Fluid device

Abstract

To fasten a fluid resistance element at a flow channel while suppressing the displacement or vibration of the fluid resistance element at the flow channel.SOLUTION: A fluid device includes: a flow channel block B that has an internal flow channel R formed therein; a fluid resistance element 2 which has the internal flow channel R formed therein, and which has a resistance flow channel formed so as to be in communication with the internal flow channel R; and a fastening mechanism 10 that fastens the fluid resistance element 2 to the internal flow channel R. The fastening mechanism 10 includes: an element holder 3 that holds the fluid resistance element 2; a holder attaching portion 4 which is formed in the flow channel block B so as to be in communication with the internal flow channel R, and to which the element holder 3 is attached; and a sealing member 5 that is present between the element holder 3 and the holder attaching portion 4. The element holder 3 is positioned and attached to the holder attaching portion 4 with the sealing member 5 being collapsed by a surface in the element holder 3 and the holder attaching portion 4 which faces the element holder 3.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a fluidic device for controlling or measuring a physical quantity of a fluid. [Background technology]

[0002] As shown in Patent Document 1, a conventional fluid control device is a pressure type device in which a fluid resistance element is provided in an internal flow path through which a fluid flows. In this flow control device, the flow rate of the fluid flowing through the internal flow path is measured from the differential pressure between the upstream and downstream pressures of the fluid resistance element, and the flow rate is controlled by a fluid control valve. In addition, a ceramic fluid resistance element (hereinafter referred to as a ceramic restrictor) is used as the fluid resistance element.

[0003] However, due to the physical property of ceramics, which is that it is almost indeformable, there is a problem in that it is difficult to fix a ceramic restrictor to a flow path.In addition, in Patent Document 1, a cylindrical ceramic restrictor is fitted into a cylindrical metallic covering member, and then the metallic covering member is fitted into the internal flow path and fixed, but all of these fixing methods are technically difficult and there are many problems in practical adoption.

[0004] On the other hand, one method of fixing a ceramic restrictor to an internal flow path is to divide a flow path block in which the internal flow path is formed into two halves and fix the ceramic restrictor therein, as shown in Figure 8. Specifically, a ceramic restrictor is inserted into the two divided blocks, and an O-ring is sandwiched between the two divided blocks. As a result, the crushed O-ring seals the gap between the ceramic restrictor and the internal flow path, fixing the position of the ceramic restrictor.

[0005] However, the above fixing method can cause the ceramic restrictor to shift position, which can cause variations in response performance, especially in fluid control devices. The variations in response performance are caused by variations in the internal volume between the ceramic restrictor and the fluid control valve, which in turn causes variations in the time it takes for gas to escape from the internal volume when the flow rate drops (declining response time). Furthermore, because the ceramic restrictor is fixed with an O-ring, the ceramic restrictor vibrates due to the pressure it receives from the fluid, causing fluctuations in the measured flow rate. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. WO2021 / 095492 Summary of the Invention [Problem to be solved by the invention]

[0007] Therefore, the present invention has been made to solve the above-mentioned problems, and its objective is to make it possible to fix a fluid resistance element to an internal flow path while reducing positional deviation or vibration of the fluid resistance element in the internal flow path. [Means for solving the problem]

[0008] In other words, the fluid device of the present invention is a fluid device that controls or measures the physical quantity of a fluid, and comprises a flow path block in which an internal flow path is formed, a fluid resistance element that is provided in the internal flow path and in which a resistance flow path communicating with the internal flow path is formed, and a fixing mechanism that fixes the fluid resistance element to the internal flow path, and the fixing mechanism has an element holder that holds the fluid resistance element, a holder mounting portion that is formed in the flow path block in communication with the internal flow path and to which the element holder is mounted, and a sealing member interposed between the element holder and the holder mounting portion, and the element holder is positioned and mounted on the holder mounting portion with the sealing member crushed by the surface of the element holder and the holder mounting portion that faces the element holder.

[0009] In such a fluidic device, the element holder holding the fluidic resistance element is positioned and attached to the holder attachment portion with the sealing member crushed by the surface of the element holder and the holder attachment portion facing the element holder, so that the fluidic resistance element can be fixed to the internal flow path while reducing positional deviation or vibration of the fluidic resistance element in the internal flow path, thereby reducing variation in response performance due to positional deviation of the fluidic resistance element or reducing fluctuation in measurement values ​​due to vibration of the fluidic resistance element.

