Appearance inspection device

Abstract

To provide an appearance inspection apparatus that enables a user to confirm the degree of progress of setting items for the apparatus during a setting operation for the setting items.SOLUTION: An appearance inspection device 100 includes: an imaging unit 1 for capturing an image of a semiconductor wafer W; a control unit 2 for detecting a defect of the semiconductor wafer W on the basis of the image of the semiconductor wafer W; and a display unit 6 including a display screen 6a with a setting item display area 8 that displays setting items of inspection of the semiconductor wafer W. The display unit 6 is configured to display, in the setting item display area 8, the progress status of setting of setting items 7 by a user in an identifiable manner.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an appearance inspection apparatus, and more particularly to an appearance inspection apparatus for detecting defects in an object based on an image of the object. [Background technology]

[0002] BACKGROUND ART Conventionally, there is known an appearance inspection device for detecting defects in an object based on an image of the object (see, for example, Patent Document 1).

[0003] The above-mentioned Patent Document 1 discloses an appearance inspection device that inspects the presence or absence of defects in a wafer based on a captured image of the wafer, which is the object. In the defect inspection device of the above-mentioned Patent Document 1, an object such as a wafer is placed on a stage that is configured by combining an XY stage, a Z stage, a theta stage, etc. While the stage is moved, an image of the object is captured by a camera installed above the stage, and defects in the object are detected based on the captured image of the object. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-149869 Summary of the Invention [Problem to be solved by the invention]

[0005] Although not explicitly stated in Patent Document 1, in order for a user to use a visual inspection device to detect defects in an object, there are many setting items that the user must set for the visual inspection device, and it may be difficult for the user to grasp to what extent the settings have been made. Therefore, there is a need for a visual inspection device that allows the user to check the progress of setting items when setting the setting items for the visual inspection device.

[0006] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide an appearance inspection device that allows the progress of setting items to be checked during the setting work for the appearance inspection device. [Means for solving the problem]

[0007] In order to achieve the above object, the appearance inspection device according to this first aspect comprises an imaging unit that captures an image of an object, a control unit that detects defects in the object based on the image of the object, and a display unit including a display screen having a setting item display area that displays setting items for inspecting the object, and the display unit is configured to identifiably display the progress status of the user's setting of the setting items in the setting item display area.

[0008] In the visual inspection device according to the first aspect, as described above, the display unit is configured to identifiably display the progress status of the setting items set by the user in the setting item display area. This allows the user to visually check the progress status of the setting items displayed on the display unit through the setting item display area. As a result, the user can check the progress of the setting items during the setting work of the visual inspection device.

[0009] In the aforementioned visual inspection device according to the first aspect, the display unit is preferably configured to display the progress of setting of the setting items in the setting item display area in a plurality of identifiable stages. With this configuration, the user can grasp to what stage the setting of the displayed setting items has been completed, and therefore the user can grasp the progress of setting the setting items in stages.

[0010] In this case, the display unit is preferably configured to display the plurality of stages using distinguishable identification marks, so that the user can easily understand from the identification marks to which stage the displayed setting item has been set.

[0011] In the visual inspection device, the display unit displays the progress status of the setting of a setting item in a plurality of distinguishable stages, and the display unit is configured to display the plurality of stages, i.e., the setting item is not set, being set, and set complete. With this configuration, the user can grasp the progress status of the setting by distinguishing between the not set item, the item being set, and the set complete item. As a result, the user can easily grasp the stage at which the progress status of the setting item is, i.e., the not set item, the item being set, or the set complete item.

[0012] In a configuration in which the display unit displays the setting items in multiple stages, i.e., not yet set, being set, and set complete, the display screen preferably has, in addition to the setting item display area, a setting input unit display area including multiple input units for the setting items, and the display unit is configured to display the setting complete state in the setting item display area based on receiving an input from the user to save the settings in response to inputs to the multiple input units. With this configuration, the user can display the setting complete state without having to input the setting complete state separately from the input to save the settings, thereby reducing the user's workload.

