Processing system

Abstract

To detect clogging of a filter more easily with a simple structure.SOLUTION: In order to achieve the above object, a processing system 1 of the invention includes: a supply device 210 which supplies a coolant filtered by a filter from a tank; and a processing device 200 which processes an object to be processed (a processed object) while using the coolant. The processing system 1 has a residual amount measurement part 500 configured to measure an amount of the coolant in the tank 211 and detects clogging of the filter based on a first measurement result by the residual amount measurement part when the processing of the processed object starts and a second measurement result by the residual amount measurement part during processing of the processed object.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a processing device that processes a workpiece, and a processing system that includes the processing device. [Background technology]

[0002] As a processing device, a method using a filter to remove chips generated when machining a workpiece using a coolant is known, but when the filter becomes clogged with chips, the coolant may overflow inside the device, so it is necessary to quickly detect the clogging of the filter.

[0003] Patent Document 1 proposes a method for detecting filter clogging by obtaining the amount of coolant that has passed through the filter and returned to the coolant storage tank, and comparing this amount with the amount of coolant discharged. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2022-112839 Summary of the Invention [Problem to be solved by the invention]

[0005] The configuration described in Patent Document 1 requires sensing or the like to obtain the amount of coolant at two locations: the coolant discharge portion and the amount of coolant returned to the coolant storage tank. The need for sensing or the like at two locations may increase the size and cost of the device. [Means for solving the problem]

[0006] In order to solve the above problems, the processing system of the present invention is a processing system comprising a supply device that supplies coolant liquid filtered through a filter from a tank, and a processing device that processes a workpiece using the coolant liquid, and is characterized in that it has a remaining amount measuring unit that measures the amount of coolant liquid in the tank, and detects clogging of the filter based on a first measurement result by the remaining amount measuring unit when processing of the workpiece begins and a second measurement result by the remaining amount measuring unit while processing the workpiece. [Effects of the Invention]

[0007] According to the present invention, filter clogging can be easily detected with a simple configuration. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is an external perspective view of a processing system according to an embodiment. [Figure 2] FIG. 1 is an external front view of a processing system according to an embodiment. [Figure 3] FIG. 1 is a perspective view of a processing machine according to an embodiment. [Figure 4] FIG. 2 is a control block diagram of the machining system according to the embodiment. [Figure 5] FIG. 1 is a diagram illustrating a processing system and an external device according to an embodiment. [Figure 6] Flowchart of detecting filter clogging during processing according to an embodiment [Figure 7] Flowchart of temporary suspension when filter clogging occurs according to the embodiment [Figure 8] Flowchart of detecting filter clogging during processing according to an embodiment DETAILED DESCRIPTION OF THE INVENTION

[0009] The embodiment will be described with reference to the drawings. First, the overall configuration of a processing system 1 of the embodiment will be described with reference to FIGS.

[0010] [Processing system] The machining system 1 includes a machining device 200 and a coolant supply device 210. In this embodiment, the machining device 200 and the coolant supply device 210 are shown as separate entities, but the coolant supply device 210 may be integrated into the machining device. The machining device 200 machines a workpiece using tools in a machining area 120. The machining device 200 houses the processing machine 100 in an exterior cover 101 serving as a housing. That is, the exterior cover 101 houses a spindle, a tool magazine, and other components described below. An openable door (not shown) is provided at the front opening of the exterior cover 101. When the openable door is open, the interior of the housing, i.e., the machining area 120 described below, is accessible, allowing for workpiece replacement and manual tool replacement.

[0011] The coolant supply device 210 supplies coolant, which is a liquid for cooling workpieces, tools, etc., into the machining area 120 of the machining apparatus 200. The coolant supply device 210 of this embodiment is disposed below the machining apparatus 200 and includes a tank 211, a pump 212, a flow meter 213, and a solenoid valve 214, which are connected by pipes 220 to 224. The arrows shown in FIGS. 1 and 2 indicate the path and direction of coolant flow. The tank 211 contains coolant, and the pump 212 sucks the coolant from the tank 211 via the pipe 220 and sends it to the pipe 221. The coolant sent to the pipe 221 passes through the flow meter 213 via the pipe 222. The flow meter 213 measures the flow rate of the coolant supplied from the pump 212 and sends a signal to a CPU 85 (FIG. 4), which is a main control unit of the machining system 1 (described later). A strainer 215 is provided midway along the pipe 222 to remove foreign matter from within the pipe path.

