X-ray measurement apparatus

Abstract

To improve measurement accuracy.SOLUTION: An X-ray measurement apparatus 1 includes: a first detection unit as a detection unit 14 that detects a diffraction ring of X-rays irradiated onto an object 2; a shielding unit 18 that shields X-rays diffracted by the object 2; a second detection unit as a detection unit 14 that detects pedestal noise with the diffracted X-rays being shielded by the shielding unit 18; and a processing unit 15 that corrects a detection result of the diffraction ring in the first detection unit using a detection result of the pedestal noise in the second detection unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray measurement device. [Background technology]

[0002] To measure an object, one method is to irradiate the object with X-rays and detect the diffraction rings of the X-rays diffracted by the object. The detected diffraction rings can be used to analyze the object.

[0003] For example, Patent Document 1 discloses that an object is irradiated with X-rays and the diffracted X-rays are detected. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-081823 Summary of the Invention [Problem to be solved by the invention]

[0005] However, when detecting diffracted X-rays, pedestal noise is included. To take the effect of pedestal noise into consideration, it is possible to measure the pedestal noise before irradiating X-rays. However, the pedestal noise may change after X-ray irradiation, which may reduce the measurement accuracy.

[0006] In view of the above problems, an object of the present invention is to provide an X-ray measurement apparatus that can improve measurement accuracy. [Means for solving the problem]

[0007] In order to solve the above problems, the X-ray measurement device according to the present invention includes a first detection unit that detects diffraction rings of X-rays irradiated onto an object, a shielding unit that blocks the X-rays diffracted by the object, a second detection unit that detects pedestal noise after the X-rays diffracted by the shielding unit are blocked, and a processing unit that corrects the detection result of the first detection unit using the detection result of the second detection unit.

[0008] In the X-ray measurement device, the second detector detects pedestal noise at the same timing as the first detector detects the diffraction ring.

[0009] In the X-ray measurement device, the first detection unit is provided on a substrate, and the second detection unit is provided on the substrate.

[0010] Furthermore, in the X-ray measurement device, each of the first detection unit and the second detection unit has a detection surface formed by a plurality of pixels, and the processing unit includes an acquisition unit that acquires a detection value indicating a detection result of pedestal noise detected at the pixel in the second detection unit, a conversion unit that converts the acquired detection value into a pedestal noise value corresponding to a specified pixel in the first detection unit, and a correction unit that corrects the detection result of the diffraction ring at the specified pixel using the converted value.

[0011] Furthermore, in the X-ray measurement device, the conversion unit performs conversion using a first correction value indicating an individual difference in sensitivity between the second detection unit and the first detection unit, and a second correction value indicating an individual difference in temperature between the second detection unit and the first detection unit. [Effects of the Invention]

[0012] According to the X-ray measurement device of the present invention, it is possible to improve the measurement accuracy. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a diagram showing an example of the configuration of an X-ray measurement apparatus according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating an example of the configuration of a detection unit in the X-ray measurement device. [Figure 3] FIG. 10 is a diagram showing an example of a diffraction profile. [Figure 4] FIG. 10 is a diagram illustrating an example of the relationship between laser intensity and detection value. [Figure 5] FIG. 10 is a diagram illustrating an example of the relationship between temperature and a detection value. [Figure 6] 10 is a flowchart illustrating an example of a processing flow by a processing unit. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. To facilitate understanding of the description, the same components in the drawings will be denoted by the same reference numerals as much as possible, and duplicate descriptions will be omitted where appropriate.

[0015] === Implementation form === <Overall structure> 1 is a diagram showing an example of the configuration of an X-ray measurement device 1 according to this embodiment. The X-ray measurement device 1 irradiates an object 2 with X-rays and detects X-rays diffracted by the object 2. The object 2 is a sample to be analyzed, and is, for example, an automobile part such as a gear, crankshaft, or shaft, or other part.

[0016] In this embodiment, the X-ray measurement device 1 detects pedestal noise as well as detecting X-rays diffracted by the object 2. Pedestal noise is a noise component that is detected when no diffracted X-rays are detected (when no diffracted X-rays are present).

