Radiation measurement system

Abstract

To provide a radiation measurement system with which it is possible to efficiently measure a plurality of samples.SOLUTION: The radiation measurement system includes an X-ray CT measurement system 3. The X-ray CT measurement system comprises a base 4, an irradiation unit 5, a detection unit 6, a sample stage 72, and a sample changer 7. The base is constructed to be installed on a floor surface. The irradiation unit is constructed to irradiate a measurement object with a radiation ray. The detection unit is constructed to detect a radiation ray having gone through the measurement object. The sample changer is constructed to be capable of accommodating a plurality of candidates for the measurement object Ob that are irradiated with an X-ray, located between the irradiation unit and the detection unit, and constituted to be located on an optical path where the measurement object placed on the sample changer can be irradiated from the irradiation unit.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a radiation measurement system. [Background technology]

[0002] Patent Document 1 discloses technology related to an X-ray fluorescence analyzer that can obtain accurate measurement results even when the distance from the X-ray source or detector to the measurement surface of the sample changes due to switching between multiple samples or changing the position of the sample.

[0003] This X-ray fluorescence instrument calculates a coefficient (intensity ratio) for each sample placement section on the turret to correct for changes in the intensity of the detector's output signal due to changes in the distance from the X-ray tube or detector to the sample, associates it with the position identifier of each sample placement section, and stores it in the form of a correction table in a memory section.When analyzing a sample, quantitative and qualitative analysis is performed using the corrected intensity obtained by correcting the intensity of the detector's output signal based on the correction table. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-193615 Summary of the Invention [Problem to be solved by the invention]

[0005] However, there is still room for improvement in the technology for efficiently measuring multiple samples. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a radiation measurement system. The radiation measurement system includes an irradiation unit, a target installation unit, a detection unit, and a candidate installation unit. The irradiation unit is configured to irradiate radiation onto a measurement target. The target installation unit is configured to be able to install the measurement target within a radiation irradiation range. The detection unit is configured to detect radiation that has passed through the measurement target. The candidate installation unit is configured to be able to install a measurement target candidate, and includes a shaft unit, a first support unit, and a second support unit. The shaft unit extends along the axial direction and is configured to be rotatable about a rotation axis along the axial direction. The first support unit is configured to be rotatable in response to rotation of the shaft unit and includes a plurality of first support regions. Each of the first support regions supports a measurement target candidate, and are arranged along the outer periphery of the first support unit. The second support unit is configured to be rotatable in response to rotation of the shaft unit and includes a plurality of second support regions. Each of the second support regions supports a measurement target candidate, and are arranged along the outer periphery of the shaft unit. The first support unit and the second support unit are arranged at positions spaced apart in the axial direction. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a schematic diagram of a radiation measurement system 1. FIG. [Figure 2] FIG. 1 is a perspective view of an example of an X-ray CT measurement system. [Figure 3] FIG. 2 is a perspective view of a specific example of a sample changer 7. [Figure 4] 4 is a perspective view of a configuration example of the periphery of the candidate installation section in FIG. 3.

[0023] FIG. [Figure 5] 4 is a plan view of an example of the candidate installation section 8 shown in FIG. 3. FIG. [Figure 6] FIG. 6 is an enlarged view of one of the support areas 83 shown in FIG. 5. [Figure 7] FIG. 7 is a cross-sectional view taken along line AA in FIG. 6. [Figure 8] 10 is a diagram showing an outline of the movement of each element of the sample changer 7 in accordance with the operation of the moving device 74. FIG. [Figure 9] FIG. 10 is an activity diagram showing the operation of the X-ray CT measurement system 3 during measurement. DETAILED DESCRIPTION OF THE INVENTION

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings. Various features shown in the following embodiments can be combined with each other.

[0009] Incidentally, the program for realizing the software appearing in one embodiment may be provided as a non-transitory computer-readable medium, or may be provided so that it can be downloaded from an external server, or may be provided so that the program is started on an external computer and its functions are realized on a client terminal (so-called cloud computing).

[0010] Furthermore, various information processing according to an embodiment may realize input and output corresponding to the input. Here, the form of information referenced in such information processing (hereinafter referred to as reference information) is not limited as long as an output is obtained as a result of the input. The reference information may be, for example, rule-based information such as a database, a lookup table, or a predetermined function (including a decision formula such as a regression formula constructed using a statistical method), a trained model that has previously trained the correlation between input and output, or a large-scale language model that can output a desired result by inputting a prompt.

[0011] In one embodiment, a "unit" may include, for example, a combination of hardware resources implemented by a circuit in the broad sense and software information processing that can be specifically realized by these hardware resources. In one embodiment, various information is handled, and this information is represented, for example, by physical values ​​of signal values ​​representing voltage and current, high and low signal values ​​as a binary bit set consisting of 0 or 1, or quantum superposition (so-called quantum bits), and communication and calculations can be performed on a circuit in the broad sense.

[0012] Furthermore, a circuit in the broad sense is a circuit realized by at least an appropriate combination of a circuit, circuitry, processor, memory, etc. The processor may be a general-purpose processor or a dedicated circuit. That is, it includes an application specific integrated circuit (ASIC), a programmable logic device (e.g., a simple programmable logic device (SPLD), a complex programmable logic device (CPLD), and a field programmable gate array (FPGA)), etc.

[0013] 1. Overview of Radiation Measurement System 1 First, an overview of a radiation measurement system 1 according to this embodiment will be described. FIG. 1 is a schematic diagram of the radiation measurement system 1. The radiation measurement system 1 according to this embodiment is configured to perform X-ray CT measurement. As shown in FIG. 1, the radiation measurement system 1 includes a radiation measurement device 11 and a user terminal 12.

[0014] The radiation measurement device 11 includes an X-ray CT measurement system 3. The X-ray CT measurement system 3 is configured to perform X-ray CT measurement. Details of the X-ray CT measurement system 3 will be described later. The radiation measurement system 1 may further include a shielding wall 2. The shielding wall 2 is configured to define a shielding room SP1 that can block X-rays, which are one example of radiation. The shielding wall 2 is made of a material that can block radiation, such as lead, barium board, or concrete. Note that the radiation is not limited to X-rays, and may be any beam that requires blocking, such as alpha rays, beta rays, and gamma rays. The shielding wall 2 includes an opening / closing unit 21 that can communicate between the inside and outside of the shielding room SP1. The opening / closing unit 21 is configured to be able to control the state of communication between the inside and outside of the shielding room SP1, for example, by sliding along the shielding wall 2.

