Inspection data processing device, inspection data processing method and program

Abstract

To provide a technique capable of automatically identifying mutually-close reflection positions as the same group on the basis of inspection data in a scope coordinate system obtained through an ultrasonic flaw inspection.SOLUTION: An inspection data processing device 10 processes inspection data of scope coordinates obtained through an ultrasonic flaw inspection on an inspection object. The inspection data of scope coordinates is the inspection data of non-Euclidean coordinates that represents each reflection position of ultrasonic waves in a plurality of coordinates including coordinates other than coordinates indicating the position in the linear direction of an actual space. The inspection data processing device 10 includes a coordinate conversion unit 12 and a group identification unit 13. The coordinate conversion unit 12 converts the inspection data of the scope coordinates into inspection data of Euclidean coordinates. The group identification unit 13 identifies reflection positions whose Euclidean distance is within a predetermined margin range as the same group on the basis of the inspection data of the Euclidean coordinates.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a technique for processing inspection data when inspection data indicating each reflection position of ultrasonic waves in an object to be inspected is generated by transmitting ultrasonic waves into the object to be inspected and receiving the ultrasonic waves reflected in the object to be inspected. More specifically, the present invention relates to a technique for identifying, as the same group, reflection positions that are close to each other among a plurality of reflection positions of ultrasonic waves in an object to be inspected indicated by inspection data.

Background Art

[0002] Ultrasonic flaw detection inspection (UT: Ultrasonic Testing) is a type of non-destructive inspection method, and is a method of detecting the presence or absence and position of defects such as cracks in an object to be inspected by using ultrasonic wave reflection. In ultrasonic flaw detection inspection, an ultrasonic probe generates ultrasonic waves and transmits them into the object to be inspected, and receives the reflected waves of the ultrasonic waves generated in the object to be inspected. Based on this reflected wave, inspection data of scope coordinates indicating the reflection position of the ultrasonic wave is generated.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The inspection data of the scope coordinates obtained by ultrasonic flaw detection inspection is inspection data of non-Euclidean coordinates representing the reflection position of ultrasonic waves, which are a plurality of coordinates including coordinates other than the coordinates indicating the position in the straight line direction of the actual space (for example, circumferential position coordinates, angular coordinates, etc.).

[0005] When the object to be inspected is a pipe, the inspection data of the scope coordinates is inspection data of non-Euclidean coordinates representing the reflection position of ultrasonic waves, for example, by the following three coordinates. ·Circumferential position coordinates indicating each ultrasonic transmission position on a scanning line extending along the outer peripheral surface of the pipe in the circumferential direction around the central axis of the pipe being inspected. ·Angle coordinates indicating the azimuth in which ultrasonic waves are transmitted into an inspection plane orthogonal to the scanning line. ·Distance coordinates indicating the distance from the ultrasonic transmission position to the reflection position.

[0006] When each reflection position is displayed on a display using such scope coordinates (non-Euclidean coordinates), a person (for example, an inexperienced inspector) may find it difficult to grasp the Euclidean distance (actual distance) between these reflection positions when looking at the display.

[0007] Therefore, there are cases where it is difficult for a person to identify, as the same group, reflection positions that are close to each other among a plurality of reflection positions in the scope coordinates displayed as described above.

[0008] Therefore, an object of the present invention is to provide a technique capable of automatically identifying, as the same group, reflection positions that are close to each other based on inspection data in a scope coordinate system obtained by ultrasonic flaw detection inspection.

Means for Solving the Problem

[0009] To achieve the above object, an inspection data processing apparatus according to the present invention is an apparatus that processes inspection data of scope coordinates obtained by ultrasonic flaw detection inspection of an object to be inspected, The inspection data of the scope coordinates is non-Euclidean coordinate inspection data representing each reflection position of ultrasonic waves with a plurality of coordinates including coordinates other than coordinates indicating the position in the straight line direction of the actual space, It has a coordinate conversion unit that converts the inspection data of the scope coordinates into inspection data of Euclidean coordinates, Based on the inspection data of the Euclidean coordinates, it has a group identification unit that identifies, as the same group, the reflection positions whose Euclidean distances are within a predetermined margin range from each other.

[0010] In addition, the inspection data processing method according to the present invention is a method for processing inspection data in a scope coordinate system obtained by ultrasonic flaw detection on an object to be inspected, and the inspection data in the scope coordinates is inspection data in non-Euclidean coordinates representing each reflection position of ultrasonic waves with a plurality of coordinates including coordinates other than the coordinates indicating the position in the linear direction of the actual space, the coordinate conversion unit converts the inspection data in the scope coordinates into inspection data in Euclidean coordinates, the group identification unit identifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range based on the inspection data in the Euclidean coordinates.

[0011] In addition, the program according to the present invention is a program for causing a computer to execute the above-described inspection data method.

Advantages of the Invention

[0012] According to the present invention, since the inspection data in the scope coordinates, which are non-Euclidean coordinates, is converted into the inspection data in Euclidean coordinates, the Euclidean distance between the reflection positions can be easily calculated, and the reflection positions whose Euclidean distances from each other are within a predetermined margin range can be automatically identified as the same group.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4A

Figure 4B

Figure 4C

Figure 4D

Figure 5A

Figure 5B

Figure 5C

Figure 6

Figure 7

Figure 8A

Figure 8B

Figure 9

Embodiments for Carrying Out the Invention

[0014] Embodiments of the present invention will be described with reference to the drawings. In the drawings, the same reference numerals are given to the common parts in each figure, and duplicate explanations are omitted.

[0015] An inspection data processing apparatus according to an embodiment of the present invention is an apparatus that processes inspection data of scope coordinates obtained by performing ultrasonic flaw detection inspection (UT) on an object to be inspected. The inspection data is data representing each reflection position of ultrasonic waves within the object to be inspected 1, and the inspection data processing apparatus specifies a plurality of reflection positions that can be regarded as one reflection region (for example, one flaw) among these reflection positions as one group. Hereinafter, ultrasonic flaw detection inspection, inspection data of scope coordinates, the inspection data processing apparatus, etc. will be described in order.

[0016] (Ultrasonic Flaw Detection Inspection) FIG. 1 is an explanatory diagram showing an example of ultrasonic flaw detection inspection for obtaining inspection data. In the present embodiment, as shown in FIG. 1, the inspection object 1 is a pipe. Further, in FIG. 1, a cross-section of the pipe 1 by a plane including the central axis C of the pipe 1 is shown, and a state in which the pipe 1 is cut by planes orthogonal to the central axis C on both sides in the direction of the central axis C in FIG. 1 is shown.

