Diaphragm pump

Abstract

To provide a diaphragm pump which can suppress abrasion at a contact point between a fulcrum point of a swing body and a housing.SOLUTION: A diaphragm pump 100 has: a housing 1; a diaphragm 7 which is attached to the housing 1 and expands and shrinks a pump chamber P by elastic deformation; an inclined shaft 4 which is rotated in an eccentric manner about a rotational center axial line C1 by a drive force of a motor 2 and is arranged in a state of being inclined with respect to the rotational center axial line C1; a swing body 6 which has a support point 61a as a support point for a rotation of the inclined shaft 4 in an eccentric manner, into which the inclined shaft 4 is inserted, and which swings by an eccentric rotation of the inclined shaft 4 about the rotation center axial line C1 and elastically deforms the diaphragm 7 by repeated pressing; and a rotation part 8 which is provided at a contact point S between the housing 1 and the support point 61a, and rotates by converting a friction force generated at the contact point S into a rotation force when the swing body 6 swings.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a diaphragm pump having a diaphragm that expands and contracts a pump chamber by elastic deformation. [Background technology]

[0002] BACKGROUND ART Conventionally, a diaphragm pump is known that includes a diaphragm that expands and contracts a pump chamber by elastic deformation (see, for example, Patent Document 1).

[0003] The above-mentioned Patent Document 1 discloses a diaphragm pump including a diaphragm that expands and contracts a pump chamber by elastic deformation, and an oscillator that oscillates to press and elastically deform the diaphragm. The diaphragm pump further includes a motor and a drive shaft (inclined shaft) that transmits the driving force of the motor to the oscillator and is disposed eccentrically with respect to the output shaft of the motor. The oscillator is attached to the drive shaft. The oscillator has an oscillation fulcrum consisting of a hemispherical protrusion of the oscillator that contacts the housing of the diaphragm pump. The oscillation fulcrum consisting of the hemispherical protrusion is held in contact with a recess in the housing as the oscillator oscillates. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2018-123810 Summary of the Invention [Problem to be solved by the invention]

[0005] The above-mentioned Patent Document 1 has a problem in that when the oscillator swings, the oscillation fulcrum, which is a hemispherical protrusion of the oscillator, rubs against the surface of the recess of the stationary housing, which is prone to wear. That is, the contact point between the recess of the stationary housing and the oscillation fulcrum, which is a hemispherical protrusion, is in sliding contact, which causes a problem in that wear is likely to occur due to sliding friction.

[0006] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a diaphragm pump that can suppress wear at the contact point between the fulcrum part of the oscillator and the housing. [Means for solving the problem]

[0007] In order to solve the above problems, a diaphragm pump according to a first aspect of the present invention includes: a housing; a diaphragm attached to the housing and expanding and contracting a pump chamber by elastic deformation; an inclined shaft that is rotated eccentrically around a predetermined central axis of rotation by the driving force of a motor and is arranged in an inclined state with respect to the central axis of rotation; an oscillator that has a fulcrum that serves as a fulcrum for the eccentric rotation of the inclined shaft, into which the inclined shaft is inserted and that oscillates in conjunction with the eccentric rotation of the inclined shaft about the central axis of rotation, repeatedly pressing against the diaphragm to elastically deform it; and a rotating part that is provided at a contact point between the housing and the fulcrum and that rotates by converting frictional force generated at the contact point when the oscillator oscillates into rotational force.

[0008] As described above, the diaphragm pump according to a first aspect of the present invention includes a oscillating body having a fulcrum portion that serves as a fulcrum for the eccentric rotation of the inclined shaft and oscillates with the eccentric rotation of the inclined shaft, repeatedly pressing and elastically deforming the diaphragm, and a rotating portion that is provided at the contact point between the housing and the fulcrum portion and converts frictional force generated at the contact point as the oscillating body oscillates into rotational force to rotate. As a result, when the oscillating body oscillates, the rotating portion can convert frictional force generated at the contact point between the housing and the fulcrum portion into rotational force that rotates the rotating portion. Therefore, unlike conventional sliding contact at the contact point between the housing and the oscillating fulcrum, the rotating portion can achieve rolling contact at the contact point between the housing and the fulcrum portion. In other words, rubbing of the fulcrum portion of the oscillating body against the surface of the housing (occurrence of sliding friction) can be suppressed. As a result, wear at the contact point between the fulcrum portion of the oscillating body and the housing can be suppressed.

[0009] A diaphragm pump according to a second aspect of the present invention includes a housing, a diaphragm attached to the housing and elastically deforming to expand and contract a pump chamber, an inclined shaft that is rotated eccentrically around a predetermined central axis of rotation by the driving force of a motor and is disposed in an inclined state with respect to the central axis of rotation, a bearing disposed on the outer periphery of the inclined shaft, a fulcrum portion that serves as a fulcrum for the eccentric rotation of the inclined shaft, the oscillating body being attached to the inclined shaft via the bearing and oscillating in conjunction with the eccentric rotation of the inclined shaft about the central axis of rotation to repeatedly press against the diaphragm and elastically deform it, and a relative position fixing portion that fixes the relative position of the bearing to regulate fluctuations in the relative position of the bearing with respect to the inclined shaft.

[0010] A diaphragm pump according to a second aspect of the present invention includes a oscillating body having a fulcrum portion that serves as a fulcrum for the eccentric rotation of the inclined shaft, attached to the inclined shaft via a bearing, and oscillating with the eccentric rotation of the inclined shaft about the central axis of rotation, repeatedly pressing and elastically deforming the diaphragm; and a relative position fixing portion that fixes the relative position of the bearing to regulate fluctuations in the relative position of the bearing with respect to the inclined shaft. This restricts fluctuations in the relative position of the bearing with respect to the inclined shaft using the relative position fixing portion, thereby restricting fluctuations in the relative position of the oscillating body with respect to the inclined shaft via the bearing. This prevents the oscillating body from moving in the axial direction of the inclined shaft, thereby reducing the pressing force (contact pressure) between the fulcrum portion of the oscillating body and the housing at their contact points. In other words, this reduces contact between the fulcrum portion of the oscillating body and the housing. As a result, wear at the contact points between the fulcrum portion of the oscillating body and the housing can be suppressed. In particular, when creating a vacuum state using a diaphragm pump, if the degree of vacuum in the pump chamber increases, the contact pressure at the contact point between the fulcrum of the oscillator and the housing increases, making wear more likely to occur, so the present invention is effective in that it can weaken the contact pressure at the contact point. [Effects of the Invention]

[0011] According to the present invention, as described above, it is possible to suppress wear at the contact point between the fulcrum portion of the rocking body and the housing. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing a diaphragm pump according to a first embodiment of the present invention, and is a view that corresponds not only to the first embodiment but also to all embodiments and modified examples. [Figure 2] 1 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a first embodiment, showing a state in which a diaphragm is in a non-pushed position. [Figure 3] 1 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a first embodiment, showing a state in which a diaphragm is in a pressed-in position. [Figure 4] FIG. 2 is a perspective view showing a oscillator of the diaphragm pump according to the first embodiment. [Figure 5] FIG. 3 is an enlarged view of a portion A1 in FIG. 2. [Figure 6] 4A and 4B are diagrams for explaining the movement (trajectory) of the contact position of the rotating portion with respect to the contact member in the diaphragm pump according to the first embodiment. [Figure 7] FIG. 4 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a second embodiment of the present invention. [Figure 8] FIG. 8 is an enlarged view of a portion A2 in FIG. 7. [Figure 9] FIG. 10 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a third embodiment of the present invention. [Figure 10] FIG. 10 is an enlarged view of a portion A3 in FIG. 9. [Figure 11] 10A and 10B are diagrams for explaining the movement (trajectory) of the contact position with respect to the oscillator in the diaphragm pump according to the third embodiment. [Figure 12] FIG. 10 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a fourth embodiment of the present invention. [Figure 13]FIG. 10 is a cross-sectional view showing an inclined shaft, a bearing, and a oscillator of a diaphragm pump according to a fifth embodiment of the present invention. [Figure 14] FIG. 10 is a cross-sectional view showing an inclined shaft, a bearing, and a oscillator of a diaphragm pump according to a sixth embodiment of the present invention. [Figure 15] FIG. 10 is a cross-sectional view showing the overall configuration of a diaphragm pump according to a seventh embodiment of the present invention. [Figure 16] FIG. 13 is a cross-sectional view showing an inclined shaft, a bearing, and a oscillator of a diaphragm pump according to a first modified example of the fourth embodiment. [Figure 17] FIG. 13 is a cross-sectional view showing an inclined shaft, a bearing, and a oscillator of a diaphragm pump according to a second modified example of the fourth embodiment. [Figure 18] FIG. 11 is a cross-sectional view showing an inclined shaft, a bearing, and a oscillator of a diaphragm pump according to a modification of the fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to the accompanying drawings.