[0013] In the configuration in which the display unit displays the setting item in a plurality of stages, i.e., not set, being set, and set, the display unit is preferably configured to display the next setting item to be set in the setting item display area when the setting item reaches the set, complete state, so that the user can easily grasp the next setting item to be set.

[0014] In this case, the display unit is preferably configured to display a plurality of mutually related setting items when displaying the setting items to be set next in the setting item display area, so that the user can easily grasp the group of related setting items to be set next, thereby improving user convenience.

[0015] In a configuration in which the display unit displays the states of setting items as not set, being set, and set complete as multiple stages, the display unit is preferably configured to continue to display the set complete setting item in the setting item display area when displaying the next setting item to be set after the setting item has reached the set complete state. This allows the set complete setting item to continue to be displayed in the setting item display area, making it easy for the user to understand which setting items have been set so far.

[0016] In the configuration in which the display unit displays the setting completion state in the setting item display area based on receiving an input from the user to save settings for input to the multiple input units, the display unit is preferably configured to display, when the input of the setting items is resumed after being interrupted based on receiving an interruption input from the user, the setting item display area in the state at the time of the interruption and the setting input unit display area in the state at the time of the interruption. With this configuration, even when the input of the setting items is interrupted and then resumed, the setting item display area shows the progress status at the time of interruption, and the setting input unit display area, so that the user can easily grasp the progress status at the time of interruption.

[0017] In the configuration in which the display unit displays the setting completion state in the setting item display area based on receiving an input from the user to save settings in response to inputs to multiple input units, the display unit is preferably configured to display all of the setting items whose settings have already been saved in the setting item display area based on an input to edit a setting item that has already been set. With this configuration, even when editing a setting item that has already been set, all of the setting items whose settings have already been saved are displayed in the setting item display area on the display unit, allowing the user to easily understand which setting items have already been set.

[0018] In this case, preferably, the display unit is configured to, when all of the setting items are displayed in the setting item display area based on an input to edit an already-set setting item, display the progress status of all of the setting items displayed in the setting item display area as an unset state, and, after editing has been performed in the setting input unit display area corresponding to the setting item selected for editing, display a setting completion status in the setting item display area for the setting item that has been edited and for which an input to save the setting has been received from the user in response to the input to edit the setting item. With this configuration, after editing has been performed in the setting input unit display area corresponding to the setting item selected for editing, based on the input to save the setting from the user in response to the input to edit the setting item, display a setting completion status in the setting item display area for the setting item that has been edited and for which an input to save the setting has been received from the user, so that the user can easily understand which setting item has been edited.

[0019] In the visual inspection device according to the first aspect, the setting item display area is preferably configured so that, for each setting item, the setting item and an identification mark that enables the progress of setting of the setting item to be identified are displayed in a corresponding manner. With this configuration, the setting item display area is configured so that, for each setting item, the setting item and an identification mark that enables the progress of setting of the setting item to be identified are displayed in a corresponding manner, allowing the user to easily grasp the progress of each setting item. [Effects of the Invention]

[0020] According to the present invention, as described above, it is possible to provide a visual inspection device that allows a user to check the progress of setting items in the setting work for the visual inspection device. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a schematic diagram showing a visual inspection apparatus according to a first embodiment. [Figure 2] FIG. 3 is a diagram for explaining a setting item display area according to the first embodiment. [Figure 3] FIG. 3 is a diagram for explaining a setting input section display area according to the first embodiment. [Figure 4] FIG. 10 is a diagram for explaining a display of a setting completion state according to the first embodiment. [Figure 5] FIG. 10 is a diagram of a display screen when a setting completion state is displayed in a setting item display area according to the first embodiment. [Figure 6] FIG. 10 is a diagram of a display screen before the next relevant setting item to be input is displayed according to the first embodiment. [Figure 7] FIG. 10 is a diagram of the display screen after the relevant setting items to be input next have been displayed according to the first embodiment. [Figure 8] FIG. 10 is a diagram for explaining interruption of input of a setting item according to the second embodiment. [Figure 9] FIG. 11 is a diagram of a display screen when an input to edit an already set setting item is made according to the third embodiment. [Figure 10] FIG. 11 is a diagram of a display screen when editing an already set setting item according to the third embodiment. [Figure 11] FIG. 11 is a diagram of a display screen after editing an already set setting item according to the third embodiment. [Figure 12] FIG. 10 is a diagram for explaining a modified example of the first embodiment. [Figure 13] FIG. 10 is a diagram for explaining a modified example of the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0022] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.