[0012] The coolant liquid that has passed through the flow meter 213 is sent to a pipe 223 and reaches a solenoid valve 214 provided on the pipe 223. The solenoid valve 214 opens and closes the flow path and is controlled by the above-mentioned CPU 85 to start and stop the supply of the coolant liquid to the machining device 200. The pipe 223 is connected to the machining device 200, and the coolant liquid that has passed through the solenoid valve 214 in an open state is supplied into the machining area 120 via a coolant discharge unit 202 serving as a coolant liquid supply unit provided in a spindle head 201 of the machining device 200. When the solenoid valve 214 is closed, the coolant liquid supplied from the pump 212 is returned to the tank 211 via a pipe 224 branching from the pipe 221.

[0013] The coolant discharge unit 202 is, for example, a nozzle provided around the spindle 11 (FIG. 3) of the spindle head 201, and supplies the coolant toward a tool held by the spindle 11 or a workpiece, which is an object to be machined, by discharging the coolant downward. The coolant supplied from the coolant discharge unit 202 accumulates in the lower part of the machining area 120 and is discharged from the lower part of the machining device 200. A tray 216 (filtering device) is provided below the machining device 200, which receives the coolant discharged from the machining device 200 and returns it to the tank 211. In this way, the machining system 1 of this embodiment uses the coolant to cool the tool or workpiece during machining. Note that this embodiment is provided with an air blow unit 87 (FIG. 4) that blows air toward the tool or the like.

[0014] [Processing machine] Next, the processing machine 100 arranged inside the exterior cover 101 of the processing device 200 will be described with reference to Fig. 3. The processing machine 100 includes a frame 1xz as a movement mechanism support member, a first movement mechanism (Z-axis movement mechanism) 10, a second movement mechanism (X-axis movement mechanism) 20, and a third movement mechanism (Y-axis movement mechanism) 30, each supported by the frame 1xz, a support mechanism 40 that supports a workpiece W as a processing target, a first rotation mechanism (rotation device) 50 and a second rotation mechanism 60 as rotation means capable of rotating the support mechanism 40, a tool magazine 70, and an electrical unit 80. The first movement mechanism 10, the second movement mechanism 20, and the third movement mechanism 30 constitute a movement device 100A that serves as movement means for relatively moving a spindle 11 and a holding device 41 (described later) in the three axial directions of X, Y, and Z.

[0015] The first movement mechanism 10 is supported by the first frame portion 3 of the frame 1xz via the second movement mechanism 20, and is capable of moving the spindle 11 in the Z-axis direction (vertical direction, first direction). A tool 12 is detachably attached to the spindle 11 via a tool holder. In other words, the spindle 11 is capable of gripping the tool 12. The spindle 11 is rotationally driven by a motor 13. The first movement mechanism 10 has a motor 14 and a guide shaft (not shown) arranged in the Z-axis direction, and is driven by the motor 14 to reciprocate (raise and lower) the spindle 11 in the Z-axis direction along the guide shaft. The spindle 11 is movably supported on the guide shaft via a Z-axis support member (not shown). The guide shaft and the Z-axis support member are covered by a cover 17.

[0016] The second movement mechanism 20, which serves as a movement unit, is supported by the first frame portion 3 of the frame 1xz and is capable of moving the main shaft 11 together with the first movement mechanism 10 in the X-axis direction (predetermined direction, horizontal direction, second direction) perpendicular to the Z-axis direction. The second movement mechanism 20 has a motor 21, a guide shaft 22 arranged in the X-axis direction, and rails 23 and 24 arranged in the X-axis direction. Driven by the motor 21, the first movement mechanism 10 reciprocates along the guide shaft 22 in the X-axis direction. Specifically, the guide shaft 22, which is a threaded shaft, is inserted into a nut member 19 fixed to a holder 18 that holds the main shaft 11 and the first movement mechanism 10. The holder 18 is also provided with engagement portions 25 and 26 that engage with the rails 23 and 24. When the guide shaft 22 is rotated by the motor 21, the nut member 19, which is threadedly engaged with the guide shaft 22, moves along the guide shaft 22. The holding portion 18 to which the nut member 19 is fixed, and the spindle 11 and first moving mechanism 10 held by the holding portion 18, move in the X-axis direction based on the engagement between the engaging portions 25, 26 and the rails 23, 24. The second frame portion 4 is connected to the lower end of the first frame portion 3 so as to extend in the Y-axis direction, and the first frame portion 3 and the second frame portion 4 are further connected by a reinforcing plate 29.

