Liquid supply device

Abstract

To provide a liquid supply device that can reduce flow rate fluctuations of fluid to be supplied to a supply destination.SOLUTION: A liquid supply device 1 comprises: a pump 20 incorporated in a pipe line 11 for supplying fluid toward a supply destination 2, and transferring the fluid in a tube 20c provided on an outer peripheral side of a rotating body 20a by rotating the rotating body; a flowmeter 29 for detecting the flow rate of the fluid passing through the pipe line; and a control unit 31 for controlling a motor 20d for rotating the rotating body. The control unit executes first control for rotating the motor at a set rotation speed set with respect to a target flow rate, and second control for performing feedback control of the motor so that a measured value of the flowmeter becomes the target flow rate when a stable flow rate is determined by referring to the measured value of the flowmeter during the execution of the first control.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a liquid supply device that supplies a liquid to a supply destination. [Background technology]

[0002] 2. Description of the Related Art Conventionally, devices that supply liquids to various destinations have been known. For example, Patent Document 1 below discloses a liquid supply device equipped with a tube pump including a rotor with a pumping roller that presses a part of a pumping tube against the inner surface of a tube casing. A first pipe from a water container is attached to a liquid inlet at one end of the pumping tube, and a second pipe that supplies water to a supply destination is attached to a liquid outlet at the other end of the pumping tube. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-190245 Summary of the Invention [Problem to be solved by the invention]

[0004] However, with the liquid supply device described in Patent Document 1 above, there was a concern that the amount of liquid supplied (flow rate per unit time) was likely to fluctuate due to residual gas in the pumping tube or pipe, deterioration of the pumping tube, etc.

[0005] The present disclosure has been made in consideration of the above circumstances, and has an object to provide a liquid supplying device that can reduce fluctuations in the flow rate of a fluid supplied to a supply destination. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, the liquid supply device disclosed herein comprises a pump incorporated in a pipeline that supplies fluid to a destination, and that transports fluid in a tube provided on the outer periphery of the rotating body by rotating the rotating body, a flow meter that detects the flow rate of fluid passing through the pipeline, and a control unit that controls a motor that rotates the rotating body, and is characterized in that the control unit performs a first control that rotates the motor at a set rotation speed that is set for a target flow rate, and a second control that, when it is determined that a stable flow rate has been achieved by referring to the measurement value of the flow meter during execution of the first control, feedback controls the motor so that the measurement value of the flow meter becomes the target flow rate. [Effects of the Invention]

[0007] The liquid supply device according to the present disclosure is configured as described above, and is therefore able to reduce fluctuations in the flow rate of the fluid supplied to the supply destination. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a schematic system diagram illustrating an example of a liquid supply apparatus according to an embodiment of the present disclosure. [Figure 2] (a) is a schematic flowchart showing an example of setting pre-setting items that are set before performing an example of a basic operation performed in the liquid supply device, and (b) is a schematic graph explaining the example of setting the pre-setting items. [Figure 3] 10 is a schematic flowchart showing an example of the basic operation. [Figure 4] 1 is a schematic time chart showing an example of the basic operation. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In FIG. 1, pipelines (pipes and tubes) and the like that serve as paths through which fluids such as liquids pass are schematically shown by solid and broken lines.

[0010] 1 to 4 are diagrams that schematically show an example of a liquid supply device according to the present embodiment and an example of a basic operation that is executed using the liquid supply device. 1, the liquid supply device 1 according to this embodiment is incorporated into a pipeline (11, 21) that supplies a fluid to a supply destination (2), and includes a pump 20 that transfers the fluid in a tube 20c provided on the outer periphery of a rotor 20a by the rotation of the rotor 20a. This configuration enables relatively constant and continuous transfer, and also prevents the fluid from coming into contact with the pump casing or pump moving parts, thereby preventing contamination and the like. The liquid supply device 1 includes a flowmeter 29 that detects the flow rate of the fluid passing through the pipelines (11, 21), and a control unit 31 that controls the motor 20d that rotates the rotor 20a. As will be described in detail later, the control unit 31 executes a first control that rotates the motor 20d at a set rotation speed that is set for a target flow rate, and a second control that, if it determines that a stable flow rate has been achieved by referring to the measurement value of the flowmeter 29 during the execution of the first control, performs feedback control of the motor 20d so that the measurement value of the flowmeter 29 becomes the target flow rate, as shown in Figures 3 and 4.

[0011] During initial startup of the liquid supply device 1, when supply begins, when switching the fluid supplied to the supply destination (2), and other times, the presence of air (gas) in the pathway, including the conduits (11, 21), tends to cause large fluctuations in the flow rate of the liquid as the fluid. In such cases, for example, if feedback control were performed, there is a concern that an error might occur due to an output exceeding the upper limit of the motor 20d (motor driver) of the pump 20, or that the rotational speed might be controlled too low, resulting in a long time being required to achieve the target flow rate. According to the control mode described above, the motor 20d is rotated at the set rotational speed until a stable flow rate is reached. Therefore, the motor 20d is driven at a constant rotational speed regardless of fluctuations in the flow rate. However, once the stable flow rate is reached, feedback control is performed based on the measurement value of the flowmeter 29. This reduces the likelihood of such concerns and stabilizes the flow rate of the fluid supplied to the supply destination (2). Furthermore, for example, if a constant control is performed at a preset rotation speed relative to a target flow rate, there is a concern that a flow rate shortage may occur due to tube deterioration or changes in the route, but with the control mode described above, feedback control is performed once a stable flow rate is achieved, making such concerns less likely to occur and reducing flow rate fluctuations. In other words, liquid can be supplied at a flow rate according to the target flow rate.

[0012] 1, the liquid supply device 1 includes a storage section 10 that stores a liquid as a fluid to be supplied to a supply destination (2). The liquid supply device 1 includes a first conduit 11 that has a first end 13 that opens below the liquid level in the storage section 10 and a second end 14 that is connected to a first connection port 4 of a flow path 3 of the supply destination (2) to form a conduit. The liquid supply device 1 includes a second conduit 21 that has a first end 23 that opens above the liquid level in the storage section 10 and a second end 24 that is connected to a second connection port 5 of the flow path 3 to form a conduit.

[0013] Although described in detail below, the control unit 31 controls switching of the pump 20 constituting a transfer direction switching unit that can switch the transfer direction of the fluid, and executes a supply step in which the liquid is supplied to the flow path 3 via the first pipe 11, and a recovery step in which air is supplied to the flow path 3 via the second pipe 21 to recover the liquid. With this configuration, in the supply step, the liquid stored in the reservoir 10 is supplied to the flow path 3 of the supply destination (2) via the first pipe 11, and is returned to the reservoir 10 via the second pipe 21. On the other hand, in the recovery step, air is supplied to the flow path 3 via the second pipe 21, and the liquid remaining in the second pipe 21, the flow path 3, and the first pipe 11 is replaced with air and returned to the reservoir 10, thereby preventing the liquid from remaining in the respective pipes 11, 21, and the flow path 3.

