Electric discharge machine and method of the same

Abstract

To provide an electric discharge machine and a method of the same.SOLUTION: An electric discharge machine and a method of the same perform a discharge processing procedure on an object to be machined. The electric discharge machine includes a mounting base, and an electric discharge unit. The mounting base mounts the object to be machined. The object to be machined has a machining target area. The electric discharge unit performs an electric discharge procedure on the machining target area of the object to be machined, by a machining parameter, through a discharge electrode. The electric discharge unit adjusts an actual output energy value according to a state of change of a discharge frequency or discharge energy during the process of discharge of the discharge processing procedure, and thereby can maintain the discharge processing procedure in a target processing state. The electric discharge machine and the method assists in removing a residue remaining in a working groove by external force to be provided, by using a slag discharge unit, while an insulating sleeve covers the discharge electrode, which can reduce Kerf loss.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a machining apparatus and a method thereof, and more particularly to an electric discharge machining apparatus and a method thereof. [Background technology]

[0002] With the rapid development of the semiconductor industry, electrical discharge machining (EDM) technology has become increasingly popular for processing crystalline ingots and wafers. Electrical discharge machining (EDM) is a manufacturing technique that uses electrical discharges to machine a workpiece into a desired shape. By applying a voltage to two electrodes separated by a dielectric material, a periodic, rapidly changing current is generated to discharge the workpiece. EDM technology employs two electrodes, one of which is called the tool electrode or discharge electrode, and the other, called the workpiece electrode, which is connected to the workpiece. During the EDM process, the discharge electrode does not actually come into contact with the workpiece electrode.

[0003] As the potential difference between the two electrodes increases, the electric field between them also increases. When the electric field strength exceeds the dielectric strength, dielectric collapse occurs, causing a current to flow between the two electrodes, melting and removing some material. When the current is stopped, new dielectric material flows into the electric field between the electrodes, removing the material and providing a new insulating effect. After the current is turned back on, the potential difference between the two electrodes returns to its state before dielectric collapse, allowing another dielectric collapse to occur. As the discharge process removes some material from the workpiece, the distance between the electrode and the workpiece increases. If this distance continues to increase until the electric field strength becomes lower than the dielectric strength, discharge becomes impossible, i.e., the EDM process is interrupted. Therefore, the distance must be continuously and immediately adjusted (reduced or increased) during the EDM feed process. However, prior art techniques do not allow for direct measurement of the distance, and adjusting the distance for various workpieces must rely on the operator's experience.

[0004] The cut surface formed by conventional EDM technology has poor roughness, a large number of cracks on the cut surface, and even cracks extending in directions other than the cutting direction, resulting in unexpected fractures. Meanwhile, when cutting a crystalline ingot, conventional EDM technology requires a clamping device to clamp the periphery of the crystalline ingot, i.e., clamp the side of the crystalline ingot along the radial direction. This prevents rolling and displacement. However, the conventional technology can only cut the crystalline ingot exposed outside the clamping device, and therefore cannot cut the area where the clamping device and the crystalline ingot overlap. Therefore, the conventional technology requires stopping the machine and adjusting its position again before it can be cut again.

[0005] In addition, in the conventional technology for cutting a crystal ingot, the thickness of the cut wafer is very thin, which makes the wafer prone to breakage. Meanwhile, in the conventional electric discharge machining technology, the discharge electrode is prone to be attached to the slag, which makes the discharge uneven (for example, the discharge stops or the current is too high in some areas), and the electrode and the workpiece are prone to damage. Summary of the Invention [Problem to be solved by the invention]

[0006] A primary object of the present invention is to provide an electric discharge machining apparatus and method that can maintain the electric discharge machining procedure at a predetermined target machining state by adjusting the actual discharge energy value during the electric discharge process in accordance with the change in the discharge frequency or discharge energy during the electric discharge process. [Means for solving the problem]

[0007] The electric discharge machining apparatus according to the present invention is an electric discharge machining apparatus for performing an electric discharge machining procedure on at least one workpiece, and is for placing the workpiece on it, the workpiece comprising at least one mounting table having at least one target machining area, at least one discharge electrode and a power supply unit, the power supply unit supplies discharge energy to the discharge electrode at a discharge frequency, and the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece via the discharge electrode with at least one machining parameter, and the electric discharge machining unit is configured to adjust an actual output energy value according to a change in the discharge frequency or discharge energy during the discharge process of the electric discharge machining procedure, thereby maintaining the electric discharge machining procedure in a target machining state.

[0008] The electric discharge machining apparatus according to the present invention adjusts the discharge frequency and / or the discharge energy supplied from the power supply unit, thereby instantly adjusting the actual output energy value when the electric discharge machining procedure is performed, thereby enabling the electric discharge machining procedure to be maintained in the target machining state.

[0009] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit can instantly adjust the actual output energy value by adjusting the machining parameters.

[0010] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit adjusts the machining parameters according to the internal characteristics or external characteristics of the workpiece, thereby enabling the electric discharge machining procedure to be maintained in the target machining state.

[0011] The electric discharge machining apparatus according to the present invention has a plurality of types of machining parameters, and the electric discharge machining procedure selects and adjusts at least one of the types of machining parameters, thereby enabling the electric discharge machining procedure to be maintained in the target machining state.

[0012] In the electric discharge machining apparatus according to the present invention, the target machining state is selected from the group consisting of a cutting speed, a material removal rate, a material loss rate and a surface roughness of the workpiece, and a wire breakage frequency of the electric discharge electrode.

[0013] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece at a set temperature, and the set temperature is 100 degrees Celsius or less.

[0014] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece within a certain temperature range, and the workpiece has the lowest resistivity within the temperature range.

[0015] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece in a water solution.

[0016] In the electric discharge machining apparatus according to the present invention, the object to be machined is a semiconductor material.

[0017] In the electric discharge machining apparatus according to the present invention, the mounting table further includes at least one clamp, which has a slit structure, and which fixes the workpiece by applying a force to the workpiece along a radial or axial direction.

[0018] In the electric discharge machining apparatus according to the present invention, the slit structure has a slit shape selected from the group consisting of a closed type with no opening, a one-side opening type, and a double-side opening type.

[0019] In the electric discharge machining apparatus according to the present invention, the clamp is of a fixed type or a detachable type with a one-side locking structure or a two-side locking structure, and is used to clamp the workpiece.

[0020] In the electric discharge machining apparatus according to the present invention, the slit structure has one or more slits, and each of the slits has the same or different span.

[0021] In the electric discharge machining apparatus according to the present invention, the slit structure has one or more slits, and the distances between adjacent slits are the same or different.

[0022] In the electric discharge machining apparatus according to the present invention, the slit structure has at least one slit, and the slit has a non-equidistant type span or an adjustable span.

[0023] In the electric discharge machining apparatus according to the present invention, the slit structure has a plurality of slits, and at least two of the plurality of slits communicate with each other.

[0024] In the electric discharge machining apparatus according to the present invention, the clamp and the workpiece are partially connected or adhered to each other via a conductor or an insulator.

[0025] In the electric discharge machining apparatus according to the present invention, the conductor or the insulator is a solid medium, a soft medium, or an adhesive.

[0026] The electric discharge machining apparatus according to the present invention further comprises a slag discharge unit, which provides at least one external force to remove residues generated when the electric discharge electrode performs the electric discharge machining procedure on the workpiece.

[0027] In the electric discharge machining apparatus according to the present invention, the external force is one or more selected from the group consisting of an air flow, a water flow, ultrasonic oscillation, piezoelectric oscillation, an attractive force, and a magnetic force.

[0028] In the electric discharge machining apparatus according to the present invention, the slag discharge unit further includes a guide structure, and the guide structure guides the external force to a machining groove where the electric discharge electrode performs the electric discharge machining procedure on the target machining area of ​​the workpiece.

[0029] In the electric discharge machining apparatus according to the present invention, the guide structure manually or automatically changes the position and angle at which the external force is guided depending on the discharge electrode performing the electric discharge machining procedure, thereby guiding the external force to the electric discharge machining position of the machining groove of the workpiece while the discharge electrode is performing the electric discharge machining procedure.

[0030] In the electric discharge machining apparatus according to the present invention, the guide structure moves while filling to the electric discharge machining position where the electric discharge machining procedure in the machining groove in the target machining area is performed, according to the position where the electric discharge electrode moves in the machining groove in the target machining area of ​​the workpiece.

[0031] In the electric discharge machining apparatus of the present invention, the guide structure is an external sealing baffle, which covers the area of ​​the target machining area of ​​the workpiece where the electric discharge machining procedure is not being performed, and moves in position synchronously with the discharge electrode.

[0032] In the electric discharge machining device according to the present invention, the guide structure is a comb-shaped structure and corresponds to the machining groove in the target machining area of ​​the workpiece.

[0033] In the electric discharge machining apparatus according to the present invention, the guide structure is adapted to an extension / contraction mechanism, so that it automatically moves synchronously with the discharge electrode and guides the external force.

[0034] In the electric discharge machining apparatus according to the present invention, the guide structure is aligned with a detection element, and the guide effect of the guide structure is adjusted according to the detection result of the detection element.

[0035] The electric discharge machining apparatus according to the present invention further comprises a temperature control unit, which provides a heat source and / or a cooling source to directly or indirectly adjust the temperature of the workpiece when the electric discharge machining procedure is performed.

[0036] In the electric discharge machining apparatus according to the present invention, the heat source is infrared rays, microwaves, or a heater.

[0037] In the electric discharge machining apparatus according to the present invention, the cooling source is used in combination with an antifreeze agent, thereby preventing freezing of the machining environment of the electric discharge machining unit.

