Retainer and stage device

Abstract

To provide a retainer and a stage device capable of easily supplying lubrication oil.SOLUTION: A retainer according to an embodiment includes a roller holder having a plurality of roller holding openings, an oil tank attached to an upper end of the roller holder along a longitudinal direction, and an oil receiver attached to a lower end of the roller holder along the longitudinal direction. A first groove extending along the longitudinal direction so as to store lubrication oil is formed on an upper surface of the oil tank, a first opening facing an upper surface of the roller holder is formed on a bottom surface of the first groove, and the lubrication oil in the first groove drops onto the upper surface of the roller holder via the first opening.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a retainer and a stage device.

Background Art

[0002] A charged particle beam lithography apparatus draws a predetermined pattern on a mask while adjusting the position of the mask by a stage device in a vacuum chamber. A linear stage used as the stage device has a guide rail, a plurality of rollers, and a long plate-shaped holder that holds the plurality of rollers, and lubricating oil is used for the purpose of reducing wear of each part.

[0003] Conventionally, at the timing of regular maintenance (for example, every two years), the vacuum chamber is vented to the atmosphere, the maintenance port is opened, and lubricating oil is supplied to the guide rail, rollers, and holder, or used lubricating oil is recovered.

[0004] Since there are a large number of rollers, it has been troublesome to supply oil to each roller. In addition, the guide rail, rollers, and holder are provided corresponding to each of the X-axis direction and the Y-axis direction, and the oil supply work takes time, leading to a long-term device downtime.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention has been made in view of the above-described conventional situation, and an object thereof is to provide a retainer and a stage device that facilitate the supply of lubricating oil.

Means for Solving the Problems

[0007] A retainer according to one aspect of the present invention includes a roller retainer in which a plurality of roller holding openings are formed, an oil tank attached along the longitudinal direction to the upper end portion of the roller retainer, and an oil receiver attached along the longitudinal direction to the lower end portion of the roller retainer. On the upper surface of the oil tank, a first groove extending along the longitudinal direction and storing lubricating oil is formed. On the bottom surface of the first groove, a first opening facing the upper surface of the roller retainer is formed, and the lubricating oil in the first groove drops onto the upper surface of the roller retainer through the first opening.

[0008] A stage device according to one aspect of the present invention includes a pair of first guide rails arranged along a first direction and having V-grooves formed in respective opposing surfaces, a first retainer which is a retainer according to one aspect of the present invention and is arranged between the first guide rails, a stage upper plate positioned on the first guide rails and connected to one of the first guide rails, a pair of second guide rails arranged along a second direction orthogonal to the first direction and having V-grooves formed in respective opposing surfaces, a second retainer which is a retainer according to one aspect of the present invention and is arranged between the second guide rails, a stage lower plate positioned under the second guide rails and connected to one of the second guide rails, and a stage middle plate positioned between the first guide rails and the second guide rails and connected to the other of the first guide rails and the other of the second guide rails. The lubricating oil in the first groove of the first retainer flows down to the stage middle plate through the roller retainer and the oil receiver of the first retainer. The lubricating oil on the stage middle plate flows down to the first groove of the second retainer through a third opening formed in the stage middle plate. The lubricating oil in the first groove of the second retainer flows down to the stage lower plate through the roller retainer and the oil receiver of the second retainer.

Advantages of the Invention

[0009] According to the present invention, since the supply of lubricating oil is easy, the workload of the oil supply operation can be reduced, and the device downtime can be shortened.

Brief Description of the Drawings

[0010]

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Embodiments for Carrying Out the Invention

[0011] FIG. 1 is a schematic diagram showing an example of the configuration of a charged particle beam lithography apparatus having a stage device 3 according to an embodiment of the present invention. The charged particle beam lithography apparatus shown in FIG. 1 irradiates an electron beam onto a processing target (mask W), for example, to draw a predetermined pattern. In addition, in this embodiment, in addition to the lithography apparatus, an apparatus that irradiates an electron beam (charged particle beam) or light such as an exposure apparatus, an electron microscope, or an optical microscope onto a processing target may be used. Therefore, the processing target may be a semiconductor substrate or the like in addition to the mask.

[0012] As shown in FIG. 1, the charged particle beam lithography apparatus includes a chamber 1, an electron source 2, a stage device 3, and a laser length measuring unit 4. The chamber 1 has a vacuum inside and houses the stage device 3. The electron source 2 is provided on the ceiling of the chamber 1 and irradiates the mask W with an electron beam. The stage device 3 is supported by a plurality of spacers 6.