[0014] In this embodiment, liquid supplying device 1 includes, as reservoir 10, a plurality of reservoirs 10A, 10B, and 10C (three in the illustrated example) that each store liquid. The liquid supply device 1 is provided with a first conduit switching unit 15 which selectively switches between each of branch conduits 12A, 12B, 12C of a first conduit 11, which is branched into multiple conduits at the first end 13 side and has first ends 13A, 13B, 13C that open below the liquid level in each storage unit 10A, 10B, 10C, and which connects the first end 13 side to the second end 14 side, and a second conduit switching unit 25 which selectively switches between each of branch conduits 22A, 22B, 22C of a second conduit 21, which is branched into multiple conduits at the first end 23 side and has first ends 23A, 23B, 23C that open above the liquid level in each storage unit 10A, 10B, 10C, and which connects the second end 24 side to the second end 24 side. The control unit 31, the details of which will be described later, controls the switching of the first line switching unit 15, the second line switching unit 25 and the pump 20, and executes a supply process in which the liquid in each storage unit 10A, 10B, 10C is supplied, followed by a recovery process in which the liquid in each storage unit 10A, 10B, 10C is recovered.

[0015] With the above configuration, the liquid in each of the reservoirs 10A, 10B, and 10C can be recovered after being supplied to the flow path 3 of the supply destination (2), thereby preventing a decrease in the liquid in each of the reservoirs 10A, 10B, and 10C. Furthermore, the liquid supplied immediately before can be prevented from remaining in each of the pipelines 11 and 21 and the flow path 3, thereby preventing a change in the concentration of the liquid when the next liquid is supplied. Furthermore, even in cases where a chemical reaction occurs when the liquids stored in each of the reservoirs 10A, 10B, and 10C mix with each other in each of the pipelines 11 and 21 and the flow path 3 depending on the type of liquid, the liquid can be prevented from remaining, thereby preventing the occurrence of such a chemical reaction. Specifically, in this embodiment, liquid supplying device 1 constitutes a polishing device that supplies a chemical polishing liquid to a flow path 3 of a mold 2 as a supply destination, and chemically polishes the inner peripheral surface of flow path 3. Liquid supplying device 1 is equipped with a first reservoir 10A that stores the chemical polishing liquid, a second reservoir 10B that stores a cleaning / neutralizing liquid, and a third reservoir 10C that stores a rinsing liquid, and is configured to switch among these and supply the liquid to flow path 3 of mold 2. Hereinafter, when it is not necessary to distinguish between these, they will be described as reservoir 10.

[0016] The mold 2 may be a molding mold installed in various molding machines such as an injection molding machine. In this case, the flow path 3 may be a medium flow passage through which a temperature-controlling medium circulated by a mold temperature controller that controls the temperature of the mold 2 passes. That is, the mold 2 may be configured such that a first connection port 4, which is the upstream end of the flow path 3, is connected to a medium supply path of the mold temperature controller, and a second connection port 5, which is the downstream end of the flow path 3, is connected to a medium return path of the mold temperature controller. Such a mold 2 may be formed using a metal 3D printer (three-dimensional modeling). Such a mold 2 allows the flow path 3 to be formed into a complex shape, such as by aligning it with the cavity (core) shape, but the inner surface of the flow path 3 must be smooth. The liquid supply device 1 may be configured to supply a chemical polishing liquid to the flow path 3 of such a mold 2 to smooth the inner surface of the flow path 3. The supply destination is not limited to such a mold 2, and may also be other objects having flow paths 3 that require chemical polishing. The liquid supply device 1 may be configured as a polishing device that polishes the flow path 3 by supplying a liquid containing an abrasive instead of a chemical polishing liquid, or as a cleaning device that supplies a cleaning liquid to the flow path 3 that is the supply target to be cleaned and cleans the flow path 3, or as a device that supplies liquid to various destinations.

[0017] In this embodiment, the liquid supplying device 1 includes a heating container 6 that houses the mold 2 and heats the mold 2, as a heating unit that heats the mold 2. With this configuration, the mold 2 can be heated, and when the liquid is heated, a drop in the temperature of the supplied liquid can be suppressed. The heating container 6 is a bottomed container that opens upward so as to accommodate the mold 2, and has a bottom and a side peripheral wall. A first connection line connecting the first connection port 4 of the flow path 3 of the mold 2 to the second end 14 of the first pipe line 11 and a second connection line connecting the second connection port 5 of the flow path 3 to the second end 24 of the second pipe line 21 may be provided to penetrate the side peripheral wall of the heating container 6. That is, the second ends 14, 24 of the first pipe line 11 and the second pipe line 21 may be connected to the first connection port 4 and the second connection port 5 of the flow path 3 via the first connection line and the second connection line. Instead of connecting the first connection port 4 and the second connection port 5 of the flow path 3 via the side peripheral wall of the heating container 6, the first pipe line 11 and the second pipe line 21 may be inserted through the upper opening of the heating container 6 and connected to the first connection port 4 and the second connection port 5 of the flow path 3.

[0018] The heating container 6 may be provided with a lid that opens and closes the upper opening of the heating container 6. The lid and the bottom and side walls of the heating container 6 may be made of a material having heat insulation properties, or may be covered with an appropriate heat insulating material. This heating container 6 is configured to heat the mold 2 with a heating medium inside the heating container 6. In the illustrated example, a circulation path 7 is connected to the heating container 6, which circulates and supplies a liquid as a heating medium heated by a heating unit 9. The liquid constituting the heating medium is not limited to water, and may be an oil-based or alcohol-based liquid, etc. A drain port or drain path for discharging (overflowing) the liquid may be provided at an appropriate location, such as the upper end of the side peripheral wall of the heating container 6. The heating container 6 is also provided with a supply level meter for detecting the liquid supply level and a lower limit level meter for detecting an abnormal (lower limit) level. The supply level meter may be configured to detect approximately the same level as the upper end of the mold 2 in the heating container 6 or a level above the upper end, so that the entire mold 2 in the heating container 6 is immersed in the liquid. A drain (drain valve) for discharging the liquid in the heating container 6 is provided at an appropriate location, such as the bottom of the heating container 6.

