Isostatic pressure device

Abstract

To enable a pressure process to be performed at required pressure by suppressing solidification of a pressure medium.SOLUTION: An isostatic pressure device 10 uses a pressure medium having a nature of higher viscosity as pressure is higher. This isostatic pressure device 10 comprises: a pressure container 12 in which a processing space 12a capable of receiving the pressure medium is formed; a booster 14 that pressurizes the pressure medium so as to obtain set pressure in the processing space 12a; a first heater 37 provided in a high-pressure piping 32 for connecting the booster 14 and the pressure container 12 to heat the pressure medium yet to be introduced into the processing space 12a to a target temperature; and a second heater 39 provided in a part of the high-pressure piping 32 on the upstream side of the first heater 37 to heat the pressure medium until the first heater 37 is reached.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an isostatic pressing device. [Background technology]

[0002] Conventionally, an isostatic pressing apparatus is known as an apparatus for pressurizing a workpiece, in which a pressure vessel containing the workpiece is pressurized with a liquid pressure medium such as water. Another known isostatic pressing apparatus is a warm isostatic pressing (WIP) apparatus, which performs both pressurization and heating, as disclosed in Patent Document 1 below. As shown in FIG. 8 , the isostatic pressing apparatus 90 disclosed in Patent Document 1 includes a pressure vessel 91 having a processing space 91a for pressurizing the workpiece, and a pressure booster 92 for pressurizing the pressure medium supplied to the processing space 91a. Furthermore, the isostatic pressing apparatus 10 includes a heater 94 and a cooler 95 in a circulation path 93 for circulating the pressure medium between the pressure booster 92 and the pressure vessel 91, so that a predetermined processing temperature can be obtained in the processing space 91a. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2-182157 Summary of the Invention [Problem to be solved by the invention]

[0004] In an isostatic pressure device, a liquid pressure medium with a high boiling point and a high flash point, rather than water, can be used as the pressure medium to enable pressure treatment under higher temperature conditions. Using such a pressure medium allows the pressure medium to be increased to high pressures without boiling or ignition. However, because pressure mediums with high boiling points and flash points often have high viscosities, when the pressure medium is pressurized to high pressures, the viscosity of the pressure medium increases with increasing pressure. This raises concerns about a decrease in the fluidity of the pressure medium. In such cases, for example, when the pressure is increased to a pressure range of approximately 400 MPa, the rate of pressure increase when the treatment space is pressurized to the set pressure may be significantly reduced. Furthermore, at higher pressures, the pressure medium may begin to solidify. Once solidification begins, the hydrostatic pressure of the pressure medium will no longer increase, potentially preventing the pressure treatment from being performed at the required pressure. The isostatic pressing device 90 disclosed in Patent Document 1 is provided with a heater 94 that heats the pressure medium, so that the isostatic pressing process can be performed by reaching a target temperature in the pressure vessel 91. However, the isostatic pressing process is not performed to a pressure that can solidify the pressure medium.

[0005] Therefore, the present invention has been made in consideration of the above-mentioned conventional technology, and an object of the present invention is to provide an isostatic pressure applying device that can suppress solidification of the pressure medium and perform pressure treatment at the required pressure. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, the isostatic pressurizing apparatus of the present invention is an isostatic pressurizing apparatus that performs isostatic pressurizing processing on a workpiece under a set pressure using a pressure medium whose viscosity increases as the pressure increases, and is equipped with a pressure vessel having a processing space capable of receiving the pressure medium, a pressure booster that pressurizes the pressure medium so that the set pressure is obtained in the processing space, a first heater that is provided in a high-pressure piping connecting the pressure booster and the pressure vessel and heats the pressure medium to a target temperature before it is introduced into the processing space, and a second heater that is provided in the high-pressure piping at a position upstream of the first heater and heats the pressure medium before it reaches the first heater.

[0007] In the isostatic pressurizing apparatus according to the present invention, a pressure medium is pressurized by a pressure intensifier so that the pressure in the processing space of the pressure vessel becomes a set pressure. The pressure medium pressurized by the pressure intensifier is heated by a first heater to a target temperature before being introduced into the processing space. This allows isostatic pressurization of the workpiece in the processing space using a pressure medium at a predetermined temperature and set pressure. However, since the pressure medium has the property of increasing viscosity when pressurized, there is a risk of partial solidification of the pressure medium and a decrease in fluidity in the section of the high-pressure piping from the pressure intensifier to the pressure vessel until it is heated by the first heater. However, a second heater is provided in the high-pressure piping between the pressure intensifier and the first heater to heat the pressure medium. This prevents clogging of the pressure medium in the high-pressure piping due to a decrease in fluidity in the section before it reaches the first heater.

