Liquid supply system, liquid feeder, and liquid consuming apparatus

Abstract

To provide a novel liquid supply system which can share information with a device at a supply destination.SOLUTION: A liquid supply system for supplying a liquid to a device comprises a container storing therein the liquid, a liquid feed pump for feeding the liquid stored in the container, a supply path connecting the liquid feed pump and the device so that the liquid fed from the container by the liquid feed pump is supplied to the device, a first pressure gauge for detecting a pressure in the supply path, a pressure adjustment unit for adjusting the pressure in the supply path, and a first controller for controlling an operation of the pressure adjustment unit. The first controller stores therein data including information about the liquid or the liquid supply system and, when the pressure in the supply path detected by the first pressure gauge is within a prescribed range, increases or decreases the pressure in the supply path by the pressure adjustment unit in accordance with the data to transmit the data to the device through the supply path.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a liquid supply system that supplies a liquid to an apparatus, a liquid delivery device used in the liquid supply system, and an apparatus that consumes a liquid. [Background technology]

[0002] In the device chip manufacturing process, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in multiple regions on the front side of a wafer, which are partitioned by multiple intersecting dividing lines (streets).The wafer is then ground from the back side to thin it, and divided along the dividing lines to obtain multiple device chips, each equipped with a device.The device chips are then installed in electronic devices such as mobile terminals and personal computers.

[0003] To divide a wafer, a cutting device equipped with a circular cutting blade or a laser processing device that irradiates a laser beam onto the wafer to perform laser processing is used. To thin a wafer from the backside, a grinding device equipped with a circular grinding wheel or a polishing device equipped with a disk-shaped polishing pad is used. In addition, in the device chip manufacturing process, a cleaning device that cleans the wafer and a coating device that coats the surface of the wafer with a liquid material to form a thin film are also used. In this way, a wide variety of equipment is used.

[0004] In these devices, a liquid suited to the purpose is often supplied and used. For example, when cutting a workpiece such as a wafer using a cutting device, a liquid in which a liquid additive has been mixed into pure water may be used. In this case, a processing liquid supply device is used to mix the additive into pure water and supply it to the cutting device (see Patent Document 1). Also known is a laser processing device that can form a protective film by applying a liquid protective film agent to the workpiece before laser processing it (see Patent Document 2).

[0005] Liquids such as additives and protective film agents are stored and transported in containers such as bottles. The containers that store the liquids are then built into the equipment, and the liquid is supplied from the containers to the equipment. When the liquid is consumed in the equipment, the containers eventually become empty. Each time this happens, the workers replace the containers. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-222963 [Patent Document 2] Japanese Patent Application Laid-Open No. 2004-322168 Summary of the Invention [Problem to be solved by the invention]

[0007] In the container replacement process, first, the empty container is disconnected from the device and removed from the device, and then a new container is loaded into the device and connected to the device. Thus, the container replacement process itself requires a great deal of work. Furthermore, if the device is installed in an area requiring special access precautions, such as a clean room, the worker must prepare according to a defined entry procedure to carry the container into the area, which requires even more work.

[0008] Furthermore, when the container becomes empty and the supply of liquid stops, the device must be partially or completely shut down. The device must remain shut down while the container is replaced. Therefore, frequent container replacement increases the device's downtime, reducing its operating efficiency.

[0009] As such, a great deal of effort and care is expended to maintain a system for smoothly supplying liquid to devices, and there is a need for a liquid supply system that can more easily and stably supply liquid to devices without stopping the devices for long periods of time. Furthermore, it is thought that such a new liquid supply system will require information about the liquid being supplied to be shared between each device.

[0010] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a new liquid supply system and the like that can share information with devices to which liquid is supplied. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a liquid supply system for supplying a liquid to an apparatus, the liquid supply system comprising: a container for storing the liquid; a liquid delivery pump for delivering the liquid stored in the container; a supply path connecting the liquid delivery pump to the apparatus so that the liquid delivered from the container by the liquid delivery pump is supplied to the apparatus; a first pressure gauge for detecting the pressure in the supply path; a pressure adjustment unit for adjusting the pressure in the supply path; and a first controller for controlling the operation of the pressure adjustment unit, wherein the first controller stores data including information about the liquid or the liquid supply system, and when the pressure in the supply path detected by the first pressure gauge is within a predetermined range, the first controller transmits the data to the apparatus through the supply path by increasing or decreasing the pressure in the supply path using the pressure adjustment unit in accordance with the data.

[0012] Preferably, the pressure adjustment unit includes an outlet path branching off from the supply path and an outlet control valve that controls the outflow of the liquid from the supply path to the outlet path, and the first controller lowers the pressure in the supply path by opening the outlet control valve and raises the pressure in the supply path by closing the outlet control valve.

[0013] Preferably, the device includes a second pressure gauge that detects the pressure in the supply line and a second controller that controls the operation of the device, and the second controller receives the data transmitted from the liquid supply system through the supply line by detecting an increase or decrease in pressure in the supply line by the second pressure gauge when the pressure in the supply line detected by the second pressure gauge is within the predetermined range, and stores the data.

[0014] Preferably, the apparatus further includes a display unit, and the second controller causes the display unit to display the information included in the data. Preferably, the information includes any one of the name of the liquid, the lot number of the liquid, and the expiration date of the liquid. Preferably, the apparatus is located in a clean room, the container and the liquid feed pump are located outside the clean room, and the supply path is provided from outside the clean room to inside the clean room. Preferably, a plurality of the apparatuses are connected to a liquid supply system.

[0015] According to another aspect of the present invention, there is provided a liquid delivery device that supplies a liquid to an apparatus, the liquid delivery device comprising: a container for storing the liquid; a liquid delivery pump that delivers the liquid stored in the container; a pressure gauge that detects the pressure in a supply path connecting the liquid delivery pump to the apparatus; a pressure adjustment unit that adjusts the pressure in the supply path; and a controller that controls the operation of the pressure adjustment unit, wherein the controller stores data including information about the liquid or the liquid delivery device, and when the pressure in the supply path detected by the pressure gauge is within a predetermined range, the controller transmits the data to the apparatus through the supply path by increasing or decreasing the pressure in the supply path using the pressure adjustment unit in accordance with the data.

[0016] According to yet another aspect of the present invention, there is provided a device for consuming liquid supplied from a liquid delivery device, comprising: a pressure gauge for detecting the pressure in the supply path connecting the liquid delivery device to the device; and a controller for controlling the operation of the device, wherein when the pressure in the supply path detected by the pressure gauge is within a predetermined range, the controller receives data transmitted from the liquid delivery device through the supply path by detecting an increase or decrease in pressure in the supply path with the pressure gauge, and stores the data. [Effects of the Invention]

[0017] A liquid supply system according to one aspect of the present invention comprises a supply path connecting a liquid delivery pump to an apparatus so that liquid delivered from a container by the liquid delivery pump is supplied to the apparatus, a first pressure gauge detecting the pressure in the supply path, a pressure adjustment unit adjusting the pressure in the supply path, and a first controller controlling the operation of the pressure adjustment unit.

[0018] The first controller stores data including information about the liquid or the liquid supply system, and when the pressure in the supply path detected by the first pressure gauge is within a predetermined range, the pressure in the supply path is increased or decreased by the pressure adjustment unit in accordance with the data, thereby transmitting the data to the device through the supply path.

[0019] Therefore, the device can receive data transmitted from the liquid supply system simply by detecting an increase or decrease in pressure in the supply path. Thus, according to one aspect of the present invention, a new liquid supply system is provided that can share information with devices to which liquid is supplied.

[0020] Furthermore, in a liquid supply system according to one aspect of the present invention, information about the liquid and the liquid supply system can be shared with each device without using electrical signals, eliminating the need for equipment for sending and receiving electrical signals between the liquid supply system and each device. This simplifies factory equipment and leads to cost reductions. There is also no risk of information leaking to the outside, as occurs when information is shared via general wireless communication. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a perspective view schematically illustrating a liquid supply system. [Figure 2] FIG. 4 is a cross-sectional view schematically showing a connection portion attached to a liquid container. [Figure 3] FIG. 2 is a diagram illustrating a schematic view of a part of a liquid supply system. [Figure 4] FIG. 2 is a perspective view schematically showing a device to which the liquid is supplied. [Figure 5] FIG. 2 is a perspective view schematically showing a workpiece to which a liquid resin is applied. [Figure 6] FIG. 2 is a diagram schematically illustrating a liquid supply system of the apparatus. [Figure 7] FIG. 10 is a functional block diagram showing some of the functions of a controller included in a liquid delivery device of a liquid supply system according to a modified example. [Figure 8] FIG. 10 is a diagram schematically illustrating a liquid supply system of an apparatus according to a modified example. [Figure 9] FIG. 10 is a functional block diagram showing some of the functions of a controller included in an apparatus according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. A liquid supply system according to this embodiment is connected to an apparatus, such as a processing apparatus, for processing a workpiece, and is used to supply liquid to the apparatus. However, the apparatus to which the liquid is supplied is not limited to the processing apparatus.

[0023] Conventionally, liquid is supplied to an apparatus by carrying a liquid container containing the liquid into the apparatus. Then, when the liquid is consumed and the liquid container finally becomes empty, the container is replaced. To replace the container, first, the empty liquid container is disconnected from the apparatus and removed from the apparatus, and then a new liquid container is carried into the apparatus and connected to the new liquid container. Thus, the container replacement process itself is very time-consuming.

[0024] Furthermore, if the equipment is installed in an area requiring special precautions, such as the interior space of a clean room, workers must follow a set entry procedure to carry the liquid container into the area, which requires additional preparations. Furthermore, when the liquid container becomes empty and the supply of liquid stops, some or all of the equipment's functions must be shut down, and the equipment must remain shut down while the container is replaced. Therefore, frequent container replacement increases the equipment's downtime and reduces its availability.

[0025] Furthermore, a device chip manufacturing factory may be equipped with multiple pieces of equipment, and these pieces of equipment may be used simultaneously. In this case, it is possible that the liquid containers of two or more pieces of equipment may become empty at the same time. It is not easy for one worker to simultaneously replace the liquid containers of multiple pieces of equipment. This further reduces the availability of the equipment, as replacement work cannot be started on another piece of equipment while replacement work is being performed on another piece of equipment.

[0026] Furthermore, when a liquid container is installed inside or near a device to which the liquid is to be supplied, there are restrictions on the shape and size of the liquid container that can be used. Therefore, it is often not possible to simply increase the capacity of the liquid container in order to reduce the frequency of replacing the liquid container. In consideration of these circumstances, the liquid supply system according to this embodiment is configured to more easily and stably supply liquid to a device without stopping the device for long periods of time.

