Conveying system

Abstract

To provide a conveying system that eliminates the need to periodically remove an automated cleaning vehicle from its travel path to discharge dust collected by the automated cleaning vehicle, and also eliminates the need to stop the automated conveying device during dust discharge.SOLUTION: In a transport system 2, a cleaning autonomous vehicle 18 collects dust accumulated on a travel panel 10. A discharge area 20 is formed in a region that does not obstruct the travel of the automatic conveying device 8, where the dust collected by the cleaning autonomous vehicle 18 is discharged. The cleaning autonomous vehicle 18 discharges the dust in the discharge area 20 as needed.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transfer system in which a travel panel along which an automatic transfer device travels is arranged on the top plate of a processing device including a plurality of processing devices. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has also developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport device travels between the processing devices to transport wafers from the wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1).

[0004] Processing equipment, including machining devices, are installed in clean rooms, but when automated transport devices travel between processing equipment, dust that has accumulated on the travel path scatters, reducing the accuracy of the clean room. Therefore, automated cleaning vehicles run along the travel path as needed to clean the path. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in order to discharge the dust collected by the automated cleaning vehicle, it is necessary to periodically lower the automated cleaning vehicle from the travel path, which is an unbearable hassle, and there are also cases where the automated transport device must be stopped, resulting in reduced productivity.

[0007] An object of the present invention is to provide a conveying system that does not require the automatic cleaning vehicle to be periodically removed from the travel path in order to discharge the dust collected by the automatic cleaning vehicle, and that does not require the automatic conveying device to stop traveling when discharging the dust. [Means for solving the problem]

[0008] According to the present invention, there is provided the following transport system that solves the above-mentioned problems: "A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on the top plate of a processing device including a plurality of processing devices, A conveying system is provided in which an automated cleaning vehicle collects dust accumulated on a traveling panel, a discharge area is formed in an area that does not interfere with the movement of the automated conveying device, and the automated cleaning vehicle discharges the collected dust in the discharge area as needed.

[0009] Preferably, a dust collection device is provided in the discharge area, the dust collection device having a discharge hole through which dust is discharged, a duct communicating with the discharge hole, and dust collection means for collecting the dust, and the dust collected by the automatic cleaning vehicle is collected in the dust collection means via the discharge hole and the duct. [Effects of the Invention]

[0010] The transport system of the present invention comprises: A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, An automated cleaning vehicle collects dust accumulated on a traveling panel, and a discharge area for discharging the collected dust is formed in an area that does not interfere with the travel of the automated transport device, and the automated cleaning vehicle discharges dust in the discharge area as needed, so there is no need to periodically remove the automated cleaning vehicle from the travel path to discharge the collected dust. Furthermore, in the transport system of the present invention, the discharge area for discharging the collected dust by the automated cleaning vehicle is formed in an area that does not interfere with the travel of the automated transport device, so there is no need to stop the travel of the automated transport device when discharging dust, and a decrease in productivity can be prevented. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view of a transport system according to the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, preferred embodiments of a transport system according to the present invention will be described with reference to the drawings.

[0013] As shown in FIG. 1, in the transfer system 2, a travel panel 10 on which an automatic transfer device 8 travels is disposed on a top plate 6 of a processing device 4 including a plurality of processing devices.

[0014] The processing equipment 4 includes a storage device 4a for storing articles and first, second, and third processing devices 4b, 4c, and 4d to which the articles in the storage device 4a are transported by an automatic transport device 8. Examples of articles stored in the storage device 4a include workpieces such as semiconductor wafers to be processed in the first to third processing devices 4b to 4d, and processing tools used when processing in any of the first to third processing devices 4b to 4d. Examples of processing tools used when processing in any of the first to third processing devices 4b to 4d include cutting blades used when cutting the workpieces, and grinding wheels with grinding stones used when grinding the workpieces to thin them. In this embodiment, one storage device 4a and three processing devices 4b to 4d are provided as the processing equipment 4, but the number and combination of processing devices 4 can be set as desired.

[0015] A traveling panel 10 is disposed on the top plate 6 of the processing device 4. The traveling panel 10 of this embodiment includes a first traveling panel 12 disposed between the processing devices 4 and a second traveling panel 14 disposed above the top plate 6 of the processing device 4.

