Substrate work machine and release method for releasing rotation restriction of electromagnetic motor

Abstract

To appropriately release the rotation restriction of an electromagnetic motor by a stopper.SOLUTION: A substrate working machine includes: an electromagnetic motor that raises and lowers a device for performing work on a substrate; a rotating body that is fixed to a rotation shaft of the electromagnetic motor and rotates together with the rotation shaft; a brake device that moves a stopper between a rotational area of the rotating body and outside the rotational area of the rotating body, restricts the rotation of the rotation shaft by moving the stopper into the rotational area to come into contact with the rotating body, and releases the restriction of the rotation of the rotation shaft by moving the stopper outside the rotational area; and a control device that controls the operation of the electromagnetic motor and the brake device. The control device controls the operation of the electromagnetic motor and the brake device such that the stopper is moved from the rotational area to outside the rotational area after the rotating body is rotated in a direction away from the stopper when the stopper is in contact with the rotating body in the rotational area.SELECTED DRAWING: Figure 7

Description

Technical Field

[0001] The present invention relates to a substrate working machine including an apparatus for working on a substrate and an electromagnetic motor for raising and lowering the apparatus, and to a technique for releasing the restriction of the rotation of the electromagnetic motor by a stopper after restricting the rotation of the electromagnetic motor by the stopper.

Background Art

[0002] A technique for restricting the rotation of a rotating member by bringing a stopper into contact with the rotating member is described.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object is to appropriately release the restriction of the rotation of the electromagnetic motor by the stopper.

Means for Solving the Problems

[0005] In order to solve the above problems, this specification provides an electromagnetic motor for raising and lowering an apparatus for working on a substrate, a rotating body fixed to the rotating shaft of the electromagnetic motor and rotating together with the rotating shaft, a brake device for moving a stopper between a rotation region of the rotating body and outside the rotation region of the rotating body, restricting the rotation of the rotating shaft by moving the stopper to the rotation region and bringing it into contact with the rotating body, and releasing the restriction on the rotation of the rotating shaft by moving the stopper outside the rotation region, and a control device for controlling the operations of the electromagnetic motor and the brake device. The control device controls the operations of the electromagnetic motor and the brake device such that after rotating the rotating body in a direction away from the stopper when the stopper is in contact with the rotating body in the rotation region, the stopper moves from the rotation region to outside the rotation region. A substrate working machine is disclosed.

[0006] Also, in order to solve the above problems, this specification provides a substrate working machine including an electromagnetic motor for raising and lowering an apparatus for working on a substrate, a rotating body fixed to the rotating shaft of the electromagnetic motor and rotating together with the rotating shaft, and a brake device for moving a stopper between a rotation region of the rotating body and outside the rotation region of the rotating body, restricting the rotation of the rotating shaft by moving the stopper to the rotation region and bringing it into contact with the rotating body, and releasing the restriction on the rotation of the rotating shaft by moving the stopper outside the rotation region. A releasing method for releasing the restriction on the rotation of the electromagnetic motor is disclosed by executing a rotation step of rotating the rotating body in a direction away from the stopper by the electromagnetic motor when the stopper is in contact with the rotating body in the rotation region, and a moving step of moving the stopper from the rotation region to outside the rotation region by the brake device after the rotation step.

Advantages of the Invention

[0007] In the present disclosure, a rotating body is fixed to the rotating shaft of an electromagnetic motor and rotates together with the rotating shaft. Then, when the stopper is in contact with the rotating body in the rotation region of the rotating body, after rotating the rotating body in a direction away from the stopper, the stopper is moved from the rotation region of the rotating body to outside the rotation region. As a result, it becomes possible to appropriately move the stopper from the rotation region of the rotating body to outside the rotation region, and it is possible to appropriately release the restriction on the rotation of the electromagnetic motor by the stopper.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Embodiments for Carrying Out the Invention

[0009] Hereinafter, as embodiments for carrying out the present invention, examples of the present invention will be described in detail with reference to the drawings.

