Low dew point space forming device and low dew point space forming system

Abstract

To provide a low dew point space forming device and system capable of more reducing leakage of dry air.SOLUTION: A low dew point space forming device 1000 of the present invention comprises: a hollow housing 1 that forms a predetermined space; an air flow rectifying unit 2 that rectifies air having a predetermined first dew point temperature in one direction from an air supply opening SAP formed in the housing 1 and supplies it into the housing 1; an exhaust unit 3 that exhausts air from the housing 1 through an exhaust opening DAP formed in the housing 1 so as to face the air supply opening SAP through the space; and a brush 4 attached to a work opening WAP formed on a first surface of the housing 1 having a first normal that intersects with the one direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a low dew point space forming device for forming a space with a low dew point environment, and a low dew point space forming system using the same. [Background technology]

[0002] Depending on the nature of the work, it may be necessary to perform the work in a space shielded from the outside, and devices that provide such a space include, for example, glove boxes, draft chambers, dry rooms (low dew point space forming devices), etc. One example of such a device is the local workspace device disclosed in Patent Document 1.

[0003] The local workspace device disclosed in Patent Document 1 comprises a housing that separates an external workspace from an internal workspace and has an opening formed in part that connects the workspace to the external space, an air supply and exhaust device that connects to the workspace via a duct and adjusts the pressure in the workspace to a different pressure from the external pressure, and a brush with flexible bristles attached to a brush base, with at least two of the brushes positioned along the edge of the opening so that the tips of the bristles are close to each other and face each other, and the bristles cover the opening. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6031687 Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the local workspace device disclosed in Patent Document 1 is used in a dry booth, if the workspace is placed at a positive pressure higher than the outside air pressure, dry air, which is air with a predetermined dew point temperature, will leak from the brushes arranged along the edge of the opening. The dry air is generated by a relatively expensive dry air generator (dehumidifier), and if the dry air leaks, it will be expensive to operate the dry booth.

[0006] The present invention has been made in consideration of the above circumstances, and its object is to provide a low dew point space forming device that can further reduce dry air leakage and a low dew point space forming system using the same. [Means for solving the problem]

[0007] After extensive investigation, the inventors have found that the above object can be achieved by the present invention. Specifically, a low dew point space forming device according to one aspect of the present invention includes a hollow housing forming a predetermined space; an airflow rectifying unit that unidirectionally rectifies air having a predetermined first dew point temperature from an air intake opening formed in the housing and supplies the air into the housing; an exhaust unit that exhausts air from the housing through an exhaust opening formed in the housing facing the air intake opening through the space; and a brush attached to an access opening formed in a first surface of the housing, the first surface having a first normal line intersecting the unidirectional line. Preferably, in the above-described low dew point space forming device, the brush has an opening ratio greater than 0% and equal to or less than 1%. Preferably, in the above-described low dew point space forming device, the brush is a channel-type brush.

[0008] Such a low dew point space forming device flows straightened air in one direction that intersects with the first normal of the first surface of the housing, which forms the work opening to which the brush is attached, from air intake openings that face each other in the same direction to exhaust openings, thereby further reducing leakage of the air (dry air) from the brush.

[0009] In another aspect, in the above-mentioned low dew point space forming device, the exhaust opening is formed between the first surface and a second surface of the housing that faces the first surface in the normal direction of the first normal line, closer to the first surface. Preferably, in the above-described low dew point space forming device, the housing is a rectangular parallelepiped box having a first panel member (e.g., a front panel member) that forms the first surface (e.g., the front surface) and a second panel member (e.g., a rear panel member) that forms the second surface (e.g., the rear surface), the air intake opening is formed in a third panel member (e.g., an upper panel member) that forms a third surface (e.g., the upper surface) of the housing on one side in the one direction, the exhaust opening is formed in a fourth panel member (e.g., a lower panel member) that forms a fourth surface (e.g., the lower surface) of the housing on the other side in the one direction, a normal direction of the first normal (e.g., the front-rear direction, the depth direction, the Y direction) is orthogonal to the one direction (e.g., the up-down direction, the Z direction), and the exhaust opening is formed in the fourth panel member so as to follow the first panel member in other directions (e.g., the left-right direction, the X direction) that are orthogonal to the normal direction of the first normal and to the one direction, respectively.

[0010] Such a low dew point space forming device forms an exhaust opening near the first surface of the housing which has a working opening to which a brush is attached, so that the air (dry air) can be exhausted from the exhaust opening more preferentially (effectively) than leakage from the brush, thereby further reducing leakage of the air (dry air) from the brush.

[0011] In another aspect, the above-described low dew point space forming device further includes a perforated plate disposed within the housing between the air inlet opening and the exhaust opening, closer to the air inlet opening and along a plane having the one direction as a second normal. Preferably, in the above-described low dew point space forming device, the perforated plate is a punched plate.

[0012] Such a low dew point space forming device further includes a perforated plate, so that the straightened air can flow between the perforated plate and the exhaust opening even if the area of the housing is larger than the area of the air intake opening in the plane.

[0013] In another aspect, the above-mentioned low dew point space forming device further comprises an air pressure measuring unit that measures the air pressure inside the housing, an air supply volume adjusting unit that adjusts the amount of air supplied into the housing, an exhaust volume adjusting unit that adjusts the amount of air exhausted from the housing, and a control unit that controls at least one of the air supply volume adjusting unit and the exhaust volume adjusting unit so that the air pressure inside the housing becomes positive based on the measurement result measured by the air pressure measuring unit.

[0014] Such a low dew point space forming device controls the air pressure inside the housing to be a positive pressure higher than the air pressure outside the housing, thereby preventing outside air from entering the housing from the outside, and therefore preventing the influence of outside air on the dew point temperature of the air inside the housing.

[0015] In another aspect, the above-mentioned low dew point space forming device further includes a glove section that includes one or more pairs of gloves and is attached to the first surface of the housing outside or inside the work opening. Preferably, in the above-mentioned low dew point space forming device, the work opening is formed to extend in one direction, and the glove section further includes a holding member that holds the gloves and a guide member that movably guides the holding member along the one direction, and the guide member is attached to the first surface of the housing outside or inside the work opening.

[0016] Such a low dew point space forming device further includes a glove portion equipped with a glove, so that by putting a hand in the glove, the influence of moisture emitted from the hand on the dew point temperature of the air inside the housing can be prevented.

[0017] In another aspect, the above-described low dew point space forming device further includes an anti-static sheet that is arranged so as to overlap the brush along the working opening and that removes static electricity generated on the brush.

