Annular Microelectromechanical Angular Velocity Sensor

Abstract

The present invention relates to a microelectromechanical angular velocity sensor (100) having a flexible ring structure (110) suitable for forming a circle in an idle state and generating an excitation vibration substantially parallel to the plane of the circle above a substrate, wherein the excitation vibration is superimposed on a detection vibration generated by a Coriolis force during rotation of the ring structure (110). The microelectromechanical angular velocity sensor also has at least one coupling structure (120) connected to the ring structure (110) and designed to be suitable for compensating for an orthogonal error of the angular velocity sensor (100) together with an electrode (130) fixed to the substrate.

Description

Detailed Description of the Invention

[0001] The present invention relates to an annular microelectromechanical angular velocity sensor.

[0002] The annular microelectromechanical angular velocity sensor operates according to the principle of a self - contained structure. The annular microelectromechanical angular velocity sensor is usually designed as a circle or a ring and is made to vibrate above the substrate parallel to the substrate plane. When the ring is rotated about a rotation axis perpendicular to the substrate surface, the vibration motion of the ring generates a Coriolis force on each mass point of the ring. Its amplitude depends on the rotational angular velocity. Since the vibration direction of this detected vibration is determined by the position of the ring and the excitation vibration in principle, and the parameters of the excitation vibration are also known, the detected vibration can be read out to determine the angular velocity.

[0003] In practice, in order to excite and read the vibration, plate electrodes arranged along the circumference of the ring are often used. However, this takes up a lot of space and does not meet all the requirements of the angular velocity sensor. Such plate electrodes can also be used to compensate for so - called cross - axis errors. Cross - axis errors often affect microelectromechanical sensors due to inevitable manufacturing tolerances.

[0004] However, the problem here is that the electrode plate arranged outside along the circumference of the ring has a limited electrode area. The use of an external electrode plate is disadvantageous because a larger signal can be input or read out through a larger electrode area. Also, it is not always possible to optimally design the excitation electrode and the read - out electrode with an external electrode plate.

[0005] Therefore, an object of the present invention is to identify an annular microelectromechanical angular velocity sensor that has a large electrode area, has a compact design, and enables compensation of cross - axis errors without restricting the possibility of exciting the ring of the angular velocity sensor or reading out the vibration.

[0006] This object is achieved by the subject matter of the claims.

[0007] The microelectromechanical angular velocity sensor has a flexible ring structure which forms a circle in the stationary state and is suitable for generating an excitation vibration substantially parallel to the plane of the circle above the substrate, and the excitation vibration is superimposed on a detection vibration generated by the Coriolis force during rotation of the ring structure. Furthermore, the angular velocity sensor has at least one coupling structure which is connected to the ring structure and is designed to be suitable for compensating the orthogonal error of the angular velocity sensor together with an electrode fixed to the substrate.

[0008] Therefore, there is no longer an attempt to compensate the orthogonal error via a plate electrode or the like acting directly on the ring structure of the angular velocity sensor. Instead, the coupling structure is connected to the ring structure and a compensation force can be applied thereto. The coupling structure can transmit these compensation forces to the ring structure and compensate the orthogonal error. The specific design of the coupling structure is arbitrary, as long as the movement of the coupling structure caused by the compensation force can be transmitted to the ring structure to such an extent that it can bring a controllable and measurable influence on the movement of the ring structure depending on the strength of the compensation force. In microelectromechanical devices, since the vibration amplitude is usually small, it is sufficient to perform the compensation with a first approximation.

[0009] Furthermore, by using the coupling structure, the arrangement and design of the electrodes become free, and a larger electrode area can be provided as a whole, enabling an advantageous design of electrodes having different functions such as excitation electrodes and readout electrodes.

[0010] In particular, when the spring stiffnesses of various components of the angular velocity sensor are appropriately designed, it becomes possible to realize that the amplitude of the vibration generated by the ring structure becomes larger than the amplitude of the vibration of the coupling structure by using the coupling structure. This can also be utilized for an advantageous design of the electrodes, for example, reducing the gap distance or operating in a linear region.

