High refractive index imprint composition and material and process for manufacturing the same

Abstract

To provide an imprint composition that improves the refractive index, optical clarity in a visible region, optical resolution, processability, shrinkage of imprinted features, and cost-effectiveness.SOLUTION: An imprint composition 104 includes one or more types of nanoparticles, one or more surface ligands, one or more solvents, one or more additives, and one or more acrylates.SELECTED DRAWING: Figure 1A

Description

Technical Field

[0001] Field

[0001] Embodiments of the present disclosure generally relate to microelectronic processing and, more particularly, to imprint compositions and materials useful for nanoimprint lithography (NIL) and related processes.

Background Art

[0002] Background Description of Related Art

[0002] Nano and micro patterning of nanoparticle imprinting provides opportunities to develop nano material-based electronic devices, energy devices, sensors, and other types of devices with nanometer scale resolution. Currently available imprint materials include either organic (high refractive index polymers) or inorganic-organic hybrid materials (sol-gel). Most of the imprint materials have low refractive indices (<1.7) and have multiple problems related to optical transparency in the visible region, optical resolution, processability, high shrinkage of the imprinted features, and cost effectiveness.

[0003]

[0003] Therefore, improved imprint compositions and materials, and related processes are needed.

Summary of the Invention

[0004]

[0004] Embodiments of the present disclosure generally relate to imprint compositions and materials useful for nanoimprint lithography (NIL) and related processes. In one or more embodiments, the imprint composition includes one or more types of nanoparticles, one or more solvents, one or more surface ligands, one or more additives, and one or more acrylates.

[0005]

[0005] In some embodiments, the imprint composition comprises from about 0.5 weight percent (wt%) to about 40 wt% nanoparticles, from about 50 wt% to about 90 wt% solvent, from about 5 wt% to about 40 wt% surface ligand, from about 0.01 wt% to about 5 wt% additive, and from about 0.1 wt% to about 10 wt% acrylate. In some examples, each nanoparticle is a bare particle without a coating or shell. In other examples, each nanoparticle contains a core and one or more shells. For example, the core can include titanium oxide, niobium oxide, or zirconium oxide, and the shell can include silicon oxide, zirconium oxide, niobium oxide, or any combination thereof. The core and the shell can include the same material or different materials.

[0006]

[0006] In other embodiments, a method of preparing an imprint surface includes disposing, coating, or otherwise placing an imprint composition on one or more substrates, contacting the imprint composition with a stamp having a pattern, converting the imprint composition into an imprint material, and removing the stamp from the imprint material.

[0007]

[0007] To enable a more detailed understanding of the above features of the present disclosure, a more specific description of the present disclosure, briefly summarized above, can be made by reference to the embodiments, some of which are shown in the accompanying drawings. However, it should be noted that the accompanying drawings show only exemplary embodiments and should not be considered as limiting the scope of the present disclosure, and other equally effective embodiments may also be acceptable.

Brief Description of the Drawings

[0008]

FIG. 1A-1F

[0008] A - F of FIG. 1 show cross - sectional views of a workpiece being processed by a plurality of operations while preparing a nano - imprint film containing nanoparticles according to one or more embodiments described and discussed herein.

FIG. 2

[0009] Shown is a front view of an optical device according to one or more embodiments described and discussed herein. **DETAILED DESCRIPTION OF THE INVENTION**

[0009]

[0010] For ease of understanding, where possible, the same reference numerals have been used to identify the same elements common to multiple figures. It is contemplated that the elements and features of one or more embodiments may be beneficially incorporated into other embodiments.

[0010]

[0011] Embodiments of the present disclosure generally relate to imprint compositions and imprint materials useful for nanoimprint lithography (NIL). The imprint composition can be converted into an imprint material by applying one or more types of radiation such as heat and / or light or microwaves. In one or more embodiments, the imprint composition contains one or more types of nanoparticles, one or more solvents, one or more surface ligands, one or more additives, and one or more acrylates.

[0011]

[0012] Each nanoparticle (NP) may be a single particle or a bare particle, or a coated particle such as an NP that includes one or more shells disposed around a core. In some examples, the nanoparticles can contain one or more types of surface ligands (e.g., linked NPs or stabilized NPs) attached to the outer surface of the particle. The nanoparticles can have one or more different forms or shape dimensions, such as spherical, elliptical, rod-shaped, cubic, wire, cylindrical, rectangular, or combinations thereof.

[0012]

[0013] The nanoparticle or core can have a size or diameter of about 2 nm, about 5 nm, about 8 nm, about 10 nm, about 12 nm, about 15 nm, about 20 nm, about 25 nm, about 30 nm, or about 35 nm to about 40 nm, about 50 nm, about 60 nm, about 80 nm, about 100 nm, about 150 nm, about 200 nm, about 250 nm, about 300 nm, about 400 nm, about 500 nm, or more. For example, the nanoparticle or core can have a size or diameter of about 2 nm to about 500 nm, about 2 nm to about 300 nm, about 2 nm to about 200 nm, about 2 nm to about 150 nm, about 2 nm to about 100 nm, about 2 nm to about 80 nm, about 2 nm to about 60 nm, about 2 nm to about 50 nm, about 2 nm to about 40 nm, about 2 nm to about 30 nm, about 2 nm to about 20 nm, about 2 nm to about 15 nm, about 2 nm to about 10 nm, about 10 nm to about 500 nm, about 10 nm to about 300 nm, about 10 nm to about 200 nm, about 10 nm to about 150 nm, about 10 nm to about 100 nm, about 10 nm to about 80 nm, about 10 nm to about 60 nm, about 10 nm to about 50 nm, about 10 nm to about 40 nm, about 10 nm to about 30 nm, about 10 nm to about 20 nm, about 10 nm to about 15 nm, about 50 nm to about 500 nm, about 50 nm to about 300 nm, about 50 nm to about 200 nm, about 50 nm to about 150 nm, about 50 nm to about 100 nm, about 50 nm to about 80 nm, about 50 nm to about 60 nm, or more.

[0013]

[0014] The nanoparticles can be or can include one or more metal oxides, non-metal oxides, and / or diamond materials. The nanoparticles can include niobium oxide, titanium oxide, zirconium oxide, hafnium oxide, tantalum oxide, silicon oxide, diamond, or any combination thereof. In some embodiments, when the nanoparticles have one or more shells disposed around a core, the core and the shell can be of the same material or different materials. The core can include one or more inorganic materials, and the shell can contain one or more organic materials and / or one or more inorganic materials. In one or more embodiments, the core can include titanium oxide, niobium oxide, or zirconium oxide, and the shell can include silicon oxide, zirconium oxide, niobium oxide, or any combination thereof. Typically, different materials are included in the core and the shell. In one or more examples, the core includes titanium oxide and the shell includes silicon oxide, zirconium oxide, niobium oxide, or any combination thereof. In other examples, the core includes niobium oxide and the shell includes silicon oxide, zirconium oxide, or any combination thereof. In some examples, the core includes zirconium oxide and the shell includes silicon oxide.

