Powder feeder

Abstract

To provide a powder feeder capable of feeding powder in a state where density unevenness is reduced, to a roll device.SOLUTION: A powder feeder comprises: a casing provided with an exhaust port opened downward at a lower end, that defines a space for storing powder as row material therein; a screw stored in the casing, having a revolving shaft, and for conveying the powder toward the exhaust port by rotating the revolving shaft as a center; and a dispersion plate provided with a plurality of openings, that is provided on a downstream side of the exhaust port.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a powder supply device.

Background Art

[0002] Patent Document 1 discloses an apparatus for manufacturing a thin film electrode of a battery. This apparatus includes a powder supply device and a roll device having a pair of rollers. The powder supply device supplies powder, which is a raw material, between a pair of rollers provided in the roll device. The roll device consolidates the powder supplied from the powder supply device with the pair of rollers and transfers the consolidated powder to a sheet member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As the powder supply device described in Patent Document 1, it is conceivable to employ a screw feeder capable of continuously supplying powder. In a screw feeder, the position of the screw blades changes periodically, and the powder is extruded in conjunction with this period. For this reason, the pressure for extruding the powder changes periodically. The periodic change in the pressure for extruding the powder may cause density unevenness in the powder supplied to the roll device and may affect the quality of the electrode. The present disclosure provides a technique capable of supplying powder in a state where density unevenness is reduced to the roll device.

Means for Solving the Problems

[0005] The powder supply device according to one aspect of the present disclosure includes a casing that defines therein a space for accommodating powder as a raw material and has a discharge port opened downward at the lower end, a screw accommodated in the casing, having a rotation shaft, and configured to convey the powder toward the discharge port by rotating about the rotation shaft, and a dispersion plate provided downstream of the discharge port and having a plurality of openings.

Effects of the Invention

[0006] According to the present disclosure, powder in a state where density unevenness is reduced can be supplied to a roll device.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Modes for Carrying Out the Invention

[0008] Embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted. The dimensional ratios in the drawings do not necessarily match those in the description. The terms “upper”, “lower”, “left”, and “right” are based on the illustrated state and are for convenience.

[0009] [Example of Powder Supply Device] FIG. 1 is a diagram for explaining the outline of a film forming apparatus provided with a powder supply apparatus according to an embodiment. The film forming apparatus 1 shown in FIG. 1 is an apparatus for manufacturing an electrode used for a battery or the like. The film forming apparatus 1 is a so-called dry film forming apparatus, and manufactures a thin-film (sheet-like) electrode by consolidating a powder as a raw material.

[0010] The powder refers to a powdery or granular substance. The size of the powder may be a particle size of about several microns to several hundred microns. The shape of the powder may be spherical, rod-shaped, or amorphous, etc. The material of the powder is, for example, an electrode material powder that becomes an electrode material for a positive electrode or a negative electrode of a storage battery. As a specific example, the material of the positive electrode is an active material, a conductive auxiliary agent, a binder, etc. of a lithium compound containing oxides such as cobalt, manganese, nickel, and iron phosphate, and the material of the negative electrode is an active material, a conductive auxiliary agent, a binder, etc. such as graphite and carbon. The film forming apparatus 1 can use not only the above-described powder but also various powders.

[0011] The film forming apparatus 1 includes a powder supply apparatus 2 and a roll apparatus 3. The powder supply apparatus 2 is an apparatus that supplies powder to the roll apparatus 3. The powder supply apparatus 2 includes a screw feeder 4 which is a conveying apparatus. The screw feeder 4 has a casing 40 and a screw 41. The casing 40 defines a space for accommodating the powder P inside. The powder P is introduced into the inside of the casing 40 from an inlet 40a of a powder input hopper provided in the casing 40.

[0012] The screw 41 is accommodated inside the casing 40. The screw 41 has a rotation shaft 41a. The screw 41 is arranged in the casing 40 such that the rotation shaft 41a is in the vertical direction. Spiral blades are provided on the rotation shaft 41a. A driving device 42 is connected to the upper end portion of the rotation shaft 41a. The driving device 42 rotates the screw 41 around the rotation shaft 41a. An example of the driving device 42 is a motor.

