Liquid delivery system

Abstract

To provide a modular system for enabling distribution of liquid chemicals.SOLUTION: A modular system 200 for enabling distribution of liquid chemicals comprises a substrate block, in which the substrate block includes at least two ports formed in a first major surface of the block, and a fluid passageway extending between the two ports. The fluid pathway is preferably a smooth, seamless path where the entire volume of the fluid pathway is completely in line with the desired fluid flow so that fluid flow completely flows all over the entire flow passageway and there are no stagnation volumes or areas stagnant in the fluid passageway. The substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process. A sealing assembly is provided, which uses a combination of a replaceable insert-type seal with a tongue and groove shaped seal formed into modular components.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] This application claims priority to U.S. Provisional Patent Application No. 62 / 318,202, filed Apr. 4, 2016, by Chris Melcer et al., entitled "LIQUID DELIVERY SYSTEM", which is hereby incorporated by reference in its entirety.

[0002] The present invention relates to a liquid chemical delivery system, and more particularly, to a modular tubeless liquid chemical delivery system with a significantly reduced footprint.

Background Art

[0003] Liquid delivery and dispensing systems are used in a variety of applications, including the manufacture of semiconductor devices and pharmaceuticals. For example, semiconductor wafers are subjected to various liquid processing steps during their manufacture, such as etching, cleaning, polishing, drying, and material deposition. In semiconductor substrate processing, it is generally required that precise amounts of liquid chemicals be delivered as needed, that they be bubble-free, that the thickness be uniform over the usable portion of the substrate, and that chemical waste be minimized due to cost and environmental concerns.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Various types of liquid delivery systems are used to deliver liquid chemicals from a source to a process that uses various types of active components such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc. In many of these applications, the size of the liquid chemical distribution system can have a dramatic impact on cost. For example, in the manufacture of semiconductor devices, a liquid distribution system or a portion of a liquid distribution system is typically housed in a very clean environment such as a clean room. Further, many of the liquids used in semiconductor manufacture are either toxic or highly reactive, or both, and thus such distribution systems often require special containment and exhaust equipment. For such systems, it is advantageous to reduce the size of the fluid distribution system.

Means for Solving the Problems

[0006] According to an embodiment of the present invention, a modular system that enables the distribution of liquid chemicals is provided. This system includes a substrate block that includes at least two ports formed on a first major surface of the block and a fluid passage extending between those two ports. This fluid passage is preferably a seamless and smooth path in which the entire volume of the fluid passage exactly matches the desired fluid flow so that the fluid flow spreads completely and without restriction throughout the flow path and there is no stagnant volume or region where the fluid remains in the fluid passage.

[0007] According to another embodiment of the present invention, a substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process.

[0008] According to another embodiment of the present invention, a sealing assembly is provided that uses a combination of a replaceable insert-type seal, a flange formed within a modular component, and a grooved seal.

[0009] Above, the features and technical advantages of the present invention have been outlined rather broadly so as to enable a more thorough understanding of the following detailed description of the present invention. In the following, additional features and additional advantages of the present invention will be described. Those skilled in the art should understand that the disclosed concepts and specific embodiments can be readily utilized as a basis for modifying or designing other structures for achieving the same objectives of the present invention. Furthermore, those skilled in the art should understand that such equivalent structures do not depart from the spirit and scope of the present invention as recited in the appended claims.

[0010] Next, for a more complete understanding of the present invention and its advantages, reference is made to the following description written with respect to the accompanying drawings.

Brief Description of the Drawings

[0011]

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DETAILED DESCRIPTION OF THE INVENTION

[0012] It is not intended that the accompanying drawings be drawn to any specific scale. In these drawings, the same or substantially the same components shown in the various figures are represented by like reference numerals respectively. For clarity purposes, not all components in all of the drawings are labeled.

[0013] Embodiments of the present invention provide a modular, ductless liquid chemical delivery system that has a significantly smaller footprint than prior art systems. Modular fluid delivery systems for the delivery and distribution of gases are well known, but there are several factors that render these prior art systems unsuitable for liquid chemical delivery systems. First, prior art modular substrate blocks (which provide fluid passages) are typically fabricated from solid metals such as stainless steel. Many of the liquid chemicals used in semiconductor manufacturing are corrosive to metals. Further, metal ions tend to be leached into the liquid that contacts the metal surface, and as a result, metal ions can undesirably adhere to the wafer surface during the manufacturing process.

[0014] Further, the fluid passages, inlet ports, and outlet ports within prior art substrate blocks are formed by drilling through the material block. Such a prior art substrate block 101 is shown in FIGS. 1A and 1B. The internal passages in FIG. 1B are shown in dashed lines. As shown in FIG. 4B, when a desired fluid passage 106 is drilled, an amount of “overshoot” (regions 107, 108) occurs where the internal fluid passage 106 intersects the inlet and outlet ports 102. In order to drill an internal fluid path that runs in a direction parallel to the upper surface 104 of the substrate block (which includes port 102), it is necessary to drill from the side surface 109 of the substrate block, and when drilling from the side surface 109 of the substrate block, a portion of the drilled passage needs to be plugged with a plug 105 to isolate the desired fluid passage. All of these factors result in a certain amount of undesirable stagnant volume within the fluid path.

