Fluid apparatus system

Abstract

To reduce the size of a fluid apparatus system.SOLUTION: A fluid apparatus system includes a flow passage member 50, a first valve which is arranged in a first region A1 and switches a flow state of a first flow passage, a second valve which is arranged in a second region A2 and switches a flow state of a second flow passage, and a third valve which is arranged in a third region A3 and switches an inflow state of a fluid from a third flow passage to the second flow passage. The first flow passage guides the fluid flowing in from an inflow port 101a to a first outflow port 101b1, the second flow passage guides the fluid flowing in from the third valve to a second outflow port 101b2, and the third flow passage guides the fluid flowing in from the first flow passage to a third outflow port 101b3. The inflow port 101a is connected to a flow control device, and is opened to a fourth region A4 which is coincident with the third region A3 in a first direction DR1 and is coincident with the first region A1 in a second direction DR2.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a fluid equipment system.

Background Art

[0002] Conventionally, a fluid equipment that discharges fluid supplied from a supply source to an inlet to any of a plurality of outlets has been known (see, for example, Patent Document 1). The fluid equipment disclosed in Patent Document 1 includes a first fluid unit having a plurality of first flow paths through which fluid flows along a first direction, and a second fluid unit having a plurality of second flow paths through which fluid flows along a second direction intersecting the first direction. A plurality of on-off valves are arranged at each of a plurality of positions where the plurality of first flow paths and the plurality of second flow paths intersect. The fluid equipment disclosed in Patent Document 1 can discharge, to the outside, the fluid that has flowed into the plurality of first flow paths through which fluid flows along the first direction, from a desired second flow path through which fluid flows along the second direction intersecting the first direction, by switching the opening and closing states of the plurality of on-off valves.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the fluid equipment disclosed in Patent Document 1, since the positions in the first direction where the plurality of second flow paths are arranged are different from each other, the size of the fluid equipment in the first direction increases according to the number of outlets for discharging to the outside from the second flow paths. In the example shown in FIG. 1, in order to provide five outlets in the second fluid unit, it is necessary to arrange second flow path members for five columns, and the size of the fluid equipment increases.

[0005] The present invention has been made in view of such circumstances, and an object thereof is to reduce the size of a fluid equipment system that selectively guides a fluid flowing in from an inlet to a plurality of outlets.

Means for Solving the Problems

[0006] In order to solve the above problems, the present invention employs the following means. The fluid equipment system according to the first aspect of the present invention includes a flow path member installed on an installation surface, a first valve installed in a first region of the flow path member when the installation surface is viewed in plan and switching the flow state of the fluid flowing through the first flow path, a second valve installed in a second region of the flow path member when the installation surface is viewed in plan and switching the flow state of the fluid flowing through the second flow path, a third valve installed in a third region of the flow path member when the installation surface is viewed in plan and switching the inflow state of the fluid from the third flow path to the second flow path, and a fluid equipment for supplying fluid to the flow path member. The second region coincides with the first region in a first direction parallel to the installation surface and is an adjacent region to the first region in a second direction parallel to the installation surface and orthogonal to the first direction. The third region is an adjacent region to the second region in the first direction and coincides with the second region in the second direction. In the first region, an inlet through which fluid flows in from the fluid equipment and a first outlet for discharging the fluid flowing in from the inlet to the outside are formed. In the second region, a second outlet for discharging fluid to the outside is formed. In the third region, a third outlet for discharging fluid to the outside is formed. The first flow path is formed in the first region so as to guide the fluid flowing in from the inlet to the first outlet via the first valve. The second flow path is formed in the second region and the third region so as to guide the fluid flowing in from the third valve to the second outlet via the second valve. The third flow path is formed in the first region, the second region, and the third region so as to guide the fluid flowing in from the first flow path to the third outlet. The inlet is connected to the fluid equipment and opens toward a fourth region that coincides with the third region in the first direction and coincides with the first region in the second direction.

[0007] According to the fluid equipment system according to the first aspect of the present invention, fluid flows into the inlet formed in the first region of the flow path member along the first direction. Further, fluid flows out along the first direction from the first outlet formed in the first region of the flow path member, the second outlet formed in the second region of the flow path member, and the third outlet formed in the third region of the flow path member. Since the direction in which fluid flows into the flow path member and the direction in which fluid flows out of the flow path member are the same, the size of the fluid equipment system can be reduced as compared with the case where these are in different directions.

[0008] Further, the inlet is connected to the fluid equipment and opens toward a fourth region that coincides with the third region in the first direction and coincides with the first region in the second direction. Since the fluid equipment connected to the inlet and the flow path member can be connected in the fourth region, the size of the fluid equipment system can be reduced.

