Mirror unit

Abstract

To provide a mirror unit capable of suppressing damage to a window member while reducing noise light and improving reliability.SOLUTION: A mirror unit comprises: a base having a first surface and a second surface; an optical scanning device having a movable portion and a mirror surface, and arranged on a first surface side of the base; a frame member arranged on the first surface side of the base so as to surround the optical scanning device; a window member arranged on the frame member so as to cover an opening of the frame member; and a wiring portion electrically connected to the optical scanning device. The wiring portion has a penetrating portion extending inside the base so as to penetrate between the first surface and the second surface of the base. The base has a protruding portion located outside the frame member when viewed from a first direction. The length of the penetrating portion in the first direction is smaller than the length of the protruding portion from the frame member to the outer edge of the base when viewed in the first direction.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a mirror unit.

Background Art

[0002] As a mirror unit, there is known one including an optical scanning device having a mirror surface provided on a movable part, a frame member arranged so as to surround the optical scanning device, and a flat window member closing an opening of the frame member (see, for example, Patent Document 1). Light enters the mirror surface from the outside through the window member, is reflected by the mirror surface, and exits to the outside through the window member.

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the mirror unit described in Patent Document 1, one of a pair of opposing wall portions constituting the frame member is formed higher than the other, and the window member arranged on the frame member is inclined with respect to the mirror surface. When the window member is inclined with respect to the mirror surface, the direction in which the light reflected by the window member travels can be made different from the direction in which the light reflected by the mirror surface travels, and it is possible to suppress the light reflected by the window member from becoming noise light.

[0005] On one hand, in a configuration where a movable part provided with a mirror surface, like the above-described mirror unit, is swung to scan light, depending on the angle of the mirror surface, the incident angle of light on the window member increases, and the refraction angle of the light emitted from the window member increases. In particular, in the configuration where the window member is inclined as described above, the incident angle of light on the window member further increases. Therefore, in order to achieve highly accurate light scanning, it is necessary to consider the influence of refraction in the window member. Thus, it is conceivable to suppress the influence of refraction in the window member by forming the window member thin to reduce the amount of refraction in the window member. However, when the window member is formed thin, the strength of the window member decreases, and the window member is likely to be damaged. Therefore, it is required to suppress the damage of the window member. Further, for the mirror unit as described above, improvement in reliability is also required.

[0006] An object of the present invention is to provide a mirror unit capable of suppressing damage to a window member while reducing noise light and improving reliability.

Means for Solving the Problems

[0007] The mirror unit of the present invention has a base, a movable part, and a mirror surface provided on the movable part, an optical scanning device disposed on the base, a frame member disposed on the base so as to surround the optical scanning device when viewed from a first direction, a flat window member disposed on the frame member so as to cover an opening of the frame member, and a wiring part electrically connected to the optical scanning device. The frame member has a first wall part and a second wall part facing each other in a second direction perpendicular to the first direction, and a third wall part and a fourth wall part facing each other in a third direction perpendicular to both the first direction and the second direction. The height of the first wall part is higher than the height of the second wall part. The window member is disposed on the top surface of the first wall part and the top surface of the second wall part and is inclined with respect to the mirror surface. When any one of the first wall part, the second wall part, the third wall part, and the fourth wall part is defined as a first reference wall part, in a cross section passing through the mirror surface and perpendicular to the first reference wall part, a first straight line passing through a first end on the first reference wall part side of the mirror surface and a first corner formed on the first reference wall part side by an outer surface on the side opposite to the frame member and a first side surface of the window member intersects the first reference wall part. The wiring part has a portion extending inside the base and is drawn out to the outside of the frame member.

[0008] In this mirror unit, the height of the first wall portion is higher than the height of the second wall portion, and the window member is disposed on the top surface of the first wall portion and the top surface of the second wall portion and is inclined with respect to the mirror surface. Thereby, the direction in which the light reflected by the window member travels can be made different from the direction in which the light reflected by the mirror surface travels, and it is possible to suppress the light reflected by the window member from becoming noise light. Further, when any one of the first wall portion, the second wall portion, the third wall portion, and the fourth wall portion is defined as the first reference wall portion, in a cross section perpendicular to the first reference wall portion passing through the mirror surface, a first straight line passing through a first end on the first reference wall portion side of the mirror surface and a first corner portion formed on the first reference wall portion side by the outer surface and the first side surface of the window member intersects the first reference wall portion. By configuring the first straight line to intersect the first wall portion, the first reference wall portion is formed relatively thick with respect to the window member. Thereby, the window member can be supported by the thickly formed first reference wall portion, and breakage of the window member can be suppressed. On the other hand, when the first reference wall portion is formed thick, from the viewpoint of miniaturization, it is conceivable to increase the thickness of the first reference wall portion toward the optical scanning device side. In that case, however, the area of the portion located inside the frame member on the base becomes narrow. If a wiring portion for electrical connection with the optical scanning device is to be formed in such a narrow portion, there is a risk that problems such as a short circuit may occur in the wiring portion. In contrast, in this mirror unit, the wiring portion has a portion extending inside the base and is drawn out to the outside of the frame member. By forming the wiring portion inside the base in this way, it is possible to suppress problems such as a short circuit from occurring in the wiring portion. Further, for example, compared with the case where the wiring portion is formed so as to extend along the surface of the base between the base and the frame member, deterioration of the wiring portion can be suppressed, and the influence of the wiring portion on the joint portion between the base and the frame member can be suppressed. Therefore, according to this mirror unit, it is possible to suppress breakage of the window member while reducing noise light, and to improve reliability.

[0009] The window member is joined to the frame member, and the thickness of the window member may be smaller than the width at which the window member and the frame member are joined. In this case, the window member can be formed thin, and the influence of refraction in the window member can be suppressed.

[0010] Of the first wall portion, the second wall portion, the third wall portion, and the fourth wall portion, if the one facing the first reference wall portion is defined as the second reference wall portion, in the above cross-section, a second straight line passing through the second end on the second reference wall portion side of the mirror surface and the second corner portion formed on the second reference wall portion side by the outer surface and the second side surface of the window member may intersect the second reference wall portion. In this case, since the second reference wall portion is formed relatively thick with respect to the window member, the window member can be supported by the thickly formed second reference wall portion, and breakage of the window member can be more reliably suppressed.

[0011] The wiring portion may extend inside the base so as to overlap the first reference wall portion when viewed from the first direction. If an attempt is made to draw out the wiring portion to the thickly formed first reference wall portion side, deterioration of the wiring portion as described above is likely to occur. However, in this mirror unit, since the wiring portion is formed inside the base, deterioration of the wiring portion and the like can be reliably suppressed.