[0013] The stage device 3 has an XY stage 3A, a Z stage 3B, and a top stage 3C, and adjusts the position of the mask W placed on the top stage 3C.

[0014] FIG. 2 is a perspective view of the XY stage 3A, FIG. 3 is a view taken in the direction of arrow A in FIG. 2, and FIG. 4 is a view taken in the direction of arrow B in FIG. 2. As shown in FIGS. 2 to 4, the XY stage 3A includes a stage upper plate 10, a stage middle plate 20, a stage lower plate 30, and two-stage cross roller guides G1 and G2 extending in the x-axis direction and the y-axis direction. The stage upper plate 10, the stage middle plate 20, and the stage lower plate 30 are plate-like members having a substantially rectangular shape in plan view.

[0015] The XY stage 3A moves the stage upper plate 10 on which the Z stage 3B and the top stage 3C are placed in the x-axis direction and the y-axis direction. Specifically, the stage upper plate 10 can be moved in the x-axis direction by the upper cross roller guide G1. Further, the stage upper plate 10 can be moved in the y-axis direction together with the cross roller guide G1 by the lower cross roller guide G2.

[0016] The Z stage 3B can move the top stage 3C in the z-axis direction. Thereby, the top stage 3C can be moved in the three-axis directions of x, y, and z, and the mask W can be placed at a desired position.

[0017] The laser length measuring unit 4 (see FIG. 1) measures the position of the top stage 3C. Based on the measurement result by the laser length measuring unit 4, the position of the top stage 3C is feedback-controlled. While controlling the position of the top stage 3C, the mask W is irradiated with an electron beam to draw a pattern.

[0018] As shown in FIGS. 2 to 4, the cross roller guide G1 includes guide rails 50 and 52 extending in the x-axis direction, and a retainer 60A disposed between the guide rail 50 and the guide rail 52. The guide rails 50 and 52 are prismatic and are arranged in parallel on the stage intermediate plate 20, and V-grooves are formed on each of the opposing surfaces. The retainer 60A holds a plurality of rollers R.

[0019] Two rail sets composed of the guide rails 50 and 52 are provided and arranged at both ends of the stage intermediate plate 20 in the y-axis direction.

[0020] The guide rail 52 is connected to the stage upper plate 10. The guide rail 50 is connected to the stage intermediate plate 20 by a connecting member 42. The guide rail 52 and the stage upper plate 10 move relatively in the x-axis direction with respect to the guide rail 50 and the stage intermediate plate 20 as the roller R of the retainer 60A rolls.

[0021] The cross roller guide G2 includes guide rails 54 and 56 extending in the y-axis direction, and a retainer 60B disposed between the guide rail 54 and the guide rail 56. The guide rails 54 and 56 are prismatic and are arranged in parallel on the stage lower plate 10, and V-grooves are formed on each of the opposing surfaces. The retainer 60B holds a plurality of rollers R.

[0022] A rail set consisting of guide rails 54 and 56 is provided in two sets and is arranged at both ends of the stage lower plate 10 in the x-axis direction.

[0023] The guide rail 56 is connected to the stage middle plate 20 by a connecting member 46. The guide rail 54 is connected to the stage lower plate 30 by a connecting member 44. The guide rail 56 and the stage middle plate 10 move relatively in the y-axis direction with respect to the guide rail 54 and the stage lower plate 30 when the roller R of the retainer 60B rolls.

[0024] Due to the movement of the guide rail 56 and the movement of the guide rail 52, the Z stage 3B and the top stage 3C placed on the stage upper plate 10 move relatively in the x-axis direction and the y-axis direction with respect to the stage lower plate 10.

[0025] Next, the configuration of the retainer 60A will be described. Since the retainer 60B has the same configuration as the retainer 60A, the description thereof will be omitted. As shown in FIGS. 5 and 6, the retainer 60A includes a roller holder 70 that holds a plurality of rollers R, an oil tank 80 disposed above the roller holder 70, and an oil receiving portion 90 disposed below the roller holder 70.