[0015] <User terminal 12> The user terminal 12 comprises a communication bus 120, a communication unit 121, a memory unit 122, at least one processor 123, a display unit 124, and an input unit 125, and these components are electrically connected within the user terminal 12 via the communication bus 120.

[0016] <Communications Department 121> The communication unit 121 is preferably a wired communication means such as USB, IEEE1394, Thunderbolt (registered trademark), wired LAN network communication, etc., but may also include wireless LAN network communication, mobile communication such as 3G / LTE / 5G, BLUETOOTH (registered trademark) communication, etc. as necessary. In other words, it is more preferable to implement it as a collection of multiple communication means. In other words, the user terminal 12 may communicate various information from the outside via the communication unit 121 and the network.

[0017] <Storage section 122> The memory unit 122 stores various information defined above. This can be implemented, for example, as a storage device such as a solid state drive (SSD) that stores various programs and the like related to the user terminal 12 executed by the processor 123, or as a memory such as a random access memory (RAM) that stores temporarily required information (arguments, arrays, etc.) related to the program operations. The memory unit 122 stores various programs, variables, etc. related to the user terminal 12 executed by the processor 123.

[0018] <Processor 123> The processor 123 processes and controls the overall operations related to the user terminal 12. The processor 123 is, for example, a central processing unit (CPU) not shown. The processor 123 realizes various functions related to the user terminal 12 by reading out predetermined programs stored in the storage unit 122. In other words, information processing by software stored in the storage unit 122 is specifically realized by the processor 123, which is an example of hardware, and can be executed as each functional unit included in the processor 123. These will be described in more detail in the next section. Note that the processor 123 is not limited to being single, and multiple processors 123 may be provided for each function. A combination of these may also be used.

[0019] <Display section 124> The display unit 124 may be included in the housing of the user terminal 12 or may be externally attached. The display unit 124 displays a graphical user interface (GUI) screen that can be operated by the user. This is preferably implemented by selectively using display devices such as a CRT display, a liquid crystal display, an organic EL display, and a plasma display depending on the type of user terminal 12.

[0020] <Input section 125> The input unit 125 is configured to receive input from the user. The input unit 125 may be included in the housing of the user terminal 12, or may be externally attached. For example, the input unit 125 may be implemented as a touch panel integrated with the display unit 124. The touch panel allows the user to input tapping, swiping, and the like. Of course, a switch button, a mouse, a QWERTY keyboard, or the like may be used instead of a touch panel. That is, the input unit 125 receives an operation input made by the user. The input is transferred as a command signal to the processor 123 via the communication bus 120, and the processor 123 can execute predetermined control or calculation as necessary.

[0021] The user terminal 12 according to this embodiment is configured to control various elements included in the radiation measurement system 1. For example, the user terminal 12 may be configured to control the open / close state of the opening / closing part 21 of the shielding wall 2. The user terminal 12 may also be configured to control measurement using the X-ray CT measurement system 3, analyze the measurement results, and the like. The user terminal 12 may be incorporated inside the X-ray CT measurement system 3.

[0022] 2. Configuration example of X-ray CT measurement system 3 Next, an example of the configuration of the X-ray CT measurement system 3 will be described. FIG. 2 is a diagram showing a perspective view of an example of the X-ray CT measurement system. The X-ray CT measurement system 3 of this embodiment is installed, for example, on an indoor floor surface. The X-ray CT measurement system 3 may be installed outdoors or fixed to the ground itself. As shown in FIG. 3, the X-ray CT measurement system 3 includes a base 4, an irradiation unit 5, a detection unit 6, a sample stage 72, and a sample changer 7.

[0023] The base 4 is configured to be placed on the floor. The base 4 may include, for example, legs 41 that come into contact with the floor and casters 42 for movement. The base 4 is configured to be able to carry various elements included in the X-ray CT measurement system 3. This allows the entire X-ray CT measurement system 3 to be moved, fixed, and surfaced with the various elements included in the X-ray CT measurement system 3 loaded thereon. The base 4 is installed so that its normal is in the height direction D1. The base 4 may also include fixed walls 43, 44. The fixed walls 43, 44 extend along the height direction D1 and are arranged to face each other in the irradiation direction D2 that is perpendicular to the height direction D1.

[0024] The irradiation unit 5 is configured to irradiate the measurement object Ob with X-rays. The irradiation unit 5 is fixed to a fixed wall 43. This allows the position of the X-rays irradiated from the irradiation unit 5 to be adjusted in the height direction D1. The irradiation unit 5 can irradiate the X-rays in an irradiation direction D2. The X-rays irradiated from the irradiation unit 5 are irradiated onto the measurement object Ob placed at a specified position.

[0025] The detector 6 is configured to detect X-rays passing through the object of measurement Ob. Examples of X-rays passing through the object of measurement Ob include transmitted X-rays passing through the object of measurement Ob, diffracted X-rays diffracted by the object of measurement Ob, reflected X-rays reflected by the object of measurement Ob, scattered X-rays scattered by the object of measurement Ob, and any X-rays absorbed by the object of measurement Ob and output through the object of measurement Ob. Scattered X-rays may include X-rays generated by resonant X-ray scattering by the object of measurement Ob and X-rays generated by non-resonant X-ray scattering by the object of measurement Ob. Passing through the object of measurement Ob refers to the optical path of the X-rays irradiated from the irradiator 5 including the object of measurement Ob, regardless of the physical phenomenon occurring in the object of measurement Ob. The detector 6 may be configured as a scintillation counter, an imaging plate, or any other suitable device. In this embodiment, the detector 6 is configured to detect X-rays passing through the object of measurement Ob. The detector 6 is positioned away from the irradiator 5 in the irradiation direction D2. The detection unit 6 is fixed to a fixed wall 44. This allows adjustment of the position in the height direction D1 of the X-rays detected by the detection unit 6. The detection unit 6 may be configured to be able to detect any output output from the measurement object Ob due to the X-rays from the irradiation unit 5. For example, when X-ray diffraction (XRD) is performed as the measurement using X-rays, the detection unit 6 may be configured to detect diffracted X-rays output from the measurement object Ob. The detection unit 6 may be configured to be slidable in the height direction D1, for example. This reduces the effort required to adjust the position in the height direction D1.

