Processing device

Abstract

To provide a processing device that can appropriately (for example, smoothly and conveniently) execute operation instructions to the processing device and, consequently, actual operations of the processing device.SOLUTION: A control unit (39) includes a display control unit (391) that displays an operation button (131) for inputting operation instructions for predetermined operations of an operation unit (120) into the control unit (39), in an input display unit (130). The operation button (131) is composed of at least one of an input-enabled area that accepts instruction inputs and an input-disabled area that does not accept instruction inputs. The display control unit (391) changes the size of the input-enabled area of the operation button (131) based on setting values related to the predetermined operation set in the control unit (39).SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] Known processing devices include cutting devices that cut workpieces with annular cutting blades, laser processing devices that process workpieces with laser beams, polishing devices that polish workpieces with polishing pads, and grinding devices that grind workpieces with grinding wheels.

[0003] Each processing device includes, for example, a holding table for holding the workpiece, a processing unit for processing the workpiece held on the holding table, and a processing feed unit for relatively feeding the holding table and the processing unit. Each processing device includes a wide variety of mechanisms, and by appropriately operating each mechanism, a predetermined purpose is achieved.

[0004] Furthermore, each processing device incorporates a control unit consisting of a computer (microcomputer, personal computer) or the like, which controls each component of the processing device. The control unit has a memory unit consisting of a hard disk drive (HDD), solid state drive (SSD), flash memory, or the like, which can store various pieces of information. The memory unit stores various pieces of information, such as an operating system (OS) that runs the control unit, programs that cause each component to perform a specific operation, and processing conditions that are used depending on the type of workpiece and the purpose of processing.

[0005] There are known machining apparatuses that are equipped with input devices such as a touch panel display and a mouse for inputting commands to a control unit. An operator (worker) operates the input device to input new machining conditions, instruct the machining of a workpiece based on the machining conditions, and input instructions to move each component of the machining apparatus.

[0006] For example, Patent Document 1 describes a touch panel that displays an image of an array of multiple function buttons. The multiple function buttons include a long press button that activates a function when pressed for a predetermined period of time, and the long press button displays a countdown signal indicating when the function will be activated.

[0007] Furthermore, Patent Document 2 describes a processing device having a control unit that controls a chuck table and a processing unit, and a touch panel that displays selection keys for inputting information to the control unit. The control unit includes a recognition unit, a timing unit, a determination unit, a display control unit, and an execution unit. The recognition unit recognizes the selection of a selection key. The timing unit measures the time for which the selection key is selected. The determination unit determines whether the selection key is pressed and held by comparing the time for which the selection key is selected with a preset reference time. The display control unit displays, on the touch panel, time transition information corresponding to the time for which the selection key is selected and long press information indicating that the selection key has been pressed and held. The execution unit executes processing corresponding to the result of the determination by the determination unit.

[0008] Furthermore, Patent Document 3 describes a processing device that includes a holding table for holding a workpiece, a processing unit for processing the workpiece held on the holding table, a touch panel display for displaying an operation screen and used for inputting commands, and a touch operation control unit. This processing device is capable of implementing an input method in which commands input using the touch panel display are valid only while the touch operation control unit is receiving input. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2022-178381 [Patent Document 2] Japanese Patent Publication No. 2022-053836 [Patent Document 3] Japanese Patent Application Laid-Open No. 2024-039133 Summary of the Invention [Problem to be solved by the invention]

[0010] However, according to the inventor's intensive research, the prior art, including Patent Documents 1-3, has room for improvement in terms of optimally (e.g., smoothly and conveniently) executing operational instructions to the processing device and, ultimately, the actual operation of the processing device.

[0011] For example, when moving each component of a processing device individually, an operator may set the speed of movement and input a movement command to move each component based on the set value. In this case, if the movement speed is faster than the operator's expectation, there is an increased risk of components colliding with each other. In this regard, with the prior art including Patent Documents 1-3, even if the risk of pressing a button is increased, the current screen display makes it difficult for the operator to notice the risk.

[0012] An object of the present invention is to provide a processing device that can preferably (for example, smoothly and conveniently) execute operation instructions to the processing device and, in turn, execute actual operations of the processing device. [Means for solving the problem]

[0013] One aspect of the present invention is a processing device for processing a workpiece, comprising: an operating unit having a moving unit that moves within the processing device and a processing unit that processes the workpiece; a control unit that controls the operating unit; and an input display unit connected to the control unit that displays information about the processing device and inputs it to the control unit, wherein the control unit has a display control unit that displays, on the input display unit, an operation button for inputting operation instructions for a predetermined operation of the operating unit into the control unit, the operation button comprising at least one of an input valid area that accepts input of instructions and an input invalid area that does not accept input of instructions, and the display control unit changes the size of the input valid area of ​​the operation button based on a setting value for the predetermined operation set in the control unit.

[0014] The display control unit may further cause the input display unit to display an information display area in which identification information based on the set value is displayed, the information display area being displayed superimposed on the operation button, the area of ​​the operation button where the information display area overlaps becoming the input invalid area, and the display control unit may change the size of the information display area based on the set value.

[0015] The display control unit may further display, on the input display unit, a setting input area for setting the setting value.

[0016] The set value may be a moving speed of the operation unit, and the display control unit may reduce the input effective area as the set value increases.

[0017] The display control unit may change the display position of the operation button based on the setting value.

[0018] the display control unit displays an operation control button on the input display unit when the setting value is a predetermined value; Input to the operation button may be valid only while the operation control button is being input.

[0019] When the setting value is a predetermined value, the display control unit may display a notification area that notifies information based on the setting value, and when a confirmation button displayed in the notification area is selected, enable input to the operation button.

[0020] The control unit has a set value related to the movement speed of the operation unit in a predetermined operation, and the operation buttons include a first speed operation button for inputting an operation instruction for the predetermined operation at a first speed based on the set value, and a second speed operation button for inputting an operation instruction for the predetermined operation at a second speed faster than the first speed, and the display control unit may not display the first speed operation button or the second speed operation button when the set value is a predetermined value.