[0018] Such a low dew point space forming device is provided with a static electricity removing sheet, so that static electricity generated on the brush during operation can be removed.

[0019] A low dew point space forming system according to another aspect of the present invention comprises any of the above-mentioned low dew point space forming devices arranged in a dry room, a first dehumidifier that generates air having the first dew point temperature and supplies it to the air flow straightening section, and a second dehumidifier that generates air having a predetermined second dew point temperature higher than the first dew point temperature and supplies it to the dry room.

[0020] This makes it possible to provide a low dew point space forming system including any of the above-mentioned low dew point space forming devices. [Effects of the Invention]

[0021] The low dew point space forming device according to the present invention can further reduce leakage of dry air. According to the present invention, a low dew point space forming system including this low dew point space forming device can be provided. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a diagram showing the configuration of a low dew point space forming system according to an embodiment. [Figure 2] 3 is a diagram illustrating the configuration of a low dew point space forming device provided in the low dew point space forming system. FIG. [Figure 3] FIG. 2 is a diagram for explaining a low dew point space forming device according to an embodiment. [Figure 4] 3 is a diagram for explaining low dew point space forming devices of first to third comparative examples. FIG. [Figure 5] FIG. 10 is a diagram showing the change over time in dew point temperature in the low dew point space forming device of the embodiment by ventilation frequency in the first simulation. [Figure 6] FIG. 10 is a diagram showing the change over time in dew point temperature in the low dew point space forming device of the first comparative example, by ventilation rate, in the first simulation. [Figure 7] FIG. 10 is a diagram showing the change over time in dew point temperature in the low dew point space forming device of the second comparative example by ventilation rate in the first simulation. [Figure 8]FIG. 10 is a diagram showing the change over time in dew point temperature in the low dew point space forming device of the third comparative example by ventilation rate in the first simulation. [Figure 9] FIG. 2 is a diagram showing the change over time in dew point temperature in each of the low dew point space forming devices of the example and the first to third comparative examples at an air change rate of 30 times / hour. [Figure 10] FIG. 10 is a diagram for explaining a second simulation in which a hand is placed in the low dew point space forming device for one minute in each of the low dew point space forming devices of the example and the first to third comparative examples. [Figure 11] FIG. 10 is a diagram showing the dew point temperature distribution immediately before the hand is removed for each opening ratio of the brush in the low dew point space forming device of the embodiment in the second simulation. [Figure 12] FIG. 10 is a diagram showing the dew point temperature distributions immediately before the low dew point space forming devices of the first to third comparative examples are removed in the second simulation. [Figure 13] FIG. 10 is a diagram showing the change in dew point temperature over time in each of the low dew point space forming devices of the example and the first to third comparative examples in the second simulation. [Figure 14] FIG. 4 is a diagram showing the relationship between the brush opening ratio and the maximum dew point temperature in the low dew point space forming device of the embodiment. [Figure 15] FIG. 4 is a diagram for explaining a low dew point space forming device in a first modified embodiment. [Figure 16] FIG. 10 is a diagram for explaining a low dew point space forming device in a second modified embodiment. [Figure 17] 10 is a diagram for explaining a low dew point space forming device in a third modified embodiment. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0023] Hereinafter, one or more embodiments of the present invention will be described with reference to the drawings. However, the scope of the invention is not limited to the disclosed embodiments. In addition, components with the same reference numerals in each drawing indicate the same components, and their description will be omitted as appropriate. In this specification, when referring to a general term, a reference numeral without a subscript is used, and when referring to an individual component, a reference numeral with a subscript is used.

[0024] Fig. 1 is a diagram showing the configuration of a low dew point space forming system in an embodiment. Fig. 2 is a diagram for explaining the configuration of a low dew point space forming device provided in the low dew point space forming system. Fig. 2A shows the structural configuration, and Fig. 2B shows the electrical configuration.

[0025] 1, a low dew point space forming system 10000 according to an embodiment includes a low dew point space forming device (dry room) 1000 disposed in a dry room DR, which is a room having an atmosphere with a dew point temperature lower than a normal dew point temperature, and first and second dehumidifiers DM1 and DM2. The first dehumidifier DM1 generates air having a predetermined first dew point temperature (first dry air) and supplies it to an airflow rectification unit 2 (described later) in the low dew point space forming device 1000. The second dehumidifier DM2 generates air having a predetermined second dew point temperature higher than the first dew point temperature (second dry air) and supplies it to the dry room DR. The first and second dehumidifiers DM1 and DM2 are, for example, adsorption-type dehumidifiers that dehumidify return air mixed with cooled outside air using an adsorbent, or dry-type dehumidifiers that dehumidify air using a dehumidifying rotor and heat the dehumidifying rotor with a regenerative heater to regenerate its dehumidifying capacity. The first and second dew-point temperatures are set appropriately depending on the workpiece WK to be handled by the low dew-point space forming device 1000. For example, if the workpiece WK is a lithium-ion battery that ignites when exposed to moisture, the first dew-point temperature is set to -30 to -40°C (DP), and the second dew-point temperature is set to -30°C (DP), and the dew-point temperature of the dry room DR becomes approximately -15 to -20°C (DP) due to the presence of a person. Alternatively, if the workpiece WK is an all-solid-state battery (sulfuric acid-based solid electrolyte), hydrogen sulfide gas is generated at a dew-point temperature of -60°C (-60°C (DP)), so the first dew-point temperature is set to -80°C (DP), and the second dew-point temperature is set to -60°C (DP), and the dew-point temperature of the dry room DR becomes approximately -40°C (DP) due to the presence of a person. When the first and second dehumidifiers DM1 and DM2 are adsorption type dehumidifiers, regeneration air is supplied to regenerate (restore) the dehumidifying function of the adsorbent.

[0026] In the example shown in Figure 1, an air shower device AS that blows out air is installed at the entrance and exit of the dry room DR to prevent operators (users) or objects such as dust from being brought into the dry room DR. The operator passes through the anteroom FR and enters and exits the dry room DR via the air shower device AS.

[0027] The low dew point space forming device 1000 provided in such a low dew point space forming system 10000 comprises, for example, a housing 1, an air flow straightening section 2, an exhaust section 3, and a brush 4, as shown in Figure 2, and in order to control the air pressure inside the housing 1, in the example shown in Figure 2, further comprises an air pressure measuring section 5, an air supply amount adjusting section 6, an exhaust amount adjusting section 7, a control section 8, and an input / output section 9 (91 to 93).

