Robot and robot system

Abstract

To provide a robot and a robot system capable of suppressing deterioration in detection accuracy of an inertial sensor module configured to hardly vibrate.SOLUTION: The robot comprises: a base; a first arm that is joined to the base and that rotates around a first rotation axis with respect to the base; a second arm that is joined to the first arm and that rotates around a second rotation axis, which is parallel to the first rotation axis, with respect to the first arm; and an inertia sensor module arranged at the second arm. The second arm has an arm base that is joined to the first arm, a plurality of pillars erected from the arm base toward one side in a direction along the second rotation axis, and a mounting member fixed to the plurality of pillars, and the inertia sensor module is fixed to the mounting member.SELECTED DRAWING: Figure 10

Description

[Technical Field]

[0001] The present invention relates to a robot and a robot system. [Background technology]

[0002] The SCARA robot (horizontally articulated robot) described in Patent Document 1 has a base, a first arm rotatably connected to the base about a first rotation axis that is vertical to the base, and a second arm rotatably connected to the first arm about a second rotation axis that is vertical to the first arm. A gyro sensor module is disposed within the second arm and is fixed to the bottom base of the second arm via a spacer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-111665 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the above-described configuration in which the bottom base material of the second arm supports the gyro sensor module via a spacer, vibrations of the second arm are easily transmitted to the gyro sensor module, which may reduce the detection accuracy of the gyro sensor module. [Means for solving the problem]

[0005] The robot of the present invention comprises: a base; a first arm connected to the base and rotatable about a first rotation axis relative to the base; a second arm connected to the first arm and rotatable relative to the first arm about a second rotation axis parallel to the first rotation axis; an inertial sensor module disposed on the second arm; the second arm has an arm base connected to the first arm, a plurality of support columns erected from the arm base toward one side in a direction along the second rotation axis, and mounting members fixed to the plurality of support columns, The inertial sensor module is fixed to the mounting member.

[0006] The robot system of the present invention comprises: a robot; a control device that controls the driving of the robot, The robot includes a base and a first arm connected to the base and rotatable about a first rotation axis relative to the base; a second arm connected to the first arm and rotatable relative to the first arm about a second rotation axis parallel to the first rotation axis; an inertial sensor module disposed on the second arm; the second arm has an arm base connected to the first arm, a plurality of support columns erected from the arm base toward one side in a direction along the second rotation axis, and mounting members fixed to the plurality of support columns, The inertial sensor module is fixed to the mounting member. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a side view showing a robot according to a first embodiment. [Figure 2] FIG. 4 is a cross-sectional view showing a connecting portion between the base and the first arm. [Figure 3] FIG. 4 is a cross-sectional view of the second arm as viewed from one lateral side. [Figure 4] FIG. 10 is a cross-sectional view of the second arm as viewed from the other lateral side. [Figure 5] FIG. 4 is a top view showing the inside of the second arm. [Figure 6] FIG. 2 is an enlarged perspective view showing a tip portion of the frame. [Figure 7] FIG. 3 is an enlarged cross-sectional view showing the tip of the frame. [Figure 8] FIG. 4 is a top view showing the inside of the second arm. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] FIG. 10 is a top view showing the inside of a second arm of a robot according to a second embodiment. [Figure 12] FIG. DETAILED DESCRIPTION OF THE INVENTION

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A robot and a robot system according to the present invention will be described in detail below based on embodiments shown in the accompanying drawings.

[0009] First Embodiment FIG. 1 is a side view showing a robot according to a first embodiment. FIG. 2 is a cross-sectional view showing a connection portion between a base and a first arm. FIG. 3 is a cross-sectional view of a second arm seen from one lateral side. FIG. 4 is a cross-sectional view of a second arm seen from the other lateral side. FIG. 5 is a top view showing the inside of the second arm. FIG. 6 is an enlarged perspective view of a tip of a frame. FIG. 7 is an enlarged cross-sectional view of a tip of a frame. FIG. 8 is a top view showing the inside of the second arm. FIG. 9 is a perspective view showing the periphery of a mounting member. FIG. 10 is an exploded perspective view showing the periphery of the mounting member.

[0010] The up-down direction in FIG. 1 corresponds to the vertical direction. Therefore, hereinafter, the upper side in FIG. 1 will also be referred to as "upper" and the lower side as "lower." Furthermore, in this specification, "vertical" refers not only to the case where the two objects are aligned vertically, but also to the case where the two objects are inclined relative to the vertical within a range where the effects of the present invention can be achieved, for example, the case where the two objects are inclined within ±5° of the vertical. Similarly, in this specification, "parallel" refers not only to the case where two objects are aligned parallel to each other, but also to the case where the two objects are inclined from the parallel direction within a range where the effects of the present invention can be achieved, for example, the case where the two objects are inclined within ±5° of the parallel direction.

[0011] The robot system 100 shown in FIG. 1 includes a robot 1 and a control device 9 that controls the driving of the robot 1.

[0012] <Control device 9> 1, the control device 9 includes, for example, a control board 91 and a power supply board 92. However, without being limited to this, the control board 91 and the power supply board 92 may be integrated into one board.

[0013] The control board 91 controls the overall operation of each part of the robot 1. The control board 91 is equipped with a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), etc. The CPU reads and executes programs and data stored in the ROM, thereby achieving the above-mentioned functions. The control board 91 is also electrically connected to a host computer (not shown), and controls the operation of each part of the robot 1 based on commands from the host computer. However, this is not limiting, and the circuits of the control board 91 may be separated into multiple boards.

[0014] The power supply board 92 supplies power to the control board 91. The power supply board 92 is equipped with a conversion circuit that converts externally supplied power into a predetermined value and supplies it to the control board 91. The conversion circuit varies depending on the configuration of the robot 1, but examples include an AC / DC conversion circuit that converts an alternating current (AC) signal into a direct current (DC) signal, and a step-up circuit or step-down circuit that converts the voltage level of a signal. However, the invention is not limited to this, and the circuits of the power supply board 92 may be separated into multiple boards.

[0015] However, the configuration of the control device 9 is not particularly limited as long as it can control the driving of the robot 1. Furthermore, in this embodiment, the control device 9 is disposed inside the base 10 of the robot 1, but the location of the control device 9 is not particularly limited. For example, the control device 9 may be installed outside the base 10. In this case, the robot 1 and the control device 9 may be connected by a cable or wirelessly.