[0011] The angular velocity sensor can further include a first spring element that connects the ring structure to the substrate, and at least one coupling structure and the first spring element act on the same side of the ring structure. Accordingly, the ring structure is connected to the substrate via the spring element. In this way, it is ensured that the ring structure can vibrate as freely as possible. All spring elements act from one side of the ring structure, i.e., the inner or outer side, to ensure a force- and torque-free connection to the substrate. And one or more coupling structures act on the same side as the spring element. Optionally, the coupling structure is also connected via the first spring element. In this way, since the important components of the angular velocity sensor are arranged together, a relatively compact design of the angular velocity sensor can be achieved. In particular, when the components are arranged inside the ring structure, the size of the angular velocity sensor is determined by the size of the ring structure.

[0012] The angular velocity sensor can have a plurality of coupling structures evenly arranged along the circumferential direction of the ring structure. Thereby, the response behavior is improved and the possibility of compensating for the cross-axis error is enhanced. Further, the coupling structures can be designed identically in terms of structure due to the uniform distribution without causing a non-uniform force distribution on the ring structure. This simplifies the manufacture of the angular velocity sensor.

[0013] The electrodes for compensating the cross-axis error can electrically interact with a portion of the coupling structure that extends substantially in the radial direction of the ring structure. Thereby, it becomes possible to effectively rotate the coupling structure about an axis perpendicular to the substrate plane, i.e., in the circumferential direction of the ring structure. This rotation is transmitted to the ring structure by the corresponding design of the coupling structure, leading to a force for compensating the cross-axis error.

[0014] The coupling structure can be designed as a frame that is connected to the ring structure on the first side and to the substrate on the second opposite side. And at least a part of the electrodes fixed to the substrate is formed within the frame. As a result, all or part of the electrodes used to control the angular velocity sensor can be arranged within the coupling structure, enabling a compact design and eliminating the need for additional space.

[0015] The electrodes for correcting the cross-axis error can electrically interact with a third side of the frame that extends substantially in the radial direction of the ring structure. Therefore, the above-described interaction for compensating the cross-axis error is performed via the appropriately arranged side of the frame.

[0016] The first and second sides of the frame may be longer than the third side of the frame. In the radial direction, the frame is relatively short, and in the tangential direction, it is relatively long. The connection point between the frame and the ring structure is located on the corresponding first side, and thus has a relatively large distance with respect to the dimensions of the frame from the point where the electrodes for compensating the cross-axis error are arranged. Therefore, there is a long lever arm between the point where the force for compensating the cross-axis error is generated and the point where it is transmitted to the ring structure. As a result, relatively small excitation by the electrodes is sufficient to compensate for the cross-axis error. Since the magnitude of the charge or voltage on the electrodes can lead to other problems such as crosstalk, this can be omitted, simplifying the compensation. Furthermore, energy consumption is also reduced.

[0017] The coupling structure, together with the electrodes fixed to the substrate, can be designed to be suitable for generating the excitation vibration and / or measuring the detection vibration. This means that not only the compensation of the cross-axis error but also the excitation and reading of the vibration of the ring structure can be performed via the coupling structure. This makes it possible to improve the operation of the angular velocity sensor. Driving, reading, and / or error compensation can be mediated by the same or different coupling structures. The above-described advantages regarding the electrode area and / or electrode design benefit all the electrodes.