[0014] (First embodiment) A diaphragm pump 100 according to a first embodiment of the present invention will be described with reference to FIGS.

[0015] (Overall configuration of diaphragm pump) The diaphragm pump 100 shown in Figure 1 is a relatively small vacuum pump used to evacuate a space. As an example, the diaphragm pump 100 can be applied to a holding device that holds an object by suction, or a device that removes gas from a food container to store food in a vacuum. The diaphragm pump 100 is configured to expand and contract the pump chamber P by elastically deforming the diaphragm 7 (see Figures 2 and 3).

[0016] Diaphragm pump 100 is generally formed into a cylindrical outer shape having one flat, circular surface 100a and the other flat, circular surface 100b. One surface 100a is provided with an intake port 13a and an exhaust port 13b. Intake port 13a is a gas inlet that introduces gas into the interior of diaphragm pump 100, and exhaust port 13b is a gas outlet that discharges the introduced gas to the outside of diaphragm pump 100. The other surface 100b is formed by the outer surface of motor casing 20.

[0017] In each drawing, the direction in which the one surface 100a and the other surface 100b face each other is referred to as the Z direction, the direction from the other surface 100b toward the one surface 100a within the Z direction is referred to as the Z1 direction, and the opposite direction is referred to as the Z2 direction. The rotational center axis C1 of the output shaft 21 of the motor 2 extends in the Z direction. The rotational center axis C1 is located at approximately the center of the circular diaphragm pump 100 in a plan view. In each drawing, the circumferential direction centered on the rotational center axis C1 is referred to as the R direction. In each drawing, the direction in which the central axis C2 of the inclined shaft 4 extends is referred to as the A direction, the direction of the A direction along the Z1 direction is referred to as the A1 direction, and the opposite direction is referred to as the A2 direction. The rotational center axis C1 is an example of a "predetermined rotational center axis" in the claims.

[0018] Here, in each drawing showing a cross section, in order to facilitate understanding of the drawings, the boundary lines of the components constituting the housing 1 inside the housing 1 are omitted. Also, in each drawing showing a cross section, in order to facilitate understanding of the drawings, only one of the multiple deforming portions 7b of the diaphragm 7 (portions that form the pump chamber P) is shown, and the other deforming portions 7b are omitted. Also, in each drawing showing a cross section, in order to facilitate understanding of the drawings, the hatching that indicates the cross-sectional portion of the diaphragm 7 is omitted.

[0019] 2 and 3, the diaphragm pump 100 includes a housing 1, a motor 2, a crank base 3, an inclined shaft 4, a bearing 5, a oscillating body 6, and a diaphragm 7 held by the oscillating body 6. The oscillating body 6 is configured to oscillate due to the driving force of the motor 2 and press against the diaphragm 7. This causes the diaphragm 7 to elastically deform and expand or contract the pump chamber P. The diaphragm pump 100 also includes a rotating section 8.

[0020] The motor 2, crank base 3, inclined shaft 4, bearing 5, and oscillator 6 constitute a drive mechanism 101 that presses and drives the diaphragm 7 to elastically deform it. The driving force of the motor 2 is transmitted to the diaphragm 7 in the order of crank base 3, inclined shaft 4, bearing 5, oscillator 6, and diaphragm 7.

[0021] The oscillator 6 has a fulcrum portion 61a that serves as a fulcrum when the oscillator 6 is oscillated. In the first embodiment, the rotating portion 8 is a part of the housing 1 that contacts the fulcrum portion 61a. Specifically, the rotating portion 8 is a part of the fulcrum plate 11 (diaphragm mounting portion). Here, the diaphragm pump 100 of the first embodiment is configured so that the rotating portion 8 suppresses wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the fulcrum plate 11 of the housing 1. Details will be described later.

[0022] The diaphragm pump 100 is configured such that the drive mechanism 101 causes the oscillator 6 to oscillate around the fulcrum portion 61a. As a result, the diaphragm 7 is repeatedly pressed in the Z1 and Z2 directions by the oscillator 6, causing repeated elastic deformation. As a result, the diaphragm 7 repeatedly moves between a pushed-in position (advance position) where it is pushed toward the pump chamber P and a non-pushed-in position (retracted position) where it is pushed down on the side opposite the pump chamber P. During the retraction stroke in which the diaphragm 7 moves from the pushed-in position to the non-pushed-in position, the diaphragm pump 100 expands the pump chamber P and draws in air through the intake port 13a. During the compression stroke (forward stroke) in which the diaphragm 7 moves from the non-pushed-in position to the pushed-in position, the diaphragm pump 100 contracts the pump chamber P and exhausts air through the exhaust port 13b.

[0023] The pushed-in position (advance position) refers to the position of the diaphragm 7 when it is pushed toward the pump chamber P (Z1 direction) and the volume of the pump chamber P is at its smallest. In other words, if the Z1 direction is the forward direction of the movement of the diaphragm 7, the pushed-in position refers to the position of the diaphragm 7 at its forward limit. Furthermore, the non-pushed-in position (retracted position) refers to the position of the diaphragm 7 when it has moved to the opposite side from the pump chamber P (Z2 direction) and the volume of the pump chamber P is at its largest. In other words, the non-pushed-in position refers to the position of the diaphragm 7 at its retract limit. Each component of the diaphragm pump 100 will be described below in order.

[0024] (Housing configuration) As shown in FIGS. 2 and 3, the housing 1 includes a case 10, a fulcrum plate 11, a valve housing 12, and a lid 13.

[0025] The case 10, fulcrum plate 11, valve housing 12, and lid 13 are assembled together in this order, stacked from the Z2 direction side (motor 2 side) toward the Z1 direction. The case 10, fulcrum plate 11, valve housing 12, and lid 13 are fixed to one another by fixing members F. As an example, the fixing members F are bolts (screws). Note that the fixing members may not be bolts, but may be clamp members that clamp and fix the case, fulcrum plate, valve housing, and lid to one another.

[0026] The Z2 direction end of the case 10 abuts against the motor casing 20. The case 10 has a cylindrical shape with an open Z1 direction end and a closed Z2 direction end. A through hole 10a is provided in the center of the Z2 direction end of the case 10 for arranging the output shaft 21 of the motor 2 inside the case 10. A drive mechanism 101 (excluding the motor casing 20) is also arranged inside the case 10.

[0027] The diaphragm 7 is attached to the fulcrum plate 11 from the Z1 direction side. That is, the fulcrum plate 11 functions as a diaphragm attachment portion. The fulcrum plate 11 also comes into contact with the fulcrum portion 61a of the oscillator 6 from the Z1 direction side and functions to stabilize the oscillation of the oscillator 6 with the fulcrum portion 61a as a fulcrum. The fulcrum plate 11 includes a fulcrum plate main body 11a and a rotating portion 8 attached to the fulcrum plate main body 11a.

[0028] The fulcrum plate main body 11a (fulcrum plate 11) is provided with a rolling bearing 80 of the rotating part 8. More specifically, the fulcrum plate main body 11a (fulcrum plate 11) is provided with a first rotating part mounting portion 11b, which is formed as a through-hole on the rotation center axis C1 and in which the rolling bearing 80 of the rotating part 8 and a contact member 81 are mounted. The first rotating part mounting portion 11b is disposed on the Z1 direction side directly above the fulcrum part 61a. The first rotating part mounting portion 11b is also disposed on the Z2 direction side directly below the diaphragm 7.

