Liquid jet head and liquid jet device

Abstract

To provide a liquid jet head that is configured to suppress wrinkles from occurring on a flexible member, and a liquid jet device.SOLUTION: The liquid jet head comprises a first member 15 defining a portion of a common liquid chamber 100 communicated with a plurality of nozzles 21, a second member 130, and a flexible member 120 fixed to the first member 15 and the second member 130. The flexible member 120 includes a flexible region 123 that is not fixed to both the first member 15 and the second member 130, and an outer peripheral region 125 ranging from the flexible region 123 to a region 124 fixed to both the first member 14 and the second member 130. The outer peripheral region 125 has a first region 126 fixed to the first member 15 but not fixed to the second member 130, whose size is above 60% of the whole circumference of the outer peripheral region 125. A linear expansion coefficient of the first member 15 is smaller than a linear expansion coefficient of the second member 130.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a liquid ejection head and a liquid ejection apparatus that eject liquid from nozzles, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as the liquid. [Background technology]

[0002] 2. Description of the Related Art A liquid ejecting apparatus, typified by an ink jet recording apparatus such as an ink jet printer or a plotter, includes a liquid ejecting head capable of ejecting liquid such as ink stored in a cartridge or a tank as droplets.

[0003] The disclosed liquid jet head has a configuration including a flow path forming plate corresponding to a first member made of silicon that defines a common liquid chamber communicating with a plurality of nozzles, and a compliance substrate including an elastic membrane corresponding to a flexible member and a support member corresponding to a second member made of stainless steel. It also discloses that the compliance substrate is fixed to the flow path forming plate on the surface opposite to the surface on which the support member for the elastic membrane is provided, and that each element of the liquid jet head is fixed with an adhesive such as a thermosetting adhesive (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2017-30222 Summary of the Invention [Problem to be solved by the invention]

[0005] However, because the linear expansion coefficient of the second member that holds the flexible member is different from the linear expansion coefficient of the first member, there was a risk that wrinkles would occur in the flexible member when the thermosetting adhesive used to bond each element contained in the liquid ejection head was cured at high temperature and then returned to room temperature. [Means for solving the problem]

[0006] An aspect of the present invention that solves the above problem is a liquid jet head comprising: a first member that defines a portion of a common liquid chamber that communicates with a plurality of nozzles that eject liquid; a second member; and a flexible member having a first surface fixed to a first fixing surface of the first member and a second surface opposite to the first surface and fixed to the second member, wherein the first fixing surface has a flow path opening through which the common liquid chamber opens, and the flexible member includes: a flexible region that overlaps the flow path opening when viewed in a stacking direction of the first member and the flexible member and is not fixed to the second member; and a peripheral region that surrounds the flexible region when viewed in the stacking direction and is between the flexible region and a region that is fixed to both the first member and the second member, wherein the peripheral region includes at least a first region that is fixed to the first member but not to the second member, and the linear expansion coefficient of the first member is smaller than the linear expansion coefficient of the second member, and the first region accounts for 60% or more of the entire circumference of the peripheral region.

[0007] Another aspect of the present invention is a liquid jet head comprising: a first member defining a portion of a common liquid chamber communicating with a plurality of nozzles that eject liquid; a second member; and a flexible member having a first surface fixed to a first fixing surface of the first member and a second surface opposite to the first surface and fixed to the second member, wherein the first fixing surface has a flow path opening through which the common liquid chamber opens, and the flexible member includes: a flexible region that overlaps the flow path opening when viewed in a stacking direction of the first member and the flexible member and is not fixed to the second member; and a peripheral region that surrounds the flexible region when viewed in the stacking direction and is between the flexible region and a region that is fixed to both the first member and the second member, wherein the peripheral region includes at least a second region that is fixed to the second member but not to the first member, and the linear expansion coefficient of the second member is smaller than the linear expansion coefficient of the first member, and the second region accounts for 60% or more of the entire circumference of the peripheral region.

[0008] Another aspect of the present invention is a liquid ejection apparatus including the liquid ejection head according to the above aspect, and a liquid storage section that stores liquid to be supplied to the liquid ejection head. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a diagram showing a schematic configuration of a liquid ejecting apparatus according to a first embodiment. [Figure 2] 1 is an exploded perspective view of a liquid jet head according to a first embodiment. [Figure 3] 1 is a plan view of a main part of a liquid jet head according to a first embodiment. [Figure 4] 1 is a cross-sectional view of a liquid jet head according to a first embodiment. [Figure 5] 2 is an enlarged cross-sectional view of a main part of the liquid jet head according to the first embodiment. FIG. [Figure 6] FIG. 10 is a cross-sectional view of a main part illustrating a bonding process of a conventional configuration. [Figure 7] 4 is a cross-sectional view of a main part illustrating a bonding step according to the first embodiment. FIG. [Figure 8] 10 is a cross-sectional view of a main part illustrating a modification of the bonding step according to the first embodiment. FIG. [Figure 9] 1 is a table showing examples of material combinations according to the first embodiment. [Figure 10] 1 is a table showing examples of material combinations according to the first embodiment. [Figure 11] FIG. 10 is a plan view of a main part of a liquid jet head according to a second embodiment. [Figure 12] FIG. 10 is a cross-sectional view of a liquid jet head according to a second embodiment. [Figure 13] FIG. 10 is a plan view of a main part of a liquid jet head according to a third embodiment. [Figure 14] FIG. 10 is a cross-sectional view of a main part of a liquid jet head according to a third embodiment. [Figure 15] FIG. 10 is a cross-sectional view showing a main part of a modified example of the liquid jet head according to the third embodiment. [Figure 16] FIG. 10 is a plan view of a main part of a liquid jet head according to a fourth embodiment. [Figure 17]FIG. 10 is a cross-sectional view of a main part of a liquid jet head according to a fourth embodiment. [Figure 18] FIG. 10 is a plan view of a main part of a liquid jet head according to a fifth embodiment. [Figure 19] FIG. 10 is a cross-sectional view of a main part of a liquid jet head according to a fifth embodiment. [Figure 20] 10 is a cross-sectional view of a main part illustrating a bonding step according to the fifth embodiment. FIG. [Figure 21] 10 is a table showing examples of material combinations according to the fifth embodiment. [Figure 22] 10 is a table showing examples of material combinations according to the fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] The present invention will be described in detail below based on embodiments. However, the following description illustrates one aspect of the present invention and can be modified as desired within the scope of the present invention. In each drawing, the same reference numerals indicate the same components, and their description will be omitted as appropriate. In each drawing, X, Y, and Z represent three spatial axes that are orthogonal to each other. In this specification, the directions along these axes are referred to as the X direction, Y direction, and Z direction. In each drawing, the direction indicated by the arrow is the positive (+) direction, and the direction opposite the arrow is the negative (-) direction. The Z direction indicates the vertical direction, the +Z direction indicates a vertically downward direction, and the -Z direction indicates a vertically upward direction. Furthermore, the directions of the three spatial axes, which are not limited to positive and negative directions, will be described as the X-axis direction, the Y-axis direction, and the Z-axis direction.

[0011] (Embodiment 1) FIG. 1 is a diagram showing a schematic configuration of a liquid ejecting apparatus 1 of the present invention.

[0012] As shown in the figure, the liquid ejection device 1 is an inkjet recording device that ejects and impacts ink, a type of liquid, as ink droplets onto a medium S such as printing paper, and prints an image or the like by forming an array of dots on the medium S. The medium S can be made of any material, such as recording paper, resin film, or cloth.

[0013] The liquid ejecting device 1 includes a liquid ejecting head 2, a liquid storage section 3, a control unit 4 which is a control section, a transport mechanism 5 which feeds out the medium S, and a moving mechanism 6.

[0014] The liquid jet head 2 jets ink supplied from the liquid storage unit 3 from a plurality of nozzles in the +Z direction.

[0015] The liquid storage unit 3 stores the ink to be ejected from the liquid ejection head 2. Examples of the liquid storage unit 3 include a cartridge that is detachable from the liquid ejection device 1, a bag-shaped ink pack made of flexible film, and an ink tank that can be refilled with ink. Although not specifically shown, the liquid storage unit 3 may store multiple types of ink with different colors, ingredients, etc. individually. The liquid storage unit 3 may also be divided into a main tank and a sub-tank. A configuration may be adopted in which the sub-tank is connected to the liquid ejection head 2, and ink consumed by ejecting ink droplets from the liquid ejection head 2 is replenished from the main tank to the sub-tank.

[0016] The control unit 4 includes, for example, a control device such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array), and a storage device such as a semiconductor memory. The control unit 4 comprehensively controls each element of the liquid ejection device 1, i.e., the liquid ejection head 2, the transport mechanism 5, the movement mechanism 6, etc., by the control device executing a program stored in the storage device.

[0017] The transport mechanism 5 transports the medium S in the X-axis direction and has a transport roller 5a. That is, the transport mechanism 5 transports the medium S in the X-axis direction by rotating the transport roller 5a. Note that the transport mechanism 5 that transports the medium S is not limited to one that includes the transport roller 5a, and may transport the medium S by, for example, a belt or a drum.

