Electroacoustic transducer, array speaker, wearable device, speaker and ultrasonic transmitter

Abstract

To provide an electroacoustic transducer having an improved sound pressure level per area in which the electroacoustic transducer is arranged.SOLUTION: An electroacoustic transducer 10 includes a vibration portion 1, a plurality of driving portions 5 provided in an area facing the vibration portion and vibrating the vibration portion, a support portion 6 provided in an area facing the vibration portion and supporting the plurality of driving portions, and a joint portion 3 that joins the vibration portion and each of the plurality of driving portions, and the plurality of driving portions extend from the center of the support portion.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an electroacoustic transducer, an array speaker, a wearable device, a speaker, and an ultrasonic transmitter.

Background Art

[0002] In recent years, acoustic devices such as earphones have been developed for applications such as listening to music and videos and video conferencing. The acoustic device realizes a speaker driver, which is an electroacoustic transducer, by, for example, MEMS (Micro Electro Mechanical Systems) technology.

[0003] Patent Document 1 describes an electroacoustic transducer realized by MEMS technology, in which an actuator and a vibrating part face each other.

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in a conventional electroacoustic transducer, a fixing part is provided around the vibrating part. According to this structure, there is room for improvement in the sound pressure level per unit area of the electroacoustic transducer.

[0005] The present invention has been made in view of the above points, and an object thereof is to provide an electroacoustic transducer with an improved sound pressure level per unit area of the electroacoustic transducer.

Means for Solving the Problems

[0006] In order to solve the above-described problems and achieve the object, the electroacoustic transducer of the present invention includes a vibrating part, a plurality of driving parts provided in a region facing the vibrating part to vibrate the vibrating part, a supporting part provided in a region facing the vibrating part to support the plurality of driving parts, and a joining part that joins each of the vibrating part and the plurality of driving parts, and the plurality of driving parts extend around the supporting part.

Effects of the Invention

[0007] According to the present invention, there is an effect that an electroacoustic transducer with an improved sound pressure level per unit area of the arrangement can be provided.

Brief Description of the Drawings

[0008]

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[0009] Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In each drawing, the same reference numerals are assigned to the same components, and duplicate descriptions will be omitted as appropriate.

[0010] In addition, the embodiments shown below exemplify an electroacoustic transducer, an array speaker, a wearable device, a speaker, or an ultrasonic transmitter for embodying the technical idea of the present invention, and the present invention is not limited to the embodiments shown below.

[0011] The shapes of the components described below, their relative arrangements, parameter values, etc. are not intended to limit the scope of the present invention only to those, but are intended to be illustrative unless otherwise specified. Also, the sizes and positional relationships of the members shown in the drawings may be exaggerated for clarity of explanation.

[0012] (First Embodiment) The first embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a perspective view showing an example of the configuration of an electroacoustic transducer according to the first embodiment. FIG. 2 is a side view of the electroacoustic transducer according to the first embodiment. FIG. 3 is a plan view of the electroacoustic transducer according to the first embodiment with the vibration part 1 omitted. Also, the arrows shown in FIGS. 1 to 3 indicate the X direction, the Y direction, and the Z direction. When no signs are attached to the X direction, the Y direction, and the Z direction, it is assumed that both positive and negative directions are included.

[0013] The electroacoustic transducer 10 shown in FIG. 1 includes a vibrating part 1, a driving source 2, a coupling part 3, a driving plate 4, and a support part 6. Also, the region where the driving source 2 and the driving plate 4 are laminated is referred to as a driving part 5.

[0014] In the electroacoustic transducer 10, due to an electrical signal input to the driving source 2, the driving part 5 having the support part 6 as a fixed end vibrates in the Z direction (the direction in which the vibrating part 1 and the driving part 5 face each other). The electroacoustic transducer 10 is a device that generates vibrations such as sound when the vibrating part 1 vibrates in the Z direction along with the vibration. Hereinafter, the details of each main part of the electroacoustic transducer 10 will be described.

