Heat treatment apparatus

Abstract

To improve the cleanliness of a processing space.SOLUTION: A heat treatment apparatus 10 includes a conveyance device 20, 22, an outer wall 41, and guide rollers 45. The conveyance device 20, 22 conveys a workpiece A. The outer wall 41 has a processing space 40a therein where the workpiece A is processed while being conveyed. The guide roller 45 is provided in the processing space 40a and guides the workpiece A. The guide roller 45 includes a shaft 46, a first bearing 47a and a second bearing 47b, a cylindrical roller body 48, and a first cover 49a and a second cover 49b. The first cover 49a and the second cover 49b close corresponding gaps between inner rings 47a1, 47b1 and outer rings 47a2, 47b2, on the outer sides of the first bearing 47a and the second bearing 47b, respectively, along the axial direction of the shaft 46.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to a heat treatment apparatus.

Background Art

[0002] Japanese Patent No. 7285360 discloses a heat treatment apparatus including an unwinding unit, a heat treatment unit, a cooling unit, and a winding unit. A strip-shaped sheet before heat treatment is unwound from the unwinding unit. In the heat treatment unit, the sheet is heat-treated while being conveyed. In the cooling unit, the sheet heat-treated in the heat treatment unit is cooled while being conveyed. In the winding unit, the strip-shaped sheet cooled in the cooling unit is wound up. In the unwinding unit, the heat treatment unit, the cooling unit, and the winding unit, the conveyed sheet is guided by guide rollers.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, the inventor of the present invention desires to improve the cleanliness of the processing space in which an object to be processed is processed.

Means for Solving the Problems

[0005] The heat treatment apparatus disclosed herein includes a transfer device, an outer wall, and guide rollers. The transfer device transfers the object to be processed. The outer wall has a processing space inside where the object to be processed is processed while being transferred. The guide rollers are provided inside the processing space and guide the object to be processed. The guide rollers include a shaft, a first bearing and a second bearing, a cylindrical roller body, a first cover and a second cover. The first bearing and the second bearing are attached at intervals in the axial direction of the shaft. The roller body is rotatably attached to the shaft via the first bearing and the second bearing. The first bearing and the second bearing each include an inner ring, an outer ring, rolling elements, and a cage. The first cover and the second cover each block the gap between the inner ring and the outer ring on the outer sides of the first bearing and the second bearing along the axial direction of the shaft. In such a heat treatment apparatus, the cleanliness of the processing space where the object to be processed is processed is improved.

Brief Description of the Drawings

[0006]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0007] Hereinafter, one of the embodiments in the present disclosure will be described in detail with reference to the drawings. In the following drawings, members and parts having the same function are denoted by the same reference numerals for description. Also, the dimensional relationships (length, width, thickness, etc.) in each figure do not reflect the actual dimensional relationships. The directions of up, down, left, right, front, and back are represented by the arrows U, D, L, R, F, and Rr in the figure, respectively. Here, the directions of up, down, left, right, front, and back are merely defined for convenience of explanation and do not limit the present invention of the present application unless otherwise particularly mentioned.

[0008] <Heat treatment apparatus 10> FIG. 1 is a schematic diagram showing a heat treatment apparatus 10. The heat treatment apparatus 10 is equipment for heat-treating a strip-shaped (sheet-shaped) workpiece A. In this embodiment, the heat treatment apparatus 10 is a device for continuously drying a strip-shaped workpiece while conveying it in a so-called roll-to-roll manner. The workpiece A is not particularly limited as long as it is strip-shaped, such as, for example, an electrode sheet of a secondary battery in which electrode materials are coated on both sides of a sheet substrate, a flexible copper-clad laminate FCCL (Flexible Cupper Clad Laminate), or a polyimide sheet. The heat treatment apparatus 10 can be used for treating various strip-shaped (sheet-shaped) workpieces.

[0009] The heat treatment apparatus 10 includes conveying devices 20 and 22 (see FIG. 2), an outer wall 41 (see FIG. 1), and a guide roller 45 (see FIG. 1). As shown in FIG. 1, the heat treatment apparatus 10 includes an unwinding section 30, a heat treatment section 40, a cooling section 50, and a winding section 60. The strip-shaped workpiece A is processed while being conveyed in the order of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60. The workpiece A is unwound from an unwinding roll A1 provided in the unwinding section 30, heat-treated in the heat treatment section 40, cooled in the cooling section 50, and then wound around a winding roll A2 provided in the winding section 60.

[0010] <Conveying devices 20 and 22> Figure 2 is a schematic diagram showing the drive mechanism of the object to be processed A. In Figure 2, the heat treatment section 40 and the cooling section 50 between the unwinding section 30 and the winding section 60 are omitted. The conveying devices 20 and 22 are devices for conveying the object to be processed A. The object to be processed A is conveyed along a predetermined conveying path. As shown in Figure 2, the conveying devices 20 and 22 are devices that respectively rotationally drive the unwinding shaft 32 to which the unwinding roll A1 of the unwinding section 30 is attached, and the winding shaft 62 to which the winding roll A2 of the winding section 60 is attached. In this embodiment, a motor is used as the conveying devices 20 and 22. The conveying devices 20 and 22 can be composed of a device for controlling the conveyance of the object to be processed A. As the conveying devices 20 and 22, for example, a motor and an inverter may be used, or a servo motor or the like may be used. Further, the conveying devices 20 and 22 may include a device for controlling the tension applied to the object to be processed A. As the device for controlling the tension, for example, a powder clutch can be used. The conveying devices 20 and 22 may be realized by a set of devices in which a device for controlling the conveying speed and a device for controlling the tension cooperate with each other.

[0011] The conveying devices 20 and 22 are respectively attached to the outer wall 31 of the unwinding section 30 and the outer wall 61 of the winding section 60. The unwinding shaft 32 is connected to the conveying device 20. The unwinding shaft 32 is rotationally driven by the conveying device 20, and the object to be processed A is unwound from the unwinding roll A1. The winding shaft 62 is connected to the conveying device 22. The winding shaft 62 is rotationally driven by the conveying device 22, and the object to be processed A is wound around the winding roll A2. The conveying devices 20 and 22 may be installed in an air box provided in a space surrounded by the outer walls 31 and 61, respectively.