[0029] The valve housing 12 is attached to the fulcrum plate 11 from the Z1 direction so as to sandwich the fixed portion 7a of the diaphragm 7 between the valve housing 12 and the fulcrum plate 11. The valve housing 12 has a pump chamber-forming wall portion 12a. The pump chamber-forming wall portion 12a is provided on the end face on the Z2 direction side and constitutes the inner wall on the Z1 direction side, which is part of the pump chamber P. As an example, the pump chamber-forming wall portion 12a is formed in a circular shape in a plan view (as viewed from the Z direction) and is a trapezoidal recess tapering toward the Z1 direction. The inner wall on the Z2 direction side of the pump chamber P is formed by the deformed portion 7b of the diaphragm 7. The pump chamber P is an enclosed space surrounded by the pump chamber-forming wall portion 12a and the deformed portion 7b of the diaphragm 7. A plurality of pump chambers P are provided and aligned in the circumferential direction (direction R) around the central rotation axis C1 (only one pump chamber P is shown in FIGS. 2 and 3). As an example, in the first embodiment, the diaphragm pump 100 is provided with three pump chambers P arranged in the circumferential direction. Note that the diaphragm pump may not be provided with three pump chambers, but may be provided with one, two, four or more pump chambers.

[0030] As shown in FIG. 2, the pump chamber-forming wall 12a has an intake hole 12b in the form of a through-hole extending in the Z direction. The intake hole 12b is connected to the intake port 13a via an intake space 14a inside the lid 13. An elastically deformable intake valve B1 is attached to the valve housing 12 to close the intake hole 12b from inside the pump chamber P. The intake valve B1 is normally held in a closed state, closing the intake hole 12b from inside the pump chamber P. During the retraction stroke in which the diaphragm 7 moves from a pushed-in position (advance position) to a non-pushed-in position (retracted position), the volume of the pump chamber P expands and a negative pressure is created. The intake valve B1 is attracted by this negative pressure and elastically deforms toward the interior of the pump chamber P (in the Z2 direction), switching from a closed state to an open state and introducing gas into the pump chamber P. When the diaphragm 7 reaches the non-pushed position, gas is introduced into the pump chamber P, and the pressure difference between the pump chamber P and the intake space 14a disappears, causing the intake valve B1 to return from the open state to the closed state.

[0031] As shown in FIG. 3, the pump chamber-forming wall 12a is provided with an exhaust hole 12c that extends in the Z direction. The exhaust hole 12c is connected to the exhaust port 13b via an exhaust space 14b inside the lid 13. An elastically deformable exhaust valve B2 that closes the exhaust hole 12c from outside the pump chamber P is attached to the valve housing 12. The exhaust valve B2 is normally held in a closed state that closes the exhaust hole 12c from outside the pump chamber P. During a compression stroke (forward movement) in which the diaphragm 7 moves from the non-compressed position to the compressed position, the volume of the pump chamber P is reduced and a positive pressure is generated. The exhaust valve B2 is pushed by this positive pressure and elastically deforms in the direction opposite to the pump chamber P (Z1 direction), switching from a closed state to an open state and discharging gas to the outside of the pump chamber P. When the diaphragm 7 reaches the pushed-in position, gas is discharged to the outside of the pump chamber P, and the positive pressure in the pump chamber P is released, causing the exhaust valve B2 to return from the open state to the closed state. During the push-in stroke, the intake valve B1 is maintained in the closed state by the positive pressure. During the retraction stroke, the exhaust valve B2 is maintained in the closed state by the negative pressure.

[0032] The lid 13 has a partition 13c that separates the internal space of the lid 13 into an intake space 14a and an exhaust space 14b. The intake space 14a connects the upstream intake port 13a and the downstream intake hole 12b. The exhaust space 14b connects the upstream exhaust hole 12c and the downstream exhaust port 13b. A cap 15 is attached to the lid 13, covering the intake port 13a from the Z1 direction side. The cap 15 is equipped with a filter 15a to remove foreign matter during intake.

[0033] (Drive mechanism configuration) The drive mechanism 101 (motor 2, crank table 3, inclined shaft 4, bearing 5, and oscillator 6) shown in FIG. 2 will be described.

[0034] The motor 2 has a motor casing 20 that houses a rotor and a stator, and an output shaft 21. A crank table 3 is directly fixed to the output shaft 21. As an example, the crank table 3 is fixed to the output shaft 21 by press fitting. In other words, the drive mechanism 101 is of a direct-acting type that transmits the driving force of the motor 2 directly to the crank table 3. Note that instead of being of a direct-acting type, the drive mechanism may be of a reduction type that transmits the driving force of the motor to the crank table via a reduction gear or the like.

[0035] The inclined shaft 4 is disposed at an angle relative to the central axis of rotation C1. The crank base 3 has an inclined shaft mounting hole 30. The inclined shaft 4 is mounted in the inclined shaft mounting hole 30 at an angle relative to the central axis of rotation C1 (Z direction). The inclined shaft 4 is a cylindrical member that extends linearly. The portion of the inclined shaft 4 on the A2 side is fixed in the inclined shaft mounting hole 30 by press fitting.

[0036] The inclined shaft 4 attached to the inclined shaft attachment hole 30 is inclined in a direction approaching the central axis C1 of rotation as it moves toward the A1 direction. That is, the distance between the central axis C2 of the inclined shaft 4 and the central axis C1 of rotation decreases as it moves toward the Z1 direction. The inclined shaft 4 is rotated eccentrically around the central axis C1 of rotation by the driving force of the motor 2. That is, the inclined shaft 4 is rotated (revolved) around the central axis C1 of rotation while maintaining the inclination angle with respect to the central axis C1 by the driving force of the motor 2.

[0037] An inner ring 50 of a bearing 5 is attached to the A1 direction side of the inclined shaft 4. The bearing 5 is a ball bearing configured as a radial bearing. The bearing 5 includes two ball bearings that are arranged in contact with each other in the A direction. The bearing may include only one ball bearing, or three or more ball bearings. An outer ring 51 of the bearing 5 is attached to the oscillator 6. As an example, the outer ring 51 of the bearing 5 is fixed to the oscillator 6 by press fitting. The outer ring of the bearing may also be fixed to the oscillator by adhesive or the like instead of press fitting.

[0038] The oscillator 6 is configured so that the inclined shaft 4 is inserted into it and oscillates in accordance with the eccentric rotation of the inclined shaft 4 about the central axis C1 of rotation, repeatedly pressing against and elastically deforming the diaphragm 7. The oscillator 6 includes a central portion 61 disposed on the central axis C2 extending in the A direction, and arm portions 62.

[0039] The central portion 61 of the oscillator 6 has a bearing accommodating portion 61b in which the bearing 5 is accommodated from the A2 direction side, and a fulcrum portion 61a arranged on the A1 direction side of the bearing accommodating portion 61b. The outer ring 51 of the bearing 5 is fixed to the bearing accommodating portion 61b by press fitting. The fulcrum portion 61a serves as a fulcrum when the inclined shaft 4 rotates eccentrically. The fulcrum portion 61a is a convex portion that protrudes toward the rotating portion 8 (A1 direction side) so as to come into contact with the rotating portion 8. The fulcrum portion 61a has a mountain-like shape with a curved surface (spherical surface) at its tip. The fulcrum portion 61a is arranged on the central axis C2 and protrudes along the central axis C2.

[0040] As shown in FIG. 4, the oscillator 6 has a plurality of (three) arm portions 62 provided in the circumferential direction centered on the central axis C2. The arm portions 62 extend radially from a central portion 61 in a direction perpendicular to the A direction. The arm portions 62 are provided with diaphragm holders 62a in the form of through-holes extending in the A direction. The diaphragm holders 62a are configured to hold the oscillator mounting portion 72 (see FIG. 2) of the diaphragm 7 disposed inside. The diaphragm holders 62a are provided with constricted portions (reduced diameter portions) 62b (see FIG. 2) that hold the diaphragm 7 so that the oscillator mounting portion 72 of the diaphragm 7 does not come off the diaphragm holders 62a. The diaphragm holders may be formed in a concave shape instead of a through-hole shape.

[0041] (Diaphragm configuration) As shown in Fig. 2, the diaphragm 7 is attached to the housing 1. The diaphragm 7 includes a fixed portion 7a and a deformable portion 7b.

[0042] The fixed portion 7a is a portion that is sandwiched between the fulcrum plate 11 and the valve housing 12. The fixed portion 7a is formed in a sheet shape. The deforming portion 7b is surrounded by the fixed portion 7a in a plan view. The deforming portion 7b faces the pump chamber forming wall portion 12a of the valve housing 12 in the Z direction, and is formed in the same circular shape as the pump chamber forming wall portion 12a in a plan view. The deforming portion 7b forms the inner wall on the Z2 direction side of the pump chamber P, and is configured to elastically deform as the motor 2 is driven, thereby expanding and contracting the pump chamber P. The deforming portion 7b elastically deforms so as to repeatedly move back and forth in the Z direction.

