Small chamber array and method for manufacturing small chamber array

Abstract

To provide a small chamber array capable of favorably retaining a hydrophilic solvent in housing units.SOLUTION: The small chamber array includes: a first substrate; a second substrate facing the first substrate; a flow path provided between the first substrate and the second substrate, through which a solvent containing a sample flows; a chamber main part provided on a surface of the first substrate facing the second substrate; and a plurality of housing units provided in the chamber main part, the first substrate having recesses recessed in the thickness direction of the first substrate from a surface of the first substrate at positions overlapping the respective housing sections.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a microchamber array and a method for manufacturing the microchamber array. [Background technology]

[0002] Patent documents 1 and 2 disclose a high-density microchamber array (referred to as a "microchamber array" in Patent document 2) having a flow path through which a solvent containing a biological sample flows and a plurality of microchambers (referred to as a "receptacle section" in Patent document 2) that open into the flow path. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-40754 [Patent Document 2] International Publication No. 2014 / 034781 Summary of the Invention [Problem to be solved by the invention]

[0004] The flow channels and microchambers of the high-density microchamber arrays of Patent Documents 1 and 2 are formed from materials with opposing properties, i.e., hydrophobic and hydrophilic materials. However, when forming the microchambers (referred to as "reservoir" in Patent Document 2), additives and resin components contained in the substance film (referred to as "chamber body" in Patent Document 2) may adhere to the bottom surface of the microchambers (referred to as "reservoir" in Patent Document 2), which may prevent the hydrophilic solvent from being properly retained within the reservoir.

[0005] An object of the present disclosure is to provide a micro-chamber array that can well retain a hydrophilic solvent in a storage portion, and a method for manufacturing the micro-chamber array. [Means for solving the problem]

[0006] A microchamber array according to one embodiment of the present disclosure comprises a first substrate, a second substrate opposite the first substrate, a flow path provided between the first substrate and the second substrate through which a solvent containing a sample flows, a chamber main body provided on the surface of the first substrate facing the second substrate, and a plurality of storage sections provided in the chamber main body, and the first substrate has recesses recessed from the surface of the first substrate in the thickness direction of the first substrate at positions overlapping each of the storage sections.

[0007] A method for manufacturing a microchamber array according to one embodiment of the present disclosure includes the steps of forming a chamber main body on a first substrate, forming a plurality of storage sections in the chamber main body, and, after the step of forming the storage sections, glass etching the bottom surface of each of the storage sections with a cleaning solution.

[0008] A method for manufacturing a microchamber array according to another aspect of the present disclosure includes the steps of forming a light-blocking resin layer on a first substrate, forming a plurality of first openings in the light-blocking resin layer, laminating a water-repellent resin layer on the light-blocking resin layer, forming second openings in the water-repellent resin layer at positions overlapping the plurality of first openings, and, after the steps of forming the first openings and the second openings, glass-etching the bottom surface of each of the first openings with a cleaning solution. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view schematically showing a micro-chamber array according to the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II' of FIG. [Figure 3] FIG. 3 is an explanatory diagram for explaining a state in which a solvent flows through a channel in the micro-chamber array according to the first embodiment. [Figure 4] FIG. 4 is a plan view schematically showing an example of the configuration of a plurality of containers in the micro-chamber array according to the first embodiment. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV' in FIG. [Figure 6] FIG. 6 is a cross-sectional view schematically showing a chamber main body according to a first modification of the first embodiment. [Figure 7] FIG. 7 is a cross-sectional view schematically showing a chamber main body according to Comparative Example 1. As shown in FIG. [Figure 8] FIG. 8 is an explanatory diagram for explaining the method for producing the micro-chamber array according to the first embodiment. [Figure 9] FIG. 9 is an explanatory diagram for explaining a method for manufacturing a micro-chamber array according to Modification 1 of Embodiment 1. In FIG. [Figure 10] FIG. 10 is a graph showing the time series change in the contact angle on the bottom surface of the container before and after glass etching in the method for producing a micro-chamber array according to Modification 1 of Embodiment 1. DETAILED DESCRIPTION OF THE INVENTION

[0010] Modes (embodiments) for carrying out the present disclosure will be described in detail with reference to the drawings. The present disclosure is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially identical. Furthermore, the components described below can be combined as appropriate. Note that the disclosure is merely an example, and any appropriate modifications that a person skilled in the art can easily conceive while maintaining the gist of the present disclosure are naturally included within the scope of the present disclosure. Furthermore, for clarity of explanation, the drawings may schematically depict the width, thickness, shape, etc. of each part compared to the actual embodiment. However, these are merely examples and are not intended to limit the interpretation of the present disclosure. Furthermore, in this disclosure and each figure, elements similar to those described above with reference to the previous figures may be designated by the same reference numerals, and detailed descriptions may be omitted as appropriate.