[0038] In the electric discharge machining apparatus according to the present invention, the temperature control unit is equipped with a temperature sensor, thereby determining whether the machining environment of the workpiece has reached a target temperature and enabling the machining environment to be maintained at the target temperature.

[0039] The electric discharge machining apparatus according to the present invention improves machining efficiency by adding ozone or bubbles to the machining environment of the electric discharge machining unit through oxidation, softening or bursting.

[0040] In the electric discharge machining apparatus according to the present invention, the material of the electric discharge electrode is selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond.

[0041] In the electric discharge machining apparatus according to the present invention, the inside of the electric discharge electrode is a metal layer, and the electric discharge electrode has a dielectric material layer or a diamond layer covering the outer surface of the metal layer.

[0042] In the electric discharge machining apparatus according to the present invention, the discharge electrode serves as a capacitance detection element and senses a capacitance value during the discharge process of the electric discharge machining procedure.

[0043] In the electric discharge machining apparatus of the present invention, when there are multiple discharge electrodes or multiple workpieces, the electric discharge machining procedure has multiple machining feed rates accordingly, and the electric discharge machining unit uses the slowest of the multiple machining feed rates as the common machining feed rate.

[0044] In the electric discharge machining apparatus according to the present invention, the mount is a movable mount, and the common machining feed speed is set as a moving speed.

[0045] The electric discharge machining apparatus according to the present invention has a plurality of the electric discharge electrodes, and each of the electric discharge electrodes has an independently controllable machining feed speed.

[0046] The electric discharge machining apparatus according to the present invention has a plurality of discharge electrodes and a plurality of workpieces, and each discharge electrode performs the electric discharge machining procedure on the same or different workpieces.

[0047] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit further has an insulating sleeve, which covers the electric discharge electrode and exposes at least one surface of the electric discharge electrode in the machining feed direction, so that the surface serves as a discharge surface during the process of discharging the electric discharge electrode.

[0048] In the electric discharge machining apparatus according to the present invention, the discharge surface exposed from the discharge electrode has a discharge area formed during the discharge, which is basically larger than the cross-sectional area of ​​the insulating sleeve.

[0049] In the electric discharge machining apparatus according to the present invention, the relative positions of the insulating sleeve and the discharge electrode in the machining feed direction of the electric discharge machining procedure are fixed, but the relative positions of the insulating sleeve and the discharge electrode in the tension direction of the discharge electrode are not fixed.

[0050] In the electric discharge machining apparatus according to the present invention, the insulating sleeve comprises a bottom plate and two side walls, and the two side walls are located at both ends of the bottom plate to form a storage tank, a chamber is formed inside the storage tank, the chamber contains the discharge electrode, and the storage tank has an opening communicating with the chamber, and the opening exposes the discharge surface of the discharge electrode located inside the chamber.

[0051] In the electric discharge machining apparatus according to the present invention, the insulating sleeve fits the discharge electrode along the tension direction of the discharge electrode, and the insulating sleeve has one or more slits, which provide drainage and debris discharge functions during the electric discharge machining procedure.

[0052] In the electric discharge machining apparatus of the present invention, the degree of conformity between the clamping surface of the clamp and the contour of the workpiece changes depending on the degree of clamping between the clamp and the workpiece, and the degree of attachment between the clamping surface of the clamp and the contour of the workpiece is changed accordingly.

[0053] In the electric discharge machining apparatus according to the present invention, the power supply unit of the electric discharge machining unit is configured integrally with or separately from the electric discharge machining apparatus, and supplies power for the electric discharge energy to the workpiece.

[0054] The electric discharge machining apparatus according to the present invention further includes a non-destructive inspection device, which inspects the workpiece before, during, or after the electric discharge machining procedure is performed.

[0055] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit further includes a vibration measuring unit, and the vibration measuring unit measures the vibration value of the discharge electrode.

[0056] In the electric discharge machining apparatus according to the present invention, the electric discharge machining unit further includes a tension measuring unit, and the tension measuring unit measures the tension value of the discharge electrode.

[0057] An electric discharge machining method according to the present invention is characterized by using the electric discharge machining apparatus, comprising the steps of: providing a mount; providing a workpiece, the workpiece having a target machining area, the workpiece being placed on the mount; providing an electric discharge machining unit, the electric discharge machining unit including at least one discharge electrode and a power supply unit, the power supply unit supplying discharge energy to the discharge electrode at a discharge frequency, the electric discharge machining unit performing an electric discharge machining procedure on the target machining area of ​​the workpiece via the discharge electrode according to machining parameters, and the electric discharge machining unit adjusting an actual output energy value according to a change in the discharge frequency or discharge energy during the discharge process of the electric discharge machining procedure, thereby maintaining the electric discharge machining procedure in a target machining state. [Effects of the Invention]

[0058] The electric discharge machining apparatus and method according to the present invention have the following effects. (1) The actual discharge energy value during the discharge process can be adjusted according to the change in the discharge frequency or discharge energy during the discharge process, thereby maintaining the electric discharge machining procedure at the predetermined target machining state.

[0059] (2) The slag discharge unit can provide an external force to assist in removing the residue remaining in the machining groove.

[0060] (3) The guide structure allows the external force from the slag discharge unit to be accurately guided to the electrical discharge machining position where the electrical discharge machining procedure is being performed.

[0061] (4) The discharge electrode can be a capacitance detection element, so that the sensed capacitance value can be fed back immediately as a discharge feedback signal.

[0062] (5) The insulating sleeve covers the discharge electrode and exposes the discharge electrode to the discharge surface in the machining feed direction, which makes it possible to reduce kerf loss (cutting material loss) and improve the precision of electrical discharge machining, thereby effectively resolving the problem of the tendency for unexpected damage to occur in conventional discharge electrodes and workpieces.

[0063] (6) The insulating sleeve covers the discharge electrode, making it less likely to vibrate and increasing the external force (e.g., water or air flow) required to remove slag, achieving the effect of removing debris. The insulating sleeve also prevents the cut workpiece (e.g., wafer) from vibrating more, reducing the risk of wafer rupture. Furthermore, the insulating sleeve reduces the friction between the insulating sleeve and the discharge electrode when using an external force (e.g., water or air flow) to remove slag, preventing damage to the discharge electrode. Meanwhile, the insulating sleeve can also provide some heating.

[0064] (7) The insulating sleeve has a crack, which can improve the effect of the electric discharge machining of the discharge electrode and can also provide the function of discharging slag.

[0065] (8) The clamp has a slit structure, which allows it to firmly clamp the workpiece and effectively solves the problem of not being able to cut the overlapping area between the clamp and the workpiece in conventional electric discharge machining technology. Furthermore, the locking structure also allows for easy detachment and adjustment.

[0066] (9) The clamp can be connected to the workpiece via a buffer member or can be attached to the workpiece, which can effectively avoid the phenomenon of wafers easily exploding in conventional crystal ingot cutting technology.

[0067] In order to better understand the technical features and achievable technical effects of the present invention, better embodiments and detailed descriptions are provided below. [Brief explanation of the drawings]

[0068] [Figure 1] 1 is a front view showing an electric discharge machining apparatus according to the present invention, illustrating a workpiece being placed on a placing table via a placing plate. [Figure 2] 1 is a front view showing an electric discharge machining apparatus according to the present invention, illustrating a workpiece being placed on a table via a clamp. [Figure 3] 3(A) and 3(B) are top views of an electric discharge machining apparatus according to the present invention, showing that a workpiece is placed on a table via a clamp. The slit span can be adjusted according to different thicknesses of the spacer. [Figure 4] 4A and 4B are cross-sectional views showing discharge electrodes of an electric discharge machining apparatus according to the present invention, in which FIG. 4A shows that the discharge electrode is composed of a metal layer, FIG. 4B shows that the discharge electrode is composed of a metal layer and a diamond layer, and FIG. 4C shows that the discharge electrode is composed of a metal layer and a dielectric material layer. [Figure 5] 5A and 5B are top views showing that the discharge electrode of the electric discharge machining device according to the present invention is covered with an insulating sleeve, where Figs. 5A and 5C show a state in which a machining groove is not formed, and Fig. 5B shows a state in which a machining groove is formed. [Figure 6] 6A and 6B are front views showing that an insulating sleeve covers the discharge electrode of an electric discharge machining device according to the present invention, where Figs. 6A and 6C show a state in which a machining groove is not formed, and Fig. 6B shows a state in which a machining groove is formed. [Figure 7] 1 is a top view showing an electrical discharge machining apparatus according to the present invention performing an electrical discharge machining procedure in a tank; FIG. [Figure 8] 1 is a top view showing a state in which slits of the slit structure of the electric discharge machining device according to the present invention are in communication with each other. FIG. [Figure 9] 9(B) is a top view showing that the slit structure of the electric discharge machining device according to the present invention has a closed type slit configuration without an opening, and FIG. 9(B) further has an auxiliary hole compared to FIG. 9(A). [Figure 10]10(A), 10(B), and 10(C) are top views showing that the slit structure of the electric discharge machining device according to the present invention has a one-sided opening type slit, and show modes in which the clamps are located above and on the side of the mounting table, respectively. [Figure 11] 11(A), 11(B), and 11(C) are top views showing that the slits of the slit structure of the electric discharge machining device according to the present invention have guide grooves, and show modes in which the clamps are located above and on the sides of the mounting table, respectively. [Figure 12] 12(A) and 12(B) are front views showing that the clamp of the electric discharge machining apparatus according to the present invention has a one-side locking structure, and show two types of clamps, respectively. [Figure 13] FIG. 1 is a front view showing that a clamp of an electric discharge machining apparatus according to the present invention indirectly clamps an object to be machined using a buffer member. [Figure 14] 14A and 14B are side views showing the state in which the clamp of the electric discharge machining device according to the present invention clamps the workpiece, with FIG. 14A showing the state in which the clamp directly clamps the workpiece, and FIG. 14B showing the state in which the clamp indirectly clamps the workpiece. [Figure 15] 1 is a front view showing that an electric discharge machining apparatus according to the present invention has a slag discharge unit. [Figure 16] 16(A) and 16(B) are front views showing a state in which a slag discharge unit of an electric discharge machining device according to the present invention discharges slag, and show states in which the slag discharge unit discharges slag in different modes. [Figure 17] 1 is a front view showing that a slag discharge unit of an electric discharge machining apparatus according to the present invention has a guide structure. [Figure 18] FIG. 1 is a front view showing that the guide structure of the electric discharge machining device according to the present invention is an external sealing baffle. [Figure 19] 1 is a front view showing that the guide structure of the electric discharge machining device according to the present invention has a comb-shaped structure. [Figure 20] 1 is a front view showing that the guide structure of the electric discharge machining device according to the present invention has an arc-shaped structure. [Figure 21] 10 is a front view showing the guide structure of the electric discharge machining device according to the present invention in combination with an extension mechanism for guiding. FIG. [Figure 22] 10 is a front view showing the detection of slag discharge by aligning a detection element with the guide structure of the electric discharge machining device according to the present invention. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0069] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The proportions of the components in the drawings of the embodiments of the present invention are shown for ease of understanding and are not actual proportions. Furthermore, the dimensional proportions of the assemblies shown in the drawings are for the purpose of explaining the components and their structures, and the present invention is not limited thereto. Meanwhile, for ease of understanding, the same components in the following embodiments will be described with the same reference numerals.