[0014]

[0015] The core has a diameter of about 2 nm, about 3 nm, about 5 nm, about 8 nm, about 10 nm, about 15 nm, about 20 nm, about 30 nm, or about 40 nm to about 50 nm, about 65 nm, about 80 nm, about 100 nm, about 150 nm, about 200 nm, about 250 nm, about 300 nm, about 400 nm, about 500 nm, or more. For example, the core has a diameter of about 2 nm to about 500 nm, about 5 nm to about 500 nm, about 10 nm to about 500 nm, about 20 nm to about 500 nm, about 50 nm to about 500 nm, about 100 nm to about 500 nm, about 150 nm to about 500 nm, about 200 nm to about 500 nm, about 300 nm to about 500 nm, about 2 nm to about 200 nm, about 5 nm to about 200 nm, about 10 nm to about 200 nm, about 20 nm to about 200 nm, about 50 nm to about 200 nm, about 100 nm to about 200 nm, about 150 nm to about 200 nm, about 2 nm to about 100 nm, about 5 nm to about 100 nm, about 10 nm to about 100 nm, about 20 nm to about 100 nm, about 50 nm to about 100 nm, or about 80 nm to about 100 nm.

[0015]

[0016] The shell has a thickness of about 0.1 nm, about 0.2 nm, about 0.5 nm, about 0.8 nm, about 1 nm, about 1.5 nm, about 2 nm, about 5 nm, about 8 nm, or about 10 nm to about 12 nm, about 15 nm, about 18 nm, about 20 nm, about 30 nm, about 40 nm, about 50 nm, about 60 nm, about 80 nm, about 100 nm, about 150 nm, or more. For example, the shell has a thickness of about 0.1 nm to about 150 nm, about 0.1 nm to about 100 nm, about 0.1 nm to about 80 nm, about 0.1 nm to about 60 nm, about 0.1 nm to about 50 nm, about 0.1 nm to about 40 nm, about 0.1 nm to about 30 nm, about 0.1 nm to about 20 nm, about 0.1 nm to about 15 nm, about 0.1 nm to about 10 nm, about 0.1 nm to about 5 nm, about 0.1 nm to about 1 nm, about 0.5 nm to about 100 nm, about 0.5 nm to about 80 nm, about 0.5 nm to about 60 nm, about 0.5 nm to about 50 nm, about 0.5 nm to about 40 nm, about 0.5 nm to about 20 nm, about 0.5 nm to about 15 nm, about 0.5 nm to about 10 nm, about 0.5 nm to about 5 nm, about 0.5 nm to about 1 nm, about 1 nm to about 150 nm, about 1 nm to about 100 nm, about 1 nm to about 80 nm, about 1 nm to about 60 nm, about 1 nm to about 50 nm, about 1 nm to about 40 nm, about 1 nm to about 30 nm, about 1 nm to about 20 nm, about 1 nm to about 15 nm, about 1 nm to about 10 nm, about 1 nm to about 5 nm, or about 1 nm to about 3 nm.

[0016]

[0017] In some examples, the core has a diameter of about 2 nm to about 500 nm and the shell has a thickness of about 0.1 nm to about 100 nm. In other examples, the core has a diameter of about 5 nm to about 200 nm and the shell has a thickness of about 0.5 nm to about 60 nm. In some examples, the core has a diameter of about 10 nm to about 100 nm and the shell has a thickness of about 1 nm to about 15 nm.

[0017]

[0018] In one or more embodiments, the imprint composition contains nanoparticles at a concentration of about 0.1 weight percent (wt%), about 0.5 wt%, about 1 wt%, about 2 wt%, about 3 wt%, about 5 wt%, about 6 wt%, about 8 wt%, or about 10 wt% to about 12 wt%, about 15 wt%, about 18 wt%, about 20 wt%, about 22 wt%, about 24 wt%, about 25 wt%, about 28 wt%, about 30 wt%, about 32 wt%, about 35 wt%, about 38 wt%, or about 40 wt%. For example, the imprint composition contains nanoparticles at a concentration of about 0.1 wt% to about 40 wt%, about 0.5 wt% to about 40 wt%, about 0.5 wt% to about 35 wt%, about 0.5 wt% to about 32 wt%, about 0.5 wt% to about 30 wt%, about 0.5 wt% to about 28 wt%, about 0.5 wt% to about 25 wt%, about 0.5 wt% to about 22 wt%, about 0.5 wt% to about 20 wt%, about 0.5 wt% to about 18 wt%, about 0.5 wt% to about 15 wt%, about 0.5 wt% to about 12 wt%, about 0.5 wt% to about 10 wt%, about 0.5 wt% to about 8 wt%, about 0.5 wt% to about 6 wt%, about 0.5 wt% to about 5 wt%, about 0.5 wt% to about 4 wt%, about 0.5 wt% to about 3 wt%, about 0.5 wt% to about 2 wt%, about 0.5 wt% to about 1.5 wt%, about 0.5 wt% to about 1 wt%, about 2 wt% to about 40 wt%, about 2 wt% to about 35 wt%, about 2 wt% to about 32 wt%, about 2 wt% to about 30 wt%, about 2 wt% to about 28 wt%, about 2 wt% to about 25 wt%, about 2 wt% to about 22 wt%, about 2 wt% to about 20 wt%, about 2 wt% to about 18 wt%, about 2 wt% to about 15 wt%, about 2 wt% to about 12 wt%, about 2 wt% to about 10 wt%, about 2 wt% to about 8 wt%, about 2 wt% to about 6 wt%, about 2 wt% to about 5 wt%, about 2 wt% to about 4 wt%, about 2 wt% to about 3 wt%, about 5 wt% to about 40 wt%, about 5 wt% to about 35 wt%, about 5 wt% to about 32 wt%, about 5 wt% to about 30 wt%, about 5 wt% to about 28 wt%, about 5 wt% to about 25 wt%, about 5 wt% to about 22 wt%, about 5 wt% to about 20 wt%, about 5 wt% to about 18 wt%, about 5 wt% to about 15 wt%, about 5 wt% to about 12 wt%, about 5 wt% to about 10 wt%, about 5 wt% to about 8 wt%, or about 5 wt% to about 6 wt%.

[0018]

[0019] In other embodiments, the imprint composition contains nanoparticles at a concentration of about 40 wt%, about 50 wt%, about 55 wt%, about 60 wt%, about 62 wt%, or about 65 wt% to about 68 wt%, about 70 wt%, about 75 wt%, about 80 wt%, about 85 wt%, about 88 wt%, about 90 wt%, about 92 wt%, about 93 wt%, about 94 wt%, about 95 wt%, about 96 wt%, about 97 wt%, about 98 wt%, or more. For example, the imprint composition contains nanoparticles at a concentration of about 40 wt% to about 98 wt%, about 50 wt% to about 95 wt%, about 50 wt% to about 90 wt%, about 50 wt% to about 80 wt%, about 50 wt% to about 75 wt%, about 50 wt% to about 70 wt%, about 50 wt% to about 65 wt%, about 50 wt% to about 60 wt%, about 50 wt% to about 55 wt%, about 60 wt% to about 95 wt%, about 60 wt% to about 90 wt%, about 60 wt% to about 80 wt%, about 60 wt% to about 75 wt%, about 60 wt% to about 70 wt%, about 60 wt% to about 65 wt%, about 70 wt% to about 95 wt%, about 70 wt% to about 90 wt%, about 70 wt% to about 80 wt%, or about 70 wt% to about 75 wt%.

