Filtration in a Steam Delivery System

Abstract

The filter assembly includes a fluid inlet, a fluid outlet, a conduit, and a filter. The conduit is fluidly connected to the fluid inlet and the filter. The filter is fluidly connected to the conduit and the fluid outlet. The filter assembly is configured to flow at least one of MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof. The filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid and provide a filtered fluid.

Description

Technical Field

[0001] The present disclosure generally relates to vapor delivery systems. More specifically, the present disclosure relates to filtration in vapor delivery systems, such as, but not limited to, vapor delivery systems configured to deliver molybdenum vapor.

[0002] Priority Claim The present disclosure claims priority to U.S. Provisional Patent Application No. 63 / 348,807, filed on June 3, 2022, which is incorporated herein by reference.

Background Art

[0003] Various materials are subject to unwanted corrosion when the materials are exposed to chemical vapors such as molybdenum vapor. An increase in heat, pressure, or both can promote unwanted corrosion.

Summary of the Invention

[0004] In some embodiments, a filter assembly includes a fluid inlet, a fluid outlet, a conduit, and a filter. In some embodiments, the conduit is fluidly connected to the fluid inlet and the filter. In some embodiments, the filter is fluidly connected to the conduit and the fluid outlet. In some embodiments, the filter assembly is configured to flow at least one of MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof. In some embodiments, the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid and provide a filtered fluid.

[0005] In some embodiments, the filter assembly includes a first end and a second end opposite the first end, and both the fluid inlet and the fluid outlet are located at the first end.

[0006] In some embodiments, the conduit is configured for fluid flow in a first direction and the filter is configured for fluid flow in a second direction. In some embodiments, the second direction is opposite the first direction.

[0007] In some embodiments, the filter assembly includes a ballast member fluidly connected between the conduit and the filter.

[0008] In some embodiments, the system includes a manifold that includes a fluid inlet and a fluid outlet. In some embodiments, the fluid inlet is configured to receive vapor. In some embodiments, the fluid outlet is configured to output vapor. In some embodiments, the conduit is fluidly connected to the fluid inlet and is configured to receive vapor. In some embodiments, the filter is fluidly connected to the conduit at a filter inlet and is configured to receive vapor from the conduit. In some embodiments, the filter is fluidly connected to the fluid outlet at a filter outlet and is configured to output the filtered vapor to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the vapor, resulting in filtered vapor. In some embodiments, the vapor includes at least one of MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof.

[0009] In some embodiments, the system includes a ballast member. In some embodiments, the ballast member includes a ballast inlet and a ballast outlet. In some embodiments, the ballast inlet is configured to be fluidly connected to a conduit, and the ballast outlet is configured to be fluidly connected to a filter. In some embodiments, the ballast member includes a housing configured to control the pressure gradient of the vapor from the conduit to the filter.

[0010] In some embodiments, the system includes a coating that covers at least a portion of the conduit, covers at least a portion of the filter, or a combination thereof. In some embodiments, the coating is configured to be exposed to the vapor. In some embodiments, the coating includes at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof. In some embodiments, the coating includes a metal oxide.

[0011] In some embodiments, the manifold is configured to fluidly connect a fluid inlet to the conduit, fluidly connect the filter to the fluid outlet, and maintain a separation between the fluid inlet and the fluid outlet.

[0012] In some embodiments, the molybdenum residue, tungsten residue, or any combination thereof includes solid particulate matter, and the filter is configured to remove the solid particulate matter from the fluid stream.

[0013] In some embodiments, the filter is configured for filtering the fluid at a temperature of 100°C or higher.

[0014] In some embodiments, the filter is configured for filtering the fluid at a temperature of 100°C to 250°C.

[0015] In some embodiments, the filter is configured for filtering the fluid at a maximum pressure of 1 MPa.

[0016] In some embodiments, the filter is a flow-through filter. In some embodiments, the filter is a filter other than a flow-through filter.

[0017] In some embodiments, a vapor delivery system includes the above-described system.

[0018] In some embodiments, a method includes obtaining a system configured to filter vapor. In some embodiments, the system includes a member having a fluid inlet and a fluid outlet, the fluid inlet being configured to receive vapor and the fluid outlet being configured to output vapor, a conduit fluidly connected to the fluid inlet and configured to receive vapor, and a filter fluidly connected to the conduit at a filter inlet and configured to receive vapor from the conduit, the filter being fluidly connected to the fluid outlet at a filter outlet and configured to output the filtered vapor to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residue, tungsten residue, or any combination thereof in the filtered vapor. In some embodiments, the vapor includes at least one of MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof. In some embodiments, the method includes attaching the above-described system to a vapor delivery system. In some embodiments, the above-described system is attached to a delivery manifold of the vapor delivery system.