[0012] The heat treatment apparatus 10 can be configured to be able to convey the object to be processed A at a high speed in order to improve the processing efficiency of the object to be processed A. Although not particularly limited, the conveying speed of the object to be processed A can be set to about 1 m / min to 200 m / min. In this embodiment, the conveying speed of the object to be processed A is set to about 100 m / min. In the heat treatment apparatus 10, the conveying speed of the object to be processed A is controlled by the control device 24.

[0013] <Control device 24> The control device 24 controls the conveyance speed of the workpiece A, the tension applied to the workpiece A, etc. so that the workpiece A is conveyed according to predetermined conveyance conditions. In this embodiment, the control device 24 controls the unwinding tension when unwinding the workpiece A, the in-furnace tension applied to the workpiece A being processed, and the winding tension when winding up the processed workpiece A, respectively. The control device 24 is connected to the conveyance devices 20 and 22. Further, the control device 24 is connected to a tension detection roller 35b, a feed roller 35c, a dancer roller 35d, a tension detection roller 65c, etc. The control device 24 feeds back the unwinding tension detected by the tension detection roller 35b to the conveyance device 20 and controls the torque of the unwinding shaft 32. Thereby, the unwinding tension is adjusted. Also, the control device 24 feeds back the in-furnace tension detected by the tension detection roller 35b to which the workpiece A being processed is applied to the dancer roller 35d. The dancer roller 35d moves according to the detected in-furnace tension. Thereby, the in-furnace tension is adjusted. Note that the rotation speed of the feed roller 35c is controlled so that the position of the dancer roller 35d returns to the reference position in a state where the in-furnace tension is constant. Further, the control device 24 feeds back the winding tension detected by the tension detection roller 65c to the conveyance device 22 and controls the torque of the winding shaft 62. Thereby, the winding tension is adjusted.

[0014] <Unwinding section 30> As shown in FIG. 1, the unwinding section 30 houses an unwinding roll A1 in a state where the workpiece A before heat treatment is wound around it. The unwinding section 30 has an outer wall 31 that surrounds the internal equipment and the unwinding roll A1. An unwinding shaft 32 and a plurality of rollers 35 are provided inside the unwinding section 30. The unwinding shaft 32 is a shaft to which the unwinding roll A1 around which the workpiece A before heat treatment is wound is attached. In this embodiment, when the unwinding shaft 32 is rotationally driven, the workpiece A is unwound from the unwinding roll A1 attached to the unwinding shaft 32.

[0015] Within the space surrounded by the outer wall 31 of the unwinding section 30, a plurality of rollers 35 for setting the conveyance path of the object to be processed A are provided. The object to be processed A unwound from the unwinding roll A1 attached to the unwinding shaft 32 is looped around the plurality of rollers 35 in a predetermined order and conveyed toward the heat treatment section 40. The plurality of rollers 35 includes a guide roller 35a, a tension detection roller 35b, a feed roller 35c, and a dancer roller 35d. The tension detection roller 35b is a roller for detecting the tension applied to the object to be processed A. A tension detector (not shown) is attached to the tension detection roller 35b. The dancer roller 35d is configured to be movable within a predetermined range. By moving the dancer roller 35d, the tension of the object to be processed A is adjusted. The feed roller 35c is rotationally driven by a driving device (not shown). By controlling the rotation of the feed roller 35c, the position of the dancer roller 35d is adjusted.

[0016] 〈Heat treatment section 40〉 The heat treatment section 40 is a facility where the strip-shaped object to be processed A is heat-treated while being conveyed. The heat treatment section 40 is connected to the unwinding section 30 via the connecting section 70. The connecting section 70 is provided with an outlet of the unwinding section 30 and an inlet of the heat treatment section 40. A passage through which the object to be processed A passes is formed in the connecting section 70. The object to be processed A is conveyed from the unwinding section 30 to the heat treatment section 40 through the connecting section 70. The passage for the object to be processed A formed in the connecting section 70 is set to a dimension slightly larger than the width and thickness of the object to be processed A. As a result, the atmosphere of the heat treatment section 40 and the atmosphere of the unwinding section 30 are less likely to interfere with each other.

[0017] The heat treatment section 40 includes an outer wall 41, a heater 42, and guide rollers 45 (45a to 45d). The outer wall 41 has an internal processing space 40a in which the object to be processed A is processed while being conveyed. The outer wall 41 surrounds the processing space 40a in which the heater 42 and the guide rollers 45 are arranged.

[0018] 〈Guide roller 45〉 The guide roller 45 is provided within the processing space 40a. The guide roller 45 is a roller that guides the workpiece A. The conveyance path along which the workpiece A is conveyed is set by the guide roller 45. The guide roller 45 is configured to rotate passively as the workpiece A is conveyed. In this embodiment, the guide roller 45 is a substantially cylindrical roller. The guide roller 45a is provided near the inlet (connection part 70) of the heat treatment unit 40. A plurality of guide rollers 45b are arranged at a predetermined pitch from the inlet toward the outlet below the heat treatment unit 40. A plurality of guide rollers 45c are arranged above the heat treatment unit 40, shifted by a half pitch from the plurality of guide rollers 45b. The guide roller 45d is provided near the outlet (connection part 72) of the heat treatment unit 40.

[0019] The workpiece A is hung on the guide roller 45a near the inlet of the heat treatment unit 40 and conveyed downward. Thereafter, the workpiece A is sequentially and alternately hung around the upper and lower guide rollers 45b and 45c from the inlet toward the outlet. As a result, in the heat treatment unit 40, the workpiece A advances while moving up and down from the inlet toward the outlet.

[0020] 〈Heater 42〉 The heater 42 is a facility for heating the workpiece A. In this embodiment, the heater 42 is provided around the workpiece A that advances from the inlet toward the outlet while being folded back up and down. The heater 42 is hung on the guide rollers 45b and 45c and is also arranged in the gap between the workpiece A that is folded back up and down. The heater 42 is arranged so as to face the workpiece A. The heater 42 may be fixed, for example, by a heater holder and a support column.

[0021] In this embodiment, a plate heater of far-infrared heating type is used as the heater 42. As the heater 42, various heaters can be used according to the heating temperature, heating atmosphere, etc. As the heater 42, for example, in addition to the plate-shaped plate heater, for example, a cylindrical heater may be used. The material of the heater 42 is not particularly limited, and a metal sheath heater, a ceramic heater, a lamp heater, etc. may be used. Also, the heater 42 is not limited to a far-infrared heating type heater. In the case of an atmosphere furnace, as the heater 42, for example, a hot air heating type heater in which hot air is blown onto the object to be processed or an infrared heating type lamp heater may be used. The heat-treated object A is carried out toward the cooling unit 50 through a guide roller 45d provided near the outlet.

