Method for driving semiconductor device

Abstract

To provide a highly reliable semiconductor device.SOLUTION: There is provided a semiconductor device provided with a memory cell having a first ferroelectric capacitor and a reference memory cell having a second ferroelectric capacitor. In a first period, first binary data is written to the memory cell, and first reference binary data is written to the reference memory cell. In a second period, the first binary data is read from the memory cell, and the first reference binary data is read from the reference memory cell. In a third period, a logical operation is performed to the first binary data and the first reference binary data. In a fourth period, second binary data is written to the memory cell, and second reference binary data is written to the reference memory cell. A value of the first binary data is different from a value of the second binary data, and a value of the first reference binary data is different from a value of the second reference binary data.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] One embodiment of the present invention relates to a semiconductor device and a driving method thereof.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. The technical field of the invention disclosed in this specification relates to an object, a driving method, or a manufacturing method. Alternatively, one embodiment of the present invention relates to a process, a machine, manufacture, or a composition of matter. Therefore, more specific examples of the technical field of one embodiment of the present invention disclosed in this specification include semiconductor devices, display devices, liquid crystal display devices, light-emitting devices, power storage devices, imaging devices, memory devices, signal processing devices, sensors, processors, electronic devices, systems, driving methods thereof, manufacturing methods thereof, and inspection methods thereof. [Background technology]

[0003] In recent years, the development of semiconductor devices has progressed, and LSIs, CPUs, memories, etc. are mainly used in semiconductor devices. A CPU is an assembly of semiconductor elements that have semiconductor integrated circuits (at least transistors and memories) processed from semiconductor wafers and formed into chips, and on which electrodes serving as connection terminals are formed.

[0004] Semiconductor circuits (IC chips) such as LSIs, CPUs, and memories are mounted on circuit boards, such as printed wiring boards, and are used as components in a variety of electronic devices.

[0005] Furthermore, a technology for constructing transistors using semiconductor thin films formed on substrates with insulating surfaces has attracted attention. Such transistors are widely used in electronic devices such as integrated circuits (ICs) and image display devices (also simply referred to as display devices). Silicon-based semiconductor materials and oxide semiconductors are known as semiconductor thin films applicable to transistors.

[0006] Furthermore, as shown in Non-Patent Document 1, research and development of memory cells using ferroelectrics is being actively conducted. Furthermore, for the next generation of ferroelectric memories, research on hafnium oxide is also being actively conducted, including research on ferroelectric HfO2-based materials (Non-Patent Document 2), research on the ferroelectricity of hafnium oxide thin films (Non-Patent Document 3), and research on the ferroelectricity of HfO2 thin films (Non-Patent Document 4). [Prior art documents] [Non-patent literature]

[0007] [Non-Patent Document 1] TSBoescke,et al,“Ferroelectricity in hafnium oxide thin films”,APL99,2011 [Non-patent document 2] Zhen Fan,et al,“Ferroelectric HfO2-based materials for next-generation ferroelectric memories”,JOURNAL OF ADVANCED DIELECTRICS,Vol.6,No.2,2016 [Non-patent document 3] Jun Okuno,et al,“SoC compatible 1T1C FeRAM memory array based on ferroelectric Hf0.5Zr0.5O2”,VLSI 2020 [Non-patent document 4] Akira Toriumi, "Ferroelectricity of HfO2 Thin Films," The Japan Society of Applied Physics, Vol. 88, No. 9, 2019 Summary of the Invention [Problem to be solved by the invention]

[0008] When data written in a memory cell using a ferroelectric material is repeatedly read, polarization reversal in the ferroelectric material may occur repeatedly. This may cause fatigue degradation, and the polarization of the ferroelectric material may become smaller when data is written to the memory cell. This may result in a decrease in the reliability of the semiconductor device.

[0009] An object of one embodiment of the present invention is to provide a highly reliable semiconductor device and a driving method thereof. Alternatively, an object of one embodiment of the present invention is to provide a novel semiconductor device and a driving method thereof.

[0010] Note that the problems of one embodiment of the present invention are not limited to the problems listed above. The problems listed above do not preclude the existence of other problems. Note that the other problems are problems not mentioned in this section, which will be described below. Problems not mentioned in this section can be derived by a person skilled in the art from the description in the specification or drawings, and can be appropriately extracted from these descriptions. Note that one embodiment of the present invention solves at least one of the problems listed above and other problems. Note that one embodiment of the present invention does not necessarily solve all of the problems listed above and other problems. [Means for solving the problem]

[0011] One aspect of the present invention is a method for driving a semiconductor device having a memory cell with a ferroelectric capacitor, the method including: writing binary data to the memory cell in a first period; reading the binary data from the memory cell in a second period; and writing the binary data back to the memory cell in a third period by causing a polarization reversal in the ferroelectric capacitor.

[0012] Alternatively, in the above aspect, polarization reversal may be caused in the ferroelectric capacitor during the third period, regardless of the value of the binary data.

[0013] Alternatively, in the above aspect, the semiconductor device may have a reference memory cell, and in a first period, write reference binary data to the reference memory cell, and in a second period, read the reference binary data from the reference memory cell, and in the second period, perform a logical operation on the binary data read from the memory cell and the reference binary data read from the reference memory cell.

[0014] Alternatively, in the above aspect, the logical operation may be an exclusive OR.

[0015] Alternatively, in the above aspect, the memory cell may have a first transistor, a second transistor, and a third transistor, one of the source or drain of the first transistor being electrically connected to the gate of the second transistor and one electrode of the ferroelectric capacitor, one of the source or drain of the second transistor being electrically connected to one of the source or drain of the third transistor, and the other of the source or drain of the third transistor being electrically connected to the other of the source or drain of the first transistor, and during the first period and the third period, the first transistor being in an on state and the third transistor being in an off state, and during the second period, the first transistor being in an off state and the third transistor being in an on state.

[0016] Alternatively, in the above aspect, the ferroelectric capacitor may have a dielectric, and the dielectric may include hafnium oxide and / or zirconium oxide.

[0017] Alternatively, one embodiment of the present invention is a method for driving a semiconductor device including a memory cell having a first ferroelectric capacitor and a reference memory cell having a second ferroelectric capacitor, the method including: writing first binary data to the memory cell and writing first reference binary data to the reference memory cell in a first period; reading the first binary data from the memory cell and reading the first reference binary data from the reference memory cell in a second period; performing a logical operation on the first binary data and the first reference binary data in a third period; and writing second binary data to the memory cell and writing the second reference binary data to the reference memory cell in a fourth period, wherein the value of the first binary data is different from the value of the second binary data and the value of the first reference binary data are different from the value of the second reference binary data.

[0018] Alternatively, in the above aspect, the semiconductor device may have a first sense amplifier circuit and a second sense amplifier circuit, the first sense amplifier circuit being electrically connected to a memory cell, and the second sense amplifier circuit being electrically connected to a reference memory cell, and the first sense amplifier circuit and the second sense amplifier circuit may be activated during the third period.

[0019] Alternatively, in the above aspect, the memory cell may have a first transistor, a second transistor, and a third transistor, one of the source or drain of the first transistor electrically connected to the gate of the second transistor and one electrode of the first ferroelectric capacitor, one of the source or drain of the second transistor electrically connected to one of the source or drain of the third transistor, the other of the source or drain of the first transistor and the other of the source or drain of the third transistor electrically connected to a first sense amplifier circuit, and during the first period and the fourth period, the first transistor may be in an on state and the third transistor may be in an off state, and during the second period and the third period, the first transistor may be in an off state and the third transistor may be in an on state.

[0020] Alternatively, in the above aspect, the first ferroelectric capacitor may have a first dielectric, the second ferroelectric capacitor may have a second dielectric, and the first dielectric and the second dielectric may each include hafnium oxide and / or zirconium oxide.

[0021] Alternatively, in the above aspect, the logical operation may be an exclusive OR. [Effects of the Invention]

[0022] According to one embodiment of the present invention, a highly reliable semiconductor device and a driving method thereof can be provided. Alternatively, according to one embodiment of the present invention, a novel semiconductor device and a driving method thereof can be provided.

[0023] The effects of one embodiment of the present invention are not limited to the effects listed above. The effects listed above do not preclude the existence of other effects. The other effects are described below and are not mentioned in this section. Effects not mentioned in this section can be derived by a person skilled in the art from the description in the specification or drawings, and can be extracted as appropriate from these descriptions. One embodiment of the present invention has at least one of the effects listed above and other effects. Therefore, one embodiment of the present invention may not have the effects listed above in some cases. [Brief explanation of the drawings]

[0024] [Figure 1] FIG. 1 is a block diagram showing an example of the configuration of a semiconductor device. [Figure 2] 2A and 2B are circuit diagrams showing examples of the configuration of a memory cell. [Figure 3] Fig. 3A is a graph showing an example of the hysteresis characteristic of a dielectric. Fig. 3B1 and Fig. 3B2 are circuit diagrams showing an example of a method for driving a memory cell. [Figure 4] 4A and 4B are timing charts showing an example of a method for driving a memory cell. [Figure 5]Fig. 5A is a circuit diagram showing an example of the configuration of a memory cell, Fig. 5B1 and Fig. 5B2 are timing charts showing an example of a method of driving the memory cell. [Figure 6] FIG. 6 is a schematic cross-sectional view showing a configuration example of a semiconductor device. [Figure 7] 7A to 7C are cross-sectional views showing examples of the structure of a transistor. [Figure 8] FIG. 8 is a schematic cross-sectional view showing a configuration example of a semiconductor device. [Figure 9] 9A and 9B are cross-sectional views showing examples of the structure of a transistor. [Figure 10] FIG. 10 is a schematic cross-sectional view showing a configuration example of a transistor. [Figure 11] 11A to 11C are cross-sectional views showing examples of the structure of a transistor. [Figure 12] FIG. 12 is a schematic cross-sectional view showing a configuration example of a transistor. [Figure 13] 13A and 13B are cross-sectional views showing examples of the structure of a transistor. [Figure 14] 14A and 14B are cross-sectional views showing examples of the structure of a transistor. [Figure 15] FIG. 15 is a schematic cross-sectional view showing a configuration example of a transistor. [Figure 16] FIG. 16 is a schematic cross-sectional view showing a configuration example of a semiconductor device. [Figure 17] FIG. 17 is a schematic cross-sectional view showing a configuration example of a semiconductor device. [Figure 18] FIG. 18A is a diagram illustrating the classification of IGZO crystal structures, FIG. 18B is a diagram illustrating the XRD spectrum of crystalline IGZO, and FIG. 18C is a diagram illustrating the electron microbeam diffraction pattern of crystalline IGZO. [Figure 19] FIG. 19A is a perspective view showing an example of a semiconductor wafer, FIG. 19B is a perspective view showing an example of a chip, and FIGS. 19C and 19D are perspective views showing an example of an electronic component. [Figure 20] FIG. 20 is a block diagram illustrating the CPU. [Figure 21] 21A to 21J are perspective views or schematic diagrams illustrating an example of a product. [Figure 22] 22A to 22E are perspective views or schematic diagrams for explaining an example of a product. DETAILED DESCRIPTION OF THE INVENTION

[0025] In this specification and the like, a metal oxide refers to an oxide of a metal in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (also referred to as oxide semiconductors or simply as OSs), and the like. For example, when a metal oxide is used in the active layer of a transistor, the metal oxide may be referred to as an oxide semiconductor. That is, when a metal oxide can form a channel formation region of a transistor having at least one of an amplifying function, a rectifying function, and a switching function, the metal oxide can be referred to as a metal oxide semiconductor. Furthermore, an OS transistor can be rephrased as a transistor having a metal oxide or an oxide semiconductor.

[0026] In this specification and the like, nitrogen-containing metal oxides may also be collectively referred to as metal oxides. Nitrogen-containing metal oxides may also be referred to as metal oxynitrides.

[0027] In this specification and the like, the configurations shown in each embodiment can be combined as appropriate with the configurations shown in other embodiments to form one aspect of the present invention. In addition, when multiple configuration examples are shown in one embodiment, the configuration examples can be combined as appropriate with each other.

[0028] In addition, the content (or even part of the content) described in one embodiment can be applied, combined, or replaced with at least one of another content (or even part of the content) described in that embodiment and one or more other content (or even part of the content) described in another embodiment.

[0029] The contents described in the embodiments refer to the contents described in each embodiment using various figures or the contents described using text in the specification.

[0030] Furthermore, a figure (or even a part thereof) described in one embodiment can be combined with another part of that figure, another figure (or even a part thereof) described in that embodiment, and at least one figure (or even a part thereof) described in one or more other embodiments to form even more figures.

[0031] The embodiments described in this specification will be described with reference to the drawings. However, it will be readily understood by those skilled in the art that the embodiments can be implemented in many different ways, and that various changes in form and details can be made without departing from the spirit and scope of the invention. Therefore, the present invention should not be interpreted as being limited to the description of the embodiments. Note that in the configuration of the invention of the embodiments, the same reference numerals are used in different drawings for the same parts or parts having similar functions, and repeated description thereof may be omitted. Also, in perspective views and the like, the description of some components may be omitted to ensure clarity of the drawings.

[0032] In this specification, when the same symbol is used for multiple elements, and particularly when it is necessary to distinguish between them, an identification symbol such as “_1”, “[n]”, or “[m,n]” may be added to the symbol.

[0033] In addition, in the drawings in this specification, the size, layer thickness, or region may be exaggerated for clarity. Therefore, the drawings are not necessarily limited to the scale. Note that the drawings are schematic illustrations of ideal examples, and are not limited to the shapes or values ​​shown in the drawings. For example, variations in signals, voltages, or currents due to noise, or variations in signals, voltages, or currents due to timing differences, etc. may be included.

[0034] Furthermore, in this specification, the ordinal numbers "first," "second," and "third" are used to avoid confusion between components. Therefore, they do not limit the number of components. Furthermore, they do not limit the order of the components. For example, a component referred to as "first" in one embodiment of this specification may be a component referred to as "second" in another embodiment or in the claims. Furthermore, for example, a component referred to as "first" in one embodiment of this specification may be omitted in another embodiment or in the claims.

[0035] Furthermore, in this specification, terms indicating position, such as "above" and "below," may be used for convenience in describing the positional relationship between components with reference to the drawings. Furthermore, the positional relationship between components changes as appropriate depending on the direction in which each component is depicted. Therefore, the terms are not limited to those used in the specification, and can be rephrased appropriately depending on the situation. For example, the expression "insulator located on the upper surface of a conductor" can be rephrased as "insulator located on the lower surface of a conductor" by rotating the orientation of the drawing 180 degrees.

[0036] Furthermore, the terms "above" and "below" do not limit the positional relationship of components to being directly above or below, and being in direct contact with each other. For example, the expression "electrode B on insulating layer A" does not require that electrode B be formed in direct contact with insulating layer A, and does not exclude the inclusion of other components between insulating layer A and electrode B.

[0037] Furthermore, in this specification and the like, terms such as "film" and "layer" can be interchanged depending on the situation. For example, the term "conductive layer" may be interchanged with the term "conductive film." Or, for example, the term "insulating film" may be interchanged with the term "insulating layer." Or, in some cases or depending on the situation, terms such as "film" and "layer" may not be used and may be interchanged with other terms. For example, the terms "conductive layer" or "conductive film" may be interchanged with the term "conductor." Or, for example, the terms "insulating layer" and "insulating film" may be interchanged with the term "insulator."

[0038] Furthermore, in this specification and the like, terms such as "electrode," "wiring," and "terminal" do not functionally limit these components. For example, an "electrode" may be used as part of a "wiring," and vice versa. Furthermore, the terms "electrode" and "wiring" include cases where multiple "electrodes" or "wirings" are integrally formed. Furthermore, for example, a "terminal" may be used as part of a "wiring" or "electrode," and vice versa. Furthermore, the term "terminal" includes cases where multiple "electrodes," "wirings," "terminals," and the like are integrally formed. Therefore, for example, an "electrode" can be part of a "wiring" or "terminal," and a "terminal" can be part of a "wiring" or "electrode." Furthermore, terms such as "electrode," "wiring," and "terminal" may be replaced with terms such as "region" in some cases.

[0039] Furthermore, in this specification and the like, terms such as "wiring," "signal line," and "power line" may be interchangeable depending on the circumstances. For example, the term "wiring" may be changed to the term "signal line." For example, the term "wiring" may be changed to the term "power line." The reverse is also true, and terms such as "signal line" and "power line" may be changed to the term "wiring." The term "power line" may be changed to the term "signal line." The reverse is also true, and terms such as "signal line" may be changed to the term "power line." The term "potential" applied to wiring may be changed to the term "signal" depending on the circumstances. The reverse is also true, and terms such as "signal" may be changed to the term "potential."

[0040] (Embodiment 1) In this embodiment, a semiconductor device of one embodiment of the present invention and a driving method thereof will be described.

[0041] One aspect of the present invention relates to a semiconductor device having memory cells, such as a memory device. The memory cells of the semiconductor device according to one aspect of the present invention are provided with capacitors using a ferroelectric material as a dielectric. When the semiconductor device is operated, binary data, for example, is written and stored in the memory cells, and then the binary data is read and written back. Here, regardless of whether the binary data stored in the memory cells is "0" or "1," the dielectric undergoes one polarization reversal during a period in which one read and one write back are performed. In other words, the number of polarization reversals of the dielectric when the binary data stored in the memory cell is "0" is the same as the number of polarization reversals of the dielectric when the binary data is "1." This improves the reliability of the semiconductor device compared to a case in which, for example, when the binary data stored in the memory cell is "0," the read and write back are performed without polarization reversal of the dielectric, and when the binary data stored in the memory cell is "1," the read and write back are performed with a total of two polarization reversals of the dielectric.

[0042] <Configuration example of semiconductor device> 1 is a block diagram illustrating a configuration example of a semiconductor device 10, which is a semiconductor device according to one embodiment of the present invention. The semiconductor device 10 can be, for example, a memory device.

[0043] The semiconductor device 10 is provided with a memory cell array MCA in which memory cells MC are arranged in a matrix of m rows and n+1 columns (m and n are integers equal to or greater than 1). The semiconductor device 10 also has a word line drive circuit WD, a plate line drive circuit PD, a potential generation circuit SD, and a bit line drive circuit BD.

[0044] The word line driving circuit WD is electrically connected to the memory cells MC via wiring WWL and also electrically connected to the memory cells MC via wiring RWL. The plate line driving circuit PD is electrically connected to the memory cells MC via wiring PL. The potential generating circuit SD is electrically connected to the memory cells MC via wiring SL. The bit line driving circuit BD is electrically connected to the memory cells MC via wiring BL.

[0045] Here, memory cells MC in the same row can be electrically connected to the word line driving circuit WD via the same wiring WWL and the same wiring RWL, and can be electrically connected to the plate line driving circuit PD via the same wiring PL, and memory cells MC in the same column can be electrically connected to the bit line driving circuit BD via the same wiring BL.

[0046] In this specification, for example, a memory cell MC in the first row and first column is referred to as memory cell MC[1,1], and a memory cell MC in the mth row and n+1th column is referred to as memory cell MC[m,n+1]. Furthermore, for example, the wiring WWL, wiring RWL, and wiring PL electrically connected to the memory cell MC in the first row are referred to as wiring WWL[1], wiring RWL[1], and wiring PL[1], respectively, and the wiring WWL, wiring RWL, and wiring PL electrically connected to the memory cell MC in the mth row are referred to as wiring WWL[m], wiring RWL[m], and wiring PL[m], respectively. Furthermore, for example, a wiring BL electrically connected to the memory cell MC in the first column is referred to as wiring BL[1], and a wiring BL electrically connected to the memory cell MC in the n+1th column is referred to as wiring BL[n+1]. Similar notations may be used for other elements.

[0047] The word line driver circuit WD has a function of controlling the potential of the wiring WWL and the potential of the wiring RWL. Specifically, the word line driver circuit WD has a function of selecting a memory cell MC to write data to by controlling the potential of the wiring WWL, and a function of selecting a memory cell MC to read data from by controlling the potential of the wiring RWL.

[0048] The plate line driver circuit PD has a function of controlling the potential of the wiring PL. The potential generator circuit SD has a function of controlling the potential of the wiring SL. The potential generator circuit SD can supply, for example, a constant potential to the wiring SL, or can supply, for example, a ground potential to the wiring SL.

[0049] The bit line driver circuit BD has a function of generating data to be written to the memory cells MC and supplying the data to the memory cells MC in a predetermined column, and also has a function of reading and outputting the data written to the memory cells MC.

[0050] The bit line driver circuit BD will be described in detail. The bit line driver circuit BD includes sense amplifier circuits SA[1] to SA[n+1], a latch circuit LAT, and a logic operation circuit LC. The sense amplifier circuits SA are electrically connected to wirings BL, REFL, ENL, and PREL. The sense amplifier circuits SA[1] to SA[n] are electrically connected to the logic operation circuit LC, and the sense amplifier circuit SA[n+1] is electrically connected to the logic operation circuit LC via the latch circuit LAT. The logic operation circuit LC is electrically connected to wirings OUT[1] to OUT[n]. The latch circuit LAT and the logic operation circuit LC may be located outside the bit line driver circuit BD. The semiconductor device 10 may not include the latch circuit LAT. If the semiconductor device 10 does not include the latch circuit LAT, data output from the sense amplifier circuit SA[n+1] may be directly input to the logic circuit LC, for example.

[0051] The sense amplifier circuit SA has a function of amplifying the difference between the potential of the wiring BL and the potential of the wiring REFL. For example, when the potential of the wiring BL is higher than the potential of the wiring REFL, the sense amplifier circuit SA can output a high potential. On the other hand, when the potential of the wiring BL is lower than the potential of the wiring REFL, the sense amplifier circuit SA can output a low potential. This allows the bit line driver circuit BD to write binary data, specifically, binary digital data, to the memory cell MC and to read the binary data written to the memory cell MC. For example, when the potential of the wiring BL is higher than the potential of the wiring REFL, it can be assumed that a "0" is written to or read from the memory cell MC. On the other hand, when the potential of the wiring BL is lower than the potential of the wiring REFL, it can be assumed that a "1" is written to or read from the memory cell MC.

[0052] An enable signal that controls whether the sense amplifier circuit SA is activated can be supplied to the wiring ENL. The enable signal can be, for example, a binary digital signal. For example, when the potential of the wiring ENL is high, the sense amplifier circuit SA can be activated, and the difference between the potential of the wiring BL and the potential of the wiring REFL is amplified. On the other hand, when the potential of the wiring ENL is low, the sense amplifier circuit SA can be deactivated, and the amplification is not performed.

[0053] A precharge signal that controls whether or not the potentials of the wiring BL and the wiring REFL are precharged can be supplied to the wiring PREL. The precharge signal can be, for example, a binary digital signal. For example, when the potential of the wiring PREL is high, the wiring BL can be precharged to a high potential. Furthermore, the potential of the wiring REFL can be set to a potential between the potential of the wiring BL when data with a value of "0" is read from the memory cell MC and the potential of the wiring BL when data with a value of "1" is read from the memory cell MC.

[0054] Note that the potential supplied to the wirings ENL[1] to ENL[n+1] may be common to each other. In this case, the wirings ENL[1] to ENL[n+1] may be electrically connected to each other. Furthermore, the potential supplied to the wirings PREL[1] to PREL[n+1] may be common to each other. In this case, the wirings PREL[1] to PREL[n+1] may be electrically connected to each other.

[0055] The latch circuit LAT has a function of holding data output from the sense amplifier circuit SA[n+1]. That is, the latch circuit LAT can hold data output from the memory cells MC in the n+1th column. The latch circuit LAT can have m latch circuits, each capable of holding 1-bit data. This allows the latch circuit LAT to hold all data read from the memory cells MC[1,n+1] to MC[m,n+1].

[0056] The logic operation circuit LC has a function of performing a logical operation using input data. The logic operation circuit LC has a function of performing a logical operation, for example, on the data output from the sense amplifier circuit SA and the data output from the latch circuit LAT. Data representing the operation result is output from the wiring OUT. The logic operation circuit LC can perform a logical operation, for example, on the data output from the sense amplifier circuit SA[1] and the data output from the latch circuit LAT, and output data representing the operation result from the wiring OUT[1]. Furthermore, the logic operation circuit LC can perform a logical operation, for example, on the data output from the sense amplifier circuit SA[n] and the data output from the latch circuit LAT, and output data representing the operation result from the wiring OUT[n].

