Sealed structure and vacuum furnace

Abstract

Examples of the present specification provide a sealing structure and a vacuum furnace, the sealing structure including: a baffle plate having a first through hole penetrating a first side and a second side of the baffle plate; a first structural member connected to the baffle plate having an inner hole through which a member to be sealed passes, at least a portion of the inner hole being located in the first through hole and at least a portion of the inner hole not parallel to both the first side and the second side; and a sealing assembly that seals a gap between the baffle plate and the first structural member, and seals a gap between the member to be sealed and the first structural member.

Description

[Technical field]

[0001] [Cross reference] This application claims priority to a Chinese patent application bearing application number 202220578211.3, filed on March 15, 2022, the entire contents of which are incorporated herein by reference.

[0002] The present disclosure relates to the field of sealing processes, and in particular to a sealing structure and a vacuum furnace applying the same. [Background technology]

[0003] In industrial production, there are many situations where parts need to be sealed with a sealing structure. For example, the coil of a vacuum furnace is located inside the hearth, and the coil head passes through the hearth wall and the furnace body to the outside, and then is connected to the power source. The coil needs to be insulated from the furnace body to avoid short circuits, and sealing measures need to be taken at the point where the coil passes through the furnace body to maintain the vacuum effect inside the vacuum furnace. Summary of the Invention [Problem to be solved by the invention]

[0004] Therefore, how to improve the sealing effect of the sealing structure is a technical problem to be solved in this field. [Means for solving the problem]

[0005] A sealing structure according to a first aspect of the present specification includes a baffle plate having a first through hole penetrating a first side and a second side of the baffle plate; a first structural member having an inner hole through which a member to be sealed passes, the first structural member being connected to the baffle plate, at least a portion of the inner hole being located within the first through hole, and at least a portion of the inner hole being not parallel to both the first side and the second side; and a sealing assembly for sealing a gap between the baffle plate and the first structural member, and for sealing a gap between the member to be sealed and the first structural member.

[0006] In some embodiments, the first structural member penetrates the baffle plate through the first through hole, and the sealing assembly includes a first sealing member for sealing a gap between the member to be sealed and the first structural member, the first sealing member being disposed between the inner wall of the inner hole and the member to be sealed.

[0007] In some embodiments, the sealing assembly includes a second sealing member located at one end of the first through hole, the second sealing member abutting a first side or a second side of the baffle plate to seal a gap between the baffle plate and the first structural member.

[0008] In some embodiments, the sealing assembly further includes a third sealing member for sealing a gap between the baffle plate and the first structural member, the second sealing member and the third sealing member being located at either end of the first through hole and abutting a first side and a second side of the baffle plate, respectively.

[0009] In some embodiments, the sealing assembly includes a fourth sealing member for sealing a gap between the baffle plate and the first structural member, at least a portion of the fourth sealing member being disposed between an inner wall of the first through hole and an outer wall of the first structural member.

[0010] In some embodiments, the sealing structure further includes a first position limiting structure that limits a position of the first structural member in the first through hole.

[0011] In some embodiments, the first position limiting structure includes a first nut and a first male thread, the first male thread being provided on the first structural member, and the first nut threadably engages with the first male thread of the first structural member on the side where the second side of the baffle plate is located.

[0012] In some embodiments, the sealing structure further includes a second structural member fitted onto the first structural member and positioned between the first nut and the third sealing member, the second structural member including a first main ring portion and a first retaining ring portion, the first main ring portion fitted onto the first structural member, the first retaining ring portion positioned at one end of the first main ring portion in the axial direction, the third sealing member and the first retaining ring portion both positioned between the baffle plate and the first main ring portion, and the third sealing member positioned in an inner ring of the first retaining ring portion.

[0013] In some embodiments, the first structural member includes a first main ring portion and a first retaining ring portion, the inner hole is formed in the first main ring portion, the first main ring portion penetrates the baffle plate through the first through hole, the first retaining ring portion is located on the side of the baffle plate where the first side is located, and the first retaining ring portion surrounds the outside of the first main ring portion, and the outer diameter of the first retaining ring portion is larger than the diameter of the first through hole.

[0014] In some embodiments, the first structural member further includes a second retaining ring portion, the second retaining ring portion being located on the side where the first side of the baffle plate is located, the second retaining ring portion being provided on the side of the first retaining ring portion facing the baffle plate, and the outer diameter of the second retaining ring portion being larger than the outer diameter of the first main ring portion.

[0015] In some embodiments, the ratio of the outer diameter of the first main ring part to the inner diameter of the first main ring part is between 1.1 and 2.

[0016] In some embodiments, the ratio of the diameter of the first through hole to the inner diameter of the first main ring portion is between 1.2 and 2.5.

[0017] In some embodiments, the sealing structure further includes a second position limiting structure configured to limit the position of the first sealing member in the bore.

[0018] In some embodiments, the second position limiting structure includes a second nut and a first female thread, the first female thread is located within the inner hole, and the second nut is connected to the first female thread of the inner hole on the side where the second side of the baffle plate is located.

[0019] In some embodiments, the second position limiting structure includes a position limiting boss disposed in the bore, and the first sealing member is disposed between the position limiting boss and the second nut.

[0020] In some embodiments, a first gasket is provided between the first sealing member and the second nut.

[0021] In some embodiments, the sealing assembly includes at least two of the first sealing members, with a second gasket provided between at least two adjacent first sealing members.

[0022] In some embodiments, the first structural member is inserted into the first through hole from the side where the second side of the baffle plate is located, a position limiting stopper is provided at one end of the first through hole close to the first side, the member to be sealed passes through the first through hole and the inner hole, and the sealing assembly includes a fifth sealing member, which is provided in the first through hole, fitted onto the member to be sealed, and is located between the position limiting stopper and the first structural member.

[0023] In some embodiments, an outer wall of the first structural member is provided with a second external thread, and an inner wall of the first through hole is provided with a second internal thread that matches the second external thread.

[0024] In some embodiments, the first structural member is formed from a conductive material, and an insulating layer is provided between an outer surface of the first structural member and an inner wall surface of the first through hole.

[0025] In some embodiments, the first structural member is formed from an insulating material and / or the sealing assembly is formed from an insulating material.

[0026] A vacuum furnace according to a second aspect of the present specification includes a sealing structure and a furnace body, an opening is provided in a side wall of the furnace body, and the sealing structure is provided in the opening via the baffle plate.