[0010] The element holder holds the end of the fluid resistance element in a state in which it extends outward, and it is desirable that the sealing member seals between the extension portion of the fluid resistance element extending outward from the element holder and the surface of the holder mounting portion that faces the extension portion. With this configuration, it is possible to prevent fluid from leaking out from the gap between the fluid resistance element and the element holder, and the gap between the element holder and the holder mounting portion.

[0011] It is desirable that the element holder or the holder mounting portion has a contact surface that comes into contact with an end face of the fluid resistance element while holding the fluid resistance element. With this configuration, the fluid resistance element can be positioned when assembling the fluid device. Furthermore, if the element holder or the holder mounting part has a contact surface that contacts the downstream end face of the fluid resistance element, it is possible to preferably solve the problem of the fluid resistance element being shifted downstream due to the pressure received from the fluid when the fluid flows through the fluid resistance element.

[0012] It is desirable that an outlet of the resistance flow path is formed in the downstream end face of the fluid resistance element, and that the contact surface contacts a portion of the downstream end face where the outlet is not formed. With this configuration, it is possible to prevent the fluid resistance element from shifting downstream without impairing the flow characteristics of the fluid resistance element.

[0013] In a specific embodiment of the fluid resistance element, the fluid resistance element may be columnar, with a plurality of resistance flow paths formed along its axial direction. In this configuration, in order not to impede the flow of fluid through the fluid resistance element, it is desirable that the element holder surrounds and holds the outer peripheral surface of the fluid resistance element.

[0014] In order to prevent the element holder from interfering with the flow of fluid by holding the fluid resistance element with the element holder, it is desirable that the element holder have an outlet portion that directs the fluid that flows out of the resistance flow path to the internal flow path.

[0015] As a specific embodiment of the fluid resistance element, as described above, it is conceivable that the fluid resistance element is columnar and has a plurality of the resistance flow paths formed along its axial direction. In this configuration, it is desirable that the element holder has a tubular member that surrounds and holds the outer circumferential surface of the fluid resistance element and sandwiches the seal member between itself and the holder mounting part, and a fixing member that is separate from the tubular member and positions and fixes the tubular member to the holder mounting part in a state in which the tubular member crushes the seal member. With this configuration, the element holder is configured as a separate cylindrical member and fixing member, which makes it easy to process each of them.

[0016] When the element holder is constructed as a separate cylindrical member and a fixing member, in order to prevent the element holder from interfering with the flow of fluid, it is desirable that the cylindrical member and / or the fixing member have an outlet portion formed therein that directs the fluid that has flowed out of the resistance flow path to the internal flow path.

[0017] It is desirable that the holder mounting portion is formed on a planar side surface of the flow path block, and that by mounting the element holder to the holder mounting portion, the fluid resistance element is fixed approximately perpendicular to the side surface. This configuration makes it possible to easily process the holder mounting portion and the like in the flow path block.

[0018] In the present invention, if the fluid resistance element is a ceramic restrictor, the effect can be made even more pronounced.

[0019] A specific embodiment of the fluid device may be one in which a flow sensor and a fluid control valve are mounted on the block body, or one in which a flow sensor or a pressure sensor is mounted on the block body. [Effects of the Invention]

[0020] As described above, according to the present invention, the fluid resistance element can be fixed to the flow channel while reducing displacement or vibration of the fluid resistance element in the flow channel. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is a diagram schematically illustrating the configuration of a fluid control device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view showing the configuration of the fluid resistance element of the embodiment. [Figure 3] FIG. 2 is a cross-sectional view schematically showing a fixing mechanism of the embodiment. [Figure 4] FIG. 2 is a cross-sectional view schematically showing the fixing mechanism of the embodiment in an exploded state. [Figure 5] 4 is a bottom view schematically showing the cylindrical member and the second downstream flow path of the embodiment. FIG. [Figure 6] FIG. 10 is a cross-sectional view schematically showing a fixing mechanism of a modified embodiment. [Figure 7] FIG. 10 is a cross-sectional view schematically showing a fixing mechanism of a modified embodiment. [Figure 8] FIG. 10 is a cross-sectional view schematically showing a conventional method for fixing a ceramic restrictor. DETAILED DESCRIPTION OF THE INVENTION

[0022] An embodiment of a fluid control device, which is an example of a fluid device according to the present invention, will be described below with reference to the drawings. Note that in all of the drawings shown below, parts are appropriately omitted or exaggerated for clarity. Identical components are assigned the same reference numerals, and descriptions thereof will be omitted as appropriate.