[0043] The deformation portion 7b includes a thin film portion 70, a protrusion 71, and a oscillator mounting portion 72. The thin film portion 70 is directly connected to the inner edge of the fixed portion 7a in a plan view and is formed in an annular shape. The thin film portion 70 is formed thin-walled so as to be elastically deformable. The thin film portion 70 supports the protrusion 71 and the oscillator mounting portion 72 on its inside. The protrusion 71 is a solid, thick-walled portion that protrudes from a position supported by the thin film portion 70 toward the pump chamber P (Z1 direction). The protrusion 71 is disposed close to the pump chamber forming wall portion 12a, which is formed by a trapezoidal recess, at the pressed-in position of the diaphragm 7. The oscillator mounting portion 72 is a solid, thick-walled portion that protrudes from a position supported by the thin film portion 70 toward the opposite side from the pump chamber P (Z2 direction). The oscillator mounting portion 72 is held in a state where it is inserted into the diaphragm holding portion 62 a of the oscillator 6 in the form of a through-hole.

[0044] (Configuration of rotating part) 5, the rotating part 8 is provided at a contact point S between the fulcrum plate 11 of the housing 1 and the fulcrum part 61a of the oscillator 6. The rotating part 8 is configured to rotate by converting the frictional force generated at the contact point S when the oscillator 6 oscillates into a rotational force. Note that the contact point S and the rotation center axis C1 are at different positions in a plan view (seen from the Z direction) and do not coincide with each other.

[0045] Here, in the first embodiment, the rotating part 8 includes a rolling bearing 80 and a contact member 81 that serves as a contact point S and is rotatably supported by the rolling bearing 80. The rolling bearing 80 rotatably supports the contact member 81 around the central rotation axis C1. The rolling bearing 80 is a ball bearing. The ball bearing that constitutes the rolling bearing 80 is smaller than the ball bearing that constitutes the bearing 5. The rolling bearing 80 is constituted by one ball bearing. Note that the rolling bearing may be constituted by multiple ball bearings. The rolling bearing 80 is constituted as a radial bearing. An outer ring 80a of the rolling bearing 80 is fixed to a through-hole-shaped first rotating part arrangement portion 11b of the fulcrum plate 11. A contact member 81 is fixed to an inner ring 80b of the rolling bearing 80.

[0046] The contact member 81 has a contact surface 81a that comes into contact with the fulcrum portion 61a, and is rotatably supported by the rolling bearing 80 so as to rotate in conjunction with the oscillation of the rocking body 6. The contact surface 81a is the end face of the contact member 81 on the Z2 direction side. In the Z direction, the contact surface 81a is disposed on substantially the same plane as the end face 110 of the fulcrum plate main body 11a on the Z2 direction side. The contact member 81 integrally has an inner portion 82 and an outer portion 83 on which the contact surface 81a is provided. The inner portion 82 is disposed inside the inner ring 80b of the rolling bearing 80. The outer portion 83 is a flange-shaped enlarged diameter portion having an outer diameter larger than that of the inner portion 82, and is disposed outside the inner ring 80b, closer to the fulcrum portion 61a of the rocking body 6 than the inner ring 80b (in the Z2 direction). The inner portion 82 and the outer portion 83 are formed in a circular shape centered on the central axis of rotation C1 in a plan view. The contact member 81 has a stepped shape in which the outer portion 83 is larger than the inner portion 82 in order to ensure a large contact surface 81a. The contact member 81 is formed from a material different from that of the fulcrum portion 61a of the oscillator 6. The contact member 81 and the fulcrum portion 61a may be made of any material, such as a metal material or a resin material, as long as they are different from each other. However, it is preferable that the contact member 81 and the fulcrum portion 61a be made from a material that is resistant to wear.

[0047] The fulcrum portion 61a does not contact the contact member 81 on the central axis C1 of rotation, but rather at a position slightly offset from the central axis C1 of rotation. That is, the contact point S between the contact member 81 (housing 1) and the fulcrum portion 61a is located eccentrically from the central axis C1 of rotation. Therefore, the contact point S between the contact member 81 (housing 1) and the fulcrum portion 61a moves along a circular orbit T1 (see FIG. 6) centered on the central axis C1 of rotation as the rotating unit 8 rotates in response to the driving of the motor 2 (see FIG. 2). The rotating unit 8 is configured to rotate so that the contact member 81 (housing 1) and the fulcrum portion 61a come into rolling contact with each other along the circular orbit T1. The rolling contact between the contact member 81 (housing 1) and the fulcrum portion 61a is achieved by the outer ring 80a and the inner ring 80b of the rolling bearing 80, which are in rolling contact with each other.

[0048] 6, when the contact member 81 of the rotating unit 8 is viewed along the Z direction from the Z2 direction side with the central axis of rotation C1 as the reference, as the motor 2 is driven, the contact point S moves in the R1 direction, which is one side of the R direction, along a circular path T1 having a rotation radius r1 centered on the central axis of rotation C1. At this time, the frictional force acting on the contact point S between the contact surface 81a of the contact member 81 and the fulcrum portion 61a is converted by the rolling bearing 80 into a rotational force (rotational torque) that rotates the contact member 81. As a result, the contact member 81 itself rotates in the R1 direction around the central axis of rotation C1.

[0049] In this way, by rotating the contact member 81, the diaphragm pump 100 prevents the fulcrum portion 61a from rubbing against the surface of the housing 1. That is, the diaphragm pump 100 uses the rotating portion 8 to ensure that the contact point S between the fulcrum plate 11 of the housing 1 and the fulcrum portion 61a of the oscillator 6 is in rolling contact rather than sliding contact. As a result, the diaphragm pump 100 suppresses wear between the fulcrum plate 11 of the housing 1 and the fulcrum portion 61a of the oscillator 6. By suppressing wear, the intervals between maintenance of the diaphragm pump 100 and the period until replacement of the diaphragm pump 100 can be extended, thereby achieving a longer life for the diaphragm pump 100.

[0050] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0051] As described above, the first embodiment includes the oscillator 6 having the fulcrum portion 61a that serves as a fulcrum when the inclined shaft 4 rotates eccentrically, and that oscillates with the eccentric rotation of the inclined shaft 4, repeatedly pressing and elastically deforming the diaphragm 7, and the rotating portion 8 that is provided at the contact point S between the housing 1 and the fulcrum portion 61a and that converts frictional force generated at the contact point S when the oscillator 6 oscillates into rotational force to rotate. As a result, when the oscillator 6 oscillates, the rotating portion 8 can convert the frictional force generated at the contact point S between the housing 1 and the fulcrum portion 61a into rotational force that rotates the rotating portion 8. Therefore, unlike the conventional case where the contact point between the housing and the oscillation fulcrum is in sliding contact, the rotating portion 8 can make the contact point S between the housing 1 and the fulcrum portion 61a into rolling contact. In other words, it is possible to prevent the fulcrum portion 61a of the oscillator 6 from rubbing against the surface of the housing 1 (occurrence of sliding friction). As a result, wear at the contact point S between the fulcrum portion 61a of the rocking body 6 and the housing 1 can be suppressed.

[0052] In the first embodiment, as described above, contact point S between the housing 1 and fulcrum portion 61a moves along a circular path T1 around a predetermined center, and the rotating portion 8 rotates to bring the housing 1 and fulcrum portion 61a into rolling contact along the circular path T1. As a result, the frictional force generated at contact point S between the housing 1 and fulcrum portion 61a is converted by the rotating portion 8 into a rotational force (rotational torque) that moves contact point S between the housing 1 and fulcrum portion 61a along the circular path T1 around the predetermined center, thereby easily suppressing sliding contact and achieving rolling contact. As a result, wear at contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1 can be easily suppressed.

[0053] In the first embodiment, as described above, the rotating part 8 includes the rolling bearing 80 and the contact member 81 that serves as the contact location S and is rotatably supported by the rolling bearing 80. This makes it possible for the contact member 81, rotatably supported by the rolling bearing 80, to easily convert the frictional force that occurs at the contact location S when the rocking body 6 rocks into a rotational force.