[0018] The movement mechanism 6 includes a conveying body 6a and a conveying belt 6b. The conveying body 6a is a generally box-shaped structure, a so-called carriage, that houses the liquid ejection head 2, and is fixed to the conveying belt 6b. The conveying belt 6b is an endless belt that is installed along the Y-axis direction. The conveying belt 6b is rotated by driving a conveying motor (not shown). The control unit 4 controls the driving of the conveying motor to rotate the conveying belt 6b, and moves the liquid ejection head 2 together with the conveying body 6a back and forth in the Y-axis direction along a guide rail (not shown). It is also possible to mount the liquid storage unit 3 on the conveying body 6a together with the liquid ejection head 2.

[0019] The liquid jet head 2 performs a jetting operation in which ink supplied from the liquid storage section 3 is jetted as ink droplets in the +Z direction from each of the multiple nozzles 21 (see FIG. 2) under the control of the control unit 4. This jetting operation of ink droplets by the liquid jet head 2 is performed in parallel with the transport of the medium S by the transport mechanism 5 and the reciprocating movement of the liquid jet head 2 by the movement mechanism 6, thereby forming an image with ink on the surface of the medium S, a so-called printing operation.

[0020] The liquid jet head 2 will be described using Figures 2 to 5. Figure 2 is an exploded perspective view of the liquid jet head 2. Figure 3 is a plan view of the liquid jet head 2 when the cover head 150 is removed from the liquid jet head 2, as viewed in the -Z direction. Figure 4 is a cross-sectional view of the liquid jet head 2 taken along line AA' in Figure 3. Figure 5 is an enlarged cross-sectional view of a main part of Figure 4. The directions of the liquid jet head 2 will be described based on the directions when the liquid jet head 2 is mounted on the liquid jet device 1, that is, the X-axis direction, Y-axis direction, and Z-axis direction. Of course, the position of the liquid jet head 2 within the liquid jet device 1 is not limited to those shown below.

[0021] As shown in the figure, the liquid jet head 2 comprises a flow path forming substrate 10, a communicating plate 15, a nozzle plate 20 having a plurality of nozzles 21 formed therein, a protective substrate 30, a case member 40, a flexible member 120, a frame body 130, a cover head 150, and a piezoelectric actuator 300.

[0022] The flow path forming substrate 10 is made of, for example, a silicon substrate. In the flow path forming substrate 10, a plurality of pressure chambers 12 are arranged side by side along the X-axis direction. The plurality of pressure chambers 12 are arranged on a straight line along the X-axis direction so as to be at the same position in the Y-axis direction. In this embodiment, two pressure chamber rows are provided in the Y-axis direction, each row having the pressure chambers 12 arranged side by side along the X-axis direction. The pressure chambers 12 constituting these two pressure chamber rows are arranged at the same position in the X-axis direction. Note that the two pressure chamber rows may be arranged with a shift of half the pitch of the pressure chambers 12, i.e., a so-called half pitch, from each other in the X-axis direction. In other words, all of the pressure chambers 12 in the two pressure chamber rows may be arranged in a staggered pattern along the X-axis direction.

[0023] A communication plate 15 and a nozzle plate 20 are sequentially stacked on the surface of the flow path forming substrate 10 facing the +Z direction. A vibration plate 50 and a piezoelectric actuator 300 are sequentially stacked on the surface of the flow path forming substrate 10 facing the -Z direction.

[0024] The communication plate 15 is made of a plate-like member bonded to the surface of the flow channel forming substrate 10 facing the +Z direction. The communication plate 15 is provided with nozzle communication passages 16 that connect the pressure chambers 12 and the nozzles 21. The communication plate 15 is also provided with a first manifold portion 17 and a second manifold portion 18 that constitute part of a manifold 100 that connects multiple pressure chambers 12 together. The first manifold portion 17 is provided to penetrate the communication plate 15 in the Z-axis direction. The second manifold portion 18 is provided to open on the surface facing the +Z direction without penetrating the communication plate 15 in the Z-axis direction. The communication plate 15 is also provided with supply communication passages 19 that communicate with the pressure chambers 12, independently for each pressure chamber 12. Each of the multiple supply communication passages 19 connects the second manifold portion 18 to each of the multiple pressure chambers 12, and supplies ink from the manifold 100 to each pressure chamber 12. That is, the supply communication passage 19 is disposed at a position overlapping with the second manifold portion 18 when viewed in the Z-axis direction.

[0025] The nozzle plate 20 is bonded to the side of the communication plate 15 opposite to the flow path forming substrate 10, i.e., the surface facing the +Z direction. A plurality of nozzles 21 are formed in the nozzle plate 20, which communicate with each pressure chamber 12 via nozzle communication passages 16. In this embodiment, a plurality of nozzles 21 are arranged in a line along the X-axis direction for each pressure chamber row. That is, in this embodiment, two nozzle rows, each having the nozzles 21 arranged side by side along the X-axis direction, are provided, spaced apart in the Y-axis direction. The nozzles 21 constituting these two nozzle rows are arranged so as to be at the same position in the X-axis direction. Of course, when the two pressure chamber rows are arranged at positions shifted from each other by half a pitch of the pressure chambers 12 in the X-axis direction, the two nozzle rows may also be similarly shifted from each other by half a pitch of the nozzles 21 in the X-axis direction. That is, all of the nozzles 21 in the two nozzle rows may be arranged in a staggered pattern along the X-axis direction.

[0026] Such a nozzle plate 20 is made of, for example, a silicon substrate. The surface of the nozzle plate 20 facing the +Z direction is referred to as a nozzle surface 20a.

[0027] In this embodiment, the individual flow paths connected to the nozzles 21 include supply communication paths 19, pressure chambers 12, and nozzle communication paths 16, and the communication plate 15 defines the supply communication paths 19, which are part of the individual flow paths connected to the second manifold portion 18, which is part of the manifold 100.

[0028] In this embodiment, the vibration plate 50 has an elastic film 51 made of silicon oxide provided on the surface facing the -Z direction of the flow path forming substrate 10, and an insulating film 52 made of zirconium oxide provided on the surface facing the -Z direction of the elastic film 51. Note that the vibration plate 50 may be configured with only the elastic film 51, or may be configured with only the insulating film 52, or may have another film in addition to the elastic film 51 and the insulating film 52.

[0029] The piezoelectric actuator 300 includes a first electrode 60, a piezoelectric layer 70, and a second electrode 80, which are sequentially stacked on the vibration plate 50 in the -Z direction. Such a piezoelectric actuator 300 is also referred to as a piezoelectric element, and refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. Furthermore, the portion where piezoelectric strain occurs in the piezoelectric layer 70 when a voltage is applied between the first electrode 60 and the second electrode 80 is referred to as an active portion 310. In other words, the active portion 310 refers to the portion where the piezoelectric layer 70 is sandwiched between the first electrode 60 and the second electrode 80. In this embodiment, an active portion 310 is formed for each pressure chamber 12. These multiple active portions 310 function as "drive elements" that generate pressure changes in the ink within the pressure chamber 12. Generally, one of the electrodes of the active portions 310 is an individual electrode independent of each other, and the other electrode is a common electrode shared by the multiple active portions 310. In this embodiment, the first electrode 60 is separated for each active portion 310 to form an individual electrode for the active portion 310, and the second electrode 80 is provided continuously across the multiple active portions 310 to form a common electrode for the multiple active portions 310. Of course, the first electrode 60 may form a common electrode, and the second electrode 80 may form an individual electrode.

[0030] The piezoelectric layer 70 is made of a piezoelectric material made of a complex oxide with a perovskite structure represented by the general formula ABO3, for example.

[0031] Furthermore, individual lead electrodes 91, which are lead wiring, are drawn out from the first electrode 60. Furthermore, a common lead electrode (not shown), which is lead wiring, is drawn out from the second electrode 80. A flexible wiring substrate 110 is connected to the ends of these individual lead electrodes 91 and the common lead electrode opposite to the ends connected to the piezoelectric actuator 300. The wiring substrate 110 is mounted with a drive circuit 111 having a plurality of switching elements that select whether or not to supply a drive signal (COM) for driving each of the active portions 310 to each active portion 310. In other words, the wiring substrate 110 in this embodiment is a COF (Chip On Film). Note that the wiring substrate 110 does not necessarily have to be provided with the drive circuit 111. In other words, the wiring substrate 110 may be an FFC (Flexible Flat Cable), an FPC (Flexible Printed Circuits), or the like.

[0032] A protective substrate 30 having approximately the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 facing the -Z direction. The protective substrate 30 has piezoelectric actuator accommodating sections 31, which are spaces for protecting the piezoelectric actuators 300. The piezoelectric actuator accommodating sections 31 are independently provided for each row of piezoelectric actuators 300 arranged side by side in the X axis direction, and two are formed side by side in the Y axis direction. The protective substrate 30 also has a through hole 32 penetrating in the Z axis direction between two piezoelectric actuator accommodating sections 31 arranged side by side in the Y axis direction. Ends of individual lead electrodes 91 and a common lead electrode (not shown) drawn from the electrodes of the piezoelectric actuators 300 extend so as to be exposed within the through hole 32, and the individual lead electrodes 91 and the common lead electrode are electrically connected to the wiring substrate 110 within the through hole 32. The protective substrate 30 is made of, for example, a silicon substrate, similar to the flow path forming substrate 10.