[0010] Figure 1 shows a component mounter 10. The component mounter 10 is a device for performing the operation of mounting components on a circuit substrate 12. The component mounter 10 includes a device main body 20, a substrate transfer and holding device 22, a component mounting device 24, a mark camera 26, a parts camera 28, a bulk component supply device 30, a component supply device 32, and a control device (see Figure 3) 36. Examples of the circuit substrate 12 include a circuit board and a substrate having a three-dimensional structure. Examples of the circuit board include a printed wiring board and a printed circuit board.

[0011] The device main body 20 is composed of a frame 40 and a beam 42 mounted on the frame 40. The substrate transfer and holding device 22 is disposed at the center in the front-rear direction of the frame 40 and has a transfer device 50 and a clamp device 52. The transfer device 50 is a device for transferring the circuit substrate 12, and the clamp device 52 is a device for holding the circuit substrate 12. Thus, the substrate transfer and holding device 22 transfers the circuit substrate 12 and fixedly holds the circuit substrate 12 at a predetermined position. In the following description, the transfer direction of the circuit substrate 12 is referred to as the X direction, the horizontal direction perpendicular to that direction is referred to as the Y direction, and the vertical direction is referred to as the Z direction. That is, the width direction of the component mounter 10 is the X direction, and the front-rear direction is the Y direction.

[0012] The component mounting device 24 is disposed on the beam 42 and has two working heads 60, 62 and a working head moving device 64. Each of the working heads 60, 62 has a suction nozzle (see FIG. 2) 66 and holds components by the suction nozzle 66. As shown in FIG. 2, the working head moving device 64 has an X-direction moving device 68, a Y-direction moving device 70, and a Z-direction moving device 72. The electromagnetic motor (see FIG. 3) 69 of the X-direction moving device 68 and the electromagnetic motor (see FIG. 3) 71 of the Y-direction moving device 70 move the two working heads 60, 62 integrally to an arbitrary position on the frame 40. Each of the working heads 60, 62 is detachably attached to sliders 74, 76, and the electromagnetic motor (see FIG. 3) 73 of the Z-direction moving device 72 moves the sliders 74, 76 individually in the vertical direction. That is, the working heads 60, 62 are individually moved in the vertical direction by the electromagnetic motor 73 of the Z-direction moving device 72.

[0013] As shown in FIG. 2, the mark camera 26 is attached to the slider 74 in a downward-facing state and is moved in the X-direction, Y-direction, and Z-direction together with the working head 60. Thereby, the mark camera 26 images an arbitrary position on the frame 40. Further, as shown in FIG. 1, the parts camera 28 is disposed between the base material conveyance and holding device 22 and the component supply device 32 on the frame 40 in an upward-facing state. Thereby, the parts camera 28 images the components held by the suction nozzles 66 of the working heads 60, 62.

[0014] The loose component supply device 30 is disposed on one side surface in the front-rear direction of the device main body 20. The loose component supply device 30 is a device that aligns a plurality of components scattered in a scattered state and supplies the components in an aligned state. That is, it is a device that aligns a plurality of components in an arbitrary posture to a predetermined posture and supplies the components in the predetermined posture.

[0015] The component supply device 32 is disposed on the other side surface in the front-rear direction of the device main body 20. The component supply device 32 has a feeder-type component supply device 86 and a tray-type component supply device 88. The feeder-type component supply device 86 is a device that supplies components by a tape feeder 90. Further, the tray-type component supply device 88 is a device that supplies components placed on a tray (not shown).

[0016] As shown in FIG. 3, the control device 36 includes a controller 100, a plurality of drive circuits 102, and an image processing device 104. The plurality of drive circuits 102 are connected to the transfer device 50, the clamp device 52, the work heads 60, 62, the electromagnetic motors 69, 71, 73, the feeder-type component supply device 86, the tray-type component supply device 88, and the bulk component supply device 30. The controller 100 includes a CPU, a ROM, a RAM, etc., and is mainly a computer, and is connected to the plurality of drive circuits 102. Thereby, the operations of the base material transfer and holding device 22, the component mounting device 24, etc. are controlled by the controller 100. Further, the controller 100 is connected to the image processing device 104. The image processing device 104 processes the image data obtained by the mark camera 26 and the parts camera 28, and the controller 100 acquires various information from the image data.