[0021] One aspect of the present invention may be a controller that controls a processing device. As described above, the processing device processes a workpiece and has an operating unit including a moving unit that moves within the processing device and a processing unit that processes the workpiece. In response to this, the controller includes an input display unit connected to a control unit that controls the operating unit and displays information about the processing device and inputs it to the control unit. The control unit has a display control unit that displays operation buttons on the input display unit for inputting operation instructions for a predetermined operation of the operating unit to the control unit. The operation buttons include at least one of an input valid area that accepts input of instructions and an input invalid area that does not accept input of instructions. The display control unit changes the size of the input valid area of ​​the operation button based on a setting value for the predetermined operation set in the control unit. [Effects of the Invention]

[0022] According to the above aspect, it is possible to provide a processing device that can preferably (for example, smoothly and conveniently) execute operation instructions to the processing device and thus actual operations of the processing device. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. [Figure 2] FIG. 1 is a diagram showing a semiconductor wafer as a workpiece. [Figure 3] FIG. 2 is a diagram showing a package substrate that is a workpiece. [Figure 4] FIG. 2 is a block diagram showing components of the processing device in a simplified manner. [Figure 5] FIG. 2 is a diagram showing an example of a display mode of a display. [Figure 6] FIG. 10 illustrates an example of a display including action buttons. [Figure 7] 10 is a diagram illustrating a first example of display control of the input display unit by the display control unit. FIG. [Figure 8] FIG. 10 is a diagram illustrating a second example of display control of the input display unit by the display control unit. [Figure 9]FIG. 10 is a diagram showing an example of an information display area displayed using an input invalid area. [Figure 10] FIG. 10 is a diagram illustrating a third example of display control of the input display unit by the display control unit. [Figure 11] FIG. 10 is a diagram illustrating a fourth example of display control of the input display unit by the display control unit. [Figure 12] FIG. 10 is a diagram illustrating a fifth example of display control of the input display unit by the display control unit. DETAILED DESCRIPTION OF THE INVENTION

[0024] In this specification, the term "machining device for processing a workpiece" is used to refer to any (all) types of processing device, such as a cutting device that cuts a workpiece with an annular cutting blade, a laser processing device that processes a workpiece with a laser beam, a polishing device that polishes a workpiece with a polishing pad, and a grinding device that grinds a workpiece with a grinding wheel.

[0025] In this specification, the term "operating unit" is used to include a "moving unit" that moves within the processing device and a "processing unit" that processes the workpiece. The moving unit moves within the processing device, thereby moving the workpiece within the processing device. In this sense, the moving unit may be interpreted as a "moving unit that moves the workpiece (within the processing device)." In addition to transporting the workpiece within the processing device, the moving unit may also move items (e.g., cameras, sensors, cleaning nozzles, etc.) that move within the processing device and are not involved in transporting the workpiece. The processing unit performs processing on the workpiece in accordance with the aspects of the various types of processing devices described above. The processing of the workpiece is performed via the operating unit of the processing device through a combination (collaboration) of the movement processing by the moving unit and the processing processing by the processing unit.

[0026] In this specification, the "information about the processing device" displayed on the input display unit may include, for example, information about the power supply state of the processing device, the operation mode of the processing device, the operation time of the processing device, etc. Furthermore, the "information about the processing device" displayed on the input display unit may include, for example, information about the actual measured values ​​of the operation of the operating unit (moving unit, processing unit) (for example, the moving speed of the moving unit and the processing speed of the processing unit) showing how the operating unit (moving unit, processing unit) actually operated in accordance with the "operation instruction for the predetermined operation of the operating unit (moving unit, processing unit)."

[0027] In this specification, "input to the control unit input to the input display unit," or more specifically, "operational instructions for a predetermined operation of the operating unit (moving unit, processing unit)," may include, for example, information such as an operational instruction value (e.g., the movement speed of the moving unit or the processing speed of the processing unit) indicating how the operating unit (moving unit, processing unit) is desired to operate. The operational instruction (value) may also include information such as the temperature (ambient temperature) of a predetermined processing area in the processing device, the amount of water (e.g., the amount of water in the spinner) to be used in the predetermined processing area in the processing device, the brightness of a light source (light, e.g., UV) to be used in the predetermined processing area in the processing device, and the position (operating position, e.g., close to the chuck table) of the predetermined processing area in the processing device. Furthermore, the operational instruction (value) may include, in addition to the aforementioned temperature (ambient temperature), information including the temperature of a component required for various processes in the processing device, such as a heat stamp (a heat stamp required for attaching the release tape) that welds a release tape to a protective sheet used in the process of grinding and thinning semiconductor substrates such as wafers.

[0028] In this specification, the "action button" that is displayed on the input display unit under the control of the display control unit and that inputs an operation instruction for a predetermined operation of the operation unit (movement unit, processing unit) to the control unit may not be a physical button, but may include a combination of a display and a mouse, or a touch panel function on the display. In this sense, the action button may be read as an operation (instruction) input area, an operation (instruction) input screen, an operation (instruction) input unit, etc.

[0029] In this specification, the input display unit including the "operation button (a combination of a display and a mouse or a touch panel function on a display)" may be a part of the processing device (for example, one integrally incorporated into the housing of the processing device), or may be an external device (for example, a mobile terminal, a tablet terminal, etc.) that can communicate with the processing device.

[0030] In this specification, "the operation button comprises at least one of an input valid area that accepts instruction input and an input invalid area that does not accept instruction input" includes an aspect in which the entire area of ​​the operation button comprises the input valid area (no input invalid area exists), an aspect in which the entire area of ​​the operation button comprises the input invalid area (no input valid area exists), and an aspect in which a portion of the area of ​​the operation button comprises the input valid area and another portion of the area comprises the input invalid area (it is assumed that the operation button is switchable (displaceable) between the above three aspects). The "input valid area" may mean, for example, an area of ​​the operation button where a predetermined operation (e.g., touch) can be performed on that area to cause the operation unit (movement unit, processing unit) to perform a predetermined operation. The "input invalid area" may mean, for example, an area in which a predetermined operation (e.g., touch) can be performed on that area of ​​the operation button, but the operation unit (movement unit, processing unit) cannot perform a predetermined operation.

[0031] In this specification, the "setting value for a predetermined operation set in the control unit" may be, for example, an operation setting value (e.g., a movement speed of the movement unit or a processing speed of the processing unit) of an operating unit (movement unit, processing unit) that is set as a default in a setting input area for setting the setting value or that is set in the immediately preceding (most recent) operation instruction. The operation setting value may also refer to the temperature (ambient temperature) of a predetermined processing area in the processing device, the amount of water (e.g., the amount of water in the spinner) used in the predetermined processing area in the processing device, the brightness of a light source (light, e.g., UV) used in the predetermined processing area in the processing device, the position of the predetermined processing area in the processing device (operation position, e.g., close to the chuck table), etc. The "setting value for a predetermined operation set in the control unit" may also be a setting value that has not yet been used to execute the operation but that can be used to transition to the operation execution by a final decision operation in the input validity area.