[0023] [First embodiment] (Configuration of visual inspection equipment) First, the configuration of a visual inspection apparatus 100 according to the first embodiment will be described with reference to FIG.

[0024] As shown in FIG. 1, in the visual inspection apparatus 100, a table 4 on which a semiconductor wafer W is placed is moved horizontally (in the X and Y directions in FIG. 1) by a stage 3, and an imaging unit 1 installed above the stage 3 (in the Z1 direction in FIG. 1) captures an image of the semiconductor wafer W. Then, based on the captured image, a control unit 2 detects defects in the semiconductor wafer W. The semiconductor wafer W is, for example, a silicon wafer obtained by thinning single-crystal silicon (Si). The semiconductor wafer W is an example of an "object" in the claims.

[0025] 1, the visual inspection apparatus 100 includes an imaging unit 1, a control unit 2, a stage 3, a table 4, a memory unit 5, and a display unit 6. The memory unit 5 stores the contents input by the user regarding the setting items 7 for the inspection of the semiconductor wafer W.

[0026] 1, the control unit 2 not only detects defects in the semiconductor wafer W based on the captured image, but also controls the operations of the imaging unit 1, the stage 3, and the table 4. For example, the control unit 2 is a computer that includes a processor such as a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and a GPU (Graphics Processing Unit), and enables image processing and device control processing.

[0027] As shown in FIG. 1, the control unit 2 is configured to control the operation of the imaging unit 1, the stage 3, and the table 4 based on the contents input by the user regarding the inspection setting items 7 (see FIG. 2, etc.) stored in the memory unit 5, and to detect defects in the semiconductor wafer W based on the image of the semiconductor wafer W captured by the imaging unit 1.

[0028] 3, the display unit 6 is configured to display a setting input unit display area 9 for receiving input of setting items 7 from the user. For example, the contents of the setting items 7 include setting of a wafer map of the semiconductor wafer W, setting of alignment, setting of inspection conditions, etc.

[0029] The display unit 6 also includes a display screen 6a having a setting item display area 8 that displays setting items 7 for the inspection of the semiconductor wafer W. In the first embodiment, the display unit 6 is configured to identifiably display the progress of the setting of the setting items 7 by the user in the setting item display area 8.

[0030] 3, the display unit 6 is configured to allow the progress of setting the setting item 7 to be identified in a plurality of stages in the setting item display area 8. The display unit 6 is also configured to display the plurality of stages, namely, the setting item 7 is not set, being set, and set to completion. In the first embodiment, the display unit 6 displays the progress of setting the setting item 7 using an identification mark 11 indicating the progress. That is, when the setting item 7 is not set, an identification mark 11a indicating the not set state is displayed; when the setting item 7 is being set, an identification mark 11b indicating the set to completion state is displayed; and when the setting item 7 is set to completion, an identification mark 11c indicating the set to completion state is displayed. Specifically, the identification mark 11a indicating the not set state is no mark (nothing is displayed), the identification mark 11b indicating the set to completion state is a check mark, and the identification mark 11c indicating the set to completion state is a check mark enclosed in a circle.

[0031] Furthermore, the display screen 6a has a setting input section display area 9 including a plurality of input sections 91 for setting items 7 in addition to the setting item display area 8, and the display section 6 is configured to display an identification mark 11c indicating a setting completion state in the setting item display area 8 based on receiving an input from the user to save the settings in response to inputs to the plurality of input sections 91. The input to the input section 91 for the setting item 7 for which an input to save the settings has been made is stored in the storage section 5.

[0032] Furthermore, when the setting item 7 has reached the setting completion state, the display unit 6 is configured to display the next setting item 7 to be set in the setting item display area 8. Specifically, when the setting item a, which is one of the setting items 7, has reached the setting completion state, the display unit 6 is configured to display the next setting item 7 to be set in the setting item display area 8.