[0011] In this specification and claims, when expressing an aspect of placing another structure on top of a certain structure, the term "on top" is used, unless otherwise specified, to include both a case in which another structure is placed directly on top of a certain structure so as to be in contact with the certain structure, and a case in which another structure is placed above a certain structure via yet another structure.

[0012] (Embodiment 1) Fig. 1 is a plan view schematically showing a micro-chamber array according to embodiment 1. Fig. 2 is a cross-sectional view taken along line II-II' in Fig. 1. In Fig. 1, for ease of viewing, a second substrate 12, an injection jig 51, and an ejection jig 53 are indicated by dashed two-dot lines.

[0013] 1 and 2, the micro-chamber array 10 has a first substrate 11, a second substrate 12, a chamber main body 21, a plurality of storage sections 22, a spacer 24, and a seal section 25. Although the plurality of storage sections 22 are not shown in FIGS. 1 to 3, the detailed configuration of the plurality of storage sections 22 will be described later with reference to FIG.

[0014] The first substrate 11 is a flat plate-like member, such as a glass substrate. The second substrate 12 is disposed opposite the first substrate 11 with a gap therebetween. The second substrate 12 is a flat plate-like member, such as a glass substrate. The first substrate 11 and the second substrate 12 may be formed of other materials, such as silicon or resin. In order to observe the samples accommodated in the multiple accommodation sections 22, at least one of the first substrate 11 and the second substrate 12 is made of a light-transmitting material.

[0015] As shown in FIG. 2, the chamber main body 21 is provided on the surface of the first substrate 11, that is, on the surface of the first substrate 11 facing the second substrate 12.

[0016] The chamber main body 21 is a hydrophobic film made of a water-repellent resin. The chamber main body 21 is formed by a polymer film processed on its surface, such as a resin containing a fluorine-based or silicone-based component that controls surface energy, an acrylic resin, an epoxy resin, a polyimide, a polymer having a fluoroalkyl group on its side chain (such as a polymer of fluoroalkylethyl methacrylate or a copolymer with methacrylate), or a polysiloxane (a polymer having a hydrophobic methyl group or a highly hydrophobic fluoroalkyl group on the side chain of siloxane). More specifically, the chamber main body 21 has poor wettability with aqueous solutions and is highly water-repellent. Furthermore, the chamber main body 21 has good affinity with oil.

[0017] The chamber main body 21 has a storage section forming area AA and a peripheral area GA. The storage section forming area AA is an area in which a plurality of storage sections 22 are formed. In the example shown in Fig. 1, the plurality of storage section forming areas AA are arranged in a matrix in the chamber main body 21. The peripheral area GA is an area in which the plurality of storage sections 22 are not formed, and is provided between the plurality of storage section forming areas AA and closer to the outer edge of the chamber main body 21 than the plurality of storage section forming areas AA.

[0018] In the following description, the first direction Dx is a direction in a plane parallel to the surface of the first substrate 11. The second direction Dy is a direction in a plane parallel to the surface of the first substrate 11, and is a direction perpendicular to the first direction Dx. The second direction Dy may intersect with the first direction Dx without being perpendicular thereto. The third direction Dz is a direction perpendicular to the first direction Dx and the second direction Dy. The third direction Dz is a normal direction to the surface of the first substrate 11. Furthermore, "planar view" refers to the positional relationship when viewed from a direction perpendicular to the surface of the first substrate 11.

[0019] As shown in FIG. 2, the plurality of storage units 22 are formed in the chamber main body 21 and are spaces for storing a solvent 31 (see FIG. 3) containing a sample to be detected. These are also called minute chambers or microchambers. The plurality of storage units 22 are provided so as to penetrate the chamber main body 21 in the thickness direction. The inner walls of the plurality of storage units 22 are made of the material of the chamber main body 21. The bottom surface 110 of each storage unit 22 is made of the surface of the first substrate 11, for example, glass. Glass is more hydrophilic than the chamber main body 21. That is, the bottom surface 110 of the plurality of storage units 22 is more hydrophilic than the surface of the chamber main body 21. In addition, a recess 120 is provided on the bottom surface 110 of each storage unit 22. The recess 120 also stores the solvent 31, similar to the storage units 22. The detailed configuration of the recess 120 will be described later with reference to FIG. 5.

