Fluid spring

Abstract

To provide a fluid spring having a construction to enable an improvement in responsiveness of the fluid spring.SOLUTION: A vibration control fluid spring 30 includes a base part 33 having an opening 32p, a diaphragm 34 covering the opening 32p of the base part 33 and provided in a flat plate shape ranging to the edge, a pressing part 31 connected to the diaphragm 34 on the opposite side to the opening 32p, a fluid chamber 32 defined by the base part 33 and the diaphragm 34, and a valve 40 provided in the base part 33 for supplying / discharging fluid to / from the fluid chamber 32. With the fluid flowing from the valve 40 to the fluid chamber 32, the diaphragm 34 is expanded and deformed to the pressing part 31 side to move the pressing part 31 in the direction of going away from the opening 32p.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present technology relates to a fluid spring used for vibration suppression, etc. in, for example, a vibration isolation device used in a semiconductor manufacturing apparatus.

Background Art

[0002] In a vibration isolation device using a fluid spring, there is a demand for improving the performance of more quickly stopping the shaking of the surface plate accompanying the acceleration and deceleration of the movable stage. For example, in order to improve the working efficiency, when the moving speed of a movable member such as a movable stage increases, the impact at the time of stopping becomes large. In order to quickly stop the vibration caused by the impact, it is necessary to improve the vibration damping performance. When vibration damping is performed by a fluid spring, it is necessary to increase the response speed of the fluid spring.

[0003] According to the configuration of the fluid spring described in Japanese Unexamined Patent Application Publication No. 2014-177963 (Patent Document 1), a diaphragm constituting the fluid spring is provided between the piston member and the frame so as to form an air chamber. Further, a folded-back portion is provided around the diaphragm so that the piston member can move in its axial direction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In order to improve the responsiveness of the fluid spring, a method of shortening the operating time of the fluid spring can be mentioned. As a method of shortening the operating time of the fluid spring, it is conceivable to reduce the volume of the air chamber of the fluid spring so that the diaphragm operates with a smaller air inflow amount.

[0006] Here, in the structure using the diaphragm provided with the folded-back portion disclosed in Patent Document 1, when the gap between the frame body constituting the air chamber and the piston member is narrowed so that the volume of the fluid chamber of the fluid spring becomes a predetermined small volume and the air filled in the folded-back portion of the diaphragm is reduced, if the position of the piston member is displaced, the diaphragm will bite into the frame body. Therefore, it is difficult to adjust the position of the piston, and it is difficult to miniaturize the fluid chamber of the fluid spring.

[0007] An object of the present technology is to solve the above problems, and to provide a fluid spring that does not cause the folded-back portion of the diaphragm to bite in.

Means for Solving the Problems

[0008] [1] The fluid spring according to the present technology includes a fluid chamber component having an opening, an elastic membrane portion that covers the opening of the fluid chamber component and is provided in a flat plate shape up to the edge, a pressing portion connected to the elastic membrane portion on the side opposite to the opening, a fluid chamber defined by the fluid chamber component and the elastic membrane portion, and a fluid supply / discharge portion provided in the fluid chamber component for supplying and discharging the fluid in the fluid chamber. When the fluid flows into the fluid chamber from the fluid supply / discharge portion, the elastic membrane portion expands and deforms toward the pressing portion side, and the pressing portion is moved in a direction away from the opening.

[0009] [2] The fluid chamber component has a wall surface portion and a standing wall portion provided so as to surround the periphery of the wall surface portion. The opening is defined in the region surrounded by the standing wall portion on the side opposite to the wall surface portion, and the edge portion of the elastic membrane portion is fixed to the end portion of the standing wall portion. The fluid spring according to [1].

[0010] [3] The wall surface portion includes a spring communication passage for allowing the fluid to flow into the fluid chamber. The fluid spring according to [2].

[0011] [4] In order to reduce the volume of the fluid chamber, the fluid chamber component further includes a spacer disposed in contact with the wall surface portion, and the spacer is provided with a communication hole for communicating the spring communication passage and the fluid chamber. The fluid spring according to any one of [1] to [3].

