Inspection system

Abstract

To reduce processes from taking-out of a molded component to inspection to improve a tact time to further enhance a yield in a site using, for example, an injection molding machine etc.SOLUTION: An inspection system comprises: a work-piece moving apparatus that holds work-pieces being at a predetermined standby position and moves the work-pieces up to a predetermined inspection position, and is integrally provided with workpiece holding mechanisms for holding the work-pieces, and light irradiation devices for irradiating the work-pieces held by the work-piece holding mechanisms with light; and an imaging device that photographs at the inspection position the work-pieces held by the workpiece moving apparatus and irradiated with the inspection light.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an inspection system that irradiates a workpiece with light for inspection.

Background Art

[0002] Conventionally, at a site using an injection molding machine, a worker bags a large number of injection-molded parts, moves them to a predetermined inspection location, opens the bags, and inserts these large numbers of parts into a parts feeder to inspect each part. The parts inserted into the parts feeder are supplied to a conveyor or the like, and inspection light is irradiated from a light irradiation device onto the parts flowing on the conveyor. In this state, the parts are imaged by a camera and image processing is performed to individually inspect each part (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As described above, at a site using a conventional injection molding machine, a series of processes from taking out the injection-molded product to setting it in the inspection device (parts feeder) are performed by workers, so the work efficiency is poor, which is one of the reasons for lengthening the tact time. Also, in the conventional method, after molding several thousand injection-molded products or so, these are collectively moved to the inspection device for inspection. Therefore, if a defect is found at this stage, the several thousand injection-molded products that have already been molded will be wasted, which is one of the reasons why the yield cannot be improved.

[0005] The present invention has been made in view of such problems, and mainly aims to shorten the process from the removal to the inspection of molded parts, improve the tact time, and further improve the yield, for example, at a site where an injection molding machine is used.

Means for Solving the Problems

[0006] That is, the inspection system of the present invention holds a workpiece at a predetermined position and moves it to a predetermined inspection position, and integrally includes a workpiece holding mechanism for holding the workpiece and a light irradiation device for irradiating light onto the workpiece held by the workpiece holding mechanism. And an imaging device for photographing the workpiece held by the workpiece moving device and irradiated with inspection light at the inspection position.

Effects of the Invention

[0007] According to the present invention configured as described above, for example, at a site where an injection molding machine is used, the process from the removal to the inspection of molded parts can be shortened, the tact time can be improved, and the yield can be further improved.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an inspection system S according to an embodiment of the present invention will be described with reference to the drawings.

[0010] The inspection system S of this embodiment is used to take out and inspect a flat part (also referred to as a workpiece W) that has been injection-molded at the site where an injection molding machine is used. More specifically, it inspects the workpiece W by irradiating the taken-out workpiece W with inspection light and imaging it, and then processing the captured image. Specifically, as shown in FIG. 1, this inspection system S includes a workpiece transfer device 300 that transfers the workpiece W molded by an injection molding machine and stored at a predetermined position (hereinafter also referred to as a standby position) to a predetermined inspection position, an imaging device 400 that images the workpiece W transferred to the inspection position, and a control device C that controls each device.

[0011] The workpiece transfer device 300 includes a light irradiation device 100 that irradiates the workpiece W with inspection light, and a transfer mechanism 200 that supports the light irradiation device 100 so that its position and posture can be changed.

[0012] The transfer mechanism 200 of this embodiment is a robot arm, and it supports the light irradiation device 100 at the tip of its arm portion 210 and sets their postures and positions. The robot arm 200 of this embodiment is a so-called vertical articulated robot, and is configured such that the posture and position of the light irradiation device 100 can be set with, for example, six degrees of freedom. Note that the robot arm 200 of this embodiment is an industrial robot, but it is not limited to this and may be a collaborative robot.

[0013] The light irradiation device 100 is attached to the tip of the robot arm 200. This light irradiation device 100 includes an LED 21 as a light source, and is a surface light-emitting device that irradiates inspection light from a planar light-emitting surface 3s. In the inspection system S of this embodiment, a plurality (here, 16) of light irradiation devices 100 are attached to the tip of the robot arm 200. These plurality of light irradiation devices 100 are provided so as to be arranged vertically and horizontally (here, arranged in 4 rows and 4 columns) such that their light-emitting surfaces 3s are located on the same plane.