[0012] The wiring portion has an electrode pad provided on the base in a region located inside the frame member when viewed from the first direction. Of the first wall portion, the second wall portion, the third wall portion, and the fourth wall portion, if the one facing the first reference wall portion is defined as the second reference wall portion, the distance between the optical scanning device and the first reference wall portion is longer than the distance between the optical scanning device and the second reference wall portion, and the electrode pad may be disposed between the optical scanning device and the first reference wall portion on the base. In this case, a space for disposing the electrode pad can be secured.

[0013] The first reference wall portion may be the first wall portion, and the second reference wall portion may be the second wall portion. In this case, since the first wall portion is farther from the optical scanning device than the second wall portion, it is possible to suppress the light from the mirror surface from being blocked by the first wall portion having a higher height than the second wall portion.

[0014] When viewed from the first direction, the wiring portion is electrically connected to the optical scanning device in a first region located inside the frame member, extends inside the base in a second region overlapping the frame member when viewed from the first direction, and may be drawn out to a third region located outside the frame member when viewed from the first direction. In this case, deterioration and the like of the wiring portion described above can be more reliably suppressed.

Advantages of the Invention

[0015] According to the present invention, it is possible to provide a mirror unit that can suppress damage to the window member while reducing noise light and improve reliability.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0017] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, the same or corresponding elements are denoted by the same reference numerals, and redundant descriptions are omitted. [Overall Configuration of Mirror Unit]

[0018] As shown in FIGS. 1 to 3, the mirror unit 100 includes an optical scanning device 1 and a package 40 that houses the optical scanning device 1. The package 40 has a base 42, a frame member 43, and a window member 44.

[0019] The base 42 is formed in a rectangular plate shape from a non-magnetic material such as aluminum nitride or aluminum oxide, for example. The base 42 has a main surface 42a and a back surface 42b on the side opposite to the main surface 42a. The main surface 42a is a surface that constitutes a part of the inner surface of the package 40. A recess 42c is formed in the main surface 42a. A recess 42d is formed in the bottom surface of the recess 42c. The optical scanning device 1 is disposed on the base 42, more specifically, on the bottom surface of the recess 42c. On the back surface 42b side of the base 42, a magnetic field generating portion (not shown) that generates a magnetic field acting on the first driving coil 11 and the second driving coil 12 of the optical scanning device 1 described later is disposed. The magnetic field generating portion includes, for example, a permanent magnet having a Halbach array.

[0020] The frame member 43 is disposed on the main surface 42a so as to surround the optical scanning device 1 when viewed from the Z-axis direction (first direction) perpendicular to the main surface 42a of the base 42. The frame member 43 is formed in a rectangular frame shape from a non-magnetic material such as aluminum nitride or aluminum oxide, for example.

[0021] The window member 44 is configured by forming antireflection films on both surfaces of a rectangular flat base material formed from a light-transmissive material such as glass, for example. The window member 44 is disposed on the frame member 43 so as to cover one opening 43a of the frame member 43, and faces the base 42 and the optical scanning device 1 in the Z-axis direction. The window member 44 is joined to the frame member 43 by a joining material 45 such as a low-melting-point glass so as to airtightly seal the opening 43a.

[0022] The base 42 is joined to the frame member 43 by a joining material 46 such as a low-melting-point glass so as to airtightly seal the other opening 43b of the frame member 43. Thereby, the inside of the package 40 is airtightly sealed. The base 42 and the frame member 43 may be integrally formed so as to constitute a single member.

[0023] The joining by the joining materials 45 and 46 may be joining by, for example, a resin adhesive, a low-temperature solder (Sn / Pb, Sn / Cu-based), a low-temperature brazing material (Au / Sn alloy, Au / Ge alloy, etc.), a high-temperature brazing material (Ag-based, etc.), projection welding, seam seal welding, laser welding, electron beam welding, etc., in addition to the joining by a low-melting-point glass. [Configuration of Optical Scanning Device]

[0024] As shown in FIG. 5, the optical scanning device 1 has a support portion 2 and a movable portion 10 that is swingable with respect to the support portion 2. The movable portion 10 has a first movable portion 3, a second movable portion 4, a pair of first connecting portions 5, a pair of second connecting portions 6, and a mirror 7. The support portion 2, the first movable portion 3, the second movable portion 4, the pair of first connecting portions 5, and the pair of second connecting portions 6 are integrally formed by, for example, an SOI (Silicon on Insulator) substrate. That is, the optical scanning device 1 is configured as a MEMS (Micro Electro Mechanical Systems) device.

[0025] The first movable portion 3 is formed, for example, in a rectangular plate shape. The second movable portion 4 is formed, for example, in a rectangular ring shape so as to surround the first movable portion 3 with a gap therebetween when viewed from the optical axis direction A. The support portion 2 is formed, for example, in a rectangular frame shape so as to surround the second movable portion 4 with a gap therebetween when viewed from the optical axis direction A. That is, the support portion 2 is formed in a frame shape so as to surround the first movable portion 3 and the second movable portion 4 when viewed from the optical axis direction A.

[0026] The first movable part 3 is connected to the second movable part 4 via a pair of first connecting parts 5 so as to be swingable around the first axis X1. That is, the first movable part 3 is supported by the support part 2 so as to be swingable around the first axis X1. The first movable part 3 includes a first part 31 and a second part 32. The first part 31 is formed, for example, in a circular shape when viewed in the optical axis direction A. The second part 32 is formed, for example, in a rectangular ring shape when viewed in the optical axis direction A. The first part 31 is surrounded by the second part 32 when viewed in the optical axis direction A and is connected to the second part 32 via a plurality (two in this example) of connecting parts 33. That is, a gap is formed between the first part 31 and the second part 32 except for the plurality of connecting parts 33.

[0027] The connecting part 33 is located, for example, at the central portions of two sides among the rectangular inner edges of the second part 32 that intersect the second axis X2. That is, in this example, the connecting part 33 is located on the second axis X2. The first part 31 only needs to be connected to the second part 32 at least in the direction along the second axis X2.

[0028] The second movable part 4 is connected to the support part 2 via a pair of second connecting parts 6 so as to be swingable around the second axis X2. That is, the second movable part 4 is supported by the support part 2 so as to be swingable around the second axis X2. The first axis X1 and the second axis X2 are perpendicular to the optical axis direction A and intersect each other (perpendicular to each other in this example). Note that the first part 31 may be formed in a rectangular shape or a polygonal shape when viewed in the optical axis direction A. The first part 31 may be formed in a circular shape (for example, an elliptical shape) when viewed in the optical axis direction A. The second part 32 may be formed in a polygonal ring shape with five or more sides or an annular shape when viewed in the optical axis direction A.