[0017] In ultrasonic flaw detection inspection, ultrasonic waves are transmitted into the inspection object 1 and reflected waves of the ultrasonic waves are detected. In the present embodiment, in ultrasonic flaw detection inspection, from each transmission position (position p in FIG. 1) on a predetermined scanning line along the surface 1a of the inspection object 1, ultrasonic waves are transmitted into the inspection object 1 in each azimuth (azimuth indicated by the angle α in FIG. 1) in an inspection plane (cross-section in FIG. 1) orthogonal to the scanning line, and reflected waves of the ultrasonic waves are detected. These transmission positions p may be a number of positions spaced apart from each other.

[0018] The above scanning line may be an imaginary line on the surface 1a of the inspection object 1. In the present embodiment, the scanning line is an imaginary line extending in the circumferential direction Dc of the pipe 1 as the inspection object. That is, the direction (i.e., the scanning direction) Dc in which the scanning line extends is the circumferential direction around the central axis C of the pipe 1, and may be a direction orthogonal to the direction of the central axis C (direction parallel to the central axis C). Such a scanning line may be a line that makes one revolution in the direction around the central axis C of the pipe 1 (for example, a circular line). Further, in the present embodiment, the above-described inspection plane is a plane including the central axis C of the pipe 1.

[0019] In ultrasonic flaw detection inspection, a probe 2 is used. The probe 2 has a vibrator 2a that generates and receives ultrasonic waves. The vibrator 2a has piezoelectric characteristics. By applying a high-frequency voltage (for example, a pulse voltage) from an inspection device 3 connected to the probe 2 to the vibrator 2a, the vibrator 2a vibrates due to the piezoelectric effect and generates ultrasonic waves. Further, the vibrator 2a outputs an electrical signal (voltage) by receiving ultrasonic waves.

[0020] The probe 2 may have a plurality of arranged vibrators 2a. The plurality of vibrators 2a may constitute a phased array probe. In this case, the transmission direction of the ultrasonic wave can be changed by electronically controlling the timing of the high-frequency voltage applied to each vibrator 2a.

[0021] In the example of FIG. 1, the probe 2 has an ultrasonic wave propagation member 2b that contacts the surface 1a of the inspection object 1. Each of the above-described vibrators 2a is attached to the ultrasonic wave propagation member 2b, transmits ultrasonic waves to the inspection object 1 through the ultrasonic wave propagation member 2b, and receives ultrasonic waves from the inspection object 1 through the ultrasonic wave propagation member 2b.

[0022] Such a probe 2 is positioned at each transmission position p on the scanning line along the surface 1a of the inspection object 1, and ultrasonic waves are transmitted from the probe 2 at the transmission position p into the inspection object 1 in each azimuth α within the inspection plane that includes the transmission position p and is orthogonal to the scanning line, and the reflected wave of this ultrasonic wave is received by the probe 2 at the transmission position p.

[0023] (Inspection data in scope coordinates) For each transmission position p, the inspection apparatus 3 generates inspection data in scope coordinates based on the electrical signal output from the probe 2 (vibrator 2a) each time an ultrasonic wave is transmitted from the probe 2 into the inspection object 1 from the transmission position p to each transmission azimuth α by supplying a high-frequency voltage to the probe 2 (vibrator 2a). Note that the inspection apparatus 3 may store the generated inspection data in its own storage unit 3a. Further, the inspection apparatus 3 may input the generated inspection data to an inspection data processing apparatus 10 described later.

[0024] The above-described inspection data in scope coordinates obtained by ultrasonic flaw detection inspection is data representing each reflection position where the ultrasonic wave transmitted into the inspection object 1 is reflected, in a plurality of coordinates including coordinates other than the coordinates indicating the position in the straight-line direction of the actual space. More specifically, the inspection data in scope coordinates includes coordinate information representing each position in the space of the scope coordinate system described later with the above plurality of coordinates (a set of coordinates), and intensity information described later indicating the reflection intensity of the ultrasonic wave at each position.

[0025] In this embodiment, the plurality of coordinates representing each reflection position are the scanning coordinate p indicating the transmission position p on the above-described scanning line, the distance coordinate r indicating the distance from the scanning coordinate p, and the angular coordinate α indicating the transmission direction of the ultrasonic wave from the scanning coordinate p. These symbols p, r, and α correspond to the position p, the distance r, and the angle α in FIG. 1. The distance coordinate r and the angular coordinate α are the distance and the angle in the inspection plane described above, respectively. Thus, each reflection position is indicated by a set of scanning coordinate p, distance coordinate r, and angular coordinate α. Hereinafter, a set of scanning coordinate p, distance coordinate r, and angular coordinate α representing each reflection position will also be simply denoted as (p, r, α).

[0026] The scanning coordinate p may be detected by a position sensor (not shown) and input to the inspection device 3. For example, when the probe 2 is moved to each transmission position p along the scanning line by a driving device (not shown), the position of the probe 2 moved to the transmission position p may be detected by the position sensor and input to the inspection device 3. Alternatively, a person may change the attachment position p of the probe 2 to the surface 1a of the inspection object 1 along the scanning line, and each time the change is made, the measured value of the attachment position p may be input to the inspection device 3 as a scanning coordinate via an appropriate input device.

[0027] The distance coordinate r is obtained by the inspection device 3. The inspection device 3 determines the distance coordinate r for each transmission position p based on the time when the ultrasonic wave is transmitted from the transmission position p, the time when the reflected wave is received at the transmission position p, and the known propagation speed of the ultrasonic wave in the inspection object 1. Here, the time when the ultrasonic wave is transmitted may be the time when the inspection device 3 applies a high-frequency voltage to the vibrator 2a, and the time when the reflected wave is received may be the time when the inspection device 3 receives an electrical signal from the vibrator 2a.

[0028] In this embodiment, the angular coordinate α indicates the transmission direction of the ultrasonic wave of the phased array probe 2. In this embodiment, the inspection device 3 controls the transmission direction of the ultrasonic wave from the phased array probe 2 at each transmission position p. The inspection device 3 sets the angle indicating the transmission direction thus controlled as the above-described angular coordinate α.