[0033] Furthermore, the display unit 6 is configured to display a plurality of mutually related setting items 7 when displaying the setting item 7 to be set next in the setting item display area 8. Here, setting items b, c, and d are setting items 7 that are mutually related. Therefore, the display unit 6 is configured to display the three setting items b, c, and d in the setting item display area 8 as the setting items 7 to be set next, based on the state in which setting item a has been set. Note that setting items a, b, c, and d are each one of the plurality of setting items 7, and by clicking a setting item 7 displayed in the setting item display area 8 with the cursor C, the display unit 6 is configured to display the setting input unit display area 9 corresponding to the clicked setting item 7.

[0034] In addition, after the setting item 7 has reached the setting completion state, the display unit 6 is configured to continue to display the setting item 7 that has reached the setting completion state in the setting item display area 8 when displaying the next setting item 7 to be set.

[0035] The setting item display area 8 is configured to display the setting items 7 in a corresponding manner with identification marks 11 that allow the progress of setting the setting items 7 to be identified.

[0036] Next, the display screen 6a when setting the setting items 7 of the examination in the first embodiment will be described with reference to FIGS.

[0037] First, as shown in Fig. 2, in the first embodiment, the display screen 6a includes a setting item display area 8. Fig. 2 shows the display screen 6a when a user inputs to the input unit 91 to save the settings for setting item a, which is one of the setting items 7. Therefore, the display screen 6a displays a circled check mark 11c, which is an identification mark 11c indicating a setting completion state, to the right of setting item a displayed in the setting item display area 8. Note that the display of identification mark 11c to the right of setting item a is an example of "display in which the setting progress status and the identification mark correspond to each other" as defined in the claims.

[0038] 2, the setting item 7 to be set next is displayed based on the setting item a being in a setting completion state. In the first embodiment, the setting items b, c, and d are three setting items 7 that are related to each other. Therefore, the setting items b, c, and d are displayed in the setting item display area 8 as the setting items 7 to be set next. Also, in FIG. 2, the setting items b, c, and d are in an unset state. Therefore, the display screen 6a displays an identification mark 11a (no mark, no display) to the right of the setting items b, c, and d displayed in the setting item display area 8, which indicates an unset state. Note that the display of the identification mark 11a to the right of the setting items b, c, and d is an example of "display in which the setting progress state and the identification mark correspond to each other" as defined in the claims.

[0039] Furthermore, the setting item display area 8 displays the setting item 7 in a selectable manner. In Fig. 2, the setting item b displayed in the setting item display area 8 is selected by clicking the setting item b with the cursor C. As a result, the setting item display area 8 displays an identification indicator 11b to the right of the setting item b, indicating that the setting is currently being performed. Furthermore, the display screen 6a displays the setting input section display area 9 corresponding to the setting item b (see Fig. 3).

[0040] Next, as shown in FIG. 3 , in the first embodiment, the display screen 6 a has a setting input section display area 9 including a plurality of input sections 91 for setting items 7, in addition to the setting item display area 8. For example, the input section 91 for setting items 7 may accept input from a keyboard, a selection from a drop-down list, or a discrete numerical value selected using up and down buttons, and is configured to accept input of the content of the setting item 7 from a user. In addition to the input section 91 for setting item 7, the setting input section display area 9 also has a save input accepting section (OK button) 92 that accepts an input from the user to save the setting in response to the input to the input section 91 for setting item 7, and a discard input accepting section (cancel button) 93 that accepts an input from the user to discard the input to the input section 91 for setting item 7. In addition to the input sections 91, the save input accepting section 92, and the discard input accepting section 93, the setting input section display area 9 can also display information I used to input the setting items 7. For example, this information I may be a wafer map or an image of a semiconductor wafer W captured by the imaging unit 1.