[0009] The fluid equipment system according to the second aspect of the present invention has the following further configuration in the first aspect. That is, the first valve switches between a first outflow state in which fluid flows from the inlet to the first outlet and a first shut-off state in which fluid does not flow from the inlet to the first outlet, the second valve switches between a second outflow state in which fluid flows from the third flow path to the second outlet and a second shut-off state in which fluid does not flow from the third flow path to the second outlet, and the third valve adjusts the flow rate of the fluid flowing from the third flow path to the second flow path in the second outflow state.

[0010] According to the fluid equipment system according to the second aspect of the present invention, the first valve can switch between a first outflow state in which fluid flows out from the first outlet and a first shut-off state in which fluid does not flow out from the first outlet. Further, the second valve can switch between a second outflow state in which fluid flows out from the second outlet and a first shut-off state in which fluid does not flow out from the second outlet. Furthermore, the third valve can adjust the flow rate of the fluid flowing from the third flow path to the second flow path in the second outflow state.

[0011] The fluid equipment system according to the third aspect of the present invention has the following further configuration in the first aspect or the second aspect. That is, the third flow path is disposed vertically below the second flow path in the second region.

[0012] According to the fluid equipment system according to the third aspect of the present invention, since the third flow path is disposed vertically below the second flow path in the second region, the second flow path and the third flow path can be appropriately disposed in the second region of the flow path member without interfering with each other.

[0013] The fluid equipment system according to the fourth aspect of the present invention includes a flow path member installed on an installation surface, a first valve installed in a first region of the flow path member when the installation surface is viewed in a plan view and switching the inflow state of fluid from a first flow path to a second flow path, a second valve installed in a second region of the flow path member when the installation surface is viewed in a plan view and switching the flow state of the fluid flowing through the second flow path, a third valve installed in a third region of the flow path member when the installation surface is viewed in a plan view and switching the inflow state of fluid from a third flow path to a fourth flow path, and a fourth valve installed in a fourth region of the flow path member when the installation surface is viewed in a plan view and switching the flow state of the fluid flowing through the fourth flow path. The second region is a region adjacent to the first region in a first direction parallel to the installation surface and coinciding with the first region in a second direction parallel to the installation surface and orthogonal to the first direction. The third region is a region coinciding with the first region in the first direction and adjacent to the first region in the second direction. The fourth region is a region coinciding with the second region in the first direction and coinciding with the third region in the second direction. In the first region, a first inlet through which fluid flows in and a first outlet through which the fluid flowing in from the first inlet flows out to the outside along one side in the first direction are formed. In the second region, a second inlet through which fluid flows in and a second outlet through which the fluid flows out to the outside along the other side in the first direction are formed. In the third region, a third outlet through which the fluid flows out to the outside along the one side in the first direction is formed. In the fourth region, a fourth outlet through which the fluid flows out to the outside along the other side in the first direction is formed. The first flow path is formed in the first region so as to guide the fluid flowing in from the first inlet to the first outlet. The second flow path is formed in the first region and the second region so as to guide the fluid flowing in from the first valve to the second outlet via the second valve. The third flow path is formed in the second region, the third region, and the fourth region so as to guide the fluid flowing in from the second inlet to the third outlet. The fourth flow path is via the fourth valve,It is formed in the third region and the fourth region so as to guide the fluid flowing in from the third valve to the fourth outlet.

[0014] According to the fluid equipment system according to the fourth aspect of the present invention, since the first valve, the second valve, the third valve, and the fourth valve are arranged in each of the first region, the second region, the third region, and the fourth region, which are four adjacent regions, the size of the fluid equipment system can be reduced as compared with the case where a part of these is arranged in non-adjacent regions.

[0015] Further, according to the fluid equipment system according to the fourth aspect of the present invention, fluid flows out along one side in the first direction from the first outlet formed in the first region of the flow path member and the third outlet formed in the third region of the flow path member, and fluid flows out along the other side in the first direction from the second outlet formed in the second region of the flow path member and the fourth outlet formed in the fourth region of the flow path member. Each of the directions in which fluid flows out from the flow path member is the first direction, and the outflow directions are divided into one side and the other side. Therefore, the size of the fluid equipment system can be reduced as compared with the case where these are in different directions or fluid flows out only on one side or the other side.

[0016] The fluid equipment system according to the fifth aspect of the present invention has the following further configuration in the fourth aspect. That is, the first valve adjusts the flow rate of the fluid flowing from the first flow path into the second flow path, the second valve switches between a state where fluid flows out from the second outlet and a state where fluid does not flow out from the second outlet, the third valve adjusts the flow rate of the fluid flowing from the third flow path into the fourth flow path, and the fourth valve switches between a state where fluid flows out from the fourth outlet and a state where fluid does not flow out from the fourth outlet.