[0013] The casing 40 has a discharge port 40b that opens downward at its lower end. The screw 41 conveys the powder P toward the discharge port 40b by rotating. The powder P passes through the discharge port 40b and is supplied to the roll device 3.

[0014] Here, a dispersion plate 5 and an additional dispersion plate 6 are provided downstream of the lower end of the screw feeder 4, that is, downstream of the discharge port 40b. Each of the dispersion plate 5 and the additional dispersion plate 6 has a plurality of openings. The powder P discharged from the screw feeder 4 passes through the openings of the dispersion plate 5 and the additional dispersion plate 6 and is supplied to the roll device 3. Details of the dispersion plate 5 and the additional dispersion plate 6 will be described later.

[0015] The roll device 3 includes a pair of rotatable rollers 30, 31. The roller 30 located on the left side in the figure is rotatable clockwise, and the roller 31 located on the right side is rotatable counterclockwise. The powder P is supplied from the powder supply device 2 between the pair of rollers 30, 31. The powder P is consolidated by the pair of rollers 30, 31 to form a thin film LY. The thin film LY is transferred to a conveyor 32 located below the pair of rollers 30, 31 and conveyed.

[0016] [Details of the dispersion plate] The dispersion plate 5 and the additional dispersion plate 6 have the same shape as the discharge port 40b. When the discharge port 40b is circular, the dispersion plate 5 and the additional dispersion plate 6 are in a disc shape. When the discharge port 40b is rectangular, the dispersion plate 5 and the additional dispersion plate 6 are in a rectangular plate shape. The dispersion plate 5 and the additional dispersion plate 6 are arranged coaxially with the discharge port 40b. As a more specific example, the upper end of the dispersion plate 5 is connected to the lower end of the discharge port 40b, and the upper end of the additional dispersion plate 6 is connected to the lower end of the dispersion plate 5.

[0017] (A) of FIG. 2 is a perspective view showing an example of a dispersion plate. As shown in (A) of FIG. 2, the dispersion plate 5 has a plurality of slits SL (an example of a plurality of openings). The plurality of slits SL are formed by a frame body 50 and a plurality of slit members 51. The frame body 50 is, as an example, an annular member, and forms a passage port T1 communicating with the discharge port 40b of the screw feeder 4. The plurality of slit members 51 are long members and are provided at intervals in the passage port T1. The plurality of slit members 51 may be arranged at equal intervals. In this case, the plurality of slits SL formed between the plurality of slit members 51 are also at equal intervals. Both ends of each slit member are connected to the inner wall of the frame body 50.

[0018] Each of the plurality of slit members 51 is, as an example, a V-shaped member. Each slit member has a pair of first plate members 510 and second plate members 511. The first plate member 510 is provided such that its main surface is inclined with respect to the conveyance direction (negative Z direction) of the powder P by the screw 41. That is, the perpendicular to the main surface of the first plate member 510 is inclined from the horizontal direction. In the figure, the first plate member 510 is inclined such that the lower end of the main surface faces the negative X direction. Similarly, the second plate member 511 is inclined such that the lower end of the main surface faces the positive X direction. The upper ends of the main surfaces of the first plate member 510 and the second plate member 511 are connected to each other. With the above arrangement, the first plate member 510 and the second plate member 511 constitute a V-shaped member. When the powder P passes through the plurality of slits SL of the dispersion plate 5, it is crushed, mixed, or dispersed by the first plate member 510 and the second plate member 511. Thereby, the density unevenness of the powder P is reduced.

[0019] The dispersion plate 5 is not limited to the above-described configuration, and variously shaped slit members can be adopted. (B) of FIG. 2 is a perspective view showing an example of a dispersion plate. As shown in (B) of FIG. 2, the dispersion plate 5A has a plurality of slits SL (an example of a plurality of openings). In the dispersion plate 5A, the plurality of slits SL are formed by a frame body 50A and a plurality of slit members 51A. The dispersion plate 5A has a different shape of the slit member compared to the dispersion plate 5, and the others are the same. Hereinafter, the description will focus on the differences, and duplicate descriptions will be omitted.

[0020] Each of the plurality of slit members 51A is, as an example, a plate member. The plate member is provided such that its main surface is inclined with respect to the conveying direction of the powder P by the screw 41. That is, the perpendicular to the main surface of the plate member is in an inclined state from the horizontal direction. In the figure, the plate member is inclined such that the lower end of the main surface faces the positive X direction. When the powder P passes through the plurality of slits SL of the dispersion plate 5A, it is crushed, mixed, or dispersed by each slit member. Thereby, the density unevenness of the powder P is reduced.