[0022] 〈Cooling Unit 50〉 The cooling unit 50 is a facility where the object to be processed A heat-treated in the heat treatment unit 40 is cooled while being conveyed. The cooling unit 50 is connected to the heat treatment unit 40 via a connecting portion 72. The connecting portion 72 is provided with an outlet of the heat treatment unit 40 and an inlet of the cooling unit 50. Similar to the connecting portion 70, a passage through which the object to be processed A passes is formed in the connecting portion 72. Since the configuration of the connecting portion 72 can be the same as that of the connecting portion 70, a detailed description thereof is omitted.

[0023] The cooling unit 50 includes cooling rollers 52, a plurality of guide rollers 55, and an outer wall 51. The outer wall 51 surrounds a processing space 50a in which the plurality of cooling rollers 52 and the plurality of guide rollers 55 are arranged. In this embodiment, a plurality of cooling rollers 52 are provided in the cooling unit 50. The plurality of cooling rollers 52 and the plurality of guide rollers 55 set a conveyance path in the cooling unit 50 along which the object to be processed A is conveyed. The number of cooling rollers 52 may be single, but a plurality is preferred.

[0024] 〈Cooling Roller 52〉 The cooling roller 52 is a roller configured such that a refrigerant flows inside. The object to be processed A is cooled by contacting the surface of the cooling roller 52. The cooling roller 52 includes a first cooling roller 52a and a second cooling roller 52b. The first cooling roller 52a is a cooling roller that is wound around so that one surface of the object to be processed A contacts it. The second cooling roller 52b is a cooling roller that is wound around so that the other surface of the object to be processed A contacts it. In this embodiment, a drive device (not shown) is connected to the cooling roller 52. The cooling roller 52 rotates in accordance with a set conveyance speed along the conveyance direction. In this embodiment, the object to be processed A is cooled to about room temperature in the cooling unit 50. The temperature of the object to be processed A to be cooled is not particularly limited.

[0025] A plurality of the first cooling rollers 52a and a plurality of the second cooling rollers 52b are each provided in a plurality (four each in this embodiment). The number of the cooling rollers 52 is not particularly limited. The first cooling rollers 52a and the second cooling rollers 52b may each be provided one by one, for example.

[0026] The plurality of first cooling rollers 52a are arranged in a row at a predetermined pitch along the height direction in front of (the outlet side of) the cooling unit 50. The plurality of second cooling rollers 52b are arranged in a row at a predetermined pitch along the height direction behind (the inlet side of) the cooling unit 50. The intervals between adjacent first cooling rollers 52a and the intervals between adjacent second cooling rollers 52b are each set to be narrower than the outer diameter of the cooling roller 52. Note that the arrangements of the first cooling rollers 52a and the second cooling rollers 52b are not particularly limited.

[0027] Here, the first cooling roller 52a and the second cooling roller 52b are arranged at the same pitch. The height of the second cooling roller 52b is arranged at a position that is half a pitch higher than that of the first cooling roller 52a in order from the bottom. As a result, the plurality of first cooling rollers 52a and the plurality of second cooling rollers 52b are arranged such that their heights are shifted in order before and after the cooling unit 50. In other words, the plurality of first cooling rollers 52a and the plurality of second cooling rollers 52b are arranged in a staggered manner. Thereby, the cooling unit 50 can have a long structure in the height direction. On the other hand, the occupied area of the cooling unit 50 can be reduced, and space saving of the equipment can be achieved.

[0028] 〈Guide roller 55〉 The guide rollers 55 (55a to 55d) are rollers for guiding the workpiece A. In this embodiment, the guide roller 55 is a substantially cylindrical roller. In the cooling unit 50, a conveyance path of the workpiece A is set by a plurality of guide rollers 55 so as to pass through a plurality of cooling rollers 52 from the inlet (connection part 72) and head toward the outlet (connection part 74). The plurality of guide rollers 55 may include a tension detection roller that detects the tension applied to the workpiece A.

[0029] The workpiece A is introduced into the cooling unit 50 through the guide roller 55a from the inlet of the cooling unit 50. The workpiece A is conveyed downward. The workpiece A is conveyed to the first cooling roller 52a arranged at the lowermost end through the guide roller 55b. The workpiece A is alternately wound around the first cooling roller 52a and the second cooling roller 52b in order from the lower side, and is conveyed from the second cooling roller 52b at the uppermost end toward the guide roller 55c. The workpiece A is conveyed downward through the guide roller 55c, and is conveyed from the outlet of the cooling unit 50 to the winding unit 60 through the guide roller 55d. Here, the workpiece A is wound around the first cooling roller 52a and the second cooling roller 52b such that different surfaces of the workpiece A come into contact in order.

[0030] The cooling unit 50 is connected to the winding unit 60 via the connecting unit 74. The connecting unit 74 includes the outlet of the cooling unit 50 and the inlet of the winding unit 60. The cooled workpiece A is conveyed to the winding unit 60 through the connecting unit 74.

[0031] 〈Winding Unit 60〉 The winding unit 60 is a facility for winding the workpiece A. The winding unit 60 houses a winding roll A2 for winding the workpiece A cooled through the cooling roller 52. The winding unit 60 has an outer wall 61 surrounding the internal facilities and the winding roll A2. The winding unit 60 is provided with a winding shaft 62 and a plurality of rollers 65. A winding roll A2 around which the workpiece A heat-treated in the heat treatment unit 40 and cooled in the cooling unit 50 is wound is attached to the winding shaft 62. When the winding shaft 62 is rotationally driven, the workpiece A is wound onto the winding roll A2.

[0032] A plurality of rollers 65 for setting the conveyance path of the workpiece A are provided in the space surrounded by the outer wall 61 of the winding unit 60. The plurality of rollers 65 set the conveyance path along which the workpiece A is conveyed in the winding unit 60. The workpiece A conveyed from the cooling unit 50 is hung on the roller 65 near the inlet (connecting unit 74) of the winding unit 60 and then wound around the plurality of rollers 65 in a predetermined order and wound onto the winding roll A2. The plurality of rollers 65 include a guide roller 65a, a dancer roller 65b, a tension detection roller 65c, and a feed roller 65d. The dancer roller 65b is configured to be movable within a predetermined range. The dancer roller 65b can be moved, for example, to ensure the necessary extra length of the workpiece A when the winding roll A2 is replaced. A tension detector (not shown) is attached to the tension detection roller 65c. The feed roller 65d feeds out the extra length required for attachment when attaching the workpiece A to the replaced winding roll A2 when replacing the winding roll A2.