[0017] According to the fluid equipment system according to the fifth aspect of the present invention, the first valve can adjust the flow rate of the fluid flowing from the first flow path to the second flow path. Further, the second valve can switch between a state where the fluid flows out from the second outlet and a state where the fluid does not flow out from the second outlet. Further, the third valve can adjust the flow rate of the fluid flowing from the third flow path to the fourth flow path. Further, the fourth valve can switch between a state where the fluid flows out from the fourth outlet and a state where the fluid does not flow out from the fourth outlet.

[0018] The fluid equipment system according to the sixth aspect of the present invention has the following further configuration in the fourth aspect or the fifth aspect. That is, the third flow path is arranged vertically below the fourth flow path in the fourth region.

[0019] According to the fluid equipment system according to the sixth aspect of the present invention, since the third flow path is arranged vertically below the fourth flow path in the fourth region, the third flow path and the fourth flow path can be appropriately arranged in the fourth region of the flow path member without interfering with each other.

Effect of the Invention

[0020] According to the present invention, the size of the fluid equipment system that selectively guides the fluid flowing in from the inlet to a plurality of outlets can be reduced.

Brief Description of the Drawings

[0021]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Mode for Carrying Out the Invention

[0022] 〔First Embodiment〕 Hereinafter, a fluid equipment system 100 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a fluid equipment system 100 according to an embodiment of the present invention. FIG. 2 is a schematic configuration diagram showing the fluid equipment system 100 according to the first embodiment of the present invention.

[0023] As shown in FIG. 1, the fluid equipment system 100 of the present embodiment includes a first valve 10, a second valve 20, a third valve 30, a flow rate adjusting device (fluid equipment) 40, and a flow path member 50.

[0024] As shown in FIG. 2, the fluid equipment system 100 of the present embodiment is a device capable of causing a fluid (chemical solution such as pure water or hydrofluoric acid) supplied from the flow rate adjusting device 40 to the inlet 101a to flow out to at least any one of the first outlet 101b1, the second outlet 101b2, and the third outlet 101b3.

[0025] The first valve 10 is a shut-off valve that switches the flow state of the fluid flowing through the first flow path 110. As shown in FIG. 2, the first flow path 110 is a flow path that allows the fluid to flow from the inlet 101a via the branch position B1 to the first outlet 101b1.

[0026] FIG. 3 is a cross-sectional view taken along the line A-A of the fluid equipment system shown in FIG. 1. As shown in FIG. 3, the first valve 10 includes a switching mechanism 12 that switches between a first outflow state in which the fluid flows from the inlet 101a to the first outlet 101b1 and a first shut-off state in which the fluid does not flow from the inlet 101a to the first outlet 101b1 by bringing the valve body portion 11 into contact with or separating it from the valve seat portion 51 of the flow path member 50 along the vertical direction VD.

[0027] The second valve 20 is a shut-off valve that switches the flow state of the fluid flowing through the second flow path 120. As shown in FIG. 2, the second flow path 120 is a flow path that allows the fluid to flow from the branch position B2 to the second outlet 101b2.

[0028] FIG. 4 is a cross-sectional view taken along the line B-B of the fluid equipment system shown in FIG. 1. FIG. 5 is a cross-sectional view taken along the line C-C of the fluid equipment system 100 shown in FIG. 1. As shown in FIGS. 4 and 5, the second valve 20 includes a switching mechanism 22 that switches between a second outflow state in which the fluid flows from the third flow path 130 through the second flow path 120 to the second outlet 101b2 and a second shut-off state in which the fluid does not flow from the third flow path 130 through the second flow path 120 to the second outlet 101b2 by bringing the valve body portion 21 into contact with or separating it from the valve seat portion 52 of the flow path member 50 along the vertical direction VD.

[0029] The third valve 30 is a flow rate adjustment valve that switches the inflow state of the fluid from the third flow path 130 to the second flow path 120. As shown in FIG. 2, the third flow path 130 is a flow path that allows the fluid to flow from the branch position B1 via the branch position B2 to the third outlet 101b3.

[0030] As shown in FIG. 4, the third valve 30 includes an adjustment mechanism 32 that adjusts the flow rate of the fluid flowing from the third flow path 130 into the second flow path 120 via the second flow path 120 in the second outflow state where the fluid flows from the third flow path 130 to the second outlet 101b2. The adjustment mechanism 32 adjusts the flow rate of the fluid flowing from the third flow path 130 into the second flow path 120 by bringing the valve body portion 31 closer to or separating it from the valve seat portion 53 of the flow path member 50 along the vertical direction VD.

[0031] The flow rate adjustment device 40 is a device that adjusts the inflow rate of the fluid flowing into the inlet 101a of the flow path member 50. The flow rate adjustment device 40 includes a flow rate measurement unit (not shown) and a flow rate adjustment unit (not shown). The flow rate adjustment device 40 controls the flow rate adjustment unit so that the flow rate measured by the flow rate measurement unit matches a preset flow rate. The flow rate adjustment device 40 supplies fluid at a preset flow rate to the inlet 101a of the flow path member 50. Note that instead of the flow rate adjustment device 40, a flow meter having only a flow meter side portion without a flow rate adjustment portion may be installed.

