Compact traversing robot

Abstract

To provide a vertically compact traversing robot.SOLUTION: A suitable apparatus includes a spindle platform; a traversing platform configured to move in a first direction; a lift system connected to the spindle platform and the traversing platform; and a movable arm connected to the spindle platform. The movable arm includes a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link. The apparatus further includes a first actuator connected to the spindle platform and configured to cause a rotation of the first link, and a second actuator in the movable arm and configured to cause a rotation of the second link. The first actuator extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link.SELECTED DRAWING: Figure 2A

Description

Technical Field

[0001] The exemplary and non-limiting embodiments described herein generally relate to a traverse robot that can be used for applications such as material handling vacuum environment systems, and more particularly to a traverse robot that is vertically compact. Brief Description of the Prior Art

[0002] The material handling robot includes a robot arm coupled to a drive device and is capable of moving along an orbit or rail system. The robot arm may include an upper link, a lower link on the upper link, and an end effector on the lower link. The end effector may be configured to handle a payload in a material handling operation. The drive device includes a spindle assembly coupled to the robot arm, a Z-axis mechanism for moving the spindle assembly vertically in the Z direction (vertical direction), and one or more motors stacked coaxially. The robot arm can be positioned and operated in a vacuum environment, and the drive device can be positioned in an atmospheric environment. Bellows may be used to confine the vacuum environment in the space where the robot arm operates. The spindle assembly, the Z-axis mechanism for vertical movement of the spindle assembly, and / or the coaxially stacked motors generally require a considerable depth and volume in the vacuum chamber in which the robot operates. Summary

[0003] In one aspect, the apparatus includes a spindle platform; a traverse platform configured to move in a first direction; a lifting system coupled to the spindle platform and the traverse platform, the lifting system being configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; At least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; At least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator arranged on the at least one movable arm and configured to cause rotation of the second link; Comprising. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0004] According to another view, the method is Providing a traverse platform configured to move in a first direction; Providing a spindle platform; A lifting system coupled to the spindle platform and the traverse platform, the lifting system configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; At least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; Providing at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and providing at least one second actuator arranged on the at least one movable arm and configured to cause rotation of the second link; Including. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0005] According to another view, the apparatus comprises at least one processor and at least one non - volatile memory storing computer program instructions, which, when executed by the at least one processor, cause the apparatus to, move the traverse platform in a first direction; operate a lifting system connected to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; operate at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; operate at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means arranged on the at least one movable arm and configured to cause rotation of the second link; be configured to perform. The first actuator means extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0006] According to another view, the apparatus comprises a traverse platform configured to move in a first direction; a spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, the at least one first actuator being configured to cause rotation of the first link, and the at least one second actuator being configured to cause rotation of the second link; A lifting system connected between the spindle platform and the traverse platform, configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state, and having a third actuator and a third control unit connected to the third actuator on the traverse platform; Comprising. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

Brief Description of the Drawings

[0007] The foregoing aspects and other features will be described below with reference to the accompanying drawings.

[0008]

Figure 0

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Figure 1A

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Figure 1B

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Figure 1C

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Figure 2A

Figure 2B

Figure 2C

Figure 2D

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Figure 3

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Figure 4A

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Figure 5

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Figure 7A

Figure 7B

Figure 7C

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Figure 7D

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Figure 7E

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Figure 7F

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Figure 7G(1)(2)

Figure 7G(3)(4)

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Figure 8

[0023] Various features will be described with reference to the exemplary embodiments shown in the drawings, but it should be understood that these features can be embodied in many alternative embodiments of the embodiments. It should also be understood that any suitable size, shape or type can be adopted for the elements and materials..

[0024] Referring to FIGS. 0A - 0C, an example of an existing vacuum environment material processing traverse robot is generally indicated at 10. This is hereinafter referred to as "robot 10". Robot 10 includes a robot arm 12 coupled to a drive device 14. The robot arm 12 is disposed and operable in a vacuum environment, and the drive device 14 is disposed in an atmospheric environment. As shown in the illustration, the robot arm 12 has an upper link 16, two lower links 18, and two end effectors 20 provided one each on each of the lower links 18. The drive unit 14 includes a spindle assembly 24 coupled to the robot arm 12, a Z - axis mechanism 26 (such as a ball screw) for moving the spindle assembly 24 up and down to thereby provide vertical operation of the robot arm 12 in the Z - direction, and one or more motors 28 stacked coaxially. A bellows 30 may be used to enclose the vacuum environment of the space in which the robot arm 12 operates. Robot 10 may move in the X - direction (indicated by arrow X in FIG. 0A) along a track 34 or rail. Robot 10 may move along two tracks 34 or rails as shown in FIG. 0B. In the folded state, as shown in FIG. 0C, the upper end effector 20 may completely cover the lower end effector 20.