[0014] Thus, in the inspection system S of the present embodiment, the work transfer device 300 integrally includes a work holding mechanism 7 that captures and holds the work W, and is configured to hold the work W at the standby position by the work holding mechanism 7 and move it to the inspection position. The work transfer device 300 is configured to irradiate the work W held by the work holding mechanism 7 with light by the light irradiation device 100.

[0015] In the present embodiment, each of the plurality of light irradiation devices 100 is made to function as the work holding mechanism 7. Hereinafter, the configuration of the light irradiation device 100 will be described in detail.

[0016] Specifically, as shown in FIGS. 2 and 3, this light irradiation device 100 includes an LED substrate 2, a rectangular parallelepiped casing 1 that houses the LED substrate 2 therein, and a light emitting plate 3 having a rectangular shape in plan view that is disposed so as to close an opening formed in one wall of the casing 1.

[0017] The casing 1 includes a bottom plate member 11 that forms a bottom wall 11a, and a casing body 12 that is provided on one surface side of the bottom plate member 11 and forms an upper wall 12a and a side wall 12b in which an opening is formed. A space for housing the LED substrate 2 is formed by the bottom wall 11a, the upper wall 12a, and the side wall 12b.

[0018] The LED substrate 2 has a rectangular shape in plan view on which a plurality of LEDs 21 are mounted in a matrix. The LED substrate 2 is housed in the casing 1 such that the LED mounting surface 2a on which the plurality of LEDs 21 are mounted faces the opening of the upper wall 12a and the back surface faces the bottom wall 11a. The LED substrate 2 is provided parallel to the bottom wall 11a.

[0019] A rectangular plate-shaped heat dissipation member 5 is provided between the LED substrate 2 and the bottom plate member 11. This heat dissipation member 5 transfers the heat generated from the LED substrate 2 to the bottom plate member 11. The heat dissipation member 5 is provided in parallel with the bottom wall 11a, one surface thereof is in contact with the back surface of the LED substrate 2, and the other surface is in contact with the inner wall surface of the bottom plate member 11. In a plan view, the heat dissipation member 5 has a larger area than the LED substrate 2, and the LED substrate 2 is arranged so that its entirety is accommodated within one surface of the heat dissipation member 5.

[0020] The light-emitting plate 3 is a light diffusing plate having translucency and is provided so as to airtightly close the opening formed in the upper wall 12a. In the light-emitting plate 3, the inward-facing surface 3b, which is the surface facing the inside of the casing 1, faces the LED mounting surface 2a of the LED substrate 2, and the outward-facing surface 3a, which is the opposite surface, functions as the above-described light-emitting surface 3s. The light-emitting plate 3 is spaced apart from the LED substrate 2 and is provided in parallel with the bottom wall 11a.

[0021] As shown in FIG. 2, the light-emitting plate 3 of the present embodiment is formed such that the outer peripheral region on the outward-facing surface 3a is located closer to the bottom wall 11a side than the central region inside thereof. In other words, the light-emitting plate 3 is formed such that the lower region on its side peripheral surface protrudes outward more than the upper region above it.

[0022] The light-emitting plate 3 is provided such that the upper region of its side peripheral surface faces the inner peripheral wall surface forming the opening of the upper wall 12a of the casing 1, and the lower region of the side peripheral surface faces the inner wall surface of the casing 1.

[0023] Also, on the inner wall surface of the upper wall 12a of the casing body 12, a facing surface that faces the outer peripheral region of the outer facing surface 3a of the light emitting plate 3 is formed, and the facing surface and the outer facing surface 3a of the light emitting plate 3 are in contact via a sealing member S1. The central region of the outer facing surface 3a of the light emitting plate 3 is exposed from the upper wall 12a of the casing 1 and functions as a light emitting surface 3s. In the present embodiment, the central region of the outer facing surface 3a of the light emitting plate 3, which is the light emitting surface 3s, is formed so as to protrude further outside (in front of the light emission direction) than the outer wall surface of the upper wall 12a of the casing body 12. By doing so, as shown in FIG. 4, when the work W is adsorbed and held by the light emitting surface 3s provided in each light irradiation device 100, the plastic accumulation W1 existing between adjacent works W can be floated with respect to the upper wall 12a of the casing 1, and interference with the upper wall 12a of the casing 1 can be avoided.