[0019] In some embodiments, a method includes obtaining a ballast member and attaching the ballast member between the conduit and the filter.

[0020] In some embodiments, attaching the system to a steam delivery system includes incorporating the system into a previously operating steam delivery system.

[0021] Refer to the accompanying drawings that form a part of this disclosure and illustrate embodiments in which the systems and methods described herein can be practiced.

Brief Description of the Drawings

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 4

Figure 5

Figure 6

Modes for Carrying Out the Invention

[0023] Like reference numerals represent the same or similar parts throughout.

[0024] FIG. 1 shows a filter assembly 100 according to some embodiments. FIG. 2 shows a cross-sectional view of the filter assembly 100 of FIG. 1 according to some embodiments. Unless otherwise specifically referred to, FIGS. 1 and 2 are described together.

[0025] The filter assembly 100 is configured for use in a steam delivery system. For example, in some embodiments, the filter assembly 100 is MoO2 Cl 2 、MoOCl 4 、MoCl 5 、WCl 6 、WCl 5 、WOCl 4 、WO 2 Cl 2 、or at least one of any combination thereof, and can be used in a vapor delivery system configured to deliver. In some embodiments, the filter assembly 100 can be disposed within the high-temperature fluid chamber of the vapor delivery system. In some embodiments, the high-temperature fluid chamber of the vapor delivery system can be disposed upstream of an output valve through which fluid is delivered from the vapor delivery system for its use.

[0026] In the illustrated embodiment, the filter assembly 100 includes a fluid inlet 102, a fluid outlet 104, a conduit 106, a ballast member 108, and a filter 110, which are fluidly connected to each other and configured to receive unfiltered fluid and output filtered fluid. In some embodiments, the filter assembly 100 is configured to collect at least a portion of molybdenum residues, tungsten residues, or any combination thereof from the unfiltered fluid and provide a filtered fluid. In some embodiments, the molybdenum residues, tungsten residues, or any combination thereof can include solid particulate matter. In some embodiments, the filter 110 can remove solid particulate matter from the fluid flow. In some embodiments, the filter 110 can remove solid particulate matter other than molybdenum residues, tungsten residues, or a combination thereof from the fluid flow.

[0027] The fluid inlet 102 and the fluid outlet 104 can be disposed within the manifold 112. The manifold 112 can receive a fluid (e.g., the delivered vapor) and can redirect the fluid through the conduit 106, the ballast member 108, and the filter 110. In some embodiments, the fluid flow is configured to be in a first direction into the fluid inlet 102 and a second direction out of the fluid outlet 104. In some embodiments, the first direction is opposite the second direction. In some embodiments, the manifold 112 is sealed between the fluid inlet 102 and the fluid outlet 104 such that unfiltered fluid cannot bypass the filter 110.

[0028] The conduit 106 is configured to have an inlet end 114 and an outlet end 116. The inlet end 114 is configured to receive fluid from the manifold 112. The outlet end 116 is configured to output fluid to the ballast member 108.

[0029] The ballast member 108 is configured to manage the pressure gradient of the fluid before the fluid flows through the filter 110. In some embodiments, the ballast member 108 can be optional. In such embodiments, the filter 110 can have a length longer than that shown in the illustrated embodiment to replace the absent ballast member 108. In some embodiments, the ballast member 108 may be absent. Such embodiments are shown in FIG. 5. In some embodiments, the ballast member 108 can be replaced by a conduit having a plurality of diameters. Such embodiments are shown in FIG. 6.

[0030] In some embodiments, filter 110 is an in-line filter. In some embodiments, the length L1 of filter 110 can be maximized to optimize filtration. In some embodiments, the total length of filter 110 and ballast member 108 can be limited by the placement of filter assembly 100 within the vapor delivery system. It should be understood that the in-line filter is an exemplary filter of filter 110, and filter 110 can include other types of filters other than the in-line filter. In some embodiments, the effectiveness of filter 110 can be measured based on the number of particles deposited on the wafer by use of the filtered vapor. In some embodiments, filter 110 is configured to provide a resulting filtered vapor having less than 100 particles per wafer, less than 10 particles per wafer, less than 1 particle per wafer, 1 particle per wafer to 10 particles per wafer, 1 particle per wafer to 100 particles per wafer, or 1 particle per wafer to 1,000 particles per wafer. In some embodiments, filter 110 is configured to provide a resulting filtered vapor having less than 1 particle per wafer of an average particle size of 1 nm to 100 nm, such as, but not limited to, an average particle size of 10 nm to 30 nm (e.g., 20 nm).

