Rotating device, motor, and pump

Abstract

To provide a new technology that utilizes an oscillator and can be applied to various purposes.SOLUTION: A rotation device includes: a first vibrator having a first vibration surface perpendicular to a vibration direction; a second vibrator having a second vibration surface perpendicular to the vibration direction; and an opposing element having a first opposing surface opposing the first vibration surface and a second opposing surface opposing the second vibration surface, and rotating around the vibration direction of the first vibrator and the second vibrator as an axis. The rotation device does not include a member supporting the opposing element. The first vibration surface and the first opposing surface have a first parallel region where they face each other in parallel and a first impeller region that is three-dimensionally formed on at least one of them. The second vibration surface and the second opposing surface have a second parallel region where they face each other in parallel and a second impeller region that is three-dimensionally formed on at least one of them.SELECTED DRAWING: Figure 7A

Description

Technical Field

[0001] The present invention relates to a rotating device, a motor, and a pump.

Background Art

[0002] In recent years, vibration waves such as ultrasonic waves have been used in various applications. Patent Document 1 discloses a technique for obtaining a pumping effect using ultrasonic waves with a simple structure. Non-Patent Document 1 discloses a phenomenon in which when an object is brought close to a vibrator, the object is attracted to the vibrator.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] A novel technology applicable to various applications using a vibrator is expected.

[0006] An object of the present invention is to provide a novel technology applicable to various applications using a vibrator.

Means for Solving the Problem

[0007] A rotating device according to one aspect of the present invention includes a first vibrator having a first vibration surface perpendicular to the vibration direction, a second vibrator having a second vibration surface perpendicular to the vibration direction, a first opposing surface facing the first vibration surface, and a second opposing surface facing the second vibration surface, and includes an opposing member that rotates about the vibration directions of the first vibrator and the second vibrator, and has no member for supporting the opposing member. The first vibration surface and the first opposing surface each have a first parallel region in which they face each other in parallel and a first impeller region three-dimensionally formed on at least one of them, and the second vibration surface and the second opposing surface each have a second parallel region in which they face each other in parallel and a second impeller region three-dimensionally formed on at least one of them.

Advantages of the Invention

[0008] According to the present invention, it is possible to provide a novel technology applicable to various applications by using a vibrator.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2A

Figure 2B

Figure 3

Figure 4A

Figure 4B

Figure 4C

Figure 4D

Figure 4E

Figure 5A

Figure 5B

Figure 5C

Figure 5D

Figure 5E

Figure 6

Figure 7A

Figure 7B

Figure 8A

Figure 8B

Figure 9A

Figure 9B

Figure 9C

Figure 9D

Figure 9E

Figure 10A

Figure 10B

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Figure 19

Figure 20

Figure 21

Figure 22

Figure 23

Figure 24

Figure 25

Figure 26

Figure 27

Figure 28

Figure 29

Figure 30

Figure 31

Figure 32

Figure 33

BEST MODE FOR CARRYING OUT THE INVENTION

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. The drawings are schematic, and the relationship between the thickness and the planar dimensions, the ratio of the thicknesses of the respective layers, etc. may be different from the actual ones. Also, there may be parts where the dimensional relationships and ratios are different between the drawings.

[0011] <Device Configuration> Referring to FIG. 1, an example of a rotating device according to the present embodiment will be described. As shown in FIG. 1, the rotating device 1 includes a vibration device 10 and an opposing element 20. The vibration device 10 includes a vibrator 11 and a horn 12. In the present embodiment, the vibration device 10 may also be referred to as a vibrator.

[0012] The vibration device 10 is fixed by the fixture 30 such that the longitudinal direction of the vibration device 10, which is the vibration direction of the vibration device 10, becomes the gravitational direction. The vibration device 10 has, at one end in the longitudinal direction of the vibration device 10 (the lower end in the example of FIG. 1), a circular vibration surface in a plane perpendicular to the vibration direction. The vibration device 10 is connected to a power source (not shown) to obtain driving power. The vibration device 10 has, although not shown, a circuit for generating and controlling vibrations as a control unit.

[0013] The lower end of the vibration device 10 and the counter member 20 are immersed in the water filled in the water tank 50. The position of the water tank 50 in the Z-axis direction is adjusted by the Z-axis stage 40. The temperature probe 60 is fixed by the fixture 30 so as to be able to measure the water temperature in the water tank 50.

[0014] The counter member 20 has a plate shape such as a disk shape, for example. The counter member 20 has two circular surface portions. Of the two circular surface portions of the counter member 20, at least one surface portion has a planar region and an impeller region. When the surface portion of the counter member 20 and the vibration surface of the vibration device 10 are opposed in parallel, the planar region of the surface portion (opposing surface) of the counter member 20 is parallel to the vibration surface of the vibration device 10, and thus is also referred to as a parallel region in the following description. The impeller region is a region in which a three-dimensional impeller shape is formed. A point-symmetric three-dimensional pattern that is not in the impeller shape may be formed in the impeller region.

[0015] The diameter of the surface portion of the counter member 20 and the diameter of the vibration surface of the vibration device 10 are the same diameter. Here, the same diameter does not necessarily mean exactly the same diameter. For example, there may be a difference of 1% to 5% between the diameter of the surface portion of the counter member 20 and the diameter of the vibration surface of the vibration device 10.

[0016] With the lower end of the vibration device 10 immersed in the water of the water tank 50, when the vibration device 10 is vibrated and the surface (opposing surface) having the parallel region and the impeller region of the opposing member 20 is brought close to the vibration surface of the vibration device 10, the opposing surface of the opposing member 20 is kept in a state of being attracted to the vibration surface of the vibration device 10. The rotating device 1 does not have a member for supporting the opposing member 20. The vibration by the vibration device 10 is, for example, ultrasonic vibration, although not limited thereto, and has a frequency of 20 kHz or higher. The vibration by the vibration device 10 is, for example, single vibration, although not limited thereto. Thus, although the detailed principle of the phenomenon in which an object is attracted to the vibration surface of the vibrator has not been elucidated, that phenomenon has been reported in Non-Patent Document 1.

[0017] When the vibration device 10 vibrates and the opposing member 20 is attracted, a self-centering effect occurs between the vibration surface of the vibration device 10 and the surface portion of the opposing member 20, so that the position of the central portion of the vibration surface of the vibration device 10 and the position of the central portion of the surface portion of the opposing member 20 become neighboring positions. Also, as described above, the diameter of the surface portion of the opposing member 20 and the diameter of the vibration surface of the vibration device 10 are the same diameter. As a result, when the vibration device 10 vibrates and the vibration surface of the vibration device 10 and the surface portion of the opposing member 20 face each other, the end portion on the vibration surface of the vibration surface of the vibration device 10 faces the end portion on the surface portion of the opposing member 20.