[0028] The housing 1 is a hollow member that forms a predetermined space.

[0029] The airflow straightening unit 2 is a device that straightens air having a predetermined first dew-point temperature in one direction through an air intake opening SAP formed in the housing 1 and supplies the air into the housing 1. In the example shown in FIGS. 1 and 2 , the output port of the first dehumidifier DM1 and the input port of the airflow straightening unit 2 are connected by an air intake duct DK, which is, for example, a cylindrical member with a circular or polygonal cross section, and the first dry air generated by the first dehumidifier DM1 is supplied to the airflow straightening unit 2 via the air intake duct DK as the air having the predetermined first dew-point temperature. The airflow straightening unit 2 may be any appropriate device, and may be, for example, the airflow straightening device disclosed in Japanese Patent No. 5,502,432. The airflow straightening device disclosed in Patent Publication No. 5502432 has first to third perforated plates which have a plurality of ventilation through-holes and are arranged in the flow path of the airflow in an orientation approximately perpendicular to the airflow, and is configured to straighten the airflow by the airflow passing through the first to third perforated plates in sequence, the first to third perforated plates being arranged parallel to each other at intervals, and all of the first to third perforated plates being made of mesh screens, and the number of ventilation through-holes per given length of the mesh screen arranged in the middle position is less than the number of ventilation through-holes per given length of each of the mesh screens arranged on both sides thereof.

[0030] The exhaust unit 3 is a device that exhausts air from inside the housing 1 through an exhaust opening DAP formed in the housing 1 so as to face the air supply opening SPA through the space formed by the housing 1. More specifically, the exhaust unit 3 includes an exhaust duct 32 that directs the exhaust air to the outside of the dry room DR, and an exhaust lead-out unit 31 that is airtightly connected to the exhaust opening DAP and that leads the air inside the housing 1 as exhaust air to the exhaust duct 32. The exhaust duct 32 is, for example, a tubular member with a circular or polygonal cross section.

[0031] The brush 4 is a flexible object having numerous bristles (brush bristles) extending in one direction, bundled together to form a surface. The brush 4 is attached to the access opening WAP formed in the first surface 11a of the housing 1 so as to close the access opening WAP, which has a first normal line intersecting the one direction. The brush bristles are formed of resin, such as polybutylene (PBT), polyethylene terephthalate (PET), polypropylene (PP), polyethylene (PE), and nylon (NY). Preferably, the brush 4 is a channel-type brush. A channel-type brush is a brush in which numerous bristles are inserted and bundled into a U-shaped metal substrate called a channel. This allows for a higher bristle density than a bristle-implanted brush, in which numerous bristles are individually implanted in a base (brush stand), thereby reducing the brush's opening ratio.

[0032] An exhaust opening DAP is formed between the first surface 11S and a second surface 12S of the housing 1 that faces the first surface 11S in the normal direction of the first normal line, and the first surface 11S, and closer to the first surface 11S.

[0033] In one example, the housing 1 is a rectangular parallelepiped box having a first panel member (e.g., front panel member) 11 that serves as a first surface (e.g., front surface) 11S, and a second panel member (e.g., rear panel member) 12 that serves as a second surface (e.g., rear surface) 12S. The air intake opening SAP is formed in a third panel member (e.g., upper panel member) 13 that serves as a third surface (e.g., upper surface) 13S of the housing 1 on one side in the one direction, and the exhaust opening DAP is formed in a fourth panel member (e.g., lower panel member) 14 that serves as a fourth surface (e.g., lower surface) 14S of the housing 1 on the other side in the one direction. More specifically, a normal direction of the first normal (e.g., the front-rear direction, the depth direction, or the Y direction) is orthogonal to the one direction (e.g., the up-down direction or the Z direction), and the exhaust opening DAP is formed in the fourth panel member 14 so as to follow the first panel member 11 in another direction (e.g., the left-right direction or the X direction) orthogonal to the normal direction of the first normal and to the one direction. The air intake opening SAP may be circular or rectangular in shape so that a portion of the third surface 13S is open, but preferably the air intake opening SAP is rectangular in shape so that the entire third surface 13S is open. Therefore, in this case, the third panel member 13 forms a rectangular frame, the output port of the air flow straightening unit 2 is approximately the same size as the air intake opening SAP, and therefore the first dry air straightened by the air flow straightening unit 2 is supplied to the space within the housing 1 from the entire third surface 13S. Preferably, the exhaust opening DAP extends in the left-right direction and has a rectangular shape whose length (width) in the front-rear direction is shorter than the length from the first surface 11S to the second surface 12S. The exhaust opening DAP is formed in the fourth panel member 14 so as to follow the lower edge of the first panel member 11 in the left-right direction. Since the exhaust opening DAP is formed so as to follow the lower edge of the first panel member 11 that defines the working opening WAP, leakage of the first dry air from the brush 4 can be more effectively reduced. The exhaust outlet portion 31 of the exhaust unit 3 is a rectangular box (e.g., a hollow rectangular box with an open top) having an opening of approximately the same size as the exhaust opening DAP, and is connected to the exhaust duct 32 at its side wall so as to be able to ventilate. A perforated plate (e.g., a punched plate) with a predetermined opening ratio is disposed in the opening of the exhaust outlet portion 31 (the opening on the top in the above example) to maintain the rectification of the first dry air.

[0034] The first face plate member 11 is a plate-like member (panel body) made of a transparent material such as resin (e.g., antistatic vinyl chloride, polycarbonate, polyethylene terephthalate, etc.) or glass so that the inside of the housing 1 can be seen. The second face plate member 12 and a pair of first and second side face plate members (not shown in FIG. 2 ) connecting the first face plate member 11 and the second face plate member 12 at each end may each be made of an opaque material (e.g., metal (including alloys, such as aluminum and stainless steel) or resin (e.g., vinyl chloride)), but like the first face plate member 11, they are plate-like members (panel bodies) made of a material such as resin or glass. The third face plate member 13 is a frame body made of a metal (including alloys) such as stainless steel, and the fourth face plate member 14 is a plate-like member (panel body) made of a metal (including alloys) such as stainless steel. The first panel member 11, the first side panel member, the second panel member 12, and the second side panel member are airtightly connected in this order to form a cylindrical body with a rectangular cross section, the top and bottom of which are airtightly fixed to the third and fourth panel members 13 and 14, respectively. This forms a rectangular box-shaped housing 1 with its top open as an air intake opening SAP. The output port of the air flow rectifying unit 2 is airtightly connected to the top surface of the air intake opening SAP, and the air flow rectifying unit 2 is airtightly fixed to the housing 1. The work opening WAP has a rectangular shape with a predetermined length in the up-down direction and a length that can be extended in the left-right direction. The brush 4 is attached, for example, to the lower edge of the work opening WAP, with its bristles extending in the up-down direction and its tips standing upright so as to abut the upper edge of the work opening WAP. Alternatively, for example, the brush 4 is attached to the upper edge of the work opening WAP, with its bristles extending in the up-down direction and its tips hanging down so as to abut the lower edge of the work opening WAP.Alternatively, for example, the brush 4 comprises a set (pair) of first and second sub-brushes, the first sub-brush is attached to the lower edge of the work opening WAP with its bristles (first bristles) standing upright so that they extend in the vertical direction, the second sub-brush is attached to the upper edge of the work opening WAP with its bristles (first bristles) hanging down so that they extend in the vertical direction, and the first bristles of the first sub-brush and the second bristles of the second sub-brush overlap each other at their respective tip portions.