[0057] As described above, the logic operation circuit LC performs a logic operation on the data output from the sense amplifier circuit SA[1] to the sense amplifier circuit SA[n] with the data output from the sense amplifier circuit SA[n+1]. The sense amplifier circuit SA[n+1] also has the function of amplifying data read from the memory cells MC in the n+1th column. As described above, the memory cells MC[1,n+1] to MC[m,n+1] can be referred to as reference memory cells. Data written to and read from the reference memory cells can be referred to as reference data. Furthermore, binary reference data can be referred to as reference binary data.

[0058] <Memory cell configuration example> 2A is a circuit diagram showing an example of the configuration of a memory cell MC. The memory cell MC includes a transistor M1, a transistor M2, a transistor M3, and a capacitor FEC.

[0059] Although the following description will be given assuming that the transistors M1 to M3 are n-channel transistors, the following description can also be applied to cases where at least some of the transistors M1 to M3 are p-channel transistors by appropriately reversing the magnitude relationship of the potentials, etc. For example, when the transistors M2 and M3 are p-channel transistors, the potential of the wiring SL can be set to a high potential.

[0060] One of the source or drain of transistor M1 is electrically connected to the gate of transistor M2. The gate of transistor M2 is electrically connected to one electrode of capacitor FEC. One of the source or drain of transistor M2 is electrically connected to one of the source or drain of transistor M3.

[0061] The other of the source or drain of the transistor M1 and the other of the source or drain of the transistor M3 are electrically connected to a wiring BL. The other of the source or drain of the transistor M2 is electrically connected to a wiring SL. The gate of the transistor M1 is electrically connected to a wiring WWL. The gate of the transistor M3 is electrically connected to a wiring RWL. The other electrode of the capacitor FEC is electrically connected to a wiring PL.

[0062] Here, a node N is defined as a node where one of the source or drain of the transistor M1, the gate of the transistor M2, and one electrode of the capacitor FEC are electrically connected.

[0063] The transistors M1 and M3 function as switching elements. Specifically, the transistor M1 can be turned on by setting the gate potential of the transistor M1 to a high potential, and the transistor M1 can be turned off by setting the gate potential of the transistor M1 to a low potential. That is, the transistor M1 can be turned on by setting the potential of the wiring WWL to a high potential, and the transistor M1 can be turned off by setting the potential of the wiring WWL to a low potential. Similarly, the transistor M3 can be turned on by setting the gate potential of the transistor M3 to a high potential, and the transistor M3 can be turned off by setting the gate potential of the transistor M3 to a low potential. That is, the transistor M3 can be turned on by setting the potential of the wiring RWL to a high potential, and the transistor M3 can be turned off by setting the potential of the wiring RWL to a low potential. Since the transistors M1 and M3 function as switching elements, it is preferable that the transistors M1 and M3 be operated in a linear region.

[0064] The transistor M2 functions as an amplifying transistor that amplifies the potential held at the node N. Therefore, it is preferable that the transistor M2 be driven in the saturation region.

[0065] The capacitor FEC is a capacitor that uses a material that can have ferroelectricity as a dielectric. In this specification and the like, a capacitor that uses a material that can have ferroelectricity as a dielectric is called a ferroelectric capacitor.

[0066] Materials that can have ferroelectric properties include hafnium oxide, zirconium oxide, and HfZrO X(X is a real number greater than 0), materials in which element J1 (here, element J1 is zirconium (Zr), silicon (Si), aluminum (Al), gadolinium (Gd), yttrium (Y), lanthanum (La), strontium (Sr), etc.) is added to hafnium oxide, and materials in which element J2 (here, element J2 is hafnium (Hf), silicon (Si), aluminum (Al), gadolinium (Gd), yttrium (Y), lanthanum (La), strontium (Sr), etc.) is added to zirconium oxide. Furthermore, materials that may have ferroelectricity include PbTiO X Piezoelectric ceramics having a perovskite structure, such as barium strontium titanate (BST), strontium titanate, lead zirconate titanate (PZT), strontium bismuth tantalate (SBT), bismuth ferrite (BFO), and barium titanate, may also be used. Ferroelectric materials may be, for example, a plurality of materials selected from the above-listed materials, or a laminated structure made of a plurality of materials selected from the above-listed materials. Incidentally, hafnium oxide, zirconium oxide, HfZrO X , and materials in which the element J1 is added to hafnium oxide, etc., may have crystal structures (characteristics) that may change not only depending on the film formation conditions but also on various processes, etc., and therefore in this specification, etc., not only materials that exhibit ferroelectricity are called ferroelectrics, but also materials that may have ferroelectricity.

[0067] Among these, hafnium oxide or a material containing hafnium oxide and zirconium oxide is preferable as a material that can have ferroelectricity, since it can have ferroelectricity even when processed into a thin film of several nm.

[0068] The film thickness of the material capable of exhibiting ferroelectricity can be set to 100 nm or less, preferably 50 nm or less, more preferably 20 nm or less, and even more preferably 10 nm or less (typically 2 nm or more and 9 nm or less). XWhen used, it is preferable to form the film by atomic layer deposition (ALD), particularly by thermal ALD.

[0069] Furthermore, when a film of a material that can have ferroelectricity is formed using a thermal ALD method, it is preferable to use a material that does not contain hydrocarbons (also called Hydro Carbon, HC) as a precursor. If either or both of hydrogen and carbon are contained in the material that can have ferroelectricity, the crystallization of the material that can have ferroelectricity may be inhibited. For this reason, as described above, it is preferable to use a precursor that does not contain hydrocarbons to reduce the concentration of either or both of hydrogen and carbon in the material that can have ferroelectricity. For example, a chlorine-based material can be used as a precursor that does not contain hydrocarbons. Note that, as a material that can have ferroelectricity, a material containing hafnium oxide and zirconium oxide (HfZrO x ) is used, HfCl4 and / or ZrCl4 may be used as the precursor.

[0070] Furthermore, when a film of a material that may have ferroelectricity is formed using a thermal ALD method, HO or O can be used as the oxidizing agent. However, the oxidizing agent for the thermal ALD method is not limited to these. For example, the oxidizing agent for the thermal ALD method may include one or more selected from O, O, N, NO, HO, and HO.

[0071] Furthermore, the crystal structure of the material capable of exhibiting ferroelectricity is not particularly limited. For example, the crystal structure of the material capable of exhibiting ferroelectricity may be one or more selected from the group consisting of cubic, tetragonal, orthorhombic, and monoclinic. In particular, the material capable of exhibiting ferroelectricity preferably has an orthorhombic crystal structure, since this allows ferroelectricity to be expressed. Alternatively, the material capable of exhibiting ferroelectricity may have a composite structure having an amorphous structure and a crystalline structure.

[0072] Ferroelectric materials are insulators that are polarized internally when an external electric field is applied, and the polarization remains even when the electric field is removed. Therefore, they can be used as nonvolatile memory elements. Therefore, by using such materials as a dielectric sandwiched between a pair of electrodes of a capacitor, the capacitor can be called a "ferroelectric capacitor." In this specification, the ferroelectric material may be referred to as being between one electrode and the other electrode of the capacitor. A memory circuit using a ferroelectric capacitor is sometimes called a Ferroelectric Random Access Memory (FeRAM), ferroelectric memory, etc.

[0073] In this specification and the like, the circuit symbol for a ferroelectric capacitor (for example, a capacitor FEC) is a circuit symbol for a capacitor with diagonal lines added, as shown in Fig. 2A. Alternatively, as shown in Fig. 2B, a different circuit symbol may be a circuit symbol for a capacitor with multiple diagonal lines added between two parallel lines.

[0074] Transistors having silicon in their channel formation regions (hereinafter referred to as Si transistors) can be used as the transistors M1 to M3. In particular, when transistors having single crystal silicon or low-temperature polysilicon in their channel formation regions are used as the transistors M1 to M3, the on-state current of the transistors M1 to M3 can be increased. This allows the memory cell MC to operate at high speed, thereby enabling the semiconductor device 10 to operate at high speed. Alternatively, transistors having amorphous silicon in their channel formation regions can be used as the transistors M1 to M3.

[0075] Furthermore, transistors other than Si transistors may be used as the transistors M1 to M3. For example, OS transistors can be used as the transistors M1 to M3. OS transistors have a high breakdown voltage characteristic. Therefore, by using OS transistors as the transistors M1 to M3, a high voltage can be applied to the transistors M1 to M3 even when the transistors M1 to M3 are miniaturized. By miniaturizing the transistors M1 to M3, the area occupied by the memory cells MC can be reduced. Therefore, the memory cells MC can be arranged with high density. This allows the semiconductor device 10 to have a large storage capacity.

[0076] Furthermore, for example, the transistors M1 to M3 included in the memory cell MC can be OS transistors, and the transistors included in the word line driver circuit WD, the plate line driver circuit PD, the potential generator circuit SD, and the bit line driver circuit BD can be Si transistors. This allows the memory cell array MCA to be stacked so as to have an overlapping area with the word line driver circuit WD, the plate line driver circuit PD, the potential generator circuit SD, or the bit line driver circuit BD. This allows the semiconductor device 10 to be downsized while maintaining the storage capacity of the semiconductor device 10. Even when the transistors included in the word line driver circuit WD, the plate line driver circuit PD, the potential generator circuit SD, and the bit line driver circuit BD are OS transistors, these circuits can be stacked so as to have an overlapping area with the memory cell array MCA.

[0077] When the transistors M1 to M3 are OS transistors, the metal oxide in the channel formation regions of the transistors M1 to M3 is preferably an oxide containing at least one of indium, gallium, and zinc. Alternatively, an oxide containing at least one of indium, an element M (e.g., aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, etc.) and zinc may be used instead of the oxide.

[0078] Here, all of the transistors M1 to M3 do not have to be the same type of transistors. For example, some of the transistors M1 to M3 may be Si transistors and the rest may be OS transistors. For example, among the transistors M1 to M3, transistors to which a high voltage is applied may be OS transistors and the other transistors may be Si transistors.

[0079] <Characteristics of dielectrics> The dielectric of a ferroelectric capacitor has a hysteresis characteristic. FIG. 3A is a graph showing an example of the hysteresis characteristic. In FIG. 3A, the horizontal axis represents the voltage applied to the dielectric. This voltage can be, for example, the value obtained by subtracting the potential of one electrode of the capacitor FEC from the potential of the other electrode of the capacitor FEC. In other words, the value obtained by subtracting the potential of the wiring PL from the potential of the node N can be used as the voltage applied to the dielectric.

[0080] 3A, the vertical axis indicates the polarization of the dielectric, and a positive value indicates that negative charges are biased toward one electrode of the FEC capacitor and positive charges are biased toward the other electrode of the FEC capacitor. On the other hand, a negative value indicates that negative charges are biased toward the other electrode of the FEC capacitor and positive charges are biased toward one electrode of the FEC capacitor.

[0081] The voltage shown on the horizontal axis of the graph in Fig. 3A may be the value obtained by subtracting the potential of one electrode of the capacitor FEC from the potential of the other electrode of the capacitor FEC. Also, the polarization shown on the vertical axis of the graph in Fig. 3A may be a positive value when negative charges are biased toward the other electrode of the capacitor FEC and positive charges are biased toward one electrode of the capacitor FEC, and a negative value when negative charges are biased toward one electrode of the capacitor FEC and positive charges are biased toward the other electrode of the capacitor FEC.

[0082] 3A, the hysteresis characteristic of a dielectric can be represented by a curve 11 and a curve 12. The voltages at the intersections of the curves 11 and 12 are defined as VSP and −VSP.

[0083] When a voltage equal to or less than -VSP is applied to the dielectric, and then the voltage applied to the dielectric is increased, the polarization of the dielectric increases along curve 11. On the other hand, when a voltage equal to or greater than VSP is applied to the dielectric, and then the voltage applied to the dielectric is decreased, the polarization of the dielectric decreases along curve 12. Therefore, VSP and -VSP can be called saturation polarization voltages. Note that, for example, VSP may be called the first saturation polarization voltage, and -VSP may be called the second saturation polarization voltage.

[0084] Here, Vc denotes the voltage applied to the dielectric when the polarization of the dielectric changes along curve 11 and the polarization of the dielectric is 0. Also, -Vc denotes the voltage applied to the dielectric when the polarization of the dielectric changes along curve 12 and the polarization of the dielectric is 0. Vc and -Vc can be called coercive voltages. The values ​​of Vc and -Vc can be said to be values ​​between -VSP and VSP. For example, Vc may be called the first coercive voltage, and -Vc may be called the second coercive voltage.

[0085] The absolute value of the first saturated polarization voltage may be different from the absolute value of the second saturated polarization voltage, and the absolute value of the first coercive voltage may be different from the absolute value of the second coercive voltage.

[0086] <Example of a method for driving a semiconductor device> The following describes an example of a method for driving the semiconductor device 10. In the following description, the voltage applied to the dielectric of the capacitor FEC indicates the value obtained by subtracting the potential of the wiring PL from the potential of the node N.

[0087] 3B1 and 3B2 are circuit diagrams showing an example of a method for driving the semiconductor device 10. In Fig. 3B1 and Fig. 3B2, "H" indicates a high potential, and "L" indicates a low potential. Similar notations are used in other drawings showing methods for driving the memory cell MC, etc.

[0088] 3B1 and 3B2, transistors that are in an off state are indicated by a cross mark, and the voltage applied to the dielectric of the capacitor FEC is indicated by a dashed line for emphasis.

[0089] 3B1 shows an example of writing binary data with a value of "0" to a memory cell MC, and FIG. 3B2 shows an example of writing binary data with a value of "1" to a memory cell MC. Here, the period during which the operation shown in FIG. 3B1 or FIG. 3B2 is performed can be referred to as a write period.

[0090] 3B1 and 3B2, in the write period, the potential of the wiring WWL is set to high and the potential of the wiring RWL is set to low, which turns on the transistor M1 and turns off the transistor M3.

[0091] When binary data with a value of "0" is written to the memory cell MC, the potential of the wiring BL is set to GND and the potential of the wiring PL is set to Vw, as shown in FIG. 3B1. GND can be, for example, a ground potential. Vw is preferably set to VSP or higher. Note that GND does not necessarily have to be set to the ground potential as long as the semiconductor device 10 can be driven in a manner that satisfies the purpose of one embodiment of the present invention.

[0092] In the following description, Vw is a potential higher than VSP, and GND is a ground potential. In addition, the potentials supplied to the wirings BL and PL will be described as Vw being a high potential and GND being a low potential.

[0093] In the example shown in FIG. 3B1, a voltage −Vw is applied to the dielectric of the capacitor FEC. This biases positive charges toward one electrode side (node ​​N side) of the capacitor FEC, and negative charges toward the other electrode side (wiring PL side) of the capacitor FEC. This allows binary data with a value of “0” to be written to the memory cell MC. Furthermore, as the voltage applied to the dielectric of the capacitor FEC increases, the polarization of the dielectric increases along curve 11 when the voltage across the dielectric is less than VSP.

[0094] When binary data with a value of "1" is written to the memory cell MC, as shown in FIG. 3B2, the potential of the wiring BL is set to Vw, and the potential of the wiring PL is set to GND. This applies a voltage Vw to the dielectric of the capacitor FEC. Therefore, negative charges are biased toward one electrode side (node ​​N side) of the capacitor FEC, and positive charges are biased toward the other electrode side (wiring PL side) of the capacitor FEC. This allows binary data with a value of "1" to be written to the memory cell MC. Furthermore, when the voltage applied to the dielectric of the capacitor FEC is reduced and the voltage of the dielectric is higher than -VSP, the polarization of the dielectric decreases along curve 12.

[0095] It is also possible to write binary data with a value of "1" to the memory cell MC by performing the operation shown in Figure 3B1, and write binary data with a value of "0" to the memory cell MC by performing the operation shown in Figure 3B2.

[0096] 4A and 4B are timing charts showing a method for driving the semiconductor device 10. FIG. 4A shows an example of reading and writing back binary data from and to the memory cell MC in a state where binary data with a value of "0" is written and held in the memory cell MC. FIG. 4B shows an example of reading and writing back binary data from and to the memory cell MC in a state where binary data with a value of "1" is written and held in the memory cell MC. Note that in the timing charts shown in FIGS. 4A and 4B, the transistors M1 to M3 are all n-channel transistors.

[0097] First, a case where binary data with a value of "0" is stored in the memory cell MC will be described. In this case, as shown in FIG. 4A, the potential of the wiring WWL is set to low from time T10 to time T11. This turns off the transistor M1. Furthermore, the potential of the wiring RWL is set to low. This turns off the transistor M3. Furthermore, the potential of the wiring PL is set to GND.

[0098] The potential of the wiring ENL is set to a low potential, which deactivates the sense amplifier circuit SA. Note that the potential of the node N is set to GND.

[0099] In this state, the potential of the wiring PREL is set to a high potential. This causes the wiring BL and the wiring REFL to be precharged. Therefore, the potential of the wiring BL becomes, for example, Vw, which is higher than the potential of the wiring SL. Also, the potential of the wiring REFL becomes a potential between GND and Vw.

[0100] Between time T11 and time T12, the potential of the wiring RWL is set to high, which turns on the transistor M3. Also, the potential of the wiring PREL is set to low, which ends the precharging of the wiring BL and the wiring REFL.

[0101] Between time T12 and time T13, the potential of the wiring PL is set to Vw. The potential of the node N rises due to capacitive coupling by the capacitor FEC or the like. Here, the capacitive coupling coefficient of the node N is less than 1, and the potential of the node N before time T12 is GND, so the potential of the node N after the potential rise is lower than Vw. Note that even if the potential of the node N rises, no polarization reversal occurs in the dielectric of the capacitor FEC. In other words, the value obtained by subtracting the potential of the wiring PL from the potential of the node N is set to Vc or less.

[0102] In this specification and the like, causing polarization inversion in the dielectric of a ferroelectric capacitor such as a capacitor FEC may be referred to as causing polarization inversion in the ferroelectric capacitor.

[0103] Note that the potential of the wiring PL may be Vw from time T11 to time T12, and the potential of the wiring RWL may be high from time T12 to time T13. Alternatively, the potential of the wiring PREL may be kept high from time T11 to time T12, and may be low from time T12 to time T13.

[0104] From the above, it can be said that the transistor M3 is turned on from time T11 to time T13, and the potential of the node N increases. Because the potential of the wiring BL is precharged to be higher than the potential of the wiring SL, the potential of the wiring BL decreases according to the potential of the node N electrically connected to the gate of the transistor M2. This means that the data "0" stored in the memory cell MC is read from the memory cell MC.

[0105] Between time T13 and time T14, the potential of the wiring ENL is set to a high potential. This activates the sense amplifier circuit SA, amplifying the difference between the potential of the wiring BL and the potential of the wiring REFL. If the potential of the wiring BL is higher than the potential of the wiring REFL when the wiring ENL becomes a high potential, the potential of the wiring BL becomes Vw, which is a high potential, and the potential of the wiring REFL becomes GND, which is a low potential. This allows the data "0" read from the memory cell MC to be output from the sense amplifier circuit SA.

[0106] As described above, the semiconductor device 10 performs the operations from time T10 to time T14, thereby reading out the data stored in the memory cell MC and outputting it from the wiring OUT. Therefore, the period from time T10 to time T14 can be referred to as a read period. Furthermore, the period from time T11 to time T14, excluding time T10 to time T11, which is the period during which the wiring BL is precharged, can be referred to as a read period.

[0107] From time T14 to time T15, the potential of the wiring WWL is set to high, which turns on the transistor M1. The potential of the wiring RWL is set to low, which turns off the transistor M3. With the transistor M1 turned on, the potential of the node N becomes Vw, which is the potential of the wiring BL.

[0108] Between time T14 and time T15, the potential of the node N and the potential of the wiring PL both become Vw. Therefore, the voltage applied to the dielectric of the capacitor FEC becomes 0 V. As shown in FIG. 3A and other figures, even if the voltage applied to the dielectric of the capacitor FEC becomes 0 V, no polarization reversal occurs in the dielectric.

[0109] Between time T15 and time T16, the potential of the wiring PL is set to GND. As a result, the voltage applied to the dielectric of the capacitor FEC becomes Vw. Therefore, polarization reversal occurs in the dielectric, and data with a value of "1" is written to the memory cell MC. In other words, binary data obtained by inverting the value of the binary data read from the memory cell MC between time T10 and time T14 is written back to the memory cell MC.

[0110] From time T16 to time T17, the potential of the wiring ENL is set to low. This deactivates the sense amplifier circuit SA. The potential of the wiring BL is set to GND. Because the transistor M1 is on, the potential of the node N is GND.

[0111] At time T17, the potential of the wiring WWL is set to low, which turns off the transistor M1.

[0112] As described above, the semiconductor device 10 performs the operations from time T14 to time T17, thereby writing data back to the memory cells MC. Therefore, the period from time T14 to time T17 can be called a write-back period. Furthermore, within the period from time T14 to time T17, the period from time T14 to time T16, during which the sense amplifier circuit SA is in an activated state, can be called a write-back period.

[0113] Next, a case where binary data with a value of "1" is stored in the memory cell MC will be described. In this case, as shown in FIG. 4B, the potential of the wiring WWL is set to low from time T20 to time T21. This turns off the transistor M1. Furthermore, the potential of the wiring RWL is set to low. This turns off the transistor M3. Furthermore, the potential of the wiring PL is set to GND.

[0114] The potential of the wiring ENL is set to a low potential, which deactivates the sense amplifier circuit SA. Note that the potential of the node N is set to GND.

[0115] In this state, the potential of the wiring PREL is set to a high potential. This causes the wiring BL and the wiring REFL to be precharged. Therefore, the potential of the wiring BL becomes, for example, Vw, which is higher than the potential of the wiring SL. Also, the potential of the wiring REFL becomes a potential between GND and Vw.

[0116] Between time T21 and time T22, the potential of the wiring RWL is set to high, which turns on the transistor M3. The potential of the wiring PREL is set to low, which ends the precharging of the wiring BL and the wiring REFL.

[0117] From time T22 to time T23, the potential of the wiring PL is set to Vw. The potential of the node N rises due to capacitive coupling by the capacitor FEC and the like. Here, since the memory cell MC holds data of “1,” negative charges are biased toward one electrode of the capacitor FEC (the node N side) as shown in FIG. 3B2. Therefore, the capacitive coupling coefficient of the node N is larger than when the memory cell MC holds data of “0.” Therefore, the increase in the potential of the node N from time T22 to time T23 is larger than the increase in the potential of the node N from time T12 to time T13 shown in FIG. 4A. Note that the capacitive coupling coefficient of the node N is less than 1, and the potential of the node N before time T22 is GND. Therefore, the potential of the node N after the potential rise is lower than Vw. Furthermore, even if the potential of the node N rises, no polarization reversal occurs in the dielectric of the capacitor FEC. In other words, the value obtained by subtracting the potential of the wiring PL from the potential of the node N is assumed to be greater than −Vc.

[0118] Note that the potential of the wiring PL may be Vw from time T21 to time T22, and the potential of the wiring RWL may be high from time T22 to time T23. Alternatively, the potential of the wiring PREL may be kept high from time T21 to time T22, and may be low from time T22 to time T23.

[0119] From the above, it can be said that the transistor M3 is on and the potential of the node N increases from time T21 to time T23. Because the potential of the wiring BL is precharged to be higher than the potential of the wiring SL, the potential of the wiring BL decreases according to the potential of the node N electrically connected to the gate of the transistor M2. Specifically, the decrease in the potential of the wiring BL from time T22 to time T23 is larger than the decrease in the potential of the wiring BL from time T12 to time T13 shown in FIG. 4A. Therefore, for example, the potential of the wiring BL at time T23 is lower than the potential of the wiring BL at time T13. This indicates that the data "1" stored in the memory cell MC has been read from the memory cell MC.

[0120] Between time T23 and time T24, the potential of the wiring ENL is set to a high potential. This activates the sense amplifier circuit SA, amplifying the difference between the potential of the wiring BL and the potential of the wiring REFL. If the potential of the wiring BL is lower than the potential of the wiring REFL when the wiring ENL becomes a high potential, the potential of the wiring BL becomes a low potential, GND, and the potential of the wiring REFL becomes a high potential, Vw. This allows the data "1" read from the memory cell MC to be output from the sense amplifier circuit SA.

[0121] As described above, the semiconductor device 10 performs the operations from time T20 to time T24, thereby reading out the data stored in the memory cell MC and outputting it from the wiring OUT. Therefore, the period from time T20 to time T24 can be referred to as a read period. Furthermore, the period from time T21 to time T24, excluding time T20 to time T21, which is the period during which the wiring BL is precharged, can be referred to as a read period.