[0027] In some embodiments, the baffle plate has a first side located within the furnace body and a second side located outside the furnace body. [Brief description of the drawings]

[0028] The present specification will be further illustrated by example embodiments, which are illustrated in detail in the accompanying drawings, in which like numbers represent like structures, and in which:

[0029] [Figure 1] FIG. 1 is a schematic diagram of a sealing structure according to some embodiments of the present disclosure. [Diagram 2] FIG. 1 is a schematic diagram of a sealing structure according to some embodiments of the present disclosure. [Diagram 3] 1 is a schematic view of an installation of a sealing assembly according to some embodiments herein. [Figure 4] 1 is another schematic view of an installation of a sealing assembly according to some embodiments herein. [Diagram 5] 13 is a further installation schematic diagram of a sealing assembly according to some embodiments herein. [Figure 6] 13 is yet another schematic installation diagram of a sealing assembly according to some embodiments herein. [Figure 7] FIG. 13 is a schematic diagram of a fourth sealing member according to some embodiments of the present disclosure. [Figure 8] FIG. 11 is a schematic diagram of a fourth sealing member according to another embodiment of the present specification. [Figure 9] FIG. 2 is a schematic diagram of a first structural member according to some embodiments of the present disclosure. [Figure 10A] FIG. 13 is a schematic diagram of a sealing structure according to another embodiment of the present specification. [Figure 10B] FIG. 11 is a schematic diagram of a second structural member according to another embodiment of the present specification. [Figure 11] FIG. 13 is a schematic diagram of a sealing structure according to yet another embodiment of the present specification. [Figure 12] 13 is a schematic view of an installation of a second position limiting structure according to some embodiments of the present disclosure. [Figure 13] FIG. 2 is a schematic diagram of a second nut according to some embodiments of the present disclosure. [Figure 14] FIG. 13 is a schematic diagram of a sealing structure according to yet another embodiment of the present specification. [Figure 15] FIG. 1 is a schematic diagram of a vacuum furnace in accordance with certain embodiments of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] In order to more clearly describe the technical means of the embodiments of the present specification, the following briefly describes the drawings that are required to be used in the description of the embodiments. Obviously, the drawings described below are only some examples or embodiments of the present specification, and those skilled in the art can apply the present specification to other similar situations without creative labor through these drawings. As long as it is clear or otherwise described in the language environment, the same numbers in the drawings represent the same structures or operations.

[0031] It should be understood that the terms "system," "apparatus," "unit," and / or "module" used herein are ways to distinguish between different components, elements, parts, portions, or assemblies at different levels, however, other terms may be substituted for the terms if the other terms can achieve the same purpose.

[0032] As shown in the specification and claims, and only where exceptional circumstances clearly indicate in the context, words such as "a," "one," "a kind," and / or "the" may refer to the plural rather than specifically to the singular. In general, the terms "comprise" and "comprising" are intended to mean only the inclusion of steps and elements already expressly identified, but these steps and elements do not constitute an exclusive list and a method or device may also include other steps and elements.

[0033] A vacuum furnace is a facility that can provide a vacuum environment and heat in a vacuum environment. The vacuum furnace may have a sealed hearth, and the hearth may be sealed by a metal cover or a quartz glass cover, etc. The hearth can be connected to a vacuum device through a pipe to realize a vacuum environment in the hearth. A heating device may be provided in the hearth, and the heating device may include a coil. When the coil is energized, heating in the hearth can be realized. The vacuum furnace may be applied to crystal growth, vacuum quenching, vacuum brazing, vacuum annealing, vacuum magnetic addition, vacuum tempering, vacuum sintering, vacuum diffusion welding, vacuum carburization, etc.

[0034] In a vacuum furnace, some parts need to penetrate from inside the hearth to outside the hearth. The parts are, for example, cables for signal transmission or coils for heating. Hereinafter, an example will be described in which a coil penetrates from inside the hearth to outside the hearth. In a vacuum furnace, a coil for heating the hearth needs to be energized to realize heating, and the coil needs to go outside the furnace from the furnace wall of the vacuum furnace and is connected to a power source located outside the furnace. A through hole may be formed in the furnace wall, and a coil outer tube (e.g., a copper tube) can pass through the through hole to go from inside the hearth to outside the hearth. The coil penetrates the coil outer tube, and the coil outer tube can play a role in protecting the coil. The coil outer tube may be fixed to the furnace wall by a connecting member (e.g., a nut). In the above structure, there may be a gap in the through hole (e.g., between the inner wall of the through hole and the coil outer tube, and between the coil outer tube and the coil), which may affect the vacuum degree of the vacuum furnace.

[0035] A member to be sealed can pass through the inner hole of the first structural member of the sealing structure according to the embodiment of the present specification. By providing a sealing assembly, the gap between the baffle plate and the first structural member and the gap between the member to be sealed and the first structural member are all sealed, thereby improving the sealing performance of the through hole of the baffle plate. The sealing structure may be applied to a vacuum furnace to ensure the vacuum degree of the vacuum furnace. The sealing structure may be applied to a high-temperature furnace body such as an electric furnace or a converter to ensure the heat retention performance of equipment such as an electric furnace or a converter.

[0036] 1 and 2 are schematic diagrams of a sealing structure according to some embodiments of the present specification, and the sealing structure will be described in detail below with reference to FIG. 2. As shown in FIG. 1 and FIG. 2, the sealing structure 1000 may include a baffle plate 100, a first structural member 200, and a sealing assembly 400. A first through hole 110 is formed in the baffle plate 100, and the first through hole 110 penetrates the first side surface 101 and the second side surface 102 of the baffle plate 100. That is, the first through hole 110 may communicate the side of the baffle plate 100 where the first side surface 101 is located and the side where the second side surface 102 is located. The first structural member 200 has an inner hole 201 through which the member to be sealed 300 penetrates. The first structural member 200 is connected to the baffle plate 100. At least a part of the inner hole 201 is located in the first through hole 110. That is, at least a portion of the first structural member 200 is located within the first through hole 110, and when the first structural member 200 is connected to the baffle plate 100, at least a portion of the inner hole 201 is not parallel to both the first side 101 and the second side 102. The sealing assembly 400 seals the gap between the baffle plate 100 and the first structural member 200, and the gap between the member to be sealed 300 and the first structural member 200.

[0037] The baffle plate 100 may provide a mounting base for the first structural member 200, and when the sealing structure 1000 is used in a furnace body such as a vacuum furnace, an electric furnace, or a converter, the baffle plate may separate the internal environment of the furnace body from the external environment. The first through hole 110 on the baffle plate 100 may be for other components of the sealing structure 1000 to pass through. The first side 101 and the second side 102 of the baffle plate 100 represent the two sides of the baffle plate 100. In some embodiments, when the sealing assembly 400 is used in a vacuum furnace, the side of the baffle plate 100 facing the inside of the furnace body of the vacuum furnace may be the first side 101, and the side of the baffle plate 100 facing the outside of the furnace body may be the second side 102. In some embodiments, the baffle plate 100 may be a flat plate-like structure to facilitate sealing. In other embodiments, the baffle plate 100 may be other plate-like structures, such as an arc plate-like structure, a corrugated plate-like structure, and the like. In some embodiments, the first side 101 and the second side 102 may be essentially parallel. In other embodiments, the first side 101 and the second side 102 may have an included angle greater than 0°. For example, the first side 101 and the second side 102 may have an included angle of 5°, 10°, etc. In some embodiments, the axis of the through hole 110 may be perpendicular to the first side 101 or the second side 102.

[0038] At least a part of the first structural member 200 may be located in the first through hole 110 of the baffle plate 100 and supported by the baffle plate 100 (for example, supported by the side wall of the first through hole 110). The first structural member 200 may penetrate the first through hole 110, or may simply enter the first through hole 110 without penetrating it. The inner hole 201 of the first structural member 200 may be for penetrating the member to be sealed 300. At least a part of the inner hole 201 not being parallel to both the first side surface 101 and the second side surface 102 can be understood as at least a part of the inner hole 201 having an included angle greater than 0° with both the first side surface 101 and the second side surface 102. This ensures that the member to be sealed 300 penetrates through the inner hole 201 from the side where the first side surface 101 of the baffle plate 100 is located to the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, the axis of the bore 201 is a straight line. The bore 201 may extend along the direction B in FIG. 2 and may have a certain included angle, such as 5°, 10°, etc., with the direction B in FIG. 2. In another embodiment, the axis of the bore 201 may be a broken line or a curved line. In some embodiments, the axis of the bore 201 (or at least a portion of the axis of the bore 201) may be (essentially) parallel to the axis of the first through hole 110 or may (essentially) overlap. In this specification, "basic" describes that the deviation between one feature (e.g., basic overlap) and the feature (e.g., complete overlap) is less than a threshold value. The threshold value may be an absolute number (e.g., a distance difference value is 1 cm, 5 mm) or a relative value (e.g., the threshold value is 10%, 5% of the hole diameter of the first through hole 110).