[0019]

[0020] The surface ligand can be or include one or more carboxylic acids, one or more esters, one or more amines, one or more alcohols, one or more silanes, their salts, their complexes, or any combination thereof. Exemplary surface ligands can be or include oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxysilane, octyltriethoxysilane, octenyltrimethoxysilane, octenyltriethoxysilane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxysilane, their salts, their esters, their complexes, or any combination thereof. In some examples, the surface ligand is at a concentration of about 8 wt% to about 50 wt% based on the wt of the nanoparticles.

[0020]

[0021] The imprint composition contains a surface ligand at a concentration of about 0.5 wt%, about 1 wt%, about 2 wt%, about 3 wt%, about 5 wt%, about 7 wt%, about 8 wt%, or about 10 wt% to about 12 wt%, about 15 wt%, about 18 wt%, about 20 wt%, about 25 wt%, about 30 wt%, about 35 wt%, about 40 wt%, about 45 wt%, or about 50 wt%. For example, the imprint composition contains a surface ligand at a concentration of about 0.5 wt% to about 50 wt%, about 1 wt% to about 50 wt%, about 3 wt% to about 50 wt%, about 5 wt% to about 50 wt%, about 5 wt% to about 40 wt%, about 5 wt% to about 35 wt%, about 5 wt% to about 30 wt%, about 5 wt% to about 25 wt%, about 5 wt% to about 20 wt%, about 5 wt% to about 15 wt%, about 5 wt% to about 10 wt%, about 10 wt% to about 50 wt%, about 10 wt% to about 40 wt%, about 10 wt% to about 35 wt%, about 10 wt% to about 30 wt%, about 10 wt% to about 25 wt%, about 10 wt% to about 20 wt%, about 10 wt% to about 15 wt%, about 15 wt% to about 50 wt%, about 15 wt% to about 40 wt%, about 15 wt% to about 35 wt%, about 15 wt% to about 30 wt%, about 15 wt% to about 25 wt%, or about 15 wt% to about 20 wt%.

[0021]

[0022] The solvent can be, or can include, one or more nanoparticle-dispersing solvents, one or more imprinting solvents, other types of solvents, or any combination thereof. The nanoparticle-dispersing solvent can be, or can include, one or more glycol ethers, alcohols, acetates, esters thereof, salts thereof, derivatives thereof, or any combination thereof. In some examples, the nanoparticle-dispersing solvent can be, or can include, one or more p-series glycol ethers, one or more e-series glycol ethers, or any combination thereof. In one or more examples, the nanoparticle-dispersing solvent includes propylene glycol methyl ether acetate (PGMEA). The imprinting solvent can be, or can include, one or more alcohols, one or more esters, salts thereof, or any combination thereof. In one or more examples, the imprinting solvent includes ethyl lactate.

[0022]

[0023] In one or more embodiments, the imprint composition contains one or more solvents at a concentration of about 50 wt%, about 55 wt%, about 60 wt%, about 62 wt%, about 65 wt%, about 68 wt%, about 70 wt%, about 72 wt%, about 75 wt%, or about 80 wt% to about 83 wt%, about 85 wt%, about 87 wt%, about 88 wt%, about 90 wt%, about 92 wt%, about 94 wt%, about 95 wt%, about 97 wt%, or about 98 wt%. For example, the imprint composition contains one or more solvents at a concentration of about 50 wt% to about 98 wt%, about 60 wt% to about 98 wt%, about 60 wt% to about 95 wt%, about 60 wt% to about 90 wt%, about 60 wt% to about 88 wt%, about 60 wt% to about 85 wt%, about 60 wt% to about 83 wt%, about 60 wt% to about 80 wt%, about 60 wt% to about 78 wt%, about 60 wt% to about 75 wt%, about 60 wt% to about 72 wt%, about 60 wt% to about 70 wt%, about 60 wt% to about 68 wt%, about 60 wt% to about 65 wt%, about 60 wt% to about 63 wt%, about 70 wt% to about 98 wt%, about 70 wt% to about 95 wt%, about 70 wt% to about 90 wt%, about 70 wt% to about 88 wt%, about 70 wt% to about 85 wt%, about 70 wt% to about 83 wt%, about 70 wt% to about 80 wt%, about 70 wt% to about 78 wt%, about 70 wt% to about 75 wt%, about 70 wt% to about 72 wt%, about 80 wt% to about 98 wt%, about 80 wt% to about 95 wt%, about 80 wt% to about 90 wt%, about 80 wt% to about 88 wt%, about 80 wt% to about 85 wt%, about 80 wt% to about 83 wt%, or about 80 wt% to about 82 wt%.

[0023]

[0024] In some embodiments, the imprint composition contains a nanoparticle dispersion solvent at a concentration of about 0.5 wt%, about 0.8 wt%, about 1 wt%, about 1.5 wt%, about 2 wt%, about 2.5 wt%, about 3 wt%, about 3.5 wt%, about 4 wt%, about 5 wt%, or about 6 wt% to about 7 wt%, about 8 wt%, about 10 wt%, about 12 wt%, about 14 wt%, about 15 wt%, about 18 wt%, about 20 wt%, or about 25 wt%. For example, the imprint composition contains a nanoparticle dispersion solvent at a concentration of about 0.5 wt% to about 20 wt%, about 1 wt% to about 20 wt%, about 1 wt% to about 18 wt%, about 1 wt% to about 15 wt%, about 1 wt% to about 13 wt%, about 1 wt% to about 12 wt%, about 1 wt% to about 11 wt%, about 1 wt% to about 10 wt%, about 1 wt% to about 8 wt%, about 1 wt% to about 7 wt%, about 1 wt% to about 6 wt%, about 1 wt% to about 5 wt%, about 1 wt% to about 4 wt%, about 1 wt% to about 3 wt%, about 5 wt% to about 20 wt%, about 5 wt% to about 18 wt%, about 5 wt% to about 15 wt%, about 5 wt% to about 13 wt%, about 5 wt% to about 12 wt%, about 5 wt% to about 11 wt%, about 5 wt% to about 10 wt%, about 5 wt% to about 8 wt%, about 5 wt% to about 7 wt%, about 5 wt% to about 6 wt%, about 8 wt% to about 20 wt%, about 8 wt% to about 18 wt%, about 8 wt% to about 15 wt%, about 8 wt% to about 13 wt%, about 8 wt% to about 12 wt%, about 8 wt% to about 11 wt%, about 8 wt% to about 10 wt%, or about 8 wt% to about 9 wt%.