[0025] One object of the present invention is to reduce the vertical space occupied by the robot, and as a result, reduce the depth and volume of the vacuum chamber in which the robot operates.

[0026] An exemplary embodiment of a traverse robot according to the present invention is illustrated in FIGS. 1A - 1C(2). Hereinafter, this exemplary embodiment is referred to as "robot 100". FIG. 1A is a side view of robot 100 having a control system 106. Additional views of robot 100 are provided in FIGS. 1B(1) - 1B(3), and an example of the arrangement of the internal components of robot 100 is illustrated in FIGS. 1C(1) and 1C(2).

[0027] As shown in FIG. 1A, the robot 100 may be supported by a stationary base 108 and may include a linear induction and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, a robot arm 120, and a control system 106.

[0028] The stationary base 108 may be a structure configured to support the robot 100. As an example, the stationary base 108 may be a plate or frame having a length along the traveling direction of the robot 100 (e.g., the X direction along the X axis), the floor or wall of a vacuum chamber, or any other suitable structure capable of supporting the robot 100.

[0029] The linear guide and actuation system 110 may include a linear guide structure and a linear actuator system configured to enable the traverse platform 112 to travel (e.g., in the direction along the X axis in FIG. 1A) relative to the stationary base 108.

[0030] As schematically shown in the example of FIG. 1A, the linear guide structure may be formed by a linear bearing structure. As an example, the linear bearing structure may include one or more linear bearing rails 124 attached to the stationary base 108 and one or more linear bearing blocks 126 attached to the traverse platform 112. The linear guide portion of the linear guide and actuation system 110 may include a shield system configured to prevent contact with the linear bearing rail 124, prevent dust from contaminating the linear bearing block 126 (or any other one or more linear bearings), and prevent particles from migrating from the linear bearing block 126 (or any other one or more linear bearings).

[0031] Alternatively, the linear guide structure may be a wheel and rail system, a cable or belt suspension system, a magnetic support system, or any other suitable structure configured to constrain the movement of the traverse platform 112 relative to the stationary base 108.

[0032] As schematically shown in the examples of FIGS. 1C(1) and 1C(2), the linear actuator system may include one or more linear actuators and one or more position sensors 111. Although the position sensors 111 are shown as being on the traverse platform 112, it should be understood that the position sensors 111 may be located anywhere on or within the linear guide - actuation system 110. The linear actuators of the linear actuator system may have a stationary portion that may be attached to the stationary base 108 and a movable portion that may be attached to the traverse platform 112. The linear actuator may be a linear motor 130, such as a permanent magnet motor, for example. The movable portion may be composed of a forcer having a coil 132 (e.g., a moving coil structure) on the bottom surface of the traverse platform 112, and the stationary portion may be formed by a magnet track 134 on the stationary base 108. In a movable magnet structure, the movable portion may consist of a magnetic plate on the traverse platform 112, and the stationary portion may be formed by a track with a coil 132 formed thereon on the stationary base 108.

[0033] Alternatively, the linear actuator can be based on any other suitable structure that can generate a force between the stationary base 108 and the traverse platform 112 substantially in the desired travel direction of the robot 100, and can be based on, for example, belt drive, band drive, cable drive, ball screw, lead screw.

[0034] The position sensor 111 of the linear actuator may be configured to measure the position of the traverse platform 112 along the desired traveling direction (the direction along the X-axis). As an example, the position sensor 111 may be a position encoder such as an optical, magnetic, inductive, or capacitive position encoder, or a laser interferometer. Alternatively, it may be any other suitable device that can directly or (in the case of belt drive, band drive, cable drive, ball screw, lead screw, etc.) indirectly measure the position of the traverse platform 112 along the desired traveling direction.

[0035] The measurement value from the position sensor 111 may be used by the control system 106 to control a linear actuator (e.g., the linear motor 130) in order to achieve the desired movement or desired stop position of the traverse platform 112 relative to the stationary base 108 along the desired traveling direction (the direction along the X-axis) of the robot 100.