[0070] Furthermore, terms used throughout the specification and claims generally have their ordinary meanings as used in the art, in the context disclosed herein, and in the particular context, unless otherwise specified. Some terms used to describe the present invention are explained below or elsewhere in this specification to provide those of ordinary skill in the art with additional guidance regarding the description of the present invention.

[0071] The use of "first," "second," "third," etc. in this article does not denote a specific order or sequence, nor is it used to limit the invention, but is used only to distinguish between components or operations that are described with the same terminology.

[0072] Secondly, when this article uses terms such as "including," "comprising," "having," and "containing," they are all open terms, meaning including but not limited to.

[0073] The electrical discharge machining apparatus and method according to the present invention are for performing an electrical discharge machining procedure on at least one workpiece. In the present invention, the electric discharge machining apparatus and method can maintain the electric discharge machining procedure at a predetermined target machining state by improving the electric discharge machining unit. For example, the electric discharge machining unit instantly adjusts the actual discharge energy during the electric discharge process according to changes in the discharge frequency or discharge energy during the electric discharge process of the electric discharge machining procedure. In the present invention, the electric discharge energy (e.g., actual output energy) can be intelligently adjusted to maintain the electric discharge machining procedure at a predetermined target machining state (e.g., maintaining the cutting speed, maintaining the maximum material removal rate (MRR), maintaining no wire breaks, maintaining a predetermined surface roughness, maintaining a predetermined wire break frequency, or other conditions). Meanwhile, the electric discharge machining apparatus and method according to the present invention further improves the efficiency of electric discharge machining by improving the structural design of the electric discharge machining unit and the stage.

[0074] Fig. 1 is a front view of an electric discharge machining apparatus according to the present invention, showing a workpiece placed on a table via a loading plate. Fig. 2 is a front view of an electric discharge machining apparatus according to the present invention, showing a workpiece placed on a table via a clamp. Fig. 3 is a top view of an electric discharge machining apparatus according to the present invention, showing a workpiece placed on a table via a clamp. Please refer to FIGS. 1 to 3. An electric discharge machining apparatus 10 according to the present invention includes at least one table 20 and at least one electric discharge machining unit 30. The table 20 is for placing at least one workpiece 100 thereon. The table 20 according to the present invention may be a table that is fixed in position, or a movable or rotatable table. The table 20 according to the present invention may optionally include a table plate 21 as shown in FIG. 1, or may omit the table plate as shown in FIGS. 2 and 3. The above-described forms of the table 20 are examples given for the purpose of explanation, and the present invention is not limited thereto.

[0075] The workpiece 100 is any conductive or semiconductive material, such as a crystal ingot or wafer, or any material suitable for electrical discharge machining, and has an outer shape such as a cylindrical block or sheet. The workpiece 100 has at least one processing target area 110, for example, one or more processing target areas 110. Taking a semiconductor material as an example, the workpiece 100 is made of a semiconductor material selected from the group consisting of silicon, gallium arsenide, indium phosphide, gallium nitride, and silicon carbide. In the case of an example in which a plurality of processing target areas 110 are provided, these processing target areas 110 are selectively positioned at any positions suitable for processing in the workpiece 100. The distance between these processing target areas 110 defines the thickness, thinning, or cutting interval of the cut workpiece 100 (for example, is the same), and the numerical value is adjusted according to the requirements of the actual process, so it is not limited to being equal to or unequal to each other.

[0076] 1 to 3 , the electric discharge machining unit 30 includes at least one electric discharge electrode 32 and at least one power supply unit 34. The electric discharge electrode 32 of the electric discharge machining unit 30 extends along a second direction Y such that a discharge section B of the electric discharge electrode 32 is parallel to the second direction Y. The second direction Y is perpendicular to the first direction X and the machining feed direction F. The electric discharge section B of the electric discharge electrode 32 and the target machining area 110 of the workpiece 100 undergo reciprocating or cyclic relative motion (e.g., relative displacement along the second direction Y shown in FIGS. 1 to 3 ), thereby performing an electric discharge machining procedure on the target machining area 110 of the workpiece 100 on the mounting table 20 along the machining feed direction F. During the electric discharge machining procedure, the power supply unit 34 of the electric discharge machining unit 30 supplies a power source P1 of discharge energy to the discharge electrode 32 and the workpiece 100, thereby applying discharge energy to the target machining area 110 of the workpiece 100 via the discharge electrode 32 located in the discharge section B. The power supply unit 34 supplies the above-mentioned power source P1 by using one set of power output or multiple sets of power output. The power supply unit 34 can be electrically connected in series or parallel to the discharge electrode 32, and can be applied to the present invention as long as it can apply discharge energy to the target machining area 110 of the workpiece 100 via the discharge electrode 32. On the other hand, in the present invention, the power supply unit 34 of the electric discharge machining unit 30 is provided so as to be integrated (integrated) with the electric discharge machining apparatus 10 or separate (detachable), and supplies power source P1 to the workpiece 100. Explaining this by way of example, the mounting table 20 (and / or the clamps 24 thereon) and the power supply unit 34 may be integrated (integrated) or separate (detachable). A mounting plate 21 may be optionally provided on the mounting table 20. In other words, when the mounting table 20 and the clamps 24 thereon receive and clamp the workpiece 100, the power source P1 is supplied to the workpiece 100 directly via the power supply unit 34 provided so as to be integrated (integrated) with the mounting table 20 (and / or the clamps 24 thereon). Alternatively, first, the workpiece 100 is received and clamped, and then the power source P1 is supplied to the workpiece 100 by the power supply unit 34, which is provided so as to be separate (detachable).

[0077] The power supply unit 34 of the electric discharge machining unit 30 supplies discharge energy to the discharge electrode 32 at a discharge frequency, and the electric discharge machining unit 30 performs an electric discharge machining procedure on the target machining area 110 of the workpiece 100 on the mounting table 20 along the machining feed direction F with at least one machining parameter via the discharge electrode 32, for example, performing electric discharge machining procedures such as cutting, thinning, and / or grinding / polishing (Electric Discharge Grinding, EDG) on the target machining area 110 of the workpiece 100. The present invention is not limited to the stage 20 driving the workpiece 100 to move it toward the discharge electrode 32 of the electric discharge machining unit 30, or the electric discharge machining unit 30 driving the discharge electrode 32 to move it toward the workpiece 100, but can be applied to the present invention as long as the discharge electrode 32 of the electric discharge machining (EDM) unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the machining feed direction F. The electric discharge machining unit 30 according to the present invention is equipped with a process control component (e.g., a processor) (not shown), which, for example, drives a servo mechanism (e.g., a stepping motor) (not shown) to move the stage 20 or drive the discharge electrode 32 to move it toward the workpiece 100. The fact that the electric discharge machining unit 30 is equipped with a process control component and that the stage 20 or the discharge electrode 32 is driven by a servo mechanism is conventional technology, and the details of how the electric discharge machining unit 30 is equipped with a process control component and how it is used in conjunction with a servo mechanism are within the understanding of those skilled in the art, and therefore will not be described here.

[0078] If the machining conditions, such as the structure of the discharge electrode 32 or the material removal rate of the workpiece 100, change during the discharge process of the electric discharge machining procedure, for example, before the discharge electrode 32 breaks or when the material removal rate decreases, the discharge frequency or discharge energy (e.g., discharge frequency or discharge energy per hour) during the discharge process of the electric discharge machining procedure will change. The principle is that before the discharge electrode 32 breaks or when the material removal rate becomes small (for example, when the material at the position of the workpiece 100 that has just been cut is harder or less conductive), the normal discharge frequency drops and the arcing discharge frequency increases. The change in the discharge frequency or discharge energy is, for example, when the change in the discharge frequency or discharge energy exceeds a predetermined threshold value, or when the change in the discharge frequency or discharge energy shows a tendency, such as a tendency to decrease over time, increase over time, rise or fall sharply, or the proportion between normal discharge and arcing discharge exceeds a predetermined critical value.