[0018] Also, at this time, the opposing member 20 rotates about the vibration direction of the vibration device 10. The principle by which the rotation occurs is not clear, but it is caused by the pressure generated by the vibration of the vibration surface of the vibration device 10, and there is a possibility that the rotation of the opposing member 20 occurs due to the water flow flowing through the gap between the vibration device 10 and the opposing member 20 and the acoustic flow generated by the vibration of the vibration surface hitting the surface portion of the opposing member 20. Details of the rotation of the opposing member 20 will be described later.

[0019] In addition, in the present embodiment, the surface portion of the opposing member 20 is assumed to have a parallel region and an impeller region, but it is not limited thereto. As a modification, instead of the surface portion of the opposing member 20, the vibration surface of the vibration device 10 may have a parallel region and an impeller region. The same applies to the embodiments described later.

[0020] As described above, according to this embodiment, the rotating device 1 includes a vibrating device 10 (vibrator) and a facing member 20. The vibrating device 10 has a vibration surface perpendicular to the vibration direction. The facing member 20 has a facing surface facing the vibration surface of the vibrating device 10 and rotates about the vibration direction of the vibrating device 10. The vibration surface of the vibrating device 10 and the facing surface of the facing member 20 each have a parallel region in which they face each other in parallel and an impeller region three-dimensionally formed on at least one of them.

[0021] By having the configuration as described above, the rotating device 1 can realize a novel rotating device using the vibrating device 10. In particular, since the facing member 20 rotates without contacting the vibrating device 10, wear and damage due to contact with the vibrating device 10 are less likely to occur. As a result, it is possible to realize a highly durable rotating device 1.

[0022] Hereinafter, examples of the vibrating device 10 and the facing member 20 in this embodiment will be described in detail.

[0023] <Vibrating Device> With reference to FIGS. 2A and 2B, an exemplary configuration of the vibrating device 10 in this embodiment will be described. The vibrating device 10 only needs to be configured to generate vibration, and its specific configuration is not limited to the configuration described below. The vibrator 11 of the vibrating device 10 is configured by alternately sandwiching a doughnut-shaped piezoelectric ceramic and electrode plates, further sandwiching both ends thereof with metal blocks, and tightening them with through bolts. A voltage is applied to the electrode plates so that the vibrator 11 is polarized in its axial direction. By applying an alternating voltage from a circuit to the electrode plates, expansion and contraction due to the inverse piezoelectric effect occur, and the vibrator 11 vibrates in a unidirectional vibration mode. Since the vibrator 11 is configured by being tightened with through bolts, it can withstand the vibration amplitude even with a piezoelectric ceramic that is weak in tensile strength and operates as a high-output vibrator.

[0024] A horn 12 is connected to one axial end of the vibrator 11. The horn 12 is a member connected to the vibrator 11 so that the vibration surface of the vibration device 10 satisfies desired conditions such as shape, pattern, presence or absence of holes, and material. In the example shown in FIG. 2A, the horn 12 is formed in a cylindrical shape. The bottom surface of the horn 12 that serves as the vibration surface of the vibration device 10 is formed in a circular shape. The horn 12 is connected to the vibrator 11 such that its axis is coaxial with the axis of the vibrator 11. The horn 12 is constituted by an arbitrary member, for example, a metal member such as stainless steel.

[0025] Referring to FIG. 3, an example of the vibration characteristics of the exemplary vibrator 11 used in the vibration device 10 in the present embodiment will be described, but the vibration characteristics are not limited thereto. FIG. 3 shows the measurement results when the impedance analyzer measures the vibration characteristics of the vibration device 10 in a state fixed by the fixture 30. FIG. 3 shows the relationship between the frequency of the alternating voltage of the circuit of the vibration device 10 and the conductance (real part G) and susceptance (imaginary part B) of the admittance. FIG. 3(1) shows the results of measuring the vibration characteristics of the vibration device 10 in the air. FIG. 3(2) shows the results of measuring the vibration characteristics of the vibration device 10 in water. The frequency at which the real part G takes the maximum value (unit [S]) is the resonance frequency of the vibration device 10. According to FIG. 3, the vibration device 10 resonates at a frequency of 26.5 to 26.6 kHz in both air and water. By using the phase measurement of the admittance, it is possible to follow the resonance frequency of the vibration device 10. According to FIG. 3, the maximum value of the real part G in water is about half of the maximum value of the real part G in air. Therefore, FIG. 3 shows that in order to obtain the same vibration amplitude in water and in air, it is necessary to apply a voltage about twice that in air in water.

[0026] <Opposite element> Referring to FIGS. 4A to 4E, a plurality of examples of the shape of the counter member 20 in the present embodiment will be described. In the example shown in FIG. 4A, the counter member 20a has a disk shape. At least one of the two opposing circular surface portions of the counter member 20a has an impeller region and a planar region 203 surrounding the impeller region. The impeller region has a plurality of inclined surfaces 201 and a plurality of vertical surfaces 202. The inclined surface 201 is a fan-shaped surface inclined with respect to the planar region 203. The inclined surface 201 has a vertex at the contact point between the planar region 203 and a radiation line, and is inclined toward the other radiation line of the inclined surface 201. The angle of the inclination is not limited, but for example, it is 10° with respect to the planar region 203. The vertical surface 202 is a surface perpendicular to the planar region 203 and is a plane extending between the ends of the two inclined surfaces 201. In the impeller region, a plurality of tangent lines (hereinafter also referred to as "radiation lines") where the inclined surface 201 and the vertical surface 202 are in contact extend radially from the central portion of the impeller region to the planar region 203.

[0027] Also, in the example shown in FIG. 4A, the counter member 20a has a convex portion formed on the surface portion along the end of the surface portion and having the planar region 203 as the upper surface. Since the convex portion has a region with a higher altitude than the impeller region, in the present embodiment, the convex portion of the counter member 20a is also referred to as an edge, and the portion recessed from the planar region 203 in the impeller region is also referred to as a concave portion.

[0028] Since the vibration surface of the vibration device 10 faces the surface portion (opposing surface) having the convex portion and the concave portion of the counter member 20a, a space is formed by the vibration surface of the vibration device 10 and the opposing surface of the counter member 20a. In this case, the vibration surface of the vibration device 10 is not in contact with the convex portion of the counter member 20a, and there is a gap of a predetermined distance between the vibration surface of the vibration device 10 and the convex portion of the counter member 20a.

[0029] Furthermore, in the example shown in FIG. 4A, although not limited, the diameter of the circular surface portion of the counter member 20a is 40 mm, and the width in the short side direction of the upper surface of the planar region 203 is 1.5 mm. The thickness of the counter member 20a is 2.5 mm.

