Resist composition, method for producing resist pattern, ammonium carboxylate, and resin

Abstract

To provide an ammonium carboxylate, a resin, a resist composition and the like which allow a resist pattern having good line edge roughness to be produced.SOLUTION: A resist composition contains an ammonium carboxylate represented by a formula (I) or a structural unit represented by a formula (IP). [In the formulae, R1 represents an H atom or a substituted / unsubstituted hydrocarbon group; ring W represents a substituted / unsubstituted alicyclic hydrocarbon ring; and X0 represents a single bond or a substituted / unsubstituted hydrocarbon group.]SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition, a method for producing a resist pattern, and an ammonium carboxylate salt and a resin.

Background Art

[0002] Patent Document 1 describes a composition containing a structural unit derived from an ammonium carboxylate salt represented by the following formula. TIFF2025092460000001.tif2944

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present invention provides a carboxylate salt that forms a resist pattern with better line edge roughness (LER) than a resist pattern formed by a resist composition containing the above ammonium carboxylate salt.

Means for Solving the Problems

[0005] The present invention includes the following inventions. [1] A resist composition containing an ammonium carboxylate salt represented by formula (I) or a structural unit represented by formula (IP). TIFF2025092460000002.tif59140[In formula (I) and formula (IP), R 1 represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -NR 2 -, or -SO2-. R2 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. Ring W represents an alicyclic hydrocarbon ring having 3 to 36 carbon atoms which may have a substituent, and -CH2- contained in the alicyclic hydrocarbon ring may be replaced by -O-, -S-, -CO- or -SO2-. X 0 represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. R 20 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 20 represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 21 -**, *-NR 21 -CO-O-**, *-O-CO-NR 21 -** or *-Ax-Ph-Ay-**. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond and a carbonate ester bond. R 21 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R 20 is bonded. L 20 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 3 , R 4 and R 5 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -NR 6-、-SO2- or -CO- may be replaced, and R 3 、R 4 、R 5 and L 20 Among them, any two or three may be combined to form a ring containing N + . R 6 represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.] [2] X 0 is an alicyclic hydrocarbon group having 3 to 36 carbon atoms, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group formed by combining two or more selected from the group consisting of a chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and an aromatic hydrocarbon group having 6 to 36 carbon atoms (the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, an alkyl fluoride group having 1 to 4 carbon atoms, or a hydroxy group, and the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, an alkyl fluoride group having 1 to 4 carbon atoms, or a hydroxy group, and -CH2- contained in the alicyclic hydrocarbon group and the chain hydrocarbon group may be replaced by -O- or -CO-.). The resist composition according to [1]. [3] X 20 is a single bond or a group represented by any of formula (X 20 -1) to formula (X 20 -10). The resist composition according to [1] or [2]. TIFF2025092460000003.tif43162 [In formula (X 20 -1) to formula (X 20 -10), *, ** are bonding sites, and ** represents the bonding site with L 20 . Rx represents a halogen atom, a hydroxy group, an alkyl fluoride group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. mx represents any integer from 0 to 4. X 21 represents -O- or -NR 21 -. R 21 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. [4]L 20 is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and the cyclic hydrocarbon group may have a substituent, the resist composition according to any one of [1] to [3]. [5] The resist composition according to any one of [1] to [4], containing an ammonium carboxylate represented by formula (I). [6] The resist composition according to any one of [1] to [5], containing a resin containing a structural unit represented by formula (IP). [7] The resist composition according to any one of [1] to [6], containing an acid generator having an acid-labile group or a resin containing a structural unit having an acid-labile group. [8] The resist composition according to any one of [1] to [7], containing a resin containing a structural unit represented by formula (IP) and a structural unit having an acid-labile group. [9] The resist composition according to any one of [1] to [8], containing a resin containing a structural unit having an acid-labile group, and the structural unit having an acid-labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025092460000004.tif46148 [In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 L a1 and L a2 each independently represent -O- or *-O-(CH2) k1 -CO-O-, k1 represents an integer of 1 to 7, and * represents a bonding site with -CO-. R a01 R a4and R a5 each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1 represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1’ represents any integer from 0 to 3. TIFF2025092460000005.tif31118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a18 -. R a18represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5. When na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4. When na11 is 2 or more, the plurality of R a17 may be the same as or different from each other. mc represents any integer from 0 to 2. TIFF2025092460000006.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH2) h3 -CO-L 54 -, h3 represents any integer from 1 to 4, and * represents the bonding site with L 51 . L 51 L 52 L 53 and L 54 each independently represent -O- or -S-. s1 represents any integer from 1 to 3. s1’ represents any integer from 0 to 3. TIFF2025092460000007.tif3479[In formula (a1-6), R a61represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represent an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site to Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 -, or *-CO-O-L a62 -, where * represents the bonding site to Ar, and L a61 and L a62 each independently represent an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.

[10] Further, the resist composition according to any one of [1] to [9], containing a resin containing a structural unit represented by the formula (a2-A). TIFF2025092460000008.tif30128 [In the formula (a2-A), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5. When nA2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4. When na21 is 2 or more, the plurality of R a27 may be the same as or different from each other. mc represents any integer from 0 to 2.] The resist composition according to any one of [1] to

[10] , containing the salt represented by the formula (B1). TIFF2025092460000009.tif1392[In the formula (B1), L b1 represents a single bond or a (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.]

[12] (1) Applying the resist composition according to any one of [1] to

[11] onto a substrate; (2) Drying the applied resist composition to form a composition layer; (3) Exposing the composition layer; (4) Heating the exposed composition layer; and (5) Developing the heated composition layer, a method for manufacturing a resist pattern.

[13] The ammonium carboxylate salt represented by the above formula (I).

[14] A resin containing a structural unit represented by the above formula (IP). [Effect of the Invention]

[0006] By using the resist composition containing the ammonium carboxylate salt of the present invention, a resist pattern can be manufactured with good line edge roughness (LER). [Embodiments for Carrying Out the Invention]

[0007] In this specification, the “(meth)acrylic monomer” means “at least one of an acrylic monomer and a methacrylic monomer”. Expressions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either. -CH2- contained in a hydrocarbon group or the like is -O-, -S-, -CO-, -SO-, -NR XWhen replaced by -(X is any sign) or -SO2-, the same examples apply to each group, and the number of carbon atoms before replacement is defined as the number of carbon atoms of hydrocarbon groups and the like. "Combined group" means a group formed by combining two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding form. "Derived from" or "derived" means that the polymerizable C=C bond contained in the molecule becomes a -C-C- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. An acid-labile group means a group that, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), causes a leaving group to leave and forms a hydrophilic group (e.g., a hydroxy group or a carboxy group). A base-labile group means a group that, when contacted with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), causes a leaving group to leave and forms a hydrophilic group (a carboxy group or a hydroxy group). Each group may have any position and number of hydrogen atoms contained in the group replaced by a bond depending on the number of substituents and the like. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the group being substituted. In this specification, "the solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0008] [Ammonium carboxylate salt represented by formula (I)] The present invention relates to an ammonium carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "ammonium carboxylate salt (I)" or "salt (I)"). Among salts (I), the side having a negative charge may be referred to as "anion (I)", and the side having a positive charge may be referred to as "cation (I)". TIFF2025092460000010.tif29132[Wherein all the symbols have the same meanings as described above.]

[0009] [Anion (I)] In formula (I), R 1 Examples of the hydrocarbon group include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, 2-ethylhexyl group, n-octyl group, n-nonyl group, n-decyl group, n-undecyl group and n-dodecyl group. Preferably, it is an alkyl group having 1 to 12 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, methylcyclohexyl group, dimethylcyclohexyl group, cycloheptyl group, cyclooctyl group, cycloheptyl group, cyclodecyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, 2-alkyladamantan-2-yl group, 1-(adamantan-1-yl)alkane-1-yl group, norbornyl group, methylnorbornyl group and isobornyl group and the like. Preferably, it is an alicyclic hydrocarbon group having 6 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include phenyl group, tosyl group, naphthyl group, biphenyl group, xylyl group, anthracenyl group and the like. Preferably, it is an aromatic hydrocarbon group having 6 to 18 carbon atoms, more preferably phenyl group or naphthyl group. Examples of the group formed by combination include aralkyl group, such as benzyl group, phenethyl group and the like. When -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO-, -NR 2 - or -SO2-, the total number of carbon atoms before replacement is defined as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more. R 2 is a hydrogen atom or an alkyl group. Examples of the alkyl group include the same groups as the alkyl group of R 1 within the range where the upper limit of the number of carbon atoms is 3. When -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO-, -NR 2-or as a group replacing -SO2-, a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), an amino group (a group in which -CH2- contained in a methyl group is replaced by -NR 2 -), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkylamino group (a group in which -CH2- contained in an alkyl group is replaced by -NR 2-replaced group), an alkanediyl-oxy group (a group in which any -CH2- in the alkanediyl group is replaced by -O-), an alkanediyl-oxycarbonyl group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -O-CO-), an alkanediyl-carbonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -CO-), an alkanediyl-carbonyl-oxy group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -CO-O-), an alkanediyl-thio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), an alkanediyl-sulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), an alkanediyl-amino group (a group in which any -CH2- in the alkanediyl group is replaced by -NH-), an alkanediyl-peptide group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -CO-NR 2 -replaced group), and groups formed by combining two or more of these groups, etc.

[0010] Examples of the alkoxy group include alkoxy groups having 1 to 23 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms of the alkoxy group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 23 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group, etc. The number of carbon atoms of the alkylthio group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 23 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 24 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 23 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 22 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group may be 2 to 12, preferably 2 to 6, more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group may be 1 to 12, preferably 2 to 6, more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group and the alkoxycarbonyloxy group may each be 2 to 12, preferably 2 to 6, more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 23 carbon atoms, such as methylthio group, ethylthio group, propylthio group and the like. The number of carbon atoms of the alkylthio group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 23 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylamino group include alkylamino groups having 1 to 23 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, octylamino group, 2-ethylhexylamino group, nonylamino group, decylamino group, undecylamino group and the like. The number of carbon atoms of the alkylamino group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 23 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group and the like. The number of carbon atoms of the alkanedioxy group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3.

[0011] Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 23 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 24 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyl-oxy group include alkanediyl-carbonyl-oxy groups having 2 to 23 carbon atoms, such as a methylene-carbonyl-oxy group, an ethylene-carbonyl-oxy group, a propanediyl-carbonyl-oxy group, and a butanediyl-carbonyl-oxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group may be 2 to 12, preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group may be 2 to 12, preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl-oxy group may be 2 to 12, preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 23 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms in the alkanediyl-thio group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 23 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, and a propylenesulfonyl group. The number of carbon atoms of the alkanediylsulfonyl group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 23 carbon atoms, such as a methyleneamino group, an ethylenamino group, and a propylenamino group. The number of carbon atoms of the alkanediylamino group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylpeptide group include alkanediylpeptide groups having 1 to 23 carbon atoms, such as a methylenepeptide group, an ethylenpeptide group, and a propylpeptide group. The number of carbon atoms of the alkanediylpeptide group may be 1 to 12, preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. In addition, -CH2- contained in a group combining an alicyclic hydrocarbon group or an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, -SO2- or -NR 2 Examples of the group replaced by - include the following groups. -O- or -CO- of the groups represented below may be replaced by -S-, -SO-, -SO2- or -NR 2 -, respectively. The bonding site can be at any position. TIFF2025092460000011.tif74167

[0012] R 1 Examples of the substituent that the hydrocarbon group of R may optionally have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Preferably, it is a fluorine atom. R 1Examples thereof include a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and a group formed by combining these (however, -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). A hydrogen atom and an alkyl group having 1 to 12 carbon atoms are more preferable.

[0013] Examples of the alicyclic hydrocarbon ring having 3 to 36 carbon atoms in ring W include rings represented by formula (a1-1) to formula (a1-11). An alicyclic hydrocarbon ring having 3 to 18 carbon atoms is preferable, and a ring represented by formula (a1-1), a ring represented by formula (a1-2) or a ring represented by formula (a1-3) is more preferable. The bonding site can be at any position. TIFF2025092460000012.tif25159[In formula (a1-1) to formula (a1-11), -CH2- contained in the ring may be replaced by -O-, -S-, -CO- or -SO2-, and a hydrogen atom contained in the ring may have a substituent.] Examples of the group in which -CH2- contained in the ring is replaced by -O-, -S-, -CO- or -SO2- include the following groups and the like. -O- or -CO- in the groups represented below may be replaced by -S- or -SO2-. The bonding site can be at any position. TIFF2025092460000013.tif15165

[0014] Examples of the substituent that ring W may have include an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon ring having 3 to 36 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, a halogen atom, a cyano group, and a nitro group. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, and a dodecyl group. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, an n-butoxy group, an n-pentyloxy group, an n-hexyloxy group, an n-octyloxy group, a 2-ethylhexyloxy group, an n-nonyloxy group, an n-decyloxy group, an n-undecyloxy group, and an n-dodecyloxy group. Examples of the alicyclic hydrocarbon group having 3 to 12 carbon atoms include the groups shown below. The bonding site can be at any position. TIFF2025092460000014.tif15122 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include a phenyl group and a naphthyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0015] X 0 Examples of the hydrocarbon group of X include a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups and bonding to ring W. Examples of the chain hydrocarbon group include a group formed by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, a propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decanyl group, an undecanyl group, a dodecanyl group, a tridecanyl group, a tetradecanyl group, a pentadecanyl group, a heptadecanyl group, and the like. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 20, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group formed by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentane group, a cyclohexane group, a cyclopentyl group, a cyclooctyl group, and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group, an adamantyl group, and the like. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group, a steroid group (steroid skeleton), and the like. Examples of the ring in which two rings are spiro-bonded include a spirocycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Further, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025092460000015.tif26165When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 7 to 12. Examples of the aromatic hydrocarbon group include an aryl group from which one hydrogen atom has been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorene group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 5 to 10. X 0 When -CH2- included in the hydrocarbon group of X is replaced by -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms in the hydrocarbon group. X 0Among the hydrocarbon groups, examples of groups in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -CO-O-), and the like. These replaced groups are the same as those exemplified by R 1 and can be the same as those exemplified. X 0 Among the hydrocarbon groups, examples of groups in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sultones, and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding positions of the alicyclic hydrocarbon groups mentioned in the following formulas can be at any positions. TIFF2025092460000016.tif49158X 0Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. Examples of the group in which -CH2- contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups and the like. The bonding site can be at any position. Examples of the group combining two or more of a chain hydrocarbon group, an alicyclic hydrocarbon group and an aromatic hydrocarbon group include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. X 0 Examples of the substituent that the hydrocarbon group of may have include a halogen atom, a cyano group and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like. X 0 When is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, X 0 By replacing -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of with -O-, -CO-, -S- or -SO2-, the hydrocarbon group of X 0 can substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like.