[0024] The light irradiation device 100 includes a sealing member S2 that seals the gap between the side peripheral surface of the light emitting plate 3 and the wall surface of the casing body 12 facing the side peripheral surface. In the present embodiment, the sealing member S2 is constituted by a sealing agent such as paint that covers the side peripheral surface of the light emitting plate 3.

[0025] The light irradiation device 100 further includes a spacer member 4 interposed between the inner facing surface 3b of the light emitting plate 3 and the LED mounting surface 2a of the LED substrate 2. The spacer member 4 keeps the inner facing surface 3b of the light emitting plate 3 and the LED mounting surface 2a of the LED substrate 2 separated by a certain distance and forms a space therebetween. The spacer member 4 has a flat rectangular tube shape, and its axial direction is provided so as to be orthogonal to the inner facing surface 3b of the light emitting plate 3 and the LED mounting surface 2a of the LED substrate 2.

[0026] The spacer member 4 has an angular annular first surface 41 that contacts the outer peripheral region of the inward-facing surface 3b of the light-emitting plate 3 at one end in the axial direction, and an angular annular second surface 42 that contacts the outer peripheral region of the LED mounting surface 2a of the LED substrate 2 at the other end in the axial direction. The spacer member 4 also further has an annular third surface 43 that contacts the outer peripheral region of the heat dissipation member 5 on the upper surface that does not overlap with the LED substrate 2. This third surface 43 is formed closer to the bottom wall 11a side than the second surface 42 in the axial direction, and is formed on the outer peripheral side of the second surface 42 when viewed from the axial direction. In this way, an internal space 1s surrounded by the inward-facing surface 3b of the light-emitting plate 3, the LED mounting surface 2a of the LED substrate 2, and the inner peripheral wall surface of the spacer member 4 is formed.

[0027] The spacer member 4 is also housed in the casing 1 such that its outer wall surface is in surface contact with the inner wall surface of the casing 1. Here, the spacer member 4 is housed in the casing 1 such that its outer wall surface straddles the joint 1J between the casing body 12 and the bottom plate member 11 provided on the side wall 12b of the casing 1.

[0028] In the light irradiation device 100 of the present embodiment, the upper wall 12a of the casing body 12 and the bottom wall 11a of the bottom plate member 11 sandwich the light-emitting plate 3, the spacer member 4, the LED substrate 2, and the heat dissipation member 5, whereby these respective members are fixed within the casing 1. Specifically, by the upper wall 12a of the casing body 12 pressing the outward-facing surface 3a of the light-emitting plate 3, the LED substrate 2 and the heat dissipation member 5 are pressed toward the bottom wall 11a by the spacer member 4 that is in contact with the inward-facing surface 3b of the light-emitting plate 3.

[0029] And the work holding mechanism 7 of the present embodiment adsorbs and holds the work W on the light-emitting surface 3s of the light irradiation device 100. The work holding mechanism 7 is configured to include a vent hole formed in the light-emitting plate 3 and an intake mechanism that intakes air within the casing 1 (internal space 1s).

[0030] The light-emitting plate 3 of the present embodiment is composed of a porous member having a large number of pores (fine pores) formed on the surface and inside, such as porous ceramics or plastic sintered porous bodies. A large number of ventilation holes that communicate the inside (internal space 1s) of the casing 1 with the outside are formed by the large number of pores formed on the surface and inside of the light-emitting plate 3.

[0031] The intake mechanism is composed of an intake port 71 formed on the inner wall surface of the spacer member 4, an air joint 72 attached to the side wall of the casing main body 12 so as to communicate with the intake port 71, and a suction pump 73 connected to the air joint 72 via an air pipe.

[0032] The work holding mechanism 7 configured as described above sucks air inside the casing 1 by the intake mechanism to create a negative pressure, so that outside air is sucked into the casing 1 through the ventilation holes. Thereby, the work W can be adsorbed on the light-emitting surface 3s. In the present embodiment, ventilation holes (fine pores) are formed over the entire surface of the light-emitting surface 3s, and the entire light-emitting surface 3s functions as a suction surface. Thus, the light irradiation device 100 of the present invention functions as a backlight illumination that adsorbs the plate-shaped work W on the light-emitting surface 3s and irradiates inspection light from the light-emitting surface 3s in this state.