[0079] In particular, the present invention determines whether a predetermined threshold value is exceeded by measuring or calculating the change in the discharge frequency or discharge energy (e.g., discharge frequency or discharge energy per time) during the discharge process of the electric discharge machining procedure, and if so, indicates that the machining state of the electric discharge machining procedure (e.g., cutting speed, material removal rate, discharge electrode integrity, surface roughness, etc.) begins to change. Since the machining parameters of the EDM procedure and the internal and external characteristics of the workpiece affect the degree of change in the above-mentioned discharge frequency or discharge energy, the present invention uses various adjustment plans to instantly adjust the actual output energy value (e.g., actual output energy value per time) corresponding to the machining parameters, so that the EDM procedure can maintain a predetermined target machining state (i.e., avoid continuous changes in the machining state), for example, maintaining a predetermined material removal rate (MRR), maintaining no wire breaks, maintaining a predetermined surface roughness, maintaining a predetermined wire break frequency, or other states. In the present invention, the discharge frequency or discharge energy can be measured or calculated using conventional electric discharge machining technology, and how to measure or calculate the change in the discharge frequency or discharge energy using current electric discharge machining technology can be understood by anyone with ordinary knowledge in the technical field to which the present invention pertains. Therefore, the theoretical basis for measuring or calculating the discharge frequency or discharge energy and the measurement and calculation methods will not be described here.

[0080] In the first type of adjustment plan, the electric discharge machining unit 30 according to the present invention adjusts machining parameters such as the discharge frequency and / or the discharge energy provided by the power supply unit 34, thereby instantly adjusting the actual output energy value corresponding to the machining parameters when performing the electric discharge machining procedure, so as to maintain the electric discharge machining procedure at the predetermined target machining state. In the present invention, the discharge energy is adjusted, for example, by adjusting the voltage. In the second type of adjustment scheme, the electric discharge machining unit 30 according to the present invention adjusts other machining parameters besides the discharge frequency and / or discharge energy, for example, by adjusting the numerical value of the machining parameter, thereby instantly adjusting the actual output energy value. For example, by adjusting the numerical value of a first machining parameter to the numerical value of a second machining parameter, the actual output energy value corresponding to the numerical value of the first machining parameter can be adjusted to the actual output energy value corresponding to the numerical value of the second machining parameter. In the third type of adjustment scheme, the first and second types of adjustment schemes are combined, i.e., the discharge frequency and / or discharge energy are adjusted, and the numerical value of the first machining parameter among other machining parameters is adjusted to the numerical value of the second machining parameter, thereby instantly adjusting the actual output energy value. The types of machining parameters according to the present invention include one or more of a directional parameter, an electric discharge characteristic parameter, a debris removal parameter, a movement and tension parameter, and a vibration parameter. The directional parameter is, for example, the relative machining direction between the discharge electrode and the workpiece. The discharge characteristic parameters include, for example, discharge frequency and discharge energy, and further include, for example, one or more of the peak current (the maximum current flowing between the discharge electrodes during discharge), the voltage when the workpiece separates from the discharge electrodes, the duration of the discharge pulse, the pause time of the discharge pulse, and the gap voltage corresponding to the discharge gap. The slag discharge parameters include the flow rate of the slag discharge liquid supplied to the discharge electrode. The slag discharge liquid is, for example, water, preferably pure water, and is supplied, for example, between the two end points of the discharge electrode. The movement and tension parameters include one or more of the movement speed of the discharge electrode, the tension of the discharge electrode, and the vibration of the discharge electrode. Meanwhile, the machining parameters according to the present invention may optionally include a feedback adjustment rate of one or more of the above-mentioned machining parameters. For example, in the present invention, by performing data analysis on the machining states obtained by performing an electric discharge machining procedure on different workpieces 100 using multiple machining parameters, machining parameters that affect the machining states of different workpieces 100 can be obtained.The above-mentioned different workpieces 100 include those having differences in internal properties (e.g., doping concentration, resistivity, defects or flaws) or external properties (e.g., thickness), such as workpieces having different doping concentrations or resistivities, or workpieces having different thicknesses. In addition, the present invention optionally creates a correspondence table that lists the correspondences between the internal and external characteristics of the workpiece, the values ​​and types of machining parameters, the machining state, the discharge frequency, the discharge energy, and the actual output energy value. This allows the present invention to adjust the values ​​or types of machining parameters by selecting optimal values ​​or types from the correspondence table according to the desired target result (i.e., the target machining state). Simply put, the present invention allows the EDM procedure to be maintained in the target machining state by selecting and adjusting at least one of the values ​​and types of multiple machining parameters using the correspondence table. The machining state is selected from the group consisting of, for example, the cutting speed, material removal rate, material loss rate and surface roughness of the workpiece 100, and the breakage frequency of the discharge electrode 32. In addition, the present invention optionally performs non-destructive testing on the workpiece 100, thereby obtaining the internal characteristics. Taking the internal characteristics as scratches or defects as an example, in the present invention, the workpiece 100 may be subjected to non-destructive testing using a non-destructive testing device 80 (e.g., an ultrasonic testing device, an X-ray testing device, or an infrared testing device) before, during, or after an electric discharge machining procedure (e.g., cutting) is performed on the workpiece 100. This allows the internal condition (e.g., the location or extent of the defects or scratches) of the workpiece 100 (e.g., a crystalline ingot or wafer) to be inspected before, during, or after cutting. This allows for adjustments to be made accordingly, and further, by feeding back the inspection results to the electric discharge machining device, optimal machining parameters can be obtained in accordance with this non-destructive testing and the one or more machining parameters.

[0081] 1 to 3. In the first embodiment, two side edges A of a discharge electrode 32 of an electric discharge machining unit 30 according to the present invention are pressed against a fixed member 36. The fixed member 36 is configured, for example, but not limited to, by assembling at least two receiving members 40 and at least two holding members 50. By pressing the two side edges A of the discharge electrode 32 movably or fixedly against the two receiving members 40, respectively, a discharge section B of the discharge electrode 32 is suspended in the air, and an electric discharge machining procedure is performed on a target machining area 110 of a workpiece 100 via the discharge section B. The holding member 50 is firmly connected to the receiving member 40, either detachably or fixedly. The fixed member 36 is connected to a motion mechanism (e.g., a stepping motor) (not shown), for example, via the holding member 50. The motion mechanism can drive the fixed member 36 to perform motions such as rotation or translation. The electric discharge machining unit 30 can drive the motion mechanism, for example, via a processing control component, and process it in accordance with the servo mechanism, thereby causing the electric discharge electrode 32 to perform reciprocating or circulating motion along the tension direction (Y-axis) and moving back and forth along the machining feed direction (F-axis). The discharge electrode 32 of the electric discharge machining unit 30 according to the present invention has, for example, a constant tension or, for example, an adjustable tension, and the two fixed members 36 are displaced relative to each other, for example, by the movement mechanism (not shown), moving in directions toward or away from each other, thereby adjusting the tension of the discharge electrode 32. The electric discharge machining unit 30 according to the present invention optionally includes a tension measuring unit 38. The tension measuring unit 38 can measure the magnitude of the tension of the discharge electrode 32. The tension measuring unit 38 is, for example, a conventional commercially available tension meter, and therefore, a description thereof will be omitted here. Meanwhile, the present invention may optionally include a vibration measuring unit 39. The vibration measuring unit 39 can measure the vibration value of the discharge electrode 32.

[0082] The discharge electrode 32 may have an outer shape such as a line, a sheet, or any of various other shapes. There may be, for example, one or more discharge electrodes 32. There may be, for example, one or more workpieces 100. These discharge electrodes 32 may optionally have independently controlled machining feed speeds, and the wire take-up and delivery sets (e.g., fixing members 36) of the discharge electrodes 32 may be independent or shared. Therefore, in the present invention, one or more discharge electrodes 32 may selectively perform an electric discharge machining procedure on, for example, one or more of the same or different workpieces 100, i.e., one or more target machining areas 110 on the same or different workpieces 100. When one or more discharge electrodes 32 perform an electric discharge machining procedure on one or more workpieces 100, each of which may be the same or different, the electric discharge machining procedure has multiple machining feed rates. Therefore, the electric discharge machining unit 30 according to the present invention can selectively set, for example, the slowest of these machining feed rates as the common machining feed rate. This allows the electric discharge electrodes 32 to have a common machining feed rate. In other words, when multiple discharge electrodes 32 machine the same workpiece 100, the overall machining feed rate is determined by the slowest of the machining feed rates. Similarly, when the workpiece 100 is placed on the mount 20 and the mount 20 is a movable mount, the mount 20 moves at the common machining feed rate. However, this is merely an example, and the present invention is not limited thereto. In the present invention, when performing an electric discharge machining procedure, the electric discharge electrodes 32 can selectively have independently controlled machining feed rates, thereby allowing the electric discharge electrodes 32 to have their own machining feed rates.

[0083] As shown in FIG. 4A, the discharge electrode 32 according to the present invention is composed of a conductive material layer 32a. The material of the conductive material layer 32a may be selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond. Alternatively, as shown in FIG. 4B, the interior of the discharge electrode 32 may be a metal layer 32b, with a diamond layer 32c covering the outer surface of the metal layer 32b. This allows for simultaneous grinding and polishing during the discharge process (i.e., grinding and polishing while discharging). Alternatively, as shown in FIG. 4C, the interior of the discharge electrode 32 may be a metal layer 32b, with a dielectric material layer 32d covering the outer surface of the metal layer 32b. Therefore, the discharge electrode 32 functions as a capacitance detection element during the discharge process. This allows for real-time detection of changes in capacitance during the discharge process, and provides a signal that senses the capacitance and feeds back to the discharge. The dielectric material layer 32d may be made of, for example, ceramic or Teflon (registered trademark), but is not limited to these. The metal layer 32b may be made of, for example, copper, brass, molybdenum, tungsten, steel, aluminum, zinc, and nickel. The thickness of the discharge electrode 32 is preferably less than about 300 μm, and is preferably in the range of about 30 μm to about 300 μm.