[0016] X 0The hydrocarbon group represented by is preferably an aliphatic hydrocarbon group having 2 to 72 carbon atoms which may have a substituent (wherein -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a hydrocarbon group having 6 to 72 carbon atoms including an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent. More preferably, it is an alicyclic hydrocarbon group having 3 to 36 carbon atoms, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group formed by combining two or more selected from the group consisting of a chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and an aromatic hydrocarbon group having 6 to 36 carbon atoms (the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, an alkyl fluoride group having 1 to 4 carbon atoms, or a hydroxy group, the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, an alkyl fluoride group having 1 to 4 carbon atoms, or a hydroxy group, and -CH2- contained in the alicyclic hydrocarbon group and the chain hydrocarbon group may be replaced by -O- or -CO-). In formula (I), X 0 When it is a group formed by combining a chain hydrocarbon group with an alicyclic hydrocarbon group or an aromatic hydrocarbon group, X 0 is more preferably a group represented by formula (X 0 -1). TIFF2025092460000018.tif1491 [In formula (X 0 -1), L c1 and L c2 each independently represent a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO- and may have a substituent. W c1 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH= contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. L c1, L of 1 or more c2 and W c1 The total carbon number of does not exceed 72. * and ** represent bonding sites, and * represents a bonding site with a carboxyanion.] In formula (X 0 -1), L c1 and L c2 As long as the chain hydrocarbon group has an upper limit on the number of carbon atoms, the chain hydrocarbon group exemplified by X 0 includes groups similar to the chain hydrocarbon group exemplified by the chain hydrocarbon group. In formula (X 0 -1) and, as long as the upper limit on the number of carbon atoms allows, the alicyclic hydrocarbon group and aromatic hydrocarbon group of W c1 include the alicyclic hydrocarbon group and aromatic hydrocarbon group exemplified by X 0 . L c1 and L c2 The substituents that the chain hydrocarbon group of may have and W c1 and W c2 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group of may have include groups similar to the substituents exemplified as the substituents that the hydrocarbon group of X 0 may have. L c1 and L c2 are preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (in the alkanediyl group, -CH2- contained therein may be replaced by -O- or -CO-. The alkanediyl group may be substituted by a fluorine atom.). L c1 is preferably a group combined with an ester bond that binds to a single bond, a methylene group, an ethylene group, or a fluorinated alkanediyl group having 1 to 4 carbon atoms and W c1 . In formula (X 0 -1), L c2 is preferably a group combined with an ester bond that binds to a single bond, a methylene group, an ethylene group, and an alkanediyl group having 1 to 3 carbon atoms and W c1 . In formula (X 0 -1), W c1The alicyclic hydrocarbon group and the aromatic hydrocarbon group are each independently preferably an alicyclic hydrocarbon group and an aromatic hydrocarbon group represented by the following. In the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented by the following, * and ** represent bonding sites. W c1 In the case of, * is L c1 represents the bonding site with. Also, L c2 ** not bonded to binds to a hydrogen atom or a substituent that W c1 may have. Further, in the alicyclic hydrocarbon group represented by the following, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, it preferably forms an ether ring, a lactone ring, a carbonate ester ring, a sultone ring or an acetal ring. TIFF2025092460000019.tif36168 formula (X 0 -1), W c1 are each independently a cyclopentane ring, a cyclohexane ring (in the cyclopentane ring and the cyclohexane ring, two -CH2- contained in the cyclopentane ring and the cyclohexane ring may be replaced by -O- or -S- to form an acetal ring or a thioacetal ring.), a norbornane ring (in the norbornane ring, -CH2- contained in the norbornane ring may be replaced by -O- or -S- to form an oxonorbornane ring or a thionorbornane ring.), a norbornane lactone ring, an adamantane ring, an adamantane lactone ring, a benzene ring, a naphthalene ring are preferred. Also, in the formula (X 0 -1), W c1is preferably a cycloalkane ring such as a cyclopentane ring, cyclohexane ring, norbornane ring or adamantane ring, a cycloalkane ring such as a cyclopentane ring, cyclohexane ring, cycloheptane ring or cyclooctane ring, or a spirocyclic hydrocarbon group (in the spirocyclic hydrocarbon group, two -CH2- groups contained in a cyclopentane ring, cyclohexane ring, cycloheptane ring or cyclooctane ring may be each replaced by -O- or -S- to form an acetal ring or a thioacetal ring), a benzene ring or a naphthalene ring.

[0017] Examples of the carboxylate anion in the carboxylate represented by the formula (I) include the carboxylate anions described below. TIFF2025092460000020.tif234154

[0018] [[Cation (I)]] R 3 , R 4 , R 5 and R 6 Examples of the hydrocarbon group having 1 to 20 carbon atoms for R include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of the alkyl group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert - butyl group, pentyl group, hexyl group, octyl group, nonyl group. Examples of the alkanediyl group include linear or branched alkanediyl groups. Linear alkanediyl groups such as methylene group, ethylene group, propane - 1,3 - diyl group, butane - 1,4 - diyl group, pentane - 1,5 - diyl group, hexane - 1,6 - diyl group; and ethane - 1,1 - diyl group, propane - 1,1 - diyl group, propane - 1,2 - diyl group, propane - 2,2 - diyl group, pentane - 2,4 - diyl group, 2 - methylpropane - 1,3 - diyl group, 2 - methylpropane - 1,2 - diyl group, pentane - 1,4 - diyl group, 2 - methylbutane - 1,4 - diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 9, more preferably from 1 to 4, and even more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the alicyclic hydrocarbon group include groups represented below. The bonding site can be at any position. TIFF2025092460000021.tif47168Specifically, examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the like. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and even more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group and binaphthyl group and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and even more preferably from 6 to 10. Among the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, groups formed by combining two or more of these groups include groups formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group - alkane diyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkane diyl group - *, and -CH2- contained in the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-.), groups formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group - alkane diyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkane diyl group - *, and -CH2- contained in the alkane diyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-.), and groups formed by combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *). * represents a bonding site. Examples of the aromatic hydrocarbon group-alkanediyl group-* include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group-alkanediyl group-* include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl and the like. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include cyclohexylphenyl group and the like. In addition, in the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any of these groups may be bonded to the benzene ring.

[0019] R 3 、R 4 and R 5 When -CH2- contained in the hydrocarbon group represented by is replaced by -O-, -CO-, -NR 6 -, -S- or -SO2-, the total carbon number of the hydrocarbon group is the carbon number before replacement. Also, the number may be one or two or more. When -CH2- contained in the hydrocarbon group is -O-, -CO-, -NR 6-、-S- or -SO2-replaced groups include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), an amino group (a group in which -CH2- contained in a methyl group is replaced by -NH-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), a carboxyl group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- contained in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- contained in an alkyl group having 2 to 12 carbon atoms is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- contained in an alkyl group is replaced by -CO-O-), an alkylamino group (a group in which -CH2- contained in an alkyl group is replaced by -NR 6 -replaced group), an alkylthio group (a group in which -CH2- contained in an alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- contained in an alkyl is replaced by -SO2-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a peptide group (a group in which -CH2-CH2- contained in an ethylene group is replaced by -CO-NR 6 -replaced group), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which any -CH2- contained in an alkanedioyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which any -CH2-CH2- contained in an alkanedioyl group is replaced by -O-CO-), an alkanedioylcarbonyl group (a group in which any -CH2- contained in an alkanedioyl group is replaced by -CO-), an alkanedioylcarbonyloxy group (a group in which any -CH2-CH2- contained in an alkanedioyl group is replaced by -CO-O-), an alkanedioylamino group (a group in which any -CH2- contained in an alkanedioyl group is replaced by -NR 6-replaced group), an alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), an alkanediylsulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, or a group formed by combining two or more of these groups, etc. As the alkoxy group, 1 to 19 carbon atoms are preferable, and specifically, a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. are mentioned. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include an alkoxycarbonyl group having 2 to 19 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, a butoxycarbonyl group, etc. Examples of the alkylcarbonyl group include an alkylcarbonyl group having 2 to 20 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group, etc. Examples of the alkylcarbonyloxy group include an alkylcarbonyloxy group having 2 to 19 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, etc. The number of carbon atoms of the alkoxycarbonyl group and the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylamino group include an alkylamino group having 1 to 19 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group. The number of carbon atoms of the alkylthio group and the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3, respectively. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 19 carbon atoms, such as methylene-oxy group, ethylene-oxy group, propanediyl-oxy group, butanediyl-oxy group, pentanediyl-oxy group and the like. The number of carbon atoms of the alkanediyl-oxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 19 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, and a butanediyl oxycarbonyl group. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 19 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, and a pentanediyl carbonyl group. Examples of the alkanediyl carbonyl oxy group include alkanediyl carbonyl oxy groups having 2 to 19 carbon atoms, such as a methylene carbonyl oxy group, an ethylene carbonyl oxy group, a propanediyl carbonyl oxy group, and a butanediyl carbonyl oxy group. The number of carbon atoms in the alkanediyl oxycarbonyl group, the alkanediyl carbonyl group, and the alkanediyl carbonyl oxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3, respectively. Examples of the alkanediyl amino group include alkanediyl thio groups having 1 to 19 carbon atoms, such as a methylene amino group, an ethylene amino group, and a propylene amino group. The number of carbon atoms in the alkanediyl amino group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl thio group include alkanediyl thio groups having 1 to 19 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms in the alkanediyl thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl sulfonyl group include alkanediyl sulfonyl groups having 1 to 20 carbon atoms, such as a methylene sulfonyl group, an ethylene sulfonyl group, and a propylene sulfonyl group. The number of carbon atoms in the alkanediyl sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 20 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as a butoxycarbonyloxy group. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 20 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 18 carbon atoms, such as a phenyloxy group.

[0020] In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -NR 6 -, -S- or -SO2- include the groups represented below. The bonding site can be at any position. TIFF2025092460000022.tif58167 Examples of the group in which -CH2- contained in the group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO-, -NR 6 -, or -SO2- include the groups represented below. The bonding site can be at any position. TIFF2025092460000023.tif38164R 6 Those in which -CH2- contained in the hydrocarbon group represented by R 3 is replaced by -O-, -CO-, -S- or -SO2- are the same as those exemplified by the hydrocarbon groups represented by R 4 and R 5 and R R 4 and R 5 、R 3 and L 20 、R3 and R 4 and L 20 、R 3 and R 4 and R 5 The cyclic hydrocarbon groups formed by the combination of and R respectively include cyclic ammonium cations containing nitrogen atoms, and the -CH2- contained in the cyclic ammonium cations may be replaced by -O-, -CO- or -NR 6 -. For the cyclic ammonium cation, the ammonium cation represented by the following is exemplified. R 4 and R 5 、R 3 and L 20 and, R 3 and R 4 and L 20 、R 3 and R 4 and R 5 The cyclic hydrocarbon groups formed by the combination of and R may each be an alicyclic hydrocarbon group or an aromatic hydrocarbon group. R 4 and R 5 、R 3 and L 20 and, R 3 and R 4 and L 20 、R 3 and R 4 and R 5 The number of carbon atoms of the cyclic hydrocarbon group formed by the combination of and R is preferably 4 to 12. R 4 and R 5 、R 3 and L 20 and, R 3 and R 4 and L 20 、R 3 and R 4 and R 5 The cyclic hydrocarbon formed by the combination of and R is preferably, for example, a cyclic ammonium cation represented by the following formula. * is X 20 is or L 20 represents a bond to a part of. TIFF2025092460000024.tif69151R 3 、R 4 and R 5The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The hydrocarbon group may have one substituent or multiple substituents.