[0033] Additionally, a case member 40 is fixed on the protective substrate 30. The case member 40 defines a portion of a manifold 100 that communicates with the plurality of pressure chambers 12. The case member 40 has substantially the same shape as the above-described communicating plate 15 in a plan view, and is bonded to the protective substrate 30 as well as the above-described communicating plate 15. Such a case member 40 has a recess 41 on the protective substrate 30 side that is deep enough to accommodate the flow path forming substrate 10 and the protective substrate 30. The case member 40 is also provided with a third manifold portion 42 that communicates with the first manifold portion 17 of the communicating plate 15. The first manifold portion 17 and the second manifold portion 18 provided on the communicating plate 15 and the third manifold portion 42 provided on the case member 40 constitute the manifold 100 of this embodiment. The manifolds 100 are provided continuously along the X-axis direction, which is the arrangement direction of the pressure chambers 12, and a total of two manifolds 100 are provided for each row of the pressure chambers 12, i.e., two manifolds in total. The case member 40 also has an inlet 43 that communicates with the manifolds 100 and supplies ink to each manifold 100 .

[0034] The case member 40 also has a wiring connection port 44 that communicates with the through-hole 32 of the protective substrate 30 and through which the wiring substrate 110 is inserted, and the wiring substrate 110 is led out to the surface of the liquid jet head 2 facing the -Z direction via the wiring connection port 44. The case member 40 is made of, for example, a metal material or a resin material.

[0035] Furthermore, first fixing surface 15a of communication plate 15 facing the +Z direction has flow path opening 15b to which first manifold portion 17 and second manifold portion 18, which are parts of manifold 100, open. Note that flow path opening 15b refers only to the end portion of manifold 100 in the +Z direction, and does not have any depth in the Z-axis direction.

[0036] Furthermore, a flexible member 120 is fixed to first fixing surface 15a of communicating plate 15 with adhesive 140. Flexible member 120 is made of a film-like member made of a flexible thin film. Flexible member 120 has a first surface 121 facing the -Z direction and a second surface 122 facing the +Z direction. First surface 121 of flexible member 120 is fixed to first fixing surface 15a of communicating plate 15 facing the +Z direction with adhesive 140.

[0037] The frame 130 is fixed to the second surface 122 of the flexible member 120 with an adhesive 141. The linear expansion coefficient of the communicating plate 15 is smaller than that of the frame 130. The linear expansion coefficient of the flexible member 120 is also smaller than that of the frame 130. It is preferable that the linear expansion coefficient of the flexible member 120 is larger than that of the communicating plate 15. In other words, the relationship is linear expansion coefficient of the communicating plate 15<linear expansion coefficient of the flexible member 120<linear expansion coefficient of the frame 130. The adhesive 141 may be applied to the entire second surface 122 of the flexible member 120.

[0038] At least one of the adhesives 140 and 141 is a thermosetting adhesive. A thermosetting adhesive refers to a high-temperature curing adhesive that cures at temperatures above 60°C. A thermosetting adhesive refers to an adhesive that primarily contains a thermosetting resin. Examples of thermosetting resins used as thermosetting adhesives include epoxy resin, polyimide resin, phenolic resin, urea resin, melamine resin, unsaturated polyester resin, and diallyl phthalate resin. These may be used alone or in combination of two or more types, such as copolymers or blends. The thermosetting resin may also contain a fiber base material such as glass fiber or a filler such as silica powder. In this embodiment, thermosetting adhesives made of epoxy-based adhesives with particularly high liquid resistance are used as the adhesives 140 and 141. After curing, the thermosetting adhesive retains the skeletal structure of the thermosetting resin used. For example, a thermosetting adhesive using an epoxy resin retains the skeletal structure of an epoxy structure after curing.

[0039] The frame 130 also has a first opening 131 and a second opening 132 that penetrate in the Z-axis direction. The first opening 131 exposes the multiple nozzles 21. In this embodiment, the first opening 131 is large enough to expose the nozzle plate 20. The second opening 132 is provided in a region that overlaps with the flow path opening 15b when viewed in the Z-axis direction. The second opening 132 divides the flexible member 120 into a flexible region 123, a fixed region 124, and a peripheral region 125.

[0040] The flexible region 123 is a region that overlaps with the flow path opening 15b when viewed in the Z-axis direction and is not fixed to the frame 130. In other words, the flexible region 123 is a region that is not fixed to the frame 130 or the communicating plate 15. In this embodiment, the second opening 132 is provided so as to overlap with the flow path opening 15b when viewed in the Z-axis direction and has a larger opening area than the flow path opening 15b. Therefore, the entire region of the flexible member 120 that overlaps with the flow path opening 15b when viewed in the Z-axis direction is the flexible region 123. The manifold 100 is partially sealed by the flexible region 123 of the flexible member 120, and thus the flexible region 123 can deform to absorb pressure fluctuations inside the manifold 100 that occur when ink droplets are ejected and when ink is filled into the manifold 100. Therefore, the pressure fluctuations inside the manifold 100 are absorbed by the flexible region 123, and it is possible to suppress the occurrence of crosstalk caused by the pressure fluctuations in the pressure chamber 12 that ejects liquid affecting the adjacent pressure chambers 12.

[0041] The fixed region 124 is a region that is fixed to both the communicating plate 15 and the frame body 130. In other words, the fixed region 124 is a region where the communicating plate 15, the flexible member 120, and the frame body 130 all overlap in the Z-axis direction. Such a fixed region 124 is provided around the outer periphery of the second opening 132, that is, so as to surround the flexible region 123.

[0042] The outer peripheral region 125 is adjacent to the flexible region 123 and surrounds the entire circumference of the flexible region 123 when viewed in the Z-axis direction, and is the region between the flexible region 123 and the fixed region 124. The outer peripheral region 125 also has a first region 126 that is fixed to the communicating plate 15 but not fixed to the frame 130. As will be described in detail later, the outer peripheral region 125 of this embodiment does not have a second region that is fixed to the frame 130 but not fixed to the communicating plate 15, and therefore the entire outer peripheral region 125 is the first region 126. Therefore, 100% of the entire circumference of the outer peripheral region 125 is the first region 126. Here, "the entire circumference of the outer peripheral region 125" refers to the circumferential length of the inner circumference of the outer peripheral region 125. Therefore, the ratio of the first region 126 to the entire circumference of the outer peripheral region 125 is the abundance ratio of the first region 126 to the circumferential length of the inner circumference of the outer peripheral region 125. In this embodiment, since 100% of the length of the inner periphery of outer peripheral region 125 is first region 126, flexible region 123 is defined by the edge of flow path opening 15b. That is, at an arbitrary first position in the X-axis direction, which is the longitudinal direction of flexible region 123, communicating plate 15, flexible member 120, and frame 130 are cut along a plane perpendicular to the longitudinal direction, that is, in a cross section cut along a YZ plane defined by the Y-axis and Z-axis, that is, in the cross section shown in FIG. 5, outer peripheral regions 125 located on both sides of flexible region 123 are both first regions 126.

[0043] The first region 126 may be provided over 60% or more, preferably 80% or more, and more preferably 90% or more of the entire circumference of the outer peripheral region 125. By providing the first region 126 over 60% or more of the entire circumference of the outer peripheral region 125 in this manner, it is possible to reduce the occurrence of wrinkles in the flexible region 123, which will be described in detail later.

[0044] Here, a mechanism for wrinkles occurring in the flexible region 123 when the conventional first region 126 is not provided will be described. Note that Fig. 6 is a cross-sectional view of a main part for explaining the bonding process of the communication plate 15, flexible member 120, and frame body 130 of the conventional configuration.

[0045] As shown in FIG. 6, the first manifold of the frame 130 has an opening area smaller than the flow path opening 15b. Therefore, the size of the flexible region 123 is determined by the opening edge of the second opening 132. In this configuration, first, a laminate in which the flexible member 120 and the frame 130 are fixed with the adhesive 141 is brought into contact with the communicating plate 15 via the uncured adhesive 140 (before high-temperature curing). Next, the adhesive 140 is cured at a high temperature of 60°C or higher. At this time, because the linear expansion coefficient of the communicating plate 15 is smaller than that of the frame 130, the edge of the second opening 132 of the frame 130 expands outward, but the communicating plate 15 expands less than the frame 130. Furthermore, because the adhesive 141 has been cured in advance, the thermal expansion of the frame 130 causes the flexible region 123 of the flexible member 120 to be in a state of being greatly stretched, and the adhesive 140 cures. After adhesive 140 hardens at a high temperature, the frame 130, particularly the portion facing flow path opening 15b, attempts to shrink back to its original state by returning to room temperature. Incidentally, other portions of frame 130, i.e., the portion overlapping with communicating plate 15 as viewed in the Z-axis direction, are constrained by communicating plate 15 and therefore do not move. In other words, when frame 130 returns to room temperature after thermal expansion, the portion of frame 130 facing flow path opening 15b is not constrained by communicating plate 15, and therefore contracts, causing flexible member 120 to contract. The amount of contraction of flexible member 120 at this time is greater than the amount of contraction of the flexible member 120 itself when it returns to room temperature after thermal expansion, resulting in wrinkles in flexible region 123. These wrinkles in flexible region 123 occur when no pressure fluctuations occur within manifold 100, and are also known as creases. When wrinkles occur in the flexible region 123 in this way, the amount of change in displacement and cross-sectional area of ​​the flexible region 123 in the low-pressure range decreases, reducing the ability of the flexible region 123 to absorb pressure fluctuations within the manifold 100. This may cause so-called crosstalk, in which the pressure fluctuations of the pressure chamber 12 that ejects liquid due to the reduced ability of the flexible region 123 affect adjacent pressure chambers 12. Furthermore, when wrinkles occur in the flexible region 123 and the flexible region 123 deforms in a convex shape toward the manifold 100, the volume of the manifold 100 decreases.In particular, in this embodiment, the supply communication passages 19 that constitute part of the individual flow paths are provided in the communication plate 15, and therefore the second manifold portion 18 is provided without penetrating the communication plate 15 in the Z-axis direction. For this reason, if wrinkles occur in the flexible region 123 that defines the second manifold portion 18 and that forms a convex shape on the surface 18a that faces the first surface 121, the flow path resistance in the second manifold portion 18 increases, the ink supply capacity from the manifold 100 to the pressure chambers 12 decreases, and ejection characteristics such as the weight and flight speed of the ink droplets decrease, and there is a risk of problems such as an inability to perform continuous ejection at high speed.