[0122] Between time T22 and time T23, the potential of the node N may rise after the potential of the wiring PL rises. In this case, a large voltage (a large voltage in the negative direction) is instantaneously applied to the dielectric of the capacitor FEC. This may cause polarization reversal in the dielectric, destroying the data stored in the memory cell MC.

[0123] From time T24 to time T25, the potential of the wiring WWL is set to high, which turns on the transistor M1. The potential of the wiring RWL is set to low, which turns off the transistor M3. With the transistor M1 turned on, the potential of the node N becomes GND, which is the potential of the wiring BL.

[0124] Between time T24 and time T25, the potential of the node N becomes GND. Meanwhile, the potential of the wiring PL remains at Vw. Therefore, the voltage applied to the dielectric of the capacitor FEC becomes −Vw. Therefore, polarization reversal occurs in the dielectric, and data with a value of “0” is written to the memory cell MC. That is, binary data obtained by inverting the binary data read from the memory cell MC between time T20 and time T24 is written back to the memory cell MC. Note that if the data held in the memory cell MC is destroyed between time T22 and time T23, polarization reversal does not occur in the dielectric of the capacitor FEC between time T24 and time T25.

[0125] Between time T25 and time T26, the potential of the wiring PL becomes GND. As a result, the potential of the node N and the potential of the wiring PL both become GND. Therefore, the voltage applied to the dielectric of the capacitor FEC becomes 0 V. As shown in FIG. 3A etc., even if the voltage applied to the dielectric of the capacitor FEC becomes 0 V, polarization inversion does not occur in the dielectric.

[0126] Between time T26 and time T27, the potential of the wiring ENL is set to low, which deactivates the sense amplifier circuit SA.

[0127] At time T27, the potential of the wiring WWL is set to low, which turns off the transistor M1.

[0128] As described above, the semiconductor device 10 performs the operations from time T24 to time T27, thereby writing data back to the memory cells MC. Therefore, the period from time T24 to time T27 can be called a write-back period. Furthermore, of the periods from time T24 to time T27, the period from time T24 to time T26, during which the sense amplifier circuit SA is in an activated state, can be called a write-back period.

[0129] As described above, regardless of whether the value of the binary data stored in the memory cell MC is "0" or "1," a total of one polarization reversal occurs in the dielectric of the capacitance FEC throughout one read period and one write-back period.

[0130] Here, consider the case where the memory cell MC has the configuration shown in Fig. 5A. The memory cell MC shown in Fig. 5A has a configuration in which the transistors M2 and M3 are omitted from the memory cell MC shown in Fig. 2A. In the memory cell MC shown in Fig. 5A, a wiring WL is electrically connected to the gate of the transistor M1.

[0131] 5B1 and 5B2 are timing charts showing a method of driving the semiconductor device 10 when the memory cell MC has the configuration shown in FIG. 5A. Fig. 5B1 shows an example of reading and writing back binary data from the memory cell MC when binary data with a value of "0" has been written and held in the memory cell MC. Fig. 5B2 shows an example of reading and writing back binary data from the memory cell MC when binary data with a value of "1" has been written and held in the memory cell MC.

[0132] In the example shown in FIG. 5B1, data stored in the memory cell MC is read from time T30 to time T33. That is, the period from time T30 to time T33 is a read period. Furthermore, data is written back to the memory cell MC from time T33 to time T35. That is, the period from time T33 to time T35 is a write-back period. Since binary data with a value of "0" is stored before time T30, positive charges are biased toward one electrode side (node ​​N side) of the capacitor FEC, and negative charges are biased toward the other electrode side (wiring PL side) of the capacitor FEC. In this case, no polarization reversal occurs in the dielectric of the capacitor FEC from time T30 to time T35. That is, when the value of the binary data stored in the memory cell MC is "0," no polarization reversal occurs in the dielectric of the capacitor FEC throughout the read period and the write-back period.

[0133] In the example shown in FIG. 5B2, data stored in the memory cell MC is read from time T40 to time T43. That is, the period from time T40 to time T43 is a read period. Furthermore, data is written back to the memory cell MC from time T43 to time T45. That is, the period from time T43 to time T45 is a write-back period. Since binary data with a value of "1" is stored before time T30, negative charges are biased toward one electrode side (node ​​N side) of the capacitor FEC, and positive charges are biased toward the other electrode side (wiring PL side) of the capacitor FEC. In this case, polarization reversal occurs in the dielectric of the capacitor FEC from time T41 to time T42 and from time T43 to time T44. That is, when the value of the binary data stored in the memory cell MC is "1," polarization reversal occurs in the dielectric of the capacitor FEC a total of two times throughout one read period and one write-back period.

[0134] As a result, polarization reversals occur many times in the dielectric of the capacitor FEC of a memory cell MC that often stores data of "1." This makes the dielectric more susceptible to fatigue degradation. Therefore, when the memory cell MC of the semiconductor device 10 has the configuration shown in FIG. 5A, the reliability of the semiconductor device 10 may be reduced. On the other hand, when the memory cell MC of the semiconductor device 10 has the configuration shown in FIG. 2A, even if the data value stored in the memory cell MC is "1," the number of polarization reversals that occurs in the dielectric of the capacitor FEC over one read period and one write-back period is one. As a result, by configuring the memory cell MC as shown in FIG. 2A, for example, the reliability of the semiconductor device 10 can be improved compared to when the memory cell MC has the configuration shown in FIG. 5A.

[0135] 4A and 4B, the value of the data held in the memory cell MC is inverted each time data is written back to the memory cell MC. However, it is preferable that the value of the data output from the wiring OUT does not change even when data is written back. To prevent the value of the data output from the wiring OUT from changing even when data is written back, a logic operation circuit LC is provided between the sense amplifier circuit SA and the wiring OUT.

[0136] Specifically, the logic operation circuit LC performs a logical operation on data read from memory cells MC[i,1] to MC[i,n] (where i is an integer between 1 and m) and data read from memory cell MC[i,n+1]. The logical operation can be an exclusive OR. The operation result is output from the wiring OUT. Specifically, data representing the exclusive OR of the data read from memory cell MC[i,1] and the data read from memory cell MC[i,n+1] is output from the wiring OUT[1]. Furthermore, data representing the exclusive OR of the data read from memory cell MC[i,n] and the data read from memory cell MC[i,n+1] is output from the wiring OUT[n]. As a result, for example, if data of value "0" is stored in memory cell MC[i,n+1], data of the same value as the data stored in memory cell MC[i,1] to memory cell MC[i,n] is output from the wirings OUT[1] to OUT[n], respectively. On the other hand, for example, when data of a value "1" is stored in the memory cell MC[i,n+1], data whose value is the inversion of the data stored in the memory cells MC[i,1] to MC[i,n] is output from the wirings OUT[1] to OUT[n], respectively. For example, when data is written back to the memory cells MC in the i-th row, the values ​​of the data stored in all of the memory cells MC[i,1] to MC[i,n+1] are inverted. As described above, even if the value of the data stored in the memory cells MC is inverted by writing back data to the memory cells MC, data of a desired value can continue to be output from the wiring OUT during the read period.

[0137] From the above, the data held in the memory cells MC of the n+1th column can be data indicating whether or not to invert the values ​​of the data read from the memory cells MC of the 1st to nth columns. Therefore, the memory cells MC of the n+1th column can be called reference memory cells. Furthermore, the data held in the memory cells MC of the n+1th column can be called reference data. Since the data held in the memory cells MC can be binary data, the data held in the memory cells MC of the n+1th column can be called reference binary data.

[0138] Table 1 shows an example of a method for driving the semiconductor device 10. Table 1 shows an example in which the semiconductor device 10 is driven in the driving modes indicated by steps S1 to S8. Table 1 shows the values ​​of data held in memory cell MC[i,j1], memory cell [i,j2] (j1, j2 are integers between 1 and n), and memory cell MC[i,n+1], and the values ​​of data output from wiring OUT[j1] and wiring OUT[j2] after the operation of each step is performed.

[0139] [Table 1]

[0140] First, in step S1, data with a value of "0" is written to, for example, all memory cells MC. That is, for example, the operation shown in Fig. 3B1 is performed on all memory cells MC. This initializes the data held in the memory cells MC.

[0141] Next, in step S2, desired data is written to the memory cells MC in the 1st to nth columns. Specifically, the memory cells MC to which data with a value of "0" is written perform the operation shown in FIG. 3B1, and the memory cells MC to which data with a value of "1" is written perform the operation shown in FIG. 3B2. In Table 1, data with a value of "0" is written to the memory cell MC[i,j1], and data with a value of "1" is written to the memory cell MC[i,j2]. Also, in step S2, data with a value of "0" is written to the memory cell MC in the n+1th column.

[0142] Then, in step S3, the data stored in the memory cells MC is read and then written back. Specifically, the memory cells MC storing data with a value of "0" perform the operation shown in Fig. 4A, and the memory cells MC storing data with a value of "1" perform the operation shown in Fig. 4B.

[0143] At the start of step S3 (the end of step S2), data with a value of "0" is held in the memory cells MC in the n+1th column. Therefore, the data held in the memory cells MC in the 1st to nth columns at the start of step S3 (the end of step S2) is output as is from the wiring OUT[1] to wiring OUT[n]. As described above, at the start of step S3 (the end of step S2), the value of the data held in the memory cells MC[i,j1] is "0", and the value of the data held in the memory cells MC[i,j2] is "1". From the above, when reading data held in the memory cells MC in the i-th row, data with a value of "0" is output from the wiring OUT[j1], and data with a value of "1" is output from the wiring OUT[j2].

[0144] Furthermore, by writing the data back to the memory cell MC, the data held in the memory cell MC is inverted. Therefore, as shown in Table 1, at the end of step S3, the value of the data held in the memory cell MC[i,j1] is “1” and the value of the data held in the memory cell MC[i,j2] is “0.”

[0145] In step S4, similarly to step S3, the data held in the memory cells MC is read out and then written back.

[0146] At the start of step S4 (the end of step S3), data with a value of "1" is held in the memory cells MC in the n+1-th column. Therefore, data with a value obtained by inverting the data held in the memory cells MC in the 1st to nth columns at the start of step S4 (the end of step S3) is output from the wirings OUT[1] to OUT[n]. As described above, at the start of step S4 (the end of step S3), the value of the data held in the memory cells MC[i,j1] is "1," and the value of the data held in the memory cells MC[i,j2] is "0." As described above, when reading data held in the memory cells MC in the i-th row, data with a value of "0" is output from the wiring OUT[j1], and data with a value of "1" is output from the wiring OUT[j2]. In other words, data with the same value as the data output from the wiring OUT in step S3 is also output from the wiring OUT in step S4.

[0147] In step S5, the data stored in the memory cell MC is read and then written back, similar to step S3, etc. As a result, similar to step S3, data with a value of "0" is output from the wire OUT[j1] and data with a value of "1" is output from the wire OUT[j2].

[0148] Next, in step S6, desired data is written to the memory cells MC in the first to n-th columns. Specifically, similar to step S2, the memory cells MC to which data with a value of "0" is written perform the operation shown in Fig. 3B1, and the memory cells MC to which data with a value of "1" is written perform the operation shown in Fig. 3B2. This allows the data held in the memory cells MC in the first to n-th columns to be updated.

[0149] In Table 1, data with a value of "0" is written to memory cell MC[i,j1], and data with a value of "1" is written to memory cell MC[i,j2]. Furthermore, in step S6, data is not written to the memory cell MC in the n+1th column. In the example shown in Table 1, at the end of step S5, data with a value of "1" is held in the memory cell MC in the n+1th column. Therefore, at the end of step S6, data with a value of "1" continues to be held in the memory cell MC in the n+1th column.

[0150] In step S6, data with a value of "0" may be written to the memory cells in the n+1th column regardless of the value of the data held in the memory cells MC in the n+1th column.

[0151] Next, in step S7, similarly to step S3 and the like, the data held in the memory cells MC is read out, and then the data is written back.

[0152] At the start of step S7 (the end of step S6), data with a value of "1" is held in the memory cells MC in the n+1-th column. Therefore, data with a value obtained by inverting the data held in the memory cells MC in the 1st to nth columns at the start of step S7 (the end of step S6) is output from the wiring OUT[1] to wiring OUT[n]. As described above, at the start of step S7 (the end of step S6), the value of the data held in the memory cells MC[i,j1] is "0", and the value of the data held in the memory cells MC[i,j2] is "1". As described above, when reading data held in the memory cells MC in the i-th row, data with a value of "1" is output from the wiring OUT[j1], and data with a value of "0" is output from the wiring OUT[j2].

[0153] In step S8, as in step S7, the data held in the memory cell MC is read and then written back, so that, as in step S7, data with a value of "1" is output from the wire OUT[j1] and data with a value of "0" is output from the wire OUT[j2].

[0154] As described above, in the method for driving a semiconductor device of one embodiment of the present invention, even if the value of the data held in the memory cell MC is inverted by writing back the data to the memory cell MC, data of a desired value can be continuously output from the wiring OUT during the read period.

[0155] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like.

[0156] (Embodiment 2) In this embodiment, a structural example of the semiconductor device described in the above embodiment and a structural example of a transistor that can be applied to the semiconductor device described in the above embodiment will be described.

[0157] <Configuration Example 1 of Semiconductor Device> 6 shows, as an example, the semiconductor device described in the above embodiment, which includes a transistor 300, a transistor 500, and a capacitor 600. Fig. 7A shows a cross-sectional view of the transistor 500 in the channel length direction, Fig. 7B shows a cross-sectional view of the transistor 500 in the channel width direction, and Fig. 7C shows a cross-sectional view of the transistor 300 in the channel width direction.

[0158] The transistor 500 is a transistor (OS transistor) having a metal oxide in a channel formation region. The transistor 500 has a small off-state current and a field-effect mobility that is not easily changed even at high temperatures. By applying the transistor 500 to a semiconductor device, such as the transistor M1 included in the memory cell MC illustrated in FIG. 2A or the like described in the above embodiment, a semiconductor device whose operating capability is not easily degraded even at high temperatures can be realized.

[0159] The transistor 500 is provided, for example, above the transistor 300, and the capacitor 600 is provided, for example, above the transistor 300 and the transistor 500. Note that the capacitor 600 can be the capacitor FEC or the like shown in FIG. 2A or the like, which is described in the above embodiment.

[0160] The transistor 300 is provided over a substrate 310 and includes an element isolation layer 312, a conductor 316, an insulator 315, a semiconductor region 313 formed of part of the substrate 310, and low-resistance regions 314a and 314b functioning as source and drain regions. Note that the transistor 300 can be applied to, for example, the transistor M2 described in the above embodiment and illustrated in FIG. 2A and the like.

[0161] The substrate 310 is preferably a semiconductor substrate (for example, a single crystal substrate or a silicon substrate).

[0162] 7C , the transistor 300 has an upper surface and a side surface in the channel width direction of a semiconductor region 313 covered with a conductor 316 via an insulator 315. By forming the transistor 300 as a fin type in this way, the effective channel width is increased, thereby improving the on-state characteristics of the transistor 300. Furthermore, the contribution of the electric field of the gate electrode can be increased, thereby improving the off-state characteristics of the transistor 300.

[0163] The transistor 300 may be either a p-channel type or an n-channel type.

[0164] The region where the channel of the semiconductor region 313 is formed, the region nearby, the low-resistance region 314a that serves as the source region or the drain region, and the low-resistance region 314b preferably contain a semiconductor such as a silicon-based semiconductor, and preferably contain single-crystal silicon. Alternatively, they may be formed of a material containing Ge (germanium), SiGe (silicon germanium), GaAs (gallium arsenide), GaAlAs (gallium aluminum arsenide), GaN (gallium nitride), or the like. A configuration using silicon in which the effective mass is controlled by applying stress to the crystal lattice and changing the lattice spacing may also be used. Alternatively, the transistor 300 may be a HEMT (High Electron Mobility Transistor) by using GaAs and GaAlAs, or the like.

[0165] The low resistance region 314a and the low resistance region 314b contain, in addition to the semiconductor material applied to the semiconductor region 313, an element that imparts n-type conductivity, such as arsenic or phosphorus, or an element that imparts p-type conductivity, such as boron.

[0166] The conductor 316 functioning as the gate electrode can be made of a conductive material such as a semiconductor material such as silicon containing an element that imparts n-type conductivity such as arsenic or phosphorus, or an element that imparts p-type conductivity such as boron, a metal material, an alloy material, or a metal oxide material.

[0167] Since the work function is determined by the material of the conductor, the threshold voltage of the transistor can be adjusted by selecting the material of the conductor. Specifically, it is preferable to use a material such as titanium nitride or tantalum nitride as the conductor. Furthermore, in order to achieve both conductivity and embeddability, it is preferable to use a metal material such as tungsten or aluminum as the conductor in a stacked structure, and tungsten is particularly preferable in terms of heat resistance.

[0168] The element isolation layer 312 is provided to isolate a plurality of transistors formed on the substrate 310. The element isolation layer can be formed by, for example, a LOCOS (LOCal Oxidation of Silicon) method, an STI (Shallow Trench Isolation) method, a mesa isolation method, or the like.

[0169] The transistor 300 shown in FIG. 6 is just an example, and the structure is not limited thereto. An appropriate transistor may be used depending on the circuit configuration, driving method, and the like. For example, the transistor 300 may have a planar structure instead of the FIN structure shown in FIG. 7C. For example, when the semiconductor device is a unipolar circuit including only OS transistors, the structure of the transistor 300 may be the same as that of the transistor 500 including an oxide semiconductor, as shown in FIG. 8. The details of the transistor 500 will be described later. In this specification and the like, a unipolar circuit refers to a circuit including transistors of only one polarity, that is, an n-channel transistor or a p-channel transistor.

[0170] In FIG. 8 , the transistor 300 is provided on a substrate 310A. In this case, the substrate 310A may be a semiconductor substrate similar to the substrate 310 of the semiconductor device in FIG. 6 . Examples of the substrate 310A include an SOI substrate, a glass substrate, a quartz substrate, a plastic substrate, a sapphire glass substrate, a metal substrate, a stainless steel substrate, a substrate with stainless steel foil, a tungsten substrate, a substrate with tungsten foil, a flexible substrate, a laminated film, paper containing a fibrous material, and a base film. Examples of glass substrates include barium borosilicate glass, aluminoborosilicate glass, and soda-lime glass. Examples of flexible substrates, laminated films, and base films include the following: Plastics such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polytetrafluoroethylene (PTFE). Other examples include synthetic resins such as acrylic. Other examples include polypropylene, polyester, polyvinyl fluoride, polyvinyl chloride, etc. Other examples include polyamide, polyimide, aramid, epoxy resin, inorganic vapor deposition film, paper, etc.

[0171] In the transistor 300 shown in FIG. 6, an insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order from the substrate 310 side.

[0172] The insulators 320, 322, 324, and 326 can be formed using, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, or the like.

[0173] In this specification, silicon oxynitride refers to a material whose composition contains more oxygen than nitrogen, silicon nitride oxide refers to a material whose composition contains more nitrogen than oxygen, aluminum oxynitride refers to a material whose composition contains more oxygen than nitrogen, and aluminum nitride oxide refers to a material whose composition contains more nitrogen than oxygen.

[0174] The insulator 322 may function as a planarizing film that flattens steps caused by the insulator 320 and the transistor 300 covered by the insulator 322. For example, the top surface of the insulator 322 may be planarized by planarization treatment using a chemical mechanical polishing (CMP) method or the like to improve flatness.

[0175] The insulator 324 is preferably a film having a barrier property that prevents hydrogen, impurities, and the like from diffusing from the substrate 310 or the transistor 300 to a region where the transistor 500 is provided.

[0176] An example of a film having a barrier property against hydrogen is silicon nitride formed by a CVD method. Here, hydrogen diffusion into a semiconductor element having an oxide semiconductor, such as the transistor 500, may degrade the characteristics of the semiconductor element. Therefore, it is preferable to use a film that suppresses hydrogen diffusion between the transistor 500 and the transistor 300. Specifically, the film that suppresses hydrogen diffusion is a film that releases a small amount of hydrogen.

[0177] The amount of desorbed hydrogen can be analyzed using, for example, thermal desorption spectroscopy (TDS) etc. For example, the amount of desorbed hydrogen from the insulator 324 is calculated by TDS analysis as follows: when the surface temperature of the film is in the range of 50°C to 500°C, the amount of desorbed hydrogen converted into hydrogen atoms is 10 x 10 per area of ​​the insulator 324. 15 atoms / cm 2 Less than or equal to 5 x 10 15 atoms / cm2 The following is fine.

[0178] It is preferable that the insulator 326 has a lower dielectric constant than the insulator 324. For example, the relative dielectric constant of the insulator 326 is preferably less than 4, and more preferably less than 3. Furthermore, for example, the relative dielectric constant of the insulator 326 is preferably 0.7 times or less, and more preferably 0.6 times or less, the relative dielectric constant of the insulator 324. By using a material with a low dielectric constant as the interlayer film, the parasitic capacitance that occurs between wirings can be reduced.

[0179] Furthermore, the insulators 320, 322, 324, and 326 are embedded with the capacitor 600 or the conductors 328 and 330 connected to the transistor 500. The conductors 328 and 330 function as plugs or wiring. Furthermore, for conductors that function as plugs or wiring, the same reference numeral may be used to denote multiple structures. Furthermore, in this specification and the like, the wiring and the plug connected to the wiring may be integrated. That is, there are cases where a part of the conductor functions as the wiring, and cases where a part of the conductor functions as the plug.

[0180] The materials for each plug and wiring (conductor 328, conductor 330, etc.) can be a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material, and can be used in a single layer or a stacked layer. It is preferable to use a high-melting-point material such as tungsten or molybdenum that has both heat resistance and conductivity, and tungsten is preferred. Alternatively, it is preferable to form the wiring from a low-resistance conductive material such as aluminum or copper. Using a low-resistance conductive material can reduce the wiring resistance.

[0181] A wiring layer may be provided over the insulator 326 and the conductor 330. For example, in FIG. 6 , the insulator 350, the insulator 352, and the insulator 354 are stacked in this order over the insulator 326 and the conductor 330. The conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or wiring connected to the transistor 300. Note that the conductor 356 can be formed using a material similar to that of the conductor 328 and the conductor 330.

[0182] Note that, for example, the insulator 350 is preferably an insulator having barrier properties against impurities such as hydrogen and water, similar to the insulator 324. Similarly to the insulator 326, the insulators 352 and 354 are preferably made of an insulator having a relatively low dielectric constant in order to reduce parasitic capacitance between wirings. The conductor 356 preferably includes a conductor having barrier properties against impurities such as hydrogen and water. In particular, a conductor having barrier properties against hydrogen is formed in the opening of the insulator 350 having barrier properties against hydrogen. With this structure, the transistor 300 and the transistor 500 can be separated by a barrier layer, thereby suppressing diffusion of hydrogen from the transistor 300 to the transistor 500.

[0183] Note that, for example, tantalum nitride or the like is preferably used as the conductor having a barrier property against hydrogen. Stacking tantalum nitride and highly conductive tungsten can suppress diffusion of hydrogen from the transistor 300 while maintaining the conductivity of the wiring. In this case, a structure in which the tantalum nitride layer having a barrier property against hydrogen is in contact with the insulator 350 having a barrier property against hydrogen is preferable.

[0184] In addition, an insulator 360, an insulator 362, and an insulator 364 are stacked in this order on the insulator 354 and the conductor 356.

[0185] The insulator 360 is preferably an insulator having barrier properties against impurities such as water and hydrogen, similar to the insulator 324. Therefore, the insulator 360 can be made of, for example, a material that can be used for the insulator 324.

[0186] The insulators 362 and 364 function as an interlayer insulating film and a planarizing film. As the insulators 362 and 364, it is preferable to use an insulator that has a barrier property against impurities such as water and hydrogen, similar to the insulator 324. Therefore, the insulator 362 and / or the insulator 364 can be made of a material that can be used for the insulator 324.

[0187] Openings are formed in the insulators 360, 362, and 364 in regions that overlap with part of the conductor 356, and the conductor 366 is provided to fill the openings. The conductor 366 is also formed over the insulator 362. For example, the conductor 366 functions as a plug or a wiring connected to the transistor 300. Note that the conductor 366 can be formed using a material similar to that of the conductors 328 and 330.