[0033] 〈Vacuum Pump 80〉 The heat treatment apparatus 10 is equipped with a vacuum pump 80. The internal spaces of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60 described above are respectively surrounded by outer walls 31, 41, 51, and 61. Each of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60 has a space isolated from the external space by the outer walls 31, 41, 51, and 61. The internal spaces of the outer walls 31, 41, 51, and 61 communicate with each other during the treatment of the workpiece A. The vacuum pump 80 is connected to each of the outer walls 31, 41, 51, and 61. The vacuum pump 80 reduces the pressure in the internal spaces of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60 (treatment spaces 40a and 50a in the heat treatment section 40 and the cooling section 50). In this embodiment, the workpiece A is treated in a predetermined vacuum atmosphere lower than the atmospheric pressure.

[0034] Note that the connection form of the vacuum pump 80 is not particularly limited. A plurality of vacuum pumps 80 may be provided, and the plurality of vacuum pumps 80 may be respectively connected to each of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60. A pipe may branch from one vacuum pump 80, and the interiors of a plurality of sections among the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60 may be depressurized.

[0035] Vacuum valves 81 to 84 for adjusting the degree of vacuum in each section are provided in the pipe of the vacuum pump 80. The vacuum valves 81 to 84 are configured to be able to switch between connecting each section to the vacuum pump 80 and disconnecting each section from the vacuum pump 80. When the degree of vacuum in each section is not adjusted, on-off valves may be used instead of the vacuum valves 81 to 84.

[0036] At the inlet of the heat treatment unit 40 (in this embodiment, the connecting portion 70), a door 70a is provided. The door 70a is closed when replacing the unwinding roll A1 or the like. By closing the door 70a when replacing the unwinding roll A1 or the like, the atmosphere of the heat treatment unit 40 (in this embodiment, a reduced pressure state) can be maintained. The door 70a may be closed when the workpiece A passes through the connecting portion 70, such as when replacing the unwinding roll A1. When the remaining amount of the workpiece A wound around the unwinding roll A1 decreases, the unwinding roll A1 is replaced with a new one. The end of the workpiece A on the replaced unwinding roll A1 and the end of the workpiece A before replacement are joined together. With the workpiece A left in the processing space 40a, the unwinding roll A1 can be replaced while maintaining the atmosphere of the heat treatment unit 40, and the recovery of the apparatus after replacing the unwinding roll A1 is accelerated.

[0037] Also, at the outlet of the cooling unit 50 (in this embodiment, the connecting portion 74), a door 74a is provided. Similar to the door 70a, by closing the door 74a when replacing the winding roll A2 or the like, the atmosphere of the cooling unit 50 (in this embodiment, a reduced pressure state) can be maintained. The door 74a may be closed when the workpiece A passes through the connecting portion 74, such as when replacing the winding roll A2. When the amount of the workpiece A wound around the winding roll A2 increases, the winding roll A2 is replaced with a new one. The end of the replaced winding roll A2 and the end of the workpiece A are joined together. With the workpiece A left in the processing space 50a, the winding roll A2 can be replaced while maintaining the atmosphere of the cooling unit 50, and the recovery of the apparatus after replacing the winding roll A2 is accelerated.

[0038] Incidentally, a heat treatment apparatus for processing a strip-shaped workpiece while being conveyed includes a conveying device, an outer wall having a processing space inside, and guide rollers. The strip-shaped workpiece is conveyed in the processing space along a predetermined conveying path. In other words, the conveying path of the strip-shaped workpiece is set by the guide rollers. The strip-shaped workpiece is conveyed in a state of being hung on the guide rollers. The guide rollers are so-called free rollers and are configured to rotate following the conveyance of the strip-shaped workpiece. Hereinafter, the heat treatment apparatus disclosed herein will be described by taking the configuration of the heat treatment section as an example.

[0039] In the heat treatment section 40 of the heat treatment apparatus 10 disclosed herein, a guide roller 45 for guiding the strip-shaped workpiece A is provided. FIG. 3 is a schematic diagram of the guide roller 45. In FIG. 3, a cross section along the axial direction of the guide roller 45 is schematically shown. In FIG. 3, a cross section of the guide roller 45b (hereinafter, also simply referred to as "guide roller 45") arranged below the heat treatment section 40 as viewed from the front is shown. FIG. 4 is a schematic diagram of the second support member 44b. In FIG. 4, a plane of the second support member 44b as viewed from the outside in the axial direction of the shaft 46 is schematically shown.

[0040] 〈Guide Roller 45〉 As shown in FIG. 3, the guide roller 45 includes a shaft 46, a first bearing 47a and a second bearing 47b, a cylindrical roller body 48, and a first cover 49a and a second cover 49b. As described above, the guide roller 45 is provided in the processing space 40a surrounded by the outer wall 41.

[0041] 〈Shaft 46〉 The shaft 46 is a member that serves as the center of the rotation axis of the guide roller 45. The shaft 46 is substantially cylindrical. The material of the shaft 46 is not particularly limited as long as it can withstand the tension applied by the conveyance of the workpiece A (see FIG. 1) and the temperature inside the heat treatment section 40 (see FIG. 1). In this embodiment, the shaft 46 is made of stainless steel.

[0042] The shaft 46 includes a first end portion 46a and a second end portion 46b. The first end portion 46a is the end portion on the right side of the shaft 46. The second end portion 46b is the end portion on the side opposite to the first end portion 46a. The second end portion 46b is the end portion on the left side of the shaft 46.

[0043] The first end portion 46a and the second end portion 46b of the shaft 46 are fixed in the processing space 40a by a first support member 44a, a second support member 44b, and a pair of support plates 90a, 90b, which will be described later. Between the first end portion 46a and the second end portion 46b, a first bearing 47a and a second bearing 47b are attached to the shaft 46.

[0044] 〈The first bearing 47a and the second bearing 47b〉 The first bearing 47a and the second bearing 47b are attached at intervals in the axial direction of the shaft 46. In this embodiment, the first bearing 47a and the second bearing 47b each include an inner ring 47a1, 47b1, an outer ring 47a2, 47b2, a plurality of rolling elements 47a3, 47b3, and a cage 47a4, 47b4. The first bearing 47a and the second bearing 47b are so-called rolling bearings.