[0032] The fluid equipment system 100 of the present embodiment switches whether the fluid flowing in from the inlet 101a flows out from the first outlet 101b1 by the first valve 10, switches whether the fluid flowing in from the inlet 101a flows out from the second outlet 101b2 by the second valve 20, and adjusts the flow rate of the fluid flowing out from the second outlet 101b2 by the third valve 30. The fluid equipment system 100 can supply fluid at a preset flow rate to the first outlet 101b1, the second outlet 101b2, and the third outlet 101b3 at desired flow rates by the flow rate adjustment device 40.

[0033] The flow path member 50 is a member installed on the installation surface S via the base members 61, 62, and 63. The flow path member 50 is formed of, for example, a fluororesin material. As shown in FIGS. 3 and 5, the flow path member 50 is disposed in a state of being sandwiched between the base member 61 and the first valve 10. As shown in FIGS. 4 and 5, the flow path member 50 is disposed in a state of being sandwiched between the base member 62 and the second valve 20. As shown in FIG. 4, the flow path member 50 is disposed in a state of being sandwiched between the base member 63 and the third valve 30.

[0034] The base members 61, 62, and 63 are each fixed to the installation surface S by fastening bolts (not shown). Further, the flow path member 50 is fixed to each of the base members 61, 62, and 63 by fastening bolts (not shown).

[0035] FIG. 6 is a plan view of the flow path member 50 shown in FIG. 1. As shown in FIG. 6, when the installation surface S is viewed in plan, the flow path member 50 has a first region A1 where the first valve 10 is installed, a second region A2 where the second valve 20 is installed, and a third region A3 where the third valve 30 is installed. The first region A1 is a rectangular region having positions P12, P13, P22, and P23 as vertices. The second region A2 is a rectangular region having positions P22, P23, P32, and P33 as vertices. The third region A3 is a rectangular region having positions P21, P22, P31, and P32 as vertices.

[0036] As shown in FIG. 6, the second region A2 coincides with the first region A1 in the first direction DR1 parallel to the installation surface S and is adjacent to the first region A1 in the second direction DR2 parallel to the installation surface S and orthogonal to the first direction DR1. The third region A3 is adjacent to the second region A2 in the first direction DR1 and coincides with the second region A2 in the second direction DR2.

[0037] In the first region A1, an inlet 101a through which fluid flows in from the flow rate adjusting device 40 along the first direction DR1, and a first outlet 101b1 through which the fluid flowing in from the inlet 101a flows out to the outside along the first direction DR1 are formed. The inlet 101a is connected to the flow rate adjusting device 40 and opens toward the fourth region A4.

[0038] The fourth region A4 is a region that coincides with the third region A3 in the first direction DR1 and coincides with the first region A1 in the second direction DR2. The fourth region A4 is a rectangular region with vertices at positions P11, P12, P21, and P22.

[0039] In the second region A2, a second outlet 101b2 through which fluid flows out to the outside along the first direction DR1 is formed. In the third region A3, a third outlet 101b3 through which fluid flows out to the outside along the first direction DR1 is formed.

[0040] The first flow path 110 is formed in the first region A1 so as to guide the fluid flowing in from the inlet 101a to the first outlet 101b1 via the first valve 10. The first flow path 110 has a valve chamber 110a in which the valve body portion 11 of the first valve 10 is accommodated, an inflow flow path 110b that communicates the inlet 101a and the valve chamber 110a, and an outflow flow path 110c that communicates the valve chamber 110a and the first outlet 101b1.

[0041] The second flow path 120 is formed in the second region A2 and the third region A3 so as to guide the fluid flowing in from the third valve 30 to the second outlet 101b2 via the second valve 20. The second flow path 120 has a valve chamber 120a in which the valve body portion 21 of the second valve 20 is accommodated, an inflow flow path 120b that communicates the valve chamber 120d of the third valve 30 and the valve chamber 120a, an outflow flow path 120c that communicates the valve chamber 120a and the second outlet 101b2, and a valve chamber 120d in which the valve body portion 31 of the third valve 30 is accommodated.

[0042] The third flow path 130 is formed in the first region A1, the second region A2, and the third region A3 so as to guide the fluid flowing in from the first flow path 110 to the third outlet 101b3. The third flow path 130 includes a connection flow path 130b that communicates the valve chamber 110a and the connection portion 131 below the valve chamber 120a, and an outflow flow path 130c that communicates the connection portion 131 and the third outlet 101b3. The third flow path 130 is disposed below the outflow flow path 120c of the second flow path 120 in the vertical direction VD in the second region A2.