[0016] <Robot 1> The robot 1 is a horizontal articulated robot (SCARA robot). As shown in Fig. 1, the robot 1 has a base 10 fixed to the floor or the like, a first arm 11 rotatably connected to the base 10, a second arm 12 rotatably connected to the first arm 11, a work head 13 disposed on the second arm 12, and a duct 14 connecting the base 10 and the second arm 12.

[0017] As shown in FIG. 2, the first arm 11 is connected at its base end to the base 10 and rotates about a first rotation axis J1 that is perpendicular to the base 10.

[0018] 3 and 4, the second arm 12 is connected at its base end to the first arm 11 and rotates relative to the first arm 11 around a second rotation axis J2 that is parallel to the first rotation axis J1. The second arm 12 also has a rigid arm base 121 connected to the first arm 11, a frame 122 fixed to the arm base 121, and a cover 123 that covers the arm base 121 from above the frame 122. For example, the arm base 121 and the frame 122 are made of a lightweight and rigid metal material such as aluminum, and the cover 123 is made of a lightweight resin material.

[0019] As shown in FIG. 1, duct 14 is a tubular member disposed outside first arm 11 and directly connects base 10 and second arm 12 without passing through first arm 11. Furthermore, as shown in FIGS. 2 to 4, duct 14 has a base end connected to base 10 and a tip end connected to second arm 12, and has a base end opening 141 facing the inside of base 10 and a tip end opening 142 facing the inside of second arm 12. This allows communication between base 10 and second arm 12 via duct 14. A plurality of wires 31 are routed between base 10 and second arm 12 via duct 14, and these wires 31 electrically connect electronic components disposed in second arm 12 (e.g., motors 222, 231, 241, brake control board 8, connector 181, brake release button 17, etc., which will be described later) to electronic components disposed in base 10 (e.g., control board 91, connector 182, etc., which will be described later). Furthermore, the wiring 31 is routed, for example, through the gap between the motors 231 and 241 and toward the tip side of the motors 231 and 241 .

[0020] 3 and 4, the working head 13 is disposed at the tip of the second arm 12. The working head 13 also has a spline nut 131 and a ball screw nut 132 that are coaxially arranged side by side in the vertical direction, and a spline shaft 133 that is inserted through the spline nut 131 and the ball screw nut 132. In this working head 13, when the spline nut 131 is rotated, the spline shaft 133 rotates about a third rotation axis J3 that is its central axis and is parallel to the first rotation axis J1, and also moves linearly (up and down) along the third rotation axis J3; when the ball screw nut 132 is rotated, the spline shaft 133 moves linearly along the third rotation axis J3; and when both the spline nut 131 and the ball screw nut 132 are rotated, the spline shaft 133 rotates about the third rotation axis J3. Although not shown, an end effector suitable for the work is attached to the lower end of the spline shaft 133.

[0021] As shown in Figures 2 and 3, the robot 1 also has a first arm drive mechanism 21 that rotates the first arm 11 around a first rotation axis J1 relative to the base 10, and a second arm drive mechanism 22 that rotates the second arm 12 around a second rotation axis J2 relative to the first arm 11.

[0022] As shown in FIG. 2, the first arm drive mechanism 21 includes a reducer 211 that rotatably connects the base 10 and the first arm 11, and a motor 212 with a built-in encoder that is disposed within the base 10. The motor 212 is a servo motor, particularly a three-phase motor driven by three-phase AC, and is fixed to the base 10. The reducer 211 is a harmonic gear device, and a circular spline 211a is fixed to the base 10 and a flexspline 211b is fixed to the first arm 11. The rotation shaft of the motor 212 is fixed to a wave generator 211c. Therefore, the wave generator 211c rotates with the rotation of the motor 212, and further, the flexspline 211b rotates at a predetermined reduction ratio relative to the rotation of the wave generator 211c. As a result, the first arm 11 rotates around the first rotation axis J1 relative to the base 10. However, the configuration of the first arm driving mechanism 21 is not particularly limited.

[0023] The second arm drive mechanism 22 has a configuration similar to that of the first arm drive mechanism 21. As shown in FIGS. 3 and 4 , the second arm drive mechanism 22 includes a reducer 221 that rotatably connects the first arm 11 and the second arm 12, and a motor 222 with a built-in encoder that is disposed within the second arm 12. The motor 222 is a servo motor, particularly a three-phase motor that is driven by three-phase AC, and is fixed to the arm base 121. The reducer 221 is a harmonic gear device, and a circular spline 221a is fixed to the arm base 121 and a flexspline 221b is fixed to the first arm 11. The rotation shaft of the motor 222 is fixed to a wave generator 221c. Therefore, the wave generator 221c rotates as the motor 222 rotates, and the flexspline 221b rotates at a predetermined reduction ratio relative to the rotation of the wave generator 221c. As a result, the second arm 12 rotates about the second rotation axis J2 relative to the first arm 11. However, the configuration of the second arm drive mechanism 22 is not particularly limited.

[0024] As shown in Figures 3 to 5, the robot 1 also has a spline shaft first drive mechanism 23 that rotates the spline nut 131 to rotate and linearly move the spline shaft 133, and a spline shaft second drive mechanism 24 that rotates the ball screw nut 132 to linearly move the spline shaft 133.

[0025] 3, the spline shaft first drive mechanism 23 has a motor 231 with a built-in encoder, which is a first motor arranged inside the second arm 12, and a speed reduction mechanism 232, which is a first power transmission mechanism that transmits the rotation of the motor 231 to the spline nut 131. The motor 231 is a servo motor, in particular a three-phase motor driven by three-phase AC, and is fixed to the arm base 121.

[0026] The reduction mechanism 232 has a first reduction mechanism 233 and a second reduction mechanism 234. The first reduction mechanism 233 has a pulley 233a attached to the rotation shaft of the motor 231, a first intermediate pulley 233b supported rotatably around a fourth rotation shaft J4 parallel to the second rotation shaft J2 with respect to the arm base 121, and a belt 233c wound around the pulley 233a and the first intermediate pulley 233b. The first intermediate pulley 233b has a larger diameter than the pulley 233a. The second reduction gear mechanism 234 includes a second intermediate pulley 234a that is disposed coaxially with the first intermediate pulley 233b and rotates together with the first intermediate pulley 233b about the fourth rotation axis J4, a pulley 234b that is a first pulley fixed to the spline nut 131, and a belt 234c that is a first belt that is wound around the second intermediate pulley 234a and the pulley 234b. The second intermediate pulley 234a has a smaller diameter than the first intermediate pulley 233b, and the pulley 234b has a larger diameter than the second intermediate pulley 234a.