[0026] The roller holder 70 is in the shape of a long strip plate, and a plurality of openings for holding rollers (through holes penetrating in the thickness direction) are formed at predetermined intervals in the longitudinal direction on its main surface. The longitudinal direction of the roller holder 70 is the x-axis or y-axis direction of the XY stage 3A, and the short direction corresponds to the vertical direction of the XY stage 3A. Hereinafter, the short direction of the roller holder 70 will also be referred to as the vertical direction. Openings with different angles (orientations) are alternately formed. When the roller R is inserted into the opening, the rollers R with different angles (orientations) are alternately arranged.

[0027] As shown in FIGS. 9 and 10, a groove 73 extending in the longitudinal direction is formed on the upper surface of the roller retainer 70. Further, on the main surface (side surface) of the roller retainer 70, a vertical groove 71 connecting the upper surface of the roller retainer 70 and the opening 75 for holding the roller is formed. Further, on the main surface (side surface) of the roller retainer 70, a horizontal groove 72 connecting adjacent openings 75 for holding the roller is formed. As will be described later, the lubricating oil flows along the side circumferential surfaces of the grooves 71 to 73 and the opening 75.

[0028] As shown in FIGS. 5, 6, 7, 8A, and 8B, the oil tank 80 is a long strip-shaped metal member. A groove 82 extending in the longitudinal direction is formed on the upper surface, a groove 84 extending in the longitudinal direction is formed on the lower surface, and the cross-section is substantially H-shaped. The upper groove 82 serves as a reservoir for the lubricating oil. The lower groove 84 is fitted with the upper end portion of the roller retainer 70.

[0029] A communication hole 85 that connects the groove 82 and the groove 84 is formed in the bottom surface of the groove 82. There may be one communication hole 85, but it is preferably formed in a plurality at predetermined intervals in the longitudinal direction. The communication hole 85 faces the upper surface of the roller retainer 70 fitted in the groove 84.

[0030] Both longitudinal ends of the oil tank 80 project downward and the upper surface is at a lower position, forming a stepped portion. Bolt insertion holes 81 penetrating in the vertical direction are formed at both ends of the oil tank 80. The longitudinal ends of the groove 82 are continuous with the vertical surface 86 of the stepped portion. Further, the longitudinal ends of the groove 82 are shallower in depth than other portions so that the lubricating oil in the groove 82 does not flow out.

[0031] As shown in FIGS. 5 to 7, the oil receiver 90 is a long strip-shaped metal member, and a groove 92 extending in the longitudinal direction is formed on the upper surface. The groove 92 is fitted with the lower end of the roller retainer 70 and serves as a reservoir for lubricating oil flowing down from the roller retainer 70. At least one through hole (not shown) is formed in the bottom surface of the groove 92, and a foreign matter removal filter is provided in this through hole. The lubricating oil in the groove 92 passes through the foreign matter removal filter and drips from the oil receiver 90.

[0032] Both longitudinal ends of the oil receiver 90 rise upward, and bolt holes 91 (see FIG. 6) are formed on the upper surface.

[0033] The upper end of the roller retainer 70 is fitted into the groove 84 of the oil tank 80, the lower end of the roller retainer 70 is fitted into the groove 92 of the oil receiver 90, both ends of the oil tank 80 and the oil receiver 90 are overlapped, a fastening bolt 62 is inserted through the bolt insertion hole 81 and the bolt hole 91, and tightened to connect and fix the ends to each other. Thereby, a retainer 60A is obtained in which the roller retainer 70 is sandwiched and fixed from above and below by the oil tank 80 and the oil receiver 90.

[0034] In the vicinity of the vertical surface 86 of the oil tank 80, a through hole 83 (see FIG. 7) facing the groove 92 from above is formed.

[0035] An insulating resin can be used for the material of the roller retainer 70. A non-magnetic material such as a titanium alloy can be used for the materials of the oil tank 80 and the oil receiver 90. A cemented carbide or the like can be used for the material of the roller R. Known lubricating oil can be used.

[0036] A tube or a needle attached to the flange can be inserted from the vertical surface 86 side, and lubricating oil can be supplied into the groove 82.

[0037] As shown in Fig. 11, a groove 22 is formed on the upper surface of the stage intermediate plate 20 along the peripheral edge. Specifically, the groove 22 has a pair of grooves 22a along the y-axis direction and a pair of grooves 22b along the x-axis direction, and the grooves 22b are connected to the ends of the pair of grooves 22a.

