Substrate processing system, image data storage method, and image search method

Abstract

To provide a substrate processing system that enables sufficient error verification.SOLUTION: An imaging unit 150 captures images of the inside of a processing chamber 111 and generates a plurality of images GD. A control unit 201 controls a substrate processing unit 101 on the basis of recipe data RP. The recipe data RP indicates a plurality of steps ST1 to ST10. The plurality of images GD include a plurality of first images GD1 and a plurality of second images GD2. The first image GD1 is generated during a target period HF. The target period HF includes the timing at which the steps switch. The second image GD2 is generated during a period LF outside the target period HF. The control unit 201 executes a frame rate adjustment process. The frame rate adjustment process refers to a process of lowering the frame rate of the second image GD2 below the frame rate of the first image GD1. The control unit 201 stores the first image GD1 and the second image GD2 after the frame rate adjustment process in the memory unit 202.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a substrate processing system, an image data storage method, and an image search method. [Background technology]

[0002] A monitoring device for a single-wafer substrate processing apparatus is known, which includes a holder and a nozzle (see, for example, Patent Document 1). The holder holds a substrate. The nozzle ejects a processing liquid toward the substrate held in the holder. The monitoring device monitors the operation of the nozzle and the upper surface of the substrate held in the holder. The monitoring device of Patent Document 1 includes an imaging unit, a monitoring video data generation unit, and a data storage unit. The imaging unit images the nozzle and the upper surface of the substrate held in the holder to generate captured video data. The monitoring video data generation unit generates monitoring video data based on the captured video data. The monitoring video data is stored in the data storage unit.

[0003] Specifically, the imaging unit images the nozzle and the substrate during a first process in which the nozzle moves, and generates the captured video data. The imaging unit also images the nozzle and the substrate during a second process in which the nozzle supplies a processing liquid to the substrate, and generates the captured video data. The monitoring video data generation unit generates the monitoring video data so that the frame rate of the monitoring video data corresponding to the captured video data generated during the second process is higher than that of the monitoring video data corresponding to the captured video data generated during the first process. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2021 / 095612 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in a single-wafer substrate processing apparatus, an error (abnormality) is likely to occur when the process executed by the substrate processing apparatus switches from one process (step) to the next. That is, an error (abnormality) is likely to occur immediately before switching from one process (step) to the next process (step), at the timing of switching from one process (step) to the next process (step), and immediately after switching from one process (step) to the next process (step). In contrast, in the monitoring device of Patent Document 1, the frame rate of the monitoring video data corresponding to the captured video data generated during execution of the first process is low, so if an error (abnormality) occurs immediately before switching from one process (step) to the next process (step), the error (abnormality) cannot be sufficiently verified.

[0006] Furthermore, a large amount of surveillance video data is stored in the data storage unit. Therefore, workers must search for images (frame images) at the time an error occurs from the surveillance video data stored in the data storage unit. Considering the burden placed on workers by the image search work, there is room for further improvement.

[0007] The present invention has been made in view of the above problems, and its first object is to provide a substrate processing system, an image data storage method, and an image retrieval method that enable sufficient verification of errors (abnormalities). Also, its second object is to provide a substrate processing system, an image data storage method, and an image retrieval method that can reduce the burden on workers of verifying errors (abnormalities). [Means for solving the problem]

[0008] According to one aspect of the present invention, a substrate processing system includes a substrate processing unit, an imaging unit, an operation control unit, and a processing unit. The substrate processing unit has a processing chamber that accommodates a substrate. The substrate processing unit processes the substrate accommodated in the processing chamber. The imaging unit captures images of the interior of the processing chamber and generates multiple images at a set frame rate. The operation control unit controls the substrate processing unit based on recipe data. The processing unit stores the images frame by frame in a data storage unit. The recipe data defines the operation of the substrate processing unit for each step included in multiple steps arranged along a time axis. The multiple images include multiple first images and multiple second images. The multiple first images are generated during a target period. The target period includes timings at which the steps switch. The multiple second images are generated during a period outside the target period. The operation control unit or the processing unit executes a frame rate adjustment process. The frame rate adjustment process refers to a process of lowering the frame rate of the second images below the frame rate of the first images. The processing unit stores the first image and the second image after the frame rate adjustment processing in the data storage unit.

[0009] In one embodiment, the processing unit refers to at least one cropping range that is preset for at least some of the specific steps among the plurality of steps, crops the image corresponding to the specific step, and stores the cropped image in the data storage unit.

[0010] In one embodiment, a plurality of trimming ranges are set for the specific step.

[0011] In one embodiment, the plurality of steps includes a first step and a second step that is a step following the first step. The target period includes a timing at which the first step switches to the second step. The specific step includes the second step. The processing unit references the cropping range set for the second step and crops the first image corresponding to the first step in accordance with the start timing of the target period.

[0012] In one embodiment, the substrate processing unit includes a first nozzle and a second nozzle. The first nozzle ejects a first processing liquid toward a predetermined location on the substrate in a direction perpendicular to the substrate. The second nozzle ejects a second processing liquid toward the predetermined location on the substrate in a direction oblique to the substrate. The trimming range includes the predetermined location on the substrate.

[0013] In one embodiment, the processing unit acquires, for each image, additional information used to search for the image, and stores the additional information in the data storage unit in association with the image.

[0014] In one embodiment, the substrate processing system further includes an input unit. The input unit inputs an arbitrary search keyword. The additional information includes a keyword. The search keyword corresponds to a keyword of the additional information. The processing unit searches for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword.

[0015] In one embodiment, the processing unit acquires a first feature amount that is a feature amount of the image, and the additional information includes the first feature amount.

[0016] In one embodiment, the substrate processing system further includes an input unit. The input unit inputs an arbitrary search keyword. The additional information further includes a keyword. The search keyword corresponds to a keyword of the additional information. The processing unit acquires a second feature amount, which is a feature amount of an arbitrary image. The processing unit searches for an image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit, based on the additional information, the search keyword, and the second feature amount.

[0017] In one embodiment, the processing unit executes the frame rate adjustment process by referring to a time schedule of the plurality of steps and an elapsed time indicating the time that has elapsed since the start of a first step of the plurality of steps.

[0018] In one embodiment, the processing unit stores the images in the data storage unit in a first data format. The processing unit converts the data format of images stored in the data storage unit that have been stored in the data storage unit for a first storage period from the first data format to a second data format. The second data format represents a data format that reduces the amount of data compared to the first data format.

[0019] In one embodiment, the processing unit deletes from the data storage unit, among the images stored in the data storage unit, images for which a second storage period has elapsed since they were stored in the data storage unit.

[0020] In one embodiment, the operation control section also functions as the processing section.

[0021] In one embodiment, the substrate processing system further includes the data storage unit.

[0022] According to another aspect of the present invention, a substrate processing system includes a substrate processing unit, an imaging unit, and a processing unit. The substrate processing unit has a processing chamber that accommodates substrates. The substrate processing unit processes the substrates accommodated in the processing chamber. The imaging unit captures images of the interior of the processing chamber and generates multiple images at a set frame rate. The processing unit stores the images frame by frame in a data storage unit. For each image, the processing unit obtains additional information used to search for the image and associates the additional information with the image and stores the additional information in the data storage unit.

[0023] In one embodiment, the substrate processing system further includes a monitoring unit. The monitoring unit monitors errors occurring in the substrate processing unit. The monitoring unit identifies the type of the error occurring in the substrate processing unit based on the image generated by the imaging unit. The processing unit acquires information indicating the type of the error as the additional information. The processing unit associates the image at the time of the error with the information indicating the type of the error and stores them in the data storage unit.

[0024] In one embodiment, the processing unit organizes the additional information into layers.

[0025] In one embodiment, the substrate processing system further includes an input unit. The input unit inputs an arbitrary search keyword. The additional information includes a keyword. The search keyword corresponds to a keyword of the additional information. The processing unit searches for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword.

[0026] In one embodiment, the processing unit acquires a first feature amount that is a feature amount of the image, and the additional information includes the first feature amount.

[0027] In one embodiment, the substrate processing system further includes an input unit. The input unit inputs an arbitrary search keyword. The additional information further includes a keyword. The search keyword corresponds to a keyword of the additional information. The processing unit acquires a second feature amount, which is a feature amount of an arbitrary image. The processing unit searches for an image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit, based on the additional information, the search keyword, and the second feature amount.

[0028] In one embodiment, the substrate processing system further includes a monitoring unit. The monitoring unit monitors errors occurring in the substrate processing unit. The processing unit acquires a second feature amount, which is a feature amount of the image at the time the error occurs. The processing unit searches for the image corresponding to the second feature amount from among the images stored in the data storage unit based on the additional information and the second feature amount.

[0029] In one embodiment, the substrate processing system further includes an input unit. The input unit inputs an arbitrary search keyword. The additional information further includes a keyword. The search keyword corresponds to a keyword of the additional information. The processing unit searches for an image corresponding to the search keyword and the second feature from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature.

[0030] In one embodiment, the substrate processing system further includes the data storage unit.

[0031] According to yet another aspect of the present invention, an image data storage method includes an imaging step and a storage step. In the imaging step, an imaging unit images the interior of a processing chamber while a substrate processing unit operates based on recipe data to process a substrate accommodated in the processing chamber, and multiple images are generated at a frame rate set in the imaging unit. In the storage step, the images after frame adjustment processing are stored in the data storage unit frame by frame. The recipe data defines the operation of the substrate processing unit for each step included in multiple steps arranged along a time axis. The multiple images include multiple first images and multiple second images. The multiple first images are generated during a target period. The target period includes timings at which the steps switch. The multiple second images are generated during a period outside the target period. The frame rate adjustment processing refers to processing for lowering the frame rate of the second images below the frame rate of the first images.

[0032] In one embodiment, in the saving step, at least one cropping range that is preset for at least some specific steps among the plurality of steps is referenced, the image corresponding to the specific step is cropped, and the cropped image is saved in the data storage unit.

[0033] In one embodiment, a plurality of trimming ranges are set for the specific step.

[0034] In one embodiment, the plurality of steps includes a first step and a second step that is a step following the first step. The target period includes a timing at which the first step switches to the second step. The specific step includes the second step. In the saving step, the cropping range set for the second step is referenced in accordance with the start timing of the target period, and the first image corresponding to the first step is cropped.

[0035] In one embodiment, the substrate processing unit includes a first nozzle and a second nozzle. The first nozzle ejects a first processing liquid toward a predetermined location on the substrate in a direction perpendicular to the substrate. The second nozzle ejects a second processing liquid toward the predetermined location on the substrate in a direction oblique to the substrate. The trimming range includes the predetermined location on the substrate.

[0036] In one embodiment, in the imaging process or the saving process, the frame rate adjustment process is performed by referring to a time schedule of the plurality of steps and an elapsed time indicating the time that has elapsed since the start of a first step of the plurality of steps.

[0037] In one embodiment, the saving step saves the image in the data storage unit in a first data format. The above image data saving method further includes a converting step, in which the data format of an image saved in the data storage unit that has been saved for a first storage period since being saved in the data storage unit is converted from the first data format to a second data format. The second data format is a data format that reduces the amount of data compared to the first data format.

[0038] In one embodiment, the image data storage method further includes a deleting step in which, of the images stored in the data storage unit, images for which a second storage period has elapsed since they were stored in the data storage unit are deleted from the data storage unit.

[0039] In one embodiment, in the storing step, additional information used for searching for the image is acquired for each of the images, and the additional information is associated with the image and stored in the data storage unit.

[0040] In one embodiment, the saving step acquires a first feature amount that is a feature amount of the image, and the additional information includes the first feature amount.

[0041] According to yet another aspect of the present invention, an image search method includes a step of storing the image and the additional information in the data storage unit in association with each other using the image data storage method described above, a step of acquiring an arbitrary search keyword, and an image search step. In the image search step, the images stored in the data storage unit are searched for the image corresponding to the search keyword based on the additional information and the search keyword. The additional information includes a keyword. The search keyword corresponds to the keyword of the additional information.

[0042] According to yet another aspect of the present invention, an image search method includes the steps of: associating the image with the additional information and storing it in the data storage unit using the image data storage method described above; acquiring an arbitrary search keyword; and searching for an image. In the image search step, a second feature, which is a feature of the arbitrary image, is acquired, and the images stored in the data storage unit are searched for an image corresponding to the search keyword and the second feature based on the additional information, the search keyword, and the second feature. The additional information further includes a keyword. The search keyword corresponds to a keyword in the additional information.

[0043] According to yet another aspect of the present invention, an image data storage method includes an imaging step and a storage step. In the imaging step, an imaging unit captures images of the interior of a processing chamber while a substrate processing unit operates based on recipe data to process a substrate accommodated in the processing chamber, and generates multiple images at a frame rate set in the imaging unit. In the storage step, the images are stored in the data storage unit on a frame-by-frame basis. In the storage step, additional information used to search for the image is acquired for each image, and the additional information is associated with the image and stored in the data storage unit.

[0044] In one embodiment, the image data storage method further includes a step of identifying a type of error that has occurred in the substrate processing unit, wherein the storing step acquires information indicating the type of the error as the additional information, and the image at the time of the error and the information indicating the type of the error are stored in the data storage unit in association with each other.

[0045] In one embodiment, in the saving step, the additional information is organized into layers.

[0046] In one embodiment, the saving step acquires a first feature amount that is a feature amount of the image, and the additional information includes the first feature amount.

[0047] According to yet another aspect of the present invention, an image search method includes a step of storing the image and the additional information in the data storage unit in association with each other using the image data storage method described above, a step of acquiring an arbitrary search keyword, and an image search step. In the image search step, the images stored in the data storage unit are searched for the image corresponding to the search keyword based on the additional information and the search keyword. The additional information includes a keyword. The search keyword corresponds to the keyword of the additional information.

[0048] According to yet another aspect of the present invention, an image search method includes the steps of: associating the image with the additional information and storing it in the data storage unit using the image data storage method described above; acquiring an arbitrary search keyword; and searching for an image. In the image search step, a second feature, which is a feature of the arbitrary image, is acquired, and the images stored in the data storage unit are searched for an image corresponding to the search keyword and the second feature based on the additional information, the search keyword, and the second feature. The additional information further includes a keyword. The search keyword corresponds to a keyword in the additional information.

[0049] According to yet another aspect of the present invention, an image retrieval method includes the steps of: storing the image and the additional information in the data storage unit in association with each other using the image data storage method described above; acquiring a second feature amount that is a feature amount of the image when an error occurs in the substrate processing unit; and an image retrieval step, in which the image corresponding to the second feature amount is searched from among the images stored in the data storage unit based on the additional information and the second feature amount.

[0050] In one embodiment, the image search method further includes a step of acquiring an arbitrary search keyword. The additional information further includes a keyword. The search keyword corresponds to a keyword of the additional information. In the image search step, the images stored in the data storage unit are searched for an image corresponding to the search keyword and the second feature based on the additional information, the search keyword, and the second feature. [Effects of the Invention]

[0051] The substrate processing system, image data storage method, and image retrieval method according to the present invention enable sufficient verification of errors (abnormalities), or reduce the burden of verifying errors (abnormalities) on workers. [Brief explanation of the drawings]

[0052] [Figure 1] 1 is a schematic diagram of a substrate processing system according to a first embodiment of the present invention. [Figure 2] 1 is a cross-sectional view schematically showing the configuration of a substrate processing unit included in a substrate processing system according to a first embodiment of the present invention. [Figure 3] 1A is a block diagram of a substrate processing system according to a first embodiment of the present invention, and FIG. 1B is a diagram showing an example of equipment parameters. [Figure 4]3 is a diagram showing a flow of processing executed by a control unit included in the substrate processing system according to the first embodiment of the present invention. FIG. [Figure 5] FIG. 10 is a diagram showing the flow of chemical treatment and rinsing treatment. [Figure 6] FIG. 1 is a diagram illustrating an image data storage method according to the first embodiment of the present invention. [Figure 7] FIG. 4 is a diagram illustrating an example of recipe data. [Figure 8] FIG. 2 is a diagram showing an example of a time schedule of a plurality of steps defined in recipe data. [Figure 9] 10(a) and 10(b) are diagrams illustrating a first example of a frame rate adjustment process. [Figure 10] FIG. 10 is a diagram showing the flow of a first example of a frame rate adjustment process. [Figure 11] FIG. 10 is a diagram showing the flow of a second example of the frame rate adjustment process. [Figure 12] 1A is a diagram showing an example of management data, and FIG. 1B is a diagram showing an example of storage rules. [Figure 13] 1A is a diagram showing a conversion process included in the image data storage method according to the first embodiment of the present invention, and FIG. 1B is a diagram showing a deletion process included in the image data storage method according to the first embodiment of the present invention. [Figure 14] FIG. 2 is a block diagram of a first modified example of the substrate processing system according to the first embodiment of the present invention. [Figure 15] FIG. 4 is a block diagram of a second modified example of the substrate processing system according to the first embodiment of the present invention. [Figure 16] 10(a) is a block diagram of a substrate processing system according to a second embodiment of the present invention, and FIG. 10(b) is a diagram showing an example of trimming range data. [Figure 17] 10A is a diagram showing a first trimming range, and FIG. 10B is a diagram showing a third trimming range. [Figure 18] 10A is a diagram showing a first modified example of trimming range data, and FIG. 10B is a diagram showing an example of trimming ranges set in a plurality of locations. [Figure 19]FIG. 10 is a diagram illustrating an example of an image when an error occurs. [Figure 20] FIG. 10 is a diagram showing the flow of a first example of trimming processing. [Figure 21] FIG. 10 is a diagram showing the flow of a second example of trimming processing. [Figure 22] FIG. 10 is a block diagram of a substrate processing system according to a third embodiment of the present invention. [Figure 23] 10(a) is a diagram showing an example of management data created by a control unit included in a substrate processing system according to a third embodiment of the present invention, and FIG. 10(b) is a diagram showing a modified example of label information. [Figure 24] FIG. 10 is a diagram showing an error detection step included in an image data storage method according to a third embodiment of the present invention. [Figure 25] FIG. 10 is a diagram illustrating an image search method according to a third embodiment of the present invention. [Figure 26] FIG. 10 is a block diagram of a modified example of the substrate processing system according to the third embodiment of the present invention. [Figure 27] FIG. 10 is a block diagram of a substrate processing system according to a fourth embodiment of the present invention. [Figure 28] FIG. 10 is a diagram showing an example of management data created by a control unit included in the substrate processing system according to the fourth embodiment of the present invention. [Figure 29] FIG. 10 is a diagram illustrating an image search method according to a fourth embodiment of the present invention. [Figure 30] FIG. 10 is a block diagram of a modified example of the substrate processing system according to the fourth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0053] Hereinafter, embodiments of the substrate processing system, image data storage method, and image search method of the present invention will be described with reference to the drawings (FIGS. 1 to 30). However, the present invention is not limited to the following embodiments, and can be implemented in various forms without departing from the spirit of the present invention. Note that duplicated explanations may be omitted as appropriate. In addition, the same or equivalent parts in the drawings will be designated by the same reference symbols, and explanations will not be repeated.