[0015] Embodiments of the present invention utilize modular substrate blocks formed from polymers or fluoropolymers such as polypropylene, PTFE, modified PTFE, or PFA. In a preferred embodiment, the modular substrate blocks are formed from a material that meets the requirements set forth in SEMI F57 regarding surface extractable ions, metals, and total organic carbon contamination in a 7-day static leach test in ultrapure water at 85 ± 5°C.

[0016] FIG. 4 shows a modular substrate block 401 according to an embodiment of the present invention. The modular substrate block 401 has a single fluid path 406 connecting two ports 402 located on the upper surface 404 of the block. In some embodiments, blocks of various sizes can be used, some of which have multiple port pairs and multiple fluid passages within the same block. Referring further to FIGS. 2-3, the modular substrate block 401 can be referred to as a "jumper block", and the modular substrate block 401 can be used to fluidly connect, for example, two active components (connect the outlet of the first active component to the inlet of the second active component), or connect one active component to another substrate block. As will be described later, in some embodiments, substrate blocks having multiple flow passages and inlet / outlet ports can also be used.

[0017] FIG. 2 is a perspective view of a modular liquid chemical delivery system 200 according to an embodiment of the present invention. FIG. 3 is a bottom perspective view of the modular liquid chemical delivery system 200 of FIG. 2, with the backplane omitted and some substrate blocks not shown for clarity. In the embodiment of FIG. 2, there are three layers for the system, namely, a top layer consisting of active components (such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc.), a second intermediate layer consisting of substrate blocks (which serve to form fluid connections between the active components), and a backplane that functions as a support structure for the entire system.

[0018] Referring further to FIGS. 8A and 8B, the substrate block 201 is typically attached to the backplane 210 by screws or other similar fasteners that extend from the upper surface of the substrate (the same surface including the inlet / outlet ports) through the fastener holes 852 into the backplane to hold the substrate block in place. In some embodiments, adjacent substrate blocks can also be coupled to each other to add stability.

[0019] Each active component (212, 213, 214, 215, 216, 217) can be held in a predetermined position on one (or more) substrate blocks 201 by at least two screws or similar fasteners. These at least two screws or similar fasteners serve to attach the active component to the substrate block and hold the active component in a suitable position relative to the inlet / outlet ports on the surface of the substrate block. Usually, the active component can be attached to the first substrate block by two screw holes 854 on both sides of the inlet / outlet port, and can be attached to the second substrate block (and port) in the same way. In some embodiments, an insert having a female metal screw that mates with the connecting screw of the active component can be appropriately disposed inside the polymer body of the substrate block. In the drawings of this specification, fastening tool holes and screw holes are not shown in most figures for clarity.

[0020] Even in this modular approach using substrate blocks, direct access to each component is possible, and for the installation and removal of active components, although not limited to, only manual hand tools such as an Allen wrench are required. The ability to directly access the active components simplifies repairs by removing only the damaged active components, thereby shortening the downtime. Since the substrate blocks are standardized, the active components can be placed anywhere within the system.

[0021] In the embodiment of FIG. 2, the liquid connection to and from the liquid chemical delivery system is effected by the pipe joint 215. One or more liquid chemical substances used in the process typically flow through a pipe from a storage tank (not shown). The pipe is connected to the system 200 by the pipe joint 215. When the liquid chemical substance enters the system 200, it flows through the arranged substrate block to various active components, and finally is delivered (also via the pipe joint 215) to one or more delivery pipes leading to the desired processing site. In the embodiment of FIG. 2, the active components include a regulator 214, a pressure transducer 217, a valve 216, a liquid flow controller 213, and a flow meter 212. As used herein, the total area occupied by all system components (including active components and substrate blocks) of the liquid delivery system and the free space between such components from the inlet pipe joint to the outlet pipe joint is referred to as the system "footprint".

[0022] Using the methods described herein, substrate blocks having virtually any desired size and configuration can be formed. In the embodiment of FIG. 4, however, the substrate block has a width of about 55 mm and a thickness of about 25 mm (1 inch). The inner diameter of the flow path can be any desired size, including, for example, 1 / 4 inch, 3 / 8 inch, or 1 / 2 inch. Importantly, in the preferred embodiment, the internal fluid path is a substantially seamless and smooth passage, and the entire volume of the path exactly matches the desired fluid flow. In other words, there are no stagnant volume / regions or plugged portions as seen in the prior art structure of FIG. 1B. Particularly with respect to slurries, stagnant volumes can lead to particle retention and an undesired increase in the number of large particles. The substrate block according to the embodiment of the present invention contributes to achieving <0.1 particles / ml (particle size >0.1 μm) in a 300 liter jet stream.