[0026] In this embodiment, the measurement object Ob includes a sample S and a holder H. The holder H is configured to hold the sample S. The holder H is also configured to be coupled to an attachment 722 of the sample stage 72, which will be described later. This allows the holder H to hold the sample S so that it extends from the sample stage 72 in the height direction D1.

[0027] The sample changer 7 is configured to be able to accommodate multiple candidates for the measurement object Ob to be irradiated with X-rays. The sample changer 7 is arranged between the irradiation unit 5 and the detection unit 6, and is configured to be located on an optical path that allows irradiation from the irradiation unit 5 to the measurement object Ob placed on the sample changer 7.

[0028] Here, a specific example of the sample changer 7 will be described. FIG. 3 is a perspective view of a specific example of the sample changer 7. As shown in FIG. 3, for example, the sample changer 7 includes a moving stage 71, a sample stage 72, an exchange device 73, a moving device 74, and a candidate setting unit 8. The candidate setting unit 8 is configured to extend in an axial direction Dz. In this embodiment, the axial direction Dz is approximately the same as the height direction D1, but the axial direction Dz and the height direction D1 may be different.

[0029] The moving stage 71 is provided on a base 4. On the moving stage 71, elements such as a sample stage 72 and a candidate setting unit 8, on which a candidate for the measurement object Ob is set, can be provided.

[0030] The sample stage 72 serving as an object placement unit is configured so that the measurement object Ob can be placed within the irradiation range of X-rays.

[0031] The candidate setting unit 8 is configured to be able to set a plurality of candidates for the measurement object Ob. The candidate setting unit 8 includes a shaft unit 81 and a plurality of turrets 82. The turrets are an example of a support unit.

[0032] The shaft 81 is connected to the moving stage 71. The shaft 81 extends from the moving stage 71 along the axial direction Dz, and is configured to be rotatable around a rotation axis C along the axial direction Dz. The shape of the shaft 81 is arbitrary, but is, for example, cylindrical.

[0033] Each of the multiple turrets 82 is configured to be rotatable around the rotation axis C in response to the rotation of the shaft portion 81. Each of the turrets 82 is connected to the outer circumferential surface of the shaft portion 81 and configured to extend in a plane perpendicular to the axial direction Dz. Each of the turrets 82 is fixed to the outer circumferential surface of the shaft portion 81 using a fastening member. This allows the turrets 82 to rotate integrally with the shaft portion 81. In this embodiment, as an example, the candidate installation unit 8 includes three turrets 82. The number of turrets 82 is arbitrary and may be one. The number of turrets 82 is arbitrary as long as the candidate installation unit 8 can be accommodated in the shielded chamber SP1, but is preferably multiple. The number of turrets 82 is specifically, for example, 2, 3, 4, 5, 6, 7, 8, 9, or 10, and may be within a range between any two of the numerical values ​​exemplified here. For example, the number of turrets 82 is 2 to 10, more preferably 3 to 7, and more preferably 3 to 5.

[0034] FIG. 4 is a perspective view of an example of the configuration of the periphery of the candidate installation portion in FIG. 3. As shown in FIG. 4, the turret 82 is configured as a flat plate having a thickness in the axial direction Dz. The turret 82 has a first surface 821, a second surface 822, and an outer circumferential surface 823. The first surface 821 and the second surface 822 are defined to be located opposite each other in the axial direction Dz. The first surface 821 and the second surface 822 are defined to be perpendicular to the axial direction Dz. The outer circumferential surface 823 is configured to connect the first surface 821 and the second surface 822. The inner circumferential surface of the turret 82 is connected to the shaft portion 81. The maximum outer diameter of the turret 82 is arbitrary, but specific examples include 10, 20, 30, 40, 50, 60, 70, 80, 90, and 100 cm, and may be within a range between any two of the values ​​exemplified here. For example, the outer diameter of the turret 82 is 10 to 100 cm, specifically 20 to 80 cm, and more specifically 30 to 50 cm.

[0035] Each of the turrets 82 includes a plurality of support regions 83. Each of the support regions 83 supports a candidate for the measurement object Ob, and is arranged along the outer periphery of the shaft portion 81. The specific shape of the support regions 83 will be described later.

[0036] The turrets 82 are disposed apart from one another in the axial direction Dz. The distance between the turrets 82 in the axial direction Dz (in other words, the distance in the height direction D1) is arbitrary as long as the measurement object Ob can be supported. The distance between the turrets 82 in the axial direction Dz is arbitrary, and specifically, may be, for example, 10, 20, 30, 40, 50, 60, 70, 80, 90, or 100 cm, or may be within a range between any two of the values ​​exemplified here. The distance between the turrets 82 in the axial direction Dz is 10 to 100 cm, specifically, 20 to 80 cm, and more specifically, 30 to 50 cm. For ease of explanation, the three turrets 82 will be referred to as the first turret 82a, the second turret 82b, and the third turret 82c in order of the shortest distance from the moving stage 71 in the axial direction Dz. For ease of explanation, the support region 83 of the first turret 82a may be referred to as the first support region 83a, the support region 83 of the second turret 82b as the second support region 83b, and the support region 83 of the third turret 82c as the third support region 83c. In other words, the first turret 82a and the second turret 82b are disposed at positions spaced apart in the axial direction Dz. This configuration can support more measurement target candidates when performing radiation measurement on each of multiple samples while suppressing an increase in the size of the radiation measurement system 1 in directions other than the axial direction Dz. The distinction between the turrets 82a, 82b, and 82c is purely for convenience. The candidate mounting unit 8 is disposed relative to the sample stage 72 without a shielding member capable of blocking X-rays. This configuration can make the area occupied by the X-ray CT measurement system 3 compact in a plane perpendicular to the height direction D1. Therefore, for example, when the radiation measurement system 1 is installed indoors, such as in a laboratory, it is possible to reduce the area required for the radiation measurement system 1. For example, the candidate installation unit 8 is configured such that, when the candidate installation unit 8 is viewed from above in the movement direction D3, no shielding member is placed in the space between the sample stage 72 and the candidate installation unit 8 so as to overlap with the candidate installation unit 8.