[0017] The component mounter 10 performs a component mounting operation on the circuit board 12 held by the substrate transfer and holding device 22 according to the above-described configuration. Specifically, the circuit board 12 is carried into a predetermined working position by the transfer device 50 and fixedly held at that position by the clamp device 52. Next, the mark camera 26 is moved above the circuit board 12 by the X-direction moving device 68 and the Y-direction moving device 70 to image the circuit board 12. Thereby, information regarding the error in the holding position of the circuit board 12 is obtained. Also, the loose component supply device 30 or the component supply device 32 supplies components at a predetermined supply position. Then, either of the working heads 60, 62 is moved above the component supply position by the X-direction moving device 68 and the Y-direction moving device 70 and descends by the Z-direction moving device 72, so that the suction nozzle 66 holds the component. Subsequently, the working heads 60, 62 holding the component are moved above the parts camera 28 by the X-direction moving device 68 and the Y-direction moving device 70, and the parts camera 28 images the component held by the suction nozzle 66. Thereby, information regarding the error in the holding position of the component is obtained. Then, the working heads 60, 62 holding the component are moved above the circuit board 12 by the X-direction moving device 68 and the Y-direction moving device 70 and descend by the Z-direction moving device 72. Then, the working heads 60, 62 holding the component correct the error in the holding position of the circuit board 12, the error in the holding position of the component, etc., and mount the held component on the circuit board 12.

[0018] In this way, in the component mounter 10, the component is held by the working heads 60, 62, and the component held by the working heads 60, 62 is mounted on the circuit board 12, thereby executing the component mounting operation. At this time, the working heads 60, 62 move up and down in the Z direction by the operation of the electromagnetic motor 73 of the Z-direction moving device 72 to hold the component or mount the held component on the circuit board 12. As shown in FIG. 4, the Z-direction moving device 72 moves the working heads 60, 62 up and down by converting the rotation of the electromagnetic motor 73 into vertical movement by the ball screw mechanism 110.

[0019] Specifically, the ball screw mechanism 110 has a screw rod 112 and a nut 114. A spiral screw groove 116 is formed on the outer peripheral surface of the screw rod 112. The nut 114 generally has an annular shape and holds a plurality of bearing balls (not shown) that circulate inside. The nut 114 is externally fitted to the screw rod 112, and the plurality of bearing balls of the nut 114 are screwed into the screw groove 116 of the screw rod 112. The screw rod 112 is arranged in a posture extending in the vertical direction, and the rotating shaft 118 of the electromagnetic motor 73 is coaxially fixed to the upper end of the screw rod 112. The working heads 60 and 62 are detachably attached to the sliders 74 and 76, and the sliders 74 and 76 are fixed to the nut 114 of the ball screw mechanism 110. With such a structure, when the screw rod 112 rotates due to the operation of the electromagnetic motor 73, the nut 114 moves vertically, and the working heads 60 and 62 move up and down.

[0020] In addition, the working heads 60 and 62 may fall due to their own weight. That is, there is a possibility that the nut 114 descends due to the weight of the working heads 60 and 62, and the screw rod 112 rotates as the nut 114 descends. For this reason, a solenoid 120 is arranged to restrict the rotation of the screw rod 112, that is, the rotation of the rotating shaft 118 of the electromagnetic motor 73. The solenoid 120 is composed of a plunger 122, a case 124, and a coil (not shown). The coil has a cylindrical shape and is arranged inside the case 124. A generally rod-shaped plunger 122 is held by the case 124 so as to be able to advance and retreat inside the coil. The plunger 122 is biased in a direction extending from the case 124 by a coil spring (not shown), and the plunger 122 extends from the case 124 in a state where no current flows through the coil (demagnetized state). When a current flows through the coil (excited state), the plunger 122 is drawn toward the case 124. The solenoid 120 having such a structure is arranged next to the electromagnetic motor 73 with the tip of the plunger 122 facing downward.