[0043] The operations and effects of the fluid equipment system 100 of the present embodiment described above will be described. According to the fluid equipment system 100 of the present embodiment, fluid flows into the inlet 101a formed in the first region A1 of the flow path member 50. Further, the fluid flows out along the second direction DR2 orthogonal to the first direction DR1 from the first outlet 101b1 formed in the first region A1 of the flow path member 50, the second outlet 101b2 formed in the second region A2 of the flow path member 50, and the third outlet 101b3 formed in the third region A3 of the flow path member 50. Since the directions in which the fluid flows into and out of the flow path member 50 are the same, the size of the fluid equipment system 100 can be reduced as compared with the case where these directions are different.

[0044] Further, the inlet 101a is connected to the flow rate adjustment device 40 and opens toward the fourth region A4 that coincides with the third region A3 in the first direction DR1 and coincides with the first region A1 in the second direction DR2. Since the flow rate adjustment device 40 connected to the inlet 101a and the flow path member 50 can be connected in the fourth region A4, the size of the fluid equipment system 100 can be reduced.

[0045] 〔Second Embodiment〕 Hereinafter, the fluid equipment system 100A of the second embodiment of the present invention will be described with reference to the drawings. FIG. 7 is a plan view showing the fluid equipment system 100A of the second embodiment of the present invention. FIG. 8 is a schematic configuration diagram showing the fluid equipment system 100A of the first embodiment of the present invention.

[0046] The fluid equipment system 100 of the first embodiment causes the fluid flowing into the flow path member 50 from a single inlet 101a to flow out to three outlets, i.e., a first outlet 101b1, a second outlet 101b2, and a third outlet 101b3. In contrast, the fluid equipment system 100 of the present embodiment causes the fluid flowing into the flow path member 50A from a first inlet 101Aa1 to flow out to a first outlet 101Ab1 and a second outlet 101Ab2, and causes the fluid flowing into the flow path member 50A from a second inlet 101Aa2 to flow out to a third outlet 101Ab3 and a fourth outlet 101Ab4.

[0047] As shown in FIG. 7, the fluid equipment system 100A of the present embodiment includes a first valve 10A, a second valve 20A, a third valve 30A, a fourth valve 40A, and a flow path member 50A.

[0048] As shown in FIG. 8, the fluid equipment system 100A of the present embodiment is a device capable of causing the fluid (chemical solution such as pure water or hydrofluoric acid) supplied to the first inlet 101Aa1 to flow out to at least one of the first outlet 101b1 and the second outlet 101b2, and causing the fluid supplied to the second inlet 101Aa2 to flow out to at least one of the third outlet 101b3 and the fourth outlet 101b4.

[0049] The first valve 10A is a flow rate adjustment valve that switches the inflow state of the fluid from the first flow path 210 to the second flow path 220. As shown in FIG. 8, the first flow path 210 is a flow path that allows the fluid to flow from the first inlet 101Aa1 through the branch position B1 to the first outlet 101Ab1.

[0050] FIG. 9 is a cross-sectional view taken along the line D-D of the fluid equipment system 100A shown in FIG. 7. FIG. 11 is a cross-sectional view taken along the line F-F of the fluid equipment system 100A shown in FIG. 7. As shown in FIGS. 9 and 11, the first valve 10A includes an adjustment mechanism 12A for adjusting the flow rate of the fluid flowing from the first flow path 210 to the second flow path 220. The adjustment mechanism 12A adjusts the flow rate of the fluid flowing from the first flow path 210 to the second flow path 220 by bringing the valve body portion 11A closer to or separating it from the valve seat portion 51A of the flow path member 50A along the vertical direction VD.

[0051] The second valve 20A is a shut-off valve for switching the flow state of the fluid flowing through the second flow path 220. As shown in FIG. 8, the second flow path 220 is a flow path for allowing the fluid to flow from the branch position B1 to the second outlet 101b2 via the first valve 10A and the second valve 20A.

[0052] As shown in FIG. 9, the second valve 20A includes a switching mechanism 22A for switching between a flow state in which the fluid flows from the first flow path 210 through the second flow path 220 to the second outlet 101Ab2 and a shut-off state in which the fluid does not flow from the first flow path 210 through the second flow path 220 to the second outlet 101Ab2 by bringing the valve body portion 21A into contact with or separating it from the valve seat portion 52A of the flow path member 50A along the vertical direction VD.

[0053] The third valve 30A is a flow rate adjustment valve for switching the inflow state of the fluid from the third flow path 230 to the fourth flow path 240. As shown in FIG. 8, the third flow path 230 is a flow path for allowing the fluid to flow from the second inlet 101Aa2 through the branch position B2 to the third outlet 101Ab3.