[0054] The "substrate" to be processed in the substrate processing system, image data storage method, and image retrieval method according to the present invention can be a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a substrate for an FED (Field Emission Display), a substrate for an optical disk, a substrate for a magnetic disk, or a substrate for a magneto-optical disk. The following description of the present invention will be primarily focused on a case where a disk-shaped semiconductor wafer is the substrate to be processed. However, the substrate processing system, image data storage method, and image retrieval method according to the present invention can be similarly applied to various substrates other than the semiconductor wafers described above. Furthermore, the shape of the substrate is not limited to a disk shape; the substrate processing system, image data storage method, and image retrieval method according to the present invention can be applied to substrates of various shapes.

[0055] [Embodiment 1] Fig. 1 is a schematic diagram of a substrate processing system 1000 according to this embodiment. More specifically, Fig. 1 is a schematic plan view of the substrate processing system 1000 according to this embodiment. As shown in Fig. 1, the substrate processing system 1000 according to this embodiment includes an apparatus main body 100, a control device 200, and a fluid cabinet 300.

[0056] The apparatus main body 100 processes the substrates W. In this embodiment, the apparatus main body 100 is a single-wafer type apparatus, and processes the substrates W one by one using a processing liquid. The apparatus main body 100 is, for example, a cleaning apparatus or an etching apparatus.

[0057] As shown in FIG. 1, the apparatus main body 100 includes a plurality of substrate processing units 101, a plurality of fluid boxes 102, a plurality of load ports LP, an indexer robot IR, and a center robot CR.

[0058] A carrier CA is placed on each of the load ports LP. The carrier CA can accommodate multiple substrates W stacked vertically. The carrier CA may be, for example, a FOUP (Front Opening Unified Pod), a SMIF (Standard Mechanical Interface) pod, or an OC (Open Cassette).

[0059] The indexer robot IR transports substrates W between at least one load port LP and the center robot CR. The center robot CR transports substrates W between the indexer robot IR and a plurality of substrate processing units 101. Note that a placement stage (path) on which the substrate W is temporarily placed may be provided between the indexer robot IR and the center robot CR, and the device may be configured to transfer the substrate W indirectly between the indexer robot IR and the center robot CR via the placement stage.

[0060] The substrate processing units 101 form a plurality of towers TW (four towers TW in FIG. 1). The towers TW are arranged to surround the center robot CR in a plan view. Each tower TW includes a plurality of substrate processing units 101 stacked one above the other (three substrate processing units 101 in FIG. 1).

[0061] The fluid cabinet 300 contains a processing liquid. Specifically, the fluid cabinet 300 contains a chemical liquid. The chemical liquid includes, for example, dilute hydrofluoric acid (DHF), hydrofluoric acid (HF), hydrofluoric nitric acid (a mixture of hydrofluoric acid and nitric acid (HNO3)), buffered hydrofluoric acid (BHF), ammonium fluoride, HFEG (a mixture of hydrofluoric acid and ethylene glycol), phosphoric acid (H3PO4), sulfuric acid, acetic acid, nitric acid, hydrochloric acid, ammonia water, hydrogen peroxide water, organic acids (e.g., citric acid, oxalic acid), organic alkalis (e.g., tetramethylammonium hydroxide (TMAH)), a sulfuric acid-hydrogen peroxide water mixture (SPM), an ammonia-hydrogen peroxide water mixture (SC1), a hydrochloric acid-hydrogen peroxide water mixture (SC2), isopropyl alcohol (IPA), a surfactant, or a corrosion inhibitor. The fluid cabinet 300 may contain a chemical liquid and a rinse liquid.

[0062] Each fluid box 102 corresponds to one of the multiple towers TW. The chemical liquid in the fluid cabinet 300 is supplied to all substrate processing units 101 included in the corresponding tower TW via one of the fluid boxes 102.

[0063] Each of the substrate processing units 101 performs substrate processing on the substrate W. Specifically, each of the substrate processing units 101 uses a processing liquid to process the substrate W. For example, each of the substrate processing units 101 performs an etching process or a cleaning process on the substrate W.

[0064] The control device 200 controls the operation of each part of the apparatus main body 100. The control device 200 also controls the fluid cabinet 300. For example, the control device 200 controls the substrate processing unit 101, the load port LP, the indexer robot IR, and the center robot CR. The control device 200 includes a control unit 201 and a memory unit 202.

[0065] The control unit 201 controls the device main body 100 and the fluid cabinet 300 based on various information stored in the storage unit 202. The control unit 201 has, for example, a processor. The processor may include a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The processor may include a GPU (Graphics Processing Unit), an NPU (Neural Network Processing Unit), or a quantum computer. The control unit 201 may have a general-purpose arithmetic device or a dedicated arithmetic device. For example, the control unit 201 may have an FPGA (Field-Programmable Gate Array) or an ASIC (Application Specific Integrated Circuit).

[0066] The storage unit 202 includes a main storage device. The main storage device is, for example, a semiconductor memory. The storage unit 202 may further include an auxiliary storage device. The auxiliary storage device includes, for example, at least one of a semiconductor memory and a hard disk drive. The storage unit 202 may also include removable media.

[0067] The storage unit 202 stores various types of information for controlling the device main body 100 and the fluid cabinet 300. Specifically, the storage unit 202 stores various types of data and various computer programs.

[0068] Next, a substrate processing system 1000 of this embodiment will be described with reference to Figures 1 and 2. Figure 2 is a cross-sectional view schematically showing the configuration of a substrate processing unit 101 included in the substrate processing system 1000 of this embodiment.

[0069] As shown in FIG. 2, the substrate processing unit 101 includes a processing chamber 111, an accommodation section 112, a substrate holding section 2, a substrate rotating section 3, a first liquid supply section 4a, a second liquid supply section 4b, a third liquid supply section 4c, a first nozzle moving section 5a, a second nozzle moving section 5b, a liquid receiving section 6, a liquid receiving lifting section 63, and an imaging section 150.

[0070] The processing chamber 111 has a generally box-like shape and accommodates the substrate W, the substrate holding unit 2, the substrate rotation unit 3, part of the first liquid supply unit 4a, part of the second liquid supply unit 4b, part of the third liquid supply unit 4c, the first nozzle movement unit 5a, the second nozzle movement unit 5b, the liquid receiving unit 6, and the liquid receiving lifting unit 63. The processing chamber 111 is, for example, a chamber. The substrate W is carried into the processing chamber 111 and accommodated therein. The substrate processing unit 101 processes the substrate W accommodated in the processing chamber 111.

[0071] The substrate holding part 2 holds the substrate W horizontally in the processing chamber 111. The substrate holding part 2 is controlled by a control part 201. Specifically, the substrate holding part 2 may have a plurality of chuck members 21 and a spin base 22.

[0072] The spin base 22 is substantially disk-shaped and supports a plurality of chuck members 21 in a horizontal position. The plurality of chuck members 21 are arranged on the periphery of the spin base 22. The plurality of chuck members 21 clamp the periphery of the substrate W. The plurality of chuck members 21 hold the substrate W in a horizontal position. The operation of the plurality of chuck members 21 is controlled by a control unit 201.

[0073] The substrate rotation unit 3 rotates the substrate W integrally with the substrate holding unit 2. Specifically, the substrate rotation unit 3 rotates the substrate holding unit 2, which holds the substrate W, around a first rotation axis AX1 that extends vertically. The substrate rotation unit 3 is controlled by the control unit 201. More specifically, the first rotation axis AX1 passes through the center of the spin base 22. The multiple chuck members 21 are arranged so that the center of the substrate W faces the center of the spin base 22. Therefore, the substrate W rotates around the center of the substrate W as the center of rotation.

[0074] Specifically, the substrate rotation unit 3 may have a shaft 31 and a drive unit 32. The shaft 31 is coupled to the center of the spin base 22 and extends downward from the spin base 22. The drive unit 32 generates a drive force that rotates the substrate W integrally with the substrate holder 2. More specifically, the drive unit 32 rotates the shaft 31 about a first rotation axis AX1. As a result, the spin base 22 rotates. The drive unit 32 is controlled by the control unit 201. The drive unit 32 includes, for example, an electric motor.

[0075] The first liquid supply unit 4a supplies a chemical liquid to the substrate W held by the substrate holder 2. Specifically, the first liquid supply unit 4a may include a first moving nozzle 41a, a first liquid supply pipe 42a, and a first opening / closing valve 43a.

[0076] The first moving nozzle 41a is housed in the processing chamber 111. The first moving nozzle 41a ejects the chemical liquid toward the upper surface of the substrate W held by the substrate holder 2 in a direction perpendicular to the substrate W. As a result, the chemical liquid is supplied to the upper surface of the substrate W. More specifically, the first moving nozzle 41a ejects the chemical liquid toward the upper surface of the rotating substrate W. As a result, a liquid film of the chemical liquid is formed on the upper surface of the substrate W. The first moving nozzle 41a may eject the chemical liquid toward a predetermined location on the upper surface of the substrate W. The predetermined location is, for example, the center of the substrate W. In this embodiment, the first moving nozzle 41a ejects the chemical liquid toward the center of the substrate W. The first moving nozzle 41a is an example of a "first nozzle." The chemical liquid ejected from the first moving nozzle 41a is an example of a "first processing liquid."

[0077] The first liquid supply pipe 42a is a tubular member through which a processing liquid flows. In this embodiment, the first liquid supply pipe 42a flows a chemical liquid. A portion of the first liquid supply pipe 42a is housed within the processing chamber 111. Another portion of the first liquid supply pipe 42a is housed in the fluid box 102 described with reference to FIG. 1.

[0078] The first liquid supply pipe 42a is supplied with the chemical liquid from the fluid cabinet 300 described with reference to Fig. 1. As a result, the chemical liquid flows through the first liquid supply pipe 42a.

[0079] One end of the first liquid supply pipe 42a is connected to the first moving nozzle 41a. The first liquid supply pipe 42a is in communication with the first moving nozzle 41a. The first liquid supply pipe 42a flows the chemical liquid up to the first moving nozzle 41a. As a result, the chemical liquid is supplied from the first liquid supply pipe 42a to the first moving nozzle 41a. When the chemical liquid is supplied from the first liquid supply pipe 42a to the first moving nozzle 41a, the chemical liquid is ejected from the first moving nozzle 41a.

[0080] The first on-off valve 43a can be opened and closed. The opening and closing operation of the first on-off valve 43a is controlled by the control unit 201. The actuator of the first on-off valve 43a is, for example, a pneumatic actuator or an electric actuator. The first on-off valve 43a may be housed in the fluid box 102 described with reference to FIG. 1.

[0081] The first on-off valve 43a is provided on the first liquid supply pipe 42a. The first on-off valve 43a controls the flow of the processing liquid (chemical liquid) through the first liquid supply pipe 42a. Specifically, when the first on-off valve 43a opens, the chemical liquid flows through the first liquid supply pipe 42a and is supplied to the first moving nozzle 41a. As a result, the first moving nozzle 41a discharges the chemical liquid. When the first on-off valve 43a closes, the flow of the chemical liquid through the first liquid supply pipe 42a stops, and the supply of the chemical liquid to the first moving nozzle 41a stops. As a result, the discharge of the chemical liquid by the first moving nozzle 41a stops.

[0082] The second liquid supply unit 4b supplies a rinse liquid to the substrate W held by the substrate holder 2. Specifically, the second liquid supply unit 4b may include a second moving nozzle 41b, a second liquid supply pipe 42b, and a second on-off valve 43b. The rinse liquid may include, for example, pure water (e.g., deionized water), carbonated water, electrolytic ionized water, hydrogen water, ozone water, or hydrochloric acid water with a diluted concentration (e.g., approximately 0.001 wt % to approximately 0.01 wt %). The configurations of the second moving nozzle 41b, the second liquid supply pipe 42b, and the second on-off valve 43b are substantially the same as the configurations of the first moving nozzle 41a, the first liquid supply pipe 42a, and the first on-off valve 43a, and therefore description thereof will be omitted.

[0083] The third liquid supply unit 4c supplies a rinse liquid to the substrate W held by the substrate holder 2. Specifically, the third liquid supply unit 4c may include a fixed nozzle 41c, a third liquid supply pipe 42c, and a third on-off valve 43c.

[0084] The fixed nozzle 41c is housed in the processing chamber 111. The fixed nozzle 41c ejects a chemical liquid from an oblique direction toward the upper surface of the substrate W held by the substrate holder 2. More specifically, the fixed nozzle 41c ejects a rinse liquid from a fixed position toward a predetermined location on the upper surface of the rotating substrate W. The predetermined location is, for example, the center of the substrate W. In this embodiment, the fixed nozzle 41c ejects the rinse liquid toward the center of the substrate W. The fixed nozzle 41c is an example of a "second nozzle." The rinse liquid ejected from the fixed nozzle 41c is an example of a "second processing liquid."

[0085] The configurations of the third liquid supply pipe 42c and the third on-off valve 43c are substantially the same as the configurations of the first liquid supply pipe 42a and the first on-off valve 43a, and therefore a description thereof will be omitted.

[0086] The rinse liquid is supplied to the second liquid supply pipe 42b and the third liquid supply pipe 42c from a factory where the apparatus main body 100, the control device 200, and the fluid cabinet 300 are installed.

[0087] The first nozzle moving unit 5a moves the first moving nozzle 41a in the vertical and horizontal directions. The first nozzle moving unit 5a is controlled by the control unit 201. More specifically, the first nozzle moving unit 5a moves the first moving nozzle 41a between a first standby position and a processing position. The first standby position is a position outside the liquid receiving unit 6. The processing position is a position facing the upper surface of the substrate W held by the substrate holding unit 2. In this embodiment, the processing position is a position facing the center of the substrate W. When the first moving nozzle 41a is positioned at the processing position, the control unit 201 controls the first liquid supply unit 4a (first on-off valve 43a) to discharge the chemical liquid from the first moving nozzle 41a onto the substrate W. As a result, the chemical liquid is discharged from the first moving nozzle 41a toward the center of the substrate W.

[0088] Specifically, the first nozzle moving section 5a may have a nozzle arm 51, a nozzle base 52, and a nozzle moving mechanism 53.

[0089] The nozzle base 52 extends in the vertical direction. The nozzle arm 51 is connected to the nozzle base 52. The nozzle arm 51 extends in the horizontal direction from the nozzle base 52. The nozzle arm 51 supports the first movable nozzle 41a. For example, the first movable nozzle 41a is fixed to the tip of the nozzle arm 51 and protrudes downward from the tip of the nozzle arm 51.

[0090] The nozzle moving mechanism 53 moves the nozzle arm 51 in the vertical and horizontal directions. As a result, the first moving nozzle 41a moves in the vertical and horizontal directions. The nozzle moving mechanism 53 is controlled by the control unit 201.

[0091] Specifically, the nozzle movement mechanism 53 has a rotation mechanism and an elevation mechanism. The rotation mechanism rotates the nozzle base 52 in both forward and reverse directions about a second rotation axis AX2 extending vertically. As a result, the first movable nozzle 41a moves along a horizontal plane. The elevation mechanism raises and lowers the nozzle base 52 in the vertical direction. As a result, the first movable nozzle 41a moves vertically. The actuator of the rotation mechanism may have, for example, a servo motor such as a stepping motor and a reducer. The actuator of the elevation mechanism may have, for example, a ball screw and an electric motor that can rotate forward and backward.