[0021] Further, a rotating body 128 is fixed to the rotating shaft 118 of the electromagnetic motor 73. As shown in FIG. 5 which is a cross-sectional view taken along line AA of FIG. 4, the rotating body 128 is generally in the shape of a rectangular plate and is fixed to the rotating shaft 118 of the electromagnetic motor 73 at the center in the longitudinal direction. Note that the rotating body 128 is fixed to the rotating shaft 118 in a posture perpendicular to the axial direction of the rotating shaft 118 of the electromagnetic motor 73. Thereby, the rotating body 128 rotates about the rotating shaft 118 together with the rotating shaft 118 of the electromagnetic motor 73. Further, the solenoid 120 is disposed adjacent to the electromagnetic motor 73 such that the plunger 122 moves between the rotation region of the rotating body 128 and outside the rotation region. Specifically, in the demagnetized state of the solenoid 120, the plunger 122 extends downward from the case 124, so that the plunger 122 moves to the rotation region of the rotating body 128 as shown in FIG. 4. On the other hand, in the excited state of the solenoid 120, the plunger 122 moves upward toward the case 124, so that the plunger 122 moves outside the rotation region of the rotating body 128 as shown in FIG. 6.

[0022] With such a structure, when the plunger 122 moves to the rotation region of the rotating body 128, as shown in FIG. 5, the plunger 122 comes into contact with the rotating body 128, restricting the rotation of the rotating body 128, that is, the rotation of the rotating shaft 118 of the electromagnetic motor 73. Then, as shown in FIG. 6, when the plunger 122 moves outside the rotation region of the rotating body 128, the rotation of the rotating body 128, that is, the rotation of the rotating shaft 118 of the electromagnetic motor 73 is permitted, and the restriction on the rotation of the rotating shaft 118 is released. Thus, the rotation of the rotating shaft 118 of the electromagnetic motor 73 is restricted when the plunger 122 moves to the rotation region of the rotating body 128, and the restriction on the rotation of the rotating shaft 118 of the electromagnetic motor 73 is released when the plunger 122 moves outside the rotation region of the rotating body 128. For this reason, when the working heads 60, 62 move in the vertical direction due to the operation of the electromagnetic motor 73, the plunger 122 moves outside the rotation region of the rotating shaft 118, and when the working heads 60, 62 are maintained at an arbitrary position in the vertical direction, the plunger 122 moves to the rotation region. Thereby, it is possible to prevent the working heads 60, 62 from falling due to their own weight when they are maintained at an arbitrary position in the vertical direction.

[0023] However, when the rotation of the rotating shaft 118 of the electromagnetic motor 73 is restricted by the plunger 122, even if an attempt is made to move the plunger 122 from the rotation region of the rotating body 128 to outside the rotation region, the plunger 122 may not move from the rotation region to outside the rotation region. That is, when the plunger 122 is in contact with the rotating body 128 in the demagnetized state of the solenoid 120, even if power is supplied to the coil of the solenoid 120 to make the solenoid 120 in the excited state, the plunger 122 may not move from the rotation region to outside the rotation region. This is because when the plunger 122 is located in the rotation region of the rotating body 128 and the plunger 122 and the rotating body 128 are in contact with each other, the plunger 122 is magnetized and the plunger 122 and the rotating body 128 are attracted to each other. Further, when the plunger 122 and the rotating body 128 are in contact with each other, the nut 114 is biased downward by the weight of the work heads 60, 62, and the rotating body 128 is biased toward the plunger 122 together with the rotating shaft 118 fixed to the screw rod 112. For this reason, the rotating body 128 shown in FIG. 5 is biased clockwise by the weight of the work heads 60, 62, and is in contact with the plunger 122 in a state where the rotating body 128 and the plunger 122 are attracted to each other due to the magnetization of the plunger 122. When the plunger 122 and the rotating body 128 are in contact with each other in such a state, there is a possibility that the plunger 122 and the rotating body 128 cannot be separated even if the solenoid 120 is made in the excited state. For this reason, there is a case where the rotation of the rotating shaft 118 of the electromagnetic motor 73 cannot be released because the plunger 122 does not move from the rotation region to outside the rotation region.

