Hose for liquid and liquid application device

Abstract

To provide a hose for liquid capable of reducing the usage amount of the liquid and preventing the generation of air bubbles in the liquid in a container.SOLUTION: A hose for liquid has a hose 21 which is used for a liquid application device, is inserted into a container 10 containing liquid 11 having viscosity of 100 cP or more and 500 cP or less, and sucks up the liquid 11, and a liquid dripping prevention member 22 which is positioned on a tip side of the hose 21 and is disposed in the hose 21.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a liquid hose and a liquid application device. [Background technology]

[0002] In conventional resist coating equipment, photoresist liquid is pumped up through a hose inserted into a gallon bottle and applied to a substrate. When the photoresist liquid runs out, the hose must be removed from the gallon bottle and the bottle replaced. Since the photoresist inside the hose drips when the gallon bottle is replaced, a tray is used to catch the photoresist liquid dripping from the end of the hose. Although the photoresist liquid that drips into the tray is still usable, it must be discarded and wasted.

[0003] In addition, when photoresist liquid drips from the tip of the hose, air gets into the hose. When the hose is inserted into the new gallon bottle with this air still in it, the air inside the hose becomes air bubbles. To remove these bubbles, a certain amount of photoresist liquid needs to be discharged, and because this discharged photoresist liquid is usable, it is also wasted.

[0004] Therefore, there is a need to reduce the amount of photoresist liquid that is usable but discarded as waste. Because photoresist liquid is expensive, there is a need to prevent waste as much as possible. In other words, there is a need for a resist liquid hose and a resist coating device that can reduce the amount of photoresist liquid used by preventing the photoresist liquid from being discarded wastefully. A related technology is described in Patent Document 1.

[0005] It is also required to prevent air bubbles from being generated in the photoresist solution in the gallon bottle after the gallon bottle is replaced.

[0006] The above problem is not limited to photoresist coating devices, and similar problems may occur in any device that coats liquid. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2021-142997 Summary of the Invention [Problem to be solved by the invention]

[0008] Various aspects of the present invention aim to provide a liquid hose and a liquid application device that can reduce the amount of liquid used by preventing the application liquid from being wasted. Another object of various aspects of the present invention is to provide a liquid hose and a liquid application device that can prevent air bubbles from forming in the liquid in a container. [Means for solving the problem]

[0009] Various aspects of the present invention are described below.

[0010] [1] A hose used in a liquid application device, inserted into a container that can hold a liquid having a viscosity of 100 cP or more and 500 cP or less, for sucking up the liquid; a drip prevention member located at the tip side of the hose and disposed within the hose; A liquid hose comprising:

[0011] According to the liquid hose of the above [1] according to one aspect of the present invention, a drip prevention member is disposed at the tip of the hose and within the hose. In other words, the liquid hose is a hose with an integrated drip prevention member. Therefore, even when the hose is removed from the container to replace the container, the drip prevention member prevents the liquid from dripping from the tip of the hose. This prevents the liquid from being wasted, thereby reducing the amount of liquid used. Furthermore, by disposing the drip prevention member at the tip of the hose and inside the hose as described above, it is possible to prevent liquid from dripping from the tip of the hose. This also prevents air from entering the hose when liquid drips. As a result, since an air-free hose is inserted into the replacement container, it is possible to prevent air bubbles from forming in the liquid inside the container.

[0012] [2] In [1] above, The liquid hose is characterized in that the drip prevention member has a function of allowing the liquid to pass through the hose and a function of retaining the liquid.

[0013] According to the liquid hose of one embodiment of the present invention, the anti-drip member at the tip of the hose functions to allow the liquid to pass through the hose and to retain the liquid. Therefore, the liquid can be drawn up through the anti-drip member, but when the hose is removed from the container to replace it, the surface tension of the anti-drip member prevents the liquid from dripping. Furthermore, because the anti-drip member is covered by the liquid, air does not enter the hose. As a result, air bubbles do not form in the hose when the hose is inserted into a new container. This eliminates the need for a process of discharging a fixed amount of liquid to remove air bubbles from the hose, thereby reducing the amount of liquid wasted. This reduces the amount of liquid used. Furthermore, the anti-drip member at the tip of the hose prevents air from entering the hose, thereby preventing dust and foreign matter from entering the hose. As a result, the quality of the liquid during application can be stabilized and pump failures can be prevented.

[0014] [3] In [1] or [2] above, A liquid hose, wherein the drip prevention member is any one of a porous member, a porous filter, an assembly of many thin tubes, and a net-shaped member.

[0015] [4] In [1] or [2] above, the liquid is a photoresist liquid, A liquid hose, wherein the container is a gallon bottle.