[0027] In this configuration, the rotation of the motor 231 is transmitted to the first intermediate pulley 233b via the pulley 233a and the belt 233c, causing the first intermediate pulley 233b and the second intermediate pulley 234a to rotate together around the fourth rotation axis J4. The rotation of the second intermediate pulley 234a is transmitted to the pulley 234b via the belt 234c, causing the pulley 234b and the spline nut 131 to rotate together around the third rotation axis J3. This causes the spline shaft 133 to rotate and translate. In this way, by using the reduction mechanism 232 including the first reduction mechanism 233 and the second reduction mechanism 234, the rotation of the motor 231 can be reduced in two stages, allowing the spline nut 131 to rotate with greater torque.

[0028] However, the configuration of the first spline shaft drive mechanism 23 is not particularly limited. For example, the first power transmission mechanism is not limited to the reduction mechanism 232 as long as it can transmit the rotation of the motor 231 to the spline nut 131. The first power transmission mechanism may be configured such that the belt 233c and the first and second intermediate pulleys 233b and 234a are omitted and the belt 234c is wound around the pulleys 233a and 234b. The first power transmission mechanism may be a mechanism that transmits the rotation of the motor 231 to the spline nut 131 at a constant speed, or a mechanism that accelerates the rotation of the motor 231 and transmits it to the spline nut 131.

[0029] 4, the spline shaft second drive mechanism 24 has a motor 241 with a built-in encoder, which is a second motor arranged inside the second arm 12, a speed reduction mechanism 242, which is a second power transmission mechanism that transmits the rotation of the motor 241 to the ball screw nut 132, and a brake 243 for the motor 241. The motor 241 is a servo motor, in particular a three-phase motor that is driven by three-phase AC, and is fixed to the arm base 121.

[0030] The speed reduction mechanism 242 includes a pulley 242a attached to the rotation shaft of the motor 241, a second pulley, pulley 242b, attached to the ball screw nut 132, and a second belt, belt 242c, wound around the pulleys 242a and 242b. With this configuration, the rotation of the motor 241 is transmitted to the pulley 242b via the pulley 242a and the belt 242c, and the pulley 242b and the ball screw nut 132 rotate integrally around the third rotation axis J3. This causes the spline shaft 133 to move linearly. In this way, by using the speed reduction mechanism 242, the rotation of the motor 241 can be slowed down, and the ball screw nut 132 can be rotated with a sufficiently large torque.

[0031] However, the configuration of the spline shaft second drive mechanism 24 is not particularly limited. For example, the second power transmission mechanism is not limited to the speed reduction mechanism 242 as long as it can transmit the rotation of the motor 241 to the ball screw nut 132, and may be configured to have a two-stage speed reduction mechanism like the above-mentioned spline shaft first drive mechanism 23. Furthermore, the second power transmission mechanism may be a mechanism that transmits the rotation of the motor 241 to the ball screw nut 132 at a constant speed, or a mechanism that accelerates the rotation of the motor 241 and transmits it to the ball screw nut 132.

[0032] The brake 243 is an electromagnetic brake attached to the motor 241 and includes a pair of opposing plates 243a and 243b. One plate 243a is fixed to the motor 241, and the other plate 243b is fixed to the rotation shaft of the motor 241 and rotates together with the rotation shaft. By controlling the ON / OFF of the current supply, the brake 243 switches between a brake state in which the plates 243a and 243b are in contact with each other to restrict rotation of the rotation shaft, and a brake release state in which the plates 243a and 243b are separated to allow rotation of the rotation shaft. In particular, the brake 243 of this embodiment is a non-excitation type electromagnetic brake that is in the brake release state when current is applied (ON) and in the brake state when current is cut off (OFF). However, the configuration of the brake 243 is not particularly limited.

[0033] Above is a brief description of the main parts of the robot 1. Next, the second arm 12 will be described in more detail.

[0034] As described above, the second arm 12 has a rigid arm base 121 connected to the first arm 11, a frame 122 fixed to the arm base 121, and a cover 123 placed over the frame 122 and onto the arm base 121.

[0035] 3 and 4, duct 14 is connected to frame 122. Also, connector 181 and brake release button 17 for releasing brake 243 are arranged on frame 122. Connector 181 and brake release button 17 are not covered by cover 123 and are exposed to the outside of second arm 12. As shown in FIG. 1, connector 182 that forms a pair with connector 181 is arranged on the back surface of base 10, and connectors 181 and 182 are connected to each other via wiring 31.

[0036] Also, a lens 85 that shines when light L from a light-emitting element 82 described later is incident on the frame 122. The lens 85 is not covered by the cover 123, but is exposed to the outside of the second arm 12.

[0037] 6, the tip of the frame 122 is supported by the arm base 121 via a pair of support members 41 and 42. As described above, the frame 122 is a cantilever beam, and therefore the tip side is prone to bending up and down. Therefore, for example, when a user inserts a connector into the connector 181, presses the brake release button 17, or installs wiring or a device to be connected to the connector 181 on the frame 122, stress may be applied to the frame 122, which may cause plastic deformation. Therefore, by supporting the tip of the frame 122 with the pair of support members 41 and 42, deformation of the frame 122 can be effectively suppressed.

[0038] 6 and 7, a brake control board 8 that controls the brake 243 is fixed to the frame 122. As shown in FIGS. 3 and 4, the brake control board 8 is electrically connected to the control board 91 via wiring 31. The brake control board 8 is also electrically connected to the brake 243 via wiring 32, and is electrically connected to the brake release button 17 via wiring 33. The brake control board 8 controls the drive of the brake 243 based on a command from the control board 91, and switches between the brake state and the brake release state. The brake control board 8 also controls the drive of the brake 243 based on the operation of the brake release button 17, and switches between the brake state and the brake release state.

[0039] As shown in FIG. 7 , the robot 1 also has a light-emitting element 82 mounted on the brake control board 8. The light-emitting element 82 is, for example, an LED (Light Emitting Diode). Light L emitted from the light-emitting element 82 is diffusely reflected upward by the frame 122 and then enters the lens 85. This causes the lens 85 to illuminate. Therefore, by controlling the driving of the light-emitting element 82 and switching the lens 85 between on / blinking / off and switching the color of light emitted from the lens 85, it is possible to notify the user of various information via the lens 85.