[0019] The circulation path 7 is provided with a circulation pump 8 that circulates the heating medium. The circulation path 7 also has a bypass path through which the liquid passes when circulating the liquid without passing through the heating container 6. The heating unit 9 is equipped with a plurality of tank-like containers (two in the illustrated example) into which heaters serving as heat sources are inserted and which store liquid. The containers of the heating unit 9 may be provided with a thermostat that stops the heaters to prevent overheating. An appropriate drain pan may be provided below the containers of the heating unit 9. The heating unit 9 is controlled by the control unit 31 based on the temperature detected by a temperature sensor provided at an appropriate location so that the temperature of the liquid in the heating container 6 becomes a preset target temperature (for example, about 60 to 95 degrees). In the illustrated example, a temperature sensor is provided in each of the heating container 6 and the circulation path 7 downstream of the pump 8.

[0020] Before carrying out the supplying step described below, a preheating step may be carried out in which the heating unit 9 preheats the mold 2 so that the temperature of the mold 2 (the liquid in the heating container 6) reaches a preset target temperature. Furthermore, instead of providing the heating unit 9 outside the heating container 6, a heater constituting the heating unit may be inserted into the liquid in the heating container 6, or a heater may be attached to or embedded in the bottom or peripheral side wall of the heating container 6. The heating unit for heating the mold 2 is not limited to the above-described heating unit using a heated liquid, but may be one that heats the mold 2 by supplying steam or gas into the heating container 6, or one that heats the mold 2 by heat transfer by bringing an appropriate heat transfer body into contact with the outer peripheral surface of the mold 2. Furthermore, a configuration may be adopted in which no heating unit for heating the mold 2 is provided.

[0021] First reservoir 10A, second reservoir 10B, and third reservoir 10C constituting reservoir 10 are container-shaped and capable of storing liquid. First reservoir 10A, second reservoir 10B, and third reservoir 10C each have a bottom and peripheral side walls and may be open upward, or may have a top wall or lid that seals the upper side. First reservoir 10A, second reservoir 10B, and third reservoir 10C may be provided in an appropriate leak-proof pan. The first reservoir 10A, the second reservoir 10B, and the third reservoir 10C may have the same capacity or different capacities. The capacities of the first reservoir 10A, the second reservoir 10B, and the third reservoir 10C, as well as the type and concentration of the chemical solution stored therein, may be appropriately determined depending on the material of the mold 2 to be chemically polished and the inner diameter and length of the flow path 3. Furthermore, drains (drain valves) for discharging the liquid from the first reservoir 10A, the second reservoir 10B, and the third reservoir 10C may be provided at appropriate locations, such as the bottoms of the first reservoir 10A, the second reservoir 10B, and the third reservoir 10C. Appropriate level gauges for detecting a drop in the liquid level in the first reservoir 10A, the second reservoir 10B, and the third reservoir 10C may also be provided. Furthermore, a supply path or the like for supplying (replenishing) liquid to first reservoir 10A, second reservoir 10B, and third reservoir 10C may be connected.

[0022] The chemical polishing liquid stored in the first storage section 10A may be a liquid that dissolves and smoothes the metal surface (the inner surface of the flow path 3), for example, a strongly acidic hydrogen peroxide-based liquid containing hydrogen peroxide, or other liquids. The cleaning / neutralizing liquid stored in the second storage section 10B may be a liquid that cleans the inner surface of the flow path 3 as a pre-treatment for chemical polishing and neutralizes it as a post-treatment for chemical polishing, for example, a strongly alkaline sodium hydroxide-based liquid containing sodium hydroxide, or other liquids. The concentrations of the chemical solutions (chemical polishing solution and cleaning / neutralizing solution) stored in first reservoir 10A and second reservoir 10B may be adjusted to appropriate concentrations. Also, first reservoir 10A and second reservoir 10B may be provided with a concentration meter or the like that detects the concentration of the chemical solution. The rinse liquid stored in third reservoir 10C may be water (clean water). The liquid stored in each of the storage sections 10A, 10B, and 10C is not limited to the liquids described above, and various other liquids may be used. Furthermore, instead of storing different liquids in each of the storage sections 10A, 10B, and 10C, the same type of liquid may be stored in multiple storage sections. Furthermore, the number of storage sections 10 is not limited to three, and may be two, four, or more, or even one.

[0023] First pipe 11 has branch pipes 12 that branch into multiple parts on the side of first end 13. In this embodiment, the multiple branch pipes 12 include a first branch pipe 12A that communicates with first reservoir 10A, a second branch pipe 12B that communicates with second reservoir 10B, and a third branch pipe 12C that communicates with third reservoir 10C. In the illustrated example, first branch pipe 12A, second branch pipe 12B, and third branch pipe 12C are provided such that portions of first end 13A, 13B, and 13C hang down within reservoirs 10A, 10B, and 10C so that first end 13A, 13B, and 13C are positioned below the liquid level, but the present invention is not limited to this example. For example, the first ends 13A, 13B, 13C of the first branch pipeline 12A, the second branch pipeline 12B, and the third branch pipeline 12C may be arranged to open on the inner surface of the bottom or side wall of each storage section 10A, 10B, 10C, and may be connected to an appropriate connecting path that opens below the liquid level of each storage section 10A, 10B, 10C.

[0024] In the illustrated example, the first conduit switching unit 15 is provided in each of the branch conduits 12A, 12B, and 12C and is configured by liquid supply valves (15A, 15B, and 15C) that allow or block the passage of a liquid (fluid). The first branch conduit 12A is provided with a first liquid supply valve 15A, the second branch conduit 12B is provided with a second liquid supply valve 15B, and the third branch conduit 12C is provided with a third liquid supply valve 15C. The first liquid supply valve 15A, the second liquid supply valve 15B, and the third liquid supply valve 15C may be electromagnetic valves or the like that are controlled to open and close by a control unit 31, which will be described later. The first conduit switching unit 15 is not limited to valves that open and close the branch conduits 12A, 12B, and 12C, and may be configured by an appropriate multi-way switching valve or the like.

[0025] Second pipeline 21 includes branch pipelines 22 that branch into multiple branches on the side of first end 23. In this embodiment, the multiple branch pipelines 22 include a first branch pipeline 22A that communicates with first reservoir 10A, a second branch pipeline 22B that communicates with second reservoir 10B, and a third branch pipeline 22C that communicates with third reservoir 10C. In the illustrated example, first branch pipeline 22A, second branch pipeline 22B, and third branch pipeline 22C are provided such that portions of first ends 23A, 23B, and 23C hang down within reservoirs 10A, 10B, and 10C so that first ends 23A, 23B, and 23C are positioned above the liquid level, but the present invention is not limited to this example. For example, the first ends 23A, 23B, 23C of the first branch pipeline 22A, the second branch pipeline 22B, and the third branch pipeline 22C may be arranged to open on the inner surface of the side wall, ceiling wall, lid, etc. of each storage section 10A, 10B, 10C, and may be connected to an appropriate connecting path that opens above the liquid level of each storage section 10A, 10B, 10C.