[0027] 1 is a perspective view showing a schematic overall view of a liquid supply system 70 that supplies liquid to an apparatus. The liquid supply system 70 supplies liquid contained in a liquid container 78 to apparatuses (apparatuses that consume liquid) 2a, 2b, and 2c. The apparatuses 2a, 2b, and 2c to which the liquid is supplied are typically processing apparatuses for processing workpieces such as wafers. However, the apparatuses 2a, 2b, and 2c may also be other apparatuses that use (consume) liquid.

[0028] 1 shows two liquid container units 71, each having four liquid containers 78 mounted on one pallet 74. Also shown in FIG. 1 is a liquid supply system 70 that supplies liquid to three apparatuses 2a, 2b, and 2c installed in a clean room 100. However, the shape and number of the liquid containers 78, the number of apparatuses to which liquid is supplied by the liquid supply system 70, and the like are not limited to these. The liquid supply system 70 may supply liquid from one or more liquid containers 78 to one or more apparatuses.

[0029] The liquid supply system 70 is mainly composed of a liquid container mounting area 72, a liquid delivery device 86 that delivers liquid from a liquid container 78 placed on the liquid container mounting area 72 to devices 2a, 2b, and 2c, and a supply path 94 that connects the liquid delivery device 86 and devices 2a, 2b, and 2c.

[0030] The liquid container placing place 72 is provided, for example, outside the clean room 100 in which the devices 2a, 2b, and 2c are installed. However, the liquid container placing place 72 may be set inside the clean room 100 instead of outside. The liquid container placing place 72 should be set in a location that is convenient for the transport and storage of the liquid containers 78. Furthermore, the liquid container placing place 72 may be set near the devices 2a, 2b, and 2c to which the liquid is supplied, or may be set in a location away from the devices 2a, 2b, and 2c.

[0031] Unlike when a container for holding liquid is placed inside the device, placing the liquid container 78 in the liquid container placement area 72 outside the device reduces restrictions on the size and shape of the liquid container 78. For example, a large-capacity container such as a drum can can be used as the liquid container 78. When a large-capacity liquid container 78 is used, the frequency with which the liquid container 78 needs to be replaced also decreases. The capacity of the liquid container 78 may be 10 times or more the capacity of a typical liquid container placed inside the device, and may be 150 L or more and 300 L or less, for example, around 200 L.

[0032] 1, in this embodiment, four liquid containers 78 are placed on a single pallet 74 and integrated to form one liquid container unit 71. In this manner, a plurality of liquid containers 78 may be integrated to form one liquid container unit 71. However, a plurality of liquid containers 78 do not necessarily have to be integrated into the liquid container unit 71.

[0033] 1, two liquid container units 71 are placed in the liquid container placement area 72. In this case, even after all of the liquid containers 78 belonging to one liquid container unit 71 have been emptied, for example, while the one liquid container unit 71 is being replaced, the liquid supply system 70 can continue to supply liquid from the other liquid container unit 71 to the devices 2a, 2b, and 2c. However, it is not necessary for multiple liquid container units 71 to be placed in the liquid container placement area 72.

[0034] Pallet 74 has an entrance 76 formed on the side that opens into the forklift claws. Therefore, pallet 74 can be easily transported by inserting the forklift claws into entrance 76 and raising the claws. In other words, this liquid container unit 71 can be easily transported by a forklift. Therefore, liquid container placement area 72 should be set in a location where liquid container unit 71 can be easily transported in and out by a forklift. However, the structure of pallet 74 is not limited to this.

[0035] Liquid container 78 has a storage space for storing liquid inside a cylindrical body, and is equipped with a top plate 80 fixed to the body so as to close the upper part of this storage space. Top plate 80 is formed with an inlet 82 through which liquid passes when entering or leaving the storage space of liquid container 78, and a ventilation port 84 which is opened when ventilating the storage space and adjusting the pressure.

[0036] When the liquid container 78 is placed on the liquid container placement area 72, the liquid contained in the liquid container 78 is sucked out by a liquid delivery device 86 from an inlet 82 in a top plate 80 of the liquid container 78. The liquid delivery device 86 includes a housing 88 that houses various components, and a connection port 90 that extends from above the housing 88 in a substantially horizontal direction.

[0037] One end of each of a plurality of tubular liquid guide paths 92 is connected to a connection port 90 of the liquid delivery device 86. However, the liquid delivery device 86 does not have to have the connection port 90, and one end of each of the plurality of liquid guide paths 92 may be directly connected to a housing 88 of the liquid delivery device 86. The other end of each of the plurality of liquid guide paths 92 is detachably connected to the respective inlets 82 of the plurality of liquid containers 78 placed on the liquid container placement site 72. FIG. 2 is a cross-sectional view schematically showing the structure of the connection portion between the liquid guide paths 92 and the inlets 82.

[0038] In order to obtain high strength (rigidity), the liquid guide path 92 of this embodiment has a double-pipe structure as shown in Fig. 2. That is, the liquid guide path 92 includes an outer tube 102 and an inner tube 104 housed in the outer tube 102. However, the structure of the liquid guide path 92 is not necessarily limited to the double-pipe structure.

[0039] The other end of the liquid guide path 92 (outer tube 102) is provided with a connector 106 as a joint structure suitable for attachment to the inlet 82. A pipe-shaped liquid suction tube (not shown) is connected to the connector 106, and is inserted from the inlet 82 into the storage space of the liquid container 78 when the connector 106 is attached to the inlet 82. The liquid suction tube has a length corresponding to the height of the storage space, and when the connector 106 is attached to the inlet 82, the lower end of the liquid suction tube reaches near the bottom of the storage space.

[0040] The liquid 108 contained in the liquid container 78 is sucked up through the liquid suction tube and the liquid guideway 92. Inside the liquid guideway 92, the liquid 108 flows through the space between the outer tube 102 and the inner tube 104. To ensure a space through which the liquid 108 can pass, the inner diameter of the outer tube 102 is determined to be larger than the outer diameter of the inner tube 104.

[0041] 2, a light-emitting unit 112 that emits visible light to notify an operator or the like is disposed inside the connection part 106 and inside the inner tube 104 of the liquid guide path 92. The connection part 106 and the liquid guide path 92 are made of a material that can transmit visible light so that the light emitted by the light-emitting unit 112 can be seen from the outside. The connection part 106 and the liquid guide path 92 are made of, for example, a resin material that is transparent to visible light.

[0042] The light-emitting unit 112 includes, for example, a first light source 114a capable of emitting light of a first color and a second light source 114b capable of emitting light of a second color different from the first color, and is configured with an LED or the like. For example, the first light source 114a is an LED capable of emitting green light, and the second light source 114b is an LED capable of emitting red light. The light-emitting unit 112 is connected to wiring 110 capable of transmitting signals or power for controlling the light emission of the light-emitting unit 112. However, the light-emitting unit 112 does not necessarily have to be disposed inside the connection unit 106.

[0043] Next, we will explain the components of the liquid delivery device 86. Figure 3 is a diagram showing the connection relationships between the components of the liquid delivery device 86. For ease of explanation, Figure 3 also shows the supply channel 94, liquid guide channels 92a and 92b, connection portions 106a and 106b, liquid containers 78a and 78b, etc., which are located outside the liquid delivery device 86.

[0044] 3, the liquid delivery device 86 has a combined flow path 92c through which the liquid 108 supplied from the liquid containers 78a, 78b flows via the liquid guide paths 92a, 92b. A sealed storage container 120 capable of storing the liquid 108 is connected to one end of the combined flow path 92c. Meanwhile, the other end of the combined flow path 92c corresponds to the connection port 90 described above, and one end of each of the liquid guide paths 92a, 92b is connected to the combined flow path 92c via one of a plurality of selection valves 116a, 116b arranged near the connection port 90.

[0045] Selection valves 116a, 116b are typically electromagnetic valves (solenoid valves) and are connected to controller (control unit) 150. Selection valves 116a, 116b switch between liquid containers 78a, 78b as supply sources of liquid 108 based on commands from controller 150. For example, when selection valve 116a is open (open state), liquid 108 supplied from liquid container 78a flows through liquid guide path 92a and into junction path 92c, and when selection valve 116b is open (open state), liquid 108 supplied from liquid container 78b flows through liquid guide path 92b and into junction path 92c.

[0046] The controller 150 is configured by a computer including, for example, a processing device and a storage device, and controls each element of the liquid supply system 70 provided inside and outside the liquid delivery device 86. The processing device is typically a CPU (Central Processing Unit), and performs various processes required to control each element of the liquid supply system 70.

[0047] The storage device includes, for example, a main storage device such as a dynamic random access memory (DRAM) and an auxiliary storage device such as a hard disk drive or flash memory. The functions of the controller 150 are realized, for example, by the processing device operating in accordance with a program (software) stored in the storage device. However, the controller 150 may also be realized solely by hardware.

[0048] The number of liquid guideways and selection valves is appropriately set depending on the number of liquid containers or liquid container units, etc. For example, if three or more selection valves are provided, two or more of them may be opened simultaneously. In either case, the remaining selection valves that are not opened are closed based on a command from controller 150.

[0049] A photoelectric or other type of bubble sensor 118 is provided between one end and the other end of the junction channel 92c to detect the presence or absence of bubbles in the liquid 108 flowing through the junction channel 92c. If the bubble sensor 118 is a photoelectric type, the bubble sensor 118 detects the presence or absence of bubbles in the liquid 108 by utilizing the difference in refractive index between the liquid 108 and air bubbles. However, the bubble sensor 118 is not limited to being a photoelectric type. The bubble sensor 118 is connected to the controller 150, and if air bubbles are mixed in the liquid 108 flowing through the junction channel 92c, it sends an electrical signal to the controller 150 informing the controller 150. Note that the bubble sensor 118 may be provided in each of the liquid guide channels 92a, 92b.

[0050] A decompression unit 124 is connected to the storage container 120 via a degassing pipe 122. The decompression unit 124 is configured by, for example, a suction pump or an ejector. When the decompression unit 124 is operated, the gas inside the storage container 120 is discharged to the outside of the storage container 120, and the pressure inside the storage container 120 is reduced. When the decompression unit 124 is operated to reduce the pressure of the storage container 120 in a state in which no liquid 108 is stored inside the storage container 120, such as when starting operation of the liquid supply system 70, negative pressure acts on the liquid containers 78a, 78b through the open selection valves 116a, 116b.

[0051] As a result, the liquid 108 contained in the liquid containers 78a and 78b is sucked up and flows into the storage container 120 through the liquid guide paths 92a and 92b and the junction path 92c. On the other hand, when the decompression unit 124 is operated to reduce the pressure inside the storage container 120 while the liquid 108 is stored inside the storage container 120, air bubbles are quickly removed from the liquid 108 inside the storage container 120. Therefore, the storage container 120 and the decompression unit 124 function as a degassing unit that performs a degassing process to remove gas from the liquid 108.