[0035] The atmospheric pressure measurement unit 5 is a sensor that measures the atmospheric pressure inside the housing 1. The atmospheric pressure measurement unit 5 is connected to the control unit 8, and outputs the measured atmospheric pressure inside the housing 1 to the control unit 8 under the control of the control unit 8.

[0036] The supply air volume adjustment unit 6 is a device that adjusts the volume of the air (first dry air) supplied into the housing 1, and is configured, for example, with an air volume adjustment damper (air volume control damper). The supply air volume adjustment unit 6 is inserted into the supply air duct DK (for example, interposed between the supply air duct DK and the airflow straightening unit 2), and adjusts the volume of the first dry air supplied by adjusting the volume of the first dry air flowing through the supply air duct DK. The supply air volume adjustment unit 6 is connected to the control unit 8, and adjusts the volume of the first dry air supplied under the control of the control unit 8.

[0037] The exhaust volume adjustment unit 7 is a device that adjusts the volume of the air (first dry air) exhausted from the housing 1, and is configured to include, for example, an air volume adjustment damper (air volume control damper). The exhaust volume adjustment unit 7 is inserted into the exhaust duct 32 (for example, interposed between the exhaust outlet unit 31 and the exhaust duct 32), and adjusts the volume of the first dry air exhausted by adjusting the volume of the first dry air flowing through the exhaust duct 32. The exhaust volume adjustment unit 7 is connected to the control unit 8, and adjusts the volume of the first dry air exhausted under the control of the control unit 8.

[0038] The input / output units 9 (91-93) are devices for inputting and outputting data to and from the control unit 8, and include, for example, an input unit 91, an output unit 92, and an interface (IF) unit 93. The input unit 91 is connected to the control unit 8 and is a device that inputs various data necessary for operating the low dew point space forming device 1000, such as the target air pressure within the housing 1, to the low dew point space forming device 1000. For example, the input unit 91 is a numeric keypad or a plurality of input switches each having a predetermined function assigned thereto. The output unit 92 is connected to the control unit 8 and is a device that outputs data input from the input unit 91 under the control of the control unit 8, and is, for example, a plurality of 16-segment LEDs or a display device such as an LCD (liquid crystal display). The IF unit 93 is connected to the control unit 8 and is a circuit that inputs and outputs data to and from, for example, an external device under the control of the control unit 8. For example, the IF unit 93 is an interface circuit for RS-232C, a serial communication method, an interface circuit using the Bluetooth (registered trademark) standard, or an interface circuit using the USB standard.

[0039] The control unit 8 is a device that controls at least one of the supply air volume adjustment unit 6 and the exhaust volume adjustment unit 7 so that the air pressure inside the housing 1 becomes a positive pressure (target air pressure) based on the measurement results measured by the air pressure measurement unit 5. The target air pressure is appropriately set to a positive pressure (positive pressure). The control unit 8 is configured, for example, with a one-chip computer or a one-board computer equipped with a CPU (Central Processing Unit), memory, and their peripheral circuits. The control unit 8 controls at least one of the supply air volume adjustment unit 6 and the exhaust volume adjustment unit 7 so that the supply air volume per unit time is greater than the exhaust volume per unit time by an amount corresponding to the target air pressure. More specifically, for example, the control unit 8 fixes the exhaust volume adjustment unit 7 to the current exhaust volume and controls the supply air volume adjustment unit 6 so that the supply air volume per unit time is greater than the exhaust volume per unit time by an amount corresponding to the target air pressure. Alternatively, for example, control unit 8 fixes air supply rate adjustment unit 6 to the current air supply rate, and controls exhaust rate adjustment unit 7 so that the exhaust rate per unit time is less than the air supply rate per unit time by an amount corresponding to the target air pressure for positive pressure. Alternatively, for example, control unit 8 controls air supply rate adjustment unit 6 and exhaust rate adjustment unit 7 so that the air supply rate per unit time is more than the exhaust rate per unit time by an amount corresponding to the target air pressure for positive pressure. As a result, the air pressure inside housing 1 becomes positive.

[0040] In the low dew point space forming system 10000 and the low dew point space forming device 1000 configured as described above, the control unit 8 controls at least one of the supply air volume adjustment unit 6 and the exhaust volume adjustment unit 7 so as to achieve a positive pressure of the target atmospheric pressure input from the input unit 91. When the first and second dehumidifiers DM1 and DM2 are operated, the first dry air at a first dew point temperature generated by the first dehumidifier DM1 is supplied to the air flow straightening unit 2 via the supply air duct DK and the supply air volume adjustment unit 6 at the supply air volume per unit time adjusted by the supply air volume adjustment unit 6. The first dry air straightened by the air flow straightening unit 2 is blown into the housing 1 through the supply air opening SAP. The first dry air inside the housing 1 is exhausted from the housing 1 through the exhaust opening DAP by the exhaust unit 3 at the exhaust volume per unit time adjusted by the exhaust volume adjustment unit 7. While the first dry air is being blown into and exhausted from the housing 1 in this manner, the control unit 8 controls at least one of the supply air volume adjustment unit 6 and the exhaust air volume adjustment unit 7 based on the measurement results obtained by the air pressure measurement unit 5 so that the air pressure inside the housing 1 becomes a positive pressure of the target air pressure. After a predetermined time has elapsed since the first dry air began to be blown into the housing 1, the atmosphere inside the housing 1 reaches a steady state and is at approximately the first dew point temperature. The operator (user) then inserts his or her hand into the brush 4, inserts his or her hand into the housing 1 through the work opening WAP, performs a predetermined task on the workpiece WK, and, upon completing the predetermined task, removes his or her hand from the housing 1 through the work opening WAP and the brush 4. During this task, even if the operator inserts his or her hand into the housing 1 through the work opening WAP, the brush 4 reduces leakage of the first dry air. The air rectified in the one direction (the up and down direction in the example shown in FIGS. 1 and 2 ) flows from the air supply opening SAP to the exhaust opening DAP, further reducing leakage of the first dry air from the brush 4. Therefore, the atmosphere in the housing 1 is maintained at approximately the first dew point temperature, and the operating costs of the dry room DR and the low dew point space forming device 1000 can be reduced.