[0054] In the first embodiment, as described above, the rotating part 8 is provided as a part of the housing 1 that contacts the fulcrum part 61a, and the contact member 81 has a contact surface 81a that contacts the fulcrum part 61a, and is rotatably supported by the rolling bearing 80 so as to rotate in accordance with the oscillation of the oscillator 6. This allows the contact member 81, which is supported by the rolling bearing 80 on the housing side, to smoothly rotate together with the fulcrum part 61a of the oscillator 6 that is oscillating, at the contact point S between the fulcrum part 61a of the oscillator 6 and the housing 1. As a result, wear at the contact point S between the fulcrum part 61a of the oscillator 6 and the housing 1 can be easily suppressed.

[0055] In the first embodiment, as described above, the housing 1 includes the fulcrum plate 11 to which the rolling bearing 80 is attached, and the fulcrum plate 11 has a first rotating part arrangement portion 11b formed in the shape of a through hole on the central rotation axis C1 and in which the rotating part 8 is arranged. This makes it possible to suppress wear at the contact point S between the contact member 81 supported by the rotating part 8 arranged on the first rotating part arrangement portion 11b of the fulcrum plate 11 and the fulcrum part 61a of the oscillator 6.

[0056] In the first embodiment, as described above, the fulcrum portion 61a of the oscillator 6 is a convex portion that protrudes toward the contact point S with the housing 1 so as to come into contact with the rotating portion 8. This makes it possible to suppress wear at the contact point S with the housing 1 even when the oscillator 6 has a convex portion that protrudes toward the contact point S with the housing 1 and thus has a shape that is relatively susceptible to wear.

[0057] In the first embodiment, as described above, the rolling bearing 80 is a ball bearing. This allows the ball bearing to efficiently convert the frictional force generated at the contact point S when the oscillator 6 oscillates into a rotational force that rotates the contact member 81.

[0058] (Second embodiment) A second embodiment will be described with reference to Figures 7 and 8. In this second embodiment, unlike the first embodiment in which the rotating part 8 is configured as part of the fulcrum plate 11 of the housing 1, an example will be described in which the rotating part 8 is configured as part of the valve housing 212 of the housing 1. Note that in the figures, the same components as those in the first embodiment are denoted by the same reference numerals.

[0059] A diaphragm pump 200 according to the second embodiment shown in FIGS. 7 and 8 includes a fulcrum plate 211 (diaphragm mounting portion), a valve housing 212, a diaphragm 207, and a rotating portion 8.

[0060] The valve housing 212 includes a valve housing main body 201 and a rotating part 8 attached to the valve housing main body 201. The rotating part 8 is provided at a contact point S between the valve housing 212 and the fulcrum part 61a, and is configured to convert the frictional force generated at the contact point S when the oscillator 6 oscillates into a rotational force to rotate the part.

[0061] The valve housing main body 201 (valve housing 212) is attached to the fulcrum plate 211 from the side opposite the oscillator 6, and together with the diaphragm 207, forms a pump chamber P. The rolling bearing 80 of the rotating part 8 is provided in the valve housing main body 201 (valve housing 212). More specifically, the valve housing main body 201 has a second rotating part mounting portion 212a. The second rotating part mounting portion 212a is formed in a concave shape on the rotation center axis C1, and the rolling bearing 80 and contact member 81 of the rotating part 8 are disposed therein. The second rotating part mounting portion 212a is disposed on the Z1 direction side, directly above the fulcrum part 61a.

[0062] The fulcrum plate 211 has a through hole 211a on the rotation center axis C1, which allows the rotating part 8 arranged in the second rotating part arrangement portion 212a to come into contact with the fulcrum part 61a. Furthermore, the diaphragm 207 has a through hole 207a on the rotation center axis C1, which allows the rotating part 8 arranged in the second rotating part arrangement portion 212a to come into contact with the fulcrum part 61a. In short, the through hole 211a and the through hole 207a are holes through which the contact member 81 of the rotating part 8 passes. The through hole 211a and the through hole 207a are holes that do not come into contact with the contact member 81.

[0063] (Effects of the second embodiment) In the second embodiment, the following effects can be obtained.

[0064] As described above, the second embodiment includes the oscillator 6 having the fulcrum portion 61a that serves as a fulcrum when the inclined shaft 4 rotates eccentrically, and which oscillates with the eccentric rotation of the inclined shaft 4, repeatedly pressing and elastically deforming the diaphragm 207, and the rotating portion 8 that is provided at the contact point S between the housing 1 and the fulcrum portion 61a and converts frictional force generated at the contact point S when the oscillator 6 oscillates into rotational force to rotate. This makes it possible to suppress wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1, just like the first embodiment.

[0065] In the second embodiment, as described above, the housing 1 includes the fulcrum plate 211 and the valve housing 212 attached to the fulcrum plate 211 from the side opposite the oscillator 6 and forming a pump chamber together with the diaphragm 207, the valve housing 212 having a second rotating part mounting portion 212a formed in a recess on the rotation central axis C1 and in which the rotating part 8 is mounted, and the fulcrum plate 211 and the diaphragm 207 have through holes 211a and 207a on the rotation central axis C1 for bringing the rotating part 8 mounted on the second rotating part mounting portion 212a into contact with the fulcrum 61a. This allows the rotating part 8 mounted on the second rotating part mounting portion 212a to come into contact with the fulcrum 61a via the through holes 211a and 207a in the fulcrum plate 211 and the diaphragm 207. Therefore, wear at the contact point S between the contact member 81 supported by the rotating part 8 arranged in the second rotating part arrangement part 212a of the valve housing 212 and the fulcrum part 61a of the oscillator 6 can be easily suppressed.

[0066] (Third embodiment) A diaphragm pump 300 according to a third embodiment will be described with reference to Figures 9 to 11. In this third embodiment, unlike the first embodiment in which the rotating portion 8 is configured as part of the housing 1, an example will be described in which the rotating portion 308 is configured as part of the oscillator 306. Note that in the drawings, the same components as those in the first embodiment are denoted by the same reference numerals.

[0067] A diaphragm pump 300 according to the third embodiment shown in FIGS. 9 and 10 includes a swinging body 306 and a rotating portion 308. As shown in FIG.

[0068] The oscillator 306 includes, as part of the oscillator 306, a rotating part 308 held by the central part 61. The rotating part 308 is provided at a contact point S between the fulcrum plate 11 and the fulcrum part 61a, and is configured to convert the frictional force generated at the contact point S when the oscillator 306 oscillates into a rotational force to rotate.

[0069] The rotating part 308 includes a rolling bearing 80 and a contact member 381. The contact member 381 integrally has an inner part 82 arranged inside the rolling bearing 80 and an outer part 383 arranged closer to the fulcrum plate 11 (Z1 direction side) than the rolling bearing 80. The contact member 381 is supported by the rolling bearing 80 so as to be rotatable around the central axis C2. The outer part 383 is provided with a contact surface 381a. The contact surface 381a is a hemispherical surface that protrudes in the A1 direction.

[0070] A contact point S between the fulcrum portion 61a of the contact member 381 (oscillating body 306) and the stationary surface of the fulcrum plate 11 moves along a circular track T2 (see FIG. 11) centered on the central axis C2 while rotating the rotating part 308 as the motor 2 (see FIG. 9) is driven. The rotating part 308 is configured to rotate so that the fulcrum portion 61a of the contact member 381 comes into rolling contact with the stationary surface of the fulcrum plate 11 along the circular track T2 centered on the central axis C2.

[0071] 11, when the fulcrum portion 61a of the oscillator 306 is viewed from the A1 side along the A direction with the central axis C2 of the inclined shaft 4 as a reference, as the motor 2 is driven, the contact point S moves along a circular path T2 with a rotation radius r2 centered on the central axis C2. At this time, the oscillator 306 itself does not rotate around the central axis C2, but simply oscillates around the central rotation axis C1. Due to the frictional force of the contact point S when it moves along the circular path T2, a rotational force (rotational torque) is generated that rotates the contact member 381 supported by the rolling bearing 80 about the central axis C2.

[0072] (Effects of the third embodiment) In the third embodiment, the following effects can be obtained.

[0073] As described above, the third embodiment includes an oscillator 306 that has a fulcrum portion 61a that serves as a fulcrum when the inclined shaft 4 rotates eccentrically, and that oscillates with the eccentric rotation of the inclined shaft 4, repeatedly pressing and elastically deforming the diaphragm 7, and a rotating portion 308 that is provided at a contact point S between the housing 1 and the fulcrum portion 61a, and that converts frictional force generated at the contact point S when the oscillator 306 oscillates into a rotational force (rotational torque) about the central axis C2 and rotates. As a result, similar to the first embodiment, wear at the contact point S between the fulcrum portion 61a of the oscillator 306 and the housing 1 can be suppressed.