[0031] In some embodiments, the filter 110 is configured for filtration in high-temperature applications. In some embodiments, the high-temperature applications can include temperatures up to 250°C. In some embodiments, the high-temperature applications can include temperatures of 100°C to 250°C, 110°C to 250°C, 120°C to 250°C, 130°C to 250°C, 140°C to 250°C, 150°C to 250°C, 160°C to 250°C, 170°C to 250°C, 180°C to 250°C, 190°C to 250°C, 200°C to 250°C, 210°C to 250°C, 220°C to 250°C, 230°C to 250°C, or 240°C to 250°C. In some embodiments, the filter 110 can also be utilized at operating temperatures of 0°C to 120°C. In some embodiments, the filter 110 can utilize a fluoropolymer membrane, such as, but not limited to, a polytetrafluoroethylene (PTFE) membrane. In some embodiments, the support for the membrane can utilize a fluoropolymer, such as, but not limited to, perfluoroalkoxy alkane (PFA). In some embodiments, the filter 110 can include a housing formed of stainless steel or the like.

[0032] In some embodiments, the filter 110 is configured for the filtration of fluids at pressures of up to 1 MPa, up to 0.9 MPa, up to 0.8 MPa, up to 0.7 MPa, up to 0.6 MPa, up to 0.5 MPa, up to 0.4 MPa, up to 0.3 MPa, up to 0.2 MPa, up to 0.1 MPa, 1 Pa to 1 MPa, 10 Pa to 1 MPa, 100 Pa to 1 MPa, 1000 Pa to 1 MPa, 0.01 MPa to 1 MPa, 0.1 MPa to 1 MPa, 0.2 to 1 MPa, 0.3 to 1 MPa, 0.4 to 1 MPa, 0.5 to 1 MPa, 0.6 to 1 MPa, 0.7 to 1 MPa, 0.8 to 1 MPa, or 0.9 to 1 MPa.

[0033] In some embodiments, the outlet pressure of the fluid from the steam delivery system can be important. Thus, in some embodiments, the filter 110 can be selected to minimize the pressure drop of the fluid.

[0034] In some embodiments, the filter 110 may be replaceable. That is, in some embodiments, the connecting portions 118 and 120 may be used to fix the filter 110 within the filter 110. In some embodiments, the connecting portions 118 and 120 include vacuum coupling radiation (VCR) connecting portions. In some embodiments, the filter 110 can have corresponding connecting portions on each end for attachment within the filter assembly 100. For example, in some embodiments, the filter assembly 100 can include a threaded nut configured to be fastened to the threaded post of the filter 110.

[0035] In some embodiments, one or more of the components of the filter assembly 100 are configured to be exposed to chemical vapor such as MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof. In some embodiments, the surfaces of the components of the filter assembly 100 that are to be exposed to chemical vapor are protected by surface treatment, an added coating, or a combination thereof. Such coatings can be understood to reduce or suppress mass loss due to corrosion, but it was surprising to find that certain types of surface treatment, added coatings, or both can also beneficially reduce mass gain on the surface. Further, certain types of surface treatment, added coatings, or both can also reduce and / or suppress residue formation on the surface.

[0036] According to some embodiments, the coating can include at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof. In some embodiments, the coating includes a metal oxide, and the metal oxide can be at least one of aluminum oxide, silicon oxide, yttrium oxide, magnesium oxide, calcium oxide, zirconium oxide, hafnium oxide, boron oxide, or any combination thereof. In some embodiments, the coating includes a metal alloy, such as an alloy containing molybdenum (Mo). In some exemplary embodiments, the coating includes at least one of aluminum (Al), silicon (Si), yttrium (Y), magnesium (Mg), calcium (Ca), zirconium (Zr), hafnium (Hf), boron (B), or any combination thereof. In some exemplary embodiments, the coating includes at least one of yttria, alumina, silica, graphite, sputtered nickel, fluorinated metal alloy, polished stainless steel, borosilicate glass, or any combination thereof.