[0188] An insulator 510, an insulator 512, an insulator 514, and an insulator 516 are stacked in this order over the insulator 364 and the conductor 366. Any of the insulator 510, the insulator 512, the insulator 514, and the insulator 516 is preferably made using a substance that has a barrier property against oxygen and hydrogen.

[0189] For example, the insulator 510 and the insulator 514 are preferably films having barrier properties that prevent hydrogen and impurities from diffusing from the substrate 310 or a region where the transistor 300 is provided to the region where the transistor 500 is provided. Therefore, a material similar to that of the insulator 324 can be used.

[0190] An example of a film having a barrier property against hydrogen is silicon nitride formed by a CVD method. Here, hydrogen diffusion into a semiconductor element having an oxide semiconductor, such as the transistor 500, may degrade the characteristics of the semiconductor element. Therefore, it is preferable to use a film that suppresses hydrogen diffusion between the transistor 500 and the transistor 300. Specifically, the film that suppresses hydrogen diffusion is a film that releases a small amount of hydrogen.

[0191] As a film having a barrier property against hydrogen, for example, the insulators 510 and 514 are preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0192] In particular, aluminum oxide has a high blocking effect of preventing the permeation of both oxygen and impurities such as hydrogen and moisture, which can cause fluctuations in the electrical characteristics of a transistor. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the transistor manufacturing process. Furthermore, aluminum oxide can suppress the release of oxygen from the oxide that constitutes the transistor 500. Therefore, aluminum oxide is suitable for use as a protective film for the transistor 500.

[0193] For example, the insulator 512 and the insulator 516 can be formed using a material similar to that of the insulator 320. By using a material with a relatively low dielectric constant for these insulators, parasitic capacitance between wirings can be reduced. For example, the insulators 512 and 516 can be formed using a silicon oxide film, a silicon oxynitride film, or the like.

[0194] A conductor 518 and conductors constituting the transistor 500 (for example, the conductor 503 shown in FIGS. 7A and 7B ) are embedded in the insulators 510, 512, 514, and 516. The conductor 518 functions as a capacitor 600 or a plug or wiring connected to the transistor 300. The conductor 518 can be formed using a material similar to that of the conductors 328 and 330.

[0195] In particular, the conductor 518 in the region in contact with the insulator 510 and the insulator 514 is preferably a conductor that has a barrier property against oxygen, hydrogen, and water. With this structure, the transistor 300 and the transistor 500 can be separated by a layer that has a barrier property against oxygen, hydrogen, and water, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0196] Above the insulator 516 is the transistor 500 .

[0197] As shown in FIGS. 7A and 7B , the transistor 500 includes an insulator 516 on an insulator 514, a conductor 503 (conductor 503a and conductor 503b) disposed so as to be embedded in the insulator 514 or the insulator 516, an insulator 522 on the insulator 516 and on the conductor 503, an insulator 524 on the insulator 522, an oxide 530a on the insulator 524, an oxide 530b on the oxide 530a, a conductor 542a on the oxide 530b, an insulator 571a on the conductor 542a, and an oxide 572a on the insulator 572b. 30b, conductor 542b on oxide 530b, insulator 571b on conductor 542b, insulator 552 on oxide 530b, insulator 550 on insulator 552, insulator 554 on insulator 550, conductor 560 (conductor 560a and conductor 560b) located on insulator 554 and overlapping with part of oxide 530b, and insulator 544 arranged on insulator 522, insulator 524, oxide 530a, oxide 530b, conductor 542a, conductor 542b, insulator 571a, and insulator 571b. 7A and 7B , insulator 552 contacts the upper surface of insulator 522, the side surface of insulator 524, the side surface of oxide 530a, the side surface and upper surface of oxide 530b, the side surface of conductor 542, the side surface of insulator 571, the side surface of insulator 544, the side surface of insulator 580, and the lower surface of insulator 550. The upper surface of conductor 560 is disposed so as to be at approximately the same height as the upper surfaces of insulator 554, insulator 550, insulator 552, and insulator 580. Insulator 574 contacts at least a portion of the upper surface of conductor 560, insulator 552, insulator 550, insulator 554, and insulator 580. In this specification and the like, conductor 542a and conductor 542b may be collectively referred to as conductor 542, and insulator 571a and insulator 571b may be collectively referred to as insulator 571. Other elements may be expressed in a similar manner.

[0198] Openings reaching the oxide 530b are provided in the insulator 580 and the insulator 544. The insulator 552, the insulator 550, the insulator 554, and the conductor 560 are disposed in the openings. In addition, the conductor 560, the insulator 552, the insulator 550, and the insulator 554 are provided between the insulator 571a and the conductor 542a and between the insulator 571b and the conductor 542b in the channel length direction of the transistor 500. The insulator 554 has a region in contact with a side surface of the conductor 560 and a region in contact with a bottom surface of the conductor 560.

[0199] The oxide 530 preferably includes an oxide 530a disposed on the insulator 524 and an oxide 530b disposed on the oxide 530a. By providing the oxide 530a below the oxide 530b, it is possible to suppress the diffusion of impurities from structures formed below the oxide 530a to the oxide 530b.

[0200] Note that although the transistor 500 has a structure in which the oxide 530 has two layers, the oxide 530a and the oxide 530b, the present invention is not limited to this. For example, the transistor 500 can have a single layer of the oxide 530b or a stacked structure of three or more layers. Alternatively, each of the oxide 530a and the oxide 530b can have a stacked structure.

[0201] The conductor 560 functions as a first gate (also referred to as a top gate) electrode, and the conductor 503 functions as a second gate (also referred to as a back gate) electrode. The insulators 552, 550, and 554 function as first gate insulators, and the insulators 522 and 524 function as second gate insulators. The gate insulators may also be referred to as a gate insulating layer or a gate insulating film. The conductor 542a functions as one of a source and a drain, and the conductor 542b functions as the other. At least a part of a region of the oxide 530 that overlaps with the conductor 560 functions as a channel formation region.

[0202] FIG. 9A shows an enlarged view of the vicinity of the channel formation region in FIG. 7A. When oxygen is supplied to the oxide 530b, a channel formation region is formed in the region between the conductor 542a and the conductor 542b. Therefore, as shown in FIG. 9A, the oxide 530b includes a region 530bc that functions as the channel formation region of the transistor 500, and regions 530ba and 530bb that are provided on either side of the region 530bc and function as source and drain regions. The region 530bc at least partially overlaps with the conductor 560. In other words, the region 530bc is located in the region between the conductor 542a and the conductor 542b. The region 530ba overlaps with the conductor 542a, and the region 530bb overlaps with the conductor 542b.

[0203] The region 530bc, which functions as a channel formation region, has a smaller oxygen vacancy (in this specification, oxygen vacancy in a metal oxide is referred to as V) than the regions 530ba and 530bb. O Since the region 530bc has a low impurity concentration or a low oxygen vacancy, it is a high-resistance region with a low carrier concentration. Therefore, the region 530bc can be said to be i-type (intrinsic) or substantially i-type.

[0204] A transistor using a metal oxide has impurities or oxygen vacancies (V O ) may cause fluctuations in electrical characteristics and reduce reliability. O ) hydrogen near the oxygen vacancy (V O ) with hydrogen (hereinafter referred to as V O H) and generate electrons that serve as carriers. Therefore, if oxygen vacancies are present in the region where a channel is formed in the oxide semiconductor, the transistor is likely to have normally-on characteristics (a channel exists and current flows through the transistor even when no voltage is applied to the gate electrode). Therefore, in the region where a channel is formed in the oxide semiconductor, impurities, oxygen vacancies, and V O It is preferable that H is reduced as much as possible.

[0205] The regions 530ba and 530bb that function as source and drain regions have oxygen vacancies (V O ) or high concentrations of impurities such as hydrogen, nitrogen, and metal elements, resulting in an increased carrier concentration and low resistance. That is, the regions 530ba and 530bb are n-type regions with a higher carrier concentration and lower resistance than the region 530bc.

[0206] Here, the carrier concentration of the region 530bc that functions as a channel forming region is 1×10 18 cm -3 Preferably, it is 1×10 or less. 17 cm -3 More preferably, it is less than 1×10 16 cm -3 More preferably, it is less than 1×10 13 cm -3 More preferably, it is less than 1×10 12 cm -3 The lower limit of the carrier concentration of the region 530bc that functions as a channel formation region is not particularly limited, but is preferably, for example, 1×10 -9 cm -3 It can be said that:

[0207] Furthermore, a region having a carrier concentration equal to or lower than that of regions 530ba and 530bb and equal to or higher than that of region 530bc may be formed between region 530bc and regions 530ba or 530bb. That is, this region functions as a junction region between region 530bc and regions 530ba or 530bb. The junction region may have a hydrogen concentration equal to or lower than that of regions 530ba and 530bb and equal to or higher than that of region 530bc. The junction region may also have oxygen vacancies equal to or lower than those of regions 530ba and 530bb and equal to or higher than those of region 530bc.

[0208] 9A illustrates an example in which the regions 530ba, 530bb, and 530bc are formed in the oxide 530b, but the present invention is not limited to this. For example, each of the above regions may be formed not only in the oxide 530b but also in the oxide 530a.

[0209] Furthermore, it may be difficult to clearly detect the boundaries between the regions in the oxide 530. The concentrations of metal elements and impurity elements such as hydrogen and nitrogen detected in each region may vary continuously within each region, rather than varying stepwise from region to region. In other words, it is sufficient that the concentrations of metal elements and impurity elements such as hydrogen and nitrogen decrease in the region closer to the channel formation region.

[0210] In the transistor 500, the oxide 530 including the channel formation region (the oxide 530a and the oxide 530b) is preferably a metal oxide that functions as a semiconductor (hereinafter also referred to as an oxide semiconductor).

[0211] The metal oxide functioning as a semiconductor preferably has a band gap of 2 eV or more, preferably 2.5 eV or more. By using such a metal oxide with a wide band gap, the off-state current of the transistor can be reduced.

[0212] For example, a metal oxide such as In-M-Zn oxide containing indium, element M, and zinc (element M is one or more elements selected from aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, etc.) may be used as oxide 530. Alternatively, In-Ga oxide, In-Zn oxide, or indium oxide may be used as oxide 530.

[0213] Here, it is preferable that the atomic ratio of In to element M in the metal oxide used for oxide 530b is greater than the atomic ratio of In to element M in the metal oxide used for oxide 530a.

[0214] In this way, by disposing the oxide 530a below the oxide 530b, it is possible to suppress the diffusion of impurities and oxygen from the structure formed below the oxide 530a into the oxide 530b.

[0215] Furthermore, since the oxide 530a and the oxide 530b have a common element other than oxygen (as a main component), the defect state density at the interface between the oxide 530a and the oxide 530b can be reduced. Since the defect state density at the interface between the oxide 530a and the oxide 530b can be reduced, the effect of interface scattering on carrier conduction is reduced, and a high on-current can be obtained.

[0216] The oxide 530b preferably has crystallinity, and in particular, it is preferable to use c-axis aligned crystalline oxide semiconductor (CAAC-OS) as the oxide 530b.

[0217] CAAC-OS has a highly crystalline and dense structure, and is free of impurities and defects (e.g., oxygen vacancies (V O In particular, the CAAC-OS can be made to have a dense structure with higher crystallinity by performing heat treatment at a temperature (for example, 400°C or higher and 600°C or lower) at which the metal oxide is not polycrystallized after formation of the metal oxide. In this way, the density of the CAAC-OS can be increased, thereby further reducing the diffusion of impurities or oxygen in the CAAC-OS.

[0218] On the other hand, since it is difficult to identify clear grain boundaries in CAAC-OS, it is said that the decrease in electron mobility due to grain boundaries is unlikely to occur. Therefore, metal oxides with CAAC-OS have stable physical properties. As a result, metal oxides with CAAC-OS are heat-resistant and highly reliable.

[0219] In a transistor using an oxide semiconductor, if impurities and oxygen vacancies exist in a region where a channel is formed in the oxide semiconductor, the electrical characteristics are likely to fluctuate and the reliability may be reduced. In addition, hydrogen in the vicinity of the oxygen vacancy is formed as a defect where hydrogen enters the oxygen vacancy (hereinafter referred to as V O H) and generate electrons that serve as carriers. Therefore, if oxygen vacancies are present in the region where a channel is formed in the oxide semiconductor, the transistor is likely to have normally-on characteristics (a channel exists and current flows through the transistor even when no voltage is applied to the gate electrode). Therefore, in the region where a channel is formed in the oxide semiconductor, impurities, oxygen vacancies, and V O It is preferable that H is reduced as much as possible. In other words, it is preferable that the region in the oxide semiconductor where a channel is formed has a reduced carrier concentration and is i-type (intrinsic) or substantially i-type.

[0220] In response to this problem, an insulator containing oxygen that is released by heating (hereinafter may be referred to as excess oxygen) is provided near the oxide semiconductor, and heat treatment is performed. This supplies oxygen from the insulator to the oxide semiconductor, thereby eliminating oxygen vacancies and V O H can be reduced. However, if an excessive amount of oxygen is supplied to the source region or the drain region, this may cause a decrease in the on-state current or a decrease in the field-effect mobility of the transistor 500. Furthermore, variations in the amount of oxygen supplied to the source region or the drain region within the substrate surface may cause variations in the characteristics of a semiconductor device having the transistor.

[0221] Therefore, in the oxide semiconductor, the region 530bc that functions as a channel formation region preferably has a reduced carrier concentration and is i-type or substantially i-type, whereas the regions 530ba and 530bb that function as source and drain regions preferably have a high carrier concentration and are n-type. O It is preferable to reduce H so that an excessive amount of oxygen is not supplied to the regions 530ba and 530bb.

[0222] Therefore, in this embodiment, in a state where the conductors 542a and 542b are provided on the oxide 530b, microwave treatment is performed in an atmosphere containing oxygen to remove oxygen vacancies in the region 530bc and V O The microwave treatment here refers to a treatment using a device with a power source that generates high-density plasma using microwaves, for example.

[0223] By performing microwave processing in an atmosphere containing oxygen, oxygen gas can be converted into plasma using microwaves or high frequency waves such as RF, and the oxygen plasma can be activated. At this time, microwaves or high frequency waves such as RF can also be irradiated onto the region 530bc. The action of the plasma, microwaves, etc. can be used to irradiate the V of the region 530bc. O H is split off, hydrogen H is removed from the region 530bc, and oxygen vacancy V O can be compensated with oxygen. O H → H + V O This reaction occurs, and the hydrogen concentration in the region 530bc can be reduced. O H can be reduced to lower the carrier concentration.

[0224] Furthermore, when microwave processing is performed in an atmosphere containing oxygen, the effects of microwaves, high frequency waves such as RF, oxygen plasma, etc. are shielded by the conductors 542a and 542b and do not reach the regions 530ba and 530bb. Furthermore, the effects of oxygen plasma can be reduced by the insulators 571 and 580 that cover the oxide 530b and the conductor 542. As a result, during microwave processing, V O Since there is no reduction in H and no excessive supply of oxygen, it is possible to prevent a decrease in the carrier concentration.

[0225] Furthermore, it is preferable to perform microwave treatment in an oxygen-containing atmosphere after forming the insulating film that becomes the insulator 552 or after forming the insulating film that becomes the insulator 550. By performing microwave treatment in an oxygen-containing atmosphere through the insulator 552 or the insulator 550 in this manner, oxygen can be efficiently injected into the region 530bc. Furthermore, by arranging the insulator 552 so as to be in contact with the side surface of the conductor 542 and the surface of the region 530bc, injection of more oxygen than necessary into the region 530bc can be suppressed, thereby suppressing oxidation of the side surface of the conductor 542. Furthermore, oxidation of the side surface of the conductor 542 can be suppressed during formation of the insulating film that becomes the insulator 550.

[0226] The oxygen implanted into the region 530bc can be in various forms, such as oxygen atoms, oxygen molecules, and oxygen radicals (atoms, molecules, or ions with an unpaired electron, also known as O radicals). The oxygen implanted into the region 530bc preferably takes one or more of the above forms, and oxygen radicals are particularly preferred. Furthermore, the film quality of the insulators 552 and 550 can be improved, thereby improving the reliability of the transistor 500.

[0227] In this way, oxygen vacancies and V OBy removing H, the region 530bc can be made i-type or substantially i-type. Furthermore, the supply of excess oxygen to the regions 530ba and 530bb, which function as source and drain regions, can be suppressed, thereby maintaining n-type electrical characteristics. This suppresses fluctuations in the electrical characteristics of the transistor 500, thereby reducing variations in the electrical characteristics of the transistor 500 within the substrate surface.

[0228] By adopting the above-described configuration, it is possible to provide a semiconductor device with less variation in transistor characteristics, a highly reliable semiconductor device, and a semiconductor device with good electrical characteristics.

[0229] 7B, in a cross-sectional view of the transistor 500 in the channel width direction, the oxide 530b may have a curved surface between the side surface and the top surface of the oxide 530b. That is, the end of the side surface and the end of the top surface may be curved (hereinafter also referred to as rounded).

[0230] The radius of curvature of the curved surface is preferably greater than 0 nm and smaller than the film thickness of the oxide 530b in the region overlapping with the conductor 542, or smaller than half the length of the region not having the curved surface. Specifically, the radius of curvature of the curved surface is greater than 0 nm and smaller than 20 nm, preferably greater than 1 nm and smaller than 15 nm, and more preferably greater than 2 nm and smaller than 10 nm. This shape can improve the coverage of the oxide 530b with the insulators 552, 550, and 554, and the conductor 560.

[0231] The oxide 530 preferably has a stacked structure of multiple oxide layers with different chemical compositions. Specifically, in the metal oxide used for the oxide 530a, the atomic ratio of the element M to the metal element that is the main component is preferably greater than the atomic ratio of the element M to the metal element that is the main component in the metal oxide used for the oxide 530b. Furthermore, in the metal oxide used for the oxide 530a, the atomic ratio of the element M to In is preferably greater than the atomic ratio of the element M to In in the metal oxide used for the oxide 530b. Furthermore, in the metal oxide used for the oxide 530b, the atomic ratio of In to the element M is preferably greater than the atomic ratio of In to the element M in the metal oxide used for the oxide 530a.

[0232] The oxide 530b is preferably a crystalline oxide such as CAAC-OS. Crystalline oxides such as CAAC-OS have few impurities and defects (such as oxygen vacancies) and have a highly crystalline and dense structure. This can prevent the source or drain electrode from extracting oxygen from the oxide 530b. This can reduce the extraction of oxygen from the oxide 530b even during heat treatment, making the transistor 500 stable against high temperatures (so-called thermal budget) in the manufacturing process.

[0233] Here, the conduction band minimum changes gradually at the junction between the oxides 530a and 530b. In other words, the conduction band minimum at the junction between the oxides 530a and 530b changes continuously or forms a continuous junction. To achieve this, it is preferable to reduce the defect level density of the mixed layer formed at the interface between the oxides 530a and 530b.

[0234] Specifically, when the oxide 530a and the oxide 530b contain a common element other than oxygen as a main component, a mixed layer with a low density of defect states can be formed. For example, when the oxide 530b is an In-M-Zn oxide, the oxide 530a may be an In-M-Zn oxide, an M-Zn oxide, an oxide of element M, an In-Zn oxide, an indium oxide, or the like.

[0235] Specifically, oxide 530a may be a metal oxide having an atomic ratio of In:M:Zn=1:3:4 or a similar composition, or an atomic ratio of In:M:Zn=1:1:0.5 or a similar composition. Oxide 530b may be a metal oxide having an atomic ratio of In:M:Zn=1:1:1 or a similar composition, or an atomic ratio of In:M:Zn=4:2:3 or a similar composition. Note that a similar composition includes a range of ±30% of the desired atomic ratio. Gallium is preferably used as element M.

[0236] When a metal oxide film is formed by sputtering, the atomic ratio is not limited to the atomic ratio of the formed metal oxide film, but may be the atomic ratio of a sputtering target used to form the metal oxide film.

[0237] 7A and other figures, providing an insulator 552 made of aluminum oxide or the like in contact with the top and side surfaces of the oxide 530 can cause indium in the oxide 530 to be unevenly distributed at and near the interface between the oxide 530 and the insulator 552. This results in an atomic ratio near the surface of the oxide 530 that is close to that of indium oxide or In-Zn oxide. The increased atomic ratio of indium near the surface of the oxide 530, particularly the oxide 530b, can improve the field-effect mobility of the transistor 500.

[0238] The oxide 530a and the oxide 530b have the above structure, which can reduce the defect state density at the interface between the oxide 530a and the oxide 530b. As a result, the influence of interface scattering on carrier conduction is reduced, and the transistor 500 can achieve high on-state current and high frequency characteristics.

[0239] At least one of the insulators 512, 514, 544, 571, 574, 576, and 581 preferably functions as a barrier insulating film that suppresses diffusion of impurities such as water and hydrogen from the substrate side or from above the transistor 500 into the transistor 500. Therefore, at least one of the insulators 512, 514, 544, 571, 574, 576, and 581 is preferably made of an insulating material that suppresses diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), and copper atoms (i.e., through which the above impurities are less likely to permeate). Alternatively, it is preferably made of an insulating material that suppresses diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.) (i.e., through which the above oxygen is less likely to permeate).

[0240] Note that in this specification, a barrier insulating film refers to an insulating film having a barrier property. In this specification, the barrier property refers to a function of suppressing the diffusion of a corresponding substance (also referred to as low permeability) or a function of capturing and fixing a corresponding substance (also referred to as gettering).

[0241] The insulators 512, 514, 544, 571, 574, 576, and 581 are preferably insulators that have a function of suppressing diffusion of oxygen and impurities such as water and hydrogen. For example, aluminum oxide, magnesium oxide, hafnium oxide, gallium oxide, indium gallium zinc oxide, silicon nitride, silicon nitride oxide, or the like can be used. For example, silicon nitride or the like, which has a high hydrogen barrier property, is preferably used for the insulators 512, 544, and 576. Furthermore, for example, aluminum oxide or magnesium oxide, which has a high function of capturing and fixing hydrogen, is preferably used for the insulators 514, 571, 574, and 581. This can suppress diffusion of impurities such as water and hydrogen from the substrate side to the transistor 500 side through the insulators 512 and 514. Alternatively, impurities such as water and hydrogen can be prevented from diffusing from an interlayer insulating film or the like disposed outside the insulator 581 toward the transistor 500. Alternatively, oxygen contained in the insulator 524 or the like can be prevented from diffusing toward the substrate through the insulators 512 and 514. Alternatively, oxygen contained in the insulator 580 or the like can be prevented from diffusing upward from the transistor 500 through the insulator 574. In this way, the transistor 500 is preferably surrounded by the insulators 512, 514, 571, 544, 574, 576, and 581, which have the function of preventing the diffusion of impurities such as water and hydrogen and oxygen.

[0242] Here, it is preferable to use an oxide having an amorphous structure as the insulators 512, 514, 544, 571, 574, 576, and 581. For example, AlO x (x is any number greater than 0), or MgO yIt is preferable to use a metal oxide such as y (where y is any number greater than 0). In such metal oxides having an amorphous structure, oxygen atoms have dangling bonds, and the dangling bonds may have the property of capturing or fixing hydrogen. By using such a metal oxide having an amorphous structure as a component of the transistor 500 or providing it around the transistor 500, hydrogen contained in the transistor 500 or hydrogen present around the transistor 500 can be captured or fixed. In particular, it is preferable to capture or fix hydrogen contained in the channel formation region of the transistor 500. By using a metal oxide having an amorphous structure as a component of the transistor 500 or providing it around the transistor 500, a highly reliable transistor 500 and a semiconductor device can be manufactured that have excellent characteristics.

[0243] Furthermore, the insulators 512, 514, 544, 571, 574, 576, and 581 preferably have an amorphous structure, but may have a polycrystalline structure in part. The insulators 512, 514, 544, 571, 574, 576, and 581 may have a multilayer structure in which an amorphous layer and a polycrystalline layer are stacked. For example, they may have a stacked structure in which a polycrystalline layer is formed on an amorphous layer.

[0244] The insulators 512, 514, 544, 571, 574, 576, and 581 can be formed by, for example, a sputtering method. Sputtering does not require the use of hydrogen-containing molecules in a film formation gas, and therefore can reduce the hydrogen concentrations of the insulators 512, 514, 544, 571, 574, 576, and 581. Note that the film formation method is not limited to sputtering, and a chemical vapor deposition (CVD) method, a molecular beam epitaxy (MBE) method, a pulsed laser deposition (PLD) method, an atomic layer deposition (ALD) method, or the like may also be used as appropriate.