[0024] In view of the above, the rotation of the rotating shaft 118 of the electromagnetic motor 73 is released by a new method. Specifically, in the demagnetized state of the solenoid 120, as shown in FIG. 5, when the plunger 122 is located in the rotation region of the rotating body 128 and the plunger 122 is in contact with the rotating body 128, the control device 36 operates the electromagnetic motor 73 while maintaining the demagnetized state of the solenoid 120, and rotates the rotating body 128 in a direction away from the plunger 122. That is, as shown in FIG. 7, the control device 36 operates the electromagnetic motor 73 to rotate the rotating body 128 in the counterclockwise direction (the direction of arrow 140). After rotating the rotating body 128 in the direction of arrow 140, the control device 36 stops the operation of the electromagnetic motor 73 and supplies power to the coil of the solenoid 120 to make it in an excited state. At this time, since the plunger 122 and the rotating body 128 are separated, the plunger 122 smoothly moves out of the rotation region of the rotating body 128 to the outside of the rotation region. Thereby, the restriction on the rotation of the rotating shaft 118 of the electromagnetic motor 73 can be appropriately released.

[0025] However, even when the solenoid 120 is in an excited state, there may be a case where the solenoid 120 does not move from the rotation region to the outside of the rotation region due to a malfunction of the solenoid 120 or the like. In such a case, when the electromagnetic motor 73 is operated to raise and lower the work heads 60, 62, the rotating body 128 and the plunger 122 may collide forcefully, and the plunger 122 or the like may be damaged. Therefore, the control device 36 operates the electromagnetic motor 73 to rotate the rotating body 128 in a direction opposite to the arrow 140, that is, in a direction in which the rotating body 128 approaches the plunger 122, to determine whether the plunger 122 has moved outside the rotation region of the rotating body 128. At this time, the operation of the electromagnetic motor 73 is for confirming the movement of the plunger 122 and not for raising and lowering the work heads 60, 62. Therefore, the control device 36 restricts the maximum torque of the electromagnetic motor 73 to a set value to control the operation of the electromagnetic motor 73.

[0026] Then, as shown in FIG. 8, if the plunger 122 has moved out of the rotation region of the rotating body 128 and into the region outside the rotation region, when the control device 36 operates the electromagnetic motor 73 to rotate the rotating body 128 in the direction opposite to the arrow 140 (the direction of the arrow 150), the rotating body 128 rotates smoothly without contacting an obstacle. On the other hand, as shown in FIG. 9, when the plunger 122 has not moved out of the rotation region of the rotating body 128 and into the region outside the rotation region, when the control device 36 operates the electromagnetic motor 73 to rotate the rotating body 128 in the direction opposite to the arrow 140 (the direction of the arrow 150), the rotating body 128 collides with the plunger 122. At this time, the torque of the electromagnetic motor 73 reaches the set value X0, as shown in FIG. 10. Note that the torque values from T1 to T2 in FIG. 10 are the torque values when the electromagnetic motor 73 rotates the rotating body 128 in the direction of the arrow 140, and the torque values after T2 are the torque values when the electromagnetic motor 73 rotates the rotating body 128 in the direction of the arrow 150. Then, at T3, the rotating body 128 collides with the plunger 122, causing the torque value of the electromagnetic motor 73 to reach the set value X0.