[0054] FIG. 10 is a cross-sectional view taken along the line E-E of the fluid equipment system 100A shown in FIG. 7. As shown in FIGS. 10 and 11, the third valve 30A includes an adjustment mechanism 32A for adjusting the flow rate of the fluid flowing from the third flow path 230 to the fourth flow path 240. The adjustment mechanism 32A adjusts the flow rate of the fluid flowing from the third flow path 230 to the fourth flow path 240 by bringing the valve body portion 31A closer to or separating it from the valve seat portion 53A of the flow path member 50A along the vertical direction VD.

[0055] The fourth valve 40A is a shut-off valve that switches the flow state of the fluid flowing through the fourth flow path 240. As shown in FIG. 8, the fourth flow path 240 is a flow path that allows fluid to flow from the branch position B2 through the third valve 30A and the fourth valve 40A to the fourth outlet 101Ab4.

[0056] FIG. 12 is a cross-sectional view taken along the line G-G of the fluid equipment system 100A shown in FIG. 7. As shown in FIGS. 10 and 12, the fourth valve 40A includes a switching mechanism 42A that switches between a flow state in which fluid flows from the third flow path 230 through the fourth flow path 240 to the fourth outlet 101Ab4 and a shut-off state in which fluid does not flow from the third flow path 230 through the fourth flow path 240 to the fourth outlet 101Ab4 by bringing the valve body portion 41A into contact with or separating it from the valve seat portion 54A of the flow path member 50A along the vertical direction VD.

[0057] The fluid equipment system 100A of the present embodiment adjusts the flow rate of the fluid flowing from the first flow path 210 to the second flow path 220 by the first valve 10A, and switches whether the fluid flowing in from the first inlet 101Aa1 flows out from the second outlet 101b2 by the second valve 20A. Further, the fluid equipment system 100A adjusts the flow rate of the fluid flowing from the third flow path 230 to the fourth flow path 240 by the third valve 30A, and switches whether the fluid flowing in from the second inlet 101Aa2 flows out from the fourth outlet 101b4 by the fourth valve 40A.

[0058] The flow path member 50A is a member installed on the installation surface S via the base members 61A, 62A, 63A, and 64A. The flow path member 50A is formed of, for example, a fluororesin material. As shown in FIGS. 9 and 11, the flow path member 50A is disposed in a state of being sandwiched between the base member 61A and the first valve 10A. As shown in FIGS. 9 and 12, the flow path member 50A is disposed in a state of being sandwiched between the base member 62A and the second valve 20A. As shown in FIGS. 10 and 11, the flow path member 50A is disposed in a state of being sandwiched between the base member 63A and the third valve 30A. As shown in FIGS. 10 and 12, the flow path member 50A is disposed in a state of being sandwiched between the base member 64A and the fourth valve 40A.

[0059] The base members 61A, 62A, 63A, and 64A are each fixed to the installation surface S by fastening bolts (not shown). Further, the flow path member 50A is fixed to each of the base members 61A, 62A, 63A, and 64A by fastening bolts (not shown).

[0060] FIG. 13 is a plan view of the flow path member 50A shown in FIG. 7. As shown in FIG. 13, when the installation surface S is viewed in plan, the flow path member 50A has a first region A1 where the first valve 10A is installed, a second region A2 where the second valve 20A is installed, and a third region A3 where the third valve 30A is installed. The first region A1 is a rectangular region having vertices at positions P11, P12, P21, and P22. The second region A2 is a rectangular region having vertices at positions P12, P13, P22, and P23. The third region A3 is a rectangular region having vertices at positions P21, P22, P31, and P32. The fourth region A4 is a rectangular region having vertices at positions P22, P23, P32, and P33.

[0061] As shown in FIG. 13, the second region A2 is adjacent to the first region A1 in the first direction DR1 parallel to the installation surface S, and coincides with the first region A1 in the second direction DR2 parallel to the installation surface S and orthogonal to the first direction DR1. The third region A3 is a region that coincides with the first region A1 in the first direction DR1 and is adjacent to the first region A1 in the second direction DR2. The fourth region A4 is a region that coincides with the second region A2 in the first direction DR1 and coincides with the third region A3 in the second direction DR2.

[0062] In the first region A1, a first fluid inlet 101Aa1 through which fluid flows in and a first fluid outlet 101Ab1 through which the fluid flowing in from the first fluid inlet 101Aa1 flows out to the outside along one side (the left side in FIG. 13) of the first direction DR1 are formed. In the second region A2, a second fluid inlet 101Aa2 through which fluid flows in and a second fluid outlet 101Ab2 through which the fluid flows out to the outside along the other side (the right side in FIG. 13) of the first direction DR1 are formed. In the third region A3, a third fluid outlet 101Ab3 through which the fluid flows out to the outside along one side of the first direction DR1 is formed. In the fourth region A4, a fourth fluid outlet 101Ab4 through which the fluid flows out to the outside along the other side of the first direction DR1 is formed.