[0030] As described above, the facing surface of the facing member 20a and the vibrating surface of the vibrating device 10 are circular, and the diameter of the facing surface of the facing member 20a and the diameter of the vibrating surface of the vibrating device 10 are the same. As a result, when the vibrating device 10 vibrates and the vibrating surface of the vibrating device 10 faces the facing surface of the facing member 20a, the end of the vibrating surface of the vibrating device 10 faces the end of the facing surface of the facing member 20a.

[0031] The example of the facing member 20 shown in FIGS. 4B to 4E will be mainly described with respect to the differences from the example of the facing member 20a or other facing members 20 shown in FIG. 4A.

[0032] The inclined surface 201 of the facing member 20b shown in FIG. 4B has a different method of inclination from that of the facing member 20a. The inclined surface 201 of the facing member 20b has the highest position of one of the radiations of the inclined surface 201 and inclines toward the contact point between the other radiation and the planar region 203.

[0033] The facing member 20c shown in FIG. 4C is different from the facing member 20b in that it has a through hole 204c in the central portion of the facing surface. Specifically, the facing member 20c has a through hole 204c formed from the central portion of one of the two facing surfaces facing parallel to the facing member 20c toward the other facing surface (the back surface in the facing member 20c). The diameter of the through hole 204c is 3 mm, although not limited. As will be described later, by having the through hole 204c in the central portion of the impeller region, the rotation of the facing member 20c becomes more stable.

[0034] The facing member 20d shown in FIG. 4D is different from the facing member 20c in that it has a through hole 204c at the contact point between the radiation and the planar region 203, rather than in the central portion of the facing surface.

[0035] The vertical surface 202e of the facing member 20e shown in FIG. 4E is curved, unlike the vertical surface 202 of the facing member 20a which is planar. In the example shown in FIG. 4E, the vertical surface 202e is curved so as to form a depression in a top view. Further, the facing member 20e is different from the facing member 20a in that it has a through hole 204e in the central portion of the facing surface.

[0036] <Measurement results> The rotating device 1 shown in FIG. 1 is configured, and the measurement results of the rotation characteristics of the opposing element 20 when the opposing elements 20a to 20e shown in FIGS. 4A to 4E are adopted as the opposing element 20 of the rotating device 1 will be described below.

[0037] To measure the rotation characteristics of the opposing element 20, an alternating voltage was generated by a function generator, amplified by a high-speed amplifier, and applied to the vibrator 11 of the vibrating device 10 to excite the vibrator 11. The frequency of the applied alternating voltage was 26.5 kHz, which was the resonance frequency of the vibrator 11. The water temperature in the water tank 50 in which the lower end of the vibrating device 10 and the opposing element 20 were immersed was maintained in the range of 20°C to 30°C. The rotation speed of the opposing element 20 was measured with a stopwatch by the naked eye at low rotation speeds and measured from the video taken at high rotation speeds.

[0038] FIGS. 5A to 5E show the measurement results of the rotational speed of the opposing element with respect to the vibration amplitude of the vibrating device 10 for each of the opposing elements 20a to 20e. The measurement results are shown for each atmospheric pressure condition.

[0039] As shown in FIG. 6, counterclockwise rotation in the top view of the impeller region of the opposing element 20 is defined as the positive rotation of the opposing element 20, and the rotational speed is shown as a positive value in FIGS. 5A to 5E. On the other hand, clockwise rotation is defined as the negative rotation of the opposing element 20, and the rotational speed is shown as a negative value in FIGS. 5A to 5E.

[0040] It can be understood from FIGS. 5A to 5E that different rotation characteristics are shown depending on the shape of the opposing element 20. For example, the opposing elements 20b, 20c, and 20e tend to have a higher rotational speed as the vibration amplitude of the vibrating device 10 increases. In addition, the opposing elements 20c and 20e having through holes in the central portion of the surface (impeller region) have less variation in the measurement results compared to the other opposing elements 20. Therefore, it can be understood that the rotation of the opposing element 20c becomes more stable by having a through hole in the central portion of the surface.

[0041] A modification of this embodiment will be described. The content of each of the following plurality of modifications can be applied to the above embodiment and other modifications as appropriate. In the following description of the modifications, the same components as those in the above embodiment are given the same reference numerals as appropriate, and the description thereof is omitted or simplified.

[0042] <Modification 1> In the above embodiment, the rotating device 1 has one vibration device. However, in Modification 1, the rotating device 1 has two vibration devices.

[0043] With reference to FIGS. 7A and 7B, the schematic configuration of the rotating device 1 in Modification 1 will be described. The rotating device 1 includes a vibration device 101, a vibration device 102, and an opposing member 211. The vibration device 101 and the vibration device 102 are configured in the same manner as the vibration device 10.

[0044] The vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. In the rotating device 1 in Modification 1, the vibration device 101 and the vibration device 102 are installed such that the first vibration surface and the second vibration surface face each other. An opposing member 211 is placed between the first vibration surface and the second vibration surface. The opposing member 211 has a plate shape such as a disk shape, for example. The opposing member 211 has two circular surface portions.

[0045] As shown in FIG. 7A, the first vibration surface, the second vibration surface, and the opposing member 211 are immersed in the water filled in the water tank 501.

[0046] As shown in FIG. 7B, the first surface portion 211a and the second surface portion 211b of the opposing member 211 each have the same planar region and impeller region as those in the above embodiment. When the opposing member 211 is placed between the first vibration surface and the second vibration surface, the first surface portion 211a becomes the opposing surface of the first vibration surface, and the second surface portion 211b becomes the opposing surface of the second vibration surface. The diameters of the first surface portion 211a and the second surface portion 211b are the same as the diameters of the first vibration surface and the second vibration surface. Note that the impeller region may be formed on the first vibration surface and the second vibration surface instead of the first surface portion 211a and the second surface portion 211b.

[0047] When the vibration devices 101 and 102 are vibrating, a self-centering effect occurs between the first vibration surface and the second vibration surface, and the first surface portion 211a and the second surface portion 211b, so that the positions of the central portions of the first vibration surface and the second vibration surface and the positions of the central portions of the first surface portion 211a and the second surface portion 211b become neighboring positions. At this time, the opposing member 211 rotates about the vibration directions of the vibration devices 101 and 102 as axes.

[0048] Note that the impeller regions of the first surface portion 211a and the second surface portion 211b are formed in a shape such that the rotational forces generated when water flow, acoustic flow, etc. hit the first surface portion 211a and the rotational forces generated when water flow, acoustic flow, etc. hit the second surface portion 211b do not repel each other.