[0045] The inner rings 47a1, 47b1 are components attached to the shaft 46. The outer rings 47a2, 47b2 are opposed to the inner rings 47a1, 47b1 in the radial direction. The outer rings 47a2, 47b2 are components attached to the roller body 48. The plurality of rolling elements 47a3, 47b3 are components disposed between the inner rings 47a1, 47b1 and the outer rings 47a2, 47b2. The plurality of rolling elements 47a3, 47b3 roll between the outer peripheral surface of the inner rings 47a1, 47b1 and the outer peripheral surface of the outer rings 47a2, 47b2. As the rolling elements 47a3, 47b3, balls or rollers are used. As the rollers, cylindrical rollers, needle rollers, tapered rollers, etc. can be used. The cages 47a4, 47b4 are components disposed between the inner rings 47a1, 47b1 and the outer rings 47a2, 47b2. The cages 47a4, 47b4 are components that hold the plurality of rolling elements 47a3, 47b3 between the inner rings 47a1, 47b1 and the outer rings 47a2, 47b2.

[0046] In this embodiment, the inner rings 47a1 and 47b1, the outer rings 47a2 and 47b2, the plurality of rolling elements 47a3 and 47b3, and the cages 47a4 and 47b4 are made of ceramic. The first bearing 47a and the second bearing 47b are ceramic bearings. The inner rings 47a1 and 47b1, the outer rings 47a2 and 47b2, the plurality of rolling elements 47a3 and 47b3, and the cages 47a4 and 47b4 can be composed of, for example, oxide-based ceramics, fluoride-based ceramics, or the like. By using ceramic bearings as the first bearing 47a and the second bearing 47b, the heat resistance can be improved. Therefore, even when used in the heat treatment unit 40, the durability of the first bearing 47a and the second bearing 47b can be good. Note that the first bearing 47a and the second bearing 47b are not limited to ceramic bearings.

[0047] The first bearing 47a is attached to the first end portion 48a of the roller body 48 and the shaft 46 by a pair of rings 47a5 attached to the inside and outside of the first bearing 47a. The second bearing 47b is attached to the second end portion 48b of the roller body 48 and the shaft 46 by a pair of rings 47b5 attached to the inside and outside of the second bearing 47b.

[0048] 〈Roller body 48〉 The roller body 48 is a cylindrical member. The roller body 48 is rotatably attached to the shaft 46 via the first bearing 47a and the second bearing 47b. The workpiece A is conveyed along the outer peripheral surface 48c of the roller body 48. The roller body 48 includes a first end portion 48a and a second end portion 48b. The first end portion 48a is the right end portion of the roller body 48. The second end portion 48b is the left end portion of the roller body 48. Openings 48a1 and 48b1 are formed in the first end portion 48a and the second end portion 48b, respectively.

[0049] The first end portion 48a and the second end portion 48b extend from the substantially cylindrical roller body 48 in the inner diameter direction, respectively. For this reason, the inner diameters of the first end portion 48a and the second end portion 48b are smaller than the inner diameter between the first end portion 48a and the second end portion 48b. A space 48d is formed between the roller body 48 and the shaft 46. Thereby, the friction applied to the first bearing 47a and the second bearing 47b can be reduced. Also, the guide roller 45 is lightened.

[0050] The first bearing 47a and the second bearing 47b are respectively attached to the openings 48a1 and 48b1 of the first end portion 48a and the second end portion 48b of the roller body 48. Thereby, the roller body 48 is rotatably supported in the circumferential direction with respect to the shaft 46 fixed in the processing space 40a. For this reason, when the workpiece A is conveyed, the guide roller 45 rotates as the workpiece A is conveyed. The first cover 49a and the second cover 49b are provided outside the first end portion 48a and the second end portion 48b of the roller body 48. In this embodiment, the roller body 48 is made of stainless steel. Note that the material of the roller body 48 is not particularly limited.

[0051] 〈The first cover 49a and the second cover 49b〉 The first cover 49a and the second cover 49b respectively block the gaps between the inner rings 47a1 and 47b1 and the outer rings 47a2 and 47b2 outside the first bearing 47a and the second bearing 47b along the axial direction of the shaft 46. In this embodiment, the first cover 49a and the second cover 49b are plate-like members.

[0052] In this embodiment, the first cover 49a and the second cover 49b are substantially disk-shaped. The first cover 49a and the second cover 49b have an outer diameter larger than the inner diameters of the openings 48a1 and 48b1 at the first end 48a and the second end 48b of the roller body 48. Insertion holes 49a1 and 49b1 through which the shaft 46 is inserted are respectively provided in the first cover 49a and the second cover 49b. The inner diameters of the insertion holes 49a1 and 49b1 are substantially the same as the outer shape of the shaft 46. In this embodiment, the first cover 49a and the second cover 49b are made of stainless steel. Note that the materials of the first cover 49a and the second cover 49b are not limited to stainless steel.

[0053] In this embodiment, a stepped portion 46c is provided on the shaft 46. The stepped portion 46c is provided outside the position where the first bearing 47a is attached. A gap is formed between the first end 48a of the roller body 48 and the stepped portion 46c. The first cover 49a has a thickness substantially the same as that of the gap. As a result, the first cover 49a is sandwiched between the stepped portion 46c and the first end 48a of the roller body 48. The first cover 49a closes the first end 48a of the roller body 48 in a state of being positioned by the stepped portion 46c and the first end 48a of the roller body 48.

[0054] In this embodiment, a spring seat portion 46d is provided on the shaft 46. The spring seat portion 46d is provided outside the second end 48b. The spring seat portion 46d is a disk-shaped member having an outer diameter larger than that of the shaft 46. As the spring seat portion 46d, a set collar formed with a slit is used. The spring seat portion 46d is detachably attached to the shaft 46 by a bolt (not shown). By moving the spring seat portion 46d along the shaft 46 with the bolt loosened, the position of the spring seat portion 46d can be adjusted. A coil spring 49c is disposed between the spring seat portion 46d and the second cover 49b with the shaft 46 inserted therethrough. The coil spring 49c has an inner diameter larger than the outer shape of the shaft 46 and an outer diameter smaller than the outer shape of the spring seat portion 46d.

[0055] By making the gap between the spring seat portion 46d and the second cover 49b narrower than the natural length of the coil spring 49c, the repulsive force of the coil spring 49c acts on the second cover 49b and the second end portion 48b. As a result, the second cover 49b is pressed against the second end portion 48b of the roller body 48 by the coil spring 49c.