[0026] In the illustrated example, the second conduit switching unit 25 is provided in each of the branch conduits 22A, 22B, and 22C and is configured by liquid return valves (25A, 25B, and 25C) that allow or block the passage of a liquid (fluid). A first liquid return valve 25A is provided in the first branch conduit 22A, a second liquid return valve 25B is provided in the second branch conduit 22B, and a third liquid return valve 25C is provided in the third branch conduit 22C. The first liquid return valve 25A, the second liquid return valve 25B, and the third liquid return valve 25C may be solenoid valves or the like that are controlled to open and close by a control unit 31, which will be described later. The second conduit switching unit 25 is not limited to valves that open and close the branch conduits 22A, 22B, and 22C, and may be configured by an appropriate multi-way switching valve or the like.

[0027] The liquid supply device 1 includes a first bypass path 16 that connects an intermediate portion of the first pipeline 11 with an intermediate portion of the second pipeline 21, and a second bypass path 26 that connects a portion of the second pipeline 21 closer to the first end 23 than the portion where the first bypass path 16 is connected with a portion of the first pipeline 11 closer to the second end 14 than the portion where the first bypass path 16 is connected. The liquid supply device 1 includes a first bypass switching unit (17, 18) that switches the first end 13 side of the first pipeline 11 between a state in which it is connected to the second end 14 of the first pipeline 11 and a state in which it is connected to the second end 24 of the second pipeline 21 via the first bypass path 16, and a second bypass switching unit (27, 28) that switches the first end 23 side of the second pipeline 21 between a state in which it is connected to the second end 24 of the second pipeline 21 and a state in which it is connected to the second end 14 of the first pipeline 11 via the second bypass path 26.

[0028] With the above configuration, when the first end 13 side of the first conduit 11 is connected to the second end 14 of the first conduit 11 and the first end 23 side of the second conduit 21 is connected to the second end 24 of the second conduit 21, the liquid supplied from the reservoir 10 passes through the flow path 3 of the mold 2 so as to flow in from the first connection port 4 and flow out from the second connection port 5. On the other hand, when the first end 13 side of the first conduit 11 is connected to the second end 24 of the second conduit 21 via the first bypass path 16 and the first end 23 side of the second conduit 21 is connected to the second end 14 of the first conduit 11 via the second bypass path 26, the liquid supplied from the reservoir 10 passes through the flow path 3 of the mold 2 so as to flow in from the second connection port 5 and flow out from the first connection port 4. In other words, the flow direction of the liquid passing through the flow path 3 of the mold 2 can be switched. This allows the inner surface of the flow path 3 of the mold 2 to be effectively chemically polished by switching the flow direction, even in cases where the efficiency of chemical polishing by the liquid decreases as the flow path 3 passes downstream.

[0029] One end of the first bypass line 16 is connected to a midpoint of the first pipeline 11, and the other end is connected to a midpoint of the second pipeline . One end of the second bypass line 26 is connected to the second pipeline 21 closer to the first end 23 than the part where the first bypass line 16 is connected, and the other end is connected to the first pipeline 11 closer to the second end 14 than the part where the first bypass line 16 is connected. The first pipeline 11 including each branch pipeline 12, the first bypass pipeline 16, the second pipeline 21 including each branch pipeline 22, and the second bypass pipeline 26 may be configured appropriately depending on the type and temperature of the liquid supplied to the flow path 3 of the mold 2, and may be made of fluororesin-based tubes such as Teflon (registered trademark) that have acid resistance, alkali resistance, chemical resistance, heat resistance, etc., or may be made of various other tubes, etc.

[0030] In the illustrated example, the first bypass switching units (17, 18) are provided in the first pipeline 11 and the first bypass path 16, and are configured by liquid supply valves (17, 18) that allow or block the passage of a liquid (fluid). The main liquid supply valve 17 is provided in the first pipeline 11 so as to be located between a portion to which the first bypass path 16 is connected and a portion to which the second bypass path 26 is connected, and the bypass liquid supply valve 18 is provided in the first bypass path 16. In the illustrated example, the second bypass switching units (27, 28) are provided in the second pipeline 21 and the second bypass path 26, as described above, and are configured by liquid return valves (27, 28) that allow or block the passage of liquid (fluid). The main liquid return valve 27 is provided in the second pipeline 21 between the portion to which the second bypass path 26 is connected and the portion to which the first bypass path 16 is connected, and the bypass liquid return valve 28 is provided in the second bypass path 26. The main liquid supply valve 17, the bypass liquid supply valve 18, the main liquid return valve 27, and the bypass liquid return valve 28 may be electromagnetic valves or the like whose opening and closing is controlled by a control unit 31 described later. The first bypass switching units (17, 18) and the second bypass switching units (27, 28) are not limited to valves that open and close the respective pipelines 11, 16, 21, 26, and may be constituted by appropriate multi-way switching valves or the like.

[0031] A heating unit 19 is provided on the outer periphery of the first conduit 11 to heat the liquid passing through the first conduit 11. This configuration allows heated liquid to be supplied to the flow path 3 of the mold 2, making the device suitable for use in applications requiring heated liquid, such as supplying a chemical polishing liquid, such as an acidic chemical solution, for chemically polishing the inner periphery of the flow path 3 of the mold 2, as described above. Even when the liquid is a strongly acidic or alkaline liquid, the heating unit 19 does not come into contact with the liquid, thereby preventing damage to the heating unit 19. Furthermore, the liquid can be heated more efficiently than in a configuration provided with a heating unit that heats the liquid in the reservoir 10. In particular, the liquid can be heated more efficiently than in a configuration provided with heating units that heat the liquid in each of multiple reservoirs.

[0032] The heating unit 19 is provided at a location on the first end 13 side of the portion of the first pipe 11 where the first bypass line 16 is connected and on the second end 14 side of the branching portion of the first pipe 11 where the plurality of branch pipes 12 are branched. That is, the heating unit 19 is provided so as to be located between the portion of the first pipe 11 where the first bypass line 16 is connected and the branching portion where the plurality of branch pipes 12 are branched. The heating unit 19 may be provided so as to be wound around the outer periphery of the first pipe 11. The heating unit 19 may be, for example, a PTC (Positive Temperature Coefficient) heater. With this configuration, heating can be performed to a target temperature without the need for a temperature sensor or the like. The heating unit 19 may be configured to heat the liquid passing through the first pipe 11 to a temperature of, for example, approximately 60 to 95 degrees. The heating unit 19 may be kept activated (ON) until the entire chemical polishing process of the flow path 3 is completed.