[0023] <1. Basic configuration of the fluid control device 100> The fluid control device 100 according to this embodiment is a so-called mass flow controller used in a semiconductor manufacturing process. The fluid control device 100 can be used not only in the semiconductor manufacturing process but also in other processes.

[0024] The fluid control device 100 here is a pressure type, as shown in Fig. 1. Specifically, the fluid control device 100 includes a flow path block B having a flow path R (hereinafter referred to as an internal flow path R) therein, a fluid control valve V installed in the flow path block B, a pair of pressure sensors PS1 and PS2 which are fluid sensors installed upstream or downstream of the fluid control valve V in the flow path block B, and a valve control unit CTL which feedback-controls the fluid control valve V so that the flow rate value of the internal flow path R, which is calculated based on the pressure values ​​measured by the pair of pressure sensors PS1 and PS2, approaches a predetermined target value.

[0025] The flow path block B has, for example, a rectangular parallelepiped shape, and has a fluid control valve V and a pair of pressure sensors PS1, PS2 installed on a predetermined surface thereof (the upper surface in FIG. 1). The flow path block B also has a recessed accommodation portion B1 on its predetermined surface for installing the fluid control valve V. The accommodation portion B1 divides the internal flow path R into an upstream flow path R1 and a downstream flow path R2. One end of the upstream flow path R1 opens on the bottom surface of the accommodation portion B1, and one end of the downstream flow path R2 opens on the side surface thereof.

[0026] The pair of pressure sensors PS1 and PS2 are connected to the upstream and downstream sides, respectively, of the fluid resistance element 2 provided in the internal flow path R, and both are connected to a flow rate calculation unit S2 that calculates the flow rate based on the outputs of the pair of pressure sensors PS1 and PS2. The pair of pressure sensors PS1 and PS2 are attached in a row together with the fluid control valve V on a predetermined surface (the upper surface in FIG. 1) of the flow path block B.

[0027] The valve control unit CTL has a so-called computer equipped with a CPU, memory, A / D and D / A converters, etc., and executes programs stored in the memory to realize various functions through cooperation of various devices. Specifically, it feedback-controls the valve opening of the fluid control valve V so that the flow rate value calculated by the flow rate calculation unit S2 approaches a target value stored in advance in memory.

[0028] <2. Fluid resistance element 2 and fixing mechanism 10 for fluid resistance element 2> The fluid resistance element 2 of this embodiment provides resistance when a fluid flows, and as shown in Fig. 2, has a flow path 21 (hereinafter referred to as resistance flow path 21) formed therein that communicates with the internal flow path R and provides resistance. The fluid resistance element 2 of this embodiment is made of ceramics such as quartz, alumina, zirconia, or silicon nitride (ceramic restrictor).

[0029] This fluid resistance element 2 is, for example, cylindrical, and has one or more (for example, several hundred) resistance flow paths 21 formed along the axial direction. The fluid resistance element 2 here has a diameter (outer diameter) of about several mm (for example, 1.5 mm) and a length (dimension along the axial direction) of about several mm to several tens of mm (for example, 7 mm), but these dimensions may be changed as appropriate.

[0030] The resistance flow paths 21 are formed so as to penetrate the fluid resistance element 2 in the axial direction. That is, an inlet of the resistance flow path 21 is formed at one axial end face 2a (upstream end face 2a) of the fluid resistance element 2, and an outlet of the resistance flow path 21 is formed at the other axial end face 2b (downstream end face 2b) of the fluid resistance element 2. The resistance flow paths 21 in this embodiment are linear and have a circular cross section. Here, the resistance flow paths 21 have a diameter dimension (inner diameter) of less than 1 mm and on the order of several tens of μm (e.g., 30 μm), and a length dimension (dimension along the axial direction) of several mm to several tens of mm (e.g., 7 mm), the same as the fluid resistance element 2, although these dimensions may be changed as appropriate.