[0037] Thus, in various embodiments of the apparatus and method, it includes a coating on an apparatus configured to be exposed to chemical vapor (such as WCl 5 and / or MoO 2 Cl 2 etc.). In some embodiments, the coating reduces or suppresses the mass change (mass gain or mass loss) to 1×10 -5 g / mm -2 or less per unit area.

[0038] In some embodiments, the filter assembly 100 can be attached to the vapor delivery system during the manufacture of the vapor delivery system. In some embodiments, the filter assembly 100 can be attached to the vapor delivery system after the vapor delivery system has been used. That is, in some embodiments, the filter assembly 100 can be incorporated into a previously operating vapor delivery system.

[0039] Figure 3 shows a flowchart of method 150 according to some embodiments. Method 150 can be used to attach a filter assembly (e.g., filter assembly 100 of FIGS. 1-2) to a steam delivery system. In some embodiments, method 150 can be used to attach other embodiments of the filter assembly (e.g., FIGS. 4-6 below) to a steam delivery system.

[0040] In block 152, method 150 includes obtaining a system configured to filter steam. In some embodiments, the system includes a member having a fluid inlet and a fluid outlet. In some embodiments, the fluid inlet is configured to receive steam. In some embodiments, the fluid outlet is configured to output steam. In some embodiments, a conduit is fluidly connected to the fluid inlet and configured to receive steam. In some embodiments, a filter is fluidly connected to the conduit at a filter inlet and configured to receive steam from the conduit. In some embodiments, the filter is fluidly connected to the fluid outlet at a filter outlet and configured to output filtered steam to the fluid outlet. In some embodiments, the filter is configured to remove at least a portion of molybdenum residue, tungsten residue, or any combination thereof in the filtered steam. In some embodiments, the steam includes at least one of MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2 , or any combination thereof.

[0041] In block 154, method 150 includes attaching the system to a steam delivery system. In some embodiments, attaching the system to a steam delivery system includes incorporating the system into a previously operating steam delivery system.

[0042] In some embodiments, optionally, at block 156, method 150 includes obtaining a ballast member and attaching the ballast member between the conduit and the filter.

[0043] FIG. 4 shows a cross-sectional view of a filter assembly 200 according to some embodiments. For the sake of brevity herein, aspects of features already described are not described in further detail unless specifically stated otherwise.

[0044] In the illustrated embodiment, filter assembly 200 includes a housing 202. Housing 202 includes an inlet 204 and an outlet 206. Inlet 204 is fluidly connected to filter 110. Unfiltered fluid may be received at inlet 204 and provided to filter 110. Filtered fluid may be output from outlet 206. Filter assembly 200 also includes a seal 208 configured to seal housing 202 such that filtered fluid can be output from outlet 206 without leaking from housing 202.

[0045] It should be understood that any of aspects 1-5 can be combined with any of aspects 6-18, 19, or 20-22. Any of aspects 6-18 can be combined with any of aspects 19 or 20-22. Aspect 19 can be combined with any of aspects 20-22.

[0046] Aspect 1. A filter assembly comprising a fluid inlet, a fluid outlet, a conduit, and a filter, wherein the conduit is fluidly connected to the fluid inlet and the filter, the filter is fluidly connected to the conduit and the fluid outlet, and the filter assembly is MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2、or configured to flow at least one of any combination thereof, and the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid and provide a filtered fluid, a filter assembly.

[0047] Aspect 2. The filter assembly according to Aspect 1, comprising a first end and a second end opposite the first end, wherein both the fluid inlet and the fluid outlet are located at the first end.

[0048] Aspect 3. The filter assembly according to Aspect 1 or 2, wherein the conduit is configured for fluid flow in a first direction and the filter is configured for fluid flow in a second direction.

[0049] Aspect 4. The filter assembly according to Aspect 3, wherein the second direction is opposite to the first direction.

[0050] Aspect 5. The filter assembly according to any one of Aspects 1 to 4, further comprising a ballast member fluidly connected between the conduit and the filter.

[0051] Aspect 6. A manifold comprising a fluid inlet and a fluid outlet, wherein the fluid inlet is configured to receive vapor and the fluid outlet is configured to output vapor, a conduit fluidly connected to the fluid inlet and configured to receive vapor, and a filter fluidly connected to the conduit at a filter inlet and configured to receive vapor from the conduit, the filter being fluidly connected to the fluid outlet at a filter outlet and configured to output filtered vapor to the fluid outlet, the filter being configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the vapor and provide filtered vapor, and the vapor being MoO 2 Cl 2 、MoOCl 4 、MoCl 5 、WCl 6 、WCl 5 、WOCl 4 、WO2 Cl 2 、 or at least one of any combination thereof, a system.