[0033] Heating unit 19 is not limited to a PTC heater and may be another heater. Furthermore, depending on the type of liquid passing through first pipeline 11, instead of providing heating unit 19 on the outer periphery of first pipeline 11, a configuration in which a heater is provided inside first pipeline 11 may be adopted. Furthermore, instead of or in addition to a configuration in which heating unit 19 is provided that heats the liquid passing through first pipeline 11, a configuration in which a heating unit that heats the liquid in storage unit 10 is provided may be adopted. In this case, the heater that constitutes the heating unit may be provided inside or outside storage unit 10. Furthermore, a configuration in which heating unit 19 that heats such liquid is not provided may be adopted.

[0034] The pump 20 is incorporated in the first pipeline 11. In the illustrated example, the pump 20 is provided so as to be located between a branching portion of the first pipeline 11 where the plurality of branch pipelines 12 branch off and the heating portion 19. The pump 20 is switchable between a supply direction (forward direction) in which a fluid (liquid) is transferred from the first end 13 of the first conduit 11 toward the first end 23 of the second conduit 21, and a recovery direction (reverse direction) in which a fluid (liquid, air) is transferred from the first end 23 of the second conduit 21 toward the first end 13 of the first conduit 11. The pump 20 is a rotary pump (tube pump) including a motor 20d constituting a drive unit, a rotor 20a rotated by the motor 20d, a plurality of pressing portions 20b (three in the illustrated example) such as rollers provided at intervals in the circumferential direction of the rotor 20a, and tubes 20c provided on the outer periphery of the rotor 20a and compressed by the pressing portions 20b to transfer the fluid.

[0035] Rotating the rotor 20a of the pump 20 in the forward direction (forward rotation) enables the fluid to be transferred in the supply direction. That is, as the rotor 20a rotates in the forward direction, the portion of the tube 20c that is crushed by the pressing portion 20b is displaced from the first end 13 of the first conduit 11 to the second end 14, thereby transferring the fluid (liquid) from the first end 13 of the first conduit 11 to the first end 23 of the second conduit 21. On the other hand, rotating the rotor 20a of the pump 20 in the reverse direction (reverse rotation) enables the fluid to be transferred in the recovery direction. That is, as the rotor 20a rotates in the reverse direction, the portion of the tube 20c that is crushed by the pressing portion 20b is displaced from the second end 14 of the first conduit 11 to the first end 13, thereby transferring the fluid (liquid, air) from the first end 23 of the second conduit 21 to the first end 13 of the first conduit 11. An appropriate rotational speed detector may be provided to detect the rotational speed (rotational speed) of one or both of the rotor 20a and the motor 20d of the pump 20. The tube 20c of the pump 20 may be any of the various tubes having acid resistance, alkali resistance, chemical resistance, heat resistance, etc., as described above, or may be a tube with good abrasion resistance. For example, the tube 20c of the pump 20 may be a PharMed (registered trademark) tube.

[0036] The flow meter 29 is provided in the second pipeline 21. The second pipeline 21 is in communication with the first pipeline 11 via the flow path 3, and the flow meter 29 provided therein can detect the flow rate of the fluid passing through the first pipeline 11. In the illustrated example, the flow meter 29 is provided so as to be located between a branching portion in the second pipeline 21 where the plurality of branch pipelines 22 branch off and a portion to which the second bypass path 26 is connected. Note that the flow meter 29 may also be provided in the first pipeline 11. This flow meter 29 may be configured to be capable of measuring the flow rate of liquid passing through the pipelines (first pipeline 11 and second pipeline 21) but not capable of measuring the flow rate of gas. In other words, flow meter 29 may be configured to measure only the flow rate of liquid. Furthermore, this flow meter 29 may be configured to output (measure) only the flow rate of liquid passing through the pipelines (first pipeline 11 and second pipeline 21) in the supply direction. In other words, flow meter 29 may be configured not to output (measure) the flow rate of liquid passing through the pipelines (first pipeline 11 and second pipeline 21) in the recovery direction. This flow meter 29 may be configured appropriately so as to be able to measure the flow rate of liquid containing the above-mentioned chemical solution, and may be any type, such as an electromagnetic type, a Coriolis type, or a Karman vortex type.

[0037] The control unit 31 is provided in an appropriate control panel 30 installed in an appropriate location in the liquid supply apparatus 1 or at a location remote from the liquid supply apparatus 1. The control unit 31 includes a control circuit such as a CPU (Central Processing Unit), an input unit, an output unit, etc., and may be a PLC (Programmable Logic Controller) or the like that executes basic operations, etc., as described below. The control unit 31 is connected via signal lines or the like to each component of the liquid supply apparatus 1, including the circulation pump 8 and heating unit 9 of the heating container 6, the heating unit 19 and pump 20 (motor driver for motor 20d) of the first pipe 11, the flowmeter 29, the first pipe switching unit 15 (15A, 15B, 15C), the second pipe switching unit 25 (25A, 25B, 25C), the first bypass switching unit (17, 18), the second bypass switching unit (27, 28), etc. The control unit 31 controls the start (ON) / stop (OFF), forward / reverse rotation, opening / closing (switching), etc. of the circulation pump 8 and heating unit 9 of the heating container 6, the heating unit 19 and pump 20 (motor driver for the motor 20d) of the first pipeline 11, the first pipeline switching unit 15 (15A, 15B, 15C), the second pipeline switching unit 25 (25A, 25B, 25C), the first bypass switching unit (17, 18), the second bypass switching unit (27, 28), etc. The control panel 30 is provided with a display operation unit 33 for setting, inputting, and displaying various settings, etc. The control panel 30 is also provided with a storage unit 32 configured from various memories such as ROM and RAM, and storing setting conditions and input values ​​set and input by operating the display operation unit 33, various programs such as control programs for executing basic operations, etc., which will be described later, various operating conditions set in advance, various data tables, etc.

[0038] The pump 20 (motor driver for the motor 20d) and each valve may be controlled by the control unit 31, and the supplying process and recovery process of each liquid may be performed, for example, as follows. When performing a polishing step (first polishing step) as a supply step in which the liquid (chemical polishing liquid) in first reservoir 10A is supplied toward flow path 3, first liquid supply valve 15A, first liquid return valve 25A, main liquid supply valve 17, and main liquid return valve 27 are opened, and the other valves (second liquid supply valve 15B, third liquid supply valve 15C, second liquid return valve 25B, third liquid return valve 25C, bypass liquid supply valve 18, and bypass liquid return valve 28) are closed. In this state, when pump 20 (motor 20d) is rotated forward, the liquid (chemical polishing liquid) in first reservoir 10A is sucked from first end 13A of first branch conduit 12A, transported toward flow path 3 through first conduit 11 including first branch conduit 12A, passes through flow path 3, and is returned to first reservoir 10A through second conduit 21 and its first branch conduit 22A. When performing a chemical polishing solution recovery step (first chemical polishing solution recovery step) to recover the liquid (chemical polishing solution) supplied in the first polishing step, the valves are opened and closed in the same manner as in the first polishing step, and the pump 20 (motor 20d) is rotated in reverse. As a result, air is sucked into the first end 23A of the first branch conduit 22A, transported toward the flow path 3 via the second conduit 21 including the first branch conduit 22A, passes through the flow path 3, and is transported to the first reservoir 10A via the first conduit 11 and its first branch conduit 12A. As the air is transported in this manner, the liquid (chemical polishing solution) remaining in the second conduit 21, the flow path 3, and the first conduit 11 is replaced with air and returned to the first reservoir 10A, i.e., recovered.