[0018] Furthermore, the angular velocity sensor can include a second spring element that couples the coupling structure to the ring structure, and the second spring element can deform in the radial direction of the ring structure such that a radial deflection of the coupling structure leads to a larger radial deflection of the ring structure. Accordingly, the second spring element mounted between the coupling structure and the ring structure serves to amplify the amplitude. A relatively small deflection of the coupling structure with a large acceleration (comparable to a force impact) in a short time is absorbed by the second spring element. The second spring element is designed such that a low-amplitude force impact leads to a radial deformation, resulting in a larger (slower) deflection in the ring structure than in the case of the coupling structure. Thus, there is an advantage that a large amplitude can be given to the ring structure without securing a space for giving a similarly large amplitude to the coupling structure. As a result, the required space can be further reduced. Furthermore, due to such amplitude amplification, the coupling structure can be excited or read out with a relatively small deflection. This means that the corresponding electrodes can be designed with a small gap width and operated in the linear region. At the same time, the vibration amplitude of the ring structure remains large, which is advantageous for accurate angular velocity determination.

[0019] The angular velocity sensor can include a third spring element that couples the coupling structure to the substrate. Thereby, the mobility of the coupling structure can be improved. Thereby, the coupling structure can also be moved as a whole, and the movement may not be only due to the deformation of the coupling structure, so that the force transmission between the coupling structure and the ring structure becomes more flexible.

[0020] At least two of the coupling structures can be coupled to each other such that their movements are coupled to each other. In particular, the coupling structures can be forced to move in a common mode or a push-pull mode via the coupling. Thereby, the vibration stability of the angular velocity sensor can be improved, and the readout accuracy can be improved.

[0021] Hereinafter, the present invention will be exemplarily described with reference to the drawings. The following description should not be understood as restrictive. The present invention is defined only by the subject matter of the claims.

[0022] Figure 1 is a schematic diagram of an annular microelectromechanical angular velocity sensor.

[0023] Figure 2 is another schematic diagram of an annular microelectromechanical angular velocity sensor.

[0024] Figure 3 is another schematic diagram of an annular microelectromechanical angular velocity sensor.

[0025] Figure 4 is a schematic diagram of electrodes for compensating the cross-axis error of an annular angular velocity sensor.

[0026] Figure 5 is a schematic diagram of plate-shaped electrodes for exciting and / or reading out the vibration of an annular angular velocity sensor.

[0027] Figure 6 is a schematic diagram of comb-shaped electrodes for exciting and / or reading out the vibration of an annular angular velocity sensor.

[0028] Figure 7 is a schematic diagram of various electrodes for operating an annular angular velocity sensor.

[0029] Figure 1 is a schematic diagram of an annular microelectromechanical angular velocity sensor 100. This angular velocity sensor has a flexible ring structure 110 that forms a circle in a stationary state and is suitable for generating excitation vibrations substantially parallel to the plane of the circle above the substrate. The excitation vibrations are superimposed on the detection vibrations generated by the Coriolis force during the rotation of the ring structure 110.

[0030] The ring structure 110 can be, for example, a self-contained flexure beam spring disposed above a substrate (not shown) lying parallel to the image plane. That is, the ring structure 110 consists substantially of a rod whose height (perpendicular to the image plane) is significantly higher than its width (in the image plane). As a result, the ring structure can deform parallel to the substrate but is rigid and inflexible with respect to deformation perpendicular to the substrate.

[0031] To measure the angular velocity, the ring structure 110 is set to a fundamental vibration or an excitation vibration, and for example, an elliptical deformation occurs along a certain direction. When the angular velocity sensor 100 rotates about an axis perpendicular to the substrate, a Coriolis force is generated at the mass points of the ring structure 110 due to the movement resulting from the excitation vibration, and a change occurs in the vibration of the ring structure 110. This change can be regarded as, for example, the superposition of another vibration with respect to the excitation vibration, but the vibration direction of this detected vibration is different from the vibration direction of the excitation vibration. In other words, the Coriolis force excites a vibration mode different from the vibration mode of the excitation vibration. This change in the vibration generated by the ring structure 110 can be measured to determine the angular velocity of rotation.

[0032] Although the ring structure 110 is shown as a circle at rest, this is not intended to exclude any shape that is similarly suitable for detecting the Coriolis force / angular velocity. For example, the ring structure 110 can deviate from the circular shape at rest and be formed as, for example, a deformed circle, a polygon with or without rounded edges, etc. All these deformations are understood to fall within the term "circle".