[0049] According to the rotating device 1 of Modification 1, the vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. The opposing member 211 has a first surface portion 211a facing the first vibration surface and a second surface portion 211b facing the second vibration surface. The first vibration surface and the first surface portion 211a (the first opposing surface) each have a first parallel region in which they face each other in parallel and a first impeller region three-dimensionally formed on at least one of them. The second vibration surface and the second surface portion 211b (the second opposing surface) each have a second parallel region in which they face each other in parallel and a second impeller region three-dimensionally formed on at least one of them. The opposing member 211 rotates about the vibration directions of the vibration devices 101 and 102 as axes.

[0050] In Modification 1, since the rotational force of the opposing member 211 is generated by the vibrations of the two vibration devices, it is possible to increase the rotational torque of the opposing member 211.

[0051] <Modification 2> In Modification 2, through-holes are formed on the vibration surfaces of the vibration devices of the rotating device 1 so as to face the outside through the inside of the vibration devices, and fluid is sucked up from the through-holes.

[0052] As shown in Fig. 8A, in Modification 2, the rotating device 1 includes a vibration device 103. In the vibration device 103, a through hole 121 is provided on a vibration surface perpendicular to the vibration direction and is formed from the inside of the vibration device 103 toward the outside of the vibration device 103. The rotating device 1 is configured in the same manner as the rotating device 1 in the above embodiment except that the through hole 121 is provided in the vibration device 103.

[0053] With the lower end of the vibration device 103 including the vibration surface immersed in the water of the water tank 50, when the vibration device 103 is vibrated and the surface portion (opposing surface) having the parallel region and the impeller region of the opposing element 20 is brought close to the vibration surface of the vibration device 103, the opposing surface of the opposing element 20 is maintained in a state of being attracted to the vibration surface of the vibration device 10. At this time, due to the pressure generated by the vibration of the vibration surface of the vibration device 103, a water flow is generated that flows through the gap between the vibration device 103 and the opposing element 20. Also, an acoustic flow is generated by the vibration of the vibration surface. When the above water flow and acoustic flow hit the surface portion of the opposing element 20, rotation of the opposing element 20 occurs. Further, due to the above water flow, acoustic flow, and rotation of the opposing element 20, a negative pressure is generated in the space formed between the vibration surface of the vibration device 103 and the surface portion of the opposing element 20, and the fluid (water) is sucked into the space. As a result, a pumping effect occurs, and the fluid that has flowed into the above space is sucked into the through hole 121 of the vibration surface and discharged to the outside through the inside of the vibration device 103.

[0054] In Modification 2, the rotating device 1 may have two vibration devices as in Modification 1, and through holes may be provided in each of the two vibration devices.

[0055] Referring to Fig. 8B, in Modification 2, the schematic configuration when the rotating device 1 has two vibration devices will be described. The rotating device 1 has a vibration device 103 and a vibration device 104. The vibration device 104 is configured in the same manner as the vibration device 103, and a through hole 122 is provided on a vibration surface perpendicular to the vibration direction and is formed from the inside of the vibration device 104 toward the outside of the vibration device 104.

[0056] The rotating device 1 shown in Fig. 8B is configured in the same manner as the rotating device 1 of Modification 1, except that through holes 121 and 122 are provided. In the rotating device 1 shown in Fig. 8B, a pumping effect is generated in each of the spaces formed by the vibration surfaces of the vibration devices 103 and 104 and the two surface portions of the opposing member 211, and the fluid flowing into the space is sucked into each of the through holes 121 and 122 of the vibration surface, passes through the inside of the vibration devices 103 and 104, and is discharged to the outside.

[0057] <Modification 3> In the above-described embodiments and modifications, the vibration surfaces of the vibration devices and the opposing members are operated underwater. However, in Modification 3, these are operated in the air.

[0058] As shown in Fig. 9A, the rotating device 1 includes a vibration device 102 and an opposing member 212. The vibration device 102 has a vibration surface perpendicular to the vibration direction, and the vibration device 102 is installed such that the vibration surface faces upward in the vertical direction.

[0059] As shown in Fig. 9B, the surface portion 212a of the opposing member 212 facing the vibration surface of the vibration device 102 has a planar region 2122 that is a plane parallel to the vibration surface of the vibration device 102 and an impeller region 2121 in which a three-dimensional impeller shape surrounding the planar region 2122 is formed. When rotating the opposing member underwater as in the above-described embodiment, for example, it is preferable that the planar region is an edge (provided on the outer periphery of the surface portion). On the other hand, when rotating in the air, as shown in Fig. 9B, the planar region 2122 may be provided at the central portion of the surface portion 212a of the opposing member 212, or may be provided as an edge on the outer periphery of the surface portion 212a of the opposing member 212.

[0060] The facing element 212 is placed on the vibration surface of the vibration device 102, and by vibrating the vibration device 102 with high-frequency vibration such as ultrasonic vibration, a squeeze film effect is generated on the vibration surface of the vibration device 102, causing the facing element 212 to float. When the positive pressure generated by the squeeze film effect is applied to the impeller region 2121, a rotational force is generated, and the facing element 212 rotates about the vibration direction of the vibration device 102. At this time, a self-centering effect occurs between the vibration surface of the vibration device 102 and the surface portion 212a of the facing element 212, so that the position of the central portion of the vibration surface of the vibration device 102 and the position of the central portion of the surface portion 212a of the facing element 20 are in the vicinity of each other.

[0061] As shown in FIG. 9C, the rotating device 1 in Modification 3 may have two vibration devices as in Modification 1. In the example shown in FIG. 9C, the rotating device 1 includes a vibration device 101, a vibration device 102, and a facing element 213. The vibration device 101 has a first vibration surface perpendicular to the vibration direction. The vibration device 102 has a second vibration surface perpendicular to the vibration direction. The vibration device 101 and the vibration device 102 are installed such that the first vibration surface and the second vibration surface face each other. A facing element 213 is placed between the first vibration surface and the second vibration surface. The facing element 213 has a plate shape such as a disk shape, for example. The facing element 211 has two circular surface portions. Each of the two surface portions is formed in the same shape as the surface portion 212a shown in FIG. 9B.

[0062] Note that the impeller regions of the respective surface portions of the facing element 213 are formed in a shape such that the rotational forces generated by the pressures applied to the two surface portions of the facing element 213 do not repel each other.

[0063] In Modification 3, the vibration of the two vibration devices can generate a rotational force for the facing element 213, and it is possible to increase the rotational torque of the facing element 213.

[0064] Furthermore, as shown in FIGS. 9D and 9E, in Modification 3, similar to Modification 2, a through hole formed from the inside of the vibration device toward the outside may be provided in the vibration surface of the vibration device of the rotating device, and fluid may be sucked up from the through hole.

