Spectrometry device and article inspection device having the same

The spectroscopic measurement device maintains reproducibility by comparing spectral characteristics across periods, addressing inconsistencies due to light source changes, and enables precise article quality inspection.

JP2025168828APending Publication Date: 2025-11-12ANRITSU CORP
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Patent Information

Application Number
JP2024073621
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-04-30
Publication Date
2025-11-12

AI Technical Summary

Technical Problem

Existing spectroscopic measurement technologies face challenges in maintaining reproducibility of measurement results due to changes in light source characteristics over time or replacement, leading to inconsistent measurements.

Method used

A spectroscopic measurement device with a light source unit, light detection unit, and spectral characteristic adjustment unit that operates in multiple modes to detect and adjust spectral characteristics, allowing comparison of absorbance measurements across periods to confirm reproducibility, using a heat-resistant test piece like alumina.

Benefits of technology

Ensures the reproducibility of measurement results is maintained by comparing spectral characteristics across periods, even with changes in light source characteristics, and allows for precise quality inspection of articles.

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Abstract

To provide a spectrometry device that is allowed to confirm whether it maintains reproducibility of a measurement result, and to provide an article inspection device having the same.SOLUTION: A spectrometry device 1 measures spectral characteristics of absorbance of a tablet W by operating a light detection section 4 in two modes, namely a first mode for detecting spectral characteristics of light applied from a light source section 3 and a second mode for detecting spectral characteristics of transmission light through the tablet W after being applied from the light source 3. The light detection section 4 can be operated in a third mode for detecting spectral characteristics of transmission light that is applied from the light source section 3 and passes through a test piece TP. A spectral characteristic adjustment section 61 compares spectral characteristics of absorbance of the test piece TP measured at a first period with spectral characteristics of absorbance of the test piece TP measured at a second period later than the first period.SELECTED DRAWING: Figure 2
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Description

[Technical Field]

[0001] The present invention relates to a spectroscopic measurement device and an article inspection device equipped with the same. [Background technology]

[0002] Patent document 1 discloses an absorbance calculation that uses the spectral characteristics of the light used to measure a tablet as a reference and the spectral characteristics when the tablet is measured as the work result, and calculates the amount of attenuation of the work result from the reference. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2023-018796 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the technology described in Patent Document 1 still has room for improvement in that it is difficult to maintain the reproducibility of measurement results because the spectral characteristics of the light emitted from the light source (i.e., the light used to measure the tablets) change due to deterioration of the light source over time or replacement.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide a spectroscopic measurement device that can confirm whether the reproducibility of measurement results is maintained, and an item inspection device equipped with the same. [Means for solving the problem]

[0006] The spectroscopic measurement device of the present invention comprises a light source unit (3) that irradiates light, a light detection unit (4) that detects the spectral characteristics of the incident light, and a spectral characteristic adjustment unit (61) that adjusts the spectral characteristics detected by the light detection unit, and measures the spectral characteristics of the absorbance of the item by operating the light detection unit in two modes: a first mode that detects the spectral characteristics of the light irradiated from the light source unit, and a second mode that detects the spectral characteristics of the transmitted light irradiated from the light source unit and transmitted through the item (W).The light detection unit can be operated in a third mode that detects the spectral characteristics of the transmitted light irradiated from the light source unit and transmitted through a test piece (TP), and the spectral characteristic adjustment unit is configured to compare the spectral characteristics of the absorbance of the test piece measured in a first period with the spectral characteristics of the absorbance of the test piece measured in a second period after the first period.

[0007] With this configuration, the spectroscopic measurement device of the present invention can confirm whether the reproducibility of the measurement results is maintained by comparing the spectroscopic characteristics of the absorbance of the test piece in the first period and the second period.

[0008] In addition, in the spectroscopic measurement device according to the present invention, even if the difference between the spectroscopic characteristics detected by operating the light detection unit in the first mode during the first period and the spectroscopic characteristics detected by operating the light detection unit in the first mode during the second period is outside an acceptable range, if the difference between the spectroscopic characteristics of the absorbance of the test piece measured during the first period and the spectroscopic characteristics of the absorbance of the test piece measured during the second period is within an acceptable range, the spectroscopic characteristics adjustment unit may determine that the reproducibility of the measurement results during the first period is maintained during the second period.