[0036] The elevating mechanism 114 may have one or more elevating links 136 configured to move the spindle platform 116 relative to the traverse platform 112 in a direction perpendicular thereto (or more precisely, in a manner that includes a vertical movement component) and to stabilize the angular attitude of the spindle platform 116 relative to the traverse platform 112 (e.g., keep the spindle platform 116 substantially horizontal). For example, in accordance with FIGS. 1A, 1B(1), and 1C(1), the elevating link components 136 may have a parallelogram configuration actuated by an elevating mechanism motor 140 that may be a rotary drive device. The rotary drive (or other elevating mechanism motor 140) may include a rotary motor and a rotary sensor. The movement control of the spindle platform 116 (e.g., to keep the spindle platform 116 substantially horizontal) may be implemented using the control system 106.

[0037] Generally, each of one or more lifting connection parts 136 of the lifting mechanism 114 may have a pulley structure that utilizes one or more links, joints (rotary or another suitable type), and / or belts, bands, or cables. The one or more lifting connection parts 136 may be actuated by one or more rotary motors, linear motors, struts, or any other suitable actuation means.

[0038] As depicted in the examples of FIGS. 1A, 1B(1), 1B(2), and 1C(1), one or more lifting connection parts 136 of the lifting mechanism 114 may be disposed on one or both sides of the traverse platform 112. FIG. 1B(2) shows an example where the lifting connection parts 136 are disposed on both sides of the traverse platform 112. As another example, one or more lifting connection parts 136 may be disposed on one or both surfaces of the traverse platform 112. Alternatively, one or more lifting connection parts 136 may be disposed at any suitable location of the traverse platform 112.

[0039] The spindle platform 116 may carry a robotic arm 120 and one or more motors configured to drive or actuate the robotic arm 120 or a part of the robotic arm 120. As an example, as schematically depicted in FIG. 1C(1), the first link 142 (upper arm) of the robotic arm 120 may be coupled to the spindle platform 116 via a rotary joint, the stator 144 of a motor (motor T) may be attached to the spindle platform 116, and the rotor 146 of the motor (motor T) may be attached to the first link 142 of the robotic arm 120. The motor (motor T) may conveniently project up to the first link 142 of the robotic arm 120 and / or extend into the first link 142 of the robotic arm 120, and utilize the combined thickness (height) of the spindle platform 116 and the first link 142 of the robotic arm 120. Alternatively, the stator 144 of the motor (motor T) may be attached to the first link 142 of the robotic arm 120, and the rotor 146 of the motor (motor T) may be attached to the spindle platform 116. Although motor T is shown in an internal rotor configuration in FIG. 1C(1), motor T may be in an external rotor configuration or any suitable type.

[0040] Referring to the example of FIG. 1B(1), the robotic arm 120 has a first link 142 (upper arm), two forearm links (forearm A 150 and forearm B 152), and two wrist links (wrist link A 154 and wrist link B 156), each of which may carry one or more end effectors 160, each of which may be configured to receive a payload. Each of the forearm links 150, 152 may be coupled to the first link 142 via a rotational joint (elbow joint A 164 and elbow joint B 166). Two motors (motor A and motor B shown in FIG. 1C(1)) may be attached to the first link 142, each of which is coupled to one of the two forearm links 150, 152. Each of the wrist links 154, 156 may be coupled to one of the forearm links 150, 152 via a rotational joint (wrist joint A 170 and wrist joint B 172). The robotic arm 120 may further include two belt drives (belt driving devices), band drives (band driving devices), or cable drives (cable driving devices) configured to constrain the angle of one of the wrist links 154, 156. (Band drives A, B are shown in FIG. 1C(1) on forearm links 150, 152, respectively.) The belt driving device, band driving device, or cable driving device may employ circular pulleys and / or non-circular pulleys as described in U.S. Pat. Nos. 9,149,936, 9,840,004, 9,889,557, and 10,224,232, which are hereby incorporated by reference in their entirety.

[0041] The traverse platform 112, the spindle platform 116, and the robotic arm 120 may comprise features configured to remove heat generated by motors and other active components attached thereto. As an example, the robotic arm 120 and the spindle platform 116 may face each other and comprise one or more surfaces (flat, cylindrical, or of any suitable shape) that allow heat to be transferred from the robotic arm 120 to the spindle platform 116 through radiative mechanisms and, if residual gas is present, through conductive and convective mechanisms. Similarly, the traverse platform 112 and the spindle platform 116 may comprise surfaces configured to extract heat from the robotic arm 120 using radiation and, if residual gas is present, heat conduction and convection.

[0042] The control system 106 of the robot 100 may, for example, receive external inputs from a user or host system, read the positions of the individual axes of motion (motors) from position encoders (not shown for simplicity), process that information, apply voltages to the motors to effect the desired motion, and / or achieve the desired position.