[0065] Figures 9D and 9E show the through-hole 121 provided in the vibrating device 103 and the through-hole 122 provided in the vibrating device 104. Due to the squeeze film effect generated between the vibrating surfaces of the vibrating device 103 and the vibrating device 104 and the opposing member 212 or the opposing member 213, and due to the rotation of the opposing member 212 or the opposing member 213, a positive pressure is generated. As a result, a pumping effect is generated, and the fluid (air) flowing into the vicinity of the opposing member 212 or the opposing member 213 is sucked into the through-hole 121 or the through-hole 122 of the vibrating surface, and is discharged to the outside through the inside of the vibrating device 103 and the vibrating device 104.

[0066] <Modification Example 4> In Modification Example 4, an impeller region, which is a region where a three-dimensional impeller shape is formed, is provided on the vibrating surface of the vibrating device. The impeller region on the vibrating surface may be provided instead of the impeller region on the surface of the opposing member described in the above embodiment and the above modification example, or may be provided together with the impeller region on the surface of the opposing member.

[0067] Referring to FIGS. 10A and 10B, the impeller region provided on the vibrating surface of the vibrating device will be described. FIG. 10A is a front view of the vibrating surface 105a of the vibrating device 105. FIG. 10B is a side view of the vibrating device 105. The vibrating surface 105a of the vibrating device 105 is circular, and the diameter is formed to be the same as that of the opposing member, for example, 30 mm. A plurality of cuts are formed from the circumference to the center direction of the vibrating surface 105a of the vibrating device 105, so that a three-dimensional impeller shape is formed on the vibrating surface 105a. The bottom of the cut is inclined with respect to the plane direction of the vibrating surface 105a, and the angle of the inclination is, for example, 2°. In addition, a conical recess having the center of the vibrating surface 105a as the apex is formed on the vibrating surface 105a, and the inclination of the side surface of the cone is, for example, 5° with respect to the plane direction of the vibrating surface 105a.

[0068] By bringing the opposing member closer to the vibrating surface 105a and vibrating the vibrating device 105, the opposing member rotates in the same manner as in the above embodiment and the above modification example.

[0069] <Modification Example 5> In the above-described embodiments and modification examples, an impeller shape was formed as a three-dimensional shape on the facing surface of the facing element. The impeller shape is generally a shape of an impeller that rotates a rotor by receiving fluid pressure. However, even when a three-dimensional shape other than a shape generally widely recognized as an impeller is provided on the facing element, it has been clarified by the verification of the applicant that the facing element functions as a rotor depending on the three-dimensional shape. Modification Example 5 is an example in which a three-dimensional shape that is generally difficult to be recognized as an impeller shape is formed on the facing surface of the facing element. In Modification Example 5, the configurations other than the facing element may be the configurations described in the above-described embodiments and modification examples.

[0070] In Modification Example 5, for example, the facing element has a facing surface facing the vibration surface of the vibrator, and the facing surface has a parallel region facing parallel to the vibration surface of the vibrator and a plurality of three-dimensional shapes formed so as to extend toward the end of the facing surface. That is, the vibration surface and the facing surface may each have a parallel region facing each other in parallel. Also, the parallel region may be a plane. The starting point of the formation of the three-dimensional shape formed so as to extend toward the end of the facing surface may be inside the facing surface, particularly, the central portion of the facing surface. That is, the three-dimensional shape may be formed from the inside of the facing surface or the central portion inside the facing surface toward the end of the facing surface. Also, the three-dimensional shape may be formed with the same width. The parallel region is considered to generate an adsorption force between the vibration surface of the vibrator in water, and in the air, a floating force of the facing element (that is, a repulsive force between the facing surface and the vibration surface) due to the above-described squeeze film effect is generated. The three-dimensional shape is a region considered to generate a rotational force of the facing element under the action of the fluid.

[0071] The three-dimensional shape formed so as to extend toward the end of the facing surface is formed, for example, with one or a plurality of grooves or holes. The above groove may be referred to as a recess. Also, the above hole may be referred to as a through hole. The three-dimensional shape formed on the facing surface may be formed with a convex portion.

[0072] Note that the number of three-dimensional shapes formed on the opposing surface is not limited, but it is preferably 4 or more on the opposing surface from the viewpoint of the rotation speed of the opposing element. Further, the number of three-dimensional shapes formed on the opposing surface is not limited, but it is preferably 4 or more and 10 or less on the opposing surface from the viewpoint of the rotation speed of the opposing element.

[0073] Figures 11 to 28 show examples of the shapes of the opposing elements applied in Modification 5. Also, Figures 11 to 22 show the measurement results of the rotational speed of the opposing element with respect to the vibration amplitude of the vibration device 10 when the opposing elements shown in Figures 11 to 22 are applied to the rotation device 1 described with reference to Figures 1 to 3. Regarding the reference numerals shown in the drawings described hereinafter, those with "a" added to the reference numeral of the opposing element are the reference numerals of the parallel regions, and those with "b" added are the reference numerals of the three-dimensional shapes. For example, on the opposing surface of the opposing element 601, a parallel region 601a and a three-dimensional shape 601b are formed.

[0074] Although not particularly limited for the realization of the opposing element of Modification 5, regarding the opposing element used in the measurement shown in the description of Modification 5 hereinafter, except in cases where it is particularly noted, the material is made of aluminum, the diameter of the opposing surface is 40 mm, and the thickness is 2.5 mm. Also, when a groove is provided on the opposing surface, the depth of the groove is 1.5 mm.

[0075] The outer peripheral shape of the opposing surface of the opposing element 601 shown in Figure 11 is circular, similar to the vibration surface of the vibrator described above. Also, the opposing surface is formed such that its end faces the end of the vibration surface. For example, the outer peripheral circle of the opposing surface and the outer peripheral circle of the vibration surface are formed in the same shape and size.

[0076] The opposing surface of the opposing member 601 has a parallel region 601a and a plurality of three-dimensional shapes 601b. In the opposing member 601, holes which are the three-dimensional shapes 601b are formed at the ends of the opposing surface. The opposing member 601 has its ends released due to the holes which are the three-dimensional shapes 601b being formed at the ends of the opposing surface. That is, the three-dimensional shapes 601b formed in the opposing member 601 form slits in the opposing surface.

[0077] Also, in the opposing member 601, the three-dimensional shapes 601b formed on the opposing surface are formed along a plurality of radial curves extending from the central portion to the ends of the opposing surface. The distance from the outer periphery of the radial curve to the center of the curvature circle of the radial curve is not limited, but for example, it is 21 mm. The width in the short direction of the three-dimensional shape 601b is, for example, 2 mm. In the opposing members described after Modification Example 5 as well, unless otherwise stated, the distance from the outer periphery of the radial curve to the center of the curvature circle of the radial curve and the width in the short direction of the three-dimensional shape may be the same as those in the example shown in FIG. 11.