[0015] The support part 6 is a support member having the Y direction as the longitudinal direction. The support part 6 is arranged on the side opposite to the driving source 2 with respect to the driving plate 4 at the position indicated by the dashed line in FIG. 3. The support part 6 is composed of, for example, a single layer or a plurality of layers such as an inorganic material or an organic material, and is preferably formed of single-crystalline silicon of an SOI substrate. When the support part 6 is composed of a plurality of layers, an interlayer film composed of silicon oxide or the like may be provided between the layers constituting the support part 6 or between the layers of the support part 6 and the driving plate 4 laminated in the +Z direction. Note that the support part 6 may be larger than the range indicated by the dashed line shown in FIG. 3. For example, a part of the region where the support part 6 is arranged may overlap the driving part 5. Also, for example, the end part of the support part 6 in the Y-axis direction may protrude from the driving plate 4.

[0016] The driving plate 4 is laminated in the +Z direction of the support part 6 and extends in the +X direction or the -X direction around the support part 6. The driving plate 4 is formed of, for example, an oxidation material, an inorganic material, an organic material, etc., and is preferably formed of a silicon active layer. Among the driving plate 4, the region extending in the X direction from the support part 6 is supported by the support part 6 in a state that can be elastically deformed in the Z direction as a so-called cantilever beam structure having the region laminated with the support part 6 as a fixed end. On the surface of the driving plate 4 opposite to the surface laminated with the support part 6, a coupling part 3 and a plurality of driving sources 2 are provided.

[0017] The joint portion 3 faces the drive unit 5 and the vibration unit 1 in the Z direction, and joins the drive unit 5 and the vibration unit 1. The joint portion 3 has the same longitudinal direction as that of the support portion 6, and is formed along the side located at the end of the drive plate 4 in the X direction (the extending direction of the drive plate 4). The joint portion 3 shown in FIGS. 1 and 2 shows a state laminated on the drive source 2, but it may be laminated on the drive plate 4. Further, the joint portion 3 does not necessarily have to be along the side located at the end of the drive plate 4 in the X direction. For example, the joint portion 3 may be provided inside the drive plate 4 in the X direction (toward the center of the drive plate 4) from the edge of the drive plate 4.

[0018] The drive source 2 is a piezoelectric actuator that is driven by applying a voltage. The drive source 2 is electrically connected to an external control device that controls a signal for generating vibrations such as sound and controls the signal toward the electroacoustic transducer 10. The drive source 2 has a lower electrode, a piezoelectric portion, and an upper electrode laminated in this order on the drive plate 4. The lower electrode and the upper electrode are formed of, for example, gold (Au) or platinum (Pt). The piezoelectric portion is formed of, for example, PZT (lead zirconate titanate), which is a piezoelectric material. However, the material forming the piezoelectric portion is not limited to this. Further, the drive source 2 may have a structure in which a plurality of piezoelectric portions are laminated and include an intermediate electrode.

[0019] When a voltage is applied to the drive source 2, strain occurs in the in-plane direction (XY direction) in the piezoelectric portion included in the drive source 2, and it deforms in the Z direction as a unimorph with the drive plate 4. When the voltage applied to the drive source 2 is changed over time, the surface of the vibration unit 1 vibrates via the joint portion 3 to generate a pressure wave in the surrounding air, which is perceived by humans as sound. The input voltage waveform is obtained by voltage-converting the waveform of the sound to be reproduced, and the sound is reproduced by inputting this voltage waveform to the drive source 2.

[0020] A plurality of drive units 5 in which the drive source 2 and the drive plate 4 are laminated are formed symmetrically with respect to a line or a point with the region where the drive plate 4 and the support portion 6 are laminated interposed therebetween. By arranging the drive units 5 with good symmetry, deformation of the vibration unit 1 during vibration can be reduced.

[0021] The vibrating part 1 is a plate-shaped member formed in a rectangular shape. On two sides facing each other in the X direction, the vibrating part 1 is joined to the driving part 5 via the joint part 3 in the Z direction. That is, the vibrating part 1 is in a positional relationship facing the driving part 5 and the joint part 3 in the Z direction. The area of the vibrating part 1 viewed from the Z direction (in plan view) is preferably equal to or larger than the total area of the driving plate 4 and the joint part 3 in plan view. Also, the shape of the vibrating part 1 is not limited to a rectangle and can be any shape.

[0022] In addition, when the vibrating part 1 is formed by, for example, a MEMS process, it is formed of silicon or the like. However, the process and material for forming the vibrating part 1 are not limited to this. As the material for forming the vibrating part 1, for example, metals such as magnesium, titanium, and aluminum, carbon nanofibers, cellulose nanofibers, paper, CFRP, etc. can be selected.