[0041] As described above, the low dew point space forming device 1000 in the embodiment flows straightened air (first dry air) in one direction (vertical direction in the example shown in Figures 1 and 2) that intersects with the first normal of the first surface 11S of the housing 1, which forms the work opening WAP to which the brush 4 is attached, from the air intake opening SAP to the exhaust opening DAP, which are opposite each other in the one direction, thereby further reducing leakage of the air (first dry air) from the brush 4.

[0042] The low dew point space forming device 1000 forms an exhaust opening DAP near the first surface 11S of the housing 1, which forms the working opening WAP to which the brush 4 is attached, so that the air (first dry air) can be exhausted from the exhaust opening DAP more preferentially (effectively) than leakage from the brush 4, thereby further reducing leakage of the air (first dry air) from the brush 4.

[0043] The low dew point space forming device 1000 controls the air pressure inside the housing 1 to be a positive pressure (positive pressure) higher than the air pressure outside the housing 1, thereby preventing external air from entering the housing 1 from the outside, and therefore preventing the influence of external air on the first dew point temperature of the air inside the housing 1.

[0044] According to this embodiment, it is possible to provide a low dew point space forming system 10000 that includes the low dew point space forming device 1000. In the low dew point space forming system 10000, the low dew point space forming device 1000 is placed in a dry room DR having a second dew point temperature, so that even if air from the dry room DR enters the housing 1 of the low dew point space forming device 1000, it is possible to reduce the effect of the air from the dry room DR on the first dew point temperature of the air in the housing 1. The closer the second dew point temperature is to the first dew point temperature, the more preferable it is.

[0045] Next, an example and a comparative example will be described. FIG. 3 is a diagram for explaining the low dew point space forming device of the example. FIG. 3A is a perspective view, FIG. 3B is a top view, FIG. 3C is a front view (front view) showing the low dew point space forming device of the example in a state where the brush 4 is not attached, FIG. 3D is a side view, FIG. 3E is a front view (front view), and FIG. 3F is a cross-sectional view taken along the AA cross-sectional line shown in FIG. 3E. As will be described later, the upper surface of the housing 1 is fully open as an air intake opening, and therefore FIG. 3F shows the lower surface of the housing 1. FIG. 4 is a diagram for explaining the low dew point space forming devices of first to third comparative examples. 4A and 4B show a first comparative example, where FIG. 4A is a perspective view showing a low dew point space forming device of the first comparative example in the first embodiment, FIG. 4B is a perspective view showing a low dew point space forming device of the first comparative example in the second embodiment, FIG. 4C is a perspective view showing a low dew point space forming device of the second comparative example, and FIG. 4D is a perspective view showing a low dew point space forming device of the third comparative example. FIG. 5 is a diagram showing the time change of dew point temperature in the low dew point space forming device of the example in the first simulation by ventilation rate. FIG. 6 is a diagram showing the time change of dew point temperature in the low dew point space forming device of the first comparative example by ventilation rate in the first simulation. FIG. 7 is a diagram showing the time change of dew point temperature in the low dew point space forming device of the second comparative example by ventilation rate in the first simulation. FIG. 8 is a diagram showing the time change of dew point temperature in the low dew point space forming device of the third comparative example by ventilation rate in the first simulation. 5 to 8, the horizontal axis is elapsed time [minutes], and the vertical axis is dew point temperature [°C DP]. In Fig. 5 to Fig. 8, ■ represents the results for a ventilation rate of 10 [times / hour], ▲ represents the results for a ventilation rate of 20 [times / hour], ◆ represents the results for a ventilation rate of 30 [times / hour], ● represents the results for a ventilation rate of 40 [times / hour], and + represents the results for a ventilation rate of 50 [times / hour]. The ventilation rate represents the amount of air intake expressed as the number of times the air in the container is replaced per unit time; for example, if the volume of the container is 1 [m 3 ], the ventilation rate is 10 [times / hour], the amount of air supplied to the container is 10 [m 3 / hour]. Fig. 9 is a diagram showing the change in dew point temperature over time in each of the low dew point space forming devices of the Example and the first to third Comparative Examples at a ventilation rate of 30 [times / hour]. The horizontal axis of Fig. 9 is elapsed time [minutes], and the vertical axis is dew point temperature [°C DP]. In Fig. 9, ■ represents the results of the first comparison, ▲ represents the results of the second comparative example, ◆ represents the results of the third comparative example, and ● represents the results of the Example.

[0046] The low dew point space forming device 1000E of the example is a device that imitates the low dew point space forming device 1000 of the embodiment by specifying the dimensions of each part. The housing 1 in the low dew point space forming device 1000E of this example is a cubic (regular hexahedron) airtight container with external dimensions of 1000 mm × 1000 mm × 1000 mm and internal dimensions of 920 mm × 920 mm × 920 mm, as shown in Fig. 3. A working opening WAP measuring 288 mm in the vertical direction and 920 mm in the horizontal direction is formed in the first panel member 11 of the front surface 11S, with its vertical center position at floor level (FL) + 1175 mm. A brush 4 with an opening ratio of 0.5% is attached to the working opening WAP. An air intake opening SAP having a width of 920 mm in the left-right direction and a width of 920 mm in the front-rear direction is formed in the third panel member 13 on the upper surface 13S. Therefore, the air intake opening SAP is formed so that the entire upper surface 13S is open, and the third panel member 13 is a rectangular frame. A perforated plate with an opening ratio of 51% is disposed in the opening of the exhaust outlet section 31 (the opening on the top surface in the above example) in a rectangular area having a width of 880 mm in the left-right direction and a width of 80 mm in the front-rear direction. An air intake opening SAP having a rectangular shape the same size as or larger than the rectangular area having a width of 880 mm in the left-right direction and a width of 80 mm in the front-rear direction is formed in the fourth panel member 14 on the lower surface 14S of the housing 1, as viewed from the perforated plate of the exhaust outlet section 31.