[0037] The replacement device 73 is configured to move a candidate for the measurement target Ob between the sample stage 72 and the candidate installation unit 8. The replacement device 73 includes a moving axis 731, an arm 732 as a target support unit, and a camera 733 as an imaging device.

[0038] The movement axis 731 is configured to extend from the movement stage 71 along the height direction D1.

[0039] The arm 732 is connected to the moving shaft 731 and configured to be able to support candidates for the measurement object Ob (including the measurement object Ob placed on the sample stage 72). The arm 732 is configured to support the holder H of the measurement object Ob from below, for example, by forks spaced apart in the irradiation direction D2. The arm 732 is connected to the moving shaft 731 and configured to be able to move in the height direction D1 along the moving shaft 731. In this case, the moving shaft 731 may include a drive unit configured to be able to move the arm 732 at least along the axial direction Dz.

[0040] The camera 733 is configured to capture an image including the measurement object Ob supported by at least some of the multiple turrets 82 (e.g., the first turret 82a and the second turret 82b). With this configuration, movement of a measurement object candidate supported by each turret 82 to the sample stage 72 and movement of a measurement object placed on the sample stage 72 to each turret 82 can be appropriately performed according to the position of the turret 82 in the axial direction Dz. In this embodiment, the camera 733 is configured to be slidable in the height direction D1 together with the arm 732 and is configured to capture an image of an imaging range R extending from the arm 732 in the movement direction D3. The camera 733 is configured to capture an image including an identification code (e.g., a barcode, a mark, etc.) written on the holder H of the measurement object Ob within the imaging range R. The identification code may include, for example, information about the sample S held in the holder H.

[0041] 3, the moving device 74 is configured to move the sample stage 72 to a measurement position where X-rays can be irradiated onto the measurement object Ob placed on the sample stage 72. For example, the moving device 74 is configured to slide the moving stage 71 at least in the moving direction D3. The moving device 74 may include a first moving unit 741 and a second moving unit 742.

[0042] The first moving unit 741 is configured to be able to move the sample stage 72 and the candidate setting unit 8 while maintaining the relative positional relationship between the sample stage 72, the candidate setting unit 8, and the replacement device 73. The first moving unit 741 is configured, for example, to move a stage on which the sample stage 72 and the candidate setting unit 8, included in the moving stage 71, are both installed in the movement direction D3. The second moving unit 742 is configured to move the replacement device 73 relative to the sample stage 72 and the candidate setting unit 8. This configuration reduces the amount of movement of the candidate setting unit 8 with a relatively simple movement mechanism and shortens the time required to move the candidate setting unit 8 to the measurement position. Specifically, the second moving unit 742 is configured to slide only the replacement device 73 out of the sample stage 72, the candidate setting unit 8, and the replacement device 73 in the movement direction D3. This allows the arm 732 of the replacement device 73 to support the measurement object Ob placed on the sample stage 72 or a candidate for the measurement object Ob placed on the candidate installation unit 8. More specifically, the moving device 74 (e.g., the first moving unit 741 and the second moving unit 742) is configured to linearly slide the sample stage 72 and the candidate installation unit 8 along a predetermined moving direction D3. The moving direction is configured to be approximately perpendicular to the axial direction Dz. This configuration makes it easier to grasp the correspondence between the candidate objects supported by each turret 82 and their positions on the candidate installation unit 8 from outside the shielded chamber, thereby preventing confusion between measurement object candidates. The moving direction D3 may be any direction within a plane normal to the axial direction Dz, but it may also be a direction different from the irradiation direction D2 (more specifically, a direction perpendicular to the irradiation direction D2). As shown in FIG. 1, an opening / closing unit 21 is arranged in the moving direction D3 of the candidate installation unit 8.

[0043] 2 and 3, the moving device 74 may further include a third moving unit 743. The third moving unit 743 is configured to move the sample stage 72 in a direction different from the moving directions of the first moving unit 741 and the second moving unit 742 so as to change the distance between the irradiation unit 5 and the sample stage 72 or the distance between the detection unit 6 and the sample stage 72. This configuration allows adjustment of parameters inherent in the optical system, such as the magnification during X-ray CT measurement. Specifically, the third moving unit 743 is configured to slide the entire moving stage 71 in the irradiation direction D2. This allows the third moving unit 743 to slide the sample stage 72, the replacement device 73, and the candidate installation unit 8 together in the irradiation direction D2. In this embodiment, the irradiation direction D2 corresponds to the direction in which the magnification axis of the X-ray CT measurement system 3 extends.

[0044] 3. Example of the configuration of the candidate installation unit 8 Next, we will explain an example of the configuration of the above-mentioned candidate installation unit 8. Fig. 5 is a plan view of an example of the candidate installation unit 8 shown in Fig. 3.

[0045] As shown in FIG. 5 , the support regions 83 are provided along the outer circumferential surface 823 of the turret 82. Each of the support regions 83 is disposed away from the rotation axis C of the shaft portion 81 in the radial direction Dr. The radial direction Dr is a direction perpendicular to the rotation axis C and is defined as extending from the rotation axis C of the shaft portion 81 toward the outer periphery of the shaft portion 81. Each of the support regions 83 is configured to hold one measurement object Ob. Furthermore, each of the support regions 83 is defined along the outer periphery of the turret 82 so as to be adjacent to each other in the circumferential direction Ds of the shaft portion 81. The circumferential direction Ds is defined so as to be perpendicular to the axial direction Dz and the radial direction Dr. The radial direction Dr, the circumferential direction Ds, and the axial direction Dz define a cylindrical coordinate system in which the rotation axis C passes through the origin. Each of the turrets 82 may have support regions 83 around the entire outer periphery of the shaft portion 81. With this configuration, it is possible to support a larger number of measurement target candidates while suppressing an increase in the size of the radiation measurement system 1 in directions different from the axial direction Dz. The support regions 83 may be arranged at equal intervals in the circumferential direction Ds along the outer periphery of the turret 82. With this configuration, it is possible to change the support region 83 located in front of the replacement device 73 by keeping the rotation angle of the shaft portion 81 constant.

[0046] Here, a specific example of the support area 83 will be described. Fig. 6 is an enlarged view of one of the support areas 83 shown in Fig. 5. Fig. 7 is a cross-sectional view taken along line AA in Fig. 6. As shown in Figs. 6 and 7, each of the support areas 83 includes a recess 831 and a mounting portion 832.