[0038] As shown in Fig. 12, guide rails 50 and 52 are arranged with the groove 22b therebetween. A retainer 60A arranged between the guide rail 50 and the guide rail 52 is located above the groove 22b.

[0039] A plurality of through holes 24 penetrating the stage intermediate plate 20 in the vertical direction are formed on the bottom surface of the groove 22a.

[0040] As shown in Fig. 13, a groove 32 is formed on the upper surface of the stage lower plate 30 along the peripheral edge. Specifically, the groove 32 has a pair of grooves 32b along the y-axis direction and a groove 32a that connects the ends of the grooves 32b and extends in the x-axis direction. The groove 32b is located below the groove 22a of the stage intermediate plate 20.

[0041] Guide rails 54 and 56 are arranged with the groove 32b therebetween. A retainer 60B arranged between the guide rail 54 and the guide rail 56 is located below the groove 22a and above the groove 32b.

[0042] At least one through hole 34 penetrating the stage lower plate 30 in the vertical direction is formed on the bottom surface of the groove 32a. An oil recovery tank (not shown) is installed below the through hole 34.

[0043] The lubricating oil stored in the groove 82 of the oil tank 80 of the retainer 60A drips from the communication hole 85 and is supplied to the groove 73 on the upper surface of the roller retainer 70. When the lubricating oil fills the groove 73, it flows down through the groove 71 to the opening 75 for holding the roller and is supplied to the side peripheral surface of the roller R. The side peripheral surface of the roller R contacts the inclined surface of the V-groove of the guide rails 50 and 52. By supplying the lubricating oil, the wear of the guide rails 50 and 52 and the roller R is reduced, and the guide rail 52 can move smoothly.

[0044] Thereafter, the lubricating oil flows down along the main surface (side surface) of the roller retainer 70, is received by the oil receiver 90, and is stored in the groove 92.

[0045] The lubricating oil in the groove 92 of the oil receiver 90 drips into the groove 22b of the stage middle plate 20 through the through hole. The lubricating oil supplied from the oil receiver 90 to the groove 22b flows into the groove 22a and drips through the through hole 24. Below the through hole 24, the oil tank 80 of the retainer 60B is located, and the dripped lubricating oil is supplied into the groove 82 of the oil tank 80.

[0046] Similar to the retainer 60A, in the retainer 60B, the lubricating oil stored in the groove 82 of the oil tank 80 drips onto the roller retainer 70 and is supplied to the surface of the roller R and the like. Thereby, the wear of the guide rails 54, 56 and the roller R is reduced, and the guide rail 56 can move smoothly.

[0047] Thereafter, the lubricating oil flows down along the main surface (side surface) of the roller retainer 70, is received by the oil receiver 90, and is stored in the groove 92. The lubricating oil in the groove 92 of the oil receiver 90 drips into the groove 32b of the stage lower plate 30 through the through hole. The lubricating oil supplied from the oil receiver 90 to the groove 32b flows into the groove 32a, drips through the through hole 34, and is stored in the oil recovery tank.

[0048] In the regular maintenance of the charged particle beam lithography apparatus, the inside of the chamber 1 is vented to the atmosphere, the maintenance port is opened, and the oil recovery tank is removed. The used oil in the oil recovery tank is recovered, and the tank is attached to the lower part of the stage lower plate 30. Further, if necessary, a tube attached to the flange through the through hole 83 of the oil tank 80 may be inserted from above to suck and recover the used oil remaining in the groove 92 of the oil receiver 90.

[0049] Using a flange with a needle or tube attached, new lubricating oil is injected and supplied into the groove 82 from the vertical surface 86 side of the oil tank 80 of the retainers 60A and 60B. The lubricating oil supplied into the groove 82 drips onto the upper surface of the roller retainer 70 through the communication hole 85 and reaches all the rollers R through the grooves 71 to 73. Therefore, it is not necessary to apply and supply lubricating oil to each roller R as in the prior art, and the amount of oiling work can be reduced.

[0050] Thus, according to this embodiment, it is easy to recover used oil and supply new oil during regular maintenance, the amount of work is reduced, and the device downtime can be shortened.

[0051] In the above embodiment, the widths, depths of the grooves 71 to 73, 82, 92, the diameter of the communication hole 85, and the diameter of the through hole formed on the bottom surface of the groove 92 may be appropriately determined according to the interval of regular maintenance, the characteristics of the lubricating oil used, etc.