[0043] In one embodiment, as illustrated, for example, in FIG. 2A, the actuators (motors) within the robot 100 may be controlled by respective control module(s) disposed proximate to the actuators. One or more actuators (e.g., motor T) located on the spindle platform 116 may be controlled by a controller or control system or one or more control modules 200 attached to or located on the spindle platform 116. One or more actuators of the elevator mechanism 114 (e.g., elevator mechanism motor 140) may be controlled by a controller or one or more control modules 210 located on (or within) the traverse platform 112. One or more actuators within the robot arm 120 may be controlled by a controller or one or more control modules 218 within the robot arm 120. The control modules 200, 210, 218 may be coordinated, for example, via a communication network 212, by a master controller 220. The master controller 220 may be located on the traverse platform 112, and the master controller 220 capable of communicating with the host communication system 228 and the control module 210 of the elevator mechanism 114 may be separate devices or may be combined in a single integrated device. Alternatively, as schematically depicted in FIG. 2B, the master controller 220 may be located outside of the traverse platform 112 and may be present in a stationary state with respect to the stationary base 108. In any configuration, the master controller 220 may have one or more processors 222 and one or more memories 224 having program instructions configured to perform operations as described herein.

[0044] In another exemplary embodiment, the encoder signal 238 and the motor lines may be provided to a centralized controller 240, as schematically shown in FIGS. 2C and 2D. The centralized controller 240 may be within the traverse platform 112 or may be outside the traverse platform 112 (and may be made stationary with respect to the stationary base 108). Alternatively, any combination of the configurations of FIGS. 2A-2D may be used. The centralized controller 240 may have one or more processors 242 and one or more memories 244 having program instructions configured to perform the operations as described herein.

[0045] In the example of FIGS. 2C and 2D, motor S refers to the actuator of the linear actuator system and motor Z refers to the elevator mechanism 114 actuator. The control modules are indicated by 200, 210, and 218.

[0046] The elevator mechanism 114 and the robotic arm 120 may comprise a configuration for supplying power, transmitting electrical signals, and circulating fluid (gas and / or liquid) within the robot 100. These configurations may be required for the control system (power supply and electrical signal transmission) and also to enhance heat removal (fluid circulation). An exemplary configuration that may assist in power supply, signal transmission, and / or fluid circulation between components coupled by a rotary joint is schematically depicted at 300 in FIG. 3A and is referred to as "configuration 300".

[0047] As shown in FIG. 3A, the bellows 304 is utilized to connect the internal spaces of components coupled by the rotary joint 306 and can provide a passageway 308 for one or more cables and / or one or more hoses. The shape guide 310 may be used to restrain one or more cables and / or one or more hoses and prevent one or more cables and / or one or more hoses from rubbing against the bellows 304 and other components.

[0048] In the exemplary configuration 300 of FIG. 3A, the internal space of the bellows 304 may be at substantially the same pressure as the internal space of the robotic component to which it is connected, which may be higher than the pressure of the external vacuum environment. Alternatively, in order to enhance the stability of the bellows 304, a configuration may be adopted in which a low-pressure environment is inside the bellows 304, as schematically shown in FIG. 3B. In FIG. 3B, the bellows 304 is shown in a compressed state.

[0049] Other exemplary configurations that may assist with power supply, signal transmission, and / or fluid circulation via a rotary joint are described in U.S. Patent No. 10,569,430, the entire disclosure of which is incorporated herein by reference.

[0050] Additional configurations may be used to transmit power and communication signals between the stationary base of the robot 100 and the traverse platform 112. For example, a service loop, inductive coupling, capacitive coupling, an optical communication link, or a radio frequency communication system may be employed for this purpose.

[0051] As illustrated in FIGS. 4A(1)-4A(3) and 4B(1)-4B(3), the robot 100 can travel along the stationary base 108, raise the spindle platform 116, rotate the robot arm 120, and extend each end effector of the robot arm 120. As an example, FIGS. 4A(1)-4A(3) depict one of the states that the robot 100 can assume with respect to the stationary base 108. In this state, the spindle platform 116 is lowered and both end effectors 160 are retracted. As another example, FIGS. 4B(1)-4B(3) depict another one of the states that the robot 100 can assume with respect to the stationary base 108. In this state, the spindle platform 116 is raised and one of the end effectors 160 is extended.