[0029] A pair of first connecting parts 5 are arranged on the first axis X1 so as to sandwich the first movable part 3 in the gap between the second part 32 of the first movable part 3 and the second movable part 4. Each first connecting part 5 functions as a torsion bar. A pair of second connecting parts 6 are arranged on the second axis X2 so as to sandwich the second movable part 4 in the gap between the second movable part 4 and the support part 2. Each second connecting part 6 functions as a torsion bar.

[0030] The mirror 7 is provided on the first part 31 of the first movable part 3. The mirror 7 is formed on the surface of the first part 31 on the side opposite to the base 42 (the window member 44 side) so as to include the intersection of the first axis X1 and the second axis X2. The mirror 7 is formed in a film shape such as a circle, an ellipse or a rectangle by a metal material such as aluminum, an aluminum-based alloy, gold or silver. The surface of the mirror 7 on the side opposite to the first movable part 3 constitutes a mirror surface 7a extending perpendicular to the optical axis direction A. The center (geometric center, centroid) of the mirror surface 7a coincides with the intersection of the first axis X1 and the second axis X2 when viewed from the optical axis direction A. In this way, since the mirror 7 is provided on the first part 31 connected to the second part 32 via a plurality of connecting parts 33, even if the first movable part 3 swings around the first axis X1 at the resonance frequency level, it is possible to suppress the occurrence of deformation such as bending in the mirror 7.

[0031] The distance from the outer edge of the mirror surface 7a to the outer edge of the first part 31 is smaller than the width of the connecting part 33. The width of the connecting part 33 is the length along the direction perpendicular to the extending direction of the connecting part 33 (the direction along the second axis X2 in this example) (the direction along the first axis X1 in this example). The first movable part 3 does not necessarily have the second part 32 and the connecting part 33. The distance from the outer edge of the mirror surface 7a to the outer edge of the first part 31 may be smaller than the width of the second connecting part 6. The width of the second connecting part 6 is the length along the direction perpendicular to the extending direction of the second connecting part 6 (the direction along the second axis X2 in this example) (the direction along the first axis X1 in this example).

[0032] Furthermore, the optical scanning device 1 includes a first driving coil 11, a second driving coil 12, wirings 15a and 15b, wirings 16a and 16b, electrode pads 21a and 21b, and electrode pads 22a and 22b. In FIG. 2, for convenience of explanation, the first driving coil 11 and the second driving coil 12 are indicated by a one-dot chain line, and the wirings 15a and 15b and the wirings 16a and 16b are indicated by solid lines.

[0033] The first driving coil 11 is provided on the second portion 32 of the first movable part 3. The first driving coil 11 is wound a plurality of times in a spiral (scroll) shape in a region outside the mirror 7 (i.e., the second portion 32) when viewed from the optical axis direction A. A magnetic field generated by a magnetic field generating portion acts on the first driving coil 11.

[0034] The first driving coil 11 is disposed in a groove formed on the surface of the first movable part 3. That is, the first driving coil 11 is embedded in the first movable part 3. One end of the first driving coil 11 is connected to the electrode pad 21a via the wiring 15a. The wiring 15a extends from the first movable part 3 to the support part 2 via one of the first connecting parts 5, the second movable part 4, and one of the second connecting parts 6. The wiring 15a and the electrode pad 21a are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper, or an aluminum-based alloy.

[0035] The other end of the first driving coil 11 is connected to the electrode pad 21b via the wiring 15b. The wiring 15b extends from the first movable part 3 to the support part 2 via the other of the first connecting parts 5, the second movable part 4, and the other of the second connecting parts 6. The wiring 15b and the electrode pad 21b are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper, or an aluminum-based alloy.

[0036] The second driving coil 12 is provided on the second movable part 4. The second driving coil 12 is wound a plurality of times in a spiral (volute) shape on the second movable part 4. A magnetic field generated by the magnetic field generating part acts on the second driving coil 12. The second driving coil 12 is disposed in a groove formed on the surface of the second movable part 4. That is, the second driving coil 12 is embedded in the second movable part 4.

[0037] One end of the second driving coil 12 is connected to the electrode pad 22a via the wiring 16a. The wiring 16a extends from the second movable part 4, via one of the second connecting parts 6, to the support part 2. The wiring 16a and the electrode pad 22a are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper, or an aluminum-based alloy, for example.

[0038] The other end of the second driving coil 12 is connected to the electrode pad 22b via the wiring 16b. The wiring 16b extends from the second movable part 4, via the other second connecting part 6, to the support part 2. The wiring 16b and the electrode pad 22b are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper, or an aluminum-based alloy, for example.

[0039] The number and arrangement of the electrode pads 21a, 21b, 22a, 22b are not limited to the example shown in FIG. 4. As in the example of FIG. 4, the electrode pad 21a may be disposed on one side of the second axis X2 with respect to the movable part 10, and the electrode pad 21b may be disposed on the other side of the second axis X2 with respect to the movable part 10, or both of the electrode pads 21a, 21b may be disposed on one side or the other side of the second axis X2 with respect to the movable part 10. In the latter case, the wirings 15a, 15b may extend on the same second connecting part 6. These points are the same for the electrode pads 22a, 22b and the wirings 16a, 16b.

[0040] Hereinafter, as examples of the operation of the movable part 10 in the optical scanning device 1, the first to fifth examples will be described. In the first example, a high-frequency drive current is applied to the first drive coil 11. At this time, since the magnetic field generated by the magnetic field generation unit acts on the first drive coil 11, a Lorentz force is generated in the first drive coil 11. As a result, the first movable part 3 is swung around the first axis X1, for example, at the resonance frequency level.

[0041] Also, a drive current of a constant magnitude is applied to the second drive coil 12. At this time, since the magnetic field generated by the magnetic field generation unit acts on the second drive coil 12, a Lorentz force is generated in the second drive coil 12. As a result, the second movable part 4 is rotated around the second axis X2 according to the magnitude of the drive current, for example, and is stopped in that state. Thus, according to the optical scanning device 1, light from a predetermined light source can be reflected by the mirror surface 7a and scanned. The light enters the mirror surface 7a through the window member 44 from the outside, is reflected by the mirror surface 7a, and exits to the outside through the window member 44. In the first example, the first movable part 3 is swung at the resonance frequency while the second movable part 4 is used statically.

[0042] In the second example, similar to the operation of the first movable part 3 in the first example, the first movable part 3 is swung according to the resonance frequency by applying a high-frequency drive current to the first drive coil 11, and the second drive coil 12 is applied with a high-frequency drive current. As a result, the second movable part 4 is swung according to the resonance frequency. Thus, in the second example, both the first movable part 3 and the second movable part 4 are swung at the resonance frequency.