[0023] Figure 4 shows a modular substrate block 401 according to an embodiment of the present invention. In some embodiments, the substrate block of FIG. 4 can be manufactured by machining two separate fluoropolymer layers and then joining them together by melt bonding them at the seam 426. FIGS. 5A and 5B show exploded views showing the upper layer 522 and the lower layer 523, FIGS. 6A and 6B show perspective views of a cross-section of the substrate block of FIG. 4 along line A-A, and FIG. 7 shows a cross-sectional view of the substrate block of FIG. 4 along line A-A. Known techniques can be used to machine the upper surface of the lower layer 523 to form smooth grooves 528 at the desired flow path locations. The bottom surface of the upper layer 522 can be machined to form corresponding grooves (not shown). Further, at each end of the flow path, inlet ports and outlet ports 402 penetrating the upper layer 522 can be drilled. When these two layers are combined into one, the corresponding two grooves form the smooth flow path 606 shown in FIGS. 6A and 6B.

[0024] After these two layers are machined and properly positioned, a melt bonding technique using a combination of heat and pressure can be used to bond these two layers together into one. The precise combination of temperature / pressure / time required for melt bonding is known in the art and varies depending on the specific fluoropolymer used to form the layers. In some embodiments, these two layers can be formed from modified PTFE and bonded together into one by heating them to a temperature of about 350° C. to 380° C. for 1 hour (or longer) under a pressure of about 450 psi. Under these conditions, the modified PTFE polymer chains in the two layers intertwine, thereby permanently bonding the two surfaces at the molecular level and forming a homogeneous solid block of modified PTFE.

[0025] The substrate block of FIG. 4 has a very simple single flow path connecting only two inlet / outlet ports, but those skilled in the art will recognize that these same techniques can be used to create much more complex flow paths between any desired number of inlet / outlet ports. For example, FIGS. 8A and 8B show a substrate block with four different flow channels 825 and eight inlet / outlet ports 820. In some embodiments, two or more fluoropolymer layers can be used to create even more complex 3D flow paths. The substrate block can also be used as a manifold in which two or more inlet flow paths combine into a single outlet flow path.

[0026] In other embodiments, known fluoropolymer molding techniques such as compression molding or isostatic molding can be used to create fluoropolymer blocks having the desired flow paths and inlet / outlet ports. Some suitable fluoropolymers (such as PFA) are known to be melt processable, and those fluoropolymers can be molded using injection molding techniques. In other embodiments, PTFE or other fluoropolymer powders can be filled into a mold and then the mold can be sintered under appropriate conditions to form two layers such as those shown in FIGS. 5A and 5B without any need for machining to form one or more flow channels. By sintering PTFE or other fluoropolymer powders in a similar manner, a complete substrate block having one or more flow channels can be formed directly. Those skilled in the art will recognize that the use of some or all of these techniques or any combination of these techniques is also included within the scope of the present invention.

[0027] Figures 9A and 9B respectively show perspective views of another modular substrate block 901 according to an embodiment of the present invention, as seen from the top surface (sealing side) and the bottom surface. In some embodiments, the substrate blocks of Figures 9A and 9B can be manufactured by injection molding using a material such as PFA, but other suitable manufacturing methods and materials within the scope of the present invention can also be used. Figure 10A shows a top surface (sealing) view of the modular substrate block 901, Figure 10B shows a cross-sectional view along line AA, and Figure 10C shows a cross-sectional view along line BB.

[0028] In some embodiments, a mold consisting of multiple parts can be used to form the body of the modular substrate block, and a removable curved insert is used to form a smooth fluid path 906. Regardless of what the exact manufacturing method is, embodiments of the modular substrate block have one or more smooth fluid paths that are substantially seamless, such that the entire volume of the fluid path exactly matches the desired fluid flow so that the fluid flow spreads completely and without limitation throughout the flow path and there is no stagnant volume or region where the fluid pools within the fluid passage. In the embodiment of Figure 10B, the fluid flow path forms a smooth arc without corners or angled walls. Such an arc helps to significantly eliminate stagnant volumes or regions where liquid pools.

[0029] The body of this modular substrate block can be formed as a substantially solid material block, except for the fluid paths and threaded holes, similar to the example discussed above. In other embodiments, as shown in the examples of Figures 9A to 11C, the body of this modular substrate block can be formed to have only the necessary support walls 959. Such embodiments are particularly advantageous for injection molding because the thickness of all different sections of the body is substantially the same, thereby making it easier to uniformly fill all sections of the mold to avoid unnecessary voids. Such an embodiment shown in Figure 9B has a larger surface area compared to the solid structure of Figure 4, which may enable the modular substrate block to withstand higher temperatures.

[0030] In some embodiments, after a substrate block including a desired flow path is formed to remove significant seams or molding artifacts and ensure that the flow path is smooth, abrasive can be flushed vigorously into the substrate block. Alternatively, specially designed tools can be used to smooth the internal flow path, either manually or automatically.