[0017] The third movement mechanism 30 is supported on the underside of the second frame portion 4 of the frame 1xz, and is capable of moving the support mechanism 40 in the Y-axis direction (horizontal direction, third direction) perpendicular to the Z-axis direction and the X-axis direction. The third movement mechanism 30 has a motor 32 and a guide shaft (not shown) arranged in the Y-axis direction, and is driven by the motor 32 to move the support mechanism 40 back and forth in the Y-axis direction along the guide shaft. As shown in FIG. 3, the side of the gantry 2 facing the support mechanism 40 in the Y-axis direction is open. The third movement mechanism 30 is capable of moving the support mechanism 40 in the Y-axis direction together with the second rotation mechanism 60 and the first rotation mechanism 50, as will be described in detail later.

[0018] The support mechanism 40 supports a workpiece W, such as a dental prosthesis, as an object to be machined by the tool 12. The support mechanism 40 has a holding device 41 as a holding part that holds the workpiece W, and a support part 42 whose both ends are connected to the rotating part 51 of the first rotating mechanism 50 and that supports the workpiece W via the holding device 41.

[0019] The first rotation mechanism 50, which serves as a rotation device, can rotate the support mechanism 40 around the a-axis, which serves as a rotation axis perpendicular to the Z-axis direction. In this embodiment, the a-axis is parallel to the X-axis direction. The first rotation mechanism 50 includes a support frame 53 that rotatably supports the rotating unit 51 and a motor that rotates the rotating unit 51. The support frame 53 is formed in a generally U-shape so as to surround the periphery of the support mechanism 40, and is composed of a first support part 53a that supports the motor and the rotating unit 51 on one side (the driving side), a second support part 53b that supports the rotating unit on the other side (the driven side), and a connecting part 53c that connects the first support part 53a and the second support part 53b.

[0020] The rotating part 51 supported by the first support part 53a and the rotating part supported by the second support part 53b are arranged to face each other in the a-axis direction and to be rotatable around the a-axis as a rotation axis. Both ends of the support mechanism 40 in the a-axis direction are supported by the rotating parts on both sides. As a result, the first rotation mechanism 50 supports the support mechanism 40 rotatably around the a-axis (X-axis).

[0021] The first rotation mechanism 50 can rotate at least 180° and can turn over the workpiece W supported by the support mechanism 40. In this embodiment, the first rotation mechanism 50 can rotate the support mechanism 40 360° around the a-axis.

[0022] The second rotation mechanism 60 can rotate the support mechanism 40 around the b-axis, which is another rotation axis perpendicular to the Z-axis direction and the a-axis. In this embodiment, the b-axis is parallel to the Y-axis direction. The second rotation mechanism 50 has a rotating unit to which the support frame 53 of the first rotation mechanism 50 is attached, and a motor that rotates and drives the rotating unit. The rotating unit is attached to a connecting portion 53c of the support frame 53, and is rotated by the motor to rotate the support frame 53 around the b-axis.

[0023] The tool magazine 70 serving as a tool holder can store a plurality of tools and is disposed adjacent to the first rotation mechanism 50. The tool magazine 70 can be moved in the Y-axis direction together with the support mechanism 40 and the like by the third movement mechanism 30. However, even if the support mechanism 40 rotates around the a-axis, the tool magazine 70 does not rotate, and even if the support mechanism 40 rotates around the b-axis, the tool magazine 70 does not rotate.

[0024] In the tool magazine 70, a plurality of types of tools, each formed integrally with the tool holder 12a, are held and arranged in a plurality of rows along the Y-axis direction, and the tools attached to the spindle 11 are changeable.

[0025] In addition, in this embodiment, before and after storing or removing the tool, an operation is performed to confirm whether or not the tool 12 is being held by the spindle 11 by bringing the tip of the tool 12 into contact with a touch sensor 96, which serves as tip detection means capable of detecting the tip of the tool 12 held by the spindle 11.

[0026] The electrical unit 80 is attached to the inside of the frame 1xz. That is, the electrical unit 80 is disposed on the upper side of the second frame portion 4, opposite to the side on which the first movement mechanism 10 of the first frame portion 3 is supported. Such an electrical unit 80 controls the machining system 1 or the machining device 200, and includes a control board that controls the drive of the motors of the spindle and each axis, and a plurality of control units that calculate pulses to be output to the motors from signals from the rotary encoders of the corresponding motors and appropriately control the rotation of the corresponding motors.