[0021] FIG. 3(A) is a perspective view showing an example of the dispersion plate, and FIG. 3(B) is a cross-sectional view taken along line III-III of FIG. 3(A). As shown in FIG. 3(A), the dispersion plate 5B has a plurality of slits SL (an example of a plurality of openings). As shown in FIGS. 3(A) and 3(B), in the dispersion plate 5B, the plurality of slits SL are formed by a frame body 50B and a plurality of slit members 51B. The dispersion plate 5B has a different shape of the slit member compared to the dispersion plate 5, and the others are the same. Hereinafter, the description will focus on the differences, and the overlapping descriptions will be omitted.

[0022] Each of the plurality of slit members 51B is, as an example, a plate member. The plurality of slit members 51B includes a non-inclined slit member and an inclined slit member 511B (an example of at least one slit member). The number of non-inclined slit members and the number of inclined slit members 511B are arbitrary. The non-inclined slit member is provided near the center of the dispersion plate 5B in the alignment direction (X direction), and the inclined slit member 511B is provided at a position closer to the outer edge than the center of the dispersion plate 5B in the alignment direction.

[0023] The non-inclined slit member is arranged such that the perpendicular to the main surface of the plate member is in the horizontal direction. The inclined slit member 511B is provided such that its main surface is inclined with respect to the conveying direction of the powder P by the screw 41. That is, the perpendicular to the main surface of the inclined slit member 511B is inclined from the horizontal direction. In the figure, the inclined slit member 511B is provided to be inclined such that the lower end is closer to the outer edge of the dispersion plate 5B than the upper end. When the powder P passes through the plurality of slits SL of the dispersion plate 5A, it is crushed, mixed, or dispersed by each slit member.

[0024] Furthermore, by adopting plate members with different inclinations, the density of the powder P in the horizontal direction (width direction) of the passage port T1 is adjusted. The density of the powder P inside the casing 40 is lower in the portion closer to the inner wall of the casing 40 in the horizontal direction than in the portion closer to the center. This is because the inner wall of the casing 40 becomes a resistance to the flow of the powder P. For this reason, the density distribution of the powder P reaching the discharge port 40b and the passage port T1 also tends to be lower closer to the edge (outer side). The inclined slit member 511B guides the powder P toward the outer edge of the dispersion plate 5B. Thereby, the density difference between the powder supplied from the portion close to the inner wall of the frame body and the powder supplied from the portion close to the center is alleviated, and the density unevenness in the horizontal direction of the passage port T1 is further reduced.

[0025] FIG. 4(A) is a perspective view showing an example of a dispersion plate, FIG. 4(B) is a plan view of the dispersion plate shown in FIG. 4(A), and FIG. 4(C) is a cross-sectional view taken along line IV-IV of FIG. 4(B). As shown in FIG. 4(A), the dispersion plate 5C has a plurality of slits SL, SL1 (an example of a plurality of openings). As shown in FIGS. 4(A) to 4(C), in the dispersion plate 5B, the plurality of slits SL, SL1 are formed by an outer frame 50C, an inner frame 52, and a plurality of slit members 51C.

[0026] The outer frame 50C is the same as the frame body 50 of the dispersion plate 5 and forms a through-hole T1. The inner frame 52 has a smaller diameter than the outer frame 50C. The inner frame 52 is provided inside the outer frame 50C so as to be coaxial with the outer frame 50C. The inner frame 52 is supported by a plurality of arm portions 53 erected radially inward from the inner side wall of the outer frame 50C. Each of the plurality of arm portions 53 is a plate-shaped member and is connected to the outer side wall of the inner frame 52. Thereby, a gap is formed between the inner frame 52 and the outer frame 50C, and a plurality of slits SL1 are formed by partitioning the gap by the plurality of arm portions 53.

[0027] The plurality of slit members 51C are provided at intervals on the inner side wall of the inner frame 52. Each of the plurality of slit members 51C is, for example, a plate member. The plate members are arranged such that the perpendicular to the main surface is in the horizontal direction. Thereby, a plurality of slits SL are formed between the plurality of slit members 51C.