[0016] [5] A container that can hold a liquid with a viscosity of 100 cP or more and 500 cP or less; a first hose inserted into the container; a drip prevention member located at a tip end side of the first hose and disposed within the first hose; a pump that draws the liquid contained in the container into the first hose through the drip prevention member; a second hose for applying the liquid sucked up by the pump onto a substrate; A liquid application device comprising:

[0017] According to the liquid application device of one aspect of the present invention, a drip prevention member is disposed inside and at the tip of the first hose. In other words, the first hose is a hose with an integrated drip prevention member. Therefore, even when the first hose is removed from the container to replace the container, the drip prevention member prevents liquid from dripping from the tip of the first hose. This prevents liquid from being wasted, thereby reducing the amount of liquid used. Furthermore, by disposing the drip prevention member inside and at the tip of the first hose as described above, it is possible to prevent liquid from dripping from the tip of the first hose. This also prevents air from entering the first hose when liquid drips. As a result, since the first hose is inserted into the replacement container without any air in it, it is possible to prevent air bubbles from forming in the liquid in the container.

[0018] [6] In paragraph [5] above, The liquid application device is characterized in that the drip prevention member has a function of passing the liquid through the first hose and a function of retaining the liquid.

[0019] [7] In paragraphs [5] or [6] above, the liquid is a photoresist liquid, The liquid application device is characterized in that the container is a gallon bottle. [Effects of the Invention]

[0020] According to various aspects of the present invention, it is possible to provide a liquid hose and a liquid application device that can reduce the amount of liquid used by preventing the application liquid from being wasted. Furthermore, according to various aspects of the present invention, it is possible to provide a liquid hose and a liquid application device that can prevent air bubbles from being generated in the liquid in a container. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is a perspective view illustrating a resist coating apparatus as an example of a liquid coating apparatus according to an aspect of the present invention. [Figure 2] 2 is a perspective view showing the lower interior of the container 10 shown in FIG. 1. FIG. [Figure 3] 3 is a cross-sectional view showing a state in which a first hose 21 is inserted into a liquid 11 in a container 10 shown in FIG. 2. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be readily understood by those skilled in the art that various changes in form and details can be made without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the description of the embodiments shown below.

[0023] Fig. 1 is a perspective view illustrating a resist coating apparatus as an example of a liquid coating apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing the interior below a container 10 shown in Fig. 1. Fig. 3 is a cross-sectional view showing a state in which a first hose 21 is inserted into liquid 11 in the container 10 shown in Fig. 2.

[0024] 2 and 3 is used in a liquid application device, and is a hose 21 (also referred to as a first hose) that is inserted into a container 10 that holds a liquid 11 having a viscosity of 100 cP or more and 500 cP or less. This hose 21 is used to suck up the liquid 11, and a drip prevention member 22 shown in FIG. 3 that is located at the tip side of this hose 21 is disposed inside the hose 21.

[0025] The drip prevention member 22 has a function of allowing the liquid 11 having a viscosity of 100 cP or more and 500 cP or less to pass through the hose 21 and a function of retaining the liquid 11.

[0026] Specific examples of the drip prevention member 22 include a porous member, a porous filter, an assembly of many thin tubes, and a net-shaped member.

[0027] Liquid 11 having a viscosity of 100 cP or more and 500 cP or less in container 10 is sucked up through anti-drip member 22 at the tip end of hose 21, and liquid 11 is applied from the base end of hose 21 by a liquid application device. Then, when liquid 11 in container 10 runs out, hose 21 inserted into container 10 is removed and container 10 is replaced. At this time, because anti-drip member 22 has the function of retaining liquid 11 having a viscosity of 100 cP or more and 500 cP or less as described above, even when hose 21 is removed from container 10, liquid 11 in hose 21 remains in anti-drip member 22 and is prevented from dripping. This eliminates the need for a tray to catch liquid 11 dripping from the tip of hose 32.

[0028] This is explained in more detail below. According to the above-described liquid hose, the drip prevention member 22 is disposed at the tip side of the hose 21 and inside the hose 21, and since it is a hose with an integrated drip prevention member, even when the hose 21 inserted in the container 10 is removed when replacing the container 10, the drip prevention member 22 can prevent the liquid from dripping from the tip of the hose 21. This makes it possible to prevent the liquid from being wasted, and as a result, the amount of liquid used can be reduced.

[0029] Furthermore, as described above, by disposing anti-drip member 22 on the tip side of hose 21 and inside hose 21, it is possible to prevent liquid from dripping from the tip of the hose. This also prevents air from entering the hose when liquid drips. As a result, hose 21 that does not contain air is inserted into the replaced container, preventing air bubbles from forming in the liquid in the container.

[0030] Furthermore, with the above-described liquid hose, the drip prevention member 22 at the tip of the hose 21 functions to both pass the liquid 11 through the hose 21 and retain the liquid 11. Therefore, the liquid can be sucked up through the drip prevention member 22. However, when the hose 21 is removed from the container 10 for container replacement, the surface tension of the drip prevention member prevents the liquid from dripping. Furthermore, because the drip prevention member 22 is covered with liquid, air does not enter the hose 21. As a result, air bubbles do not form in the hose 21 even when the hose 21 is inserted into the replaced container 10. This eliminates the need for a process of discharging a fixed amount of liquid to remove air bubbles from the hose, thereby preventing unnecessary liquid waste. This reduces the amount of liquid used. Furthermore, the drip prevention member 22 at the tip of the hose 21 prevents air from entering the hose 21, thereby preventing dust and other foreign objects from entering the hose 21. As a result, the quality of the liquid during liquid application can be stabilized and pump 31 malfunctions can be prevented.