[0027] The processing machine 100 of this embodiment is an NC processing machine that performs automatic processing under computer control. Specifically, processing data is created by a CAD / CAM system using an external terminal such as a personal computer, and the workpiece W is processed by numerical control based on this data. For this purpose, an external terminal (external device 800) such as a personal computer that issues commands to the processing machine 100 is connected to the processing machine 100. Note that the processing machine 100 itself may be provided with a computer equipped with a CPU and memory capable of numerical control. The control means described below may be provided in either the processing machine or a computer connected to the processing machine.

[0028] For example, when a dental prosthesis (dental material) is produced using the processing machine 100, data of the dental prosthesis measured by a three-dimensional measuring device is transferred to a CAD / CAM system, and processing data is created by the CAD / CAM system. Then, based on this processing data, the processing machine 100 is controlled to cut the workpiece W with the tool 12, thereby producing the dental prosthesis.

[0029] Next, the control configuration within the electrical unit 80 will be described with reference to Fig. 4. The electrical unit 80 includes a CPU 85 as control means (main control unit), an input / output port (I / O) 86i, motor control units 84x, 84y, and 84z, a spindle control unit 84c, an a-axis control unit 84a, and a b-axis control unit 84b. The CPU 85 performs various calculations using memory 86m based on input data and signals, and sends instructions on rotation speed and position to the connected control units 84x, 84y, 84z, 84a, 84b, and 84c, which serve as servo amplifiers.

[0030] The I / O 86i is connected to the compressor 350, the pump 212, the touch sensor 96, the air pressure detection sensor 91, the flow meter 213, and the solenoid valve 214. The compressor 350 supplies air to an air blow unit 87 of the processing device 200. The air blow unit 87 blows the air supplied from the compressor 350 onto the tool 12 attached to the spindle 11 to cool the tool 12 and remove chips adhering to the tool 12. The pressure of the air supplied to the air blow unit 87 is detected by an air pressure detection sensor 91, and a detection signal of the air pressure detection sensor 91 is sent to the CPU 85 via the I / O 86i.

[0031] As described above, the pump 212 supplies coolant to the coolant discharge unit 202. The coolant discharge unit 202 supplies the coolant toward the tool 12 and the workpiece. As described above, the touch sensor (tool length sensor) 96 as a tip detecting means is used to confirm whether or not the tool 12 is held by the spindle 11 during a tool changing operation, and also detects the length of the tool 12 and sends a signal to the CPU 85.

[0032] Motor control units 84x, 84y, and 84z provided in the CPU 85 drive the X, Y, and Z motors based on commands from the CPU 85. Each of the motors 21, 32, and 14 is provided with an encoder as a position detection means. The encoder detects, for example, the number of rotations, rotation angle, and rotation direction of the rotation shaft of each of the motors 21, 32, and 14. The encoder then detects the amount of actual movement of each of the stages x, y, and z (actual position, the relative position of the spindle 11 with respect to the holding device 41) by driving each of the motors 21, 32, and 14.

[0033] The main shaft control unit 84c controls the rotation speed of the main shaft (spindle) by controlling a motor (not shown) that rotates the main shaft 11. Furthermore, the a- and b-axis control units 84a and 84b drive the a-axis and b-axis motors 54 and 62 based on commands from the CPU 85. These motors 54 and 62 are also provided with encoders 54a and 62a, which can detect the rotation angles of the support mechanism 40 around the a-axis and b-axis.

[0034] In this way, the CPU 85 controls each part of the processing machine 100, thereby performing predetermined processing on the workpiece W held as described above. The CPU 85 executes each operation and process described below by loading a program into storage means such as the memory 86m. When detecting the amount of coolant by weight, a tank weight detection sensor 97 may be disposed in the part of the tank that receives the weight, and the amount of coolant may also be measured by a water level gauge or water surface sensor.

[0035] [Remaining amount measuring section] The processing system includes a remaining amount measuring unit 500 that measures the remaining amount of coolant in the tank 211. The sensor may be a sensor that measures weight, such as a strain gauge, or may measure the liquid level in the tank with a laser sensor or the like.

[0036] [External device] 5, the machining system 1 includes a machining device 200 that machines a workpiece, and an external device 800 that transmits an NC file to the machining device 200. The external device 800 includes an NC generation unit 820 that generates an NC file, and an application unit 810 that operates the machining system 1 using the NC file. The external device 800 may be located inside the machining device 200. The external device 800 may be, for example, a PC or the like that serves as an information processing device.

[0037] [Filter detection flow] A flowchart for detecting clogging of a filter according to an embodiment of the present invention is shown in Fig. 6. This flowchart is executed from the start of processing of a workpiece.