[0032] In this specification, the "size of the valid input area of ​​an operation button" may be interpreted as, for example, the size of the invalid input area of ​​the operation button, the proportion of the valid input area to the combined area of ​​the valid input area and invalid input area of ​​the operation button, the proportion of the invalid input area to the combined area of ​​the valid input area and invalid input area of ​​the operation button, etc. Furthermore, "size" may be interpreted as smallness or size.

[0033] In this specification, the "information display area displaying identification information based on the setting value" that the display control unit causes to be displayed on the input display unit may be, for example, the setting value itself (e.g., the movement speed of the moving unit or the processing speed of the processing unit), or in addition / instead, it may be an area that displays information (including letters, figures (patterns), symbols, colors, etc.) indicating the validity of the setting (e.g., the movement speed of the moving unit is too fast or too slow, or the processing speed of the processing unit is too fast or too slow) or the safety of the setting (e.g., the movement speed of the moving unit or the processing speed of the processing unit is appropriate and safe, or the movement speed of the moving unit or the processing speed of the processing unit is too fast or too slow and is dangerous).

[0034] In this specification, "when the set value (for the predetermined operation set in the control unit) is a predetermined value" may refer to, for example, when the set value is the movement speed of the moving unit or the processing speed of the processing unit, and the actual transition to these movement speeds or processing speeds requires caution or a warning. More specifically, when the "set value (for the predetermined operation set in the control unit)" may affect the operational stability or operational safety of the processing device (e.g., the operating unit including the moving unit and the processing unit), the set value may be defined as a "predetermined value." Alternatively, when the values ​​of the movement speed of the moving unit and the processing speed of the processing unit are each within an appropriate range (not unnatural), but the balance between the movement speed of the moving unit and the processing speed of the processing unit is inappropriate (one is too large or too small compared to the other), the set value may be defined as a "predetermined value."

[0035] With reference to Fig. 1, a workpiece processing device according to this embodiment will be described. The processing device 10 shown in Fig. 1 includes a first processing unit 11 and a second processing unit 12 that process the workpiece S. A groove is formed in the workpiece using the first processing unit 11, and burrs that occur in the workpiece S due to the formation of the groove are removed using the second processing unit 12. In the processing device 10, the X-axis and Y-axis directions are horizontal, and the Z-axis direction is the up-down direction. The X-axis and Y-axis directions are perpendicular to each other.

[0036] 2 and 3 show an example of a workpiece S to be processed by the processing apparatus 10. The wafer 90 shown in FIG. 2 is a disk-shaped semiconductor wafer made of, for example, silicon. On the front side of the wafer 90, chips 91, which are electronic devices, are formed in multiple regions defined by multiple grid-like division lines. The wafer 90 is supported by an annular frame 93 via tape 92, which is a support member attached to the back side.

[0037] 3, chips 95, which are electronic devices, are formed in a plurality of regions defined by a plurality of grid-like division lines. The package substrate 94 is supported by an annular frame 97 via tape 96, which is a support member attached to the back surface side.

[0038] In the processing device 10, processing grooves are formed along the division lines between the plurality of chips 91 on the wafer 90 and along the division lines between the plurality of chips 95 on the package substrate 94.

[0039] Returning to Figure 1, we will continue to explain the processing device 10. The processing device 10 is equipped with a base 13, and various components are arranged on the base 13. A cassette 15 is placed on a cassette placement section 14 provided in a corner of the base 13. The workpiece S is carried into the processing device 10 while being contained in the cassette 15.

[0040] An opening 16 is formed on the base 13 at a position adjacent to the cassette placement portion 14 in the Y-axis direction. The opening 16 extends in the X-axis direction, and a table cover 17 is supported inside the opening 16, with a holding table 18 provided on the table cover 17. The holding table 18 is a table having a holding surface that holds the workpiece S. The holding table 18 has clamps on the outside of the holding surface that hold the frame 93 shown in FIG. 2 and the frame 97 shown in FIG. 3. The holding table 18 also has a suction mechanism (not shown) that suction-holds the workpiece S onto the holding surface. Bellows 19 are connected to both sides of the table cover 17 in the X-axis direction, and the opening 16 is covered by the table cover 17 and the bellows 19.

[0041] The table cover 17 and the holding table 18 are moved in the X-axis direction by a table feed mechanism (not shown) provided inside the base 13 below the opening 16. The table feed mechanism includes a guide rail and a ball screw extending in the X-axis direction, and a base portion that supports the table cover 17 and the holding table 18 is supported by the guide rail so that it can move in the X-axis direction. A ball screw is threadedly engaged with the base portion, and when the ball screw is rotated by a motor, the base portion moves in the X-axis direction.

[0042] Furthermore, the holding table 18 is rotated by a table rotation mechanism (not shown) around an axis facing the Z-axis direction relative to the base portion.

[0043] A gate-shaped column 20 is provided on the base 13, spanning the opening 16 in the Y-axis direction. A first processing unit 11 is supported on one side of the column 20 in the Y-axis direction, and a second processing unit 12 is supported on the opposite side in the Y-axis direction. The first processing unit 11 and the second processing unit 12 are each moved in the Y-axis direction by a Y-axis movement mechanism provided on the column 20, and moved in the Z-axis direction by a Z-axis movement mechanism provided on the column 20. The Y-axis movement mechanism and the Z-axis movement mechanism will now be described.

[0044] A pair of guide rails 21, a ball screw 22, and a ball screw 23 extending in the Y-axis direction are provided on the front surface of column 20. The pair of guide rails 21 support Y-axis moving table 24 and Y-axis moving table 25 so that they can move in the Y-axis direction. Ball screw 22 is threaded into a female thread portion (not shown) provided on Y-axis moving table 24, and ball screw 23 is threaded into a female thread portion (not shown) provided on Y-axis moving table 25. Y-axis moving table 24 moves in the Y-axis direction by rotating ball screw 22 using a motor 26 provided on the end of ball screw 22. Y-axis moving table 25 moves in the Y-axis direction by rotating ball screw 23 using a motor (not shown) provided on the end of ball screw 23.

[0045] A pair of guide rails 27 and a ball screw 28 extending in the Z-axis direction are provided on the front surface of the Y-axis moving table 24. The pair of guide rails 27 support a Z-axis moving table 29 so that the table can move in the Z-axis direction. The ball screw 28 is rotated by a motor 30 provided at the end of the ball screw 28, thereby moving the Z-axis moving table 29 in the Z-axis direction.