[0008] That is, depending on the purpose of the isostatic pressurization treatment of the workpiece, the pressure medium may be pressurized to a pressure range where solidification of the pressure medium may occur. In such cases, the temperature of the pressure medium discharged from the pressure intensifier drops due to heat dissipation to the high-pressure pipe, increasing the viscosity of the pressure medium and potentially causing the pressure medium to begin solidifying. In particular, the longer the high-pressure pipe, the greater the temperature drop. This increases the risk of clogging the high-pressure pipe in the section before it is heated by the first heater. However, since the second heater is installed in the high-pressure pipe between the pressure intensifier and the first heater, the increase in viscosity of the pressure medium in the section before it reaches the first heater can be suppressed, thereby preventing clogging of the pressure medium in the high-pressure pipe. This prevents the pressure of the pressure medium from being unable to reach the set pressure (i.e., the required pressure). Therefore, this is effective in an isostatic pressurization device that performs isostatic pressurization treatment by pressurizing the pressure medium to a pressure range where solidification of the pressure medium would begin without the assistance of heating to improve fluidity.

[0009] The pressure intensifier may be configured by a double-acting compressor having a first cylinder accommodating a first piston and a second cylinder accommodating a second piston. In this case, the high-pressure piping may include a first piping connected to an outlet of the first cylinder, a second piping connected to an outlet of the second cylinder, and a third piping extending from a junction of the first piping and the second piping to the first heater. The second heater may be disposed in at least one of the first piping and the second piping.

[0010] In this embodiment, the second heater can heat the pressure medium at a location where a flow toward the confluence of the first and second pipes occurs. That is, when a flow of pressure medium toward the confluence occurs in one pipe, the flow of pressure medium toward the confluence from the other pipe may decrease the fluidity of the pressure medium in that pipe. Therefore, by heating the pressure medium at a location where a flow toward the confluence occurs using the second heater, the decrease in fluidity upstream of the confluence can be suppressed. In this case, since the amount of heat dissipated from each of the first and second pipes varies depending on the lengths of the first and second pipes, the second heater may be disposed in at least one of the first and second pipes depending on the lengths of the first and second pipes. Furthermore, because fluidity tends to decrease near the confluence, the second heater is preferably disposed in a region of the first and second pipes that includes at least the region adjacent to the confluence.

[0011] The high-pressure pipe may have a pipe portion, another pipe portion, and a small-diameter portion disposed between the pipe portion and the other pipe portion, and the small-diameter portion may have an inner diameter smaller than an inner diameter of the pipe portion and an inner diameter of the other pipe portion. In this case, the second heater may be provided in the small-diameter portion.

[0012] In this embodiment, the pressure medium is heated by the second heater in a small-diameter section of the high-pressure pipe, the small-diameter section having a smaller inner diameter than the adjacent pipe section and the other pipe section. Therefore, clogging of the pressure medium due to reduced fluidity of the pressure medium at a smaller inner diameter than the other sections, where clogging is likely to occur when the viscosity is high, can be suppressed. For example, a joint connecting a pipe section to another pipe section may be formed with a smaller inner diameter than the pipe section and the other pipe section to ensure strength. In this case, clogging of the pressure medium within the joint section can be suppressed.

[0013] The high-pressure pipe may have a bent portion, in which case the second heater may be disposed downstream of the bent portion so as to be adjacent to the bent portion.

[0014] In this embodiment, the flow rate of the pressure medium decreases immediately downstream of the bend in the high-pressure pipe due to pressure loss at the bend. That is, in the high-pressure pipe, the pressure medium is pressurized by the pressure intensifier, resulting in high pressure. On the other hand, the pressure temporarily decreases due to pressure loss at the bend, which can reduce the flow rate of the pressure medium immediately downstream of the bend, resulting in poor flow. Therefore, by arranging the second heater downstream of the bend so as to be adjacent to the bend, clogging of the pressure medium due to reduced flow immediately downstream of the bend can be suppressed.