[0027] Therefore, when the control device 36 rotates the rotating body 128 in the direction of arrow 150 and the torque value of the electromagnetic motor 73 reaches the set value X0, the control device 36 determines that the rotating body 128 has collided with the plunger 122. That is, when the torque value of the electromagnetic motor 73 reaches the set value X0, the control device 36 determines that the plunger 122 has not moved outside the rotation range of the rotating body 128. When the rotating body 128 collides with the plunger 122 when the torque value of the electromagnetic motor 73 reaches the set value X0, but the maximum torque of the electromagnetic motor 73 is limited, damage to the plunger 122 and the like can be prevented. Then, when the control device 36 determines that the plunger 122 has not moved outside the rotation range of the rotating body 128, the control device 36 performs control again to release the restriction on the rotation of the rotation shaft 118 of the electromagnetic motor 73. That is, the control device 36 operates the electromagnetic motor 73 to rotate the rotating body 128 in a direction away from the plunger 122, then stops the operation of the electromagnetic motor 73, and supplies power to the coil of the solenoid 120 to make it in an excited state. On the other hand, after the control device 36 rotates the rotating body 128 in the direction of arrow 150, if the torque value of the electromagnetic motor 73 does not reach the set value X0, the control device 36 determines that the rotating body 128 has not collided with the plunger 122 and the plunger 122 has moved outside the rotation range of the rotating body 128. In this way, by the control device 36 rotating the rotating body 128 in the direction of arrow 150 and determining whether the plunger 122 has moved outside the rotation range of the rotating body 128, it is possible to appropriately confirm whether the rotation restriction of the rotation shaft 118 of the electromagnetic motor 73 has been released. Also, by determining whether the plunger 122 has moved outside the rotation range of the rotating body 128 based on the torque value of the electromagnetic motor 73, it is possible to simply and early confirm whether the rotation restriction of the rotation shaft 118 of the electromagnetic motor 73 has been released.

[0028] Note that the component mounting machine 10 is an example of a substrate working machine. The control device 36 is an example of a control device. The working heads 60, 62 are examples of devices for performing work on a substrate. The electromagnetic motor 73 is an example of an electromagnetic motor. The rotation shaft 118 is an example of a rotation shaft. The solenoid 120 is an example of a braking device. The plunger 122 is an example of a stopper. The rotating body 128 is an example of a rotating body.

[0029] In the above-described embodiment, the following effects are achieved.

[0030] In the component mounting machine 10, when the plunger 122 is in contact with the rotating body 128, the control device 36 rotates the rotating body 128 in a direction away from the plunger 122 and then controls the operations of the electromagnetic motor 73 and the solenoid 120 so that the plunger 122 moves from the rotation region of the rotating body 128 to outside the rotation region. Thereby, the restriction on the rotation of the rotation shaft 118 of the electromagnetic motor 73 can be appropriately released.

[0031] Further, after the control device 36 controls the operation of the solenoid 120 so that the plunger 122 moves from the rotation region of the rotating body 128 to outside the rotation region, the control device 36 controls the operation of the electromagnetic motor 73 so that the rotating body 128 rotates in a direction opposite to the direction away from the plunger 122, thereby determining whether or not the plunger 122 has moved outside the rotation region of the rotating body 128. Thereby, it is possible to appropriately confirm whether or not the restriction on the rotation of the rotation shaft 118 of the electromagnetic motor 73 has been released.

[0032] Further, when rotating the rotating body 128 in a direction opposite to the direction away from the plunger 122, the control device 36 controls the operation of the electromagnetic motor 73 by limiting the maximum torque to the set value X0. Then, when the torque of the electromagnetic motor 73 reaches the set value X0, the control device 36 determines that the plunger 122 has not moved from the rotation region of the rotating body 128 to outside the rotation region. Thereby, even when the plunger 122 has not moved outside the rotation region of the rotating body 128 and the rotating body 128 has collided with the plunger 122, breakage of the plunger 122 or the like can be prevented. Also, it is possible to simply and early confirm whether or not the restriction on the rotation of the rotation shaft 118 of the electromagnetic motor 73 has been released.