[0084] Also, as shown in Figures 5 to 6, Figures 5(A), 5(C), 6(A) and 6(C) show a state in which the discharge electrode 32 has not formed a machining groove 120 on the workpiece 100, and Figures 5(B) and 6(B) show a state in which the discharge electrode 32 has formed a machining groove 120 on the workpiece 100. The electric discharge machining unit 30 according to the present invention optionally includes an insulating sleeve 132. The insulating sleeve 132 is made of an electrically insulating material. The insulating sleeve 132 according to the present invention fits around the circumferential surface of the discharge electrode 32 along the tension direction of the discharge electrode 32 (i.e., the Y-axis direction). The insulating sleeve 132 is not limited to being fixedly or movably fitted around the circumferential surface of the discharge electrode 32, and thus the relative positions of the insulating sleeve 132 and the discharge electrode 32 in the tension direction can be fixed or movable as required. The insulating sleeve 132 exposes the discharge electrode 32 from at least one surface in the machining feed direction F of the electric discharge machining procedure, so that the above surface can serve as the discharge surface 32e when the discharge electrode 32 generates an electric discharge in the electric discharge machining procedure. Although a portion of the insulating sleeve 132 covers the discharge electrode 32, it is preferable that only the surface of the discharge electrode 32 in the machining feed direction F of the electric discharge machining procedure is exposed. In the present invention, an insulating sleeve 132 covers the peripheral edge of the discharge electrode 32 (i.e., the surface other than that in the machining feed direction F), with the purpose of reducing kerf loss (also called material processing loss), thereby effectively reducing the problem that the conventional discharge electrode 32 and the workpiece 100 are prone to unexpected damage. In the present invention, the discharge region R formed during discharge on the discharge surface 32e of the discharge electrode 32 is substantially larger than the cross-sectional area r of the insulating sleeve 132. This allows the discharge electrode 32 and the insulating sleeve 132 to enter the machining groove 120. That is, the present invention is applicable as long as the discharge region R is slightly larger than the cross-sectional area r of the insulating sleeve 132. In other words, the present invention can improve the precision of electric discharge machining and avoid the problem of the conventional discharge electrode 32 and workpiece 100 being susceptible to unexpected damage. For example, the insulating sleeve 132 includes, for example, a bottom plate 132a and two side walls 132b. The insulating sleeve 132 is placed, for example, via the bottom plate 132a, on the fixing member 36 or the table 20 (shown in FIG. 2) or around the workpiece 100. The two side walls 132b are located at both ends of the bottom plate 132a and form a container 132c. Both ends of the accommodating tank 132c are open. A chamber is formed inside the accommodating tank 132c to accommodate the discharge electrode 32. The accommodating tank 132c has an opening 132d communicating with the chamber. The insulating sleeve 132 exposes the discharge surface 32e of the discharge electrode 32 located in the chamber through the opening 132d. In one embodiment, the relative positions of the insulating sleeve 132 and the discharge electrode 32 in the machining feed direction F of the electric discharge machining procedure are fixed, for example, and the relative positions of the insulating sleeve 132 and the discharge electrode 32 in the tension direction of the discharge electrode 32 are movable, for example. Simply put, the discharge electrode 32 is movably fitted into the insulating sleeve 132. The insulating sleeve 132 and the discharge electrode 32 move along the machining feed direction F (for example, displace along the vertical direction), but only the discharge electrode 32 displaces left and right, and the insulating sleeve 132 does not displace left and right. However, the present invention is not limited to this, and in another embodiment, the relative positions of the insulating sleeve 132 and the discharge electrode 32 in the machining feed direction F of the electric discharge machining procedure and the tension direction of the discharge electrode 32 are all fixed, for example. While it is preferable that only the surface of the insulating sleeve 132 in the machining feed direction F of the discharge electrode 32 be exposed, the present invention is not limited thereto. For example, the insulating sleeve 132 according to the present invention may optionally have one or more gaps 134, such as a plurality of micro-holes located in the side wall 132b, as shown in Figures 6(A), 6(B), and 6(C). The containing tank 132c may communicate with the outside through these gaps 134, thereby providing a slag discharge (e.g., drainage or chip discharge) function during the EDM process. The purpose of providing these gaps is to discharge residue or water flow (i.e., the external force F2 generated by the slag discharge unit 64 in Figure 17) and to direct this away from the discharge electrode 32. Therefore, the insulating sleeve 132 is not limited to a specific orientation, position, size, or number. As long as it can protect the discharge electrode 32 and provide a slag discharge function, any insulating sleeve 132 may be applied to the present invention.

[0085] 1 to 3 and 7. The electrical discharge machining unit 30 according to the present invention can perform dry electrical discharge machining on the workpiece 100 in a dry machining environment such as a gas environment or a vacuum environment, and can also perform wet electrical discharge machining on the workpiece 100 in a wet machining environment by immersing the workpiece 100 in a liquid in a tank 41 or by spraying a liquid onto the workpiece 100. The liquid is, for example, a water solution or an electrolyte. Specifically, the electrical discharge machining unit 30 according to the present invention performs an electrical discharge machining process on the target machining area 110 of the workpiece 100 in a liquid, such as a water solution or an electrolyte. Taking the liquid as an example, assuming that the liquid is an electrolyte, as shown in FIG. 1 , the discharge electrode 32 is electrically connected to the cathode of the power supply unit 34, and the workpiece 100 is electrically connected to the anode of the power supply unit 34. This allows an electrolytic reaction to occur simultaneously during the electrical discharge machining process. In the present invention, the cathodic protection phenomenon of the electrolytic reaction prevents the metal components of the discharge electrode 32 from dissolving in the electrolyte during the electrical discharge machining process, thereby reducing the risk of fracture of the discharge electrode 32. The electrolytic reaction generates hydrogen gas from the water in the electrolyte at the target machining area 110 of the workpiece 100. The hydrogen gas bubbles help remove residue from the machining groove 120, improving the cleaning effect of the workpiece 100. By utilizing the principle that like polarities repel each other, it is possible to prevent residues that are negatively charged from adhering to the discharge electrode 32 and the machined groove 120.

[0086] The temperature range in which the electric discharge machining unit 30 according to the present invention can perform an electric discharge machining procedure is, for example, less than or equal to about 100° C. That is, the set temperature in which the electric discharge machining unit 30 according to the present invention can perform an electric discharge machining procedure is any temperature less than or equal to about 100° C. For example, the relatively low temperature range applicable to the present invention is, for example, from about 0° C. to about 100° C., and, for example, from about 22° C. to about 100° C., and the set temperature is any temperature within this temperature range, for example, room temperature. In the present invention, since the required temperature of the machining environment during the EDM procedure does not exceed 100 degrees Celsius, the present invention further allows for the EDM procedure to be performed using a machining environment such as a tank 41 containing a water solution. This eliminates the need for the conventional high-temperature oil solution, significantly reducing energy consumption and improving convenience. Meanwhile, the EDM unit 30 according to the present invention may also optionally include a temperature control unit 33. The temperature control unit 33 can provide a heat source and / or a cooling source during the EDM procedure. The heat source and / or the cooling source may directly adjust the temperature of the workpiece 100, or indirectly adjust the temperature of the workpiece 100 via various components of the EDM apparatus, such as the clamp 24 shown in FIG. 2, the guide structure 66 shown in FIG. 17, the mounting table shown in FIG. 2, the discharge electrode 32 shown in FIG. 2, the mounting plate shown in FIG. 1, the insulating sleeve 132 shown in FIG. 5, and / or the liquid in the tank 41 shown in FIG. 7. This allows the EDM procedure to be performed on the workpiece 100 within the above-mentioned temperature range or at a set temperature. The temperature control unit 33 includes a heat source, such as an infrared ray, microwave, or heater, which is a heat source. The temperature control unit 33 also includes a cooling source, such as a cooler, which is a temperature reduction element. The cooling source can optionally be used in conjunction with an antifreeze agent to prevent the machining environment of the electric discharge machining unit 30 (e.g., the above-mentioned water solution) from freezing. Meanwhile, the temperature control unit 33 includes, for example, a temperature sensor 35. The temperature control unit 33 can use the temperature sensor 35 to detect whether the machining environment of the workpiece 100 has reached a target temperature (e.g., the above-mentioned temperature range or set temperature). This allows the machining environment to be maintained at this target temperature. In addition, to further improve the machining efficiency, the present invention further adds ozone (e.g., gas or liquid phase) or bubbles (e.g., microbubbles) to the machining environment (e.g., the above-mentioned water solution) of the EDM unit 30, which can increase the EDM speed and improve the EDM quality through oxidation, softening, or explosion (e.g., implosion) methods, and can also remove carbides and residues generated on the surface of the discharge electrode 32, thereby reducing the wear of the discharge electrode.