[0028] When the powder P passes through the plurality of slits SL and SL1 of the dispersion plate 5C, it is crushed, mixed, or dispersed by each slit member.

[0029] Furthermore, the outer side wall of the inner frame 52 is inclined such that the lower end is closer to the outer frame 50C than the upper end. For this reason, the plurality of slits SL1 guide the passing powder P toward the outer edge of the dispersion plate 5C. As described above, the density distribution of the powder P reaching the discharge port 40b and the through-hole T1 tends to be lower closer to the edge. By using the dispersion plate 5C, the density difference between the powder supplied from the portion closer to the edge of the dispersion plate 5C and the powder supplied from the portion closer to the center is alleviated, and the density unevenness in the horizontal direction of the through-hole T1 is further reduced.

[0030] (A) of FIG. 5 is a plan view showing an example of a dispersion plate. As shown in (A) of FIG. 5, the dispersion plate 5D has lattice-shaped openings SL2 (an example of a plurality of openings). As shown in (A) of FIG. 5, in the dispersion plate 5D, the lattice-shaped openings SL2 are formed by a frame body 50D and a net member 54D. The frame body 50D is the same as the frame body 50 of the dispersion plate 5 and forms a through-hole T1. The net member 54D is supported by the inner wall of the frame body 50D. The net member 54D may be a wire stretched in a lattice shape or a plate member arranged in a lattice shape. When the powder P passes through the lattice-shaped openings SL2 of the dispersion plate 5D, it is crushed, mixed, or dispersed by the net member 54D.

[0031] (B) of FIG. 5 is a plan view showing an example of a dispersion plate. As shown in (B) of FIG. 5, the dispersion plate 5E has lattice-shaped openings SL3, SL4 (an example of a plurality of openings). As shown in (B) of FIG. 5, in the dispersion plate 5E, the lattice-shaped openings SL3, SL4 are formed by an outer frame 50E, an inner frame 52E, an inner net member 54E, and an outer net member 55.

[0032] The outer frame 50E is the same as the frame body 50 of the dispersion plate 5 and forms a through-hole T1. The inner frame 52E has a smaller diameter than the outer frame 50E. The inner frame 52E is provided inside the outer frame 50E so as to be coaxial with the outer frame 50E. An outer net member 55 is provided between the inner frame 52 and the outer frame 50C. An inner net member 54E is provided inside the inner frame 52. The outer net member 55 and the inner net member 54E may be wires stretched in a lattice shape or plate members arranged in a lattice shape. When the powder P passes through the lattice-shaped openings SL3, SL4 of the dispersion plate 5E, it is crushed, mixed, or dispersed by the outer net member 55 and the inner net member 54E.

[0033] Furthermore, the lattice interval of the outer net member 55 is larger than that of the inner net member 54E. For this reason, the lattice-shaped opening SL4 provided on the edge side of the dispersion plate 5E is larger than the lattice-shaped opening SL3 provided at the center of the dispersion plate 5E. As a result, the dispersion plate 5E allows the powder P to pass more easily on the edge side than at the center of the dispersion plate 5E. As described above, the density distribution of the powder P reaching the discharge port 40b and the passage port T1 tends to be lower closer to the edge. By using the dispersion plate 5E, the density difference between the powder supplied from the portion near the edge of the dispersion plate 5E and the powder supplied from the portion near the center is alleviated, and the density unevenness in the horizontal direction of the passage port T1 is further reduced.

[0034] The additional dispersion plate 6 can adopt an appropriate structure from among the dispersion plates 5 to 5E. The additional dispersion plate 6 may be arranged such that at least a part of the plurality of openings of the connected dispersion plates and the plurality of openings of the additional dispersion plate 6 do not overlap when viewed from the vertical direction. For example, when a dispersion plate 5 having a mountain-shaped slit member and an additional dispersion plate 6 having the same structure as the dispersion plate 5 are adopted, the slit members of the dispersion plate 5 and the additional dispersion plate 6 are adjusted so as not to overlap when viewed from the vertical direction. Thereby, the crushing, mixing, or dispersion of the powder P is further promoted.