[0024]

[0025] In other embodiments, the imprint composition contains the imprinting solvent at a concentration of about 50 wt%, about 55 wt%, about 60 wt%, about 62 wt%, about 65 wt%, about 68 wt%, or about 70 wt% to about 72 wt%, about 75 wt%, about 78 wt%, about 80 wt%, about 82 wt%, about 83 wt%, about 85 wt%, about 87 wt%, about 88 wt%, about 90 wt%, or about 95 wt%. For example, the imprint composition contains the imprinting solvent at a concentration of about 50 wt% to about 95 wt%, about 60 wt% to about 95 wt%, about 60 wt% to about 90 wt%, about 60 wt% to about 88 wt%, about 60 wt% to about 85 wt%, about 60 wt% to about 83 wt%, about 60 wt% to about 80 wt%, about 60 wt% to about 78 wt%, about 60 wt% to about 75 wt%, about 60 wt% to about 72 wt%, about 60 wt% to about 70 wt%, about 60 wt% to about 68 wt%, about 60 wt% to about 65 wt%, about 60 wt% to about 63 wt%, about 70 wt% to about 98 wt%, about 70 wt% to about 95 wt%, about 70 wt% to about 90 wt%, about 70 wt% to about 88 wt%, about 70 wt% to about 85 wt%, about 70 wt% to about 83 wt%, about 70 wt% to about 80 wt%, about 70 wt% to about 78 wt%, about 70 wt% to about 75 wt%, about 70 wt% to about 72 wt%, about 75 wt% to about 98 wt%, about 75 wt% to about 95 wt%, about 75 wt% to about 90 wt%, about 75 wt% to about 88 wt%, about 75 wt% to about 85 wt%, about 75 wt% to about 83 wt%, about 75 wt% to about 80 wt%, or about 75 wt% to about 78 wt%.

[0025]

[0026] The additive(s) can be, or can include, one or more perfluoroalkyl ethers, one or more polyglycols, one or more fatty acids, one or more silanes, one or more siloxanes, or any combination thereof. Exemplary additives include fluorosurfactants, fluoroadditives, and / or fluorocarbons (e.g., CAPSTONE® FS-66 or FS-68 fluorosurfactants available from DuPont), glycolic acid ethoxylate oleyl ether, polyethylene glycol, polypropylene glycol, lauric acid, myristic acid, stearic acid, palmitic acid, dimethyldiethoxysilane, polydimethylsiloxane, polydiphenylsiloxane, hexamethylcyclotrisiloxane, octamethylcyclotetrasiloxane, silanol-terminated polydimethylsiloxane, vinyl-terminated polydimethylsiloxane, 1,2-propanediol, salts thereof, esters thereof, complexes thereof, or any combination thereof. The additive(s) can be, or can include, one or more diols, one or more alcohols having three or more alcohol groups, or any combination thereof. In one or more examples, the additive contains 1,2-propanediol. In some examples, the additive is at a concentration of about 0.01 wt% to about 2.5 wt% based on the weight of the nanoparticles.

[0026]

[0027] The imprint composition contains an additive at a concentration of about 0.01 wt%, about 0.05 wt%, about 0.1 wt%, about 0.2 wt%, about 0.3 wt%, about 0.5 wt%, about 0.8 wt%, or about 1 wt% to about 1.2 wt%, about 1.5 wt%, about 1.8 wt%, about 2 wt%, about 2.5 wt%, about 3 wt%, about 3.5 wt%, about 4 wt%, about 5 wt%, about 6 wt%, about 8 wt%, or about 10 wt%. For example, the imprint composition contains an additive at a concentration of about 0.01 wt% to about 10 wt%, about 0.01 wt% to about 8 wt%, about 0.01 wt% to about 5 wt%, about 0.01 wt% to about 4 wt%, about 0.01 wt% to about 3 wt%, about 0.01 wt% to about 2 wt%, about 0.01 wt% to about 1 wt%, about 0.01 wt% to about 0.5 wt%, about 0.01 wt% to about 0.1 wt%, about 0.01 wt% to about 0.05 wt%, about 0.1 wt% to about 10 wt%, about 0.1 wt% to about 8 wt%, about 0.1 wt% to about 5 wt%, about 0.1 wt% to about 4 wt%, about 0.1 wt% to about 3 wt%, about 0.1 wt% to about 2 wt%, about 0.1 wt% to about 1 wt%, about 0.1 wt% to about 0.5 wt%, about 1 wt% to about 10 wt%, about 1 wt% to about 8 wt%, about 1 wt% to about 5 wt%, about 1 wt% to about 4 wt%, about 1 wt% to about 3 wt%, about 1 wt% to about 2 wt%, or about 1 wt% to about 1.5 wt%.

[0027]

[0028] The acrylate can be one or more methacrylates, one or more ethyl acrylates, one or more propyl acrylates, one or more butyl acrylates, one or more monofunctional acrylates, one or more difunctional acrylates, one or more trifunctional acrylates, other polyfunctional acrylates, or any combination thereof, or can include them. Exemplary acrylates are 3-(trimethoxysilyl)propyl methacrylate (3-MPS), 3-(trimethoxysilyl)propyl acrylate, di(ethylene glycol) methyl ether methacrylate, ethylene glycol methyl ether methacrylate, 2-ethylhexyl methacrylate, ethyl methacrylate, hexyl methacrylate, methacrylic acid, vinyl methacrylate, their monomers, their polymers, their salts, their complexes, or any combination thereof, or can include them. In some examples, the acrylate is at a concentration of about 0.05 wt% to about 10 wt% based on the weight of the nanoparticles.

[0028]

[0029] The imprint composition contains acrylate at a concentration of about 0.1 wt%, about 0.2 wt%, about 0.3 wt%, about 0.5 wt%, about 0.8 wt%, about 1 wt% to about 1.2 wt%, about 1.5 wt%, about 1.8 wt%, or about 2 wt%, about 2.2 wt%, about 2.3 wt%, about 2.5 wt%, about 2.8 wt%, about 3 wt%, about 3.2 wt%, about 3.5 wt%, about 3.8 wt%, about 4 wt%, about 5 wt%, about 6 wt%, about 8 wt%, about 10 wt%, about 12 wt%, about 15 wt%, about 18 wt%, or about 20 wt%. For example, the imprint composition contains acrylate at a concentration of about 0.1 wt% to about 20 wt%, about 0.1 wt% to about 15 wt%, about 0.1 wt% to about 10 wt%, about 0.1 wt% to about 8 wt%, about 0.1 wt% to about 5 wt%, about 0.1 wt% to about 4 wt%, about 0.1 wt% to about 3 wt%, about 0.1 wt% to about 2 wt%, about 0.1 wt% to about 1 wt%, about 0.1 wt% to about 0.5 wt%, about 1 wt% to about 20 wt%, about 1 wt% to about 15 wt%, about 1 wt% to about 10 wt%, about 1 wt% to about 8 wt%, about 1 wt% to about 5 wt%, about 1 wt% to about 4 wt%, about 1 wt% to about 3.5 wt%, about 1 wt% to about 3.2 wt%, about 1 wt% to about 3 wt%, about 1 wt% to about 2.8 wt%, about 1 wt% to about 2.5 wt%, about 1 wt% to about 2.3 wt%, about 1 wt% to about 2.2 wt%, about 1 wt% to about 2 wt%, about 1 wt% to about 1.8 wt%, about 1 wt% to about 1.5 wt%, about 1.8 wt% to about 20 wt%, about 1.8 wt% to about 15 wt%, about 1.8 wt% to about 10 wt%, about 1.8 wt% to about 8 wt%, about 1.8 wt% to about 5 wt%, about 1.8 wt% to about 4 wt%, about 1.8 wt% to about 3.5 wt%, about 1.8 wt% to about 3.2 wt%, about 1.8 wt% to about 3 wt%, about 1.8 wt% to about 2.8 wt%, about 1.8 wt% to about 2.5 wt%, about 1.8 wt% to about 2.3 wt%, about 1.8 wt% to about 2.2 wt%, or about 1.8 wt% to about 2 wt%.