[0020] As shown in Fig. 1, the spacers 24 are wall-like members provided in the peripheral region GA of the chamber main body 21, and are arranged side by side in the first direction Dx, each extending in the second direction Dy. A plurality of accommodation portion forming regions AA are arranged side by side in the second direction Dy between the spacers 24 adjacent to each other in the first direction Dx. The upper ends of the spacers 24 are in contact with the second substrate 12 (see Fig. 5). This defines the distance between the chamber main body 21 and the second substrate 12 in the third direction Dz.

[0021] With this configuration, a flow path 55 is formed between the first substrate 11 and the second substrate 12 and between the plurality of spacers 24 in a plan view, through which the solvents 31, 34 (see FIG. 3) flow from the inlet 52 toward the outlet 54. In the example shown in FIG. 1, three flow paths 55 separated by the plurality of spacers 24 are provided, and each of the three flow paths 55 extends along the second direction Dy. The inlet 52 through which the solvent 31 is injected is provided on one side of the flow path 55 in the second direction Dy, and the outlet 54 through which the solvent 31 is discharged is provided on the other side of the flow path 55 in the second direction Dy.

[0022] The sealing portion 25 is a member that bonds the first substrate 11 and the second substrate 12 together, and is provided on the first substrate 11 closer to the outer edge than the chamber main body 21. The sealing portion 25 is provided along a side of the first substrate 11 that extends in the second direction Dy. The sealing portion 25 has a first opening 25a on a side corresponding to the injection port 52, and a second opening 25b on the side opposite the first opening 25a and corresponding to the outlet 54.

[0023] As shown in FIG. 2 , the injection jig 51 is provided to cover one end of the first substrate 11 and the second substrate 12 in the second direction Dy. The ejection jig 53 is provided on the opposite side of the injection jig 51 to cover the other end of the first substrate 11 and the second substrate 12 in the second direction Dy. The injection jig 51 and the ejection jig 53 each have first portions 51a and 53a, second portions 51b and 53b, and third portions 51c and 53c. The first portions 51a and 53a extend in the third direction Dz and are provided to cover the gap between the first substrate 11 and the second substrate 12. The second portions 51b and 53b are provided to overlap part of the back surface of the first substrate 11. The third portions 51c and 53c are provided to overlap part of the front surface of the second substrate 12.

[0024] An injection port 52 penetrating in the third direction Dz is provided in the third portion 51c of the injection jig 51. An outlet 54 penetrating in the third direction Dz is provided in the third portion 51c of the discharge jig 53. The length of the second substrate 12 in the second direction Dy is shorter than the length of the first substrate 11 in the second direction Dy. The injection port 52 of the injection jig 51 and the outlet 54 of the discharge jig 53 are each provided in an area that does not overlap with the second substrate 12. With this configuration, the injection port 52, the flow path 55, and the outlet 54 are provided in communication with each other.

[0025] 3A to 3C are explanatory views for explaining a state in which a solvent flows through a flow path in the micro-chamber array according to embodiment 1. Each view in Fig. 3 is an enlarged cross-sectional view showing a part of the micro-chamber array 10 on the injection port 52 side.

[0026] As shown in FIG. 3, a solvent supply unit 30 (nozzle) is inserted into an inlet 52, and a solvent 31 is injected from the inlet 52 into a flow path 55 (step ST11). The solvent 31 is a hydrophilic solvent containing a sample to be detected (not shown) and a reagent 32. Examples of the hydrophilic solvent include water, hydrophilic alcohols (specifically, those with a small hydrocarbon content, such as methanol, ethanol, and IPA), hydrophilic ethers, ketones, nitrile-based solvents, dimethyl sulfoxide, N,N-dimethylformamide ionic solutions, and N,N-dimethylformamide electrolyte solutions. The sample to be detected is, for example, a biomolecule or a virus. The reagent 32 is a material that reacts with the sample.

[0027] Thereafter, the solvent supply unit 30 is removed and left for a certain period of time (step ST12). The reagent 32 settles in the solvent 31 and is placed on the chamber main body 21. In addition, a part of the reagent 32 is stored in the storage unit 22 together with the solvent 31 containing the sample to be detected.