[0023] According to the present embodiment, the driving part 5 and the support part 6 are provided in a region facing the vibrating part 1. In particular, the driving part 5 and the support part 6 are provided within the region facing the vibrating part 1. Thereby, a configuration that does not require members provided around the vibrating part 1 can be achieved. Therefore, the area of the vibrating part 1 with respect to the arrangement area of the electroacoustic transducer 10 can be increased, and the sound pressure level per unit arrangement area of the electroacoustic transducer can be improved. Also, the plurality of driving parts 5 have a configuration extending around the support part 6. That is, the driving part 5 has a configuration of driving the vibrating part 1 as a so-called cantilever beam structure with the region where it laminates with the support part 6 as a fixed end. Thereby, since a larger displacement can be obtained compared to a configuration where both ends of the driving part 5 are fixed ends, the amplitude of vibration of the driving part 1 can be increased. Therefore, an improvement in the sound pressure level per unit area of the vibrating part 1 can be realized.

[0024] Further, the drive unit 5 is configured to drive both ends of the vibrating unit 1 via the integrating unit 3. As a result, the distortion due to the driving force of the vibration surface of the vibrating unit 1 is reduced compared to the case where the center of the vibrating unit 1 is driven, and the vibrating unit 1 can vibrate parallel to the Z direction (vibrating direction). Therefore, the distortion (THD: Total Harmonic Distortion) generated when driving the electroacoustic transducer 10 can be further reduced.

[0025] (Modification 1) FIG. 4 is a plan view showing the configuration of the electroacoustic transducer according to Modification 1 of the first embodiment. As shown in FIG. 4, the integrating unit 3 and the drive unit 5 may be divided by a slit 7 provided along the X direction. By configuring the drive unit 5 in a plurality of pairs with respect to the support unit 6, the longitudinal direction of the drive unit 5 can be changed from the Y direction (the direction orthogonal to the extending direction of the drive unit 5) to the X direction. As a result, the ratio of the deformation in the X direction is larger than the deformation in the Y direction of the drive unit 5, so that it is possible to more efficiently improve the sound pressure level per unit area of the vibrating unit 1 and reduce THD.

[0026] (Second Embodiment) Next, the second embodiment will be described with reference to FIG. 5. Hereinafter, in the description of the second embodiment, the description of the same parts as those of the first embodiment already described will be omitted, and the parts different from the first embodiment will be described.

[0027] FIG. 5 is a plan view showing an example of the configuration of the electroacoustic transducer according to the second embodiment. Note that the vibrating unit 1 in the present embodiment is the same as that in the first embodiment, and thus is omitted. The electroacoustic transducer 11 shown in FIG. 5 is different from the modification of the first embodiment shown in FIG. 4 in that the integrating unit 3 is located between the drive units 5 adjacent in the Y direction. Further, the integrating unit 3 includes a spring unit 8 that is displaced in the Z direction with respect to the drive unit 5.

[0028] The integrating unit 3 is provided on the free end side (the extending direction end side) between each pair of drive units 5 adjacent in the Y direction, that is, between the adjacent drive units 5. The integrating unit 3 is integrated with the adjacent drive units 5 by a pair of spring units 8.

[0029] The spring part 8 has a shape symmetric with respect to the joining position with the vibrating part 1 of the integrating part 3. The spring part 8 is formed by a part of the driving plate 4 and has a folded-back structure from the free end toward the fixed end side of the driving part 5. Thereby, the spring part 8 enables deformation in the Z direction with respect to the driving part 5 with the joining position of the spring part 8 and the driving part 5 as the rotation axis.

[0030] According to the present embodiment, the integrating part 3 has a configuration that can be displaced in the vibration direction of the vibrating part 1 with respect to the driving part 5 between adjacent driving parts 5. Thereby, only the component in the vibration direction of the driving force of the driving part 5 is transmitted to the vibrating part 1, so that the amplitude of the vibration of the vibrating part 1 can be further increased. Therefore, it is possible to improve the sound pressure level per unit area of the vibrating part 1. Further, the vibration surface of the vibrating part 1 has less distortion due to the driving force compared to the case where the spring part 8 is not provided, and can vibrate parallel to the Z direction (vibration direction). Therefore, the distortion generated when driving the electroacoustic transducer 10 can be further reduced. Further, the driving part 5 has different widths in the direction perpendicular to the extending direction on the end side of the vibrating part 1 and the support part 6 side in the extending direction of each driving part 5. That is, the driving part 5 has a smaller width in the short side direction on the end side in the extending direction than on the support part 6 side. Thereby, an increase in the arrangement area due to providing the spring part 8 can be suppressed.