[0029]

[0030] In one or more examples, the imprint composition contains from about 0.5 wt% to about 40 wt% nanoparticles, from about 50 wt% to about 90 wt% one or more solvents, from about 5 wt% to about 40 wt% surface ligands, from about 0.01 wt% to about 5 wt% additives, and from about 0.1 wt% to about 10 wt% acrylate. In other examples, the imprint composition contains from about 1 wt% to about 25 wt% nanoparticles, from about 60 wt% to about 85 wt% one or more solvents, from about 6 wt% to about 35 wt% surface ligands, from about 0.05 wt% to about 3 wt% additives, and from about 0.3 wt% to about 8 wt% acrylate. In some examples, the imprint composition contains from about 5 wt% to about 20 wt% nanoparticles, from about 65 wt% to about 80 wt% one or more solvents, from about 7 wt% to about 31 wt% surface ligands, from about 0.09 wt% to about 1.5 wt% additives, and from about 0.5 wt% to about 6 wt% acrylate.

[0030]

[0031] The imprint composition can have a viscosity of about 1 cP, about 2 cP, about 3 cP, about 5 cP, about 8 cP, or about 10 cP to about 12 cP, about 15 cP, about 20 cP, about 25 cP, about 30 cP, about 40 cP, about 50 cP, or about 70 cP as measured at a temperature of 23°C. For example, the imprint composition can have a viscosity of about 1 cP to about 70 cP, about 1 cP to about 50 cP, about 1 cP to about 40 cP, about 1 cP to about 30 cP, about 1 cP to about 20 cP, about 1 cP to about 10 cP, about 1 cP to about 5 cP, about 10 cP to about 70 cP, about 10 cP to about 50 cP, about 10 cP to about 40 cP, about 10 cP to about 30 cP, about 10 cP to about 20 cP, about 20 cP to about 70 cP, about 20 cP to about 50 cP, about 20 cP to about 40 cP, about 20 cP to about 30 cP, or about 20 cP to about 25 cP as measured at a temperature of 23°C.

[0031] Method for preparing an imprinted surface

[0032] In one or more embodiments, a method for preparing an imprinted surface, such as a NIL film, is provided. The imprinted surface is one or more exposed surfaces of the nanoimprint film described and discussed herein. The method includes disposing, coating, or otherwise placing an imprint composition on one or more substrates, contacting the imprint composition with a stamp having a pattern, converting the imprint composition into an imprint material (e.g., a nanoimprint film), and removing the stamp from the imprint material. In some examples, the substrate (e.g., a wafer) can be or include silicon oxide such as glass, quartz, a glass substrate, or a glass wafer. In other examples, the substrate can be or include silicon, silicon germanium, plastic, and / or other materials. The imprint composition can have a refractive index of from about 1.7 to about 2.0. The pattern on the stamp and transferred to the imprinted surface can be any of a one-dimensional pattern, a two-dimensional pattern, or a three-dimensional pattern.

[0032]

[0033] Figures 1A - 1F show cross-sectional views of a workpiece being processed by a plurality of operations while preparing a nanoimprint film containing nanoparticles, such as a nanoimprint film, according to one or more embodiments described and discussed herein. The nanoimprint film is formed on a substrate by an imprint process. The imprint process includes disposing an imprint composition 104 containing nanoparticles on a substrate 102 and aligning a stamp 120 over or adjacent to the imprint composition 104 (Figure 1A). The imprint composition 104 is imprinted with or otherwise contacted with the patterned stamp 120 (Figures 1B - 1C). The imprint composition 104 is converted into a nanoimprint film 106 (Figure 1D). In some examples, a curing process using heat and / or radiation (UV light) is used to convert the imprint composition 104 into the nanoimprint film 106. The stamp 120 is removed from the nanoimprint film 106 while disposed on the substrate 102 (Figures 1E - 1F).

[0033]

[0034] In some examples, the imprint composition is disposed on a substrate by spin coating, drop casting, blade coating, and / or other coating processes. The imprint composition is disposed on the substrate as a film or layer having a predetermined thickness. The thickness of the imprint composition ranges from about 50 nm, about 80 nm, about 100 nm, about 120 nm, about 150 nm, or about 200 nm to about 250 nm, about 300 nm, about 400 nm, about 500 nm, about 600 nm, about 800 nm, about 1,000 nm, about 1,200 nm, or thicker. For example, the thickness of the imprint composition is from about 50 nm to about 1,000 nm, from about 100 nm to about 1,000 nm, from about 200 nm to about 1,000 nm, from about 400 nm to about 1,000 nm, from about 500 nm to about 1,000 nm, from about 600 nm to about 1,000 nm, from about 800 nm to about 1,000 nm, from about 50 nm to about 600 nm, from about 100 nm to about 600 nm, from about 200 nm to about 600 nm, from about 400 nm to about 600 nm, from about 500 nm to about 600 nm, from about 50 nm to about 400 nm, from about 100 nm to about 400 nm, from about 200 nm to about 400 nm, or from about 300 nm to about 400 nm.

[0034]

[0035] The imprint composition is converted into an imprint material by exposing the imprint composition to heat, ultraviolet light, infrared light, visible light, microwave radiation, and / or any combination thereof. In one or more examples, when converting the imprint composition into an imprint material, the imprint composition is exposed to a light source having a wavelength of about 300 nm to about 365 nm. In other examples, when converting the imprint composition into an imprint material, the imprint composition is exposed to heat and maintained at a temperature of about 30 °C to about 100 °C for a period of about 30 seconds to about 1 hour. In some examples, the imprint composition is exposed to heat and maintained at a temperature of about 50 °C to about 60 °C for a period of about 1 minute to about 15 minutes.

[0035]

[0036] In one or more embodiments, one or more acrylates in the imprint composition can polymerize and / or oligomerize while generating (e.g., curing or otherwise converting) the imprint material.

[0036]

[0037] The following are some virtual examples of imprint compositions that can be generated by the embodiments described and discussed herein. JPEG2025111447000002.jpg55170JPEG2025111447000003.jpg55170JPEG2025111447000004.jpg56170

[0037]

[0038] In one or more embodiments described and discussed herein, the imprint material contains or comprises inorganic oxide nanoparticles (about 1 wt% to about 95 wt%), a methacrylate or acrylate or chloro - acrylate binder (about 0.1 wt% to about 10 wt%), high - boiling components such as diols, fatty acids, amines (about 0.1 wt% to about 5 wt%), and an ether or acetate solvent with an optimal viscosity (about 1 cP to 50 cP at about 23 °C) (about 5 wt% to about 20 wt%). The imprint material exhibits a high refractive index exceeding 1.7 with light transmittance exceeding 90% in the visible region at different weight percentages (about 1 wt% to about 50 wt%), and a feature shrinkage of about 1% to about 30% (less than 1% in some examples), enabling high - resolution large - area patterning. Nanoimprint lithography combined with a high - refractive - index material provides a unique method for manufacturing printable devices by directly imprinting this functional material. The patterned film has the final required optical functions and no additional etching process is needed. This approach combines the advantages of both a top - down lithography process for manufacturing highly controlled micro / nano structures and a bottom - up synthetic chemistry approach for designing and tuning the properties of the patterned film.