[0017] 1, the X-ray measurement device 1 has a main body 10, and its main components are a tube 11, a collimator 12, a substrate 13, and a detection unit 14. The X-ray measurement device 1 also has a processing unit 15.

[0018] Tube 11 functions as a part that generates X-rays and irradiates the generated X-rays onto object 2. Tube 11 is made of a material such as glass or metal.

[0019] Collimator 12 has the function of adjusting the irradiation range of the X-rays generated by tube 11. Collimator 12 is provided below (on the substrate side of) tube 11 and extends toward substrate 13. The X-rays generated by tube 11 pass through collimator 12 and are irradiated (emitted) onto object 2.

[0020] Substrate 13 is a plate-like member, and is provided with detection unit 14, which will be described later. Substrate 13 is provided with a hole, and collimator 12, which extends from the tube 11 side, protrudes from this hole toward target 2. Substrate 13 is provided with a connector that outputs the detection result (pixel signal) of detection unit 14 to processing unit 15.

[0021] The detection unit 14 detects X-rays diffracted from the object 2 and pedestal noise. FIG. 2 is a diagram showing an example of the configuration of the detection unit 14 in the X-ray measurement device 1. FIG. 2 is a diagram showing a schematic configuration example of the periphery of the detection unit 14 in the X-ray measurement device 1. The detection unit 14 is configured to include a first detection unit 16A, a first detection unit 16B, and a second detection unit 17.

[0022] First detector 16A and first detector 16B detect X-rays diffracted from object 2. Specifically, first detector 16A and first detector 16B are, for example, rectangular in shape, and are provided on substrate 13 on the object 2 side (the surface opposite to tube 11). One each of first detector 16A and first detector 16B (two in total) are provided on substrate 13. First detector 16A and first detector 16B are provided on either side of collimator 12, and are provided at equal distances from each other with respect to the center point of collimator 12.

[0023] The first detection unit 16A and the first detection unit 16B detect X-rays diffracted from the object 2 using a detection surface on which a plurality of pixels are arranged. The detection surface of the first detection unit 16A and the first detection unit 16B is formed by arranging a plurality of pixels in a grid pattern. Specifically, the first detection unit 16A and the first detection unit 16B detect diffraction rings, which are annular diffraction images of the diffracted X-rays. Diffraction rings are also called Debye rings or Debye-Scherrer rings. The first detection unit 16A and the first detection unit 16B are imaging elements for capturing images of the diffraction rings on the detection surface, such as SOI (Silicon on Insulator) sensors. The first detection unit 16A and the first detection unit 16B have the same specifications (configuration). The first detection unit 16A and the first detection unit 16B detect the diffracted X-rays at each pixel constituting the detection surface and output a value corresponding to the detected intensity as a detection value.

[0024] The X-rays irradiated onto the object 2 are detected as a diffraction ring by the first detection unit 16A and the first detection unit 16B, as shown by C in FIG. 2, for example. The angle of the diffraction ring in the circumferential direction (the angle relative to the reference position) is the α angle (the central angle of the diffraction ring). Each of the first detection unit 16A and the first detection unit 16B detects a portion of the diffraction ring. Note that the first detection unit 16A and the first detection unit 16B may detect a portion of the diffraction ring, or may detect the entire circumference (entire) of the diffraction ring.

[0025] 3 shows an example of a diffraction profile P1 when the α angle detected by the first detector 16A is α1. The diffraction profile shows the intensity distribution in the radial direction of the diffraction ring, with the vertical axis representing intensity and the horizontal axis representing radial position relative to the center of the diffraction ring. In the diffraction profile, the intensity is high at radial positions where the diffraction ring (C in FIG. 2) is detected (X-rays are strong), and the intensity is low at positions where the diffraction ring is not detected (X-rays are weak).