[0029] Further, according to the present embodiment, each time the inspection device 3 receives the electrical signal from the probe 2 (oscillator 2a), the inspection device 3 generates scope coordinates (p, r, α) indicating the generation position (reflection position) of the reflected wave that caused the electrical signal as coordinate information of inspection data.

[0030] Furthermore, each time the inspection device 3 receives the electrical signal from the probe 2 (oscillator 2a), the inspection device 3 generates intensity information (echo value) indicating the reflection intensity of the ultrasonic wave at the generation position (p, r, α) of the reflected wave that caused the electrical signal. More specifically, the inspection device 3 may generate the intensity information (echo value) of the reflection position based on the magnitude of the electrical signal due to the reflected wave from within the inspection object 1, the distance (the above-described distance coordinate r) from the ultrasonic wave transmission position p to the generation position of the reflected wave, and the attenuation coefficient of the ultrasonic wave within the inspection object 1. The attenuation coefficient indicates the degree of attenuation as the ultrasonic wave propagates within the inspection object 1. The attenuation coefficient may be preset in the inspection device 3.

[0031] The scope coordinate system representing the scope coordinates (p, r, α) in the virtual space has a plurality of coordinate axes respectively indicating the scanning coordinate p, the distance coordinate r, and the angle coordinate α. In the virtual space of the scope coordinate system, these plurality of coordinate axes are orthogonal to each other. FIG. 2 is an explanatory diagram showing an example of the virtual space of the scope coordinate system.

[0032] As shown in FIG. 2, the virtual space of the scope coordinate system may be divided into a number of unit regions (for example, rectangular parallelepiped regions). Each unit region may be a region (voxel) having dimensions corresponding to the resolution of the ultrasonic flaw detection inspection. That is, each unit region corresponds to the position (reflection position) where the above-described reflection intensity is detected. The position of each unit region may be indicated by the above-described scope coordinates (p, r, α). The scope coordinates (p, r, α) indicating the position of the unit region may be the scope coordinates of the representative point (for example, the center point) of the unit region.

[0033] (Inspection data processing device) FIG. 3 is a block diagram showing a configuration example of the inspection data processing apparatus 10 according to an embodiment of the present invention. The inspection data processing apparatus 10 processes inspection data in a scope coordinate system obtained by performing an ultrasonic flaw detection inspection on the inspection object 1 as described above.

[0034] Inspection data in scope coordinates generated by the inspection apparatus 3 is input to the inspection data processing apparatus 10. The inspection data in scope coordinates may be input from the inspection apparatus 3 to the inspection data processing apparatus 10 via a wiring such as a data transfer cable. Alternatively, the inspection data in scope coordinates may be transmitted from the inspection apparatus 3 to the inspection data processing apparatus 10 via a network and input to the inspection data processing apparatus 10. Alternatively, the inspection data in scope coordinates may be input from the inspection apparatus 3 to the inspection data processing apparatus 10 via a portable storage device such as a portable HDD or a USB memory.

[0035] The inspection data processing apparatus 10 includes a candidate specifying unit 11, a coordinate conversion unit 12, a group specifying unit 13, a group integration unit 14, a defect determination unit 15, a display control unit 16, and an input device 18.

[0036] <Candidate specifying unit> Based on the inspection data in scope coordinates input to the inspection data processing apparatus 10, the candidate specifying unit 11 specifies a plurality of reflection positions adjacent to each other in the virtual space of the scope coordinate system as candidates for the same group.

[0037] FIG. 4A shows an example of the virtual space in the scope coordinate system as in FIG. 2, but shows only the unit regions (voxels B1 to B7) that become each reflection position (reflection position where the reflection intensity is equal to or greater than the first threshold value), and shows each voxel enlarged compared to the case of FIG. 2. In FIG. 4A, illustration of voxels as unit regions that are not reflection positions (reflection positions where the reflection intensity is equal to or greater than the first threshold value) is omitted.

[0038] FIG. 4B shows a plurality of voxels B1 to B7 in FIG. 4A as viewed from the direction of the coordinate axis indicating the scanning coordinate p. FIG. 4C shows a plurality of voxels B1 to B7 in FIG. 4A as viewed from the direction of the coordinate axis indicating the angular coordinate α. FIG. 4D shows a plurality of voxels B1 to B7 in FIG. 4A as viewed from the direction of the coordinate axis indicating the distance coordinate r. With reference to FIGS. 4A to 4D, the processing by the candidate specifying unit 11 will be described in more detail.

[0039] The candidate specifying unit 11 may be configured to perform any one of the following processes A to C.

[0040] (Process A) Assuming that the above-mentioned "a plurality of reflection positions adjacent to each other in the virtual space of the scope coordinate system" are a plurality of reflection positions adjacent to each other in the direction of the coordinate axis, the candidate specifying unit 11 specifies the plurality of reflection positions as candidates in the same group. Each reflection position constituting the candidates in the same group is adjacent to any other reflection position constituting the candidates in the direction of any coordinate axis.

[0041] Here, a plurality of reflection positions (i.e., a plurality of voxels) adjacent to each other in the direction of the coordinate axis are a plurality of coordinates (i.e., a plurality of voxels) in which the coordinates of the reflection positions are continuous with each other, which means that there are no coordinates (i.e., voxels) with a reflection intensity less than the first threshold value between the coordinates of the reflection positions. Note that the plurality of reflection positions are not limited to two or more reflection positions, and may be three or more reflection positions. When the plurality of reflection positions are three or more, the above description "there are no coordinates (voxels) with a reflection intensity less than the first threshold value between the coordinates of the reflection positions" means that there are no coordinates (voxels) with a reflection intensity less than the first threshold value between any pair of adjacent reflection positions among the three or more reflection positions.

[0042] In the case of FIG. 4A, among the voxels B1 to B7 as seven reflection positions, voxels B1 to B3 are adjacent to each other in the direction of the coordinate axes. That is, voxels B1 and B2 are adjacent to each other in the direction of the coordinate axis indicating the scanning coordinate P, and voxel B3 is adjacent to voxel B2 in the direction of the coordinate axis indicating the distance coordinate r. Therefore, the candidate specifying unit 11 specifies voxels B1 to B3 as candidates in the same group among the voxels B1 to B7.

[0043] (Process B) Assuming that the above-mentioned "a plurality of reflection positions adjacent to each other in the virtual space of the scope coordinate system" are a plurality of reflection positions adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis and parallel to the coordinate plane of the scope coordinate system, the candidate specifying unit 11 specifies the plurality of reflection positions as candidates in the same group.