[0092] The second nozzle moving unit 5b moves the second moving nozzle 41b in the vertical and horizontal directions, similar to the first nozzle moving unit 5a. The second nozzle moving unit 5b is controlled by the control unit 201. More specifically, the second nozzle moving unit 5b moves the second moving nozzle 41b between a second standby position and a processing position, similar to the first nozzle moving unit 5a. The second standby position is a position outside the liquid receiving unit 6 that is different from the first standby position. The configuration of the second nozzle moving unit 5b is substantially the same as the configuration of the first nozzle moving unit 5a, and therefore a description thereof will be omitted.

[0093] The liquid receiving part 6 surrounds the substrate W held by the substrate holding part 2, and receives the processing liquid (chemical liquid and rinse liquid) discharged from the substrate W. Specifically, the liquid receiving part 6 has a guard part 61 and a cup part 62.

[0094] The guard part 61 can be raised and lowered between an upper position and a lower position. The upper position is a position higher than the lower position. When the guard part 61 is in the upper position, the upper end of the guard part 61 is positioned higher than the substrate W held by the substrate holding part 2. When the guard part 61 is in the lower position, the upper end of the guard part 61 is positioned lower than the substrate W held by the substrate holding part 2. Figure 2 shows the guard part 61 in the upper position.

[0095] The guard part 61 has a substantially cylindrical shape. When the guard part 61 is in the upper position, it surrounds the substrate W held by the substrate holder 2 and receives the processing liquid (chemical liquid and rinse liquid) discharged from the substrate W.

[0096] The cup portion 62 has an annular shape. The cup portion 62 is disposed around the substrate rotation portion 3. The cup portion 62 has an annular groove with an open upper surface. At least the bottom of the groove of the cup portion 62 is located at a position lower than the lower end of the guard portion 61.

[0097] The processing liquids (chemical liquid and rinse liquid) received by the guard portion 61 are collected in the grooves of the cup portion 62. The processing liquids (chemical liquid and rinse liquid) collected in the cup portion 62 may be discharged to a drain tank (not shown) via a drain pipe (not shown) connected to the bottom of the cup portion 62. The drain tank may be housed in, for example, the fluid box 102 described with reference to FIG. 1.

[0098] The liquid receiver lifting / lowering unit 63 raises and lowers the guard unit 61. Specifically, the liquid receiver lifting / lowering unit 63 raises and lowers the guard unit 61 between an upper position and a lower position. The liquid receiver lifting / lowering unit 63 is controlled by the control unit 201. The liquid receiver lifting / lowering unit 63 may have, for example, a ball screw and an electric motor that can rotate forward and backward. Note that the cup unit 62 may rise and lower together with the guard unit 61, or may be fixed in a certain position.

[0099] The imaging unit 150 captures images of the inside of the processing chamber 111 and generates a plurality of images GD (image data) at a set frame rate. In other words, the imaging unit 150 generates a group of image data at a set frame rate. Here, the frame rate indicates the number of frames per unit time. The frame rate of the imaging unit 150 is, for example, 60 fps. However, the frame rate of the imaging unit 150 is not limited to 60 fps. The frame rate of the imaging unit 150 may be, for example, 120 fps or 30 fps. The frame rate of the imaging unit 150 may be set by the control unit 201.

[0100] The imaging unit 150 may include a charge coupled device (CCD), or alternatively, the imaging unit 150 may include a complementary metal oxide semiconductor (CMOS) image sensor.

[0101] The image capturing unit 150 receives visible light. The image capturing unit 150 may receive light of a specific wavelength. For example, the image capturing unit 150 may receive light of a red, green, or blue wavelength.

[0102] The imaging unit 150 may receive near-infrared light. For example, the imaging unit 150 may receive near-infrared light having a wavelength in the range of at least 800 nm to 2.5 μm. The imaging unit 150 may include a SWIR (Short Wavelength Infra-Red) image sensor. In this case, the imaging unit 150 detects near-infrared light having a wavelength in the range of at least 800 nm to 2.5 μm. The imaging unit 150 may switch between receiving near-infrared light and visible light.

[0103] 2, the imaging unit 150 is disposed outside the processing chamber 111. By disposing the imaging unit 150 outside the processing chamber 111, it is possible to prevent the processing liquid and volatile components of the processing liquid from adhering to the imaging unit 150.

[0104] Specifically, the sidewall 111s of the processing chamber 111 has a window portion 112w. The accommodation portion 112 is provided outside the window portion 112w. The accommodation portion 112 is attached to the sidewall 111s of the processing chamber 111. The accommodation portion 112 has a generally box-like shape with one side (the surface facing the sidewall 111s of the processing chamber 111) open. The accommodation portion 112 forms an accommodation space together with the sidewall 111s. The imaging unit 150 is accommodated in the accommodation portion 112. The atmosphere inside the accommodation portion 112 is isolated from the atmosphere inside the processing chamber 111.

[0105] The window portion 112w is provided in front of the imaging unit 150. For example, the window portion 112w is transparent. In one example, the window portion 112w is formed from a transparent material such as quartz glass. The window portion 112w transmits at least light. The imaging unit 150 captures an image of the inside of the processing chamber 111 through the window portion 112w. The window portion 112w has high translucency for the wavelength of light detected by the imaging unit 150. The transmittance of the window portion 112w in the detection wavelength range of the imaging unit 150 is, for example, 60% or more, preferably 80% or more. By providing the window portion 112w, the imaging unit 150 can be protected from the processing liquid in the processing chamber 111 and volatile components of the processing liquid.

[0106] Next, a substrate processing system 1000 according to this embodiment will be described with reference to Figures 1, 2, 3(a) and 3(b). Figure 3(a) is a block diagram of the substrate processing system 1000 according to this embodiment. Figure 3(b) is a diagram showing an example of an equipment parameter MP.

[0107] 3(a), the control device 200 further includes a clock unit 203 and a timer 204. The storage unit 202 stores recipe data RP, device parameters MP, an image GD (image data), management data MD, and a storage rule SR.

[0108] The control unit 201 controls the substrate processing unit 101 based on recipe data RP. The recipe data RP indicates a recipe that defines the processing content, processing conditions, and processing procedure for the substrate W. Various parameter values ​​are set in the recipe as processing conditions. The control unit 201 is an example of an "operation control unit." The recipe data RP will be described in further detail with reference to FIG. 7.

[0109] In this embodiment, the control unit 201 controls the substrate processing unit 101 based on the recipe data RP and the equipment parameters MP. The equipment parameters MP include values ​​of parameters other than those defined by the recipe data RP.

[0110] 3(b), the device parameters MP may include a chemical liquid discharge delay time T1. The chemical liquid discharge delay time T1 is a parameter that delays the timing at which the chemical liquid is discharged from the first movable nozzle 41a from the timing defined by the recipe data RP. The control unit 201 controls the discharge of the chemical liquid based on the recipe data RP and the device parameters MP. Specifically, the control unit 201 transitions the first on-off valve 43a from the closed state to the open state at a timing that is delayed from the timing defined by the recipe data RP by the time set as the chemical liquid discharge delay time T1.

[0111] The control unit 201 stores the image GD (image data) generated by the imaging unit 150 in the memory unit 202 on a frame-by-frame basis. That is, the control unit 201 stores the frame images in the memory unit 202. In this embodiment, the control unit 201 is an example of a "processing unit." In other words, the control unit 201 functions as both an "operation control unit" and a "processing unit." Furthermore, the memory unit 202 is an example of a "data storage unit." In this embodiment, the substrate processing system 1000 includes a "data storage unit." The image GD (image data) stored in the memory unit 202 is used, for example, when investigating the cause of a defective lot by looking back at the past.

[0112] Specifically, the control unit 201 controls the imaging unit 150 to capture images of the inside of the processing chamber 111 during a period from the start to the end of a processing procedure defined by the recipe data RP. Then, the control unit 201 stores the RAW data (primary data) generated by the imaging unit 150 in the storage unit 202. Alternatively, the control unit 201 converts the RAW data into image data in a lossless compression format and stores the converted data in the storage unit 202. Therefore, a high-quality image GD is stored in the storage unit 202.

[0113] The clock unit 203 measures the current date and time under the control of the control unit 201. The control unit 201 acquires the current date and time from the clock unit 203.

[0114] The timer 204 measures time under the control of the control unit 201. More specifically, the control unit 201 drives the timer 204 when starting a processing procedure defined by the recipe data RP, and acquires the time that has elapsed since the processing procedure started from the timer 204. Hereinafter, the time that has elapsed since the processing procedure started may be referred to as the "elapsed time."

[0115] The management data MD is data for managing the images GD (image data) stored in the storage unit 202. For example, the management data MD may be a database. The management data MD is created by the control unit 201. The storage rules SR indicate the conditions for the images GD (image data) to be stored in the storage unit 202. The management data MD and the storage rules SR will be described later with reference to Figures 12(a) and 12(b).

[0116] Next, the substrate processing system 1000 of this embodiment will be described with reference to Figures 1 to 4. Figure 4 is a diagram showing the flow of processing executed by the control unit 201 included in the substrate processing system 1000 of this embodiment. Specifically, Figure 4 shows the flow of operation of the substrate processing unit 101. The control unit 201 executes the processing shown in Figure 4 based on recipe data RP and equipment parameters MP.

[0117] 4 begins when a substrate W is loaded into the processing chamber 111. The control unit 201 controls the center robot CR to load the substrate W into the processing chamber 111, and then controls the substrate holding unit 2 (the multiple chuck members 21) to hold the substrate W on the substrate holding unit 2 (the multiple chuck members 21) (step S1). After the substrate W is loaded onto the multiple chuck members 21 of the substrate holding unit 2, the control unit 201 causes the center robot CR to retreat from the processing chamber 111.

[0118] After causing the substrate holder 2 to hold the substrate W, the control unit 201 controls the first nozzle moving unit 5a to move the first moving nozzle 41a from the first standby position to the processing position (step S2).

[0119] After moving the first moving nozzle 41a from the first standby position to the processing position, the control unit 201 controls the substrate rotation unit 3 to rotate the substrate W (step S3).

[0120] When the control unit 201 starts the rotation of the substrate W, it controls the liquid receiving lifting unit 63 to lift the guard unit 61 from the lower position to the upper position (step S4).

[0121] After raising the guard part 61, the control part 201 controls the first liquid supply part 4a to perform chemical liquid processing (step S5). Specifically, the control part 201 causes the first moving nozzle 41a to discharge the chemical liquid. As a result, the upper surface of the substrate W is covered with the chemical liquid. In other words, a liquid film of the chemical liquid is formed on the upper surface of the substrate W.

[0122] When a predetermined time has elapsed since the start of discharge of the chemical liquid, the control unit 201 controls the first liquid supply unit 4a to stop discharging the chemical liquid. After stopping the discharge of the chemical liquid, the control unit 201 controls the second liquid supply unit 4b and the third liquid supply unit 4c to perform a rinse process (step S6). Specifically, the control unit 201 causes the fixed nozzle 41c to discharge the rinse liquid, and then causes the second movable nozzle 41b to discharge the rinse liquid. As a result, the chemical liquid is washed away from the upper surface of the substrate W, and the upper surface of the substrate W is covered with the rinse liquid. In other words, a liquid film of the rinse liquid is formed on the upper surface of the substrate W. Details of the rinse process will be described later with reference to FIG. 5.

[0123] When a predetermined time has elapsed since the second moving nozzle 41b started to discharge the rinsing liquid, the control unit 201 controls the second liquid supply unit 4b to stop the discharge of the rinsing liquid. After stopping the discharge of the rinsing liquid, the control unit 201 executes a drying process (step S7). Specifically, the control unit 201 controls the substrate rotation unit 3 to increase the rotation speed of the substrate W. As a result, the rinsing liquid is discharged from the substrate W, and the substrate W is dried.

[0124] When a predetermined time has elapsed since increasing the rotation speed of the substrate W, the control unit 201 controls the substrate rotation unit 3 to stop the rotation of the substrate W (step S8). After stopping the rotation of the substrate W, the control unit 201 controls the liquid receiving lifting unit 63 to lower the guard unit 61 from the upper position to the lower position (step S9).

[0125] After lowering the guard part 61, the control part 201 releases the substrate W from the substrate holder 2. Then, the control part 201 controls the center robot CR to unload the processed substrate W from the processing chamber 111 (step S10). As a result, the processing shown in FIG. 4 is completed.

[0126] Next, the chemical liquid treatment (step S5) and rinsing treatment (step S6) in Fig. 4 will be described in detail with reference to Fig. 1 to Fig. 5. Fig. 5 is a diagram showing the flow of the chemical liquid treatment and rinsing treatment.

[0127] 5, when the control unit 201 raises the guard unit 61 (step S4 in FIG. 4), it controls the first liquid supply unit 4a to discharge the chemical liquid from the first moving nozzle 41a (step S11). When a predetermined time has elapsed since the control unit 201 started discharging the chemical liquid, it controls the first liquid supply unit 4a to stop discharging the chemical liquid (step S12).

[0128] When the control unit 201 stops the discharge of the chemical liquid, it controls the third liquid supply unit 4c to discharge the rinse liquid from the fixed nozzle 41c (step S13).

[0129] When the control unit 201 starts discharging the rinsing liquid from the fixed nozzle 41c, it controls the first nozzle moving unit 5a to move the first moving nozzle 41a from the processing position to the first standby position (step S14).

[0130] After moving the first moving nozzle 41a to the first standby position, the control unit 201 controls the second nozzle moving unit 5b to move the second moving nozzle 41b from the second standby position to the processing position (step S15).

[0131] After moving the second movable nozzle 41b to the processing position, the control unit 201 controls the third liquid supply unit 4c to stop the fixed nozzle 41c from discharging the rinse liquid (step S16).

[0132] After stopping the discharge of the rinsing liquid from the fixed nozzle 41c, the control unit 201 controls the second liquid supply unit 4b to discharge the rinsing liquid from the second movable nozzle 41b (step S17).

[0133] When a predetermined time has elapsed since the second moving nozzle 41b started to discharge the rinsing liquid, the control unit 201 controls the second liquid supply unit 4b to stop the discharge of the rinsing liquid (step S18).

[0134] After stopping the discharge of the rinsing liquid, the control unit 201 controls the second nozzle moving unit 5b to move the second moving nozzle 41b from the processing position to the second standby position (step S19). As a result, the chemical liquid processing and rinsing processing shown in FIG. 5 are completed.

[0135] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to Figures 1 to 6. Figure 6 is a diagram showing the image data storage method of this embodiment. As shown in Figure 6, the image data storage method of this embodiment includes step S21 and step S22.

[0136] Step S21 is executed in response to the start of a processing procedure defined in the recipe data RP. Step S21 indicates a step (imaging step) of operating the substrate processing unit 101 based on the recipe data RP to image the interior of the processing chamber 111 using the imaging section 150 while processing a substrate W accommodated in the processing chamber 111, and generating a plurality of images GD (image data) at a frame rate set in the imaging section 150. Step S21 is executed from the start to the end of the processing procedure. Step S22 indicates a step (storing step) of storing the image GD (image data) after the frame adjustment process in the storage section 202 on a frame-by-frame basis. The frame rate adjustment process will be described later with reference to FIGS. 7 to 11.

[0137] The image data saving method of this embodiment is executed by, for example, the control unit 201. Therefore, FIG.

[0138] 6, the control unit 201 operates the substrate processing unit 101 based on the recipe data RP, and while processing the substrate W accommodated in the processing chamber 111, causes the imaging unit 150 to capture images of the inside of the processing chamber 111 and generate a plurality of images GD (image data) at a frame rate set in the imaging unit 150 (step S21). Furthermore, the control unit 201 stores the images GD (image data) after the frame adjustment process in the storage unit 202 on a frame-by-frame basis (step S22).

[0139] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to FIGS. 1 to 7. FIG. 7 is a diagram showing an example of recipe data RP. The recipe data RP defines the operation of the substrate processing unit 101 for each step included in a plurality of steps arranged along a time axis. Specifically, as shown in FIG. 7, the recipe data RP defines a step number ST of each step included in the plurality of steps, a content CS of each step included in the plurality of steps, and a time schedule TS of each step included in the plurality of steps. The content CS of each step indicates each operation to be executed by the substrate processing unit 101. More specifically, the content CS of each step indicates each command to the control unit 201.

[0140] The recipe data RP shown in FIG. 7 indicates the content CS of each step having step numbers ST1 to ST10. The steps having step numbers ST1 to ST10 are executed in the order of step numbers ST. The time schedule TS (recipe data RP) indicates the time TM set for each step having step numbers ST1 to ST10. In other words, the time schedule TS (recipe data RP) indicates the execution time of each operation to be executed by the substrate processing unit 101. Hereinafter, the step having step number ST1 may be referred to as "step ST1." Similarly, a step such as "step number ST2" may be referred to as "step ST2," etc. In addition, the time TM set for each step may be referred to as "execution time TM."

[0141] 7, step ST1 indicates a command to move the first moving nozzle 41a from the first standby position to the processing position. An execution time TM of 2 seconds is set for step ST1. Step ST2 indicates a command to start rotation of the substrate W. An execution time TM of 0.5 seconds is set for step ST2.

[0142] Step ST3 represents a command to eject the chemical liquid from the first movable nozzle 41a. An execution time TM of 20 seconds is set for step ST3. Step ST4 represents a command to stop ejection of the chemical liquid from the first movable nozzle 41a. An execution time TM of 0.2 seconds is set for step ST4.