[0026] Returning to FIG. 1 , the second detector 17 detects pedestal noise. Specifically, the second detector 17 has, for example, a rectangular shape and is provided on the substrate 13 on the side of the target 2 (the side opposite the tube 11). That is, the second detector 17 is provided on the same substrate 13 as the first detectors 16A and 16B, on the same plane. One second detector 17 is provided on the substrate 13. The second detector 17 is provided at a different position on the substrate 13 from the first detectors 16A and 16B. For example, the second detector 17 is provided so that a line connecting the center of the second detector 17 to the center of the collimator 12 is perpendicular to a line connecting the centers of the first detectors 16A and 16B to the center of the collimator 12. Furthermore, for example, the distance of the second detector 17 from the center point of the collimator 12 is different from that of the first detectors 16A and 16B.

[0027] The second detection unit 17 detects pedestal noise using a surface on which multiple pixels are arranged as a detection surface. The detection surface of the second detection unit 17 is formed by arranging multiple pixels in a grid pattern. The second detection unit 17 preferably has the same specifications (configuration) as the first detection unit 16A and the first detection unit 16B. The second detection unit 17 is preferably configured to reduce errors (individual differences) such as detection errors compared to the first detection unit 16A and the first detection unit 16B. For this reason, the second detection unit 17 is, for example, an SOI (Silicon on Insulator) sensor, similar to the first detection unit 16A and the first detection unit 16B. The second detection unit 17 detects pedestal noise at each pixel constituting the detection surface and outputs a value corresponding to the detected intensity as a detection value.

[0028] The second detection unit 17 is covered by a shielding portion 18. The shielding portion 18 has the function of blocking X-rays diffracted by the object 2. The shielding portion 18 is made of, for example, a lead-containing material. The shielding portion 18 is provided so as to cover the detection surface of the second detection unit 17. That is, the shielding portion 18 is provided between the second detection unit 17 and the object 2. This blocks X-rays diffracted by the object 2 from reaching the second detection unit 17, thereby preventing the second detection unit 17 from detecting a diffraction ring. This enables the second detection unit 17 to detect pedestal noise. Note that, as long as the diffracted X-rays reaching the second detection unit 17 are suppressed, the detection surface of the second detection unit 17 may be entirely or partially covered. Note that, in order to effectively suppress the influence of X-rays diffracted in the second detection unit 17, it is more preferable that the detection surface of the second detection unit 17 be entirely covered by the shielding portion 18.

[0029] FIG. 3 shows an example of an intensity distribution (pseudo-diffraction profile) corresponding to the case where the α angle in the second detector 17 is angle α2, indicated as P2. Because the second detector 17 does not detect diffraction rings (or suppresses detection), the intensity distribution corresponding to the diffraction profiles of the first detector 16A and the first detector 16B is used as a pseudo-diffraction profile, which is referred to as the pseudo-diffraction profile. As indicated by P2, the influence of diffracted X-rays is suppressed in the second detector 17, and pedestal noise is detected. In FIG. 3, P3 indicates the case where the shielding portion 18 is not present, and the influence of diffracted X-rays is apparent at P3. In other words, providing the shielding portion 18 can effectively block diffracted X-rays and detect pedestal noise.

[0030] The second detector 17 detects pedestal noise at the same timing as the first detector 16A and the first detector 16B detect the diffraction rings. Specifically, the first detector 16A and the first detector 16B detect the diffraction rings while the object 2 is being irradiated with X-rays. The second detector 17, like the first detector 16A and the first detector 16B, detects pedestal noise while the object 2 is being irradiated with X-rays. That is, the second detector 17 can detect pedestal noise corresponding to the diffraction rings detected by the first detector 16A and the first detector 16B. In this way, the detection of the diffraction rings by the first detector 16A and the first detector 16B and the detection of pedestal noise by the second detector 17 are performed in parallel.

[0031] 1, first detector 16A and first detector 16B detect the diffraction rings of the irradiated X-rays, and second detector 17 detects pedestal noise. Information about the diffraction rings detected by first detector 16A and first detector 16B and information about the pedestal noise detected by second detector 17 are output to processor 15.

[0032] Processing unit 15 is an information processing device that corrects the detection results of first detection unit 16A and first detection unit 16B using the detection results of second detection unit 17. Specifically, processing unit 15 corrects the detection results of the diffraction rings of first detection unit 16A and first detection unit 16B using the pedestal noise detected by second detection unit 17.