[0047] The recesses 831 are configured to be recessed from the outer peripheral surface 823 of each of the turrets 82 along a radial direction Dr from the rotation axis C of the shaft portion 81 toward the circumferential surface of the shaft portion 81. For example, the recesses 831 are configured to be continuous with the outer peripheral surface 823. The recesses 831 are configured to penetrate in the axial direction Dz. The shape of the recesses 831 is arbitrary, but for example, they are U-shaped when viewed from above in the axial direction Dz. For example, the recesses 831 include a first surface 831a, a second surface 831b, and a connecting surface 831c.

[0048] The first surface 831a and the second surface 831b are each defined to be continuous from the outer peripheral surface 823 in the circumferential direction Ds. The first surface 831a and the second surface 831b face each other in the circumferential direction Ds and are defined to include a linear region when viewed from above in the axial direction Dz—in other words, a planar region perpendicular to the circumferential direction Ds. That is, the recess 831 may include a planar region facing the circumferential direction Ds defined along the circumferential surface of the shaft portion 81 and continuing with the circumferential surface of the support region 83. With this configuration, by matching the planar region of the holder H with the planar region of the recess 831, the measurement target Ob can be installed in an appropriate orientation relative to the candidate installation portion 8. The connection surface 831c is defined to connect the first surface 831a and the second surface 831b along the circumferential direction Ds. The connection surface 831c may include a planar region perpendicular to the radial direction Dr.

[0049] The placement unit 832 is configured to support a candidate for the measurement object Ob (more specifically, a holder H of the measurement object Ob) in the axial direction Dz. With this configuration, when the candidate for the measurement object accommodated in the recess is moved from the indication region, the amount of movement of the candidate for the measurement object in the axial direction Dz can be reduced. This makes it possible to reduce the possibility that the candidate for the measurement object being moved will interfere with the second turret 82b when moving the candidate for the measurement object between the support region 83 and the sample stage 72, for example.

[0050] The mounting portion 832 is a region that comes into contact with the holder H of the measurement object Ob in the axial direction Dz. This allows the mounting portion 832 to support the holder H of the measurement object Ob in the axial direction Dz. In this embodiment, the mounting portion 832 is defined to connect the recess 831 and the first surface 821. The mounting portion 832 is connected to the first surface 821 so as to extend from the recess 831 in the circumferential direction Ds. Specifically, the mounting portion 832 includes a mounting surface 832a and a restricting surface 832b.

[0051] The mounting surface 832a is a surface perpendicular to the axial direction Dz and connected to the surfaces 831a to 831c of the recess 831. In this embodiment, the mounting surface 832a is defined so as to be recessed in the axial direction Dz from the first surface 821. For example, the mounting surface 832a forms the bottom surface of a circular recess having a depth direction in the axial direction Dz relative to the first surface 821.

[0052] The restriction surface 832b extends along the axial direction Dz so as to connect between the mounting surface 832a and the first surface 821. At least a portion of the restriction surface 832b can be defined to have a normal in a direction along the circumferential direction Ds. This allows the mounting portion 832 to restrict movement of the measurement target candidate due to centrifugal force in a direction away from the rotation axis C along the radial direction as the shaft portion 81 rotates. Restriction of this movement can be achieved, for example, by a wall surface facing the rotation axis C. Furthermore, at least a portion of the restriction surface 832b can be defined to face the rotation axis C of the shaft portion 81 along the radial direction Dr. An area of ​​the restriction surface 832b that faces the measurement target candidate Ob to be placed at least in the radial direction Dr corresponds to a first wall surface in this embodiment. At least a portion of the first wall surface can be defined by a normal having a component facing the rotation axis C along the radial direction Dr. The mounting portion 832 has a restricting surface 832b configured to restrict movement of the candidate for measurement object Ob in a circumferential direction defined along the peripheral surface of the shaft portion 81 as the shaft portion 81 rotates. The restriction of movement can be implemented, for example, by a wall surface facing the circumferential direction Ds. The restricting surface 832b configured in this manner is an example of a second flat surface. In other words, the mounting portion 832 can have a second wall surface facing at least the candidate for measurement object Ob to be placed in the circumferential direction Ds. The length d1 of the restricting surface 832b in the axial direction Dz (in other words, the depth of the mounting portion 832) is shorter than the length of the recess 831 in the axial direction Dz (in other words, the depth of the recess 831). Specifically, the length ratio d1 / d2 is, for example, 0.01, 0.02, 0.03, 0.04, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, or 0.5, and may be within a range between any two of the values ​​exemplified here. In particular, to simultaneously reduce the amount of movement in the height direction D1 when the measurement target Ob is lifted by the arm 732 and regulate the movement of the candidate measurement target Ob by the regulation surface 832b, the length ratio d1 / d2 is 0.01 to 0.5, specifically 0.05 to 0.3, and more specifically 0.1 to 0.2.

[0053] 4. Operation of the moving device 74 when installing the measurement object Ob in the candidate installation section 8 Next, the operation of the moving device 74 when placing the measurement object Ob in the candidate installation unit 8 will be described. FIG. 8 is a diagram showing an overview of the movement of each element of the sample changer 7 in accordance with the operation of the moving device 74. In FIG. 8, the shielding wall 2 and the X-ray CT measurement system 3 are shown as a plan view from the height direction D1. This operation is performed, for example, by controlling the sample changer 7 and the like by the processor 123. This operation is performed, for example, when X-rays are not irradiated from the irradiation unit 5 into the inside of the shielded room SP1. Here, the operation after the measurement of the measurement object Ob is completed will be described.

[0054] First, the processor 123 drives the third moving unit 743 to move the moving stage 71 to a specified position in the irradiation direction D2, for example, in front of the opening / closing unit 21 in the moving direction D3.

[0055] Next, the processor 123 controls the opening and closing unit 21 to communicate the inside and outside of the shielded room SP1.