[0143] Step ST5 represents a command to move the first moving nozzle 41a from the processing position to the first standby position. An execution time TM of 2.0 seconds is set for step ST5. Step ST6 represents a command to move the second moving nozzle 41b from the second standby position to the processing position. An execution time TM of 2.0 seconds is set for step ST6.

[0144] Note that each of the steps with step numbers ST5 and ST6 further includes a command to eject a rinse liquid from the fixed nozzle 41c. That is, the recipe data RP further includes a command to eject a rinse liquid from the fixed nozzle 41c during execution of each of the steps with step numbers ST5 and ST6.

[0145] Step ST7 represents a command to eject the rinse liquid from the second movable nozzle 41b. An execution time TM of 20 seconds is set for step ST7. Step ST8 represents a command to stop the ejection of the rinse liquid from the second movable nozzle 41b. An execution time TM of 0.2 seconds is set for step ST8.

[0146] Step ST9 indicates a command to move the second moving nozzle 41b from the processing position to the second standby position. An execution time TM of 30 seconds is set for step ST9. Step ST10 indicates a command to stop the rotation of the substrate W. An execution time TM of 0.5 seconds is set for step ST10.

[0147] It should be noted that a rotation speed of the substrate W is also set for each of the steps with step numbers ST1 to ST10. The rotation speed of the substrate W set for step number ST9 is greater than the rotation speed of the substrate W set for each of the steps with step numbers ST2 to ST8. Therefore, when the step executed by the substrate processing unit 101 switches from step ST8 to step ST9, the rotation speed of the substrate W increases. It should be noted that the rotation speed set for each of the steps with step numbers ST1 and ST10 is 0 rpm.

[0148] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to FIGS. 1 to 8. FIG. 8 is a diagram showing an example of a time schedule TS of a plurality of steps defined in recipe data RP. Specifically, FIG. 8 shows a part of the time schedule TS of the recipe data RP exemplified in FIG. 7. The substrate processing unit 101 operates in accordance with the time schedule TS shown in FIG. 8. Therefore, FIG. 8 shows the flow of operation of the substrate processing unit 101. In detail, FIG. 8 shows the flow of processing executed by the control unit 201.

[0149] As shown in FIG. 8, the control unit 201 first executes step ST1 based on the recipe data RP. The control unit 201 also activates the timer 204 at the same time as starting step ST1. After starting step ST1, the control unit 201 references the timer 204 and executes step ST1 until the execution time TM set for step ST1 has elapsed. As a result, process S2 shown in FIG. 4 is executed during the period from time t0 to time t2. Specifically, the control unit 201 controls the first nozzle moving unit 5a to move the first moving nozzle 41a from the first standby position to the processing position. The period from time t0 to time t2 (the execution time TM of step ST1) is 2.0 seconds, as described with reference to FIG. 7.

[0150] When the execution time TM of step ST1 has elapsed, the control unit 201 executes step ST2 based on the recipe data RP until the execution time TM set for step ST2 has elapsed (from time t2 to time t3). As a result, process S3 shown in FIG. 4 is executed. Specifically, the control unit 201 controls the substrate rotation unit 3 to rotate the substrate W. The period from time t2 to time t3 (the execution time TM of step ST2) is 0.5 seconds, as described with reference to FIG. 7.

[0151] When the execution time TM for step ST2 has elapsed, the control unit 201 executes step ST3 based on the recipe data RP until the execution time TM set for step ST3 has elapsed (from time t3 to time t7). Step ST3 represents a command to discharge the chemical liquid from the first movable nozzle 41a. When the discharge of the chemical liquid starts, the control unit 201 controls the liquid receiver lifting / lowering unit 63 to move the guard unit 61 from the lower position to the upper position (step S4 in FIG. 4). In other words, when the step to be executed by the substrate processing unit 101 switches from step ST2 to step ST3, the control unit 201 moves the guard unit 61 from the lower position to the upper position.

[0152] As already described, the control unit 201 controls the discharge of the chemical liquid based on the recipe data RP and the apparatus parameters MP. Specifically, the control unit 201 transitions the first on-off valve 43a from the closed state to the open state at a timing delayed by the time set as the chemical liquid discharge delay time T1 from the timing specified by the recipe data RP. Therefore, the discharge of the chemical liquid starts at a timing delayed by the time set as the chemical liquid discharge delay time T1 (e.g., 1 second) from the timing (time t3) at which step ST2 switches to step ST3. In the example shown in FIG. 8, the discharge of the chemical liquid starts at time t4. As a result, the chemical liquid is discharged from the first movable nozzle 41a during the period from time t4 to time t7 (step S11 in FIG. 5). The time set as the chemical liquid discharge delay time T1 is set according to the time required for the guard part 61 to move from the lower position to the upper position.

[0153] When the execution time TM of step ST3 has elapsed, the control unit 201 executes step ST4 based on the recipe data RP until the execution time TM set for step ST4 has elapsed (from time t7 to time t8). As a result, process S12 shown in FIG. 5 is executed. Specifically, the control unit 201 controls the first liquid supply unit 4a to stop the discharge of the chemical liquid. The period from time t7 to time t8 (the execution time TM of step ST4) is 0.2 seconds, as described with reference to FIG. 7.

[0154] When the execution time TM of step ST4 has elapsed, the control unit 201 executes step ST5 based on the recipe data RP until the execution time TM set for step ST5 has elapsed (from time t8 to time t10). As a result, process S14 shown in FIG. 5 is executed. Specifically, the control unit 201 controls the first nozzle moving unit 5a to move the first moving nozzle 41a from the processing position to the first standby position. The period from time t8 to time t10 (execution time TM of step ST5) is 2.0 seconds, as described with reference to FIG. 7.

[0155] As already explained, step ST5 further includes a command to cause the fixed nozzle 41c to discharge the rinse liquid. Therefore, when starting step ST5, the control unit 201 controls the third liquid supply unit 4c to cause the fixed nozzle 41c to discharge the rinse liquid (step S13 in FIG. 5).

[0156] When the execution time TM of step ST5 has elapsed, the control unit 201 executes step ST6 based on the recipe data RP until the execution time TM set for step ST6 has elapsed (from time t10 to time t12). As a result, process S15 shown in FIG. 5 is executed. Specifically, the control unit 201 controls the second nozzle moving unit 5b to move the second moving nozzle 41b from the second standby position to the processing position. The period from time t10 to time t12 (the execution time TM of step ST6) is 2.0 seconds, as described with reference to FIG. 7.

[0157] As already explained, step ST6 further includes a command to cause the fixed nozzle 41c to discharge the rinse liquid. Therefore, during execution of steps ST5 and ST6, the control unit 201 controls the third liquid supply unit 4c to cause the fixed nozzle 41c to discharge the rinse liquid (step S13 in FIG. 5).

[0158] When the execution time TM of step ST6 has elapsed, the control unit 201 controls the third liquid supply unit 4c to stop the fixed nozzle 41c from discharging the rinse liquid (step S16 in FIG. 5). Furthermore, when the execution time TM of step ST6 has elapsed, the control unit 201 executes step ST7 based on the recipe data RP until the execution time TM set for step ST7 has elapsed (after time t12). As a result, step S17 shown in FIG. 5 is executed. Specifically, the control unit 201 controls the second liquid supply unit 4b to discharge the rinse liquid from the second movable nozzle 41b. Thereafter, steps ST8 to ST10 are executed sequentially.

[0159] Next, the frame rate adjustment process will be described with reference to FIGS. 1 to 9. As shown in FIG. 8, the multiple images GD generated by the imaging section 150 described with reference to FIGS. 2 and 3 include multiple images GD generated in the target period HF and multiple images GD generated in a period LF other than the target period HF. Hereinafter, an image GD generated in the target period HF may be referred to as a "first image GD1." Similarly, an image GD generated in a period LF other than the target period HF may be referred to as a "second image GD2." Furthermore, a period LF other than the target period HF may be referred to as a "non-target period LF."

[0160] The target period HF indicates a period including the timing of step switching, which includes the timing of the start of the first step (step ST1) of the multiple steps defined in the recipe data RP.

[0161] More specifically, the target period HF includes a first period immediately before the step changes, the timing of the step change, and a second period immediately after the step changes. In this embodiment, the length of the first period is 1 second, and the length of the second period is 3 seconds. The length of the first period is pre-stored in the storage unit 202. Similarly, the length of the second period is pre-stored in the storage unit 202. Note that the target period HF, which includes the start timing of the first step, includes only the second period.

[0162] In the example shown in FIG. 8, the period from time t0 to time t2 is the target period HF including the start timing of step ST1. The period from time t1 to time t3 is the target period HF including the timing (time t2) when step ST1 switches to step ST2. The period from time t2 to time t5 is the target period HF including the timing (time t3) when step ST2 switches to step ST3. The period from time t5 to time t6 is the non-target period LF. The period from time t6 to time t8 is the target period HF including the timing (time t7) when step ST3 switches to step ST4. The period from time t7 to time t10 is the target period HF including the timing (time t8) when step ST4 switches to step ST5. The period from time t9 to time t12 is the target period HF including the timing (time t10) when step ST5 switches to step ST6. The period from time t11 to time t13 is a target period HF that includes the timing (time t12) when step ST6 switches to step ST7.

[0163] Specifically, since the execution time TM (2 seconds) of step ST1 is shorter than the length of the second period (3 seconds), the target period HF including time t0 includes the entire period of step ST1.

[0164] The first period of the target period HF, which includes time t2, includes the period from time t1 to time t2. In this embodiment, the execution time TM (0.5 seconds) of step ST2 is shorter than the length of the second period (3 seconds), so the second period of the target period HF, which includes time t2, includes the entire period of step ST2.

[0165] Furthermore, because the execution time TM (0.5 seconds) of step ST2 is shorter than the length of the first period (1 second), the first period of the target period HF, which includes time t3, includes the entire period of step ST2. The second period of the target period HF, which includes time t3, includes the period from time t3 to time t5. Because the execution time TM (20 seconds) of step ST3 is longer than the length of the second period (3 seconds), the period from time t5 to time t6 becomes the non-target period LF.

[0166] Therefore, in the example shown in FIG. 8, the period from time t0 to time t5 is the target period HF.

[0167] The first period of the target period HF, which includes time t7, includes the period from time t6 to time t7. In this embodiment, the execution time TM (0.2 seconds) of step ST4 is shorter than the length of the second period (3 seconds), so the second period of the target period HF, which includes time t7, includes the entire period of step ST4.

[0168] Furthermore, since the execution time TM (0.2 seconds) of step ST4 is shorter than the length of the first period (1 second), the first period of the target period HF, which includes time t8, includes the entire period of step ST4.

[0169] Furthermore, since the execution time TM (2 seconds) of step ST5 is shorter than the length of the second period (3 seconds), the second period of the target period HF, which includes time t8, includes the entire period of step ST5.

[0170] The first period of the target period HF, which includes time t10, includes the period from time t9 to time t10. In this embodiment, the execution time TM (2 seconds) of step ST6 is shorter than the length of the second period (3 seconds), so the second period of the target period HF, which includes time t10, includes the entire period of step ST6.

[0171] The first period of the target period HF including time t12 includes the period from time t11 to time t12. The second period of the target period HF including time t12 includes the period from time t12 to time t13.

[0172] Therefore, in the example shown in FIG. 8, the period from time t6 to time t13 is the target period HF.

[0173] 9(a) and 9(b) are diagrams schematically illustrating a first example of the frame rate adjustment process. The frame rate adjustment process is a process of lowering the frame rate of the image GD (second image GD2) generated in the non-target period LF below the frame rate of the image GD (first image GD1) generated in the target period HF. As shown in FIGS. 9(a) and 9(b), the control unit 201 stores the first image GD1 and the second image GD2 in the storage unit 202 at their corresponding frame rates. More specifically, the control unit 201 stores the first image GD1 and the second image GD2 after the frame rate adjustment process in the storage unit 202. Therefore, in step S22 (storage step) illustrated in FIG. 6, the first image GD1 and the second image GD2 after the frame rate adjustment process are stored in the storage unit 202.

[0174] 9(a), the control unit 201 does not change the frame rate of the first image GD1 (image data) from the frame rate set in the imaging unit 150. The control unit 201 stores the first image GD1 (image data) in the storage unit 202 at the frame rate set in the imaging unit 150. Therefore, the image GD (image data) generated during the period including the timing of the step change is stored in the storage unit 202 at the frame rate set in the imaging unit 150. In other words, all of the images GD (image data) generated during the target period HF are stored in the storage unit 202.

[0175] 9(b), the control unit 201 sets the frame rate of the second image GD2 (image data) to be lower than the frame rate set in the imaging unit 150. The control unit 201 stores the second image GD2 (image data) in the storage unit 202 at a frame rate lower than the frame rate set in the imaging unit 150. Therefore, the image GD (image data) generated during a period that does not include the timing at which the step switches is stored in the storage unit 202 at a frame rate lower than the frame rate set in the imaging unit 150.

[0176] 9(b), only some of the multiple images GD (image data) generated during the non-target period LF are stored in the storage unit 202. Specifically, the control unit 201 stores the second images GD2 (image data) in the storage unit 202 at a cycle that is slower than the cycle at which the imaging unit 150 generates the images GD (image data) (the cycle at which the imaging unit 150 captures images).

[0177] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to Figures 1 to 10. Figure 10 is a diagram showing the flow of a first example of frame rate adjustment processing. The frame rate adjustment processing shown in Figure 10 is executed in the storage step (step S22) described with reference to Figure 6.

[0178] The frame rate adjustment process is executed by the control unit 201. The frame rate adjustment process shown in Fig. 10 is started in response to the imaging unit 150 being caused to start imaging. Specifically, when the control unit 201 causes the imaging unit 150 to start imaging, the control unit 201 executes the process shown in Fig. 10 every time it acquires an image GD (image data) from the imaging unit 150. More specifically, the control unit 201 executes the process shown in Fig. 10 by referring to a time schedule TS of the multiple steps defined in the recipe data RP and the elapsed time from the start of execution of the first step (step ST1) of the multiple steps.

[0179] A first example of the frame rate adjustment process includes a process of deleting some of the second images GD2 (image data) to make the frame rate of the second images GD2 (image data) lower than the frame rate of the first images GD1 (image data).

[0180] Specifically, the control unit 201 acquires an image GD frame by frame from the imaging unit 150. When the control unit 201 acquires the image GD from the imaging unit 150, the control unit 201 determines whether or not the acquired image GD is an image GD (first image GD1) for the target period HF (step S31). Specifically, the control unit 201 starts timing by the timer 204 when causing the substrate processing unit 101 to start the operation of step ST1. Then, the control unit 201 determines whether or not the image GD acquired from the imaging unit 150 is the first image GD1 by referring to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP.

[0181] When the control unit 201 determines that the image GD acquired from the imaging unit 150 is the image GD (first image GD1) of the target period HF (Yes in step S31), the control unit 201 stores the acquired image GD (first image GD1) in the storage unit 202 (step S35). That is, the control unit 201 stores all of the images GD (first images GD1) of the target period HF in the storage unit 202. Therefore, the images GD (first images GD1) of the target period HF are stored in the storage unit 202 at the frame rate set in the imaging unit 150. In other words, the control unit 201 stores the first images GD1 in the storage unit 202 at a cycle equal to the cycle at which the imaging unit 150 generates the images GD (the cycle at which the imaging unit 150 captures images).

[0182] On the other hand, when the control unit 201 determines that the image GD acquired from the imaging unit 150 is not the image GD (first image GD1) of the target period HF (No in step S31), it decides whether to delete the acquired image GD (second image GD2) (step S32).

[0183] If the control unit 201 determines to delete the acquired second image GD2 (Yes in step S32), it deletes the acquired second image GD2 (step S33). If the control unit 201 determines not to delete the acquired second image GD2 (No in step S32), it saves the acquired second image GD2 in the storage unit 202 (step S35).

[0184] Specifically, the control unit 201 stores the second image GD2 in the storage unit 202 at a cycle slower than the cycle at which the imaging unit 150 generates the image GD (the cycle at which the imaging unit 150 captures images). As a result, the second image GD2 is stored in the storage unit 202 at a frame rate slower than the frame rate set in the imaging unit 150.

[0185] Specifically, a set value for the period for saving the second image GD2 in the storage unit 202 (the frame rate of the second image GD2) is stored in advance in the storage unit 202. The control unit 201 saves the second image GD2 in the storage unit 202 based on the set value for the period for saving the second image GD2 in the storage unit 202. The period for saving the second image GD2 in the storage unit 202 is, for example, 0.3 fps. In this case, the control unit 201 saves the image GD (second image GD2) generated in the non-target period LF in the storage unit 202 at a rate of approximately once every 3.33 seconds. Note that the period for saving the second image GD2 in the storage unit 202 (the frame rate of the second image GD2) is not particularly limited as long as it is lower than the period for saving the first image GD1 in the storage unit 202 (the frame rate of the first image GD1). For example, the frame rate of the second image GD2 may be 0.1 fps or 1 fps.

[0186] After deleting the second image GD2 (step S33), the control unit 201 determines whether or not the imaging by the imaging unit 150 has finished (step S34). After saving the image GD in the storage unit 202 (step S35), the control unit 201 determines whether or not the imaging by the imaging unit 150 has finished (step S34). Specifically, the control unit 201 determines whether or not the imaging by the imaging unit 150 has finished by referring to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP.