[0015] The second heater may be disposed adjacent to the pressure medium outlet of the intensifier. In this embodiment, the pressure medium intensified by the intensifier is heated by the second heater when discharged from the intensifier. For example, it may be possible to increase the fluidity of the pressure medium by supplying pressure medium that has been heated in a tank in advance to the intensifier. However, in this case, the temperature of the pressure medium decreases due to heat dissipation not only in the high-pressure piping but also within the intensifier. Therefore, even if the pressure of the pressure medium is increased in advance, there is a risk that the fluidity will decrease at the discharge port of the intensifier. Therefore, by heating the high-pressure piping when discharged from the intensifier, the pressure medium in a highly fluid state can flow through the high-pressure piping. In this case, even if the pressure medium dissipates heat into the high-pressure piping, it is possible to prevent the fluidity of the pressure medium from decreasing to the extent that it will clog before reaching the first heater. [Effects of the Invention]

[0016] As described above, according to the present invention, it is possible to suppress solidification of the pressure medium and perform pressurization at a required pressure. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a diagram illustrating an isostatic pressurizing device according to an embodiment. [Figure 2] FIG. 4 is a diagram showing the configuration of a second heater. [Figure 3]FIG. 10 is a diagram for explaining a modified example of the isostatic pressurizing device in the case where the lengths of the first pipe and the second pipe are different. [Figure 4] FIG. 10 is a diagram illustrating a modified example of the isostatic pressurizing device in which the second heater is provided adjacent to the outlet of the pressure intensifier. [Figure 5] 10 is a diagram illustrating a modified example of an isostatic pressurizing device in the case where a pressure booster is configured by a single-acting compressor. FIG. [Figure 6] 10A and 10B are diagrams for explaining a modified example of an isotropic pressure applying device when a bent portion is provided in a high-pressure pipe. [Figure 7] 10A and 10B are diagrams for explaining a modified example of an isostatic pressurizing device in the case where a small diameter portion is provided in a high-pressure pipe. [Figure 8] FIG. 1 is a diagram showing a conventional isostatic pressing device. DETAILED DESCRIPTION OF THE INVENTION

[0018] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0019] The isostatic pressurizing apparatus according to the present embodiment is an apparatus for isostatically pressurizing a workpiece under a set pressure using a pressure medium. Examples of the workpiece include all-solid-state batteries and electronic components. Examples of the pressure medium include high-flashpoint hydraulic oils and silicone oils, which do not boil or ignite even at 200°C. These liquid pressure mediums have the property of increasing viscosity as the pressure increases. Therefore, when the pressure is increased to a pressure range of approximately 400 MPa, the fluidity of the pressure medium decreases, resulting in a slower pressure increase rate. Furthermore, at even higher pressures, the pressure medium may begin to solidify. Therefore, the isostatic pressurizing apparatus according to the present embodiment is designed to prevent the pressure medium from solidifying even when the set pressure (the pressure required for isostatically pressurizing the workpiece) is approximately 400 MPa or higher.

[0020] As shown in FIG. 1, the isostatic pressurizing apparatus 10 according to this embodiment includes a pressure vessel 12 in which a processing space 12a is formed in which an isostatic pressurizing process is performed on a workpiece using a pressure medium, a pressure booster 14 that pressurizes the pressure medium supplied to the pressure vessel 12, and a tank 16 located upstream of the pressure booster 14 in which the pressure medium is stored.

[0021] The tank 16 is provided with a heater 16a that heats the pressure medium stored in the tank 16. The pressure medium is heated by a first heater 37 and a second heater 39 as described below, but by providing the heater 16a in the tank 16 as well, it is possible to prevent the temperature of the pressure medium from rising easily when the isostatic pressurizing apparatus 10 is started up. Note that, depending on the processing temperature, the heater 16a in the tank 16 may be omitted.

[0022] The pressure vessel 12 has a vessel body 12b with an open top and a lid 12c that opens and closes the top opening of the vessel body 12b. The sealed space formed by the vessel body 12b and the lid 12c is the processing space 12a. With the top opening of the vessel body 12b open by the lid 12c, a workpiece can be placed in the processing space 12a, and when isostatic pressure processing is performed, the top opening is closed by the lid 12c.