[0063] The first flow path 210 is formed in the first region A1 so as to guide the fluid flowing in from the first fluid inlet 101Aa1 to the first fluid outlet 101Ab1. The first flow path 210 has an outflow flow path 210b that communicates the first fluid inlet 101Aa1 and the first fluid outlet 101Ab1.

[0064] The second flow path 220 is formed in the first region A1 and the second region A2 so as to guide the fluid flowing in from the first valve 10A to the second fluid outlet 101Ab2 via the second valve 20A. The second flow path 220 has a valve chamber 220a that houses the valve body portion 21A, a connection flow path 220b that communicates the valve chamber 220a and the valve chamber 210a, and an outflow flow path 220c that communicates the valve chamber 220a and the second fluid outlet 101Ab2.

[0065] The third flow path 230 is formed in the second region A2, the third region A3, and the fourth region A4 so as to guide the fluid flowing in from the second inlet 101Aa2 to the third outlet 101Ab3. The third flow path 230 is a flow path that connects the second inlet 101Aa2 and the third outlet 101Ab3. The third flow path 230 is disposed below the outflow flow path 240c of the fourth flow path 240 in the vertical direction VD in the fourth region A4.

[0066] The fourth flow path 240 is formed in the third region A3 and the fourth region A4 so as to guide the fluid flowing in from the third valve 30A to the fourth outlet 101Ab4 via the fourth valve 40A. The fourth flow path 240 includes a valve chamber 240a that houses the valve body portion 41A, a connection flow path 240b that connects the valve chamber 240a and the valve chamber 240d, an outflow flow path 240c that connects the valve chamber 240a and the fourth outlet 101Ab4, and a valve chamber 240d that houses the valve body portion 31A of the third valve 30A.

[0067] Instead of the flow path member 50A shown in FIG. 13, a modified flow path member 50B shown in FIG. 14 may be employed. FIG. 14 is a plan view showing a modified example of the flow path member 50B according to the second embodiment of the present invention. The flow path member 50B shown in FIG. 14 is different from the flow path member 50A shown in FIG. 13 in that the fluids flowing out from the second outlet 101Ab2 and the fourth outlet 101Ab4 are joined inside and then guided to a single fifth outlet 101Ab5. By adopting the flow path member 50B instead of the flow path member 50A, the fluids flowing out from the second outlet 101Ab2 and the fourth outlet 101Ab4 can be discharged to the outside from a single fifth outlet 101Ab5.

[0068] According to the fluid device system 100A of the present embodiment, since the first valve 10A, the second valve 20A, the third valve 30A, and the fourth valve 40A are arranged in the first region A1, the second region A2, the third region A3, and the fourth region A4, which are four adjacent regions, respectively, the size of the fluid device system 100A can be reduced as compared with the case where some of them are arranged in non-adjacent regions.

[0069] Also, according to the fluid equipment system 100A of the present embodiment, fluid flows out along one side in the first direction DR1 from the first outlet 101Ab1 formed in the first region A1 of the flow path member 50A and the third outlet 101Ab3 formed in the third region A3 of the flow path member 50A, and fluid flows out along the other side in the first direction DR1 from the second outlet 101Ab2 formed in the second region A2 of the flow path member 50A and the fourth outlet 101Ab4 formed in the fourth region A4 of the flow path member 50A. Each of the directions in which fluid flows out from the flow path member 50A is the first direction DR1, and the outflow directions are divided into one side and the other side. Therefore, the size of the fluid equipment system 100A can be reduced compared to the case where these are in different directions or the case where fluid flows out only on one side or the other side.

Explanation of Signs

[0070] 10, 10A First valve 11, 11A Valve body part 12 Switching mechanism 12A Adjusting mechanism 20, 20A Second valve 21, 21A Valve body part 22, 22A Switching mechanism 30, 30A Third valve 31, 31A Valve body part 32, 32A Adjusting mechanism 40 Fluid equipment 50, 50A Flow path member 51, 52, 53 Valve seat part 61, 61A, 62, 62A, 63, 63A, 64A Base member 100, 100A Fluid equipment system 101a Inlet 101Aa1 First inlet 101Aa2 Second inlet 101b1, 101Ab1 First outlet 101b2, 101Ab2 Second outlet 101b3, 101Ab3 Third outlet 110, 210 First flow path Chambers 110a, 120a, 210a, 220a, 240a, 240d Inflow passage 110b Outflow passage 110c Second flow path 120 Inflow passage 120b Outflow passage 120c Third flow path 130 Connection passage 130b Outflow passage 130c Connection part 131 First region A1 Second region A2 Third region A3 Fourth region A4 Branching positions B1, B2 First direction DR1 Second direction DR2 Vertical direction VD Installation surface S