[0187] If the control unit 201 determines that the imaging unit 150 has not finished capturing images (No in step S34), it acquires the image GD from the imaging unit 150 and executes the processes from step S31 onwards again. If the control unit 201 determines that the imaging unit 150 has finished capturing images (Yes in step S34), it ends the process shown in FIG.

[0188] 10, the control unit 201 only executes the process of lowering the frame rate of the second image GD2 (the period at which the second image GD2 is saved in the storage unit 202) below the frame rate of the first image GD1 (the period at which the first image GD1 is saved in the storage unit 202), but the control unit 201 may also execute the process of lowering the frame rate of the first image GD1 below the frame rate set in the imaging unit 150 when executing the frame rate adjustment process. For example, if the frame rate set in the imaging unit 150 is 120 fps, the control unit 201 may delete some of the multiple first images GD1 generated by the imaging unit 150 so that the frame rate of the first image GD1 (the period at which the first image GD1 is saved in the storage unit 202) becomes 60 fps.

[0189] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to Figures 1 to 8 and 11. Figure 11 is a diagram showing the flow of a second example of the frame rate adjustment process. The frame rate adjustment process shown in Figure 11 is performed in the imaging process (process S21) described with reference to Figure 6.

[0190] 11 starts in response to the start of image capture by the image capture unit 150. In detail, the control unit 201 executes the process shown in FIG. 11 by referring to the time schedule TS of the multiple steps defined in the recipe data RP and the elapsed time from the start of execution of the first step (step ST1) of the multiple steps.

[0191] A second example of the frame rate adjustment process includes a process of changing the frame rate set in the imaging unit 150 between the target period HF and the non-target period LF, thereby making the frame rate of the second image GD2 (image data) lower than the frame rate of the first image GD1 (image data).

[0192] Specifically, when the control unit 201 causes the imaging unit 150 to start capturing an image, the control unit 201 sets a first frame rate for the imaging unit 150 (step S41). The first frame rate may be, for example, 120 fps, 60 fps, or 30 fps.

[0193] After setting the first frame rate to the imaging section 150, the control section 201 determines whether or not imaging by the imaging section 150 has ended (step S42). Specifically, when the control section 201 causes the substrate processing unit 101 to start the operation of step ST1, the control section 201 causes the timer 204 to start measuring time. Then, the control section 201 determines whether or not imaging by the imaging section 150 has ended by referring to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP.

[0194] When the control unit 201 determines that the imaging unit 150 has not finished capturing images (No in step S42), it refers to the elapsed time measured by the timer 204 and determines whether the elapsed time indicates the start timing of the non-target period LF (step S43).

[0195] If the control unit 201 determines that the elapsed time does not indicate the start timing of the non-target period LF (No in step S43), the process returns to step S42, and the control unit 201 determines whether or not the image capturing by the image capturing unit 150 has ended.

[0196] When the control unit 201 determines that the elapsed time indicates the start timing of the non-target period LF (Yes in step S43), it sets a second frame rate for the imaging unit 150 (step S44). The second frame rate indicates a value lower than the first frame rate. For example, the second frame rate may be 1.0 fps, 0.3 fps, or 0.1 fps.

[0197] After setting the second frame rate for the image capturing section 150, the control section 201 determines whether or not image capturing by the image capturing section 150 has ended, similar to step S42 (step S45).

[0198] When the control unit 201 determines that the imaging by the imaging unit 150 has not finished (No in step S45), it refers to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP and determines whether the elapsed time indicates the start timing of the target period HF (step S46).

[0199] If the control unit 201 determines that the elapsed time does not indicate the start timing of the target period HF (No in step S46), the control unit 201 returns to step S45 and determines whether or not the image capturing by the image capturing unit 150 has ended.

[0200] When the control unit 201 determines that the elapsed time indicates the start timing of the target period HF (Yes in step S46), the process returns to step S41 and sets the imaging unit 150 to the first frame rate.

[0201] When the control unit 201 determines that the image capturing by the image capturing unit 150 has ended (Yes in step S42 or step S45), the control unit 201 ends the processing shown in FIG.

[0202] Next, the management data MD will be described with reference to Fig. 1 to Fig. 12(a). As already explained, the management data MD is data for managing the images GD stored in the storage unit 202. Fig. 12(a) is a diagram showing an example of the management data MD. The management data MD shown in Fig. 12(a) is table data (management table).

[0203] 12(a), the management data MD may associate index information ID, storage location information PD, shooting date and time information CD, and saving date and time information SD for each image GD stored in the storage unit 202. Specifically, the control unit 201 acquires or creates the index information ID, storage location information PD, shooting date and time information CD, and saving date and time information SD, and stores them in the storage unit 202 in association with the image GD. In more detail, the control unit 201 may register the index information ID, storage location information PD, shooting date and time information CD, and saving date and time information SD in a management table.

[0204] The index information ID indicates an index assigned to each image GD stored in the storage unit 202. The index information ID may indicate, for example, a sequential number. Specifically, the control unit 201 may assign a number to each image GD stored in the storage unit 202 in the order in which the images are stored in the storage unit 202.

[0205] The storage location information PD indicates the location where each image GD is stored. The storage location information PD may indicate, for example, the file path of each image GD (each image file).

[0206] The image capture date and time information CD indicates the date and time when each image GD was generated. The control unit 201 references the clock unit 203 to obtain, for each image GD, the date and time when the image capture unit 150 was caused to capture the image.

[0207] The storage date and time information SD indicates the date and time when each image GD was stored in the storage unit 202. The control unit 201 references the clock unit 203 to obtain the date and time when the image GD was stored in the storage unit 202.

[0208] According to this embodiment, the management data MD includes the image capture date and time information CD and the storage date and time information SD, which makes it easy to search for a desired image GD from among the images GD stored in the storage unit 202.

[0209] Next, the storage rules SR will be described with reference to Figures 1 to 12(b). As already described, the storage rules SR indicate conditions for the images GD to be stored in the storage unit 202. Figure 12(b) is a diagram showing an example of the storage rules SR.

[0210] 12(b) includes a first condition SR1, a second condition SR2, and a third condition SR3. The first condition SR1 and the second condition SR2 associate the storage period of the image GD with the data format of the image GD (image data).

[0211] The storage period indicates the period of time that has elapsed since the image GD was saved in the storage unit 202. The storage period is calculated by the control unit 201 with reference to the saved date and time information SD in the management data MD and the current date and time acquired from the clock unit 203. The data format indicates the data format of the image GD (image data) saved in the storage unit 202.

[0212] Specifically, the first condition SR1 indicates that an image GD whose storage period is less than a first storage period is to be stored in the storage unit 202 in a first data format. The second condition SR2 indicates that an image GD whose storage period is equal to or greater than the first storage period and less than a second storage period is to be stored in the storage unit 202 in a second data format. The first storage period is, for example, three months. The second storage period is a period longer than the first storage period. The second storage period is, for example, six months.

[0213] The image GD in the first data format may be, for example, RAW data (primary data) or image data in a lossless compression format. The lossless compression format may be, for example, PNG or GIF. The first condition SR1 allows the image GD to be stored in the storage unit 202 in high image quality until the first storage period has elapsed.

[0214] The second data format indicates a data format in which the amount of data is compressed compared to the first data format. An image GD in the second data format indicates, for example, image data in a lossy compression format. The lossy compression format may indicate, for example, JPEG format. The second condition SR2 makes it possible to compress the amount of data of an image GD whose first storage period has elapsed. This makes it possible to reduce the capacity of the storage unit 202.

[0215] The third condition SR3 indicates a condition for deleting an image GD from the storage unit 202. Specifically, the third condition SR3 indicates that an image GD whose storage period is equal to or longer than the second storage period is to be deleted from the storage unit 202.

[0216] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to FIGS. 1 to 13(a).

[0217] First, the saving step (step S22) will be described with reference to FIG. 6. In this embodiment, in the saving step (step S22), the image GD is saved in the storage unit 202 in a first data format. More specifically, the control unit 201 refers to the saving rule SR and causes the image GD to be saved in the storage unit 202 in the first data format. For example, if the first data format indicates RAW data, the control unit 201 saves the image GD (image data) acquired from the imaging unit 150 as is in the storage unit 202. If the first data format indicates a lossless compression format, the control unit 201 converts the image GD (image data) acquired from the imaging unit 150 from RAW data to image data in a lossless compression format and saves the converted image data in the storage unit 202.

[0218] 13(a) is a diagram showing a conversion step included in the image data storage method of this embodiment. The conversion step includes a step of converting the data format of an image GD stored in the storage unit 202 that has been stored for a first storage period from a first data format to a second data format.

[0219] The conversion step shown in Fig. 13(a) is executed by, for example, the control unit 201. Therefore, Fig. 13(a) shows the flow of processing executed by the control unit 201. Specifically, the control unit 201 executes a conversion process. The conversion process refers to processing for converting the data format of an image GD stored in the storage unit 202, of which a first storage period has elapsed since it was stored in the storage unit 202, from a first data format to a second data format.

[0220] Specifically, the control unit 201 refers to the storage date and time information SD of the management data MD and the current date and time acquired from the clock unit 203 to determine whether the storage period of the image GD is less than the first storage period (step S51).

[0221] If the control unit 201 determines that the storage period of the image GD is less than the first storage period, it ends the process shown in Fig. 13(a). If the control unit 201 determines that the storage period of the image GD is not less than the first storage period (No in step S51), it determines whether the storage period of the image GD is equal to or greater than the first storage period and less than the second storage period (step S52).

[0222] If the control unit 201 determines that the storage period of the image GD is not equal to or longer than the first storage period and shorter than the second storage period (No in step S52), the control unit 201 ends the processing shown in Fig. 13(a). If the control unit 201 determines that the storage period of the image GD is equal to or longer than the first storage period and shorter than the second storage period (Yes in step S52), the control unit 201 converts the data format of the image GD from the first data format to the second data format and stores the image GD in the second data format in the storage unit 202 (step S53). As a result, the processing shown in Fig. 13(a) ends. The control unit 201 may, for example, overwrite the image GD in the second data format over the image GD in the first data format.

[0223] Next, the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to FIGS. 1 to 13(b).

[0224] 13(b) is a diagram showing a deletion step included in the image data storage method of this embodiment. The deletion step includes a step of deleting from the storage unit 202, among the images GD stored in the storage unit 202, images GD for which the second storage period has elapsed since they were stored in the storage unit 202.

[0225] The deletion step shown in Fig. 13(b) is executed by, for example, the control unit 201. Therefore, Fig. 13(b) shows the flow of processing executed by the control unit 201. Specifically, the control unit 201 executes the deletion processing. The deletion processing refers to processing of deleting from the storage unit 202, among the images GD stored in the storage unit 202, images GD for which the second storage period has elapsed since they were stored in the storage unit 202.

[0226] Specifically, the control unit 201 refers to the storage date and time information SD of the management data MD and the current date and time acquired from the clock unit 203 to determine whether the storage period of the image GD is equal to or longer than the second storage period (step S61).

[0227] If the control unit 201 determines that the storage period of the image GD is not equal to or longer than the second storage period (No in step S61), the control unit 201 ends the processing shown in Fig. 13(b). If the control unit 201 determines that the storage period of the image GD is equal to or longer than the second storage period (Yes in step S61), the control unit 201 deletes the image GD from the storage unit 202 (step S62). As a result, the processing shown in Fig. 13(b) ends.

[0228] In this embodiment, the management data MD includes the image capture date and time information CD and the storage date and time information SD, but either the image capture date and time information CD or the storage date and time information SD may be included in the management data MD. If the management data MD does not include the storage date and time information SD, the control unit 201 may refer to the image capture date and time information CD and execute the conversion process and deletion process described with reference to Figures 13(a) and 13(b).

[0229] 1 to 13(b), the first embodiment of the present invention has been described. According to this embodiment, the period of the moving images immediately before and after the step change (target period HF) is high, so that it is possible to sufficiently verify errors (abnormalities) that are likely to occur immediately before or after the step change.

[0230] Furthermore, according to this embodiment, the period of the moving images during the period other than the target period HF (non-target period LF) is low, so the amount of data to be stored can be reduced. Therefore, the image GD can be stored for a long period of time. Furthermore, the capacity required to store the image GD can be reduced.

[0231] Furthermore, according to this embodiment, since the image GD is saved frame by frame, it is possible to save the image GD with higher quality than when the image GD captured by the imaging unit 150 is compressed into a video format. This allows the worker to check the high-quality image GD and verify the details. This makes it possible to thoroughly verify errors (abnormalities).

[0232] Furthermore, according to this embodiment, high-quality images can be stored because image data (RAW data) or losslessly compressed image data acquired from the imaging unit 150 is stored in the storage unit 202. Therefore, it becomes possible to thoroughly verify errors (abnormalities).

[0233] Furthermore, according to this embodiment, image GDs whose storage period is equal to or longer than the first storage period can be converted into image GDs in the second data format, thereby reducing the amount of data to be stored. This reduces the capacity required to store image GDs.

[0234] Furthermore, according to this embodiment, images GD whose storage period is equal to or longer than the second storage period are deleted from the storage unit 202, so the capacity required to store images GD can be reduced.

[0235] In this embodiment, the first predetermined time is 1 second, but the length of the first predetermined time is not particularly limited. Similarly, the length of the second predetermined time is not particularly limited. For example, the first predetermined time may be 0.5 seconds or 1.5 seconds. The second predetermined time may be 2.5 seconds or 3.5 seconds. In this embodiment, the length of the first predetermined time is shorter than the second predetermined time, but the length of the first predetermined time may be equal to or longer than the second predetermined time.

[0236] Furthermore, in this embodiment, the control unit 201 operates the clock unit 203 to obtain the current date and time, but the control unit 201 may also be communicatively connected to an external time server via a line network such as the Internet, and obtain the current date and time from the external time server.

[0237] In addition, in this embodiment, the control unit 201 activates the timer 204 to obtain the time that has passed since the start of the processing procedure (elapsed time), but the control unit 201 may have a timer function. Specifically, the control unit 201 may execute a computer program stored in the storage unit 202 to measure the time that has passed since the start of the processing procedure (elapsed time).

[0238] Next, a first modified example of the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to Figure 14. The first modified example differs from the embodiment described with reference to Figures 1 to 13(b) in that the image GD (image data) is stored in a data storage unit ES1 external to the substrate processing system 1000. Hereinafter, the external data storage unit ES1 may be referred to as an "external data storage unit ES1."

[0239] 14 is a block diagram of a first modified example of the substrate processing system 1000 of this embodiment. As shown in FIG.

[0240] The interface unit 205 exchanges information, data, or signals with the external data storage unit ES1. For example, the interface unit 205 may be electrically connected to the external data storage unit ES1 to input and output information, data, or signals to and from the external data storage unit ES1. In this case, the control unit 201 stores the first image GD1 and the second image GD2 after the frame rate adjustment process in the external data storage unit ES1 via the external data storage unit ES1.

[0241] For example, the interface unit 205 may include a slot or a USB terminal. The external data storage unit ES1 may include, for example, a card-shaped information carrier such as an SD memory card, a USB memory, or a hard disk drive. The card-shaped information carrier is inserted into the slot and electrically connected to the slot. The USB memory is inserted into the USB terminal and electrically connected to the USB terminal. The hard disk drive is electrically connected to the USB terminal via a USB cable.

[0242] Alternatively, the interface unit 205 may include an optical disc drive. The external data storage unit ES1 may include an optical disc such as a CD, DVD, or Blu-ray disc. In this case, the control unit 201 controls the optical disc drive to write the first image GD1 and the second image GD2 after the frame rate adjustment process onto the optical disc.

[0243] In the first modified example shown in FIG. 14, the first image GD1 and the second image GD2 after the frame rate adjustment process are stored in the external data storage unit ES1 via the interface unit 205. However, the control device 200 may store the image GD in another computer system. That is, the external data storage unit ES1 may be another computer system. For example, the control device 200 may be communicatively connected to the other computer system via a cable and store the image GD (image data) in the other computer system. Alternatively, the control device 200 may be communicatively connected to the other computer system via a line network such as the Internet and store the image GD (image data) in the other computer system. The other computer system may be a general-purpose computer or a dedicated computer. The other computer system may be a server.

[0244] Next, a second modified example of the substrate processing system 1000 and the image data storage method of this embodiment will be described with reference to Fig. 15. The second modified example differs from the embodiment described with reference to Figs. 1 to 14 in that the image GD is stored in the data storage unit 400.

[0245] 15 is a block diagram of a second modified example of the substrate processing system 1000 of the present embodiment. As shown in FIG. 15, in the second modified example, the substrate processing system 1000 includes an apparatus main body 100, a control device 200, and a data storage unit 400. The control device 200 further includes a first communication unit 206.

[0246] The first communication unit 206 is connected to a network and performs communication with the data storage unit 400. The network includes, for example, the Internet, a local area network (LAN), a public telephone network, and a short-range wireless network. The first communication unit 206 includes a communication device. The first communication unit 206 is, for example, a network interface controller.

[0247] The first communication unit 206 is controlled by the control unit 201 and exchanges information, data, or signals with the data storage unit 400. For example, the first communication unit 206 transmits the image GD (image data) acquired from the imaging unit 150, the recipe data RP, elapsed time information, and imaging date and time information CD to the data storage unit 400. The elapsed time information indicates the time (elapsed time) that has elapsed since the start of the processing procedure.