[0039] The member to be sealed 300 may include a coil, cable, etc. of a furnace body such as a vacuum furnace, an electric furnace, a converter, etc. The member to be sealed 300 may include an outer tube, and the coil, cable, etc. may penetrate into the outer tube, and the outer tube may play a role in protecting the coil, cable, etc.

[0040] A gap between the baffle plate 100 and the first structural member 200 is formed in the first through hole 110, and the sealing assembly 400 may be located in the first through hole 110, at any one end of the first through hole 110, or at both ends of the first through hole 110 to seal the gap between the baffle plate 100 and the first structural member 200. A gap between the member to be sealed 300 and the first structural member 200 is formed in the inner hole 201, and the sealing assembly 400 may be located in the inner hole 201, at any one end of the inner hole 201, or at both ends of the inner hole 201 to seal the gap between the member to be sealed 300 and the first structural member 200. For the specific structure and included parts of the sealing assembly 400, please refer to the related description below. It should be noted that in FIG. 2, the shape, structure, and installation position of the first structural member 200 and the sealing assembly 400 are merely illustrative, and in different embodiments, the shape, structure, and installation position of the first structural member 200 and the sealing assembly 400 may vary.

[0041] In some embodiments, the first structural member 200 penetrates the baffle plate 100 through the first through hole 110. At this time, the length of the portion of the first structural member 200 penetrating the first through hole 110 is longer than the length of the first through hole 110. The sealing assembly 400 may include a first sealing member 401. The first sealing member 401 seals a gap between the member to be sealed 300 and the first structural member 200. The first sealing member 401 is provided between the inner wall of the inner hole 201 and the member to be sealed 300. In some embodiments, the first sealing member 401 may be a sealing ring fitted on the outside of the member to be sealed 300. In some embodiments, the sealing ring (first sealing member 401) is in a compressed state after being attached between the inner wall of the inner hole 201 and the member to be sealed 300, thereby improving the sealing effect of the first sealing member 401. In another embodiment, the first sealing member 401 may be a sealant (e.g., a sealant that becomes solid after solidification), and the sealant (first sealing member 401) may seal the gap between the first sealing member 401 and the member to be sealed 300 in the inner hole 201.

[0042] In some embodiments, when the first sealing member 401 is a sealing ring, the outer cross-sectional contour of the first sealing member 401 may be circular, elliptical, triangular, rectangular, polygonal, or irregular, and the like.

[0043] Fig. 3 is an installation schematic diagram of a sealing assembly according to some embodiments of the present disclosure, and Fig. 4 is another installation schematic diagram of a sealing assembly according to some embodiments of the present disclosure. In some embodiments, as shown in Figs. 3 and 4, the sealing assembly 400 includes a second sealing member 402 that abuts against the baffle plate 100. The second sealing member 402 is located at one end of the first through hole 110 to seal the gap between the baffle plate 100 and the first structural member 200.

[0044] In some embodiments, the second sealing member 402 may abut against the first side 101 of the baffle plate 100, as shown in FIG. 3. In some embodiments, the second sealing member 402 may abut against the second side 102 of the baffle plate 100, as shown in FIG. 4. In some embodiments, the second sealing member 402 may include a sealing ring fitted onto the first structural member 200. In another embodiment, the second sealing member 402 may include a sealant (e.g., a sealant that is in a solid state after solidification), which may seal a gap between the baffle plate 100 and the first structural member 200 at the first through-hole 110.

[0045] In some embodiments, when the second sealing member 402 is a sealing ring, the outer cross-sectional contour of the second sealing member 402 may be circular, elliptical, triangular, rectangular, polygonal, irregular, or the like.

[0046] By providing the second sealing member 402 that abuts against the baffle plate 100, the second sealing member 402 can effectively seal the gap between the baffle plate 100 and the first structural member 200, and since the second sealing member 402 is provided at the end of the first through hole 110 and achieves sealing by abutting against the baffle plate 100, the arrangement of the second sealing member 402 is basically not limited by the size of the first through hole 110, there are fewer restrictions on the shape and size of the second sealing member 402, and it is easy to install.

[0047] FIG. 5 is a further mounting schematic diagram of a sealing assembly according to some embodiments of the present disclosure. As shown in FIG. 5, the sealing assembly 400 further includes a third sealing member 403 abutting against the baffle plate 100. The third sealing member 403 seals the gap between the baffle plate 100 and the first structural member 200. The second sealing member 402 and the third sealing member 403 may be located at both ends of the first through-hole 110, respectively. The second sealing member 402 and the third sealing member 403 may abut against the first side surface 101 and the second side surface 102 of the baffle plate 100, respectively. The structure and shape of the third sealing member 403 may be similar to that of the second sealing member 402, and specifically, the relevant description of the second sealing member 402 may be referred to.

[0048] By providing the second sealing member 402 and the third sealing member 403 and sealing both ends of the first through hole 110, the gap between the baffle plate 100 and the first structural member 200 can be better sealed, and the arrangement of the second sealing member 402 and the third sealing member 403 is not basically limited by the size of the first through hole 110, and there are fewer restrictions on the shape and size of the second sealing member 402 and the third sealing member 403.

[0049] 6 is yet another schematic mounting diagram of a sealing assembly according to some embodiments of the present disclosure. As shown in FIG. 6, the sealing assembly 400 may include a fourth sealing member 404. The fourth sealing member 404 may seal a gap between the baffle plate 100 and the first structural member 200. At least a portion of the fourth sealing member 404 is disposed between the inner wall of the first through hole 110 of the baffle plate 100 and the outer wall of the first structural member 200. That is, at least a portion of the fourth sealing member 404 is disposed within the first through hole 110 of the baffle plate 100.

[0050] In some embodiments, the fourth sealing member 404 may be a sealing ring. The sealing ring (fourth sealing member 404) may be located in the first through hole 110 of the baffle plate 100 and fitted on the outside of the first structural member 200. In another embodiment, the fourth sealing member 404 may be a sealant (e.g., a sealant that becomes solid after solidification) filled in the first through hole 110 of the baffle plate 100 and located between the inner wall of the first through hole 110 of the baffle plate 100 and the outer wall of the first structural member 200, and the sealant (fourth sealing member 404) may seal the gap between the first structural member 200 and the baffle plate 100 in the first through hole 110.

[0051] When the fourth sealing member 404 is a sealing ring, it may have a number of different shapes. The shape of the fourth sealing member 404 may be similar to that of the first sealing member 401. In the embodiment shown in FIG. 6, the fourth sealing member 404 may be a regular ring structure and is completely located within the first through-hole 110 of the baffle plate 100.