[0023] A flow passage 12d for circulating a heating medium is formed in the side wall of the container body 12b. The heating medium circulates between the flow passage 12d and the heating unit 22 through a medium circulation path 23 by operation of a pump 21. The heating unit 22 is configured to be able to adjust the temperature of the heating medium. The heating medium flowing into the flow passage 12d heats the side wall of the container body 12b, and the temperature in the processing space 12a is adjusted to a preset processing temperature.

[0024] The pressure intensifier 14 is configured as a double-acting compressor. That is, the pressure intensifier 14 includes a cylinder 27 having a first cylinder 25 and a second cylinder 26. A first piston 25a is disposed within the first cylinder 25, forming a first compression chamber 25b in which the pressure medium is pressurized by the first piston 25a. A second piston 26a connected to the first piston 25a is disposed within the second cylinder 26, forming a second compression chamber 26b in which the pressure medium is pressurized by the second piston 26a.

[0025] The isostatic pressurizing device 10 includes a supply pipe 31 connecting the tank 16 and the intensifier 14 to each other, a high-pressure pipe 32 connecting the intensifier 14 and the pressure vessel 12 to each other, and a return pipe 33 for returning the pressure medium from the pressure vessel 12 to the tank 16. In other words, the isostatic pressurizing device 10 has a circulation path formed therein that allows the pressure medium to circulate between the tank 16, the intensifier 14, and the pressure vessel 12.

[0026] A pump 35 is provided in the supply pipe 31, and when the pump 35 is operated, the pressure medium in the tank 16 is sent to the pressure intensifier 14. The supply pipe 31 includes a pumping pipe 31a in which the pump 35 is disposed, a first branch pipe 31b connected to the pumping pipe 31a, and a second branch pipe 31c connected to the pumping pipe 31a so as to branch off from the first branch pipe 31b. The first branch pipe 31b is connected to the first cylinder 25 of the pressure intensifier 14. The second branch pipe 31c is connected to the second cylinder 26. The supply pipe 31 may be wrapped with a heat insulating material to suppress heat radiation from the pressure medium.

[0027] The first branch pipe 31b is provided with a check valve 31d that allows the pressure medium to flow from the tank 16 to the first cylinder 25 while blocking flow in the opposite direction. The second branch pipe 31c is provided with a check valve 31e that allows the pressure medium to flow from the tank 16 to the second cylinder 26 while blocking flow in the opposite direction.

[0028] The high-pressure pipe 32 has a first pipe 32a connected to the first cylinder 25, a second pipe 32b connected to the second cylinder 26, and a third pipe 32c connected to the first pipe 32a and the second pipe 32b and through which the pressure medium from the first pipe 32a and the pressure medium from the second pipe 32b join together and circulates. Note that the high-pressure pipe 32 may be wrapped with a heat insulating material to suppress heat radiation from the pressure medium.

[0029] The first pipe 32a is provided with a check valve 32d that allows the pressure medium to flow from the first cylinder 25 to the third pipe 32c while blocking flow in the opposite direction. The second pipe 32b is provided with a check valve 32e that allows the pressure medium to flow from the second cylinder 26 to the third pipe 32c while blocking flow in the opposite direction.

[0030] The third pipe 32c is provided with a first heater 37 for heating the pressure medium to a target temperature before being introduced into the processing space 12a. This target temperature is a temperature that is set according to the processing temperature in the processing space 12a.

[0031] The first heater 37 is configured, for example, as an oil bath heater. That is, the first heater 37 includes a bath 37a configured to store oil as a heating medium, a heating unit 37b for heating the oil, and an oil circulation path 37d in which a pump 37c is disposed and which circulates the oil between the bath 37a and the heating unit 37b. The third pipe 32c has a coil-shaped portion (coil portion 32f) disposed in the oil filled in the bath 37a, and the pressure medium in the third pipe 32c is heated by the oil in this coil portion 32f. The heating unit 37b is configured to adjust the amount of heat applied to the oil so that the temperature of the pressure medium becomes a target temperature. However, the first heater 37 is not limited to this configuration. For example, the first heater 37 may be configured as a heater disposed around the third pipe 32c to heat the third pipe 32c.