[0052] A characteristic feature of the exemplary embodiment of FIG. 1A is that the motors and other components of the robot 100 may be nested or overlapping in the vertical direction. That is, they substantially share the same vertical space. In particular, as illustrated in FIGS. 5A and 5B, this is the case when the spindle platform 116 is lowered and in a fallen state. As shown in FIG. 5A, when the spindle platform 116 is tilted with respect to the traverse platform 112, or even when the robot arm 120 is in the retracted position, a part of the motor T may protrude into the first link 142 of the robot arm 120. Thereby, the vertical space occupied by the robot 100 is reduced, and as a result, the depth and volume of the vacuum chamber in which the robot 100 can operate are reduced. Also, at least motor A and motor B may be nested with motor T in a folded state to further reduce the vertical space occupied by the robot 100.

[0053] An alternative exemplary embodiment of the traverse robot 100 according to the present invention is schematically depicted in FIGS. 6-8.

[0054] The elevator mechanism 114 may be provided with a counterbalance function such as a counterweight or a spring (e.g., a coil spring or a torsion spring) to reduce the torque or force on the elevator mechanism 114 actuator (motor). An exemplary embodiment having a counterbalance function utilizing a tensioned coil spring 600 is schematically depicted in FIG. 6. Alternatively, any other suitable counterbalance function may be used.

[0055] An exemplary alternative elevating mechanism is depicted schematically in FIG. 7A, which is hereinafter referred to as "elevating mechanism 714". The elevating mechanism 714 may have a link 716, which may be coupled to the traverse platform 112 and the spindle platform 116 by respective rotary joints 720 and 722. The elevating mechanism 714 may further have an actuator or motor 730 configured to drive a band 732 (or belt or cable). In this example, the actuator or motor 730 is driven to maintain the same angular orientation of the spindle platform 116 relative to the traverse platform 112. For example, it is driven to keep the spindle platform 116 substantially horizontal. In this configuration, as shown, a first pulley 734 may be attached to the traverse platform 112 and a second pulley 736 may be attached to the spindle platform 116.

[0056] As shown in FIG. 7A, the link 716 may be actuated by a rotary motor RM attached to the traverse platform 112. When the rotary motor RM actuates the link 716 to pivot relative to the traverse platform 112, the spindle platform 116 changes altitude relative to the traverse platform 112. Alternatively, the rotary motor RM may be attached to the spindle platform 116. As another alternative, a linear motor, strut, or any other suitable actuation means may be used to actuate the link 716 of the elevating mechanism 714.

[0057] Another exemplary alternative lifting mechanism is schematically shown at 750 in FIG. 7B. The lifting mechanism 750 may include a connection that may be composed of a first link 754 and a second link 756. The first link 754 may be coupled to the traverse platform 112 by a first rotary joint 760, the second link 756 may be coupled to the first link 754 by a second rotary joint 762, and the spindle platform 116 may be coupled to the second link 756 by a third rotary joint 764. The connection of the lifting mechanism 750 may further include two belt drives, band drives, or cable drives configured to maintain the angular orientation of the spindle platform 116 relative to the traverse platform 112 unchanged. These may be configured, for example, to keep the spindle platform 116 substantially horizontal.

[0058] As shown in FIG. 7B, a first belt drive, band drive, or cable drive may be located inside the first link 754 and connect a first pulley 770 attached to the traverse platform 112 and a second pulley 772 attached to the second link 756. The diameter of the first pulley 770 attached to the traverse platform 112 may be twice the diameter of the second pulley 772 attached to the second link 756. A second belt drive, band drive, or cable drive may be disposed inside the second link 756 and connect the second pulley 772 to a third pulley 774 on the spindle platform 116. The diameter of the third pulley 774 may be approximately twice the diameter of the second pulley 772 and may be the same as or about the same as the diameter of the first pulley 770.

[0059] Referring further to FIG. 7B, the first link 754 of the elevator mechanism 750 links may be actuated by a rotary motor RM located within or above the traverse platform 112. In this configuration, when the rotary motor RM actuates the first link 754 such that the first link 754 pivots relative to the traverse platform 112, the spindle platform 116 moves vertically relative to the traverse platform 112. Alternatively, a linear motor, strut, or any other suitable actuation means may be used to actuate the elevator mechanism 750.

[0060] The exemplary elevator mechanism 750 of FIG. 7B is shown with two links of equal link-to-joint lengths and a circular pulley, but the two links may have unequal link-to-joint lengths and part or all of the pulley may be non-circular. Alternatively, any suitable number of links and pulley types may be used. The connection defined by the first link 754 and the second link 756 may be disposed on one or both sides of the traverse platform 112 and coupled to one or both sides of the spindle platform 116.