[0031] Referring again to FIGS. 2-3, a flow path can be formed that connects a liquid source to a process through virtually any desired arrangement of active components (e.g., valves, pressure transducers, flow controllers, etc.) by combining substrate blocks according to the present invention, without welds and tubes. The liquid flows through passages within the substrate blocks rather than through separate tubes. In this way, the present invention provides a solution to the problems of the prior art by providing a plurality of individual substrate blocks each having an inlet and an outlet port accessing a common surface with at least one fluid passage. Using that common surface, standard active components such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc. can be mounted. In some embodiments, the common surface of each adjacent manifold block is maintained in a common plane to facilitate sealing requirements. The active components bridge or extend across adjacent substrate blocks, and the substrate blocks are removably aligned and mounted (as described above) to allow their respective fluid passages to be positioned for sealed interconnection.

[0032] The Applicant of the present application has found that the use of these types of modular components enabled by the novel systems and processes described herein can provide a liquid chemical delivery system with a footprint smaller than one half the size of a typical prior art liquid chemical delivery system. Unlike conventional liquid delivery systems in which components are connected via pipe fittings and pipes, in embodiments of the system of the present invention, components can be arranged with a very small gap therebetween. In a preferred embodiment, adjacent components can be arranged with a gap of less than 20 mm, such as less than 10 mm, less than 5 mm, about 1 mm or less than 1 mm. Further, in some embodiments, using a standardized width (e.g., 55 mm) for active components allows various components to be arranged without wasted space between parallel liquid flow paths. In a preferred embodiment, the ratio of wasted space to the total system footprint can be on the order of 30%, and this ratio can be, for example, 20%, 10% or 5%. The use of such modular components also helps to significantly save on design time and expense associated with custom parts and / or pipe assemblies.

[0033] As described above, in some embodiments of the present invention, the active components are mounted on the substrate block by screws or other fasteners. The screw holes 854 are disposed on both sides of each inlet / outlet port. In some embodiments, metal screws are provided and metal inserts are placed inside the screw holes 854 to facilitate a tight connection. Thus, the lower surface of each active component has a corresponding inlet / outlet port held at an appropriate position on the inlet / outlet port of the substrate block. In a preferred embodiment, the housing of the active component 962 is also formed from a polymer or fluoropolymer. FIG. 11A shows the fluid flow path (indicated by arrow 1164) of one embodiment. An active component 1162 (a valve in this example) is mounted on the outlet port of the first substrate block 401A such that the fluid path inside the active component 1162 is fluidly connected to the fluid path in the substrate block 401A. Similarly, the active component 1162 is also mounted on the substrate block 401B such that the outlet port of the active component 1162 is disposed on the inlet port of the substrate block 401B and the fluid path from the active component 962 is fluidly connected to the fluid passage in the substrate block 401B.

[0034] FIG. 11B is an enlarged view of the portion inside the dashed box 1170 of FIG. 11A. As shown in FIG. 11B, the desired fluid path (line 1164) leads from the substrate block 401A through the inlet / outlet ports on the top surface of the substrate block 401A and the lower surface of the active component 1162 and into the component fluid passage 1163. Even if the connection between the component and the substrate block is tight, there is still a possibility of leakage (in the direction indicated by arrow 1166). Also, the face-to-face interface has the potential for liquid to stagnate, which can lead to the growth of microorganisms or the generation of a large number of particles. Accordingly, in some embodiments, one or more sealing assemblies are used to prevent leakage at the connection between the active component and the substrate block.

[0035] Some embodiments of the present invention utilize a bead and groove structure and / or inserts to provide a seal between an active component and a substrate block. In some embodiments, a similar seal can be used to directly form a fluid connection between substrate blocks or between active components. As shown in FIGS. 10B and 10C, bead and groove connections (957 and 956, respectively) are formed directly in the bodies of the two components (i.e., a small protruding "bead" on one surface fits into a "groove" formed in the corresponding surface). Alternatively, inserts can be formed and replaceable sealing components can be placed in grooves formed in one or both of the mating surfaces.

[0036] FIGS. 112 and 12B show an embodiment of the present invention in which a replaceable insert seal 970 can be placed in a contoured groove surrounding a fluid connection between a substrate block 401 and an active component 1162. In the cross-sectional views of FIGS. 12A and 12B, the active component shown is a test fixture used for the purpose of testing flow and extractable particle requirements, but this seal arrangement would be the same for an actual active component such as a valve or a liquid flow meter. FIG. 14A shows the substrate block 401, and line B-B indicates the location of the cross-section of FIGS. 12A and 12B. FIG. 13A shows a perspective view of the seal 970, and FIG. 13B shows a cutaway view of the seal 970 to show the cross-sectional shape. In the embodiment shown, the chamfered horizontal portion 972 of the seal 970 helps with proper attachment of the seal by providing a leading edge that can be easily inserted into the groove in one of the mounting surfaces (the lower surface of the active component in this embodiment). Referring again to FIGS. 8A and 8B, the seal grooves 860 are formed by machining or other means around each of the inlet / outlet ports 820.

[0037] In a preferred embodiment, the seal 970 can also be made from a polymer or a fluoropolymer. Since it is necessary to allow for a large tolerance with respect to the structure formed by machining or other means on the polymer body, the applicant of the present application has found that the size of the seal ring 970 should be determined such that there is always a tightening allowance at the leading edge 972 of the seal ring. In other words, while attached, the seal ring is compressed horizontally to ensure that a liquid seal is always formed. In contrast, in some embodiments, the size of the seal is determined such that there is little or no vertical tightening allowance or compression on the horizontal portion 971 of the ring.