[0052] For example, prepare a member similar to the oil tank 80, process communication holes with diameters of 0.5 mm, 1 mm, and 1.5 mm, and for each communication hole, measure the time (the time the lubricating oil stays in the oil tank) until 0.5 mL of lubricating oil with a density of 1.89 [g / cm 3 , 25 °C] and a kinematic viscosity of 187 [cSt, 40 °C] has all dripped by experiment. The measurement results are shown in Fig. 14. Then, obtain an approximate formula that approximates this experimental result. From the approximate formula, the diameter of the communication hole can be obtained according to the desired stay time.

[0053] Note that the present invention is not limited to the above embodiment as it is, and at the implementation stage, the components can be modified and embodied without departing from the gist. Also, various inventions can be formed by appropriately combining a plurality of components disclosed in the above embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, components from different embodiments may be appropriately combined.

Explanation of Reference Numerals

[0054] 1 Chamber 2 Electron source 3 Stage device 3A XY Stage 4 Laser length measurement unit 6 Spacer 10 Upper stage plate 20 Middle stage plate 30 Lower stage plate 50, 52, 54, 56 Guide rail 60A, 60B Retainer 70 Roller holder 80 Oil tank 90 Oil receiving part G1, G2 Cross roller guide R Roller

Claims

1. A retainer having a plurality of openings for holding rollers formed therein, an oil tank attached along the longitudinal direction to the upper end of the retainer, an oil receiver attached along the longitudinal direction to the lower end of the retainer, comprising: On the upper surface of the oil tank, a first groove extending along the longitudinal direction and storing lubricating oil is formed. On the bottom surface of the first groove, a first opening facing the upper surface of the retainer is formed, and the lubricating oil in the first groove drips onto the upper surface of the retainer through the first opening. A retainer.

2. On the upper surface of the retainer, a second groove extending along the longitudinal direction is formed, and the first opening is located above the second groove. On the side surface of the retainer, a third groove connecting the roller holding opening and the upper surface of the retainer is formed. The retainer according to claim 1.

3. On the lower surface of the oil tank, a fourth groove extending along the longitudinal direction and fitting into the upper end of the retainer is formed, and the first opening communicates the first groove and the fourth groove. The retainer according to claim 2.

4. On the upper surface of the oil receiver, a fifth groove extending along the longitudinal direction and into which the lower end of the retainer is fitted is formed, and the fifth groove stores the lubricating oil flowing down from the retainer. The retainer according to claim 2.

5. On the bottom surface of the fifth groove, a second opening for dripping the lubricating oil in the fifth groove downward is formed. The retainer according to claim 4.

6. A pair of first guide rails arranged along a first direction and each having a V-groove formed on each of the opposing surfaces, a first retainer which is the retainer according to claim 1 arranged between the first guide rails, a stage upper plate located on the first guide rails and connected to one of the first guide rails, a pair of second guide rails arranged along a second direction orthogonal to the first direction and each having a V-groove formed on each of the opposing surfaces, a second retainer which is the retainer according to claim 1 arranged between the second guide rails, a stage lower plate located under the second guide rails and connected to one of the second guide rails, a stage middle plate located between the first guide rails and the second guide rails and connected to the other of the first guide rails and the other of the second guide rails, comprising: The lubricating oil in the first groove of the first retainer flows down to the stage middle plate through the roller retainer and the oil receiving portion of the first retainer. The lubricating oil on the stage middle plate flows down to the first groove of the second retainer through the third opening formed in the stage middle plate. The lubricating oil in the first groove of the second retainer flows down to the stage lower plate through the roller retainer and the oil receiving portion of the second retainer, a stage device.

7. On the upper surface of the stage middle plate, a sixth groove along the first direction and a seventh groove along the second direction connected to an end of the sixth groove are formed. The first guide rail is disposed with the sixth groove therebetween. The first retainer is located above the sixth groove. The stage device according to claim 6, wherein the third opening is formed in the bottom surface of the seventh groove.

8. On the upper surface of the stage lower plate, an eighth groove along the second direction and a ninth groove along the first direction connected to an end of the eighth groove are formed. The second guide rail is disposed with the eighth groove therebetween. The second retainer is located above the eighth groove. The stage device according to claim 7, wherein the lubricating oil is recovered into a recovery tank through a fourth opening formed in the bottom surface of the ninth groove.

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