[0032] The return pipe 33 is connected to the third pipe 32c of the high-pressure pipe 32 and extends to the pressure vessel 16. The return pipe 33 is provided with an on-off valve 33a, and by opening the return pipe 33 with the on-off valve 33a, the pressure medium can be returned from the high-pressure pipe 32 or the pressure vessel 12 to the tank 16.

[0033] The high-pressure pipe 32 is provided with a second heater 39 at a position upstream of the first heater 37. The second heater 39 is provided to prevent the pressure medium pressurized by the pressure intensifier 14 from starting to solidify before reaching the second heater 39. That is, in the isostatic pressurizing device 10 of this embodiment, the pressure medium can be pressurized by the pressure intensifier 14 to a pressure above the pressure at which the pressure medium would start to solidify if not heated, and therefore there is a possibility that the pressure medium will start to partially solidify before reaching the first heater 37. Therefore, by arranging the second heater 39 at a position upstream of the first heater 37 in the high-pressure pipe 32, solidification of the pressure medium is suppressed, and clogging of the pressure medium in the high-pressure pipe 32 is prevented.

[0034] 2, the second heater 39 may be configured as a mantle heater. That is, the second heater 39 has a heat insulating material 40 formed in an annular cross section so as to cover the outer periphery of the high-pressure pipe 32 and having a circumferentially interrupted shape, and heating wires 41 arranged on the inner and outer circumferential surfaces of the heat insulating material 40. Note that fasteners 42 such as Velcro (registered trademark) are provided at the circumferentially interrupted portions of the heat insulating material 40.

[0035] The second heater 39 may be disposed anywhere in the high-pressure pipe 32 as long as it is located upstream of the first heater 37, but in this embodiment, it is disposed in the first pipe 32a and the second pipe 32b.

[0036] Specifically, the second heater 39 is preferably provided in an area of ​​the first pipe 32a adjacent to the junction 44 where it meets the second pipe 32b, and in an area of ​​the second pipe 32b adjacent to the junction 44. Here, "adjacent" includes being in contact with the junction 44, or being in contact with a T-joint that constitutes the junction 44, or being in a position that is not in contact with the T-joint that constitutes the junction 44 but that provides substantially the same effect as if it were in contact with a T-joint.

[0037] By disposing the second heater 39 in a region adjacent to the upstream side of the junction 44 in one of the pipes 32a, 32b, clogging of the pressure medium in one of the pipes 32a, 32b can be prevented even in a region where the fluidity of the pressure medium is likely to decrease toward the junction 44 due to the influence of the flow of the pressure medium from the other pipe 32b, 32a. In other words, by heating the pressure medium, the viscosity of the pressure medium can be reduced, thereby suppressing a decrease in the fluidity of the pressure medium and preventing clogging of the pressure medium in the first pipe 32a and the second pipe 32b. In other words, by heating the area where the flow rate of the pressure medium is likely to decrease, a temporary decrease in the flow rate is suppressed.

[0038] The second heater 39 is provided not only in the region adjacent to the junction 44 but also in an intermediate portion of the first pipe 32a between the junction 44 and the upstream end of the first pipe 32a, and also in an intermediate portion of the second pipe 32b between the junction 44 and the upstream end of the second pipe 32b. The number of second heaters 39 provided in these intermediate portions is not limited to one, and may be omitted. The second heater 39 may also be provided in the third pipe 32c.

[0039] Here, a method of isostatically pressing an object to be treated using the isostatically pressing apparatus 10 according to this embodiment will be described.

[0040] First, in the pressure vessel 12, the processing space 12a is opened by the lid 12c, and the object to be processed is placed in the processing space 12a. Then, the lid 12c is closed to seal the processing space 12a. Next, the temperature (processing temperature) and pressure (set pressure) for the isostatic pressing process are set, and the isostatic pressing device 10 is started.

[0041] In response to the start command, the heating unit 22 is activated to heat the heating medium, and the pump 21 is also activated. As a result, the heating medium circulates between the heating unit 22 and the circulation path 12d provided in the container body 12b, and the pressure vessel 12 is heated. In addition, in response to the start command, the heating unit 37b of the first heater 37 is activated to heat the oil, which is the heating medium, and the pump 37c is also activated. As a result, the oil circulates through the oil circulation path 37d, and heating of the pressure medium by the first heater 37 begins.