[0245] It may also be preferable to reduce the resistivity of the insulators 512, 544, and 576. For example, it may be preferable to reduce the resistivity of the insulators 512, 544, and 576 to approximately 1×10 13 By setting the resistivity to Ωcm, the insulators 512, 544, and 576 may be able to reduce charge-up of the conductors 503, 542, 560, and the like in a process using plasma or the like in a semiconductor device manufacturing process. The resistivity of the insulators 512, 544, and 576 is preferably 1×10 10 Ωcm or more 1×10 15 Ωcm or less.

[0246] The insulators 516, 574, 580, and 581 preferably have a lower dielectric constant than the insulator 514. Using a material with a low dielectric constant as an interlayer film can reduce parasitic capacitance between wirings. For example, silicon oxide, silicon oxynitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, silicon oxide having vacancies, or the like can be used as appropriate for the insulators 516, 580, and 581.

[0247] For example, the insulator 581 is preferably an insulator that functions as an interlayer film, a planarizing film, or the like.

[0248] The conductor 503 is arranged to overlap the oxide 530 and the conductor 560. Here, the conductor 503 is preferably embedded in an opening formed in the insulator 516. In some cases, part of the conductor 503 is embedded in the insulator 514.

[0249] The conductor 503 includes a conductor 503a and a conductor 503b. The conductor 503a is provided in contact with the bottom surface and sidewall of the opening. The conductor 503b is provided so as to be embedded in a recess formed in the conductor 503a. Here, the height of the top of the conductor 503b is approximately the same as the height of the top of the conductor 503a and the height of the top of the insulator 516.

[0250] Here, the conductor 503a is preferably made of a conductive material that has the function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), copper atoms, etc. Alternatively, it is preferably made of a conductive material that has the function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0251] By using a conductive material that can reduce hydrogen diffusion for the conductor 503a, it is possible to prevent impurities such as hydrogen contained in the conductor 503b from diffusing into the oxide 530 via the insulator 524 or the like. Furthermore, by using a conductive material that can suppress oxygen diffusion for the conductor 503a, it is possible to prevent the conductor 503b from being oxidized and its conductivity from decreasing. Examples of conductive materials that can suppress oxygen diffusion include titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, and ruthenium oxide. Therefore, the conductor 503a may be a single layer or a multilayer of the above conductive materials. For example, the conductor 503a may be made of titanium nitride.

[0252] The conductor 503b is preferably made of a conductive material containing tungsten, copper, or aluminum as a main component, for example, tungsten.

[0253] The conductor 503 may function as a second gate electrode. In this case, the threshold voltage (Vth) of the transistor 500 can be controlled by changing the potential applied to the conductor 503 independently of the potential applied to the conductor 560. In particular, applying a negative potential to the conductor 503 can increase the Vth of the transistor 500 and reduce its off-state current. Therefore, applying a negative potential to the conductor 503 can reduce the drain current when the potential applied to the conductor 560 is 0 V compared to not applying a negative potential to the conductor 503.

[0254] The electrical resistivity of the conductor 503 is designed taking into consideration the potential applied to the conductor 503, and the film thickness of the conductor 503 is set to match this electrical resistivity. The film thickness of the insulator 516 is approximately the same as that of the conductor 503. Here, it is preferable to make the film thicknesses of the conductor 503 and the insulator 516 as thin as possible within the range permitted by the design of the conductor 503. By making the film thickness of the insulator 516 thin, the absolute amount of impurities such as hydrogen contained in the insulator 516 can be reduced, thereby reducing the diffusion of the impurities into the oxide 530.

[0255] Note that the conductor 503 is preferably larger than the area of ​​the oxide 530 that does not overlap with the conductors 542a and 542b when viewed from above. In particular, as shown in FIG. 7B , the conductor 503 preferably extends to an area outside the channel width direction ends of the oxide 530a and the oxide 530b. That is, outside the side surfaces of the oxide 530 in the channel width direction, the conductor 503 and the conductor 560 preferably overlap with each other through an insulator. With this structure, the channel formation region of the oxide 530 can be electrically surrounded by the electric field of the conductor 560, which functions as the first gate electrode, and the electric field of the conductor 503, which functions as the second gate electrode. In this specification, a transistor structure in which the channel formation region is electrically surrounded by the electric fields of the first gate and the second gate is referred to as a surrounded channel (S-channel) structure.

[0256] In this specification and the like, a transistor with an S-channel structure refers to a transistor structure in which a channel formation region is electrically surrounded by the electric fields of one and the other of a pair of gate electrodes. The S-channel structure disclosed in this specification and the like differs from a fin structure and a planar structure. By adopting the S-channel structure, the transistor can be made more resistant to the short-channel effect, in other words, less susceptible to the short-channel effect.

[0257] 7B, the conductor 503 is extended to function as a wiring. However, the present invention is not limited to this, and a conductor functioning as a wiring may be provided below the conductor 503. Furthermore, it is not necessary to provide one conductor 503 for each transistor. For example, the conductor 503 may be shared by multiple transistors.

[0258] Note that although the conductor 503 in the transistor 500 has a stacked structure of the conductor 503a and the conductor 503b, the present invention is not limited to this. For example, the conductor 503 may have a single layer structure or a stacked structure of three or more layers.

[0259] Insulator 522 and insulator 524 function as gate insulators.

[0260] The insulator 522 preferably has a function of suppressing the diffusion of hydrogen (e.g., at least one of hydrogen atoms, hydrogen molecules, etc.). The insulator 522 preferably has a function of suppressing the diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.). For example, the insulator 522 preferably has a function of suppressing the diffusion of one or both of hydrogen and oxygen more than the insulator 524.

[0261] The insulator 522 may be an insulator containing an oxide of one or both of aluminum and hafnium, which are insulating materials. Aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like is preferably used as the insulator. When the insulator 522 is formed using such a material, the insulator 522 functions as a layer that suppresses oxygen release from the oxide 530 to the substrate and diffusion of impurities such as hydrogen from the periphery of the transistor 500 to the oxide 530. Therefore, the insulator 522 can suppress diffusion of impurities such as hydrogen into the transistor 500 and suppress generation of oxygen vacancies in the oxide 530. Furthermore, reaction of the conductor 503 with oxygen contained in the insulator 524 or the oxide 530 can be suppressed.

[0262] Alternatively, the insulator may contain, for example, aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide. Alternatively, these insulators may be nitrided. Furthermore, the insulator 522 may be formed by stacking silicon oxide, silicon oxynitride, or silicon nitride on these insulators.

[0263] The insulator 522 may be a single layer or a multilayer insulator containing a so-called high-k material, such as aluminum oxide, hafnium oxide, tantalum oxide, or zirconium oxide. As transistors become smaller and more highly integrated, thinning of the gate insulator can lead to problems such as leakage current. Using a high-k material as the insulator functioning as the gate insulator allows for a reduction in the gate potential during transistor operation while maintaining the physical film thickness. Alternatively, the insulator 522 may be made of a material with a high dielectric constant, such as lead zirconate titanate (PZT), strontium titanate (SrTiO3), or (Ba,Sr)TiO3 (BST).

[0264] The insulator 524 in contact with the oxide 530 may be formed using, for example, silicon oxide, silicon oxynitride, or the like as appropriate.

[0265] During the manufacturing process of the transistor 500, heat treatment is preferably performed with the surface of the oxide 530 exposed. The heat treatment may be performed, for example, at a temperature of 100° C. to 600° C., more preferably 350° C. to 550° C. Note that the heat treatment is performed in a nitrogen gas or inert gas atmosphere, or an atmosphere containing an oxidizing gas at 10 ppm or more, 1% or more, or 10% or more. For example, the heat treatment is preferably performed in an oxygen atmosphere. This supplies oxygen to the oxide 530, thereby eliminating oxygen vacancies (V O ) can be reduced. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas after the heat treatment in a nitrogen gas or inert gas atmosphere to compensate for the desorbed oxygen. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas, and then the heat treatment may be performed in a nitrogen gas or inert gas atmosphere.

[0266] By subjecting the oxide 530 to oxygen addition treatment, oxygen vacancies in the oxide 530 are repaired by the supplied oxygen. In other words,O Furthermore, the reaction of the hydrogen remaining in the oxide 530 with the supplied oxygen can be removed as HO (dehydration). As a result, the hydrogen remaining in the oxide 530 recombines with the oxygen vacancies to form V O The formation of H can be suppressed.

[0267] The insulators 522 and 524 may each have a stacked structure of two or more layers. In this case, the stacked structure is not limited to a stacked structure made of the same material, and may be a stacked structure made of different materials. The insulator 524 may be formed in an island shape overlapping the oxide 530a. In this case, the insulator 544 is in contact with the side surface of the insulator 524 and the top surface of the insulator 522.

[0268] The conductor 542a and the conductor 542b are provided in contact with the top surface of the oxide 530b. The conductor 542a and the conductor 542b function as a source electrode and a drain electrode of the transistor 500, respectively.

[0269] As the conductor 542 (conductor 542a and conductor 542b), for example, a nitride containing tantalum, a nitride containing titanium, a nitride containing molybdenum, a nitride containing tungsten, a nitride containing tantalum and aluminum, or a nitride containing titanium and aluminum is preferably used. In one embodiment of the present invention, a nitride containing tantalum is particularly preferable. Also, for example, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, or an oxide containing lanthanum and nickel may be used. These materials are preferable because they are conductive materials that are resistant to oxidation or materials that maintain conductivity even when absorbing oxygen.

[0270] Note that hydrogen contained in the oxide 530b and the like may diffuse into the conductor 542a or the conductor 542b. In particular, when a nitride containing tantalum is used for the conductor 542a and the conductor 542b, hydrogen contained in the oxide 530b and the like is likely to diffuse into the conductor 542a or the conductor 542b, and the diffused hydrogen may bond with nitrogen contained in the conductor 542a or the conductor 542b. In other words, hydrogen contained in the oxide 530b and the like may be absorbed by the conductor 542a or the conductor 542b.

[0271] Furthermore, it is preferable that no curved surface be formed between the side surface of the conductor 542 and the top surface of the conductor 542. The conductor 542 without such a curved surface can increase the cross-sectional area of ​​the conductor 542 in the cross section in the channel width direction. This can increase the conductivity of the conductor 542 and the on-state current of the transistor 500.

[0272] The insulator 571a is provided in contact with the top surface of the conductor 542a, and the insulator 571b is provided in contact with the top surface of the conductor 542b. The insulator 571 preferably functions as a barrier insulating film against oxygen. Therefore, the insulator 571 preferably has a function of suppressing oxygen diffusion. For example, the insulator 571 preferably has a function of suppressing oxygen diffusion more than the insulator 580. The insulator 571 may be, for example, a nitride containing silicon, such as silicon nitride. The insulator 571 preferably has a function of capturing impurities such as hydrogen. In this case, the insulator 571 may be an insulator such as a metal oxide having an amorphous structure, such as aluminum oxide or magnesium oxide. In particular, using aluminum oxide having an amorphous structure or aluminum oxide having an amorphous structure as the insulator 571 is preferable because hydrogen can be more effectively captured or fixed. This enables the manufacture of a highly reliable transistor 500 and a semiconductor device with favorable characteristics.

[0273] The insulator 544 is provided to cover the insulator 524, the oxide 530a, the oxide 530b, the conductor 542, and the insulator 571. The insulator 544 preferably has a function of capturing and fixing hydrogen. In this case, the insulator 544 preferably includes an insulator such as silicon nitride or a metal oxide having an amorphous structure, such as aluminum oxide or magnesium oxide. Alternatively, for example, the insulator 544 may be a stacked film of aluminum oxide and silicon nitride on the aluminum oxide.

[0274] By providing the insulator 571 and the insulator 544 as described above, the conductor 542 can be surrounded by an insulator having a barrier property against oxygen. That is, oxygen contained in the insulators 524 and 580 can be prevented from diffusing into the conductor 542. This can prevent the conductor 542 from being directly oxidized by the oxygen contained in the insulators 524 and 580, which increases the resistivity and reduces the on-state current.

[0275] The insulator 552 functions as part of the gate insulator. The insulator 552 is preferably a barrier insulating film against oxygen. Any of the insulators that can be used for the insulator 574 may be used as the insulator 552. An insulator containing one or both of an oxide of aluminum and hafnium may be used as the insulator 552. Examples of the insulator that can be used include aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), an oxide containing hafnium and silicon (hafnium silicate), and the like. In this embodiment, aluminum oxide is used as the insulator 552. In this case, the insulator 552 contains at least oxygen and aluminum.

[0276] As shown in FIG. 7B , the insulator 552 is provided in contact with the top surface and side surfaces of the oxide 530b, the side surfaces of the oxide 530a, the side surfaces of the insulator 524, and the top surface of the insulator 522. That is, the regions of the oxide 530a, the oxide 530b, and the insulator 524 that overlap with the conductor 560 are covered with the insulator 552 in the cross section in the channel width direction. This allows the insulator 552, which has oxygen barrier properties, to block oxygen from being released from the oxides 530a and 530b when heat treatment or the like is performed. This reduces the formation of oxygen vacancies (Vo) in the oxides 530a and 530b. This reduces the oxygen vacancies (Vo) and V formed in the region 530bc. O H can be reduced. Therefore, the electrical characteristics of the transistor 500 can be improved, and the reliability can be improved.

[0277] Conversely, even if the insulator 580, the insulator 550, or the like contains excessive oxygen, the oxygen can be prevented from being excessively supplied to the oxide 530a and the oxide 530b. Therefore, the region 530bc can prevent the regions 530ba and 530bb from being excessively oxidized, which would cause a decrease in the on-state current or the field-effect mobility of the transistor 500.

[0278] 7A, the insulator 552 is provided in contact with the side surfaces of the conductor 542, the insulator 571, the insulator 544, and the insulator 580. This reduces the oxidation of the side surface of the conductor 542 and the formation of an oxide film on the side surface. This can prevent a decrease in the on-state current or the field-effect mobility of the transistor 500.

[0279] The insulator 552, together with the insulator 554, the insulator 550, and the conductor 560, needs to be provided in an opening formed in the insulator 580 or the like. To miniaturize the transistor 500, the insulator 552 preferably has a small thickness. The thickness of the insulator 552 is preferably 0.1 nm or more, 0.5 nm or more, or 1.0 nm or more, and preferably 1.0 nm or less, 3.0 nm or less, or 5.0 nm or less. Note that the above-described lower and upper limits can be combined. In this case, the insulator 552 only needs to have at least a region with the above-described thickness. The thickness of the insulator 552 is preferably thinner than the thickness of the insulator 550. In this case, the insulator 552 only needs to have at least a region with a thickness thinner than the insulator 550.

[0280] To form the insulator 552 into a thin film as described above, it is preferable to form the film by the ALD method. The ALD method includes a thermal ALD method in which a precursor and a reactant are reacted using only thermal energy, and a plasma enhanced ALD method in which a plasma excited reactant is used. The PEALD method may be preferable because it uses plasma, allowing film formation at a lower temperature.

[0281] The ALD method utilizes the self-regulating property of atoms and can deposit atoms one layer at a time, which has the following advantages: it is possible to form an extremely thin film, it is possible to form a film on a structure with a high aspect ratio, it is possible to form a film with few defects such as pinholes, it is possible to form a film with excellent coverage, it is possible to form a film at a low temperature, etc. Therefore, the insulator 552 can be formed with good coverage on the side surface of an opening formed in the insulator 580 or the like, with a thin film thickness as described above.

[0282] Some precursors used in the ALD method contain carbon and other impurities. Therefore, films formed by the ALD method may contain more impurities such as carbon than films formed by other film formation methods. Quantitative determination of impurities can be performed using secondary ion mass spectrometry (SIMS) or X-ray photoelectron spectroscopy (XPS).

[0283] The insulator 550 functions as part of the gate insulator. The insulator 550 is preferably disposed in contact with the upper surface of the insulator 552. The insulator 550 can be made of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, silicon oxide having vacancies, or the like. Silicon oxide and silicon oxynitride are particularly preferred because they are stable against heat. In this case, the insulator 550 is an insulator containing at least oxygen and silicon.

[0284] Like the insulator 524, the insulator 550 preferably has a reduced concentration of impurities such as water and hydrogen. The thickness of the insulator 550 is preferably 1 nm or more, or 0.5 nm or more, and preferably 15 nm or less, or 20 nm or less. Note that the above-mentioned lower and upper limits can be combined. In this case, the insulator 550 only needs to have a region with the above-mentioned thickness in at least a portion thereof.

[0285] 7A and 7B, the insulator 550 is shown as a single layer, but the present invention is not limited to this and may have a laminated structure of two or more layers. For example, as shown in Fig. 9B, the insulator 550 may have a two-layer laminated structure of an insulator 550a and an insulator 550b on the insulator 550a.

[0286] As shown in FIG. 9B , when the insulator 550 has a two-layer structure, the lower insulator 550a is preferably formed using an insulator that easily transmits oxygen, and the upper insulator 550b is preferably formed using an insulator that suppresses oxygen diffusion. Such a structure can suppress the diffusion of oxygen contained in the insulator 550a into the conductor 560. That is, a decrease in the amount of oxygen supplied to the oxide 530 can be suppressed. Furthermore, oxidation of the conductor 560 due to the oxygen contained in the insulator 550a can be suppressed. For example, the insulator 550a may be formed using any of the materials that can be used for the insulator 550, and the insulator 550b may be formed using an insulator containing one or both of aluminum and hafnium oxides. Examples of the insulator that can be used include aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), and an oxide containing hafnium and silicon (hafnium silicate). In this embodiment, hafnium oxide is used as the insulator 550b. In this case, the insulator 550b contains at least oxygen and hafnium. The thickness of the insulator 550b is preferably 0.5 nm or more, or 1.0 nm or more, and preferably 3.0 nm or less, or 5.0 nm or less. The above-mentioned lower and upper limits can be combined. In this case, the insulator 550b only needs to have a region with the above-mentioned thickness in at least a portion.

[0287] When silicon oxide, silicon oxynitride, or the like is used for the insulator 550a, the insulator 550b may be an insulating material, such as a high-k material with a high dielectric constant. By forming the gate insulator as a layered structure of the insulators 550a and 550b, a layered structure that is thermally stable and has a high dielectric constant can be achieved. This allows the gate potential applied during transistor operation to be reduced while maintaining the physical thickness of the gate insulator. Furthermore, the equivalent oxide thickness (EOT) of the insulator functioning as the gate insulator can be reduced. This allows the dielectric strength of the insulator 550 to be increased.

[0288] The insulator 554 functions as part of the gate insulator. A barrier insulating film against hydrogen is preferably used as the insulator 554. This can prevent impurities such as hydrogen contained in the conductor 560 from diffusing into the insulator 550 and the oxide 530b. The insulator 554 can be any of the insulators that can be used for the insulator 576. For example, silicon nitride formed by a PEALD method can be used as the insulator 554. In this case, the insulator 554 contains at least nitrogen and silicon.

[0289] The insulator 554 may further have a barrier property against oxygen, which can prevent oxygen contained in the insulator 550 from diffusing into the conductor 560.

[0290] The insulator 554, together with the insulator 552, the insulator 550, and the conductor 560, needs to be provided in an opening formed in the insulator 580 or the like. To miniaturize the transistor 500, the insulator 554 preferably has a small thickness. The thickness of the insulator 554 is preferably 0.1 nm or more, 0.5 nm or more, or 1.0 nm or more, and preferably 3.0 nm or less, or 5.0 nm or less. Note that the above-described lower and upper limits can be combined. In this case, the insulator 554 only needs to have at least a region with the above-described thickness. The thickness of the insulator 554 is preferably thinner than the thickness of the insulator 550. In this case, the insulator 554 only needs to have at least a region with a thickness thinner than the insulator 550.

[0291] The conductor 560 functions as a first gate electrode of the transistor 500. The conductor 560 preferably includes a conductor 560a and a conductor 560b disposed over the conductor 560a. For example, the conductor 560a is preferably disposed so as to surround the bottom and side surfaces of the conductor 560b. As shown in FIGS. 7A and 7B, the height of the top of the conductor 560 roughly coincides with the height of the top of the insulator 550. Note that although the conductor 560 is shown as having a two-layer structure of the conductor 560a and the conductor 560b in FIGS. 7A and 7B, the conductor 560 may have a single-layer structure or a stacked structure of three or more layers, other than the two-layer structure.

[0292] The conductor 560a is preferably made of a conductive material that has a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules, copper atoms, etc. Alternatively, it is preferably made of a conductive material that has a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0293] Furthermore, since the conductor 560a has the function of suppressing oxygen diffusion, it is possible to suppress a decrease in conductivity due to oxidation of the conductor 560b caused by oxygen contained in the insulator 550. As a conductive material having the function of suppressing oxygen diffusion, it is preferable to use, for example, titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, ruthenium oxide, or the like.

[0294] Furthermore, since the conductor 560 also functions as wiring, it is preferable to use a conductor with high conductivity. For example, the conductor 560b can be a conductive material containing tungsten, copper, or aluminum as a main component. The conductor 560b can have a layered structure. Specifically, for example, the conductor 560b can have a layered structure of titanium or titanium nitride and the above-mentioned conductive material.

[0295] Furthermore, in the transistor 500, the conductor 560 is formed in a self-aligned manner so as to fill an opening formed in the insulator 580, etc. By forming the conductor 560 in this manner, the conductor 560 can be reliably placed in the region between the conductor 542a and the conductor 542b without alignment.

[0296] 7B , in the channel width direction of the transistor 500, the height of the bottom surface of the conductor 560 in a region where the conductor 560 does not overlap with the oxide 530b is preferably lower than the height of the bottom surface of the oxide 530b when the bottom surface of the insulator 522 is used as the reference. When the conductor 560, which functions as a gate electrode, covers the side and top surfaces of the channel formation region of the oxide 530b via the insulator 550 or the like, the electric field of the conductor 560 can be easily applied to the entire channel formation region of the oxide 530b. Therefore, the on-state current of the transistor 500 can be increased, and the frequency characteristics can be improved. The difference between the height of the bottom surface of the conductor 560 and the height of the bottom surface of the oxide 530b in the region where the oxides 530a and 530b do not overlap with the conductor 560, relative to the bottom surface of the insulator 522, is preferably 0 nm or more, 3 nm or more, or 5 nm or more, and is preferably 20 nm or less, 50 nm or less, or 100 nm or less. Note that the above-mentioned lower limit and upper limit values ​​can be combined with each other.

[0297] The insulator 580 is provided on the insulator 544, and openings are formed in the regions where the insulator 550 and the conductor 560 are provided. The top surface of the insulator 580 may be planarized.

[0298] The insulator 580, which functions as an interlayer film, preferably has a low dielectric constant. Using a material with a low dielectric constant as the interlayer film can reduce parasitic capacitance between wirings. The insulator 580 is preferably formed using, for example, the same material as the insulator 516. In particular, silicon oxide and silicon oxynitride are preferred because they are thermally stable. In particular, materials such as silicon oxide, silicon oxynitride, and silicon oxide with vacancies are preferred because they can easily form a region containing oxygen that is released by heating.

[0299] The insulator 580 preferably has a low concentration of impurities such as water and hydrogen. For example, the insulator 580 may be formed using an oxide containing silicon, such as silicon oxide or silicon oxynitride, as appropriate.

[0300] The insulator 574 preferably functions as a barrier insulating film that suppresses diffusion of impurities such as water and hydrogen from above into the insulator 580 and preferably has a function of capturing impurities such as hydrogen. The insulator 574 also preferably functions as a barrier insulating film that suppresses oxygen permeation. The insulator 574 may be an insulator made of a metal oxide having an amorphous structure, such as aluminum oxide. In this case, the insulator 574 contains at least oxygen and aluminum. By providing the insulator 574, which is in contact with the insulator 580 and has a function of capturing impurities such as hydrogen, in the region between the insulators 512 and 581, the insulator 574 can capture impurities such as hydrogen contained in the insulator 580 and maintain a constant amount of hydrogen in the region. In particular, using aluminum oxide having an amorphous structure as the insulator 574 is preferable because it may be able to more effectively capture or fix hydrogen. This enables the manufacture of a highly reliable transistor 500 and semiconductor device with excellent characteristics.