[0074] In the third embodiment, as described above, the rotating part 308 is provided as a part of the oscillator 306 that contacts the housing 1, and the contact member 381 is the fulcrum part 61a, which is rotatably supported by the rolling bearing 80 so as to rotate in accordance with the oscillation of the oscillator 306. This allows the fulcrum part 61a, which is the contact member 381 supported by the rolling bearing 80, to rotate around the central axis C2 with respect to the surface of the housing 1 in a stationary state at the contact point S between the fulcrum part 61a of the oscillator 306 and the housing 1. As a result, wear at the contact point S between the fulcrum part 61a of the oscillator 306 and the housing 1 can be easily suppressed.

[0075] (Fourth embodiment) A diaphragm pump 400 according to a fourth embodiment will be described with reference to Fig. 12. Unlike the first embodiment in which the rotating portion 8 suppresses wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1, the fourth embodiment describes an example in which a relative position fixing portion 9 suppresses wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1. Note that in the drawing, the same components as those in the first embodiment are denoted by the same reference numerals.

[0076] A diaphragm pump 400 according to the fourth embodiment shown in FIG. 12 includes an inclined shaft 404 and a relative position fixing portion 9.

[0077] The relative position fixing portion 9 is configured to prevent the contact pressure of the fulcrum portion 61a of the oscillator 6 that contacts the fulcrum plate 11 from increasing, thereby preventing wear between the fulcrum plate 11 and the fulcrum portion 61a of the oscillator 6. In short, the relative position fixing portion 9 is configured to prevent the oscillator 6 from moving toward the fulcrum plate 11.

[0078] The relative position fixing part 9 is configured to fix the relative position of the bearing 5 with respect to the inclined shaft 404 so as to restrict fluctuations in the relative position of the bearing 5 with respect to the inclined shaft 404. In detail, the relative position fixing part 9 is configured to restrict movement of the bearing 5 with respect to the inclined shaft 404 so as to suppress an increase in the pressing force (contact pressure) with which the fulcrum part 61a presses the housing 1 (fulcrum plate 11). The outer ring 51 of the bearing 5 is fixed to the oscillator 6 by press fitting.

[0079] The inclined shaft 404 is formed in a stepped shape including a shaft main body 404a arranged on the inner periphery side of the bearing 5 and a flange-like expanded diameter portion 404b. The portion of the inclined shaft 404 on the A2 direction side is fixed to the crank table 3 by press-fitting. The output shaft 21 of the motor 2 is press-fitted into the crank table 3, thereby fixing the crank table 3 to the motor 2. This fixes the inclined shaft 404 so that it does not move in the A1 direction. The expanded diameter portion 404b is provided on the tip side (A1 direction side) of the inclined shaft 404 and has a larger diameter than the shaft main body 404a.

[0080] The relative position fixing portion 9 is a flange-shaped expanded diameter portion 404b. In other words, the relative position fixing portion 9 is a part of the inclined shaft 404. The relative position fixing portion 9 is configured to maintain the position of the fulcrum portion 61a of the oscillator 6 attached to the bearing 5 by abutting the bearing 5 against the expanded diameter portion 404b and restricting movement of the bearing 5 relative to the inclined shaft 404. The expanded diameter portion 404b contacts the A1-direction end face of the inner ring 50 of the bearing 5 from the A1 direction side. The expanded diameter portion 404b is formed in a circular plate shape with the A direction as its thickness direction. The expanded diameter portion 404b has a constant thickness in the A direction. The expanded diameter portion 404b is disposed in a space K located inside the fulcrum portion 61a. The space K is a space continuous with the bearing accommodating portion 61b. The space K has a triangular shape tapering in the A1 direction. The space K is located on the A1 direction side of the bearing 5.

[0081] (Effects of the fourth embodiment) In the fourth embodiment, the following effects can be obtained.

[0082] As described above, the fourth embodiment includes the oscillator 6 having the fulcrum portion 61a serving as a fulcrum when the inclined shaft 404 rotates eccentrically, attached to the inclined shaft 404 via the bearing 5, and oscillating with the eccentric rotation of the inclined shaft 404 about the central rotation axis C1 to repeatedly press and elastically deform the diaphragm 7, and the relative position fixing portion 9 that fixes the relative position of the bearing 5 to regulate fluctuations in the relative position of the inclined shaft 404. This regulates fluctuations in the relative position of the bearing 5 with respect to the inclined shaft 404 by the relative position fixing portion 9, thereby regulating fluctuations in the relative position of the oscillator 6 with respect to the inclined shaft 404 via the bearing 5. This prevents the oscillator 6 from moving in the axial direction of the inclined shaft 404, thereby reducing the pressing force (contact pressure) between the fulcrum portion 61a of the oscillator 6 and the housing 1 at the contact point S. In other words, the contact between the fulcrum portion 61a of the oscillator 6 and the housing 1 can be weakened. As a result, it is possible to suppress wear at the contact point S between the fulcrum part 61a of the oscillator 6 and the housing 1. In particular, when creating a vacuum state using the diaphragm pump 400, if the degree of vacuum in the pump chamber P increases, the contact pressure at the contact point S between the fulcrum part 61a of the oscillator 6 and the housing 1 increases, making wear more likely to occur, so the present invention, which can weaken the contact pressure at the contact point S, is effective.

[0083] In the fourth embodiment, as described above, the relative position fixing part 9 restricts the movement of the bearing 5 relative to the inclined shaft 404 so as to suppress an increase in the pressing force with which the fulcrum part 61a presses the housing 1. This restricts the movement of the bearing 5 relative to the inclined shaft 404, and thereby restricts the movement of the oscillator 6 toward the contact point S with the housing 1. As a result, wear at the contact point S between the fulcrum part 61a of the oscillator 6 and the housing 1 can be effectively suppressed.

[0084] In the fourth embodiment, as described above, the inclined shaft 404 is formed in a stepped shape including a shaft main body 404a disposed on the inner periphery of the bearing 5 and an expanded diameter portion 404b provided on the tip end side of the inclined shaft 404 and having a diameter larger than that of the shaft main body 404a. The relative position fixing portion 9 is the expanded diameter portion 404b. The bearing 5 is brought into contact with the expanded diameter portion 404b to restrict movement of the bearing 5 relative to the inclined shaft 404, thereby maintaining the position of the fulcrum 61a of the oscillator 6 attached to the bearing 5. Thus, simply by forming the inclined shaft 404 in a stepped shape including the shaft main body 404a and the expanded diameter portion 404b, the position of the fulcrum 61a of the oscillator 6 attached to the bearing 5 can be maintained. As a result, wear at the contact point S between the fulcrum 61a of the oscillator 6 and the housing 1 can be easily suppressed.

[0085] (Fifth embodiment) A diaphragm pump 500 according to a fifth embodiment will be described with reference to Fig. 13. Unlike the fourth embodiment in which the relative position fixing portion 9 is the expanded diameter portion 404b of the inclined shaft 404 having a stepped shape, the fifth embodiment will describe an example in which the relative position fixing portion 9a is a ring member 91 attached to the inclined shaft 504. Note that in the drawings, the same components as those in the fourth embodiment will be denoted by the same reference numerals.

[0086] A diaphragm pump 500 according to a fifth embodiment shown in FIG. 13 includes an inclined shaft 504 and a relative position fixing portion 9a.

[0087] The inclined shaft 504 has an annular or C-shaped groove 90 provided along the end face of the bearing 5 on the A1 direction side. A ring member 91 larger than the inner diameter of the bearing 5 is fitted and fixed in the groove 90. The ring member 91 is attached to the inclined shaft 504 so as to protrude from the inclined shaft 504 in a direction intersecting the axial direction of the inclined shaft 504. The ring member 91 abuts against the bearing 5 from the A1 direction side. The outer diameter of the ring member 91 is larger than the inner diameter of the inner ring 50 of the bearing 5. The ring member 91 is arranged in the space K.

[0088] The relative position fixing portion 9a is a ring member 91, and is configured to maintain the position of the fulcrum portion 61a of the oscillating body 6 attached to the bearing 5 by abutting the bearing 5 against the ring member 91 and restricting the movement of the bearing 5 relative to the inclined shaft 504.

[0089] (Effects of the fifth embodiment) In the fifth embodiment, the following effects can be obtained.