[0046] A pair of guide rails 31 and a ball screw 32 extending in the Z-axis direction are provided on the front surface of the Y-axis moving table 25. The pair of guide rails 31 support a Z-axis moving table 33 so that the table can move in the Z-axis direction. The ball screw 32 is rotationally driven by a motor 34 provided at the end of the ball screw 32, thereby moving the Z-axis moving table 33 in the Z-axis direction.

[0047] The first processing unit 11 is supported at the lower end of the Z-axis moving table 29. The first processing unit 11 is a tool that forms a processing groove in the workpiece S. For example, the first processing unit 11 includes a cutting blade that is rotated by a spindle facing in the Y-axis direction, and a water jet injection nozzle that injects pressurized liquid downward in the Z-axis direction.

[0048] The second processing unit 12 is supported at the lower end of the Z-axis moving table 33. The second processing unit 12 is a tool for removing burrs present around a processed groove formed in the workpiece S. Specifically, the second processing unit 12 is a water jet processing unit that performs processing by spraying pressurized liquid toward the workpiece S. Liquid is supplied from a liquid supply source 121 to a pump unit 122, and in the pump unit 122, the liquid flow rate is controlled by a flow rate control unit 123 and the liquid pressure is adjusted by a pump 124. The liquid pressurized by the pump unit 122 is supplied to the spray nozzle of the second processing unit 12, and the liquid is sprayed from the spray nozzle downward in the Z-axis direction.

[0049] The table feed mechanism that moves the holding table 18 in the X-axis direction, and the Y-axis and Z-axis movement mechanisms that move the first processing unit 11 and the second processing unit 12 in the Y-axis and Z-axis directions constitute a movement unit in the processing device 10. The movement unit allows the holding table 18 and the first processing unit 11 or the second processing unit 12 to move relatively to each other. Furthermore, the table feed mechanism that moves the holding table 18 in the X-axis direction, and the Y-axis and Z-axis movement mechanisms that move the first processing unit 11 and the second processing unit 12 in the Y-axis and Z-axis directions correspond to a "movement unit 100 (see FIG. 4 described later) that moves within the processing device 10." Furthermore, the first processing unit 11 and the second processing unit 12 correspond to a "processing unit 110 (see FIG. 4 described later) that processes the workpiece." Furthermore, the "moving unit 100 that moves within the processing device 10" and the "processing unit 110 that processes the workpiece" may be collectively referred to as the "operating unit 120 (see FIG. 4 described later)."

[0050] The table cover 17 and the holding table 18 can be moved in the X-axis direction by a table feed mechanism and positioned between a carry-in / out area adjacent to the cassette mounting section 14 and a processing area where processing can be performed by the first processing section 11 and the second processing section 12. A pair of guide rails 35 extending in the Y-axis direction and crossing above the opening 16 is provided in the carry-in / out area. A workpiece S is pulled out of the cassette 15 using a transport mechanism (not shown) and placed on the pair of guide rails 35, delivered to the holding table 18 located in the carry-in / out area, and held on the holding surface of the holding table 18. The holding table 18 holding the workpiece S is moved from the carry-in / out area to the processing area by the table feed mechanism.

[0051] In the machining area, the movement of the holding table 18 in the X-axis direction is the machining feed operation, and the movement of the first machining unit 11 and the second machining unit 12 in the Y-axis direction is the indexing feed operation, and machining is performed on the workpiece S.

[0052] Specifically, when forming a groove, the movement units (table feed mechanism, Y-axis movement mechanism, Z-axis movement mechanism) are controlled to adjust the relative positions of the first processing unit 11 and the holding table 18, and the cutting blade and spray nozzle constituting the first processing unit 11 are positioned above the starting point of the planned dividing line in the workpiece S. The first processing unit 11 is then lowered to a height where it can process the workpiece S, and the driving of the first processing unit 11 is started (for example, the cutting blade is rotated and a liquid is sprayed from the spray nozzle). Then, while the holding table 18 is moved in the X-axis direction by the table feed mechanism, the first processing unit 11 performs its processing operation (cutting with the rotating cutting blade and spraying of pressurized liquid) to form a groove extending in the X-axis direction in the workpiece S. When the end point of one groove is reached, the Y-axis movement mechanism moves the first processing unit 11 in the Y-axis direction, and the first processing unit 11 is positioned above the starting point of the next groove. Then, similarly to the above, while moving the holding table 18 in the X-axis direction, the formation of a processed groove is carried out using the processing operation of the first processing unit 11. When processing the workpiece S by the first processing unit 11, the first processing unit 11 moves away from and towards the workpiece S in the vertical direction (Z-axis direction) as appropriate (for example, every time the processing line is changed in the Y-axis direction).

[0053] Once all the grooves aligned in the Y-axis direction have been formed, the holding table 18 is rotated 90 degrees by the table rotation mechanism. This results in the unmachined division lines being aligned in the Y-axis direction. Then, as described above, the holding table 18 is moved in the X-axis direction by the table feed mechanism and the first processing unit 11 performs a processing operation to form a groove extending in the X-axis direction. When the end point of one groove is reached, the first processing unit 11 is moved in the Y-axis direction by the Y-axis movement mechanism to form the next groove.

[0054] In this way, once processing grooves have been formed along all of the planned dividing lines on the workpiece S, processing by the first processing unit 11 is completed. After the processing grooves have been formed, burrs will be generated along the processing grooves on the workpiece S, so deburring is performed using the second processing unit 12.

[0055] Specifically, the movement units (table feed mechanism, Y-axis movement mechanism, Z-axis movement mechanism) are controlled to adjust the relative positions of the second processing unit 12 and the holding table 18, and the spray nozzle constituting the second processing unit 12 is positioned above the start point of the processed groove in the workpiece S. Then, the second processing unit 12 is lowered to a height where it can process the workpiece S, and the second processing unit 12 is started to be driven (for example, by spraying liquid from the spray nozzle). Then, while the holding table 18 is moved in the X-axis direction by the table feed mechanism, the second processing unit 12 uses a pressurized liquid jet to remove burrs along the processed groove. When the end point of one processed groove is reached, the Y-axis movement mechanism moves the second processing unit 12 in the Y-axis direction to position the second processing unit 12 above the start point of the next processed groove. Then, while the holding table 18 is moved in the X-axis direction, the second processing unit 12 uses a high-pressure liquid jet to remove burrs along the processed groove. When the second processing unit 12 processes the workpiece S, the second processing unit 12 moves away from and towards the workpiece S in the vertical direction (Z-axis direction) as appropriate (for example, each time the processing line changes in the Y-axis direction).