[0039] Furthermore, for example, when a polishing step (second polishing step) is performed as a supply step in which the liquid (chemical polishing liquid) in first reservoir 10A is passed through flow path 3 in the opposite direction to the first polishing step, main liquid supply valve 17 and main liquid return valve 27 are closed and bypass liquid supply valve 18 and bypass liquid return valve 28 are opened from the state of the first polishing step. In this state, when pump 20 is rotated forward, the liquid (chemical polishing liquid) in first reservoir 10A is sucked from first end 13A of first branch conduit 12A and transported toward flow path 3 via first conduit 11 on the side of first end 13A including first branch conduit 12A, first bypass conduit 16 connected thereto, and second end 24 side of second conduit 21 connected thereto. In addition, the liquid (chemical polishing liquid) transferred to the flow path 3 passes through the flow path 3 and is returned to the first storage section 10A via the second pipeline 21 on the first end 23A side, which includes the second end 14 side of the first pipeline 11, the second bypass path 26 connected thereto, and the first branch pipeline 22A connected thereto. When a chemical polishing solution recovery step (second chemical polishing solution recovery step) is performed as a recovery step for recovering the liquid (chemical polishing solution) supplied in this second polishing step, the valves are opened and closed in the same manner as in the second polishing step, and the pump 20 is rotated in reverse. As a result, air is sucked into the first end 23A of the first branch conduit 22A and transferred toward the flow path 3 via the second conduit 21 on the first end 23A side including the first branch conduit 22A, the second bypass conduit 26 connected thereto, and the first conduit 11 on the second end 14 side to which the second bypass conduit 26 is connected. The air transferred to the flow path 3 passes through the flow path 3 and is transferred to the first reservoir 10A via the second end 24 side of the second conduit 21, the first bypass conduit 16 connected thereto, the first conduit 11 on the first end 13A side to which the first bypass conduit 16 is connected, and the first branch conduit 12A. By transferring the air in this manner, the liquid (chemical polishing liquid) remaining in each of bypass paths 16, 26 is replaced with air and returned, that is, recovered, to first reservoir 10A, in a manner similar to that described above.

[0040] When performing a cleaning step or a neutralization step as a supply step in which the liquid (cleaning / neutralizing liquid) in second reservoir 10B is supplied toward flow path 3, second liquid supply valve 15B, second liquid return valve 25B, main liquid supply valve 17, and main liquid return valve 27 are opened, and the other valves (first liquid supply valve 15A, third liquid supply valve 15C, first liquid return valve 25A, third liquid return valve 25C, bypass liquid supply valve 18, and bypass liquid return valve 28) are closed. In this state, when pump 20 is rotated forward, the liquid (cleaning / neutralizing liquid) in second reservoir 10B is sucked from first end 13B of second branch pipe 12B, transported toward flow path 3 via first pipe 11 including second branch pipe 12B, passes through flow path 3, and is returned to second reservoir 10B via second pipe 21 and its second branch pipe 22B. When performing the recovery step of recovering the liquid (cleaning / neutralizing liquid) supplied in the cleaning step or neutralization step, the valves are opened and closed in the same manner as in the cleaning step or neutralization step described above, and pump 20 is rotated in reverse. As a result, air is sucked in from first end 23B of second branch conduit 22B, transported toward flow path 3 via second conduit 21 including second branch conduit 22B, passes through flow path 3, and is transported to second reservoir 10B via first conduit 11 and its second branch conduit 12B. By transporting air in this manner, the liquid (cleaning / neutralizing liquid) remaining in second conduit 21, flow path 3, and first conduit 11 is replaced with air, and is returned to second reservoir 10B, i.e., recovered, in a manner generally similar to that described above.

[0041] When a rinsing step is performed as a supply step in which the liquid (rinse liquid) in third reservoir 10C is supplied toward flow path 3, third liquid supply valve 15C, third liquid return valve 25C, main liquid supply valve 17, and main liquid return valve 27 are opened, and the other valves (first liquid supply valve 15A, second liquid supply valve 15B, first liquid return valve 25A, second liquid return valve 25B, bypass liquid supply valve 18, and bypass liquid return valve 28) are closed. In this state, when pump 20 is rotated forward, the liquid (rinse liquid) in third reservoir 10C is sucked from first end 13C of third branch conduit 12C, transported toward flow path 3 via first conduit 11 including third branch conduit 12C, passes through flow path 3, and is returned to third reservoir 10C via second conduit 21 and its third branch conduit 22C. When performing the recovery step of recovering the liquid (rinse liquid) supplied in the rinsing step, the open / close states of each valve are set to the same as in the rinsing step, and pump 20 is rotated in reverse. As a result, air is sucked from first end 23C of third branch conduit 22C, transported toward flow path 3 via second conduit 21 including third branch conduit 22C, passes through flow path 3, and is transported to third reservoir 10C via first conduit 11 and its third branch conduit 12C. As the air is transported in this manner, the liquid (rinse liquid) remaining in second conduit 21, flow path 3, and first conduit 11 is replaced with air and returned to third reservoir 10C, i.e., recovered.

[0042] When executing the supply process of supplying the liquid from the storage section 10 as described above, the control section 31 executes a first control that rotates the motor 20d of the pump 20 at a set rotation speed, and a second control that feedback controls the motor 20d. 2(a) and 2(b), the control unit 31 calculates the rotation speed for the target flow rate based on a rate of change calculated from the difference between a first flow rate when the motor 20d is rotated at a first rotation speed and a second flow rate when the motor 20d is rotated at a second rotation speed greater than the first rotation speed, and the difference between the first rotation speed and the second rotation speed, and sets the calculated rotation speed as the set rotation speed. With this configuration, the set rotation speed when executing the first control is set to an appropriate value, making it less likely to deviate from the target flow rate, compared to a configuration in which a rate of change indicating the relationship between the rotation speed and the flow rate is set in advance regardless of the pump 20, its tube 20c, etc., i.e., a configuration in which a common rate of change is set for all pumps.