[0038] FIG. 14B shows another embodiment 1280 of an interchangeable seal ring as a cross-sectional view of an active component 1162 mounted on a substrate block 401. Again, FIG. 14A shows the substrate block 401, and line B-B indicates the position of the cross-section of FIG. 14A.

[0039] FIG. 15A shows a perspective view of 1280, and FIG. 15B shows a cutaway view of the seal 1280 to show the cross-sectional shape. The seal ring 1280 features a conical inner sleeve 1283 that has no (potentially leak-prone) horizontal portion. Thus, when the seal is in place, liquid spreads and flows unimpeded inside the sleeve 1283. The outer ring 1282, connected to the conical sleeve portion via a horizontal bridge portion 1284, provides an additional seal that acts as a backup and provides positioning behind the conical seal portion 1283. The tapered shape of the conical central portion 1283 also serves to assist in the attachment of the seal ring 1280. Similar to the seal ring embodiments described above, the size of the seal ring 1280 is also determined such that when attached, the groove creates a horizontal tightening allowance rather than a vertical tightening allowance.

[0040] FIG. 16A shows a perspective view of another embodiment of a replaceable seal-ring 1680 used to provide a liquid seal at the inlet and outlet ports of a modular substrate block according to an embodiment of the present invention. FIG. 16B is a cross-section of the seal of FIG. 16A along line AA. FIG. 16C is an enlarged view of half of the cross-section of FIG. 16B. The seal-ring 1680 features a conical inner sleeve 1683. The conical sleeve 1683 has a portion 1685 that slopes outward (sloping away from the port opening), a portion 1686 that slopes inward (sloping toward the port opening), and an outer vertical portion 1687. In the embodiment of FIG. 16A, the conical sleeve portion of the seal has no horizontal surface (which could potentially allow leakage). In some embodiments, the slope of the outward-sloping portion 1685 is from about 25 degrees to about 35 degrees, for example about 30 degrees, with respect to the vertical axis (or the inner wall of the seal). In some embodiments, the slope of the inward-sloping portion 1686 is at an angle greater than the slope of the outward-sloping portion, from 40 degrees to 50 degrees, for example about 45 degrees, with respect to the vertical axis.

[0041] In some embodiments of a seal featuring a conical inner sleeve, the ratio of the height of the cone (shown by the arrow and reference numeral 1695) to the thickness of the cone wall (shown by the arrow and reference numeral 1976) is in the range of about 0.5 to about 2.5, such as from about 1.0 to 2.0, from about 1.1 to 1.8, or from about 1.1 to 1.6.

[0042] In some embodiments, the size of the seal is determined such that when the seal is attached, the portion 1685 that slopes outwardly of the conical sleeve is compressed as indicated by arrow 1690. The size of the seal is further determined such that when the seal is attached, the upper edge (substrate fitting portion) of the port opening does not contact the outwardly sloping portion 1685. Instead, the upper edge of the port opening slides over the outer vertical portion 1687 and the seal can be formed in the region indicated by reference numeral 1688. The tapered shape of the conical central portion 1683 also serves to assist in the attachment of the seal ring 1680. Thus, when the seal is in place, liquid spreads and flows unimpeded inside the sleeve 1683.

[0043] The outer ring 1682 provides an additional seal that serves as a backup and further positions the conical seal portion 1683. In some embodiments, the size of the seal ring 1680 is determined such that when attached, it creates a horizontal clamping margin on the outer and inner surfaces of the outer ring 1688 as indicated by arrows 1691 and 1692 around the port opening in the modular substrate block. In some embodiments, there is no vertical clamping margin on the top or bottom surface of the ring, the horizontal bridge portion or intermediate portion 1684, and / or on the conical central portion 1683.

[0044] In some embodiments, in addition to the removable inserts described above, a bead and groove insert can be used as a backup or secondary seal and as additional assistance in properly aligning the ports on the active component and the ports on the substrate block. FIG. 17A shows the position of a bead and groove secondary seal 1790 relative to a primary seal insert 1770 according to one embodiment of the present invention. In other embodiments, the bead and groove structure can be the primary seal structure (closest to the desired flow path), and the seal insert can be the secondary seal. FIGS. 17B-17D show various possible bead and groove structures that can be used as the secondary seal structure or the primary seal structure. FIG. 17B shows a simple corresponding bead and groove ring 1790. FIG. 17C shows the addition of an inverted concentric shoulder 1792 that serves to prevent damage to the convex ring of FIG. 17B. FIG. 17D shows a double set of concentric bead and groove rings (1793, 1794). In some embodiments, a leak detector can be embedded within the substrate between the primary and secondary seals.