[0078] In the opposing member 601, the above-mentioned parallel region is formed at the central portion of the opposing surface. The outer periphery of the parallel region is formed so as to define a concentric circle with the outer peripheral circle of the opposing surface. In other words, the three-dimensional shapes 601b (or the ends of the three-dimensional shapes 601b) formed on the opposing surface of the opposing member 601 are formed along a concentric circle concentric with the outer peripheral circle of the opposing surface. In the example shown in FIG. 11, the radius of the outer peripheral circle of the above-mentioned parallel region is, for example, 27 mm.

[0079] The radius of the outer peripheral circle of the parallel region formed at the central portion of the opposing surface may be 60% to 80% of the radius of the outer peripheral circle of the opposing surface. More preferably, the radius of the outer peripheral circle of the parallel region may be 70% to 80% of the radius of the outer peripheral circle of the opposing surface.

[0080] As described above, in the opposing member 601, the three-dimensional shape 601b is formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. As a result, the adjacent three-dimensional shapes 601b are not symmetric with respect to the radial direction of the opposing surface. That is, the plurality of three-dimensional shapes 601b formed on the opposing surface include a plurality of adjacent three-dimensional shapes 601b that are not symmetric with respect to the radial direction of the opposing surface.

[0081] Note that, as in the example described later, a hole may be formed at the central portion of the opposing surface instead of the parallel region.

[0082] In the graph of the measurement results of the rotational speed of the opposing member 601 shown in FIG. 11, the result when the surface of the opposing member shown in the figure is opposed to the vibrating surface of the vibrator (i.e., facing upward) is indicated by "front", and the result when the back surface of the surface of the opposing member shown in the figure is opposed to the vibrating surface of the vibrator is indicated by "reverse". The measurement of the rotational speed was performed multiple times, and the first time, the second time, and the third time are indicated by "1st time", "2nd time", and "3rd time", respectively. The same applies to the graphs shown in FIGS. 12 to 22.

[0083] As shown in the graph of FIG. 11, when the opposing member 601 is applied to the rotating device 1 described with reference to FIGS. 1 to 3, the rotation of the opposing member 601 was confirmed.

[0084] The opposing surface of the opposing member 602 shown in FIG. 12 has a parallel region 602a and a plurality of three-dimensional shapes 602b. In the opposing member 602, similar to the opposing member 601 shown in FIG. 11, the three-dimensional shape 602b formed on the opposing surface is formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. In the opposing member 602, the distance from the outer periphery of the radial curve to the center of the curvature circle of the radial curve is not limited, but is, for example, 16 mm. Other configurations of the opposing member 602 are the same as those of the opposing member 601.

[0085] As shown in the graph of FIG. 12, when the armature 602 was applied to the rotating device 1, rotation of the armature 602 was confirmed. As can be understood from the graphs of FIGS. 11 and 12, at high vibration amplitudes, a higher rotational speed was confirmed for the armature 601 than for the armature 602.

[0086] The opposing surface of the armature 603 shown in FIG. 13 has a parallel region 603a and a plurality of three-dimensional shapes 603b. The three-dimensional shapes 603b are formed with holes and grooves. The three-dimensional shapes 603b are formed by holes along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. However, the three-dimensional shapes 603b are formed by grooves at the outer peripheral side end portions on the opposing surface. As a result, unlike the armature 601, no slit is formed on the opposing surface of the armature 603. In the parallel region 603a, a circular parallel region is formed at the central portion of the opposing surface. The diameter of the circle is 6.5 mm, although not limited thereto.

[0087] The three-dimensional shapes 603b are formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. The distance (radius of curvature) from the outer periphery of the radial curve to the center of the circle of curvature of the radial curve is, although not limited thereto, for example, 20 mm. The radius of curvature may be the same for the armatures described with reference to FIGS. 14 to 22 as well.

[0088] As shown in the graph of FIG. 13, when the armature 603 was applied to the rotating device 1, rotation of the armature 603 was confirmed.

[0089] Regarding the armatures shown in FIGS. 14 to 22 as well, when the armature 603 was applied to the rotating device 1, rotation of the armature was confirmed.

[0090] In the armature 604 shown in FIG. 14, the three-dimensional shape 604b is formed by grooves. The three-dimensional shape 604b is formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface.

[0091] In the opposing element 605 shown in FIG. 15, the three-dimensional shape 605b is formed by holes. The three-dimensional shape 605b is formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface, but the three-dimensional shape 605b is not formed at the outer peripheral side end portion on the opposing surface.

[0092] In the opposing element 606 shown in FIG. 16, the three-dimensional shape 606b is formed by grooves. The three-dimensional shape is formed along a plurality of radial curves extending from the central portion to the end portion of the opposing surface, but the three-dimensional shape is not formed at the outer peripheral side end portion on the opposing surface.

[0093] In the opposing element 607 shown in FIG. 17, the three-dimensional shape 607b is formed by grooves and holes. The three-dimensional shape 607b is formed by grooves along a plurality of radial curves extending from the central portion to the end portion of the opposing surface, but the three-dimensional shape 607b is not formed at the outer peripheral side end portion on the opposing surface. In the central portion of the opposing surface, the three-dimensional shape 607b is circularly formed by holes.

[0094] In the opposing element 608 shown in FIG. 18, the three-dimensional shape 608b is formed with holes and grooves. The three-dimensional shape 608b is formed by holes along a plurality of radial curves extending from the central portion to the end portion of the opposing surface, but the three-dimensional shape 608b is formed by grooves at the outer peripheral side end portion on the opposing surface. Unlike the opposing element 603, the opposing element 608 is not provided with a parallel region at the central portion of the opposing surface.

[0095] In the opposing element 609 shown in FIG. 19, the three-dimensional shape 609b is formed with grooves. The three-dimensional shape 609b is formed by grooves along a plurality of radial curves extending from the central portion to the end portion of the opposing surface.

[0096] In the opposing element 610 shown in FIG. 20, the three-dimensional shape 610b is formed with holes and grooves. The three-dimensional shape 610b is formed by grooves along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. Also, in the central portion of the opposing surface, the three-dimensional shape 610b is circularly formed by holes.

[0097] In the opposing element 611 shown in FIG. 21, the three-dimensional shape 611b is formed by holes. The three-dimensional shape 611b is formed by holes along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. The three-dimensional shape 611b is not formed at the outer peripheral side end portion on the opposing surface. Also, a parallel region is provided in a circular shape at the central portion of the opposing surface.