[0043] In the third example, similar to the operation of the second movable part 4 in the first example, by applying a driving current of a certain magnitude to the first driving coil 11, the first movable part 3 is rotated and stopped around the first axis X1 according to the magnitude of the driving current, and by applying a driving current of a certain magnitude to the second driving coil 12, the second movable part 4 is rotated and stopped around the second axis X2 according to the magnitude of the driving current. Thus, in the third example, both the first movable part 3 and the second movable part 4 are used statically.

[0044] In the fourth and fifth examples, only the first movable part 3 is driven. In the fourth example, by applying a high-frequency driving current to the first driving coil 11, the first movable part 3 is oscillated according to the resonance frequency. In the fifth example, by applying a driving current of a certain magnitude to the first driving coil 11, the first movable part 3 is rotated and stopped around the first axis X1 according to the magnitude of the driving current. The fourth and fifth examples can be used, for example, when the second movable part 4 is not provided.

[0045] As described above, the optical scanning device 1 is disposed on the base 42. The support part 2 is fixed to the bottom surface of the concave part 42c, and the first movable part 3 and the second movable part 4 face the bottom surface of the concave part 42d. By providing the concave part 42d, the first movable part 3 and the second movable part 4 can swing without interfering with the base 42. [Configuration of Package]

[0046] As shown in FIGS. 1 to 4, the frame member 43 has a first wall portion 51, a second wall portion 52, a third wall portion 53, and a fourth wall portion 54. Each of the wall portions 51 to 54 is formed in a flat plate shape and has the same thickness. The first wall portion 51 and the second wall portion 52 extend parallel to each other and face each other in the X-axis direction (second direction) perpendicular to the Z-axis direction. The third wall portion 53 and the fourth wall portion 54 extend parallel to each other and face each other in the Y-axis direction (third direction) perpendicular to both the Z-axis direction and the X-axis direction. The third wall portion 53 is connected to one end of the first wall portion 51 and one end of the second wall portion 52, and the fourth wall portion 54 is connected to the other end of the first wall portion 51 and the other end of the second wall portion 52. The third wall portion 53 and the fourth wall portion 54 have, for example, the same shape.

[0047] The top surface 51a of the first wall portion 51 on the side opposite to the base 42 is inclined with respect to the main surface 42a of the base 42 so as to move away from the main surface 42a of the base 42 as it moves away from the second wall portion 52. The top surface 52a of the second wall portion 52 on the side opposite to the base 42 is inclined with respect to the main surface 42a of the base 42 so as to move away from the main surface 42a of the base 42 as it approaches the first wall portion 51. The height H1 of the first wall portion 51 is higher than the height H2 of the second wall portion 52. The height H1 of the first wall portion 51 is the maximum value of the distance from the main surface 42a to the top surface 51a, and the height H2 of the second wall portion 52 is the maximum value of the distance from the main surface 42a to the top surface 52a.

[0048] The top surface 53a of the third wall portion 53 on the side opposite to the base 42 is inclined with respect to the main surface 42a of the base 42 so as to move away from the main surface 42a of the base 42 as it approaches the first wall portion 51 when viewed from the Y-axis direction. The top surface 54a of the fourth wall portion 54 on the side opposite to the base 42 is inclined with respect to the main surface 42a of the base 42 so as to move away from the main surface 42a of the base 42 as it approaches the first wall portion 51 when viewed from the Y-axis direction. The height of the third wall portion 53 is equal to the height of the fourth wall portion 54.

[0049] The top surfaces 51a to 54a are flush and located on the same plane. The window member 44 is arranged on the top surfaces 51a to 54a and is inclined with respect to the main surface 42a (mirror surface 7a) so as to move away from the main surface 42a as it goes from the second wall portion 52 toward the first wall portion 51. In other words, each of the top surfaces 51a to 54a is inclined at an angle corresponding to the inclination of the window member 44.

[0050] Note that the first wall portion 51 may be composed of a plurality of parts. These plurality of parts may be provided with gaps between them and formed separately. In the embodiment, the entire top surface 51a is formed flat, but the top surface 51a may be divided into a plurality of regions by forming a notch, a recess, a protrusion, etc. on the top surface 51a. It is not always necessary for the entire top surface 51a to be inclined at an angle corresponding to the inclination of the window member 44. For example, it is sufficient if a straight line connecting two points within the top surface 51a is inclined at an angle corresponding to the inclination of the window member 44. The same applies to the second wall portion 52 to the fourth wall portion 54. The window member 44 does not have to be joined to the frame member 43 over the entire top surfaces 51a to 54a, and it is sufficient if it is joined to the frame member 43 at at least a part of the top surfaces 51a to 54a.

[0051] The window member 44 has an outer surface 44a, an inner surface 44b, a first side surface 44c, a second side surface 44d, a third side surface 44e, and a fourth side surface 44f. The outer surface 44a is the surface on the side opposite to the frame member 43, and the inner surface 44b is the surface on the frame member 43 side. The outer surface 44a and the inner surface 44b extend parallel to each other. Each of the side surfaces 44c to 44f extends perpendicular to the outer surface 44a and the inner surface 44b and is continuous with the outer surface 44a and the inner surface 44b. The window member 44 is arranged on the frame member 43 such that the inner surface 44b faces the top surfaces 51a to 54a. The first side surface 44c, the second side surface 44d, the third side surface 44e, and the fourth side surface 44f are located on the top surfaces 51a, 52a, 53a, and 54a, respectively.

[0052] The window member 44 has a first corner 61 formed on the first wall portion 51 side by the outer surface 44a and the first side surface 44c, a second corner 62 formed on the second wall portion 52 side by the outer surface 44a and the second side surface 44d, a third corner 63 formed on the third wall portion 53 side by the outer surface 44a and the third side surface 44e, and a fourth corner 64 formed on the fourth wall portion 54 side by the outer surface 44a and the fourth side surface 44f. When viewed in the Z-axis direction, the first corner 61 overlaps with the top surface 51a, and the second corner 62 overlaps with the top surface 52a. When viewed in the Z-axis direction, the third corner 63 overlaps with the top surface 53a, and the fourth corner 64 overlaps with the top surface 54a. In this example, the first side surface 44c is a flat surface, but the first side surface 44c may be a curved surface. In this case, the first corner 61 is formed at the boundary between the flat outer surface 44a and the curved first side surface 44c. Similarly, the second side surface 44d may be a curved surface. In this case, the second corner 62 is formed at the boundary between the flat outer surface 44a and the curved second side surface 44d.