[0045] FIG. 18 shows another embodiment 1800 of a liquid chemical delivery system in which one or more active components are embedded in a substrate block 1801. FIG. 19 shows a perspective view of the substrate block 1801 showing the internal structure. In the embodiment of FIG. 19, liquid enters the substrate block through inlet 1920A, proceeds through path 1925 to check valve 1992, and reaches static mixer 1994. In this way, two fluid flows are combined and exit the substrate block through outlet port 1920B. As described above, the substrate block 1401 for use with liquid chemicals can be formed from a polymer or fluoropolymer. In some embodiments, the substrate block 1401 for use with a gas mixture can be formed from a metal such as stainless steel. The substrate block 1401 can be formed to have slots for active components, or slots / openings can be machined into the substrate block. The flow paths can be formed as described above or machined using prior art methods. In some embodiments, the embedded active components are replaceable and are removably held in place by screws / fasteners 1991.

[0046] Many different aspects and embodiments are possible. Some of those aspects and embodiments are described herein. After reading this specification, those skilled in the art will understand that those aspects and embodiments are for illustrative purposes and are not intended to limit the scope of the invention. Embodiments may be based on any one or more of the following items.

[0047] Item 1. A substrate block including a first substrate port and a second substrate port formed on a first surface, and a liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, a first active component fluidly connected to the first substrate port, and a second active component different from the first active component and fluidly connected to the second substrate port, the first liquid passage having no stagnant volume or region where liquid accumulates, a liquid delivery system.

[0048] Item 2. A system for enabling the dispensing of liquid chemical substances, comprising a substrate block including a first substrate port and a second substrate port formed on a first surface, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, wherein the first substrate port is adapted to be fluidly connected to a first active component, the second substrate port is adapted to be fluidly connected to a second active component different from the first active component, and the first liquid passage is a smooth passage having no stagnant volume or region where liquid accumulates.

[0049] Item 3. A system for enabling the dispensing of liquid chemical substances, comprising a substrate block including a first substrate port and a second substrate port formed on a first surface, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, wherein the first substrate port is adapted to be fluidly connected to a first active component, the second substrate port is adapted to be fluidly connected to a second active component different from the first active component, and the entire volume of the first liquid passage coincides with the flow of the fluid.

[0050] Item 4. Any one of the preceding items, wherein the first liquid passage is formed such that the flow of the liquid flows unimpeded through the entire volume of the liquid passage.

[0051] Item 5. Any one of the preceding items, wherein the entire volume of the first liquid passage coincides with the flow of the fluid.

[0052] Item 6. Any one of the preceding items, wherein the substrate block includes a polymer or a fluoropolymer.

[0053] Item 7. Any one of the preceding items, wherein the substrate block includes polypropylene, PTFE, modified PTFE, or PFA.

[0054] Item 8. Any one of the preceding items, wherein the substrate block comprises third and fourth substrate ports formed on a first surface, and a second liquid passage fluidly connecting the third substrate port to the fourth substrate port.

[0055] Item 9. Any one of the preceding items, wherein the substrate block is formed by machining smooth grooves on the upper surface of a first substrate layer, machining matching smooth grooves on the bottom surface of a second substrate layer, placing the second substrate layer on the first substrate layer such that the matching grooves form a liquid passage, and bonding the two layers together into one.

[0056] Item 10. Item 9, further comprising drilling a first port and a second port through the second layer at both ends of the formed grooves.

[0057] Item 11. Any one of the preceding items, wherein bonding the two substrate layers comprises fusion bonding two polymer or fluoropolymer layers together into one by applying heat and pressure.

[0058] Item 12. Any one of the preceding items, wherein the substrate block is formed by molding a polymer or fluoropolymer.

[0059] Item 13. Item 12, wherein the molding includes compression molding, isostatic molding, melt processing, or injection molding.

[0060] Item 14. Any one of the preceding items, wherein the substrate block is formed by sintering a fluoropolymer in a mold.

[0061] Item 15. Any one of the preceding items, wherein the substrate block is formed by sintering two substrate layers separately in a mold and then fusion bonding the layers together into one.

[0062] Item 16. Any one of the preceding items, wherein the active component comprises one or more components selected from the group consisting of a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, and a valve.

[0063] Item 17. Any one of the preceding items, having a proprietary area where the ratio of the free space to the system component is 30% or less, 20% or less, 10% or less, or 5% or less.

[0064] Item 18. Any one of the preceding items, having a plurality of active components mounted such that the spacing between the active components is less than 20 mm, such as less than 10 mm, less than 5 mm, about 1 mm, or less than 1 mm.

[0065] Item 19. A liquid delivery system comprising a substrate block including a first substrate port and a second substrate port formed on a first surface, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, a first active component having a lower surface fluidly connected to the first substrate port, and a seal assembly for sealing its fluid connection, the seal assembly including a primary seal with a removable seal insert, and a secondary seal having a flange and groove structure formed on the first surface of the substrate block and the lower surface of the active component.

[0066] Item 20. Item 19, wherein the seal insert comprises a polymer or a fluoropolymer.

[0067] Item 21. Any one of Items 19 to 20, wherein the seal assembly comprises a seal ring that is compressed horizontally when attached and not compressed vertically.