[0056] Incidentally, in the processing space inside the outer wall of the heat treatment furnace, as the workpiece is conveyed, the guide roller that guides the workpiece rotates. The roller body of the guide roller rotates with respect to the shaft via the first bearing and the second bearing. In the knowledge of the present inventor, at this time, friction may occur between the components of the guide roller. As a result, there is a concern that the cleanliness (cleanliness degree) in the processing space may decrease. For example, dust may be generated from the first bearing and the second bearing due to friction generated between the inner ring, outer ring, rolling elements, and retainer of the first bearing and the second bearing. The faster the conveying speed and the greater the friction, the more dust can be generated from the first bearing and the second bearing. Also, when the grease filled in the first bearing and the second bearing scatters or the like, the cleanliness in the processing space may decrease.

[0057] In the above-described embodiment, the heat treatment apparatus 10 includes transfer devices 20 and 22, an outer wall 41, and guide rollers 45. The transfer devices 20 and 22 transfer the workpiece A. The outer wall 41 has an internal processing space 40a in which the workpiece A is processed while being transferred. The guide rollers 45 are provided in the processing space 40a and guide the workpiece A. The guide roller 45 includes a shaft 46, a first bearing 47a and a second bearing 47b, a cylindrical roller body 48, and a first cover 49a and a second cover 49b. The first bearing 47a and the second bearing 47b are attached at intervals in the axial direction of the shaft 46. The roller body 48 is rotatably attached to the shaft 46 via the first bearing 47a and the second bearing 47b. The first bearing 47a and the second bearing 47b each include an inner ring 47a1, 47b1, an outer ring 47a2, 47b2, rolling elements 47a3, 47b3, and a cage 47a4, 47b4. The first cover 49a and the second cover 49b each block the gap between the inner ring 47a1, 47b1 and the outer ring 47a2, 47b2 on the outer sides of the first bearing 47a and the second bearing 47b along the axial direction of the shaft 46. With such a configuration, dust generated by friction that may occur in the first bearing 47a and the second bearing 47b during the transfer of the workpiece A is less likely to enter the processing space 40a. Also, even when grease is used for the first bearing 47a and the second bearing 47b, the grease is less likely to scatter into the processing space 40a. As a result, the cleanliness of the processing space 40a is improved.

[0058] Even when dust, scattering of grease, etc. occur due to friction between components such as the first bearing 47a and the second bearing 47b of the guide roller 45, the dust, scattered grease, etc. can be contained in the space 48d inside the roller body 48. Since the first cover 49a and the second cover 49b are provided outside the first end portion 48a and the second end portion 48b of the roller body 48, dust, scattered grease, etc. are less likely to enter the processing space 40a from the space 48d inside the roller body 48.

[0059] In the above-described embodiment, the second cover 49b is pressed against the second end portion 48b of the roller body 48 by the coil spring 49c. Thereby, even when the dimensions of the shaft 46, the roller body 48, etc. change due to a temperature change in the processing space 40a, the second cover 49b is stably pressed against the second end portion 48b. As a result, generation of dust from the first bearing 47a and the second bearing 47b can be suppressed. Note that the present invention is not limited to the above-described embodiment, and the first cover 49a may be pressed against the first end portion 48a of the roller body 48 by the coil spring 49c. Both the first cover 49a and the second cover 49b may be pressed against the first end portion 48a and the second end portion 48b of the roller body 48 by the coil spring 49c, respectively.

[0060] In the above-described embodiment, a spring seat portion 46d is provided on the shaft 46 outside the second end portion 48b. The coil spring 49c is disposed between the spring seat portion 46d and the second end portion 48b. By adjusting the position of the coil spring 49c by the spring seat portion 46d, pressing of the first cover 49a and the second cover 49b is stabilized, and it becomes difficult for dust or the like to scatter into the processing space 40a.

[0061] In the above-described embodiment, a stepped portion 46c is provided on the shaft 46 outside the position where the first bearing 47a is attached. The first cover 49a is sandwiched between the stepped portion 46c and the first end portion 48a of the roller body 48. Thereby, the first cover 49a is positioned on the shaft 46, and the first end portion 48a is easily blocked.

[0062] In the above-described embodiment, the first bearing 47a and the second bearing 47b are ceramic bearings. Thereby, when the guide roller 45 rotates in accordance with the conveyance of the object to be processed A, generation of dust from the first bearing 47a and the second bearing 47b can be reduced. Further, by using a ceramic material having good self-lubricity as the first bearing 47a and the second bearing 47b, grease filled between parts becomes unnecessary. For this reason, there is no concern about scattering of grease, and the cleanliness in the processing space 40a is easily improved.

[0063] In the above-described embodiment, the first cover 49a is positioned on the shaft 46. The second cover 49b is pressed against the second end portion 48b of the roller body 48 by the coil spring 49c. As a result, the position of the guide roller 45 is stabilized.

[0064] In the above-described embodiment, a vacuum pump 80 for decompressing the processing space 40a is connected to the outer wall 41. In the heat treatment apparatus 10 in which the processing space 40a is decompressed by the vacuum pump 80, the dust generated from the guide roller 45 during processing can greatly affect the cleanliness of the processing space 40a. Therefore, when the configuration of the guide roller 45 described above is adopted, the effect of improving the cleanliness can be greater.

[0065] In the heat treatment apparatus 10, the guide roller 45 is supported by a pair of support plates 90a and 90b provided in the processing space 40a.

[0066] 〈A pair of support plates 90a and 90b〉 The pair of support plates 90a and 90b are provided in the processing space 40a of the heat treatment unit 40. Although detailed illustration is omitted, the pair of support plates 90a and 90b are plate-like members extending along the direction (front-rear direction) in which the guide rollers 45b are arranged. The pair of support plates 90a and 90b support a plurality of guide rollers 45b arranged in the front-rear direction. The pair of support plates 90a and 90b are arranged with an interval longer than the width of the workpiece A so as to sandwich the conveyance path of the workpiece A. Insertion holes 90a1 and 90b1 through which the shaft 46 is inserted are provided in the pair of support plates 90a and 90b. The insertion holes 90a1 and 90b1 are opened in a substantially circular shape. The shaft 46 is inserted through the insertion holes 90a1 and 90b1. In this embodiment, the guide roller 45 is supported by the pair of support plates 90a and 90b via the first support member 44a and the second support member 44b.