[0053] The thickness T44 of the window member 44 is thinner than each of the thicknesses T51 of the first wall portion 51, the thickness T52 of the second wall portion 52, the thickness T53 of the third wall portion 53, and the thickness T54 of the fourth wall portion 54. In this example, the thicknesses T51 to T54 of the wall portions 51 to 54 are equal to each other. Also, the thickness T44 of the window member 44 is smaller than the width W of the joint region where the window member 44 and the frame member 43 are joined by the joining material 45. The width W is the width along the direction parallel to each of the top surfaces 51a to 54a and perpendicular to the extending direction of the frame member 43. In this example, the width W of the joint region is equal over the entire circumference of the frame member 43, but when the width of the joint region varies in the circumferential direction of the frame member 43, the width W is the maximum value of the width of the joint region.

[0054] While referring to FIGS. 2 and 3, the positional relationship of each member will be described. The optical scanning device 1 is arranged such that, for example, the first axis X1 is parallel to the X-axis direction and the second axis X2 is parallel to the Y-axis direction. In FIG. 2, a cross-section passing through the center of the mirror surface 7a and parallel to both the X-axis direction and the Z-axis direction is shown. The cross-section of FIG. 2 is perpendicular to the Y-axis direction and perpendicular to the first wall portion 51 and the second wall portion 52. In FIG. 3, a cross-section passing through the center of the mirror surface 7a and parallel to both the Y-axis direction and the Z-axis direction is shown. The cross-section of FIG. 3 is perpendicular to the X-axis direction and perpendicular to the third wall portion 53 and the fourth wall portion 54.

[0055] In FIGS. 2 and 3, a non-rotating state (non-driven state, initial state) in which the movable portion 10 is not rotating around the first axis X1 and the second axis X2 is shown. In the non-rotating state, the first movable portion 3 is not rotating around the first axis X1, and the second movable portion 4 is not rotating around the second axis X2. In the non-rotating state, the mirror surface 7a is parallel to the main surface 42a of the base 42.

[0056] In the cross-section of FIG. 2, a first straight line L1 passing through the first end P1, which is the end portion of the mirror surface 7a on the side of the first wall portion 51, and the vertex of the first corner portion 61 intersects the first wall portion 51. That is, the first straight line L1 passes through the first wall portion 51. Also, in the cross-section of FIG. 2, a second straight line L2 passing through the second end P2, which is the end portion of the mirror surface 7a on the side of the second wall portion 52, and the vertex of the second corner portion 62 intersects the second wall portion 52. That is, the second straight line L2 passes through the second wall portion 52.

[0057] In the cross-section of FIG. 3, a third straight line L3 passing through the third end P3, which is the end portion of the mirror surface 7a on the side of the third wall portion 53, and the vertex of the third corner portion 63 intersects the third wall portion 53. That is, the third straight line L3 passes through the third wall portion 53. Also, in the cross-section of FIG. 3, a fourth straight line L4 passing through the fourth end P4, which is the end portion of the mirror surface 7a on the side of the fourth wall portion 54, and the vertex of the fourth corner portion 64 intersects the fourth wall portion 54. That is, the fourth straight line L4 passes through the fourth wall portion 54.

[0058] In addition, when the mirror surface 7a is formed by mirror-finishing the surface of the first movable part 3, the end of the mirror surface 7a is the end of the processed area. Alternatively, when the surface of the first movable part 3 itself constitutes the mirror surface 7a without forming a reflective film, the end of the mirror surface 7a is the end of the first movable part 3. In the above embodiment, in a cross-section perpendicular to the Y-axis direction passing through the center of the mirror surface 7a, the first movable part 3 is connected to the first connecting part 5. In this case, the end of the first movable part 3 is located on the boundary between the first movable part 3 and the first connecting part 5. When the first movable part 3 has a first part 31 and a second part 32 surrounding the first part 31 as in the embodiment, and the mirror surface 7a is provided on the first part 31, the end of the mirror surface 7a is located near the end of the first part 31. [Wiring part]

[0059] As shown in FIGS. 1 and 4, the mirror unit 100 further includes a wiring part 70 electrically connected to the optical scanning device 1. The wiring part 70 has a plurality (eight in this example) of inner electrode pads 71, a plurality (nine in this example) of outer electrode pads 72, and a plurality (eight in this example) of wirings 73. Each of the inner electrode pads 71, the outer electrode pads 72, and the wirings 73 is formed of a metal material such as tungsten, aluminum, gold, silver, copper, or an aluminum-based alloy, for example.

[0060] The inner electrode pads 71 are provided in an inner region (first region) R1 that is located inside the frame member 43 when viewed from the Z-axis direction. The inner electrode pads 71 are disposed on the base 42, and more specifically, on the bottom surface of the recess 42c. The inner electrode pads 71 are disposed between the optical scanning device 1 and the third wall portion 53 on the bottom surface of the recess 42c. In the mirror unit 100, the distance C1 between the optical scanning device 1 and the third wall portion 53 along the Y-axis direction is longer than the distance C2 between the optical scanning device 1 and the fourth wall portion 54 along the Y-axis direction (FIG. 3). That is, the inner electrode pads 71 are disposed between the optical scanning device 1 and the third wall portion 53, which is farther from the optical scanning device 1 among the third wall portion 53 and the fourth wall portion 54. In the mirror unit 100, the distance between the optical scanning device 1 and the first wall portion 51 along the X-axis direction is equal to the distance between the optical scanning device 1 and the second wall portion 52 along the X-axis direction. The plurality of inner electrode pads 71 are arranged side by side, for example, along the X-axis direction. Each of the plurality of inner electrode pads 71 is electrically connected to any one of the electrode pads 21a, 21b, 22a, 22b of the optical scanning device 1 via a wire WR.

[0061] The outer electrode pads 72 are provided in an outer region (third region) R3 that is located outside the frame member 43 when viewed from the Z-axis direction. The outer electrode pads 72 are disposed on the base 42, and more specifically, on the main surface 42a. The plurality of outer electrode pads 72 are arranged at equal intervals, for example, along the X-axis direction. The plurality of outer electrode pads 72 are used, for example, for electrical connection with an external control device or the like.

[0062] As shown in FIG. 1, the plurality of wirings 73 electrically connect the inner electrode pads 71 and the outer electrode pads 72 to each other. The plurality of wirings 73 include a plurality (four in this example) of wirings 73A and a plurality (four in this example) of wirings 73B.