[0046] In contrast, the mechanism by which wrinkles are less likely to occur in the flexible region 123 when the first region 126 of this embodiment is provided will be described below. Fig. 7 is a cross-sectional view of a main part illustrating the bonding process of the communicating plate 15, flexible member 120, and frame body 130 of this embodiment. Fig. 8 is a diagram illustrating a modified example of the bonding process of the communicating plate 15, flexible member 120, and frame body 130.

[0047] As shown in FIG. 7, first, a laminate in which flexible member 120 and frame body 130 are fixed with adhesive 141 and communicating plate 15 are brought into contact with each other via uncured adhesive 140 (before high-temperature curing). Next, adhesive 140 is cured at high temperature. At this time, because the linear expansion coefficient of communicating plate 15 is smaller than that of frame body 130, the edge of second opening 132 of frame body 130 expands outward, but communicating plate 15 expands less than frame body 130. Furthermore, due to the thermal expansion of frame body 130, flexible region 123 of flexible member 120, more specifically, the region of flexible member 120 that overlaps with second opening 132 when viewed in the Z-axis direction, is in a greatly stretched state as adhesive 140 cures. After the adhesive 140 is cured at a high temperature, the frame 130 attempts to shrink back to its original state when the temperature is returned to room temperature. However, the frame 130 is constrained by the communicating plate 15, and there is no unconstrained portion as in the conventional configuration shown in FIG. 6 . Therefore, the frame 130 is unlikely to shrink so as to narrow the second opening 132. Furthermore, because the first region 126 and the fixed region 124 of the flexible member 120 are constrained by the communicating plate 15, the flexible region 123 of the flexible member 120 attempts to shrink when the temperature is returned to room temperature after the high-temperature curing. However, because the flexible region 123 was significantly stretched during the high-temperature curing, the flexible region 123 remains stretched even when it shrinks. Note that in this embodiment, the linear expansion coefficient of the flexible member 120 is greater than the linear expansion coefficient of the communicating plate 15. Therefore, when the temperature is returned to room temperature after the high-temperature curing, the amount by which the flow path opening 15b of the communicating plate 15 moves to narrow is smaller than the amount by which the flexible region 123 shrinks. This also maintains the stretched state of the flexible region 123. Therefore, it is possible to reduce the occurrence of wrinkles in the flexible region 123 when the adhesive 140 is returned to room temperature after being cured at a high temperature.

[0048] As shown in FIG. 8 , first, a laminate formed by bonding the communicating plate 15 and the flexible member 120 with the adhesive 140 is brought into contact with the frame 130 via the uncured adhesive 141 (before high-temperature curing). Next, the adhesive 141 is cured at a high temperature. At this time, the linear expansion coefficient of the frame 130 is greater than the linear expansion coefficients of the communicating plate 15 and the flexible member 120. Therefore, the adhesive 141 is cured at a high temperature in a state in which the edge of the second opening 132 expands outward. Furthermore, because the linear expansion coefficient of the flexible member 120 is greater than the linear expansion coefficient of the communicating plate 15, the flexible region 123 is slightly bent during high-temperature curing. After the adhesive 140 has cured at a high temperature, the frame 130 attempts to shrink back to its original state by returning to room temperature. However, since the frame 130 is constrained by the communicating plate 15 and has no unconstrained portion as in the conventional configuration shown in FIG. 6 , the frame 130 is less likely to shrink so as to narrow the second opening 132. Furthermore, flexible region 123 of flexible member 120 that wrinkles at high temperatures shrinks and returns to its original state, i.e., wrinkles are reduced, when returned to room temperature. Therefore, it is possible to reduce the occurrence of wrinkles in flexible region 123 when adhesive 141 is cured at high temperature and then returned to room temperature.

[0049] 7 and 8, either the adhesive 140 or the adhesive 141 is cured at a high temperature first. However, this is not limited to this. The adhesive 140 and the adhesive 141 may be cured at a high temperature simultaneously. That is, the communicating plate 15, the flexible member 120, and the frame 130 may be cured at a high temperature simultaneously with the adhesive 140 and the adhesive 141. Even in this case, as in the case shown in FIGS. 7 and 8, when the temperature is returned to room temperature after high-temperature curing, the frame 130 attempts to shrink back to its original state. However, since the frame 130 is constrained by the communicating plate 15 and there is no portion unconstrained by the communicating plate 15 as in the conventional configuration shown in FIG. 6, the frame 130 is unlikely to shrink in such a way as to narrow the second opening 132. Therefore, the occurrence of wrinkles in the flexible region 123 when the temperature is returned to room temperature after the adhesives 140 and 141 are cured at a high temperature can be reduced.

[0050] Here, the combination of materials for the communicating plate 15, the flexible member 120, and the frame 130 with respect to their respective linear expansion coefficients will be described.

[0051] For example, as described above, the linear expansion coefficient of the flexible member 120 is smaller than that of the frame 130, and the linear expansion coefficient of the flexible member 120 is larger than that of the communicating plate 15. In other words, an example of a combination of materials that satisfies the linear expansion coefficient of the communicating plate 15<linear expansion coefficient of the flexible member 120<linear expansion coefficient of the frame 130 is as shown in the table of FIG. 9. The linear expansion coefficients shown in FIG. 9 are expressed in units of (×10 -6 / °C). The same applies to Figs. 10, 21 and 22 described below.

[0052] That is, as shown in combination example 1, when silicon is used for the communicating plate 15, aramid can be selected for the flexible member 120 and stainless steel (SUS430) can be selected for the frame 130.

[0053] Furthermore, as shown in combination example 1, when an inorganic material such as silicon or ceramics, which has a relatively low linear expansion coefficient, is used for the communicating plate 15, an organic film or metal can be selected for the flexible member 120, and various metals or engineering plastics can be selected for the frame 130 according to the linear expansion coefficient. Note that when stainless steel (SUS430) is selected for one of the flexible member 120 and the frame 130, a material other than stainless steel (SUS430) can be selected for the other. Furthermore, when aramid is used for the flexible member 120, an aramid with a linear expansion coefficient larger than that of the material selected for the communicating plate 15 can be selected.

[0054] Furthermore, as shown in combination example 2, when metal is used for the communicating plate 15, a wide range of materials can be selected for the flexible member 120, such as organic films or various metals, and for the frame 130, various metals or engineering plastics, depending on the linear expansion coefficient. Note that when stainless steel (SUS316) is selected for one of the flexible member 120 and the frame 130, a material other than stainless steel (SUS316) can be selected for the other. Also, when stainless steel (SUS430) is selected for one of the flexible member 120 and the communicating plate 15, a material other than stainless steel (SUS316) can be selected for the other.

[0055] In the above-described embodiment, the linear expansion coefficient of the flexible member 120 is greater than that of the communicating plate 15. However, this is not limiting, and the linear expansion coefficient of the flexible member 120 may be smaller than that of the communicating plate 15. In other words, the following relationship may be satisfied: linear expansion coefficient of the flexible member 120 < linear expansion coefficient of the communicating plate 15 < linear expansion coefficient of the frame 130. This is because, if the linear expansion coefficient of the flexible member 120 is smaller than that of the communicating plate 15, some wrinkles may occur in the flexible region 123 due to contraction of the communicating plate 15 when the temperature is returned to room temperature after the high-temperature curing of either the adhesive 140 or 141 during assembly. However, the occurrence of wrinkles is reduced compared to the wrinkles in the flexible region 123 formed due to contraction of the frame 130. An example of a combination of materials for each member in such a case is shown in the table of FIG. 10.

[0056] In other words, as shown in combination example 3, when the flexible member 120 is made of ceramics, organic films, or metals with a relatively small linear expansion coefficient, the communicating plate 15 and the frame 130 can be made of various metals or engineering plastics selected according to the linear expansion coefficient.

[0057] Furthermore, as shown in combination example 4, when the flexible member 120 is made of metal or an organic film, the communicating plate 15 and the frame 130 can be made of various metals or engineering plastics selected according to the linear expansion coefficient.