[0028] Next, a solvent supply unit 33 (nozzle) is inserted into the inlet 52, and the solvent 34 is injected from the inlet 52 into the flow path 55 (step ST13). The solvent 34 is a hydrophobic solvent, and examples of the solvent 34 that can be used include linear saturated hydrocarbons such as n-hexadecane, cyclic saturated hydrocarbons such as cyclohexane, unsaturated hydrocarbons, aromatic hydrocarbons, silicone oil, perfluorocarbons, and halogenated solvents. The solvent 34 is injected so as to push the solvent 31 and reagent 32 injected in steps ST11 and ST12 toward the outlet 54. As a result, the reagent 32 is contained in each container 22.

[0029] Thereafter, the solvent 34 is filled into the flow path 55, covering each storage section 22, and the solvent supply section 33 is removed (step ST14). Each storage section 22 stores a solvent 31 containing a sample to be detected and a reagent 32. The solvent 31, which contains the sample to be detected and the reagent 32 stored in the storage section 22, is covered with the solvent 34.

[0030] As described above, at least the bottom surfaces 110 of the multiple storage units 22 are hydrophilic, and the chamber main body 21 is hydrophobic. That is, the bottom surfaces 110 of the multiple storage units 22 are highly hydrophilic and have a high affinity for the solvent 31 containing the sample to be detected and the reagent 32, so the solvent 31 containing the reagent 32 is placed in contact with the bottom surfaces 110. On the other hand, the surface of the chamber main body 21 is highly lipophilic and has a high affinity for the solvent 34 covering the multiple storage units 22, so it is placed in contact with the solvent 34. As a result, in step ST14, the sample to be detected and the solvent 31 containing the reagent 32 are efficiently placed in each storage unit 22. The micro-chamber array 10 can detect the presence or absence of a sample in each storage unit 22 by observing fluorescence from the sample sealed in each storage unit 22 from the back side of the first substrate 11.

[0031] In this embodiment, the solvent 31 is filled into the space between the first substrate 11 and the second substrate 12, but the method for sealing the solvent 31 in the micro-chamber array 10 is not limited to this. For example, the solvent 31 (aqueous solution specimen) containing the reagent 32 may be dropped onto the first substrate 11, and the solvent 31 may be sealed with a solvent 34 (oil).

[0032] Next, the detailed configuration of the plurality of storage sections 22 provided in the storage section formation area AA will be described. Fig. 4 is a plan view schematically showing an example of the configuration of the plurality of storage sections of the micro-chamber array according to embodiment 1. Fig. 5 is a cross-sectional view taken along the line VV' in Fig. 4.

[0033] 4, the plurality of storage sections 22 are each circular in a plan view and are arranged in a triangular lattice pattern in the storage section formation area AA. That is, the plurality of storage sections 22 arranged in the nth row in the second direction Dy are arranged so that their positions are offset from those of the plurality of storage sections 22 arranged in the n+1th row in the second direction Dy.

[0034] 4 is merely an example and can be changed as appropriate. The arrangement of the plurality of storage sections 22 is not limited to a triangular shape, and may be either a rectangular shape or a rhombic shape.

[0035] 5, a recess 120 recessed from the surface of the first substrate 11 in the thickness direction of the first substrate 11 is provided on the bottom surface 110 of each accommodation section 22. The accommodation section 22 has a side surface 210 and is tapered forward. The recess 120 is, for example, arc-shaped.

[0036] Opening surface 230 of recess 120 is provided at a position overlapping opening surface 213 of housing section 22 at surface 23 where chamber main body 21 and the surface of first substrate 11 come into contact.

[0037] This makes it easier to retain the specimen sample in the storage section 22.

[0038] Furthermore, opening surface 230 of recess 120 has a structure that is wider than the opening diameter of opening surface 213 of storage section 22 at surface 23 where chamber main body 21 and first substrate 11 come into contact. This increases the surface tension of first substrate 11, making it easier to retain the specimen sample within storage section 22.

[0039] Furthermore, injection jig 51 and discharge jig 53 may be provided integrally with first substrate 11 and second substrate 12 by a fixing member (not shown). Alternatively, injection jig 51 and discharge jig 53 may be provided so as to be detachable from first substrate 11 and second substrate 12, as necessary.