[0052] 7 is a schematic diagram of a fourth sealing member according to some embodiments of the present disclosure. In some embodiments, as shown in FIG. 7, when the fourth sealing member 404 is a sealing ring, the fourth sealing member 404 has an inner ring with a cylindrical shape and an outer ring with a conical shape. The outer ring is designed to be conical, and the fourth sealing member 404 is inserted into the first through-hole 110 from one end of the outer ring with a small diameter, so that the fourth sealing member 404 can be easily inserted into the first through-hole 110. In some embodiments, the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through-hole 110, and the outer diameter of the other end of the conical outer ring may be essentially equal to the diameter of the first through-hole 110, and the one end of the outer ring with a large diameter of the fourth sealing member 404 may be interference-fitted into the inner wall of the first through-hole 110 of the baffle plate 100, thereby improving the sealing effect of the fourth sealing member 404. In some embodiments, the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through hole 110, and the outer diameter of the other end of the conical outer ring may be larger than the diameter of the first through hole 110. With this arrangement, a part of the fourth sealing member 404 may be located within the first through hole 110 of the baffle plate 100, and another part may be located outside the first through hole 110 of the baffle plate 100. With this arrangement, it is possible to ensure the sealing effect and prevent the fourth sealing member 404 from moving along the direction A in FIG.

[0053] 8 is a schematic diagram of a fourth sealing member according to another embodiment of the present specification. In some embodiments, as shown in FIG. 8, one end of the fourth sealing member 404 is provided with a position limiting ring 4041 extending outward along a radial direction, and the outer diameter of the position limiting ring 4041 is larger than the inner diameter of the first through hole 110 of the baffle plate 100. When the fourth sealing member 404 is installed, the position limiting ring 4041 cannot pass through the first through hole 110 of the baffle plate 100, so that it can play a role of position limiting. That is, the fourth sealing member 404 shown in FIG. 8 can ensure the sealing effect and prevent the fourth sealing member 404 from moving along the A direction in FIG. 6.

[0054] In some embodiments, when the fourth sealing member 404 is a sealing ring, the length of the fourth sealing member 404 along the axial direction of the sealing ring may be longer, shorter, or equal to the length of the first through hole 110 of the baffle plate 100 along the axis of the first through hole 110. When the length of the fourth sealing member 404 along the axial direction of the sealing ring is longer than the length of the first through hole 110 along the axial direction of the first through hole 110, both ends of the fourth sealing member 404 can exceed both ends of the first through hole 110, so that the fourth sealing member 404 can completely cover the gap between the baffle plate 100 and the first structural member 200, which is advantageous to improving the sealing strength of the fourth sealing member 404.

[0055] In some embodiments, as shown in FIGS. 3 to 5, the sealing structure 1000 further includes a first position limiting structure 800. The first position limiting structure 800 can limit the position of the first structural member 200 in the first through-hole 110 (e.g., limit the relative position between the first structural member 200 and the baffle plate 100, thereby limiting the position of the first structural member 200 in the first through-hole 110). As can be understood, the first position limiting structure 800 may limit the position of the first structural member 200 in only one direction, that is, may limit the movement of the first structural member 200 relative to the baffle plate 100 in only one direction. For example, the first position limiting structure 800 in FIGS. 3 to 5 can prevent the first structural member 200 from moving toward the direction A in FIGS. 3 to 5. In some embodiments, the first position limiting structure 800, together with other structures, can connect the baffle plate 100 and the first structural member 200 by fixing the position of the first structural member 200 in the first through hole 110, thereby realizing fixation of the relative position between the first structural member 200 and the baffle plate 100. For example, the first position limiting structure 800 can engage with a second retaining ring portion 203 of the first structural member 200 described below (the second retaining ring portion 203 can prevent the first structural member 200 from moving in the B direction in Figures 3 to 5) to fix the position of the first structural member 200 in the first through hole 110, thereby realizing fixation of the relative position between the first structural member 200 and the baffle plate 100.

[0056] In some embodiments, the first position limiting structure 800 may include a stop block located on the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, as shown in Figure 3, the stop block can abut against the baffle plate 100 to prevent the first structural member 200 from moving in the direction A in Figures 3 to 5.

[0057] 4, the second sealing member 402 and the stop block are both located on the side where the second side 102 of the baffle plate 100 is located, and the second sealing member 402 may abut against the second side 102 of the baffle plate 100, and the stop block may abut against the second sealing member 402. With this arrangement, the first position limiting structure 800 can not only prevent the first structural member 200 from moving in the A direction, but also apply pressure to the second sealing member 402 to press the second sealing member 402 against the baffle plate 100, thereby allowing the second sealing member 402 to have a better sealing effect.

[0058] 5, the second sealing member 402 and the third sealing member 403 are located on both sides of the baffle plate 100, respectively, and abut against the first side 101 and the second side 102 of the baffle plate 100, respectively. The stop block may be located on the side where the second side 102 of the baffle plate 100 is located, and abut against the third sealing member 403. With this arrangement, the first position limiting structure 800 can not only prevent the first structural member 200 from moving in the A direction, but also apply pressure to the third sealing member 403 to press the third sealing member 403 against the baffle plate 100, so that the third sealing member 403 can have a better sealing effect.

[0059] In some embodiments, the first position limiting structure 800 (the stop block described above) and the first structural member 200 can achieve position limiting in multiple connectable ways, such as by locking, threading, etc.

[0060] In some embodiments, the first position limiting structure 800 realizes the position limit by a screwing method. FIG. 9 is a schematic configuration diagram of a first structural member according to some embodiments of the present specification. As shown in FIGS. 3 to 5 and 9, in some embodiments, the first position limiting structure 800 includes a first nut 801 and a first male screw 206. That is, the stop block may be the first nut 801. The first male screw 206 is provided on the first structural member 200. After the first structural member 200 is inserted into the first through hole 110, at least a part of the first male screw may be located on the side where the second side surface 102 of the baffle plate 100 is located. The first nut 801 is screwed into the first male screw 206 of the first structural member 200 on the side where the second side surface 102 of the baffle plate 100 is located. By rotating the first nut 801, the first nut 801 is controlled so as to reciprocate on the first male screw 206, whereby the first nut 801 approaches the baffle plate 100 or moves away from the baffle plate 100. By controlling the first nut 801 so as to move toward the baffle plate 100, when the first nut 801 abuts against the baffle plate 100 (embodiment shown in FIG. 3), the second sealing member 402 (embodiment shown in FIG. 4), or the third sealing member 403 (embodiment shown in FIG. 5), the first nut 801 can apply pressure to the baffle plate 100, the second sealing member 402, or the third sealing member 403. When the first nut 801 abuts against the second sealing member 402 (embodiment shown in FIG. 4) or the third sealing member 403 (embodiment shown in FIG. 5), the first nut 801 can be controlled to move toward the baffle plate 100, thereby pressing the second sealing member 402 or the third sealing member 403 correspondingly to ensure the sealing effect.

[0061] FIG. 10A is a schematic diagram of a sealing structure according to another embodiment of the present specification, and FIG. 10B is a schematic diagram of a second structural member according to another embodiment of the present specification. Hereinafter, the second structural member 600 will be described in detail with reference to FIG. 10A and FIG. 10B. As shown in FIG. 10A, the second structural member 600 is fitted onto the first structural member 200 and is located between the first nut 801 and the third sealing member 403. The second structural member 600 is fitted onto the first structural member 200 and is located between the first nut 801 and the third sealing member 403, and contacts the third sealing member 403 to limit the position of the third sealing member 403. In some embodiments, as shown in FIG. 10B, the second structural member 600 may be provided with a second through hole 603. As shown in FIG. 10A, the first structural member 200 may be inserted into the second through hole 603 of the second structural member 600.