[0033] The processing unit 15 includes, for example, a control unit, a communication unit, and a storage device. The control unit is mainly configured with a CPU (Central Processing Unit) and a memory. In the control unit, the CPU executes a predetermined program stored in the memory or storage device, etc., thereby functioning as various functional components described below. The communication unit includes a communication interface for communicating with external devices. The storage device includes a hard disk or the like, and stores various programs and information required to execute processing in the control unit, as well as information on processing results. Note that the processing unit 15 may be configured with a single information processing device or multiple information processing devices. Also, FIG. 1 only shows some of the main hardware components of the processing unit 15, and the processing unit 15 may include other components such as an operation device and a display device.

[0034] <Functional configuration> 1 is a block diagram showing an example of various functions in the processing unit 15. Processing is executed by the functions in each block.

[0035] As shown in FIG. 1, the processing unit 15 includes an irradiation unit 30, an acquisition unit 31, a conversion unit 32, a correction unit 33, and an analysis unit 34 as main components.

[0036] The irradiation unit 30 controls the irradiation of X-rays. That is, the irradiation unit 30 controls the start and stop of the irradiation of X-rays.

[0037] The acquisition unit 31 acquires the detection results from the detection unit 14. Specifically, the acquisition unit 31 acquires the detection results of the diffraction rings from the first detection unit 16A and the first detection unit 16B, and acquires the detection result of the pedestal noise from the second detection unit 17.

[0038] Specifically, the acquisition unit 31 acquires detection values ​​indicating the detection results of the diffraction rings detected at pixels on the detection surfaces of the first detection unit 16A and the first detection unit 16B. That is, the acquisition unit 31 acquires detection values ​​of the diffraction rings (X-rays) corresponding to each pixel from the first detection unit 16A and the first detection unit 16B. For example, if the detection surfaces of the first detection unit 16A and the first detection unit 16B are each made up of N pixels vertically and M pixels horizontally, the acquisition unit 31 acquires detection values ​​corresponding to each of the N×M pixels.

[0039] The acquisition unit 31 assigns the number i to the detection value of each pixel. In particular, the number i of each pixel of the first detection unit 16A is referred to as the number ia. Furthermore, the number i of each pixel of the first detection unit 16B is referred to as the number ib. In this embodiment, when the numbers ia and ib are not distinguished, the numbers ia and ib are referred to as the number i. The detection value of the pixel numbered i is referred to as the detection value I(i), and the detection value of each pixel of the first detection unit 16A is referred to as the detection value I(ia). Furthermore, the detection value of each pixel of the first detection unit 16B is referred to as the detection value I(ib). The numbers ia and ib are each set to a number ranging from 1 to N×M. For example, the detection value I(ia) indicates the detection value of the pixel numbered ia of the first detection unit 16A.

[0040] The acquisition unit 31 also acquires detection values ​​indicating the detection results of pedestal noise detected at pixels on the detection surface of the second detection unit 17. The acquisition unit 31 acquires detection values ​​of pedestal noise corresponding to predetermined pixels from the second detection unit 17. Specifically, the acquisition unit 31 acquires detection values ​​corresponding to a plurality of (e.g., Q) pixels at the center of the detection surface out of the plurality of pixels that make up the detection surface of the second detection unit 17. The plurality of central pixels refers to a predetermined plurality of pixels included in a predetermined region (a part of the entire detection surface) that includes the center point of the detection surface. The pixels in question are set in advance.

[0041] The acquisition unit 31 assigns a number to the detection value of each pixel of the second detection unit 17. In this embodiment, the number i of each pixel of the second detection unit 17 is written as the number ic. The detection value of each pixel of the second detection unit 17 is written as the detection value I(ic). The number ic is set to a number ranging from 1 to Q, for example. For example, the detection value I(ic) indicates the detection value of the pixel of the second detection unit 17 with the number ic.

[0042] In this way, the acquisition unit 31 acquires the detection value I(ia) of each pixel of the first detection unit 16A, the detection value I(ib) of each pixel of the first detection unit 16B, and the detection value I(ic) of each pixel of the second detection unit 17.