[0061] As another example, as schematically shown in FIG. 7C, one or more connections defined by the first link 754 and the second link 756 of the elevator mechanism 750 may be disposed on the front and / or rear surfaces of the traverse platform 112 and coupled to the front and / or rear surfaces (rather than the sides) of the spindle platform 116. Alternatively, the first link 754 and the second link 756 of the elevator mechanism 750 may be disposed at any suitable location between the traverse platform 112 and the spindle platform 116.

[0062] Referring now to FIGS. 7D(1) and 7D(2), a simplified cross-sectional view of an exemplary embodiment robot 700 having a robotic arm 702 is shown. The exemplary robot 700 may utilize one or more linear bearings and a linear actuation system. In the exemplary robot 700, the spindle platform 766 may be supported by one or more linear bearings 768 and a linear actuator. The linear actuator may be, as in previous examples, a forcer / coil structure on a rail or track system such as rail 769. The spindle platform 766 can be moved up and down, for example, by a suitable Z-axis mechanism 26 (such as a ball screw drive, lead screw, band drive, belt drive, cable drive, linear motor, or any other suitable actuation means). As shown, the bellows 776 can also be utilized to enclose a vacuum environment while allowing the spindle platform 766 to move up and down. The height of the robot 700 can be reduced compared to other embodiments disclosed herein by repositioning the motor M that actuates the upper arm 778 to the robotic arm 702, as schematically shown in FIG. 7E.

[0063] Exemplary embodiments of the traverse robot according to the present invention without a lifting mechanism are schematically depicted in FIGS. 7F(1) and 7F(2), and are hereinafter referred to as "robot 780". The robot 780 includes a robotic arm 782 directly attached to a base 784. The robotic arm 782 utilizes one or more linear bearings 768 configured to slide along a rail 769 (or track). The robot 780 also includes a linear actuation system, as in previous exemplary embodiments.

[0064] A comparison of the selected exemplary embodiments with a robot representing the prior art is provided in FIGS. 7G(1), 7G(2), 7G(3), and 7G(4). FIG. 7G(1) shows a simplified cross-sectional view of a robot 10 representing the prior art, and FIG. 7G(2) shows an exemplary embodiment of a traverse robot 800 in which two motors M are relocated to the robot arm 802. FIG. 7G(3) depicts an exemplary embodiment having a lifting mechanism based on the aforementioned connection, e.g., robot 100. FIG. 7G(4) depicts an exemplary embodiment without a lifting mechanism, e.g., robot 780.

[0065] As part of the above exemplary embodiments, a single spindle platform supported by a single lifting mechanism is shown, but the number of spindle platforms and lifting mechanisms may be plural. Embodiments without a lifting mechanism may also exist.

[0066] An exemplary alternative robot is schematically depicted in FIG. 8 at 1000, hereinafter referred to as "robot 1000". Robot 1000 is supported by a stationary base 108 and may include a linear guide and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, and a control system 106, as in the previous embodiments. An arm 1012 is attached to the spindle platform 116, and the arm 1012 has an upper arm 1014 and two forearm 1016s each carrying an end effector, and the forearm 1016s are coupled to the upper arm 1014 via a coaxial rotary joint (referred to as elbow joint 1020). The upper arm 1014 may house two motors (motor A and motor B) configured to operate one of the two forearm 1016s each. FIG. 8 shows motors A and B in a configuration having an external rotor, but motors A and B may be in an internal rotor configuration. Alternatively, any suitable motor configuration, type, and design may be used.

[0067] The bearings, bearing configurations, and bearing positions shown in the figures described in this book are for illustrative purposes only, and it should be noted that the purpose is to convey how individual components can generally be constrained relative to each other. Any suitable bearings, bearing configurations, and bearing positions can be used.

[0068] Although a communication network has been described as a means of communication between various components of a control system, any other suitable means of communication between the master controller and the control module can be utilized, such as a wireless network or a point-to-point bus.

[0069] The features described in this specification can be used in conjunction with the features described in U.S. Patent Application Nos. 16 / 788,993, 16 / 788,973, and 15 / 294,099, which are hereby incorporated by reference in their entirety.