[0301] The insulator 576 functions as a barrier insulating film that suppresses diffusion of impurities such as water and hydrogen from above into the insulator 580. The insulator 576 is disposed over the insulator 574. The insulator 576 is preferably a nitride containing silicon, such as silicon nitride or silicon nitride oxide. For example, the insulator 576 may be a silicon nitride film formed by a sputtering method. A high-density silicon nitride film can be formed by forming the insulator 576 by a sputtering method. Alternatively, the insulator 576 may be formed by stacking a silicon nitride film formed by a PEALD method or a CVD method on the silicon nitride film formed by a sputtering method.

[0302] One of the first and second terminals of the transistor 500 is electrically connected to a conductor 540a functioning as a plug, and the other of the first and second terminals of the transistor 500 is electrically connected to a conductor 540b. Note that in this specification and the like, the conductors 540a and 540b are collectively referred to as conductors 540.

[0303] For example, the conductor 540a is provided in a region overlapping with the conductor 542a. Specifically, in the region overlapping with the conductor 542a, openings are formed in the insulators 571, 544, 580, 574, 576, and 581 shown in FIG. 7A and in the insulators 582 and 586 shown in FIG. 6, and the conductor 540a is provided inside the openings. For example, the conductor 540b is provided in a region overlapping with the conductor 542b. Specifically, in the region overlapping with the conductor 542b, openings are formed in the insulators 571, 544, 580, 574, 576, and 581 shown in FIG. 7A and in the insulators 582 and 586 shown in FIG. 6, and the conductor 540b is provided inside the openings. The insulator 582 and the insulator 586 will be described later.

[0304] 7A, an insulator 541a may be provided as an insulator having a barrier property against impurities between the conductor 540a and a side surface of the opening in a region overlapping with the conductor 542a. Similarly, an insulator 541b may be provided as an insulator having a barrier property against impurities between the conductor 540b and a side surface of the opening in a region overlapping with the conductor 542b. Note that in this specification and the like, the insulators 541a and 541b are collectively referred to as the insulator 541.

[0305] The conductors 540a and 540b are preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. The conductors 540a and 540b may have a layered structure.

[0306] Furthermore, when the conductor 540 has a layered structure, it is preferable to use a conductive material that has the function of suppressing the permeation of impurities such as water and hydrogen for the insulators 574, 576, 581, 580, 544, and the first conductor disposed near the insulator 571. For example, it is preferable to use tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, ruthenium oxide, or the like. Furthermore, the conductive material that has the function of suppressing the permeation of impurities such as water and hydrogen may be used in a single layer or a layered structure. Furthermore, it is possible to suppress impurities such as water and hydrogen contained in layers above the insulator 576 from being mixed into the oxide 530 through the conductors 540a and 540b.

[0307] The insulators 541a and 541b may be a barrier insulating film that can be used for the insulator 544 or the like. For example, the insulators 541a and 541b may be made of an insulator such as silicon nitride, aluminum oxide, or silicon nitride oxide. The insulators 541a and 541b are provided in contact with the insulator 580, and thus can prevent impurities such as water and hydrogen contained in the insulator 580 or the like from being mixed into the oxide 530 through the conductors 540a and 540b. Silicon nitride is particularly suitable because it has a high blocking property against hydrogen. Furthermore, oxygen contained in the insulator 580 can be prevented from being absorbed by the conductors 540a and 540b.

[0308] When the insulators 541a and 541b are formed into a layered structure as shown in FIG. 7A, it is preferable that the first insulator in contact with the inner wall of the opening of the insulator 580 or the like and the second insulator inside it are formed by combining a barrier insulating film against oxygen and a barrier insulating film against hydrogen.

[0309] For example, aluminum oxide formed by the ALD method can be used as the first insulator, and silicon nitride formed by the PEALD method can be used as the second insulator. With this structure, oxidation of the conductor 540 can be suppressed and hydrogen contamination of the conductor 540 can be reduced.

[0310] Although the transistor 500 has a stacked structure of the first insulator of the insulator 541 and the second conductor of the insulator 541, the present invention is not limited to this. For example, the insulator 541 may have a single layer or a stacked structure of three or more layers. Furthermore, the transistor 500 has a stacked structure of the first conductor of the conductor 540 and the second conductor of the conductor 540, but the present invention is not limited to this. For example, the conductor 540 may have a single layer or a stacked structure of three or more layers.

[0311] 6, conductors 610 and 612, which function as wiring and are in contact with the upper portions of conductors 540a and 540b, may be disposed. Conductor 610 and conductor 612 are preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. The conductors may also have a layered structure. Specifically, for example, the conductors may be a layered structure of titanium or titanium nitride and the above-mentioned conductive material. The conductors may be formed so as to be embedded in openings provided in an insulator.

[0312] Note that the structure of the transistor included in the semiconductor device of one embodiment of the present invention is not limited to the transistor 500 illustrated in Figures 6, 7A, 7B, and 8. The structure of the transistor included in the semiconductor device of one embodiment of the present invention may be changed depending on the situation.

[0313] For example, the transistor 500 illustrated in FIGS. 6, 7A, 7B, and 8 may have the structure illustrated in FIG. 10. The transistor in FIG. 10 differs from the transistor 500 illustrated in FIGS. 6, 7A, 7B, and 8 in that it includes an oxide 543a and an oxide 543b. In this specification and the like, the oxide 543a and the oxide 543b are collectively referred to as the oxide 543. The cross-sectional structure of the transistor in FIG. 10 in the channel width direction can be similar to that of the cross-section of the transistor 500 illustrated in FIG. 7B.

[0314] The oxide 543a is provided between the oxide 530b and the conductor 542a, and the oxide 543b is provided between the oxide 530b and the conductor 542b. Here, the oxide 543a is preferably in contact with the upper surface of the oxide 530b and the lower surface of the conductor 542a. The oxide 543b is preferably in contact with the upper surface of the oxide 530b and the lower surface of the conductor 542b.

[0315] The oxide 543 preferably has a function of suppressing oxygen permeation. Placing the oxide 543, which has a function of suppressing oxygen permeation, between the conductor 542 functioning as a source or drain electrode and the oxide 530b is preferable because the electrical resistance between the conductor 542 and the oxide 530b can be reduced. Such a structure can improve the electrical characteristics, field-effect mobility, and reliability of the transistor 500 in some cases.

[0316] Alternatively, a metal oxide containing element M may be used as oxide 543. In particular, element M may be aluminum, gallium, yttrium, or tin. Preferably, oxide 543 has a higher concentration of element M than oxide 530b. Alternatively, oxide 543 may be gallium oxide. Alternatively, oxide 543 may be a metal oxide such as In-M-Zn oxide. Specifically, the atomic ratio of element M to In in the metal oxide used for oxide 530b is preferably greater than the atomic ratio of element M to In in the metal oxide used for oxide 530b. Furthermore, the film thickness of oxide 543 is preferably 0.5 nm or more or 1 nm or more, and is preferably 2 nm or less, 3 nm or less, or 5 nm or less. The above-mentioned lower and upper limits may be combined. Preferably, oxide 543 is crystalline. When oxide 543 is crystalline, oxygen release from oxide 530 can be effectively suppressed. For example, if the oxide 543 has a crystalline structure such as a hexagonal crystal structure, the release of oxygen from the oxide 530 may be suppressed.

[0317] An insulator 582 is provided on the insulator 581, and an insulator 586 is provided on the insulator 582.

[0318] The insulator 582 is preferably made of a substance that has a barrier property against oxygen and hydrogen. Therefore, the insulator 582 can be made of a material similar to that of the insulator 514. For example, the insulator 582 is preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0319] The insulator 586 can be made of a material similar to that of the insulator 320. The use of a material with a relatively low dielectric constant for these insulators can reduce parasitic capacitance between wirings. For example, the insulator 586 can be made of a silicon oxide film, a silicon oxynitride film, or the like.

[0320] Next, a description will be given of a capacitor 600 and its peripheral wiring or plugs included in the semiconductor device shown in Figures 6 and 8. Note that the capacitor 600, wiring, and / or plugs are provided above the transistor 500 shown in Figures 6 and 8.

[0321] The capacitor 600 includes, for example, a conductor 610 , a conductor 620 , and an insulator 630 .

[0322] A conductor 610 is provided over one of the conductors 540a and 540b, the conductor 546, and the insulator 586. The conductor 610 functions as one of a pair of electrodes of a capacitor 600.

[0323] A conductor 612 is provided over the other of the conductor 540a and the conductor 540b and over the insulator 586. The conductor 612 functions as a plug, a wiring, a terminal, or the like that electrically connects the transistor 500 to a circuit element, a wiring, or the like arranged above it.

[0324] The conductor 612 and the conductor 610 may be formed at the same time.

[0325] A metal film containing an element selected from molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium, or a metal nitride film containing any of the above elements (tantalum nitride film, titanium nitride film, molybdenum nitride film, tungsten nitride film), or the like can be used for the conductor 612 and the conductor 610. Alternatively, a conductive material such as indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon oxide is added can also be used.

[0326] 6, the conductor 612 and the conductor 610 have a single-layer structure, but are not limited to this structure and may have a stacked structure of two or more layers. For example, a conductor having a barrier property and a conductor having high adhesion to the conductor having high conductivity may be formed between a conductor having a barrier property and a conductor having high conductivity.

[0327] An insulator 630 is provided on the insulator 586 and the conductor 610. The insulator 630 functions as a dielectric sandwiched between the pair of electrodes of the capacitor 600.

[0328] The insulator 630 can be, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, hafnium oxide, hafnium oxynitride, hafnium nitride oxide, hafnium nitride, zirconium oxide, or the like. The insulator 630 can be formed as a stacked layer or a single layer using any of the above-mentioned materials.

[0329] Furthermore, for example, a laminated structure of a material with high dielectric strength, such as silicon oxynitride, and a high dielectric constant (high-k) material may be used for the insulator 630. With this configuration, the capacitor 600 can ensure sufficient capacitance by having an insulator with high dielectric constant (high-k), and the insulator with high dielectric strength improves the dielectric strength, thereby suppressing electrostatic breakdown of the capacitor 600.

[0330] Examples of high-dielectric-constant (high-k) materials (materials with a high relative dielectric constant) insulators include gallium oxide, hafnium oxide, zirconium oxide, oxides containing aluminum and hafnium, oxynitrides containing aluminum and hafnium, oxides containing silicon and hafnium, oxynitrides containing silicon and hafnium, and nitrides containing silicon and hafnium.

[0331] Alternatively, the insulator 630 may be a single layer or a multilayer insulator containing a high-k material, such as aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO3), or (Ba,Sr)TiO3 (BST). Alternatively, the insulator 630 may be a compound containing hafnium and zirconium. As semiconductor devices become smaller and more highly integrated, thinning of the dielectrics used in gate insulators and capacitors can cause problems such as leakage current in transistors and capacitors. Using a high-k material for the insulators that function as the gate insulator and the dielectrics used in capacitors can reduce the gate potential during transistor operation and ensure the capacitance of capacitors while maintaining the physical film thickness.

[0332] The conductor 620 is provided to overlap with the conductor 610 with the insulator 630 placed therebetween. The conductor 610 functions as one of a pair of electrodes of the capacitor 600.

[0333] The conductor 620 can be made of a conductive material such as a metal material, an alloy material, or a metal oxide material. It is preferable to use a high-melting-point material such as tungsten or molybdenum, which has both heat resistance and conductivity, and tungsten is particularly preferable. When the conductor 620 is formed simultaneously with other structures such as a conductor, a low-resistance metal material such as Cu (copper) or Al (aluminum) can be used. For example, the conductor 620 can be made of a material that can be used for the conductor 610. The conductor 620 may have a laminated structure of two or more layers instead of a single layer structure.

[0334] An insulator 640 is provided over the conductor 620 and the insulator 630. For the insulator 640, for example, a film having a barrier property that prevents diffusion of hydrogen, impurities, and the like into a region where the transistor 500 is provided is preferably used. Therefore, a material similar to that of the insulator 324 can be used.

[0335] An insulator 650 is provided over the insulator 640. The insulator 650 can be provided using a material similar to that of the insulator 320. The insulator 650 may also function as a planarizing film that covers the uneven shape below it. Therefore, the insulator 650 can be made of, for example, a material that can be used for the insulator 324.

[0336] 6 and 8 is a planar type, the shape of the capacitive element is not limited to this. The capacitor 600 may be, for example, a cylindrical type instead of a planar type.

[0337] A wiring layer may be provided above the capacitor 600. For example, in FIG. 6, an insulator 411, an insulator 412, an insulator 413, and an insulator 414 are provided in this order above an insulator 650. A conductor 416 functioning as a plug or a wiring is provided in the insulators 411, 412, and 413. For example, the conductor 416 can be provided in a region overlapping with a conductor 660 described later.

[0338] Furthermore, openings are provided in the insulators 630, 640, and 650 in regions overlapping with the conductor 612, and the conductor 660 is provided to fill the openings. The conductor 660 functions as a plug or wiring electrically connected to the conductor 416 included in the above-described wiring layer.

[0339] The insulators 411 and 414 are preferably made of an insulator that has barrier properties against impurities such as water and hydrogen, similar to the insulator 324. Therefore, the insulators 411 and 414 can be made of a material that can be used for the insulator 324, for example.

[0340] For the insulators 412 and 413, similar to the insulator 326, it is preferable to use an insulator with a relatively low dielectric constant in order to reduce parasitic capacitance between wirings.

[0341] Furthermore, the conductor 612 and the conductor 416 can be formed using, for example, the same material as the conductor 328 and the conductor 330 .

[0342] <Example of a configuration of a transistor and a ferroelectric capacitor> Next, a configuration will be described in which a dielectric that may have ferroelectricity is provided in and around a transistor 500 that includes a metal oxide in a channel formation region.

[0343] FIG. 11A shows an example of a transistor configuration in which a dielectric that may have ferroelectric properties is provided in the configuration of transistor 500 shown in FIGS. 6, 7A, etc.

[0344] 11A has a configuration in which the insulator 522 functioning as the second gate insulator is replaced with an insulator 520. As one example, the insulator 520 can be a dielectric material that may have ferroelectricity.

[0345] 11A can have a ferroelectric capacitor between the conductor 503, which functions as the second gate electrode, and the oxide 530. In other words, the transistor of FIG. 11A can be an FeFET (Ferroelectric FET) in which a dielectric that may have ferroelectric properties is provided in a part of the second gate insulator.

[0346] As a material that can have ferroelectricity, it is possible to use the same materials as those that can be used for the dielectric of the capacitive FEC shown in the above embodiment.

[0347] 11A, the insulator 520 is illustrated as a single layer, but the insulator 520 may be an insulating film of two or more layers including a dielectric material that may have ferroelectricity. A specific example of such a transistor is shown in FIG. 11B. In FIG. 11B, for example, the insulator 520 includes an insulator 520a and an insulator 520b. The insulator 520a is provided on the top surface of the insulator 516 and the conductor 503, and the insulator 520b is provided on the top surface of the insulator 520a.

[0348] For example, a dielectric material that may have ferroelectricity may be used as the insulator 520a. For example, silicon oxide may be used as the insulator 520b. Alternatively, for example, silicon oxide may be used as the insulator 520a and a dielectric material that may have ferroelectricity may be used as the insulator 520b.

[0349] As shown in FIG. 11B, by forming the insulator 520 into two layers, with one layer being a dielectric that may have ferroelectric properties and the other layer being silicon oxide, it is possible to suppress current leakage between the conductor 503 that functions as a gate electrode and the oxide 530.

[0350] 11C shows an example of the configuration of a transistor in which the insulator 520 has three layers. In FIG. 11C, the insulator 520 includes, for example, an insulator 520a, an insulator 520b, and an insulator 520c. The insulator 520c is provided on the top surface of the insulator 516 and the conductor 503, the insulator 520a is provided on the top surface of the insulator 520c, and the insulator 520b is provided on the top surface of the insulator 520a.

[0351] The insulator 520a may be made of, for example, a dielectric material that may have ferroelectricity, and the insulators 520b and 520c may be made of, for example, silicon oxide.

[0352] The respective configurations of the transistor and ferroelectric capacitor shown in FIGS. 11A to 11C can be applied to, for example, the transistor M1 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0353] FIG. 12 shows an example of a transistor configuration in which a dielectric that may have ferroelectric properties is provided in the configuration of transistor 500 of FIGS. 6, 7A, etc., which is different from the transistors of FIGS. 11A to 11C.

[0354] The transistor shown in Figure 12 shows an example of a transistor configuration in which a dielectric that may have ferroelectric properties is provided above insulators 552, 550, and 554 that function as first gate insulators, conductor 560 that functions as a first gate electrode, and a partial region of insulator 580.

[0355] Specifically, insulator 561 is provided so as to be in contact with insulator 552, insulator 550, insulator 554, conductor 560, and partial regions of insulator 580. As an example, insulator 561 can be made of a dielectric material that can have ferroelectricity and can be applied to insulator 520 in FIG. 11A.

[0356] A conductor 562 is provided to be in contact with an upper portion of the insulator 561. The conductor 562 can be provided using, for example, the same material as the conductors 328 and 330.

[0357] Therefore, with the configuration of the transistor in FIG. 12, a ferroelectric capacitor can be provided between the conductor 503 functioning as the first gate electrode and the conductor 562.

[0358] Note that the insulator 561 may have a laminated structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0359] Furthermore, the respective configurations of the transistor and ferroelectric capacitor shown in FIG. 12 can be applied to, for example, the transistor M2 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0360] FIG. 13A shows an example of a transistor configuration in which a dielectric that may have ferroelectric properties is provided in the configuration of transistor 500 of FIGS. 6, 7A, etc., which is different from the transistors of FIGS. 11A to 11C and 12.

[0361] 13A, an insulator 602 is provided in an opening that overlaps with the conductor 542b and is provided in the insulators 544, 571b, 580, 574, 576, and 581. Specifically, in the opening, an insulator 541b is provided on a side surface of the opening, a conductor 540b is provided over the insulator 541b and over the conductor 542b that is at the bottom of the opening, an insulator 602 is provided over a portion of the insulator 581 and over the conductor 540b, and a conductor 613 is provided over the insulator 602 to fill the remaining opening.

[0362] As another specific configuration example, within the opening, an insulator 541b is provided on the side surface of the opening, a conductor 540b is provided on the insulator 541b, an insulator 602 is provided on a partial region of the insulator 581, on the conductor 540b, and on the conductor 542b at the bottom of the opening, and a conductor 613 is provided on the insulator 602 so as to fill the remaining opening.

[0363] For example, the insulator 602 may be a dielectric material that may have ferroelectric properties, which may be applicable to the insulator 520 in FIG. 11A.

[0364] The conductor 613 can be formed using, for example, a material similar to that of the conductors 328 and 330 .

[0365] Therefore, with the configuration of the transistor in FIG. 13A, a ferroelectric capacitor can be provided between the conductor 540b and the conductor 613 in the opening included in the region overlapping with the conductor 542b.

[0366] The insulator 602 may have a laminated structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0367] Furthermore, the respective configurations of the transistor and ferroelectric capacitor shown in FIG. 13A can be applied to, for example, the transistor M2 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0368] FIG. 13B shows an example of a transistor configuration in which a dielectric that may have ferroelectric properties is provided in the configuration of transistor 500 of FIGS. 6, 7A, etc., which is different from the transistors of FIGS. 11A to 11C, 12, and 13A.

[0369] 13B has a structure in which the insulators 552, 550, and 554 functioning as the first gate insulator are replaced with an insulator 553. For example, the insulator 553 can be a dielectric that can have ferroelectricity and can be used for the insulator 520 in FIG. 11A.

[0370] Therefore, the transistor of Figure 13B can have a ferroelectric capacitor between the conductor 560, which functions as the first gate electrode, and the oxide 530. In other words, the transistor of Figure 13B can be an FeFET in which a dielectric that may have ferroelectric properties is provided in a portion of the first gate insulator.

[0371] Note that the insulator 553 may have a stacked structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0372] In addition, in FIG. 13B, the insulator 552, the insulator 550, and the insulator 554 are replaced with the insulator 553. However, as another example of the configuration, at least one of the insulators 552, 550, and 554 may be replaced with the insulator 553, and the remaining insulator and the insulator 553 may form a laminated structure.

[0373] Furthermore, the respective configurations of the transistor and ferroelectric capacitor shown in FIG. 13B can be applied to, for example, the transistor M2 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0374] FIG. 14A shows an example of the configuration of a transistor 500 and a capacitor, in which a capacitor including a dielectric material that may have ferroelectricity is provided around the transistor 500.

[0375] 14A , for example, a plurality of openings are formed in the insulators 544, 571b, 580, 574, 576, and 581 in a region overlapping with the conductor 542b. A conductor 540c functioning as a plug is provided inside one of the openings, and an insulator 541c serving as an insulator with a barrier property against impurities is provided between a side surface of the opening and the conductor 540c. A conductor 540d functioning as a plug is provided inside another of the openings, and an insulator 541d serving as an insulator with a barrier property against impurities is provided between a side surface of the opening and the conductor 540d. The conductor 540c and the conductor 540d can be made of, for example, a material that can be used for the conductor 540a and the conductor 540b, and the insulator 541c and the insulator 541d can be made of, for example, a material that can be used for the insulator 541a and the insulator 541b.

[0376] An insulator 601 is provided on the upper part of the conductor 540c and the conductor 540d so as to be in contact with them. As an example, the insulator 601 can be made of a dielectric material that can have ferroelectricity and can be used for the insulator 520 in FIG. 11A.

[0377] A conductor 611 is provided to be in contact with an upper portion of the insulator 601. The conductor 611 can be provided using, for example, the same material as the conductors 328 and 330.

[0378] Therefore, with the configuration shown in FIG. 14A, a ferroelectric capacitor can be provided between the conductor 540c and the conductor 540d that function as plugs and the conductor 611.

[0379] The insulator 601 may have a laminated structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0380] 14A shows two plugs (conductor 540c and conductor 540d) in contact with insulator 601, but the number of plugs may be one or three or more. In other words, while FIG. 14A shows an example in which two openings having conductors as plugs are provided in the region overlapping with insulator 601, the number of openings provided in the region overlapping with insulator 601 may be one or three or more.

[0381] Furthermore, the respective configurations of the transistor and ferroelectric capacitor shown in FIG. 14A can be applied to, for example, the transistor M2 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0382] FIG. 14B shows an example of a configuration of a transistor 500 and a capacitor, which is different from that of FIG. 14A, in which a capacitor including a dielectric material that may have ferroelectricity is provided around the transistor 500.

[0383] 14B, an insulator 631 is provided on the top surface of a portion of the conductor 610 located on the conductor 540b functioning as a plug and the top surface of the insulator 581. As an example, the insulator 631 can be a dielectric material that can have ferroelectricity and can be used for the insulator 520 in FIG.

[0384] In addition, a conductor 620 is provided on the upper surface of insulator 631, and an insulator 640 and an insulator 650 are provided in order on the upper surfaces of insulator 581, conductor 612, conductor 620, and a partial region of insulator 631.

[0385] Therefore, with the configuration shown in FIG. 14B, a ferroelectric capacitor can be provided between the conductor 610 and the conductor 620.

[0386] Note that the insulator 631 may have a stacked structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0387] The respective configurations of the transistor and ferroelectric capacitor shown in FIG. 14B can be applied to, for example, the transistor M1 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0388] FIG. 15 shows an example of a configuration of a transistor 500 and a capacitor, which is different from those in FIGS. 14A and 14B, in which a capacitor including a dielectric that may have ferroelectricity is provided around the transistor 500.

[0389] In FIG. 15, a plurality of openings are formed in an insulator 516, and a conductor 503 is embedded in one opening, and a conductor 503A is embedded in another opening.

[0390] For example, a material applicable to the conductor 503 can be used as the conductor 503A.

[0391] An insulator 517 and a conductor 519 are provided in this order on the top of the conductor 503A. The insulator 517 and the conductor 519 are covered with the insulator 522 described in the transistor 500 of FIG. 7A. The insulator 522 is covered with the insulator 544 described in the transistor 500 of FIG. 7A.

[0392] As an example, the insulator 517 may be a dielectric material that may have ferroelectric properties, which may be applicable to the insulator 520 in FIG. 11A.

[0393] The conductor 519 can be formed using, for example, a material similar to that of the conductors 328 and 330 .

[0394] Therefore, with the configuration shown in FIG. 15, a ferroelectric capacitor can be provided between the conductor 503A and the conductor 519.

[0395] The insulator 517 may have a stacked structure of two or more layers, similar to the insulator 520 shown in FIGS. 11B and 11C.