Advantages of the Invention

[0012] According to the present technology, since there is no folded-back portion of the diaphragm, even when the pressing portion moves in a direction perpendicular to the pressing direction due to an external force from a pressing object or the like, the diaphragm will not be caught. Therefore, when the diaphragm is caught, the fluid chamber component constituting the fluid chamber and the pressing portion are fixed by being caught, but since there is no such fixed state, the vibration from the member fixing the fluid spring is transmitted to the pressing object of the pressing portion through the fluid spring. will not be transmitted. In addition, since there is no folded-back portion of the diaphragm, the fluid filled in the folded-back portion can be reduced, so it can also be used for applications where improvement of the responsiveness of the fluid spring is required.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

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Figure 8

Embodiments for Carrying Out the Invention

[0014] Hereinafter, embodiments of the present technology will be described. The same or corresponding parts may be denoted by the same reference numerals, and the description thereof may not be repeated.

[0015] In each of the embodiments described below, when referring to the number, amount, dimensions, etc., unless otherwise specified, the scope of the present technology is not necessarily limited to the number, amount, dimensions, etc. In the following embodiments, each component is not necessarily essential to the present technology, unless otherwise specified. The same parts and corresponding parts may be denoted by the same reference numerals, and the overlapping description may not be repeated. It is initially planned to use the configurations in the embodiments in appropriate combinations.

[0016] In this specification, the descriptions of "comprise", "include", and "have" are in an open-ended form. That is, when including a certain configuration, other configurations other than the said configuration may or may not be included. Further, the present technology is not necessarily limited to those that necessarily exhibit all the effects mentioned in this embodiment.

[0017] (Embodiment 1: Vibration isolator 1) With reference to FIGS. 1 and 2, the configuration of the vibration isolator 1 of this embodiment will be described. FIG. 1 is a longitudinal sectional view showing the configuration of the vibration isolator 1, and FIG. 2 is a partial perspective view seen from one valve side of the vibration isolator 1.

[0018] The vibration isolation device 1 has a bilaterally symmetric form with a virtual plane perpendicular to the direction axis of the pressing direction of the piston-shaped pressing portion 31, which includes the vertical line VL, as a boundary as shown in the figure. In the following description, the vibration isolation device 1 having a bilaterally symmetric form will be described, but it is not limited to the bilaterally symmetric form, and it may be the configuration of a vibration isolation device having either one of the configurations.

[0019] The vibration isolation device 1 includes a flat vibration isolation table 10 on which a vibration isolation target such as a semiconductor manufacturing device is mounted, a support portion 20 provided below the vibration isolation table 10 in the vertical direction, a vibration damping fluid spring 30 that presses the support portion 20 from the horizontal direction, a valve 40, and a fixing portion 50 that fixes the valve 40. The vibration damping fluid spring 30 is provided so as to be able to press the support portion 20 in a pair so as to have a bilaterally symmetric form with a virtual plane including the vertical line VL as a boundary. One vibration damping fluid spring 30 is connected to one valve 40 so that the fluid can be supplied, but it can also be connected to a plurality of valves.

[0020] The support portion 20 includes a support plate 22 provided on the vibration isolation table 10 and a connecting portion 21 that extends downward from the support plate 22 and is connected to the vibration damping fluid spring 30. The support portion 20 supports the vibration isolation table 10 by at least horizontal support by the vibration damping fluid spring 30. The fixing portion 50 includes a side wall portion 51 that fixes the valve 40 and a mounting wall 52 that supports the side wall portion 51.

[0021] The valve 40, which will be described later, functions as a valve for switching the fluid flow path to control the supply and / or discharge of fluid to the fluid chamber 32, and is a device controlled by the control unit 100. Although air is used as the fluid, it is not limited to air, and an inert gas such as nitrogen or a liquid can also be used. The valve 40 has a supply port capable of supplying fluid to the fluid chamber 32. The valve 40 only needs to be able to supply fluid to the fluid chamber 32. In this embodiment, it is provided with an intake port (not shown) connected to a fluid supply source such as a compressor and a discharge port (not shown) connected to an exhaust passage (not shown). The supply port of the valve 40 will be connected to the fixed portion fluid passage 51h.

[0022] The valve 40 can be fixed to the side wall portion 51 by fixing the valve 40 to the surface of the side wall portion 51, or by providing a bottomed hole in the thickness direction of the side wall portion 51 and embedding the valve 40 in this hole to fix the valve 40 to the side wall portion 51.

[0023] The forms of the vibration isolation base 10, the support portion 20, and the fixing portion 50 described above are merely examples and are not limited to these forms.