[0031] (Modification 1) FIG. 6 is a plan view showing the configuration of an electroacoustic transducer according to Modification 1 of the second embodiment. FIG. 7 is a perspective view showing the configuration of an electroacoustic transducer according to Modification 1 of the second embodiment. As shown in FIGS. 6 and 7, it is also possible to adopt a configuration in which three or more pairs of driving parts 5 are provided and two or more pairs of integrating parts 3 provided with spring parts 8 are provided. In this case, the ratio of the length in the X direction to the Y direction of the driving part 5 can be increased. Thereby, since the ratio of the deformation in the X direction is larger than the deformation in the Y direction of the driving part 5, it is possible to improve the sound pressure level (also referred to as the amplitude of the generated vibration) more efficiently and reduce THD. Further, since the vibrating part 1 can be supported at more locations, the vibration of the vibrating part 1 can be made more stable.

[0032] (Modification Example 2) FIG. 8 is a plan view showing an example of the configuration of an electroacoustic transducer according to Modification Example 2 of the second embodiment. As shown in FIG. 8, the integrated portion 3 provided with the spring portion 8 does not necessarily have to be provided between the adjacent drive portions 5. For example, it may be configured to be provided at the free end of each of the plurality of drive portions 5 provided.

[0033] (Third Embodiment) Next, the third embodiment will be described with reference to FIG. 9. Hereinafter, in the description of the third embodiment, the description of the same parts as those in the first embodiment or the second embodiment already described will be omitted, and the parts different from the first embodiment or the second embodiment will be described.

[0034] FIG. 9(a) is a plan view showing an example of the configuration of an electroacoustic transducer according to the third embodiment. FIG. 9(b) is a plan view in which the vibration portion 1 of the electroacoustic transducer 12 shown in FIG. 9(a) is omitted. The electroacoustic transducer 12 shown in FIGS. 9(a) and 9(b) is different from the first embodiment in that the vibration portion 1 is circular. Further, the electroacoustic transducer 12 is different from the first embodiment in that the drive portions 5 are arranged point-symmetrically with respect to the support portion 6.

[0035] The electroacoustic transducer 12 in the present embodiment has eight drive portions 5 that extend radially around the support portion 6. The eight drive portions 5 are arranged point-symmetrically with respect to the support portion 6. By arranging the drive portions 5 point-symmetrically and vibrating the vibration portion 1, the vibration components other than the Z-direction vibration generated in each drive portion 5 can be canceled out. As a result, the vibration portion 1 can be vibrated more stably, so that the THD can be reduced. Note that the number of drive portions 5 shown in the present embodiment may be three or more and is not limited to eight.

[0036] Further, it is preferable that the width in the short direction at the end side in the extending direction of each drive unit 5 (which may also be referred to as the edge side of the vibrating unit) is equal to or greater than the width of the joint portion 3. By having the drive unit 5 in contact with all of the side surfaces of the joint portion 3, the contact surface between the drive unit 5 and the joint portion 3 can be made stronger. Thereby, it is possible to prevent breakage due to vibrations or the like caused by the driving of the drive unit 5. Note that the width in the short direction on the support portion 6 side of the drive unit 5 may be equal to or less than the width of the joint portion 3. By setting the width in the short direction on the support portion 6 side of the drive unit 5 to be equal to or less than the width of the joint portion 3, the number of drive units 5 that can be arranged can be increased, and the vibrating unit 1 can be vibrated more stably.

[0037] (Modification 1) FIG. 10(a) is a plan view showing the configuration of an electroacoustic transducer according to Modification 1 of the third embodiment. FIG. 10(b) is a plan view of the electroacoustic transducer 12 shown in FIG. 10(a) with the vibrating unit 1 omitted. As shown in FIG. 10, each of the plurality of drive units 5 arranged symmetrically may have different widths in the short direction on the end side in the extending direction and on the support portion 6 side. For example, by increasing the width in the short direction on the end side in the extending direction compared to the support portion 6 side of the drive unit 5, the area of the drive source 2 can be increased, and the driving force of the drive unit 5 can be increased. Thereby, the driving sensitivity of the vibrating unit 1 can be improved.