[0033] Further, the light irradiation device 100 of the present embodiment further includes a covering member 6 that covers and closes the ventilation holes formed in the outer peripheral region within the light-emitting surface 3s in order to strengthen the adsorption force of the work W on the light-emitting surface 3s by the work holding mechanism 7. This covering member 6 has an angular ring shape in plan view, covers and hides the outer peripheral region on the light-emitting surface 3s, and exposes the inner region thereof. Specifically, this covering member 6 is composed of a transparent film made of, for example, resin.

[0034] The imaging device 400 is fixedly arranged near the inspection position and captures the light-emitting surfaces 3s of a plurality of light irradiation devices 100 attached to the tip of the robot arm 200 all at once. Note that the imaging device 400 may be attached to a robot arm 200 or the like that supports it so that the position and posture can be changed.

[0035] The control device C is a so-called computer equipped with a CPU, a memory, I / O ports, etc. According to the program stored in the memory, the CPU and peripheral devices cooperate, and as shown in FIG. 5, at least, it functions as a movement mechanism control unit C1 that controls the operation of the movement mechanism 200, a light emission control unit C2 that controls the light emission mode of the light irradiation device 100, an imaging control unit C3 that controls the imaging device 400, and a holding mechanism control unit C4 that controls the operation of the work holding mechanism 7.

[0036] The movement mechanism control unit C1 outputs a control signal to the robot arm which is the movement mechanism 200, and moves the light emission surface 3s which is the adsorption surface provided at the tip thereof between the standby position where the work W formed by the injection molding machine waits and the inspection position where imaging by the imaging device 400 is performed. Further, the movement mechanism control unit C1 of the present embodiment moves the light emission surface 3s of the light irradiation device 100 between the inspection position and the inspected work W standby position where the inspected work W is placed.

[0037] At the standby position, a plurality of workpieces W (molded products) are arranged side by side vertically and horizontally at the same interval as the plurality of light emission surfaces 3s. The movement mechanism control unit C1 controls the movement mechanism 200 so that the plurality of light emission surfaces 3s of the light irradiation device 100 come into contact with the surfaces of the plurality of workpieces W at the standby position all at once.

[0038] On the other hand, at the inspection position, the movement mechanism control unit C1 controls the movement mechanism 200 so that the plurality of light emission surfaces 3s of the light irradiation device 100 face directly the light receiving part (sensor) of the imaging device 400.

[0039] The light emission control unit C2 supplies power to the LED substrate 2 to cause the LED 21 to emit light at least in a state where the light emission surface 3s of the light irradiation device 100 faces the light receiving part of the imaging device 400 at the inspection position.

[0040] The imaging control unit C3 has its imaging timing synchronized with the light emission timing by the light emission control unit C2. It starts the exposure of the imaging device 400 in accordance with the timing when the light emission control unit C2 causes the LED 21 to emit light, and captures the transmitted light that has passed through the workpiece W.

[0041] The holding mechanism control unit C4 controls the suction pump to intake the inside of the casing 1 in a state where the plurality of light emission surfaces 3s of the light irradiation device 100 are in contact with the surfaces of the plurality of workpieces W at the standby positions. As a result, the ventilation holes formed in the light emitting plate 3 become negative pressure, and the plurality of workpieces W are adsorbed to the light emission surfaces 3s. Then, the holding mechanism control unit C4 controls the suction pump so as to maintain the negative pressure state inside the casing 1 until the workpiece W is moved from the standby position to the inspection position by the moving mechanism 200 and at least imaged by the imaging device 400. And, after the workpiece W is imaged by the imaging device 400, when the light emission surface 3s is moved to the inspected workpiece W standby position by the moving mechanism 200, the holding mechanism control unit C4 controls the suction pump to make the inside of the casing 1 at normal pressure and release the workpiece W from the light emission surface 3s.