[0090] As described above, the fifth embodiment includes the oscillator 6 that has the fulcrum portion 61a that serves as a fulcrum when the inclined shaft 504 rotates eccentrically, is attached to the inclined shaft 504 via the bearing 5, and oscillates in conjunction with the eccentric rotation of the inclined shaft 504 about the central rotation axis C1, repeatedly pressing against and elastically deforming the diaphragm 7, and a relative position fixing portion 9a that fixes the relative position of the bearing 5 to restrict fluctuations in the relative position with respect to the inclined shaft 504. This makes it possible to suppress wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1, just like the fourth embodiment.

[0091] As described above, in the fifth embodiment, the relative position fixing portion 9a is the ring member 91 attached to the inclined shaft 504 in a state where it protrudes from the inclined shaft 504 in a direction intersecting the axial direction of the inclined shaft 504, and is configured to hold the position of the fulcrum portion 61a of the oscillator 6 attached to the bearing 5 by abutting the bearing 5 against the ring member 91 to restrict movement of the bearing 5 relative to the inclined shaft 504. Thus, simply by attaching the ring member 91 to the inclined shaft 504, the position of the fulcrum portion 61a of the oscillator 6 attached to the bearing 5 can be held. As a result, wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1 can be easily suppressed.

[0092] (Sixth embodiment) A diaphragm pump 600 according to a sixth embodiment will be described with reference to Fig. 14. Unlike the fourth embodiment in which the relative position fixing portion 9 is the expanded diameter portion 404b of the inclined shaft 404 having a stepped shape, the sixth embodiment will describe an example in which the relative position fixing portion 9b is an adhesive portion 92 that fixes the inclined shaft 4 and the bearing 5 to each other. Note that in the drawing, the same components as those in the fourth embodiment will be assigned the same reference numerals.

[0093] A diaphragm pump 600 according to the sixth embodiment shown in FIG. 14 includes a relative position fixing portion 9b.

[0094] The inclined shaft 4 is fixed to the inner ring 50 of the bearing 5 via an adhesive portion 92. The relative position fixing portion 9b is the adhesive portion 92 that fixes the inclined shaft 4 and the bearing 5 to each other, and is configured to maintain the position of the fulcrum portion 61a of the oscillator 6 attached to the bearing 5 by restricting movement of the bearing 5 relative to the inclined shaft 4 with the adhesive portion 92. The adhesive portion 92 is arranged along the inner circumferential surface of the inner ring 50 of the bearing 5.

[0095] (Effects of the sixth embodiment) In the sixth embodiment, the following effects can be obtained.

[0096] As described above, the sixth embodiment includes the oscillator 6 that has the fulcrum portion 61a that serves as a fulcrum when the inclined shaft 4 rotates eccentrically, is attached to the inclined shaft 4 via the bearing 5, and oscillates in conjunction with the eccentric rotation of the inclined shaft 4 about the central rotation axis C1, repeatedly pressing against and elastically deforming the diaphragm 7, and a relative position fixing portion 9b that fixes the relative position of the bearing 5 to restrict fluctuations in the relative position with respect to the inclined shaft 4. This makes it possible to suppress wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1, similar to the fourth embodiment.

[0097] In the sixth embodiment, as described above, the relative position fixing portion 9b is the adhesive portion 92 that fixes the inclined shaft 4 and the bearing 5 to each other, and is configured to maintain the position of the fulcrum portion 61a of the oscillator 6 attached to the bearing 5 by restricting movement of the bearing 5 relative to the inclined shaft 4 with the adhesive portion 92. In this way, the adhesive portion 92 can fix the inclined shaft 4 and the bearing 5 to each other without requiring a large installation space.

[0098] (Seventh embodiment) A diaphragm pump 700 according to a seventh embodiment will be described with reference to Fig. 15. In this seventh embodiment, an example will be described in which the diaphragm pump 700 includes both the rotating unit 8 described in the first embodiment and the relative position fixing unit 9 (inclined shaft 404) described in the fourth embodiment. Note that in the drawings, the same components as those in the first and fourth embodiments are denoted by the same reference numerals.

[0099] A diaphragm pump 700 according to the seventh embodiment shown in FIG. 15 includes both a rotating portion 8 and a relative position fixed portion 9 (an enlarged diameter portion 404b of an inclined shaft 404).

[0100] In the diaphragm pump 700, the rotating part 8 causes the contact point S between the fulcrum plate 11 and the fulcrum part 61a of the oscillator 6 to be in rolling contact rather than sliding contact, thereby suppressing wear between the fulcrum plate 11 and the fulcrum part 61a of the oscillator 6. Furthermore, in the diaphragm pump 700, the relative position fixing part 9 fixes the relative position of the bearing 5 with respect to the inclined shaft 404 so as to restrict fluctuations in the relative position, thereby suppressing wear between the fulcrum plate 11 and the fulcrum part 61a of the oscillator 6.

[0101] (Effects of the Seventh Embodiment) In the seventh embodiment, the following effects can be obtained.

[0102] The seventh embodiment, like the first embodiment, includes an oscillator 6 having a fulcrum 61a serving as a fulcrum when the inclined shaft 404 rotates eccentrically, oscillating in conjunction with the eccentric rotation of the inclined shaft 404 and repeatedly pressing against the diaphragm 7 to elastically deform it, and a rotating unit 8 provided at a contact point S between the housing 1 and the fulcrum 61a and rotating by converting frictional force generated at the contact point S when the oscillator 6 oscillates into rotational force. Also, like the fourth embodiment, the seventh embodiment includes an oscillator 6 having a fulcrum 61a serving as a fulcrum when the inclined shaft 404 rotates eccentrically, attached to the inclined shaft 404 via the bearing 5, oscillating in conjunction with the eccentric rotation of the inclined shaft 404 about the rotation central axis C1 and repeatedly pressing against the diaphragm 7 to elastically deform it, and a relative position fixing unit 9 that fixes the relative position of the bearing 5 to restrict fluctuations in the relative position of the inclined shaft 404. As a result, similarly to the first and fourth embodiments, wear at the contact point S between the fulcrum portion 61a of the oscillator 6 and the housing 1 can be suppressed.

[0103] (Variation) The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims rather than the description of the above embodiments, and further includes all modifications (variations) within the meaning and scope of the claims.

[0104] For example, in the fourth embodiment, the thickness of the expanded diameter portion 404b, which becomes the relative position fixing portion 9, in the direction A is constant. However, the present invention is not limited to this. In the present invention, the thickness of the expanded diameter portion 404c, which becomes the relative position fixing portion 9, in the direction A does not have to be constant, as in a diaphragm pump 400a of a first modified example of the fourth embodiment shown in FIG. 16. Specifically, in the direction A, the expanded diameter portion 404c may be formed so that the thickness of a portion located on the central axis C2 is maximum and the thickness of an outer edge portion is minimum. That is, the expanded diameter portion 404c may be formed in a mountain shape (triangular shape). As a result, the expanded diameter portion 404c has a shape that follows the triangular space K. Therefore, the thickness of the expanded diameter portion 404c can be increased in some parts, thereby increasing the strength of the expanded diameter portion 404c.

[0105] Furthermore, in the fourth embodiment, the outer ring 51 of the bearing 5 is fixed to the oscillator 6 by press-fitting, but the present invention is not limited to this. The present invention may be configured as a diaphragm pump 400b according to a second modified example of the fourth embodiment shown in FIG. 17 . Specifically, in this second modified example, the oscillator 406 of the diaphragm pump 400b is composed of two members: a bearing accommodating member 460 and a cover member 461. The bearing accommodating member 460 has an opening 460a on the A1 side for introducing the bearing 5 into the bearing accommodating member 460 therein. The cover member 461 is a member for closing the opening 460a and is provided with a fulcrum portion 61a. The bearing accommodating member 460 has a movement restricting portion 460b that abuts on the end face of the bearing 5 on the A2 side and restricts movement of the bearing 5 in the A2 direction. With the cover member 461 covering the opening 460a, the movement of the bearing 5 in the direction A is restricted by the cover member 461 and the movement restricting portion 460b. As a result, the relative positions of the inclined shaft 404, the bearing 5, and the oscillator 406 are fixed in the direction A.

[0106] In the fifth embodiment, the ring member 91 serving as the relative position fixing portion 9a is disposed in the space K inside the fulcrum portion 61a (on the A1 direction side of the two bearings), but the present invention is not limited to this. In the present invention, the ring member 91 serving as the relative position fixing portion 9a may be disposed between the two bearings 5, as in a diaphragm pump 500a of a modified example of the fifth embodiment shown in FIG.