[0047] In the low dew point space forming apparatuses 1000C1-1 and 1000C1-2 of the first comparative example, dry air is blown into the housing 1 through an air supply duct and the dry air is exhausted from the housing 1 through an exhaust duct, but the housing 1 is airtightly sealed. The low dew point space forming apparatus 1000C1-1 of the first comparative example of the first embodiment is an apparatus simulating a glove box as shown in Fig. 4A, and the low dew point space forming apparatus 1000C1-2 of the first comparative example of the second embodiment is an apparatus simulating a dry box with a door that is closed and cannot be opened or closed as shown in Fig. 4B. The housings 1 in the low dew point space forming apparatuses 1000C1-1 and 1000C1-2 of the first comparative example are containers with the same external and internal dimensions as the housing 1 in the low dew point space forming apparatus 1000E of the example. The air supply duct is attached at a central position on the third panel member on the upper surface, and the exhaust duct is attached at a position on the second panel member on the rear surface, closer to the bottom in the vertical direction and central in the left-right direction.

[0048] As shown in Fig. 4C, the low dew point space forming apparatus 1000C2 of the second comparative example is an apparatus in which an air flow straightening unit 2 is further attached to the dry base shown in Fig. 4B, and the dry air is straightened by the air flow straightening unit 2 and supplied to the housing 1. As in the above embodiment, an air intake opening is formed on the entire surface of the third panel member on the top surface.

[0049] 4B, the low dew point space forming apparatus 1000C3 of the third comparative example is an apparatus in which an air flow straightening unit 2 is further attached to the dry booth shown in FIG. 4B, the dry air is straightened by the air flow straightening unit 2 and supplied to the housing 1, and the exhaust air from the exhaust duct is exhausted in the same manner as the low dew point space forming apparatus 1000E of the embodiment. That is, the low dew point space forming apparatus 1000C3 of the third comparative example is similar to the low dew point space forming apparatus 1000E of the embodiment, except that it has an access opening with a door instead of the access opening WAP to which the brush 4 is attached.

[0050] For each of the low dew point space forming devices 1000E, 1000C1, 1000C2, and 1000C3 in the example and the first to third comparative examples, dry air with a dew point temperature of -82°C was supplied to the housing 1, which had an atmosphere with a dew point temperature of -40°C. A simulation (numerical experiment) was conducted (first simulation) using Flow Designer, manufactured by Advanced Knowledge Research Institute, to examine the change in dew point temperature over time within the housing 1, for each ventilation rate. The observation point was located at the center in the left-right direction, 600 mm from the outside of the rear surface in the front-rear direction, and 100 mm from the bottom surface in the up-down direction. The predetermined area including this observation point was assumed to be the work area WA where the workpiece WK was to be worked on.

[0051] The simulation results are shown in Figures 5 to 9. In each of the low dew point space forming devices 1000E, 1000C1 (1000C1-1, 1000C1-2), 1000C2, and 1000C3 in the example and the first to third comparative examples, the amount of dry air supplied at a dew point temperature of -82°C increases, and therefore the time required for the dew point temperature to decrease from -40°C to -80°C decreases as the ventilation rate increases. In each of the low dew point space forming devices 1000C1, 1000C2, and 1000C3 in the first to third comparative examples, when the ventilation rate is 50 times / hour, the time required is approximately 7.5 minutes (approximately 7 minutes 30 seconds), approximately 13.5 minutes (approximately 13 minutes 30 seconds), and 5 minutes, respectively. In contrast, for the low dew point space forming device 1000E of the embodiment, when the ventilation rate is 50 times / hour, the time is approximately 4.5 minutes (approximately 4 minutes 30 seconds). Furthermore, when the ventilation rate is 30 times / hour, taking into consideration operating costs, the time is approximately 12 minutes, approximately 20 minutes, and approximately 14 minutes for the low dew point space forming devices 1000C1, 1000C2, and 1000C3 of the first to third comparative examples, respectively, but approximately 8.5 minutes (approximately 8 minutes 30 seconds) for the low dew point space forming device 1000E of the embodiment. Therefore, in the first simulation, the low dew point space forming device 1000E of the embodiment is superior to the low dew point space forming devices 1000C1, 1000C2, and 1000C3 of the first to third comparative examples.

[0052] As a second simulation, a simulation was conducted in which both hands were placed inside the housing 1 of each of the low dew point space forming devices 1000E, 1000C1-2, 1000C2, and 1000C3 in the Example, the First Comparative Example of the Second Aspect, the Second Comparative Example, and the Third Comparative Example for one minute, starting from a steady state of a dew point temperature of -80°C. The ventilation rate was 30 times / hour. The access opening with the door attached in each of the low dew point space forming devices 1000C1-2, 1000C2, and 1000C3 in the First Comparative Example, the Second Comparative Example, and the Third Comparative Example for the second aspect was 350 mm in the vertical direction and 600 mm in the horizontal direction.

[0053] FIG. 10 is a diagram illustrating a second simulation in which a user's hand is placed in the low dew point space forming device of the example and the first to third comparative examples for one minute. FIG. 11 is a diagram illustrating the dew point temperature distribution immediately before the user removes their hand in the low dew point space forming device of the example in the second simulation, for each brush aperture ratio. FIG. 11A shows the case where the aperture ratio of the brush 4 is 0.5%, and FIG. 11B shows the case where the aperture ratio of the brush 4 is 1%. FIG. 12 is a diagram illustrating the dew point temperature distribution immediately before the user removes their hand in each of the low dew point space forming devices of the first to third comparative examples in the second simulation. FIG. 12A shows the case of the first comparative example of the second embodiment, FIG. 12B shows the case of the second comparative example, and FIG. 12C shows the case of the third comparative example. In Figures 11 and 12, the dew-point temperature distribution is represented by isodew-point temperature lines, which are lines connecting points with equal dew-point temperatures every 5°C DP in the range of -80°C DP to -35°C DP. Figure 13 shows the time-varying dew-point temperature in each of the low dew-point space forming devices of the example and the first to third comparative examples in the second simulation. The horizontal axis of Figure 13 is elapsed time [minutes], and the vertical axis is dew-point temperature [°C DP]. Figure 14 shows the relationship between the brush aperture ratio and maximum dew-point temperature in the low dew-point space forming device of the example. The horizontal axis of Figure 14 is the aperture ratio [%] of the brush 4, and the vertical axis is maximum dew-point temperature [°C DP]. The maximum dew point temperature is the maximum dew point temperature in a rectangular area 100 mm wide in the front-to-back direction, 100 mm wide in the left-to-right direction, and 200 mm long in the up-to-down direction, with the points 800 mm (800 mm from the rear), 500 mm, and FL+1100 mm (225 mm from the bottom) in the front-to-back direction, left-to-right direction, and up-to-down direction as center points.