[0042] According to the inspection system S of the present embodiment configured as described above, the workpiece transfer device 300 integrally includes a workpiece holding mechanism 7 that holds the workpiece W and a light irradiation device 100 that irradiates light on the held workpiece W. Since it is configured to hold the workpiece W placed at a predetermined standby position and be able to move to the inspection position where imaging by the imaging device 400 is performed, for example, a series of steps from the takeout of the workpiece W formed by an injection molding machine, the movement to the inspection position, and the execution of image inspection using the imaging device 400 can be automatically performed without manual intervention. For example, the steps from the takeout to the inspection of parts formed by an injection molding machine can be shortened, and the tact time can be improved.

[0043] Note that the present invention is not limited to the above-described embodiment. For example, in the above embodiment, the work holding mechanism 7 adsorbs and holds the work W on the light emitting surface 3s, but it is not limited to this. The work holding mechanism 7 of other embodiments may include, for example, a gripping mechanism that grips and holds the work W, and the work W may be held by the gripping mechanism.

[0044] Further, in the inspection system S of the above embodiment, the light irradiation device 100 is configured as a backlight device, and the transmitted light of the light irradiated on the work W is imaged by the imaging device 400, but it is not limited to this. In other embodiments, the light irradiation device 100 may irradiate light on the work W from the side of the imaging device 400, and the reflected light may be imaged by the imaging device 400.

[0045] Further, in the inspection system S of the above embodiment, the light emitting surface 3s of the light irradiation device is flat, but it is not limited to this. In other embodiments, the light emitting surface 3s may conform to the surface shape of the work W, for example, may be formed with irregularities, or may be curved.

[0046] Further, the moving mechanism 200 of the above embodiment is constituted by a robot arm, but it is not limited to this. As long as the light irradiation device 100 and the work holding mechanism 7 are integrally provided and can be moved, for example, an orthogonal robot that moves in a two-dimensional plane may be used.

[0047] In the above embodiment, the sealing member S2 that seals the gap between the side peripheral surface of the light emitting plate 3 and the wall surface of the casing main body 12 facing it is constituted by a sealing agent that covers the side peripheral surface of the light emitting plate 3, but it is not limited to this. In other embodiments, the sealing member S2 may be, for example, a film or the like that is attached so as to straddle the light emitting surface 3s of the light emitting plate 3 and the outer wall surface of the upper wall 12a of the casing main body 12 so as to cover the gap between the side peripheral surface of the light emitting plate 3 and the wall surface of the casing main body 12 facing it.

[0048] Needless to say, the present invention is not limited to the above embodiments, and various modifications are possible without departing from the spirit thereof. For example, the disclosure of this specification may include the following aspects.

[0049] (Aspect 1) It is for holding a workpiece at a predetermined position and moving it to a predetermined inspection position, and includes an integrated workpiece transfer device having a workpiece holding mechanism for holding the workpiece and a light irradiation device for irradiating light onto the workpiece held by the workpiece holding mechanism, and an imaging device for photographing the workpiece held by the workpiece transfer device and irradiated with inspection light at the inspection position.

[0050] In such an aspect, the workpiece transfer device integrally includes a workpiece holding mechanism for holding the workpiece and a light irradiation device for irradiating light onto the held workpiece, and is configured to hold the workpiece placed at the predetermined position and move it to the inspection position where imaging by the imaging device is performed. Therefore, for example, a series of processes from taking out the workpiece molded by an injection molding machine, moving it to the inspection position, and performing image inspection using the imaging device can be automatically performed without manual intervention. For example, the process from taking out to inspecting the parts molded by an injection molding machine can be shortened, and the tact time can be improved. Moreover, with such a configuration, for example, the workpiece after molding can be immediately inspected, so it is possible to prevent the situation where thousands of workpieces become wasted as in the conventional case, and the yield can be improved.

[0051] (Aspect 2) The inspection system according to Aspect 1, wherein the workpiece holding mechanism adsorbs and holds the workpiece on the light emitting surface of the light irradiation device. In such an aspect, since the light emitting surface provided in the light irradiation device is also used as an adsorption surface for holding the workpiece, for example, there is no need to provide another physical configuration such as a gripping hand for gripping and holding the workpiece, and the number of components can be reduced. Also, the light irradiation device can be used as a backlight, and by photographing the transmitted light that has passed through the workpiece with the imaging device, it is possible to inspect the presence or absence of scratches or defects inside the workpiece.