[0063] When viewed from the Z-axis direction, each wiring 73A extends linearly while being inclined with respect to the X-axis direction and the Y-axis direction. Each wiring 73B has a plurality (two in this example) of bent portions. Each wiring 73B has a pair of first linearly extending portions 73Ba that extend linearly while being inclined with respect to the X-axis direction and the Y-axis direction when viewed from the Z-axis direction, and a second linearly extending portion 73Bb that extends linearly along the X-axis direction when viewed from the Z-axis direction. The pair of first linearly extending portions 73Ba are located at both ends of the wiring 73B and are connected to the second linearly extending portion 73Bb. The bent portion is formed at the boundary between the pair of first linearly extending portions 73Ba and the second linearly extending portion 73Bb.

[0064] As shown in FIG. 4, each wiring 73 is disposed in a hole 42e formed in the base 42 and extends inside the base 42. Each wiring 73 is electrically connected to the inner electrode pad 71 in the inner region R1, extends inside the base 42 in an overlapping region (second region) R2 that overlaps the frame member 43 when viewed from the Z-axis direction, and is drawn out to the outer region R3. That is, each wiring 73 has a first portion 74 located in the inner region R1, a second portion 75 located in the overlapping region R2, and a third portion 76 located in the outer region R3.

[0065] The first portion 74 is connected to the inner electrode pad 71. In this example, the wiring 73 and the inner electrode pad 71 are integrally formed (as one member). In other words, the wiring 73 is provided so as to be exposed in the inner region R1, and the exposed portion constitutes the inner electrode pad 71. The second portion 75 is connected to the first portion 74 and extends linearly under the third wall portion 53. In other words, the wiring 73 extends inside the base 42 so as to overlap the third wall portion 53 when viewed from the Z-axis direction in the overlapping region R2. The third portion 76 is connected to the second portion 75, is drawn out from the overlapping region R2 to the outer region R3, and is connected to the back surface of the outer electrode pad 72. Although the wiring 73A among the wirings 73 is illustrated in FIG. 4, similarly to the wiring 73A, the wiring 73B also extends inside the base 42. [Operation and Effect]

[0066] In the mirror unit 100, the height H1 of the first wall portion 51 is higher than the height H2 of the second wall portion 52, and the window member 44 is disposed on the top surface 51a of the first wall portion 51 and the top surface 52a of the second wall portion 52 and is inclined with respect to the mirror surface 7a. Thereby, the direction in which the light reflected by the window member 44 travels can be made different from the direction in which the light reflected by the mirror surface 7a travels, and it is possible to suppress the light reflected by the window member 44 from becoming noise light.

[0067] In a cross-section (FIG. 2) perpendicular to the first wall portion 51 passing through the mirror surface 7a, a first straight line L1 passing through a first end P1 on the first wall portion 51 side of the mirror surface 7a and a first corner portion 61 formed on the first wall portion 51 side by the outer surface 44a and the first side surface 44c of the window member 44 intersects the first wall portion 51. In the cross-section (FIG. 2), a second straight line L2 passing through a second end P2 on the second wall portion 52 side of the mirror surface 7a and a second corner portion 62 formed on the second wall portion 52 side by the outer surface 44a and the second side surface 44d of the window member 44 intersects the second wall portion 52. In a cross-section (FIG. 3) perpendicular to the third wall portion 53 passing through the mirror surface 7a, a third straight line L3 passing through a third end P3 on the third wall portion 53 side of the mirror surface 7a and a third corner portion 63 formed on the third wall portion 53 side by the outer surface 44a and the third side surface 44e of the window member 44 intersects the third wall portion 53. In the cross-section (FIG. 3), a fourth straight line L4 passing through a fourth end P4 on the fourth wall portion 54 side of the mirror surface 7a and a fourth corner portion 64 formed on the fourth wall portion 54 side by the outer surface 44a and the fourth side surface 44f of the window member 44 intersects the fourth wall portion 54. By configuring the straight lines L1 to L4 to intersect the wall portions 51 to 54, the wall portions 51 to 54 are formed relatively thick with respect to the window member 44. Thereby, the window member 44 can be supported by the thickly formed wall portions 51 to 54, and breakage of the window member 44 can be suppressed.

[0068] On the one hand, when forming the wall portions 51 to 54 thick, from the perspective of miniaturization, it is conceivable to increase the thickness of the wall portions 51 to 54 toward the optical scanning device 1 side. However, in that case, the area of the portion located inside the frame member 43 on the base 42 becomes narrow. If an attempt is made to form a wiring portion for electrical connection with the optical scanning device 1 in such a narrow portion, there is a risk of problems such as a short circuit occurring in the wiring portion. In contrast, in the mirror unit 100, the wiring portion 70 has a portion (wiring 73) extending inside the base 42 and is drawn out to the outside of the frame member 43. By forming the wiring portion 70 inside the base 42 in this way, it is possible to suppress problems such as a short circuit occurring in the wiring portion 70. Further, for example, compared with the case where the wiring portion 70 is formed so as to extend along the main surface 42a of the base 42 between the base 42 and the frame member 43, it is possible to suppress deterioration of the wiring portion 70 and suppress the wiring portion 70 from affecting the joint portion (joint material 46) between the base 42 and the frame member 43. Therefore, according to the mirror unit 100, it is possible to suppress breakage of the window member 44 while reducing noise light and improve reliability.

[0069] The thickness T44 of the window member 44 is smaller than the width W at which the window member 44 and the frame member 43 are joined. Thereby, the window member 44 can be formed thin, and the influence of refraction in the window member 44 can be suppressed.

[0070] The first straight line L1 intersects the first wall portion 51, and the second straight line L2 intersects the second wall portion 52. As a result, both the first wall portion 51 and the second wall portion 52 facing each other are formed relatively thick with respect to the window member 44. Therefore, the window member 44 can be supported by the thickly formed wall portions 51 and 52, and breakage of the window member 44 can be more reliably suppressed. Further, the third straight line L3 intersects the third wall portion 53, and the fourth straight line L4 intersects the fourth wall portion 54. As a result, both the third wall portion 53 and the fourth wall portion 54 facing each other are formed relatively thick with respect to the window member 44. Therefore, the window member 44 can be supported by the thickly formed wall portions 53 and 54, and breakage of the window member 44 can be more reliably suppressed.

[0071] The wiring portion 70 extends inside the base 42 so as to overlap with the third wall portion 53 when viewed from the Z-axis direction in the overlapping region R2. If an attempt is made to draw out the wiring portion 70 toward the thickly formed third wall portion 53 side, deterioration of the wiring portion 70 as described above is likely to occur. However, in the mirror unit 100, since the wiring portion 70 is formed inside the base 42, deterioration of the wiring portion 70 can be reliably suppressed.

[0072] The distance C1 between the optical scanning device 1 and the third wall portion 53 is longer than the distance C2 between the optical scanning device 1 and the fourth wall portion 54, and the inner electrode pad 71 is disposed on the base 42 between the optical scanning device 1 and the third wall portion 53. Thereby, a space for disposing the inner electrode pad 71 can be secured.