[0098] In the opposing element 612 shown in FIG. 22, the three-dimensional shape 612b is formed by grooves. The three-dimensional shape 612b is formed by grooves along a plurality of radial curves extending from the central portion to the end portion of the opposing surface. The three-dimensional shape 612b is not formed at the outer peripheral side end portion on the opposing surface. Also, a parallel region 612a is provided in a circular shape at the central portion of the opposing surface.

[0099] Regarding the opposing elements 613 to 634 shown in FIGS. 23 to 28, although the measurement results are not shown, when the opposing elements are applied to the rotating device 1 described with reference to FIGS. 1 to 3, the presence or absence of rotation of the opposing elements was confirmed. In the opposing elements 614, 617, and 633, no clear rotation was confirmed, but rotation was confirmed in the other opposing elements. Also, the rotation of the opposing elements 618 to 620 was slight. For the opposing elements with slight rotation, it is conceivable that they can rotate more by separately applying an initial torque of rotation to the opposing elements.

[0100] Below, the shapes of the notable ones among the opposing elements 613 to 634 will be described. In FIGS. 23 to 28, the left side is a photographic view of the opposing element, and the right side is a schematic diagram. The black three-dimensional shapes shown in the photographic view are holes, and the other three-dimensional shapes are grooves.

[0101] On the opposing surfaces of the opposing elements 613 and 614, the adjacent three-dimensional shapes are formed symmetrically with respect to each other in the radial direction of the opposing surface.

[0102] The difference between the opposing element 615 and the opposing element 624 is that the three-dimensional shape of the opposing element 615 is formed by holes, while the three-dimensional shape 624b of the opposing element 624 is formed by grooves.

[0103] The opposing surface of the opposing element 626 has a parallel region 626a and a plurality of three-dimensional shapes 626b. The three-dimensional shapes 626b formed by grooves are formed over a wide area as compared with other opposing elements such as the opposing element 601 to the opposing element 612. Among the parallel regions 626a, the central portion of the opposing surface of the opposing element 626 is formed in a substantially circular shape. The opposing surface of the opposing element 627 also has three-dimensional shapes 627b formed over a wide area, similar to the opposing element 626. The opposing surface of the opposing element 627 is different from the opposing element 626 in that the central portion is a three-dimensional shape formed by a hole.

[0104] The opposing surface of the opposing element 628 has a parallel region 628a and a plurality of three-dimensional shapes 628b. The three-dimensional shapes 628b are formed by convex portions.

[0105] The opposing surface of the opposing element 629 has a parallel region 629a and a plurality of three-dimensional shapes 629b. The three-dimensional shapes 629b are formed by a plurality of holes. The three-dimensional shapes 629b may be formed by a plurality of grooves or a combination of holes and grooves.

[0106] The opposing element 631 is an opposing element that is also used in Modification 6 described later. In Modification 5, the rotation of the opposing element 631 was confirmed.

[0107] The outer peripheral shape of the opposing surface of the opposing element 633 is rectangular. The outer peripheral shape of the opposing surface of the opposing element 633 is different from the outer peripheral shape of the vibrating surface of the vibrator. Therefore, the opposing surface of the opposing element 633 is not formed such that its end portion faces the end portion of the vibrating surface. As described above, no clear rotation of the opposing element 633 could be confirmed.

[0108] The opposing surface of the opposing element 634 has a parallel region 634a and a three-dimensional shape 634b. The three-dimensional shape 634b is formed along a spiral curve extending from the central portion to the end portion of the opposing surface of the opposing element 634. The three-dimensional shape 634b may be an Archimedean spiral shape. In this case, although not limited, the width in the short direction of the three-dimensional shape 634b may be 5 mm. There is one three-dimensional shape formed on the opposing surface of the opposing element 634. As described above, the rotation of the opposing element 634 was confirmed.

[0109] <Modified Example 6> In Modified Example 5, an example of applying a stator with a three-dimensional shape other than the impeller shape to the rotating device 1 described with reference to FIGS. 1 to 3 and rotating it (i.e., an example of rotating the stator underwater) was described. In Modified Example 6, an example of rotating a stator with a three-dimensional shape other than the impeller shape in the air will be described. Modified Example 6 is the same as Modified Example 3 except that a stator different from the stator in Modified Example 3 is used. In particular, as the rotating device, the rotating device 1 described with reference to FIG. 9A is used.

[0110] In Modified Example 6, for example, the stator has a facing surface facing the vibrating surface of the vibrator, and the facing surface has a parallel region facing parallel to the vibrating surface of the vibrator and a plurality of three-dimensional shapes formed so as to extend toward the end of the facing surface. That is, the vibrating surface and the facing surface may each have a parallel region facing each other in parallel. Further, the parallel region may be a plane. The starting point of the formation of the three-dimensional shape formed so as to extend toward the end of the facing surface may be inside the facing surface, particularly, the central portion of the facing surface. That is, the three-dimensional shape may be formed from the inside of the facing surface or the central portion inside the facing surface toward the end of the facing surface. The parallel region is a region where, in the case of air, a levitation force of the stator (that is, a repulsive force between the facing surface and the vibrating surface) due to the above-described squeeze film effect is considered to be generated between the parallel region and the vibrating surface of the vibrator. The three-dimensional shape is a region where a rotational force of the stator is considered to be generated under the action of the fluid.

[0111] In FIGS. 29 and 30, stators 701 to 708 are shown as examples of the shape of the stator applied in Modified Example 6. The manufacturing method of the stator in Modified Example 6 is not limited, but the stators shown in FIGS. 29 and 30 are made of ABS resin and manufactured using a 3D printer. Regarding the reference numerals shown in the drawings described hereinafter, those with "a" added to the reference numeral of the stator are the reference numerals of the parallel region, and those with "b" added are the reference numerals of the three-dimensional shape. For example, on the facing surface of the stator 701, a parallel region 701a and a three-dimensional shape 701b are formed.

[0112] The opposing surface of the opposing element 701 has a parallel region 701a and a three-dimensional shape 702b. The parallel region 701a has a central portion 701a1, beams 701a2, and an outer peripheral portion 701a3. The central portion 701a1 is the region of the central part of the opposing surface. The outer peripheral portion 701a3 is the region of the outer peripheral part of the opposing surface. The beam 701a2 is the region connecting the central portion 701a1 and the outer peripheral portion 701a3. The three-dimensional shape 702b is formed by holes. The opposing elements 702 to 708 also have a parallel region and a three-dimensional shape. Further, the parallel region has a central portion, beams, and an outer peripheral portion. The opposing elements 701 to 708 have different numbers of beams, and the number of the beams is from 2 to 9.