[0070] In one exemplary embodiment, the apparatus includes a spindle platform; a traverse platform configured to move in a first direction; a lifting system coupled to the spindle platform and the traverse platform, the lifting system being configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; comprises. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0071] The at least one first actuator and the at least one second actuator may be configured to overlap in a vertical direction. The first actuator may be configured to be nested with the second actuator. The apparatus may further comprise a linear guide system on the traverse platform. In that case, the linear guide system is configured to restrain the movement of the traverse platform in a linear direction. The linear guide system comprises at least one linear bearing on the traverse platform, and the at least one linear bearing may be configured to engage with a rail and slide on the rail. The apparatus may further comprise a linear actuation system provided on the traverse platform. In that case, the linear actuation system is configured to move the traverse platform in a linear direction. The linear actuation system may have a linear actuator and at least one position sensor. The linear actuator may have a permanent magnet motor having at least one coil, and in that case, the at least one coil is configured to magnetically engage with a track. The at least one position sensor may be disposed on the traverse platform and may be configured to be controlled along a linear direction using control means. The lifting system may have at least one connecting portion, and in that case, the at least one connecting portion extends between the traverse platform and the spindle platform and is rotatable with respect to the spindle platform. The at least one connecting portion may be rotatable on the traverse platform using a rotary actuator. The rotary actuator may be controllable using control means to maintain the spindle platform in a substantially horizontal position with respect to the traverse platform. The lifting system may further have a counterbalance spring.

[0072] In another exemplary embodiment, the method provides a traverse platform configured to move in a first direction; provides a spindle platform; a lifting system coupled to the spindle platform and the traverse platform, the lifting system configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; providing at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and providing at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; comprising. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0073] The at least one first actuator and the at least one second actuator may be configured to overlap in a vertical direction. The method may include providing a linear guide system on the traverse platform. In that case, the linear guide system is configured to constrain the movement of the traverse platform in a linear direction. The method may include providing a linear actuation system provided on the traverse platform. In that case, the linear actuation system is configured to move the traverse platform in a linear direction. The method may include controlling the movement of the traverse platform in a first direction using a position sensor and control means. The method may further include controlling the movement of the spindle platform in a second direction using control means.

[0074] In another exemplary embodiment, the apparatus comprises at least one processor and at least one non-volatile memory storing computer program instructions, which, when executed by the at least one processor, cause the apparatus to move the traverse platform in a first direction; actuate a lifting system coupled to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; operate at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; At least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means arranged on the at least one movable arm and configured to cause rotation of the second link are actuated; is configured to perform. The first actuator means extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0075] The device may further be configured to nest the first actuator means and the second actuator means. Moving the traverse platform in the first direction may include using a linear drive system to move the traverse platform along a rail. Using a linear drive system to move the traverse platform along a rail may include operating a permanent magnet motor having a coil arranged along a magnetic track. The device may further include using at least one processor and at least one non-transitory memory together with a position sensor on the traverse platform to sense the position of the traverse platform. The device may further include using the at least one processor and the at least one non-transitory memory together with a lifting system to level the spindle platform with respect to the traverse platform.

[0076] In another exemplary embodiment, the device includes a traverse platform configured to move in a first direction; a spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, the at least one first actuator being configured to cause rotation of the first link, and the at least one second actuator being configured to cause rotation of the second link, the at least one movable arm; A lifting system connected to the spindle platform and the traverse platform, configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state, and having a third actuator and a third control unit connected to the third actuator on the traverse platform, the lifting system; Comprising. The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link.

[0077] The first actuator may be nested with the at least one second actuator. The first control unit, the second control unit, and the third control unit may be coordinated by a master control unit via a communication network. The master control unit may be arranged on the traverse platform. The master control unit may be arranged outside the traverse platform. The traverse platform may be configured to move in a first direction along a linear bearing and rail system. The apparatus may further comprise a magnet and coil system configured to move the traverse platform in the first direction.

[0078] It should also be understood that the above description is merely an example. Those skilled in the art will be able to consider various modifications and corrections. For example, it is also possible to selectively combine features from the various embodiments described above to form a new embodiment. Therefore, this application encompasses all matters such as changes, corrections, and modifications included in the appended claims.

Claims

1. A spindle platform; A traverse platform configured to move in a first direction; A lifting system connected to the spindle platform and the traverse platform, the lifting system configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; At least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; At least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; A master control unit disposed on the traverse platform and coordinating a first control unit of the at least one first actuator, a second control unit of the at least one second actuator, and a third control unit of the lifting system; Comprising: The at least one first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link, The at least one first actuator is configured to be nested with the at least one second actuator, Device.

2. The device according to claim 1, wherein the at least one first actuator and the at least one second actuator are configured to overlap in a vertical direction.

3. The device according to claim 1, further comprising a linear guide system on the traverse platform, the linear guide system being configured to constrain the movement of the traverse platform in a linear direction.