[0052] Two water level sensors (liquid surface sensors) 126, 128 are provided inside the storage container 120. Alternatively, the water level sensors 126, 128 are disposed on the outer wall (outside) of the storage container 120. The water level sensors 126, 128 are typically capacitance-type or float-type level switches, etc. However, the water level sensors 126, 128 are not limited to these. Each water level sensor 126, 128 is connected to the controller 150 and transmits the detection result of the liquid 108 to the controller 150.

[0053] The lower water level sensor 126 is provided, for example, at a height position close to the bottom of the storage container 120, and is mainly used to determine whether the storage container 120 is empty. The upper water level sensor 128 is provided, for example, at a height of the liquid surface of the liquid 108 when a sufficient volume of the liquid 108 is contained in the storage container 120, and is mainly used to determine whether the storage container 120 is full.

[0054] When a sufficient amount of liquid 108 is contained in storage container 120, water level sensor 126 is submerged in liquid 108 and detects liquid 108. On the other hand, when the amount of liquid 108 stored in storage container 120 decreases and storage container 120 approaches empty, water level sensor 126 no longer detects liquid 108. This makes it possible to determine whether or not liquid 108 is contained in storage container 120.

[0055] As the liquid 108 continues to flow into the storage container 120 and the storage container 120 approaches full capacity, the water level sensor 128 detects the liquid 108. That is, in this case, the liquid 108 is detected by the two water level sensors 126, 128. This indicates that the liquid 108 has been contained in the storage container 120 up to its limit, and that the storage container 120 is full.

[0056] 3, two liquid delivery systems 129a, 129b are connected to storage container 120. Specifically, liquid suction pipes 130a, 130b, which serve as the starting ends of liquid delivery systems 129a, 129b, are inserted into storage container 120. The lower ends of liquid suction pipes 130a, 130b reach the vicinity of the bottom surface of storage container 120. One liquid suction pipe 130a is connected to liquid delivery pump 132a outside storage container 120, and the other liquid suction pipe 130b is connected to liquid delivery pump 132b outside storage container 120.

[0057] In this embodiment, one of these two liquid delivery systems 129a, 129b operates to deliver the liquid 108 from the storage container 120 to the devices 2a, 2b, 2c. In this case, even if one of the liquid delivery systems 129a, 129b stops due to a malfunction, inspection work, or the like, the other liquid delivery system 129a, 129b can continue to deliver the liquid 108. However, the number of liquid delivery systems of the liquid delivery device 86 is not limited to two, and may be one, or three or more.

[0058] The liquid feed pumps 132a and 132b are, for example, air-driven pumps, typically air-driven diaphragm pumps. That is, the liquid feed pumps 132a and 132b are driven by receiving a supply of air without relying on electricity. An air supply system 138 for supplying air is connected to each of the liquid feed pumps 132a and 132b. Note that FIG. 3 shows only the air supply system 138 connected to the liquid feed pump 132a, and the air supply system connected to the liquid feed pump 132b is omitted, but both air supply systems are configured in the same way.

[0059] The air supply system 138 supplies air at a predetermined pressure from an air source 140 provided outside the liquid delivery device 86 to the liquid delivery pump 132a. The air source 140 is, for example, a utility facility provided in a device chip manufacturing factory in which the devices 2a, 2b, and 2c are installed. The air supply system 138 includes an air supply path 142 for supplying air from the air source 140 to the liquid delivery pump 132a.

[0060] An electromagnetic valve (solenoid valve) 144 is provided in the air supply path 142. The electromagnetic valve 144 is connected to a controller 150 and is controlled based on commands from the controller 150. For example, when the electromagnetic valve 144 is opened, air is supplied from the air source 140 to the liquid feed pump 132a, and when the electromagnetic valve 144 is closed, the supply of air to the liquid feed pump 132a is stopped. In this way, the electromagnetic valve 144 controls the supply and stop of air from the air source 140 to the liquid feed pump 132a through the air supply path 142.

[0061] When the liquid feed pump 132a is operated, the solenoid valve 144 is opened and air is supplied to the liquid feed pump 132a from the air source 140. This operates the air-driven liquid feed pump 132a, and a negative pressure acts on the liquid 108 stored in the storage container 120 through the liquid suction pipe 130a, causing the liquid 108 to be sucked up by the liquid feed pump 132a. The liquid feed pump 132a then sends the liquid 108 to the supply path 94 leading to the devices 2a, 2b, and 2c.

[0062] As the liquid 108 stored in the storage container 120 is sucked out by the liquid feed pumps 132a, 132b, the pressure inside the storage container 120 decreases. As a result, negative pressure acts on the liquid containers 78a, 78b through the liquid guide paths 92a, 92b, and the liquid 108 stored in the liquid containers 78a, 78b flows into the storage container 120 through the liquid guide paths 92a, 92b. In other words, the liquid 108 sucked out from the storage container 120 is automatically replenished to the storage container 120. During this process, the decompression unit 124 does not need to be operating.

[0063] 3, a spare air supply path 146 is connected to the air supply path 142 of the air supply system 138 as a bypass that circumvents the solenoid valve 144. In other words, the spare air supply path 146 branches off from the air supply path 142 on the air source 140 side of the solenoid valve 144 and merges with the air supply path 142 on the liquid feed pump 132a side of the solenoid valve 144.

[0064] A manual valve 148 that can be manually switched between an open state (air supply) and a closed state (supply stop) is provided in the spare air supply path 146. For example, if the supply of power to the liquid supply system 70 from the utility equipment of the device chip manufacturing factory is stopped, the manual valve 148 can be manually switched between an open state and a closed state. This makes it possible to continue supplying the liquid 108 to the supply path 94 by switching between supplying air from the air source 140 to the liquid feed pump 132a and stopping the supply, even if the power supply to the liquid supply system 70 is cut off.

[0065] The liquid feed pump 132a is connected to the supply channel 94 via an air bubble sensor 134a and a liquid feed valve 136a, and the liquid feed pump 132b is connected to the supply channel 94 via an air bubble sensor 134b and a liquid feed valve 136b. In other words, the air bubble sensors 134a and 134b and the liquid feed valves 136a and 136b are provided downstream of the liquid feed pumps 132a and 132b.

[0066] The air bubble sensors 134a, 134b are, for example, photoelectric air bubble sensors, and detect whether or not air bubbles have been mixed in the liquid 108 flowing into the supply path 94. However, the air bubble sensors 134a, 134b are not limited to being photoelectric. The air bubble sensors 134a, 134b are connected to the controller 150, and when air bubbles have been mixed in the liquid 108, they send an electrical signal to the controller 150 indicating this.

[0067] If the inflow of liquid 108 from liquid containers 78a, 78b into storage container 120 is stagnant even though the suction of liquid 108 stored in storage container 120 is progressing, the liquid level of liquid 108 in storage container 120 will drop. As a result, the lower ends of liquid suction tubes 130a, 130b will be exposed to the outside of liquid 108, and air bubbles will become mixed into the liquid 108 flowing inside liquid suction tubes 130a, 130b. Air bubble sensors 134a, 134b detect such air bubbles.

[0068] Therefore, the air bubble sensors 134a, 134b can detect that the liquid 108 in the storage container 120 has decreased to the extent that the lower ends of the suction pipes 130a, 130b are exposed outside the liquid 108, that is, that the storage container 120 has become substantially empty. When the air bubble sensors 134a, 134b detect that the storage container 120 has become substantially empty, the lower water level sensor 126 does not need to be provided in the storage container 120.

[0069] The liquid supply valves 136a, 136b are, for example, a combination of an air-operated valve and an electromagnetic valve (solenoid valve), and are used to select a liquid supply system to be operated from among a plurality of liquid supply systems provided in the liquid supply device 86. Specifically, the liquid supply valves 136a, 136b are connected to the controller 150, and are controlled so that one of the liquid supply valves 136a, 136b is open and the other is closed based on a command from the controller 150. At least one of the liquid supply valves 136a, 136b is controlled to be always open.

[0070] For example, when the liquid supply valve 136a is opened and the liquid supply valve 136b is closed, the liquid supply pump 132a supplies the liquid 108. That is, the liquid supply system 129a is activated. When the liquid supply valve 136b is opened and the liquid supply valve 136a is closed, the liquid supply pump 132b supplies the liquid 108. That is, the liquid supply system 129b is activated.

[0071] For example, if one of the two liquid supply systems 129a, 129b is used as a normal liquid supply system and the other is used as an emergency liquid supply system, the emergency liquid supply system will not operate until the normal liquid supply system is stopped, and the emergency liquid supply system will be stopped for a long time. In this case, liquid 108 will remain in the flow path of the emergency liquid supply system for a long time, which is likely to cause problems such as changes in the quality of liquid 108 and adhesion of components of liquid 108 to components of the emergency liquid supply system.

[0072] Therefore, it is preferable that the two liquid supply systems 129a, 129b be used alternately. For example, the controller 150 may periodically switch between the liquid supply valves 136a, 136b that are opened. In this case, the liquid 108 does not remain in either of the liquid supply systems 129a, 129b for a long period of time, thereby avoiding the occurrence of the above-mentioned problems.

[0073] 3, liquid delivery device 86 of liquid supply system 70 includes a pressure adjustment unit 172 for adjusting the pressure inside supply channel 94. Pressure adjustment unit 172 has, for example, an outlet channel 174 branching off from supply channel 94. That is, one end of this outlet channel 174 is connected to supply channel 94. Meanwhile, the other end of outlet channel 174 is inserted into storage container 120.

[0074] Furthermore, an outflow control valve 176 is provided in the outflow path 174. The outflow control valve 176 is typically an electromagnetic valve (solenoid valve) and is connected to the controller 150. The outflow control valve 176 controls the outflow of the liquid 108 from the supply path 94 to the outflow path 174 based on a command from the controller 150.

[0075] As described above, one of the liquid supply valves 136a, 136b is always open, so when the outflow control valve 176 is closed, the liquid 108 flows from the storage container 120 into the supply path 94, increasing the pressure within the supply path 94. On the other hand, when the outflow control valve 176 is open, the liquid 108 supplied into the supply path 94 flows through the outflow path 174 and is returned to the storage container 120 via this outflow path 174. Therefore, when the outflow control valve 176 is open, the pressure within the supply path 94 decreases.

[0076] In this embodiment, when the pressure in supply path 94 exceeds a first threshold, outflow control valve 176 is opened, and when the pressure in supply path 94 falls below a second threshold, outflow control valve 176 is closed. In other words, the pressure in supply path 94 is maintained within a predetermined range determined by the first threshold and the second threshold. In this case, liquid 108 continues to circulate between liquid delivery systems 129a, 129b and storage container 120, making it less likely that problems such as changes in the quality of liquid 108 in supply path 94 will occur.