[0009] With this configuration, even if there is a difference in the spectral characteristics of the light irradiated from the light source unit to the light detection unit between the first period and the second period, the spectroscopic measurement device of the present invention can determine that the reproducibility of the measurement results in the first period is maintained up to the second period as long as the difference in the spectral characteristics of the absorbance of the test piece between the first period and the second period is within an acceptable range, thereby allowing the user to confirm whether the reproducibility of the measurement results is maintained.

[0010] In the spectroscopic measurement device according to the present invention, the test piece may be made of a material that is highly heat resistant and resistant to deterioration over time.

[0011] With this configuration, the spectroscopic measurement device according to the present invention can confirm whether or not the reproducibility of the measurement results is maintained without being affected by temperature or aging.

[0012] In the spectroscopic measurement device according to the present invention, the test piece may be made of alumina.

[0013] With this configuration, the spectroscopic measurement device according to the present invention can confirm whether or not the reproducibility of the measurement results is maintained without being affected by temperature or aging.

[0014] In addition, the article inspection device according to the present invention comprises the above-mentioned spectroscopic measurement device (1) and an inspection unit (2) that inspects the quality of the article based on the spectroscopic characteristics of the absorbance of the article measured by the spectroscopic measurement device.

[0015] With this configuration, the article inspection device according to the present invention can check whether the reproducibility of the measurement results is maintained, thereby enabling the quality of articles to be inspected with high precision. [Effects of the Invention]

[0016] According to the present invention, it is possible to provide a spectroscopic measurement device that can confirm whether the reproducibility of measurement results is maintained, and an article inspection device equipped with the same. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a first schematic diagram of an article inspection device equipped with a spectroscopic measurement device according to one embodiment of the present invention. [Figure 2] FIG. 2 is a second schematic diagram of an article inspection device equipped with a spectroscopic measurement device according to one embodiment of the present invention. [Figure 3] FIG. 3 is a graph showing an example of a case where a spectral characteristic adjustment unit constituting a spectroscopic measurement device according to one embodiment of the present invention determines that the reproducibility of the measurement results in the first period is maintained in the second period, where (a) shows an example of each spectral characteristic in the first period, and (b) shows an example of each spectral characteristic in the second period. [Figure 4] FIG. 4 is a graph showing an example of a case where a spectral characteristic adjustment unit constituting a spectroscopic measurement device according to one embodiment of the present invention determines that the reproducibility of the measurement results in the first period is not maintained in the second period, where (a) shows an example of each spectral characteristic in the first period, and (b) shows an example of each spectral characteristic in the second period. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an article inspection device equipped with a spectroscopic measurement device according to one embodiment of the present invention will be described with reference to the drawings.

[0019] In this embodiment, when an item to be inspected is transported individually along a transport path by a transport unit and reaches a predetermined inspection position, the item inspection device irradiates light onto the item, which is in a fixed position at the predetermined inspection position, and inspects the quality of the item based on the spectral characteristics of the transmitted light that passes through the item upon irradiation with this light (also called irradiated light).

[0020] The items to be inspected are items that are relatively close in size to the area irradiated with light, and include items with an outer diameter φ of several mm to several tens of mm that can be transported individually without packaging, bite-sized items, as well as items and molded products of a predetermined shape manufactured using existing manufacturing equipment or manufacturing equipment without inspection functions, and especially items that do not change shape during transportation.

[0021] Examples of such articles include pharmaceutical preparations such as tablets, capsules, lozenges, and drops, as well as candy and chocolate. The following description will be given taking as an example an article to be inspected a tablet W that is circular in plan view, has a height (thickness) smaller than its diameter, and is roughly cylindrical in side view. Note that the article to be inspected is not limited to a circular shape in plan view, and articles of various shapes such as an oval shape or a polygonal shape can also be used.

[0022] The conveying unit may be, for example, a conveying unit configured to align and convey articles individually, such as a conveying belt, a conveying disk, or a conveying chute. In this embodiment, an example will be described in which a conveying disk 11 (see FIG. 1) is used as the conveying unit.

[0023] As shown in Fig. 1, the conveying disk 11 is a conveying unit configured to suck tablets W into suction holes on its outer peripheral surface and convey them in the circumferential direction while rotating horizontally. In the conveying disk 11, the tablets W are conveyed with their upper and lower surfaces kept horizontal as their sides are sucked into the suction holes. In Fig. 1, only a portion of the outer peripheral side of the conveying disk 11 is shown.

[0024] The article inspection device 10 according to this embodiment includes a spectroscopic measurement device 1 and an inspection unit 2.