[0040] While power is being supplied to the motors 212, 222, 231, and 241, i.e., while the robot 1 is powered on, the brake control board 8 emits light L of a predetermined color from the light-emitting element 82 to illuminate the lens 85. Hereinafter, this state will also be referred to as the first light-emitting state. This allows the user to easily be notified that the robot 1 is powered on. When the brake release button 17 is pressed and the brake 243 enters the brake release state, the brake control board 8 emits light L of a color different from that of the first light-emitting state from the light-emitting element 82 to illuminate the lens 85. Hereinafter, this state will also be referred to as the second light-emitting state. This allows the user to easily be notified that the brake 243 is in the brake release state. Switching between the first light-emitting state and the second light-emitting state allows the user to more clearly be notified of the state of the robot 1. However, the notification method is not particularly limited. For example, the first light-emitting state may be illuminated and the second light-emitting state may be extinguished, or the first light-emitting state may be illuminated and the second light-emitting state may be flashing.

[0041] The brake control board 8 as described above includes a CPU (Central Processing Unit), a ROM (Read Only Memory), etc. The CPU reads and executes programs and data stored in the ROM, thereby achieving the above-mentioned functions.

[0042] 8 and 9, the second arm 12 has three support columns 151, 152, and 153 that are erected from the arm base 121 toward the vertically upward direction, i.e., toward one side in the direction along the second rotation axis J2. Of these, the support column 151 passes through a belt 234c that is wound around a second intermediate pulley 234a and a pulley 234b, and extends above the belt 234c. In contrast, the remaining two support columns 152 and 153 pass through a belt 242c that is wound around a pulley 242a and a pulley 242b, and extend above the belt 242c. This configuration makes it possible to effectively utilize the space within the belts 234c and 242c, and effectively suppress an increase in size of the second arm 12 due to the arrangement of the support columns 151, 152, and 153.

[0043] Furthermore, the support pillars 152 and 153 are spaced apart along the length direction of the second arm 12, and the support pillars 151 and 152 are spaced apart along the width direction of the second arm 12, i.e., along a direction perpendicular to the length direction. The support pillars 152 and 153 are connected by a rib 154. The upper surfaces of the support pillars 151, 152, and 153 are flush with one another, and a screw hole, i.e., a female screw 150, is formed on each upper surface.

[0044] In this embodiment, the pillars 151, 152, and 153 are formed integrally with the arm base 121, but this is not limiting. For example, the pillars 151, 152, and 153 may be formed separately from the arm base 121 and fixed to the arm base 121 by means of screwing, fitting, bonding, welding, screwing, or the like. Also, the pillars 151, 152, and 153 may be formed integrally with a side wall (not shown) of the arm base 121. The arrangement of the pillars 151, 152, and 153 is not particularly limited. For example, they may be arranged outside the belts 234c and 242c. The number of pillars is not limited to three, but may be two, or four or more.

[0045] As shown in FIGS. 9 and 10 , the second arm 12 includes a mounting member 16 placed on the upper surfaces of the support columns 151, 152, and 153. The support columns 151, 152, and 153 and the mounting member 16 form a platform that protrudes vertically upward from the arm base 121. The mounting member 16 is plate-shaped and made of a lightweight, hard metal material, such as aluminum. The mounting member 16 is located above the belts 234c and 242c and overlaps with the spaces within the belts 234c and 242c in a plan view along the second rotation axis J2. That is, the mounting member 16 overlaps with portions of the belts 234c and 242c. This configuration effectively utilizes the space above the belts 234c and 242c, thereby effectively preventing the second arm 12 from becoming larger due to the placement of the mounting member 16. Furthermore, the mounting member 16 may be located above the first intermediate pulley 233b and may overlap at least a portion of the first intermediate pulley 233b in a plan view along the second rotation axis J2. This configuration makes it possible to effectively utilize the space above the first intermediate pulley 233b, and more effectively prevent the second arm 12 from becoming larger due to the placement of the mounting member 16. However, the placement of the mounting member 16 is not particularly limited, and for example, the mounting member 16 may be located below the belts 234c and 242c.

[0046] Furthermore, the mounting member 16 has three first screw insertion holes 161 formed at positions that overlap with the female screws 150 formed in each of the supports 151, 152, and 153 in a plan view from the direction along the second rotation axis J2. The number of first screw insertion holes 161 matches the number of female screws 150. The mounting member 16 is fixed to the supports 151, 152, and 153 by fastening screws B1 inserted into each of the first screw insertion holes 161 to the female screws 150 of each of the supports 151, 152, and 153.

[0047] Furthermore, the mounting member 16 is formed with three second screw insertion holes 162 in addition to the first screw insertion holes 161. These three second screw insertion holes 162 are used in a robot 1 of a second embodiment described later, and will be described in detail in the second embodiment. Furthermore, the mounting member 16 is formed with a mounting member through-hole 163 that penetrates from the top surface to the bottom surface. With this configuration, the weight of the mounting member 16 can be reduced.

[0048] 8, an arm base through-hole 121a is formed in the arm base 121, passing through the arm base 121 in the vertical direction, i.e., in the direction along the second rotation axis J2. The arm base through-hole 121a is located between the support column 151 and the support columns 152 and 153, and overlaps with the mounting member 16 in a plan view from the direction along the second rotation axis J2.

[0049] Returning to the description of the mounting member 16, as shown in FIGS. 9 and 10 , four columnar spacers 164 extending in the vertical direction are disposed on the upper surface of the mounting member 16. Each of these spacers 164 is fixed to the mounting member 16 by means of, for example, screwing, fitting, bonding, welding, or screw fastening. These four spacers 164 are disposed side by side so as to be located at the four corners of a rectangle. The upper surfaces of the spacers 164 are at the same height, and each upper surface has a screw hole, i.e., a female screw 165. In plan view from the direction along the second rotation axis J2, the four female screws 165 are offset from the three female screws 150. In other words, in plan view from the direction along the second rotation axis J2, each female screw 165 does not overlap any of the three female screws 150.