[0087] Meanwhile, as shown in FIGS. 2 and 3, the mounting table 20 of the electric discharge machining apparatus 10 according to the present invention is optionally provided with at least one clamp 24. As shown in FIGS. 2 and 3, the clamp 24 applies a force to the workpiece 100 along the radial or axial direction to fix the workpiece 100. The clamp 24 according to the present invention includes, for example, a first pressing element 23a and a second pressing element 23b. The first pressing element 23a has a first pressing portion 123a, and the second pressing element 23b has a second pressing portion 123b. This allows pressing against both sides of the workpiece 100, for example, pressing against both sides along the radial direction. At least one (e.g., both) of the first pressing element 23a and the second pressing element 23b of the clamp 24 according to the present invention has one or more slits 25 to form a slit structure. The span D of the slit 25 is, for example, substantially larger than the width of the discharge electrode 32, so that the discharge electrode 32 can be inserted into the clamp 24 through the slit 25. When the clamp 24 clamps the workpiece 100, the slit 25 accordingly exposes the target machining area 110 of the workpiece 100, and the positions of the slits 25 correspond to the positions of the machining grooves 120; for example, the slits 25 and the machining grooves 120 are distributed along the machining feed direction F. In the present invention, by moving the discharge electrode 32 along the slit 25, an electric discharge machining procedure can be performed on the target machining area 110 of the workpiece 100 clamped by the clamp 24. As a result, a machining groove 120 can be formed in the target machining area 110 of the workpiece 100. The outer shapes of the first pressing portion 123a and the second pressing portion 123b may be similar to each other, the same, or different, and may be, for example, flat, arcuate, curved, or other shapes, and preferably correspond to the outer shape of the workpiece 100. For example, if the workpiece 100 is a circular crystalline ingot, the first pressing element 23a and the second pressing element 23b press against both radial sides of the workpiece 100, respectively. The contours of the first pressing portion 123a and the second pressing portion 123b may be, for example, arc-shaped and may optionally conform to at least a portion or all of the contour of the peripheral edge of the workpiece 100, thereby more firmly clamping and fixing the workpiece 100. Meanwhile, the degree of contact of the clamp 24 with the workpiece 100 (also referred to as the degree of conformity to the workpiece 100) according to the present invention varies depending on, for example, the clamping strength between the clamp 24 and the workpiece 100. For example, the contours of the clamping surfaces of the clamp 24 (e.g., the surfaces of the first pressing portion 123a and the second pressing portion 123b) vary according to, for example, the contour of the surface of the workpiece 100, thereby adjusting the degree of conformity between the clamping surfaces of the clamp 24 and the peripheral edge of the workpiece 100 depending on the clamping strength. In a possible application example, the outer layer of the clamp 24 is a clamping surface, and the outer layer is a deformable structure, such as a soft surface layer or a flexible surface layer, or a deformable structure with resilience. The inner layer of the clamp 24 is a support member, and the support member is a structure that is difficult to deform. As a result, the degree of attachment of the clamp 24 to the workpiece 100 varies before, during, and after the clamp 24 locks the workpiece 100, and the degree of attachment between the clamping surface of the clamp 24 and the contour of the workpiece 100 can be changed depending on the clamping degree. In other words, when the clamp 24 completely locks the workpiece 100, the degree of attachment (conformity) between the clamping surface of the clamp 24 and the contour of the workpiece 100 is the highest.

[0088] On the other hand, in the present invention, the clamp 24 has one or more slits 25. These slits 25 are independent of each other as shown in Fig. 3, or at least two slits 25 communicate with each other as shown in Fig. 8. With this design, the discharge electrode 32 can move from one of the slits 25 to another slit 25. This makes it possible to form machining grooves 120 in a plurality of different positions, without requiring a structure for attaching and detaching the clamp 24 or the introduction of a new discharge electrode 32.

[0089] The clamp 24 according to the present invention has a slit structure, which can firmly clamp the workpiece 100, for example, by clamping the upper and lower ends of the workpiece 100 as shown in Fig. 2, and the discharge electrode 32 can pass through the slit 25 of the slit structure and perform an electric discharge machining procedure on the workpiece 100 along the extension direction of the slit 25 to form a machining groove 120, thereby preventing the discharge electrode 32 from damaging the clamp 24. In the present invention, the shape of the slit 25 is selected from the group consisting of a closed type without an opening shown in FIGS. 9(A) and 9(B), a one-side opening type shown in FIGS. 10(A) and 10(B), and a two-side opening type shown in FIG. 3. Taking the one-side opening type or the two-side opening type as an example, the mount 20 according to the present invention may have corresponding openings on one or both sides as shown in FIGS. 10(A) and 11(A), which allows the discharge electrode 32 to easily pass through the slit 25. However, the present invention is not limited thereto. The mount 20 may not have corresponding openings on one or both sides, or the clamp 24 according to the present invention may be located on the side of the mount 20 (as shown), for example, as shown in FIGS. 10(B), 10(C), 11(B), and 11(C). This allows the discharge electrode 32 to easily pass through the slit 25. The slit structure according to the present invention is not limited to specific dimensions, materials, slit opening numbers, or set directions, and the mounting table 20 and / or clamp 24 fall within the scope of the present invention as long as they can clamp the workpiece 100 during the EDM procedure. In other words, the span of the slits 25 of the slit structure and the distance between the multiple slits 25 are not limited to being the same or different from each other. Meanwhile, the slits 25 of the clamp 24 according to the present invention are not limited to having equal spans. The slits 25 may selectively have unequal spans, as shown in FIGS. 11(A) and 11(B) or 9(B). For example, the span at the edge (e.g., the electrode passage end) of the same slit 25 may be greater than the span at the center (e.g., the electric discharge machining end) of the slit, thereby forming a guide groove 125. The edge of the guide groove 125 may selectively be, for example, an arc-shaped protrusion as shown in FIG. 11(B) or an arc-shaped recess as shown in FIG. 11(C). This facilitates the introduction of the discharge electrode 32 into the slit 25 of the clamp 24. Meanwhile, in the case of unequal spans, the clamp 24 (slit structure) according to the present invention may selectively have auxiliary holes 25a communicating with the slits 25. The auxiliary holes 25a may be located on one or both sides of the slit 25, as shown in FIG. 9(B). Therefore, according to the present invention, the discharge electrode 32 can be inserted into the auxiliary hole 25a and moved from the auxiliary hole 25a into the slit 25, making it easier for the discharge electrode 32 to pass through the slit 25 of the clamp 24. The slit 25 of the clamp 24 according to the present invention is not limited to having a fixed span; the slit 25 may optionally have an adjustable span. For example, the clamp 24 according to the present invention may optionally include at least one spacer 27, as shown in FIG. 3 . The spacer 27 is positioned within the slit 25 of the clamp 24 and presses against two side walls of the slit 25, respectively. Therefore, the span of the slit 25 can be adjusted by changing the thickness of the spacer 27, as shown in FIG. 3(A). Since the purpose of the spacer 27 is to adjust the span of the slit 25, the length of the spacer 27 is not particularly limited. However, if the length of the spacer 27 extends from the first pressing element 23a to the second pressing element 23b, as shown in FIG. 2, the stability of the entire clamp 24 structure can be ensured.

[0090] Furthermore, in the present invention, the clamp 24 is not limited to being fixed or detachably positioned on the platform 20. Taking a detachable design as an example, the first pressing element 23a and the second pressing element 23b of the clamp 24 are detachably connected to each other, for example, by a lock-in structure 240. This may be a one-sided locking structure (e.g., two types of clamp 24 shown in FIGS. 12(A) and 12(B)) or a double-sided locking structure as shown in FIG. 2, and the lower second pressing element 23b may also be selectively detachably connected to the platform 20 by the locking structure 240, for example, as shown in FIG. 12. The clamp 24 according to the present invention can detachably clamp the workpiece 100 using the locking structure 240, and the dimensions of the clamping opening of the clamp 24 can also be adjusted according to the dimensions of the workpiece 100. 2 and 12, the locking structure 240 may include, but is not limited to, a bolt 242 and a nut 244. The locking structure 240 according to the present invention can be replaced with any clamp 24 capable of clamping a detachable workpiece 100 according to actual requirements, i.e., as long as it can achieve the effect of detachability, it falls within the scope of the claims of the present invention.

[0091] In the present invention, the clamp 24 may be adapted to clamp the workpiece 100 by directly contacting it as shown in Figures 2 and 14(A), or may be adapted to clamp the workpiece 100 by indirectly contacting it as shown in Figures 13 and 14(B). When the indirect contact method is adopted as an example, a portion of the clamp 24 is connected to the workpiece 100 via a buffer member 29, or a portion of the clamp 24 is adhered to the workpiece 100, for example. The material of the buffer member 29 may be, for example, a conductor or an insulator, such as a solid medium, a soft medium, or an adhesive. For example, the buffer member 29 may be, for example, a conductive or non-conductive adhesive layer, or a conductive (e.g., copper foil) or non-conductive soft pad block. This allows for both a pressing effect and a buffering effect to be achieved. In the present invention, the buffer member 29 is selectively fixed to the first pressing element 23a and the second pressing element 23b of the clamp 24, or fixed to the workpiece 100, or detachably positioned between the first pressing element 23a and the workpiece 100 of the clamp 24 and detachably positioned between the second pressing element 23b and the workpiece 100. To explain this by way of example, when copper foil is used as the buffer member 29, the clamp 24 clamps a portion of the workpiece 100 (e.g., a crystalline ingot) via the copper foil (e.g., a thickness of approximately 100 μm). Therefore, according to the present invention, the portion of the workpiece 100 to be cut (e.g., a wafer) can be prevented from coming into direct contact with the clamp 24, thereby effectively avoiding the phenomenon of wafers being prone to bursting, which occurs in conventional techniques for cutting crystalline ingots.