[0068] Item 22. Any one of Items 19 to 21, wherein the secondary flange and groove structure is a circular groove on either the upper surface of the substrate block or the lower surface of the active component, and the corresponding circular flange extends from the other of the upper surface of the substrate block or the lower surface of the active component.

[0069] Item 23. Any one of Items 19 - 22, wherein the flange and groove - like structure includes a circular structure having a diameter larger than that of the insert - seal.

[0070] Item 24. Any one of Items 19 - 23, wherein the flange and groove - like structure includes at least two concentric circular flange and groove - like structures.

[0071] Item 25. Any one of Items 19 - 24, wherein the seal includes a conical central portion through which liquid flows when the seal is in a predetermined position.

[0072] Item 26. Item 25, wherein the ratio of the height of the cone of the conical central portion to the thickness of the seal wall of the conical central portion is from about 0.5 to 2.5, such as from about 1.0 to 2.0, from 1.1 to 1.8 or from 1.1 to 1.6.

[0073] The invention described in this specification has broad applicability and can provide many of the advantages described and illustrated in the above examples. Embodiments of the invention vary widely depending on the specific application, and not all embodiments provide all of these advantages, nor do they achieve all of the objectives achievable by the invention.

[0074] As used herein, when the terms "automated", "automation", or similar terms are used, these terms are understood to include manual initiation of an automated process or step or an automated process or step. In the discussion and claims of this specification, the terms "comprising" and "including" are used as open-ended terms and, accordingly, should be interpreted to mean "including, but not limited to". If a term is not specifically defined herein, that term is intended to be used in its ordinary and customary sense. The accompanying drawings are intended to facilitate understanding of the present invention and are not drawn to scale unless otherwise specifically indicated. As used herein, terms such as "right", "left", "lower", "upper", "bottom", "horizontal", "vertical", etc. designate directions within the referenced drawings. These terms are used for convenience only and are not intended to be limiting.

[0075] Furthermore, it should be recognized that embodiments of the present invention can be realized by computer hardware or software, or a combination of hardware and software. The methods of the present invention can be realized as a computer program using standard programming techniques based on the methods and figures described herein, and this computer program includes a computer-readable storage medium configured to include the computer program, and the storage medium so configured causes a computer to operate in a predetermined and specific manner. To communicate with a computer system, each program can be realized in a high-level procedural programming language or an object-oriented programming language. However, if desired, those programs can also be realized in assembly language or machine language. In any case, the language can be a compiled or interpreted language. Furthermore, the program can be executed on a dedicated integrated circuit programmed to execute the program.

[0076] The scope of the present application is not intended to be limited to the specific embodiments of the processes, machines, manufactures, compositions, means, methods, and steps described herein. As will be readily understood by those skilled in the art from the disclosure of the present invention, existing or later-developed processes, machines, manufactures, compositions, means, methods, or steps that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein can be utilized in accordance with the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufactures, compositions, means, methods, or steps. The figures described herein are generally schematic and the embodiments of the present invention are not necessarily drawn to scale.

Claims

1. a substrate block including a first substrate port and a second substrate port formed in a first surface thereof and a first liquid passage extending in a first direction to fluidly connect the first substrate port and the second substrate port; a first active component fluidly connected to the first substrate port; and a second active component separate from the first active component, the second active component fluidly connected to the second substrate port. Equipped with The first liquid passage has no stagnation volume or area in which liquid may stagnate. Fluid delivery system.

2. The liquid delivery system of claim 1 , wherein the first liquid passage is configured to allow liquid flow throughout an entire volume of the liquid passage.

3. The liquid delivery system of claim 1 , wherein the entire volume of the first liquid passage is consistent with the flow of fluid.

4. The liquid delivery system of claim 1 , wherein the substrate block comprises a polymer or a fluoropolymer.

5. The liquid delivery system of claim 1 , wherein the substrate block comprises polypropylene, PTFE, modified PTFE, or PFA.

6. 2. The liquid delivery system of claim 1, wherein the substrate block comprises third and fourth substrate ports formed in the first surface, and a second liquid passage fluidly connecting the third substrate port to the fourth substrate port.

7. 2. The liquid delivery system of claim 1, wherein the substrate block is formed by machining a smooth groove into a top surface of a first substrate layer, machining a matching smooth groove into a bottom surface of a second substrate layer, placing the second substrate layer on the first substrate layer such that the matching grooves form liquid passageways, and bonding the two layers together.

8. 8. The liquid delivery system of claim 7, further comprising drilling a first port and a second port through the second layer on either side of the formed groove.

9. The liquid delivery system of claim 1 , wherein bonding the two substrate layers comprises melt bonding the two polymer or fluoropolymer layers together by application of heat and pressure.

10. The liquid delivery system of claim 1 , wherein the substrate block is formed by molding a polymer or a fluoropolymer.

11. The liquid delivery system of claim 10 , wherein molding comprises compression molding, isostatic molding, or melt processing.