[0052] Aspect 7. The system according to aspect 6, further comprising a ballast member.

[0053] Aspect 8. The ballast member includes a ballast inlet and a ballast outlet, the ballast inlet is configured to be fluidly connected to the conduit, the ballast outlet is configured to be fluidly connected to the filter, and the ballast member comprises a housing configured to control the pressure gradient of the vapor from the conduit to the filter. The system according to aspect 7.

[0054] Aspect 9. The system according to any one of aspects 6 to 8, comprising a coating that covers at least a part of the conduit, covers at least a part of the filter, or a combination thereof.

[0055] Aspect 10. The system according to aspect 9, wherein the coating is configured to be exposed to the vapor.

[0056] Aspect 11. The system according to aspect 10, wherein the coating comprises at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof.

[0057] Aspect 12. The system according to aspect 10, wherein the coating comprises a metal oxide.

[0058] Aspect 13. The system according to any one of aspects 6 to 12, wherein the manifold fluidly connects the fluid inlet and the conduit, fluidly connects the filter and the fluid outlet, and is configured to maintain the separation between the fluid inlet and the fluid outlet.

[0059] Aspect 14. The system according to aspect 13, wherein the molybdenum residue, tungsten residue, or any combination thereof contains solid particulate matter, and the filter is configured to remove the solid particulate matter from the fluid flow.

[0060] Aspect 15. The system according to any one of Aspects 6 to 14, wherein the filter is configured for filtering a fluid at a temperature of 100°C or higher.

[0061] Aspect 16. The system according to Aspect 15, wherein the filter is configured for filtering a fluid at a temperature of 100°C to 250°C.

[0062] Aspect 17. The system according to any one of Aspects 6 to 16, wherein the filter is configured for filtering a fluid at a maximum pressure of 1 MPa.

[0063] Aspect 18. The system according to any one of Aspects 6 to 17, wherein the filter is a flow-through filter.

[0064] Aspect 19. A steam delivery system comprising the system according to any one of Aspects 6 to 18.

[0065] Aspect 20. Obtaining a system configured to filter steam, the system comprising: a member having a fluid inlet and a fluid outlet, the fluid inlet being configured to receive steam and the fluid outlet being configured to output steam; a conduit fluidly connected to the fluid inlet and configured to receive steam; a filter fluidly connected to the conduit at a filter inlet and configured to receive steam from the conduit, the filter being fluidly connected to the fluid outlet at a filter outlet and configured to output the filtered steam to the fluid outlet, the filter being configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered steam, and the steam being MoO 2 Cl 2 , MoOCl 4 , MoCl 5 , WCl 6 , WCl 5 , WOCl 4 , WO 2 Cl 2obtaining a system configured to filter steam, including at least one of them or any combination thereof; and attaching the system to a steam delivery system, wherein the system is attached to a delivery manifold of the steam delivery system, including attaching the system to the steam delivery system.

[0066] Aspect 21. The method according to aspect 20, including obtaining a ballast member and attaching the ballast member between a conduit and a filter.

[0067] Aspect 22. The method according to aspect 20 or 21, wherein attaching the system to the steam delivery system includes incorporating the system into a previously operating steam delivery system.

[0068] The terms used in this specification are intended to describe embodiments and are not intended to be limiting. The terms "a", "an", and "the" include the plural form unless otherwise specified. The terms "comprises" and / or "comprising" used in this specification specify the presence of the described features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, and / or components.

[0069] It should be understood that modifications may be made in detail, without departing from the scope of the present disclosure, particularly with regard to the constituent materials used and the shape, size, and arrangement of the components. This specification and the described embodiments are examples, and the true scope and spirit of the present disclosure are indicated by the following claims.

Claims

1. A fluid inlet, a fluid outlet, a conduit, and a filter comprising a filter assembly, wherein the conduit is fluidly connected to the fluid inlet and the filter, the filter is fluidly connected to the conduit and the fluid outlet, wherein the filter assembly flows at least one of MoO ２ Cl ２ , MoOCl ４ , MoCl ５ , WCl ６ , WCl ５ , WOCl ４ , WO ２ Cl ２ , or any combination thereof, the filter is configured to collect molybdenum residues, tungsten residues, or any combination thereof from the fluid and provide a filtered fluid, filter assembly.