[0067] A first support member 44a is attached to the first end portion 46a of the shaft 46. Inside the first end portion 46a, a stepped portion 46c having a diameter larger than that of the first end portion 46a is provided. The stepped portion 46c is provided outside the first cover 49a. A second support member 44b is attached to the second end portion 46b of the shaft 46. Insertion holes 44a1 and 44b1 penetrating along the axis of the shaft 46 are respectively formed in the first support member 44a and the second support member 44b. The shaft 46 is attached to the first support member 44a and the second support member 44b in a state of being inserted into the insertion holes 44a1 and 44b1. The inner diameters of the insertion holes 44a1 and 44b1 are set to be substantially the same as the outer diameters of the first end portion 46a and the second end portion 46b of the shaft 46.

[0068] 〈First support member 44a〉 The first support member 44a has an insertion portion 44a2, a flange portion 44a3, and an end portion 44a4. The insertion portion 44a2, the flange portion 44a3, and the end portion 44a4 may be different members or may be integrally formed. The outer shapes of the insertion portion 44a2, the flange portion 44a3, and the end portion 44a4 are substantially annular. The insertion portion 44a2 is a portion to be inserted into the insertion hole 90a1 of the support plate 90a. The flange portion 44a3 is a portion having a diameter larger than those of the insertion portion 44a2 and the end portion 44a4. The end portion 44a4 may be a set collar provided with a slit.

[0069] The first end portion 46a has a smaller diameter than the stepped portion 46c. With the insertion portion 44a2 of the first support member 44a hitting against the stepped portion 46c and being positioned, the first support member 44a is attached to the shaft 46. The insertion hole 44a1 of the first support member 44a has substantially the same length as the first end portion 46a of the shaft 46. For this reason, the first end portion 46a of the shaft 46 and the end portion 44a4 of the first support member 44a are aligned. The first support member 44a is attached to the first end portion 46a of the shaft 46 by tightening the end portion 44a4 against the first end portion 46a of the shaft 46.

[0070] The first support member 44a is attached to the support plate 90a while being attached to the first end portion 46a of the shaft 46. In other words, the first end portion 46a of the shaft 46 is attached to the support plate 90a via the first support member 44a. Here, the first support member 44a is attached to the support plate 90a in a state where the flange portion 44a3 abuts against the outer surface of the support plate 90a and the insertion portion 44a2 is inserted into the insertion hole 90a1 of the support plate 90a. Here, the flange portion 44a3 of the first support member 44a is attached to the support plate 90a by a bolt (not shown). Thereby, the position of the guide roller 45 can be stabilized in the processing space 40a.

[0071] 〈Second support member 44b〉 The second support member 44b has an insertion portion 44b2, a flange portion 44b3, and an end portion 44b4. The insertion portion 44b2, the flange portion 44b3, and the end portion 44b4 may be different members or may be integrally formed. The outer shapes of the insertion portion 44b2 and the end portion 44b4 are substantially annular. The outer diameter of the flange portion 44b3 is a substantially square shape with chamfered corners (see FIG. 4). The insertion portion 44b2 is a portion to be inserted into the insertion hole 90b1 of the support plate 90b. The flange portion 44b3 is a portion having a larger diameter than the insertion portion 44b2 and the end portion 44b4. The end portion 44b4 may be a set collar provided with a slit.

[0072] When the second support member 44b is attached to the support plate 90b, the end portion 44b4 is set to a dimension that substantially aligns with the second end portion 46b of the shaft 46. The second end portion 46b of the shaft 46 is inserted into the insertion hole 44b1 of the second support member 44b. The second end portion 46b of the shaft 46 is not fixed to the inner peripheral surface of the insertion hole 44b1 of the second support member 44b. Even when the length of the shaft 46 changes due to a temperature change during the processing of the workpiece A, the shaft 46 slides on the inner peripheral surface of the insertion hole 44b1 of the second support member 44b. Thereby, it is difficult to apply a load to the shaft 46.

[0073] The second support member 44b is attached to the support plate 90b in a state where the flange portion 44b3 abuts against the outer surface of the support plate 90b and the insertion portion 44b2 is inserted into the insertion hole 90b1 of the support plate 90b.

[0074] As shown in FIG. 4, insertion holes 44b5 are provided at the four corners of the flange portion 44b3 of the second support member 44b. The second support member 44b is attached to the support plate 90b (see FIG. 3) by bolts 44b6 inserted through the insertion holes 44b5. The inner diameter of the insertion hole 44b5 is set to a dimension slightly larger than the outer shape of the portion through which the bolt 44b6 is inserted. For this reason, even in a state where the bolt 44b6 is tightened, the flange portion 44b3 moves along the outer surface of the support plate 90b by the difference between the inner diameter of the insertion hole 44b5 and the outer shape of the bolt 44b6. The second support member 44b is configured to be position-adjustable along the outer surface of the support plate 90b by a position adjustment member 44d.

[0075] The position adjustment member 44d is provided in the vicinity of the lower surface 44ba, the front side surface 44bb, and the rear side surface 44bc of the flange portion 44b3. The position adjustment member 44d includes a base portion 44d1 attached to the support plate 90b and an adjustment screw 44d2 inserted through the base portion 44d1. The tip portions of the adjustment screws 44d2 penetrate the base portion 44d1 and reach the respective surfaces 44ba to 44bc of the flange portion 44b3. By turning the adjustment screw 44d2, the position of the tip can be adjusted, and thereby the position of the flange portion 44b3 on the outer surface of the support plate 90b can be adjusted.

[0076] In this embodiment, the insertion hole 90b1 is larger than the outer shape of the roller body 48 (see FIG. 3). During maintenance or the like, the guide roller 45 is removed in the following manner. The second support member 44b is removed from the support plate 90b. A cylindrical member that is larger than the outer shape of the roller body 48 and smaller than the inner diameter of the insertion hole 90b1 is inserted into the insertion hole 90b1. The first end portion 46a of the shaft 46 is removed from the first support member 44a. The shaft 46 to which the roller body 48 is attached is removed from the second end portion 46b side. Since the cylindrical member is inserted into the insertion hole 90b1 of the support plate 90b, the shaft 46 and the roller body 48 are less likely to fall off, and the workability during replacement is good.

[0077] As described above, the configuration of the guide roller and the like provided in the heat treatment apparatus disclosed herein has been described by taking the case where it is provided in the heat treatment section as an example. However, the above-described guide roller can also exhibit the above-described effects even when it is provided in a part other than the heat treatment section. For example, the above-described guide roller may be provided in a cooling section, an unwinding section, a winding section, or the like.