[0062] In some embodiments, the second structural member 600 may include a first main ring portion 601 fitted onto the first structural member 200. An inner ring of the first main ring portion 601 may be formed with a second through hole 603 through which the first structural member 200 of the second structural member 600 passes. The side of the first main ring portion 601 away from the baffle plate 100 abuts against a first nut 801, and when the first nut 801 moves, the second structural member 600 can be driven to move synchronously.

[0063] In some embodiments, the second structural member 600 may further include a first retaining ring portion 602. The first retaining ring portion 602 is provided at one end of the first main ring portion 601 in the axial direction. When the first main ring portion 601 is fitted to the first structural member 200, the first retaining ring portion 602 is located on a side of the first main ring portion 601 that is adjacent to the baffle plate. When the first main ring portion 601 is fitted to the first structural member 200, both the third sealing member 403 and the first retaining ring portion 602 are located between the baffle plate 100 and the first main ring portion 601. The third sealing member 403 is located in the inner ring of the first retaining ring portion 602.

[0064] According to the above structural design of the second structural member 600, the first main ring portion 601 can restrict the position of the third sealing member 403 in the axial direction of the first through hole 110 of the baffle plate 100. The first retaining ring portion 602 restricts the position of the third sealing member 403 in the radial direction of the first through hole 110 of the baffle plate 100. By providing the first main ring portion 601 and the first retaining ring portion 602 on the second structural member 600, the position of the third sealing member 403 can be restricted in the axial and radial directions of the first through hole 110, so that the third sealing member 403 can be tightly abutted between the first main ring portion 601 and the baffle plate 100, and the contact gap between the second structural member 600 and the baffle plate 100 can be well sealed. In addition, the second structural member 600 can effectively reduce wear on the third sealing member 403 and extend the service life of the third sealing member 403 by avoiding direct contact between the first nut 801 and the third sealing member 403.

[0065] In some embodiments, the second structural member 600 may be a partition plate having a second through hole 603, and the first structural member 200 may be inserted into the second through hole 603 of the partition plate, so that the partition plate is fitted onto the outside of the first structural member 200. In some embodiments, the side of the partition plate facing the baffle plate 100 may be provided with a groove with an arc-shaped bottom, and the third sealing member 403 may be provided in the groove of the partition plate, and the groove of the partition plate may realize a positional restriction for the third sealing member 403.

[0066] As can be appreciated, when the second sealing member 402 is provided on the side of the baffle plate where the second side 102 is located (i.e., the embodiment shown in FIG. 4), the second structural member 600 may be similarly provided in accordance with the above description.

[0067] Hereinafter, the structure of the first structural member 200 will be described in detail with reference to Figs. 3 to 5 and 9. As shown in Fig. 9, the first structural member 200 includes a second main ring portion 202. The second main ring portion 202 may penetrate the baffle plate 100 through the first through hole 110 of the baffle plate. That is, the outer diameter of the second main ring portion 202 may be smaller than the diameter of the first through hole 110, and the second main ring portion 202 may penetrate the baffle plate 100 from the side where the first side surface 101 is located to the side where the second side surface 102 is located. The inner hole 201 is formed in the second main ring portion 202.

[0068] In some embodiments, the first structural member 200 may further include a second retaining ring portion 203. When the first structural member 200 is mounted in the first through hole 110 of the baffle plate 100, the second retaining ring portion 203 may be located on the side where the first side surface 101 of the baffle plate 100 is located and surround the second main ring portion 202. That is, the second retaining ring portion 203 may be provided on the outer circumferential surface of the second main ring portion 202, and the outer diameter of the second retaining ring portion 203 is larger than the diameter of the first through hole 110, so that when the second main ring portion 202 penetrates the first through hole 110 of the baffle plate 100, the second retaining ring portion 203 cannot penetrate the first through hole 110. The second retaining ring portion 203 may play a role in restricting the position of the first structural member 200. The second retaining ring portion 203 can prevent the first structural member 200 from moving in the direction B shown in FIGS.

[0069] In some embodiments, as shown in Figures 3 and 5, when the second sealing member 402 is located on the side where the first side 101 of the baffle plate 100 is located, the second sealing member 402 may be fitted onto the outside of the second main ring portion 202 and abut against the second retaining ring portion 203, and the second retaining ring portion 203 serves to limit the position of the second sealing member 402 in the axial direction of the second main ring portion 202 (which is also the axial direction of the first through hole 110) and prevent the second sealing member 402 from coming off the second main ring portion 202.

[0070] In some embodiments, as shown in Figures 3 to 5 and 9, the first structural member 200 may further include a third retaining ring portion 204. The third retaining ring portion 204 is located on the side where the first side surface 101 of the baffle plate 100 is located, and is provided on the side of the second retaining ring portion 203 facing the baffle plate 100, and the inner diameter of the third retaining ring portion 204 is larger than the outer diameter of the second main ring portion 202, and an annular groove is formed between the third retaining ring portion 204 and the second main ring portion 202. In some embodiments, the outer diameter of the third retaining ring portion 204 may be equal to the outer diameter of the second retaining ring portion 203.

[0071] 3 and 5, the second sealing member 402 may be fitted onto the second main ring portion 202 and positioned in an inner ring of the third retaining ring portion 204. That is, the second sealing member 402 may be positioned in an annular groove formed between the third retaining ring portion 204 and the second main ring portion 202. The third retaining ring portion 204 restricts the position of the second sealing member 402 along the radial direction of the second main ring portion 202 (which is also the radial direction of the first through hole 110).

[0072] In another embodiment, the second retaining ring part 203 may have a groove with an arc-shaped bottom on the side facing the baffle plate 100, and the second sealing member 402 may be provided in the groove of the second retaining ring part 203, and the groove of the second retaining ring part 203 may realize a position limit for the second sealing member 402. In yet another embodiment, the second main ring part 202 may be provided with another position limiting mechanism, thereby achieving the purpose of preventing the first structural member 200 from moving in the direction B shown in Figures 3 to 6. For example, the second main ring part 202 may have a position limiting block, which cannot enter the first through hole 110 and thus plays the role of position limiting.

[0073] In some embodiments, the outer diameter of the second main ring portion 202 may be 15 mm to 750 mm. In some embodiments, the inner diameter of the second main ring portion 202 may be 10 mm to 500 mm. The inner diameter of the second main ring portion 202 is the diameter of the inner hole 201. In some embodiments, the ratio of the outer diameter of the second main ring portion 202 to the inner diameter of the second main ring portion 202 may be 1.1 to 2. By setting the size of the second main ring portion 202 as described above, the structure of the first structural member 200 can be made more rational and compact.

[0074] In some embodiments, the diameter of the first through hole 110 may be 17mm to 800mm. In some embodiments, the ratio of the diameter of the first through hole 110 to the inner diameter of the second main ring portion 202 is 1.2 to 2.5. Based on the above and the size design of the first through hole 110 and the second main ring portion 202, the components of the sealing structure can be better combined, so that the sealing structure can achieve a better sealing effect.