[0021] R 3 , R 4 , R 5 and R 6 are each independently a hydrogen atom, a chain hydrocarbon group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 12 carbon atoms, or a group consisting of a chain hydrocarbon group having 1 to 8 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms, or R 3 and R 4 Or R 3 and R 4 and R 5 and each of them are bonded to form a cyclic hydrocarbon group having 3 to 12 carbon atoms, and are preferably a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a cyclic hydrocarbon group having 3 to 10 carbon atoms, or a group in which an alkyl group having 1 to 3 carbon atoms and a cyclic hydrocarbon group having 3 to 10 carbon atoms are combined, or R 3 and R 4 Or R 3 and R 4 and R 5 and each are bonded to form a cyclic hydrocarbon group having 3 to 10 carbon atoms. Here, in the above group, -CH2- contained in the chain hydrocarbon group, the cyclic hydrocarbon group and the alkyl group is preferably -O-, -S-, -NR 7 The chain hydrocarbon group, the cyclic hydrocarbon group and the alkyl group may have a substituent. When each group is bonded to form a cyclic hydrocarbon group, the cyclic hydrocarbon group may form one or more double bonds between two adjacent carbon atoms, and the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO- or -NR 7 - may be replaced by -, and -CH= contained in the cyclic hydrocarbon group may be replaced by -N=. Also, in one embodiment, R 3 , R4 and R 5 are each independently a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the aralkyl group may be replaced by -O- or -CO-). R 3 and R 4 When they are a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, R 5 is preferably a phenyl group which may have a substituent or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the aralkyl group may be replaced by -O- or -CO-). R 3 、R 4 、R 5 and L 20 Among them, any two or three of them may be bonded to form a ring containing N + . The ring may be a 5- or 6-membered ring containing -O-, -CO-, -NR N - or -N= in the ring-constituting atoms, and may be a monocyclic ring or a condensed ring (R N represents an alkyl group having 1 to 4 carbon atoms). As one embodiment, R 3 and L 20 form a 5- or 6-membered alicyclic hydrocarbon group containing N + (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-), and R 4 and R 5 are each independently a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the aralkyl group may be replaced by -O- or -CO-) is preferred. Also, in another embodiment, R 4 and R 5 form a 5- or 6-membered alicyclic hydrocarbon group containing N + (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-), and R 3is a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, a phenyl group which may have a substituent, or an aralkyl group having 7 to 12 carbon atoms (wherein -CH2- contained in the aralkyl group may be replaced by -O- or -CO-). Further, in another aspect, R 3 , R 4 and R 5 preferably form an aromatic hydrocarbon group of a 5- or 6-membered ring containing N + (wherein -CH= contained in the aromatic hydrocarbon group may be replaced by -N=). R 6 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and even more preferably a hydrogen atom.

[0022] Examples of the halogen atom of R 20 include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like. Examples of the alkyl group of R 20 include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group and the like. Preferably, it is an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group. Examples of the alkyl group having 1 to 6 carbon atoms having a halogen atom of R 20 include a fluorinated alkyl group having 1 to 6 carbon atoms, a chlorinated alkyl group having 1 to 6 carbon atoms, a brominated alkyl group having 1 to 6 carbon atoms, an iodinated alkyl group having 1 to 6 carbon atoms and the like. Specifically, examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, a periodomethyl group and the like. The number of carbon atoms of the alkyl group, alkyl fluoride group, alkyl chloride group, alkyl bromide group, and alkyl iodide group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R 20 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group. R 21 Examples of the alkyl group of 20 include the same groups as the alkyl group of R X 20 In the case of the group represented by *-Ax-Ph-Ay-**, is preferably a linking group represented by the following formula (X20). TIFF2025092460000025.tif3451[In formula (X20), Ax represents the bonding species that binds to the carbon atom to which R 20 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. Ay represents the bonding species that binds to L 20 or a nitrogen atom, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents any integer from 0 to 4. When mx is an integer of 2 or more, the plurality of Rx may be the same or different from each other.] When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. When Ax and Ay are amide bonds, -NR 21 - is preferred. Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position relative to the bonding position of Ax, and more preferably the p-position. X 20 Examples of [X 20 -1] to [X 20 -10] include groups represented by the following formulas. * represents the bonding site with the carbon atom to which -R 20 is bonded. ** represents the bonding site with L 20 or a nitrogen atom. TIFF2025092460000026.tif43162 [In the formulas [X 20 -1] to [X 20 -10], all symbols have the same meaning as described above.] Specific examples of the groups represented by the formulas [X 20 -1] to [X 20 -10] include the following groups. TIFF2025092460000027.tif87163 Among them, X 20 is preferably a single bond or a group represented by the formulas [X 20 -1'] and [X 20 -3'] to [X 20 -10'], more preferably a single bond or a group represented by the formulas [X 20 -1'], [X 20 -4'], [X 20 -5'], [X 20 -6'] and [X 20 -10'], and even more preferably a single bond, a group represented by the formula [X 20 -1'], a group represented by the formula [X 20 -5'] or a group represented by the formula [X 20 -6'].

[0023] L 20Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, etc., and a hydrocarbon group formed by combining two or more of these groups may also be used. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. may be mentioned. Examples of the alkenediyl group include ethenediyl group, propenediyl group, isopropenediyl group, butenediyl group, isobutenediyl group, tert-butenediyl group, pentenediyl group, hexenediyl group, heptenediyl group, octenediyl group, isooctenediyl group, nonenediyl group. Examples of the alkynediyl group include ethynediyl group, propynediyl group, isopropynediyl group, butynediyl group, isobutynediyl group, tert-butynediyl group, pentynediyl group, hexynediyl group, octynediyl group, nonynediyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic, polycyclic or spiro ring. Examples of the divalent alicyclic hydrocarbon group include the groups represented below. The bonding site can be at any position. TIFF2025092460000028.tif47167Specifically, examples of the monocyclic divalent alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, cyclooctane-1,5-diyl group, etc. Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. Examples of the hydrocarbon group formed by combining two or more types include groups formed by combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, such as -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc.

[0024] L 20 The -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms of L may be replaced by -O-, -S-, -CO- or -SO2-. L 20 When the hydrocarbon group having 1 to 36 carbon atoms of L has a substituent or the -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. Examples of the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in the methyl group is replaced by -S-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), a sulfonyl group (a group in which -CH2- contained in the methylene group is replaced by -SO2-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), a thio group (a group in which -CH2- contained in the methylene group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -CO-O-), an alkylthio group (a group in which -CH2- at any position contained in the alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -SO2-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group,Examples thereof include an aromatic hydrocarbon group-carbonyl oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group formed by combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, a butoxycarbonyl group, and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group may each be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanedioxy group, a butanedioxy group, a pentanedioxy group, and the like. The number of carbon atoms of the alkanedioxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 35 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, a butanediyl oxycarbonyl group, and the like. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 36 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, a pentanediyl carbonyl group, and the like. Examples of the alkanediyl carbonyloxy group include alkanediyl carbonyloxy groups having 2 to 35 carbon atoms, such as a methylene carbonyloxy group, an ethylene carbonyloxy group, a propanediyl carbonyloxy group, a butanediyl carbonyloxy group, and the like. The number of carbon atoms of the alkanediyl oxycarbonyl group, the alkanediyl carbonyl group, and the alkanediyl carbonyloxy group may each be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, and the like. The number of carbon atoms of the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, and a propylenesulfonyl group. The number of carbon atoms of the alkanediylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, and a propylenethio group. The number of carbon atoms of the alkanediylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms of the cycloalkoxy group and the cycloalkylalkoxy group may be 3 to 17, preferably 3 to 11, and more preferably 3 to 6. The number of carbon atoms of the alkoxycarbonyloxy group may be 3 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 36 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 35 carbon atoms, such as a phenyloxy group. In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the groups represented below. The -O- or -CO- in the groups represented below may be replaced by -S- or -SO2-. The bonding site can be at any position. TIFF2025092460000029.tif46167 Examples of the group in which -CH2- contained in the group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0025] L 20 Examples of the substituent that the hydrocarbon group of L may have include a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and a group combining these. L 20 Due to the group in which -CH2- contained in the hydrocarbon group of L is replaced by -O- or -CO-, L 20 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 20 The hydrocarbon group of L having 1 to 36 carbon atoms may have one substituent or a plurality of substituents.

[0026] L 20is a single bond, an alkanediyl group having 1 to 12 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), preferably a single bond, an alkanediyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), more preferably a single bond, an alkanediyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-) A phenylene group which may have a substituent, a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a phenylene group which may have a substituent (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-) is more preferable, and a single bond or an alkanediyl group having 1 to 4 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-) is even more preferable.

[0027] Examples of the cation of the salt (I) include cations represented by the following formulas (I-c-1) to (I-c-45). In the following structural units, R 20 structural units in which the methyl group corresponding to is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group, and structural units in which the hydrogen atom corresponding to R 20 is replaced by a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (I). TIFF2025092460000030.tif184162

[0028] The ammonium carboxylate salt (I) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. As the ammonium carboxylate salt (I), preferably, a combination of an anion represented by any of the formulas (I-a-1), (I-a-2), (I-a-5), (I-a-11) to (I-a-22) and a cation represented by the formulas (I-c-1) to (I-c-45) is exemplified.

[0029] Examples of the ammonium carboxylate salt (I) include the salts described in Table 1. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation. For example, the ammonium carboxylate salt (I-1) means a salt composed of the anion represented by the formula (I-a-1) and the cation represented by the formula (I-c-1), and represents the salts shown below. TIFF2025092460000031.tif3487 [Table 1] TIFF2025092460000033.tif52146

[0030] Among them, as the ammonium carboxylate salt (I), a salt obtained by combining an anion represented by any one of the formula (I-a-1), formula (I-a-2), formula (I-a-5), formula (I-a-11) to formula (I-a-22) and a cation represented by any one of the formula (I-c-1) to formula (I-c-45) is preferable.

[0031] <Method for producing ammonium carboxylate salt (I)> The ammonium carboxylate salt (I) can be produced, for example, by reacting a salt represented by the formula (I-a) and a compound represented by the formula (I-b) in a solvent under a base catalyst. TIFF2025092460000034.tif27166 (In the formula, all symbols have the same meanings as described above.) Examples of the base catalyst include pyridine and the like. Examples of the solvent include methanol, chloroform and the like. The reaction temperature is usually 5°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours.

[0032] Examples of the salt represented by the formula (I-a) include the salts represented below, and can also be easily produced by known production methods. The compound represented by formula (I-b), such as o-methylhydroxyamine hydrochloride, can be easily obtained on the market.

[0033] [Structural unit derived from ammonium carboxylate salt represented by formula (I)] The structural unit derived from the ammonium carboxylate salt represented by formula (I) is a structural unit represented by formula (IP) (hereinafter sometimes referred to as "structural unit (IP)"). TIFF2025092460000036.tif29140[Wherein all the symbols have the same meanings as described above.] The structural unit (IP) shows a state in which the double bond of CH2=C-R contained in the ammonium carboxylate salt (I) is cleaved. 20 Similar to the ammonium carboxylate salt (I), the structural unit (IP) can function as a quencher.

[0034] [Resin containing structural unit derived from ammonium carboxylate salt represented by formula (I)] The resin of the present invention is a resin containing a structural unit (IP) derived from an ammonium carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "resin (Ap)"). The resin (Ap) may be a homopolymer containing one kind of structural unit (IP) or a copolymer containing two or more kinds of structural units (IP). In addition, the resin (Ap) may contain structural units other than the structural unit (IP). Examples of the structural units other than the structural unit (IP) include a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)") and a structural unit other than the structural unit having an acid-labile group. Examples of the structural unit other than the structural unit having an acid-labile group include a structural unit having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)") and structural units known in the art. The content of the structural unit (IP) is 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and still more preferably 1 mol% or more with respect to the total amount of the resin (Ap). Also, it is 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and still more preferably 1 to 10 mol%.

[0035] In particular, when the resin (Ap) is used in a resist composition as described later, in addition to the structural unit (IP), it can contain a structural unit (a1), a structural unit (s), and / or other structural units. For example, it is preferable that the resin (Ap) further contains the structural unit (a1). In addition, when the resin (Ap) is used in a resist composition as described later, regardless of whether it contains the structural unit (a1), it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)"). Hereinafter, the resin (Ap) and / or the resin (A) may sometimes be referred to as "resin (A) etc.". It is preferable that the resin (Ap) and the resin (A) further contain structural units other than the structural unit (a1).

[0036] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile group contained in the resin (A) or the like is preferably a group represented by the formula (1) (hereinafter also referred to as group (1)) and / or a group represented by the formula (2) (hereinafter also referred to as group (2)). TIFF2025092460000037.tif1988[In the formula (1), R a1 、R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025092460000038.tif2171[In the formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0037] R a1 、R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and the like. Ra1 and R a2 and R a3 Examples of the alkenyl group in R, R, and R include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. R a1 R a2 and R a3 The alicyclic hydrocarbon group in R, R, and R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group, and the following group (*represents the bonding site), etc. The number of carbon atoms of the alicyclic hydrocarbon group of R, R, and R is preferably 3 to 16. a1 R a2 and R a3 Examples of the aromatic hydrocarbon group in R, R, and R include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. TIFF2025092460000039.tif10150R a1 R a2 and R a3 Examples of the combined group include a group combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl group such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025092460000040.tif27138

[0038] R a1’ 、R a2’ and R a3’ Examples of the hydrocarbon group in R , R a1 , R a2 and R a3 include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. R a2’ and R a3’ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ includes the following groups. * represents the bonding site. TIFF2025092460000041.tif18130R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ Examples of the halogen atom that R , R a1’ , R a2’ may have include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. Preferably, na’ is 0.