[0041] Next, as shown in Fig. 4, when the user clicks an OK button in the save input accepting section 92, the contents of the setting item 7 input by the user into the input section 91 are stored in the storage section 5. Also, when the user clicks a cancel button in the discard input accepting section 93, the contents input into the input section 91 are discarded and the display on the display screen 6a of the setting input section display area 9 is terminated. Therefore, clicking the discard input accepting section 93 returns to the state in Fig. 2. Note that clicking the save input accepting section 92 is an example of "input to save settings" in the claims.

[0042] Next, with reference to Fig. 5, the display screen 6a after the user clicks the OK button in the save input acceptance section 92 in Fig. 4 will be described. Clicking the OK button in the save input acceptance section 92 causes the display of setting item b in the setting input section display area 9 on the display screen 6a to end. Furthermore, clicking the OK button in the save input acceptance section 92 causes the display screen 6a to display an identification indicator 11c to the right of setting item b in the setting item display area 8, indicating that the setting has been completed.

[0043] Next, the display of the related setting item 7 to be input next in the setting item display area 8 will be described with reference to FIGS. 6 and 7 . FIG. 6 shows a display screen 6a in which setting items a, b, and c are in a completed state, and setting item d is in a setting-in-progress state. Like the setting input display area 9 for setting item b, the setting input display area 9 for setting item d also includes an input section 91 for setting item 7, a save input accepting section 92, a discard input accepting section 93, and information I used to input setting item 7. However, the setting input display area 9 for setting item b and the setting input display area 9 for setting item d are not the same. As long as they are configured to accept input for setting item 7, appropriate configurations can be used depending on the input content of each setting item 7. For example, while an example in which a wafer map is displayed as information I in the setting input display area 9 for setting item b is shown, setting item d may display data used to input setting item d instead of a diagram or image.

[0044] FIG. 7 shows a display screen 6a after clicking the save input accepting section 92 in the setting input section display area 9 for setting item d in FIG. 6 . The identification indicator 11 indicating the progress of setting item d in the setting item display area 8 changes from identification indicator 11b, indicating a setting in progress state, to identification indicator 11c, indicating a setting completed state. At the same time, the next setting item 7 to be set is displayed. Here, setting items e, f, and g are related to each other, so setting items e, f, and g are displayed in the setting item display area 8 as the next setting item 7 to be set. Note that in the explanation using FIG. 6 , an example was shown in which setting items b and c, among related setting items b, c, and d, are in a setting completed state. However, in order for the next setting item 7 to be set to be displayed, it is sufficient that all of the related setting items b, c, and d are in a setting completed state, and the order in which setting items b, c, and d are in a setting completed state does not matter.

[0045] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0046] In the visual inspection device 100 of the first embodiment, the display unit 6 is configured to identifiably display the progress status of the setting of the setting item 7 by the user in the setting item display area 8, and thus the user can visually check the progress status of the setting item 7 displayed on the display unit 6 from the setting item display area 8. As a result, in the setting work of the setting item 7 in the visual inspection device 100, the user can check the degree of progress of the setting item 7.

[0047] Furthermore, in the visual inspection apparatus 100 of the first embodiment, the display unit 6 is configured to display the progress status of the setting of the setting item 7 in a plurality of stages in the setting item display area 8, with the plurality of stages being displayed as not set, being set, and set complete. Furthermore, in the first embodiment, the display unit 6 is configured to display the progress status of the setting of the setting item 7 using an identification mark 11 indicating the progress status. As a result, the user can confirm from the identification mark 11 which stage the progress status of the setting item 7 is at among not set, being set, and set complete. Therefore, the user can easily confirm which stage the progress status of the setting of the setting item 7 is at.

[0048] Furthermore, in the visual inspection device 100 of the first embodiment, the display screen 6a further has, in addition to the setting item display area 8, a setting input unit display area 9 including a plurality of input units 91 for the setting items 7, and the display unit 6 is configured to display an identification mark 11c indicating a setting completion state in the setting item display area 8 based on receiving an input from the user to save the settings in response to an input to the plurality of input units 91. As a result, the user can cause the identification mark 11c indicating a setting completion state to be displayed in the setting item display area 8 by inputting the setting save command without having to input the setting completion command separately from the input to save the settings, thereby reducing the burden on the user.