[0396] After the insulator 581 is provided, openings are formed in the insulators 522, 544, 580, 574, 576, and 581 in a region overlapping with the conductor 503. A conductor 540e functioning as a plug is provided inside the opening, and an insulator 541e is provided between the side surface of the opening and the conductor 540e as an insulator having barrier properties against impurities. Note that the conductor 540e can be formed using, for example, a material that can be used for the conductors 540a and 540b, and the insulator 541e can be formed using, for example, a material that can be used for the insulators 541a and 541b.

[0397] A conductor 611 is provided on the top surfaces of the conductors 540a and 540e functioning as plugs and a partial region of the insulator 581. The conductor 611 can be provided using, for example, the same material as the conductors 328 and 330.

[0398] Furthermore, on the upper surface of the conductor 611 and a partial region of the insulator 581, an insulator 640 and an insulator 650 are provided in this order.

[0399] The respective configurations of the transistor and ferroelectric capacitor shown in FIG. 15 can be applied to, for example, the transistor M1 and capacitor FEC shown in FIG. 2A and the like, which have been described in the above embodiment.

[0400] <Configuration Example 2 of Semiconductor Device> Next, a configuration example in which the above-mentioned semiconductor device is provided with a ferroelectric capacitor will be described.

[0401] FIG. 16 shows an example in which the configuration of the capacitor 600 located on the upper surface of the insulator 582 and the conductor 546 in the semiconductor device shown in FIG. 6 is modified.

[0402] Specifically, capacitor 600 includes, for example, conductor 610, conductor 620, insulator 630, and insulator 631. In particular, as insulator 631, a dielectric material that may have ferroelectricity can be used, as described in FIG. 14B.

[0403] In Figure 16, the conductors 610 and 612 can be made of the same materials as the conductors 610 and 612 in Figure 6. Also, in Figure 16, the conductors 610 and 612 can be formed in the same manner as the conductors 610 and 612 in Figure 6.

[0404] 16, the insulator 630 is provided on the upper surface of the conductor 610 and a partial region of the insulator 586. The insulator 631 is provided on the upper surface of the insulator 630, and the conductor 620 is provided on the upper surface of the insulator 631.

[0405] As the insulator 630, for example, a material applicable to the insulator 630 in FIG. 6 can be used.

[0406] Also, in FIG. 16, insulator 640 is provided on the upper surface of a region including the end of insulator 630, a region including the end of insulator 631, conductor 620, and a partial region of insulator 586.

[0407] As the insulator 640, for example, a material applicable to the insulator 640 in FIG. 6 can be used.

[0408] As shown in FIG. 16, by applying the configuration of the capacitor 600, a ferroelectric capacitor can be provided in the semiconductor device shown in FIG.

[0409] Next, a configuration example of a semiconductor device that includes a ferroelectric capacitor, which is different from that shown in FIG. 16, will be described.

[0410] The semiconductor device shown in Figure 17 is a modified example of the semiconductor device in Figure 16, and has a structure in which transistor 500 and capacitor 600 are surrounded by insulators 571, 544, 574, 576, 581, 641, and 642, etc.

[0411] In addition, in each of the semiconductor devices of Figures 6 and 16, the substrate 310 to the insulator 574 are provided in order, and then an opening is provided that reaches the insulator 514, whereas in the semiconductor device of Figure 17, the substrate 310 to the insulator 640 are provided in order, and then an opening is provided that reaches the insulator 514.

[0412] In the semiconductor device of FIG. 17, an insulator 641, an insulator 642, and an insulator 650 are provided in this order on the bottom of the opening and on the upper surface of the insulator 640.

[0413] The insulators 641 and 642 preferably function as barrier insulating films that prevent impurities such as water and hydrogen from diffusing from above the transistor 500 and the capacitor 600 to the transistor 500 and the capacitor 600 .

[0414] The insulator 641 can be formed by, for example, a sputtering method. For example, the insulator 641 can be formed using silicon nitride formed by a sputtering method. The sputtering method does not require the use of hydrogen-containing molecules in the deposition gas, and therefore the hydrogen concentration in the insulator 641 can be reduced. The reduced hydrogen concentration in the insulator 641 can prevent hydrogen from diffusing from the insulator 641 to the conductor 610, the conductor 612, and the insulator 586.

[0415] The insulator 642 is preferably formed by, for example, an ALD method, particularly a PEALD method. For example, silicon nitride formed by the PEALD method can be used as the insulator 642. This allows the insulator 642 to be formed with good coverage. Therefore, even if pinholes or discontinuities are formed in the insulator 641 due to unevenness of the base, the insulator 642 can cover them, thereby reducing diffusion of hydrogen into the conductor 610, the conductor 612, and the insulator 586.

[0416] 17 can prevent impurities such as water and hydrogen from diffusing toward the transistor 500 and the capacitor 600 through the insulator 512, the insulator 514, the insulator 641, the insulator 642, etc. Furthermore, oxygen contained in the insulator 580 and the like can be prevented from diffusing to the outside through the insulator 574, the insulator 641, the insulator 642, etc.

[0417] By applying the structure described in this embodiment to a semiconductor device including a transistor including an oxide semiconductor, fluctuations in the electrical characteristics of the transistor can be suppressed and reliability can be improved.

[0418] Furthermore, in a semiconductor device using a transistor having an oxide semiconductor, the area of ​​a circuit constituting the semiconductor device can be reduced by achieving a stacked structure, miniaturization, high integration, and the like. In particular, by using a ferroelectric capacitor as a capacitor included in a semiconductor device, the capacitance value of the capacitor can be increased, thereby enabling miniaturization of the capacitor. Therefore, the area of ​​a circuit including the capacitor can be reduced. Furthermore, as described in this embodiment, stacking transistors and capacitors can increase the circuit scale while suppressing an increase in the circuit area of ​​the semiconductor device.

[0419] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like.

[0420] (Embodiment 3) In this embodiment, a metal oxide (hereinafter also referred to as an oxide semiconductor) that can be used for the OS transistor described in the above embodiment will be described.

[0421] The metal oxide preferably contains at least indium or zinc. It is particularly preferable that it contains indium and zinc. In addition to these, it is preferable that it contains aluminum, gallium, yttrium, tin, etc. It may also contain one or more elements selected from boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt, etc.

[0422] <Classification of crystal structures> First, classification of crystal structures in oxide semiconductors will be described with reference to Fig. 18A. Fig. 18A is a diagram illustrating classification of crystal structures of oxide semiconductors, typically IGZO (a metal oxide containing In, Ga, and Zn).

[0423] As shown in FIG. 18A, oxide semiconductors are broadly classified into "amorphous," "crystalline," and "crystal." "Amorphous" includes completely amorphous. "Crystalline" includes c-axis-aligned crystalline (CAAC), nanocrystalline (nc), and cloud-aligned composite (CAC). The "Crystalline" classification excludes single crystal, polycrystal, and completely amorphous. "Crystalline" includes single crystal and polycrystal.

[0424] The structure within the bold frame shown in Figure 18A is an intermediate state between "Amorphous" and "Crystal" and belongs to a new boundary region (New crystalline phase). In other words, this structure can be said to be completely different from the energetically unstable "Amorphous" and "Crystal."

[0425] The crystalline structure of a film or substrate can be evaluated using X-ray diffraction (XRD) spectroscopy. Figure 18B shows the XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement of a CAAC-IGZO film classified as "Crystalline." The GIXD method is also known as the thin-film method or the Seemann-Bohlin method. Hereinafter, the XRD spectrum obtained by GIXD measurement shown in Figure 18B may be simply referred to as the XRD spectrum. The composition of the CAAC-IGZO film shown in Figure 18B is approximately In:Ga:Zn = 4:2:3 [atomic ratio]. The thickness of the CAAC-IGZO film shown in Figure 18B is 500 nm.

[0426] As shown in Figure 18B, a clear peak indicating crystallinity is detected in the XRD spectrum of the CAAC-IGZO film. Specifically, a peak indicating c-axis orientation is detected near 2θ = 31° in the XRD spectrum of the CAAC-IGZO film. As shown in Figure 18B, the peak near 2θ = 31° is asymmetric with respect to the angle at which the peak intensity is detected.

[0427] The crystalline structure of a film or substrate can be evaluated by a diffraction pattern (also called a nanobeam electron diffraction pattern) observed using nanobeam electron diffraction (NBED). The diffraction pattern of a CAAC-IGZO film is shown in Figure 18C. Figure 18C shows a diffraction pattern observed using NBED, in which an electron beam is incident parallel to the substrate. The composition of the CAAC-IGZO film shown in Figure 18C is approximately In:Ga:Zn = 4:2:3 [atomic ratio]. In nanobeam electron diffraction, electron diffraction is performed using a probe diameter of 1 nm.

[0428] As shown in FIG. 18C, multiple spots indicating c-axis orientation are observed in the diffraction pattern of the CAAC-IGZO film.

[0429] <<Oxide semiconductor structure>> Note that oxide semiconductors may be classified differently from those shown in FIG. 18A when focusing on their crystal structures. For example, oxide semiconductors are divided into single-crystal oxide semiconductors and other non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above-mentioned CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, amorphous-like oxide semiconductors (a-like OSs), amorphous oxide semiconductors, and the like.

[0430] Here, the above-mentioned CAAC-OS, nc-OS, and a-like OS will be described in detail.

[0431] [CAAC-OS] CAAC-OS is an oxide semiconductor having multiple crystalline regions, each with its c-axis aligned in a specific direction. The specific direction can be the thickness direction of the CAAC-OS film, the normal direction to the surface on which the CAAC-OS film is formed, or the normal direction to the surface of the CAAC-OS film. A crystalline region is a region with periodic atomic arrangement. Considering an atomic arrangement as a lattice arrangement, a crystalline region can also be a region with a uniform lattice arrangement. Furthermore, CAAC-OS has a region where multiple crystalline regions are connected in the ab-plane direction, and the region may have distortion. The distortion refers to a location where the lattice orientation changes between a region with a uniform lattice arrangement and a region with a different uniform lattice arrangement in the region where multiple crystalline regions are connected. In other words, CAAC-OS is an oxide semiconductor with a c-axis aligned but no clear orientation in the ab-plane direction.

[0432] Each of the multiple crystalline regions is composed of one or more minute crystals (crystals with a maximum diameter of less than 10 nm). When a crystalline region is composed of one minute crystal, the maximum diameter of the crystalline region is less than 10 nm. When a crystalline region is composed of many minute crystals, the size of the crystalline region may be several tens of nm.

[0433] In an In-M-Zn oxide (wherein element M is one or more elements selected from aluminum, gallium, yttrium, tin, titanium, etc.), the CAAC-OS tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium (In) and oxygen (hereinafter referred to as an In layer) and a layer containing element M, zinc (Zn), and oxygen (hereinafter referred to as an (M, Zn) layer) are stacked. Note that indium and element M are mutually substituted. Therefore, the (M, Zn) layer may contain indium. Furthermore, the In layer may contain element M. Furthermore, the In layer may contain Zn. The layered structure is observed as a lattice image in a high-resolution TEM image, for example.

[0434] When the CAAC-OS film is subjected to structural analysis using, for example, an XRD apparatus, a peak indicating c-axis orientation is detected at or near 2θ=31° in out-of-plane XRD measurement using θ / 2θ scan. Note that the position of the peak indicating c-axis orientation (2θ value) may vary depending on the type and composition of the metallic elements constituting the CAAC-OS.

[0435] Furthermore, for example, in the electron diffraction pattern of the CAAC-OS film, multiple bright spots are observed, and the spots are observed at positions that are point-symmetric with respect to the spot of the incident electron beam that has passed through the sample (also called the direct spot).

[0436] When the crystalline region is observed from the specific direction, the lattice arrangement in the crystalline region is basically a hexagonal lattice, but the unit cell is not necessarily a regular hexagon and may be non-regular hexagonal. The distortion may also have a pentagonal, heptagonal, or other lattice arrangement. In the CAAC-OS, no clear grain boundaries can be identified even near the distortion. This indicates that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is thought to be because the CAAC-OS can tolerate distortion due to the lack of close-packed oxygen atom arrangement in the ab-plane direction and the change in interatomic bond distance caused by metal atom substitution.

[0437] A crystal structure with clear grain boundaries is called polycrystalline. Grain boundaries act as recombination centers, trapping carriers and potentially causing a decrease in the on-state current and field-effect mobility of a transistor. Therefore, CAAC-OS, which lacks clear grain boundaries, is one of the crystalline oxides with a crystal structure suitable for use in the semiconductor layer of a transistor. Zn is preferred for use in CAAC-OS. For example, In-Zn oxide and In-Ga-Zn oxide are suitable because they can suppress the generation of grain boundaries more effectively than In oxide.

[0438] The CAAC-OS is an oxide semiconductor with high crystallinity and no clear grain boundaries. Therefore, it can be said that the CAAC-OS is less susceptible to a decrease in electron mobility due to grain boundaries. Furthermore, since the crystallinity of an oxide semiconductor can be reduced by impurities or defects, the CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, oxide semiconductors with CAAC-OS have stable physical properties. Therefore, oxide semiconductors with CAAC-OS are heat-resistant and highly reliable. Furthermore, the CAAC-OS is stable even under high temperatures (so-called thermal budget) during the manufacturing process. Therefore, using a CAAC-OS for an OS transistor enables greater flexibility in the manufacturing process.

[0439] [nc-OS] The nc-OS has periodic atomic arrangement in a microscopic region (e.g., a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). In other words, the nc-OS has microcrystalline structures. The size of the microcrystalline structures is, for example, 1 nm to 10 nm, particularly 1 nm to 3 nm, and therefore the microcrystalline structures are also called nanocrystalline structures. Furthermore, the nc-OS exhibits no regularity in the crystal orientation between different nanocrystalline structures. Therefore, the entire film lacks orientation. Therefore, depending on the analytical method, the nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor. For example, when a structural analysis of an nc-OS film is performed using an XRD apparatus, no peaks indicating crystallinity are detected in out-of-plane XRD measurements using θ / 2θ scanning. Furthermore, when an nc-OS film is subjected to electron diffraction (also known as selected-area electron diffraction) using an electron beam with a probe diameter larger than that of nanocrystalline structures (e.g., 50 nm or larger), a halo-like diffraction pattern is observed. On the other hand, when electron diffraction (also called nanobeam electron diffraction) is performed on an nc-OS film using an electron beam with a probe diameter close to or smaller than the size of the nanocrystals (for example, 1 nm to 30 nm), an electron diffraction pattern can be obtained in which multiple spots are observed within a ring-shaped region centered on the direct spot.

[0440] [a-like OS] The a-like OS is an oxide semiconductor having a structure between the nc-OS and the amorphous oxide semiconductor. The a-like OS has a pore or low-density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. Furthermore, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and CAAC-OS.

[0441] <<Oxide semiconductor structure>> Next, the above-mentioned CAC-OS will be described in detail, which relates to the material composition.

[0442] [CAC-OS] CAC-OS is a material structure in which elements constituting a metal oxide are unevenly distributed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof. Note that, hereinafter, a metal oxide in which one or more metal elements are unevenly distributed and the regions containing the metal elements are mixed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof, is also referred to as a mosaic or patch state.

[0443] Furthermore, CAC-OS has a mosaic structure in which the material is separated into first and second regions, and the first regions are distributed throughout the film (hereinafter also referred to as a cloud structure). That is, CAC-OS is a composite metal oxide having a structure in which the first and second regions are mixed.

[0444] Here, the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In-Ga-Zn oxide are denoted as [In], [Ga], and [Zn], respectively. For example, in the CAC-OS in the In-Ga-Zn oxide, the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film. The second region is a region where [Ga] is larger than [Ga] in the composition of the CAC-OS film. Alternatively, for example, the first region is a region where [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region. The second region is a region where [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.

[0445] Specifically, the first region is a region whose main component is indium oxide, indium zinc oxide, or the like. The second region is a region whose main component is gallium oxide, gallium zinc oxide, or the like. In other words, the first region can be rephrased as a region whose main component is In. The second region can be rephrased as a region whose main component is Ga.

[0446] It should be noted that there are cases where a clear boundary between the first region and the second region cannot be observed.

[0447] For example, in the case of CAC-OS in In-Ga-Zn oxide, EDX mapping obtained using EDX (Energy Dispersive X-ray spectroscopy) confirms that the CAC-OS has a structure in which a region mainly composed of In (first region) and a region mainly composed of Ga (second region) are unevenly distributed and mixed.

[0448] When CAC-OS is used in a transistor, the conductivity due to the first region and the insulating property due to the second region act in a complementary manner, thereby providing the CAC-OS with a switching function (the ability to turn on and off). In other words, CAC-OS has a conductive function in part of the material and an insulating function in part of the material, and the material as a whole functions as a semiconductor. By separating the conductive function from the insulating function, both functions can be maximized. Therefore, by using CAC-OS in a transistor, a high on-current (I on ), high field-effect mobility (μ), and good switching behavior can be achieved.

[0449] Oxide semiconductors have a variety of structures, each with different characteristics. The oxide semiconductor of one embodiment of the present invention may include two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS.

[0450] <Transistors containing oxide semiconductors> Next, a case where the oxide semiconductor is used in a transistor will be described.

[0451] By using the oxide semiconductor for a transistor, a transistor with high field-effect mobility and high reliability can be realized.

[0452] For the transistor, an oxide semiconductor with a low carrier concentration is preferably used. For example, the carrier concentration of the oxide semiconductor is 1×10 17 cm -3 Less than 1 × 10 15 cm -3 or less, more preferably 1 × 10 13 cm -3 Less than 1×10, more preferably 11 cm -3 or less, more preferably 1 × 10 10 cm -3 Less than 1 x 10 -9 cm-3 The above is the case. Note that in order to reduce the carrier concentration of an oxide semiconductor film, the impurity concentration in the oxide semiconductor film may be reduced to reduce the density of defect states. In this specification and the like, a semiconductor having a low impurity concentration and a low density of defect states is referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor. Note that an oxide semiconductor having a low carrier concentration may also be referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor.

[0453] Furthermore, a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has a low density of defect states, and therefore the density of trap states may also be low.

[0454] Furthermore, charges trapped in the trap states of an oxide semiconductor take a long time to disappear and may behave like fixed charges. Therefore, a transistor in which a channel formation region is formed in an oxide semiconductor with a high density of trap states may have unstable electrical characteristics.

[0455] Therefore, in order to stabilize the electrical characteristics of a transistor, it is effective to reduce the impurity concentration in the oxide semiconductor. Furthermore, in order to reduce the impurity concentration in the oxide semiconductor, it is preferable to also reduce the impurity concentration in the adjacent film. Examples of impurities include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, and silicon.

[0456] <Impurities> Here, the influence of each impurity in an oxide semiconductor will be described.

[0457] When an oxide semiconductor contains silicon or carbon, which is one of the Group 14 elements, defect levels are formed in the oxide semiconductor. Therefore, the concentrations of silicon and carbon in the oxide semiconductor and those near the interface with the oxide semiconductor (concentrations obtained by secondary ion mass spectrometry (SIMS)) are calculated to be 2×10 18 atoms / cm 3 Less than or equal to 2 x 10 17atoms / cm 3 The following applies.

[0458] Furthermore, when an oxide semiconductor contains an alkali metal or alkaline earth metal, defect levels may be formed and carriers may be generated. Therefore, a transistor using an oxide semiconductor containing an alkali metal or alkaline earth metal is likely to have normally-on characteristics. For this reason, when the concentration of the alkali metal or alkaline earth metal in the oxide semiconductor obtained by SIMS is 1×10 18 atoms / cm 3 Less than or equal to 2 x 10 16 atoms / cm 3 Do the following:

[0459] Furthermore, when nitrogen is contained in an oxide semiconductor, electrons serving as carriers are generated, the carrier concentration increases, and the semiconductor is likely to become n-type. As a result, a transistor using an oxide semiconductor containing nitrogen as a semiconductor tends to have normally-on characteristics. Alternatively, when nitrogen is contained in an oxide semiconductor, trap states may be formed. As a result, the electrical characteristics of the transistor may become unstable. For this reason, the nitrogen concentration in the oxide semiconductor obtained by SIMS is set to 5×10 19 atoms / cm 3 Less than 5 x 10 18 atoms / cm 3 Less than 1×10, more preferably 18 atoms / cm 3 Less than 5 × 10, more preferably 17 atoms / cm 3 Do the following:

[0460] Furthermore, hydrogen contained in an oxide semiconductor may react with oxygen bonded to a metal atom to form water, which may form an oxygen vacancy. When hydrogen enters the oxygen vacancy, electrons serving as carriers may be generated. Furthermore, some of the hydrogen may bond with oxygen bonded to a metal atom to generate electrons serving as carriers. Therefore, a transistor using an oxide semiconductor containing hydrogen is likely to have normally-on characteristics. For this reason, it is preferable to reduce the amount of hydrogen in the oxide semiconductor as much as possible. Specifically, the hydrogen concentration in an oxide semiconductor measured by SIMS is 1×10 20 atoms / cm 3 Less than 1 x 10 19 atoms / cm 3 less than 5 × 10 18 atoms / cm 3 less than 1×10 18 atoms / cm 3 Make it less than.

[0461] When an oxide semiconductor with sufficiently reduced impurities is used for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0462] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like.

[0463] (Fourth embodiment) This embodiment mode will describe an example of a semiconductor wafer on which the semiconductor device or the like described in the above embodiment mode is formed, and an example of an electronic component in which the semiconductor device is incorporated.

[0464] <Semiconductor wafer> First, an example of a semiconductor wafer on which semiconductor devices and the like are formed will be described with reference to FIG. 19A.

[0465] 19A includes a wafer 4801 and a plurality of circuit portions 4802 provided on the upper surface of the wafer 4801. On the upper surface of the wafer 4801, a portion where the circuit portions 4802 are not present is a spacing 4803, which is a region for dicing.

[0466] The semiconductor wafer 4800 can be manufactured by forming a plurality of circuit portions 4802 on the surface of the wafer 4801 in a previous process. After that, the surface of the wafer 4801 opposite to the surface on which the plurality of circuit portions 4802 are formed may be ground to thin the wafer 4801. This process reduces warping of the wafer 4801 and allows for miniaturization of the component.

[0467] The next step is the dicing process. Dicing is performed along scribe lines SCL1 and SCL2 (sometimes called dicing lines or cutting lines) indicated by dashed lines. To facilitate the dicing process, spacing 4803 is preferably arranged so that multiple scribe lines SCL1 are parallel to each other, multiple scribe lines SCL2 are parallel to each other, and scribe lines SCL1 and SCL2 are perpendicular to each other.

[0468] By performing a dicing process, chips 4800a as shown in FIG. 19B can be cut out from semiconductor wafer 4800. Chip 4800a has wafer 4801a, circuit portion 4802, and spacing 4803a. It is preferable to make spacing 4803a as small as possible. In this case, it is sufficient that the width of spacing 4803 between adjacent circuit portions 4802 is approximately the same length as the cutting margin of scribe line SCL1 or the cutting margin of scribe line SCL2.

[0469] Note that the shape of the element substrate of one embodiment of the present invention is not limited to the shape of the semiconductor wafer 4800 illustrated in Figure 19A. For example, the semiconductor wafer may have a rectangular shape. The shape of the element substrate can be changed as appropriate depending on the manufacturing process and the apparatus for manufacturing the element.

[0470] <Electronic components> FIG. 19C shows a perspective view of electronic component 4700 and a substrate (mounting substrate 4704) on which electronic component 4700 is mounted. Electronic component 4700 shown in FIG. 19C has chip 4800a in mold 4711. Note that chip 4800a shown in FIG. 19C has a configuration in which circuit unit 4802 is stacked. In other words, the semiconductor device described in the above embodiment can be used as circuit unit 4802. FIG. 19C omits a portion to show the interior of electronic component 4700. Electronic component 4700 has lands 4712 on the outside of mold 4711. Lands 4712 are electrically connected to electrode pads 4713, and electrode pads 4713 are electrically connected to chip 4800a by wires 4714. Electronic component 4700 is mounted on, for example, a printed circuit board 4702. A plurality of such electronic components are combined and electrically connected on a printed circuit board 4702 to complete a mounting board 4704 .

[0471] 19D shows a perspective view of electronic component 4730. Electronic component 4730 is an example of a SiP (System in Package) or MCM (Multi Chip Module). Electronic component 4730 has an interposer 4731 provided on a package substrate 4732 (printed circuit board), and a semiconductor device 4735 and multiple semiconductor devices 4710 provided on interposer 4731.