[0056] Next, the processor 123 drives the first moving unit 741 to move the candidate installation unit 8 toward the open door / close unit 21 in the movement direction D3. In other words, the moving device 74 is configured to move the candidate installation unit 8 from the measurement position toward the open door / close unit 21 so that the candidate installation unit 8 can support the measurement target Ob on the candidate installation unit 8 from outside the shielded room SP1. With this configuration, for example, when a person installs a measurement target on the candidate installation unit 8, the area of ​​the human body included inside the shielded room is reduced, thereby reducing the effort required for installation. At this time, the processor 123 preferably drives the first moving unit 741 to move the candidate installation unit 8 in the movement direction D3 so that at least a portion of the candidate installation unit 8 (particularly, at least one of the support regions 83) is located outside the shielded room SP1. Furthermore, it is preferable that the shaft 81 be configured to be rotatable when installing the measurement target Ob. This makes it easier to install the measurement target Ob.

[0057] 5. Operation of X-ray CT measurement system 3 during measurement Next, the operation of the X-ray CT measurement system 3 during measurement will be described. FIG. 9 is an activity diagram showing the operation of the X-ray CT measurement system 3 during measurement. Note that the information processing may include any exception processing not shown in the activity diagram. Exception processing may include interruption of the information processing or omission of each process. Selection or input performed in the information processing may be based on a user operation or may be performed automatically without relying on a user operation.

[0058] First, in activity A1, the processor 123 receives a measurement sequence and a measurement start command from the user. The measurement sequence may include information about the X-ray irradiation time, the CT magnification rate, and the position of the support region 83 where the candidate for the measurement object Ob is placed (for example, a position corresponding to an identification number that can identify the support region 83).

[0059] Next, in activity A2, the processor 123 moves the arm 732 along the movement axis 731 to the position of the turret 82 where a candidate for the measurement object Ob to be moved next is supported.

[0060] Next, in activity A3, the processor 123 captures an image of a candidate for the measurement target Ob to be installed next, using the camera 733. As a result, the processor 123 acquires a captured image of the measurement target Ob or the support region 83 corresponding to the measurement target Ob.

[0061] Next, in activity A4, the processor 123 corrects the position of the arm 732 based on the captured image. This allows the arm 732 to hold a candidate for the measurement object Ob more accurately in accordance with the shape of the holder H and the storage state of the measurement object Ob. For example, the processor 123 identifies the position of a portion of the holder H that is held by the arm 732 based on an identification code (such as a barcode or a specific shape) assigned to the holder H, and corrects the position of the arm 732 based on the identification result. Note that the processor 123 may identify the position by performing predetermined image identification on the captured image, and correct the position of the arm 732 based on the identification result. That is, the processor 123 identifies the position of a candidate for the measurement object Ob that is supported by one of the first turret 82a and the second turret 82b included in the captured image, based on the captured image. In addition, if the processor 123 determines that the measurement object Ob is not included in the captured image, it may omit measuring the X-rays for the measurement object Ob, rotate the axis portion 81, and perform processing of activity A2 for the next measurement object Ob.

[0062] Next, in activity A5, the processor 123 uses the second moving unit 742 to move the arm 732 closer to the candidate installation unit 8, support the candidate for measurement target Ob to be installed next, and lift it from the support area 83. In other words, the processor 123 controls the driving unit to move the arm 732 to the position of the identified candidate for measurement target Ob. With this configuration, the candidate for measurement target Ob supported by each turret 82 can be moved to the sample stage 72, and the measurement target to be installed on the sample stage 72 can be moved to each turret 82 appropriately according to the position of the turret 82 in the axial direction Dz.

[0063] Next, in activity A6, the processor 123 performs movement processing of the measurement object Ob, and places the candidate for the measurement object Ob lifted by the arm 732 on the sample stage 72, while moving the moving stage 71, sample stage 72, and arm 732 to positions corresponding to the measurement sequence. Here, a specific example of the processing of activity A6 will be described.

[0064] First, in activity A61, the processor 123 moves the sample stage 72 to the measurement position using the first moving unit 741. The measurement position is a position on the optical path where the X-rays irradiated from the irradiation unit 5 reach the detection unit 6, and is a position where the X-rays can be irradiated onto the sample S of the measurement object Ob.

[0065] In parallel with activity A61, in activity A62, the processor 123 moves the arm 732 to above the sample stage 72 using the second movement unit 742.

[0066] Thereafter, in activity A63, the processor 123 moves the arm 732 to the position of the sample stage 72 and places a candidate for the measurement object Ob on the sample stage 72. In this way, by moving the sample stage 72 to the measurement position using the first moving unit 741, and placing the measurement object Ob on the sample stage 72 using the second moving unit 742 and the replacement device 73, it is possible to shorten the time required for measurement preparation.

[0067] Furthermore, in parallel with activities A61 to A63, in activity A64, processor 123 may move moving stage 71 to a position corresponding to the magnification ratio using third moving unit 743. This further reduces the time required for measurement preparation.

[0068] When the preparation for measurement is completed by the processing of activity A6, in activity A7, the processor 123 moves the arm 732 out of the optical path of the X-rays.

[0069] Thereafter, in activity A8, the processor 123 irradiates the measurement object Ob with X-rays using the irradiation unit 5. The irradiated X-rays pass through the measurement object Ob and are detected by the detection unit 6.

[0070] After the irradiation time has elapsed, in activity A9, the processor 123 performs the reverse operation of the operation of moving the candidate measurement object Ob performed from activity A2 onwards, and moves the measurement object Ob placed on the sample stage 72 back to the original support area 83.

[0071] Thereafter, the processor 123 determines whether or not there is a candidate for the next measurement target Ob based on the acquired measurement sequence. If there is a candidate for the next measurement target Ob, in activity A10, the processor 123 rotates the shaft 81 and positions the candidate for the next measurement target Ob in front of the arm 732. Thereafter, based on the updated candidate for the next measurement target Ob, the processes from activity A2 onwards are repeatedly executed.

[0072] On the other hand, if it is determined that there is no candidate for the next measurement object Ob, the processor 123 determines that the measurement sequence is complete, and ends this process.

[0073] [others] The above-described embodiments can be modified as appropriate as follows.

[0074] The specific form of the support region 83 is not limited to a recess, and may be a through-hole penetrating in the axial direction Dz defined on the first surface 821, or a recess having a depth in the axial direction Dz defined on the first surface 821. In short, any form may be used as long as it can support the measurement object Ob (more specifically, the holder H) from the axial direction Dz.

[0075] The shape of the turret 82 is arbitrary and is not limited to a flat plate shape. For example, the shape of the turret 82 may be a curved surface. Furthermore, the shape of the turret 82 is not limited to a plate shape, and the turret 82 may be configured so that the thickness varies depending on the position.