[0042] The heater 16a of the tank 16 is also activated to heat the pressure medium in the tank 16, and the second heater 39 is also activated. The open / close valve 33a of the return pipe 33 is in a shutoff state.

[0043] Furthermore, in response to the start command, the intensifier 14 is operated, and the pump 35 of the supply pipe 31 is also operated. As a result, the pressure medium in the tank 16 is supplied to the intensifier 14, and the pressure medium is pressurized in the intensifier 14. The pressure medium pressurized by the first cylinder 25 of the intensifier 14 flows through the first pipe 32a toward the junction 44, and the pressure medium pressurized by the second cylinder 26 flows through the second pipe 32b toward the junction 44. At this time, the pressure medium flowing through the first pipe 32a and the pressure medium flowing through the second pipe 32b are each heated by the second heater 39.

[0044] The pressure medium heated by the second heaters 39 joins at the joining point 44 and flows through the third pipe 32c. This pressure medium is heated to a target temperature by the first heater 37 and introduced into the processing space 12a. In the processing space 12a, the vessel body 12b is heated by the heating medium, so that the temperature of the pressure medium in the processing space 12a approaches the processing temperature.

[0045] Furthermore, as the pressure medium pressurized by the pressure booster 14 continues to be supplied to the processing space 12a, the pressure in the processing space 12a gradually increases. Accordingly, the pressure of the pressure medium in the high-pressure pipe 32 also gradually increases. At this time, the viscosity of the pressure medium gradually increases, and its fluidity gradually decreases. However, because the pressure medium is heated by the second heater 39 in the first pipe 32a and the second pipe 32b, the increase in viscosity of the pressure medium is suppressed. Therefore, even if the pressure of the pressure medium approaches the set pressure in the first pipe 32a and the second pipe 32b, which have a region upstream of the confluence 44 where the fluidity is likely to decrease, the decrease in the fluidity of the pressure medium can be suppressed. In other words, even if the pressure medium is pressurized to a pressure that may cause partial solidification of the pressure medium, the increase in viscosity is suppressed by heating the pressure medium by the second heater 39, and therefore clogging of the first pipe 32a and the second pipe 32b can be prevented.

[0046] When a pressure detector (not shown) detects that the pressure in the processing space 12a has reached the set pressure, a controller (not shown) issues a command to stop the pressure intensifier 14. This maintains the pressure in the processing space 12a at the set pressure. Then, isostatic pressurization is performed for a preset time while the temperature in the processing space 12a is maintained at the processing temperature. If the pressure in the processing space 12a drops, the controller restarts the pressure intensifier 14, thereby maintaining the pressure in the processing space 12a at the set pressure.

[0047] As described above, in this embodiment, the pressure medium is pressurized by the pressure intensifier 14 so that the pressure in the processing space 12a of the pressure vessel 12 becomes the set pressure. The pressure medium pressurized by the pressure intensifier 14 is heated by the first heater 37 to a target temperature before being introduced into the processing space 12a. This allows the workpiece to be isostatically pressurized in the processing space 12a using the pressure medium at the predetermined temperature and set pressure. However, since the pressure medium has the property of increasing viscosity when pressurized, there is a risk of partial solidification and a decrease in fluidity of the pressure medium in the section of the high-pressure piping 32 extending from the pressure intensifier 14 to the pressure vessel 12 until it is heated by the first heater 37. However, the second heater 39 is provided in the high-pressure piping 32 between the pressure intensifier 14 and the first heater 37 to heat the pressure medium. This prevents the pressure medium from clogging in the high-pressure piping 32 due to a decrease in fluidity in the section before it reaches the first heater 37.

[0048] That is, depending on the purpose of the isostatic pressurization treatment of the workpiece, the pressure medium may be pressurized to a pressure range where solidification of the pressure medium may occur. In this case, the temperature of the pressure medium discharged from the pressure intensifier 14 decreases due to heat dissipation to the high-pressure pipe 32, which increases the viscosity of the pressure medium and may cause the pressure medium to begin solidifying. In particular, the longer the high-pressure pipe 32, the greater the amount of temperature drop. This increases the risk of clogging the high-pressure pipe 32 in the section before it is heated by the first heater 37. However, because the second heater 39 is provided in the high-pressure pipe 32 between the pressure intensifier 14 and the first heater 37, the increase in viscosity of the pressure medium in the section before it reaches the first heater 37 can be suppressed, thereby suppressing clogging of the pressure medium in the high-pressure pipe 32. This prevents the pressure medium from being unable to be increased to the set pressure (i.e., the required pressure). Therefore, this is effective in the isostatic pressurizing device 10 that performs isostatic pressurizing by pressurizing the pressure medium to a pressure range where the pressure medium would begin to solidify without the assistance of heating to improve fluidity.