[0038] In S501, the remaining amount of coolant measured by the remaining amount measuring unit 500 is stored in the memory 86m as the remaining amount Xs at the start of machining (first measurement result).

[0039] In S502, the pump 212 is operated and the solenoid valve 214 is opened. In S503, the process waits until the coolant flow rate measured by the flow meter 213 reaches or exceeds the flow rate threshold Tf. The flow rate threshold Tf here is a flow rate that can distinguish between the coolant circulating state and the stopped state. For example, it may be set to an intermediate value between the flow rate in the circulating state and the flow rate in the stopped state. If the coolant flow rate does not exceed the threshold, an error may be detected and machining may be stopped.

[0040] In S510, the process waits for the remaining amount of coolant measured by the remaining amount measuring unit 500 to decrease by more than the starting decrease amount threshold Xd from the remaining amount Xs at the start of machining. The starting decrease amount threshold Xd here is a threshold for determining whether the coolant has circulated within the machining system 1. For example, the remaining amount in the tank 211 decreases when circulation begins, but the intermediate value of this decrease may be used. If the remaining amount of coolant has decreased by more than the starting decrease amount threshold Xd from the remaining amount Xs at the start of machining, the process proceeds to S512; if not, the process proceeds to S511. When measuring the remaining amount of coolant by the weight of the tank, it is easier to detect if a threshold is provided.

[0041] In S511, a residual quantity measuring unit error is detected, processing is stopped, and this flowchart is stopped.

[0042] In S512, the workpiece machining operation is started.

[0043] In S520, the process waits for the workpiece machining operation to finish. Until the machining operation finishes, the remaining amount of coolant measured by the remaining amount measuring unit 500 (second measurement result) is monitored. If the remaining amount of coolant has decreased by more than the filter clogging judgment threshold Xf from the remaining amount Xs at the start of machining, the process proceeds to S521. If the machining is finished without the remaining amount of coolant having decreased by more than the filter clogging judgment threshold Xf from the remaining amount Xs at the start of machining, the process proceeds to S531.

[0044] In S520, it is determined that a filter blockage has occurred, and the process moves to the pause flow described later. However, instead of pausing, it may be possible to treat it as an error and stop the processing.

[0045] In S531, the pump 212 is stopped and the solenoid valve 214 is closed.

[0046] In S532, the remaining amount Xe at the end of machining is measured by the remaining amount measuring unit 500. At this time, the measurement may be performed after a certain time has elapsed using a timer or the like until the coolant liquid circulation has completely stopped.

[0047] In S540, the remaining amount Xs at the start of processing is compared with the remaining amount Xe at the end of processing, and if the remaining amount Xe at the end of processing is lower than the remaining amount Xs at the start of processing, the process proceeds to S541. Otherwise, this flow ends.

[0048] In S541, it is determined that a filter blockage has occurred, and the process moves to the pause flow described later. However, instead of pausing, it may be possible to treat it as an error and stop the processing.

[0049] [Pause flow when filter is clogged] The temporary stop flow when the filter is clogged in this embodiment is shown in Figure 7. When a clogged filter is detected during processing, recovery is performed according to this flow.

[0050] In S550, the spindle 11 is stopped, the pump 212 is stopped, and the solenoid valve 2104 is closed. The first moving mechanism 10, the second moving mechanism 20, the third moving mechanism 30, the first rotating mechanism 40, and the second rotating mechanism 50 are moved to retracted positions. At this time, it is desirable that the retracted positions be positions that allow an operator to easily attach, detach, and clean the filter 203. Furthermore, the order in which the moving mechanisms are operated is also determined in consideration of device interference, and it is desirable that the third moving mechanism 30 be raised and retracted.

[0051] In S551, the fact that the processing system is in a paused state is displayed via the application unit 810 of the external device 800. The display mechanism of the processing system 1 may be used to display the information.

[0052] In S552, the worker removes the chips clogging the filter 203 and the filter in the tray 216. When the removal work is completed, the worker instructs the application unit 810 of the external device 800 that the cleaning work is complete. At this time, a button for notifying the processing system 1 of the completion of the work may be provided and used to notify the completion of the work.

[0053] In S560, the remaining amount of coolant measured by the remaining amount measuring unit 500 is re-stored in the memory 86m as the remaining amount Xs at the start of processing. The stored value may be updated, or may be stored as the weight when processing resumes in another area.

[0054] In S561, the processing operation is resumed, the pump 212 is operated, and the solenoid valve 214 is opened. This completes the temporary suspension due to a clogged filter.