[0024] The vibration damping fluid spring 30 includes a base portion 33 as a fluid chamber component in which an opening 33p is defined, a diaphragm 34 as an elastic membrane portion that covers the opening 33p of the base portion 33 and is provided in a flat plate shape up to the edge, a pressing portion 31 connected to the diaphragm 34 on the side opposite to the opening 33p, a fluid chamber 32 defined by the base portion 33 and the diaphragm 34, and a spring communication passage 33h provided in the base portion 33 for supplying and / or discharging fluid into the fluid chamber 32. The connecting portion 21 of the support portion 20 is connected to the side of the pressing portion 31 opposite to the side connected to the diaphragm 34.

[0025] The base portion 33 includes a circular wall surface portion 33a and a cylindrical standing wall portion 33b provided so as to surround the periphery of the wall surface portion 33a. The spring communication passage 33h is provided in the wall surface portion 33a. An opening 33p is defined at the surrounded end portion 33t on the side of the standing wall portion 33b opposite to the wall surface portion 33a. The edge portion of the diaphragm 34 is fixed to the end portion 33t of the standing wall portion 33b by, for example, an annular pressing member 33c. The pressing member 33c is screwed to the end portion 33t of the standing wall portion 33b using bolts or the like. The diaphragm 34 is fixed to the base portion 33 in a state where a predetermined tension is applied. The tension applied to the diaphragm 34 only needs to be such that the diaphragm 34 is located at a predetermined position with respect to the base portion 33 and the diaphragm 34 can be stretched by the fluid filled in the fluid chamber 32, and is appropriately set according to the material and film thickness of the diaphragm 34 set according to the degree of expansion of the fluid chamber 32 due to the stretching of the diaphragm 34. Since the diaphragm 34 is provided on the base portion 33 in a state where tension is applied by the pressing member 33c, it can be connected to the pressing portion 31 without providing a folded-back portion.

[0026] The diaphragm 34 is stretched by being pressed by the fluid flowing into the fluid chamber 32, transmits the pressure received from the fluid to the pressing portion 31, and presses and moves the pressing portion 31. Further, when the fluid flowing into the fluid chamber 32 decreases, the pressing by the fluid on the diaphragm 34 is released, and the diaphragm 34 returns to its initial position before stretching. The diaphragm 34 preferably has elasticity so that such displacement can return to the initial position. The material and film thickness are appropriately selected according to the usage conditions such as the pressing force and durability received by the diaphragm 34, and natural or synthetic rubber materials can be used.

[0027] In the present embodiment, in order to ensure a predetermined responsiveness, since the fluid chamber 32 maintains a predetermined volume, it is preferable that the base portion 33 has a strength capable of maintaining the volume of the fluid chamber 32. The base portion 33 maintains the volume of the fluid chamber 32 according to the application. Since the wall surface portion 33a maintains the standing wall portion 33b and is a portion that connects to the side wall portion 51 and maintains the vibration damping fluid spring 30, the thickness and material are appropriately selected and used according to the pressure applied to the fluid chamber 32 and the like. For the spring communication passage 33h, the diameter as a flow path is specified according to the flow rate and flow velocity of the fluid passing through it.

[0028] When fluid flows into the fluid chamber 32 from the spring communication passage 33h, the diaphragm 34 expands and deforms toward the pressing portion 31 side, and moves the pressing portion 31 in a direction away from the wall surface portion 33a.

[0029] A fixed portion fluid passage 51h is provided in the side wall portion 51. One end side of the fixed portion fluid passage 51h is directly connected to the spring communication passage 33h. A valve 40 is fixed to the surface of the side wall portion 51 opposite to the base portion 33. The valve 40 has a valve fluid supply and discharge port 40h for supplying fluid to the vibration damping fluid spring 30. The valve fluid supply and discharge port 40h of the valve 40 is directly connected to the other end side of the fixed portion fluid passage 51h.

[0030] In the above description, "directly connected" means not interposing other connecting members. Note that interposing a leakage suppressing member such as a sealing material to prevent fluid from leaking to the outside means that it is included in the directly connected configuration. The vibration damping fluid spring 30 and the valve 40 can be connected to the side wall portion 51 without interposing an intervening member such as a connecting member, thereby shortening the path length of the flow path and achieving a path length capable of ensuring sufficient responsiveness.

[0031] In the present embodiment, as long as the side wall portion 51 can maintain the vibration control fluid spring 30 and the valve 40 in the horizontal direction, the material and thickness are not limited. Further, the fixed portion fluid passage 51h is provided so as to communicate with the spring communication passage 33h, and the diameter as a flow passage is specified according to the flow rate and flow velocity of the fluid passing through. In the present embodiment, the center lines CL of the through holes of the valve fluid supply / discharge port 40h, the fixed portion fluid passage 51h, and the spring communication passage 33h are arranged to be coaxial in the horizontal direction.