[0033] Furthermore, the angular velocity sensor 100 has at least one coupling structure 120 that is connected to the ring structure 110 and is designed to be suitable for compensating the orthogonal error of the angular velocity sensor 100 together with the electrode 130 fixed to the substrate. Such an orthogonal error almost inevitably exists due to manufacturing tolerances that occur during the manufacture of microelectromechanical components. In particular, since the etching process is used during manufacture, the dimensions of parts with the same design may vary slightly. For example, the thickness of the ring structure 110 may vary along the circumferential direction. This results in an undesirable situation where the spring stiffness is different and the response behavior to the influence of force is different. In order to operate the angular velocity sensor 100 as if there is no deviation from such ideal behavior, it is necessary to compensate for the deviation by applying an additional force.

[0034] This is usually attempted with the plate electrode 135. The plate electrode 135 is disposed outside or inside the ring structure 110 and electrically interacts with the ring structure 110. However, the problem here is that due to the flat design of the plate electrode 135, it cannot generate sufficiently in a way that aims at the compensating force. Furthermore, a force in any direction cannot be applied to the ring structure 110 via the plate electrode 135, and the available area of the plate electrode 135 is limited by the circumference of the ring structure 110.

[0035] To avoid such problems, the angular velocity sensor 100 has at least one, preferably more than one coupling structure 120. The coupling structure 120 receives a force via the electrode 130 connected to the substrate. The coupling structure 120 is designed to accurately transmit these compensating forces to the ring structure 110. The specific design of the coupling structure 120 and the electrode 130 is arbitrary as long as this function can be achieved.

[0036] In particular, the coupling structure 120 must be able to apply a tangential force to the ring structure 110. This tangential force is symbolized by the double arrow A in FIG. 1. This is achieved, for example, by enabling the coupling structure 120 to rotate about an axis perpendicular to the substrate, whereby a tensile force acts tangentially at the connection point between the coupling device 120 and the ring structure 110.

[0037] As depicted in FIG. 1, the coupling structure 120 is preferably connected to the ring structure 110 exactly at one point for this purpose. Thereby, the application point of the compensating force can be accurately determined. However, the coupling structure 120 can also be connected to the ring structure 110 at several points, thereby, for example, achieving dimensional stability in the connection area.

[0038] As depicted in FIG. 1, the electrode 130 can be arranged at different parts of the coupling structure 120 to compensate for the orthogonal error. Thereby, the available effective area in the electrode region increases. Also, it is possible to deviate from the plate structure and realize a design of the electrode 130 that exactly conforms to the function of the electrode 130. This is applicable not only to the electrode 130 for compensating the orthogonal error, but also to all electrodes acting on the coupling structure 120. This will be further described in detail below.

[0039] In this process, the electrode for compensating the orthogonal error can preferably be arranged at the part of the coupling structure 120 that extends substantially in the radial direction of the ring structure 110. A part that runs substantially in the radial direction is here to be understood as a part where the radial vector is larger than the tangential vector, like the outer side surface of the coupling structure 120 depicted in FIG. 1. Then, the electrode 130 can be designed in a simple way, for example, as a plate electrode that generates a force perpendicular to it, i.e., a force that runs substantially in the tangential direction and is suitable for displacing or twisting the coupling structure 120 in the tangential direction, on the part of the coupling structure 120 that runs substantially in the radial direction.

[0040] By using an appropriate shape and an appropriate electrode 130, in addition to the tangential force, a radial force can also be applied to the ring structure 110 via the coupling structure 120. In contrast to the conventionally used plate electrode 135, the coupling structure 120 can thus generate compensation forces in all directions and apply them accurately to the ring structure 110. Thereby, the orthogonal error is effectively reduced, especially when a plurality of coupling structures 120 are used. By dividing the electrode area, the electrode area can also be increased in this way.