[0038] (Modification 2) FIG. 11(a) is a plan view showing the configuration of an electroacoustic transducer according to Modification 2 of the third embodiment. FIG. 11(b) is a plan view of the array-type electroacoustic transducer 20 (speaker array) shown in FIG. 11(a) with the vibrating unit 1 omitted. The array-type electroacoustic transducer 20 shown in FIGS. 11(a) and 11(b) has a configuration in which a plurality of the electroacoustic transducers 12 shown in FIGS. 10(a) and 10(b) are arranged on the same plane. By arranging a plurality of electroacoustic transducers on the same plane, the directivity of the generated vibrations can be improved. In other words, the reach distance of the vibrations generated in the vibration direction of the vibrating unit 1 can be made longer. At this time, from the viewpoint of improving the directivity of the vibrations, it is preferable to arrange the plurality of electroacoustic transducers 12 in a closest-packed manner, such as in a triangular lattice.

[0039] Note that the vibrating part 1 shown in Fig. 11(a) forms a shape in which a plurality of hexagonal vibrating parts 1 shown in Fig. 10(a) are combined by a single plate-like member, but a combination of a plurality of plate-like members may also be used.

[0040] (Fourth Embodiment) The above-described first to third embodiments are applicable not only to electroacoustic transducers but also to acoustic devices having electroacoustic transducers, such as earphones, headphones, and speakers. Further, for example, it can also be incorporated and used as an acoustic device in a wearable device in a form that can be directly or indirectly worn on the user's body, such as a wristwatch type, glasses type, HMD (Head Mounted Display) type, body-mounted type, etc.

[0041] In particular, the acoustic device incorporated and used in the wearable device is preferably small and low power consumption from the viewpoints of extending the operating time, reducing the size and weight, and designability. On the other hand, the first to third embodiments can improve the sound pressure level per unit area of the arrangement surface of the electroacoustic transducer and per unit area of the vibrating part. That is, the first to third embodiments can be mounted as an acoustic device that can output a larger volume with a predetermined power while suppressing the size of the electroacoustic transducer. Therefore, the acoustic device to which the first to third embodiments are applied can prevent the overall size of the wearable device from increasing and improve the degree of freedom in design. At the same time, the acoustic device to which the first to third embodiments are applied can suppress the power consumption when outputting the volume. Application examples will be described below.

[0042] The fourth embodiment will be described with reference to Fig. 12. Hereinafter, in the description of the fourth embodiment, the description of the same parts as those in the already described first to third embodiments will be omitted, and the parts different from the first to third embodiments will be described.

[0043] FIG. 12 is a schematic diagram showing an example of the configuration of the glasses-type wearable device according to the fourth embodiment. The glasses-type wearable device 2000 shown in FIG. 12 includes a speaker 1000 and a temple 2001. Note that the speaker 1000 corresponds to the electroacoustic transducer described as the first to third embodiments above. When mounting the speaker 1000 on the glasses-type wearable device 2000, it is preferably disposed on the inner surface of the temple portion 2001 (the surface facing the user when worn). In particular, when the speaker 1000 is used as a bone conduction speaker, it is preferably disposed at a position in contact with the surface of the user's head on the temple portion 2001.

[0044] (Fifth Embodiment) Next, the fifth embodiment will be described with reference to FIG. 13. Hereinafter, in the description of the fifth embodiment, the description of the same parts as those in the first to third embodiments already described will be omitted, and the parts different from the first to third embodiments will be described.

[0045] FIG. 13 is a schematic diagram showing an example of the configuration of the watch-type wearable device according to the fifth embodiment. The watch-type wearable device 3000 shown in FIG. 13 includes a speaker 1000, a liquid crystal screen 3001, and an outer periphery 3002 of the liquid crystal screen.

[0046] When mounting the speaker 1000 on the wristwatch-type wearable device 3000, it is preferably disposed on the outer periphery 3002 of the liquid crystal screen 3001.

[0047] (Sixth Embodiment) Next, the sixth embodiment will be described with reference to FIG. 14. Hereinafter, in the description of the sixth embodiment, the description of the same parts as those in the first to third embodiments already described will be omitted, and the parts different from the first to third embodiments will be described.

[0048] FIG. 14 is a schematic diagram showing an example of the configuration of an earphone type speaker according to the sixth embodiment. The earphone type speaker 4000 shown in FIG. 14 includes a speaker 1000, a mounting portion 4001 to be mounted on the user's ear, and an opening 4002.