[0044] Here, as the coordinate planes, in FIG. 4A, there are a p-α coordinate plane including the coordinate axis indicating the scanning coordinate p and the coordinate axis indicating the angular coordinate α, an r-p coordinate plane including the coordinate axis indicating the distance coordinate r and the coordinate axis indicating the scanning coordinate p, and an r-α coordinate plane including the coordinate axis indicating the distance coordinate r and the coordinate axis indicating the angular coordinate α.

[0045] In the case of FIG. 4A, among the voxels B1 to B7 as seven reflection positions, voxels B1 to B5 are adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis. That is, voxels B1 to B3 are adjacent to each other in the direction of the coordinate axis as described in the case of Process A, voxel B5 is adjacent to voxel B2 in a direction oblique to the direction of the coordinate axis indicating the distance coordinate r and parallel to the r-α coordinate plane as shown in FIGS. 4A to 4C, and voxel B4 is adjacent to voxel B1 in a direction oblique to the direction of the coordinate axis indicating the scanning coordinate p and parallel to the p-α coordinate plane as shown in FIGS. 4A, 4C, and 4D. Therefore, the candidate specifying unit 11 specifies voxels B1 to B5 as candidates in the same group among the voxels B1 to B7.

[0046] (Process C) Assuming that the "plurality of reflection positions adjacent to each other in the virtual space of the scope coordinate system" are a plurality of reflection positions adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis, the candidate specifying unit 11 specifies the plurality of reflection positions as candidates in the same group.

[0047] Here, the direction oblique to the direction of the coordinate axis may be a direction parallel to the coordinate plane of the scope coordinate system, or may not be parallel to the coordinate plane of the scope coordinate system.

[0048] In the case of FIG. 4A, among the voxels B1 to B7 as seven reflection positions, the voxels B1 to B7 are adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis. That is, the voxels B1 to B3 are adjacent to each other in the direction of the coordinate axis as described in the case of process A, and as shown in FIGS. 4A to 4D, the voxel B5 is adjacent to the voxel B2 in a direction oblique to the direction of the coordinate axis indicating the distance coordinate r (and a direction parallel to the r-α coordinate plane), and the voxel B4 is adjacent to the voxel B1 in a direction oblique to the direction of the coordinate axis indicating the scanning coordinate p (and a direction parallel to the p-α coordinate plane), the voxel B6 is adjacent to the voxel B3 in a direction oblique to the direction of the coordinate axis indicating the distance coordinate r (a direction not parallel to any coordinate plane), and the voxel B7 is adjacent to the voxel B3 in another oblique direction to the direction of the coordinate axis indicating the distance coordinate r (a direction not parallel to any coordinate plane). Therefore, the candidate specifying unit 11 specifies the voxels B1 to B7 as candidates in the same group.

[0049] In any of the above-described cases of processes A to C, if there are candidates in each of a plurality of groups separated from each other in the virtual space of the scope coordinate system, the candidate specifying unit 11 specifies each of such a plurality of candidates as described above.

[0050] <Coordinate conversion unit> The coordinate conversion unit 12 converts the inspection data in scope coordinates input to the inspection data processing apparatus 10 into inspection data in Euclidean coordinates. The inspection data in Euclidean coordinates is the position coordinates in a plurality of linear directions orthogonal to each other in the actual space, and the reflection position is the data in orthogonal coordinates.

[0051] In the present embodiment, the inspection data in Euclidean coordinates is the inspection data in three-dimensional orthogonal coordinates. The inspection data in three-dimensional orthogonal coordinates includes the coordinate information representing each of the above-described reflection positions by the respective coordinate values of three coordinate axes (the x-axis, y-axis, and z-axis in FIG. 5C described later) indicating three linear directions orthogonal to each other in the actual space, and the above-described intensity information associated with the three-dimensional orthogonal coordinates (x, y, z) representing each reflection position.

[0052] In the present embodiment, the coordinate conversion unit 12 converts the inspection data in scope coordinates into inspection data in three-dimensional orthogonal coordinates in two steps. That is, the coordinate conversion unit 12 converts the inspection data in scope coordinates into inspection data in polar coordinates, and then converts the inspection data in polar coordinates into the above-described inspection data in three-dimensional orthogonal coordinates.

[0053] FIGS. 5A to 5C are explanatory diagrams of the conversion from scope coordinates to three-dimensional orthogonal coordinates via polar coordinates. FIG. 5A shows the reflection position represented by scope coordinates. FIG. 5B shows the reflection position represented by polar coordinates. FIG. 5C shows the reflection position represented by three-dimensional orthogonal coordinates.

[0054] The coordinate conversion unit 12 converts the scope coordinates (p, α, r) indicating each reflection position into polar coordinates (r o , θ, φ) according to the following equations (1) and (2) of [Equation 1] and equations (3) to (5) of [Equation 2].

[0055]

Equation

[0056]

Equation

[0057] In Formula (1) and Formula (2), d, Δz, and L are defined as follows. As shown in FIG. 5A, d represents the depth from the surface 1a of the pipe 1 in the radial direction of the pipe 1 (hereinafter also simply referred to as the radial direction), and is represented by the azimuth coordinate α and the distance coordinate r. As shown in FIG. 5B, Δz represents the distance from the transmission position coordinate p (the position of the scanning line) to the reference point O (i.e., the origin O of the three-dimensional orthogonal coordinate system) of each coordinate in the polar coordinate system in the direction of the central axis C of the pipe 1. In the example of FIG. 5B, this reference point O (origin O) is set on the central axis C of the pipe 1. L represents the distance in the direction of the central axis C of the pipe 1 from the reference point O (origin O) to the reflection position.

[0058] Each symbol in Formulas (3) to (5) is defined as follows. R is the radius of the pipe 1, and more specifically, is the radial distance from the central axis C of the pipe 1 to the surface 1a (outer peripheral surface) of the pipe 1. r O represents the distance from the reference point O (origin O) to the reflection position. θ represents the angle formed by the line segment connecting the reference point O and the reflection position and the central axis C of the pipe 1 (the z-axis of the three-dimensional orthogonal coordinate system). φ represents the position of the reflection position in the circumferential direction around the central axis C. That is, φ represents the angle formed by the line segment connecting the foot of the perpendicular dropped from the reflection position to the yx plane of the three-dimensional orthogonal coordinate system and the reference point O and the x-axis of the three-dimensional orthogonal coordinate system.