[0025] [Spectrometry device] The spectroscopic measurement device 1 includes a light source unit 3 and a light detection unit 4. The spectroscopic measurement device 1 irradiates a tablet W to be measured with broadband light (visible light, near-infrared to terahertz light (terahertz waves)), and measures the spectral characteristics of the light that passes through the tablet W in response to the irradiation of this light.

[0026] (Light source part) The light source unit 3 is configured to irradiate broadband light onto the tablet W passing through a predetermined inspection position, i.e., onto the tablet W being conveyed (moving). In this embodiment, the light source unit 3 is arranged on the opposite side (lower side in this embodiment) from the light detection unit 4 across the conveyance path of the tablet W so as to irradiate light from one side (lower side in this embodiment) of a pair of circular end faces of the approximately cylindrical tablet W to the other side (upper side in this embodiment).

[0027] The conveying path of the tablet W is an area through which the tablet W passes during conveyance. The predetermined inspection position is a position on the conveying path of the tablet W where the light source unit 3 and the light detection unit 4 are arranged.

[0028] The light source unit 3 includes a light source 30 , a light guide 31 , and an optical lens 32 .

[0029] The light source 30 is composed of a broadband light source, such as a halogen lamp, to emit broadband light onto the tablet W to be measured, and is installed at a predetermined position as a light source unit integrally assembled with a lamp holding means (not shown) and a case with heat dissipation fins, and is connected to a power supply unit (neither of which is shown).

[0030] Broadband light refers to light that includes visible light, near-infrared light, and terahertz light (terahertz waves). The wavelength of the irradiated light does not need to cover all of these; for example, a wavelength band of 400-2500 nm can easily pass through a measured object such as a tablet and is less likely to cause damage from ultraviolet rays, so the light may be limited to this wavelength band or the near-infrared band within this wavelength band. Furthermore, if the absorption spectrum of the component to be measured is known, only the wavelength band corresponding to the absorption spectrum may be used.

[0031] The light guide 31 is made up of a large number of glass optical fibers bundled together, and guides light from the light source 30 to an optical lens 32 that focuses the light. The optical lens 32 focuses the light from the light guide 31 onto the tablet W at a predetermined inspection position (the underside of the tablet W in the example of FIG. 1). The light emitted from the light source 30 is irradiated onto the tablet W via this light guide 31 and the optical lens 32.

[0032] The light guide 31 has a tip surface 31a facing the optical lens 32 at the end opposite to the light source 30 (upper side in this embodiment). Light emitted from the light source 30 is emitted from the tip surface 31a of the light guide 31 towards the optical lens 32. In this embodiment, the tip surface 31a means the tip surface of the light guide in which glass optical fibers are bundled together, and does not include the outer periphery that covers the tip surface.

[0033] (Photodetector) The light detecting section 4 has an optical fiber 41 and a spectroscope 42. In the light detecting section 4, the optical fiber 41 and the spectroscope 42 are unitized.

[0034] The light detection unit 4 is positioned on the opposite side (in this embodiment, the upper side) from the light source unit 3 across the conveying path of the tablet W, so as to face the other (in this embodiment, the upper side) of a pair of circular end faces of the approximately cylindrical tablet W.

[0035] The optical fiber 41 is configured to receive transmitted light that has passed through the tablet W at a predetermined inspection position. The transmitted light that has passed through the tablet W enters the optical fiber 41 from the end face on the incident side of the optical fiber 41. The transmitted light that has entered the optical fiber 41 passes through the optical fiber 41 and reaches the spectroscope 42.

[0036] The spectroscope 42 performs spectrometry using, for example, a grating that utilizes differences in the diffraction angle depending on the wavelength of light. Specifically, the light that enters the spectroscope 42 is irradiated onto a grating (diffraction grating) and separated into individual wavelength components. The light separated into individual wavelength components is then detected for each wavelength component by a row of photodetector elements. The light intensity for each wavelength component is then measured. The grating is an optical element with multiple grooves engraved on its surface.

[0037] A tapered optical fiber with a large input diameter and a small output diameter can be used as the optical fiber 41. This allows the transmitted light to be incident on the spectroscope 42 more efficiently.

[0038] In this way, the light detection unit 4 receives the transmitted light irradiated from the light source unit 3 and transmitted through the tablet W via the optical fiber 41, and measures the spectral characteristics of the transmitted light received via the optical fiber 41 using the spectroscope .

[0039] 2, the light source unit 3 is configured so that the test piece TP can be attached and detached. A positioning mechanism (not shown) for positioning the test piece TP is provided on the upper surface of the light source unit 3.