[0472] The electronic component 4730 includes a semiconductor device 4710. The semiconductor device 4710 can be, for example, any of the semiconductor devices described in the above embodiments, a high bandwidth memory (HBM), or the like. The semiconductor device 4735 can be an integrated circuit (semiconductor device) such as a CPU, a GPU, an FPGA, or a memory device.

[0473] A ceramic substrate, a plastic substrate, a glass epoxy substrate, or the like can be used for the package substrate 4732. A silicon interposer, a resin interposer, or the like can be used for the interposer 4731.

[0474] The interposer 4731 has multiple wirings and functions to electrically connect multiple integrated circuits with different terminal pitches. The multiple wirings are provided in a single layer or multiple layers. The interposer 4731 also functions to electrically connect the integrated circuits provided on the interposer 4731 to electrodes provided on the package substrate 4732. For these reasons, the interposer is sometimes called a "rewiring substrate" or "intermediate substrate." In some cases, through electrodes are provided in the interposer 4731, and the integrated circuits and the package substrate 4732 are electrically connected using the through electrodes. In addition, in a silicon interposer, TSVs (Through Silicon Vias) can also be used as through electrodes.

[0475] It is preferable to use a silicon interposer as the interposer 4731. Since a silicon interposer does not require an active element, it can be manufactured at a lower cost than an integrated circuit. On the other hand, since the wiring of a silicon interposer can be formed using a semiconductor process, it is easy to form fine wiring that is difficult to form with a resin interposer.

[0476] HBM requires many interconnects to achieve a wide memory bandwidth. Therefore, the interposer that implements HBM requires fine and high-density interconnects. Therefore, it is preferable to use a silicon interposer for implementing HBM.

[0477] Furthermore, SiP, MCM, etc. that use silicon interposers are less likely to experience a decrease in reliability due to differences in the expansion coefficient between the integrated circuit and the interposer. Furthermore, because the silicon interposer has a highly flat surface, poor connections between the integrated circuit mounted on the silicon interposer and the silicon interposer are less likely to occur. It is particularly preferable to use silicon interposers in 2.5D packages (2.5-dimensional packaging), in which multiple integrated circuits are arranged horizontally on an interposer.

[0478] A heat sink (heat sink) may be provided overlapping the electronic component 4730. When a heat sink is provided, it is preferable to align the height of an integrated circuit provided on the interposer 4731. For example, in the electronic component 4730 shown in this embodiment, it is preferable to align the height of the semiconductor device 4710 and the height of the semiconductor device 4735.

[0479] In order to mount electronic component 4730 on another substrate, electrodes 4733 may be provided on the bottom of package substrate 4732. Fig. 19D shows an example in which electrodes 4733 are formed with solder balls. By providing solder balls in a matrix on the bottom of package substrate 4732, BGA (Ball Grid Array) mounting can be achieved. Electrodes 4733 may also be formed with conductive pins. By providing conductive pins in a matrix on the bottom of package substrate 4732, PGA (Pin Grid Array) mounting can be achieved.

[0480] The electronic component 4730 can be mounted on other substrates using various mounting methods, including but not limited to BGA and PGA, such as a staggered pin grid array (SPGA), a land grid array (LGA), a quad flat package (QFP), a quad flat J-leaded package (QFJ), or a quad flat non-leaded package (QFN).

[0481] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like.

[0482] (Embodiment 5) In this embodiment, a CPU that can include the semiconductor device of the above embodiment will be described.

[0483] FIG. 20 is a block diagram showing the configuration of an example of a CPU that partially uses the semiconductor device described in the above embodiments.

[0484] The CPU shown in FIG. 20 includes an ALU 1191 (Arithmetic logic unit, arithmetic circuit), an ALU controller 1192, an instruction decoder 1193, an interrupt controller 1194, a timing controller 1195, a register 1196, a register controller 1197, a bus interface 1198 (Bus I / F), a rewritable ROM 1199, and a ROM interface 1189 (ROM I / F) on a substrate 1190. The substrate 1190 may be a semiconductor substrate, an SOI substrate, a glass substrate, or the like. The ROM 1199 and the ROM interface 1189 may be provided on separate chips. Of course, the CPU shown in FIG. 20 is merely an example of a simplified configuration, and actual CPUs have a wide variety of configurations depending on their applications. For example, a configuration including the CPU or arithmetic circuit shown in FIG. 20 may be considered as one core, and a configuration including multiple such cores, each operating in parallel, such as a GPU, may be used. The number of bits that the CPU can handle in its internal arithmetic circuit and data bus can be, for example, 8 bits, 16 bits, 32 bits, 64 bits, and the like.

[0485] An instruction input to the CPU via the bus interface 1198 is input to the instruction decoder 1193 , decoded, and then input to the ALU controller 1192 , interrupt controller 1194 , register controller 1197 , and timing controller 1195 .

[0486] The ALU controller 1192, interrupt controller 1194, register controller 1197, and timing controller 1195 perform various controls based on the decoded instructions. Specifically, the ALU controller 1192 generates signals for controlling the operation of the ALU 1191. Furthermore, the interrupt controller 1194 processes interrupt requests from external input / output devices, peripheral circuits, etc., based on their priority and mask status while the CPU is executing a program. The register controller 1197 generates an address for the register 1196, and reads or writes data from or to the register 1196 depending on the state of the CPU.

[0487] Furthermore, the timing controller 1195 generates signals that control the timing of the operations of the ALU 1191, ALU controller 1192, instruction decoder 1193, interrupt controller 1194, and register controller 1197. For example, the timing controller 1195 includes an internal clock generation unit that generates an internal clock signal based on a reference clock signal, and supplies the internal clock signal to the various circuits described above.

[0488] 20, memory cells are provided in a register 1196. The register 1196 may include, for example, the semiconductor device described in the above embodiment.

[0489] In the CPU shown in FIG. 20, the register controller 1197 selects the holding operation in the register 1196 in accordance with an instruction from the ALU 1191. That is, it selects whether to hold data in a flip-flop or a capacitive element in the memory cell of the register 1196. If holding data in a flip-flop is selected, a power supply voltage is supplied to the memory cell in the register 1196. If holding data in a capacitive element is selected, the data is rewritten to the capacitive element, and the supply of power supply voltage to the memory cell in the register 1196 can be stopped.

[0490] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like.

[0491] (Sixth embodiment) In this embodiment, an example of an electronic device including the semiconductor device described in the above embodiment will be described. Note that Figures 21A to 21J and 22A to 22E illustrate how an electronic component 4700 including the semiconductor device is included in each electronic device.

[0492] [mobile phone] 21A is a mobile phone (smartphone), which is one type of information terminal. The information terminal 5500 has a housing 5510 and a display unit 5511. As input interfaces, a touch panel is provided on the display unit 5511 and buttons are provided on the housing 5510.

[0493] By applying the semiconductor device described in the above embodiment, the information terminal 5500 can hold temporary files (for example, caches when using a web browser) generated when an application is executed.

[0494] By applying the semiconductor device described in the above embodiment to the information terminal 5500, the information terminal 5500 can have high reliability.

[0495] [Wearable devices] 21B illustrates an information terminal 5900, which is an example of a wearable terminal. The information terminal 5900 includes a housing 5901, a display unit 5902, operation buttons 5903, an operator 5904, a band 5905, and the like.

[0496] Like the above-described information terminal 5500, the wearable terminal can hold temporary files generated when an application is executed by applying the semiconductor device described in the above embodiment.

[0497] By applying the semiconductor device described in the above embodiment modes to the information terminal 5900, the information terminal 5900 can have high reliability.

[0498] [Information terminal] 21C also shows a desktop information terminal 5300. The desktop information terminal 5300 has a main body 5301 of the information terminal, a display 5302, and a keyboard 5303.

[0499] The desktop information terminal 5300, like the information terminal 5500 described above, can hold temporary files generated when an application is executed by applying the semiconductor device described in the above embodiment.

[0500] 21A to 21C are taken as examples of electronic devices, and are illustrated in Fig. 21A to 21C, but information terminals other than smartphones, wearable terminals, and desktop information terminals can also be applied. Examples of information terminals other than smartphones, wearable terminals, and desktop information terminals include PDAs (Personal Digital Assistants), notebook information terminals, and workstations.

[0501] By applying the semiconductor device described in the above embodiment modes to the desktop information terminal 5300, the desktop information terminal 5300 can have high reliability.

[0502] [electric appliances] 21D also illustrates, as an example of an electrical appliance, an electric refrigerator-freezer 5800. The electric refrigerator-freezer 5800 includes a housing 5801, a refrigerator door 5802, a freezer door 5803, and the like.

[0503] By applying the semiconductor device described in the above embodiment to the electric refrigerator-freezer 5800, the electric refrigerator-freezer 5800 can be used as, for example, IoT (Internet of Things). By using IoT, the electric refrigerator-freezer 5800 can transmit and receive information about ingredients stored in the electric refrigerator-freezer 5800, expiration dates of the ingredients, and the like, to the above-mentioned information terminal or the like via the Internet or the like. Furthermore, when transmitting the information, the electric refrigerator-freezer 5800 can store the information as a temporary file in the semiconductor device.

[0504] In this example, an electric refrigerator-freezer has been described as an electrical appliance, but other electrical appliances include, for example, vacuum cleaners, microwave ovens, electric ovens, rice cookers, water heaters, induction cookers, water dispensers, heating and cooling appliances including air conditioners, washing machines, dryers, audio-visual equipment, etc.

[0505] By applying the semiconductor device described in the above embodiment to the electric refrigerator-freezer 5800, the electric refrigerator-freezer 5800 can have high reliability.

[0506] [Game consoles] 21E shows a portable game machine 5200, which is an example of a game machine. The portable game machine 5200 includes a housing 5201, a display portion 5202, buttons 5203, and the like.

[0507] FIG. 21F further illustrates a stationary game console 7500, which is an example of a game console. The stationary game console 7500 includes a main unit 7520 and a controller 7522. The controller 7522 can be connected to the main unit 7520 wirelessly or via a cable. Although not shown in FIG. 21F, the controller 7522 can include a display unit that displays game images, a touch panel that serves as an input interface other than buttons, a stick, a rotary knob, a sliding knob, or the like. The shape of the controller 7522 is not limited to the shape shown in FIG. 21F, and the shape of the controller 7522 may be modified in various ways depending on the genre of the game. For example, in a shooting game such as an FPS (First Person Shooter), a controller shaped like a gun with a trigger as a button can be used. In a music game, for example, a controller shaped like a musical instrument, music equipment, or the like can be used. Furthermore, the stationary game console may not use a controller, but may instead be equipped with a camera, depth sensor, microphone, etc., and be operated by the game player's gestures and / or voice.

[0508] Furthermore, the images of the above-mentioned game machines can be output by display devices such as television devices, personal computer displays, game displays, and head-mounted displays.

[0509] By applying the semiconductor device described in the above embodiment modes to the portable game machine 5200 and the stationary game machine 7500, the portable game machine 5200 can have high reliability.

[0510] Furthermore, by applying the semiconductor device described in the above embodiments to the portable game console 5200 and the stationary game console 7500, temporary files and the like necessary for calculations that occur during game execution can be stored.

[0511] 21E and 21F illustrate a portable game machine and a stationary game machine as examples of game machines, but the electronic device of one embodiment of the present invention is not limited to these. Examples of the electronic device of one embodiment of the present invention include an arcade game machine installed in an entertainment facility (such as a game center or an amusement park) and a pitching machine for batting practice installed in a sports facility.

[0512] [Moving object] The semiconductor device described in the above embodiment mode can be applied to automobiles, which are moving objects, and to the vicinity of a driver's seat of an automobile.

[0513] FIG. 21G illustrates an automobile 5700 as an example of a moving object.

[0514] An instrument panel that provides various information by displaying a speedometer, tachometer, mileage, fuel gauge, gear status, air conditioning settings, etc. may be provided around the driver's seat of the automobile 5700. A display device that shows this information may also be provided around the driver's seat.

[0515] In particular, by displaying images from an imaging device (not shown) installed in the automobile 5700, the display device can compensate for visibility obstructed by pillars, blind spots around the driver's seat, etc., thereby improving safety.

[0516] The semiconductor device described in the above embodiment can temporarily store information, and therefore, for example, the computer can be used to store necessary temporary information in an automatic driving system for the automobile 5700, a system that provides road guidance, hazard prediction, or the like. The display device may be configured to display temporary information such as road guidance and hazard prediction. Furthermore, the display device may be configured to store video images from a driving recorder installed in the automobile 5700.

[0517] Although an automobile is described above as an example of a moving body, the moving body is not limited to an automobile. For example, moving bodies may include trains, monorails, ships, and flying bodies (helicopters, unmanned aerial vehicles (drones), airplanes, rockets, etc.).

[0518] By applying the semiconductor device described in the above embodiment modes to the automobile 5700, the automobile 5700 can have high reliability.

[0519] [camera] The semiconductor device described in the above embodiment can be applied to a camera.

[0520] 21H shows a digital camera 6240, which is an example of an imaging device. The digital camera 6240 has a housing 6241, a display unit 6242, operation buttons 6243, a shutter button 6244, etc., and is also equipped with a detachable lens 6246. Note that, here, the digital camera 6240 is configured so that the lens 6246 can be detached from the housing 6241 and replaced, but the lens 6246 and the housing 6241 may be integrated. The digital camera 6240 may also be configured so that a strobe device, a viewfinder, etc. can be separately attached.

[0521] By applying the semiconductor device described in the above embodiment modes to the digital camera 6240, the digital camera 6240 can have high reliability.

[0522] [Video camera] The semiconductor device described in the above embodiment can be applied to a video camera.

[0523] 21I shows a video camera 6300, which is an example of an imaging device. The video camera 6300 has a first housing 6301, a second housing 6302, a display unit 6303, operation keys 6304, a lens 6305, a connection unit 6306, and the like. The operation keys 6304 and the lens 6305 are provided in the first housing 6301, and the display unit 6303 is provided in the second housing 6302. The first housing 6301 and the second housing 6302 are connected by the connection unit 6306, and the angle between the first housing 6301 and the second housing 6302 can be changed by the connection unit 6306. The image on the display unit 6303 may be switched according to the angle between the first housing 6301 and the second housing 6302 at the connection unit 6306.

[0524] When recording video captured by the video camera 6300, it is necessary to encode the video according to the data recording format. By using the semiconductor device described above, the video camera 6300 can store temporary files generated during encoding.

[0525] By applying the semiconductor device described in the above embodiment modes to the video camera 6300, the video camera 6300 can have high reliability.

[0526] [ICD] The semiconductor device described in the above embodiment can be applied to an implantable cardioverter defibrillator (ICD).

[0527] 21J is a cross-sectional schematic diagram showing an example of an ICD. ICD main body 5400 has at least battery 5401, electronic components 4700, a regulator, a control circuit, antenna 5404, wire 5402 to the right atrium, and wire 5403 to the right ventricle.

[0528] The ICD body 5400 is surgically placed in the body, and the two wires are passed through the subclavian vein 5405 and superior vena cava 5406 of the human body so that one wire tip is placed in the right ventricle and the other wire tip is placed in the right atrium.

[0529] The ICD main body 5400 functions as a pacemaker and paces the heart when the heart rate falls outside a specified range. If the heart rate does not improve with pacing (fast ventricular tachycardia, ventricular fibrillation, etc.), treatment with an electric shock is administered.

[0530] The ICD main body 5400 must constantly monitor the heart rate in order to properly perform pacing and administer electric shocks. Therefore, the ICD main body 5400 has a sensor for detecting the heart rate. The ICD main body 5400 can also store in the electronic component 4700 the heart rate data acquired by the sensor, the number of pacing treatments performed, the duration, etc.

[0531] Furthermore, the antenna 5404 can receive power, which is then charged into the battery 5401. Furthermore, the ICD main body 5400 can improve safety by having multiple batteries. Specifically, even if some of the batteries in the ICD main body 5400 become unusable, the remaining batteries can continue to function, so the ICD main body 5400 can also function as an auxiliary power source.

[0532] In addition to the antenna 5404 that can receive power, an antenna that can transmit physiological signals may be provided, and a system for monitoring cardiac activity may be configured in which physiological signals such as pulse rate, respiratory rate, heart rate, and body temperature can be confirmed on an external monitor device.

[0533] By applying the semiconductor device described in the above embodiment mode to the ICD main body 5400, a highly reliable ICD main body 5400 can be realized.

[0534] [PC expansion device] The semiconductor device described in the above embodiment can be applied to computers such as PCs (Personal Computers) and expansion devices for information terminals.

[0535] Fig. 22A shows an example of such an expansion device: a portable expansion device 6100 mounted on a chip capable of storing information and externally attached to a PC. The expansion device 6100 can store information using the chip by connecting to a PC via, for example, a USB (Universal Serial Bus). Note that while Fig. 22A shows a portable expansion device 6100, the expansion device according to one aspect of the present invention is not limited to this; for example, it may be a relatively large expansion device equipped with a cooling fan or the like.

[0536] The expansion device 6100 has a housing 6101, a cap 6102, a USB connector 6103, and a board 6104. The board 6104 is housed in the housing 6101. The board 6104 is provided with circuits that drive the semiconductor devices and the like described in the above embodiments. For example, an electronic component 4700 and a controller chip 6106 are attached to the board 6104. The USB connector 6103 functions as an interface for connecting to an external device.

[0537] By applying the semiconductor device described in the above embodiment to the expansion device 6100, a highly reliable expansion device 6100 can be realized.

[0538] [SD card] The semiconductor device described in the above embodiment can be applied to an SD card that can be attached to electronic devices such as information terminals and digital cameras.

[0539] FIG. 22B is a schematic diagram of the external appearance of an SD card, and FIG. 22C is a schematic diagram of the internal structure of the SD card. The SD card 5110 has a housing 5111, a connector 5112, and a substrate 5113. The connector 5112 functions as an interface for connecting to an external device. The substrate 5113 is housed in the housing 5111. A semiconductor device and a circuit for driving the semiconductor device are provided on the substrate 5113. For example, an electronic component 4700 and a controller chip 5115 are attached to the substrate 5113. Note that the circuit configurations of the electronic component 4700 and the controller chip 5115 are not limited to those described above, and the circuit configurations may be changed as appropriate depending on the situation. For example, the write circuit, row driver, read circuit, etc. provided in the electronic component may be incorporated into the controller chip 5115 rather than the electronic component 4700.

[0540] The capacity of the SD card 5110 can be increased by providing the electronic component 4700 also on the back side of the substrate 5113. A wireless chip with a wireless communication function may be provided on the substrate 5113. This allows wireless communication between an external device and the SD card 5110, and enables reading and writing of data from and to the electronic component 4700.

[0541] By applying the semiconductor device described in the above embodiment to the SD card 5110, a highly reliable SD card 5110 can be realized.

[0542] [SSD] The semiconductor device described in the above embodiment can be applied to an SSD (Solid State Drive) that can be attached to electronic devices such as information terminals.

[0543] FIG. 22D is a schematic diagram of the external appearance of an SSD, and FIG. 22E is a schematic diagram of the internal structure of the SSD. The SSD 5150 includes a housing 5151, a connector 5152, and a circuit board 5153. The connector 5152 functions as an interface for connecting to an external device. The circuit board 5153 is housed in the housing 5151. A semiconductor device and a circuit for driving the semiconductor device are provided on the circuit board 5153. For example, the circuit board 5153 is equipped with an electronic component 4700, a memory chip 5155, and a controller chip 5156. The capacity of the SSD 5150 can be increased by providing an electronic component 4700 on the back side of the circuit board 5153 as well. The memory chip 5155 incorporates a work memory. For example, a DRAM chip may be used for the memory chip 5155. The controller chip 5156 incorporates a processor, an ECC circuit, and the like. The circuit configurations of the electronic component 4700, the memory chip 5155, and the controller chip 5115 are not limited to those described above, and may be changed as appropriate depending on the situation. For example, the controller chip 5156 may also be provided with a memory that functions as a work memory.

[0544] By applying the semiconductor device described in the above embodiment to the SSD 5150, a highly reliable SSD 5150 can be realized.

[0545] By applying the semiconductor device described in the above embodiment to the semiconductor device included in the electronic device, novel electronic devices can be provided.

[0546] This embodiment mode can be appropriately combined with other embodiment modes shown in this specification and the like. [Explanation of symbols]

[0547] 10: semiconductor device, 11: curve, 12: curve, 300: transistor, 310: substrate, 310A: substrate, 312: element isolation layer, 313: semiconductor region, 314a: low resistance region, 314b: low resistance region, 315: insulator, 316: conductor, 320: insulator, 322: insulator, 324: insulator, 326: insulator, 328: conductor, 330: conductor, 350: insulator, 352: insulator, 354: insulator, 356: conductor, 360: insulator, 362: insulator, 364: insulator, 366: conductor, 411: insulator, 412: insulator, 413: insulator, 414: insulator region, 416: conductor, 500: transistor, 503: conductor, 503a: conductor, 503A: conductor, 503b: conductor, 510: insulator, 512: insulator, 514: insulator, 516: insulator, 517: insulator, 518: conductor, 519: conductor, 520: insulator, 520a: insulator, 520b: insulator, 520c: insulator, 522: insulator, 524: insulator, 530: oxide, 530a: oxide, 530b: oxide, 530ba: region, 530bb: region, 530bc: region, 540: conductor, 540a: conductor, 540b: conductor, 540c: conductor conductor, 540d: conductor, 540e: conductor, 541: insulator, 541a: insulator, 541b: insulator, 541c: insulator, 541d: insulator, 541e: insulator, 542: conductor, 542a: conductor, 542b: conductor, 543: oxide, 543a: oxide, 543b: oxide, 544: insulator, 546: conductor, 550: insulator, 550a: insulator, 550b: insulator, 552: insulator, 553: insulator, 554: insulator, 560: conductor, 560a: conductor, 560b: conductor, 561: insulator, 562: conductor, 571: insulator, 571a: Insulator, 571b: insulator, 574: insulator, 576: insulator, 580: insulator, 581: insulator, 582: insulator, 586: insulator, 600: capacitor, 601: insulator, 602: insulator, 610: conductor, 611: conductor, 612: conductor, 613: conductor, 620: conductor, 630: insulator, 631: insulator, 640: insulator, 641: insulator, 642: insulator, 650: insulator, 660: conductor, 1189: ROM interface, 1190: board, 1191: ALU, 1192: ALU controller, 1193: instruction decoder,1194: interrupt controller, 1195: timing controller, 1196: register, 1197: register controller, 1198: bus interface, 1199: ROM, 4700: electronic component, 4702: printed circuit board, 4704: mounting board, 4710: semiconductor device, 4711: mold, 4712: land, 4713: electrode pad, 4714: wire, 4730: electronic component, 4731: interposer, 4732: package substrate, 4733: electrode, 4735: semiconductor device, 4800: semiconductor wafer Ha, 4800a: chip, 4801: wafer, 4801a: wafer, 4802: circuit unit, 4803: spacing, 4803a: spacing, 5110: SD card, 5111: housing, 5112: connector, 5113: board, 5115: controller chip, 5150: SSD, 5151: housing, 5152: connector, 5153: board, 5155: memory chip, 5156: controller chip, 5200: portable game console, 5201: housing, 5202: display unit, 5203: button, 5300: desktop information terminal ,5301: main body, 5302: display, 5303: keyboard, 5400: ICD main body, 5401: battery, 5402: wire, 5403: wire, 5404: antenna, 5405: subclavian vein, 5406: superior vena cava, 5500: information terminal, 5510: housing, 5511: display unit, 5700: automobile, 5800: electric refrigerator-freezer, 5801: housing, 5802: refrigerator compartment door, 5803: freezer compartment door, 5900: information terminal, 5901: housing, 5902: display unit, 5903: operation button, 5904: operator, 5905 : Band, 6100: Expansion device, 6101: Housing, 6102: Cap, 6103: USB connector, 6104: Board, 6106: Controller chip, 6240: Digital camera, 6241: Housing, 6242: Display unit, 6243: Operation buttons, 6244: Shutter button, 6246: Lens, 6300: Video camera, 6301: Housing, 6302: Housing, 6303: Display unit, 6304: Operation keys, 6305: Lens, 6306: Connection unit, 7500: Stationary game console, 7520: Main unit, 7522: Controller,

Claims

[Claim 1] A method for driving a semiconductor device provided with a memory cell having a ferroelectric capacitor, comprising: In a first period, binary data is written to the memory cell; In a second period, the binary data is read from the memory cell; In a third period, the binary data is written back to the memory cell by causing polarization inversion in the ferroelectric capacitor.

Images