[0016] The first running panel 12 has a main section 12a having a running path along which the automatic conveying device 8 runs, a fall prevention wall 12b for preventing the automatic conveying device 8 from falling from the main section 12a, and a connecting piece 12c for connecting the first running panel 12 to the processing device 4.

[0017] The shape of the main portion 12a of the first traveling panel 12 can be any shape depending on the positional relationship between the processing devices 4 to be connected and the traveling route of the automatic conveying device 8, etc. However, in this embodiment, a rectangular main portion 12a is shown for convenience. The main portion 12a is formed with a traveling guide line (not shown) for guiding the traveling of the automatic conveying device 8. The fall prevention walls 12b protrude upward from both end portions of the main portion 12a in the width direction (direction perpendicular to the traveling direction) along the traveling direction of the automatic conveying device 8 indicated by arrows A1 to A4. In this embodiment, the connecting pieces 12c extend downward from both end portions of the main portion 12a in the traveling direction. The connecting pieces 12c and the processing device 4 can be connected via appropriate connecting means 16 such as bolts.

[0018] The second running panel 14 has a main portion 14a having a running path along which the automatic conveying device 8 runs, a fall prevention wall 14b for preventing the automatic conveying device 8 from falling from the main portion 14a, and a connecting piece 14c for connecting the fall prevention wall 14b to the processing device 4.

[0019] The main portion 14a of the second traveling panel 14 may have any shape depending on the travel route of the automatic conveying device 8, etc. A travel guide line (not shown) for guiding the travel of the automatic conveying device 8 is formed in the main portion 14a. The main portion 14a may be formed as part or all of the top plate 6 of the processing device 4, or may be formed as a separate member from the top plate 6 of the processing device 4. As shown in FIG. 1 , when the main portion 14a and the top plate 6 are formed as the same member, the main portion 14a is defined by a fall prevention wall 14b provided on the top plate 6. The top plate 6 has an opening 6a formed therein for passing a cassette of the automatic conveying device 8, as described below. On the other hand, when the main portion 14a and the top plate 6 are formed as separate members, the fall prevention wall 14b is provided so as to extend upward from the outer periphery of the main portion 14a. In this case, an opening for passing a cassette of the automatic conveying device 8, as described below, is also formed in the main portion 14a of the second traveling panel 14. 1, the fall prevention wall 14b of the second traveling panel 14 is connected to the fall prevention wall 12b of the first traveling panel 12. The connection piece 14c of this embodiment is attached to the lower end of the fall prevention wall 14b, and the connection piece 14c and the processing device 4 can be connected via appropriate connection means 16 such as a bolt.

[0020] The automatic transport device 8 that travels on the first and second traveling panels 12, 14 is equipped with drive wheels arranged on the left and right, directional casters arranged in front and behind the drive wheels, a sensor that reads the travel guide lines of the first and second traveling panels 12, 14, a cassette that stores the items to be transported, and a lifting means for raising and lowering the cassette (none of which are shown).

[0021] The conveyance system 2 is provided with an autonomous cleaning vehicle 18 that collects dust accumulated on the first and second traveling panels 12, 14. The autonomous cleaning vehicle 18 is equipped with a suction nozzle that sucks in dust, suction means for generating suction force in the suction nozzle, a dust container that stores the dust sucked through the suction nozzle, and opening / closing means for opening and closing the dust container (none of which are shown).

[0022] In the conveying system 2, it is important that a discharge area 20 is formed in an area that does not interfere with the movement of the automatic conveying device 8, where the cleaning automatic vehicle 18 discharges the dust collected, and that the cleaning automatic vehicle 18 discharges the dust in the discharge area 20 as needed.

[0023] The discharge area 20 is formed in an area that does not interfere with the travel of the automatic transport device 8. In other words, when the automatic transport vehicle 18 for cleaning is stopped in the discharge area 20, even if the automatic transport device 8 passes by the automatic transport vehicle 18 for cleaning, the discharge area 20 is formed so that the automatic transport vehicle 18 for cleaning and the automatic transport device 8 do not come into contact with each other.

[0024] The illustrated discharge area 20 is attached to the first running panel 12. Specifically, the discharge area 20 protrudes from the first running panel 12 in a direction perpendicular to the direction indicated by arrow A4. The discharge area 20 is provided with a main portion 20a connected to the main portion 12a of the first running panel 12 and a fall prevention wall 20b connected to the fall prevention wall 12b of the first running panel 12. The discharge area 20 may also be attached to the second running panel 14.