[0050] The robot 1 also includes an inertial sensor module 6 disposed within the second arm 12 and mounted on the mounting member 16. The inertial sensor module 6 includes a substrate 61 and an angular velocity sensor 62 mounted on the substrate 61 as an inertial sensor for detecting the angular velocity ω of the second arm 12 around the vertical axis. The angular velocity sensor 62 also includes a package and an angular velocity sensor element and a circuit element housed within the package. The angular velocity sensor element is, for example, a quartz oscillator, and includes a drive arm that is driven to vibrate when a drive signal is applied, and a detection arm that detects and vibrates due to the Coriolis force generated by the application of the angular velocity ω and outputs a signal of a magnitude corresponding to the detected vibration. The circuit element also includes, for example, a drive circuit that applies a drive signal to vibrate the drive arm of the quartz oscillator, and a detection circuit that detects the angular velocity ω based on the signal output from the detection arm. When viewed from above in a direction along the second rotation axis J2, the inertial sensor module 6 is disposed at a position overlapping with a virtual central axis, where the virtual central axis is a virtual line segment passing through the second rotation axis J2 and the third rotation axis J3. However, the present invention is not limited to this, and the inertial sensor module 6 may be disposed at a position not overlapping with the virtual central axis.

[0051] The substrate 61 is also formed with a control circuit 64 that controls the operation of the angular velocity sensor 62 based on commands from the control substrate 91. The control circuit 64 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), and the like, and the CPU reads and executes programs and data stored in the ROM to achieve the above-mentioned functions. The control circuit 64 acquires signals from the angular velocity sensor 62 and sends them to the control substrate 91. The substrate 61 is also provided with a connector 63 that is electrically connected to the control circuit 64, and this connector 63 is electrically connected to the control substrate 91 via wiring 31. However, this is not limiting, and the wiring 31 may be omitted and the control circuit 64 may transmit signals to the control substrate 91 via wireless communication, or the connector 63 may be electrically connected to the power supply substrate 92 via wiring 31, and the control circuit 64 may send signals from the angular velocity sensor 62 to the control substrate 91 via the power supply substrate 92.

[0052] The substrate 61 is rectangular in plan view from the direction along the second rotation axis J2. As shown in FIG. 10 , four screw insertion holes 611 are formed at the four corners of the substrate 61, and the four screw insertion holes 611 are aligned with the female screws 165 formed in the spacers 164. The substrate 61 is fixed to the mounting member 16 via the spacers 164 by fastening the screws B2 inserted into the screw insertion holes 611 to the female screws 165 of the spacers 164. Fixing the four corners of the substrate 61 to the spacers 164 in this manner stabilizes the posture of the inertial sensor module 6. Fixing the substrate 61 to the mounting member 16 via the spacers 164 also prevents interference between the components mounted on the underside of the substrate 61 and the mounting member 16, and between the substrate 61 and the heads of the screws B1. The term "rectangle" is not limited to a rectangular shape, but includes shapes that can be considered the same as a rectangle from a technical standpoint, such as shapes with chamfered corners, cutouts, or protruding parts. The shape of the substrate 61 is not particularly limited, and may be, for example, a polygon with five or more sides, a circle, or an irregular shape. The location where the substrate 61 is fixed to the mounting member 16, i.e., the location of the screw insertion hole 611, is not particularly limited, and may be located away from the corners. The number of spacers 164 may be five or more, or three or less. Alternatively, the spacers 164 may be omitted, and the substrate 61 may be directly fixed to the mounting member 16.

[0053] Furthermore, a connector 63 electrically connected to the control circuit 64 is disposed on the substrate 61, and the wiring 31 is connected to the connector 63. The inertial sensor module 6 and the control substrate 91 are electrically connected via the wiring 31. By disposing the connector 63 on the substrate 61 in this manner, the electrical connection between the inertial sensor module 6 and the control substrate 91 is facilitated. Furthermore, the connector 63 is disposed along the outer edge of the substrate 61 and is located between a pair of adjacent screw insertion holes 611, i.e., between the fixing points to a pair of adjacent mounting members 16. This arrangement allows the connector 63 to be supported from both sides. Therefore, deformation of the substrate 61 when connecting the wiring 31 to the connector 63 is suppressed, and damage and malfunction of the inertial sensor module 6 can be effectively suppressed. Furthermore, the connector 63 is disposed on the upper side of the substrate 61, i.e., on the opposite side from the mounting member 16. This facilitates the work of connecting the wiring 31 to the substrate 61. The connector 63 may also be disposed on the lower side of the substrate 61.

[0054] The inertial sensor module 6 has been described above, but the inertial sensor module 6 is not particularly limited. For example, in this embodiment, the inertial sensor is an angular velocity sensor that detects the angular velocity ω of the second arm 12, but this is not limited thereto, and the inertial sensor may be, for example, an acceleration sensor that detects the acceleration of the second arm 12. It may also be a composite sensor that can detect both the angular velocity ω and the acceleration. Furthermore, in this embodiment, the angular velocity sensor element is a quartz crystal resonator, but this is not limited thereto, and the inertial sensor may be, for example, a silicon MEMS that detects angular velocity based on changes in electrostatic capacitance between a movable electrode and a fixed electrode.

[0055] As described above, in the robot 1, the inertial sensor module 6 is fixed to the support columns 151, 152, and 153 via the mounting member 16. Therefore, vibrations of the arm base 121 are attenuated by the mounting member 16 and are less likely to be transmitted to the inertial sensor module 6. Therefore, compared to a conventional configuration in which the inertial sensor module 6 is fixed directly to the support columns 151, 152, and 153, unnecessary vibrations of the inertial sensor module 6 can be suppressed, and a decrease in the detection accuracy of the inertial sensor module 6 due to unnecessary vibrations can be suppressed. In particular, as described above, the arm base through hole 121a is formed in the arm base 121. Therefore, vibrations of the arm base 121 are attenuated by the arm base through hole 121a and are less likely to be transmitted to the support columns 151, 152, and 153. Therefore, unnecessary vibrations of the inertial sensor module 6 can be suppressed, and a decrease in the detection accuracy of the inertial sensor module 6 due to unnecessary vibrations can be suppressed. Furthermore, the mounting member through hole 163 is formed in the mounting member 16. Therefore, vibrations of the arm base 121 are attenuated by the mounting member through-hole 163 and are less likely to be transmitted to the inertial sensor module 6. Therefore, unnecessary vibrations of the inertial sensor module 6 can be suppressed, and a decrease in the detection accuracy of the inertial sensor module 6 caused by the unnecessary vibrations can be suppressed.