[0049] Furthermore, in the visual inspection apparatus 100 of the first embodiment, the display unit 6 is configured to display a plurality of mutually related setting items 7 to be set next in the setting item display area 8, based on the setting of a setting item 7 being completed. This allows the user to easily grasp the group of related setting items to be set next, thereby improving user convenience.

[0050] Furthermore, in the visual inspection device 100 of the first embodiment, when the display unit 6 displays the next setting item 7 to be set after the setting item 7 has reached a setting completion state, the display unit 6 continues to display the setting item 7 that has reached a setting completion state in the setting item display area 8. As a result, the setting item 7 that has reached a setting completion state continues to be displayed in the setting item display area 8, allowing the user to easily understand which setting items 7 have been set up to that point.

[0051] Furthermore, in the visual inspection device 100 of the first embodiment, when the display unit 6 displays the next setting item 7 to be set after the setting item 7 has reached a setting completion state, the display unit 6 continues to display the setting item 7 that has reached a setting completion state in the setting item display area 8. As a result, the setting item 7 that has reached a setting completion state continues to be displayed in the setting item display area 8, allowing the user to easily understand which setting items 7 have been set up to that point.

[0052] [Second embodiment] Next, a display screen 6a when setting the inspection setting items 7 of the appearance inspection apparatus 100a according to the second embodiment will be described. The configuration of the appearance inspection apparatus 100a used in the appearance inspection method according to the second embodiment is the same as that of the appearance inspection apparatus 100 according to the first embodiment, except that it accepts an interruption input from the user. In the second embodiment, the display unit 6 is configured to display the setting item display area 8 in the state at the time of the interrupted input and the setting input unit display area 9a in the state at the time of the interrupted input, when the input of the setting items 7 is resumed after being interrupted based on the acceptance of an interruption input from the user.

[0053] As shown in FIG. 8 , in the second embodiment, the setting input unit display area 9a differs from the setting input unit display area 9 of the first embodiment in that it includes an interruption input acceptance unit 94 that accepts an interruption input from the user. When the user clicks an interruption button that is the interruption input acceptance unit 94, the display contents of the setting item display area 8 and the contents of the setting items 7 input by the user to the input unit 91 are stored in the storage unit 5, and an interruption is performed. Here, an example of an interruption is shutting down the appearance inspection apparatus 100a. Note that clicking the interruption button that is the interruption input acceptance unit 94 is an example of an "interruption input" in the claims.

[0054] For example, if the interruption is a shutdown of the visual inspection device 100a, when the visual inspection device 100a is started up after the interruption, the display unit 6 displays the setting item display area 8 in the state at the time of the interrupted input and the setting input section display area 9a in the state at the time of the interruption, based on the contents stored in the storage unit 5. In other words, the display unit 6 displays the same contents as in FIG.

[0055] (Effects of the second embodiment) In the second embodiment, the following effects can be obtained.

[0056] In the visual inspection device 100a of the second embodiment, the display unit 6 is configured to display the setting item display area 8 in the state at the time of the interrupted input and the setting input section display area 9a in the state at the time of the interrupted input when the input of the setting item 7 is resumed after being interrupted based on receiving an interruption input from the user.Even if the user resumes input of the setting item 7 after interrupting the input, the setting item display area 8 showing the progress status at the time of interruption and the setting input section display area 9a are displayed on the display unit 6, so the user can easily grasp the progress status at the time of interruption.

[0057] The other effects of the second embodiment are the same as those of the first embodiment.

[0058] [Third embodiment] Next, a display screen 6a when setting the inspection setting items 7 of the appearance inspection apparatus 100b according to the third embodiment will be described. The appearance inspection apparatus 100b used in the appearance inspection method according to the third embodiment has the same configuration as the appearance inspection apparatus 100 according to the first embodiment, except that it accepts input from the user to edit the setting items 7 that have already been set. In the third embodiment, the display unit 6 is configured to display the progress status of all the setting items 7 displayed in the setting item display area 8 as an unset state when all of the setting items 7 are displayed in the setting item display area 8 based on input to edit the setting items 7 that have already been set. After editing is performed in the setting input unit display area 9 corresponding to the setting item 7 selected for editing, based on receiving input from the user to save the settings for the editing input of the setting item 7, display the setting completed status in the setting item display area 8 for the setting item 7 for which the edited and saved input has been received.