[0035] [Summary of Embodiment] In the powder supply device 2, the powder P accommodated inside the casing 40 is conveyed by the screw 41 to the discharge port 40b at the lower end of the casing 40. The powder P that has passed through the discharge port 40b passes through the plurality of openings of the dispersion plate 5 provided downstream of the discharge port 40b. The consolidated powder contained in the passing powder P is crushed, mixed, or dispersed. As a result, the powder supply device 2 can supply the powder in a state with reduced density unevenness to the roll device 3.

[0036] As described above, various exemplary embodiments have been described, but the present invention is not limited to the above-described exemplary embodiments, and various omissions, substitutions, and changes may be made.

[0037] The dispersion plate and the additional dispersion plate of the powder supply device 2 do not need to be in close contact with each other and may be arranged at intervals. The additional dispersion plate is not limited to one, and a plurality of additional dispersion plates may be used. The plurality of additional dispersion plates may be arranged at intervals. The powder supply device 2 may not include the additional dispersion plate 6. The powder supply device 2 may supply powder to a device other than the roll device. The shape of the slit or grid-shaped opening described above can be set as appropriate and may be, for example, circular. The grid-shaped opening SL4 provided on the edge side of the dispersion plate 5E only needs to have a part that is larger than the grid-shaped opening SL3 provided in the center of the dispersion plate 5E.

[0038] [Summary of Embodiments of the Present Disclosure] The present disclosure includes the following aspects.

[0039] (Clause 1) A powder supply device according to one aspect of the present disclosure includes a casing that defines a space for accommodating powder as a raw material therein and has a discharge port that opens downward at the lower end, a screw that is accommodated in the casing, has a rotation axis, and conveys the powder toward the discharge port by rotating around the rotation axis, and a dispersion plate provided downstream of the discharge port and having a plurality of openings.

[0040] In this powder supply device, the powder accommodated inside the casing is conveyed by the screw to the discharge port at the lower end of the casing. The powder that has passed through the discharge port passes through the plurality of openings of the dispersion plate provided downstream of the discharge port. The consolidated powder contained in the passing powder is crushed, mixed, or dispersed. Thereby, the powder supply device can supply the powder in a state with reduced density unevenness to the roll device.

[0041] (Clause 2) In the powder supply device described in Clause 1, the dispersion plate has a through-hole communicating with the discharge port and a plurality of slit members provided at intervals from the through-hole. Each of the plurality of slit members is a plate member. The plurality of openings are a plurality of slits formed between the plurality of slit members. At least one slit member included in the plurality of slit members may be provided such that its main surface is inclined with respect to the conveying direction of the powder by the screw. The powder supply device can reduce density unevenness by passing the powder through the plurality of slits. The inclined slit member provides resistance to the conveyed powder, increasing the effect of crushing, mixing, or dispersing. The powder supply device can supply the powder in a state with further reduced density unevenness to the roll device by passing the powder between the inclined slit members.

[0042] (Clause 3) In the powder supply device described in Clause 2, the plurality of slit members are provided in alignment. At least one slit member is provided at a position closer to the outer edge than the center of the dispersion plate in the alignment direction, and may be inclined such that the lower end is closer to the outer edge than the upper end. The density of the powder inside the casing is lower in the portion closer to the inner wall of the casing in the horizontal direction than in the portion closer to the center. This is because the inner wall of the casing provides resistance to the flow of the powder. Therefore, the density distribution of the powder reaching the discharge port and the through-hole also tends to be lower closer to the edge. At least one slit member guides the powder toward the outer edge of the dispersion plate. Thereby, the density difference between the powder discharged from the portion closer to the edge of the dispersion plate and the powder discharged from the portion closer to the center is alleviated, and the density unevenness in the horizontal direction (width direction) of the through-hole is further reduced.

[0043] (Clause 4) In the powder supply device according to Clause 1, the dispersion plate has an outer frame forming a passage opening communicating with the discharge port, an inner frame supported within the outer frame, and a plurality of slit members provided at intervals on the inner side wall of the inner frame. The plurality of openings are a plurality of slits formed between the outer frame and the inner frame and between the plurality of slit members. The plurality of slit members are provided on the inner side wall of the inner frame, and the inner frame may have an outer side wall inclined such that the lower end is closer to the outer frame than the upper end. The powder passing through the center of the passage opening, that is, through the inner frame, is crushed, mixed, or dispersed by the slits, and the powder passing between the inner frame and the outer frame is guided toward the outer edge of the dispersion plate along the inclined outer side wall of the inner frame as it approaches the lower end of the inner frame. Thereby, the density difference between the powder discharged from a portion near the edge of the dispersion plate and the powder discharged from a portion near the center is alleviated, and the density unevenness in the horizontal direction (width direction) of the passage opening is reduced.