[0032] In the present embodiment, a fluid spring using a diaphragm 34 which is an elastic film-like portion can be used as a vibration control fluid spring in a vibration isolation device. As the vibration isolation device, a vibration isolation table on which a vibration isolation target is mounted, a support portion that supports the vibration isolation table in the vertical direction, a vibration control fluid spring that presses the support portion from the horizontal direction and has a spring communication passage communicating with a fluid chamber provided inside, and a valve having a valve fluid supply / discharge port for supplying or discharging fluid to / from the vibration control fluid spring are provided, and the vibration control fluid spring uses a diaphragm 34 which is an elastic film-like portion, and can be a vibration isolation device. Regarding the above-described valve, it can also be configured to be fixed to a fixed portion, and the fixed portion includes a fixed portion fluid passage in which the spring communication passage is connected to one side and the valve fluid supply / discharge port is connected to the other side. This fluid spring can be used as an actuator, but can also be used for vibration control or vibration isolation.

[0033] (Control system) With reference to FIG. 3, a control system for introducing or discharging fluid into / from the fluid chamber 32 of the vibration isolation device 1 having the above-described configuration will be described. FIG. 3 is a block diagram showing the control of introducing or discharging fluid into / from the fluid chamber 32 of the vibration isolation device 1.

[0034] A control unit 100 on the main body device side is connected to the valve 40, and the switching operation of the valve 40 is controlled. An air supply system 200 is connected to the valve 40, and the introduction of fluid into the valve 40 is controlled by the control unit 100. An exhaust system 300 is connected to the valve 40, and the exhaust of fluid from the valve 40 is controlled by the control unit 100.

[0035] (Function and Effect) As described above, according to the vibration damping device 1 using the fluid spring 30 for vibration damping in this embodiment, by using the diaphragm 34 provided in a flat plate shape up to the edge portion and stretched with a predetermined tension for the fluid spring 30 for vibration damping, the opening 33p of the concave base portion 33 is blocked, and when fluid flows into the fluid chamber 32, the diaphragm 34 expands and presses the pressing portion 31 to operate the pressing portion 31.

[0036] As a result, unlike a conventional fluid spring, since there is no folded-back portion provided at the peripheral edge of the diaphragm, it is possible to use the fluid spring 30 for vibration damping in which the volume of the fluid chamber 32 is set to a predetermined volume and the pressing portion 31 operates, and it is possible to make the fluid spring 30 for vibration damping with a small volume that is easy to attach to the fixing portion 50. Furthermore, it is also possible to suppress vibration transmission in the direction of the opening 33p of the base portion 33.

[0037] Furthermore, since there is no folded-back portion provided at the peripheral edge of the diaphragm, inhibition of the degree of freedom in the vertical direction of the pressing portion 31 due to the biting of the folded-back portion is eliminated. Furthermore, the attachment work of the fluid spring 30 for vibration damping to the fixing portion 50 can also be facilitated.

[0038] By adopting this configuration, it is possible to obtain a sufficient response speed required for the fluid spring for vibration damping as a vibration damping actuator. For example, the vibration damping device 1 of this embodiment can be suitably used for the vibration damping table of a semiconductor manufacturing apparatus incorporating a high-speed stage.

[0039] Furthermore, the valve fluid supply / discharge port 40h of the valve 40 is directly connected to the side wall portion 51 of the fixing portion 50 that fixes the fluid spring 30 for vibration damping. As a supply path for passing fluid, only the fixing portion fluid passage 51h and the spring communication passage 33h are used, and by adopting a minimum piping configuration without interposing other pipelines, the volume of the passage is reduced as much as possible, and it is possible to further improve the response speed.

[0040] Note that the configuration is not limited to that shown in FIGS. 1 and 2, and the above configuration using the diaphragm 34 provided in a flat plate shape up to the edge and stretched with a predetermined tension as the fluid spring 30 for vibration control may be adopted for a configuration in which the fluid spring 30 for vibration control and the valve 40 are connected separately using a pipeline.

[0041] (Embodiment 2) Referring to FIG. 4, another form of the vibration isolation device will be described. FIG. 4 is a partial longitudinal sectional view showing the configuration of the vibration isolation device 1A according to Embodiment 2. The basic configuration is the same as that of the vibration isolation device 1 having the fluid spring 30 for vibration control in Embodiment 1 described above, but the positions of the valve fluid supply / discharge port 40h, the fixed part fluid passage 51h, and the through holes of the spring communication passage 33h are provided at positions deviated from the horizontal center line CL of the pressing part 31.