[0025] A dust collecting device 22 is also disposed in the discharge area 20. The dust collecting device 22 includes a discharge hole 24 through which dust is discharged, a duct 26 communicating with the discharge hole 24, and dust collecting means 28 that collects the dust. The discharge hole 24 is formed in the main portion 20a of the discharge area 20. The duct 26 connects the discharge hole 24 to the dust collecting means 28. The dust collecting means 28 includes suction means (not shown) that generates a suction force at the discharge hole 24 via the duct 26, a dust storage unit 30 that stores the dust discharged into the discharge hole 24, and a housing 32 to which the suction means and the dust storage unit 30 are attached. In the dust collecting device 22, the suction means generates a suction force at the discharge hole 24, sucks in the dust discharged into the discharge hole 24 from the autonomous cleaning vehicle 18, and stores the dust in the dust storage unit 30. A handle 30a is attached to the outer surface of the dust storage section 30, and an operator can grasp the handle 30a to open the dust storage section 30 and remove the dust inside the dust storage section 30.

[0026] Next, an example of transporting a workpiece such as a semiconductor wafer in the transport system 2 will be described.

[0027] In the conveyance system 2, first, the workpieces are transferred from the storage device 4a to the automatic conveyance device 8. At this time, the automatic conveyance device 8 stops above the opening 6a of the top plate 6 of the storage device 4a. Next, a cassette is lowered from the automatic conveyance device 8 through the opening 6a and sent into the storage device 4a. Once the cassette is positioned at a predetermined position within the storage device 4a, the workpieces are stored in the cassette by a transport means (for example, a robot hand) of the storage device 4a. Then, the cassette containing the workpieces is raised and removed from the storage device 4a. In this manner, the workpieces are transferred from the storage device 4a to the automatic conveyance device 8.

[0028] After the workpieces are transferred from the storage device 4a to the automatic transfer device 8, the automatic transfer device 8 transfers the workpieces to the first processing device 4b, where they are subjected to the required processing. During this process, the automatic transfer device 8 travels along the main sections 12a and 14a of the first and second traveling panels 12 and 14, respectively, while using a sensor to read the travel guide lines of the first and second traveling panels 12 and 14, moving from the storage device 4a to the first processing device 4b. When the automatic transfer device 8 arrives above the opening 6a in the top plate 6 of the first processing device 4b, the automatic transfer device 8 lowers a cassette through the opening 6a and feeds it into the first processing device 4b. Then, once the cassette is positioned at a predetermined position within the first processing device 4b, the workpieces are removed from the cassette by a transport means (e.g., a robot hand) of the first processing device 4b. After the workpiece is subjected to the required processing in the first processing device 4b, the processed workpiece is placed in a cassette by the conveying means. Once the processed workpiece is placed in the cassette, the cassette is raised and removed from the first processing device 4b.

[0029] After the required processing is performed on the workpiece in the first processing device 4b, the workpiece is transported by the automatic transport device 8 to the second processing device 4c, where the required processing is performed on the workpiece. The steps for transporting the workpiece to the second processing device 4c are substantially the same as the steps for transporting the workpiece to the first processing device 4b, and therefore a description thereof will be omitted.

[0030] After the required processing is performed on the workpiece in the second processing device 4c, the workpiece is transported by the automatic transport device 8 to the third processing device 4d, where the required processing is performed on the workpiece. The automatic transport device 8 then transports the workpiece to the storage device 4a, where the processed workpiece is stored. In this way, in the transport system 2, articles such as workpieces are transported to each processing device 4 by the automatic transport device 8.

[0031] Furthermore, in the transport system 2, the automated cleaning vehicle 18 travels as needed to clean the traveling panel 10. This is because the processing devices 4 are installed in a clean room, and if the automated transport device 8 travels between processing devices 4, dust accumulated on the traveling panel 10 will scatter, reducing the accuracy of the clean room. The automated cleaning vehicle 18 generates suction force in the suction nozzle using the suction means, and while traveling over the traveling panel 10, it sucks dust on the traveling panel 10 from the suction nozzle and collects the dust sucked from the suction nozzle in a dust container. Note that when the automated cleaning vehicle 18 performs cleaning, the travel of the automated cleaning vehicle 18 and the travel of the automated transport device 8 are controlled so that the automated cleaning vehicle 18 and the automated transport device 8 do not come into contact with each other. Alternatively, the automated cleaning vehicle 18 may travel when the automated transport device 8 is not traveling.