[0058] Furthermore, as shown in combination example 5, when the flexible member 120 is made of metal, the communicating plate 15 and the frame 130 can be made of various metals or engineering plastics selected according to the linear expansion coefficient.

[0059] Of course, the combination of materials for the communicating plate 15, the flexible member 120, and the frame 130 is not limited to the combination examples 1 to 5, as long as the relationship in magnitude of the linear expansion coefficients described above is satisfied.

[0060] The cover head 150 is fixed to the surface of the frame body 130 facing the +Z direction. The cover head 150 has an exposure opening 151 that exposes the nozzle 21. In this embodiment, the exposure opening 151 has a size that exposes the nozzle plate 20. In other words, the exposure opening 151 communicates with the first opening 131 of the frame body 130 and has approximately the same size as the first opening 131.

[0061] In this embodiment, the cover head 150 is provided with its end bent so as to cover the side surface of the communication plate 15, that is, the surface that intersects with the nozzle surface 20a.

[0062] Such a cover head 150 is fixed to the surface of the frame 130 facing the +Z direction so as to define a compliance space 152 between the cover head 150 and the flexible region 123, in which the flexible region 123 can deform. By providing this compliance space 152, pressure fluctuations within the manifold 100 can be alleviated by the flexible region 123.

[0063] In this embodiment, the communicating plate 15 is an example of a "first member," the frame body 130 is an example of a "second member," the Z-axis direction is an example of a "stacking direction," the X-axis direction is an example of a "longitudinal direction," and the Y-axis direction is an example of a "short direction."

[0064] (Embodiment 2) Fig. 11 is a plan view of the liquid jet head 2 according to the second embodiment of the present invention, viewed in the -Z direction, with the cover head 150 removed from the liquid jet head 2. Fig. 12 is a cross-sectional view of a main part of the liquid jet head 2 taken along line BB' in Fig. 11. Note that the cross section of the liquid jet head 2 along the YZ plane is substantially the same as Figs. 4 and 5 of the first embodiment described above, and therefore duplicated views will be omitted. Furthermore, the same members as those in the first embodiment described above will be assigned the same reference numerals, and duplicated explanations will be omitted.

[0065] As shown in the figure, the liquid jet head 2 includes a communication plate 15, a flexible member 120, and a frame 130. The flexible member 120 includes a flexible region 123, a fixed region 124, and a peripheral region 125.

[0066] The outer peripheral region 125 includes a first region 126 and a second region 127 . As described above, the first region 126 is a region of the outer peripheral region 125 that is fixed to the communicating plate 15 but not to the frame 130. The first region 126 occupies 60% or more of the entire circumference of the outer peripheral region 125, preferably 80% or more, and more preferably 90% or more. Here, "the entire circumference of the outer peripheral region 125" refers to the circumferential length of the inner circumference of the outer peripheral region 125, as in the first embodiment. Therefore, the ratio of the first region 126 to the entire circumference of the outer peripheral region 125 refers to the proportion of the first region 126 to the circumferential length of the inner circumference of the outer peripheral region 125. In this embodiment, the first region 126 preferably occupies 80% or more of the entire portion of the outer peripheral region 125 along the longitudinal direction of the flexible region 123, i.e., the X-axis direction, and more preferably 90% or more. Note that the "portion along the longitudinal direction" refers to an axis along the longitudinal direction, which in this embodiment forms an angle of ±80 degrees or less with respect to the X-axis direction.

[0067] The second region 127 is a region of the outer peripheral region 125 that is fixed to the frame 130 but not to the communicating plate 15. The second region 127 preferably occupies 1% or more and less than 10% of the entire circumference of the outer peripheral region 125. In this embodiment, the second region 127 preferably occupies 80% or more, and more preferably 90% or more, of the entire portion of the outer peripheral region 125 along the short side of the flexible region 123, i.e., along the Y-axis direction. Of course, the second region 127 may occupy 100% of the portion along the short side of the flexible region 123. Note that the "portion along the short side" refers to an axis along the short side, which in this embodiment forms an angle of less than ±10 degrees with respect to the Y-axis direction.

[0068] In this embodiment, the flexible region 123 includes a first portion 123a extending along the X-axis direction, a second portion 123b extending along the Y-axis direction, and a third portion 123c connecting the first portion 123a and the second portion 123b and inclined with respect to both the X-axis direction and the Y-axis direction. The angle θ between a line extending along the third portion 123c and the X-axis is 80 degrees or less, so the first portion 123a and the third portion 123c correspond to portions extending along the longitudinal direction, and the second portion 123b corresponds to a portion extending along the lateral direction. Therefore, a first region 126 is formed around the periphery of the first portion 123a and the third portion 123c, and a second region 127 is formed around the periphery of the second portion 123b.

[0069] Such flexible region 123 is greatly affected by wrinkles that occur along the longitudinal direction. For this reason, by making 80% or more, and more preferably 90% or more of the portion of outer peripheral region 125 along the longitudinal direction of flexible region 123 the first region 126, it is possible to reduce the occurrence of wrinkles along the longitudinal direction of flexible region 123.

[0070] Furthermore, wrinkles along the short direction have a smaller effect than wrinkles along the long direction in flexible region 123. Therefore, by making 80% or more, and more preferably 90% or more of the portion of outer peripheral region 125 along the short direction of flexible region 123 second region 127, second region 127 can function as a portion that releases tensile stress acting on flexible region 123, and a decrease in the ability of flexible region 123 to absorb pressure fluctuations inside manifold 100 can be suppressed.

[0071] In this embodiment, the communicating plate 15 is an example of a "first member," the frame body 130 is an example of a "second member," the Z-axis direction is an example of a "stacking direction," the X-axis direction is an example of a "longitudinal direction," and the Y-axis direction is an example of a "short direction."

[0072] (Embodiment 3) Fig. 13 is a plan view of the liquid jet head 2 according to the third embodiment of the present invention, viewed in the -Z direction, with the cover head 150 removed from the liquid jet head 2. Fig. 14 is a cross-sectional view of a main part of the liquid jet head 2 taken along line CC' in Fig. 13. Note that the same reference numerals are used to designate the same members as those in the above-described embodiments, and redundant explanations will be omitted.

[0073] As shown in the figure, the liquid jet head 2 includes a communication plate 15, a flexible member 120, a frame 130, a cover head 150, etc. The flexible member 120 includes a flexible region 123, a fixed region 124, and a peripheral region 125.

[0074] The frame 130 has a first opening 131, a second opening 132, and a protrusion 133 that protrudes along the Y-axis direction from the opening edge of the second opening 132 to a region facing the inside of the flow path opening 15b, i.e., a region facing the manifold 100 in the Z-axis direction. The protrusions 133 are provided so as to protrude along the Y-axis direction from both sides of the opening edge of the second opening 132 in the Y-axis direction toward the center. A plurality of the protrusions 133 are provided at predetermined intervals in the X-axis direction. That is, the plurality of protrusions 133 are provided in a comb-like shape within the second opening 132 of the frame 130. The tips of two protrusions 133 facing each other in the Y-axis direction are arranged with a predetermined distance between them. As a result, a gap is formed between the two protrusions 133 facing each other in the Y-axis direction, and the compliance space 152 is provided in communication with the protrusions 133 without being partitioned.

[0075] By providing the protrusions 133 in this manner, the flexible region 123 is restricted from moving toward the cover head 150, and the flexible region 123 can be prevented from sticking to the cover head 150.

[0076] The outer peripheral region 125 includes a first region 126 and a second region 127 .

[0077] As described above, the first region 126 is a region of the outer peripheral region 125 that is fixed to the communicating plate 15 but is not fixed to the frame 130. The first region 126 occupies 60% or more of the entire circumference of the outer peripheral region 125, preferably 80% or more, and more preferably 90% or more.

[0078] Furthermore, the second region 127 is a region of the outer circumferential region 125 that is fixed to the frame 130 but not to the communication plate 15. In this embodiment, the second region 127 is a region that faces both the manifold 100 and the protrusion 133 in the Z-axis direction. Incidentally, the portion of the flexible member 120 that faces the base end of the protrusion 133 is a fixed region 124 that is fixed to both the protrusion 133 and the communication plate 15. The second region 127 preferably occupies 1% or more of the entire circumference of the outer circumferential region 125, and more preferably less than 10%. This allows for a balanced suppression of both the occurrence of wrinkles and the sticking of the flexible region 123 to the cover head 150.

[0079] Even when the protrusions 133 are provided in this manner, the same effects as those of the first embodiment described above can be achieved.

[0080] In this embodiment, the protrusion 133 has the same thickness as the other regions, but is not particularly limited to this. Modified examples of the protrusion 133 are shown in Fig. 15. Fig. 15 is a cross-sectional view of a main part of the liquid jet head 2, showing modified examples of the protrusion 133.

[0081] 15, protrusion 133 has recess 133a on the surface facing the +Z direction. Protrusion 133 has recess 133a, making the thickness in the Z axis direction thinner than other regions. By reducing the thickness of protrusion 133 in this manner, a gap is formed between protrusion 133 and cover head 150, allowing second region 127 of flexible member 120 facing protrusion 133 to flex and deform. In other words, second region 127 can function like flexible region 123, and protrusion 133 can prevent flexible region 123 from sticking to cover head 150.