[0059] The coordinate conversion unit 12 converts the above-mentioned polar coordinates (r o , θ, φ) indicating each reflection position into three-dimensional orthogonal coordinates (x, y, z) according to the following Formulas (6) to (8) of [Equation 3].

[0060]

Equation

[0061] In formulas (6) to (8), x, y, and z are the respective coordinate values of the x-axis, y-axis, and z-axis, which respectively indicate three mutually orthogonal linear directions in the actual space. Note that the origin O of the three-dimensional orthogonal coordinates (x, y, z) is located on the central axis C of the pipe 1, and the z-axis points in the direction of the central axis C.

[0062] <Group identification unit> Based on the inspection data of Euclidean coordinates (three-dimensional orthogonal coordinates), the group identification unit 13 identifies reflection positions whose Euclidean distances from each other are within a predetermined margin range as belonging to the same group. The predetermined margin range may be a preset distance range, and a predetermined upper limit value may be set as this range. When the group identification unit 13 identifies three or more reflection positions as belonging to the same group, the Euclidean distance between each reflection position of the reflection positions in the group and any one of the reflection positions in the group is within the predetermined margin range.

[0063] In the present embodiment, based on the inspection data of Euclidean coordinates, the group identification unit 13 identifies, as belonging to the same group, reflection positions whose Euclidean distances from each other are within the margin range among the plurality of reflection positions that constitute the candidates in the same group identified by the candidate identification unit 11. When there are a plurality of such candidates, the group identification unit 13, for each candidate, as described above, identifies, as belonging to the same group, reflection positions whose Euclidean distances from each other are within the margin range among the plurality of reflection positions that constitute the candidate. In this case, a plurality of groups are identified.

[0064] <Group integration unit> When the group identification unit 13 identifies a plurality of groups, the group integration unit 14 performs integration processing on the plurality of groups. That is, the group integration unit 14 identifies, as one same integrated group, two or more groups among the plurality of groups identified by the group identification unit 13 whose Euclidean distance from each other is within a predetermined margin range. The margin range may be a preset distance range, and a predetermined upper limit value may be set as the range. Note that the upper limit value used by the group integration unit 14 may be the same as the upper limit value used by the group identification unit 13, or may be larger or smaller than the upper limit value used by the group identification unit 13.

[0065] Here, the Euclidean distance between two groups may be the distance between the reflection position closest to the other group in one group and the reflection position closest to the one group in the other group.

[0066] When the group integration unit 14 identifies three or more groups as an integrated group, the Euclidean distance between each group constituting the integrated group and any one of the groups constituting the integrated group is within a predetermined margin range.

[0067] <Defect determination unit> Based on the inspection data (coordinate information and intensity information) of the Euclidean coordinates, when there is a reflection position whose reflection intensity is equal to or greater than the second threshold value in the integrated group identified by the group integration unit 14, the defect determination unit 15 determines that the integrated group is a defect site in the inspection object 1. The second threshold value is larger than the first threshold value described above.

[0068] <Display control unit> The display control unit 16 causes the inspection object 1 and the integration group to be displayed on the screen of the display in the Euclidean coordinate system based on the inspection data in the Euclidean coordinates. FIG. 6 shows an example of this display. As shown in FIG. 6, the display control unit 16 three-dimensionally displays the inspection object 1 in the orthogonal coordinate system on the screen of the display 17, and in the orthogonal coordinate system, based on the orthogonal coordinates (x, y, z) of each reflection position constituting the integration group, the integration group (and a plurality of groups constituting the integration group) is three-dimensionally displayed at the position of the orthogonal coordinates (x, y, z) in the inspection object 1. At this time, the display control unit 16 may display each coordinate axis (x-axis, y-axis, x-axis) and the origin O of the orthogonal coordinate system on the screen as shown in FIG. 6. Note that the display 17 may or may not be a component of the inspection data processing apparatus 10 as shown in FIG. 3.

[0069] The display control unit 16 displays each group constituting one integration group in a form that can be visually recognized as belonging to the same integration group (for example, in the same color). Further, when there are a plurality of integration groups, the display control unit 16 displays these integration groups in a form that can be visually recognized as being different from each other (for example, in different colors).

[0070] The display control unit 16 may display only the integration group determined to be a defective part by the defect determination unit 15 as described above. Alternatively, the display control unit 16 may display both the integration group determined to be a defective part by the defect determination unit 15 and the integration group not determined to be a defective part by the defect determination unit 15 as described above. In this case, the integration group determined to be a defective part may be displayed on the screen by the display control unit 16 in a form that can recognize that it is a defective part (for example, in a specific color or together with an indicator indicating that it is a defective part).

[0071] <Input device> The input device 18, when operated by a person, sets or changes, in accordance with the operation, the first threshold value used by the candidate specifying unit 11, the margin range used by the group specifying unit 13, the margin range used by the group integrating unit 14, and the second threshold value used by the defect determination unit 15. The input device 18 includes an operating device such as a keyboard, a mouse, a touch panel, and buttons that are operated by a person.

[0072] (Inspection data processing method) FIG. 7 is a flowchart of an inspection data processing method according to an embodiment of the present invention. This inspection data processing method is a method for processing inspection data in the scope coordinate system obtained by the ultrasonic flaw detection described above. Further, this method may be performed using the inspection data processing apparatus 10 described above. This method has steps S1 to S7.

[0073] In step S1, the inspection data in the scope coordinate system described above is input to the inspection data processing apparatus 10. Since this input may be made as described above, a detailed description thereof is omitted.

[0074] In step S2, the candidate specifying unit 11 specifies, as candidates for the same group, a plurality of reflection positions adjacent to or overlapping each other in the virtual space of the scope coordinate system based on the input inspection data of the scope coordinates. This process may be the same as any of processes A to C by the candidate specifying unit 11 described above, and thus a detailed description thereof is omitted.

[0075] In step S3, the coordinate conversion unit 12 converts the inspection data of the scope coordinates into inspection data of Euclidean coordinates. That is, the coordinate conversion unit 12 converts the scope coordinates (p, α, r) indicating each reflection position into three-dimensional orthogonal coordinates (x, y, z). This coordinate conversion may be performed only for each reflection position constituting the candidate for the group specified in step S2, may be performed for all reflection positions, or may be performed only for each reflection position where the above-described reflection intensity is equal to or greater than the above-described first threshold value. The coordinate conversion in step S3 is the same as the coordinate conversion by the coordinate conversion unit 12 described above, and thus a detailed description thereof is omitted.