[0038]

[0039] In other embodiments described and discussed herein, an inorganic nanoparticle imprint composition is prepared that has a low viscosity, high refractive index (about 1 cP to about 50 cP at about 23 °C), is optically transparent, and is easy to process. The inorganic imprint composition may or may not be core - shell (about 2 to about 20 nm) and contains or can contain spherical or cubic or elliptical nanoparticles in a high - boiling ether or acetate - based solvent of about 1 wt% to about 80 wt%. The imprint composition can include or can contain: one or more methacrylate or acrylate binders (about 0.1 wt% to about 10 wt%), fatty acids (about 0.05 wt% to about 5 wt%), amines (about 0.05 wt% to about 5 wt%), PEG - based monomers (about 0.1 wt% to about 15 wt%), and a perfluorinated dispersant or siloxane dispersant (about 0.05 wt% to about 5 wt%) that acts as a surfactant. The final imprint composition remains optically transparent for six months or more at room temperature (about 23 °C) and can be used with or without filtration.

[0039]

[0040] In some embodiments, a scalable solvent - assisted soft NIL method is used to create large areas of nanopatterned features and structures. In this form of NIL, polydimethylsiloxane (PDMS) or other silicon stamps are used, many of which can be made from a single silicon master and each can be reused many times, thus minimizing costs. Thus, the area of the imprinted structure is mainly limited only by the size of the original patterned master. Feature sizes less than 100 nm can be replicated using PDMS. Briefly, the imprint composition is dispensed, filtered or as - is, onto the surface of the substrate. The substrate is rotated to create a film having a thickness of about 100 nm to about 400 nm. The PDMS mold is placed on the surface of the spin - on film and then thermally cured at about 50 °C to about 60 °C. UV curing is with a light source having a wavelength of about 300 nm to about 365 nm at about 10 Jcm -2 ~ about 50 Jcm -2It is performed with the power of . After curing the imprint composition to produce an imprint material, the PDMS stamp is removed in the direction of the grating or in the opposite direction of the grating. The released stamp is used again, and the imprint is further cured by heat and / or UV treatment to densify the material.

[0040]

[0041] Figure 2 shows a front view of an optical device 200 including a nanoimprint film 106 as shown in FIG. 1F according to one or more embodiments described and discussed herein. It should be understood that the optical device 200 described below is an exemplary optical device. In one or more embodiments, the optical device 200 is a waveguide combiner such as an extended reality waveguide combiner. In other embodiments, the optical device 200 is a flat optical device such as a metasurface. The optical device 200 includes a plurality of device structures 204. The device structure 204 may be a nanostructure having a sub-micron size, for example, a nano-sized dimension such as a critical dimension of less than 1 μm. In one or more embodiments, the region of the device structure 204 corresponds to one or more gratings 202 such as grating regions 202a and 202b. In one or more embodiments, the optical device 200 includes a first grating region 202a and a second grating region 202b, and each of the first grating regions 202a and 202b includes a plurality of device structures 204.

[0041]

[0042] The depth of the grating 202 can vary across the grating regions 202a and 202b in the embodiments described herein. In some embodiments, the depth of the grating 202 can vary smoothly across the first grating region 202a and the second grating region 202b. In one or more examples, the depth can range from about 10 nm to about 400 nm across one of the grating regions. The grating region 202a can range from about 20 mm to 50 mm on a given side in some examples. Thus, as some examples, the angle of change in the depth of the grating 202 can be on the order of 0.0005 degrees.

[0042]

[0043] In the embodiments described herein, the device structure 204 can be created using laser ablation. The laser ablation used here is used to generate a three-dimensional microstructure in the device material or, optionally, to create a variable-depth structure in a sacrificial layer covering the device material as part of a variable-depth structure process. By creating the optical structure 204 using laser ablation, fewer processing operations and higher variable-depth resolution than existing methods are possible.

[0043]

[0044] Embodiments of the present disclosure further relate to any one or more of paragraphs 1-46 below:

[0044]

[0045] 1. An imprint composition comprising nanoparticles; one or more solvents; a surface ligand; an additive; and an acrylate.

[0045]

[0046] 2. The imprint composition comprises: about 0.5 wt% to about 40 wt% nanoparticles; about 50 wt% to about 90 wt% solvent; about 5 wt% to about 40 wt% surface ligand; about 0.01 wt% to about 5 wt% additive; and about 0.1 wt% to about 10 wt% acrylate, each nanoparticle comprising a core and a shell, the core comprising titanium oxide, niobium oxide, or zirconium oxide, the shell comprising silicon oxide, zirconium oxide, niobium oxide, or any combination thereof, the core and the shell comprising different materials.

[0046]

[0047] 3. The imprint composition according to paragraph 1, comprising about 0.5 wt% to about 40 wt% nanoparticles; about 50 wt% to about 90 wt% solvent; about 5 wt% to about 40 wt% surface ligand; about 0.01 wt% to about 5 wt% additive; and about 0.01 wt% to about 5 wt% additive.

[0047]

[0048] 4. An imprint composition according to any one of paragraphs 1 to 3, comprising from about 1 wt% to about 25 wt% nanoparticles; from about 60 wt% to about 85 wt% solvent; from about 6 wt% to about 35 wt% surface ligand; from about 0.05 wt% to about 3 wt% additive; and from about 0.3 wt% to about 8 wt% acrylate.

[0048]

[0049] 5. An imprint composition according to any one of paragraphs 1 to 4, comprising from about 5 wt% to about 20 wt% nanoparticles; from about 65 wt% to about 80 wt% solvent; from about 7 wt% to about 31 wt% surface ligand; from about 0.09 wt% to about 1.5 wt% additive; and from about 0.5 wt% to about 6 wt% acrylate.

[0049]

[0050] 6. An imprint composition according to any one of paragraphs 1 to 5, wherein the nanoparticles have a shape selected from the group consisting of spherical, elliptical, rod-shaped, cubic, wire, cylindrical, rectangular, or combinations thereof.

[0050]

[0051] 7. An imprint composition according to any one of paragraphs 1 to 6, wherein the nanoparticles comprise a metal oxide or a diamond material.

[0051]

[0052] 8. An imprint composition according to any one of paragraphs 1 to 7, wherein the nanoparticles comprise niobium oxide.

[0052]

[0053] 9. An imprint composition according to any one of paragraphs 1 to 8, wherein each nanoparticle comprises a core and one or more shells.

[0053]

[0054] 10. An imprint composition according to paragraph 9, wherein the core comprises titanium oxide and the shell comprises silicon oxide, zirconium oxide, niobium oxide, or any combination thereof.

[0054]

[0055] 11. An imprint composition according to paragraph 9, wherein the core comprises niobium oxide and the shell comprises silicon oxide, zirconium oxide, or any combination thereof.