[0049] Furthermore, in this embodiment, the first pipe 32a and the second pipe 32b are provided with second heaters 39, which can heat the pressure medium in a region where a flow toward the confluence 44 of the first pipe 32a and the second pipe 32b occurs. That is, when a flow of pressure medium toward the confluence 44 occurs in one of the pipes 32a, 32b, the flow of pressure medium from the other pipe 32b may cause a decrease in the fluidity of the pressure medium in the one of the pipes 32a, 32b. Therefore, by heating the pressure medium with the second heater 39 in a region where a flow toward the confluence 44 occurs, a decrease in fluidity upstream of the confluence 44 can be suppressed. In this case, because the fluidity tends to decrease easily near the confluence 44, it is preferable to arrange the second heaters 39 in a region of the first pipe 32a and the second pipe 32b that includes at least a region adjacent to the confluence 44.

[0050] The disclosed embodiments should be considered illustrative in all respects and not restrictive. The present invention is not limited to the above-described embodiments, and various modifications and improvements are possible without departing from the spirit and scope of the present invention. For example, in FIG. 1, the first pipe 32a and the second pipe 32b have the same length, and therefore the second heater 39 is provided on both the first pipe 32a and the second pipe 32b. However, this is not limiting. For example, as shown in FIG. 3, if the first pipe 32a and the second pipe 32b have different lengths, the second heater 39 may be provided only on the longer pipe 32b. This is because the longer pipe 32b has a longer heat dissipation section, making it more susceptible to clogging of the pressure medium. While FIG. 3 illustrates an example in which the second pipe 32b is longer than the first pipe 32a, if the first pipe 32a is longer than the second pipe 32b, the second heater 39 is provided on at least the first pipe 32a.

[0051] 4, the second heater 39 may be provided in the first pipe 32a adjacent to the outlet 14a of the pressure intensifier 14 for the pressure medium, or in the second pipe 32b adjacent to the outlet 14a of the pressure intensifier 14 for the pressure medium. That is, the second heater 39 may be disposed so as to be in contact with the outlet 14a of the pressure intensifier 14, or may be disposed so as to be close to the outlet 14a of the pressure intensifier 14 without being in contact with the outlet 14a, as long as substantially the same effect as when the second heater 39 is disposed in contact with the outlet 14a can be obtained. Furthermore, when the first pipe 32a and the second pipe 32b have a bent portion 46, the second heater 39 may be disposed between the outlet 14a of the pressure intensifier 14 and the bent portion 46. In this case, the pressure medium increased in pressure by the pressure intensifier 14 is heated by the second heater 39 when it flows out of the pressure intensifier 14. Therefore, although the pressure of the pressure medium is increased by the pressure intensifier 14, the pressure medium flows through the high-pressure pipe 32 with increased fluidity. Therefore, even if the pressure medium dissipates heat to the high-pressure pipe 32, the fluidity of the pressure medium can be prevented from decreasing to such an extent that the pressure medium becomes clogged before reaching the first heater 37.

[0052] In the above embodiment, the intensifier 14 is configured as a double-acting compressor, but this is not limiting. For example, as shown in Fig. 5, the intensifier 14 may be configured as a single-acting compressor having one piston 27a and a compression chamber 27b. Even in this case, the second heater 39 may be provided adjacent to the outlet 14a of the pressure medium in the intensifier 14. That is, the second heater 39 may be in contact with the outlet 14a, or, even if not in contact with the outlet 14a, may be located close enough to obtain substantially the same effect as when the second heater 39 is located in contact with the outlet 14a. Furthermore, the second heater 39 may be located in the high-pressure pipe 32 up to the first bend.