[0032] The frequency at which the autonomous cleaning vehicle 18 performs cleaning can be set arbitrarily. For example, the autonomous cleaning vehicle 18 can perform cleaning periodically (for example, once a day). Furthermore, the autonomous cleaning vehicle 18 may perform cleaning when an instruction is input by an operator, other than at the times set in advance.

[0033] The autonomous cleaning vehicle 18 discharges dust as needed in the discharge area 20. Therefore, in this embodiment, it is not necessary to periodically lower the autonomous cleaning vehicle 18 from the traveling panel 10 in order to discharge the dust collected by the autonomous cleaning vehicle 18.

[0034] When the autonomous cleaning vehicle 18 discharges dust in the discharge area 20, the autonomous cleaning vehicle 18 first stops above the discharge hole 24 in the discharge area 20. As described above, the discharge area 20 is formed in an area that does not interfere with the travel of the automatic transport device 8, so there is no need for the automatic transport device 8 to stop traveling when the autonomous cleaning vehicle 18 discharges dust.

[0035] After the autonomous cleaning vehicle 18 stops above the discharge hole 24, dust is discharged from the autonomous cleaning vehicle 18 into the discharge hole 24. Specifically, before the dust is discharged from the autonomous cleaning vehicle 18 into the discharge hole 24, the suction means of the dust collection means 28 is activated, and suction force is generated at the discharge hole 24 via the duct 26. Next, the dust container is opened by the opening / closing means of the autonomous cleaning vehicle 18, and the dust is discharged from the dust container into the discharge hole 24. The discharged dust is sucked through the discharge hole 24 and sent to the dust storage section 30 of the dust collection means 28 via the duct 26. The dust stored in the dust storage section 30 is then removed and disposed of by an operator.

[0036] The frequency at which the autonomous cleaning vehicle 18 discharges dust in the discharge area 20 can be set arbitrarily. For example, the autonomous cleaning vehicle 18 can periodically discharge dust in the discharge area 20. Furthermore, other than at preset times, the autonomous cleaning vehicle 18 may discharge dust in the discharge area 20 when the amount of dust in the dust container of the autonomous cleaning vehicle 18 exceeds a predetermined amount. In this case, a sensor that detects whether the amount of dust in the dust container exceeds the predetermined amount is provided in the autonomous cleaning vehicle 18.

[0037] As described above, in this embodiment, the autonomous cleaning vehicle 18 collects dust accumulated on the traveling panel 10, and a discharge area 20 for discharging the collected dust by the autonomous cleaning vehicle 18 is formed in an area that does not interfere with the travel of the automatic conveyance device 8, and the autonomous cleaning vehicle 18 discharges the dust in the discharge area 20 as needed. Therefore, it is not necessary to periodically lower the autonomous cleaning vehicle 18 from the traveling panel 10 to discharge the collected dust. Furthermore, because the discharge area 20 for discharging the collected dust by the autonomous cleaning vehicle 18 is formed in an area that does not interfere with the travel of the automatic conveyance device 8, there is no need to stop the travel of the automatic conveyance device 8 when discharging the dust, and a decrease in productivity can be prevented. [Explanation of symbols]

[0038] 2:Transport system 4: Processing equipment 6: Top plate 8: Automatic transport device 10: Travel panel 18: Self-driving cleaning vehicle 20: Discharge area 22: Dust collector 24: Discharge hole 26: Duct 28: Dust collection means

Claims

1. A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, A conveyance system in which an automated cleaning vehicle collects dust accumulated on a traveling panel, and a discharge area is formed in an area that does not interfere with the movement of the automated conveyance device, where the automated cleaning vehicle discharges the collected dust, and the automated cleaning vehicle discharges the dust in the discharge area as needed.

2. 2. The conveying system according to claim 1, wherein the discharge area is provided with a dust collecting device having a discharge hole through which dust is discharged, a duct communicating with the discharge hole, and dust collecting means for collecting the dust, and the dust collected by the automatic cleaning vehicle is collected by the dust collecting means via the discharge hole and the duct.

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