[0056] Furthermore, as described above, the substrate 61 of the inertial sensor module 6 is rectangular, and its four corners are fixed to the mounting member 16. This stabilizes the posture of the inertial sensor module 6, making it less likely to vibrate. This makes it possible to more effectively prevent a decrease in the detection accuracy of the inertial sensor module 6 due to unwanted vibrations. Furthermore, as described above, the inertial sensor module 6 is fixed to the mounting member 16 via the spacer 164. This makes it possible to lengthen the vibration propagation route from the arm base 121 to the inertial sensor module 6, making it less likely that vibrations from the arm base 121 will be transmitted to the inertial sensor module 6. This makes it less likely that the inertial sensor module 6 will vibrate, making it more effectively possible to prevent a decrease in the detection accuracy of the inertial sensor module 6 due to unwanted vibrations.

[0057] As described above, in a plan view taken along the second rotation axis J2, the four female screws 165, which are the fixing points between the inertial sensor module 6 and the mounting member 16, are offset from the three female screws 150, which are the fixing points between the mounting member 16 and the supports 151, 152, and 153. This increases the length of the vibration propagation route from the arm base 121 to the inertial sensor module 6, making it difficult for vibrations from the arm base 121 to be transmitted to the inertial sensor module 6. This reduces the likelihood of the inertial sensor module 6 vibrating, effectively suppressing a decrease in the detection accuracy of the inertial sensor module 6 due to unwanted vibrations. As described above, the connector 63 is disposed between the fixing points to a pair of adjacent mounting members 16 and is supported from both sides. This reduces the likelihood of the connector 63 vibrating, thereby suppressing vibrations of the inertial sensor module 6 due to swinging of the wiring 31.

[0058] The robot system 100 has been described above. The robot 1 included in the robot system 100 includes a base 10, a first arm 11 connected to the base 10 and rotatable about a first rotation axis J1 relative to the base 10, a second arm 12 connected to the first arm 11 and rotatable about a second rotation axis J2 parallel to the first rotation axis J1 relative to the first arm 11, and an inertial sensor module 6 disposed on the second arm 12. The second arm 12 includes an arm base 121 connected to the first arm 11, a plurality of support columns 151, 152, and 153 extending from the arm base 121 to one side in the direction along the second rotation axis J2, i.e., facing vertically upward, and a mounting member 16 fixed to the plurality of support columns 151, 152, and 153. The inertial sensor module 6 is fixed to the mounting member 16. With this configuration, vibrations of the arm base 121 are attenuated by the mounting member 16 and are less likely to be transmitted to the inertial sensor module 6. Therefore, compared to the conventional configuration in which the inertial sensor module 6 is fixed directly to the supports 151, 152, and 153, unnecessary vibrations of the inertial sensor module 6 are suppressed, and it is possible to suppress a decrease in the detection accuracy of the inertial sensor module 6 caused by unnecessary vibrations.

[0059] As described above, the robot 1 also includes the work head 13, which includes the spline shaft 133 disposed on the second arm 12 and arranged along the third rotation axis J3 parallel to the first rotation axis J1, the spline nut 131 and the ball screw nut 132 attached to the spline shaft 133, and in which the spline shaft 133 rotates at least about the third rotation axis J3 when the spline nut 131 is rotated, and the spline shaft 133 moves linearly along the third rotation axis J3 when the ball screw nut 132 is rotated, the motor 231 serving as a first motor, and a reduction mechanism serving as a first power transmission mechanism that transmits the rotation of the motor 231 to the spline nut 131. the reduction mechanism 232 includes a spline shaft first drive mechanism 23 having a pulley 234b which is a first pulley fixed to the spline nut 131, and a belt 234c which is a first belt wound around the pulley 234b; the spline shaft second drive mechanism 24 having a motor 241 which is a second motor, and a reduction mechanism 242 which is a second power transmission mechanism that transmits the rotation of the motor 241 to the ball screw nut 132, and the reduction mechanism 242 includes a pulley 242b which is a second pulley fixed to the ball screw nut 132, and a belt 242c which is a second belt wound around the pulley 242b. The mounting member 16 is located on one side of the belts 234c, 242c in the direction along the second rotation axis J2, i.e., vertically above the belts 234c, 242c, and overlaps with the belts 234c, 242c in a plan view along the second rotation axis J2. This configuration makes it possible to effectively utilize the space above the belts 234c, 242c, and effectively prevents the second arm 12 from becoming larger due to the placement of the mounting member 16.

[0060] As described above, the inertial sensor module 6 has the substrate 61 and the angular velocity sensor 62, which is an inertial sensor, disposed on the substrate 61. The substrate 61 is rectangular in plan view and is fixed to the mounting member 16 at each corner. With this configuration, the posture of the inertial sensor module 6 is stable, and the inertial sensor module 6 is less likely to vibrate. Therefore, it is possible to more effectively prevent a decrease in the detection accuracy of the inertial sensor module 6 due to unwanted vibrations.

[0061] As described above, the inertial sensor module 6 has the connector 63 disposed on the substrate 61 between the fixing points of the pair of adjacent mounting members 16. With this configuration, the connector 63 is supported from both sides and is less likely to vibrate. This reduces vibration of the inertial sensor module 6 caused by swinging of the wiring 31 connected to the connector 63, and more effectively prevents a decrease in the detection accuracy of the inertial sensor module 6 caused by unwanted vibrations.

[0062] As described above, the inertial sensor module 6 is fixed to the mounting member 16 via the spacer 164. With this configuration, the vibration propagation route from the arm base 121 to the inertial sensor module 6 can be made longer, making it difficult for vibrations of the arm base 121 to be transmitted to the inertial sensor module 6. As a result, the inertial sensor module 6 is less likely to vibrate, and it is possible to more effectively prevent a decrease in the detection accuracy of the inertial sensor module 6 due to unwanted vibrations.

[0063] Furthermore, as described above, in a plan view from the direction along the second rotation axis J2, the fixing points between the inertial sensor module 6 and the mounting member 16 are offset from the fixing points between the mounting member 16 and the supports 151, 152, and 153. With this configuration, the vibration propagation route from the arm base 121 to the inertial sensor module 6 can be made longer, making it difficult for vibrations of the arm base 121 to be transmitted to the inertial sensor module 6. Therefore, the inertial sensor module 6 is less likely to vibrate, and it is possible to more effectively prevent a decrease in the detection accuracy of the inertial sensor module 6 caused by unwanted vibrations.