[0075] 11 is a schematic diagram of a sealing structure according to yet another embodiment of the present specification. In some embodiments, as shown in FIG. 11, the sealing structure further includes a second position limiting structure 500. The second position limiting structure 500 can improve the stability of the first sealing member 401 and prevent the first sealing member 401 from coming off by limiting the position of the first sealing member 401 within the inner hole 201. In some embodiments, the second position limiting structure 500 can apply pressure to the first sealing member 401 to improve the sealing effect of the first sealing member 401.

[0076] FIG. 12 is a schematic view of the installation of the second position limiting structure according to some embodiments of the present specification, and FIG. 13 is a schematic configuration diagram of the second nut according to some embodiments of the present specification. Hereinafter, the second position limiting structure will be described in detail with reference to FIG. 12 and FIG. 13. As shown in FIG. 12 and FIG. 13, the second position limiting structure 500 includes a second nut 501 and a first female thread 205. The second nut 501 is provided with a third male thread 504 that can be screwed into the first female thread 205. The first female thread 205 is provided in the inner hole 201 of the first structural member 200. The second nut 501 is connected to the first female thread 205 of the inner hole 201 on the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, after the first structural member 200 is installed in the first through hole 110, at least a part of the first female thread 205 may be located on the side where the second side surface 102 of the baffle plate 100 is located.

[0077] After the second nut 501 abuts against the first sealing member 401 and is screwed in, it can limit the moving space of the first sealing member 401. Furthermore, the second nut 501 can press the first sealing member 401 to improve the sealing effect of the first sealing member 401.

[0078] In some embodiments, the second nut 501 is provided with a position limiting convex ring 502, and the outer diameter of the position limiting convex ring 502 may be larger than the diameter of the inner hole 201, thereby limiting the length that the second nut 501 enters the inner hole 201. In some embodiments, the outer diameter of the position limiting convex ring 502 may be larger than the diameter of the first through hole 110 of the baffle plate 100.

[0079] In some embodiments, the second nut 501 may be provided with a third through hole 505 extending along its axis, and the third through hole 505 may be for the member to be sealed 300 to pass through. By providing the third through hole 505, the member to be sealed 300 can smoothly pass through the side of the baffle plate 100 where the second side surface 102 is located, without being restricted by the second nut 501.

[0080] In some embodiments, as shown in FIG. 9 and FIG. 11, the second position limiting structure 500 further includes a position limiting boss 207. The position limiting boss 207 is provided at one end of the inner hole 201 close to the side where the first side surface 101 of the baffle plate 100 is located. The first sealing member 401 is provided between the position limiting boss 207 and the second nut 501. The first sealing member 401 may abut against the position limiting boss 207, and the position limiting boss 207 can limit the first sealing member 401 from moving toward the first side surface 101 of the baffle plate along the axial direction of the inner hole 201. After the second nut 501 abuts against the first sealing member 401, the first sealing member 401 can be pressed against the position limiting boss 207, which is advantageous to improving the stability and sealing effect of the first sealing member 401.

[0081] The second position limiting structure 500 can prevent the first sealing member 401 from coming off by a plurality of structures. In some embodiments, the second position limiting structure 500 may further include a first position limiting plug, which may be directly pressed into the inner hole 201 from the side where the second side surface 102 of the baffle plate 100 is located, so as to prevent the first sealing member 401 from coming off. The first position limiting plug may be locked in the inner hole 201, or may be relatively fixed to the inner wall of the inner hole 201 by frictional force. The first position limiting plug can prevent the first sealing member 401 from coming off from the side where the second side surface 102 of the baffle plate 100 is located.

[0082] In another embodiment, the second position limiting structure 501 may further include a second position limiting plug or a third nut, and the second position limiting plug and the third nut may be disposed in the inner hole 201 from the side where the first side surface 101 of the baffle plate 100 is located, and can prevent the first sealing member 401 from being dislodged from the side where the first side surface 101 of the baffle plate 100 is located. The manner of providing the second position limiting plug may be similar to the manner of providing the first position limiting plug, and the manner of providing the third nut may be similar to the manner of providing the second nut 501.

[0083] In some embodiments, the number of the first sealing members 401 may be at least 2. By providing at least two first sealing members 401, the gap between the first structural member 200 and the member to be sealed 300 can be better sealed.

[0084] In some embodiments, a first gasket 4011 may be provided between the first sealing member 401 and the second nut 501. In some embodiments, the first gasket 4011 may be ring-shaped. The material of the first gasket 4011 includes, but is not limited to, copper, stainless steel, and the like. The first gasket 4011 may be replaced after it is worn out. When the second nut 501 is screwed in, the second nut 501 abuts against the first gasket 4011, and the first gasket 4011 and the first sealing member 401 are driven to move toward the position limit boss 207, thereby pressing the first sealing member 401 between the position limit boss 207 and the second nut 501.

[0085] By providing a first gasket 4011 between the second nut 501 and the first sealing member 401, the first sealing member 401 can be effectively protected from wear caused by the second nut 501, thereby extending the service life of the first sealing member 401.

[0086] In some embodiments, when the number of the first sealing members 401 is plural, a second gasket 4012 may be provided between at least two of the first sealing members 401. Materials of the second gasket 4012 include, but are not limited to, copper, stainless steel, etc. In some embodiments, the second gasket 4012 may be provided between some two adjacent first sealing members 401, and the second gasket 4012 may not be provided between other two adjacent first sealing members 401.

[0087] By providing the second gasket 4012 between two adjacent first sealing members 401, direct contact between the first sealing members 401 can be avoided, and when multiple first sealing members 401 are provided, the wear between the first sealing members 401 can be effectively reduced, thereby extending the service life of the first sealing members 401.

[0088] Fig. 14 is a schematic diagram of a sealing structure according to yet another embodiment of the present specification. Hereinafter, the first structural member 200 will be described in detail with reference to Fig. 14. As shown in Fig. 14, the first structural member 200 is inserted into the first through hole 110 from the side where the second side surface 102 of the baffle plate 100 is located. The first structural member 200 does not penetrate the first through hole 110. The member to be sealed 300 penetrates the through hole and the inner hole 201. The sealing assembly includes a fifth sealing member 405.

[0089] A position limiting stopper 103 is provided at one end of the first through hole 110 close to the side where the first side surface 101 is located. The fifth sealing member 405 is fitted onto the member to be sealed 300 and is located between the position limiting stopper 103 and the first structural member 200. In some embodiments, the position limiting stopper 103 can prevent the fifth sealing member 405 from coming off the first through hole 110 on the side where the first side surface 101 is located. The position limiting stopper 103 and the first structural member 200 can cooperate to limit the position of the fifth sealing member 405. In some embodiments, the first structural member 200 can apply pressure to the fifth sealing member 405 to ensure the sealing effect of the fifth sealing member 405. The fifth sealing member 405 not only seals the gap between the first structural member 200 and the member to be sealed 300, but may also seal the gap between the baffle plate 100 and the first structural member 200, thereby simplifying the structure of the sealing structure 1000.

[0090] The first structural member 200 is connected within the first through-hole 110 of the baffle plate 100. The first structural member 200 can be connected to the first through-hole 110 by a removable connection method such as locking, screwing, or the like.

[0091] In some embodiments, the outer wall of the first structural member 200 is provided with a second male thread 209, and the inner wall of the first through hole 110 is provided with a second female thread 111 that screws with the second male thread 209. The first structural member 200 and the first through hole 110 may be connected by a screw, and the first structural member 200 applies pressure to the fifth sealing member 405 when screwed, and the magnitude of the pressure can be easily controlled by controlling the screwing distance.