[0107] In the first to third and seventh embodiments, the rolling bearings 80 of the rotating parts 8, 308 are ball bearings, but the present invention is not limited to this. In the present invention, roller bearings may be used as the rolling bearings of the rotating parts.

[0108] Furthermore, in the first to seventh embodiments, the bearing 5 provided between the oscillator 6, 306 and the inclined shaft 4, 404, 504 is a ball bearing (a type of rolling bearing), but the present invention is not limited to this. In the present invention, the bearing provided between the oscillator 6, 306 and the inclined shaft may be a roller bearing, which is a type of rolling bearing, or may be a sliding bearing instead of a rolling bearing.

[0109] In the first to seventh embodiments, the fulcrum 61a of the oscillator 6, 306 is formed as a convex portion, but the present invention is not limited to this. In the present invention, the fulcrum of the oscillator may be formed as a flat surface. In this case, it is preferable to provide a convex portion that protrudes toward the fulcrum on the housing side with which the fulcrum comes into contact.

[0110] Furthermore, in the sixth embodiment, the inclined shaft 4 is fixed to the bearing 5 by the adhesive portion 92, which serves as the relative position fixing portion 9b. However, the present invention is not limited to this. In the present invention, the inclined shaft may be fixed to the bearing by a press-fit portion, which serves as the relative position fixing portion. In other words, the inclined shaft may be fixed to the inner ring of the bearing by press-fitting, rather than by adhesive fixation.

[0111] In the first embodiment, the first rotating part placement portion 11b in which the rotating part 8 is placed is formed in the shape of a through hole, but the present invention is not limited to this. In the present invention, the first rotating part placement portion in which the rotating part is placed may be formed in a recessed shape.

[0112] In the second embodiment, the second rotating part placement portion 212a where the rotating part 8 is placed is formed in a concave shape, but the present invention is not limited to this. In the present invention, the second rotating part placement portion where the rotating part is placed may be formed in the shape of a through hole.

[0113] In the first and second embodiments, the contact member 81 of the rotating part 8 is shaped like a step that becomes larger on the fulcrum 61a side, but the present invention is not limited to this. In the present invention, the contact member of the rotating part may be shaped like a cylinder having a certain diameter. [Explanation of symbols]

[0114] 1. Housing 2 motors 4, 404, 504 Inclined Shaft 5. Bearings 6, 306, 406 rocker 7, 207 Diaphragm 8, 308 Rotating part 9, 9a, 9b Relative position fixing part 11, 211 Support plate 11b First rotating part arrangement part 12, 212 valve housing 61a (of the swinging body) fulcrum 80 Rolling bearings 81, 381 Contact member 81a Contact surface 91 Ring member 92 Adhesive part 100, 200, 300, 400, 400a, 400b, 500, 500a, 600, 700 diaphragm pump 207a (Diaphragm) through hole 211a (support plate) through hole 212a Second rotating part arrangement part 404a Shaft body 404b, 404c Expanded diameter part C1 Rotational axis (predetermined rotational axis) P Pump Room S Contact point T1, T2 orbit

Claims

1. Housing and a diaphragm attached to the housing and elastically deforming to expand and contract the pump chamber; an inclined shaft that is rotated eccentrically around a predetermined rotation center axis by a driving force of a motor and is disposed in a state inclined with respect to the rotation center axis; a swinging body having a fulcrum portion serving as a fulcrum when the inclined shaft rotates eccentrically, into which the inclined shaft is inserted, swinging in accordance with the eccentric rotation of the inclined shaft about the central axis of rotation to repeatedly press the diaphragm and elastically deform it; a rotating portion provided at a contact point between the housing and the fulcrum portion, which converts frictional force generated at the contact point when the oscillating body oscillates into rotational force and rotates.

2. the contact point between the housing and the fulcrum moves along a circular trajectory around a predetermined center, The diaphragm pump according to claim 1 , wherein the rotating portion is configured to rotate to bring the housing and the fulcrum portion into rolling contact with each other along the circular track.

3. 2. The diaphragm pump according to claim 1, wherein the rotating portion includes a rolling bearing and a contact member that is rotatably supported by the rolling bearing and serves as the contact point.

4. the rotating portion is provided as a part of the housing that contacts the fulcrum portion, 4. The diaphragm pump according to claim 3, wherein the contact member has a contact surface that comes into contact with the fulcrum portion, and is rotatably supported by the rolling bearing so as to rotate in association with the oscillation of the oscillator.

5. the housing includes a fulcrum plate on which the rolling bearing is provided, 5. The diaphragm pump according to claim 4, wherein the fulcrum plate has a first rotor mounting portion formed on the central axis of rotation as a through hole or a recess, and on which the rotor is mounted.

6. The housing includes: A fulcrum plate; a valve housing in which the rolling bearing is provided, the valve housing being attached to the fulcrum plate from the side opposite to the oscillator side, and forming the pump chamber together with the diaphragm, the valve housing has a second rotating part mounting portion formed in a through-hole shape or a recess shape on the rotation central axis, and in which the rotating part is mounted; 5. The diaphragm pump according to claim 4, wherein the fulcrum plate and the diaphragm have a through hole on the rotation center axis for contacting the fulcrum with the rotating portion disposed in the second rotating portion disposing portion.

7. the rotating portion is provided as a part of the swinging body that contacts the housing, 4. The diaphragm pump according to claim 3, wherein the contact member is the fulcrum portion and is rotatably supported by the rolling bearing so as to rotate in association with the oscillation of the oscillator.

8. 2. The diaphragm pump according to claim 1, wherein the fulcrum portion of the oscillator is a convex portion that protrudes toward the contact point with the housing so as to come into contact with the rotating portion.

9. 4. The diaphragm pump according to claim 3, wherein the rolling bearing is a ball bearing.

10. a bearing disposed on the outer periphery of the inclined shaft and to which the rocking body is attached; The diaphragm pump according to claim 1 , further comprising: a relative position fixing portion that fixes the relative position of the bearing with respect to the inclined shaft so as to restrict fluctuations in the relative position of the bearing with respect to the inclined shaft.

11. Housing and a diaphragm attached to the housing and elastically deforming to expand and contract the pump chamber; an inclined shaft that is rotated eccentrically around a predetermined rotation center axis by a driving force of a motor and is disposed in a state inclined with respect to the rotation center axis; a bearing disposed on the outer periphery of the inclined shaft; an oscillator having a fulcrum portion serving as a fulcrum when the inclined shaft rotates eccentrically, the fulcrum portion being attached to the inclined shaft via the bearing, the fulcrum portion oscillating in association with the eccentric rotation of the inclined shaft about the central axis of rotation to repeatedly press against the diaphragm and elastically deform it; a relative position fixing portion that fixes the relative position of the bearing with respect to the inclined shaft so as to restrict fluctuations in the relative position of the bearing with respect to the inclined shaft.

12. The diaphragm pump according to claim 11, wherein the relative position fixing portion restricts movement of the bearing relative to the inclined shaft so as to suppress an increase in a pressing force with which the fulcrum portion presses the housing.

13. The inclined shaft is a shaft main body portion disposed on an inner circumferential side of the bearing; an expanded diameter portion provided on the tip side of the inclined shaft and having a diameter larger than that of the shaft main body, 12. The diaphragm pump according to claim 11, wherein the relative position fixing portion is the enlarged diameter portion, and is configured to hold the position of the fulcrum portion of the oscillator attached to the bearing by abutting the bearing against the enlarged diameter portion to restrict movement of the bearing relative to the inclined shaft.

14. 12. The diaphragm pump according to claim 11, wherein the relative position fixing portion is a ring member attached to the inclined shaft so as to protrude from the inclined shaft in a direction intersecting an axial direction of the inclined shaft, and the bearing is abutted against the ring member to restrict movement of the bearing relative to the inclined shaft, thereby maintaining a position of the fulcrum portion of the oscillator attached to the bearing.

15. 12. The diaphragm pump according to claim 11, wherein the relative position fixing portion is an adhesive portion that fixes the inclined shaft and the bearing to each other, or a press-fit portion of the inclined shaft that is press-fitted into the bearing, and the adhesive portion or the press-fit portion restricts movement of the bearing relative to the inclined shaft, thereby maintaining the position of the fulcrum portion of the oscillator attached to the bearing.

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