[0039] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 are alkyl groups, ma = 0, and na = 1. As such a group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma = 0, and na = 1. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1. Specific examples of the group (1) include the following groups. * represents a bonding site. TIFF2025092460000042.tif150162

[0040] Specific examples of the group (2) include the following groups. * represents a bonding site. TIFF2025092460000043.tif55153

[0041] The monomer (a1) is preferably a monomer having an acid-labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid-labile group. Among the (meth)acrylic monomers having an acid-labile group, those having an alicyclic hydrocarbon group with 5 to 20 carbon atoms are preferable. If a resin (A) having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0042] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one structural unit selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025092460000044.tif46148 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meaning as above.]

[0043] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5 Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , Ra4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 、L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 、R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in R a1 、R a2 and R a3 are the same groups as those exemplified for the R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in R a1 、R a2 and R a3 are the same groups as those exemplified for the R R a02 、R a03 、and R a04 The alkyl group in R R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and still more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a02 、R a03 、R a04 、Ra6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of is preferably 5 to 12, more preferably 5 to 10. R a02 、R a03 、R a04 、R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of is preferably 6 to 12, more preferably 6 to 10. For the group combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0044] Examples of the structural unit (a1-0) include structural units represented by any of formulae (a1-0-1) to (a1-0-24) and structural units in which the methyl group corresponding to R in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Structural units represented by any of formulae (a1-0-1) to (a1-0-10), formula (a1-0-13), formula (a1-0-14), formulae (a1-0-19) to (a1-0-21) are preferred. a01 Examples of the structural unit (a1-0) include structural units represented by any of formulae (a1-0-1) to (a1-0-24) and structural units in which the methyl group corresponding to R in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Structural units represented by any of formulae (a1-0-1) to (a1-0-10), formula (a1-0-13), formula (a1-0-14), formulae (a1-0-19) to (a1-0-21) are preferred. TIFF2025092460000045.tif119160

[0045] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among them, structural units represented by any of formulae (a1-1-1) to (a1-1-7) and structural units in which the methyl group corresponding to R in the structural unit (a1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group are preferred, and structural units represented by any of formulae (a1-1-1) to (a1-1-4) are more preferred. a4 Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among them, structural units represented by any of formulae (a1-1-1) to (a1-1-7) and structural units in which the methyl group corresponding to R in the structural unit (a1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group are preferred, and structural units represented by any of formulae (a1-1-1) to (a1-1-4) are more preferred. TIFF2025092460000046.tif38168

[0046] Examples of the structural unit (a1-2) include structural units represented by any of formulae (a1-2-1) to (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6) and formulae (a1-2-10) to (a1-2-20) are preferred. a5 Examples of the structural unit (a1-2) include structural units represented by any of formulae (a1-2-1) to (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6) and formulae (a1-2-10) to (a1-2-20) are preferred. TIFF2025092460000047.tif91164

[0047] When resin (A) etc. contain structural unit (a1-0) and / or structural unit (a1-1) and / or structural unit (a1-2), their total content rate is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, yet even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When resin (A) etc. contain structural unit (a1-0), its content rate is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, yet even more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on all the structural units of resin (A) etc. Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, it is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When resin (A) etc. contain structural unit (a1-1) and / or structural unit (a1-2), their total content rate is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is mentioned, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and still even more preferably 20 to 70 mol%.

[0048] Examples of the structural unit having group (2) in structural unit (a1) include the structural unit represented by formula (a1-4) (hereinafter, may be referred to as "structural unit (a1-4)"). TIFF2025092460000048.tif31118[In formula (a1-4), all the symbols have the same meanings as described above respectively.]

[0049] R a1 and R a17 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 etc. are the same as those exemplified by R of formula (a1-0). R a1 R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a17Examples of the alkoxy group in [compound name] include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyloxy group, and hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17 Examples of the alkoxyalkyl group in [compound name] include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, and tert-butoxymethyl group. The alkoxyalkyl group may be an alkoxyalkyl group having 2 to 8 carbon atoms, preferably an alkoxyalkyl group having 2 to 4 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a17 Examples of the alkoxyalkoxy group in [compound name] include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, and tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, still more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17 Examples of the alkylcarbonyl group in [compound name] include acetyl group, propionyl group, and butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and still more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group in [compound name] include acetyloxy group, propionyloxy group, and butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and still more preferably an acetyloxy group. R a17is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0050] A a11 Examples of the alkanediyl group of include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, even still more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group of include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group and tert-butyl group. A a11 When -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the alkanediyl group. A a11 When -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NRa18 - As the group replaced by, a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group (where -CH2- contained in the methyl group is replaced by -NR a18 - group), an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group (where any -CH2- at an arbitrary position contained in the alkyl group is replaced by -NR a18 - group), a peptide group (where -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18 - group), an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group (where any -CH2- at an arbitrary position contained in the alkanediyl group is replaced by -NR a18 - group), etc. may be mentioned. These replaced groups include those similar to those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a11 - As the group where -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a18 - group, *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-A a12 -O-, *-O-A a12-CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - is exemplified. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NR a18 - is preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a1 is bonded. The alkanediyl group of A a12 includes, within the range allowed by the upper limit of the number of carbon atoms, alkanediyl groups similar to A a11 is exemplified. A a11 is a single bond, *-CO-O- or *-CO-O-A a12 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0051] R a34 , R a35 and R a36 The hydrocarbon groups in include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these. Examples of the alkyl group include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group and the like. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site). Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, phenanthryl group and the like. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group and the like), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group and the like), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group and the like), aryl-cycloalkyl groups such as phenylcyclohexyl group and the like. In particular, R a36 Examples thereof include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 And R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other together with the -C-O- to which they are bonded include, for example, the following groups. * represents the bonding site, and one is the bonding site with R a34 and the other is the bonding site with R TIFF2025092460000050.tif15105

[0052] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group formed by combining these, more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. R a36 The alkyl group and the alicyclic hydrocarbon group in are preferably unsubstituted. R a36 The aromatic hydrocarbon group in preferably has an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0053] -OC(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) is eliminated by contact with an acid (for example, p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 In the case of a benzene ring, it may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a11 . Among them, at least one is preferably bonded to the o-position or p-position, more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a11 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a11 is at the 1-position, at least one is preferably bonded to the 3rd to 6th positions, more preferably bonded to the 3rd or 4th position. When the bonding position of A a11 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, more preferably bonded to the 5th or 6th position.

[0054] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-42) and R in the structural unit (a1-4) a1 Examples of the structural unit in which the hydrogen atom corresponding to R is replaced with a halogen atom, a haloalkyl group or an alkyl group include structural units represented by formula (a1-4-1) to formula (a1-4-5), formula (a1-4-10), formula (a1-4-13), formula (a1-4-14), formula (a1-4-19), and formula (a1-4-20). TIFF2025092460000051.tif228165

[0055] When the resin (A) or the like contains the structural unit (a1-4), the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, still more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol% based on the total of all the structural units of the resin (A) or the like.

[0056] Examples of the structural unit derived from the (meth)acrylic monomer having the group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025092460000052.tif4558[In formula (a1-5), all the symbols have the same meanings as described above.]

[0057] R a8 Examples of the halogen atom in R and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom are the same as those exemplified for R in formula (a1-0). a01 In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L​53 Of these, it is preferable that one is -O- and the other is -S-. For s1, 1 is preferable. For s1', any integer from 0 to 2 is preferable. Z a1 A single bond or *-CH2-CO-O- is preferable.

[0058] Examples of the structural unit (a1-5) include structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by Formula (a1-5-1) to Formula (a1-5-4) are preferable, and the structural unit represented by Formula (a1-5-1) or Formula (a1-5-2) is more preferable. TIFF2025092460000053.tif33133

[0059] When the resin (A) etc. contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on all the structural units of the resin (A) etc. Also, it is 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is even more preferable.

[0060] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by Formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025092460000054.tif3481[In Formula (a1-6), all the symbols have the same meanings as described above.]

[0061] R a61 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R of formula (a1-0) a01 include the same ones as those exemplified above. R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 、R a63 、R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group or an ethyl group. R a62 、R a63 and R a64 Examples of the cyclic hydrocarbon group in include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12. TIFF2025092460000055.tif32110

[0062] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group and the like. L a61 and L a62 are each independently preferably a methylene group or an ethylene group. X a61is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L a61 -, more preferably a single bond.

[0063] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms in Ar include a phenylene group, 1-naphthylene group, 2-naphthylene group, 1-anthrylene group, 9-anthrylene group, biphenylene group, 1-phenanthrylene group, 2-phenanthrylene group, and the like. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, hydroxy group, alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkoxy group having 2 to 12 carbon atoms, alkylcarbonyl group having 2 to 4 carbon atoms, alkylcarbonyloxy group having 2 to 4 carbon atoms, acryloyloxy group, or methacryloyloxy group.

[0064] Examples of the halogen atom include a fluorine atom, iodine atom, chlorine atom, bromine atom, and the like. Examples of the alkyl group include a methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyloxy group, hexyloxy group. The alkoxy group preferably has 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. Preferred substituents include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0065] Examples of the structural unit (a1-6) include structural units represented by Formula (a1-6-1) to Formula (a1-6-44), with the structural units represented by Formula (a1-6-1) to Formula (a1-6-9) being preferred, the structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7) or Formula (a1-6-8) being more preferred, and the structural units represented by Formula (a1-6-1) or Formula (a1-6-2) being even more preferred. TIFF2025092460000056.tif227164

[0066] In the structural units represented by Formula (a1-6-1) to Formula (a1-6-9), Formula (a1-6-16) to Formula (a1-6-21), Formula (a1-6-28) to Formula (a1-6-30), and Formula (a1-6-37) to Formula (a1-6-43), R a61 Structural units in which the hydrogen atom corresponding to is replaced by a methyl group, a halogen atom, a haloalkyl group, etc., and in the structural units represented by Formula (a1-6-10) to Formula (a1-6-15), Formula (a1-6-22) to Formula (a1-6-27), and Formula (a1-6-31) to Formula (a1-6-36), R a61 Structural units in which the methyl group corresponding to is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, etc. are also included as the structural unit (a1-6).

[0067] When the resin (A) contains the structural unit (a1-6), its content is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, still more preferably 10 mol% or more, even more preferably 20 mol% or more, even still more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on all the structural units of the resin (A). Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, even still more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0068] Moreover, examples of the structural unit (a1) also include the following structural units. TIFF2025092460000057.tif33167

[0069] When the resin (A) etc. contains the structural units represented by the formulas (a1-7-1) to (a1-7-7), its content is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, even still more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, even still more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, even still more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0070] Moreover, examples of the structural unit (a1) also include the following structural units. When the resin (A) etc. contain structural units represented by the formulas (a1-8-1) to (a1-8-3), the content rate thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferable, 15 to 55 mol% is more preferable, 20 to 50 mol% is still more preferable, 20 to 45 mol% is even more preferable, and 20 to 40 mol% is particularly preferable.

[0071] 〈Structural unit(s)〉 The structural unit(s) is / are derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer that leads to the structural unit(s), a monomer having no acid-labile group known in the resist field can be used. As the structural unit(s), it is preferable to have a hydroxy group, a carboxy group or a lactone ring. By using a resin containing a structural unit having a hydroxy group or a carboxy group and not having an acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and not having an acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, the structural unit(s) includes a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"), and the like.

[0072] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group. TIFF2025092460000059.tif33106[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. L a22represents a linear hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is any integer of 2 or more, a plurality of L a22 may be the same as or different from each other.