[0076] It may be provided in the following manner.

[0077] (1) A radiation measurement system comprising an irradiation unit, a target installation unit, a detection unit, and a candidate installation unit, wherein the irradiation unit is configured to irradiate a measurement target with radiation, the target installation unit is configured to be able to install the measurement target within an irradiation range of the radiation, the detection unit is configured to detect radiation that has passed through the measurement target, the candidate installation unit is configured to be able to install a candidate for the measurement target, and comprises a shaft unit, a first support unit, and a second support unit, wherein the shaft unit extends along an axial direction and is configured to be rotatable around a rotation axis along the axial direction. the first support unit is configured to be rotatable in response to rotation of the shaft unit and includes a plurality of first support regions, each of which supports the candidate to be measured and which are arranged along the outer periphery of the first support unit; the second support unit is configured to be rotatable in response to rotation of the shaft unit and includes a plurality of second support regions, each of which supports the candidate to be measured and which are arranged along the outer periphery of the shaft unit; and the first support unit and the second support unit are arranged at positions spaced apart in the axial direction.

[0078] (2) In the radiation measurement system described in (1) above, each of the first support area and the second support area includes a mounting portion that supports the candidate measurement target from the axial direction, and a recess that continues from the mounting portion, and the recess is configured to be recessed from the outer peripheral surface of each of the first support area and the second support area along a radial direction from the rotation axis of the shaft portion toward the circumferential surface of the shaft portion.

[0079] (3) In the radiation measurement system described in (2) above, the placement section is configured to restrict movement of the measurement target candidate due to centrifugal force in a direction away from the rotation axis along the radial direction as the shaft section rotates.

[0080] (4) In the radiation measurement system described in (2) or (3) above, the placement section has a first wall surface that faces the candidate measurement target to be placed at least in the radial direction, and at least a portion of the first wall surface is defined by a normal having a component toward the rotation axis along the radial direction.

[0081] (5) In the radiation measurement system described in (3) or (4) above, the placement section is configured to restrict movement of the candidate measurement object in a circumferential direction defined along the circumferential surface of the shaft section as the shaft section rotates.

[0082] (6) In the radiation measurement system described in any one of (3) to (5) above, the placement section has a second wall surface that faces the candidate measurement object to be placed at least in a circumferential direction defined along the circumferential surface of the shaft section.

[0083] (7) In the radiation measurement system described in (5) or (6) above, the recesses face each other in a circumferential direction defined along the circumferential surface of the shaft portion and include a flat area that is continuous with the circumferential surface of the first support area or the second support area.

[0084] (8) In the radiation measurement system according to any one of (1) to (7) above, the first support portion has the first support region around the entire outer periphery of the shaft portion.

[0085] (9) The radiation measurement system according to any one of (1) to (8) above, further comprising a replacement device, an imaging device, and at least one processor, wherein the replacement device is configured to move the candidate measurement target between the target installation unit and the candidate installation unit, and comprises a target support unit and a drive unit, wherein the target support unit is configured to be able to support the candidate measurement target, and the drive unit is configured to be able to move the target support unit at least along the axial direction, and the imaging device is configured to capture an image including the measurement target supported by at least a part of the first support unit and the second support unit, and the processor is configured to execute a program to perform the following steps: in the acquisition step, the captured image is acquired; in the identification step, the position of the candidate measurement target on one of the first support unit and the second support unit included in the captured image is identified based on the captured image; and in the drive step, the target support unit is moved to the position by controlling the drive unit.

[0086] (10) The information processing system according to any one of (1) to (9) above, further comprising a replacement device and a moving device, wherein the replacement device is configured to move the candidate measurement target between the target installation unit and the candidate installation unit, and the moving device is configured to move the target installation unit to a measurement position where the radiation can be irradiated to the measurement target installed on the target installation unit, and the system comprises a first moving unit and a second moving unit, wherein the first moving unit is configured to be able to move the target installation unit and the candidate installation unit while maintaining the relative positional relationship between the target installation unit, the candidate installation unit, and the replacement device, and the second moving unit is configured to move the replacement device relative to the target installation unit and the candidate installation unit.

[0087] (11) In the radiation measurement system described in (10) above, the moving device is configured to linearly slide the target installation portion and the candidate installation portion along a predetermined movement direction, and the movement direction is configured to be approximately perpendicular to the axial direction.

[0088] (12) In the radiation measurement system described in (10) or (11) above, the moving device further includes a third moving unit, and the third moving unit is configured to move the target installation unit in a direction different from the moving direction of the first moving unit and the second moving unit so as to change the distance between the irradiation unit and the target installation unit or the distance between the detection unit and the target installation unit.

[0089] (13) The radiation measurement system according to any one of (10) to (12) above, further comprising a shielding wall configured to define a shielded room capable of shielding the radiation, and an opening / closing section that allows communication between the inside and outside of the shielded room, and the moving device configured to be able to move the candidate installation unit from the measurement position so that the candidate installation unit can support the measurement target candidate on the candidate installation unit from outside the shielded room.

[0090] (14) A radiation measurement system comprising an irradiation unit, a target installation unit, a detection unit, and a candidate installation unit, wherein the irradiation unit is configured to irradiate radiation to a measurement target, the target installation unit is configured to be able to install the measurement target within an irradiation range of the radiation, the detection unit is configured to detect radiation that has passed through the measurement target, and the candidate installation unit is configured to be able to install multiple candidates for the measurement target, and is placed relative to the target installation unit without a shielding member capable of blocking the radiation. Of course, this is not the case.