[0082] In this embodiment, the communicating plate 15 is an example of a "first member," the frame body 130 is an example of a "second member," the Z-axis direction is an example of a "stacking direction," the X-axis direction is an example of a "longitudinal direction," and the Y-axis direction is an example of a "short direction."

[0083] (Embodiment 4) Fig. 16 is a plan view of the liquid jet head 2 according to the fourth embodiment of the present invention, viewed in the -Z direction, with the cover head 150 removed from the liquid jet head 2. Fig. 17 is a cross-sectional view of a main part of the liquid jet head 2 taken along line DD' in Fig. 16. Note that the same reference numerals are used to designate the same members as those in the above-described embodiments, and redundant explanations will be omitted.

[0084] As shown in the figure, the liquid jet head 2 includes a communication plate 15, a flexible member 120, a frame 130, a cover head 150, etc. The flexible member 120 includes a flexible region 123, a fixing region 124, a peripheral region 125, and a support region 128.

[0085] The frame 130 has a plurality of island portions 135 at positions facing the flow path openings 15b in the Z-axis direction. The support region 128 is a region bonded to the island portions 135. The island portions 135 are preferably arranged at positions where the distance L from the edge of the flow path openings 15b is 40 times or less, more preferably 20 times or less, the thickness of the flexible member 120. For example, when the thickness of the flexible member 120 is 5 μm, the distance L of the island portions 135 from the edge of the flow path openings 15b is preferably 200 μm or less, more preferably 100 μm or less.

[0086] By providing the island portion 135 in this manner, it is easy to press the first region 126 of the flexible member 120 against the communicating plate 15 via the island portion 135, and bonding between the flexible member 120 and the communicating plate 15 at the first region 126 with the adhesive 140 can be reliably performed. Furthermore, by providing the island portion 135, excessive deformation can be suppressed when the flexible region 123 of the flexible member 120 is flexibly deformed toward the cover head 150, and therefore adhesion of the flexible region 123 to the cover head 150 can be suppressed. Furthermore, because the island portion 135 is positioned at a distance L from the opening edge of the flow path opening 15b, even if the island portion 135 is provided, wrinkles are unlikely to occur in the flexible region 123, as in the first embodiment described above, and defects due to wrinkles in the flexible region 123 can be suppressed.

[0087] In this embodiment, the communicating plate 15 is an example of a "first member," the frame body 130 is an example of a "second member," the Z-axis direction is an example of a "stacking direction," the X-axis direction is an example of a "longitudinal direction," and the Y-axis direction is an example of a "short direction."

[0088] (Embodiment 5) Fig. 18 is a plan view of the liquid jet head 2 according to the fifth embodiment of the present invention, viewed in the -Z direction, with the cover head 150 removed from the liquid jet head 2. Fig. 19 is a cross-sectional view of a main part of the liquid jet head 2 taken along the line EE' in Fig. 18. Note that the same reference numerals are used to designate the same members as those in the above-described embodiments, and redundant explanations will be omitted.

[0089] As shown in the figure, the liquid jet head 2 of this embodiment includes a communication plate 15, a flexible member 120, a frame 130, and a cover head 150. The flexible member 120 includes a flexible region 123, a fixed region 124, and an outer circumferential region 125.

[0090] The frame 130 has a second opening 132 at a position opposite the flow path opening 15b. The second opening 132 divides the flexible member 120 into a flexible region 123, a fixed region 124, and a peripheral region 125.

[0091] The flexible region 123 is a region that overlaps with the flow path opening 15b when viewed in the Z-axis direction and is not fixed to the frame body 130. In other words, the flexible region 123 is a region that is not fixed to the frame body 130 and the communication plate 15. In this embodiment, the second opening 132 overlaps with the flow path opening 15b when viewed in the Z-axis direction and has a smaller opening area than the flow path opening 15b. Therefore, the flexible region 123 is the region that overlaps with the second opening 132 of the flexible member 120 when viewed in the Z-axis direction.

[0092] The fixed region 124 is a region that is fixed to both the communicating plate 15 and the frame body 130. In other words, the fixed region 124 is a region where the communicating plate 15, the flexible member 120, and the frame body 130 all overlap in the Z-axis direction. Such a fixed region 124 is provided around the outer periphery of the second opening 132, that is, so as to surround the flexible region 123.

[0093] The outer circumferential region 125 is adjacent to and surrounds the flexible region 123 when viewed in the Z-axis direction, and is a region between the flexible region 123 and the fixed region 124. The outer circumferential region 125 also has a second region 127 that is fixed to the frame body 130 but is not fixed to the communicating plate 15. The outer circumferential region 125 of this embodiment does not have a first region 126 (see FIG. 5 ) that is fixed to the frame body 130 but is not fixed to the communicating plate 15, and therefore the entire outer circumferential region 125 is the second region 127. Therefore, 100% of the entire circumference of the outer circumferential region 125 is the second region 127. Here, "the entire circumference of the outer circumferential region 125" refers to the circumferential length of the inner circumference of the outer circumferential region 125. Therefore, the ratio of the second region 127 to the entire circumference of the outer circumferential region 125 is the abundance ratio of the second region 127 to the circumferential length of the inner circumference of the outer circumferential region 125. In this embodiment, since the second region 127 occupies 100% of the length of the inner periphery of the outer circumferential region 125, the flexible region 123 is defined by the edge of the second opening 132. In other words, at an arbitrary first position in the X-axis direction, which is the longitudinal direction of the flexible region 123, the communicating plate 15, the flexible member 120, and the frame body 130 are cut along a plane perpendicular to the longitudinal direction, that is, in a cross section cut along the YZ plane defined by the Y-axis and the Z-axis, that is, in the cross section shown in FIG.

[0094] The second region 127 may be provided over 60% or more, preferably 80% or more, and more preferably 90% or more of the entire circumference of the outer peripheral region 125. By providing the second region 127 over 60% or more of the entire circumference of the outer peripheral region 125 in this manner, it is possible to reduce wrinkles that occur in the flexible region 123, which will be described in detail later.

[0095] Here, the linear expansion coefficient of the frame 130 in this embodiment is smaller than that of the communicating plate 15. The linear expansion coefficient of the flexible member 120 is also smaller than that of the communicating plate 15. The linear expansion coefficient of the flexible member 120 is preferably larger than that of the frame 130. In other words, the following relationship is satisfied: linear expansion coefficient of the frame 130<linear expansion coefficient of the flexible member 120<linear expansion coefficient of the communicating plate 15.

[0096] Here, a mechanism by which wrinkles are less likely to occur in the flexible region 123 when the second region 127 of this embodiment is provided will be described. Note that Fig. 20 is a cross-sectional view of a main part illustrating the bonding process of the communication plate 15, the flexible member 120, and the frame body 130 of this embodiment.

[0097] As shown in FIG. 20 , first, a laminate in which flexible member 120 and frame 130 are fixed with adhesive 141 and communicating plate 15 are brought into contact with each other via uncured adhesive 140 (before high-temperature curing). Next, adhesive 140 is cured at high temperature. At this time, because the linear expansion coefficient of frame 130 is smaller than that of communicating plate 15, adhesive 140 is cured at high temperature in a state in which the edges of flow path openings 15b of communicating plate 15 expand outward. At this time, frame 130 expands less than communicating plate 15. Furthermore, because the linear expansion coefficient of flexible member 120 is larger than that of frame 130, flexible region 123 bends slightly during high-temperature curing. When the adhesive 140 is cured at a high temperature and then returned to room temperature, the communicating plate 15 attempts to shrink back to its original state. However, since the communicating plate 15 is constrained by the frame 130 and there is no area of ​​the communicating plate 15 that is not constrained by the frame 130, it is difficult for the communicating plate 15 to shrink in a manner that narrows the flow path opening 15b. Furthermore, when the temperature is returned to room temperature after curing at a high temperature, the flexible region 123 of the flexible member 120 shrinks and returns to its original state. Therefore, it is possible to reduce the occurrence of wrinkles in the flexible region 123 when the adhesive 140 is cured at a high temperature and then returned to room temperature.

[0098] Incidentally, even in a process in which communicating plate 15 and flexible member 120 are first fixed with adhesive 140 to form a laminate, and then adhesive 141 is cured at a high temperature to bond the laminate and frame 130, it is possible to reduce the occurrence of wrinkles in flexible region 123. Of course, the occurrence of wrinkles in flexible region 123 can also be reduced when adhesives 140 and 141 are cured at a high temperature simultaneously.

[0099] The linear expansion coefficient of the frame 130 is smaller than that of the communicating plate 15, the linear expansion coefficient of the flexible member 120 is smaller than that of the communicating plate 15, and the linear expansion coefficient of the flexible member 120 is larger than that of the frame 130. In other words, an example of a combination of materials that satisfies the relationship linear expansion coefficient of the frame 130<linear expansion coefficient of the flexible member 120<linear expansion coefficient of the communicating plate 15 is as shown in the table of FIG.

[0100] That is, as shown in combination example 6, when silicon is used for the frame 130, the flexible member 120 can be made of an organic film or metal, and the communicating plate 15 can be made of various metals or engineering plastics, etc., and can be selected from a wide range of materials according to the linear expansion coefficient.