[0073] R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0074] A a21Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 , the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. A a21 Examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 include hydroxy group (the group in which -CH2- contained in the methyl group is replaced by -O-), carboxy group (the group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), carbonyl group (the group in which -CH2- contained in the methylene group is replaced by -CO-), oxy group (the group in which -CH2- contained in the methylene group is replaced by -O-), amino group (the group in which -CH2- contained in the alkanediyl group is replaced by -NR a28-replaced group), alkoxy group (a group in which any -CH2- in the alkyl group is replaced by -O-), alkoxycarbonyl group (a group in which any -CH2-CH2- in the alkyl group is replaced by -O-CO-), alkylcarbonyl group (a group in which any -CH2- in the alkyl group is replaced by -CO-), etc., alkylamino group (a group in which -CH2- contained in the alkyl group is replaced by -NR a28 -replaced group), peptide group (a group in which -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a28 -replaced group), alkanediylamino group (a group in which any -CH2- in the alkanediyl group is replaced by -NR a28 -replaced group). These replaced groups include those similar to those described above and those described below within the range allowed by the upper limit of the number of carbon atoms. Also, Examples of the alkylamino group include alkylamino groups having 1 to 19 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, and octylamino group. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylthio groups having 1 to 19 carbon atoms, such as methyleneamino group, ethyleneamino group, and propyleneamino group. The number of carbon atoms of the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a21 The group in which -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a28 -replaced groups include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22-O-CO-, *-CO-NR a28 - etc. Among these, *-CO-O-, *-CO-O-A a22 -CO-O- or *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 may be the same alkanediyl group as A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is a single bond, *-CO-O- or *-CO-O-A a22 -CO-O- is preferred, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0075] L a21 The hydrocarbon group in is a (na2 + 1)-valent hydrocarbon group, and examples include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of include divalent to hexavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkanepentayl groups, and alkanhexayl groups. L a21 Examples of the alkanediyl group of include, for example, the same alkanediyl group as A a21 etc. L a21Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, a heptadecanetriyl group, and the like. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, a heptadecanetetrayl group, and the like. Examples of the alkanepentayl group include a methanepentayl group, an ethanepentayl group, a propanepentayl group, a butanepentayl group, a pentanepentayl group, a hexanepentayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. L a21 The number of carbon atoms of the chain hydrocarbon group of L is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic divalent alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025092460000060.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentayl group, a cycloalkanehexayl group, and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by bonding sites can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in L include divalent to hexavalent aromatic hydrocarbon groups such as arylene group, arenetriyl group, arenetetrayl group, arenepentayl group, arenexayl group. Specifically, phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalenetriyl group, anthracenetriyl group, biphenylenetriyl group, phenanthrenetriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, etc. can be mentioned. Also, groups in which one or more of the hydrogen atoms of the above-described group are replaced with a bonding site, etc. can be mentioned. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, etc. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be A a21 and L a22 and may be bonded thereto. Examples of the trivalent to pentavalent alicyclic hydrocarbon group and aromatic hydrocarbon group include groups in which 1 to 3 hydrogen atoms are removed from the above-described divalent group to form a bond. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group,Examples include an aromatic hydrocarbon group-carbonyl oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group formed by combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups are replaced at the bonding site. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0076] Examples of a group in which -CH2- contained in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. Examples of a group in which -CH2- contained in the combined group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. The bonding site can be at any position. TIFF2025092460000061.tif26164L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a21 By having a halogen atom as a substituent, the hydrocarbon group in can substantially have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. A haloalkyl group having 1 to 4 carbon atoms is preferred, and a haloalkyl group having 1 to 3 carbon atoms is more preferred. L a21 By including a branched chain hydrocarbon group, the hydrocarbon group of substantially becomes a21It can have substituents such as an alkyl group. Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group and the like. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The -CH2- contained in the hydrocarbon group of L is replaced by -O- or -CO- a21 Substantially, L can have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group and the like. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. These groups include those similar to those exemplified in this specification. L a21Examples of the substituent that the hydrocarbon group in [compound name] may have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Preferred are a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferred are a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferred are a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferably, it is a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. Also, when a21 the alkanediyl group of L a23 is replaced by -O- or -CO- etc., for example, *-L a21 -X a23 -(L a21 represents an alkanediyl group having 1 to 8 carbon atoms, X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents the bonding site with A L a21is preferably a group formed by combining a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-); more preferably, it is a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-).

[0077] L a22Examples of the linear hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO- include the same groups as those exemplified in the present specification. L a22 The fluorine atom that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. TIFF2025092460000062.tif68168

[0078] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as an exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. Further, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural units (a2-B), (a2-C), or (a2-D) described later. The structural unit (a2) may contain one kind alone or two or more kinds.

[0079] In the structural unit (a2), L a21 In the case where is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include the structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025092460000063.tif30128[In the formula (a2-A), all the symbols have the same meanings as described above.]

[0080] R a2 and A a21 are each a group similar to those exemplified in the formula (a2). R a27 Examples of the halogen atom of include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 may be 1, 2, 3, or 4, preferably 1, 2, or 3, and more preferably 1 or 2. na21 is preferably 0, 1, or 2, and more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, and more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A a21 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a21 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a21 is at the 1-position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a21 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0081] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), and structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), where the methyl group corresponding to R in the structural unit (a2-A) a2 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025092460000064.tif107170

[0082] When the resin (A) contains the structural unit (a2-A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is a compound that induces the structural unit (a2-A) (for example, -CH2-C(-R of the structural unit (a2-A) a2 )- is CH2=C(-R of the double bond before cleavage a2By polymerizing a compound (such as (a2-A')) in the state of , it can be incorporated into the resin (A). Further, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin (A) by treating with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin (A) by treating with an alkali such as tetramethylammonium hydroxide.

[0083] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include the structural unit represented by the formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), the structural unit represented by the formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), or the structural unit represented by the formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025092460000066.tif45100[In the formula (a2-B) and the formula (a2-C), R a2 represents the same meaning as in the formula (a2). R a27 represents the same meaning as in the formula (a2-A). L a25 is -O- or *-O-(CH2) k2 -CO-O- represents, and k2 represents any integer from 1 to 7. * represents the bonding position with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents any integer from 1 to 5. When nB2 is 2 or more, a plurality of Xs a2 may be the same as or different from each other. nB22 represents any integer from 0 to 8. When nB22 is 2 or more, a plurality of Rs a27 may be the same as or different from each other. nC22 represents any integer from 0 to 10. When nC22 is 2 or more, a plurality of Rs a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH2) f1 -CO-O- (wherein f1 represents any integer from 1 to 4), and more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated C1-C4 alkyl group, a C1-C4 alkoxy group or a C2-C8 alkoxyalkoxy group, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0084] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and Rs in the following structural units a2Examples of structural units in which the methyl group or hydrogen atom corresponding thereto is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include those represented by any of Formula (a2-B-1) to Formula (a2-B-5) and Formula (a2-C-1) to Formula (a2-C-9). Among them, structural units represented by any of Formula (a2-B-1) to Formula (a2-B-5) and Formula (a2-C-1) to Formula (a2-C-9) are preferable. When the resin (A) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (A). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, still more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, still more preferably 1 to 20 mol% or 2 to 20 mol%, and even more preferably 1 to 10 mol% or 2 to 10 mol%.

[0085] Examples of the structural unit having an alcoholic hydroxy group in the structural unit (a2) include a structural unit represented by Formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025092460000068.tif51106[In Formula (a2-D), R a2 and A a21 each represent the same meaning as in Formula (a2). R a27 represents the same meaning as in Formula (a2-A). R a21 and R a22 each independently represent a fluoroalkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, a plurality of Rs a27 may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.

[0086] R a21 and R a22 As the alkyl fluoride groups having 1 to 4 carbon atoms, each independently, a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 As the alkanediyl group of L, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, etc. may be mentioned. L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxyethoxy group, still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, still more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded at the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, and even more preferably 0.

[0087] As the structural unit (a2-D), it is more preferable that it is a structural unit represented by the following formula (a2-D1) (hereinafter, may be referred to as "structural unit (a2-D1)"). TIFF2025092460000069.tif51107[In formula (a2-D1), R a2 、A a21 、R a27 、na2 and na21 each represent the same meaning as formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0088] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025092460000070.tif62167

[0089] In the structural units represented by formula (a2-D-1) to formula (a2-D-8), structural units in which the hydrogen atom corresponding to R a2 is replaced with a methyl group or the like, and in the structural units represented by formula (a2-D-9) to formula (a2-D-16), structural units in which the methyl group corresponding to R a2 is replaced with a hydrogen atom or the like can also be cited as specific examples of the structural unit (a2-D). Among them, the structural units represented by formula (a2-D-1) to formula (a2-D-8) are preferred, the structural units represented by formula (a2-D-1) to formula (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0090] When the resin (A) etc. contain the structural unit (a2-D), the content is preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (A) etc. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0091] 〈Structural unit (a3)〉 The lactone ring possessed by the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, γ-butyrolactone ring, δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, the structural unit represented by the following formula (a3-2)) can be mentioned.

[0092] The structural unit (a3) is preferably a structural unit represented by the formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025092460000071.tif48155[In the formula (a3-1), formula (a3-2), formula (a3-3), and formula (a3-4), L a4 、L a5 and L a6 each independently represents a group represented by -O- or *-O-(CH2) k3 -CO-O- (k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding position to the carbonyl group. R a18 R a19 R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 R a23 and R a25 each independently represents a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents any integer from 0 to 5. q1 represents any integer from 0 to 3. r1 represents any integer from 0 to 3. w1 represents any integer from 0 to 8. When p1, q1, r1 and / or w1 is 2 or more, a plurality of R a21 R a22 R a23 and / or R a25 may be the same as or different from each other.

[0093] R a21 R a22 R a23 and R a25 Examples of the aliphatic hydrocarbon group in R R a18 R a19 R a20 and R a24 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group. R a18 Ra19 , R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in R a01 etc. are the same as those exemplified by R of formula (a1-0). L a8 and L a9 Examples of the alkanediyl group in L L a4 ~L a6 are each independently preferably -O- or, *-O-(CH2) k3 -CO-O- wherein k3 is an integer of any one of 1 to 4, more preferably -O- and, *-O-CH2-CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 , R a19 , R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably an integer of any one of 0 to 2, more preferably 0 or 1. w1 is preferably any integer from 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)'. TIFF2025092460000072.tif3848 (wherein R a24 , L a7 represents the same meaning as described above.)

[0094] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2), and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 are replaced with hydrogen atoms are preferred. TIFF2025092460000073.tif108164

[0095] When the resin (A) or the like contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (A) or the like. Further, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still even more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 1 to 65 mol%, more preferably 1 to 60 mol%, still more preferably 3 to 60 mol%. In addition, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and even more preferably 10 mol% or more, respectively, based on all the structural units such as the resin (A). Further, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 50 mol% is more preferable, and 5 to 50 mol% is still more preferable.

[0096] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025092460000074.tif2770[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having a halogen atom with 1 to 24 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.

[0097] R 42 The saturated hydrocarbon group represented by is a linear or branched chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these, etc. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc.; polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group and the following group (*represents the bonding site). Examples of the group formed by the combination of TIFF2025092460000075.tif10146 include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, etc.; branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group contained in 42 include fluorine atom, chlorine atom, bromine atom or iodine atom. R 42 Examples of the group in which -CH2- of the saturated hydrocarbon group contained in 42 is replaced by -O- or -CO- include hydroxy group, carboxy group, carbonyl group, oxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkanediyl oxy group, alkanediyl oxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, cycloalkoxy group, cycloalkylalkoxy group, and groups formed by combining two or more of these groups. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0098] As the structural unit (a4), R 42 is preferably a saturated hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) in which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025092460000076.tif3092[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0099] L 41 Examples of the alkanediyl group in include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, and a butane-1,4-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42fExamples of the alkanediyl group having a fluorine atom in [specific context] include linear alkanediyl groups having a fluorine atom such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, an octane-1,8-diyl group having a fluorine atom; Examples of the branched alkanediyl group having a fluorine atom include an ethane-1,1-diyl group having a fluorine atom, a propane-1,1-diyl group having a fluorine atom, a propane-1,2-diyl group having a fluorine atom, a propane-2,2-diyl group having a fluorine atom, a pentane-2,4-diyl group having a fluorine atom, a 2-methylpropane-1,3-diyl group having a fluorine atom, a 2-methylpropane-1,2-diyl group having a fluorine atom, a pentane-1,4-diyl group having a fluorine atom, a 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [specific context] include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cyclooctane-1,5-diyl group having a fluorine atom, Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms of the alkanediyl group and the cycloalkanediyl group having a fluorine atom in [specific context] may be 1 or more, and preferably 2 or more. L42f The alkandiyl group and the cycloalkandiyl group having a fluorine atom in are preferably a perfluoroalkandiyl group and a perfluorocycloalkandiyl group, respectively.

[0100] L 42f Examples of the perfluoroalkandiyl group in include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkandiyl group in include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0101] L 41 is preferably a single bond or an alkandiyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and still more preferably a single bond or a methylene group. L 42fis preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and still more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0102] Examples of the structural unit (a4-1) include the structural units shown below and the structural units in the structural unit (a4-1) in the following structural units where the methyl group corresponding to R 41 is replaced by a hydrogen atom. The structural unit represented by the formula (a4-2) is the structural unit shown below. TIFF2025092460000078.tif33101 [In the formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and the upper limit of the total carbon number of L 43f and R 43f is 21.

[0103] Examples of the saturated hydrocarbon group in L 43f and R 43f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon group in L 43f and R 43f are, as long as the upper limit of the total carbon number of L 43f and R 43f allows, R in the formula (a4)42 Examples of the saturated hydrocarbon group of 42 include the same groups as the exemplified saturated hydrocarbon groups.

[0104] L 43f As the saturated hydrocarbon group of 43f , an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1) is preferable. TIFF2025092460000079.tif14120[In the formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represent a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represent -O-, -CO-, -CO-O- or -O-CO-. However, the total number of carbon atoms of L 45f , L 46f , L 47f , X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f .

[0105] Examples of the divalent saturated hydrocarbon group represented by L 45f , L 46f and L 47f in the group represented by the formula (L43f-1) include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and divalent saturated hydrocarbon groups formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, etc. may be mentioned. s is preferably 0.