[0043] The converter 32 converts the detection value acquired from the second detector 17 into a pedestal noise value corresponding to a predetermined pixel in the first detector 16A and the first detector 16B. That is, the converter 32 estimates the pedestal noise of the first detector 16A and the first detector 16B from the pedestal noise detected by the second detector 17.

[0044] Pedestal noise includes noise related to sensitivity (detection sensitivity) and noise related to temperature (environmental temperature). Sensitivity-related noise appears in each pixel as variations in detected values ​​for the same intensity (sensitivity variations). Temperature-related noise appears in detected values ​​as dark noise caused by the same heat (temperature), and also appears as variations between pixels. Thus, pedestal noise varies between individual pixels and further differs between first detection unit 16A, first detection unit 16B, and second detection unit 17.

[0045] Therefore, the conversion unit 32 takes into consideration individual differences in sensitivity and individual differences in temperature and derives the pedestal noise of each pixel of the first detection unit 16A and the pedestal noise of each pixel of the first detection unit 16B from the detection value I(ic) of the second detection unit 17. Specifically, the conversion unit 32 performs the conversion using the following equation (1).

[0046]

number

[0047] In equation (1), i is the pixel number, specifically number ia or number ib. N(i) is the value of pedestal noise corresponding to each pixel (number i) of each of the first detection units 16A and 16B. For example, N(ia) indicates the value of pedestal noise corresponding to pixel number ia of the first detection unit 16A. Ave is the average value of the detected values ​​I(ic) of the second detection unit 17. Ave is the sum of Q detected values ​​I(ic) divided by Q.

[0048] C in Equation (1) s (i) is a correction value (hereinafter referred to as "first correction value C") related to the sensitivity of the pixel numbered i of the first detection unit 16A and the first detection unit 16B. s (i)"). The first correction value C s (i) is a correction value that indicates the individual difference in sensitivity between the second detection unit 17 and the first detection unit 16A and the first detection unit 16B. Specifically, the first correction value C s (i) indicates the individual difference in sensitivity of the pixel numbered i of the first detection unit 16A or the first detection unit 16B (individual difference in noise related to sensitivity) when the second detection unit 17 is used as a reference.

[0049] First correction value C s(i) is correction information set in advance through testing or the like. For example, the test involves irradiating the first detection unit 16A, the first detection unit 16B, and the second detection unit 17 with laser light at a constant intensity. During irradiation, the laser light is irradiated, for example, one pixel at a time, and the detection value is read. Note that the temperature is kept constant. By irradiating in this manner, detection values ​​for the laser light at the constant intensity are obtained for each pixel of the first detection unit 16A, the first detection unit 16B, and the second detection unit 17. Then, the intensity of the laser light is changed in multiple stages, and detection values ​​are similarly obtained. FIG. 4 is a diagram showing an example of the detection value results for pixel number i. In FIG. 4, the vertical axis represents the detection value, and the horizontal axis represents the laser intensity. For example, the detection value is proportional to the laser intensity, as shown by line L1. The proportional coefficient of this proportional relationship is the gain Gs(i). That is, the gain Gs(i) is the increase (increase rate) of the detection value relative to the laser intensity at pixel number i. That is, the gain Gs(i) indicates the ratio of the amount of change in the detected value to the amount of change in the intensity.

[0050] Then, the average value of the gains Gs(ic) of a plurality of (e.g., Q) pixels at the center of the detection surface of the second detection unit 17 is taken as the gain average GsAve. The ratio of the gain Gs(ia) of each pixel of the first detection unit 16A to the gain average GsAve is taken as the first correction value C corresponding to the first detection unit 16A. s (ia). That is, the first correction value C s (ia) = Gain Gs(ia) / Gain average GsAve. First correction value C s (ia) is set corresponding to each pixel of the first detection unit 16A. Similarly, the first correction value C s (ib) is calculated. First correction value C s (ib) is set corresponding to each pixel of the first detection unit 16B.

[0051] In this way, a first correction value C related to sensitivity is calculated for the pixel number i of the first detection unit 16A and the first detection unit 16B. s (i) is set.