[0056] Once deburring has been completed along all of the grooves aligned in the Y-axis direction, the holding table 18 is rotated 90 degrees by the table rotation mechanism. This leaves the grooves aligned in the Y-axis direction that have not been deburred. Then, as described above, deburring is performed along the grooves using the table feed mechanism to move the holding table 18 in the X-axis direction and the second processing unit 12 to spray high-pressure liquid. When the end point of one groove is reached, the Y-axis movement mechanism moves the first processing unit 11 in the Y-axis direction, and deburring of the next groove is performed. In this way, deburring is performed along all of the grooves on the workpiece S.

[0057] The processing device 10 is provided with a cleaning unit 36 ​​on the opposite side of the Y-axis direction from the cassette mounting unit 14, with the opening 16 in between. The cleaning unit 36 ​​is provided with a spinner table 37 that can hold and rotate the workpiece S, and a cleaning nozzle 38 that sprays cleaning liquid and drying air toward the workpiece S on the spinner table 37.

[0058] Using a transport mechanism not shown, the workpiece S can be transported between the holding table 18 in the carry-in / out area and the cleaning unit 36. In the cleaning unit 36 ​​that receives the workpiece S, a cleaning liquid is supplied from a cleaning nozzle 38 and the workpiece S is cleaned by rotating the spinner table 37 that holds the workpiece S. After cleaning, air is supplied from the cleaning nozzle 38 to dry the workpiece S. Cleaning of the workpiece S by the cleaning unit 36 ​​can be performed at any time, such as after the formation of a processed groove or after the completion of deburring.

[0059] After the series of processes such as forming the processed groove, deburring, and cleaning are completed, the workpiece S is transported to the cassette mounting section 14 by the transport mechanism and collected inside the cassette 15.

[0060] In the above processing example, of the two (e.g., first axis and second axis) processing units (first processing unit 11, second processing unit 12), the first (e.g., first axis) processing unit (first processing unit 11) performs cutting processing (forming a processing groove) using a cutting blade, and the second (e.g., second axis) processing unit (second processing unit 12) performs deburring processing. However, there is a degree of freedom in the type of processing to be performed by each of the two (e.g., first axis and second axis) processing units, and various design modifications are possible. For example, two (e.g., first axis and second axis) processing units may perform processing simultaneously (in cooperation).

[0061] The processing apparatus 10 is comprehensively controlled by a control unit 39. The control unit 39 is composed of a processor that executes various processes and a storage unit (memory) that stores various parameters, programs, etc. Various operations of the processing apparatus 10 are performed under the control of the control unit 39. For example, the control unit 39 controls "an operating unit 120 having a moving unit 100 that moves within the processing apparatus 10 and a processing unit 110 that processes the workpiece."

[0062] As shown in FIG. 1, a display (input display unit) 130 is provided on the housing of the processing device 10. The display 130 is connected to the control unit 39 (capable of transmitting various signals, etc.) and displays information related to the processing device 10. The information related to the processing device 10 may include, for example, information such as the power supply state of the processing device 10, the operation mode of the processing device 10, and the operation time of the processing device 10. The information related to the processing device 10 may also include information such as actual operation measurements (for example, the movement speed of the moving unit 100 and the processing speed of the processing unit 110) showing how the operating unit 120 (moving unit 100, processing unit 110) actually operated in accordance with an operation instruction for a predetermined operation of the operating unit 120 (moving unit 100, processing unit 110).

[0063] The display 130 has a function for inputting (operating) information to the control unit 39 that controls the operation unit 120 (movement unit 100, processing unit 110), for example. The control unit 39 has a display control unit 391 that displays "operation buttons" on the display 130 for inputting operation instructions for predetermined operations of the operation unit 120 (movement unit 100, processing unit 110) to the control unit 39. The display control unit 391 is one of the functional components of the control unit 39. The "operation buttons" displayed on the display 130 are realized, for example, as a touch panel function on the display 130.

[0064] More specifically, the input to the control unit 39 input to the display 130, more specifically, the operation instruction for a predetermined operation of the operating unit 120 (moving unit 100, processing unit 110), may include, for example, an operation instruction value (e.g., the movement speed of the moving unit 100 or the processing speed of the processing unit 110) indicating how the operating unit 120 (moving unit 100, processing unit 110) is desired to operate. The operation instruction (value) may also include information such as the temperature (ambient temperature) of a predetermined processing area in the processing apparatus 10, the amount of water (e.g., the amount of water in the spinner) to be used in the predetermined processing area in the processing apparatus 10, the brightness of a light source (light, e.g., UV) to be used in the predetermined processing area in the processing apparatus 10, and the position of the predetermined processing area in the processing apparatus 10 (operating position, e.g., close to the chuck table). Furthermore, the operation instruction (value) may be a set value that has not yet been used to execute the operation at the current setting, but can be used to transition to the execution of the operation by a final decision operation using the input validity area described below.

[0065] Fig. 4 is a block diagram showing in simplified form the components (functional components) of the processing device 10. As shown in Fig. 4, the processing device 10 has an operating unit 120 including a moving unit 100 and a processing unit 110. The processing device 10 also has a control unit 39 including a display control unit 391, which is connected to the operating unit 120. The processing device 10 also has a display 130 that is connected to the control unit 39 (display control unit 391) and can display operation buttons 131.

[0066] The control unit 39 and the display 130 may be part of the processing device 10 (for example, integrally incorporated into the housing of the processing device 10), or may be an external device capable of communicating with the processing device 10 (for example, a controller for a mobile terminal, tablet terminal, etc.).

[0067] FIG. 5 is a diagram showing an example of a display mode of the display 130 (the display 130 including the operation button 131). FIG. 5 exemplifies X, Y, Z, and θ as axes to be selected. Among these, X refers to the X-axis direction in which the moving unit 100 (table feed mechanism) moves the holding table 18, Y and Z refer to the Y-axis direction and Z-axis direction in which the processing unit 110 (the first processing unit 11 and the second processing unit 12) moves, and θ may refer to the rotation direction in which the holding table 18 rotates. The speed may also include setting areas for setting the movement speed in each of the X, Y, Z, and θ directions. In the example of FIG. 5, the movement speed in the X-axis direction is set to 1000 mm / s, the movement speed in the Y-axis direction is set to 900 mm / s, the movement speed in the Z-axis direction is set to 800 mm / s, and the movement speed (rotation speed) in the θ direction is set to 10° / s. Furthermore, distance may refer to the movement distance (movement amount) in each of the X, Y, Z, and θ directions per unit time or per unit process. In the example of FIG. 5, the unit movement distance (unit movement amount) in the X-axis direction is set to 50 mm, the unit movement distance (unit movement amount) in the Y-axis direction is set to 50 mm, the unit movement distance (unit movement amount) in the Z-axis direction is set to 50 mm, and the unit movement distance (unit movement amount) in the θ direction is set to 60°. Furthermore, the current position may refer to the position (or estimated position) in each of the X, Y, Z, and θ directions of the holding table 18 and the processing unit 110 (first processing unit 11 and second processing unit 12). In the example of FIG. 5, after setting a predetermined reference position, the current position in the X-axis direction is set to 123 mm, the current position in the Y-axis direction is set to 234 mm, the current position in the Z-axis direction is set to 345 mm, and the current position in the θ direction is set to 12°.