[0059] 9 shows the display screen 6a after receiving an input from the user to edit a setting item 7 that has already been set in the third embodiment. For example, the user can have the control unit 2 read in the setting items 7 that have already been set and that are stored in the storage unit 5. This is the same as the first embodiment except that all setting items 7, from setting item a to setting item g, are displayed in the setting item display area 8 together with an identification mark 11a indicating an unset state. As described above, the contents of the setting items 7 that have already been set are stored in the storage unit 5, and therefore reading in the setting items 7 stored in the storage unit 5 is an example of "input to edit an already set setting item" in the claims.

[0060] 10 shows the display screen 6a displaying the setting input section display area 9 corresponding to setting item b when the user selects setting item b displayed in the setting item display area 8. The third embodiment is the same as the first embodiment except that the input content for setting item b that has already been set is entered in the input section 91 for setting item 7.

[0061] 11 shows the display screen 6a after the user has completed editing the setting item b and input to save the settings. As in the first embodiment, by inputting to save the settings, an identification mark 11c indicating the setting completion state is displayed to the right of the setting item b.

[0062] (Effects of the third embodiment) Next, the effects of the third embodiment will be described.

[0063] In the third embodiment, the display unit 6 is configured to, when all of the setting items 7 are displayed in the setting item display area 8 based on an input to edit a setting item 7 that has already been set, display the progress status of all of the setting items 7 displayed in the setting item display area 8 as an unset state, and after editing is performed in the setting input unit display area 9 corresponding to the setting item 7 selected for editing, display a setting completion state in the setting item display area 8 for the setting item 7 that has been edited and for which an input to save the setting is received from the user in response to the input to edit the setting item 7. Therefore, after editing is performed in the setting input unit display area 9 corresponding to the setting item 7 selected for editing, based on the input to save the setting from the user in response to the input to edit the setting item 7, the setting completion state is displayed in the setting item display area 8 for the setting item 7 that has been edited and for which an input to save the setting is received from the user, so the user can easily understand which setting item 7 has been edited.

[0064] The other effects of the third embodiment are the same as those of the first embodiment.

[0065] [Variations]

[0066] The present invention is not limited to the above embodiments, but is illustrated by the claims, and includes all modifications within the scope of the claims.

[0067] For example, in the first to third embodiments, examples have been shown in which multiple stages of the progress state are displayed by the identification signs 11, but the present invention is not limited to this. In the present invention, for example, multiple stages of the progress state may be displayed by color, or words such as "Not set," "Setting in progress," and "Setting completed" may be displayed. Any mode may be used as long as the multiple stages can be distinguished.

[0068] Furthermore, in the above first to third embodiments, examples have been shown in which the multiple stages of the progress status are displayed in three stages: "Not set," "Setting," and "Setting complete," but the present invention is not limited to this. For example, there may be two stages: "Not set" and "Setting complete," or there may be more than three stages. As long as the progress status can be grasped, any number of stages of the multiple stages of the progress status may be used. Furthermore, the progress status may be displayed using percentages (%) or the like.

[0069] Furthermore, in the above first to third embodiments, an example was shown in which the setting completion state was displayed in the setting item display area 8 based on receiving an input to save the settings, but the present invention is not limited to this. For example, a setting completion input button may be separately provided, and the setting completion state may be displayed in the setting item display area 8 based on receiving an input by clicking the setting completion input button.

[0070] In addition, the example has been shown in which the display unit 6 displays a plurality of mutually related setting items 7 to be set next in the setting item display area 8 based on the setting of a setting item 7 being completed, but the present invention is not limited to this. For example, as shown in Fig. 12, only one setting item 7 to be set next may be displayed in the setting item display area 8.

[0071] In the second embodiment, the interruption input accepting unit 94 is displayed in the setting input unit display area 9, but the present invention is not limited to this. In the present invention, the interruption input accepting unit 94 may be displayed in the setting item display area 8, for example, or anywhere within the display screen 6a.