[0077] When the pressure of the liquid 108 on the supply path 94 side increases sufficiently due to the operation of the liquid delivery systems 129a and 129b, the air pressure supplied from the air source 140 is no longer sufficient to move the diaphragms of the liquid delivery pumps 132a and 132b. In other words, when the pressure of the liquid 108 on the supply path 94 side increases to a certain level, the liquid delivery pumps 132a and 132b stop delivering the liquid 108 even if the liquid delivery valves 136a and 136b are open. On the other hand, when the pressure of the liquid 108 on the supply path 94 side decreases, the liquid delivery pumps 132a and 132b start operating again, and the delivery of the liquid 108 by the liquid delivery pumps 132a and 132b resumes.

[0078] The liquid 108 that flows into the supply path 94 by either of the liquid delivery systems 129a, 129b proceeds toward the devices 2a, 2b, and 2c. With the configuration described above, the liquid delivery device 86 sucks the liquid 108 from at least one of the multiple liquid containers 78 placed on the liquid container placement area 72, transfers it to the storage container 120, and delivers the liquid 108 from this storage container 120 to each of the devices 2a, 2b, and 2c via the supply path 94, etc.

[0079] 1, in this embodiment, the devices 2a, 2b, and 2c are installed in a clean room 100, and the liquid container placement area 72 is set outside the clean room 100. Therefore, the supply path 94 is arranged to penetrate the outer wall of the clean room 100.

[0080] The supply path 94 is provided with a pressure gauge 96 for detecting the pressure of the liquid 108 in the supply path 94. The pressure gauge 96 is connected to a controller 150 of the liquid delivery device 86, and transmits the pressure value of the liquid 108 in the supply path 94 to the controller 150. The controller 150 controls the operation of the two liquid delivery systems 129a, 129b based on the pressure value obtained from the pressure gauge 96. The pressure gauge 96 is provided, for example, outside the clean room 100 and outside the liquid delivery device 86, but may also be provided inside the clean room 100 or inside the liquid delivery device 86.

[0081] The supply path 94 branches into three branch paths 94a, 94b, and 94c outside the clean room 100, and is connected to each of the apparatuses 2a, 2b, and 2c via one of on-off valves 98a, 98b, and 98c. Specifically, the branch path 94a provided with the on-off valve 98a is connected to the apparatus 2a, the branch path 94b provided with the on-off valve 98b is connected to the apparatus 2b, and the branch path 94c provided with the on-off valve 98c is connected to the apparatus 2c. However, the supply path 94 may branch inside the clean room 100. The numbers of the branch paths 94a, 94b, and 94c and the on-off valves 98a, 98b, and 98c are changed according to the number of the apparatuses 2a, 2b, and 2c.

[0082] The on-off valves 98a, 98b, 98c are, for example, solenoid valves, and are used to switch between allowing and stopping the inflow of the liquid 108 into the devices 2a, 2b, 2c from the supply path 94. The on-off valves 98a, 98b, 98c are connected to controllers (not shown) of the devices 2a, 2b, 2c to which the branch paths 94a, 94b, 94c, respectively, are connected.

[0083] The controllers of the devices 2a, 2b, and 2c are configured by, for example, a computer including a processing unit and a storage device, and control each element of the devices 2a, 2b, and 2c. The processing unit is typically a CPU (Central Processing Unit), and performs various processes required to control each element of the devices 2a, 2b, and 2c.

[0084] The storage device includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive or flash memory. The functions of this controller are realized, for example, by the processing device operating in accordance with a program (software) stored in the storage device. However, the controller may also be realized solely by hardware.

[0085] When the devices 2a, 2b, 2c need to be supplied with the liquid 108, the controller of each device 2a, 2b, 2c opens the on-off valves 98a, 98b, 98c to receive the supply of the liquid 108 from the supply path 94. On the other hand, when the devices 2a, 2b, 2c do not need to be supplied with the liquid 108, the controller of each device 2a, 2b, 2c closes the on-off valves 98a, 98b, 98c.

[0086] When the liquid 108 flows from the supply channel 94 into the devices 2a, 2b, and 2c, the pressure of the liquid 108 inside the supply channel 94 decreases, and the pressure value measured by the pressure gauge 96 decreases. When the pressure value measured by the pressure gauge 96 decreases, or when this pressure value falls below a predetermined threshold, the controller 150 opens one of the liquid supply valves 136a and 136b and operates one of the two liquid supply systems 129a and 129b. This causes the liquid 108 to be supplied to the supply channel 94.

[0087] Furthermore, when the liquid 108 is supplied to the supply path 94 while the devices 2a, 2b, and 2c no longer need to receive the supply of the liquid 108 and the on-off valves 98a, 98b, and 98c are closed, the pressure value measured by the pressure gauge 96 increases. When the pressure value measured by the pressure gauge 96 increases or exceeds a predetermined threshold value, the controller 150 closes both of the liquid supply valves 136a and 136b and stops the operation of the liquid supply systems 129a and 129b.

[0088] As liquid delivery device 86 of liquid supply system 70 configured as described above continues to suck up liquid 108 contained in liquid containers 78a, 78b, the amount of liquid 108 contained inside liquid containers 78a, 78b decreases, and the liquid level of liquid 108 in liquid containers 78a, 78b gradually drops. When the liquid level of liquid 108 reaches the vicinity of the lower ends of the suction tubes inserted into liquid containers 78a, 78b and air bubbles begin to mix into liquid 108 being sucked up by the suction tubes, these air bubbles are detected by air bubble sensor 118.

[0089] Therefore, the air bubble sensor 118 can detect that the liquid 108 in the liquid containers 78a, 78b has decreased to the point where the lower ends of the suction tubes are exposed outside the liquid 108, that is, that the liquid containers 78a, 78b have become substantially empty. When the controller 150 receives a notification from the air bubble sensor 118 that the liquid container 78a, 78b has become substantially empty, it disconnects the liquid container 78a, 78b in question from the storage container 120 and connects to the storage container 120 another liquid container 78a, 78b, in which liquid 108 remains.

[0090] That is, the controller 150 closes the selection valves 116a, 116b that connect the liquid guideways 92a, 92b leading to the substantially empty liquid containers 78a, 78b to the junction channel 92c. The controller 150 also opens the selection valves 116a, 116b that connect the liquid guideways 92a, 92b leading to the other liquid containers 78a, 78b that still have liquid 108 remaining to the junction channel 92c. This switches the liquid containers 78a, 78b that serve as the supply sources of liquid 108.

[0091] The light-emitting units 112 built into each of the connection units 106a, 106b are connected to the controller 150 via wiring 110. When the controller 150 receives a notification from the air bubble sensor 118 that the liquid container 78a, 78b is substantially empty, it performs the above-mentioned process for switching the liquid container 78a, 78b that serves as the supply source, and changes the light-emitting state of the light-emitting units 112. In other words, the controller 150 has the function of controlling the target light-emitting unit 112 using a signal or power supplied to the light-emitting unit 112 via wiring 110, and turning the target light-emitting unit 112 on, off, or blinking.

[0092] For example, the controller 150 controls the light emitting unit 112 of the connector 106 connected to the liquid container 78a, 78b that is not empty to turn on only the first light source 114a that emits light of a first color (e.g., green light) indicating that the liquid container 78a, 78b is not empty. The light emitted by the first light source 114a passes through the liquid guide path 92 and the connector 106 and is visible outside the liquid guide path 92.

[0093] On the other hand, when the controller 150 receives a notification from the air bubble sensor 118 that the liquid container 78a, 78b is substantially empty, it controls the light emitting unit 112 of the connection unit 106 connected to the substantially empty liquid container 78a, 78b to change its light emitting state. For example, the controller 150 controls the light emitting unit 112 of the connection unit 106 connected to the substantially empty liquid container 78a, 78b to turn on only the second light source 114b, which emits light of a second color (e.g., red light) indicating that the corresponding liquid container 78a, 78b is empty.

[0094] By controlling light-emitting unit 112 in this manner, a worker or the like can determine whether or not the liquid container 78 to which this connection unit 106 is connected is empty simply by visually checking the target connection unit 106. For example, if the color of the light emitted from connection unit 106 is green, the worker or the like will understand that the liquid container 78 to which this connection unit 106 is connected is not empty. On the other hand, if the color of the light emitted from connection unit 106 is red, the worker or the like will understand that the liquid container 78 to which this connection unit 106 is connected is empty.

[0095] When multiple liquid containers 78 are placed on the liquid container placement area 72, as in the liquid supply system 70 according to this embodiment, it is not always easy to determine the amount of liquid remaining in each liquid container 78. In contrast, in the liquid supply system 70 according to this embodiment, whether or not a liquid container 78 is empty is indicated by light emitted by the light-emitting unit 112 built into the connection unit 106, so an operator or the like can very easily determine whether or not each liquid container 78 is empty simply by checking the color emitted from each connection unit 106. Therefore, a new liquid container 78 filled with liquid 108 can be easily prepared before the remaining amount of liquid in a non-empty liquid container 78 reaches zero.

[0096] Next, specific examples of apparatuses 2a, 2b, and 2c to which the liquid supply system 70 according to this embodiment is connected will be described. FIG. 4 is a perspective view schematically showing a processing apparatus 2 that uses liquid 108. Note that the X-axis, Y-axis, and Z-axis used in the description of this processing apparatus 2 are perpendicular to one another. The processing apparatus 2 shown in FIG. 4 is a so-called laser processing apparatus, and processes workpieces such as semiconductor wafers used in the manufacture of device chips with a laser beam.

[0097] 5 is a perspective view that schematically shows how liquid resin 60 as liquid 108 is applied to workpiece 1 in processing device 2. As shown in Fig. 5, workpiece 1 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon, and has a circular front surface 1a and a circular back surface 1b facing the opposite side to front surface 1a.

[0098] A plurality of planned dividing lines 3 are set on the surface 1a of the workpiece 1, and are arranged in a grid pattern so as to intersect with one another. Devices 5 such as ICs and LSIs are formed in each of the areas partitioned by the planned dividing lines 3 on the surface 1a of the workpiece 1. When the workpiece 1 is divided along the planned dividing lines 3, individual device chips are manufactured.

[0099] For example, when the workpiece 1 is ground from the back surface 1b side to thin the workpiece 1 and then divided along the planned division lines 3, a plurality of thin chips (device chips) each having a device 5 are manufactured. The manufactured device chips are mounted in various electronic devices such as mobile phones and personal computers.

[0100] There are no limitations on the material, structure, size, etc. of the workpiece 1. For example, the workpiece 1 may be a substrate made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass (quartz glass, borosilicate glass, etc.), etc. The workpiece 1 does not have to be disk-shaped, and may be, for example, a plate-like structure with rectangular front and back surfaces. There are also no limitations on the type, number, shape, structure, size, arrangement, etc. of devices, and the workpiece does not have to have any devices formed thereon.