[0068] Looking at the bottom of Figure 5, you can see areas F2, F3, F4, F5, F7, F8, F9, F10, and F11. Areas F2-F5 and F8-F11 each consist of a combination of a value display area above and a command area (operation buttons) below. For F2, the value display area is "100 mm / s" and the command area is "-low speed specified distance feed." For F3, the value display area is "1000 mm / s" and the command area is "-specified distance feed." For F4, the value display area is "100 mm / s" and the command area is "-low speed feed." For F5, the value display area is "1000 mm / s" and the command area is "-feed." For F7, rather than a combination of a value display area and a command area, it is an area representing initial (initialization) (an input operation area and operation button for commanding initialization). For F8, the value display area is "100mm / s" and the instruction area is "+Slow specified distance feed." For F9, the value display area is "1000mm / s" and the instruction area is "+Specified distance feed." For F10, the value display area is "100mm / s" and the instruction area is "+Slow feed." For F11, the value display area is "1000mm / s" and the instruction area is "+Feed."

[0069] The relationship between the display screen illustrated in Figure 5 and the display screens illustrated in Figures 6 to 12 described below may be such that the operation parameters of the operating units (moving units, processing units) are set by operating the display screen in Figure 5, and the set operation parameters are put into action by operating the display screens in Figures 6 to 12 (for example, by operating the operation instruction button and thus the input valid area).

[0070] Fig. 6 is a diagram showing an example of an input display unit (display) including an operation instruction button (operation button). As shown in Fig. 6, the operation instruction button (operation button) is configured to include at least one of an input valid area that accepts input of an operation instruction (instruction) for a predetermined operation of the operation unit and an input invalid area that does not accept input of an operation instruction (instruction) for the predetermined operation of the operation unit. In Fig. 6, the operation instruction button is configured from a rectangular touch panel type input operation unit displayed in the lower left of the input display unit, and is configured from a rectangular input valid area located in the center and an input invalid area located on the periphery of the input valid area.

[0071] The input valid area is, for example, an area where a predetermined operation (e.g., touch) can be performed on the area of ​​the operation button to cause the operation unit (movement unit, processing unit) to perform a predetermined operation. The input invalid area is, for example, an area where a predetermined operation (e.g., touch) can not be performed on the area of ​​the operation button to cause the operation unit (movement unit, processing unit) to perform a predetermined operation.

[0072] For example, while touching the input valid area of ​​the operation button, it is possible to move a predetermined axis of the operation unit (movement unit, processing unit) at a set speed, change the setting of the movement speed, etc. Also, by touching the input valid area of ​​the operation button, it is possible to make the processing unit of the processing device perform a predetermined operation.

[0073] Here, the display control unit 391 changes the size of the input valid area of ​​the action button 131 based on the setting value related to the predetermined action set in the control unit 39.

[0074] 7A and 7B are diagrams showing a first example of display control of the input display unit (display) 130 by the display control unit 391. In Fig. 7A and Fig. 7B, a case is illustrated in which the "setting value related to the predetermined operation set in the control unit 39" is the operation speed (movement speed by the moving unit, processing speed by the processing unit) of the operation unit (movement unit, processing unit).

[0075] 7A, the operation speed (set value) of the operation unit is set to a relatively slow 10 mm / sec, and the size of the input valid area of ​​the operation button 131 is set to a relatively large size. That is, the proportion of the input valid area in the operation button 131 is larger than the proportion of the input invalid area, and the operator can handle the input valid area with high operability. Since the operation speed (set value) of the operation unit is set to a relatively slow 10 mm / sec and does not affect the operation stability or operation safety of the operation unit, the input valid area is enlarged to prioritize high operability for the operator.

[0076] 7B, the operation speed (set value) of the operation unit is set to a relatively fast 500 mm / sec, and the size of the input valid area of ​​the operation button 131 is set to a relatively small size. That is, the proportion of the input valid area in the operation button 131 is smaller than the proportion of the input invalid area, intentionally reducing the operability of the input valid area by the operator. Since the operation speed (set value) of the operation unit is set to a relatively fast 500 mm / sec, which may affect the operational stability and operational safety of the operation unit, the input valid area is made small to intentionally reduce the operability by the operator, encouraging caution and alerting the operator.

[0077] Here, the change in size of the input effective area of ​​the operation button 131 may be linear expansion or contraction, or may be set to change in a stepwise manner, such as the same size when the operation speed (set value) of the operation unit is in the range of 0 to 50 mm / sec, the same size when the operation speed (set value) of the operation unit is in the range of 50 to 150 mm / sec, and the same size when the operation speed (set value) of the operation unit is in the range of 150 to 250 mm / sec.

[0078] In this way, the "setting value related to the predetermined operation set in the control unit 39" may be the movement speed of the operation unit (movement unit, processing unit), and the display control unit 391 may reduce the input valid area as the movement speed of the operation unit (movement unit, processing unit) increases. In this case, the operation button or the entire input valid area (input receiving area) may become smaller, or the input invalid area (information display area described later) may become larger.

[0079] Furthermore, in addition to changing the size of the valid input area of ​​the operation button 131, display control may be performed to change the degree of emphasis of each of the valid input area and the invalid input area. For example, if the valid input area is large, the valid input area may be displayed in a color that makes it more noticeable than the invalid input area in order to improve operability of the valid input area. On the other hand, if the valid input area is small, the valid input area may be displayed in a color that makes it less noticeable than the invalid input area in order to reduce operability of the valid input area.

[0080] 8A and 8B are diagrams showing a second example of display control of the input display unit (display) 130 by the display control unit 391. Similar to Fig. 7A and Fig. 7B, Fig. 8A depicts a case where the movement speed (set value) of the movement unit is slow, the risk is low, and the effective input area of ​​the movement button 131 is large, and Fig. 8B depicts a case where the movement speed (set value) of the movement unit is fast, the risk is high, and the effective input area of ​​the movement button 131 is small.