[0055] [Other Examples] FIG. 8 shows a flow chart of a filter clogging detection method according to another embodiment of the present invention.

[0056] FIG. 8 shows the detection of filter clogging when a circulation check operation is performed by operating the pump 212 and opening the solenoid valve 214 before starting machining to circulate the coolant.

[0057] In S571, the coolant remaining amount measured by the remaining amount measuring unit 500 is stored in the memory 86m as the remaining amount Xsa at the start of circulation (first measurement result).

[0058] In S572, the circulation confirmation operation is started.

[0059] In S573, it is determined whether the elapsed time i from the start of the circulation confirmation operation has reached the timeout time T. If the timeout time T has not been reached, the process proceeds to S574, and if it has been reached, the process proceeds to S575.

[0060] In S574, the remaining amount of coolant is monitored to confirm whether circulation is occurring. If the remaining amount Xsa at the start of circulation has decreased by more than the circulation confirmation threshold value Xg, the process proceeds to S575, and if not, the process proceeds to S576.

[0061] In S575, a circulation confirmation NG error occurs, processing is not started, and this flowchart is stopped.

[0062] In S576, the remaining coolant level is acquired and a determination is made as to whether the coolant level has stabilized. To determine whether the coolant level has stabilized, the measured coolant level is converted to a value that reduces variance, and the converted value is acquired at regular intervals. The difference between the previously acquired value and the currently acquired value is acquired multiple times. A moving average, for example, can be used to reduce variance. In the first stage of circulation confirmation, since the difference value is small at the beginning of the decrease, the most recent difference value is used to determine that the decrease has begun. In the second stage, since the difference value becomes smaller as the coolant level stabilizes, the coolant level is determined to be stable when all acquired values fall within a predetermined range. If it is confirmed that the coolant level has stabilized, proceed to S577. If it is not stable, count up the elapsed time i since the start of the circulation confirmation operation and return to S573.

[0063] In S577, the remaining amount of coolant when it stabilizes is measured by the remaining amount measuring unit 500 and stored in memory 86m as the remaining amount at the start of machining Xsb. Because Xsb changes due to factors such as chips accumulating on the tray 216, by performing a circulation check operation, it is possible to accurately measure the amount of coolant that has decreased since the start of machining and detect filter clogging.

[0064] In S578, workpiece machining operation begins.

[0065] In S579, the process waits for the machining operation to finish. Until the machining operation finishes, the remaining amount of coolant measured by the remaining amount measuring unit 500 is monitored. If the remaining amount of coolant has decreased by more than the filter clogging judgment threshold Xf from the remaining amount Xsb at the start of machining, the process proceeds to S580 and transitions to the pause flow described above. This makes it possible to detect a decrease in the remaining amount of coolant due to a clogged filter without being affected. However, it is also possible to stop machining as an error rather than pausing the machine. If the amount has not decreased, the process proceeds to S581.

[0066] In S581, the processing is completed.

[0067] In S582, the pump 212 is stopped and the solenoid valve 214 is closed, and this flow ends.

[0068] As described above, according to this embodiment, a single remaining amount measuring unit 500 installed in the tank 211 can detect filter clogging, thereby preventing the coolant liquid from overflowing outside the processing device 200. [Explanation of symbols]

[0069] 100...Processing equipment 210 Coolant supply device 211 Tank 212 Pump 216···Tray (filtration device) 500... Remaining amount measuring unit

Claims

1. a supply device that supplies the coolant liquid filtered by the filter from a tank; a processing device that processes a workpiece while using the coolant liquid, a remaining amount measuring unit that measures the amount of the coolant liquid in the tank, a first measurement result by the remaining amount measuring unit when processing of the object is started; and a processing system that detects clogging of the filter based on a second measurement result by the remaining amount measuring unit while the object is being processed.

2. a storage means for storing a predetermined threshold value; 2. The processing system according to claim 1, wherein the filter is determined to be clogged when the difference between the first measurement result and the second measurement result is equal to or greater than the threshold value.

3. When the processing is temporarily stopped and then resumed after the clogging of the filter occurs, the remaining amount measuring unit measures again; 2. The processing system according to claim 1, wherein clogging of the filter is detected based on the result of the remeasurement and the second measurement result.

4. The processing system described in claim 1, characterized in that the first measurement result is obtained after a preliminary operation of circulating coolant before starting processing of the workpiece, and before starting processing, the amount of coolant stored in the tank is measured by the remaining amount measuring unit.

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