[0073] The wiring portion 70 is electrically connected to the optical scanning device 1 in the inner region R1 located inside the frame member 43 when viewed from the Z-axis direction, extends inside the base 42 in the overlapping region R2 that overlaps with the frame member 43 when viewed from the Z-axis direction, and is drawn out to the outer region R3 located outside the frame member 43 when viewed from the Z-axis direction. Thereby, deterioration of the wiring portion 70 as described above can be more reliably suppressed.

[0074] The wiring portion 70 does not have a portion formed on the back surface 42b of the base 42. When the back surface 42b of the base 42 is adhered and fixed to the upper surface of a magnet (magnetic field generating portion), in order to secure the magnetic force acting on the first driving coil 11 and the second driving coil 12, it is preferable to bring the base 42 as close as possible to the magnet. Since the wiring portion 70 does not have a portion formed on the back surface 42b of the base 42, the base 42 can be brought close to the magnet, and the magnetic force acting on the first driving coil 11 and the second driving coil 12 can be greatly secured. [Modification Example]

[0075] In the wiring portion 70A shown in FIG. 6, the outer electrode pad 72 and the wiring 73 are provided in the inner region R1. The outer electrode pad 72 is disposed on the back surface 42b of the base 42 in the inner region R1. The wiring 73 is connected to the back surface of the inner electrode pad 71, linearly extends along the Z-axis direction inside the base 42, and is connected to the back surface of the outer electrode pad 72. Even with such a modification, similar to the above-described embodiment, deterioration and the like of the wiring portion 70 described above can be suppressed.

[0076] In the above modification, the outer electrode pad 72 may be disposed on the back surface 42b of the base 42 in the outer region R3. In this case, the wiring 73 is connected to the back surface of the inner electrode pad 71, linearly extends along the Z-axis direction inside the base 42, has a first portion exposed on the back surface 42b of the base 42, and a second portion connected to the first portion and provided on the back surface 42b so as to extend over the inner region R1, the overlapping region R2, and the outer region R3 and connected to the outer electrode pad 72.

[0077] In the above modification, the outer electrode pad 72 may be disposed on the main surface 42a of the base 42 in the outer region R3. In this case, the wiring 73 is connected to the back surface of the inner electrode pad 71, linearly extends along the Z-axis direction inside the base 42, has a first portion exposed on the back surface 42b of the base 42, a second portion connected to the first portion and provided on the back surface 42b so as to extend over the inner region R1, the overlapping region R2, and the outer region R3, and a third portion connected to the second portion, linearly extending along the Z-axis direction inside the base 42, and connected to the back surface of the outer electrode pad 72.

[0078] The present invention is not limited to the above-described embodiments and modifications. For example, the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be adopted. The thicknesses T51 to T54 of the respective wall portions 51 to 54 may be different from each other. The wiring 73 may be electrically connected to the inner electrode pad 71 in the inner region R1, extend inside the base 42 in the overlapping region R2, and be drawn out to the outer region R3. A part of the wiring 73 may be configured as a surface wiring formed along the surface of the base 42. In the optical scanning device 1 of the embodiment, the movable portion 10 is driven by electromagnetic force, but the movable portion 10 may be driven by electrostatic force or a piezoelectric element.

[0079] In the above embodiment, the third wall portion 53 can be regarded as the first reference wall portion, and the fourth wall portion 54 can be regarded as the second reference wall portion. In this case, the third wall portion 53, the third end P3, the third side surface 44e, the third corner portion 63, and the third straight line L3 respectively correspond to the first wall portion, the first end, the first side surface, the first corner portion, and the first straight line, and the fourth wall portion 54, the fourth end P4, the fourth side surface 44f, the fourth corner portion 64, and the fourth straight line L4 respectively correspond to the second wall portion, the second end, the second side surface, the second corner portion, and the second straight line. In the above embodiment, the third wall portion 53 can also be regarded as the second reference wall portion, and the fourth wall portion 54 can be regarded as the third reference wall portion.

[0080] In the above embodiment, the first wall portion 51 can also be regarded as the first reference wall portion, and the second wall portion 52 can be regarded as the second reference wall portion. In this case, the first wall portion 51, the first end P1, the first side surface 44c, the first corner portion 61, and the first straight line L1 respectively correspond to the first wall portion, the first end, the first side surface, the first corner portion, and the first straight line, and the second wall portion 52, the second end P2, the second side surface 44d, the second corner portion 62, and the second straight line L2 respectively correspond to the second wall portion, the second end, the second side surface, the second corner portion, and the second straight line. In this case, the distance between the optical scanning device 1 and the first wall portion 51 is made longer than the distance between the optical scanning device 1 and the second wall portion 52, and the inner electrode pad 71 may be disposed between the optical scanning device 1 and the first wall portion 51 on the base 42. That is, the inner electrode pad 71 may be disposed between the first wall portion 51, which is farther from the optical scanning device 1 among the first wall portion 51 and the second wall portion 52, and the optical scanning device 1. Even in this case, a space for disposing the inner electrode pad 71 can be secured. Further, since the first wall portion 51 is farther from the optical scanning device 1 than the second wall portion 52, it is possible to suppress the light from the mirror surface 7a from being blocked by the first wall portion 51 having a higher height than the second wall portion 52. In the above embodiment, the first wall portion 51 can also be regarded as the second reference wall portion, and the second wall portion 52 can be regarded as the first reference wall portion.

[0081] In the above embodiment, all of the following (1) to (4) were satisfied, but it is sufficient that at least one of the following (1) to (4) is satisfied, and the others do not have to be satisfied. (1) In the cross section of FIG. 2, the first straight line L1 intersects the first wall portion 51 (2) In the cross section of FIG. 2, the second straight line L2 intersects the second wall portion 52 (3) In the cross section of FIG. 3, the third straight line L3 intersects the third wall portion 53 (4) In the cross section of FIG. 3, the fourth straight line L4 intersects the fourth wall portion 54