2. The filter assembly according to claim 1, comprising a first end and a second end opposite the first end, wherein both the fluid inlet and the fluid outlet are located at the first end.

3. The filter assembly according to claim 1, wherein the conduit is configured for fluid flow in a first direction and the filter is configured for fluid flow in a second direction.

4. The filter assembly according to claim 3, wherein the second direction is opposite to the first direction.

5. The filter assembly according to claim 1, further comprising a ballast member fluidly connected between the conduit and the filter.

6. A manifold comprising a fluid inlet and a fluid outlet, wherein the fluid inlet is configured to receive vapor, the fluid outlet is configured to output the vapor, a conduit fluidly connected to the fluid inlet and configured to receive the vapor, a filter fluidly connected to the conduit at a filter inlet and configured to receive the vapor from the conduit, the filter being fluidly connected to the fluid outlet at a filter outlet and configured to output the filtered vapor to the fluid outlet, comprising, the filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the vapor and provide the filtered vapor, The steam contains MoO ２ Cl ２ , MoOCl ４ , MoCl ５ , WCl ６ , WCl ５ , WOCl ４ , WO ２ Cl ２ , or at least one of any combination thereof system.

7. The system according to claim 6, further comprising a ballast member.

8. The system according to claim 7, wherein the ballast member includes a ballast inlet and a ballast outlet, the ballast inlet is configured to be fluidly connected to the conduit, the ballast outlet is configured to be fluidly connected to the filter, and the ballast member comprises a housing configured to control the pressure gradient of the vapor from the conduit to the filter. Claim 9 The system according to claim 6, comprising a coating covering at least a part of the filter, covering at least a part of the conduit, or a combination thereof. Claim 10 The system according to claim 9, wherein the coating is configured to be exposed to the vapor. Claim 11 The system according to claim 10, wherein the coating comprises at least one of a metal oxide, a metal alloy, an elemental metal, quartz, or any combination thereof. Claim 12 The system according to claim 10, wherein the coating comprises a metal oxide. Claim 13 The system according to claim 6, wherein the manifold is configured to fluidly connect the fluid inlet and the conduit, fluidly connect the filter and the fluid outlet, and maintain a separation between the fluid inlet and the fluid outlet. Claim 14 The system according to claim 13, wherein the molybdenum residue, the tungsten residue, or any combination thereof comprises solid particulate matter, and the filter is configured to remove the solid particulate matter from the fluid flow. Claim 15 The system according to claim 6, wherein the filter is configured for filtering a fluid at a temperature of 100°C or higher. Claim 16 The system according to claim 15, wherein the filter is configured for filtering a fluid at a temperature of 100°C to 250°C. Claim 17 The system according to claim 6, wherein the filter is configured for filtering a fluid at a maximum pressure of 1 MPa. Claim 18 The system according to claim 6, wherein the filter is a flow-through filter. Claim 19 A vapor delivery system comprising the system according to claim 6. Claim 20 Obtaining a system configured to filter vapor, the system comprising: A member having a fluid inlet and a fluid outlet, The fluid inlet being configured to receive vapor, The fluid outlet being configured to output the vapor, and A conduit fluidly connected to the fluid inlet and configured to receive the vapor, A filter fluidly connected to the conduit at a filter inlet and configured to receive the vapor from the conduit, the filter being fluidly connected to the fluid outlet at a filter outlet and configured to output the filtered vapor to the fluid outlet. Comprising The filter is configured to remove at least a portion of molybdenum residues, tungsten residues, or any combination thereof in the filtered vapor. wherein the vapor contains at least one of MoO ２ Cl ２ , MoOCl ４ , MoCl ５ , WCl ６ , WCl ５ , WOCl ４ , WO ２ Cl ２ , or any combination thereof, and obtaining a system configured to filter the vapor Attaching the system to a steam delivery system, wherein the system is attached to a delivery manifold of the steam delivery system, the attaching of the system to the steam delivery system A method comprising. **Claim 21** The method according to claim 20, comprising obtaining a ballast member and attaching the ballast member between the conduit and the filter. **Claim 22** The method according to claim 20, wherein the attaching of the system to the steam delivery system includes incorporating the system into a previously operating steam delivery system.

Images