[0041] As depicted in FIG. 2, the angular velocity sensor 100 can include a first spring element 140, and the first spring element 140 connects the ring structure 110 to the substrate via an anchor structure 142. The first spring element 140 serves to hold the ring structure 110 above the substrate while enabling the vibrations necessary for the operation of the angular velocity sensor 100. The design of the first spring element 140 is at the discretion of those skilled in the art. This is symbolized by using a zigzag line as the general pictogram of the "spring" in FIG. 2. The decisive factor in this context is not the shape of the first spring element 140, but rather that all of the at least one coupling structure 120 and the first spring element 140 act on the same side of the ring structure 110. In FIG. 2, this is the inside of the ring structure 110. However, the first spring element 140 and the at least one coupling structure 120 can also be arranged outside the ring structure 110.

[0042] By connecting the first spring element 140 and the coupling structure(s) 120 to the same side of the ring structure 110, a compact design of the angular velocity sensor 100 can be achieved. In particular, the side of the ring structure 110 without the spring element 140 and the coupling structure(s) 120 is free for the arrangement of various other components of the angular velocity sensor 100.

[0043] FIG. 3 is another schematic view of an exemplary embodiment of the angular velocity sensor 100. In addition to the components described above, the angular velocity sensor 100 has a plurality of coupling structures 120 evenly distributed along the circumferential direction of the ring structure 110. Further, in the example of FIG. 3, a second spring element 150 connecting the coupling structure 120 to the ring structure 110 and a third spring element 160 connecting the coupling structure 120 to the substrate are depicted. The anchor structures connecting the first and third spring elements 140, 160 to the substrate are not depicted for clarity. The second and third spring elements 150, 160 are each optional.

[0044] By using a plurality of coupling structures 120 distributed along the circumference of the ring structure 110, sufficient compensation force can be applied to the ring structure 110 at each point to compensate for orthogonal errors. Any uniform distribution has the additional advantage that since a uniform distribution is theoretically easier to handle, the results of the influence of the force on the ring structure can be more easily estimated or predicted. Furthermore, the uniformly designed coupling structure 120 thus guarantees the desired rotational symmetry of the angular velocity sensor 100. The coupling structure 120 with a uniform shape is easier to manufacture than the coupling structure 120 with different shapes (for example, in an etching process, a structure with uniform dimensions is easier to manufacture), so the uniform distribution of the coupling structure 120 also simplifies the manufacturing process of the angular velocity sensor 100.

[0045] As depicted in FIG. 3, the coupling structure 120 can be designed as a frame that is connected to the ring structure 110 on the first side surface 122 and to the substrate on the second opposite side surface 124. Thereby, at least a portion of the electrode 130 that is fixed to the substrate and can interact with the coupling structure 120 is formed within the frame. In this way, a structure for exciting / detecting the movement of the coupling structure 120 can be arranged in a compact and space-saving manner within the angular velocity sensor 100. Furthermore, by using the frame, the area that can interact with the electrode is increased compared to the area of the circumferential portion of the ring structure 110 that interacts with the simple plate electrode 135.

[0046] As further illustrated in FIG. 3, the first side 122 and the second side 124 of the frame may be longer than the third side 126 of the frame that extends substantially in the radial direction of the ring structure 110. Thus, the frame has an elongated rectangular or trapezoidal shape and is connected to the ring structure 110 or the substrate by the longitudinal sides. On the one hand, this is a space-saving design of the coupling structure 120.

[0047] On the one hand, due to this shape of the coupling structure 120, the electrode 132 can be arranged to interact electrically with the third side surface 126 in order to compensate for the orthogonal error. This is illustrated in FIG. 4, which shows an enlarged view of the region indicated by B in FIG. 3. Since the relatively long first side surface 122 and the second side surface 124 provide a large lever arm between the force application point by the electrode 132 and the connection between the coupling device 120 and the ring structure 110, the compensation of the orthogonal error can be effectively achieved by this structure. Therefore, the relatively small force transmission at the third side surface 126 leads to an increase in the force on the ring structure 110 by the lever arm and can be used to compensate for the orthogonal error. The ratio of the length of the first side surface 122 to the third side surface 126 can be between 3:1 and 10:1, for example 5:1.