[0033] Furthermore, the present invention is not limited to the above embodiments, and can be implemented in various forms with various modifications and improvements based on the knowledge of those skilled in the art. For example, in the above embodiments, as the substrate-facing work machine, the component mounter 10 that performs the component mounting work on the substrate is adopted, but a work machine that performs various works may be adopted. For example, a printing work machine that prints solder or the like on the substrate, an inspection work machine that inspects the substrate, etc. may be adopted.

[0034] Also, in the above embodiments, the solenoid 120 is adopted as the brake device that restricts the rotation of the rotating shaft 118 of the electromagnetic motor 73, but various devices such as a cylinder can be adopted as long as it is a device that moves the stopper between the rotation region of the rotating body 128 and outside the rotation region.

[0035] Also, in the above embodiments, the work heads 60 and 62 are adopted as the devices that move up and down by the operation of the electromagnetic motor 73, but various devices can be adopted as long as it is a device that performs work on the substrate. For example, various devices such as a device that raises and lowers the suction nozzle, a device that raises and lowers the substrate, and a device that raises and lowers the tray can be adopted.

[0036] Also, in the above embodiments, the ball screw mechanism 110 is adopted as the mechanism that converts the rotation of the electromagnetic motor 73 into the vertical movement of the work heads 60 and 62, but various mechanisms such as a rack and pinion mechanism can be adopted.

Explanation of Reference Numerals

[0037] 10: Component mounter (substrate-facing work machine) 36: Control device 60: Work head (device) 62: Work head (device) 73: Electromagnetic motor 118: Rotating shaft 120: Solenoid (brake device) 122: Plunger (stopper) 128: Rotating body

Claims

1. An electromagnetic motor for raising and lowering a device for performing an operation on a substrate, A rotating body fixed to the rotating shaft of the electromagnetic motor and rotating together with the rotating shaft, A brake device that moves a stopper between a rotation region of the rotating body and outside the rotation region of the rotating body, and restricts the rotation of the rotating shaft by moving the stopper into the rotation region and bringing it into contact with the rotating body, and releases the restriction on the rotation of the rotating shaft by moving the stopper outside the rotation region, A control device for controlling the operations of the electromagnetic motor and the brake device, Comprising, The control device, A substrate working machine that controls the operations of the electromagnetic motor and the brake device so that after rotating the rotating body in a direction away from the stopper when the stopper is in contact with the rotating body in the rotation region, the stopper moves from the rotation region to outside the rotation region.

2. The control device, The substrate working machine according to claim 1, wherein after controlling the operation of the brake device so that the stopper moves from the rotation region to outside the rotation region, the operation of the electromagnetic motor is controlled so that the rotating body rotates in a direction opposite to the direction away from the stopper, thereby determining whether the stopper has moved from the rotation region to outside the rotation region.

3. The control device, The substrate working machine according to claim 2, wherein when rotating the rotating body in the opposite direction, the operation of the electromagnetic motor is controlled by limiting the maximum torque to a set value, and when the torque of the electromagnetic motor reaches the set value, it is determined that the stopper has not moved from the rotation region to outside the rotation region.

4. An electromagnetic motor for raising and lowering a device for performing an operation on a substrate, A rotating body fixed to the rotating shaft of the electromagnetic motor and rotating together with the rotating shaft, A brake device that moves a stopper between a rotation region of the rotating body and outside the rotation region of the rotating body, and restricts the rotation of the rotating shaft by moving the stopper into the rotation region and bringing it into contact with the rotating body, and releases the restriction on the rotation of the rotating shaft by moving the stopper outside the rotation region, In a substrate working machine provided with, A rotation step of rotating the rotating body in a direction away from the stopper by the electromagnetic motor when the stopper is in contact with the rotating body in the rotation region, After the rotation step, a moving step of moving the stopper from the rotation region to outside the rotation region by the braking device; A release method for releasing the regulation of the rotation of the electromagnetic motor by executing the above.

Images