[0106] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f and. TIFF2025092460000080.tif47140

[0107] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include the structural units represented by formula (a4-2A) or (formula a4-2B). TIFF2025092460000081.tif41157[In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represent the same as those in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** is the bonding site with A 43f and represents the bonding site. R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in formula (a4-2A), the total number of carbon atoms of L 43f and R 43fA is 21 or less, and in formula (a4-2B), the total number of carbon atoms of L 43f , A 43f , X 43 and R 43fB is 21 or less, and at least one of A 43f and R 43fB has at least one fluorine atom. R 43fA The saturated hydrocarbon group of R, as long as the upper limit of the number of carbon atoms permits, is a saturated hydrocarbon group similar to the saturated hydrocarbon group exemplified by R 42 herein. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having fluorine atoms, a cycloalkyl group having 3 to 12 carbon atoms and having fluorine atoms, or a group combining them, *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents any integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and the saturated hydrocarbon group of R, as long as the upper limit of the number of carbon atoms permits, is a saturated hydrocarbon group similar to the saturated hydrocarbon group exemplified by R 43fB in formula (a4). 42 Herein. A 43f is preferably a divalent chain-like saturated hydrocarbon group which may have fluorine atoms, a divalent alicyclic saturated hydrocarbon group, or a group combining them, more preferably a divalent chain-like saturated hydrocarbon group having fluorine atoms, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group, an alicyclic saturated hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and still more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, a perfluorooctyl group and other alkyl fluoride groups, a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, a perfluoroadamantylmethyl group and the like. In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025092460000082.tif15170

[0108] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 TIFF2025092460000083.tif99167

[0109] Examples of the structural unit represented by formula (a4-2B) include the structural units shown below and the structural unit in the following structural unit represented by formula (a4-2B) where the methyl group corresponding to R 41 is replaced by a hydrogen atom. JPEG2025092460000084.jpg111163

[0110] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025092460000085.tif3689[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 44f and R 44f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 44f and R 44f is 21.]

[0111] Examples of the saturated hydrocarbon group in L 44f and R 44f include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these. Examples of the saturated hydrocarbon group in L 44f and R 44f include, as long as the upper limit of the total number of carbon atoms of L 44f and R 44f allows, groups similar to the saturated hydrocarbon groups exemplified as the saturated hydrocarbon group of R 42 in formula (a4). L 44fis preferably an alkanediyl group having 1 to 14 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (wherein one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, still more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0112] Examples of the structural unit represented by the formula (a4-3) include structural units represented by the following structural units and the following formulas, in which the methyl group corresponding to R in the structural unit (a4-3) is replaced by a hydrogen atom. 41 TIFF2025092460000086.tif86170

[0113] Examples of the structural unit (a4) also include a structural unit represented by the formula (a4-A). TIFF2025092460000087.tif3686 [In the formula (a4-A), all symbols represent the same meaning as described above.]

[0114] R 1 ​The alkyl group having 1 to 6 carbon atoms in [[]] includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in [[]] include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in [[]] include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0115] L 1 Examples of the aliphatic hydrocarbon group in [[]] include a chain hydrocarbon group, and an alicyclic hydrocarbon group which is monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include a chain hydrocarbon group such as an alkanediyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0116] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups, etc. The bonding site can be at any position. TIFF2025092460000088.tif45164 For example, alicyclic hydrocarbon groups such as cycloalkanediyl groups, etc. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc., and Examples of the polycyclic alicyclic hydrocarbon group include a spiro ring having a cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a decahydronaphthalenediyl group, a bicyclo[3.3.0]octanediyl group, a spirocyclohexane-1,2'-cyclopentane-diyl group, a spiroadamantane-2,3'-cyclopentane-diyl group, etc., a norbornyl group or an adamantyl group, and a cycloalkanediyl group spiro-bonded thereto respectively. The number of carbon atoms of the alicyclic hydrocarbon group is preferably from 3 to 20, more preferably from 3 to 18, still more preferably from 3 to 16, and even more preferably from 3 to 12.

[0117] Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups and two or more chain hydrocarbon groups may be combined respectively. Also, any of the groups may be bonded to X 11 . Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), etc. * represents the bonding site to X 11 .

[0118] L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L, -CH2- may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When -CH2- contained in the aliphatic hydrocarbon group of L is replaced by -O-, -S-, -SO2- or -CO-, the carbon number before replacement shall be the carbon number of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in the present specification within the range where the upper limit of the carbon number allows. In addition, groups in which one or more hydrogen atoms of the above-described groups are replaced by bonding sites are also included. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in the present specification within the range where the upper limit of the carbon number allows.

[0119] L 1 The aliphatic hydrocarbon group in L may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (in the alkyl group, -CH2- may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, and 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. When -CH2- contained in the alkyl group is replaced by -O- or -CO-, the total number of carbon atoms before replacement is defined as the total number of carbon atoms of the alkyl group. Examples of the replaced group include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkoxycarbonyloxy group, and the like. L 1 The substituent that the aliphatic hydrocarbon group in may have preferably includes a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferably, it includes a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferably, it includes a fluorine atom, an iodine atom, trifluoromethyl group, methyl group, hydroxy group, or methoxy group. L 1 is R 3When not forming an alkyl group or an alicyclic hydrocarbon group, it is preferably a linear hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). More preferably, it is a linear hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-). Even more preferably, it is a linear hydrocarbon group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 6 to 12 carbon atoms, a group formed by combining a linear hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 6 to 12 carbon atoms, or a group formed by combining an alicyclic hydrocarbon group having 6 to 12 carbon atoms, a linear hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 6 to 12 carbon atoms.

[0120] R 2Examples of the C1-C8 fluoroalkyl group in [the compound of formula (1)] include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The number of carbon atoms of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 The C1-C6 fluoroalkyl group in [the compound of formula (2)] is, as long as the upper limit of the number of carbon atoms permits, the same as the C1-C6 fluoroalkyl groups exemplified for the fluoroalkyl group of R 2 R 2 is preferably a C1-C6 fluoroalkyl group when R 3 is a C1-C6 fluoroalkyl group, more preferably a C1-C3 fluoroalkyl group, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is, when R 3 is a hydrogen atom, preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is L 1 and combines to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, R 3 is L 1 Examples of the group formed by combining with L 2 include, for example, groups represented by the following formulas. In the following formulas, * and ** represent bonding sites, and the two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 1A is L 1 is a part of the hydrocarbon group of L TIFF2025092460000089.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0121] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, structural units in which the methyl group corresponding to R 1 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and structural units in which the hydrogen atom corresponding to R 1 is replaced with a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025092460000090.tif192167

[0122] When the resin (A) etc. has the structural unit (a4), its content is preferably 1 to 97 mol%, more preferably 2 to 95 mol%, and still more preferably 3 to 90 mol% with respect to all the structural units of the resin (A) etc.

[0123] <Structural unit (a5)> Examples of the non-detachable hydrocarbon group in the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by formula (a5-1). TIFF2025092460000091.tif3351[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0124] R 52 The alicyclic hydrocarbon group in R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group.

[0125] L 55Examples of the divalent saturated hydrocarbon group in [compound name] include divalent chain saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as methylene group, ethylene group, propane diyl group, butane diyl group, and pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic divalent alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as cyclopentane diyl group and cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantane diyl group and norbornane diyl group.

[0126] L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by [compound name] is replaced by -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025092460000092.tif18164[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms of L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms of L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms of L x8 , L x9 and W x1 is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0127] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025092460000093.tif37147 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025092460000094.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025092460000095.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025092460000096.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0128] Examples of the structural unit (a5-1) include the following structural units and the structural units in the following structural units where the methyl group corresponding to R in the structural unit (a5-1) is replaced by a hydrogen atom. 51 and the structural units in which the methyl group corresponding to R in the structural unit (a5-1) is replaced by a hydrogen atom. TIFF2025092460000097.tif104151 When the resin (A) etc. has the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, still more preferably 3 to 15 mol% with respect to all the structural units of the resin (A) etc.

[0129] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0130] Examples of the sultone ring include the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may further contain a heteroatom in addition to -SO2-O- as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the heteroatom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025092460000098.tif2977

[0131] The sultone ring may have a substituent, and examples of the substituent include a halogen atom or an alkyl group having 1 to 12 carbon atoms which may have a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc.

[0132] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group. Preferably, it is an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. Preferably, a trifluoromethyl group is included. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group and an ethoxycarbonyl group is bonded to a carbonyl group. Preferably, an alkoxycarbonyl group having 6 or less carbon atoms is included, and more preferably a methoxycarbonyl group is included. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.

[0133] From the viewpoint that the production of the monomer leading to the structural unit (a6) is easy, a sultone ring having no substituent is preferred. As the sultone ring, a ring represented by the following formula (T1’) is preferable. TIFF2025092460000099.tif2665[In formula (T1’), X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41 is the same as those of the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferable. ma is preferably 0 or 1, more preferably 0.

[0134] Examples of the ring represented by formula (T1’) include the following rings. The bonding site is at an arbitrary position. Among them, those in which the bonding site is at the 1-position or the 3-position are preferable. TIFF2025092460000100.tif44148

[0135] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group and the like. Among them, the monomer leading to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0136] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025092460000101.tif4077[In the formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same group as described above. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

[0137] Examples of the halogen atom of R x include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group of R x include, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and an n-hexyl group, etc., preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R xExamples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, a triiodomethyl group, and the like. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0138] A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a combination of two or more of these groups may also be used. Specifically, linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; branched alkanediyl groups such as a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group; monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, and the like. A x The bonding position to the sultone ring of x can be any position, but the position at the 1-position is preferred.

[0139] Examples of the structural unit (a6-0) include the following structural units. TIFF2025092460000102.tif93150

[0140] Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred. When the resin (A) etc. has the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, still more preferably 3 to 30 mol% with respect to all the structural units of the resin (A) etc.

[0141] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0142] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A). TIFF2025092460000103.tif26124[In formula (a7-A), R a7represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR a71 -*, *-NR a71 -CO-O-*, *-O-CO-NR a71 -* or *-Ax-Ph-Ay-*. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and L a72 each independently represent a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents the bonding site with L a71 is bonded. na7 represents any integer from 0 to 2. When na7 is 2, the groups in the plurality of parentheses may be the same as or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation.

[0143] R a7 The alkyl group having 1 to 6 carbon atoms in R includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Ra7 Examples of the halogen atom in a7 include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and a halogen atom in a7 include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, a dibromomethyl group, etc. R a7 R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0144] X a71 When X is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025092460000104.tif3251[In formula (X10), Ax represents the bonding type that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay represents the bonding type that binds to L a71 and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer from 0 to 4. When mx is an integer of 2 or more, the plurality of Rx's may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably at least one selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 Examples of X include a single bond and the groups represented by the following formulas (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025092460000105.tif43162 Specific examples of the groups represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025092460000106.tif87163 Among them, X 10 is preferably a single bond or a group represented by formula (X 10 -1’) and formula (X 10 -3’) to formula (X 10 -10’), and preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10It is more preferably a group represented by any of (-10’), and a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’), or a group represented by formula (X 10 -6’) is even more preferred.

[0145] L a71 As the hydrocarbon group of, a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, X a71 and X a72 and the group that binds to. Also, as the hydrocarbon group of L a72 a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, X a72 and RA - and the group that binds to. L a71 and L a72 Examples of the chain hydrocarbon group of include a group obtained by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically, the same groups as those described as the chain hydrocarbon group of X 0 are included. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 20, and even more preferably 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of include a group obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentane group, a cyclohexane group, a cyclopentyl group, a cyclooctyl group, and the like. L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the ring in which two rings are spiro-bonded include a spirocycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. Further, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025092460000107.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of L and L include an aryl group from which one hydrogen atom has been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorene group. The number of carbon atoms of the aromatic hydrocarbon group is preferably 5 to 14, more preferably 5 to 10. L a71 and L a72 When -CH2- contained in the hydrocarbon group of L and L is replaced by -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms is allowed. L a71 and L a72 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group and the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms is allowed. L a71 and L a72 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. L a71 and L a72 Examples of the group combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The above combined groups are included. The group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. La71 and L a72 When the group is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent possessed by the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L b1‘ and L b2‘ When the -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of is replaced by -O-, -CO-, -S- or -SO2-, L b1‘ and L b2‘ The hydrocarbon group of may substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. na7 is preferably 0 or 1. ZA in formula (a7-A) + is the same as the cation Z1 in the salt represented by formula (B1) described later + and the like can be mentioned.

[0146] Examples of the structural unit represented by formula (a7-A) include the following structural units, R a7 Structural units in which the group corresponding to the methyl group of is replaced by a hydrogen atom, a halogen atom (for example, a fluorine atom) or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.) and the structural units described in WO 2012 / 050015. ZA + represents an organic cation. TIFF2025092460000108.tif244163

[0147] JPEG2025092460000109.jpg131156

[0148] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by formula (a7-B). TIFF2025092460000110.tif27104[In formula (a7-B), R a7represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A II1 represents a single bond or a divalent linking group. R II1 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R II2 and R II3 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R II2 and R II3 may combine with each other to form a ring together with the sulfur atom to which they are attached. A - represents an organic anion. R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom of R include the same halogen atom and the alkyl group which may have a halogen atom as those in formula (a7-A). R II1 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R include a phenylene group and a naphthylene group. R II2 and R II3 Examples of the hydrocarbon group represented by R and R include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A II1 Examples of the divalent linking group represented by A include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S-, or -CO-. Examples of the divalent saturated hydrocarbon group include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. can be mentioned. Examples of those in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- include divalent groups represented by formula (X1) to formula (X53). However, the number of carbon atoms before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- is 17 or less, respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R II2 and represents the bonding site with R. TIFF2025092460000111.tif123162 [In the formula, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0149] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and a group corresponding to the methyl group of R a7 wherein the group corresponding to the methyl group of R is replaced with a hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.). JPEG2025092460000112.jpg72163

[0150] A - Examples of the organic anion represented by A include a sulfonate anion, a sulfonylimide anion, and a sulfonylmethide anion. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably an anion contained in the salt represented by formula (B1) described later. Examples of the sulfonylimide anion, the sulfonylmethide anion, and the carboxylic acid anion are the same as those exemplified as the anion of the acid generator (B).