[0043] The rate of change for calculating the set rotation speed may be calculated as a preset item for each pump 20 before shipping and stored in the storage unit 32 or the like. Alternatively, the rate of change may be calculated as a preset item after the pump 20 is installed in the pipeline (11, 21) after shipping and stored in the storage unit 32 or the like. With this configuration, the set rotation speed when the first control is executed can be set to a more appropriate value corresponding to the pipeline (11, 21), making it less likely to deviate from the target flow rate. In this case, for example, a rate of change setting operation unit may be provided as a preset item in an appropriate location such as the display operation unit 33, and a rate of change calculation mode for calculating the rate of change may be executed by operating the rate of change setting operation unit. Alternatively, the first flow rate and the second flow rate may be manually measured separately by appropriate operations to calculate the rate of change, and the rate of change may be input in advance via an appropriate operation unit and stored in the storage unit 32 or the like.

[0044] Specifically, as shown in FIG. 2(a), the motor 20d of the pump 20 is rotated at a first rotation speed to measure the first flow rate, and the motor 20d of the pump 20 is rotated at a second rotation speed to measure the second flow rate (steps S100 and S101). Instead of measuring the first flow rate and then the second flow rate, the second flow rate may be measured before the second flow rate is measured. The first flow rate and the second flow rate may be measured by the flow meter 29 when the pump is installed in the pipeline (11, 21), or may be measured by another flow meter before shipping. The first flow rate and the second flow rate may be measured by rotating the pump at the respective rotation speeds (first rotation speed and second rotation speed) for a predetermined time to reduce the influence of flow rate fluctuations, or may be measured as moving average values. The first rotation speed may be a relatively small rotation speed, for example, the minimum rotation speed of the motor 20d. The second rotation speed may be any speed greater than the first rotation speed, and may be the maximum rotation speed of the motor 20d, for example. The first rotation speed and the second rotation speed may be set in advance, or may be input / settable via the display operation unit 33 or the like.

[0045] Then, a rate of change is calculated from the value obtained by subtracting the first rotation speed from the second rotation speed and the value obtained by subtracting the first flow rate from the second flow rate, and the rotation speed for the target flow rate is calculated based on this rate of change and set as the set rotation speed (supply set rotation speed) (steps S102, S103). That is, as shown in Fig. 2(b), since the rotation speed of motor 20d and the flow rate of liquid transferred by pump 20 are in a substantially proportional relationship, by calculating the slope corresponding to the rate of change (proportion of change), it is possible to calculate the rotation speed (supply set rotation speed) for an arbitrary target flow rate. The target flow rate may be set in advance or may be input / settable via the display / operation unit 33, etc. Furthermore, when supplying a plurality of liquids as described above, the target flow rate may be set for each liquid or each supply step. In other words, the supply set rotation speed for the target flow rate may be set for each liquid or each supply step.

[0046] The control unit 31 executes a third control to rotate the motor 20d at a set recovery rotation speed in the recovery process, which rotates the motor 20d in the opposite direction to the first and second controls to recover the fluid. With this configuration, the recovery process described above can recover fluid remaining in the pipelines (11, 12) and the like when stopping the supply or switching the fluid to be supplied to the supply destination (the flow path 3 of the mold 2). Furthermore, since the motor 20d rotates at the set recovery rotation speed in this recovery process, recovery can be performed more quickly regardless of the flow rate, compared to a configuration using feedback control, for example. This set recovery rotation speed may be set to be higher than the set supply rotation speed in the first control, as shown in FIG. 4 . With this configuration, fluid remaining in the pipelines (11, 12) and the like can be recovered more quickly. The set recovery rotation speed may be set by adding or multiplying the set supply rotation speed set as described above by a predetermined value. For example, the set recovery rotation speed may be approximately 1.2 to 8 times, or approximately 2 to 6 times, the set supply rotation speed. Alternatively, the set recovery rotation speed may be input / set by the display operation unit 33, etc. Instead of this mode, the set recovery rotation speed may be the same as the set supply rotation speed or may be smaller than the set supply rotation speed.

[0047] Once the set supply rotation speed and set recovery rotation speed are set as described above, the control unit 31 may control each unit to execute the supply process and recovery process, as shown in Figures 3 and 4. The flow rate graph shown in Figure 4 schematically shows the transition of the value (moving average value) obtained by moving average processing of the measurement value of the flow meter 29, which outputs only the flow rate of the liquid passing through the pipelines (first pipeline 11 and second pipeline 21) in the supply direction. The rotation speed graph shown in Figure 4 also schematically shows the transition of the rotation speed detected by the rotation speed detection unit that detects the rotation speed of the rotor 20a or the motor 20d. Figure 4 also schematically shows the ON (forward or reverse) / OFF operation of the motor 20d.

[0048] First, when the supply process is started, a first control is executed to drive the motor 20d in the forward direction at the set supply rotation speed (steps S200 and S201). In this first control, a constant output corresponding to the set supply rotation speed is input to the motor 20d via the motor driver, and the motor 20d is driven. As a result, as shown in FIG. 4, the rotation speed fluctuates around the set supply rotation speed. Meanwhile, the flow rate fluctuates at zero for a while immediately after starting the motor 20d due to residual air (gas) in the conduits (11, 12). Thereafter, the flow rate gradually increases, but temporarily decreases and then increases due to residual air or air bubbles in the conduits (11, 12). Even if the flow rate becomes zero or suddenly increases or decreases, the first control drives the motor 20d at the set supply rotation speed, and thus the liquid is supplied without errors or the rotation speed being controlled too low. Then, when the flow rate is stabilized (determined to have reached a stable flow rate), the process transitions to a second control in which motor 20d is feedback-controlled so that the measurement value of flowmeter 29 reaches the target flow rate (steps S202 and S203). The determination of a stable flow rate may be made, for example, by determining that the stable flow rate has been reached when the fluctuation range of the moving average value based on the measurement value of flowmeter 29 remains below a predetermined value for a predetermined period of time. Alternatively, the stable flow rate may be determined to have been reached when the difference between the moving average value and the target flow rate remains smaller than a predetermined value for a predetermined period of time, and various other determination methods may also be employed.