[0031] 1, 3 and 4, the fluid control device 100 of this embodiment further includes a fixing mechanism 10 that fixes the fluid resistance element 2 to the internal flow path R of the flow path block B.

[0032] 1 and 3 to 5, the fixing mechanism 10 has an element holder 3 that holds the fluid resistance element 2, a holder mounting portion 4 that is formed in the flow path block B and to which the element holder 3 is attached, and a seal member 5 that is interposed between the element holder 3 and a surface that faces the holder mounting portion 4. The fixing mechanism 10 positions and fixes the element holder 3 that holds the fluid resistance element 2 to the holder mounting portion 4 with the seal member 5 being crushed by the surface that faces the element holder 3 and the holder mounting portion 4.

[0033] Specifically, as shown in Figures 3 to 5, the element holder 3 has a cylindrical member 31 that surrounds and holds the outer peripheral surface of the fluid resistance element 2, and a fixing member 32 that is separate from the cylindrical member 31 and fixes the cylindrical member 31 to the holder mounting portion 4.

[0034] The cylindrical member 31 is made of metal and has a cylindrical shape, and accommodates and holds the fluid resistance element 2 therein. The cylindrical member 31 sandwiches the seal member 5 between itself and the holder mounting portion 4. The cylindrical member 31 has a contact surface 31x that comes into contact with the downstream end surface 2b of the fluid resistance element 2 when the cylindrical member 31 holds the fluid resistance element 2. The contact surface 31x is formed by a protrusion 311 that protrudes radially inward from the inner circumferential surface of the cylindrical member 31. The protrusion 311 is formed on the lower end side of the inner circumferential surface of the cylindrical member 31. The contact surface 31x comes into contact with a portion of the downstream end surface 2b of the fluid resistance element 2 where no outlet is formed, and in this embodiment, it comes into contact with the peripheral portion of the downstream end surface 2b of the fluid resistance element 2.

[0035] The cylindrical member 31 of this embodiment is configured so that, when it houses and holds the fluid resistance element 2, an upper end 2c of the fluid resistance element 2 extends outward from the upper end opening of the cylindrical member 31. An O-ring, which is a sealing member 5, is attached to the outer circumferential surface of the upper end 2c, which is the extension portion of the fluid resistance element 2 that extends from the cylindrical member 31 (see FIG. 4). As a result, when the cylindrical member 31 is attached to the holder attachment portion 4, the O-ring 5 is sandwiched and crushed between the upper end surface of the cylindrical member 31 and the inner surface of the holder attachment portion 4 (the surface facing the upper end surface of the cylindrical member 31).

[0036] The fixing member 32 positions and fixes the cylindrical member 31 to the holder mounting portion 4 in a state in which the cylindrical member 31 crushes the seal member 5. The fixing member 32 in this embodiment is made of metal and has a rectangular flat plate shape when viewed from above. The fixing member 32 is fixed to the lower surface of the flow path block B by, for example, screws.

[0037] The holder mounting portion 4 is a recess formed on a planar side surface (the lower surface in FIG. 1) of the flow path block B. As shown in FIGS. 3 and 4, the holder mounting portion 4 of this embodiment has a first recess 41 that accommodates the cylindrical member 31 and a second recess 42 that accommodates the fixing member 32. Note that the holder mounting portion 4 may not have the second recess 42. Furthermore, the holder mounting portion 4 divides the downstream flow path R2 into a first downstream flow path R2a and a second downstream flow path R2b.

[0038] The first recess 41 is formed substantially perpendicular to the bottom surface of the flow path block B and accommodates the cylindrical member 31. The first recess 41 has substantially the same shape as the outer shape of the cylindrical member 31, and in this embodiment, has a circular cross section. One end of the first downstream flow path R2a opens at the bottom surface of the first recess 41. The periphery of the opening of the first downstream flow path R2a on the bottom surface of the first recess 41 forms the inner surface of the holder attachment portion 4 that sandwiches the O-ring 5 between itself and the upper end surface of the cylindrical member 31.