[0040] (Modification 1 of Embodiment 1) Fig. 6 is a cross-sectional view schematically showing a micro-chamber array according to Modification 1 of Embodiment 1. As shown in Fig. 6, in the micro-chamber array 10A according to Modification 1 of Embodiment 1, in the following description, the same components as those described in the above-mentioned embodiment are denoted by the same reference numerals, and duplicated description will be omitted.

[0041] 6, in a micro-chamber array 10A according to Modification 1 of Embodiment 1, the chamber main body 21 has a light-shielding resin layer 21A and a water-repellent resin layer 21B, which are laminated in this order on the first substrate 11. The water-repellent resin layer 21B is formed of a black resin material. Note that the water-repellent resin layer 21B may be made of a resin that does not emit spontaneous light.

[0042] The plurality of storage sections 22 have first openings 21a provided in the light-shielding resin layer 21A and second openings 21b provided in the water-repellent resin layer 21B. The first openings 21a are provided so as to penetrate through the light-shielding resin layer 21A in the thickness direction, and the second openings 21b are provided so as to penetrate through the water-repellent resin layer 21B in the thickness direction.

[0043] Furthermore, a recess 120 is provided on the bottom surface 110 of each first opening 21a.

[0044] As shown in FIG. 6, the micro-chamber array 10A has a light source 60 that emits excitation light L1, and a detection circuit 50.

[0045] The detection circuit 50 is a charge coupled device and an imaging circuit, and is capable of detecting the intensity of the fluorescent light and the distribution of the fluorescent light emission intensity.

[0046] The light source 60 irradiates the upper surface of the chamber main body 21 with excitation light L1. The detection circuit 50 detects fluorescence L2 emitted by the sample in the storage unit 22 in response to the excitation light L1. At this time, the water-repellent resin layer 21B emits autofluorescence L3 in response to the excitation light L1. The light-blocking resin layer 21A can reduce the autofluorescence L3 emitted by the water-repellent resin layer 21B. As a result, the autofluorescence L3 emitted by the water-repellent resin layer 21B becomes less likely to be detected by the detection circuit 50. This improves the detection accuracy of the detection circuit 50 in detecting fluorescence L2 emitted by the sample in the storage unit 22 in response to the excitation light L1.

[0047] 6, the first opening 21a and the second opening 21b have side surfaces 210 and 214, respectively, and the side surface 210 of the first opening 21a and the side surface 214 of the second opening 21b have a forward tapered shape. The inner diameter of the second opening 21b is larger than the inner diameter of the first opening 21a. The inner diameter of the first opening 21a is the diameter of the bottom surface of the second opening 21b, i.e., the diameter of the opening surface 213 of the recessed portion 120. The inner diameter of the second opening 21b is the diameter of the opening surface where the first opening 21a and the second opening 21b meet.

[0048] As a result, the autofluorescence L3 emitted by the water-repellent resin layer 21B is reduced by the light-shielding resin layer 21A and becomes difficult to detect by the detection circuit 50, thereby increasing the SNR of the fluorescence detection of the sample and improving the detection accuracy.

[0049] In the first embodiment, excitation light L1 is irradiated onto the chamber main body 21 to detect fluorescence L2 from the sample. However, a reflection-type detection method may also be used in which excitation light L1 is irradiated from the underside of the chamber main body 21 to detect fluorescence L2 from the sample. As described above, the autofluorescence generated when excitation light L1 is irradiated onto the light-blocking resin layer 21A is smaller than the autofluorescence L3 generated when excitation light L1 is irradiated onto the water-repellent resin layer 21B. Therefore, the autofluorescence L3 generated when excitation light is irradiated from the top surface of the chamber main body 21 is smaller than the autofluorescence L3 generated when excitation light is irradiated from the bottom surface of the chamber main body 21. Therefore, even in the reflection-type detection method, the detection circuit 50 has difficulty detecting the autofluorescence L3 from the water-repellent resin layer 21B. Alternatively, excitation light L1 may be irradiated from the light source 60 without the second substrate.

[0050] (Comparative Example 1 of Embodiment 1) FIG. 7 is a cross-sectional view schematically showing an example of the configuration of a plurality of containers in a micro-chamber array according to Comparative Example 1. As shown in FIG.

[0051] 7, in the micro-chamber array 10a according to Comparative Example 1, the chamber main body 21 does not have a recess 120 in the storage section 22. With this configuration, when the storage section is formed in the resin formation on the glass, additives and resin components contained in the resin formation adhere to the glass surface, i.e., the bottom surface 110 of the storage section 22, and therefore, the hydrophilic solvent may not be well retained within the storage section.