[0040] The test piece TP is made of a material that transmits and absorbs even a small amount of light. However, the test piece TP is not made of an excessively transparent material such as glass or a reflective material such as a mirror. The test piece TP is made of a material that is highly heat-resistant and does not easily deteriorate over time. For example, the test piece TP may be made of a resin material such as Teflon (registered trademark), or a ceramic such as alumina or zirconia. The test piece TP in this embodiment is made of alumina.

[0041] [Control device] 1, the article inspection device 10 has a control device 60. The control device 60 is configured by a computer device having, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a storage device such as a hard disk device, an input / output port, and a communication port.

[0042] The ROM and storage device of this computer device store a program for causing the computer device to function as the control device 60. That is, the CPU executes the program stored in the ROM using the RAM as a work area, causing the computer device to function as the control device 60. In this embodiment, the control device 60 functions as a spectral characteristics adjustment unit 61 and an inspection unit 2.

[0043] (Spectral characteristics adjustment section) The spectral characteristics adjustment unit 61 adjusts the spectral characteristics detected by the light detection unit 4. For example, the spectral characteristics adjustment unit 61 standardizes the spectral characteristics detected by the light detection unit 4. The standardization performed by the spectral characteristics adjustment unit 61 includes at least one of the four arithmetic operations, differentiation, integration, and normalization.

[0044] The spectral characteristic adjustment unit 61 standardizes the spectral characteristics detected by the light detection unit 4 in the first mode in which the spectral characteristics of the light irradiated from the light source unit 3 are detected, and stores the standardized spectral characteristics (hereinafter simply referred to as "spectral characteristics RF") in a storage device as a reference.

[0045] The spectral characteristic adjustment unit 61 standardizes the spectral characteristics detected by the light detection unit 4 in the second mode in which the spectral characteristics of the transmitted light irradiated from the light source unit 3 and transmitted through the tablet W are detected, and calculates the spectral characteristics of the absorbance of the tablet W (hereinafter also simply referred to as the "absorbance characteristics Wad") using the standardized spectral characteristics (hereinafter also simply referred to as the "spectral characteristics W") and the spectral characteristics RF.

[0046] For example, the spectral characteristic adjusting unit 61 calculates the absorbance A of the tablet W at each wavelength λ from the light intensity Ii at the wavelength λ of the spectral characteristic RF and the light intensity I at the wavelength λ of the spectral characteristic W as A=-log 10 The absorbance characteristic Wad is calculated according to (I / Ii).

[0047] The spectral characteristics adjustment unit 61 standardizes the spectral characteristics detected by the light detection unit 4 in the third mode in which the spectral characteristics of transmitted light irradiated from the light source unit 3 and transmitted through the test piece TP are detected, and calculates the spectral characteristics of the absorbance of the test piece TP (hereinafter also simply referred to as the "absorbance characteristics Tad") using the standardized spectral characteristics (hereinafter also simply referred to as the "spectral characteristics T") and the spectral characteristics RF, and stores the calculated spectral characteristics in the storage device. The spectral characteristics adjustment unit 61 calculates the absorbance characteristics Tad in the same way as the absorbance characteristics Wad.

[0048] The spectral characteristic adjustment unit 61 determines whether the reproducibility of the measurement results in the first period is maintained in the second period by comparing the absorbance characteristics Tad of the test piece measured in the first period with the absorbance characteristics Tad of the test piece measured in the second period that follows the first period.

[0049] In other words, even if the difference between the spectral characteristic RF detected by operating the light detection unit 4 in the first mode during the first period and the spectral characteristic RF detected by operating the light detection unit 4 in the first mode during the second period is outside the acceptable range, the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results during the first period is maintained during the second period if the difference between the absorbance characteristic Tad of the test piece measured during the first period and the absorbance characteristic Tad of the test piece measured during the second period is within the acceptable range.

[0050] In this embodiment, the first period corresponds to the period from when a new reference is stored in the memory device to measure the absorbance characteristics Tad of a new tablet W of type A until when measurement of the absorbance characteristics Tad of the new tablet W of type A begins.

[0051] The second period corresponds to the period from when a reference for measuring the absorbance characteristics Tad of the measured tablet W of type A is selected from the references stored in the memory device to when measurement of the absorbance characteristics Tad of the measured tablet W of type A is started.