[0072] Furthermore, in the third embodiment, when an input to edit an already set setting item 7 is made and all of the setting items 7 are displayed in the setting item display area 8, the progress status of all of the setting items 7 displayed in the setting item display area 8 is displayed as an unset state. However, the present invention is not limited to this. As shown in Fig. 13, when the setting of the setting items 7 is completed, all of the setting items 7 may be displayed as a set-completed state.

[0073] Furthermore, in the first to third embodiments, an example was shown in which the identification indicator 11 indicating the progress status is displayed to the right of the setting item 7 in the setting item display area 8, but the present invention is not limited to this. For example, the identification indicator 11 may be displayed to the left of the setting item 7, or the identification indicator 11 may be displayed so as to overlap the setting item 7. The display of the setting item 7 and the identification indicator 11 may be any display that allows the correspondence between the setting item 7 and the identification indicator 11 to be understood. [Explanation of symbols]

[0074] 1. Imaging unit 2. Control Unit 3 Stages 4 tables 5 Storage section 6 Display section 6a Display screen 7 Setting items 8 Setting item display area 9, 9a Setting input display area 11, 11a, 11b, 11c identification signs 91 Input section 92 Save input reception section 94 Interrupt input reception section 100, 100a, 100b Appearance inspection device C cursor W: Semiconductor wafer (object)

Claims

1. an imaging unit that captures an image of an object; a control unit that detects defects in the object based on an image of the object; a display unit including a display screen having a setting item display area for displaying setting items for the object inspection, The display unit is configured to identifiably display a progress status of the setting of the setting items by the user in the setting item display area.

2. 2. The visual inspection device according to claim 1, wherein the display unit is configured to display the progress of setting the setting items in the setting item display area in a plurality of distinguishable stages.

3. 3. The visual inspection apparatus according to claim 2, wherein the display unit is configured to display the plurality of stages by identifiable identification marks.

4. 3. The visual inspection device according to claim 2, wherein the display unit is configured to display, as the plurality of stages, a state in which the setting item is not set, a state in which the setting item is being set, and a state in which the setting item has been set.

5. the display screen further has, in addition to the setting item display area, a setting input section display area including a plurality of input sections for the setting items; 5. The visual inspection device according to claim 4, wherein the display unit is configured to display the setting completion state in the setting item display area based on receiving an input from a user to save settings for inputs to the plurality of input units.

6. 5. The visual inspection device according to claim 4, wherein the display unit is configured to display the setting item to be set next in the setting item display area based on the setting item being in the setting completion state.

7. 7. The visual inspection device according to claim 6, wherein the display unit is configured to display a plurality of mutually related setting items when displaying the setting items to be set next in the setting item display area.

8. 5. The visual inspection device according to claim 4, wherein the display unit is configured to, after the setting item has reached the setting completion state, continue to display the setting item that has reached the setting completion state in the setting item display area when displaying the next setting item to be set.

9. 6. The visual inspection device according to claim 5, wherein the display unit is configured to, when input of the setting items is resumed after being interrupted based on receiving an interruption input from a user, display the setting item display area in the state it was in at the time of the interrupted input and the setting input unit display area in the state it was in at the time of the interrupted input.

10. 6. The visual inspection device according to claim 5, wherein the display unit is configured to display all of the setting items whose settings have already been saved in the setting item display area based on an input to edit the setting items that have already been set.

11. The display unit when all of the setting items are displayed in the setting item display area based on an input for editing the setting items that have already been set, the progress states of all of the setting items displayed in the setting item display area are displayed as the unset state, 11. The visual inspection device according to claim 10, wherein after editing is performed in the setting input unit display area corresponding to the setting item selected for editing, the setting item display area is configured to display the setting completion state for the setting item that has been edited and for which input for saving has been received based on receiving an input from a user to save the settings for the editing input of the setting item.

12. 2. The visual inspection device according to claim 1, wherein the setting item display area is configured to display the setting items in correspondence with identification marks that enable the progress status of setting the setting items to be identified.

Images