[0031] The liquid may be a photoresist liquid, and the container 10 may be a gallon bottle. Next, a resist coating apparatus to which this specific example is applied, as shown in FIG.

[0032] The liquid application device shown in FIG. 1 has a container 10 that contains a photoresist liquid 11 having a viscosity of 100 cP to 500 cP, and this container 10 is a gallon bottle. A first hose 21 is inserted into the gallon bottle (container 10). A drip prevention member 22 is disposed within the first hose 21, and the drip prevention member 22 is located at the tip side of the first hose 21 (see FIG. 2). The photoresist liquid (liquid 11) contained in the gallon bottle (container 10) is sucked up into the first hose 21 through the drip prevention member 22 by a pump 31. The photoresist liquid (liquid 11) sucked up by the pump 31 is applied onto a substrate 41 by a second hose 23.

[0033] This will be explained in more detail. 1, the tip (one end) of a first hose 21 is inserted into a gallon bottle (container 10) containing photoresist liquid, and the other end of the first hose 21 is connected to a pump 31 via a switching valve 51. The other end of the first hose 21 is connected to one end of a third hose 24 through the pump 31, and the other end of the third hose 24 is connected to a suck-back valve 53 via a filter 52. The other end of the third hose 24 is connected to one end of a second hose 23 through the suck-back valve 53, and the other end of the second hose 23 is placed on a substrate 41.

[0034] One end of the first drainage hose 61 is inserted into the drainage tank 71, and the other end of the first drainage hose 61 is connected to the filter 52 through the suck-back valve 53. The first drainage hose 61 is also connected to one end of the second drainage hose 62, and the other end of the second drainage hose 62 is connected to the switching valve 51. The switching valve 51 is connected to the first hose 21.

[0035] The photoresist liquid (liquid 11) in the gallon bottle (container 10) is sucked up by pump 31 through drip prevention member 22 into first hose 21, and the sucked-up photoresist liquid passes through third hose 24, filter 52, and suck-back valve 53 and is applied onto substrate 41 from one end of second hose 23. When application is complete, suck-back valve 53 is closed and pump 31 is stopped. Closing suck-back valve 53 draws the photoresist liquid into suck-back valve 53, improving the liquid drainage from one end of second hose 23.

[0036] According to this embodiment, a drip prevention member 22 is disposed inside and at the tip of the first hose 21. In other words, the first hose 21 is a hose integrated with a drip prevention member. Therefore, even if the first hose 21 inserted in the gallon bottle (container 10) is removed when replacing the gallon bottle, the drip prevention member 22 can prevent the photoresist liquid (liquid 11) from dripping from the tip of the first hose 21. This can prevent the photoresist liquid from being wasted, and as a result, the amount of photoresist liquid used can be reduced.

[0037] As described above, a drip prevention member 22 is disposed inside the first hose 21 at the distal end of the first hose 21. The drip prevention member 22 has the function of passing the liquid 11 having a viscosity of 100 cP or more and 500 cP or less through the first hose 21 and the function of retaining the liquid 11. This prevents the photoresist liquid (liquid 11) from dripping from the distal end of the first hose. This also prevents air from entering the first hose 21 when the photoresist liquid drips. As a result, the first hose 21 that does not contain air is inserted into the replaced gallon bottle, preventing air bubbles from forming in the photoresist liquid in the gallon bottle. [Explanation of symbols]

[0038] 10 gallon containers 11 Liquid (photoresist liquid) 21 hose, first hose 22 Anti-drip member 23 Second Hose 31 Pump 41 PCB

Claims

1. a hose used in the liquid application device, inserted into a container that can hold a liquid having a viscosity of 100 cP or more and 500 cP or less, for sucking up the liquid; a drip prevention member located at the tip side of the hose and disposed within the hose; A liquid hose comprising:

2. In claim 1, The liquid hose is characterized in that the drip prevention member has a function of allowing the liquid to pass through the hose and a function of retaining the liquid.

3. In claim 1 or 2, A liquid hose, wherein the drip prevention member is any one of a porous member, a porous filter, an assembly of many thin tubes, and a net-shaped member.

4. In claim 1 or 2, the liquid is a photoresist liquid, A liquid hose, wherein the container is a gallon bottle.

5. a container capable of holding a liquid having a viscosity of 100 cP or more and 500 cP or less; a first hose inserted into the container; a drip prevention member located at a tip end side of the first hose and disposed within the first hose; a pump that draws the liquid contained in the container into the first hose through the drip prevention member; a second hose for applying the liquid sucked up by the pump onto a substrate; A liquid application device comprising:

6. In claim 5, The liquid application device is characterized in that the drip prevention member has a function of passing the liquid through the first hose and a function of retaining the liquid.

7. In claim 5 or 6, the liquid is a photoresist liquid, The liquid application device is characterized in that the container is a gallon bottle.

Images