[0113] In the beam, the two side surfaces connecting the central portion and the outer peripheral portion of the opposing surface may or may not be parallel to each other. When they are not parallel, for example, the angle formed by the intersection of the longitudinal directions of the two side surfaces in the beam 704a2 of the opposing element 704 is 10°. Also, the diameter of the central portion 704a1 of the opposing element 704 is 10.5 mm. The diameter of the outer peripheral circle of the outer peripheral portion 704a3 of the opposing element 704 is 40 mm, and the diameter of the inner peripheral circle is 30 mm.

[0114] FIG. 31 shows the relationship among the number of beams, mass, hole area, and the ratio of the hole area to the whole of the opposing element shown in FIG. 29.

[0115] FIG. 32 shows the relationship among the number of beams, the ratio of the hole area to the whole, the rotational speed of the opposing element, and the amplitude of the rear end of the vibrator of the opposing element shown in FIG. 29.

[0116] FIG. 33 shows the relationship between the number of beams and the rotational speed of the opposing element shown in FIG. 29. According to FIGS. 32 and 33, the rotational speed of the opposing element with 6 beams (i.e., the opposing element 708) is faster than that of other opposing elements.

[0117] <Other Modification Examples> A motor having the rotating device 1 in the above-described embodiment and the above-described modification may be configured. In this case, the motor may be driven by rotating the opposing element.

[0118] A pump having the rotating device 1 in the above-described embodiment and the above-described modification may be configured, and the pump may be driven by rotating the opposing element. In this case, the rotating device 1 may provide the function of a pump by sucking fluid through the above-described through hole provided in the vibrating device of the rotating device 1 and sending it out to the outside of the vibrating device.

[0119] In the above-described embodiment, the rotor 20 of the rotating device 1 was configured to rotate about the vibration direction of the vibrating device 10. However, as a modification, the rotor 20 may be fixed so as not to rotate. For example, as a modification of the rotating device 1 having the vibrating device 10 (vibrator) and the rotor 20 shown in FIG. 1, the rotor 20 may have a facing surface facing the vibration surface, and the vibration surface and the facing surface may be fixed so as to face each other with a gap therebetween. Here, "fixed" may mean that the rotor 20 does not rotate at a predetermined position and is stationary. The rotor 20 may be fixed, for example, by being integrally formed via a support member or with a fixed member. By fixing the rotor 20, the position of the center of the vibration surface and the position of the center of the surface portion of the rotor 20 may be provided to be in the vicinity of each other. By fixing the rotor 20, the distance between the vibration surface and the facing surface is not limited, but may be provided to be 10 to 500 microns. The vibration surface and the facing surface may have the same shape (for example, circular). Further, the rotating device 1 in this modification may have, as in the example shown in FIG. 1, a parallel region where the vibration surface and the facing surface face each other in parallel, and an impeller region three-dimensionally formed on at least one of them. Further, a pump having the rotating device in this modification may be configured. The pump may be formed, for example, as in the example of FIG. 8A, by providing a through hole in the vibrating device. In this modification, since the rotor is fixed, it is possible to suppress a reduction in pressure due to the pumping effect generated in the space formed between the vibration surface and the surface portion of the rotor 20 as compared with the case where the rotor rotates.

[0120] Although the embodiment and the modification have been described, those skilled in the art can further make various modifications and corrections based on the present embodiment and the modification, and these modifications and corrections are included in the present embodiment. The functions and the like included in each means and the like can be rearranged so as not to be logically contradictory, and a plurality of means, steps, etc. can be combined into one or divided.

Description of Reference Numerals

[0121] 1 Rotating device 10 Vibration device 11 Vibrator 12 Horn 20, 211, 212, 213 Opposing elements 30 Fixture 40 Z-axis stage 50 Water tank 60 Temperature probe 101, 102, 103, 104, 105 Vibration device

Claims

1. a first vibrator having a first vibration surface perpendicular to a vibration direction; a second vibrator having a second vibration surface perpendicular to the vibration direction; an opposing element having a first opposing surface opposing the first vibration surface and a second opposing surface opposing the second vibration surface, the opposing element rotating about an axis corresponding to the vibration direction of the first vibrator and the second vibrator; Equipped with No member supporting the opposing element is provided, The first vibration surface and the first opposing surface each have a first parallel region that faces each other in parallel, and a first impeller region that is three-dimensionally formed on at least one of the first vibration surface and the first opposing surface, A rotating device, wherein the second vibration surface and the second opposing surface each have a second parallel region that faces parallel to each other, and a second impeller region that is three-dimensionally formed on at least one of the second vibration surface and the second opposing surface.

2. A motor comprising the rotating device according to claim 1.

3. A pump comprising the rotating device according to claim 1.

4. A vibrator having a vibration surface perpendicular to a vibration direction; a counter element having a facing surface facing the vibration surface and rotating about an axis in the vibration direction of the vibrator; Equipped with No member supporting the opposing element is provided, the vibration surface and the opposing surface each have a parallel region that faces parallel to each other, A rotating device, wherein the opposing surface has one or more three-dimensional shapes formed to extend toward an end of the opposing surface, and the opposing element rotates without contacting the vibrator.

5. The rotating device according to claim 4 , wherein the three-dimensional shape is formed with one or more grooves or holes.

6. The rotating device according to claim 4 , wherein the plurality of three-dimensional shapes include a plurality of adjacent three-dimensional shapes that are not symmetrical with respect to a radial direction of the opposing surface.

7. The rotating device according to claim 4 , wherein four or more of the three-dimensional shapes are formed on the opposing surface.

8. The rotating device according to claim 4 , wherein a hole is formed in a center of the opposing surface.

9. The rotating device according to claim 4 , wherein the parallel region is formed in a central portion of the opposing surface.

10. The rotating device according to claim 9 , wherein a radius of an outer circumferential circle of the parallel region formed in the central portion of the opposing surface is 60% to 80% of a radius of the outer circumferential circle of the opposing surface.

11. The rotating device according to claim 9 or 10, wherein the three-dimensional shape forms a slit in the opposing surface.

12. The rotating device according to claim 4 , wherein the vibration surface and the opposing surface each have a circular outer circumferential shape, and an end of the vibration surface faces an end of the opposing surface.

13. The rotation device according to claim 4 , wherein the three-dimensional shape is formed along a plurality of radial curves extending from a center portion of the opposing surface to an end portion of the opposing surface.

14. The rotating device according to claim 4 , wherein the three-dimensional shape is formed along a spiral curve extending from a center portion of the opposing surface to an end portion of the opposing surface.

15. The rotating device according to claim 4 , wherein the three-dimensional shape is formed along a concentric circle that is concentric with an outer circumferential circle of the opposing surface of the opposing element.

16. A motor comprising a rotating device according to any one of claims 4 to 15.

17. A pump comprising a rotating device according to any one of claims 4 to 15.

Images