[0052] The second period may be any period after the first period during which the light detection unit 4 can operate in the third mode. For example, the second period may be a period after maintenance of the article inspection apparatus 10 is performed, or a period after the article inspection apparatus 10 is powered on.

[0053] In this embodiment, the spectral characteristic adjustment unit 61 calculates the root mean square error of the absorbance characteristic Tad based on the spectral characteristics detected by the light detection unit 4 in the second period (hereinafter also simply referred to as the "second absorbance characteristic Tad") relative to the absorbance characteristic Tad based on the spectral characteristics detected by the light detection unit 4 in the first period (hereinafter also simply referred to as the "first absorbance characteristic Tad").

[0054] If the root mean square error is less than a predetermined threshold TH, the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results in the first period is maintained in the second period, and if the root mean square error is equal to or greater than the threshold TH, it determines that the reproducibility of the measurement results in the first period is not maintained in the second period.

[0055] For example, as shown in FIG. 3(a), if a first absorbance characteristic Tad is obtained from the spectral characteristics RF and T in a first period, and as shown in FIG. 3(b), if a second absorbance characteristic Tad is obtained from the spectral characteristics RF and T in a second period, the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results in the first period is maintained in the second period because the root mean square error is less than the threshold value TH.

[0056] On the other hand, if a first absorbance characteristic Tad is obtained from the spectral characteristics RF and T in the first period as shown in FIG. 4(a), and a second absorbance characteristic Tad is obtained from the spectral characteristics RF and T in the second period as shown in FIG. 4(b), the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results in the first period is not maintained in the second period because the root mean square error is equal to or greater than the threshold value TH.

[0057] In FIG. 1, the spectral characteristic adjustment unit 61 issues an alarm via a display device or a speaker device connected to the control device 60 depending on the result of determining whether the reproducibility of the measurement results in the first period is maintained in the second period.

[0058] For example, if the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results in the first period is maintained in the second period, it does not issue an alarm, and if it determines that the reproducibility of the measurement results in the first period is not maintained in the second period, it issues an alarm.

[0059] In addition, if the spectral characteristic adjustment unit 61 determines that the reproducibility of the measurement results in the first period is maintained in the second period, it may issue an alarm in a first manner, and if it determines that the reproducibility of the measurement results in the first period is not maintained in the second period, it may issue an alarm in a second manner different from the first manner.

[0060] (Inspection Department) The inspection unit 2 compares the spectroscopic characteristics of absorbance of a non-defective tablet W acquired in advance with the spectroscopic characteristics of absorbance of the tablet W to be inspected that has been transported to a predetermined inspection position, and determines whether the quality of the tablet W is good or bad based on the magnitude of the difference. The inspection unit 2 outputs a sorting signal based on the result of the judgment to a sorting unit (not shown) that sorts the tablets W into normal and defective products.

[0061] Specifically, for example, the quality of the tablet W is judged based on whether the difference amount for each wavelength determined by calculation using a calibration curve obtained by statistical calculation results (such as standard deviation) or statistical methods such as regression is within a predetermined range (a range determined based on the results of statistical calculations or the results of the calibration curve).The quality of the tablet W can also be judged based on whether the sum of the intensities of each wavelength is within a predetermined range.Furthermore, if the components of the tablet W are uniform, the quality of the tablet W may be judged based on whether there is an intensity exceeding a predetermined threshold value set in advance in a region other than the specific wavelength.

[0062] As described above, the spectroscopic measurement device 1 of this embodiment can allow the user to confirm whether the reproducibility of the measurement results is maintained by comparing the spectroscopic characteristics of the absorbance of the test piece TP in the first period and the second period.

[0063] Furthermore, even if there is a difference in the spectral characteristics of the light irradiated from the light source unit 3 to the light detection unit 4 between the first period and the second period, the spectroscopic measurement device 1 of this embodiment determines that the reproducibility of the measurement results in the first period is maintained up to the second period as long as the difference in the spectral characteristics of the absorbance of the test piece TP between the first period and the second period is within an acceptable range, and therefore allows the user to confirm whether the reproducibility of the measurement results is maintained.

[0064] Furthermore, since the test piece TP is made of a material that is highly heat resistant and does not easily deteriorate over time, the spectroscopic measuring device 1 of this embodiment allows the user to confirm whether the reproducibility of the measurement results is maintained without being affected by temperature or aging.

[0065] Furthermore, since the test piece TP is made of alumina, the spectroscopic measurement device 1 of this embodiment is not affected by temperature or aging, and allows the user to confirm whether the reproducibility of the measurement results is maintained.