[0052] (Aspect 3) The inspection system according to aspect 2, wherein the light irradiation device includes an LED substrate, a casing that houses the LED substrate therein, and a light emitting plate that closes an opening formed in one wall of the casing facing the LED substrate to form the light emitting surface, and the work holding mechanism includes a vent hole formed in the light emitting plate to communicate the inside and outside of the casing, and an intake mechanism that intakes air into the casing, and the work is adsorbed to the light emitting surface by intaking air into the casing by the intake mechanism to create a negative pressure. In such an aspect, the light emitting surface included in the light irradiation device can also function as the adsorption surface of the work holding mechanism.

[0053] (Aspect 4) The inspection system according to aspect 3, wherein in the light irradiation device, the light emitting surface protrudes forward in the light emission direction with respect to the outer surface of the wall in which the opening is formed. For example, when the work is an injection molded product, there may be a plastic accumulation part (protrusion) such as a cold slug well remaining between adjacent works in the standby position. Therefore, in each light irradiation device, if the light emitting surface protrudes with respect to the outer wall of the casing, when each molded product is adsorbed by each light emitting surface, the plastic accumulation part existing between adjacent molded products can be floated with respect to the outer wall of the casing, and interference with the outer wall of the casing can be avoided. Such an effect becomes particularly remarkable when, in the work transfer device, a plurality of the light irradiation devices are provided such that their light emitting surfaces are aligned.

[0054] (Aspect 5) The inspection system according to any one of aspects 3 to 4, wherein the light emitting plate is made of a porous member. In such an aspect, the light emitting surface of the light emitting plate can function as a light diffusion surface that irradiates light substantially uniformly, and can also function as an adsorption surface.

[0055] (Aspect 6) The inspection system according to any one of Aspects 4 to 5, further comprising a sealing member that seals a gap between a side surface of the light-emitting plate and a wall surface of the casing facing the side surface. In this way, it is possible to reduce the intrusion of air into the casing from between the side surface of the light-emitting plate and the wall surface of the casing facing it, and it is possible to increase the adsorption force of the light-emitting surface that functions as an adsorption surface. Such an aspect is particularly effective in the case where the light-emitting plate is made of a porous member and has many air inlets.

[0056] (Aspect 7) The inspection system according to any one of Aspects 3 to 6, further comprising an annular covering member that covers and closes the ventilation holes formed in the outer peripheral region within the light-emitting surface. When the workpiece fits snugly within the light-emitting surface in a plan view, air enters the casing from the ventilation holes in the outer peripheral region of the light-emitting surface not covered by the workpiece, so the differential pressure between the inside and outside of the casing becomes small, and the adsorption force on the adsorption surface decreases. If the ventilation holes formed in the outer peripheral region within the light-emitting surface are covered and closed by an annular covering member, it is possible to prevent the intrusion of air from the outer peripheral region and increase the adsorption force in the region that adsorbs the workpiece formed within the light-emitting surface.

[0057] (Aspect 8) The inspection system according to Aspect 7, wherein the covering member is made of a transparent film. In this way, since the covering member has light-transmitting properties, it is possible to apply light to the side surface of the adsorbed workpiece while increasing the adsorption force, and it is possible to fully exhibit the function as a backlight.

[0058] (Aspect 9) The casing includes a bottom plate member forming a bottom wall, and a casing body provided on one surface side of the bottom plate member and forming an upper wall and side walls in which the opening is formed. The light irradiation device further includes a spacer member interposed between the inward-facing surface of the light emitting plate and the LED mounting surface of the LED substrate facing the inward-facing surface. The inspection system according to any one of Aspects 3 to 8, wherein the light emitting plate, the spacer member, and the LED substrate are sandwiched and fixed by the upper wall of the casing body and the bottom wall of the bottom plate member. In this way, since the spacer member can hold and fix the LED substrate, it becomes possible to fix the LED substrate without the need for screwing (for example, the screws between the LEDs can be eliminated). As a result, the mounting density of the LEDs can be increased, and light with a sufficient light amount can be irradiated from the light emitting surface. This aspect is particularly effective when the light emitting plate is made of a porous member having a low light transmittance.