[0248] The data storage unit 400 includes a processing unit 401, a memory unit 402, a second communication unit 403, and a clock unit 404. The data storage unit 400 may be, for example, a general-purpose computer or a dedicated computer. The data storage unit 400 may be a server. Hereinafter, the memory unit 402 may be referred to as a "second memory unit 402." Furthermore, the clock unit 203 may be referred to as a "first clock unit 203," and the clock unit 404 may be referred to as a "second clock unit 404."

[0249] The second communication unit 403 is connected to a network and communicates with the control device 200 (first communication unit 206). The second communication unit 403 includes a communication device. The second communication unit 403 is, for example, a network interface controller. The second communication unit 403 is controlled by the processing unit 401 and exchanges information, data, or signals with the control device 200 (first communication unit 206). For example, the second communication unit 403 receives an image GD (image data), recipe data RP, elapsed time information, and imaging date and time information CD from the control device 200 (first communication unit 206).

[0250] Similar to the first clock unit 203, the second clock unit 404 is controlled by the processing unit 401 and measures the current date and time. The processing unit 401 acquires the current date and time from the second clock unit 404. The processing unit 401 may also acquire the current date and time from an external time server by communicably connecting to the external time server via a line network such as the Internet.

[0251] The second storage unit 402 has a main storage unit and an auxiliary storage unit. The main storage unit includes, for example, a semiconductor memory. The auxiliary storage unit includes, for example, a hard disk drive. The second storage unit 402 stores the storage rules SR in advance.

[0252] The processing unit 401 includes a processor. The processing unit 401 may include, for example, a CPU, a GPU, an NPU, or a quantum computer. Alternatively, the processing unit 401 may include a general-purpose computing device or a special-purpose computing device. For example, the processing unit 401 may include an FPGA or an ASIC.

[0253] 15, the control unit 201 controls the substrate processing unit 101 by executing the processes described with reference to FIGS. 4 and 5. The control unit 201 further executes the imaging process (step S21) described with reference to FIG. 6. In the second modification, the control unit 201 is an example of an "operation control unit."

[0254] The processing unit 401 executes the saving process (step S22) described with reference to Fig. 6 and the frame rate adjustment process described with reference to Fig. 10. Therefore, the processing unit 401 saves the first image GD1 and the second image GD2 after the frame rate adjustment process in the second storage unit 402. The processing unit 401 also creates management data MD and stores it in the second storage unit 402. The processing unit 401 further executes the conversion process described with reference to Fig. 13(a) and the saving process described with reference to Fig. 13(b). The frame rate adjustment process shown in Fig. 11 is executed by the control unit 201.

[0255] [Embodiment 2] Next, a second embodiment of the present invention will be described with reference to Figures 2, 7, and 16(a) to 21. However, only differences from the first embodiment will be described, and a description of the same aspects as in the first embodiment will be omitted. The second embodiment differs from the first embodiment in that the image GD is cropped.

[0256] Fig. 16(a) is a block diagram of the substrate processing system 1000 according to the second embodiment. Fig. 16(b) is a diagram showing an example of trimming area data TR. As shown in Fig. 16(a), in the second embodiment, the storage unit 202 further stores the trimming area data TR. Furthermore, the control unit 201 trims the image GD by referring to the trimming area data TR.

[0257] Cropping refers to the process of cutting out the portion of the image GD (frame image) outside the cropping range from the image GD. In other words, cropping refers to the process of cutting out the portion of the image GD (frame image) surrounding the cropping range from the image GD.

[0258] The trimming range is set in the trimming range data TR. The trimming range data TR indicates at least one trimming range that is set in advance for at least some specific steps among the multiple steps defined in the recipe data RP. Specifically, the trimming range is set to a location in a specific step where an error (abnormality) is likely to occur. The trimming range indicates a rectangular area.

[0259] As shown in Fig. 16(b), the trimming range data TR associates the content of each step with the trimming range. In the example shown in Fig. 16(b), the specific steps include a step of moving the first movable nozzle 41a, a step of moving the second movable nozzle 41b, a step of discharging the treatment liquid, and a step of stopping the discharge of the treatment liquid.

[0260] Specifically, the step of moving the first movable nozzle 41a includes steps ST1 and ST5 described with reference to Fig. 7. The step of moving the second movable nozzle 41b includes steps ST6 and ST9 described with reference to Fig. 7. The step of discharging the treatment liquid includes steps ST3 and ST7 described with reference to Fig. 7. The step of stopping the discharge of the treatment liquid includes steps ST4 and ST8 described with reference to Fig. 7.

[0261] For example, the trimming range data TR associates a first trimming range TR1{(x1, y1), W1, H1} with the step of moving the first movable nozzle 41a, a second trimming range TR2{(x2, y2), W2, H2} with the step of moving the second movable nozzle 41b, a third trimming range TR3{(x3, y3), W3, H3} with the step of ejecting the processing liquid, and a third trimming range TR3{(x3, y3), W3, H3} with the step of stopping the ejection of the processing liquid.

[0262] In the example shown in Figure 16(b), the trimming range indicates the coordinate of the upper left corner of the trimming range, the horizontal width of the trimming range, and the vertical height of the trimming range. The origin of the coordinates is the upper left corner of the image GD (frame image). The width and height values ​​indicate the number of pixels in the image GD (frame image).

[0263] Fig. 17(a) is a diagram showing the first trimming range TR1. Specifically, Fig. 17(a) shows the trimming range set for the image GD generated by the imaging unit 150 during the step of moving the first moving nozzle 41a from the first standby position to the processing position (step ST1).

[0264] 17(a), the first trimming range TR1 is set so that the entire movement range of the first movable nozzle 41a falls within the first trimming range TR1. By setting the first trimming range TR1, even if the trimmed image GD is saved, it becomes possible to verify whether an error (abnormality) has occurred in the movement of the first movable nozzle 41a. Similar to the first trimming range TR1, the second trimming range TR2 is also set so that the entire movement range of the second movable nozzle 41b falls within the second trimming range TR2.

[0265] Fig. 17(b) is a diagram showing a third trimming range TR3. Specifically, Fig. 17(b) shows the trimming range set for the image GD generated by the imaging unit 150 during the step of discharging the chemical solution from the first movable nozzle 41a (step ST3).

[0266] As shown in FIG. 17(b), the third trimming range TR3 is set so that the tip of the first movable nozzle 41a positioned at the processing position and the center (predetermined location) of the substrate W are within the third trimming range TR3. By setting the third trimming range TR3, even if the trimmed image GD is saved, it is possible to verify whether an error (abnormality) has occurred in the discharge of the chemical liquid and the stop of the discharge of the chemical liquid. In this embodiment, like the first movable nozzle 41a, the second movable nozzle 41b also discharges the processing liquid (rinse liquid) toward the center of the substrate W from a position (processing position) facing the center of the substrate W. Therefore, the third trimming range TR3 is set, like the first movable nozzle 41a, for the image GD generated by the imaging unit 150 during the execution of the step of discharging the rinse liquid from the second movable nozzle 41b (step ST7).

[0267] Next, a first modified example of the trimming range data TR will be described with reference to Figures 18(a) and 18(b). Figure 18(a) is a diagram showing a first modified example of the trimming range data TR. As shown in Figure 18(a), multiple trimming ranges may be set for a specific step.

[0268] 18(a), the step of discharging the treatment liquid is associated with trimming range TR3a{(x3, y3), W3, H3}, trimming range TR3b{(x4, y4), W4, H4}, and trimming range TR3c{(x5, y5), W4, H4}. Similarly to the step of discharging the treatment liquid, the step of stopping the discharge of the treatment liquid is associated with trimming range TR3a to trimming range TR3c.

[0269] Fig. 18(b) is a diagram showing an example of trimming ranges set in multiple locations. Specifically, Fig. 18(b) shows trimming ranges set for image GD generated by imaging unit 150 during execution of the step of discharging chemical solution from first moving nozzle 41a (step ST3). Specifically, Fig. 18(b) shows trimming range TR3a, trimming range TR3b, and trimming range TR3c.

[0270] 18(b), the trimming range TR3a is set so that the tip of the first moving nozzle 41a positioned at the processing position and the center (predetermined location) of the substrate W fall within the trimming range TR3a. The trimming range TR3b is set so that the entire range of movement of a portion of the upper end of the guard part 61 falls within the trimming range TR3b. The trimming range TR3c is set so that the entire range of movement of another portion of the upper end of the guard part 61 falls within the trimming range TR3c.

[0271] As already explained, in the step of discharging the liquid medicine (step ST3), the guard portion 61 moves from the lower position to the upper position before starting to discharge the liquid medicine. Therefore, by setting the trimming ranges TR3b and TR3c for the step of discharging the liquid medicine (step ST3), even if the trimmed image GD is saved, it becomes possible to verify whether an error (abnormality) has occurred in the movement of the guard portion 61.

[0272] Next, a second modified example of the trimming range data TR will be described with reference to Fig. 19. Fig. 19 is a diagram showing an example of the image GD when an error occurs. In detail, Fig. 19 shows an example of an error (abnormality) that occurs immediately before the first moving nozzle 41a moves from the processing position to the first standby position.

[0273] As already explained, in this embodiment, when the discharge of the chemical liquid by the first movable nozzle 41a is stopped, the fixed nozzle 41c discharges the rinsing liquid toward the center (predetermined location) of the substrate W. Therefore, for example, if the stop of the discharge of the chemical liquid is delayed from the scheduled time, the discharge of the chemical liquid by the first movable nozzle 41a and the discharge of the rinsing liquid by the fixed nozzle 41c are performed simultaneously, as shown in Fig. 19. As a result, an error (abnormality) may occur in which the continuous flows of the two liquids collide at the center (predetermined location) of the substrate W.

[0274] In contrast, as shown in Figure 19, by setting a trimming range (trimming range TR3c) that includes the center (predetermined location) of the substrate W for the step of stopping the discharge of the chemical liquid, it becomes possible to verify errors (abnormalities) that are likely to occur in the substrate processing unit 101 equipped with the fixed nozzle 41c.

[0275] Next, the substrate processing system 1000 and the image data storage method according to the second embodiment will be described with reference to Fig. 16(a) to Fig. 20. Fig. 20 is a diagram showing the flow of a first example of the trimming process. The trimming process is performed in the storage step (step S22) described with reference to Fig. 6. More specifically, the trimming process is performed in parallel with the frame rate adjustment process.

[0276] The trimming process is executed by the control unit 201. More specifically, the control unit 201 refers to at least one trimming range that is preset for at least some specific steps among the multiple steps defined in the recipe data RP, and trims the image GD corresponding to the specific step. The control unit 201 then stores the trimmed image GD (image data) in the storage unit 202. The control unit 201 may perform trimming on all second images GD2, or may perform trimming only on the second images GD2 stored in the storage unit 202.

[0277] 20 is executed each time a step is switched. The timing of the step switch includes the start timing of the first step among the multiple steps defined in the recipe data RP and the end timing of the last step. The control unit 201 determines whether the step has switched to the next step by referring to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP.

[0278] Specifically, as shown in FIG. 20, when the step is switched, the control unit 201 refers to the recipe data RP and the trimming range data TR to determine whether or not a trimming range is set for the current step (step S71).

[0279] If the control unit 201 determines that a trimming range is set for the current step (Yes in step S71), it refers to the trimming range set for the current step and continues trimming the image GD until switching to the next step (step S72). As a result, the process shown in Fig. 20 ends. On the other hand, if the control unit 201 determines that a trimming range is not set for the current step (No in step S71), it ends the process shown in Fig. 20.

[0280] Next, the substrate processing system 1000 and the image data storage method of the second embodiment will be described with reference to Figures 16(a) to 19 and 21. Figure 21 is a diagram showing the flow of a second example of trimming processing.

[0281] In the first example of the trimming process described with reference to Figure 20, the control unit 201 switched the trimming range at the timing when the step changed, but in the second example of the trimming process, the control unit 201 switches the trimming range in accordance with the start timing of the target period HF.

[0282] In detail, during execution of the first step, the control unit 201 refers to the cropping range set for the second step, which is the next step after the first step, in accordance with the start timing of the target period HF included in the first step, and crops the first image GD1 corresponding to the first step. Note that the first image GD1 corresponding to the first step refers to the first image GD1 generated by the imaging unit 150 when the first step is executed.

[0283] For example, as described with reference to FIG. 8, the target period HF includes the target period HF that includes the timing (time t3) when step ST2 switches to step ST3. Here, step ST2 is an example of a first step. Step ST3 is an example of a second step. Also, as described with reference to FIG. 16(b), step ST3 is an example of a specific step. In the second example of the trimming process, during execution of step ST2, the control unit 201 trims the first image GD1 corresponding to step ST2, in accordance with the start timing (time t2) of the target period HF that includes time t3, by referring to the trimming range set for step ST3.

[0284] 21 is executed on a frame-by-frame basis. Specifically, the control unit 201 first refers to the elapsed time measured by the timer 204 and the time schedule TS of the recipe data RP, and determines whether the elapsed time is included in the target period HF (step S81).

[0285] When the control unit 201 determines that the elapsed time is not included in the target period HF (No in step S81), it refers to the recipe data RP and the trimming range data TR and determines whether a trimming range is set for the current step (step S82).

[0286] If the control unit 201 determines that a trimming range has been set for the current step (Yes in step S82), it trims the image GD by referring to the trimming range set for the current step and stores the trimmed image GD in the storage unit 202 (step S83). As a result, the process shown in Fig. 21 ends. On the other hand, if the control unit 201 determines that a trimming range has not been set for the current step (No in step S82), it ends the process shown in Fig. 21.

[0287] When the control unit 201 determines that the elapsed time is included in the target period HF (Yes in step S81), it refers to the recipe data RP and the trimming range data TR and determines whether a trimming range is set for the next step (step S84).

[0288] If the control unit 201 determines that a trimming range has been set for the next step (Yes in step S84), it trims the image GD by referring to the trimming range set for the next step and stores the trimmed image GD in the storage unit 202 (step S85). As a result, the process shown in Fig. 21 ends. On the other hand, if the control unit 201 determines that a trimming range has not been set for the next step (No in step S84), it ends the process shown in Fig. 21.

[0289] The trimming process shown in FIG. 21 makes it possible to verify errors that occur due to some operations of the substrate processing unit 101 starting earlier than scheduled.

[0290] 2, 7, and 16(a) to 21, the second embodiment of the present invention has been described. According to the second embodiment, similar to the first embodiment, it is possible to sufficiently verify errors (abnormalities) that are likely to occur immediately before or after a step change. Furthermore, according to the second embodiment, the trimmed image GD (image data) is stored in the storage unit 202, so the amount of data to be stored can be further reduced.

[0291] In the second embodiment, the frame image (first image GD1) constituting the high-frequency moving image and the frame image (second image GD2) constituting the low-frequency moving image are trimmed, but only the frame image (first image GD1) constituting the high-frequency moving image may be trimmed.

[0292] Furthermore, in the second embodiment, the trimming range is set for a specific step, but the trimming range may be set for all steps.

[0293] In the second embodiment, the trimmed image GD is stored in the storage unit 202. However, as described with reference to Fig. 14, the trimmed image GD may be stored in the external data storage unit ES1 or in another computer system. Alternatively, as described with reference to Fig. 15, the trimmed image GD may be stored in the data storage unit 400. In the substrate processing system 1000 that stores the trimmed image GD in the data storage unit 400, the trimming process may be executed by the control unit 201 or by the processing unit 401.

[0294] [Embodiment 3] Next, a third embodiment of the present invention will be described with reference to Figures 22 to 26. However, differences from the first and second embodiments will be described, and a description of the same aspects as the first and second embodiments will be omitted. The third embodiment differs from the first and second embodiments in that an image GD (image data) is stored in association with additional information. The third embodiment also differs from the first and second embodiments in that a search for the image GD is performed.

[0295] Fig. 22 is a block diagram of a substrate processing system 1000 according to the embodiment 3. As shown in Fig. 22, in the embodiment 3, the control device 200 further includes an input unit 207 and a display unit 208 in addition to a control unit 201, a storage unit 202, a clock unit 203, and a timer 204.

[0296] The input unit 207 inputs an arbitrary search keyword. Specifically, the input unit 207 includes a user interface device operated by the worker. The input unit 207 inputs a signal according to the worker's operation to the control unit 201. The input unit 207 may include, for example, a keyboard, a mouse, and a touch sensor. The touch sensor may be superimposed on the display surface of the display unit 208. A graphical user interface may be configured by superimposing the touch sensor on the display surface of the display unit 208.

[0297] The worker can input any search keyword by operating the input unit 207. The control unit 201 acquires the search keyword input from the input unit 207. The control unit 201 then searches for an image GD that corresponds to the acquired search keyword from among the images GD stored in the storage unit 202.

[0298] The display unit 208 is controlled by the control unit 201 to display various screens. For example, the display unit 208 displays an input screen for inputting search keywords. The display unit 208 also displays an output screen showing search results. The output screen may, for example, show the image GD searched for by the control unit 201, or may show the storage location of the image GD searched for by the control unit 201. The display unit 208 includes, for example, a display device such as a liquid crystal display device or an organic EL (electroluminescence) display device.

[0299] Next, the management data MD created by the control unit 201 included in the substrate processing system 1000 of embodiment 3 will be described with reference to Fig. 22 and Fig. 23(a). Fig. 23(a) is a diagram showing an example of the management data MD created by the control unit 201 included in the substrate processing system 1000 of embodiment 3. The management data MD shown in Fig. 23(a) is table data (management table).