[0066] Furthermore, the article inspection device 10 according to this embodiment allows the user to check whether the reproducibility of the measurement results is maintained, and therefore allows the quality of the article to be inspected with high precision.

[0067] In the present embodiment, an example has been described in which the light source unit 3 is configured to allow the test piece TP to be attached and detached. However, the light detection unit 4 may be configured to allow the test piece TP to be attached and detached. In this case, a positioning mechanism for positioning the test piece TP is provided on the bottom surface of the light detection unit 4.

[0068] In addition, in this embodiment, an example has been described in which the spectral characteristic adjustment unit 61 determines whether the reproducibility of the measurement results in the first period is maintained in the second period by calculating the root mean square error of the second absorbance characteristic Tad with respect to the first absorbance characteristic Tad.

[0069] In contrast to this, the spectral characteristics adjustment unit 61 may determine whether the reproducibility of the measurement results in the first period is maintained in the second period by calculating the mean square error, the mean absolute error, the average error, the predicted standard error, the coefficient of determination, or the coefficient of determination corrected for degrees of freedom, instead of the root mean square error.

[0070] In addition, the spectroscopic measurement device 1 may be configured to measure the spectroscopic characteristics of the absorbance of the test piece TP during a second period before the inspection of the item by the item inspection device 10 begins, and the spectroscopic measurement device 1 may allow the item inspection device 10 to start inspecting the item if it determines that the reproducibility of the measurement results from the first period is maintained during the second period, and may prohibit the item inspection device 10 from starting inspecting the item if it determines that the reproducibility of the measurement results from the first period is not maintained during the second period.

[0071] In addition, during a second period before the inspection of the item by the item inspection device 10 begins, the spectroscopic measurement device 1 may be configured to measure the spectroscopic characteristics of the absorbance of the test piece TP, and if the spectroscopic measurement device 1 determines that the reproducibility of the measurement results during the first period is not maintained during the second period, it may be configured to activate a function that determines that there is a problem somewhere in the optical system and causes cleaning, inspection of parts, etc.

[0072] While embodiments of the present invention have been disclosed above, it will be apparent to those skilled in the art that modifications may be made without departing from the scope of the present invention. All such modifications and equivalents are intended to be encompassed by the following claims. [Explanation of symbols]

[0073] 1 Spectrometer 2. Inspection Department 3 Light source section 4. Light detection unit 10. Item inspection equipment 61 Spectral characteristics adjustment section W Tablet (item) TP test piece

Claims

1. a light source unit (3) that irradiates light; a light detection unit (4) that detects the spectral characteristics of incident light; a spectral characteristic adjusting unit (61) that adjusts the spectral characteristics detected by the light detecting unit, a first mode for detecting a spectral characteristic of light irradiated from the light source unit; a first mode for detecting the spectral characteristics of transmitted light irradiated from the light source unit and transmitted through the object (W), and a second mode for detecting the spectral characteristics of transmitted light irradiated from the light source unit and transmitted through the object (W), the light detection unit can be operated in a third mode to detect spectral characteristics of transmitted light irradiated from the light source unit and transmitted through a test piece (TP), The spectral characteristics adjustment unit A spectroscopic measurement device that compares the spectroscopic characteristics of the absorbance of the test piece measured in a first period with the spectroscopic characteristics of the absorbance of the test piece measured in a second period that is later than the first period.

2. The spectral characteristics adjustment unit Even if a difference between the spectroscopic characteristics detected by operating the light detection unit in the first mode during the first period and the spectroscopic characteristics detected by operating the light detection unit in the first mode during the second period is outside an allowable range, 2. The spectroscopic measurement device according to claim 1, wherein if a difference between the spectroscopic characteristics of the absorbance of the test piece measured in the first period and the spectroscopic characteristics of the absorbance of the test piece measured in the second period is within an acceptable range, it is determined that the reproducibility of the measurement results in the first period is maintained in the second period.

3. 2. The spectrometer according to claim 1, wherein the test piece is made of a material that is highly heat-resistant and resistant to deterioration over time.

4. 4. The spectrometer according to claim 3, wherein the test piece is made of alumina.

5. A spectroscopic measurement device (1) according to any one of claims 1 to 4; and an inspection unit (2) that inspects the quality of the item based on the spectroscopic characteristics of the absorbance of the item measured by the spectroscopic measurement device.

Citation Information

Patent Citations

  • Item inspection device

    JP2023018796A