[0151] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below. TIFF2025092460000113.tif96156

[0152] When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The content of the total structural unit (a7) is preferably 1 to 30 mol%, more preferably 2 to 25 mol%, and still more preferably 3 to 20 mol% based on all the structural units of the resin (A).

[0153] Resin (A), etc. is preferably a resin containing structural unit (a1). In particular, resin (Ap) is a resin composed of structural unit (IP), structural unit (a1), and structural unit (s), that is, a copolymer of salt (I), monomer (a1), and monomer (s). Resin (A) that does not contain structural unit (IP) is preferably a resin composed of structural unit (a1) and structural unit (s). Structural unit (a1) is preferably at least one selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) (the structural unit preferably having a cyclohexyl group or a cyclopentyl group), more preferably at least two kinds, and still more preferably at least two kinds selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). Structural unit (s) is preferably at least one selected from the group consisting of structural unit (a2) and structural unit (a3). Structural unit (a2) is preferably structural unit (a2-1) or structural unit (a2-A). Structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by formula (a3-1), the structural unit represented by formula (a3-2), and the structural unit represented by formula (a3-4).

[0154] Each structural unit constituting resin (A), etc. may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that lead to these structural units. The content of each structural unit of resin (A), etc. can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of resin (Ap) and resin (A) is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more), 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is the value determined by gel permeation chromatography under the conditions described in the examples. Note that structural unit (IP) may constitute a dimer, trimer, or a compound having a weight average molecular weight of less than 2,000.

[0155] Resist Composition The resist composition of the present invention contains an ammonium carboxylate represented by the formula (I) of the present invention and / or a structural unit represented by the formula (IP). The resist composition of the present invention may contain both the ammonium carboxylate represented by the formula (I) and the structural unit represented by the formula (IP). The resist composition of the present invention preferably further contains a resin. The resin may contain a structural unit represented by the formula (IP). Further, the resist composition of the present invention preferably contains an acid generator having an acid-labile group or a resin containing a structural unit (a1) having an acid-labile group. The resin containing an acid-labile group may be either resin (A) or resin (Ap). Furthermore, it is preferable to contain a resin having a structural unit (a2-A), and the resin having a structural unit (a2-A) may be resin (A) or resin (Ap), or may be a resin other than resin (A) composed of a structural unit not containing an acid-labile group. The resist composition of the present invention preferably further contains an acid generator (hereinafter sometimes referred to as "acid generator (B)"), a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)") regardless of the presence or absence of an acid-labile group. Further, the resist composition of the present invention may further contain a resin other than the above-described resin (A) etc., or may contain a carboxylic acid generator known in the resist field.

[0156] Ammonium Carboxylate In the resist composition of the present invention, the content of the ammonium carboxylate (I) or the compound having a structural unit represented by the formula (IP) is preferably about 0.001 to 15% by mass, more preferably about 0.001 to 10% by mass, still more preferably about 0.001 to 8% by mass, and still more preferably about 0.005 to 7% by mass, based on the solid content of the resist composition.

[0157] Resin (Ap) Containing a Structural Unit Represented by the Formula (IP) The content rate of the resin (Ap) in the resist composition of the present invention is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. Further, the total content rate of the resin (A) and the resin (Ap) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The content rate of the resin (A) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The solid content of the resist composition and the content rate of the resin relative thereto can be measured by known analysis means such as liquid chromatography or gas chromatography.

[0158] <Resins other than resin (A) etc.> The resist composition of the present invention may be used in combination with a resin other than the resin (A) etc. Examples of the resin other than the resin (Ap) and the resin (A) include a resin (AX) having the same structural units as the resin (A) except for not containing the structural unit (a1) in the resin (A) described above, and a resin containing the structural unit (a4) and / or the structural unit (a5) (however, not containing the structural unit (IP) and the structural unit (a1); hereinafter sometimes referred to as "resin (X)"). Examples of the resin (AX) include a resin containing the structural unit (a2), and a resin containing the structural unit (a2-A) is preferred. In the resin (AX), the content rate of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, based on the total of all the structural units of the resin (AX). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less. Examples of the structural units that the resin (X) may further have include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. Among them, the resin (X) is preferably a resin composed of only the structural unit (a4) and / or the structural unit (a5), and more preferably a resin composed of only the structural unit (a4). When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, 20 to 100 mol% is mentioned, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, 20 to 100 mol% is mentioned, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less. Specifically, 40 to 100 mol% is mentioned, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%.

[0159] Each of the structural units constituting the resin (AX) and the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that induce these structural units. The content of each structural unit of the resin (AX) and the resin (X) can be adjusted by the amount of the monomers used in the polymerization. The weight average molecular weights of resin (AX) and resin (X) are preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less). The means for measuring the weight average molecular weights of resin (AX) and resin (X) is the same as that for resin (A) etc., but may contain oligomers having a smaller weight average molecular weight than this.

[0160] When the resist composition of the present invention contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, still more preferably 1 to 30 parts by mass, and particularly preferably 1 to 8 parts by mass with respect to 100 parts by mass in total of resin (A) and resin (Ap).

[0161] The total content ratio of resin (A) etc. and resins other than resin (A) etc. is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition.

[0162] <Acid generator (B)> As the acid generator (B), either a nonionic compound or an ionic compound may be used. Examples of the nonionic compound include sulfonate esters (for example, 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (for example, disulfone, ketosulfone, sulfonyldiazomethane), etc. Representative examples of the ionic compound include onium salts containing an onium cation (for example, diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of the anion of the onium salt include sulfonic acid anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, etc. Further, the acid generator (B) may be a structural unit having an acid generating function, for example, a resin having the above-mentioned structural unit (a7) may also be used.

[0163] As the acid generator (B), compounds that generate acid upon irradiation as described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc. can be used. Further, compounds produced by known methods may also be used. The acid generator (B) may be used alone or in combination of two or more. Further, the acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group, and the acid-labile group preferably contains the above-described group (1) or group (2). When the resist composition of the present invention has a compound having an acid-labile group, a resin containing a structural unit having an acid-labile group may not be included.

[0164] A preferred form of the acid generator (B) includes a salt represented by the formula (B1) (hereinafter sometimes referred to as "acid generator (B1)"). JPEG2025092460000114.jpg1392[In the formula (B1), all symbols are the same as those described above.] L b1 As the (nb1 + 1)-valent hydrocarbon group of L, from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining two or more of these groups, nb1 hydrogen atoms are removed, and a group bonding to one or more L b2 is mentioned. As the chain hydrocarbon group, a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group is mentioned. The alkyl group may be linear or branched, and specifically, the same groups as those described as the chain hydrocarbon group of X 0 are mentioned. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 20, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentane group, a cyclohexane group, a cyclopentyl group, a cyclooctyl group, and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group, an adamantyl group, and the like. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group, a steroid group (steroid skeleton), and the like. Examples of the ring in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Further, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025092460000115.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 7 to 12. Examples of the aromatic hydrocarbon group include an aryl group from which nb1 hydrogen atoms have been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorene group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 5 to 14, more preferably 5 to 10. L b1 When -CH2- contained in the hydrocarbon group of L is replaced by -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -CO-O-), and the like. Examples of these replaced groups are the same as those described above. L b1 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sultones, and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding positions of the alicyclic hydrocarbon groups mentioned in the following formulas can be at any position. TIFF2025092460000116.tif46146L b1Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. Examples of the group in which -CH2- contained in the group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms permits. Examples of the group combining two or more of a chain hydrocarbon group, an alicyclic hydrocarbon group and an aromatic hydrocarbon group include a group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, a group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, a group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. Examples of the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L b2 Examples of the divalent hydrocarbon group of L include a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by removing one hydrogen atom from a group combining two or more of these groups, which binds to Y b1 and the like. L b2 Examples of the divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these groups of L are each a group formed by removing one hydrogen atom from the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and group combining two or more of these groups exemplified by L b1 within the range where the number of carbon atoms permits. L b1 and L b2 Examples of the substituent that the hydrocarbon group of L and L may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. L b1 and L b2When it is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent possessed by the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L b1 and L b2 By replacing the -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of with -O-, -CO-, -S- or -SO2-, L b1 and L b2 The hydrocarbon groups of can substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. Y b1 Examples of the cyclic hydrocarbon group of include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrogen group and the aromatic hydrocarbon group of are the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 respectively, and when they have no substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 Examples of the substituent that the methyl group of may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, and a nitro group. The -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range permitted by the upper limit of the number of carbon atoms, L b1Examples of groups similar to the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups formed by combining two or more of these groups are the same as those exemplified above. Also, Y b1 Examples of groups in which -CH2- contained in a hydrocarbon group having 1 to 18 carbon atoms, which may have a cyclic hydrocarbon group of Y b1 as a substituent, is replaced by -O-, -S-, -CO-, or -SO2- are the same as those exemplified by groups in which -CH2- contained in the hydrocarbon group of Lb1 is replaced by -O-, -S-, -CO-, or -SO2- within the range allowed by the upper limit of the carbon number. Also, Y The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) or an anion represented by formula (B1-A2). TIFF2025092460000117.tif31125[In formula (B1-A1), L b2 and Y b1 have the same meanings as in formula (B1). Q b1 、Q b2 、Q b3 and Q b4 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. X 1 represents -O-CO-, -CO-O-, -O-CO-O-, or -O-. L b3 represents a hydrocarbon group having (nb2 + 1) carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. nb2 represents any integer from 1 to 3.] Q b1 、Q b2 、Q b3 and Q b4Examples of the alkyl group represented by [[ID=]] include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, and the like. Q b1 and Q b2 and Q b3 and Q b4 Examples of the C1-C6 perfluoroalkyl group of [[ID=]] include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, and the like. Q b1 and Q b2 is preferably included in at least one of [[ID=]] and [[ID=]], more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. b1 and Q b2 is preferably independently a hydrogen atom, a fluorine atom or a C1-C3 perfluoroalkyl group, [[ID=]] is preferably a hydrogen atom, a fluorine atom or a C1-C3 perfluoroalkyl group, and [[ID=]] is preferably a hydrogen atom or a fluorine atom. Q b3 and Q b4 is preferably an integer from 0 to 3, preferably 0, 1 or 2. b3 X b4 is preferably -O-CO- or -CO-O-. Examples of the hydrocarbon group in [[ID=]] include the same hydrocarbon groups as exemplified for [[ID=]] of formula (B1) within the range allowed by the upper limit of the number of carbon atoms. X 1 In formula (B1-A1), [[ID=]]

[0165] L b3 Examples of the hydrocarbon group in [[ID=]] include the same hydrocarbon groups as exemplified for [[ID=]] of formula (B1) within the range allowed by the upper limit of the number of carbon atoms. b1 The same hydrocarbon groups as those exemplified for [[ID=]] of formula (B1) can be mentioned within the range allowed by the upper limit of the number of carbon atoms. In formula (B1-A1), [[ID=]] b3is preferably a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (wherein -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group formed by combining two or more of these groups, and more preferably a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). When the chain hydrocarbon group is replaced by -O- or -CO-, the number of -CH2- contained in the chain hydrocarbon group replaced by -O- or -CO- is preferably 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. TIFF2025092460000118.tif1581[In formula (Lb3-1), nb2 represents the same meaning as formula (B1-A1). L b31 is a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 and represents the bonding site with X.] In formula (Lb3-1), L b31 The chain hydrocarbon group of may be the same group as the chain hydrocarbon group exemplified by L b1 as long as the upper limit of the number of carbon atoms permits. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of b3 include the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 as long as the upper limit of the number of carbon atoms permits. In formula (Lb3-1), the substituent that the chain hydrocarbon group of L b31 may have and the substituent that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b1 may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b1 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b1 are preferably the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below, * and ** represent the bonding sites, * represents the bonding site with X 1 or L b31 and ** represents a hydrogen atom, a substituent or the bonding site with L b2 and at least one ** represents the bonding site with L b2 In addition, in the alicyclic hydrocarbon group represented below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, it is preferably to form an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. In formula (B1-A1) of TIFF2025092460000119.tif37168, L b2 is preferably a single bond or an alkanediyl group having 1 to 12 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2-L b22 -**(L b21 and L b22 either represents an alkanediyl group having at least 1 to 6 carbon atoms, the other represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-, * and ** represent bonding sites, and ** represents the bonding site with Y b1 . However, L b21 , X 2 and L b22 preferably have a total carbon number of 12 or less.). In formula (B1-A1), L b2 is preferably a single bond or an alkanediyl group having 1 to 12 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 either represents an alkanediyl group having at least 1 to 6 carbon atoms, the other represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-, * and ** represent bonding sites, and ** represents the bonding site with Y b1 . However, L b21 , X 2 and L b22 preferably have a total carbon number of 12 or less.). In formula (B1-A1), Y b1 is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or a phenyl group which may have a substituent, and more preferably is a group represented by formula (Y1) to formula (Y36) represented by the following groups. In formula (Y1) to formula (Y36), R Yb represents an alkyl group having 1 to 4 carbon atoms among the substituents that the cyclic hydrocarbon group of Y b1 may have, and R Yc represents a hydrogen atom or Y b1represents a substituent that the cyclic hydrocarbon group may have, and * represents the bonding site with L b2 represents the bonding site with. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have other substituents although not particularly illustrated in the following formula. TIFF2025092460000120.tif84159

[0166] As the anion in the salt represented by the formula (B1), anions represented by the formulas (B1-A1-1) to (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] are preferable, and anions represented by any of the formulas (B1-A1-1) to (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formulas (B1-A1-24) to (B1-A1-33), formulas (B1-A1-36) to (B1-A1-40), and formulas (B1-A1-47) to (B1-A1-85) are more preferable. TIFF2025092460000121.tif216160

[0167] TIFF2025092460000122.tif249151

[0168] TIFF2025092460000123.tif254163

[0169] Here, R i2 ~R i7 are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Examples of the anion represented by formula (B1-A1) include, specifically, the anions described in JP-A-2010-204646.