[0064] Furthermore, as described above, the robot 1 has the mounting member through-hole 163 that penetrates the mounting member 16 in the direction along the second rotation axis J2. With this configuration, vibrations of the arm base 121 are attenuated by the mounting member through-hole 163 and are less likely to be transmitted to the inertial sensor module 6. Therefore, unnecessary vibrations of the inertial sensor module 6 can be suppressed, and a decrease in the detection accuracy of the inertial sensor module 6 due to unnecessary vibrations can be suppressed.

[0065] As described above, the robot 1 has an arm base through-hole 121a that penetrates the arm base 121 in the direction along the second rotation axis J2. The arm base through-hole 121a is located between two selected columns from the plurality of columns 151, 152, and 153, and in this embodiment, between the column 151 and the columns 152 and 153. With this configuration, vibrations of the arm base 121 are attenuated by the arm base through-hole 121a and are less likely to be transmitted to the columns 151, 152, and 153. Therefore, unnecessary vibrations of the inertial sensor module 6 can be suppressed, and a decrease in the detection accuracy of the inertial sensor module 6 caused by the unnecessary vibrations can be suppressed.

[0066] As described above, the robot system 100 includes the robot 1 and the control device 9 that controls the driving of the robot 1. The robot 1 also includes a base 10, a first arm 11 connected to the base 10 and rotatable about a first rotation axis J1 relative to the base 10, a second arm 12 connected to the first arm 11 and rotatable about a second rotation axis J2 parallel to the first rotation axis J1 relative to the first arm 11, and an inertial sensor module 6 disposed on the second arm 12. The second arm 12 also includes an arm base 121 connected to the first arm 11, a plurality of support columns 151, 152, and 153 extending from the arm base 121 to one side in the direction along the second rotation axis J2, i.e., facing vertically upward, and a mounting member 16 fixed to the plurality of support columns 151, 152, and 153. The inertial sensor module 6 is fixed to the mounting member 16. With this configuration, vibrations transmitted from the arm base 121 are attenuated by the mounting member 16 and are less likely to be transmitted to the inertial sensor module 6. Therefore, compared to the conventional configuration in which the inertial sensor module 6 is fixed directly to the supports 151, 152, and 153, unnecessary vibrations of the inertial sensor module 6 are suppressed, and it is possible to suppress a decrease in the detection accuracy of the inertial sensor module 6 caused by unnecessary vibrations.

[0067] Second Embodiment Fig. 11 is a top view showing the inside of the second arm of the robot according to the second embodiment, and Fig. 12 is an exploded perspective view showing the periphery of the mounting member.

[0068] The robot 1 according to this embodiment is similar to the robot 1 according to the first embodiment, except that the arrangement of the support columns 151, 152, and 153 and the orientation of the mounting member 16 are different. In the following description, the robot 1 according to this embodiment will be described focusing on the differences from the first embodiment, and a description of the same points will be omitted. In addition, in each drawing of this embodiment, the same reference numerals are used to designate the same components as those in the above-described embodiment.

[0069] 11 , in the robot 1 of this embodiment, of the three support columns 151, 152, and 153, the support columns 151 and 153 pass through the inside of a belt 242c that is wound around pulleys 242a and 242b and extend above the belt 242c. In contrast, the remaining support column 152 passes outside the belt 242c and extends above the belt 242c. The relative positional relationship of these support columns 151, 152, and 153 matches the relative positional relationship of the three second screw insertion holes 162 when the mounting member 16 is in a position (hereinafter simply referred to as the "second position") rotated 90° around the vertical axis from the position of the first embodiment (hereinafter simply referred to as the "first position"). 12, the mounting member 16 is fixed to the support posts 151, 152, and 153 in the second posture with screws B1 inserted through the second screw insertion holes 162. As shown in FIG.

[0070] In this way, by forming the first screw insertion hole 161 used for fixing in the first posture and the second screw insertion hole 162 used for fixing in the second posture in the mounting member 16, the degree of freedom in the arrangement of the supports 151, 152, 153 increases. In other words, it is possible to select whether to fix the mounting member 16 in the first posture or the second posture based on the arrangement of other members. This makes it easier to design the robot 1.

[0071] As described above, in the robot 1 of this embodiment, the mounting member 16 is fixed to each of the support columns 151, 152, and 153 by the screw B1, and has a first screw insertion hole 161 through which the screw B1 is inserted when the robot is in the first posture, and a second screw insertion hole 162 through which the screw B2 is inserted when the robot is in the second posture different from the first posture. This configuration increases the degree of freedom in the arrangement of the support columns 151, 152, and 153. In other words, it is possible to select whether the mounting member 16 is fixed in the first posture or the second posture based on the arrangement of other members. This makes it easier to design the robot 1.

[0072] The second embodiment can also achieve the same effects as the first embodiment described above.

[0073] While the robot and robot system of the present invention have been described above based on the illustrated embodiments, the present invention is not limited thereto, and the configuration of each part can be replaced with any configuration having a similar function. Furthermore, any other configuration may be added to the present invention. For example, in the above-described embodiment, the robot 1 has a duct 14, but the duct 14 may be omitted. In this case, the wiring 31 is routed through the first arm 11 to the base 10 and the second arm 12. Furthermore, in the above-described embodiment, the robot 1 is a floor-mounted SCARA robot in which the base 10 is fixed to the floor or the like, but the robot 1 may also be a ceiling-suspended SCARA robot in which the base 10 is suspended from the ceiling. In this case, the base 10 is suspended from a top plate located at the top of a stand having frame-shaped legs, for example. [Explanation of symbols]