[0082] The window member 44 may have a notch formed therein. The notch may be formed, for example, on the outer surface 44a and may extend along the edge of the outer surface 44a. The notch may be formed, for example, in a rectangular cross-sectional shape. In this case, in the cross-section of FIG. 2, the window member 44 has a first corner portion formed on the first wall portion 51 side by the outer surface 44a and the inner surface of the notch, a second corner portion formed on the second wall portion 52 side by the outer surface 44a and the inner surface of the notch, a fifth corner portion (another first corner portion) formed by the inner surface of the notch and the first side surface 44c, and a sixth corner portion (another second corner portion) formed by the inner surface of the notch and the second side surface 44d. Further, in the cross-section of FIG. 3, the window member 44 has a third corner portion formed on the third wall portion 53 side by the outer surface 44a and the inner surface of the notch, a fourth corner portion formed on the fourth wall portion 54 side by the outer surface 44a and the inner surface of the notch, a seventh corner portion (another third corner portion) formed by the inner surface of the notch and the third side surface 44e, and an eighth corner portion (another fourth corner portion) formed by the inner surface of the notch and the fourth side surface 44f. In this case, at least one of the following (5) to (8) may be satisfied. (5) In the cross-section of FIG. 2, the straight line passing through the first end P1 on the first wall portion 51 side of the mirror surface 7a and the first corner portion intersects the first wall portion 51. (6) In the cross-section of FIG. 2, the straight line passing through the second end P2 on the second wall portion 52 side of the mirror surface 7a and the second corner portion intersects the second wall portion 52. (7) In the cross-section of FIG. 3, the straight line passing through the third end P3 on the third wall portion 53 side of the mirror surface 7a and the third corner portion intersects the third wall portion 53. (8) In the cross-section of FIG. 3, the straight line L4 passing through the fourth end P4 on the fourth wall portion 54 side of the mirror surface 7a and the fourth corner portion may intersect the fourth wall portion 54. Thereby, similar to the above-described embodiment, each of the wall portions 51 to 54 can be formed thick. At least one of the following (9) to (12) may be satisfied. (9) In the cross-section of FIG. 2, the straight line passing through the first end P1 and the fifth corner portion intersects the first wall portion 51. (10) In the cross-section of FIG. 2, the straight line passing through the second end P2 and the sixth corner portion intersects the second wall portion 52. (11) In the cross-section of FIG. 3, the straight line passing through the third end P3 and the seventh corner portion intersects the third wall portion 53. (12) In the cross-section of FIG. 3, the straight line passing through the fourth end P4 and the eighth corner portion intersects the fourth wall portion 54. Also in this case, each of the wall portions 51 to 54 can be formed thick.When the above (9) to (12) are satisfied, the above (5) to (8) may not be satisfied. In this case, since the above (9) to (12) are satisfied, each of the wall portions 51 to 54 can be formed thick. Further, since the above (5) to (8) are not satisfied, it is possible to avoid the light from the mirror surface 7a being blocked by each of the wall portions 51 to 54, and the entire outer surface 44a of the window member 44 can be used for optical scanning. The outer surface 44a of the window member 44 means the surface facing the side opposite to the optical scanning device 1 and includes the inner surface of the notch.

Explanation of Signs

[0083] 1... optical scanning device, 7a... mirror surface, 10... movable part, 44c... first side surface, 44d... second side surface, 42... base, 43... frame member, 43a... opening, 44... window member, 44a... outer surface, 45... bonding material, 51... first wall portion, 51a... top surface, 52... second wall portion, 52a... top surface, 53... third wall portion, 54... fourth wall portion, 61... first corner portion, 62... second corner portion, 63... third corner portion, 64... fourth corner portion, 70... wiring portion, 71... inner electrode pad, 100... mirror unit, C1, C2... distance, L1... first straight line, L2... second straight line, L3... third straight line, L4... fourth straight line, P1... first end, P2... second end, P3... third end, P4... fourth end, R1... inner region (first region), R2... overlapping region (second region), R3... outer region (third region), W... width.

Claims

1. a base having a first surface and a second surface opposite the first surface; an optical scanning device having a movable portion and a mirror surface provided on the movable portion and disposed on the first surface side of the base; a frame member disposed on the first surface side of the base so as to surround the optical scanning device when viewed from a first direction; a window member disposed on the frame member so as to cover an opening of the frame member; a wiring portion electrically connected to the optical scanning device, the wiring portion has a through portion extending inside the base so as to penetrate between the first surface and the second surface of the base, the base has a protruding portion located outside the frame member when viewed from the first direction, a length of the penetrating portion in the first direction is smaller than a length of the protruding portion from the frame member to an outer edge of the base when viewed from the first direction.

2. The mirror unit according to claim 1 , wherein a length of the through portion in the first direction is smaller than a thickness of a wall portion that constitutes the frame member.

3. The mirror unit according to claim 1 , wherein a width of the through portion in a direction perpendicular to the first direction is smaller than a thickness of the window member.

4. The optical scanning device further includes a support portion that supports the movable portion so that the movable portion can swing.

4. The mirror unit according to claim 1, wherein a length of the penetrating portion in the first direction is greater than a thickness of the supporting portion in the first direction.

5. The optical scanning device further includes a support portion that supports the movable portion so that the movable portion can swing.

5. The mirror unit according to claim 1, wherein a width of the penetrating portion in a direction perpendicular to the first direction is smaller than a thickness of the supporting portion in the first direction.

6. 6. The mirror unit according to claim 1, wherein a width of the penetrating portion in a direction perpendicular to the first direction is smaller than a length of the protruding portion from the frame member to an outer edge of the base when viewed from the first direction.

7. 7. The mirror unit according to claim 1, wherein the wiring portion further comprises an electrode pad disposed on the second surface side of the base and electrically connected to the penetrating portion.

8. The mirror unit according to claim 7 , wherein the electrode pad is disposed inside the frame member when viewed from the first direction.

9. The mirror unit according to claim 7 , wherein the electrode pad is disposed outside the frame member when viewed from the first direction.

10. 10. The mirror unit according to claim 7, wherein the electrode pad is directly connected to the through portion.

11. the wiring portion further includes an extending portion extending on the second surface side of the base, 10. The mirror unit according to claim 7, wherein one end of the extending portion is connected to the electrode pad, and the other end of the extending portion is connected to the penetrating portion.

12. 12. The mirror unit according to claim 1, wherein a length of the protruding portion from the frame member to an outer edge of the base when viewed from the first direction is greater than a thickness of a wall portion constituting the frame member.

13. 12. The mirror unit according to claim 1, wherein a length of the protruding portion from the frame member to an outer edge of the base when viewed from the first direction is smaller than a thickness of a wall portion constituting the frame member.

14. 14. The mirror unit according to claim 1, wherein a length of the protruding portion from the frame member to an outer edge of the base when viewed from the first direction is greater than a thickness of the window member.

15. The frame member has a first wall portion and a second wall portion facing each other in a direction perpendicular to the first direction, a height of the first wall portion from the first surface of the base is greater than a height of the second wall portion from the first surface of the base; The mirror unit according to any one of claims 1 to 14, wherein the window member is inclined with respect to the mirror surface.

16. 16. The mirror unit according to claim 1, wherein the base is joined to the frame member by a joining material.

Images