[0092] In some embodiments, the number of the fifth sealing members 405 may be at least 2. By providing at least two fifth sealing members 405, the gap between the first structural member 200 and the member to be sealed 300 and the gap between the first structural member 200 and the member to be sealed 300 can be successfully sealed.

[0093] In some embodiments, a third gasket 4051 may be provided between the fifth sealing member 405 and the first structural member 200. The third gasket 4051 serves to prevent the fifth sealing member 405 from being worn by the first structural member 200, thereby extending the service life of the fifth sealing member 405. Materials for the third gasket 4051 include, but are not limited to, copper, stainless steel, and the like.

[0094] In some embodiments, the number of the fifth sealing members 405 may be more than one. A fourth gasket 4052 may be provided between at least two adjacent fifth sealing members 405. Materials of the fourth gasket 4052 include, but are not limited to, copper, stainless steel, and the like.

[0095] By providing the fourth gasket 4052 between two adjacent fifth sealing members 405, direct contact between the fifth sealing members 405 can be avoided, and when multiple fifth sealing members 405 are provided, the wear between the fifth sealing members 405 can be effectively reduced, thereby extending the service life of the fifth sealing members 405.

[0096] In some embodiments, the first structural member 200 may be made of a conductive material. In some embodiments, as shown in FIGS. 3 to 5, an insulating layer 700 is provided between the first structural member 200 and the inner wall surface of the first through hole 110, and the insulating layer 700 insulates the baffle plate 100 and the first structural member 200 to improve the safety performance of the sealed structure. In some embodiments, the material of the first structural member may be a metallic conductive material having a low magnetic permeability (e.g., a relative magnetic permeability smaller than 2), such as copper, stainless steel, or aluminum. The insulating layer 700 is made of an insulating material. As the insulating material, a rubber-based elastic material having electrical insulating properties, such as polytetrafluoroethylene, fluororubber, nitrile rubber, or urethane rubber, may be used.

[0097] In some embodiments, the first structural member 200 may be made of an insulating material. The specific material of the first structural member 200 may be similar to the material of the insulating layer 700. By using an insulating material as the material of the first structural member 200, it is not necessary to provide an insulating part (e.g., the insulating layer 700) between the first structural member 200 and the baffle plate 100, and thus the number of parts of the sealing structure can be simplified, which is advantageous in improving the sealing effect.

[0098] In some embodiments, the sealing assembly 400 may be made of an insulating material. The specific material of the sealing assembly 400 may be similar to the material of the insulating layer 700. In some embodiments, the second sealing member 402 may be made of an insulating material. In some embodiments, the insulating layer 700 and the second sealing member 402 may be a one-piece structure. In some embodiments, the materials of the second sealing member 402 and the third sealing member 403 may all be insulating materials. In some embodiments, the insulating layer 700, the second sealing member 402 and the third sealing member 403 may be a one-piece structure. In some embodiments, the material of the first sealing member 401 is an insulating material. The technical effects that can be achieved by the above-mentioned embodiments include, but are not limited to, that the insulation between the baffle plate 100 and the first structural member 200, the second structural member 600 and the member to be sealed 300 can be achieved by using the insulating layer 700, the first sealing member 401, the second sealing member 402 and the third sealing member 403 made of insulating materials.

[0099] In some embodiments, a tool hole may be formed in the first structural member 200, the first nut 801, and / or the second nut 501. The tool hole may be useful for inserting an auxiliary tool (e.g., a latch) into the tool hole prior to performing an attachment action (e.g., screwing, pushing forward, pulling backward, etc.) on the component in which the tool hole is formed.

[0100] In some embodiments, the first tooling hole 208 may be formed in the first structural member 200. In some embodiments, the first tooling hole 208 may be formed in the third retaining ring portion 204, as shown in FIG.

[0101] In some embodiments, as shown in FIGS. 12 and 13, a second tool hole 503 may be formed in the second nut 501 .

[0102] In some embodiments, the first nut 801 may have a third tool hole formed therein, which is not shown and may refer to the first tool hole 208 and the second tool hole 503. In some embodiments, the outer shape of the first nut 801 may be hexagonal or other shape.

[0103] The technical effects that can be achieved by the above-mentioned embodiments include, but are not limited to, that by forming tool holes in each part, very convenient and quick installation and / or removal can be achieved.

[0104] The beneficial effects that may be brought about by the sealing structure in the embodiments of the present specification include, but are not limited to, (1) the sealing assembly in the present specification can provide a better sealing effect by sealing the gap between the baffle plate and the first structural member and the gap between the member to be sealed and the first structural member, (2) the sealing structure can simultaneously seal both sides of the baffle plate to improve the sealing effect, (3) the connection between each structure in the sealing structure is simple and convenient, the sealing assembly can be quickly installed and replaced, and flexibly adjusted, and the difficulty and cost of maintenance and repair can be reduced, and (4) the safety performance can be improved by using insulating materials in the sealing assembly and structural members. Note that the beneficial effects according to different embodiments are different, and in different embodiments, they may be any one or more combinations of the above, or any other possible effects.

[0105] FIG. 15 is a schematic diagram of a vacuum furnace according to some embodiments of the present specification. The vacuum furnace will be described in detail below with reference to FIG. 15. As shown in FIG. 15, a vacuum furnace 2000 includes a sealing structure 1000, and the vacuum furnace includes a furnace body 2100. The furnace body 2100 is a furnace body that provides a vacuum environment. In some embodiments, the baffle plate 100 may be a part of the side wall of the furnace body 2100, i.e., may be an integral structure with the side wall of the furnace body 2100. In another embodiment, an opening may be first provided in the side wall of the furnace body 2100, and then the baffle plate 100 may be attached to the opening. That is, the baffle plate 100 and the side wall of the furnace body are separate structures.

[0106] In some embodiments, the first side 101 of the baffle plate 100 is located inside the furnace body 2100, and the second side 102 of the baffle plate 100 is located outside the furnace body 2100. By providing in this manner, installation, removal, inspection, replacement, and other operations can be easily performed from outside the vacuum furnace. For example, in the process of attaching the first nut 801 and / or the second nut 501, since both the first nut 801 and the second nut 501 are provided on the side where the second side 102 of the baffle plate 100 is located, the first nut 801 and / or the second nut 501 can be easily attached from outside the furnace body.

[0107] In some embodiments, the furnace body 2100 may have a plurality of openings. For example, the furnace body 2100 may have two openings, which are used for the ingress and egress of the coil and cable, respectively. Each opening may be provided with the sealing structure 1000 described above.

[0108] Although the basic concept has been described above, it is obvious that the above detailed disclosure is merely illustrative and does not limit the present specification. Although not explicitly described herein, a person skilled in the art may make various amendments, improvements and modifications to the present specification. Since such amendments, improvements and modifications are proposed in the present specification, such amendments, improvements and modifications still fall within the spirit and scope of the exemplary embodiments of the present specification.

[0109] In addition, certain terms are used herein to describe the embodiments of the present specification. "An embodiment," "an embodiment," and / or "some embodiments" refer to features, structures, or characteristics associated with at least one embodiment of the present specification. Thus, it should be noted that "an embodiment," "an embodiment," or "alternative embodiments" referenced two or more times in different positions herein do not necessarily refer to the same embodiment. Furthermore, some features, structures, or characteristics in one or more embodiments of the present specification may be appropriately combined.