[0052] In contrast to this, in the micro-chamber array 10 of the first embodiment, the recessed portion 120 is provided on the surface of the first substrate 11 at a position overlapping with the plurality of storage portions 22. This makes it possible to easily hold the specimen sample in the storage portion.

[0053] (Method of manufacturing the detection device 1 according to the embodiment) Next, a description will be given of a method for manufacturing the detection device 1. Fig. 8 is an explanatory diagram for explaining a method for manufacturing the micro-chamber array according to the first embodiment.

[0054] As shown in FIG. 8, in the method for manufacturing the detection device 1, the chamber main body 21 is formed on the first substrate 11 (step ST101).

[0055] Next, a resist layer 80 is laminated on the chamber main body 21 (step ST102).

[0056] Next, the resist layer 80 is photoetched, and using a photomask having a predetermined pattern, the resist layer 80 is exposed and developed, and the predetermined pattern is removed (step ST103).

[0057] Next, the exposed surface portion of chamber main body 21 is removed by photoetching (step ST104).

[0058] Then, the resist layer 80 remaining on the chamber main body 21 is peeled off, the chamber main body 21 is patterned, and a plurality of storage sections 22 are formed in the chamber main body 21 (step ST105).

[0059] Finally, the bottom surface 110 of the storage section 22 is glass-etched with a cleaning solution (step ST106). As a result, the bottom surface 110 of the storage section 22 is scraped off to form a recessed portion 120, which makes it easier to hold the aqueous solution sample.

[0060] Examples of cleaning liquids include dilute hydrofluoric acid, alkaline glass cleaning liquids, etc. When the cleaning liquid is an alkaline glass cleaning liquid, it is sufficient to use at least one of Semicoclean 56, GC-3022FT, PK-LCG series, Sunecon AS-3, and Semiclean series.

[0061] As a result, any deposits, such as resin components of the chamber main body 21, adhering to the bottom surface 110 are removed from the bottom surface 110 by lift-off, so that the contact angle of the bottom surface 110 with water becomes 10° or less, thereby improving the wettability of the bottom surface 110.

[0062] An organic solvent may be used as the cleaning liquid. In this case, the organic solvent does not have an etching effect, but can dissolve deposits adhering to the bottom surface 110 and improve the wettability of the bottom surface 110.

[0063] (First modified example of the manufacturing method of the detection device 1) Next, a first modified example of the method for manufacturing the detection device 1 will be described, focusing mainly on the differences from the above-described method for manufacturing the detection device 1. Figure 9 is an explanatory diagram for explaining a method for manufacturing a micro-chamber array according to modified example 1 of embodiment 1. In the following explanation, the same components as those explained in the above-described method for manufacturing the detection device 1 will be assigned the same reference numerals, and duplicate explanations will be omitted.

[0064] As shown in FIG. 9, a light-shielding resin layer 21A is formed on a first substrate 11 (step ST201).

[0065] Next, a resist layer 80 is laminated on the light-shielding resin layer 21A (step ST202).

[0066] Next, the resist layer 80 is photoetched, and using a photomask having a predetermined pattern, the resist layer 80 is exposed and developed, and the predetermined pattern is removed (step ST203).

[0067] Next, the exposed surface portion of the light-shielding resin layer 21A is removed by photoetching (step ST204).

[0068] Then, the resist layer 80 remaining on the light-shielding resin layer 21A is peeled off, and the light-shielding resin layer 21A is patterned to form a plurality of first openings 21a in the light-shielding resin layer 21A (step ST205).

[0069] Next, the water-repellent resin layer 21B is laminated on the light-shielding resin layer 21A (step ST206).

[0070] Next, the resist layer 80 is laminated on the water-repellent resin layer 21B (step ST207).

[0071] Next, the resist layer 80 is photoetched, and using a photomask having a predetermined pattern, the resist layer 80 is exposed and developed, and the predetermined pattern is removed (step ST208).

[0072] Next, the exposed surface portion of the water-repellent resin layer 21B is removed by photoetching (step ST209).

[0073] Then, the resist layer 80 remaining on the water-repellent resin layer 21B is peeled off, and the water-repellent resin layer 21B is patterned to form second openings 21b in the water-repellent resin layer 21B at positions overlapping the first openings 21a (step ST210), thereby forming a plurality of storage sections 22 each having a first opening 21a and a second opening 21b.