[0300] 23(a), the management data MD may associate index information ID, storage location information PD, shooting date and time information CD, saving date and time information SD, and label information LA for each image GD stored in the storage unit 202. Specifically, the control unit 201 creates or acquires the index information ID, storage location information PD, shooting date and time information CD, saving date and time information SD, and label information LA for each image GD to be stored in the storage unit 202, and stores the index information ID, storage location information PD, shooting date and time information CD, saving date and time information SD, and label information LA in association with the image GD in the storage unit 202. In more detail, the control unit 201 may register the index information ID, storage location information PD, shooting date and time information CD, saving date and time information SD, and label information LA in a management table.

[0301] The label information LA is an example of "additional information." The additional information is used to search for the image GD. The label information LA indicates a keyword. That is, the label information LA is used for keyword searches.

[0302] Figure 23(a) shows an example of label information LA, which includes a first label LA1, a second label LA2, and a third label LA3. The first label LA1 indicates the recipe name. The second label LA2 indicates the lot number. The third label LA3 indicates the elapsed time of the used chemical liquid. The elapsed time of the used chemical liquid indicates the time that has elapsed since the chemical liquid in the chemical liquid tank was replaced with new liquid. The chemical liquid tank is housed in the fluid cabinet 300 described with reference to Figure 1.

[0303] The label information LA is not limited to the recipe name, lot number, and elapsed time of the used chemical. The label information LA may include, for example, at least one of the recipe name, lot number, elapsed time of the used chemical, surface type of the substrate W, type of chemical used, step number ST, step content CS, name of the alarm that occurred, type of error (abnormality) that occurred, chamber number, and operator identification information. The surface type of the substrate W may include information indicating the material formed on the surface of the substrate W. The surface type of the substrate W may also include information indicating whether the surface of the substrate W is covered with a liquid or whether the surface of the substrate W is dry. The material formed on the surface of the substrate W may include, for example, silicon, a nitride film, and an oxide film.

[0304] Next, a modified example of the label information LA will be described with reference to Fig. 23(b). Fig. 23(b) is a diagram showing a modified example of the label information LA. As shown in Fig. 23(b), the control unit 201 may hierarchically organize the label information LA and store it in the storage unit 202. For example, as shown in Fig. 23(b), the information included in the recipe data RP may be hierarchically organized. Fig. 23(b) shows an example of label information LA created by hierarchically organizing the recipe name, step number ST, step content CS, and type of treatment liquid used.

[0305] Next, a substrate processing system 1000 and an image data storage method according to the third embodiment will be described with reference to Fig. 22 to Fig. 24. The image data storage method according to the third embodiment includes an error detection step. Fig. 24 is a diagram showing the error detection step included in the image data storage method according to the third embodiment.

[0306] The error detection process includes a process of identifying the type of error (abnormality) that has occurred in the substrate processing unit 101. Information indicating the identified type of error is associated with the image GD (image data) at the time of the error occurrence and stored in the storage unit 202. The type of error is an example of label information LA.

[0307] The error detection process is performed every time an image GD is generated by the imaging section 150. In other words, the error detection process is performed on a frame-by-frame basis. The error detection process shown in Fig. 24 includes steps S91 to S94.

[0308] In step S91, it is determined whether or not an error has occurred in the substrate processing unit 101, based on the image GD generated by the imaging section 150. If an error has occurred in the substrate processing unit 101, the process proceeds to step S92, where the type (name) of the error that has occurred is identified based on the image GD generated by the imaging section 150. In step S93, information indicating the identified type of error is acquired as label information LA (additional information). In step S94, the image GD (image data) at the time of error occurrence and the information indicating the type of error are associated and stored in the storage section 202. Therefore, the label information LA (additional information) associated with the image GD at the time of error occurrence includes the type of error.

[0309] The error detection process shown in Fig. 24 is executed by, for example, the control unit 201. Therefore, Fig. 24 shows the flow of the process executed by the control unit 201. Specifically, the control unit 201 executes the error detection process.

[0310] The error detection process includes a process for identifying the type of error (abnormality) that has occurred in the substrate processing unit 101. The error detection process is executed every time an image GD is generated by the imaging unit 150. In other words, the error detection process is executed on a frame-by-frame basis. The control unit 201 monitors errors that occur in the substrate processing unit 101 by executing the error detection process. The control unit 201 is an example of a "monitoring unit."

[0311] When the control unit 201 acquires the image GD from the imaging unit 150, it determines whether or not an error has occurred in the substrate processing unit 101 based on the acquired image GD (step S91).

[0312] If the control unit 201 determines that an error has occurred (Yes in step S91), it identifies the type of error that has occurred (step S92) and acquires information indicating the type of error as label information LA (additional information) (step S93). Then, the control unit 201 associates the image GD (image data) at the time of error occurrence with the information indicating the type of error and stores them in the storage unit 202 (step S94). As a result, the processing shown in Fig. 24 ends. On the other hand, if the control unit 201 determines that no error has occurred (No in step S91), it ends the processing shown in Fig. 24.

[0313] If an error occurs during the non-target period LF described with reference to Fig. 8, the image GD at the time of the error occurrence is stored in the storage unit 202 even if it is an image GD that was determined to be deleted in step S32 described with reference to Fig. 10. However, if the image GD at the time of the error occurrence is an image GD that was determined to be deleted in step S32 of Fig. 10, the image GD at the time of the error occurrence does not need to be stored in the storage unit 202.

[0314] Next, the substrate processing system 1000 and the image search method of embodiment 3 will be described with reference to Fig. 22 to Fig. 25. Fig. 25 is a diagram showing the image search method of embodiment 3. The image search method shown in Fig. 25 includes steps S101 to S103.

[0315] In step S101, an arbitrary search keyword is acquired. For example, the search keyword may be input from the input unit 207. In step S102, based on the label information LA stored in the storage unit 202 and the acquired search keyword, an image GD corresponding to the search keyword is searched from among the images GD stored in the storage unit 202. As already explained, the label information LA indicates a keyword. The acquired search keyword corresponds to one of the label information LA (keywords). In step S103, an output screen showing the search results is displayed on the display unit 208. For example, the output screen may show the searched image GD. Alternatively, the output screen may show the storage location of the searched image GD.

[0316] The image search process shown in Fig. 25 is executed by, for example, the control unit 201. Therefore, Fig. 25 shows the flow of the process executed by the control unit 201. Specifically, the control unit 201 executes a search process. The search process includes a process of searching for an image GD corresponding to the search keyword from among the images GD stored in the storage unit 202, based on label information LA (additional information) and the search keyword. The search process is started, for example, when an operator operates the input unit 207 to instruct execution of the search process.

[0317] Specifically, when the control unit 201 starts the process shown in FIG. 25, it acquires any search keyword input by the operator operating the input unit 207 (step S101).

[0318] When the control unit 201 acquires the search keyword, it searches for an image GD corresponding to the search keyword from among the images GD stored in the storage unit 202 based on the label information LA stored in the storage unit 202 and the acquired search keyword (step S102). When the control unit 201 has searched for the image GD, it causes the display unit 208 to display an output screen showing the search results (step S103), and ends the processing shown in Fig. 25.

[0319] The third embodiment of the present invention has been described above with reference to FIGS. 22 to 25. According to the third embodiment, as with the first and second embodiments, it is possible to thoroughly verify errors (abnormalities) that are likely to occur immediately before or after a step change. Furthermore, according to the third embodiment, it is possible to search for an image GD that corresponds to a search keyword from among the stored images GD, and therefore it is possible to easily search for an image GD to be used for verifying an error (abnormality). Therefore, it is possible to reduce the burden on the operator of the error (abnormality) verification work.

[0320] Although the trimming process is omitted in the third embodiment, the trimming process may be performed in the same manner as in the second embodiment. Furthermore, although the image GD is stored in the storage unit 202 in the third embodiment, the image GD may be stored in the external data storage unit ES1 as described with reference to FIG.

[0321] Next, a modified example of the substrate processing system 1000, the image data storage method, and the image search method of the third embodiment will be described with reference to Fig. 26. Fig. 26 is a block diagram of a modified example of the substrate processing system 1000 of the third embodiment. The substrate processing system 1000 shown in Fig. 26 includes a data storage unit 400, similar to the substrate processing system 1000 shown in Fig. 15.

[0322] 26, the first communication unit 206 transmits the image GD (image data), recipe data RP, elapsed time information, imaging date and time information CD, and label information LA acquired from the imaging unit 150 to the data storage unit 400. The second communication unit 403 receives the image GD (image data), recipe data RP, elapsed time information, imaging date and time information CD, and label information LA from the control device 200 (first communication unit 206).

[0323] 26, the data storage unit 400 further includes an input unit 405 and a display unit 406. The input unit 405 is used to input an arbitrary search keyword. The display unit 406 displays an output screen showing the search results. The configuration of the input unit 405 is substantially the same as the configuration of the input unit 207 described with reference to FIG. 22, and therefore a description thereof will be omitted. Similarly, the configuration of the display unit 406 is substantially the same as the configuration of the display unit 208 described with reference to FIG. 22, and therefore a description thereof will be omitted.

[0324] In the modification shown in Fig. 26, processing unit 401 executes the error detection process described with reference to Fig. 24. Therefore, in the modification shown in Fig. 26, processing unit 401 functions as a "monitoring unit." Also, in the modification shown in Fig. 26, processing unit 401 executes the search process described with reference to Fig. 25. However, the error detection process may be executed by control unit 201.

[0325] The third embodiment of the present invention has been described above with reference to Figures 22 to 26. Note that in the embodiment described with reference to Figures 22 to 26, the frame rate adjustment process is executed in the same manner as in the first embodiment, but in other embodiments, the frame rate adjustment process may be omitted.

[0326] [Embodiment 4] Next, a fourth embodiment of the present invention will be described with reference to Figures 27 to 30. However, differences from the first to third embodiments will be described, and a description of the same aspects as the first to third embodiments will be omitted. The fourth embodiment differs from the first to third embodiments in that the feature value GF of the image GD is stored as additional information in association with the image GD. The fourth embodiment also differs from the first to third embodiments in that a search is performed for an image GD similar to the search key image KD.

[0327] Fig. 27 is a block diagram of a substrate processing system 1000 according to the fourth embodiment. As shown in Fig. 27, in the fourth embodiment, the control device 200 further includes an interface unit 205, an input unit 207, and a display unit 208 in addition to a control unit 201, a storage unit 202, a clock unit 203, and a timer 204. In the fourth embodiment, the storage unit 202 stores a machine learning model ML.

[0328] The machine learning model ML is trained to output image feature quantities GF. For example, the machine learning model ML may be a trained model. Specifically, the data set (learning data) used to train the machine learning model ML includes images generated by capturing images of the interior of the processing chamber 111 while the substrate processing unit 101 is operating. More specifically, the data set used to train the machine learning model ML includes images generated by capturing images of the interior of the processing chamber 111 while the substrate processing unit 101 is processing a substrate W. When the data set (learning data) used to train the machine learning model ML is training data, the data set further includes information indicating whether the image is an image obtained when an error occurred.

[0329] The control unit 201 inputs the image GD (frame image) generated by the imaging unit 150 into the machine learning model ML and acquires a first feature amount GF1, which is a feature amount GF of the image GD, from the machine learning model ML. Then, the control unit 201 associates the first feature amount GF1 with the image GD (image data) as additional information and stores it in the storage unit 202. The first feature amount GF1 is an example of additional information. Note that the control unit 201 may acquire the feature amount GF of the image GD after the frame rate adjustment process, or may acquire the feature amount GF of the image GD before the frame rate adjustment process.

[0330] In this embodiment, the machine learning model ML generates an embedding vector as the feature GF of the image. The algorithm for constructing the machine learning model ML may be, for example, a convolutional neural network (CNN). However, the algorithm for constructing the machine learning model ML is not limited to a CNN as long as it can acquire the feature GF of the image. The algorithm for constructing the machine learning model ML may be, for example, a deep neural network (DNN) or a recurrent neural network (RNN).

[0331] The interface unit 205 inputs an arbitrary search key image KD (image data) to the control unit 201. Specifically, the control unit 201 acquires the search key image KD via the interface unit 205 in accordance with a command input by the operator operating the input unit 207. The interface unit 205 may be electrically connected to, for example, an external hard disk drive. In this case, the control unit 201 controls the external hard disk drive via the interface unit 205 to acquire the search key image KD from the external hard disk drive. The specific configuration of the interface unit 205 has been described with reference to Fig. 14, and therefore will not be described here.

[0332] When the control unit 201 acquires the key image KD via the interface unit 205, it inputs the key image KD to the machine learning model ML to acquire a second feature amount GF2 which is a feature amount GF of the key image KD. Then, the control unit 201 searches for an image GD corresponding to the key image KD from among the images GD stored in the storage unit 202 based on the second feature amount GF2 and the first feature amount GF1. For example, the control unit 201 may search for an image GD similar to the key image KD.

[0333] Next, the management data MD created by the control unit 201 included in the substrate processing system 1000 of embodiment 4 will be described with reference to Fig. 27 and Fig. 28. Fig. 28 is a diagram showing an example of the management data MD created by the control unit 201 included in the substrate processing system 1000 of embodiment 4. The management data MD shown in Fig. 28 is table data (management table).

[0334] 28, the management data MD may associate index information ID, storage location information PD, image capture date and time information CD, storage date and time information SD, a feature amount GF (first feature amount GF1) of the image GD, and label information LA for each image GD stored in the storage unit 202. Specifically, the control unit 201 creates or acquires the index information ID, storage location information PD, image capture date and time information CD, storage date and time information SD, a feature amount GF (first feature amount GF1) of the image GD, and label information LA for each image GD stored in the storage unit 202, and stores the index information ID, storage location information PD, image capture date and time information CD, storage date and time information SD, a feature amount GF (first feature amount GF1) of the image GD, and label information LA in association with the image GD in the storage unit 202. More specifically, the control unit 201 may register the index information ID, storage location information PD, image capture date and time information CD, storage date and time information SD, a feature amount GF (first feature amount GF1) of the image GD, and label information LA in a management table.

[0335] Next, the substrate processing system 1000 and the image search method according to the fourth embodiment will be described with reference to Fig. 27 to Fig. 29. Fig. 29 is a diagram showing the image search method according to the fourth embodiment. The image search method shown in Fig. 29 includes steps S111 to S115.

[0336] In step S111, an arbitrary search keyword is acquired. For example, the search keyword may be input via the input unit 207. In step S112, an arbitrary search key image KD is acquired. For example, the search key image KD may be acquired via the interface unit 205. In step S113, a feature GF (second feature GF2) of the search key image KD is acquired. Specifically, the search key image KD is input to the machine learning model ML, and the second feature GF2 is output from the machine learning model ML.

[0337] In step S114, based on the first feature value GF1, the label information LA, the search keyword, and the second feature value GF2, an image GD corresponding to the search keyword and the second feature value GF2 is searched from among the images GD stored in the storage unit 202. In step S115, an output screen showing the search results is displayed on the display unit 208.

[0338] Note that step S111 may be performed after step S113. Alternatively, in step S114, first, an image GD corresponding to the feature value GF2 of the search key image KD may be searched from among the images GD stored in the storage unit 202, and then an image GD corresponding to the search keyword may be searched from among the images GD corresponding to the feature value GF2 of the search key image KD. Alternatively, first, an image GD corresponding to the search keyword may be searched from among the images GD stored in the storage unit 202, and then an image GD corresponding to the feature value GF2 of the search key image KD may be searched from among the images GD corresponding to the search keyword.

[0339] The image search process shown in Fig. 29 is executed by, for example, the control unit 201. Accordingly, Fig. 29 shows the flow of processing executed by the control unit 201. Specifically, the control unit 201 executes search processing. The search processing includes processing for searching for an image GD that corresponds to the search keyword and the second feature amount GF2 from among the images GD stored in the storage unit 202, based on the label information LA, the first feature amount GF1, the search keyword, and the second feature amount GF2. The search processing is started, for example, when an operator operates the input unit 207 to instruct execution of the search processing.

[0340] 29 starts, the control unit 201 acquires any search keyword input by the operator operating the input unit 207 (step S111). The control unit 201 also acquires any search key image KD (step S112). The control unit 201 then inputs the acquired search key image KD to the machine learning model ML to acquire a second feature amount GF2 (step S113). For example, the control unit 201 may acquire the feature amount GF of the acquired search key image KD via the interface unit 205.

[0341] When the control unit 201 acquires the search keyword and the second feature amount GF2, it searches for an image GD corresponding to the search keyword and the second feature amount GF2 from among the images GD stored in the storage unit 202 based on the first feature amount GF1, the label information LA, the search keyword, and the second feature amount GF2 (step S114). Then, the control unit 201 displays an output screen showing the search results on the display unit 208 (step S115), and ends the processing shown in FIG.

[0342] The control unit 201 may acquire the inspection keyword after acquiring the feature amount GF of the search key image KD. Alternatively, the control unit 201 may search for an image GD corresponding to the feature amount GF of the search key image KD from among the images GD stored in the storage unit 202, and then search for an image GD corresponding to the search keyword from among the images GD corresponding to the feature amount GF of the search key image KD. Alternatively, the control unit 201 may search for an image GD corresponding to the search keyword from among the images GD stored in the storage unit 202, and then search for an image GD corresponding to the feature amount GF of the search key image KD from among the images GD corresponding to the search keyword.