[0055]

[0056] 12. The imprint composition according to paragraph 9, wherein the core contains zirconium oxide and the shell contains silicon oxide.

[0056]

[0057] 13. The imprint composition according to any one of paragraphs 1 to 12, wherein each of the nanoparticles and / or the core independently has a diameter of about 2 nm to about 500 nm, and the shell has a thickness of about 0.1 nm to about 100 nm.

[0057]

[0058] 14. The imprint composition according to any one of paragraphs 1 to 13, wherein each of the nanoparticles and / or the core independently has a diameter of about 5 nm to about 200 nm, and the shell has a thickness of about 0.5 nm to about 60 nm.

[0058]

[0059] 15. The imprint composition according to any one of paragraphs 1 to 14, wherein each of the nanoparticles and / or the core independently has a diameter of about 10 nm to about 100 nm, and the shell has a thickness of about 1 nm to about 15 nm.

[0059]

[0060] 16. The imprint composition according to any one of paragraphs 1 to 15, wherein the surface ligand contains carboxylic acid, ester, amine, alcohol, silane, their salts, their complexes, or any combination thereof.

[0060]

[0061] 17. The imprint composition according to any one of paragraphs 1 to 16, wherein the surface ligand contains oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxysilane, octyltriethoxysilane, octenyltrimethoxysilane, octenyltriethoxysilane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxysilane, their salts, their esters, their complexes, or any combination thereof.

[0061]

[0062] 18. The imprinting composition according to any one of paragraphs 1 to 17, wherein the surface ligand is at a concentration of about 8 wt% to about 50 wt% based on the weight of the nanoparticles.

[0062]

[0063] 19. The imprinting composition according to any one of paragraphs 1 to 18, wherein the solvent comprises a nanoparticle dispersion solvent, an imprinting solvent, or a combination thereof.

[0063]

[0064] 20. The imprinting composition according to any one of paragraphs 1 to 19, wherein the solvent comprises a nanoparticle dispersion solvent, and the nanoparticle dispersion solvent comprises a glycol ether, an alcohol, an acetate, an ester thereof, a salt thereof, a derivative thereof, or any combination thereof.

[0064]

[0065] 21. The imprinting composition according to paragraph 20, wherein the nanoparticle dispersion solvent comprises a p-series glycol ether, an e-series glycol ether, or a combination thereof.

[0065]

[0066] 22. The imprinting composition according to paragraph 21, wherein the nanoparticle dispersion solvent comprises propylene glycol methyl ether acetate (PGMEA).

[0066]

[0067] 23. The imprinting composition according to paragraph 20, comprising the nanoparticle dispersion solvent at a concentration of about 0.5 wt% to about 20 wt%.

[0067]

[0068] 24. The imprinting composition according to any one of paragraphs 1 to 23, wherein the solvent comprises an imprinting solvent, and the imprinting solvent comprises an alcohol, an ester, a salt thereof, or a combination thereof.

[0068]

[0069] 25. The imprinting composition according to paragraph 24, wherein the imprinting solvent comprises ethyl lactate.

[0069]

[0070] 26. The imprint composition according to paragraph 24 or 25, wherein the imprint composition contains an imprinting solvent at a concentration of about 60 wt% to about 95 wt%.

[0070]

[0071] 27. The imprint composition according to any one of paragraphs 1 to 26, wherein the additive contains a diol, an alcohol having three or more alcohol groups, or any combination thereof.

[0071]

[0072] 28. The imprint composition according to paragraph 27, wherein the additive contains 1,2-propanediol.

[0072]

[0073] 29. The imprint composition according to any one of paragraphs 1 to 28, wherein the additive contains a perfluoroalkyl ether, a polyglycol, a fatty acid, a silane, a siloxane, or any combination thereof.

[0073]

[0074] 30. The imprint composition according to any one of paragraphs 1 to 29, wherein the additive contains a fluorosurfactant, a fluoro additive, and / or a fluorocarbon, glycolic acid ethoxylate oleyl ether, polyethylene glycol, polypropylene glycol, lauric acid, myristic acid, stearic acid, palmitic acid, dimethyldiethoxysilane, polydimethylsiloxane, polydiphenylsiloxane, hexamethylcyclotrisiloxane, octamethylcyclotetrasiloxane, silanol-terminated polydimethylsiloxane, vinyl-terminated polydimethylsiloxane, salts thereof, esters thereof, complexes thereof, or any combination thereof.

[0074]

[0075] 31. The imprint composition according to any one of paragraphs 1 to 30, wherein the additive is at a concentration of about 0.01 wt% to about 2.5 wt% based on the weight of the nanoparticles.

[0075]

[0076] 32. The imprint composition according to any one of paragraphs 1 to 31, wherein the acrylate comprises methacrylate, ethyl acrylate, propyl acrylate, butyl acrylate, monofunctional acrylate, difunctional acrylate, trifunctional acrylate, or other polyfunctional acrylate, or any combination thereof.

[0076]

[0077] 33. The imprint composition according to any one of paragraphs 1 to 32, wherein the acrylate comprises 3-(trimethoxysilyl)propyl methacrylate (3-MPS), 3-(trimethoxysilyl)propyl acrylate, di(ethylene glycol) methyl ether methacrylate, ethylene glycol methyl ether methacrylate, 2-ethylhexyl methacrylate, ethyl methacrylate, hexyl methacrylate, methacrylic acid, vinyl methacrylate, salts thereof, complexes thereof, or any combination thereof.

[0077]

[0078] 34. The imprint composition according to any one of paragraphs 1 to 33, wherein the acrylate is at a concentration of about 0.05 wt% to about 10 wt% based on the weight of the nanoparticles.

[0078]

[0079] 35. The imprint composition according to any one of paragraphs 1 to 34, wherein the imprint composition has a viscosity of about 1 cP to about 50 cP as measured at a temperature of 23°C.

[0079]

[0080] 36. A method of preparing an imprinted surface, comprising: disposing the imprint composition according to any one of paragraphs 1 to 35 on a substrate; contacting the imprint composition with a stamp having a pattern; converting the imprint composition into an imprint material; and removing the stamp from the imprint material.

[0080]

[0081] 37. The method according to paragraph 36, wherein the imprint composition is converted into an imprint material by exposure to heat, ultraviolet light, infrared light, visible light, microwave radiation, or any combination thereof.

[0081]

[0082] 38. The method according to paragraph 36 or 37, wherein converting the imprint composition into an imprint material further comprises exposing the imprint composition to a light source having a wavelength of about 300 nm to about 365 nm.

[0082]

[0083] 39. The method according to any one of paragraphs 36 to 38, wherein converting the imprint composition into an imprint material further comprises heating the imprint composition at a temperature of about 30 °C to about 100 °C for a period of about 30 seconds to about 1 hour.

[0083]

[0084] 40. The method according to any one of paragraphs 36 to 39, wherein converting the imprint composition into an imprint material further comprises heating the imprint composition at a temperature of about 50 °C to about 60 °C for a period of about 1 minute to about 15 minutes.

[0084]

[0085] 41. The method according to any one of paragraphs 36 to 40, wherein the imprint composition is disposed on the substrate by spin coating, drop casting, or blade coating.