[0101] Furthermore, as shown in combination example 7, when silicon or various ceramics is used for the frame 130, the flexible member 120 can be made of metal, and the communicating plate 15 can be made of various metals or engineering plastics, etc., which can be selected from a wide range of materials according to the linear expansion coefficient.

[0102] Furthermore, as shown in combination example 8, when silicon, glass, metal, or various ceramics is used for the frame body 130, the flexible member 120 can be made of an organic film or metal, and the communicating plate 15 can be made of various metals or engineering plastics, etc., and can be selected from a wide range of materials according to the linear expansion coefficient.

[0103] Furthermore, in the above example, the linear expansion coefficient of the flexible member 120 is greater than that of the frame 130. However, this is not limiting, and the linear expansion coefficient of the flexible member 120 may be smaller than that of the frame 130. In other words, the following relationship may be satisfied: linear expansion coefficient of the flexible member 120 < linear expansion coefficient of the frame 130 < linear expansion coefficient of the communicating plate 15. This is because, if the linear expansion coefficient of the flexible member 120 is smaller than that of the frame 130, some wrinkles may occur in the flexible region 123 due to contraction of the frame 130 when the temperature is returned to room temperature after high-temperature curing of either the adhesive 140 or 141 during assembly. However, the occurrence of wrinkles can be reduced compared to the wrinkles in the flexible region 123 formed due to contraction of the communicating plate 15. An example of a combination of materials for each member in such a case is shown in the table of FIG. 22.

[0104] In other words, as shown in combination example 9, when the flexible member 120 is made of a ceramic material or an organic film with a relatively small linear expansion coefficient, the frame body 130 can be made of various metals, and the connecting plate 15 can be made of various metals or engineering plastics, etc., selected according to the linear expansion coefficient.

[0105] Furthermore, as shown in combination example 10, when the flexible member 120 is made of metal or an organic film, the frame 130 can be made of various metals, and the communicating plate 15 can be made of various metals or engineering plastics, etc., selected according to the linear expansion coefficient.

[0106] Furthermore, as shown in combination example 11, when the flexible member 120 is made of metal, the frame 130 can be made of various metals, and the communicating plate 15 can be made of various metals or engineering plastics, etc., selected according to the linear expansion coefficient.

[0107] Of course, the combination of materials for the communicating plate 15, the flexible member 120, and the frame 130 is not limited to the combination examples 6 to 11, as long as the relationship in magnitude of the linear expansion coefficients described above is satisfied.

[0108] Furthermore, in the present embodiment, the outer circumferential region 125 does not have the first region 126, but this is not particularly limited, and the outer circumferential region 125 may have the first region 126. The second region 127 preferably occupies 80% or more, and more preferably 90% or more, of the entire portion of the outer circumferential region 125 along the X-axis direction, which is the longitudinal direction of the flexible region 123. This reduces the occurrence of wrinkles along the longitudinal direction of the flexible region 123. Of course, the second region 127 may occupy 100% of the longitudinal direction of the flexible region 123.

[0109] Moreover, first region 126 preferably occupies 1% or more and less than 10% of the entire circumference of outer peripheral region 125. Moreover, first region 126 preferably occupies 80% or more, and more preferably 90% or more, of the entire portion of outer peripheral region 125 along the Y-axis direction, which is the short-side direction of flexible region 123.

[0110] In this embodiment, the communicating plate 15 is an example of a "first member," the frame 130 is an example of a "second member," the manifold 100 is an example of a "common liquid chamber," the Z-axis direction is an example of a "stacking direction," the X-axis direction is an example of a "longitudinal direction," and the Y-axis direction is an example of a "short direction."

[0111] (Other embodiments) Although the embodiments of the present invention have been described above, the basic configuration of the present invention is not limited to those described above.

[0112] For example, in each of the above-described embodiments, the manifold 100 of the liquid jet head 2 is exemplified as a "common liquid chamber," but the present invention is not particularly limited to this, and in a head unit including the above-described liquid jet head 2 and a flow path member including a holder that holds a plurality of liquid jet heads 2, a flow path that is provided in the flow path member and communicates with the manifold 100 may be an example of a "common liquid chamber." In this case, the head unit corresponds to the "liquid jet head."

[0113] Furthermore, in the above-described embodiments, the frame 130 having an opening is exemplified as the "second member," but the present invention is not limited to this. The "second member" may be, for example, a member in which the frame 130 and the cover head 150 are integrated, that is, a plate-like member having a recess that opens on a surface facing the -Z direction. Furthermore, the compliance space 152 may be in communication with the atmosphere via an atmosphere communication passage (not shown).

[0114] Furthermore, in each of the above-described embodiments, at least one of the adhesive 140 and the adhesive 141 is a thermosetting adhesive, but this is not particularly limited, and the adhesive 140 and the adhesive 141 may be a room temperature curing adhesive, an ultraviolet curing adhesive, or the like. Even when a thermosetting adhesive, particularly a high temperature curing adhesive, is used in other locations within the liquid jet head 2, by providing the first region 126 in the outer circumferential region 125 as in the above-described first to fourth embodiments and by providing the second region 127 in the outer circumferential region 125 as in the above-described fifth embodiment, it is possible to reduce the occurrence of wrinkles in the flexible region 123 when the thermosetting adhesive in other locations is heated and cured and then returned to room temperature.

[0115] In the above-described embodiments, the outer circumferential region 125 is configured with both the first region 126 and the second region 127, or with only at least one of the first region 126 and the second region 127, but this is not limited to this. A portion of the outer circumferential region 125 that surrounds and is adjacent to the flexible region 123 when viewed in the Z-axis direction may be the fixed region 124 that is sandwiched between both the frame body 130 and the communicating plate 15. In other words, the outer circumferential region 125 may include at least one of the first region 126 and the second region 127, as well as a portion of the fixed region 124.

[0116] In the above-described embodiments, the thin-film piezoelectric actuator 300 is used as the driving element for generating a pressure change in the pressure chamber 12. However, the present invention is not limited to this, and the driving element may be, for example, a thick-film piezoelectric actuator formed by attaching a green sheet or a longitudinal vibration type piezoelectric actuator in which piezoelectric material and electrode forming material are alternately laminated and expanded and contracted in the axial direction. The driving element may also be a so-called electrostatic actuator in which a heating element is disposed in the pressure chamber 12 and droplets are ejected from the nozzle 21 by bubbles generated by the heat generated by the heating element, or a so-called electrostatic actuator in which static electricity is generated between a vibration plate and an electrode, and the electrostatic force deforms the vibration plate, causing droplets to be ejected from the nozzle 21.

[0117] Furthermore, the present invention is broadly applicable to liquid ejection devices in general that include a liquid ejection head. Examples of liquid ejection heads include various inkjet recording heads used in image recording devices such as printers, and colorant ejection heads used in manufacturing color filters for liquid crystal displays and the like. Examples of liquid ejection heads include electrode material ejection heads used in forming electrodes for organic EL displays, FEDs (field emission displays), and the like, and bioorganic material ejection heads used in biochip manufacturing, and the present invention can also be applied to liquid ejection devices that include these liquid ejection heads.

[0118] (Addendum) From the above-described exemplary embodiments, the following configurations can be understood, for example.

[0119] A preferred embodiment of the liquid ejection head of aspect 1 includes a first member defining a portion of a common liquid chamber communicating with a plurality of nozzles that eject liquid, a second member, and a flexible member having a first surface fixed to a first fixing surface of the first member and a second surface opposite to the first surface and fixed to the second member, wherein the first fixing surface has a flow path opening through which the common liquid chamber opens, and the flexible member includes a flexible region that overlaps the flow path opening when viewed in the stacking direction of the first member and the flexible member and is not fixed to the second member, and a peripheral region that surrounds the flexible region when viewed in the stacking direction and is between the flexible region and a region that is fixed to both the first member and the second member, wherein the peripheral region includes at least a first region that is fixed to the first member but not to the second member, the linear expansion coefficient of the first member is smaller than the linear expansion coefficient of the second member, and the first region accounts for 60% or more of the entire circumference of the peripheral region. In this way, when the linear expansion coefficient of the first member is smaller than the linear expansion coefficient of the second member, by providing the first region in more than 60% of the outer peripheral region, the occurrence of wrinkles in the flexible region can be reduced even when there is no pressure fluctuation in the common liquid chamber after assembly.

[0120] In Aspect 2, which is a specific example of Aspect 1, the first region accounts for 80% or more of the entire circumference of the outer peripheral region. This makes it difficult for wrinkles to occur due to the flexible region.

[0121] In Aspect 3, which is a specific example of Aspect 2, the first region accounts for 90% or more of the entire circumference of the outer peripheral region. This makes it difficult for wrinkles to occur due to the flexible region.

[0122] In Aspect 4, which is a specific example of Aspect 1, the outer peripheral region includes a second region that is fixed to the second member but not to the first member. Thus, by providing the second region in the outer peripheral region, it is possible to reduce the likelihood of the flexible member sticking to a member that faces the flexible region and defines the compliance space.

[0123] In Aspect 5, which is a specific example of Aspect 4, the second region occupies 1% or more of the entire circumference of the outer peripheral region. This allows both the first region to reduce the occurrence of wrinkles in the flexible region and the second region to prevent the flexible region from sticking to the members that define the compliance space.