Claims

1. A flow path member installed on an installation surface, a first valve installed in a first region of the flow path member when the installation surface is viewed in plan view and switching the flow state of a fluid flowing through a first flow path, a second valve installed in a second region of the flow path member when the installation surface is viewed in plan view and switching the flow state of a fluid flowing through a second flow path, a third valve installed in a third region of the flow path member when the installation surface is viewed in plan view and switching the inflow state of a fluid from the third flow path to the second flow path, and a fluid device for supplying fluid to the flow path member. The second region coincides with the first region in a first direction parallel to the installation surface and is a region adjacent to the first region in a second direction parallel to the installation surface and orthogonal to the first direction, The third region is a region adjacent to the second region in the first direction and coinciding with the second region in the second direction, In the first region, a fluid inlet through which fluid flows in from the fluid device, and a first fluid outlet for discharging the fluid flowing in from the fluid inlet to the outside along the first direction are formed. In the second region, a second fluid outlet for discharging fluid to the outside along the first direction is formed. In the third region, a third fluid outlet for discharging fluid to the outside along the first direction is formed. The first flow path is formed in the first region so as to guide the fluid flowing in from the fluid inlet to the first fluid outlet via the first valve. The second flow path is formed in the second region and the third region so as to guide the fluid flowing in from the third valve to the second fluid outlet via the second valve. The third flow path is formed in the first region, the second region, and the third region so as to guide the fluid flowing in from the first flow path to the third fluid outlet. The fluid inlet is connected to the fluid device and opens toward a fourth region that coincides with the third region in the first direction and coincides with the first region in the second direction. A fluid device system.

2. The first valve switches between a first outflow state in which fluid flows from the fluid inlet to the first fluid outlet and a first shut-off state in which fluid does not flow from the fluid inlet to the first fluid outlet, The second valve switches between a second outflow state in which fluid flows from the third flow path to the second fluid outlet and a second shut-off state in which fluid does not flow from the third flow path to the second fluid outlet, The fluid equipment system according to claim 1, wherein the third valve adjusts the flow rate of the fluid flowing from the third flow path to the second flow path in the second outflow state.

3. The fluid equipment system according to claim 1 or 2, wherein the third flow path is arranged below the second flow path in the vertical direction in the second region.

4. A flow path member installed on an installation surface, A first valve installed in a first region of the flow path member when the installation surface is viewed in plan view, and switching the inflow state of the fluid from the first flow path to the second flow path, A second valve installed in a second region of the flow path member when the installation surface is viewed in plan view, and switching the flow state of the fluid flowing through the second flow path, A third valve installed in a third region of the flow path member when the installation surface is viewed in plan view, and switching the inflow state of the fluid from the third flow path to the fourth flow path, A fourth valve installed in a fourth region of the flow path member when the installation surface is viewed in plan view, and switching the flow state of the fluid flowing through the fourth flow path, and comprising: The second region is a region adjacent to the first region in a first direction parallel to the installation surface and coinciding with the first region in a second direction parallel to the installation surface and orthogonal to the first direction. The third region is a region coinciding with the first region in the first direction and adjacent to the first region in the second direction. The fourth region is a region coinciding with the second region in the first direction and coinciding with the third region in the second direction. In the first region, A first inlet through which fluid flows in, and a first outlet through which the fluid flowing in from the first inlet flows out to the outside along one side in the first direction are formed. In the second region, A second inlet through which fluid flows in, and a second outlet through which the fluid flows out to the outside along the other side in the first direction are formed. In the third region, A third outlet through which the fluid flows out to the outside along the one side in the first direction is formed. In the fourth region, A fourth outlet through which the fluid flows out to the outside along the other side in the first direction is formed. The first flow path is formed in the first region so as to guide the fluid flowing in from the first inlet to the first outlet. The second flow path is formed in the first region and the second region so as to guide the fluid flowing in from the first valve to the second outlet via the second valve. The third flow path is formed in the second region, the third region, and the fourth region so as to guide the fluid flowing in from the second inlet to the third outlet. The fourth flow path is a fluid equipment system formed in the third region and the fourth region so as to guide the fluid flowing in from the third valve to the fourth outlet through the fourth valve. **Claim 5** The first valve adjusts the flow rate of the fluid flowing from the first flow path into the second flow path. The second valve switches between a state where fluid flows out from the second outlet and a state where fluid does not flow out from the second outlet. The third valve adjusts the flow rate of the fluid flowing from the third flow path into the fourth flow path. The fluid equipment system according to claim 4, wherein the fourth valve switches between a state where fluid flows out from the fourth outlet and a state where fluid does not flow out from the fourth outlet. **Claim 6** The fluid equipment system according to claim 4 or claim 5, wherein the third flow path is arranged vertically below the fourth flow path in the fourth region.

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