[0059] (Aspect 10) The inspection system according to Aspect 9, wherein the spacer member has a cylindrical shape including an annular first surface that contacts an outer peripheral region of the inward-facing surface of the light emitting plate and an annular second surface that contacts an outer peripheral region of the LED mounting surface. In this way, since the spacer member presses the entire outer peripheral region of the LED substrate, the LED substrate can be firmly fixed. Moreover, by forming the spacer member in a cylindrical shape, a closed space surrounded by the inward-facing surface of the light emitting plate, the LED substrate, the LED mounting substrate, and the inner wall surface of the spacer member can be formed inside the casing. Thus, the space communicating with the ventilation holes of the light emitting plate can be surrounded by a double wall formed by the spacer member and the casing, so that the intrusion of external air can be further reduced, and the adsorption force on the light emitting surface can be further enhanced.

[0060] (Aspect 11) The inspection system according to Aspect 10, wherein a plate-shaped heat radiating member is provided between the LED substrate and the bottom plate member, and the spacer member further includes an annular third surface that contacts an outer peripheral region of the upper surface of the heat radiating member and does not overlap with the LED substrate. In such a manner, both the LED substrate and the heat dissipation member can be pressed and fixed by one spacer member.

Explanation of Reference Numerals

[0061] S ··· Inspection system 300 ··· Work transfer device 200 ··· Transfer mechanism (robot arm) 100 ··· Light irradiation device 1 ··· Casing 2 ··· LED substrate 3 ··· Light emitting plate 4 ··· Spacer member 7 ··· Work holding mechanism C ·· Control device W ··· Work

Claims

1. A work moving device that holds a work at a predetermined position and moves it to a predetermined inspection position, integrally including a work holding mechanism that holds the work and a light irradiation device that irradiates light onto the work held by the work holding mechanism, An inspection system comprising, at the inspection position, an imaging device that captures an image of the work held by the work moving device and irradiated with inspection light.

2. The inspection system according to claim 1, wherein the work holding mechanism adsorbs and holds the work on a light emitting surface of the light irradiation device.

3. The light irradiation device includes an LED substrate, a casing that houses the LED substrate therein, and a light emitting plate that closes an opening formed in one wall of the casing facing the LED substrate to form the light emitting surface, The work holding mechanism, A ventilation hole formed in the light emitting plate and communicating the inside and outside of the casing, An intake mechanism that intakes air into the casing, The inspection system according to claim 2, wherein the work is adsorbed on the light emitting surface by intaking air into the casing by the intake mechanism to create a negative pressure.

4. The inspection system according to claim 3, wherein, in the light irradiation device, the light emitting surface protrudes forward in the light emission direction with respect to an outer surface of the wall in which the opening is formed.

5. The inspection system according to claim 3, wherein the light emitting plate is made of a porous member.

6. The inspection system according to claim 5, further comprising a sealing member that seals a gap between a side surface of the light emitting plate and a wall surface of the casing facing the side surface.

7. The inspection system according to claim 5, further comprising an annular covering member that covers and closes the ventilation hole formed in an outer peripheral region within the light emitting surface.

8. The inspection system according to claim 7, wherein the covering member is made of a transparent film.

9. The casing includes a bottom plate member that forms a bottom wall, and a casing body provided on one surface side of the bottom plate member and forming an upper wall and side walls in which the opening is formed, The light irradiation device further includes a spacer member interposed between an inward surface of the light emitting plate and an LED mounting surface of the LED substrate facing the inward surface, The inspection system according to claim 3, wherein the light emitting plate, the spacer member, and the LED substrate are sandwiched and fixed by the upper wall of the casing body and the bottom wall of the bottom plate member.

10. The inspection system according to claim 9, wherein the spacer member has a cylindrical shape including an annular first surface that contacts an outer peripheral region on the inner-facing surface of the light-emitting plate and an annular second surface that contacts an outer peripheral region on the LED mounting surface.

11. A plate-shaped heat dissipation member is provided between the LED substrate and the bottom plate member, The inspection system according to claim 10, wherein the spacer member further includes an annular third surface that contacts an outer peripheral region on the upper surface of the heat dissipation member that does not overlap with the LED substrate.

Images