[0052] Also, C in Eq. (1) d (i) is a correction value (hereinafter referred to as "second correction value C") related to the temperature of the pixel numbered i of the first detection unit 16A and the first detection unit 16B. d (i)"). The second correction value C d (i) is a correction value that indicates the individual difference in temperature between the second detection unit 17 and the first detection unit 16A and the first detection unit 16B. Specifically, the second correction value C d (i) indicates the individual difference in temperature (individual difference in temperature-related noise) of the pixel numbered i of the first detection unit 16A or the first detection unit 16B when the second detection unit 17 is used as a reference.

[0053] Second correction value C d (i) is correction information set in advance through testing or the like. In testing, for example, the temperatures of the first detection unit 16A, the first detection unit 16B, and the second detection unit 17 are controlled to be constant. For example, the temperature is maintained constant using a thermostatic bath or a cooling chiller. Then, the detection values ​​are read out pixel by pixel. Note that irradiation with X-rays or the like is not performed. By reading out in this manner, detection values ​​for the constant temperature are obtained for each pixel of the first detection unit 16A, the first detection unit 16B, and the second detection unit 17. Then, the temperature is changed in multiple stages to obtain detection values ​​in the same manner. FIG. 5 is a diagram showing an example of the detection value results for pixel number i. In FIG. 5, the vertical axis represents the detection value and the horizontal axis represents the temperature. For example, the detection value is proportional to the temperature, as shown by line L2. The proportionality coefficient of this proportionality is the gain Gd(i). In other words, the gain Gd(i) is the increase (increase rate) of the detection value with respect to the temperature at pixel number i. That is, the gain Gd(i) indicates the ratio of the amount of change in the detected value to the amount of change in the temperature.

[0054] Then, the average value of the gains Gd(ic) of a plurality of (e.g., Q) pixels at the center of the detection surface of the second detection unit 17 is taken as the gain average GdAve. The ratio of the gain Gs(ia) of each pixel of the first detection unit 16A to the gain average GdAve is taken as the second correction value C corresponding to the first detection unit 16A. d (ia). That is, the second correction value Cd (ia) = Gain Gd(ia) / Gain average GdAve. Second correction value C d (ia) is set corresponding to each pixel of the first detection unit 16A. Similarly, the second correction value C d (ib) is calculated. Second correction value C d (ib) is set corresponding to each pixel of the first detection unit 16A.

[0055] In this way, the second correction value C for the temperature of the pixel numbered i of the first detection unit 16A and the first detection unit 16B is calculated. d (i) is set.

[0056] Returning to FIG. 1, the conversion unit 32 converts the average value I(ic) of the detection values ​​I(ic) of the second detection unit 17 acquired by the acquisition unit 31 into Ave is calculated, and the preset first correction value C s (i) and the second correction value C d Using (i), conversion is performed using equation (1). As a result, the pedestal noise of each pixel of each of the first detection units 16A and 16B is derived as a value N(i) from the pedestal noise detection result of the second detection unit 17.

[0057] The correction unit 33 corrects the detection results of the diffraction rings from the first detection unit 16A and the first detection unit 16B using the converted value N(i) from the conversion unit 32. Specifically, the correction unit 33 corrects the detection values ​​of each pixel of the first detection unit 16A and the first detection unit 16B using the converted value N(i).

[0058] Specifically, for first detector 16A, corrector 33 subtracts converted value N(ia) from detection value I(ia) of pixel numbered ia when diffracted X-rays are detected. Also, for first detector 16B, corrector 33 subtracts converted value N(ib) from detection value I(ib) of pixel numbered ib when diffracted X-rays are detected. Corrector 33 performs correction processing on all pixels of first detector 16A and first detector 16B. This suppresses the influence of pedestal noise from the diffraction ring detection results.

[0059] The analysis unit 34 analyzes the object 2 using the diffraction ring corrected by the correction unit 33. For example, the analysis unit 34 can use the detected diffraction ring to analyze hardness (full width at half maximum), stress (stress distribution), etc. For example, the diffraction ring can be used to evaluate hardness from the full width at half maximum of the diffraction profile. Also, the diffraction ring can be used to evaluate stress from the radius or diffraction angle of the diffraction ring. Note that as long as analysis is possible using the diffraction ring, it is not limited to analyzing hardness or stress. Furthermore, various methods can be applied as an analysis method using the diffraction ring, and there are no limitations. In the correction unit 33, the influence of pedestal noise is suppressed from the detection results of the diffraction ring, making it possible to perform analysis with high accuracy.