[0049] When the second control is executed, motor 20d is feedback-controlled based on the measurement value of flow meter 29, so that the measurement value of flow meter 29 gradually approaches the target flow rate and stabilizes at approximately the target flow rate. For example, even if deterioration or the like occurs in tube 20c, liquid is supplied without a shortage of flow rate or the like by executing this second control. In this second control, for example, an operation amount for the motor 20d may be calculated sequentially by PID control, and an output corresponding to this operation amount may be input to the motor 20d via a motor driver to drive the motor 20d. The proportional gain (proportional band), integral gain (integral time), differential gain (differential time), etc. required for the PID control may be set in advance, or may be configured to be adjustable by an appropriate regulator or the like. When the motor 20d is subjected to PID control (feedback control) as described above, the flow rate gradually converges to the target flow rate while repeatedly increasing and decreasing due to residual air or bubbles in the conduits (11, 12), as shown in FIG. 4. Furthermore, the rotational speed deviates from the set supply rotational speed due to feedback control of the motor 20d based on the measurement value of the flowmeter 29. In the illustrated example, the rotational speed increases sharply immediately after switching to the second control and then gradually decreases. Once the flow rate converges to approximately the target flow rate, the rotational speed remains approximately constant at a speed lower than the set supply rotational speed. This transition in the flow rate and rotational speed is merely an example and may vary depending on the conduits (11, 21), the set supply rotational speed, the determination of a stable flow rate in the first control, and other factors. The feedback control during execution of the second control is not limited to PID control and may be other control methods. Furthermore, the flow rate fluctuation during execution of the second control may be monitored, and an alarm or other output may be issued if the flow rate exceeds an upper or lower limit. Alternatively or additionally to this embodiment, pressure gauges may be provided at appropriate locations in the pipelines (11, 12) etc. to monitor for abnormalities.

[0050] The supply process may be carried out until a predetermined time has elapsed or until a predetermined flow rate (cumulative flow rate) is exceeded, depending on the purpose of each of the polishing process, cleaning process, neutralization process, and rinsing processes described above, and depending on the inner diameter and length of each of the pipelines 11, 21 and the flow path 3, for example. Then, once the supply step is completed, the recovery step is executed (steps S204 and S205). That is, a third control is executed to drive the motor 20d in the reverse direction at the set recovery rotation speed (step S206). At this time, after the supply step is completed, the motor 20d may be stopped until a predetermined time has elapsed, and then the motor 20d may be driven in the reverse direction. The stop time of the motor 20d between the supply step and the recovery step may be several seconds, for example, about 1 to 5 seconds. When the motor 20d is stopped, the flow rate and the rotation speed become zero, as shown in FIG. 4. Furthermore, in the third control, the rotation speed remains near the set recovery rotation speed, and the flow rate remains zero because the liquid passes through the pipelines (first pipeline 11 and second pipeline 21) in the recovery direction. In addition, when the flow meter 29 outputs the flow rate of the liquid passing through the pipelines (first pipeline 11 and second pipeline 21) in the recovery direction, immediately after transitioning to the third control, liquid remains on the first end 23 side of the second pipeline 21, so the flow rate of this remaining liquid is output.

[0051] The recovery step may be performed until a predetermined time has elapsed so that all of the liquid supplied in the supply step and remaining in each of the pipelines 11 and 21 and the flow path 3 can be recovered. Alternatively, an appropriate detection unit capable of detecting the recovery of substantially all of the liquid remaining in each of the pipelines 11 and 21 and the flow path 3 may be provided, and the recovery step may be terminated when this detection unit detects the recovery. Such a detection unit may be a detection unit that detects the mass or liquid level of the storage unit 10 (each of the storage units 10A, 10B, and 10C), a detection unit that detects air passing through the first end 13 (each of the first end 13A, 13B, and 13C) of the first pipeline 11 or air discharged from the first end 13, or various other detection units may be used.

[0052] Then, once the recovery step is completed and the supply step is started, the first control and subsequent controls may be executed in the same manner as described above (steps S207, S200 to S207). Note that, instead of waiting until the next supply step is started after the recovery step is completed, the supply step may be started according to a preset program. As shown in Fig. 4, once the recovery step is completed, motor 20d may be stopped until a predetermined stop time similar to that described above has elapsed, and then the first control and subsequent controls may be executed to drive motor 20d in the forward direction. For example, when a series of chemical polishing steps are performed, the following may be performed in sequence: a supply step of supplying a rinsing liquid and a recovery step as a preliminary heating step; a supply step of supplying a cleaning / neutralizing liquid and a recovery step as a preliminary cleaning step; a supply step of supplying a rinsing liquid and a recovery step as a rinsing step; a supply step of supplying a chemical polishing liquid and a recovery step as a polishing step (the first polishing step and the second polishing step described above); a supply step of supplying a rinsing liquid and a recovery step as a rinsing step; a supply step of supplying a cleaning / neutralizing liquid and a recovery step as a neutralization step; and a supply step of supplying a rinsing liquid and a recovery step as a rinsing step. The basic operation described above is an example, and appropriate modifications can be made.

[0053] In the above example, the bypass paths 16, 26 and bypass switching units (17, 18, 27, 28) are provided so that the flow direction of the liquid passing through the flow path 3 can be switched, but these may not be provided. In the above example, the recovery step of recovering the liquid is performed after the supply step of supplying the liquid is performed, but such a recovery step may not be performed. In the above example, the first pipeline 11 and the second pipeline 21 are connected to the flow path 3 of the mold 2 as the supply destination, and the liquid in the storage section 10 is supplied in a circulatory manner, but this is not limited to such an example, and the liquid from the supply source may be supplied in a one-way manner to the supply destination, etc. The specific configuration of each part of the liquid supply device 1 according to this embodiment, and the liquid supply method and control method executed using the liquid supply device 1 are not limited to the configurations described above, and various other modifications are possible. [Explanation of symbols]

[0054] 1 Liquid supply device 11 1st pipe line (pipe line) 20 Pump 20a Rotating body 20c tube 20d motor 21 2nd pipe (pipe) 29 Flow meter 31 Control Unit 2. Mold (supply destination)

Claims

1. The pump is incorporated in a pipeline that supplies a fluid to a supply destination, and transports the fluid in a tube provided on the outer periphery of the rotor by rotation of the rotor; a flow meter that detects the flow rate of the fluid passing through the pipeline; and a control unit that controls a motor that rotates the rotor, The control unit executes a first control to rotate the motor at a set rotation speed set for a target flow rate, and a second control to feedback-control the motor so that the measurement value of the flow meter becomes the target flow rate if it determines that the flow rate has stabilized by referring to the measurement value of the flow meter while the first control is being executed.

2. In claim 1, The liquid supply device is characterized in that the control unit calculates the rotation speed for the target flow rate based on a rate of change calculated from a difference between a first flow rate when the motor is rotated at a first rotation speed and a second flow rate when the motor is rotated at a second rotation speed greater than the first rotation speed, and a difference between the first rotation speed and the second rotation speed, and sets the rotation speed as the set rotation speed.

3. In claim 1 or 2, The liquid supply device is characterized in that the control unit executes a third control to rotate the motor at a recovery set rotation speed during a recovery process in which the motor is rotated in the opposite direction to the first control and the second control to recover fluid.

4. In claim 3, The liquid supplying device according to claim 1, wherein the set rotational speed for recovery is set to be greater than the set rotational speed in the first control.

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