[0081] 8A and 8B, the display control unit 391 further displays, on the input display unit (display) 130, an information display area in which identification information based on the operation speed (setting value) of the operation unit is displayed. The information display area is displayed overlapping the operation button, and the area where the information display area of ​​the operation button overlaps becomes an input invalid area, and the display control unit changes the size of the information display area based on the operation speed (setting value) of the operation unit. That is, in FIGS. 8A and 8B, an input invalid area that does not contribute to determining the operation speed (setting value) of the operation unit is used to display the information display area in which identification information based on the operation speed (setting value) of the operation unit is displayed (at least a part of the input invalid area is replaced with the information display area).

[0082] Here, the "information display area displaying identification information based on the setting value" that the display control unit 391 causes to be displayed on the input display unit (display) 130 may be, for example, the setting value itself (e.g., the movement speed of the moving unit or the processing speed of the processing unit), or in addition / instead, it may be an area that displays information (including letters, figures (patterns), symbols, colors, etc.) indicating the validity of the setting (e.g., the movement speed of the moving unit is too fast or too slow, or the processing speed of the processing unit is too fast or too slow) or the safety of the setting (e.g., the movement speed of the moving unit or the processing speed of the processing unit is appropriate and safe, or the movement speed of the moving unit or the processing speed of the processing unit is too fast or too slow and is dangerous).

[0083] 9A to 9D are diagrams showing examples of information display areas displayed using invalid input areas. In each of Figures 9A to 9D, the left side shows a state in which the valid input area is large and the information display area (invalid input area) is small, and the right side shows a state in which the valid input area is small and the information display area (invalid input area) is large.

[0084] In FIG. 9A, the left information display area displays the operating speed (set value) of the operating unit as "10 mm / sec," and the right information display area displays the operating speed (set value) of the operating unit as "500 mm / sec." In FIG. 9B, the left information display area displays a symbol (one arrow) indicating that the operating speed (set value) of the operating unit is relatively slow, and the right information display area displays a symbol (three arrows) indicating that the operating speed (set value) of the operating unit is relatively fast. In FIG. 9C, the left information display area displays the word "Slow" indicating that the operating speed (set value) of the operating unit is relatively slow, and the right information display area displays the word "Fast!" indicating that the operating speed (set value) of the operating unit is relatively fast. In FIG. 9D, the left information display area displays the word "Safe" indicating that the operating speed (set value) of the operating unit is appropriate and safe, and the right information display area displays the word "Danger!" indicating that the operating speed (set value) of the operating unit is too fast and dangerous.

[0085] 8A and 8B, the display control unit 391 further displays a setting input area for setting the operation speed (setting value) of the operation unit in the upper left portion of the input display unit (display) 130. The operation speed (setting value) of the operation unit may be set by cooperating the setting input area with the operation button (operation instruction button). For example, the setting input area may be used to set the operation speed (setting value) of the operation unit as a default.

[0086] As shown in FIGS. 8A and 8B, the display control unit 391 may display the operation control button in the upper right corner of the input display unit (display) 130 when the operation speed (setting value) of the operation unit is a "predetermined value." In this case, input to the operation button (operation instruction button) may be valid only while an input is being made to the operation control button. For example, the operator may execute a process by operating the input valid area of ​​the operation button (operation instruction button) with the finger of one hand while continuing to press (touch) the operation control button with the finger of the other hand. Alternatively, when the operator presses (touches) the operation control button once, a predetermined valid operation time (for example, several seconds to several tens of seconds) is set, and during this valid operation time, the operator may operate the input valid area of ​​the operation button (operation instruction button) to execute a process.

[0087] Here, the case where the operating speed (set value) of the operating unit is a "predetermined value" can be defined as, for example, a case where caution or a warning is required when actually (actually) transitioning to this operating speed. More specifically, if the "operating speed (set value) of the operating unit" is likely to affect the operational stability or operational safety of the processing device (e.g., an operating unit including a moving unit and a processing unit), the set value may be defined as corresponding to a "predetermined value." Alternatively, if the values ​​of the moving speed of the moving unit and the processing speed of the processing unit are each within an appropriate range (not unnatural), but the balance between the moving speed of the moving unit and the processing speed of the processing unit is inappropriate (one is too large or too small compared to the other), the operating speed (set value) of the operating unit may be defined as corresponding to a "predetermined value."

[0088] 10A and 10B are diagrams showing a third example of display control of the input display unit (display) 130 by the display control unit 391. In Fig. 10A and 10B, three setting areas (setting input areas) 1-3 are depicted lined up in order from top to bottom as setting areas (setting input areas) displayed in the upper left part of the input display unit (display) 130. In Fig. 10A and 10B, three operation buttons (information display areas 1-3) are depicted lined up in order from left to right as operation buttons (including input valid areas and information display areas (input invalid areas)) displayed in the lower part of the input display unit (display) 130.

[0089] As shown in FIGS. 10A and 10B, the display control unit 391 changes the display position of the operation buttons based on the operation speed (setting value) of the operation unit. For example, FIG. 10A shows a normal state in which the operation speed (setting value) of the operation unit is set within an appropriate range, and three operation buttons (information display areas 1-3) are lined up in order (in a straight line) from left to right. On the other hand, FIG. 10B shows a warning state in which the operation speed (setting value) of the operation unit has increased and exceeded a predetermined threshold, and the leftmost operation button (the operation button including information display area 1) is moved higher than the other two operation buttons (the operation buttons including information display areas 2 and 3), thereby encouraging the operator to exercise caution or to pay attention when setting (changing) the operation speed (setting value) of the operation unit.

[0090] In this case, the display mode of the operation button whose display position is changed (operation button including information display area 1) may be different from the display mode of the operation button whose display position is not changed (operation button including information display areas 2 and 3). For example, the input valid area of ​​the operation button whose display position is changed (operation button including information display area 1) may be highlighted smaller and in a different color than the input valid area of ​​the operation button whose display position is not changed (operation button including information display areas 2 and 3).

[0091] In Figures 10A and 10B, the display position of the leftmost action button (action button including information display area 1) has been changed, but this is just one example, and the display position of at least one of the middle action button (action button including information display area 2) and the rightmost action button (action button including information display area 3) may also be changed.

[0092] Fig. 11 is a diagram showing a fourth example of display control of the input display unit (display) 130 by the display control unit 391. As shown in Fig. 11, when the operation speed (set value) of the operation unit is a predetermined value, the display control unit 391 displays a notification area that notifies information based on the operation speed (set value) of the operation unit, and enables input to the operation button when a confirmation button displayed in the notification area is selected.