[0076] The inspection data in the orthogonal coordinate system (Euclidean coordinate inspection data) converted in step S3 includes the coordinate-converted Euclidean coordinates (x, y, z) of each reflection position and the intensity information (echo value) indicating the above-described reflection intensity corresponding to the Euclidean coordinates (x, y, z). The subsequent steps S3 to S7 are performed based on the Euclidean coordinate inspection data.

[0077] In step S4, the group identification unit 13 identifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range, from among the plurality of reflection positions that constitute the candidates of the same group identified in step S2 as described above. For example, in the three-dimensional orthogonal coordinate system (Euclidean coordinate system), the group identification unit 13 calculates the Euclidean distance between each pair of reflection positions included in the plurality of reflection positions that constitute the candidates of the same group, based on the three-dimensional orthogonal coordinates (x, y, z) of the pair of reflection positions. Then, based on this calculation result, the group identification unit 13 identifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range, from among the plurality of reflection positions that constitute the candidates.

[0078] In step S5, when a plurality of candidates are identified in step S2 and a plurality of groups are identified in step S4, the group integration unit 14 identifies, as the same integrated group, groups among the plurality of groups whose Euclidean distance is within a predetermined margin range as described above. For example, in a three-dimensional orthogonal coordinate system (Euclidean coordinate system), for each pair of groups included in the plurality of groups, the group integration unit 14 calculates the Euclidean distance between each reflection position included in one group and each reflection position included in the other group based on the three-dimensional orthogonal coordinates (x, y, z) of the two reflection positions. If there is a Euclidean distance within the predetermined margin range among these Euclidean distances, the pair of groups is identified as the same integrated group. At this time, for the pair of groups, each time the group integration unit 14 calculates the Euclidean distance, it determines whether the Euclidean distance is within the predetermined margin range. If the determination result is affirmative, the pair of groups may be identified as the same integrated group without calculating the remaining Euclidean distances.

[0079] In step S6, the defect determination unit 15 determines whether there is a reflection position with a reflection intensity equal to or greater than the second threshold value in the integrated group, and determines that the integrated group for which the determination result is affirmative is a defect site in the inspection object 1. When a plurality of integrated groups are identified in step S4, step S6 is performed for each integrated group.

[0080] In step S7, the display control unit 16 displays the inspection object 1 and the integrated group on the screen of the display 17 in the Euclidean coordinate system based on the inspection data of the Euclidean coordinates. For example, an image like that in FIG. 6 is displayed on the screen. Note that the display by the display control unit 16 may be the same as described above, so detailed description is omitted.

[0081] (Program) The inspection data processing apparatus 10 according to the above-described embodiment can be realized by a computer, a program, and a storage medium. In this case, the program causes the computer to execute the above-described respective processes of the candidate specifying unit 11, the coordinate conversion unit 12, the group specifying unit 13, the group integrating unit 14, the defect determination unit 15, and the display control unit 16 (for example, the respective processes of steps S2 to S7 described above). In this case, the storage medium may be a computer-readable medium (for example, a storage medium such as a hard disk, a memory, or a CD-ROM of a computer) that non-temporarily stores the program.

[0082] (Effect of this embodiment) According to this embodiment, the following effects can be obtained.

[0083] Since the inspection data in the scope coordinates, which are non-Euclidean coordinates, is converted into the inspection data in Euclidean coordinates (orthogonal coordinates), the Euclidean distance between the reflection positions can be easily calculated, and the reflection positions whose Euclidean distances from each other are within a predetermined margin range can be automatically specified as the same group.

[0084] The candidate specifying unit 11 specifies a plurality of reflection positions adjacent to or overlapping each other in the virtual space of the scope coordinate system as candidates for the same group. The group specifying unit 13 specifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range among the plurality of reflection positions constituting the candidates for the same group. In this way, the calculation target of the Euclidean distance by the group specifying unit 13 is limited to the candidates specified by the candidate specifying unit 11. Therefore, it is not necessary to calculate the Euclidean distance for every pair of all the reflection positions included in the inspection data. Thus, the amount of calculation of the Euclidean distance can be significantly reduced.

[0085] Since the candidate specifying unit 11 specifies the candidates from among a plurality of reflection positions whose reflection intensity is equal to or greater than the first threshold value, the candidates that may have defects can be appropriately specified. In addition, when there is a reflection position equal to or greater than a second threshold value that is greater than the first threshold value within the group, the defect determination unit 15 determines that the group is a defect site in the inspection object 1. Thereby, it is possible to appropriately identify the group and determine whether the group is a defect. For example, the range of existence of the group that is a defect site can be specified with an appropriate width.

[0086] When a plurality of groups are specified by the group specifying unit 13, the group integrating unit specifies groups having a Euclidean distance within a predetermined margin range among the plurality of groups as the same group. Thereby, a wider range of groups that can be specified without using the above candidates can be specified as an integrated group.

[0087] Based on the inspection data of the Euclidean coordinates, the display control unit 16 displays the inspection object 1 and the group on the screen of the display 17 in the Euclidean coordinate system. Therefore, a person can easily grasp the existence position and range of the group of reflection positions by looking at the display.

[0088] (Specific example) FIGS. 8A and 8B show an example of inspection data of scope coordinates obtained by performing the above-described ultrasonic flaw detection inspection on the pipe 1. FIGS. 8A and 8B represent d = rsinα and rcosα instead of r and α among the above-described scope coordinates (p, r, α). That is, FIGS. 8A and 8B are images representing inspection data in a virtual space having a p-axis, a d-axis, and an rcos-axis. The p-axis indicates the transmission position p on the circumferential scanning line around the central axis C of the pipe 1, the d-axis indicates the depth rsinα from the transmission position p in the inspection plane, and the rcos-axis indicates the position in the direction parallel to the central axis C of the pipe 1. In FIGS. 8A and 8B, at each scope coordinate (p, r, α), the reflection intensity at the coordinate is indicated by the color tone of the pixel.

[0089] In FIG. 8A, the inspection data (pixels at each reflection position) is displayed by overlapping in the direction of the p-axis, and in FIG. 8B, the inspection data (pixels at each reflection position) is displayed by overlapping in the direction of the rcosα-axis.