[0343] Furthermore, the search key image KD is not limited to an image input via the interface unit 205. The search key image KD may be an image GD stored in the storage unit 202. Specifically, of the images GD stored in the storage unit 202, an image GD designated by the operator by operating the input unit 207 may be acquired as the search key image KD.

[0344] For example, the worker may specify, as the search key image KD, an image GD at the time of error occurrence from among the images GD stored in the storage unit 202. In this case, images GD similar to the image GD at the time of error occurrence specified by the worker are searched from among the images GD stored in the storage unit 202. Therefore, the worker can efficiently search, from among the images GD stored in the storage unit 202, for an image GD that is likely to show a situation in which an error (abnormality) has occurred. Therefore, the worker can efficiently verify the cause of the error (abnormality).

[0345] Next, a modified example of the substrate processing system 1000 of the embodiment 4 will be described with reference to Fig. 30. Fig. 30 is a block diagram of the modified example of the substrate processing system 1000 of the embodiment 4. As shown in Fig. 30, in the modified example, the control device 200 further includes a communication unit 206.

[0346] The communication unit 206 is controlled by the control unit 201 to exchange information, data, or signals with the external server ES2. Note that the configuration of the communication unit 206 has already been described with reference to Fig. 15, and therefore will not be described here.

[0347] In the embodiment described with reference to Figs. 27 to 29, the machine learning model ML is stored in the storage unit 202, but in the modified example shown in Fig. 30, the machine learning model ML is stored in the server ES2. The communication unit 206 transmits the image GD and the search key image KD to the server ES2. The communication unit 206 also receives the feature values ​​GF of the image GD and the search key image KD from the server ES2. The control unit 201 stores the feature values ​​GF of the image GD, acquired from the server ES2 via the communication unit 206, in the storage unit 202 as additional information. Furthermore, when executing a search process, the control unit 201 searches for the image GD corresponding to the feature values ​​GF of the search key image KD, acquired from the server ES2 via the communication unit 206, from among the images GD stored in the storage unit 202.

[0348] The fourth embodiment of the present invention has been described above with reference to FIGS. 27 to 30. According to the fourth embodiment, similar to the first to third embodiments, it is possible to sufficiently verify errors (abnormalities) that are likely to occur immediately before or after a step switch. Furthermore, according to the fourth embodiment, it is possible to search for an image GD that corresponds to a key search image KD from among the stored images GD, and therefore it is possible to easily search for an image GD to be used for verifying an error (abnormality). Therefore, it is possible to reduce the burden on the operator of verifying errors (abnormalities).

[0349] Furthermore, according to the fourth embodiment, it is possible to search for an image GD corresponding to a search keyword from among images GD similar to the key image KD. Alternatively, it is possible to search for an image GD similar to the key image KD from among images GD corresponding to the search keyword. This improves the detection accuracy. However, it is also possible to search for an image GD using only the key image KD.

[0350] In addition, in embodiment 4, the control unit 201 acquires the search key image KD via the interface unit 205, but the control unit 201 may execute communication with another computer system to acquire the search key image KD from the other computer system.

[0351] Furthermore, although trimming is omitted in the fourth embodiment, it may be performed in the same manner as in the second embodiment. Furthermore, although the image GD is stored in the storage unit 202 in the fourth embodiment, the image GD may be stored in the external data storage unit ES1 as described with reference to Fig. 14. Alternatively, the image GD may be stored in the data storage unit 400 as described with reference to Fig. 26.

[0352] The fourth embodiment of the present invention has been described above with reference to Figures 29 and 30. Note that in the embodiment described with reference to Figures 29 and 30, the frame rate adjustment process is executed in the same manner as in the first embodiment, but in other embodiments, the frame rate adjustment process may be omitted.

[0353] The embodiments of the present invention have been described above with reference to the drawings (FIGS. 1 to 30). However, the present invention is not limited to the above embodiments and can be embodied in various forms without departing from the spirit of the present invention. Furthermore, the components disclosed in the above embodiments can be modified as appropriate. For example, some of the components shown in one embodiment may be added to the components of another embodiment, or some of the components shown in one embodiment may be deleted from the embodiment.

[0354] The drawings mainly show each component in a schematic manner to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown in the drawings may differ from the actual ones due to the convenience of creating the drawings. Furthermore, the configuration of each component shown in the above embodiment is merely an example and is not particularly limited, and it goes without saying that various modifications are possible within a range that does not substantially deviate from the effects of the present invention.

[0355] For example, the apparatus main body 100 is not particularly limited as long as it is an apparatus for processing a substrate, and may be, for example, a cleaning apparatus, an etching apparatus, a coating apparatus, a developing apparatus, an exposure apparatus, a baking apparatus, or a film forming apparatus.

[0356] 1 to 30, the first moving nozzle 41a discharges the chemical liquid from a position facing the center of the top surface of the substrate W, but the first moving nozzle 41a may discharge the chemical liquid from positions facing each of a plurality of positions in the radial direction of the substrate W, or may discharge the chemical liquid while moving above the substrate W. Alternatively, the chemical liquid may be discharged from a position facing the center of the substrate W and a position facing the peripheral edge of the substrate W.

[0357] 1 to 30, the substrate holding unit 2 has a clamping chuck mechanism, but the substrate holding unit 2 is not limited to a clamping chuck mechanism. For example, the substrate holding unit 2 may have a vacuum chuck mechanism. [Industrial Applicability]

[0358] The present invention is useful in the field of substrate processing. [Explanation of symbols]

[0359] 41a: First moving nozzle 41b: Second moving nozzle 41c: Fixed nozzle 101: Substrate processing unit 111: Processing room 150: Imaging unit 201: Control unit 202: Storage section 400: Data storage unit 401: Processing section 402: Storage section 1000: Substrate processing system ES1: External data storage ES2 : Server GD:Image GD1: First image GD2: Second image GF: Feature HF: Target period KD: Search key image LA: Label Information LF: Non-eligible period RP: Recipe data SR1: First condition SR2: 2nd condition SR3: 3rd condition ST1: Step ST2: Step ST3: Step ST4: Step ST5: Step ST6: Step ST7: Step ST8: Step ST9: Step ST10: Step TR1: First trimming range TR2: Second trimming range TR3: Third trimming range TR3a: Trimming range TR3b: Trimming range TR3c: Trimming range TS: Time Schedule W: Substrate

Claims

1. a substrate processing unit having a processing chamber for accommodating a substrate, the substrate being processed within the processing chamber; an imaging unit that captures images of the inside of the processing chamber and generates a plurality of images at a set frame rate; an operation control unit that controls the substrate processing unit based on recipe data; a processing unit that stores the image in a data storage unit on a frame-by-frame basis; Equipped with the recipe data defines an operation of the substrate processing unit for each step included in a plurality of steps arranged along a time axis; The plurality of images are a plurality of first images generated during a target period including a timing at which the step is switched; a plurality of second images generated during a period outside the target period; Including, the operation control unit or the processing unit executes a frame rate adjustment process to make the frame rate of the second image lower than the frame rate of the first image; The processing unit stores the first image and the second image after the frame rate adjustment process in the data storage unit.

2. 2. The substrate processing system of claim 1, wherein the processing unit refers to at least one trimming range that is preset for at least a specific step among the plurality of steps, trims the image corresponding to the specific step, and stores the trimmed image in the data storage unit.

3. The substrate processing system according to claim 2 , wherein a plurality of the trimming ranges are set for the specific step.

4. the plurality of steps includes a first step and a second step that is a step subsequent to the first step, the target period includes a timing of switching from the first step to the second step, the specific step includes the second step, 4. The substrate processing system according to claim 2, wherein the processing unit refers to the trimming range set for the second step and trims the first image corresponding to the first step in accordance with a start timing of the target period.

5. The substrate processing unit includes: a first nozzle that ejects a first processing liquid toward a predetermined location on the substrate in a direction perpendicular to the substrate; a second nozzle that ejects a second processing liquid toward the predetermined location on the substrate in a direction oblique to the substrate; and Including, 4. The substrate processing system according to claim 2, wherein the trimming range includes the predetermined portion of the substrate.

6. 4. The substrate processing system according to claim 1, wherein the processing unit acquires additional information for each image used to search for the image, and stores the additional information in the data storage unit in association with the image.

7. further comprising an input unit for inputting an arbitrary search keyword; the additional information includes a keyword, and the search keyword corresponds to the keyword of the additional information; 7. The substrate processing system according to claim 6, wherein the processing unit searches for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword.

8. the processing unit acquires a first feature amount that is a feature amount of the image; The substrate processing system according to claim 6 , wherein the additional information includes the first feature amount.

9. further comprising an input unit for inputting an arbitrary search keyword; the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information; 9. The substrate processing system of claim 8, wherein the processing unit acquires a second feature amount that is a feature amount of an arbitrary image, and searches for the image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature amount.

10. 4. The substrate processing system according to claim 1, wherein the processing unit performs the frame rate adjustment process by referring to a time schedule of the plurality of steps and an elapsed time indicating the time elapsed from the start of a first step among the plurality of steps.

11. The processing unit storing the image in the data storage unit in a first data format; converting the data format of an image among the images stored in the data storage unit, for which a first storage period has elapsed since the image was stored in the data storage unit, from the first data format to a second data format; 4. The substrate processing system according to claim 1, wherein the second data format indicates a data format in which the amount of data is compressed as compared with the first data format.

12. 4. The substrate processing system according to claim 1, wherein the processing unit deletes from the data storage unit, among the images stored in the data storage unit, images for which a second storage period has elapsed since they were stored in the data storage unit.

13. The substrate processing system according to claim 1 , wherein the operation control unit also functions as the processing unit.

14. The substrate processing system according to claim 1 , further comprising the data storage unit.

15. a substrate processing unit having a processing chamber for accommodating a substrate, the substrate being processed within the processing chamber; an imaging unit that captures images of the inside of the processing chamber and generates a plurality of images at a set frame rate; a processing unit that stores the image in a data storage unit on a frame-by-frame basis; Equipped with The processing unit acquires additional information used for searching for the image for each of the images, and stores the additional information in the data storage unit in association with the image.

16. a monitoring unit for monitoring an error occurring in the substrate processing unit; the monitoring unit identifies the type of the error that has occurred in the substrate processing unit based on the image generated by the imaging unit; The processing unit acquiring information indicating the type of the error as the additional information; The substrate processing system according to claim 15 , wherein the image at the time of occurrence of the error and information indicating the type of the error are stored in the data storage unit in association with each other.

17. The substrate processing system according to claim 15 or 16, wherein the processing unit organizes the additional information into layers.

18. further comprising an input unit for inputting an arbitrary search keyword; the additional information includes a keyword, and the search keyword corresponds to the keyword of the additional information; 17. The substrate processing system according to claim 15, wherein the processing unit searches for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword.

19. the processing unit acquires a first feature amount that is a feature amount of the image; The substrate processing system according to claim 15 , wherein the additional information includes the first feature amount.

20. further comprising an input unit for inputting an arbitrary search keyword; the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information; 20. The substrate processing system of claim 19, wherein the processing unit acquires a second feature amount that is a feature amount of an arbitrary image, and searches for the image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature amount.

21. a monitoring unit for monitoring an error occurring in the substrate processing unit; 20. The substrate processing system of claim 19, wherein the processing unit acquires a second feature amount that is a feature amount of the image at the time the error occurred, and searches for the image corresponding to the second feature amount from among the images stored in the data storage unit based on the additional information and the second feature amount.

22. further comprising an input unit for inputting an arbitrary search keyword; the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information; 22. The substrate processing system of claim 21, wherein the processing unit searches for the image corresponding to the search keyword and the second feature from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature.

23. The substrate processing system according to claim 15 or 16, further comprising the data storage unit.

24. an imaging step of operating the substrate processing unit based on recipe data to image the inside of the processing chamber with an imaging unit while processing a substrate accommodated in the processing chamber, and generating a plurality of images at a frame rate set in the imaging unit; a storing step of storing the image after the frame adjustment process in a data storing unit on a frame-by-frame basis; Including, the recipe data defines an operation of the substrate processing unit for each step included in a plurality of steps arranged along a time axis; The plurality of images are a plurality of first images generated during a target period including a timing at which the step is switched; a plurality of second images generated during a period outside the target period; Including, The image data storage method, wherein the frame rate adjustment process refers to a process of making the frame rate of the second image lower than the frame rate of the first image.

25. 25. The image data storage method according to claim 24, wherein in the storage step, at least one cropping range that is preset for at least some specific steps among the plurality of steps is referenced, the image corresponding to the specific step is cropped, and the cropped image is stored in the data storage unit.

26. The image data saving method according to claim 25 , wherein a plurality of the trimming ranges are set for the specific step.

27. the plurality of steps includes a first step and a second step that is a step subsequent to the first step, the target period includes a timing of switching from the first step to the second step, the specific step includes the second step, 27. The image data saving method according to claim 25, wherein in the saving step, the cropping range set for the second step is referenced and the first image corresponding to the first step is cropped in accordance with the start timing of the target period.

28. The substrate processing unit includes: a first nozzle that ejects a first processing liquid toward a predetermined location on the substrate in a direction perpendicular to the substrate; a second nozzle that ejects a second processing liquid toward the predetermined location on the substrate in a direction oblique to the substrate; and Including, 27. The image data storage method according to claim 25, wherein the trimming range includes the predetermined portion of the substrate.

29. 27. The image data storage method according to claim 24, wherein in the imaging process or the storage process, the frame rate adjustment process is performed by referring to a time schedule of the plurality of steps and an elapsed time indicating the time elapsed from the start of a first step of the plurality of steps.

30. In the storing step, the image is stored in the data storage unit in a first data format; The image data storage method further includes a conversion step of converting, from the first data format to a second data format, a data format of an image stored in the data storage unit for which a first storage period has elapsed since the image was stored in the data storage unit, among the images stored in the data storage unit; 27. The image data saving method according to claim 24, wherein the second data format indicates a data format in which the amount of data is compressed compared to the first data format.

31. 27. The image data storage method according to claim 24, further comprising a deletion step of deleting from the data storage unit, among the images stored in the data storage unit, those images for which a second storage period has elapsed since they were stored in the data storage unit.

32. 27. The image data storage method according to claim 24, wherein in the storage step, additional information used to search for the image is obtained for each of the images, and the additional information is associated with the image and stored in the data storage unit.

33. In the storing step, a first feature amount that is a feature amount of the image is acquired, The image data storage method according to claim 32 , wherein the additional information includes the first feature amount.

34. a step of storing the image and the additional information in the data storage unit in association with each other by the image data storage method according to claim 32; obtaining any search keywords; an image search step of searching for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword; Including, The image search method, wherein the additional information includes a keyword, and the search keyword corresponds to the keyword of the additional information.

35. a step of storing the image and the additional information in the data storage unit in association with each other by the image data storage method according to claim 33; obtaining any search keywords; an image search step of acquiring a second feature amount, which is a feature amount of an arbitrary image, and searching for an image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature amount; Including, The image search method, wherein the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information.

36. an imaging step of operating the substrate processing unit based on recipe data to image the inside of the processing chamber with an imaging unit while processing a substrate accommodated in the processing chamber, and generating a plurality of images at a frame rate set in the imaging unit; a storing step of storing the image in a data storage unit on a frame-by-frame basis; Including, In the storing step, additional information used for searching for the image is obtained for each of the images, and the additional information is associated with the image and stored in the data storage unit.

37. further comprising a step of identifying a type of error occurring in the substrate processing unit; In the preservation step, As the additional information, information indicating the type of the error is acquired, 37. The image data storage method according to claim 36, wherein the image at the time of occurrence of the error and information indicating the type of the error are stored in the data storage unit in association with each other.

38. 38. The image data storage method according to claim 36, wherein in the storage step, the additional information is hierarchically organized.

39. In the storing step, a first feature amount that is a feature amount of the image is acquired, 38. The image data storage method according to claim 36, wherein the additional information includes the first feature amount.

40. a step of storing the image and the additional information in the data storage unit in association with each other by the image data storage method according to claim 36 or 37; obtaining any search keywords; an image search step of searching for the image corresponding to the search keyword from among the images stored in the data storage unit based on the additional information and the search keyword; Including, The image search method, wherein the additional information includes a keyword, and the search keyword corresponds to the keyword of the additional information.

41. a step of storing the image and the additional information in the data storage unit in association with each other by the image data storage method according to claim 39; obtaining any search keywords; an image search step of acquiring a second feature amount, which is a feature amount of an arbitrary image, and searching for an image corresponding to the search keyword and the second feature amount from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature amount; Including, The image search method, wherein the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information.

42. a step of storing the image and the additional information in the data storage unit in association with each other by the image data storage method according to claim 39; acquiring a second feature amount, which is a feature amount of the image when an error occurs in the substrate processing unit; an image retrieval step of retrieving the image corresponding to the second feature amount from among the images stored in the data storage unit based on the additional information and the second feature amount; Image search methods, including:

43. The method further includes a step of acquiring an arbitrary search keyword; the additional information further includes a keyword, and the search keyword corresponds to the keyword of the additional information; 43. The image search method of claim 42, wherein in the image search step, the image corresponding to the search keyword and the second feature is searched from among the images stored in the data storage unit based on the additional information, the search keyword, and the second feature.

Images