[0039] Like the first recess 41, the second recess 42 is formed substantially perpendicular to the bottom surface of the flow path block B and accommodates the fixing member 32. The second recess 42 has a shape corresponding to the outer shape of the fixing member 32, and in this embodiment, has a rectangular cross section. One end of the second downstream flow path R2b opens at the bottom surface of the second recess 42. Note that the second downstream flow path R2b may have one end opening at the inner surface of the first recess 41. A flow path portion 421 may be formed at the bottom surface of the second recess 42 to guide the fluid flowing out from the fluid resistance element 2 to the second downstream flow path R2b.

[0040] By mounting the element holder 3 on the holder mounting part 4 configured in this manner, the fluid resistance element 2 is fixed approximately perpendicular to the lower surface. Specifically, the cylindrical member 31 holding the fluid resistance element 2 and the O-ring 5 are accommodated in the first recess 41 of the holder mounting part 4, and in this state, the fixing member 32 is accommodated and fixed in the second recess 42, whereby the O-ring 5 is crushed between the upper end surface of the cylindrical member 31 and the bottom surface of the first recess 41 (the surface facing the upper end surface of the cylindrical member 31). By crushing the O-ring 5 in this manner, a seal is ensured between the inner surface of the first recess 41 and the upper end surface of the cylindrical member 31. In addition, the O-ring 5 is in close contact with the outer circumferential surface of the upper end 2c, which is an extension part of the fluid resistance element 2 extending outward from the element holder, and the inner surface of the first recess (the surface facing the outer circumferential surface of the upper end 2c). In this fixing mechanism 10, by fixing the fixing member 32 to the second recess 42, the fixing member 32 is positioned relative to the flow path block B (internal flow path R), and the element holder 3 fixed in contact with the fixing block 32 is positioned relative to the flow path block (internal flow path R). As a result, the fluid resistance element 2 held by the element holder 3 is positioned relative to the flow path block B (internal flow path R).

[0041] As shown in FIG. 4 , the fixing member 32 has a mounting surface 32a that is mounted in the second recess 42 and a pressing surface 32b that is configured to crush the O-ring 5 via the cylindrical member 31 when the mounting surface 32a is mounted in the second recess 42. In this embodiment, the mounting surface 32a and the pressing surface 32b are formed on the same flat surface. Therefore, when the fixing member 32 is mounted in the second recess 42, the sum of the axial length of the cylindrical member 31 and the thickness of the O-ring 5 in its natural state along the axial direction is greater than the distance between the upper surface (pressing surface 32a) of the fixing member 32 and the bottom surface of the first recess 41. The axial length of the cylindrical member 31 is shorter than the distance between the upper surface (pressing surface 32a) of the fixing member 32 and the bottom surface of the first recess 41. With this configuration, when the fixing member 32 is mounted in the second recess 42, the O-ring 5 positions the element holder 31 and the fluid resistance element 2 in the up-down direction (axial direction). Furthermore, the O-ring 5 contacts the outer peripheral surface of the fluid resistance element 2 and the inner surface of the holder mounting portion 4, thereby positioning the element holder 31 and the fluid resistance element 2 in the left-right direction (direction perpendicular to the axial direction). In this way, the O-ring 5 fills the gap formed by the outer peripheral surface of the upper end portion 2c of the fluid resistance element 2, the upper end surface of the element holder 3, and the opposing surface of the holder mounting portion 5. As a result, the O-ring 5 positions the fluid resistance element 2 and the cylindrical member 31 relative to the holder mounting portion 4.

[0042] When the element holder 3 is attached to the holder attachment portion 4, the upstream end surface 2a of the fluid resistance element 2 held by the cylindrical member 31 may have a gap between it and the bottom surface of the first recess 41 so as to prevent stress from being applied to the fluid resistance element 2. Note that when the element holder 3 is attached to the holder attachment portion 4, the upstream end surface 2a of the fluid resistance element 2 held by the cylindrical member 31 may be configured to come into contact with the bottom surface of the first recess 41.