[0060] <Processing flow> FIG. 6 is a flowchart showing an example of the flow of processing according to this embodiment. The processing of each of the following steps is executed, for example, when a user gives an instruction relating to the detection of the diffraction ring. Note that the first correction value C s (i) and the second correction value C d (i) is set in advance. The order and content of the following steps can be changed as appropriate.

[0061] (Step SP10) The irradiation unit 30 starts irradiating X-rays, and the process then proceeds to step SP11.

[0062] (Step SP11) The acquisition unit 31 acquires the diffraction ring detection results (detection value I(ia) and detection value I(ib)) from the first detection unit 16A and the first detection unit 16B, and also acquires the pedestal noise detection result (detection value I(ic)) from the second detection unit 17. That is, each detection is performed in parallel. Then, the process proceeds to step SP12.

[0063] (Step SP12) The converter 32 converts the detection values ​​acquired from the second detector 17 into pedestal noise values ​​(N(i)) corresponding to each pixel in the first detector 16A and the first detector 16B. Then, the process proceeds to step SP13.

[0064] (Step SP13) Correction unit 33 corrects the detection results of the diffraction rings by first detection unit 16A and first detection unit 16B using the values ​​converted by conversion unit 32. Then, the process proceeds to step SP14.

[0065] (Step SP14) The irradiation unit 30 stops irradiating X-rays, and the process then proceeds to step SP15. Note that the timing for stopping the irradiation of X-rays is not limited to step SP14, and may be after step SP11, for example.

[0066] (Step SP15) The analysis unit 34 uses the corrected diffraction ring to analyze the object 2. The analysis results are displayed on a predetermined display device, for example, and provided to the user, and then the process ends.

[0067] In the above example, a case where one diffraction ring is acquired and analyzed is described as an example, but it is also possible to acquire multiple diffraction rings by performing steps SP11 to SP13 multiple times, and then add them together to obtain a composite diffraction ring. In this case, analysis unit 34 performs analysis using the composite diffraction ring.

[0068] <Action and effect> As described above, this embodiment includes first detection unit 16A and first detection unit 16B that detect diffraction rings of X-rays irradiated onto object 2, a shielding unit 18 that blocks X-rays diffracted by object 2, a second detection unit 17 that detects pedestal noise after the X-rays diffracted by shielding unit 18, and a processing unit 15 that corrects the detection results of first detection unit 16A and first detection unit 16B using the detection results of second detection unit 17.

[0069] This configuration allows for the detection of diffraction rings of irradiated X-rays and the detection of pedestal noise to be performed in parallel. For example, if pedestal noise is detected before X-ray detection (before X-ray irradiation), the pedestal noise may change over time due to heat from various devices. In such cases, the pedestal noise may not be accurately detected, resulting in a decrease in measurement accuracy. However, the above configuration allows for accurate detection of pedestal noise, improving measurement accuracy. It also makes it possible to shorten the measurement time.

[0070] In the X-ray measurement apparatus 1 according to this embodiment, the second detector 17 detects pedestal noise at the same timing as the first detector 16A and the first detector 16B detect the diffraction rings.

[0071] This configuration allows the detection of diffraction rings and pedestal noise to be performed in parallel, enabling the pedestal noise to be detected at the same time as the diffraction ring is detected, thereby enabling accurate detection of pedestal noise and improving measurement accuracy.

[0072] In the X-ray measurement device 1 according to this embodiment, the first detection unit 16A and the first detection unit 16B are provided on the substrate 13, and the second detection unit 17 is also provided on the substrate 13.

[0073] According to this configuration, the first detector 16A, the first detector 16B, and the second detector 17 can be operated in the same (similar) environment, and the pedestal noise can be accurately detected.