[0049] When mounting the speaker 1000 on the earphone 4000, a configuration in which the opening 4002 of the mounting portion 4001 to be mounted on the ear is arranged in the normal direction of the drive plate of the speaker 1000 is preferable.

[0050] (Seventh Embodiment) Furthermore, the electroacoustic transducer according to the first to third embodiments can also be applied to an ultrasonic transmitter or the like that generates ultrasonic waves by the vibration of the electroacoustic transducer.

[0051] Next, the seventh embodiment will be described with reference to FIG. 15. Hereinafter, in the description of the seventh embodiment, the description of the same parts as those of the first to third embodiments already described will be omitted, and the parts different from the first to third embodiments will be described.

[0052] FIG. 15 is a schematic diagram showing an example of the configuration of an ultrasonic oscillator according to the seventh embodiment. The ultrasonic transmitter 5000 shown in FIG. 15 includes at least an ultrasonic vibrator 1002 and a processing unit 5001. Note that the ultrasonic vibrator 1002 corresponds to the electroacoustic transducer described as the first to third embodiments above.

[0053] The ultrasonic transmitter 5000 outputs ultrasonic waves from the ultrasonic vibrator 1002 based on an electrical signal controlled by the processing unit 5001.

[0054] (Embodiment Capture) So far, the electroacoustic transducer according to an embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiments, and can be changed within the range that those skilled in the art can conceive, such as addition, change, or deletion of other embodiments. As long as the functions and effects of the present invention are achieved in any aspect, it is included in the scope of the present invention.

[0055] Aspects of the present invention are as follows, for example.

[0056] (First aspect) The electroacoustic transducer according to the first aspect includes a vibrating portion, a plurality of driving portions provided in a region facing the vibrating portion for vibrating the vibrating portion, a supporting portion provided in a region facing the vibrating portion for supporting the plurality of driving portions, and a joint portion for joining the vibrating portion and the driving portions respectively, wherein the plurality of driving portions extend around the supporting portion.

[0057] (Second aspect) The electroacoustic transducer according to the second aspect is characterized in that, in the first aspect, the supporting portion is provided within the region facing the vibrating portion.

[0058] (Third aspect) The electroacoustic transducer according to the third aspect is characterized in that, in the first or second aspect, the driving portion is provided within the region facing the vibrating portion.

[0059] (Fourth aspect) The electroacoustic transducer according to the fourth aspect is characterized in that, in any one of the first to third aspects, the joint portion is located in the region facing the vibrating portion.

[0060] (Fifth aspect) The electroacoustic transducer according to the fifth aspect is characterized in that, in any one of the first to fourth aspects, the joint portion is located at an end portion of each driving portion in the extending direction.

[0061] (Sixth aspect) The electroacoustic transducer according to the sixth aspect is characterized in that, in any one of the first to fifth aspects, the plurality of driving portions are arranged symmetrically with respect to the supporting portion.

[0062] (Seventh aspect) As a seventh aspect, the electroacoustic transducer, in any one of the first to fifth aspects, is characterized in that the plurality of drive units are arranged point-symmetrically with respect to the support unit.

[0063] (Eighth aspect) As an eighth aspect, the electroacoustic transducer, in any one of the first to seventh aspects, is characterized in that a plurality of pairs of the drive units are provided with respect to the support unit.

[0064] (Ninth aspect) As a ninth aspect, the electroacoustic transducer, in the eighth aspect, is characterized in that the joint portion is located between the adjacent drive units and integrally joins the adjacent drive units to the vibration unit.

[0065] (Tenth aspect) As a tenth aspect, the electroacoustic transducer, in any one of the first to ninth aspects, is characterized in that the joint portion has a spring portion that is displaced in the vibration direction of the vibration unit with respect to the drive unit.

[0066] (Eleventh aspect) As an eleventh aspect, the electroacoustic transducer, in any one of the first to tenth aspects, is characterized in that, in the extending direction of each of the plurality of drive units, the widths in the direction perpendicular to the extending direction are different between the end side of the vibration unit and the support unit side.

[0067] (Twelfth aspect) As a twelfth aspect, the electroacoustic transducer, in any one of the first to eleventh aspects, is characterized in that the width of the end portion in the extending direction of each of the drive units is equal to or greater than the width of the joint portion.