4. The device according to claim 3, wherein the linear guide system comprises at least one linear bearing on the traverse platform, the at least one linear bearing being engaged with a rail and configured to slide on the rail.

5. The apparatus according to claim 1, further comprising a linear actuation system provided on the traverse platform, the linear actuation system being configured to move the traverse platform in a linear direction.

6. The apparatus according to claim 5, wherein the linear actuation system has a linear actuator and at least one position sensor.

7. The apparatus according to claim 6, wherein the linear actuator has a permanent magnet motor having at least one coil, the at least one coil being configured to magnetically engage with a track.

8. The apparatus according to claim 6, wherein the at least one position sensor is disposed on the traverse platform and is configured to be controlled along a linear direction using control means.

9. The apparatus according to claim 1, wherein the lifting system has at least one connecting portion, the at least one connecting portion extending between the traverse platform and the spindle platform and being rotatable with respect to the spindle platform.

10. The apparatus according to claim 9, wherein the at least one connecting portion is rotatable on the traverse platform using a rotary actuator.

11. The apparatus according to claim 10, wherein the rotary actuator is controllable using control means to maintain the spindle platform in a horizontal position with respect to the traverse platform.

12. Providing a traverse platform configured to move in a first direction; Providing a spindle platform; Providing a lifting system connected to the spindle platform and the traverse platform, the lifting system being configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; Providing at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; Providing at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and providing at least one second actuator arranged on the at least one movable arm and configured to cause rotation of the second link; Providing a master control unit that coordinates a first control unit of the at least one first actuator, a second control unit of the at least one second actuator, and a third control unit of the spindle platform, the master control unit being provided on the traverse platform; comprising The at least one first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link. The at least one first actuator and the at least one second actuator are configured to overlap in a vertical direction. Method.

13. The method according to claim 12, comprising providing a linear guide system on the traverse platform, the linear guide system being configured to constrain the movement of the traverse platform in a linear direction.

14. The method according to claim 12, comprising providing a linear actuation system provided on the traverse platform, the linear actuation system being configured to move the traverse platform in a linear direction.

15. The method according to claim 12, comprising using a position sensor and control means to control the movement of the traverse platform in a first direction.

16. The method according to claim 12, further comprising using control means to control the movement of the spindle platform in a second direction.

17. An apparatus comprising at least one processor and at least one non-volatile memory storing computer program instructions, wherein when the computer program instructions are executed by the at least one processor, the apparatus is caused to Move the traverse platform in a first direction; Actuate a lifting system connected to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; Operate at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; Actuate at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means arranged on the at least one movable arm and configured to cause rotation of the second link; Control a master control unit that coordinates a first control unit of the at least one first actuator means, a second control unit of the at least one second actuator means, and a third control unit of the spindle platform, which are arranged on the traverse platform; configured to perform; The first actuator means extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link, The first actuator means and the second actuator means are nested, Device.

18. The apparatus according to claim 17, wherein moving the traverse platform in the first direction includes using a linear drive system to move the traverse platform along a rail.

19. The apparatus according to claim 17, wherein using a linear drive system to move the traverse platform along a rail includes operating a permanent magnet motor having a coil arranged along a magnetic track.

20. The apparatus according to claim 17, further comprising using the at least one processor and the at least one non-volatile memory together with a position sensor on the traverse platform to sense the position of the traverse platform.

21. The apparatus according to claim 17, further comprising using the at least one processor and the at least one non-volatile memory together with an elevating system to level the spindle platform with respect to the traverse platform.

22. A traverse platform configured to move in a first direction; A spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, the at least one first actuator being configured to cause rotation of the first link, and the at least one second actuator being configured to cause rotation of the second link, the at least one movable arm; An elevating system connected to the spindle platform and the traverse platform, configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state, and having a third actuator and a third control unit connected to the third actuator on the traverse platform, the elevating system; Comprising, The first actuator extends from the spindle platform to the first link and occupies the total thickness of the spindle platform and the first link, The first control unit, the second control unit, and the third control unit are adjusted via a communication network by a master control unit, The master control unit is arranged on the traverse platform, Apparatus.

23. The apparatus according to claim 22, wherein the first actuator is nested with the second actuator.

24. The apparatus according to claim 22, wherein the master control unit is arranged outside the traverse platform.

25. The apparatus according to claim 22, wherein the traverse platform is configured to move in a first direction along a linear bearing and rail system. **Claim 26** The apparatus according to claim 25, further comprising a magnet and coil system configured to move the traverse platform in the first direction.

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