[0044] (Clause 5) In the powder supply device according to Clause 1, the dispersion plate has the plurality of grid-shaped openings, and at least one opening provided at a position closer to the outer edge than the center of the dispersion plate among the plurality of openings may be formed larger than an opening provided at a position closer to the center than the outer edge of the dispersion plate. The powder supply device can reduce density unevenness by passing the powder through the plurality of grid-shaped openings. The powder passing through a position closer to the outer edge than the center of the passage opening passes through an opening larger than the opening provided at a position closer to the center than the outer edge of the dispersion plate. Thereby, the density difference between the powder discharged from a portion near the edge of the dispersion plate and the powder discharged from a portion near the center is alleviated, and the density unevenness in the horizontal direction (width direction) of the passage opening is reduced.

[0045] (Clause 6) The powder supply device described in Clauses 1 to 5 has a plurality of openings and further includes an additional dispersion plate provided downstream of the dispersion plate. The additional dispersion plate may be arranged such that at least a part of the plurality of openings of the dispersion plate and the plurality of openings of the additional dispersion plate do not overlap when viewed in the vertical direction. The powder passes through the openings of the two dispersion plates, namely the dispersion plate and the additional dispersion plate. Since a part of the openings do not overlap, crushing, mixing, or dispersion is further promoted. Therefore, the density unevenness of the powder is further reduced.

Description of Signs

[0046] 1... Film forming apparatus, 2... Powder supply device, 5, 5A, 5B, 5C, 5D, 5E... Dispersion plates, 6... Additional dispersion plate, 40... Casing, 40b... Discharge port, 41... Screw, 41a... Rotation shaft, 50C, 50E... Outer frames, 51, 51A, 51B, 51C... Plurality of slit members, 52, 52E... Inner frames, P... Powder, SL, SL1... Plurality of slits, SL2, SL3, SL4... Lattice-shaped openings, T1... Passage port.

Claims

1. A casing that defines a space inside for accommodating powder as a raw material and has a discharge port that opens downward at the lower end, A screw that is accommodated in the casing, has a rotation axis, and conveys the powder toward the discharge port by rotating around the rotation axis, A dispersion plate provided downstream of the discharge port and having a plurality of openings, A powder supply device comprising the above.

2. The dispersion plate has a passage port communicating with the discharge port and a plurality of slit members provided at intervals from the passage port. Each of the plurality of slit members is a plate member, The plurality of openings are a plurality of slits formed between the plurality of slit members, The powder supply device according to claim 1, wherein at least one of the plurality of slit members is provided such that its main surface is inclined with respect to the conveying direction of the powder by the screw.

3. The plurality of slit members are provided in alignment, The powder supply device according to claim 2, wherein the at least one slit member is provided at a position closer to the outer edge than the center of the dispersion plate in the alignment direction and is inclined such that the lower end is closer to the outer edge than the upper end.

4. The dispersion plate has an outer frame forming a passage port communicating with the discharge port, an inner frame supported inside the outer frame, and a plurality of slit members provided at intervals from the inner side wall of the inner frame, The plurality of openings are a plurality of slits formed between the outer frame and the inner frame and between the plurality of slit members, The powder supply device according to claim 1, wherein the inner frame has an outer side wall inclined such that the lower end is closer to the outer frame than the upper end.

5. The dispersion plate has the plurality of lattice-shaped openings, The powder supply device according to claim 1, wherein at least one opening provided at a position closer to the outer edge than the center of the dispersion plate among the plurality of openings is formed larger than an opening provided at a position closer to the center than the outer edge of the dispersion plate.

6. Further comprising an additional dispersion plate having a plurality of openings and provided downstream of the dispersion plate, The powder supply device according to claim 1, wherein the plurality of openings of the dispersion plate and the plurality of openings of the additional dispersion plate are arranged such that at least a part thereof does not overlap when viewed from the vertical direction.

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