[0090] In FIG. 8B, even reflection positions that are close to each other may be separated in the direction of the rcosα axis. For example, at this point, it may be difficult to identify reflection positions that are close to each other from FIGS. 8A and 8B as belonging to the same group. In contrast, in the present embodiment, as described above, reflection positions that are close to each other can be automatically identified, and inspection data can be three-dimensionally displayed in a three-dimensional orthogonal coordinate system that is easy to visually recognize.

[0091] The present invention is not limited to the above-described embodiments, and it goes without saying that various modifications can be made within the scope of the technical idea of the present invention. For example, the inspection data processing apparatus 10 according to the embodiment of the present invention does not necessarily have to have all of the above-described multiple matters, and may have only a part of the above-described multiple matters.

[0092] Also, any one of the following modification examples 1 to 3 may be adopted alone, or two or more of modification examples 1 to 3 may be arbitrarily combined and adopted. In this case, points not described below may be the same as those described above.

[0093] (Modification Example 1) The inspection data of the scope coordinates to be processed by the present invention may be inspection data of non-Euclidean coordinates representing each reflection position of ultrasonic waves, which are a plurality of coordinates including coordinates other than the coordinates indicating the position in the straight line direction of the actual space. Also, the inspection object 1 may be other than a pipe.

[0094] For example, in the case where inspection data of scope coordinates is obtained by an ultrasonic flaw detection inspection in which ultrasonic waves are transmitted from each transmission position p on a scanning line extending along the inspection object 1 into the inspection object 1 in each azimuth α in an inspection plane orthogonal to the scanning line, and the reflected waves of the ultrasonic waves are detected, the inspection data of the scope coordinates to be processed by the present invention may be data representing each reflection position of the ultrasonic waves with coordinates indicating the transmission position p on the scanning line (for example, a linear scanning line), angular coordinates indicating the azimuth α, and distance coordinates indicating the distance r from the transmission position p to the reflection position.

[0095] (Modification Example 2) The group integration unit 14 may be omitted. In this case, as shown in FIG. 9, the display control unit 16 three-dimensionally displays the inspection object 1 on the screen of the display 17 in a three-dimensional orthogonal coordinate system, and in the orthogonal coordinate system, based on the orthogonal coordinates (x, y, z) of each reflection position constituting the group, a plurality of groups are three-dimensionally displayed at the position of the orthogonal coordinates (x, y, z) in the inspection object 1.

[0096] Also, when the group integration unit 14 is omitted, the defect determination unit 15 may determine that the group in which a reflection position having a reflection intensity equal to or greater than the second threshold value exists among the groups specified by the group specifying unit 13 is a defect site in the inspection object 1 based on the inspection data (coordinate information and intensity information) in Euclidean coordinates.

[0097] In this case, the display control unit 16 may display only the group determined to be a defect site by the defect determination unit 15 as described above. Alternatively, the display control unit 16 may display both the group determined to be a defect site by the defect determination unit 15 and the group not determined to be a defect site by the defect determination unit 15 as described above. In this case, the group determined to be a defect site is displayed in a form in which it can be recognized that it is a defect site (for example, in a specific color or together with an index indicating that it is a defect site).

[0098] (Modification Example 3) Based on the inspection data in the scope coordinate system, the candidate specifying unit 11 may specify, in the virtual space of the scope coordinate system, a plurality of reflection positions whose separation of coordinate values (coordinate values of the corresponding coordinate axis) in the direction of the coordinate axis (more precisely, in the direction of any coordinate axis) is equal to or less than a predetermined upper limit value as candidates for the same group. In this case, for each reflection position constituting the candidate for the same group, the separation of the coordinate value (coordinate value of the corresponding coordinate axis) from any other reflection position constituting the candidate in the direction of any coordinate axis is equal to or less than the upper limit value. Note that this upper limit value may be set for each direction of the coordinate axis, or may be set to the same value for a plurality of directions of each of the plurality of coordinate axes.

[0099] In this case, other points may be the same as described above. For example, as described above, the group identification unit 13 identifies, from among a plurality of reflection positions that constitute candidates of the same group identified by the candidate identification unit 11, reflection positions whose Euclidean distances from each other are within a margin range as the same group based on the inspection data of Euclidean coordinates.

[0100] When the scope coordinate system includes a coordinate axis indicating the distance coordinate r indicating the distance from the scanning coordinate p and a coordinate axis indicating the angular coordinate α indicating the azimuth from the scanning coordinate p as shown in FIG. 2, the candidate identification unit 11 may be configured as follows. When determining whether the difference in the coordinate values of each pair of reflection positions from each other is equal to or less than a predetermined upper limit value in the direction of the coordinate axis indicating the angular coordinate α, the upper limit value used may be set to a larger value as the distance coordinate of the reflection position (for example, the larger distance coordinate of the distance coordinates of the pair of reflection positions) is larger. Note that the above-described upper limit value used by the candidate identification unit 11 in the direction of each coordinate axis other than the angular coordinate α may be constant.

Explanation of Signs

[0101] 1 Object to be inspected (pipe) 1a Surface 2 Probe 2a Vibrator 2b Ultrasonic propagation member 3 Inspection device 3a Storage unit 10 Inspection data processing device 11 Candidate identification unit 12 Coordinate conversion unit 13 Group identification unit 14 Group integration unit 15 Defect determination unit 16 Display control unit 16 17 Display 18 Input device Dc Scanning direction p Transmission position α Azimuth r Distance The origin of the three-dimensional orthogonal coordinate system

Claims

1. An inspection data processing apparatus for processing inspection data of scope coordinates obtained by ultrasonic flaw detection inspection on an object to be inspected, wherein the inspection data of the scope coordinates is inspection data of non-Euclidean coordinates representing each reflection position of ultrasonic waves with a plurality of coordinates including coordinates other than coordinates indicating positions in the linear direction of the actual space, a coordinate conversion unit that converts the inspection data of the scope coordinates into inspection data of Euclidean coordinates, and a group specifying unit that specifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range based on the inspection data of the Euclidean coordinates. An inspection data processing apparatus.

2. In the ultrasonic flaw detection inspection, ultrasonic waves are transmitted into the object to be inspected from each transmission position on a scanning line extending along the object to be inspected in each azimuth in an inspection plane orthogonal to the scanning line, and reflected waves of the ultrasonic waves are detected, wherein the inspection data of the scope coordinates is data representing each reflection position of ultrasonic waves with coordinates indicating the transmission positions on the scanning line, angular coordinates indicating the azimuths, and distance coordinates indicating the distances from the transmission positions to the reflection positions. The inspection data processing apparatus according to claim 1.