[0068] (Thirteenth aspect) The electroacoustic transducer according to the 13th aspect, in any one of the 1st to 12th aspects, is characterized in that the vibrating part includes at least one of silicon, magnesium, titanium, aluminum, carbon nanofiber, cellulose nanofiber, paper, or CFRP.

[0069] (14th aspect) The array speaker according to the 14th aspect is characterized by including a plurality of electroacoustic transducers in any one of the 1st to 13th aspects.

[0070] (15th aspect) The array speaker according to the 15th aspect is characterized in that, in the 14th aspect, the vibrating parts of the plurality of electroacoustic transducers are shared on one sheet.

[0071] (16th aspect) The wearable device according to the 16th aspect is characterized by including the electroacoustic transducer described in any one of the 1st to 13th aspects.

[0072] (17th aspect) The speaker according to the 17th aspect is characterized by including the electroacoustic transducer described in any one of the 1st to 13th aspects.

[0073] (18th aspect) The ultrasonic transmitter according to the 18th aspect is characterized by including the electroacoustic transducer described in any one of the 1st to 13th aspects.

Explanation of reference numerals

[0074] 1 Vibrating part 2 Driving source 3 Integrating part 4 Driving plate 5 Driving part 6 Supporting part 7 Slit 8 Spring part 10, 11, 12 Electroacoustic transducers 20 Array-type electroacoustic transducer (speaker array) 2000 Glasses-type wearable device 2001 Harness part 3000 Wristwatch-type wearable device 4000 Earphone 4001 Mounting part 4002 Opening 5000 Ultrasonic transmitter

Prior art documents

Patent documents

[0075]

Patent Document 1

Claims

1. A vibrating part, a plurality of driving parts provided in a region facing the vibrating part and vibrating the vibrating part, a supporting part provided in a region facing the vibrating part and supporting the plurality of driving parts, and a joining part joining each of the vibrating part and the plurality of driving parts, characterized in that the plurality of driving parts extend around the supporting part. An electroacoustic transducer.

2. The supporting part is provided within a region facing the vibrating part. The electroacoustic transducer according to claim 1, characterized in that.

3. The driving part is provided within a region facing the vibrating part. The electroacoustic transducer according to claim 1, characterized in that.

4. The joining part is located in a region facing the vibrating part. The electroacoustic transducer according to claim 1, characterized in that.

5. The joining part is located at an end in the extending direction of each driving part. The electroacoustic transducer according to claim 1, characterized in that.

6. The plurality of driving parts are arranged symmetrically with respect to the supporting part in a line. The electroacoustic transducer according to claim 1, characterized in that.

7. The plurality of driving parts are arranged symmetrically with respect to the supporting part in a point. The electroacoustic transducer according to claim 1, characterized in that.

8. A plurality of pairs of the driving parts are provided with respect to the supporting part. The electroacoustic transducer according to claim 6, characterized in that.

9. The joining part is located between adjacent driving parts and joins the adjacent driving parts together with the vibrating part. The electroacoustic transducer according to claim 8, characterized in that.

10. The joining part has a spring part that is displaced in the vibration direction of the vibrating part with respect to the driving part. The electroacoustic transducer according to claim 1, characterized in that.

11. In the extending direction of each of the plurality of driving parts, the widths in the direction perpendicular to the extending direction are different between the end part side of the vibrating part and the supporting part side. The electroacoustic transducer according to claim 1, characterized in that.

12. The width of the end part in the extending direction of each driving part is equal to or greater than the width of the joining part. The electroacoustic transducer according to claim 1, characterized in that.

13. The vibrating part includes at least any one of silicon, magnesium, titanium, aluminum, carbon nanofiber, cellulose nanofiber, paper, or CFRP. The electroacoustic transducer according to claim 1, characterized in that.

14. Comprising a plurality of electroacoustic transducers according to any one of claims 1 to 13, An array speaker characterized by this.

15. The vibrating parts of the plurality of electroacoustic transducers are commonized into one sheet, The array speaker according to claim 14, characterized by this.

16. Comprising an electroacoustic transducer according to any one of claims 1 to 13, A wearable device characterized by this.

17. Comprising an electroacoustic transducer according to any one of claims 1 to 13, A speaker characterized by this.

18. Comprising an electroacoustic transducer according to any one of claims 1 to 13, An ultrasonic transmitter characterized by this.

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