[0054] In this second simulation, the insertion of both hands is represented by two prismatic members inserted through the working opening, as shown in Figure 10. The results of this second simulation are shown in Figures 11 to 13.

[0055] In the low dew point space forming devices 1000C1-2, 1000C2, and 1000C3 in the first, second, and third comparative examples of the second embodiment, just before the hand is removed, as shown in Fig. 12, the area where the dew point temperature is elevated is widely distributed in the front-to-back direction from the work opening, due to the intrusion of external air into the housing 1 through the work opening rather than the leakage of the first dry air from the housing 1 through the work opening. In contrast, in the low dew point space forming device 1000E of the embodiment, just before the hand is removed, as shown in Fig. 11, the area where the dew point temperature is elevated is narrower than in the cases shown in Fig. 12 and is not distributed as widely in the front-to-back direction from the work opening WAP. Note that the area where the dew point temperature is elevated expands over time starting immediately after the hand is inserted.

[0056] FIG. 13 shows the change in dew point temperature over time when the hands are inserted, then removed one minute later, and the housing 1 is returned to the state it was in before the hands were inserted. In the low dew point space forming devices 1000C1-2, 1000C2, and 1000C3 of the first, second, and third comparative examples of the second embodiment, the door is closed and the access opening is blocked when the hands are removed. As shown in FIG. 13, in the low dew point space forming devices 1000C1-2, 1000C2, and 1000C3 of the first, second, and third comparative examples of the second embodiment, the atmosphere inside the housing 1 gradually returns to its original state of a dew point temperature of −82°C over time. However, in the low dew point space forming device 1000E of the example, the atmosphere inside the housing 1 remains almost constant at a dew point temperature of −82°C even while the hands are inserted, and therefore returns to approximately its original state when the hands are removed.

[0057] Therefore, in the case of the second simulation, the low dew point space forming device 1000E of the example is superior to the low dew point space forming devices 1000C1-2, 1000C2, and 1000C3 of the first to third comparative examples.

[0058] Furthermore, in the low dew point space forming device 1000E of the embodiment, when comparing the maximum dew point temperature depending on the opening ratio of the brush 4, as shown in Figure 14, the maximum dew point temperature is almost the same when the opening ratio is 0.5% or 1% compared to when the opening ratio is 5% or 2%. Therefore, it is preferable that the opening ratio is greater than 0% and not more than 1%.

[0059] Next, modified embodiments will be described. Fig. 15 is a diagram illustrating a low dew point space forming device in a first modified embodiment. Fig. 16 is a diagram illustrating a low dew point space forming device in a second modified embodiment. Fig. 16A is a front view of a low dew point space forming device 1000b in the second modified embodiment, and Fig. 16B is a side view of the low dew point space forming device 1000b in the second modified embodiment. Fig. 17 is a diagram illustrating a low dew point space forming device in a third modified embodiment. Fig. 17A is a side view of a low dew point space forming device 1000c in the third modified embodiment, and Fig. 17B is a diagram illustrating a static electricity removing sheet provided in the low dew point space forming device 1000c in the third modified embodiment.

[0060] In the above-described embodiment, the low dew point space forming device 1000 may be a low dew point space forming device 1000a further including a porous plate 100 disposed in the housing 1a between the air inlet opening SAPa and the exhaust opening DAP, closer to the air inlet opening SAPa and along a plane having a second normal in the one direction (the up-and-down direction in the examples shown in FIGS. 1, 2, and 15) (first modified embodiment), as shown in FIG. 15. The low dew point space forming device 1000a in this first modified embodiment is configured similarly to the low dew point space forming device 1000 in the above-described embodiment, except that the housing 1 is replaced with a housing 1a in which the air inlet opening SAPa is formed in a portion of the third surface 13Sa. The housing 1a in the low dew point space forming device 1000a in this first modified embodiment is configured similarly to the housing 1 in the low dew point space forming device 1000 in the above-described embodiment, except that the air inlet opening SAPa is formed in a portion of the third surface 13Sa. The air supply opening SAPa formed in this third surface 13Sa has an area that is, for example, 1 / 2 or 1 / 3 of the area of the third surface 13Sa, and is formed in the third panel member 13a that becomes the third surface 13Sa. For example, the air supply opening SAPa has a rectangular shape whose width in the left-right direction is 1 / 3 of the length of the third panel member 13a in the left-right direction and whose width in the front-to-rear direction is the length of the third panel member 13a in the front-to-rear direction, and is formed in the third panel member 13a at approximately the center in the left-to-right direction so as to be along the upper edge of the first panel member 11 of the front surface 11S. If the length of the air intake opening SAPa in the front-to-rear direction is made shorter than the length of the third panel member 13a in the front-to-rear direction, there is a risk that a vortex flow will be generated by the first dry air that has been rectified in one direction in the space within the housing 1a that corresponds to the lower part of the remaining part of the third panel member 13a in the front-to-rear direction where the air intake opening SAPa is not formed. Therefore, as described above, it is preferable to make the length of the air intake opening SAPa in the front-to-rear direction approximately equal to the length of the third panel member 13a in the front-to-rear direction so that the air intake opening SAPa fills the entire third surface 13a in the front-to-rear direction.

[0061] The perforated plate 100 is, for example, a punched plate made of resin, metal (including alloy), etc. The aperture ratio of the perforated plate 100 is appropriately set depending on, for example, the airflow rate of the airflow rectifying unit 2 and the area of the plane having the second normal line in the housing 1a (the area of the perforated plate 100) so that the first dry air is rectified between the perforated plate 100 and the fourth panel member 14 that forms the fourth surface 14S of the lower surface.

[0062] The low dew point space forming device 1000a in the first modified embodiment further includes the perforated plate 100, so that even if the area of the housing 1 is larger than the area of the air intake opening SAPa in the plane, the rectified air (first dry air) can be caused to flow between the perforated plate 100 and the exhaust opening DAP. When the housing 1a has a relatively large capacity, the low dew point space forming device 1000a can use an air flow rectifying unit 2 with an air blowing capacity smaller than that of the air flow rectifying unit attached to the air intake opening of the same size as the third surface, thereby making it possible to reduce the cost of the air flow rectifying unit 2.