[0101] When the workpiece 1 is carried into the processing device 2, the workpiece 1 is integrated with, for example, an adhesive tape 9 and an annular frame 7 to form a frame unit 11. Then, the workpiece 1 is carried into the processing device 2 in the state of the frame unit 11 and processed.

[0102] The frame unit 11 includes an annular frame 7 and an adhesive tape 9 attached so as to cover an opening 7a of the frame 7. The adhesive tape 9 exposed at the opening 7a of the frame 7 is attached to the back surface 1b of the workpiece 1. That is, the workpiece 1 is supported by the frame 7 via the adhesive tape 9.

[0103] When the workpiece 1 is divided along the division lines 3 in this state, the individual chips formed continue to be supported by the frame 7 via the adhesive tape 9. Therefore, when the frame unit 11 is formed, the workpiece 1 and the chips formed from the workpiece 1 become easier to handle.

[0104] As shown in Fig. 4, the processing device 2 includes a base 4 that supports each of the components. Fig. 4 shows the processing device 2 with a part of the area above the base 4 covered with a cover. A cassette support table 6 that can be raised and lowered is provided at the front corner of the base 4. A cassette (not shown) that stores multiple workpieces 1 in a frame unit 11 state is placed on the top surface of the cassette support table 6.

[0105] A long rectangular opening 10 is formed along the X-axis at a position adjacent to the cassette support base 6 on the top surface of the base 4. A ball screw type X-axis movement mechanism (not shown) is provided in opening 10. The X-axis movement mechanism includes, for example, a moving table configured to be able to slide along the X-axis, a screw shaft connected to the moving table, and a rotational drive source such as a motor connected to the screw shaft. When the rotational drive source rotates the screw shaft, the moving table moves along the X-axis.

[0106] The top of the moving table is covered by a table cover 12. At both ends of the table cover 12 in the direction along the X axis, accordion-shaped dustproof and drip-proof covers 10a that can expand and contract in accordance with the movement of the moving table and table cover 12 are attached. A holding unit 14 that can hold a workpiece 1 is arranged above the moving table in a manner that it is exposed from the table cover 12.

[0107] The holding unit 14 is typically a chuck table for holding the workpiece 1. The holding unit 14 is disposed above the moving table via a rotary drive source such as a motor, and rotates around a rotation axis roughly parallel to the Z axis. The upper part of the holding unit 14 is formed, for example, from a plate-shaped porous member, and the upper surface of this porous member serves as a holding surface that holds the portion of the frame unit 11 that corresponds to the workpiece 1. The lower surface of the porous member is connected to a suction source (not shown) via a suction path (not shown) formed inside the holding unit 14.

[0108] Therefore, the suction force generated by the suction source acts on the upper surface of the porous member via the suction path, etc. The holding unit 14 suction-holds the portion of the frame unit 11 that corresponds to the workpiece 1 by the suction force acting from the suction source. A plurality of clamp mechanisms for gripping the frame 7 that constitutes the frame unit 11 are arranged around the porous member.

[0109] A transport unit 16 is provided above the opening 10 for carrying the frame unit 11 out of the cassette placed on the cassette support stand 6 and for carrying the frame unit 11 into the cassette. The transport unit 16 is supported by the support structure of the base 4, and has a pair of long guide rails 18 along the Y axis.

[0110] A moving body 20 is attached to the pair of guide rails 18 so as to be slidable along the Y axis. A nut portion (not shown) constituting a ball screw is provided on the moving body 20, and a long screw shaft 22 extending along the Y axis is connected to this nut portion. A pulse motor 24 is connected to one end of the screw shaft 22. When the screw shaft 22 is rotated by the pulse motor 24, the moving body 20 moves along the Y axis.

[0111] A long arm 26 extending along the X-axis is connected to the lower part of the moving body 20 via an elevation mechanism. A plurality of suction parts 28 for sucking the frame 7 are arranged below the arm 26 in positions where they can simultaneously come into contact with the frame 7. Furthermore, a gripping mechanism 30 for gripping the frame 7 is arranged on the cassette support base 6 side of the arm 26.

[0112] Furthermore, a pair of long transport rails 8 extending along the Y-axis are arranged on the upper surface of the base 4 so as to straddle the opening 10 along the Y-axis. The pair of transport rails 8 are arranged at positions spaced apart from each other so that the distance between them in the direction along the X-axis is smaller than the outer diameter of the frame 7, and are movable relative to each other so that this distance becomes larger than the outer diameter of the frame 7.

[0113] For example, by adjusting the height of the arm 26, moving the movable body 20 along the Y-axis, and inserting the tip of the gripping mechanism 30 into a cassette on the cassette support base 6, the gripping mechanism 30 can grip the frame 7 of the frame unit 11 housed in that cassette. When the movable body 20 moves in the opposite direction along the Y-axis with the frame 7 gripped by the gripping mechanism 30, the frame unit 11 is pulled out onto the pair of transport rails 8.

[0114] Then, the gripping mechanism 30 releases the gripping of the frame 7, and the frame unit 11 is supported by the pair of transport rails 8. In this state, the height of the arm 26 is adjusted again, and the movable body 20 moves along the Y axis, causing the suction part 28 of the transport unit 16 to come into contact with the frame 7 from above and hold the frame 7 by suction. Thereafter, the gap between the pair of transport rails 8 is widened, and the arm 26 is lowered, whereby the frame unit 11 is carried into the holding unit 14.

[0115] A processing unit (not shown) that irradiates a laser beam onto the workpiece 1 is disposed in an area covered by a cover above the base 4. The holding unit 14 that holds the frame unit 11 by suction is sent to the vicinity of the processing unit by the X-axis movement mechanism. Then, for example, a laser beam having a wavelength that is absorbed by the workpiece 1 is irradiated from the processing unit onto the workpiece 1, and the workpiece 1 is subjected to ablation processing along the planned dividing lines 3.

[0116] 4, an opening 38 is provided on the top surface of the base 4 at a position adjacent to the opening 10 along the Y axis. The space inside the opening 38 serves as a processing chamber 40 in which processing such as forming a water-soluble resin film on the workpiece 1 and cleaning the workpiece 1 is carried out. A holding table 56 capable of holding the workpiece 1 (frame unit 11) is provided in the processing chamber 40.

[0117] The holding table 56 is connected to a rotary drive source (not shown) such as a motor, and rotates around a rotation axis that is approximately perpendicular to the Z axis. Above the holding table 56, there are arranged a cleaning nozzle (not shown) that supplies a cleaning liquid such as pure water to the workpiece 1 held by the holding table 56, and a discharge nozzle 58 (FIG. 5) that discharges liquid resin 60 that will be used to form the water-soluble resin film. The cleaning liquid and liquid resin 60 are supplied to the processing device 2 from the liquid supply system 70 as the above-mentioned liquid 108.

[0118] The cleaning nozzle is configured to be movable between a position where it overlaps with the center of the holding table 56 when viewed from above and a position where it does not overlap with the holding table 56 when viewed from above. The discharge nozzle 58 is configured to be movable independently of the cleaning nozzle between a position where it overlaps with the center of the holding table 56 when viewed from above and a position where it does not overlap with the holding table 56 when viewed from above.

[0119] When the workpiece 1 is subjected to ablation processing using a laser beam, the workpiece 1 partially melts near the processing point, and this melted portion scatters around the processing point, becoming processing waste called debris. If the scattered debris adheres to the upper surface (surface 1a) of the workpiece 1, it is not easily removed even if the workpiece 1 is washed. In this case, the debris remains in the device chip formed from the workpiece 1. In other words, the debris becomes a factor in reducing the quality of the device chip.

[0120] Therefore, a water-soluble resin film is formed on the upper surface of the workpiece 1 before it is processed by the laser beam. When the workpiece 1 with the water-soluble resin film formed thereon is subjected to ablation processing, the scattered debris adheres to the surface of the water-soluble resin film, not to the upper surface of the workpiece 1. Therefore, when the workpiece 1 is subsequently washed, the water-based washing liquid easily removes the water-soluble resin film from the upper surface of the workpiece 1 together with the debris that had adhered to the water-soluble resin film.

[0121] When a water-soluble resin film is formed on the workpiece 1 in the processing chamber 40, for example, a discharge nozzle 58 moves to a position above the center of the workpiece 1 held on a holding table 56 and discharges a liquid resin 60. After the liquid resin 60 has been supplied to the upper surface (surface 1a) of the workpiece 1, as shown in Fig. 5, when the holding table 56 is rotated around the rotation axis, the liquid resin 60 is applied to the upper surface of the workpiece 1. In other words, the liquid resin 60 is applied to the upper surface of the workpiece 1 by a spin coating method.

[0122] Thereafter, as the holding table 56 continues to rotate, the liquid resin 60 dries, and a water-soluble resin film is formed on the upper surface of the workpiece 1. Note that the water-soluble resin film covering the upper surface of the workpiece 1 may be made of polyvinyl alcohol, or the "HOGOMAX (registered trademark)" series manufactured by DISCO Corporation. However, the water-soluble resin film is not limited to this.

[0123] The formation of the water-soluble resin film in the processing chamber 40 is typically carried out before the workpiece 1 is transferred to the holding unit 14. Thereafter, the workpiece 1 on which the water-soluble resin film has been formed is transferred to the holding unit 14 and subjected to ablation processing by a laser beam. Note that the formation of the water-soluble resin film on the upper surface of the workpiece 1 may also be carried out before the workpiece 1 is transferred to the processing device 2. In this case, it is not necessary to provide the discharge nozzle 58 in the processing chamber 40.

[0124] When cleaning the workpiece 1, for example, while the holding table 56 that holds the workpiece 1 is being rotated, a cleaning liquid is sprayed toward the workpiece 1 from a cleaning nozzle positioned above the workpiece 1. This causes the workpiece 1 to be cleaned with the cleaning liquid. Thereafter, by stopping the spraying of the cleaning liquid from the cleaning nozzle while continuing to rotate the holding table 56, the workpiece 1 can be dried. When cleaning the workpiece 1, it is preferable to oscillate the cleaning nozzle above the workpiece 1.

[0125] A transport unit 42 is provided above the openings 10 and 38 to transport the workpiece 1 between the holding unit 14 and the holding table 56. The transport unit 42 is supported by the support structure of the base 4, and has a pair of long guide rails 44 that extend along the Y axis. A movable body 46 is attached to the pair of guide rails 44 so as to be slidable along the Y axis.