[0092] Please refer to Fig. 15. When the discharge electrode 32 performs an electric discharge machining procedure on the workpiece 100, residues are generated, so the electric discharge machining unit 30 according to the present invention may optionally further include a slag discharge unit 64. When the electric discharge machining unit 30 performs an electric discharge machining procedure on the workpiece 100, the slag discharge unit 64 applies one or more external forces F2 to remove residues generated when the discharge electrode 32 applies discharge energy to the workpiece 100. The direction or position of the external force F2 from the slag discharge unit 64 can be adjusted according to the outer shape of the workpiece 100 so that the direction or position of the external force F2 corresponds to the discharge section B of the discharge electrode 32. The slag discharge unit 64 is, for example, selected from the group consisting of an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, a suction force generator, and a magnetic generator. The external force F2 is, for example, selected from the group consisting of an air flow, a water flow, an ultrasonic oscillation, a piezoelectric oscillation, a suction force, and a magnetism. The slag discharge unit 64 is not limited to being provided on the fixing member 36 or the mounting table 20, and may also be provided around the discharge section B of the electrode 32. As shown in FIGS. 15, 16(A), and 16(B), the slag discharge unit 64 is a thrust generator 64a, e.g., a water jet generator such as a water sprayer, an air jet generator such as an air sprayer, and / or a suction generator 64b (e.g., a water pump). The slag discharge unit 64 is mounted on the fixture 36 or the table 20, or is mounted around the workpiece 100. The thrust generator 64a and the suction generator 64b are located on both sides of the workpiece 100, respectively, and generate two external forces F2 (thrust force F21 and suction force F22) in different directions. The thrust generator 64a and the suction generator 64b respectively press and suck residues generated during the discharge process of the EDM procedure, thereby effectively improving residue removal. The suction generator 64b is preferably located in the path of the residues pressed by the external force F2. Furthermore, the present invention is not limited to the simultaneous use of the thrust generating device 64a and the suction generating device 64b; in other words, the present invention may also be applied to the use of either the thrust generating device 64a or the suction generating device 64b alone, and as long as the residue can be effectively removed, it falls within the scope of the present invention.

[0093] 17, the slag discharge unit 64 of the electric discharge machining unit 30 according to the present invention may optionally further include a guide structure 66. The guide structure 66 guides an external force F2 (e.g., thrust) from the slag discharge unit 64 to a machining groove 120 on the target machining area 110 of the workpiece 100, thereby assisting in the effect of discharging the slag. The guide structure 66 may be provided on the fixing member 36 or the table 20, as shown in FIG. 2, or may be provided around the workpiece 100. The guide structure 66 is a baffle, for example, an external sealing baffle as shown in FIG. 18, which covers an area on the target machining area 110 of the workpiece 100 where the electric discharge machining procedure is not being performed, and moves synchronously with the discharge electrode 32. 18 and 19, the guide structure 66 is a comb-shaped structure, and has one or more finger baffles that respectively correspond to the machining grooves 120 on the target machining area 110 of the workpiece 100. The cross-sectional shape of the comb-shaped structure may be, for example, linear or curved, and may also be a curved shape such as a linear shape as shown in FIG. 17, a circular arc shape as shown in FIG. 20, or a U-shape as shown in FIG. 18.

[0094] In the present invention, the guide structure 66 guides the external force F2 (e.g., water flow, air flow, etc.) from the slag discharge unit 64 to the electric discharge machining position of the machined groove 120 in the workpiece 100 where the electric discharge machining procedure is being performed by the electric discharge electrode 32, by guiding the position or angle of the external force together with the electric discharge electrode 32 performing the electric discharge machining procedure, either manually as shown in FIG. 17 or automatically as shown in FIG. 18. Meanwhile, the guide structure 66 according to the present invention may be a filling-type baffle, which moves along the machining feed direction F, for example. Explaining by way of example, the guide structure 66 according to the present invention moves along the machining feed direction F, for example, along the machining groove 120 in the machining target area 110 in the workpiece 100, together with the electric discharge electrode 32 performing the electric discharge machining procedure. As a result, the guide structure 66 moves along the machining feed direction F to the electric discharge machining position where the electric discharge machining procedure is being performed on the machined groove 120 in the machining target area 110, while filling. 18 and 21. In one embodiment, the guide structure 66 is, for example, an expandable baffle. The guide structure 66 has elasticity that allows it to expand and contract in accordance with the expansion mechanism 68, so that it can automatically or manually move synchronously with the discharge electrode 32 to guide the external force F2. For example, when the discharge electrode 32 is performing an electric discharge machining procedure, the guide structure 66 automatically maintains a state of proximity to or pressing against the machining groove 120 of the target machining area 110 of the workpiece 100, or, for example, presses against the outside or inside of the machining groove 120 of the workpiece 100. The guide structure 66 (expandable baffle) and the expansion mechanism 68 can achieve an automatic expansion and contraction effect by, for example, a spring or an expansion rod (e.g., a sleeve-type expansion rod), as shown in FIG. 21. Meanwhile, the guide structure 66 according to the present invention is selectively adapted to the structure shown in FIG. 7 during use so that the position and angle of the guide structure 66 can be selectively adjusted within the slit 25 shown in FIG. 7. This achieves the effect of guiding the external force.

[0095] 22, the guide structure 66 according to the present invention can be optionally fitted with a detector 69, which can detect the status of slag discharge or the status of guiding external force F2. The detector 69 can be a sensing element such as a residue sensor, air flow sensor, or water flow sensor, and the angle or position of the guide structure 66 can be adjusted based on the detection results. This allows for excellent slag discharge and guiding effects.

[0096] The electric discharge machining apparatus and method according to the present invention have the following effects. (1) The actual discharge energy value during the discharge process can be adjusted according to the change in the discharge frequency or discharge energy during the discharge process, thereby maintaining the electric discharge machining procedure at the predetermined target machining state.

[0097] (2) The slag discharge unit can provide an external force to assist in removing the residue remaining in the machining groove.

[0098] (3) The guide structure allows the external force from the slag discharge unit to be accurately guided to the electrical discharge machining position where the electrical discharge machining procedure is being performed.

[0099] (4) The discharge electrode can be a capacitance detection element, so that the sensed capacitance value can be fed back immediately as a discharge feedback signal.

[0100] (5) The insulating sleeve covers the discharge electrode and exposes the discharge electrode to the discharge surface in the machining feed direction, which makes it possible to reduce kerf loss (cutting material loss) and improve the precision of electrical discharge machining, thereby effectively resolving the problem of the tendency for unexpected damage to occur in conventional discharge electrodes and workpieces.

[0101] (6) The insulating sleeve covers the discharge electrode, making it less likely to vibrate and increasing the external force (e.g., water or air flow) required to remove slag, achieving the effect of removing debris. The insulating sleeve also prevents the cut workpiece (e.g., wafer) from vibrating more, reducing the risk of wafer rupture. Furthermore, the insulating sleeve reduces the friction between the insulating sleeve and the discharge electrode when using an external force (e.g., water or air flow) to remove slag, preventing damage to the discharge electrode. Meanwhile, the insulating sleeve can also provide some heating.

[0102] (7) The insulating sleeve has a crack, which can improve the effect of the electric discharge machining of the discharge electrode and can also provide the function of discharging slag.

[0103] (8) The clamp has a slit structure, which allows it to firmly clamp the workpiece and effectively solves the problem of not being able to cut the overlapping area between the clamp and the workpiece in conventional electric discharge machining technology. Furthermore, the locking structure also allows for easy detachment and adjustment.

[0104] (9) The clamp can be connected to the workpiece via a buffer member or can be attached to the workpiece, which can effectively avoid the phenomenon of wafers easily exploding in conventional crystal ingot cutting technology.

[0105] The foregoing description is by way of example only and is not intended to be limiting. Any equivalent modifications or variations thereto that do not depart from the spirit and scope of the present invention are intended to be encompassed within the scope of the claims. [Explanation of symbols]

[0106] 10 Electrical discharge machining equipment 20 Loading stand 21 Loading plate 23a First pressing element 23b Second pressing element 24 Clamp 25 slit 25a Auxiliary hole 27 spacer 29 Cushioning material 30 Electrical Discharge Machining Unit 32 Discharge electrode 32a Conductive material layer 32b metal layer 32c Diamond Layer 32d Dielectric material layer 32e discharge surface 33 Temperature Control Unit 34 Power Supply Unit 35 Temperature Sensor 36 Fixing member 38 Tension measurement unit 39 Vibration Measurement Unit 40 Receiving member 41 Tank 50 holding member 64 Slag discharge unit 64a Thrust generator 64b Suction force generator 66 Guide structure 68 Telescopic mechanism 69 Detector element 80 Non-destructive testing equipment 100 Processing object 110 Processing target area 120 Machining groove 123a first pressing portion 123b Second pressing portion 125 Guide groove 132 Insulating sleeve 132a Bottom plate 132b side wall 132c Containment Tank 132d aperture 134 Crack 240 Locking Structure 242 volts 244 Nut A side B Discharge section D span P1 power supply F, X, Y direction F2 external force F21 thrust F22 Suction power R discharge area r cross-sectional area

Claims

1. 1. An electric discharge machining apparatus for performing an electric discharge machining procedure on at least one workpiece, comprising: At least one table for placing the workpiece thereon, the workpiece having at least one processing target area; At least one discharge electrode and a power supply unit are provided, the power supply unit supplies discharge energy to the discharge electrode at a discharge frequency, and the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece with at least one machining parameter via the discharge electrode, and the electric discharge machining unit adjusts an actual output energy value according to a change in the discharge frequency or the discharge energy during the discharge process of the electric discharge machining procedure, thereby maintaining the electric discharge machining procedure in a target machining state. Electrical discharge machining equipment.

2. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit adjusts the discharge frequency and / or the discharge energy supplied from the power supply unit to instantly adjust the actual output energy value when performing the electric discharge machining procedure, thereby enabling the electric discharge machining procedure to be maintained in the target machining state.

3. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit adjusts the machining parameters to instantly adjust the actual output energy value.

4. 4. The electric discharge machining apparatus according to claim 3, wherein the electric discharge machining unit adjusts the machining parameters according to internal characteristics or external characteristics of the workpiece, thereby enabling the electric discharge machining procedure to be maintained in the target machining state.