[0053] 6, when a bent portion 46 is provided in the high-pressure pipe 32, the second heater 39 may be disposed adjacent to the downstream side of the bent portion 46. That is, the second heater 39 may be disposed adjacent to the joint member constituting the bent portion 46 on the downstream side of the joint member, or may be disposed close to the joint member, even if not in contact with the joint member, as long as substantially the same effect as when the second heater 39 is disposed in contact with the joint member can be obtained.

[0054] In this case, the flow rate of the pressure medium decreases immediately downstream of the bent portion 46 of the high-pressure piping 32 due to pressure loss at the bent portion 46. That is, in the high-pressure piping 32, the pressure medium is pressurized by the pressure intensifier 14, resulting in high pressure. On the other hand, since the pressure temporarily decreases due to pressure loss at the bent portion 46, the flow rate of the pressure medium decreases immediately downstream of the bent portion 46, which can result in poor flow. Therefore, by arranging the second heater 39 adjacent to the bent portion 46 downstream of the bent portion 46, clogging of the pressure medium due to reduced flow immediately downstream of the bent portion 46 can be suppressed.

[0055] As shown in FIG. 7 , when the high-pressure pipe 32 is provided with a narrow-diameter portion 49, the second heater 39 is preferably provided in the narrow-diameter portion 49. For example, when the high-pressure pipe 32 is configured to connect pipe portion 47a and another pipe portion 47b, a joint portion 48 is disposed between pipe portion 47a and another pipe portion 47b. In this case, to ensure the strength of the high-pressure pipe 32, which is subject to extremely high pressures, the inner diameter of the joint portion 48 tends to be smaller than the inner diameters of pipe portion 47a and another pipe portion 47b. In this case, by providing the second heater 39 in the joint portion 48 that forms the narrow-diameter portion 49, the inner diameter of the narrow-diameter portion 49 is smaller than the upstream and downstream portions, thereby suppressing a decrease in the fluidity of the pressure medium in the narrow-diameter portion 49, where the fluidity is likely to decrease. Therefore, clogging of the pressure medium due to a decrease in the fluidity of the pressure medium at an inner diameter smaller than the other portions, where clogging is likely to occur when the viscosity is high, can be suppressed. [Explanation of symbols]

[0056] 10: Isostatic pressure device 12: Pressure vessel 12a: Processing space 14: Booster 14a:Exit 25: First cylinder 25a: First piston 26: No. 2 cylinder 26a: Second piston 32: High pressure piping 32a: First pipe 32b: 2nd piping 32c: 3rd pipe 33: Return pipe 37: 1st heater 39:Second heater 44: Junction 46: Bend 47a: Piping section 47b: Other piping sections 49: Thin section 90: Isostatic pressure device

Claims

1. An isostatic pressurizing device that performs isostatic pressurizing treatment on a workpiece under a set pressure using a pressure medium whose viscosity increases as the pressure increases, a pressure vessel having a treatment space capable of receiving a pressure medium; a pressure booster that pressurizes a pressure medium so that a set pressure is obtained in the processing space; a first heater provided in a high-pressure pipe connecting the pressure booster and the pressure vessel, the first heater heating the pressure medium to a target temperature before the pressure medium is introduced into the processing space; a second heater provided in the high-pressure pipe at a position upstream of the first heater and configured to heat the pressure medium before the pressure medium reaches the first heater; An isostatic pressure applying device comprising:

2. the booster is configured by a double-acting compressor having a first cylinder that houses a first piston and a second cylinder that houses a second piston, the high-pressure piping includes a first piping connected to an outlet of the first cylinder, a second piping connected to an outlet of the second cylinder, and a third piping extending from a junction of the first piping and the second piping to the first heater, The isostatic pressing device according to claim 1 , wherein the second heater is disposed in at least one of the first pipe and the second pipe.

3. the high-pressure pipe has a pipe portion, another pipe portion, and a small-diameter portion disposed between the pipe portion and the other pipe portion, the small diameter portion has an inner diameter smaller than an inner diameter of the piping portion and an inner diameter of the other piping portion, The isostatic pressing device according to claim 1 , wherein the second heater is provided in the small diameter portion.

4. the high-pressure pipe has a bent portion, The isostatic pressing apparatus according to claim 1 , wherein the second heater is disposed adjacent to the bent portion and downstream of the bent portion.

5. The isostatic pressurizing apparatus according to claim 1 , wherein the second heater is disposed adjacent to an outlet of the pressure medium in the pressure intensifier.

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