[0126] The moving body 46 is provided with a nut portion (not shown) that constitutes a ball screw, and a long screw shaft 48 is connected to this nut portion along the Y axis. A pulse motor 50 is connected to one end of the screw shaft 48. When the screw shaft 48 is rotated by the pulse motor 50, the moving body 46 moves along the Y axis.

[0127] An arm 52 is connected to the lower part of the moving body 46 via a lifting mechanism. A holding mechanism 54 having a plurality of suction parts (not shown) at the bottom for sucking the frame 7 is provided below the arm 52. The plurality of suction parts are arranged in positions where they can come into contact with the frame 7 simultaneously.

[0128] The transport unit 42 transports, for example, the workpiece 1 on which the water-soluble resin film has been formed in the processing chamber 40 from the holding table 56 to the holding unit 14. The transport unit 42 also transports the processed workpiece 1 from the holding unit 14 to the holding table 56 in the processing chamber 40. The workpiece 1 cleaned in the processing chamber 40 is placed in a cassette placed on the cassette support stand 6 by the transport unit 16.

[0129] As described above, when the workpiece 1 is processed by this processing apparatus 2 and divided into a plurality of device chips, a liquid 108 such as a cleaning liquid or liquid resin 60 supplied from the liquid supply system 70 to the processing apparatus 2 is used. On the other hand, the apparatuses 2a, 2b, and 2c to which the liquid supply system 70 is connected are not limited to this processing apparatus 2.

[0130] Processing devices such as a cutting device equipped with an annular cutting blade, a grinding device that grinds the workpiece 1 with a grinding wheel, and a polishing device that polishes the workpiece 1 with a polishing pad can be used to process the workpiece 1. In addition, when processing the workpiece 1, other devices such as a coating device that coats the workpiece 1 with a liquid material to form a thin film, and a cleaning device that cleans the processed workpiece 1 can also be used.

[0131] In these devices, a liquid 108 is often used depending on the purpose. For example, when cutting the workpiece 1 with a cutting device, a liquid 108 called cutting fluid, which is pure water mixed with a liquid additive, is used to remove processing waste and processing heat generated by cutting. Such devices that use the liquid 108 are connected to the liquid supply system 70 of this embodiment.

[0132] Next, a description will be given of a supply system for the liquid 108 arranged in each of the devices 2a, 2b, and 2c that receives a supply of the liquid 108 from the liquid supply system 70 according to this embodiment. Fig. 6 is a diagram that schematically shows the configuration of the liquid supply system 151 of the devices 2a, 2b, and 2c. In addition to the components of the liquid supply system 151 provided inside the housings of the devices 2a, 2b, and 2c, Fig. 6 also shows branch paths 94a, 94b, and 94c of the supply path 94, and opening and closing valves 98a, 98b, and 98c.

[0133] The liquid supply system 151 of each of the devices 2a, 2b, and 2c includes a sealed receiving container (sealed container) 152 into which the liquid 108 delivered from the liquid supply system 70 flows. Branch paths 94a, 94b, and 94c of the supply path 94 of the liquid supply system 70 are connected to the receiving container 152. When opening / closing valves 98a, 98b, and 98c provided in the branch paths 94a, 94b, and 94c are opened, the liquid 108 flows from each branch path 94a, 94b, and 94c into the receiving container 152.

[0134] The liquid 108 that has flowed into the receiving container 152 is temporarily stored inside the receiving container 152. Two water level sensors 158, 160 are provided inside the receiving container 152. Each water level sensor 158, 160 is connected to the controller (not shown) of the devices 2a, 2b, 2c, and upon detecting the liquid 108, transmits the detection status to the controller (not shown) of the devices 2a, 2b, 2c.

[0135] The lower water level sensor 158 is provided, for example, at a height position close to the bottom of the receiving container 152, and is mainly used to determine whether or not the liquid 108 contained in the receiving container 152 is low. The upper water level sensor 160 is provided, for example, at a height position of the liquid surface of the liquid 108 when a sufficient volume of the liquid 108 is stored in the receiving container 152, and is mainly used to determine whether or not the receiving container 152 is full.

[0136] When the water level sensor 158 detects that the amount of liquid 108 inside the receiving container 152 is insufficient, the controller of each of the devices 2a, 2b, 2c opens the on-off valves 98a, 98b, 98c to receive the liquid 108 into the receiving container 152. On the other hand, when the water level sensor 160 detects that a sufficient amount of liquid 108 has been stored in the receiving container 152, the controller of each of the devices 2a, 2b, 2c closes the on-off valves 98a, 98b, 98c to stop receiving the liquid 108 into the receiving container 152.

[0137] In addition, a pressure gauge 154 that measures the air pressure inside the receiving container 152 and a decompression unit 156 are connected to the receiving container 152. The pressure gauge 154 and the decompression unit 156 are connected to the controllers of the devices 2a, 2b, and 2c, and are controlled based on commands from the controllers.

[0138] The decompression unit 156 is configured by, for example, a suction pump or an ejector. When the decompression unit 156 is operated, the gas inside the receiving container 152 is discharged to the outside of the receiving container 152, and the pressure inside the receiving container 152 is reduced. For example, when the on-off valves 98a, 98b, and 98c are opened and the liquid 108 flows into the receiving container 152, the pressure inside the receiving container 152 increases, and the supply of the liquid 108 to the receiving container 152 may be impeded.

[0139] In such a case, the controller of the devices 2a, 2b, and 2c activates the decompression unit 156. This causes the gas accumulated inside the receiving container 152 to be discharged to the outside of the receiving container 152, reducing the pressure inside the receiving container 152 and allowing the liquid 108 to be supplied to the receiving container 152 smoothly.

[0140] Furthermore, an atmosphere open path (not shown) is connected to the receiving container 152 via a valve. One end of the atmosphere open path is connected to the receiving container 152, and the other end of the atmosphere open path is connected to the space inside or outside the devices 2a, 2b, and 2c. When a valve provided in the atmosphere open path is opened, the receiving container 152 is opened to the atmosphere. When the receiving container 152 is opened to the atmosphere, the pressure inside the receiving container 152 becomes atmospheric pressure, even if the pressure inside the receiving container 152 is different from atmospheric pressure. Therefore, this atmosphere open path and valve can also function as a pressure reduction unit 156.

[0141] It should be noted that the liquid 108 flowing into the receiving container 152 may contain air bubbles. In this case, the controller activates the decompression unit 156 to reduce the pressure inside the receiving container 152, thereby quickly removing the air bubbles from the liquid 108 in the receiving container 152. In this way, the receiving container 152 and the decompression unit 156 function as a degassing unit that performs a degassing process to remove gas from the liquid 108.

[0142] A pipe-shaped liquid suction pipe 164 is inserted into the receiving container 152, and one end (lower end) of the liquid suction pipe 164 reaches near the bottom surface of the receiving container 152. The other end of the liquid suction pipe 164 is connected to a location where the liquid 108 is used via a supply pump 162 connected to the controller of the devices 2a, 2b, and 2c. The other end of the liquid suction pipe 164 is connected to, for example, a cleaning nozzle (not shown) or a discharge nozzle 58 (see FIG. 5) provided in the processing chamber 40 (see FIGS. 4 and 5).

[0143] When the liquid 108 is used in the devices 2a, 2b, and 2c, for example, the controller of each device 2a, 2b, and 2c opens the on-off valves 98a, 98b, and 98c and operates the supply pump 162. As a result, the liquid 108 stored in the receiving container 152 is sucked up through the suction pipe 164 and delivered to the location where the liquid 108 is to be used. The receiving container 152 is then replenished with the liquid 108 from the liquid supply system 70. However, when the controller operates the supply pump 162, the on-off valves 98a, 98b, and 98c do not necessarily need to be opened. Furthermore, when the supply pump 162 is operated, it is preferable that a valve provided in an atmosphere release path (not shown) be opened so that the pressure inside the receiving container 152 is maintained at approximately atmospheric pressure. This allows the liquid 108 to be stably supplied to the supply destination at a predetermined pressure.

[0144] When the remaining amount of liquid 108 stored in receiving container 152 decreases, the controller opens on-off valves 98a, 98b, 98c to allow liquid 108 to flow into receiving container 152. Therefore, there is no need to carry a container for storing liquid 108 into apparatus 2a, 2b, 2c, and there is no need to stop operations such as processing of workpiece 1 in apparatus 2a, 2b, 2c. In this way, according to liquid supply system 70 of this embodiment, when liquid 108 is used in apparatus 2a, 2b, 2c, which is the supply destination, liquid 108 is replenished to apparatus 2a, 2b, 2c.

[0145] Next, a liquid supply procedure using the liquid supply system 70 according to this embodiment will be described. First, as shown in Figure 1, a liquid container 78 containing a liquid 108 is carried into the liquid container mounting area 72 by an operator or the like. Then, a liquid guide path 92 extending from a connection port 90 of a housing 88 of the liquid delivery device 86 is connected to the liquid container 78. Thereafter, the operator or the like starts operation of the liquid delivery device 86.

[0146] 3, and also operates the decompression unit 124 to reduce the pressure inside the storage container 120. As a result, the liquid 108 contained in the liquid container 78 is sucked up and flows into the storage container 120 through the liquid guide paths 92a and 92b. When a sufficient amount of the liquid 108 is stored inside the storage container 120, the liquid delivery device 86 stops the decompression unit 124.

[0147] Next, the liquid delivery device 86 uses either of the liquid delivery systems 129a, 129b to deliver the liquid 108 stored in the storage container 120 to the supply path 94. Specifically, either of the liquid delivery valves 136a, 136b is opened, and the solenoid valve 144 of the air supply system 138 is also opened. As a result, the liquid 108 stored in the storage container 120 is sucked up through the liquid suction pipes 130a, 130b and delivered to the supply path 94.

[0148] The devices 2a, 2b, and 2c (controllers) that receive the supply of the liquid 108 open the on-off valves 98a, 98b, and 98c shown in FIG. 6 to connect the supply path 94 to the receiving container 152. Then, the liquid 108 flows into the receiving container 152 through the supply path 94. The devices 2a, 2b, and 2c operate the decompression units 156 as necessary to prevent the flow of the liquid 108 into the receiving container 152 from stagnating.

[0149] When a sufficient amount of liquid 108 exists inside the receiving container 152, the devices 2a, 2b, and 2c operate the supply pump 162 as needed. As a result, the liquid 108 contained in the receiving container 152 is sucked up through the suction pipe 164, and the liquid 108 is sent to a predetermined location where the liquid 108 is to be used.

[0150] When the liquid 108 is sent from the storage container 120 of the liquid sending device 86 to each of the devices 2a, 2b, and 2c, the storage container 120 is depressurized. Then, the liquid 108 is sucked up from the liquid container 78 and flows into the storage container 120. After that, when the liquid container 78 becomes empty, the air bubble sensor 118 (see FIG. 3) detects air bubbles in the liquid 108.