[0093] FIG. 11 illustrates an example in which the operating speed (setting value) of the operating unit is set to 300 mm / s. A pop-up display (warning display) appears as a notification area on the input display unit (display) 130. The pop-up display (warning display) appears immediately after inputting the setting area and / or immediately after inputting an instruction. In the example of FIG. 11, the pop-up display (warning display) displays a message stating, “[Warning] The axis speed of the button you just pressed is 300 mm / s. Operating an axis with your hands close to the moving part may result in serious injury, such as bone fracture or amputation.” The pop-up display also displays confirmation buttons for “I understand the risks” and “Change axis speed.” By selecting (approving or deciding) the confirmation buttons for “I understand the risks” and “Change axis speed,” the setting operation (input operation) of the operating unit’s operating speed (setting value) may be enabled. Forcing the operator to perform a process involving such a pop-up display (warning display) can further encourage caution and alertness when setting (changing) the operating speed (setting value) of the operating unit.

[0094] 12A and 12B are diagrams illustrating a fifth example of display control of the input display unit (display) 130 by the display control unit 391. The control unit 39 has a set value related to the movement speed of the movement unit in a predetermined movement, i.e., the movement speed (set value) of the movement unit. The movement buttons include a first-speed movement button (first-speed movement instruction button) for inputting a movement instruction for the predetermined movement at a first speed based on the set value, i.e., the first movement speed (set value) of the movement unit, and a second-speed movement button (second-speed movement instruction button) for inputting a movement instruction for the predetermined movement at a second speed faster than the first speed, i.e., the second movement speed (set value) of the movement unit. When the set value related to the movement speed of the movement unit in a predetermined movement, i.e., the movement speed (set value) of the movement unit, is a predetermined value, the display control unit 391 does not display the first-speed movement button (first-speed movement instruction button) or the second-speed movement button (second-speed movement instruction button).

[0095] In FIG. 12A, the set value for the movement speed in a specified operation of the operation unit, i.e., the operation speed (set value) of the operation unit, is within the appropriate range, and both the first speed operation button (first speed operation instruction button) and the second speed operation button (second speed operation instruction button) are displayed on the input display unit (display) 130.

[0096] 12B shows a case where the set value for the movement speed in a predetermined operation of the operation unit, i.e., the operation speed (set value) of the operation unit, is too fast and reaches a "predetermined value" (for example, when it exceeds a predetermined threshold value for ensuring operation stability and operation safety), and the first speed operation button (first speed operation instruction button) continues to be displayed on the input display unit (display) 130, while the second speed operation button (second speed operation instruction button) disappears from the display screen of the input display unit (display) 130. This makes it possible to urge the operator to exercise caution or to call attention to the setting (change) of the operation speed (set value) of the operation unit.

[0097] The first to fifth examples of the display control of the input display unit (display) 130 by the display control unit 391 described above can be executed in combination with each other. By executing these examples in combination, it is possible to be more careful and call attention to the setting (changing) of the operating speed (setting value) of the operating unit.

[0098] As described above, the processing device of this embodiment processes a workpiece. The processing device includes an operating unit having a moving unit that moves within the processing device and a processing unit that processes the workpiece; a control unit that controls the operating unit; and an input display unit connected to the control unit for displaying and inputting information about the processing device to the control unit. The control unit has a display control unit that displays operation buttons on the input display unit for inputting operation instructions for a predetermined operation of the operating unit to the control unit. The operation buttons have at least one of an input valid area that accepts input instructions and an input invalid area that does not accept input instructions. The display control unit changes the size of the input valid area of ​​the operation button based on a setting value for the predetermined operation set in the control unit. This allows operation instructions to the processing device and, ultimately, the actual operation of the processing device to be executed preferably (e.g., smoothly and conveniently). Furthermore, for example, the operator can sense operational risks from the screen display.

[0099] The embodiments of the present invention are not limited to the above-described embodiments and modifications, and may be variously changed, substituted, or modified without departing from the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological advances or other derived technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea of ​​the present invention. [Industrial Applicability]

[0100] As described above, the present invention can be applied to a processing device that executes operational instructions to the processing device and thus the actual operation of the processing device in an appropriate manner (e.g., smoothly and conveniently), as well as to a controller or user interface of the processing device. [Explanation of symbols]

[0101] 10: Processing equipment 11: 1st processing section (processing section) 12:Second processing section (processing section) 39: Control section 391: Display control unit 100: Moving part 110: Processing department 120: Operating part 130: Display (input display section) 131: Action button S: Workpiece

Claims

1. A processing device for processing a workpiece, an operating unit having a moving unit that moves within the processing device and a processing unit that processes the workpiece; a control unit that controls the operation unit; an input / display unit connected to the control unit for displaying information relating to the processing device and inputting the information to the control unit; Equipped with the control unit has a display control unit that displays, on the input display unit, an operation button for inputting an operation instruction for a predetermined operation of the operation unit to the control unit; the operation button includes at least one of an input valid area for accepting input of an instruction and an input invalid area for not accepting input of an instruction, the display control unit changes the size of the input effective area of ​​the action button based on a setting value related to the predetermined action set in the control unit; A processing device characterized by:

2. the display control unit further causes the input display unit to display an information display area in which identification information based on the setting value is displayed; The information display area is displayed over the operation button, The area where the information display area of ​​the operation button overlaps becomes the input invalid area, the display control unit changes the size of the information display area based on the setting value; 2. The processing device according to claim 1.

3. the display control unit further displays a setting input area for setting the setting value on the input display unit.

3. The processing device according to claim 1 or 2.

4. the set value is the movement speed of the operating unit, the display control unit reduces the input effective area as the set value increases; 3. The processing device according to claim 1 or 2.

5. the display control unit changes the display position of the operation button based on the setting value.

3. The processing device according to claim 1 or 2.

6. the display control unit displays an operation control button on the input display unit when the setting value is a predetermined value; input to the operation button is enabled only while the operation control button is being input; 3. The processing device according to claim 1 or 2.

7. The display control unit When the set value is a predetermined value, displaying a notification area that notifies information based on the set value; When a confirmation button displayed in the notification area is selected, input to the operation button is enabled.

3. The processing device according to claim 1 or 2.

8. the control unit has a set value related to a movement speed in a predetermined operation of the operation unit, the operation buttons include a first speed operation button for inputting an operation instruction for the predetermined operation at a first speed based on the set value, and a second speed operation button for inputting an operation instruction for the predetermined operation at a second speed faster than the first speed, the display control unit does not display the first speed operation button or the second speed operation button when the set value is a predetermined value; 3. The processing device according to claim 1 or 2.

Images