12. The liquid delivery system of claim 10 , wherein molding comprises injection molding.

13. The fluid delivery system of claim 1 , wherein the substrate block is formed by sintering a fluoropolymer in a mold.

14. 10. The liquid delivery system of claim 1, wherein the substrate block is formed by sintering two substrate layers separately in a mold and then fusion bonding the layers together.

15. The liquid delivery system of claim 1 , wherein the first active component is a component selected from the group of a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, and a valve.

16. 10. The fluid delivery system of claim 1, having a footprint with a free space to system component ratio of 30% or less.

17. 10. The liquid delivery system of claim 1 having a plurality of active components mounted such that the spacing between the active components is less than 20 mm.

18. 20. The liquid delivery system of claim 17, wherein the plurality of active components includes two or more components selected from the group of flow controllers, pressure transducers, flow measurement sensors, pressure regulators and valves.

19. 1. A system for enabling dispensing of a liquid chemical, comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface thereof, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port; Equipped with the first substrate port is adapted to be fluidly connected to a first active component, and the second substrate port is adapted to be fluidly connected to a second active component separate from the first active component; The first liquid passage is a smooth passageway that does not have any stagnant volumes or areas in which liquid may stagnate. system.

20. 1. A system for enabling dispensing of a liquid chemical, comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface thereof, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port; Equipped with the first substrate port is adapted to be fluidly connected to a first active component, and the second substrate port is adapted to be fluidly connected to a second active component separate from the first active component; The entire volume of the first liquid passage is aligned with the flow of fluid. system.

21. 21. Any of claims 1 to 20, wherein the first liquid passage is configured to allow liquid flow throughout the entire volume of the liquid passage.

22. 22. Any of claims 1 to 21, wherein the entire volume of the first liquid passage is consistent with fluid flow.

23. 23. Any of claims 1 to 22, wherein the substrate block comprises a polymer or a fluoropolymer.

24. 24. Any of claims 1 to 23, wherein the substrate block comprises polypropylene, PTFE, modified PTFE or PFA.

25. 25. Any of claims 1 to 24, wherein the substrate block comprises third and fourth substrate ports formed in the first surface, and a second liquid passage fluidly connecting the third substrate port to the fourth substrate port.

26. 26. Any of claims 1 to 25, wherein the substrate block is formed by machining a smooth groove into a top surface of a first substrate layer and a matching smooth groove into a bottom surface of a second substrate layer, positioning the second substrate layer on the first substrate layer such that the matching grooves form liquid passageways, and bonding the two layers together.

27. 27. The method of claim 26, further comprising drilling a first port and a second port through the second layer on either side of the formed groove.

28. 28. Any of claims 1 to 27, wherein bonding the two substrate layers comprises melt bonding two polymer or fluoropolymer layers together by application of heat and pressure.

29. 29. Any of claims 1 to 28, wherein the substrate block is formed by molding a polymer or a fluoropolymer.

30. 30. The method of claim 29, wherein the molding comprises compression molding, isostatic molding, melt processing, or injection molding.

31. 31. Any of claims 1 to 30, wherein the substrate block is formed by sintering a fluoropolymer in a mold.

32. 32. Any of claims 1 to 31, wherein the substrate block is formed by sintering two substrate layers separately in a mold and then fusion bonding the layers together.

33. 33. Any of claims 1 to 32, wherein the active component comprises one or more components selected from the group of a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator and a valve.

34. 34. Any of claims 1 to 33, having a footprint with a ratio of free space to system components of 30% or less, 20% or less, 10% or less, or 5% or less.

35. 35. Any of claims 1 to 34, having a plurality of active components mounted such that the spacing between active components is less than 20 mm, such as less than 10 mm, less than 5 mm, about 1 mm or less than 1 mm.

36. a substrate block including a first substrate port and a second substrate port formed in a first surface thereof, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port; a first active component having a lower surface fluidly connected to the first substrate port; and A seal assembly for sealing the fluid connection, the seal assembly including a primary seal having a removable seal insert and a secondary seal having a flange-and-groove structure formed on the first surface of the substrate block and the lower surface of the active component. A liquid delivery system comprising:

37. 37. The seal insert of claim 36, wherein the seal insert comprises a polymer or a fluoropolymer.

38. 38. Any one of claims 36 to 37, wherein the seal assembly comprises a seal ring that is horizontally compressed and not vertically compressed when installed.

39. 39. Any one of claims 36 to 38, wherein the secondary flange and groove like structure is a circular groove in one of the top surface of the substrate block or the bottom surface of the active component, with a corresponding circular flange extending from the other of the top surface of the substrate block or the bottom surface of the active component.

40. 40. Any one of claims 36 to 39, wherein the flange and groove structure comprises a circular structure having a larger diameter than the insert seal.

41. 41. Any one of claims 36 to 40, wherein the flange and groove like formations include at least two concentric circular flange and groove like formations.

42. 42. Any one of claims 36 to 41, wherein the seal includes a conical central portion through which liquid flows when the seal is in place.

43. 43. The cone height of the conical center portion to the seal wall thickness of the conical center portion is about 0.5 to 2.5, such as about 1.0 to 2.0, 1.1 to 1.8, or 1.1 to 1.6.

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