5. 5. The electric discharge machining apparatus according to claim 4, wherein there are a plurality of types of the machining parameters, and the electric discharge machining procedure is performed by selecting and adjusting at least one of the types of the machining parameters, so that the electric discharge machining procedure can be maintained in the target machining state.

6. 2. The electric discharge machining apparatus according to claim 1, wherein the target machining state is selected from the group consisting of a cutting speed, a material removal rate, a material loss rate and a surface roughness of the workpiece, and a wire break frequency of the electric discharge electrode.

7. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece at a set temperature, and the set temperature is 100 degrees Celsius or less.

8. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece within a certain temperature range, and the workpiece has the lowest resistivity within the temperature range.

9. 9. The electric discharge machining apparatus according to claim 7, wherein the electric discharge machining unit performs the electric discharge machining procedure on the target machining area of ​​the workpiece in a water solution.

10. 10. The electric discharge machining apparatus according to claim 9, wherein the workpiece is a semiconductor material.

11. 2. The electric discharge machining apparatus according to claim 1, wherein the mounting table further comprises at least one clamp, the clamp having a slit structure, and the clamp fixes the workpiece by applying a force to the workpiece along a radial direction or an axial direction.

12. 12. The electric discharge machining apparatus according to claim 11, wherein the slit structure has a shape selected from the group consisting of a closed type with no opening, a one-side opening type, and a two-side opening type.

13. 12. The electric discharge machining apparatus according to claim 11, wherein the clamp is of a fixed type or a detachable type, and has a one-side locking structure or a two-side locking structure, for clamping the workpiece.

14. The electric discharge machining apparatus according to claim 11, wherein the slit structure has one or more slits, and each of the slits has the same or different span.

15. The electric discharge machining apparatus according to claim 11, wherein the slit structure has one or more slits, and the distances between adjacent slits are the same or different.

16. 12. The electric discharge machining apparatus according to claim 11, wherein the slit structure has at least one slit, and the slit has a non-equidistant type span or an adjustable span.

17. The electric discharge machining apparatus according to claim 11, wherein the slit structure has a plurality of slits, and at least two of the plurality of slits communicate with each other.

18. 12. The electric discharge machining apparatus according to claim 11, wherein the clamp and the workpiece are partially connected or adhered to each other via a conductor or an insulator.

19. 19. The electric discharge machining apparatus according to claim 18, wherein the conductor or the insulator is a solid medium, a soft medium, or an adhesive.

20. 2. The electric discharge machining apparatus according to claim 1, further comprising a slag discharge unit, wherein at least one external force is provided by the slag discharge unit to remove residues generated when the electric discharge electrode performs the electric discharge machining procedure on the workpiece.

21. 21. The electric discharge machining apparatus according to claim 20, wherein the external force is one or more selected from the group consisting of an air flow, a water flow, an ultrasonic oscillation, a piezoelectric oscillation, an attractive force, and a magnetic force.

22. 21. The electric discharge machining apparatus according to claim 20, wherein the slag discharge unit further comprises a guide structure, and the guide structure guides the external force to a machining groove where the electric discharge electrode performs the electric discharge machining procedure on the target machining area of ​​the workpiece.

23. 23. The electric discharge machining device according to claim 22, wherein the guide structure manually or automatically changes a position and an angle for guiding the external force depending on a discharge electrode performing the electric discharge machining procedure, thereby guiding the external force to an electric discharge machining position of the machined groove of the workpiece when the discharge electrode is performing the electric discharge machining procedure.

24. 23. The electric discharge machining device according to claim 22, wherein the guide structure moves while filling to an electric discharge machining position where the electric discharge machining procedure in the machining groove in the machining target area is performed, according to a position where the electric discharge electrode moves in the machining groove in the machining target area of ​​the workpiece.

25. 23. The electric discharge machining apparatus according to claim 22, wherein the guide structure is an external sealing baffle, which covers a region of the target machining area of ​​the workpiece where the electric discharge machining procedure is not being performed, and which moves synchronously with the electric discharge electrode.

26. 23. The electric discharge machining apparatus according to claim 22, wherein the guide structure is a comb-shaped structure and corresponds to the machining groove in the target machining area of ​​the workpiece.

27. 23. The electric discharge machining apparatus according to claim 22, wherein the guide structure is adapted to an extension / contraction mechanism, so as to automatically move synchronously with the electric discharge electrode and guide the external force.

28. The electric discharge machining apparatus according to claim 22, wherein the guide structure is adapted to a detection element, and the guide effect of the guide structure is adjusted according to the detection result of the detection element.

29. 9. The electric discharge machining apparatus according to claim 1, further comprising a temperature control unit, which provides a heat source and / or a cooling source to directly or indirectly adjust the temperature of the workpiece when the electric discharge machining procedure is performed.

30. 30. The electric discharge machining apparatus according to claim 29, wherein the heat source is an infrared ray, a microwave, or a heater.

31. 30. The electric discharge machining apparatus according to claim 29, wherein the cooling source is used in conjunction with an antifreeze agent to prevent freezing of the machining environment of the electric discharge machining unit.

32. 30. The electric discharge machining apparatus according to claim 29, wherein the temperature control unit is provided with a temperature sensor to determine whether or not the machining environment of the workpiece has reached a target temperature, and to maintain the machining environment at the target temperature.

33. 2. The electric discharge machining apparatus according to claim 1, wherein ozone or bubbles are added to the machining environment of the electric discharge machining unit to improve machining efficiency by oxidation, softening or bursting.

34. 2. The electric discharge machining apparatus according to claim 1, wherein the material of the discharge electrode is selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond.

35. 2. The electric discharge machining apparatus according to claim 1, wherein the inside of the discharge electrode is a metal layer, and the discharge electrode has a dielectric material layer or a diamond layer covering an outer surface of the metal layer.

36. 36. The electric discharge machining apparatus according to claim 35, wherein the discharge electrode serves as a capacitance sensing element to sense a capacitance value during the discharge process of the electric discharge machining procedure.

37. 2. The electric discharge machining apparatus according to claim 1, wherein when there are a plurality of the discharge electrodes and / or the workpieces, the electric discharge machining procedure has a plurality of machining feed speeds corresponding thereto, and the electric discharge machining unit sets the slowest of the plurality of machining feed speeds as a common machining feed speed.

38. 38. The electric discharge machining apparatus according to claim 37, wherein the platform is a movable platform, and the common machining feed rate is a moving rate.

39. 38. The electric discharge machining apparatus according to claim 1 or 37, wherein there are a plurality of said electric discharge electrodes, and each of said electric discharge electrodes has an independently controllable machining feed speed.

40. 38. The electric discharge machining apparatus according to claim 1 or 37, wherein there are a plurality of said discharge electrodes and said workpieces, and each of said discharge electrodes performs said electric discharge machining procedure on the same or different said workpieces.

41. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit further comprises an insulating sleeve that covers the electric discharge electrode and exposes at least one surface of the electric discharge electrode in the machining feed direction, whereby the surface serves as an electric discharge surface of the electric discharge electrode during the process of performing the electric discharge.

42. 42. The electric discharge machining apparatus according to claim 41, wherein a discharge area formed on the exposed discharge surface of the discharge electrode during the discharge is essentially larger than a cross-sectional area of ​​the insulating sleeve.

43. 42. The electric discharge machining apparatus according to claim 41, wherein the relative positions of the insulating sleeve and the electric discharge electrode in the machining feed direction of the electric discharge machining procedure are fixed, and the relative positions of the insulating sleeve and the electric discharge electrode in the tension direction of the electric discharge electrode are not fixed.

44. 42. The electric discharge machining apparatus according to claim 41, wherein the insulating sleeve comprises a bottom plate and two side walls, the two side walls being located at both ends of the bottom plate to form a storage tank, a chamber being formed inside the storage tank, the chamber containing the discharge electrode, and the storage tank having an opening communicating with the chamber, the opening exposing the discharge surface of the discharge electrode located inside the chamber.

45. 42. The electric discharge machining apparatus according to claim 41, wherein the insulating sleeve fits the electric discharge electrode along the tension direction of the electric discharge electrode, and the insulating sleeve has one or more slits, which can provide drainage and debris discharge functions during the electric discharge machining procedure.

46. 2. The electric discharge machining apparatus according to claim 1, wherein the stage further comprises at least one clamp, and the degree of conformity between a clamping surface of the clamp and the contour of the workpiece varies depending on the degree of clamping between the clamp and the workpiece, and the degree of attachment between the clamping surface of the clamp and the contour of the workpiece varies accordingly.

47. 2. The electric discharge machining apparatus according to claim 1, wherein the power supply unit of the electric discharge machining unit is configured integrally with or separately from the electric discharge machining apparatus, and supplies power for the electric discharge energy to the workpiece.

48. 2. The electric discharge machining apparatus according to claim 1, further comprising a non-destructive inspection device, which inspects the workpiece before, during, or after the electric discharge machining procedure is performed.

49. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit further comprises a vibration measuring unit, and the vibration measuring unit measures a vibration value of the electric discharge electrode.

50. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit further comprises a tension measuring unit, and the tension measuring unit measures the tension value of the electric discharge electrode.

51. Using the electric discharge machining device according to claim 1, providing a platform; providing a workpiece, the workpiece having a target processing area, the workpiece being placed on the platform; providing an electric discharge machining unit, the electric discharge machining unit comprising at least one discharge electrode and a power supply unit, the power supply unit supplying discharge energy to the discharge electrode at a discharge frequency, the electric discharge machining unit performing the electric discharge machining procedure on the target machining area of ​​the workpiece via the discharge electrode according to machining parameters, and the electric discharge machining unit adjusting an actual output energy value according to a change in the discharge frequency or the discharge energy during the discharge process of the electric discharge machining procedure, thereby maintaining the electric discharge machining procedure in a target machining state. Electric discharge machining method.

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