[0043] Furthermore, in this embodiment, as shown in FIGS. 3 to 5, the element holder 3 has a lead-out portion 33 that leads the fluid flowing out of the resistance flow passage 21 to the downstream flow passage R2 (second downstream flow passage R2b). Specifically, the cylindrical member 31 and / or the fixing member 32 are formed with the lead-out portion 33 that leads the fluid flowing out of the resistance flow passage 21 to the downstream flow passage R2 (second downstream flow passage R2b). In this embodiment, a groove 31M that serves as a lead-out portion that leads the fluid flowing out of the resistance flow passage 21 to the second downstream flow passage Rb is formed in the lower end portion of the cylindrical member 31. This groove 31M communicates between the downstream end face 2b of the fluid resistance element 2 and the opening of the second downstream flow passage R2b. The groove 31M is a notch formed in the lower end portion of the cylindrical member 31, and extends from the center of the fluid resistance element 2 toward the second downstream flow passage R2b, as shown in FIG. The shape of the groove 31M (notch) can be changed in various ways, and for example, it may be formed over the entire radial direction of the cylindrical member 31. Through the outlet portion 33 configured in this manner, the fluid flows into the downstream flow path R2 (second downstream flow path R2b) directly or via a flow path portion 421 formed in the second recess 42.

[0044] <3. Effects of this embodiment> As described above, according to the fluid control device 100 of this embodiment, the element holder 3 is positioned and mounted on the holder mounting part 4 in a state in which the sealing member 5 is crushed by the element holder 3 holding the fluid resistance element 2 and the holder mounting part 4, so that the fluid resistance element 2 can be fixed to the internal flow path R while reducing positional deviation or vibration of the fluid resistance element 2 in the internal flow path R. As a result, it is possible to reduce variations in response performance due to positional deviation of the fluid resistance element 2, or reduce fluctuations in measurement values ​​due to vibration of the fluid resistance element 2.

[0045] <4. Other embodiments> For example, in the above embodiment, the cylindrical member 31 is provided with a contact surface 31x that contacts the downstream end surface 2b of the fluid resistance element 2. However, as shown in Figures 6 and 7, the upper surface of the fixing member 32 may have a contact surface 32x that contacts the downstream end surface 2b of the fluid resistance element 2. Since the cylindrical member 31 does not need to be provided with a protrusion 311, it can be made cylindrical with a uniform cross-sectional shape along the axial direction. Furthermore, the holder mounting portion 4 may have a contact surface that contacts the end surface of the fluid resistance element 2.

[0046] In this case, it is possible to provide the fixed member 32 with a lead-out portion 33 that leads the fluid flowing out of the resistance flow path 21 to the second downstream flow path R2b. Specifically, as shown in FIG. 6, the lead-out portion 33 may be formed by forming a recess 321 on the upper surface of the fixed member 32. This recess 321 connects the downstream end face 2b of the fluid resistance element 2 with the opening of the second downstream flow path R2b. Alternatively, as shown in FIG. 7, the lead-out portion 33 may be formed by forming a protrusion 322 on the upper surface of the fixed member 32. The upper surface of this protrusion 322 contacts both the lower end face of the tubular member 31 and the downstream end face 2b of the fluid resistance element 2, and the gap formed between the upper surface of the fixed member 32 and the fluid resistance element 2 serves as the lead-out portion 33.

[0047] Furthermore, in the above embodiment, the element holder 3 is configured as a separate cylindrical member 31 and fixing member 32, but the cylindrical member 31 and fixing member 32 may be formed integrally.

[0048] In the above embodiment, the fluid resistance element 2 is fixed approximately perpendicular to the planar side surface (bottom surface) of the flow path block 2, but the fluid resistance element 2 may be fixed at an angle to the planar side surface (bottom surface) of the flow path block 2, or may be fixed horizontally.

[0049] In the above embodiment, one sealing member 5 (O-ring) was provided at the upper end 2c, which is the extension of the fluid resistance element 2, but multiple sealing members 5 (O-rings) may also be provided along the vertical direction (axial direction) at the upper end 2c of the fluid resistance element 2.