[0074] Finally, the bottom surface 110 of the first opening 21a is glass-etched with a cleaning solution (step ST211). As a result, the bottom surface 110 of the storage section 22 is scraped off to form a recessed section 120, which makes it easier to hold the aqueous solution sample.

[0075] As a result, deposits such as resin components of the light-shielding resin layer 21A and the water-repellent resin layer 21B that have adhered to the bottom surface 110 are removed from the bottom surface 110 by lift-off, so that the contact angle of the bottom surface 110 with water becomes 10° or less, thereby improving the wettability of the bottom surface 110.

[0076] Fig. 10 is an explanatory diagram showing the time series change in the contact angle on the bottom surface of the container before and after glass etching in the manufacturing method of the micro-chamber array according to Modification 1 of Embodiment 1. The explanatory diagram shown in Fig. 10 shows the results when dilute hydrofluoric acid was used as the cleaning liquid in the glass etching.

[0077] As shown in Figure 10, when the surface of the first substrate 11 is not glass-etched, the contact angle of the bottom surface 110 with water is approximately 37°, and after the glass etching, this increases by approximately 5° over time, and there is no effect from the glass etching.

[0078] When light-shielding resin layer 21A is patterned and then glass-etched, the contact angle of bottom surface 110 with water is approximately 25°, but as time passes after glass etching, this increases by approximately 5°, resulting in no effect from the glass etching.The same is true when light-shielding resin layer 21A is not patterned and then glass-etched.

[0079] When water-repellent resin layer 21B is subjected to glass etching after patterning, the contact angle of bottom surface 110 with water is approximately 8°, and remains almost constant even after time has passed since glass etching, allowing the effect of glass etching to be maintained. Note that when the surface of water-repellent resin layer 21B is glass-etched, the contact angle of the surface of water-repellent resin layer 21B with water is 63°, and increases to 11° over time after glass etching because substances adsorbed on the surface of water-repellent resin layer 21B are removed.

[0080] Although preferred embodiments of the present disclosure have been described above, the present disclosure is not limited to such embodiments. The contents disclosed in the embodiments are merely examples, and various modifications are possible within the scope of the present disclosure. Appropriate modifications made within the scope of the present disclosure naturally fall within the technical scope of the present disclosure. At least one of various omissions, substitutions, and modifications of components can be made within the scope of the gist of each of the above-described embodiments and modifications. [Explanation of symbols]

[0081] 10, 10a, 10A Microchamber Array 11 First board 12 Second board 21 Chamber body 22 Storage section 120 recess 21A Light-shielding resin layer 21B Water-repellent resin layer 21a 1st opening 21b 2nd opening

Claims

1. a first substrate; a second substrate facing the first substrate; a flow channel provided between the first substrate and the second substrate, through which a solvent containing a sample flows; a chamber main body provided on a surface of the first substrate facing the second substrate; a plurality of storage sections provided in the chamber main body, the first substrate has recessed portions recessed from a surface of the first substrate in a thickness direction of the first substrate at positions overlapping with the respective accommodation portions, Microchamber array.

2. the chamber body has a water-repellent resin layer and a light-shielding resin layer, the light-blocking resin layer and the water-repellent resin layer are laminated in this order on the first substrate; The microchamber array according to claim 1 .

3. forming a chamber body on a first substrate; forming a plurality of storage compartments in the chamber body; After the step of forming the storage portions, a step of glass etching the bottom surface of each of the storage portions with a cleaning solution is included. A method for manufacturing a microchamber array.

4. forming a light-blocking resin layer on a first substrate; forming a plurality of first openings in the light-shielding resin layer; laminating a water-repellent resin layer on the light-blocking resin layer; forming second openings in the water-repellent resin layer at positions overlapping the plurality of first openings; and after the step of forming the first openings and the second openings, performing glass etching on the bottom surfaces of the first openings with a cleaning liquid. A method for manufacturing a microchamber array.

5. The cleaning solution is dilute hydrofluoric acid. The method for producing the micro-chamber array according to claim 3 or 4.

6. The cleaning solution is at least one of Semicoclean 56, GC-3022FT, PK-LCG series, Sunecon AS-3, and Semiclean series. The method for producing the micro-chamber array according to claim 3 or 4.

Images