3. wherein the object to be inspected is a pipe, and the scanning line is a line extending along the outer peripheral surface of the pipe in the circumferential direction around the central axis of the pipe. The inspection data processing apparatus according to claim 2.

4. wherein the inspection data of the scope coordinates is data of a scope coordinate system having a plurality of coordinate axes each indicating the plurality of coordinates, and based on the inspection data of the scope coordinate system, a candidate specifying unit that specifies, as candidates for the same group, a plurality of reflection positions adjacent to each other in the virtual space of the scope coordinate system, wherein the group specifying unit specifies, as the same group, the reflection positions whose Euclidean distances from each other are within the margin range among the plurality of reflection positions constituting the candidates for the same group based on the inspection data of the Euclidean coordinates. The inspection data processing apparatus according to claim 1.

5. wherein the plurality of coordinate axes are orthogonal to each other, (A) assuming that the plurality of reflection positions adjacent to each other in the virtual space are a plurality of reflection positions adjacent to each other in the direction of the coordinate axis, the candidate specifying unit specifies the plurality of reflection positions as candidates for the same group, or (B) When the plurality of reflection positions adjacent to each other in the virtual space are adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis and parallel to the coordinate plane of the scope coordinate system, the candidate specifying unit specifies the plurality of reflection positions as candidates in the same group. Or, (C) When the plurality of reflection positions adjacent to each other in the virtual space are adjacent to each other in the direction of the coordinate axis or in an oblique direction with respect to the direction of the coordinate axis, the candidate specifying unit specifies the plurality of reflection positions as candidates in the same group. The inspection data processing apparatus according to claim 4.

6. The inspection data of the scope coordinates is data of a scope coordinate system having a plurality of coordinate axes respectively indicating the plurality of coordinates. Based on the inspection data of the scope coordinate system, in the virtual space of the scope coordinate system, a candidate specifying unit that specifies, as candidates in the same group, a plurality of reflection positions whose coordinate value differences from each other in the direction of the coordinate axis are equal to or less than a predetermined upper limit value. The group specifying unit specifies, as the same group, the reflection positions whose Euclidean distances from each other are within the margin range among the plurality of reflection positions constituting the candidates in the same group based on the inspection data of the Euclidean coordinates. The inspection data processing apparatus according to claim 1.

7. The inspection data of the scope coordinates includes intensity information indicating the reflection intensity of ultrasonic waves at each position in the virtual space of the scope coordinate system. The candidate specifying unit specifies the candidates on the assumption that each position where the reflection intensity of ultrasonic waves is equal to or greater than a first threshold value is the reflection position based on the intensity information. The inspection data processing apparatus according to any one of claims 4 to 6.

8. When the group specifying unit specifies a plurality of the groups, the inspection data processing apparatus according to claim 7, further comprising a group integrating unit that specifies, as the same group, groups whose Euclidean distances are within a predetermined margin range among the plurality of groups.

9. When there is a reflection position whose reflection intensity is equal to or greater than a second threshold value in the group, the group includes a defect determination unit that determines that the group is a defect site in the inspection object. The inspection data processing device according to claim 7, wherein the second threshold value is larger than the first threshold value.

10. The inspection data processing device according to any one of claims 4 to 6, further comprising a display control unit configured to display the inspection object and the group on a display screen in a Euclidean coordinate system based on the inspection data of the Euclidean coordinates.

11. An inspection data processing method for processing inspection data of scope coordinates obtained by ultrasonic flaw detection inspection on an inspection object, wherein the inspection data of the scope coordinates is non-Euclidean coordinate inspection data representing each reflection position of ultrasonic waves with a plurality of coordinates including coordinates other than coordinates indicating positions in a straight line direction in an actual space, the coordinate conversion unit converts the inspection data of the scope coordinates into inspection data of Euclidean coordinates, and the group specifying unit specifies, as the same group, the reflection positions whose Euclidean distances from each other are within a predetermined margin range based on the inspection data of the Euclidean coordinates.

12. The inspection data of the scope coordinates is data of a scope coordinate system having a plurality of coordinate axes each indicating the plurality of coordinates, a candidate specifying unit specifies, as candidates for the same group, a plurality of reflection positions adjacent to each other in a virtual space of the scope coordinate system based on the inspection data of the scope coordinate system, and the group specifying unit specifies, as the same group, the reflection positions whose Euclidean distances from each other are within the margin range among the plurality of reflection positions constituting the candidates for the same group based on the inspection data of the Euclidean coordinates. The inspection data processing method according to claim 11.

13. The plurality of coordinate axes are orthogonal to each other, (A) assuming that the plurality of reflection positions adjacent to each other in the virtual space are a plurality of reflection positions adjacent to each other in the direction of the coordinate axes, the candidate specifying unit specifies the plurality of reflection positions as candidates for the same group, or, (B) assuming that the plurality of reflection positions adjacent to each other in the virtual space are a plurality of reflection positions adjacent to each other in the direction of the coordinate axes or in a direction parallel to a coordinate plane of the scope coordinate system and oblique to the direction of the coordinate axes, the candidate specifying unit specifies the plurality of reflection positions as candidates for the same group, or, (C) Assuming that the plurality of reflection positions adjacent to each other in the virtual space are a plurality of reflection positions adjacent to each other in the direction of the coordinate axis or in a direction oblique to the direction of the coordinate axis, the candidate specifying unit specifies the plurality of reflection positions adjacent to each other as candidates in the same group. The inspection data processing method according to claim 12.

14. The inspection data of the scope coordinates is data of a scope coordinate system having a plurality of coordinate axes respectively indicating the plurality of coordinates. Based on the inspection data of the scope coordinate system, the candidate specifying unit specifies, as candidates in the same group, a plurality of reflection positions whose coordinate value differences in the direction of the coordinate axis in the virtual space of the scope coordinate system are equal to or less than a predetermined upper limit value. The inspection data processing method according to claim 11, wherein the group specifying unit specifies, as the same group, the reflection positions whose Euclidean distances are within the margin range from among the plurality of reflection positions constituting the candidates in the same group based on the inspection data of the Euclidean coordinates.

15. The inspection data processing method according to claim 11, further comprising a display control unit that displays the inspection object and the group on a display screen in a Euclidean coordinate system based on the inspection data of the Euclidean coordinates.

16. A program for causing a computer to execute the inspection data method according to any one of claims 11 to 15.

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