[0050] Furthermore, in the above embodiment, the fluid control device 100 has been described as a pressure type, but it may also be a thermal type. The thermal type fluid control device 100 has a thermal sensor with a resistance temperature detector provided in a bypass path that branches off from the internal flow path R of the flow path block B and rejoins the internal flow path. In this configuration, the fluid resistance element 2 is fixed as a laminar flow element between the branching point and the junction point of the bypass path in the internal flow path R using the fixing mechanism of the above embodiment.

[0051] In the above embodiment, the actuator of the fluid control valve V may be one that uses a piezoelectric element (piezo stack) or one that uses a solenoid.

[0052] The fluid device of the present invention is not limited to a fluid control device as in the above embodiment, but may be a flow meter having a flow sensor mounted on a block body, or a pressure meter having a pressure sensor mounted on a block body.

[0053] In addition, various modifications and combinations of the embodiments may be made as long as they do not go against the spirit of the present invention. [Explanation of symbols]

[0054] 100 Fluid control device (fluid device) V···Fluid Control Valve R...Internal flow path B···Flow path block PS1, PS2... Pressure sensor (flow sensor) 2. Fluid resistance element 21. Resistance flow path 2b...Downstream end face 10...Fixing mechanism 3. Element holder 31 Cylindrical member 31x...Contact surface 32 Fixing member 33...Derivation part 4 Holder mounting part 5. Sealing member

Claims

1. A fluid device for controlling or measuring a physical quantity of a fluid, a flow path block in which an internal flow path is formed; a fluid resistance element provided in the internal flow path and having a resistance flow path formed therein that communicates with the internal flow path; a fixing mechanism for fixing the fluid resistance element to the internal flow path, The fixing mechanism includes: an element holder for holding the fluid resistance element; a holder mounting portion formed in the flow path block so as to communicate with the internal flow path, and on which the element holder is mounted; a seal member interposed between the element holder and a surface of the holder mounting portion facing the element holder, A fluidic device, wherein the element holder is positioned and attached to the holder attachment portion with the sealing member crushed by the element holder and the holder attachment portion.

2. the element holder holds the end of the fluid resistance element in a state where the end of the fluid resistance element extends outward, The fluid device according to claim 1 , wherein the seal member seals between an extension portion of the fluid resistance element that extends outward from the element holder and a surface of the holder mounting portion that faces the extension portion.

3. 3. The fluidic device according to claim 1, wherein the element holder or the holder mounting portion has a contact surface that comes into contact with an end face of the fluidic resistance element while holding the fluidic resistance element.

4. an outlet of the resistance flow path is formed on a downstream end surface of the fluid resistance element, The fluid device according to claim 3 , wherein the contact surface contacts a portion of the downstream end surface where the outlet is not formed.

5. The fluid resistance element is columnar, and a plurality of the resistance flow paths are formed along the axial direction thereof, 5. The fluid device according to claim 1, wherein the element holder surrounds and holds an outer peripheral surface of the fluid resistance element.

6. The fluidic device according to claim 1 , wherein the element holder has an outlet portion that leads the fluid that has flowed out of the resistance flow path to the internal flow path.

7. The fluid resistance element is columnar, and a plurality of the resistance flow paths are formed along the axial direction thereof, The element holder includes: a cylindrical member that surrounds and holds an outer peripheral surface of the fluid resistance element and sandwiches the seal member between itself and the holder mounting portion; A fluid device as described in any one of claims 1 to 4, further comprising a fixing member that is separate from the tubular member and positions and fixes the tubular member to the holder mounting portion when the tubular member crushes the sealing member.

8. The fluid device according to claim 7 , wherein the cylindrical member and / or the fixed member is formed with a lead-out portion that leads the fluid that has flowed out of the resistance flow path to the internal flow path.

9. the holder mounting portion is formed on a planar side surface of the flow path block, The fluid device according to claim 5 , wherein the fluid resistance element is fixed substantially perpendicular to the side surface by attaching the element holder to the holder attachment portion.

10. The fluidic device according to claim 1 , wherein the fluid resistance element is a ceramic restrictor.

11. The fluid device according to claim 1 , wherein a flow rate sensor and a fluid control valve are mounted on the block body.

12. The fluid device according to claim 1 , wherein the block body is equipped with a flow rate sensor or a pressure sensor.

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