[0085]

[0086] 42. The method according to any one of paragraphs 36 to 41, wherein the imprint composition is disposed on the substrate as a layer having a thickness of about 50 nm to about 1,000 nm.

[0086]

[0087] 43. The method according to any one of paragraphs 36 to 42, wherein the imprint composition is disposed on the substrate as a layer having a thickness of about 100 nm to about 400 nm.

[0087]

[0088] 44. The method according to any one of paragraphs 36 to 43, wherein the imprint composition has a refractive index of about 1.7 to about 2.0.

[0088]

[0089] 45. The method according to any one of paragraphs 36 to 44, wherein the pattern on the stamp is a one-dimensional pattern, a two-dimensional pattern, or a three-dimensional pattern.

[0089]

[0090] 46. The method according to any one of paragraphs 36 to 45, wherein the substrate contains glass.

[0090]

[0091] The foregoing relates to embodiments of the present disclosure, but other and further embodiments can be devised without departing from its basic scope, which is determined by the scope of the claims. All documents described herein are incorporated herein by reference, including priority documents and / or test procedures, to the extent they do not conflict with this text. As is apparent from the foregoing general description and specific embodiments, the forms of the present disclosure are illustrated and described, but various changes can be made without departing from the spirit and scope of the present disclosure. Accordingly, the present disclosure is not intended to be limited thereby. Similarly, the term "comprising" is considered to be synonymous with the term "including" for the purposes of U.S. law. Similarly, when there is a transitional phrase "comprising" before a composition, element, or group of elements, it is always understood to also include, or be construed as the reverse of, the same composition or group of elements with a transitional phrase such as "consisting essentially of", "consisting of", "selected from the group of consisting of", or "is" before the description of the composition, element, or group of elements.

[0091]

[0092] Certain embodiments and features have been described using a series of numerical upper limits and a series of numerical lower limits. It is to be understood that ranges are contemplated that include any combination of two values, e.g., any combination of any lower limit value and any upper limit value, any combination of any two lower limit values, and / or any combination of any two upper limit values, unless otherwise indicated. Specific lower limits, upper limits, and ranges are set forth in one or more of the following claims.

Claims

1. Nanoparticles; One or more solvents; Surface ligands; Additives; and Acrylates An imprint composition comprising the same.

2. About 1 weight percent (wt%) to about 25 wt% of said nanoparticles; About 60 wt% to about 85 wt% of said solvents; About 6 wt% to about 35 wt% of said surface ligands; About 0.05 wt% to about 3 wt% of said additives; and About 0.3 wt% to about 8 wt% of said acrylates The imprint composition according to claim 1, comprising the same.

3. The imprint composition according to claim 1, wherein said nanoparticles contain niobium oxide or diamond material, and said nanoparticles have a diameter of about 5 nm to about 200 nm.

4. The imprint composition according to claim 1, wherein each nanoparticle contains a core and a shell.

5. The imprint composition according to claim 4, wherein said core contains titanium oxide, niobium oxide, or zirconium oxide, said shell contains silicon oxide, zirconium oxide, niobium oxide, or any combination thereof, and said core and said shell contain different materials.

6. The imprint composition according to claim 4, wherein said core has a diameter of about 2 nm to about 500 nm, and said shell has a thickness of about 0.1 nm to about 100 nm.

7. The imprint composition according to claim 1, wherein said surface ligands contain oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxysilane, octyltriethoxysilane, octenyltrimethoxysilane, octenyltriethoxysilane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxysilane, salts thereof, esters thereof, complexes thereof, or any combination thereof, and said surface ligands have a concentration of about 8 wt% to about 50 wt% based on the weight of said nanoparticles.

8. The imprint composition according to claim 1, wherein said solvent contains a nanoparticle dispersion solvent, and said nanoparticle dispersion solvent contains glycol ethers, alcohols, acetates, esters thereof, salts thereof, derivatives thereof, or any combination thereof.

9. The nanoparticle dispersion solvent includes p-series glycol ethers, e-series glycol ethers, or a combination thereof, and the imprint composition includes the nanoparticle dispersion solvent at a concentration of about 0.5 wt% to about 20 wt%. The imprint composition according to claim 8.

10. The solvent includes an imprinting solvent, and the imprinting solvent includes alcohol, ester, salts thereof, or a combination thereof. The imprint composition includes the imprinting solvent at a concentration of about 60 wt% to about 95 wt%. The imprint composition according to claim 1.

11. The additive includes diol, alcohol having three or more alcohol groups, or any combination thereof. The imprint composition according to claim 1.

12. The additive includes perfluoroalkyl ether, polyglycol, fatty acid, silane, siloxane, or any combination thereof. The imprint composition according to claim 1.

13. The additive includes a fluorosurfactant, a fluoro additive, and / or a fluorocarbon, glycolic acid ethoxylate oleyl ether, polyethylene glycol, polypropylene glycol, lauric acid, myristic acid, stearic acid, palmitic acid, dimethyldiethoxysilane, polydimethylsiloxane, polydiphenylsiloxane, hexamethylcyclotrisiloxane, octamethylcyclotetrasiloxane, silanol-terminated polydimethylsiloxane, vinyl-terminated polydimethylsiloxane, salts thereof, esters thereof, complexes thereof, or any combination thereof. The imprint composition according to claim 1.

14. The additive is at a concentration of about 0.01 wt% to about 2.5 wt% based on the weight of the nanoparticles. The imprint composition according to claim 1.

15. The acrylate includes methacrylate, ethyl acrylate, propyl acrylate, butyl acrylate, monofunctional acrylate, difunctional acrylate, trifunctional acrylate, or other polyfunctional acrylates, or any combination thereof. The acrylate is at a concentration of about 0.05 wt% to about 10 wt% based on the weight of the nanoparticles. The imprint composition according to claim 1.

16. The imprint composition according to claim 1, having a viscosity of about 1 cP to about 50 cP and a refractive index of about 1.7 to about 2.0 when measured at a temperature of 23°C.

17. About 0.5 wt% to about 40 wt% of nanoparticles; About 50 wt% to about 90 wt% of a solvent; About 5 wt% to about 40 wt% of a surface ligand; About 0.01 wt% to about 5 wt% of an additive; and About 0.1 wt% to about 10 wt% of acrylate An imprint composition comprising: Each nanoparticle includes a core and a shell, The core includes titanium oxide, niobium oxide, or zirconium oxide, The shell includes silicon oxide, zirconium oxide, niobium oxide, or any combination thereof, and The core and the shell include different materials, The imprint composition.

18. Placing an imprint composition comprising nanoparticles, a solvent, a surface ligand, an additive, and acrylate on a substrate; Contacting the imprint composition with a stamp having a pattern; Converting the imprint composition into an imprint material; and Removing the stamp from the imprint material A method for preparing an imprinted surface, comprising:

19. The method according to claim 18, wherein converting the imprint composition into the imprint material further comprises exposing the imprint composition to a light source having a wavelength of about 300 nm to about 365 nm.

20. The method according to claim 18, wherein converting the imprint composition into the imprint material further comprises heating the imprint composition to a temperature of about 50°C to about 60°C for a period of about 1 minute to about 15 minutes.

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