[0091] Finally, while various embodiments of the present disclosure have been described, they are presented as examples and are not intended to limit the scope of the invention. The novel embodiments may be embodied in various other forms, and various omissions, substitutions, and modifications may be made without departing from the spirit of the invention. Such embodiments and modifications are intended to be included within the scope and spirit of the invention, as well as within the scope of the inventions and their equivalents as defined in the claims. [Explanation of symbols]

[0092] 1: Radiation measurement system 2: Shielding wall 3:X-ray CT measurement system 4: Base 5: Irradiation unit 6: Detection unit 7: Sample changer 8: Candidate installation section 11: Radiation measuring device 12: User terminal 21: Opening and closing section 41: Legs 42: Caster 43:Fixed wall 44:Fixed wall 71: Moving stage 72: Sample stage 73: Replacement device 74: Mobile device 81: Shaft 82: Turret 82a: First Turret 82b: Second Turret 82c: Third Turret 83 :Support area 83a: First support region 83b: Second support area 83c: Third support area 120: Communication bus 121: Communications Department 122: Storage section 123: Processor 124:Display section 125: Input section 722: Attachment 731: Moving axis 732: Arm 733: Camera 741: First moving part 742: Second moving part 743: Third Mobile Unit 821: 1st page 822: 2nd side 823: Outer surface 831: Recess 831a: 1st page 831b: 2nd side 831c: Connection surface 832: Placement section 832a: Placement surface 832b: Regulatory aspects C: Rotation axis D1: Height direction D2: Irradiation direction D3: Movement direction Dr: Radial direction Ds: Circumferential direction Dz: Axial direction H: Holder Ob: Measurement object R: Image capture range S: Sample SP1: Shield room

Claims

1. A radiation measurement system, comprising: The apparatus includes an irradiation unit, a target installation unit, a detection unit, and a candidate installation unit, the irradiation unit is configured to irradiate a measurement object with radiation, the target installation unit is configured to be able to install the measurement target within an irradiation range of the radiation, the detection unit is configured to detect radiation that has passed through the measurement object, the candidate installation unit is configured to be able to install the measurement target candidate, and includes a shaft unit, a first support unit, and a second support unit; the shaft portion extends along an axial direction and is configured to be rotatable around a rotation axis along the axial direction, the first support portion is configured to be rotatable in response to rotation of the shaft portion and includes a plurality of first support regions; Each of the first support regions supports the measurement target candidate and is arranged along an outer periphery of the first support portion; the second support portion is configured to be rotatable in response to rotation of the shaft portion and includes a plurality of second support regions; each of the second support regions supports the measurement target candidate and is arranged along the outer periphery of the shaft portion; The first support and the second support are disposed at spaced positions in the axial direction.

2. 2. The radiation measurement system according to claim 1, each of the first support region and the second support region includes a mounting portion that supports the measurement target candidate from the axial direction and a recess that is continuous with the mounting portion; The recess is configured to be recessed from the outer peripheral surface of each of the first support portion and the second support portion along a radial direction from the rotation axis of the shaft portion toward the outer peripheral surface of the shaft portion.

3. 3. The radiation measurement system according to claim 2, The system is configured such that the mounting portion restricts movement of the measurement target candidate due to centrifugal force along the radial direction away from the rotation axis as the shaft portion rotates.

4. 3. The radiation measurement system according to claim 2, The system, wherein the mounting portion has a first wall surface that faces at least the radial direction of the candidate measurement target to be placed, and at least a portion of the first wall surface is defined by a normal having a component toward the rotation axis along the radial direction.

5. 4. The radiation measurement system according to claim 3, The system is configured such that the mounting portion is configured to restrict movement of the candidate measurement target in a circumferential direction defined along the circumferential surface of the shaft portion as the shaft portion rotates.

6. 4. The radiation measurement system according to claim 3, The system, wherein the mounting portion has at least a second wall surface that faces the candidate measurement target to be placed in a circumferential direction defined along the circumferential surface of the shaft portion.

7. 6. The radiation measurement system according to claim 5, The recesses face each other in a circumferential direction defined along the circumferential surface of the shaft portion and include flat areas that are continuous with the circumferential surface of the first support area or the second support area.

8. 2. The radiation measurement system according to claim 1, The first support portion comprises the first support region around the entire circumference of the shaft portion.

9. 2. The radiation measurement system according to claim 1, further comprising a conversion device, an imaging device, and at least one processor; The replacement device is configured to move the measurement target candidate between the target installation unit and the candidate installation unit, and includes a target support unit and a drive unit; the object support unit is configured to be able to support the measurement object candidate, the drive unit is configured to be able to move the object support unit at least along the axial direction, the imaging device is configured to capture an image including the measurement target supported by at least a part of the first support part and the second support part, The processor is configured to execute a program that performs the following steps: In the acquisition step, the captured image is acquired, In the identifying step, a position of the measurement target candidate on one of the first support part and the second support part included in the captured image is identified based on the captured image; In the driving step, the system controls the driving unit to move the object support unit to the position.

10. 2. The information processing system according to claim 1, Further, a replacement device and a movement device are provided, the replacement device is configured to move the measurement target candidate between the target installation unit and the candidate installation unit; the moving device is configured to move the target installation unit to a measurement position where the measurement target installed on the target installation unit can be irradiated with the radiation, and includes a first moving unit and a second moving unit; the first moving unit is configured to be able to move the target installation unit and the candidate installation unit while maintaining a relative positional relationship between the target installation unit, the candidate installation unit, and the replacement device; The second moving unit is configured to move the conversion device relatively to the target installation unit and the candidate installation unit.

11. The radiation measurement system according to claim 10, The system, wherein the moving device is configured to linearly slide the target installation portion and the candidate installation portion along a predetermined movement direction, the movement direction being configured to be approximately perpendicular to the axial direction.

12. The radiation measurement system according to claim 10, the moving device further includes a third moving unit; The third moving unit is configured to move the target installation unit in a direction different from the movement direction of the first moving unit and the second moving unit so as to change the distance between the irradiation unit and the target installation unit or the distance between the detection unit and the target installation unit.

13. The radiation measurement system according to claim 10, Furthermore, a shielding wall is provided, the shielding wall is configured to define a shielded chamber capable of shielding the radiation, and includes an opening / closing part that allows communication between the inside and the outside of the shielded chamber; The moving device is The system is configured to be able to move the candidate installation unit from the measurement position toward the opening and closing unit so that the candidate for the measurement target can be supported on the candidate installation unit from outside the shielded room.

14. A radiation measurement system, comprising: The apparatus includes an irradiation unit, a target installation unit, a detection unit, and a candidate installation unit, the irradiation unit is configured to irradiate a measurement object with radiation, the target installation unit is configured to be able to install the measurement target within an irradiation range of the radiation, the detection unit is configured to detect radiation that has passed through the measurement object, The candidate installation unit is configured to be able to install multiple candidates for the measurement target, and is placed relative to the target installation unit without a shielding member capable of blocking the radiation.

Images