[0110] Similarly, it should be noted that in the foregoing description of the embodiments herein, various features may be combined in one embodiment, drawing, or description thereof in order to simplify the presentation of the disclosure herein and to facilitate understanding of one or more inventive embodiments. However, this method of disclosure does not imply that the subject matter of the present disclosure requires more features than are recited in the claims. Indeed, an embodiment may have fewer than all the features of a single embodiment disclosed above.

[0111] Finally, it should be noted that the embodiments described herein are merely principles for describing the embodiments of the present specification. Other variations may also fall within the scope of the present specification. Thus, by way of example and not of limitation, alternative configurations of the embodiments of the present specification may be considered consistent with the teachings of the present specification. Thus, the embodiments of the present specification are not limited to the embodiments explicitly introduced and described herein. [Explanation of symbols]

[0112] 1000 sealed structure 100 Baffle plate 101 First aspect 102 Second aspect 103 Position limit stopper 110 First through hole 111 Second female thread 200 First structural member 201 Inner hole 202 Second Main Ring Section 203 Second retaining ring part 204 Third retaining ring part 205 First female thread 206 First male thread 207 Position Restriction Boss 208 1st tool hole 209 Second male thread 300 Sealed parts 400 Seal Assembly 401 First sealing member 4011 First gasket 4012 Second gasket 402 Second sealing member 403 Third sealing member 404 Fourth sealing member 4041 Position limit ring 405 Fifth sealing member 4051 3rd gasket 4052 4th gasket 500 Second position limiting structure 501 Second Nut 502 Position limiting convex ring 503 2nd tool hole 504 3rd male thread 505 3rd Through Hole 600 Second structural member 601 First Main Ring Section 602 First retaining ring part 603 Second Through Hole 700 Insulation Layer 800 First position limiting structure 801 First Nut 2000 vacuum furnace 2100 Furnace body

Claims

1. a baffle plate having a first through hole formed therein penetrating a first side surface and a second side surface of the baffle plate; a first structural member having an inner hole through which a member to be sealed passes, the first structural member being connected to the baffle plate, at least a portion of the inner hole being located within the first through hole, and at least a portion of the inner hole being not parallel to both the first side surface and the second side surface; a sealing assembly for sealing a gap between the baffle plate and the first structural member and for sealing a gap between the member to be sealed and the first structural member; A sealed structure including:

2. the first structural member penetrates the baffle plate through the first through hole, the sealing assembly includes a first sealing member for sealing a gap between the member to be sealed and the first structural member; The sealing structure according to claim 1 , wherein the first sealing member is provided between an inner wall of the inner hole and the member to be sealed.

3. The sealing assembly includes a second sealing member located at one end of the first through hole, The sealing structure according to claim 2 , wherein the second sealing member abuts against the first side surface or the second side surface of the baffle plate to seal a gap between the baffle plate and the first structural member.

4. the sealing assembly further includes a third sealing member for sealing a gap between the baffle plate and the first structural member; 4. The sealing structure according to claim 3, wherein the second sealing member and the third sealing member are located at both ends of the first through hole, and abut against a first side surface and a second side surface of the baffle plate, respectively.

5. 3. The sealing structure of claim 2, wherein the sealing assembly includes a fourth sealing member for sealing a gap between the baffle plate and the first structural member, and at least a portion of the fourth sealing member is provided between an inner wall of the first through hole and an outer wall of the first structural member.

6. The sealing structure according to claim 4 , further comprising a first position limiting structure that limits a position of the first structural member in the first through hole.

7. 7. The sealing structure of claim 6, wherein the first position limiting structure includes a first nut and a first male thread, the first male thread is provided on the first structural member, and the first nut is screwed into the first male thread of the first structural member on a side where the second side surface of the baffle plate is located.

8. a second structural member fitted onto the first structural member and positioned between the first nut and the third sealing member; the second structural member includes a first main ring portion and a first retaining ring portion, the first main ring portion is fitted onto the first structural member, and the first retaining ring portion is located at one end of the first main ring portion in the axial direction; 8. The sealing structure of claim 7, wherein the third sealing member and the first retaining ring portion are both positioned between the baffle plate and the first main ring portion, and the third sealing member is positioned in an inner ring of the first retaining ring portion.

9. 3. The sealing structure of claim 2, wherein the first structural member includes a first main ring portion and a first retaining ring portion, the inner hole is formed in the first main ring portion, the first main ring portion penetrates the baffle plate through the first through hole, the first retaining ring portion is located on the side of the baffle plate where the first side surface is located, and the first retaining ring portion surrounds the outside of the first main ring portion, and an outer diameter of the first retaining ring portion is larger than a diameter of the first through hole.

10. 10. The sealing structure of claim 9, wherein the first structural member further includes a second retaining ring portion, the second retaining ring portion being located on the side where the first side surface of the baffle plate is located, the second retaining ring portion being provided on the side of the first retaining ring portion facing the baffle plate, and the outer diameter of the second retaining ring portion being larger than the outer diameter of the first main ring portion.

11. 10. The sealing structure according to claim 9, wherein a ratio of an outer diameter of the first main ring portion to an inner diameter of the first main ring portion is 1.1 to 2.

12. 10. The sealing structure according to claim 9, wherein a ratio of a diameter of the first through hole to an inner diameter of the first main ring portion is 1.2 to 2.

5.

13. The sealing structure of claim 2 , further comprising a second position limiting structure configured to limit the position of the first sealing member in the bore.

14. 14. The sealing structure of claim 13, wherein the second position limiting structure includes a second nut and a first female thread, the first female thread is located within the inner hole, and the second nut is connected to the first female thread of the inner hole on a side where the second side of the baffle plate is located.

15. The sealing structure according to claim 14 , wherein the second position limiting structure includes a position limiting boss provided in the inner hole, and the first sealing member is provided between the position limiting boss and the second nut.

16. The sealing arrangement according to claim 14, further comprising a first gasket disposed between the first sealing member and the second nut.

17. The sealing structure according to claim 2 , wherein the sealing assembly includes at least two of the first sealing members, and a second gasket is provided between at least two adjacent first sealing members.

18. the first structural member is inserted into the first through hole from a side where the second side surface of the baffle plate is located, and a position limiting stopper is provided at one end of the first through hole adjacent to the first side surface, The member to be sealed passes through the first through hole and the inner hole, 2. The sealing structure according to claim 1, wherein the sealing assembly includes a fifth sealing member, the fifth sealing member being provided in the first through hole, fitted around the member to be sealed, and positioned between the position limit stopper and the first structural member.

19. 20. The sealing structure according to claim 18, wherein an outer wall of the first structural member is provided with a second male thread, and an inner wall of the first through hole is provided with a second female thread that matches the second male thread.

20. The sealed structure according to claim 1 , wherein the first structural member is made of a conductive material, and an insulating layer is provided between an outer surface of the first structural member and an inner wall surface of the first through hole.

21. The sealed structure of claim 1 , wherein the first structural member is formed from an insulating material and / or the sealed assembly is formed from an insulating material.

22. A vacuum furnace comprising the sealing structure according to any one of claims 1 to 21 and a furnace body, wherein an opening is provided in a side wall of the furnace body, and the sealing structure is provided in the opening via the baffle plate.

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