[0151] When the air bubble sensor 118 detects air bubbles in the liquid 108, the liquid delivery device 86 closes the selection valves 116a, 116b of the liquid guide path 92 leading to the emptied liquid container 78, and opens the selection valves 116a, 116b of the liquid guide path 92 leading to another liquid container 78 containing the liquid 108. In other words, the liquid delivery device 86 switches the supply source of the liquid 108.

[0152] During this series of operations, the liquid delivery device 86 does not need to stop supplying the liquid 108 from the storage container 120 to the devices 2a, 2b, and 2c. Therefore, the liquid supply system 70 according to this embodiment can continuously supply the liquid 108 to the devices 2a, 2b, and 2c.

[0153] Incidentally, under normal circumstances, this liquid supply system 70 operates by receiving a supply of electric power from a utility facility of the manufacturing factory or the like in which the liquid supply system 70 is installed. However, there are cases in which the supply of electric power to the manufacturing factory is stopped for some reason. The liquid supply system 70 according to this embodiment is configured to be able to operate without using electric power, and can continue to supply the liquid 108 to the specified destination even when the supply of electric power to the manufacturing factory is stopped.

[0154] For example, if the power supply to the liquid delivery device 86 is cut off and the electrically driven solenoid valve 144 is closed, air will no longer be supplied to the liquid delivery pumps 132a and 132b. If air is not supplied to the liquid delivery pumps 132a and 132b, the liquid delivery pumps 132a and 132b will not operate, and delivery of the liquid 108 to the devices 2a, 2b, and 2c will stop.

[0155] Therefore, when the power supply to the liquid delivery device 86 is cut off, the operator opens the manual valve 148 of the spare air supply path 146 and supplies air to the liquid delivery pumps 132a and 132b through the spare air supply path 146. By receiving the air supply, the liquid delivery pumps 132a and 132b operate normally and can deliver the liquid 108 to the devices 2a, 2b, and 2c.

[0156] When the supply of power to the liquid delivery device 86 is cut off, the supply of power to the selection valves 116a, 116b and the liquid delivery valves 136a, 136b is also cut off. In this embodiment, at least one of the selection valves 116a, 116b is controlled to be always open, and at least one of the liquid delivery valves 136a, 136b is controlled to be always open. Therefore, even if the supply of power to the selection valves 116a, 116b and the liquid delivery valves 136a, 136b is cut off, both valves remain open, and the liquid 108 can be delivered by the liquid delivery pumps 132a, 132b.

[0157] At least one of the liquid supply valves 136a, 136b may be configured as an electromagnetic valve (solenoid valve) equipped with a spring or the like so that it automatically switches to an open state by the spring or the like when the supply of power is interrupted. Similarly, at least one of the selection valves 116a, 116b may be configured as an electromagnetic valve (solenoid valve) equipped with a spring or the like so that it automatically switches to an open state by the spring or the like when the supply of power is interrupted.

[0158] In this case, too, when the power supply is interrupted, at least one of the liquid supply valves 136a, 136b is opened, enabling the liquid supply pumps 132a, 132b to supply the liquid 108. Furthermore, when the power supply is interrupted, at least one of the selection valves 116a, 116b is opened, enabling the liquid 108 to be supplied from the liquid container 78 to the storage container 120.

[0159] Furthermore, at least one of the liquid delivery valves 136a, 136b and at least one of the selection valves 116a, 116b may be configured to be manually openable and closable. In this case, when the supply of power to the liquid delivery device 86 is interrupted, an operator can open at least one of the liquid delivery valves 136a, 136b and at least one of the selection valves 116a, 116b, thereby enabling the delivery of the liquid 108 from the liquid delivery device 86 even when the supply of power is interrupted.

[0160] In this way, the liquid supply system 70 according to this embodiment can supply the liquid 108 from the liquid container 78 to the devices 2a, 2b, and 2c even when the supply of power is cut off.

[0161] The present invention is not limited to the above-described embodiments, and various modifications can be made to the present invention. For example, the liquid supply system of the present invention may be configured so that information about the liquid and the liquid supply system can be shared with each device without using electrical signals.

[0162] The basic structure of the liquid delivery device included in the liquid supply system according to the modified example is the same as that of the liquid delivery device 86 according to the embodiment. Therefore, the same reference numerals are used to designate components that are common to the components of the liquid delivery device 86, and redundant explanations will be omitted.

[0163] Figure 7 is a functional block diagram showing some of the functions of a controller (first controller) 150 included in a liquid delivery device of a liquid supply system according to a modified example. Note that Figure 7 also shows some elements outside the controller 150 that are related to the functions of the controller 150. As described above, the functions of the controller 150 are realized by the operation of the processing device in accordance with a program stored in the storage device. However, the functions of the controller 150 may also be realized by a program or the like provided from outside the controller 150 via a communication line or the like.

[0164] 7, a reader 178 included in the liquid supply system or liquid delivery device according to the modified example is connected to controller 150. Reader 178 optically reads a code provided in the form of a printed matter attached to liquid containers 78a, 78b, for example, and sends information contained in the read code to controller 150. The code is, for example, a one-dimensional code or a two-dimensional code.

[0165] However, reader 178 may be configured to be able to read data electromagnetically stored in a device called an IC tag or the like. In this case, a device such as an IC tag is provided in a form attached to liquid containers 78a, 78b, and information contained in the data read by reader 178 is sent to controller 150. Controller 150 then stores the data (typically digital data expressed in binary) including the information sent from reader 178 in storage unit 150a.

[0166] Of course, the controller 150 can also receive information input from an input device (not shown) such as a touch screen or a keyboard. In this case, data including the information input by the operator via the input device is stored in the storage unit 150a of the controller 150.

[0167] The above-mentioned information relates to, for example, the liquid 108 or the liquid supply system. Specifically, this information may include the name of the liquid 108, the lot number (identification number) of the liquid 108, the expiration date of the liquid 108, etc. This information may also include the conditions set in the liquid supply system to supply the liquid 108, the type of error that occurred in the liquid supply system, etc.

[0168] It is preferable that the controller 150 stores data linking the above-mentioned information with identification information of the liquid guideways 92a, 92b to which the liquid containers 78a, 78b are connected in the storage unit 150a. The identification information of the liquid guideways 92a, 92b is typically a number, symbol, or the like assigned to each of the liquid guideways 92a, 92b.

[0169] The controller 150 controls the operation of the outflow control valve 176 so that, when the opening / closing valves 98a, 98b, and 98c are closed and no liquid 108 is supplied from the liquid supply system to each device 2a, 2b, and 2c, the pressure value in the supply path 94 detected by the pressure gauge (first pressure gauge) 96 is within a predetermined range, as described above.

[0170] Specifically, when the pressure value in the supply path 94 detected by the pressure gauge 96 reaches the upper limit (first threshold) of a predetermined range, the controller 150 opens the outflow control valve 176 to reduce the pressure in the supply path 94. Furthermore, when the pressure value in the supply path 94 detected by the pressure gauge 96 reaches the lower limit (second threshold) of the predetermined range, the controller 150 closes the outflow control valve 176 to increase the pressure in the supply path 94. On the other hand, when the on-off valves 98a, 98b, 98c are opened, the controller 150 suspends such control of the outflow control valve 176.

[0171] The controller 150 further includes a transmitter 150b that controls the transmission of data including the above-mentioned information. The transmitter 150b transmits the data stored in the memory 150a to each of the devices 2a, 2b, and 2c by varying the pressure in the supply path 94 while the pressure value in the supply path 94 detected by the pressure gauge 96 is within a predetermined range. That is, the transmitter 150b controls the outflow control valve 176 to increase or decrease the pressure in the supply path 94 in accordance with the data.

[0172] Specifically, by closing the outflow control valve 176, the transmitter 150b supplies the liquid 108 to the supply path 94, thereby increasing the pressure in the supply path 94. Furthermore, by opening the outflow control valve 176, the transmitter 150b returns the liquid 108 in the supply path 94 to the storage container 120 via the outflow path 174, thereby decreasing the pressure in the supply path 94.

[0173] More specifically, the transmitter 150b sets consecutive unit periods (1-bit periods) the same number as the number of bits of data to be transmitted, and transmits the data by increasing or decreasing the pressure in the supply channel 94 during a target unit period based on the pressure in the supply channel 94 during the immediately preceding unit period. The length of the unit period is, for example, 50 ms to 500 ms, typically 400 ms. However, the length of the unit period is not limited to this.

[0174] When the value of a target bit is 1, the transmitter 150b increases the pressure in the supply channel 94 during the unit period corresponding to this bit, for example, to a level higher than the pressure in the supply channel 94 during the immediately preceding unit period. When the value of a target bit is 0, the transmitter 150b decreases the pressure in the supply channel 94 during the unit period corresponding to this bit, for example, to a level lower than the pressure in the supply channel 94 during the immediately preceding unit period.

[0175] Therefore, when transmitting 4-bit data "1011," the transmitting unit 150b continuously changes the pressure in the supply channel 94 "increase, decrease, increase, increase" for each unit period. However, the relationship between the bit value and the increase and decrease in the pressure in the supply channel 94 may be reversed. That is, the transmitting unit 150b may decrease the pressure in the supply channel 94 when the value of the target bit is 1, and may increase the pressure in the supply channel 94 when the value of the target bit is 0.

[0176] The transmitting unit 150b may also encode the data stored in the storage unit 150a using any method before transmitting the encoded data. For example, the transmitting unit 150b may transmit data incorporating an error correction code so that each of the devices 2a, 2b, and 2c can detect and correct errors in the received data.

[0177] Furthermore, it is preferable that the transmitter 150b repeatedly transmits data using the above-described method while the pressure inside the supply path 94 detected by the pressure gauge 96 is within a predetermined range. In this case, each of the devices 2a, 2b, and 2c can receive data at multiple times. Furthermore, since the data is repeatedly transmitted, each of the devices 2a, 2b, and 2c can easily obtain correct data.

[0178] Figure 8 is a diagram schematically showing a liquid supply system 180 of devices 2a, 2b, and 2c connected to a liquid supply system according to a modified example. As shown in Figure 8, the basic structure of liquid supply system 180 is the same as that of liquid supply system 151 according to the embodiment. Therefore, components common to those of liquid supply system 151, etc., are given the same reference numerals, and redundant explanations will be omitted.

[0179] 8, the liquid supply system 180 includes a pressure gauge (second pressure gauge) 182 for detecting the pressure inside the supply path 94. Branch paths 94a, 94b, and 94c of the supply path 94 are connected to the receiving container 152 via this pressure gauge 182 and on-off valves 98a, 98b, and 98c. In other words, the liquid supply system 180 includes the on-off valves 98a, 98b, and 98c as components.