[0170] Preferred anions in the salt represented by formula (B1) include the anions represented by formulae (B1a-1) to (B1a-70). TIFF2025092460000124.tif186163

[0171] TIFF2025092460000125.tif252166

[0172] TIFF2025092460000126.tif70166

[0173] Among them, anions represented by any of formulae (B1a-1) to (B1a-3), formulae (B1a-7) to (B1a-19), and formulae (B1a-22) to (B1a-70) are preferred.

[0174] The anion represented by formula (B1-A2) is represented by the following formula. TIFF2025092460000127.tif23100[In formula (B1-A2), L b2 and Y b1 have the same meanings as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents an integer of 1 to 5. When nb4 is 2 or more, a plurality of -L b4 -Y b2 may be the same as or different from each other. nb3 represents an integer of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.

[0175] In formula (B1-A2), L b2 Examples of the hydrocarbon group and Y b1 Examples of the cyclic hydrocarbon group are, within the range allowed by the upper limit of the number of carbon atoms, the examples of the hydrocarbon group of L b2 in formula (B1) and the examples of the cyclic hydrocarbon group of Y b1 are the same as those. L b2 For the hydrocarbon group of, the methyl group of Y b1 and the substituents that the cyclic hydrocarbon group may have, the same as the examples of the hydrocarbon group of L b2 in formula (B1), the methyl group of Y b1 and the examples of the substituents that the cyclic hydrocarbon group may have are mentioned. L b2 preferably represents an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-. More preferably, *-CO-O-L b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the phenyl group to which SO3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. ). Y b1 preferably is a cyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O- or -CO-), more preferably, Y b1 of formula (B1-A1), and further L b1 is the cyclic hydrocarbon group exemplified by, and more preferably, is the following group. R Yb and R Yc have the same meaning as above. TIFF2025092460000128.tif83158

[0176] In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Yb1 The bonding position of - is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO3. TIFF2025092460000129.tif26105[In the above formula, L b2 , Y b1 , R b1 , and nb3 represent the same meaning as in formula (B1-A2).] In formula (B1-A2), when n4b is 2 or more, a plurality of L b2 and Y b1 preferably represent the same group as each other.

[0177] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3. Examples of the halogen atom for R b1 include fluorine atom, chlorine atom, bromine atom, and iodine atom. R b1 is each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group. nb3 is any integer from 0 to 4 (that is, nb3-1 represents any integer from 0 to 3), preferably any integer from 0 to 3, more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1is more preferably a fluorine atom or an iodine atom. When nb3 is 2, one of R b1 is preferably a halogen atom, and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms. One of R b1 is more preferably a fluorine atom or an iodine atom, and the other is more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0178] Examples of the anion (B1-A2) include the following anions. Among them, the anions represented by the formulas (B2a-1) to (B2a-20) are preferable, and the anions represented by the formulas (B2a-1) to (B2a-11) and the formulas (B2a-16) to (B2a-20) are more preferable. TIFF2025092460000130.tif95162

[0179] In another form of the acid generator (B), an anion in which the anion represented by the formula (B1) is replaced with a sulfonimide anion, a sulfonylmethide anion, or a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the sulfonylimide anion and the sulfonylmethide anion include the sulfonylimide anion or the sulfonylmethide anion represented by the formula (B1-A3) (hereinafter sometimes referred to as "anion (B1-A3)"). TIFF2025092460000131.tif1289[In the formula (B1-A3), A 1 represents a nitrogen atom or a carbon atom. L b2’ represents a single bond or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. Y b1’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-. nb5 represents an integer of 2 or 3, and A 1When it is a nitrogen atom, nb5 is 2, A 1 When it is a carbon atom, nb5 is 3, and a plurality of -L b2’ -Y b1’ may be the same as or different from each other, and two -L b2’ -Y b1’ may combine together to form a ring containing A 1 .] In formula (B1 - A3), L b2’ and Y b1’ are exemplified by the same groups as L b2 and Y b1 in formula (B1 - A1). In formula (B1 - A3), L b2’ is a single bond, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X 3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, X 2 and X 3 each independently represent -O-, -CO - O-, -O - CO-, -O - CO - O- or -O-, W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.). It is preferably this. In formula (B1 - A3), Y b1’ is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or a phenyl group which may have a substituent, and more preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36) in formula (B1 - A1). nb5 is preferably 2 or 3. In formula (B1 - A3), when two -L b2’ -Y b1’ combine together to form a ring containing A 1 , for example, an anion represented by formula (B1 - A3’) can be mentioned. TIFF2025092460000132.tif22123In formula (B1-A3’), A 1 , Y b1’ and L b1’ have the same meaning as in formula (B1-A3). W b4 represents a C3-C12 disulfonylimide ring or disulfonylmethide ring which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring of W preferably has 3 to 6 carbon atoms, and the hydrogen atoms of the methylene groups contained in the ring are preferably replaced by fluorine atoms.

[0180] Examples of the anion represented by formula (B1-A3) include the following. Among them, the anions represented by formula (B3a-1) and formula (B3a-2) are preferred. TIFF2025092460000133.tif189164Examples of the carboxylic acid anion include the following. However, the acid generator (B) having a carboxylic acid anion does not contain ammonium carboxylate (I). TIFF2025092460000134.tif41155

[0181] Z1 + Examples of the organic cation of include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations, etc. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryliodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter may be referred to as "cation (b2-1)" etc. according to the formula number) are included. TIFF2025092460000135.tif82160In formula (b2-1) to formula (b2-5), R b4 ~R b6Each independently represents a linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms. The hydrogen atoms contained in the linear hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atoms contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent any integer from 0 to 5. When m2 is 2 or more, the plurality of R b7 may be the same or different, and when n2 is 2 or more, the plurality of R b8 may be the same or different. R b9 and R b10 each independently represents a linear hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b11represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 and may be bonded to each other to form a ring including -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 and may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent any integer from 0 to 5. q2 and r2 each independently represent any integer from 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, a plurality of R b13are the same or different, and when p2 is 2 or more, a plurality of R b14 are the same or different, and when q2 is 2 or more, a plurality of R b15 are the same or different, and when r2 is 2 or more, a plurality of R b16 are the same or different, and when s2 is 2 or more, a plurality of R b17 are the same or different, and when t2 is 2 or more, a plurality of R b18 are the same or different. u3 represents any integer from 1 to 3 and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represent any integer from 0 to 3 and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. o21, p22, q23, r24, t25, and s26 each independently represent any integer from 0 to 4. When u3, u4, and u5 are each 2 or more, the groups in parentheses are each the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, a plurality of R b21 ~R b26 are each the same or different. When u3, u4, and u5 are each 2 or more, the groups in parentheses are each the same or different.] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and at least one of R b13 ~R b16 is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and at least one of R b13 ~R b18 is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0182] The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. In particular, R b9 ~R b12 The chain hydrocarbon group is preferably a group having 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups. TIFF2025092460000136.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group is preferably a group having 3 to 18 carbon atoms, more preferably a group having 4 to 12 carbon atoms.

[0183] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group and isobornyl group. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and examples thereof include fluoromethyl group, difluoromethyl group, trifluoromethyl group and perfluorobutyl. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.

[0184] Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, biphenyl group, naphthyl group, and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group. Examples of the aromatic hydrocarbon group having a chain hydrocarbon group include tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., and examples of the aromatic hydrocarbon group having an alicyclic hydrocarbon group include p-cyclohexylphenyl group, p-adamantylphenyl group, etc. When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include p-methoxyphenyl group, etc. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl group, phenethyl group, phenylpropyl group, trityl group, naphthylmethyl group, naphthylethyl group, etc.

[0185] Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, dodecyloxy group, etc. Examples of the alkylcarbonyl group include acetyl group, propionyl group, butyryl group, etc. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, iodine atom, etc. Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, 2-ethylhexylcarbonyloxy group, etc.

[0186] Rb4 and R b5 The ring formed by the combination of and together with the sulfur atom to which they are attached may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, preferably rings having 4 to 18 carbon atoms. In addition, examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings, and examples thereof include the following rings. * represents a bonding site. TIFF2025092460000137.tif24142

[0187] R b9 and R b10 The ring formed by and together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. Examples thereof include thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring and the like. R b11 and R b12 The ring formed by and together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-...

Claims

1. A resist composition comprising an ammonium carboxylate represented by formula (I) or a structural unit represented by formula (IP). [In formula (I) and formula (IP), R 1 represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO-, -NR ２ -or-SO ２ It may be replaced with -. R ２ represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. Ring W represents an alicyclic hydrocarbon ring having 3 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ２０ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X ２０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. * and ** represent binding sites, * represents R ２０ represents the bonding site with the carbon atom to which it is bonded. L ２０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ３ , R ４ and R ５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ６ -, -SO ２ may be replaced by - or -CO-, R ３ , R ４ , R ５ and L ２０ Any two or three of these may be bonded to form N ＋ may form a ring containing: R ６ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

2. X ０ a group formed by combining two or more selected from the group consisting of an alicyclic hydrocarbon group having 3 to 36 carbon atoms, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a chain hydrocarbon group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and an aromatic hydrocarbon group having 6 to 36 carbon atoms (the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or a hydroxy group, the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or a hydroxy group, and the -CH contained in the alicyclic hydrocarbon group and the chain hydrocarbon group ２ 2. The resist composition according to claim 1, wherein - may be replaced by -O- or -CO-.

3. X ２０ is a single bond or a group represented by the formula (X ２０ -1) ~Formula (X ２０ 2. The resist composition according to claim 1, wherein the aryl group is a group represented by any one of the following formulas: [Formula (X ２０ -1) ~ type (X ２０ -10) *, ** are binding sites, ** is L ２０ represents the binding site with Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２１ is -O- or -NR ２１ Represents -. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

4. L ２０ is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The alkanediyl group contains —CH ２ 2. The resist composition according to claim 1, wherein - may be replaced by -O- or -CO-, and the cyclic hydrocarbon group may have a substituent.

5. 2. The resist composition according to claim 1, which contains an ammonium carboxylate represented by formula (I).

6. The resist composition according to claim 1, which contains a resin containing a structural unit represented by formula (IP).

7. 2. The resist composition according to claim 1, which contains an acid generator having an acid labile group or a resin that contains a structural unit having an acid labile group.

8. 2. The resist composition according to claim 1, which contains a resin containing a structural unit represented by formula (IP) and a structural unit having an acid labile group.

9. The composition contains a resin including a structural unit having an acid labile group, The resist composition according to claim 1, wherein the structural unit having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L ａ１ and L ａ２ are each independently -O- or *-O-(CH ２ ) ｋ１ represents --CO--O--, k1 represents an integer of 1 to 7, and * represents the bonding site with --CO--. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the hydrocarbon group and the -CH 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 It represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents --O-- or --S--. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form, together with the carbon atoms to which they are attached, a ring having 3 to 20 carbon atoms. X a61 is a single bond, -CO-O-* or -CO-NR a65 - represents *, * represents a bonding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-O-L a61 - or *-CO-OL a62 -, * represents a bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.

10. The resist composition according to claim 1, further comprising a resin containing a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

11. 2. The resist composition according to claim 1, which contains a salt represented by formula (B1): [In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z1 ＋ represents an organic cation.

12. (1) A step of applying a resist composition according to any one of claims 1 to 11 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

13. An ammonium carboxylate represented by formula (I): [In formula (I), R 1 represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO-, -NR ２ -or-SO ２ It may be replaced with -. R ２ represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. Ring W represents an alicyclic hydrocarbon ring having 3 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ２０ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X ２０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. * and ** represent binding sites, * represents R ２０ represents the bonding site with the carbon atom to which it is bonded. L ２０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ３ , R ４ and R ５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ６ -, -SO ２ may be replaced by - or -CO-, R ３ , R ４ , R ５ and L ２０ Any two or three of these may be bonded to form N ＋ may form a ring containing: R ６ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

14. A resin containing a structural unit represented by formula (IP): [In the formula (IP), R 1 represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO-, -NR ２ -or-SO ２ It may be replaced with -. R ２ represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. Ring W represents an alicyclic hydrocarbon ring having 3 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X ０ represents a single bond or a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. R ２０ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X ２０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an amide bond, an ester bond, and a carbonate ester bond. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. * and ** represent binding sites, * represents R ２０ represents the bonding site with the carbon atom to which it is bonded. L ２０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ３ , R ４ and R ５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -NR ６ -, -SO ２ may be replaced by - or -CO-, R ３ , R ４ , R ５ and L ２０ Any two or three of these may be bonded to form N ＋ may form a ring containing: R ６ represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ - or -CO- may be substituted.]

Images