[0124] In Aspect 6, which is a specific example of Aspect 1, the linear expansion coefficient of the flexible member is smaller than the linear expansion coefficient of the second member.

[0125] In Aspect 7, which is a specific example of Aspect 6, the linear expansion coefficient of the flexible member is greater than the linear expansion coefficient of the first member, thereby reducing the occurrence of wrinkles in the flexible region.

[0126] In Aspect 8, which is a specific example of Aspect 1, at least one of the first surface and the first member are fixed to each other and the second surface and the second member is fixed to each other using a thermosetting adhesive. This reduces the occurrence of wrinkles in the flexible region due to the expansion of the first member and the second member when the thermosetting adhesive is heated and hardened, and the contraction of the first member and the second member when the temperature is returned to room temperature. Therefore, a thermosetting adhesive that has strong adhesive strength and is liquid-resistant can be used.

[0127] In Aspect 9, which is a specific example of Aspect 1, 80% or more of the entire portion of the outer peripheral region that extends along the longitudinal direction of the flexible region is the first region. Accordingly, if wrinkles occur along the longitudinal direction of the flexible region, the impact is significant, so by making 80% or more of the entire longitudinal direction of the flexible region the first region, wrinkles along the longitudinal direction can be effectively reduced.

[0128] In Aspect 10, which is a specific example of Aspect 9, 80% or more of the entire portion of the outer peripheral region along the short side of the flexible region includes a second region that is fixed to the second member but not to the first member. By centering the first region on the portion along the long side of the flexible region, ease of assembly can be improved. Furthermore, by centering the second region on the portion along the short side, where the effects of wrinkles are less likely to occur, internal stress in the flexible member can be released, and a decrease in the amount of deformation of the flexible region in response to pressure fluctuations in the common liquid chamber can be suppressed.

[0129] In aspect 11, which is a specific example of aspect 1, in a cross section obtained by cutting the first member, the flexible member, and the second member at a first position in the longitudinal direction of the flexible region with a plane perpendicular to the longitudinal direction, the outer peripheral regions located on both sides of the flexible region are both the first region.

[0130] In Aspect 12, which is a specific example of Aspect 1, the first member further defines a portion of a plurality of individual flow paths that communicate with each of the plurality of nozzles, and the portion of the common liquid chamber defined by the first member is connected to the plurality of individual flow paths. This reduces the height of the common liquid chamber in the first member in which the individual flow paths are formed, thereby reducing wrinkles in the flexible member and preventing a decrease in the volume of the common liquid chamber due to wrinkles in the flexible member and an increase in flow path resistance from the common liquid chamber toward the individual flow paths.

[0131] A liquid ejection head according to a preferred aspect 13 comprises: a first member defining a portion of a common liquid chamber communicating with a plurality of nozzles that eject liquid; a second member; and a flexible member having a first surface fixed to a first fixed surface of the first member and a second surface opposite the first surface and fixed to the second member, wherein the first fixed surface has a flow path opening through which the common liquid chamber opens; the flexible member includes: a flexible region that overlaps the flow path opening when viewed in the stacking direction of the first member and the flexible member and is not fixed to the second member; and a peripheral region that surrounds the flexible region when viewed in the stacking direction and is between the flexible region and a region fixed to both the first member and the second member; the peripheral region includes at least a second region that is fixed to the second member but not to the first member; the linear expansion coefficient of the second member is smaller than the linear expansion coefficient of the first member; and the second region accounts for 60% or more of the entire circumference of the peripheral region. In this way, when the linear expansion coefficient of the second member is smaller than the linear expansion coefficient of the first member, by providing the second region in more than 60% of the outer peripheral region, the occurrence of wrinkles in the flexible region can be reduced even when there is no pressure fluctuation in the common liquid chamber after assembly.

[0132] In Aspect 14, which is a specific example of Aspect 13, the linear expansion coefficient of the flexible member is smaller than the linear expansion coefficient of the first member.

[0133] In Aspect 15, which is a specific example of Aspect 14, the linear expansion coefficient of the flexible member is greater than the linear expansion coefficient of the second member, thereby reducing the occurrence of wrinkles in the flexible region.

[0134] A preferred embodiment of a liquid ejection device according to the present invention includes the liquid ejection head according to any one of the above embodiments, and a liquid storage unit that stores liquid to be supplied to the liquid ejection head. This reduces the occurrence of wrinkles in the flexible member, thereby realizing a liquid ejection device that suppresses problems such as poor ejection. [Explanation of symbols]

[0135] S...medium, 1...liquid ejection device, 2...liquid ejection head, 3...liquid storage section, 4...control unit, 5...transport mechanism, 6...movement mechanism, 10...flow path forming substrate, 12...pressure chamber, 15...communication plate, 15a...first fixing surface, 15b...flow path opening, 16...nozzle communication path, 19...supply communication path, 20...nozzle plate, 21...nozzle, 30...protective substrate, 31...piezoelectric actuator housing section, 32...through hole, 40...case member, 50...vibration plate, 51...elastic film, 52...insulating film, 60...first electrode, 7 0...piezoelectric layer, 80...second electrode, 100...manifold, 110...wiring board, 120...flexible member, 121...first surface, 122...second surface, 123...flexible region, 124...fixed region, 125...peripheral region, 126...first region, 127...second region, 130...frame, 131...first opening, 132...second opening, 133...protrusion, 135...island portion, 140, 141...adhesive, 150...cover head, 152...compliance space, 300...piezoelectric actuator, 310...active portion.

Claims

1. a first member defining a part of a common liquid chamber communicating with a plurality of nozzles that eject liquid; A second member; a flexible member having a first surface fixed to the first fixing surface of the first member and a second surface opposite to the first surface and fixed to the second member; Equipped with the first fixing surface has a flow path opening to which the common liquid chamber opens, The flexible member is a flexible region that overlaps with the flow path opening when viewed in a stacking direction of the first member and the flexible member and that is not fixed to the second member; a peripheral region that surrounds the flexible region when viewed in the stacking direction and is located between the flexible region and a region that is fixed to both the first member and the second member, the outer peripheral region includes at least a first region that is fixed to the first member but not to the second member, The linear expansion coefficient of the first member is smaller than the linear expansion coefficient of the second member, 60% or more of the entire circumference of the outer peripheral region is the first region. A liquid jet head characterized by:

2. 80% or more of the entire circumference of the outer peripheral region is the first region. The liquid jet head according to claim 1 .

3. 90% or more of the entire circumference of the outer peripheral region is the first region. The liquid jet head according to claim 2 .

4. the outer peripheral region includes a second region that is fixed to the second member but not to the first member; The liquid jet head according to claim 1 .

5. 1% or more of the entire circumference of the outer peripheral region is the second region. The liquid jet head according to claim 4 .

6. The linear expansion coefficient of the flexible member is smaller than the linear expansion coefficient of the second member. The liquid jet head according to claim 1 .

7. The linear expansion coefficient of the flexible member is greater than the linear expansion coefficient of the first member. The liquid jet head according to claim 6 .

8. At least one of the first surface and the first member and the second surface and the second member is fixed by a thermosetting adhesive. The liquid jet head according to claim 1 .

9. 80% or more of the entire portion of the outer peripheral region extending along the longitudinal direction of the flexible region is the first region. The liquid jet head according to claim 1 .

10. 80% or more of the entire portion of the outer peripheral region along the short direction of the flexible region includes a second region that is fixed to the second member but not fixed to the first member. The liquid jet head according to claim 9 .

11. In a cross section obtained by cutting the first member, the flexible member, and the second member at a first position in the longitudinal direction of the flexible region along a plane perpendicular to the longitudinal direction, the outer peripheral regions located on both sides of the flexible region are both the first region. The liquid jet head according to claim 1 .

12. the first member further defines a portion of a plurality of individual flow paths communicating with each of the plurality of nozzles; the portion of the common liquid chamber defined by the first member is connected to the plurality of individual flow paths; The liquid jet head according to claim 1 .

13. a first member defining a part of a common liquid chamber communicating with a plurality of nozzles that eject liquid; A second member; a flexible member having a first surface fixed to the first fixing surface of the first member and a second surface opposite to the first surface and fixed to the second member; Equipped with the first fixing surface has a flow path opening to which the common liquid chamber opens, The flexible member is a flexible region that overlaps with the flow path opening when viewed in a stacking direction of the first member and the flexible member and that is not fixed to the second member; a peripheral region that surrounds the flexible region when viewed in the stacking direction and is located between the flexible region and a region that is fixed to both the first member and the second member, the outer peripheral region includes at least a second region that is fixed to the second member but not to the first member, the second member has a smaller linear expansion coefficient than the first member; 60% or more of the entire circumference of the outer peripheral region is the second region. A liquid jet head characterized by:

14. The linear expansion coefficient of the flexible member is smaller than the linear expansion coefficient of the first member. The liquid jet head according to claim 13 .

15. The linear expansion coefficient of the flexible member is greater than the linear expansion coefficient of the second member. The liquid jet head according to claim 14 .

16. A liquid jet head according to any one of claims 1 to 15, a liquid storage section that stores the liquid to be supplied to the liquid jet head; Equipped with A liquid ejection device characterized by:

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