[0180] Fig. 9 is a functional block diagram showing the functions of the controller (second controller) 184 included in the devices 2a, 2b, and 2c. Note that Fig. 9 also shows some elements outside the controller 184 that are related to the functions of the controller 184.

[0181] As described above, the functions of the controller 184 included in the devices 2a, 2b, and 2c are realized by the operation of the processing device in accordance with the program stored in the storage device. However, the functions of the controller 184 may also be realized by a program or the like provided from outside the controller 184 via a communication line or the like.

[0182] 9, a pressure gauge 182 is connected to the controller 184 to detect the pressure inside the supply channel 94, which fluctuates due to the liquid 108 supplied through the supply channel 94. The value of the pressure inside the supply channel 94 detected by the pressure gauge 182 is sent to the controller 184.

[0183] The receiving unit 184a of the controller 184 receives data transmitted from the liquid delivery device through the supply path 94 by detecting an increase or decrease in pressure within the supply path 94 using the pressure gauge 182 while the pressure value within the supply path 94 detected by the pressure gauge 182 is within a predetermined range.

[0184] For example, when the pressure in the supply channel 94 during the unit period corresponding to the bit in question is higher than the pressure in the supply channel 94 during the immediately preceding unit period, the receiving unit 184a sets the value of the bit in question to 1. Also, when the pressure in the supply channel 94 during the unit period corresponding to the bit in question is lower than the pressure in the supply channel 94 during the immediately preceding unit period, the receiving unit 184a sets the value of the bit in question to 0.

[0185] Therefore, when the pressure inside the supply path 94 changes continuously "up, down, up, up" every unit period, the receiving unit 184a receives 4-bit data of "1011." However, the relationship between the rise and fall of the pressure inside the supply path 94 and the bit values ​​can be changed to match the relationship when the data is transmitted. Note that the receiving unit 184a can also decode data that was coded at the time of transmission using the same method.

[0186] Controller 184 stores the data received by receiving unit 184a in storage unit 184b. As shown in Fig. 9, a display unit 186 represented by a liquid crystal panel or the like is connected to controller 184, and controller 184 causes display unit 186 to display information included in the data stored in storage unit 184b as necessary.

[0187] In the liquid supply system according to this modified example, data is transmitted and received by increasing or decreasing the pressure in the supply channel 94 during a target unit period with the pressure in the supply channel 94 during the immediately preceding unit period as a reference, but the method for transmitting and receiving data is not limited to this. For example, data may be transmitted and received by changing the pressure in the supply channel 94 relative to a reference value (or a reference range).

[0188] In this case, for example, the on-off valves 98a, 98b, and 98c, the liquid supply valves 136a and 136b, and the outflow control valve 176 are all closed, thereby maintaining the pressure in the supply path 94 at a reference value (or a reference range). In this state, the liquid supply valves 136a and 136b or the outflow control valve 176 are opened, thereby changing the pressure in the supply path 94 to a value higher or lower than the reference value (or the reference range).

[0189] As described above, the liquid supply system according to the modified example includes a supply path 94 that connects the liquid supply pumps 132a, 132b to the devices 2a, 2b, and 2c so that the liquid 108 sent from the storage container 120 by the liquid supply pumps 132a, 132b is supplied to the devices 2a, 2b, and 2c, a pressure gauge (first pressure gauge) 96 that detects the pressure in the supply path 94, a pressure adjustment unit 172 that adjusts the pressure in the supply path 94, and a controller (first controller) 150 that controls the operation of the pressure adjustment unit 172.

[0190] The controller 150 then stores data including information about the liquid or the liquid supply system, and when the pressure in the supply line 94 detected by the pressure gauge 96 is within a predetermined range, the controller 150 transmits the data to the devices 2a, 2b, and 2c through the supply line 94 by increasing or decreasing the pressure in the supply line 94 using the pressure adjustment unit 172 in accordance with the data.

[0191] Therefore, the devices 2a, 2b, and 2c can receive data transmitted from the liquid supply system (liquid delivery device 86) simply by detecting an increase or decrease in pressure within the supply path 94. In this way, according to the modified example, a new liquid supply system is provided that can share information with the devices 2a, 2b, and 2c that are the destinations of supply of the liquid 108.

[0192] Furthermore, in the liquid supply system according to the modified example, information about the liquid 108 and the liquid supply system can be shared with each of the devices 2a, 2b, and 2c without using electrical signals, so there is no need for equipment to send and receive electrical signals between the liquid supply system (liquid delivery device 86) and each of the devices 2a, 2b, and 2c. This simplifies factory equipment and leads to cost reductions. There is also no risk of information leaking to the outside, as occurs when information is shared via general wireless communication.

[0193] Furthermore, in the liquid supply system according to the modified example, information input to the liquid supply system (liquid delivery device 86) is shared between each of the devices 2a, 2b, and 2c, eliminating the need to input information individually to each of the devices 2a, 2b, and 2c. This liquid supply system is therefore particularly suitable for cases in which multiple devices 2a, 2b, and 2c are connected, or where the liquid delivery device 86 and each of the devices 2a, 2b, and 2c are separated from each other, or where each of the devices 2a, 2b, and 2c is separated from each other.

[0194] In addition, the structures, methods, etc. according to the above-described embodiments and modifications may be modified and implemented without departing from the scope of the present invention. [Explanation of symbols]

[0195] 1 Workpiece 1a surface 1b back side 3 Planned division line 5 Devices 7 frames 7a aperture 9 adhesive tape 11 Frame Unit 2 Processing equipment 2a, 2b, 2c Devices (devices that consume liquids) 4 Foundation 6 Cassette support stand 8 Transport rail 10 aperture 10a Dustproof / Waterproof Cover 12 Table Cover 14 Holding unit 16 Transport unit 18 Guide rail 20 Mobile 22 Screw shaft 24 Pulse motor 26 Arm 28 Suction part 30 Gripping mechanism 38 Aperture 40 Processing Room 42 Transport unit 44 Guide rail 46 Mobile 48 Screw shaft 50 Pulse motor 52 Arm 54 Retention mechanism 56 Holding table 58 Discharge nozzle 60 Liquid Resin 70 Liquid Supply System 71 Liquid container unit 72 Liquid container storage area 74 palettes 76 Entrance 78,78a,78b Liquid container 80 Top Plate 82 Inlet 84 Ventilation vent 86 Liquid delivery device 88 Case 90 connection ports 92,92a,92b Liquid guide path 92c confluence road 94 Supply route 94a,94b,94c Branch road 96 Pressure gauge (first pressure gauge) 98a, 98b, 98c Opening and closing valves 100 Clean Rooms 102 Outer tube 104 Inner tube 106, 106a, 106b Connection 108 Liquid 110 Wiring 112 Light-emitting part 114a,114b light source 116a, 116b Selector valve 118 Air bubble sensor 120 Storage container 122 Degassing tube 124 Decompression Unit 126,128 Water level sensor 129a, 129b Liquid transfer system 130a,130b Liquid suction pipe 132a, 132b Liquid transfer pump 134a, 134b Air bubble sensor 136a, 136b Liquid transfer valve 138 Air supply system 140 Air Source 142 Air supply line 144 Solenoid valve 146 Reserve air supply line 148 Manual Valve 150 Controller (1st Controller) 150a Storage section 150b Transmitter 151 Liquid supply system 152 Receiving container 154 Pressure gauge 156 Decompression Unit 158,160 Water level sensor 162 Supply Pump 164 Liquid suction tube 172 Pressure Regulating Unit 174 Outflow channel 176 Outflow control valve 178 Leader 180 Liquid supply system 182 Pressure gauge (second pressure gauge) 184 Controller (Second Controller) 184a Receiving unit 184b Storage section 186 Display Unit

Claims

1. A liquid supply system for supplying liquid to an apparatus, comprising: a container for containing the liquid; a liquid feed pump for feeding the liquid contained in the container; a supply path connecting the liquid feed pump and the device so that the liquid fed from the container by the liquid feed pump is supplied to the device; a first pressure gauge that detects the pressure in the supply path; a pressure adjusting unit for adjusting the pressure in the supply path; a first controller that controls the operation of the pressure adjustment unit; The first controller storing data containing information about the liquid or the liquid supply system; A liquid supply system in which, when the pressure in the supply line detected by the first pressure gauge is within a predetermined range, the pressure in the supply line is increased or decreased by the pressure adjustment unit in accordance with the data, and the data is transmitted to the device through the supply line.

2. The pressure adjustment unit comprises: an outlet path branching from the supply path; an outflow control valve that controls the outflow of the liquid from the supply path to the outflow path; The first controller 2. The liquid supply system according to claim 1, wherein the pressure in the supply passage is decreased by opening the outflow control valve, and the pressure in the supply passage is increased by closing the outflow control valve.

3. The device comprises: a second pressure gauge for detecting the pressure in the supply passage; a second controller for controlling the operation of the device; The second controller receiving the data transmitted from the liquid supply system through the supply line by detecting an increase or decrease in pressure in the supply line by the second pressure gauge when the pressure in the supply line detected by the second pressure gauge is within the predetermined range; A liquid supply system according to claim 1 or claim 2, wherein the data is stored.

4. The device comprises: Further comprising a display unit, The second controller The liquid supply system according to claim 3 , wherein the information contained in the data is displayed on the display unit.

5. 3. The liquid supply system according to claim 1, wherein the information includes any one of the name of the liquid, the lot number of the liquid, and the expiration date of the liquid.

6. the apparatus is located in a clean room; the container and the liquid feed pump are disposed outside the clean room; 3. The liquid supply system according to claim 1, wherein the supply path is provided across from the external space to the internal space.

7. 3. The liquid supply system according to claim 1, wherein a plurality of the devices are connected to the liquid supply system.

8. A liquid delivery device that supplies a liquid to an apparatus, a container for containing the liquid; a liquid feed pump for feeding the liquid contained in the container; a pressure gauge for detecting the pressure in a supply line connecting the liquid feed pump and the device; a pressure adjusting unit for adjusting the pressure in the supply path; a controller for controlling the operation of the pressure adjustment unit; The controller storing data including information about the liquid or the liquid delivery device; A liquid delivery device that, when the pressure in the supply path detected by the pressure gauge is within a predetermined range, transmits the data to the device through the supply path by increasing or decreasing the pressure in the supply path using the pressure adjustment unit in accordance with the data.

9. A device that consumes a liquid supplied from a liquid delivery device, a pressure gauge for detecting the pressure in the supply path connecting the liquid delivery device and the device; a controller for controlling the operation of the device; The controller receiving the data transmitted from the liquid delivery device through the supply path by detecting an increase or decrease in pressure in the supply path using the pressure gauge when the pressure in the supply path detected by the pressure gauge is within a predetermined range; A liquid consuming device that stores the data.

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