[0074] Furthermore, in the X-ray measurement device 1 according to this embodiment, each of the first detection unit 16A, the first detection unit 16B, and the second detection unit 17 has a detection surface formed by a plurality of pixels, and the processing unit 15 includes an acquisition unit 31 that acquires a detection value indicating the detection result of pedestal noise detected at a pixel in the second detection unit 17, a conversion unit 32 that converts the acquired detection value into a pedestal noise value corresponding to a specified pixel in the first detection unit 16A and the first detection unit 16B, and a correction unit 33 that corrects the detection result of the diffraction ring at the specified pixel using the converted value.

[0075] According to this configuration, the value of the pedestal noise corresponding to each pixel of the first detection unit 16A and the first detection unit 16B can be identified based on the detection result of the second detection unit 17. This improves measurement accuracy.

[0076] In the X-ray measurement device 1 according to this embodiment, the conversion unit 32 calculates a first correction value C s (i), and a second correction value C indicating individual differences in temperature between the second detection unit 17 and the first detection unit 16A and the first detection unit 16B. d (i) and perform the conversion.

[0077] According to this configuration, the conversion can be performed taking into consideration individual differences due to sensitivity and temperature, and the pedestal noise can be accurately determined, thereby improving the measurement accuracy.

[0078] <Modification> The present invention is not limited to the above-described embodiments. In other words, designs that are produced by those skilled in the art with appropriate design modifications to the above-described specific examples are also included within the scope of the present invention as long as they include the features of the present invention. Furthermore, the elements of the above-described embodiments and the following modifications can be combined to the extent technically possible, and such combinations are also included within the scope of the present invention as long as they include the features of the present invention.

[0079] For example, in the above embodiment, the processing unit 15 is described as being provided separately from the main body unit 10, but the processing unit 15 is not limited to being provided separately from the main body unit 10, and may be mounted on the main body unit 10.

[0080] Furthermore, in the above embodiment, a case where two first detection units (first detection unit 16A and first detection unit 16B) are provided is described, but the number of first detection units provided is not limited. For example, the number of first detection units may be one or three. Furthermore, in the above embodiment, a case where one second detection unit 17 is provided is described, but the number of second detection units 17 provided is not limited. Furthermore, while FIG. 2 shows an example of the arrangement of the first detection unit and the second detection unit 17, the arrangement positions are not limited to the example of FIG. 2.

[0081] In the above embodiment, the acquisition unit 31 acquires detection values ​​corresponding to a plurality of pixels (e.g., Q pixels) at the center of the detection surface of the second detection unit 17. However, the acquisition unit 31 may acquire detection values ​​for all pixels on the detection surface of the second detection unit 17, or may acquire detection values ​​for only specific pixels (one or more pixels). [Explanation of symbols]

[0082] 1:X-ray measuring device 2: Object 15: Processing section 16A: First detection unit 16B: First detection unit 17: Second detection unit 18: Shield part

Claims

1. a first detector for detecting diffraction rings of X-rays irradiated onto an object; a shielding portion that blocks X-rays diffracted by the object; a second detection unit that detects pedestal noise by blocking the diffracted X-rays with the blocking unit; a processing unit that corrects the detection result of the first detection unit using the detection result of the second detection unit; An X-ray measurement device comprising:

2. the second detector detects pedestal noise at the same timing as the first detector detects the diffraction ring. The X-ray measurement device according to claim 1 .

3. the first detection unit is provided on a substrate, The second detection unit is provided on the substrate.

3. The X-ray measuring device according to claim 1 or 2.

4. each of the first detection unit and the second detection unit has a detection surface formed by a plurality of pixels; The processing unit an acquisition unit that acquires a detection value indicating a detection result of pedestal noise detected at the pixel by the second detection unit; a conversion unit that converts the acquired detection value into a pedestal noise value corresponding to a predetermined pixel in the first detection unit; a correction unit that corrects the detection result of the diffraction ring at a predetermined pixel using the converted value; Equipped with 3. The X-ray measuring device according to claim 1 or 2.

5. the conversion unit performs conversion using a first correction value indicating an individual difference in sensitivity between the second detection unit and the first detection unit, and a second correction value indicating an individual difference in temperature between the second detection unit and the first detection unit.

5. The X-ray measurement device according to claim 4.

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