[0042] The spring communication passage 33h is provided at a position shifted upward with respect to the center line CL, and the fixed part fluid passage 51h is provided so as to incline upward as it moves away from the pressing part 31.

[0043] For example, when the arrangement position of the valve 40 is provided at a position deviated from the horizontal center line CL due to design constraints, the adoption of the configuration such as the vibration isolation device 1A in the present embodiment is selected.

[0044] Even with such a configuration, it is possible to directly connect the valve fluid supply / discharge port 40h of the valve 40 to the side wall part 51 of the fixed part 50 that fixes the fluid spring 30 for vibration control, and the same operational effects as those in Embodiment 1 described above can be obtained.

[0045] (Other Embodiments) For example, referring to FIGS. 5 to 8, the configuration of the vibration isolation device according to still other embodiments will be described. FIGS. 5 to 7 are first to third schematic views showing variations in the arrangement of the valve 40, and FIG. 8 is a partial longitudinal sectional view for explaining the configuration of the vibration isolation device that changes the capacity of the fluid chamber 32.

[0046] FIG. 5 is a schematic view seen from valve 40 when the center lines CL of the through holes of valve fluid supply / discharge port 40h, fixed part fluid passage 51h, and spring communication passage 33h of vibration isolator 1 shown in Embodiment 1 are coaxially arranged in the horizontal direction, in the case where one valve 40 is provided.

[0047] The case of providing one valve 40 is not the only possibility. As shown in FIG. 6, it is also possible to adopt a configuration in which two valves 40 are provided. As shown in FIG. 7, it is also possible to adopt a configuration in which four valves 40 are provided, and five or more valves 40 may be provided.

[0048] Furthermore, as shown in FIG. 8, in fluid chamber 32 of base part 33, in order to reduce the volume of fluid chamber 32, spacer 80 may be arranged in contact with wall surface part 33a. Spacer 80 is provided with communication hole 80h for communicating spring communication passage 33h and fluid chamber 32. The form of this communication hole 80h may be constituted by a single passage like spring communication passage 33h, or may be branched into a plurality toward fluid chamber 32 as shown in FIG. 8.

[0049] As described above, the embodiments of the present technology have been described. However, each of the embodiments disclosed this time should be considered as illustrative in all respects and not restrictive. The scope of the present technology is indicated by the claims, and it is intended that all modifications within the meaning and scope equivalent to the claims are included.

Description of Reference Numerals

[0050] 1 Vibration isolator, 1A Vibration isolator, 10 Vibration isolation table, 20 Support part, 21 Connection part, 22 Support plate, 30 Vibration damping fluid spring, 31 Pressing part, 32 Fluid chamber, 33 Base part, 33a Wall surface part, 33b Standing wall part, 33c Pressing member, 33h Spring communication passage, 33p Opening, 33t End part, 34 Diaphragm, 40 Valve, 40h Valve fluid supply / discharge port, 50 Fixed part, 51 Side wall part, 51h Fixed part fluid passage, 52 Placing wall, 80 Spacer, 80h Communication hole, 100 Control part, 200 Air supply system, 300 Exhaust system.

Claims

1. A fluid chamber component having an opening, an elastic membrane-like part that covers the opening of the fluid chamber component and is provided in a flat plate shape up to the edge, a pressing part connected to the elastic membrane-like part on the side opposite to the opening, a fluid chamber defined by the fluid chamber component and the elastic membrane-like part, a fluid supply / discharge part provided in the fluid chamber component for supplying and discharging the fluid in the fluid chamber, comprising: When the fluid flows into the fluid chamber from the fluid supply / discharge part, the elastic membrane-like part expands and deforms toward the pressing part side, and the pressing part is moved in a direction away from the opening. Fluid spring.

2. The fluid chamber component has a wall surface part, and a standing wall part provided so as to surround the periphery of the wall surface part, and in a region surrounded by the standing wall part on the side opposite to the wall surface part, the opening is defined, and the edge of the elastic membrane-like part is fixed to the end of the standing wall part. The fluid spring according to Claim 1.

3. The wall surface part includes a spring communication passage for allowing the fluid to flow into the fluid chamber. The fluid spring according to Claim 2.

4. The fluid chamber component further includes a spacer disposed in contact with the wall surface part to reduce the volume of the fluid chamber, and the spacer is provided with a communication hole for communicating the spring communication passage and the fluid chamber. The fluid spring according to Claim 3.

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