[0078] As described above, specific embodiments have been described in detail, but these are merely examples and do not limit the scope of the claims. Thus, the technology described in the claims includes various modifications and changes of the above-described embodiments.

[0079] Note that this specification includes the following items 1 to 9. The following items 1 to 9 are not limited to the above-described embodiments.

[0080] Item 1: A conveying device for conveying a strip-shaped object to be processed, An outer wall having an internal processing space in which the object to be processed is processed while being conveyed, A guide roller provided in the processing space for guiding the object to be processed, and comprising, The guide roller is a shaft, a first bearing and a second bearing attached at intervals in the axial direction of the shaft, and A cylindrical roller body rotatably attached to the shaft via the first bearing and the second bearing; a first cover and a second cover; and comprising: The first bearing and the second bearing each include: an inner ring mounted on the shaft; an outer ring facing the inner ring in the radial direction; a plurality of rolling elements disposed between the inner ring and the outer ring; a cage disposed between the inner ring and the outer ring for holding the plurality of rolling elements; and each having: The first cover and the second cover each close the gap between the inner ring and the outer ring outside the first bearing and the second bearing along the axial direction of the shaft. A heat treatment apparatus.

[0081] Item 2: The heat treatment apparatus according to item 1, wherein at least one of the first cover and the second cover is pressed against an end portion of the roller body by a coil spring.

[0082] Item 3: The shaft includes a first end portion and a second end portion opposite to the first end portion. The first cover is positioned on the shaft. The heat treatment apparatus according to item 2, wherein the second cover is pressed against the second end portion of the guide roller by the coil spring.

[0083] Item 4: A spring seat portion is provided on the shaft outside the second end portion. The heat treatment apparatus according to item 3, wherein the coil spring is disposed between the spring seat portion and the second end portion.

[0084] Item 5: A stepped portion is provided on the shaft outside the position where the first bearing is mounted. The first cover is sandwiched between the stepped portion and the first end of the roller body, the heat treatment apparatus according to claim 3 or 4.

[0085] Claim 6: A pair of support plates are provided in the processing space, One of the first end and the second end of the shaft is attached to one of the pair of support plates, the heat treatment apparatus according to any one of claims 3 to 5.

[0086] Claim 7: A vacuum pump for decompressing the processing space is connected to the outer wall, the heat treatment apparatus according to any one of claims 1 to 6.

[0087] Claim 8: At least one of the first bearing and the second bearing is a ceramic bearing, the heat treatment apparatus according to any one of claims 1 to 7.

[0088] Claim 9: A space is formed between the roller body and the shaft, the heat treatment apparatus according to any one of claims 1 to 8.

Explanation of Signs

[0089] A Workpiece A1 Pay-off roll A2 Take-up roll 10 Heat treatment apparatus 20, 22 Conveying device 24 Control device 30 Pay-off section 31, 41, 51, 61 Outer wall 32 Pay-off shaft 35 Roller 40 Heat treatment section 40a, 50a Processing space 42 Heater 44a First support member 44b Second support member 44a1, 44b1 Insertion hole 44a2, 44b2 Insertion portion Flange parts 44a3, 44b3 Ends 44a4, 44b4 Insertion hole 44b5 Bolt 44b6 Position adjusting member 44d Base 44d1 Adjusting screw 44d2 Guide rollers 45, 45a - 45d Shaft 46 First end 46a Second end 46b Step portion 46c Spring seat portion 46d First bearing 47a Second bearing 47b Inner rings 47a1, 47b1 Outer rings 47a2, 47b2 Rolling elements 47a3, 47b3 Cages 47a4, 47b4 Rings 47a5, 47b5 Roller body 48 First end 48a Second end 48b Openings 48a1, 48b1 Outer peripheral surface 48c Space 48d First cover 49a Second cover 49b Insertion holes 49a1, 49b1 Coil spring 49c Cooling part 50 Cooling roller 52 Guide rollers 55, 55a - 55d Winding part 60 Winding shaft 62 Roller 65 Connection parts 70, 72, 74 Vacuum pump 80 Vacuum valves 81 - 84 Support plates 90a, 90b Insertion holes 90a1, 90b1

Claims

1. A conveying device for conveying a belt-shaped object to be processed, an outer wall having an internal processing space in which the object to be processed is processed while being conveyed, and a guide roller provided in the processing space for guiding the object to be processed and comprising: the guide roller comprises a shaft, a first bearing and a second bearing mounted at intervals in the axial direction of the shaft, a cylindrical roller body rotatably mounted on the shaft via the first bearing and the second bearing, a first cover and a second cover and comprising: the first bearing and the second bearing each comprise an inner ring mounted on the shaft, an outer ring facing the inner ring in the radial direction, a plurality of rolling elements arranged between the inner ring and the outer ring, and a retainer arranged between the inner ring and the outer ring for holding the plurality of rolling elements, respectively; the first cover and the second cover respectively block the gaps between the inner ring and the outer ring outside the first bearing and the second bearing along the axial direction of the shaft, a heat treatment device.

2. The heat treatment device according to claim 1, wherein at least one of the first cover and the second cover is pressed against an end of the roller body by a coil spring.

3. The shaft comprises a first end and a second end opposite to the first end, the first cover is positioned on the shaft, the heat treatment device according to claim 2, wherein the second cover is pressed against the second end of the guide roller by the coil spring.

4. A spring seat portion is provided outside the second end of the shaft, the heat treatment device according to claim 3, wherein the coil spring is arranged between the spring seat portion and the second end.

5. A stepped portion is provided outside the position where the first bearing is mounted on the shaft, the heat treatment device according to claim 3 or 4, wherein the first cover is sandwiched between the stepped portion and the first end of the roller body.

6. A pair of support plates are provided in the processing space, the heat treatment device according to any one of claims 3 or 4, wherein one of the first end and the second end of the shaft is mounted on one of the pair of support plates.

7. The heat treatment apparatus according to any one of claims 1 to 4, wherein a vacuum pump for decompressing the processing space is connected to the outer wall.

8. The heat treatment apparatus according to any one of claims 1 to 4, wherein at least one of the first bearing and the second bearing is a ceramic bearing.

9. The heat treatment apparatus according to any one of claims 1 to 4, wherein a space is formed between the roller body and the shaft.

Images