[0063] In the above-described embodiment and the first modified embodiment, the low dew point space forming device 1000, 1000a may be, for example, a low dew point space forming device 1000b (second modified embodiment) that further includes a glove unit 200 that includes a pair of globes 211a, 211b and is attached to the first surface 11S of the housing 1 outside or inside the work opening WAP, as shown in Fig. 16. More specifically, the work opening WAP is formed to extend in one direction (the left-right direction in the example shown in Fig. 16), and the glove unit 200 includes holding members 212 (212a, 212b) that hold the globes 211 (211a, 211b) and guide members 213 (213a, 213b) that movably guide the holding members 212 along the one direction, and the guide members 211 are attached to the first surface 11S of the housing 1 outside or inside the work opening WAP. The holding member 212 may be a single plate-like member provided with a pair of mounting cylinders for mounting each of the pair of globes 211a, 211b, but in the example shown in Figure 16, the holding member 212 is provided with a first holding member 212a, which is a plate-like member provided with a first mounting cylinder 2121a for mounting one of the pair of globes 211a, 211b, and a second holding member 212b, which is a plate-like member provided with a second mounting cylinder 2121b for mounting the other of the pair of globes 211a, 211b, so that each of the pair of globes 211a, 211b can be moved individually. The pair of gloves 211a, 211b are attached to the first and second holding members 212a, 212b, for example, by fastening their wrist portions to the first and second mounting cylinders 2121a, 2121b with airtight rubber bands (e.g., O-rings, etc.). The guide member 213 includes a pair of identical guide members 213a, 213b, which are elongated plate-like members with a single groove extending linearly in the one direction. The length of the pair of guide members 213a, 213b corresponds to the range of movement of the holding member 212 (212a, 212b) (e.g., the length of the access opening WAP in the left-right direction, etc.).The pair of guide members 213a, 213b are attached to portions of the first panel member 11 corresponding to the upper and lower edges of the access opening WAP such that the grooves face each other in the up-down direction, one end of the first and second holding members 212a, 212b in the up-down direction slidably fits into the groove of one guide member 213a of the pair of guide members 213a, 213b, and the other end of the first and second holding members 212a, 212b in the up-down direction slidably fits into the groove of the other guide member 213b of the pair of guide members 213a, 213b. In the example shown in Fig. 16, the pair of guide members 213a, 213b are attached to the portions of the first panel member 11 outside the access opening WAP.

[0064] In the example shown in FIG. 16, the glove section 200 includes one pair of gloves 211a and 211b, but may include multiple pairs of gloves.

[0065] In this second variant, the low dew point space forming device 1000b further includes a glove section 200 having gloves 211a and 211b. By fitting the hands into the gloves 211a and 211b, the moisture emitted from the hands can be prevented from affecting the dew point temperature of the air inside the housing 1.

[0066] In the above-described embodiment and the first and second modified embodiments, the low dew point space forming devices 1000, 1000a, 1000b may be, for example, a low dew point space forming device 1000c (third modified embodiment) further including an anti-static sheet 300 that is disposed so as to overlap the brush 4 along the work opening WAP and that removes static electricity generated on the brush 4, as shown in FIG. 17. As shown in FIG. 17B, the anti-static sheet 300 is formed in a strip shape by forming slits (cuts) along the vertical direction, leaving only the upper end portion in the vertical direction. As shown in FIG. 17A, the upper end portion of the anti-static sheet 300 is attached to a portion of the first panel member 11 that corresponds to the upper edge of the work opening WAP, and is disposed so as to overlap the brush 4 on the inside and is earthed.

[0067] The low dew point space forming device 1000c in the third modified embodiment is provided with the static electricity removing sheet 300, and can remove static electricity generated on the brush 4 during work. By forming it into a strip shape, it becomes easier to put your hand in and out.

[0068] In order to express the present invention, the present invention has been properly and sufficiently described above through the embodiments with reference to the drawings, but it should be recognized that those skilled in the art can easily change and / or improve the above-mentioned embodiments. Therefore, unless the changes or improvements made by those skilled in the art are at a level that causes departure from the scope of the claims described in the claims, such changes or improvements are interpreted as being included in the scope of the claims. [Explanation of symbols]

[0069] 10000 Low dew point space forming system; 1000 Low dew point space forming device; 1 Housing; 2 Air flow straightening section; 3 Exhaust section; 4 Brush; 5 Barometric pressure measuring section; 6 Air supply volume adjusting section; 7 Exhaust volume adjusting section; 8 Control section; 100 Perforated plate; 200 Glove section; 300 Static electricity removing sheet

Claims

1. a hollow housing that forms a predetermined space; an airflow rectifying unit that rectifies the air having a predetermined first dew point temperature in one direction through an air intake opening formed in the housing and supplies the air into the housing; an exhaust section that exhausts air from the housing through an exhaust opening formed in the housing so as to face the air intake opening across the space; a brush attached to a working opening formed in a first surface of the housing having a first normal line intersecting the one direction, Low dew point space forming device.

2. the exhaust opening is formed between the first surface and a second surface of the housing that faces the first surface in a normal direction of the first normal line, and the first surface, and closer to the first surface; The low dew point space forming device according to claim 1.

3. a porous plate disposed in the housing between the air intake opening and the exhaust opening, the porous plate being closer to the air intake opening and extending along a plane having the one direction as a second normal line; The low dew point space forming device according to claim 1.

4. an air pressure measuring unit for measuring the air pressure inside the housing; an air supply amount adjusting unit that adjusts the amount of the air supplied into the housing; an exhaust amount adjustment unit that adjusts the amount of the air exhausted from inside the housing; a control unit that controls at least one of the supply air amount adjustment unit and the exhaust air amount adjustment unit based on the measurement result measured by the air pressure measurement unit so that the air pressure inside the housing becomes positive, The low dew point space forming device according to any one of claims 1 to 3.

5. The glove portion further includes one or more pairs of gloves attached to the first surface of the housing outside or inside the access opening. The low dew point space forming device according to any one of claims 1 to 3.

6. The brush may further include an anti-static sheet disposed so as to overlap the brush along the working opening, and configured to remove static electricity generated on the brush. The low dew point space forming device according to any one of claims 1 to 3.

7. The low dew point space forming device according to any one of claims 1 to 3, which is disposed in a dry room; a first dehumidifier that generates the air having the first dew point temperature and supplies the air to the air flow straightening unit; a second dehumidifier that generates air having a predetermined second dew point temperature higher than the first dew point temperature and supplies the air to the dry room; Low dew point space formation system.

Images