[0074] 1...robot, 10...base, 100...robot system, 11...first arm, 12...second arm, 121...arm base, 121a...arm base through-hole, 122...frame, 123...cover, 13...working head, 131...spline nut, 132...ball screw nut, 133...spline shaft, 14...duct, 141...base end opening, 142...tip opening, 150...female screw, 151...support, 152...support, 153...support, 154...rib, 16...mounting member, 161...first screw insertion hole , 162...second screw insertion hole, 163...mounting member through hole, 164...spacer, 165...female screw, 17...brake release button, 181...connector, 182...connector, 21...first arm drive mechanism, 211...reduction gear, 211a...circular spline, 211b...flex spline, 211c...wave generator, 212...motor, 22...second arm drive mechanism, 221...reduction gear, 221a...circular spline, 221b...flex spline, 221c...wave generator 222...motor, 23...spline shaft first drive mechanism, 231...motor, 232...reduction mechanism, 233...first reduction mechanism, 233a...pulley, 233b...first intermediate pulley, 233c...belt, 234...second reduction mechanism, 234a...second intermediate pulley, 234b...pulley, 234c...belt, 24...spline shaft second drive mechanism, 241...motor, 242...reduction mechanism, 242a...pulley, 242b...pulley, 242c...belt, 243...brake, 24 3a...plate, 243b...plate, 31...wiring, 32...wiring, 33...wiring, 41...support member, 42...support member, 6...inertial sensor module, 61...board, 611...screw insertion hole, 62...angular velocity sensor, 63...connector, 64...control circuit, 8...brake control board, 82...light emitting element, 85...lens, 9...control device, 91...control board, 92...power supply board, B1...screw, B2...screw, J1...first rotating shaft, J2...second rotating shaft, J3...third rotating shaft, J4...fourth rotating shaft, L...light, ω...angular velocity

Claims

1. The base and a first arm connected to the base and rotatable about a first rotation axis relative to the base; a second arm connected to the first arm and rotatable relative to the first arm about a second rotation axis parallel to the first rotation axis; an inertial sensor module disposed on the second arm; the second arm includes an arm base connected to the first arm, a plurality of support columns erected from the arm base toward one side in a direction along the second rotation axis, and a mounting member fixed to the plurality of support columns, A robot characterized in that the inertial sensor module is fixed to the mounting member.

2. a working head including a spline shaft that is disposed on the second arm and that is disposed along a third rotation axis parallel to the first rotation axis, and a spline nut and a ball screw nut that are attached to the spline shaft, wherein the spline shaft rotates at least about the third rotation axis when the spline nut is rotated, and the spline shaft moves linearly along the third rotation axis when the ball screw nut is rotated; a spline shaft first drive mechanism including a first motor and a first power transmission mechanism that transmits rotation of the first motor to the spline nut, the first power transmission mechanism including a first pulley fixed to the spline nut and a first belt wound around the first pulley; a second power transmission mechanism including a second motor and a second power transmission mechanism that transmits rotation of the second motor to the ball screw nut, the second power transmission mechanism including a second pulley fixed to the ball screw nut and a second belt wound around the second pulley; 2. The robot according to claim 1, wherein the placement member is located on the one side of the first belt and the second belt in a direction along the second rotation axis, and overlaps with the first belt and the second belt in a plan view from the direction along the second rotation axis.

3. the inertial sensor module includes a substrate and an inertial sensor disposed on the substrate; 2. The robot according to claim 1, wherein the substrate is rectangular in plan view and is fixed at each corner to the mounting member.

4. 4. The robot according to claim 3, wherein the inertial sensor module has connectors disposed on the substrate between fixing points to the pair of adjacent mounting members.

5. The robot according to claim 1 , wherein the inertial sensor module is fixed to the mounting member via a spacer.

6. 2. The robot according to claim 1, wherein, in a plan view from the direction along the second rotation axis, a fixed point between the inertial sensor module and the mounting member is offset from a fixed point between each mounting member and the support column.

7. The robot according to claim 1 , further comprising a mounting member through-hole that penetrates the mounting member in a direction along the second rotation axis.

8. an arm base through-hole that passes through the arm base in a direction along the second rotation axis; The robot according to claim 1 , wherein the arm base through-hole is located between two of the plurality of support columns.

9. The mounting member is fixed to each of the support columns by a screw, a first screw insertion hole through which the screw is inserted when the screw is in a first position; The robot according to claim 1 , further comprising: a second screw insertion hole through which the screw is inserted when the robot is in a second posture different from the first posture.

10. a working head including a spline shaft that is disposed on the second arm and that is disposed along a third rotation axis parallel to the first rotation axis, and a spline nut and a ball screw nut that are attached to the spline shaft, wherein the spline shaft rotates about the third rotation axis when the spline nut is rotated, and the spline shaft moves linearly along the third rotation axis when the ball screw nut is rotated; a spline shaft first drive mechanism including a first motor and a first power transmission mechanism that transmits rotation of the first motor to the spline nut, the first power transmission mechanism including a first pulley fixed to the spline nut and a first belt wound around the first pulley; a spline shaft second drive mechanism including a second motor and a second power transmission mechanism that transmits rotation of the second motor to the ball screw nut, the second power transmission mechanism including a second pulley fixed to the ball screw nut and a second belt wound around the second pulley; a mounting member through-hole that penetrates the mounting member in a direction along the second rotation axis; an arm base through-hole that penetrates the arm base in a direction along the second rotation axis and overlaps with the mounting member in a plan view from the direction along the second rotation axis, the mounting member is located on the one side of the first belt and the second belt in a direction along the second rotation shaft, and overlaps with the first belt and the second belt in a plan view from the direction along the second rotation shaft, Furthermore, the mounting member is fixed to each of the supports by a screw, and has a first screw insertion hole through which the screw is inserted when the mounting member is in a first position, and a second screw insertion hole through which the screw is inserted when the mounting member is in a second position different from the first position, the inertial sensor module includes a circuit board and an inertial sensor mounted on the circuit board; the circuit board has a rectangular shape in a plan view from a direction along the second pivot shaft, is fixed to the mounting member at each corner of the rectangle via a spacer, and has a connector disposed between fixing points with a pair of adjacent mounting members, for electrically connecting with another electronic device; The robot according to claim 1 , wherein, in a plan view taken along the second rotation axis, a fixed portion between the circuit board and the mounting member is offset from a fixed portion between the mounting member and the support.

11. Robots and a control device that controls the driving of the robot, The robot includes a base and a first arm connected to the base and rotatable about a first rotation axis relative to the base; a second arm connected to the first arm and rotatable relative to the first arm about a second rotation axis parallel to the first rotation axis; an inertial sensor module disposed on the second arm; the second arm includes an arm base connected to the first arm, a plurality of support columns erected from the arm base toward one side in a direction along the second rotation axis, and a mounting member fixed to the plurality of support columns, A robot system, wherein the inertial sensor module is fixed to the mounting member.

Images