[0048] In addition to or instead of the electrode 132 for compensating the orthogonal error, an electrode 134 fixed to the substrate can also be formed within or on the frame constituting the coupling structure 120, and the excitation vibration of the ring structure 110 is generated through this electrode, or the detected vibration is measured through this electrode. Examples of such electrode structures are depicted in FIGS. 5 to 7 with reference to region B in FIG. 3. In all these figures, it is clear that both the electrode area and the design options of the individual electrodes are significantly improved compared to the use of external plate electrodes.

[0049] FIG. 5 depicts an electrode 134 configured as a plate for driving / readout of the vibration of the ring structure 110, which is alternately arranged with an electrode plate 128 connected to the frame. The electrode 134 and the electrode 128 form a plate capacitor, through which a force can be applied radially to the frame or such a force can be detected. The structure depicted in FIG. 5 can be used for a plurality of coupling devices 120. In an individual coupling device 120, it can be used only for driving, and in other coupling devices 120, it can be used only for detection. However, the same structure can also be used for time multiplexing for both tasks.

[0050] In FIG. 6, the electrode 134 for driving / reading the vibration of the ring structure is designed as a comb-shaped electrode that engages with the comb-shaped electrode 128 connected to the frame. With such a design, the radial movement can also be excited / detected.

[0051] FIG. 7 shows combinations of various electrode shapes depicted in FIGS. 4 to 6. In addition to the electrodes 134 designed as plates and combs for driving / reading operations and their opposing electrodes 128 connected to the frame, there are also electrodes 132 for compensating for orthogonal errors, which can interact with the frame and the connection part between the frame and the ring structure 110.

[0052] FIGS. 4 to 7 show that the frame structure can achieve a considerable space saving in addition to complete functionality. Considering in relation to FIG. 3 and the arrangement of the first spring element 140 depicted therein, as a result, the angular velocity sensor 100 has an extremely compact structure.

[0053] As described above, particularly the radial force can be applied to the ring structure 110 via the coupling structure 120. The amplitude of the deformation of the ring structure 110 caused by these forces can be increased by the appropriately designed second spring element 150. For this purpose, the second spring element 150 needs to have a low spring constant with respect to radial deflection. A spring that is soft in the radial direction causes a large deformation of the spring in the case of an impact of a force with a small amplitude, and this deformation is transmitted to the ring structure 110. Thus, by appropriately selecting the connection between the coupling structure 120 and the ring structure 110, amplitude amplification can be achieved, which is advantageous for applying a driving force or a compensating force to the ring structure 110.

[0054] As depicted in FIG. 3, the second spring element 150 can be designed, for example, as a double-folded spring. Further, these can interact with the first spring element 140. However, the second spring element 150 can also be directly connected to the ring structure 110. Instead of the depicted double-folded spring, other spring designs that are sufficiently flexible radially can also be used to achieve the aforementioned purpose of amplitude amplification.

[0055] The third spring element 160, also depicted in FIG. 3, serves to enhance the mobility of the coupling structure 120. Thereby, the transmission of force from the coupling structure 120 to the ring structure 110 is simplified. The third spring element 160 can be designed according to technical requirements.

[0056] As shown by line 170 in FIG. 3, at least two of the coupling structures 120 are coupled to each other such that their movements are interlocked. The movement of one coupling structure 120 affects the movement of the other coupling structure 120, and vice versa. In particular, it can be advantageous for adjacent coupling structures 120 to move in a common mode or a push-pull mode in order to cause and / or stabilize the desired vibration mode of the ring structure 110. The coupling of the coupling structures 120 to each other can take any form that enables this purpose to be achieved.

[0057] As is clear from the above description, the angular velocity sensor 100 is characterized by the coupling structure 120. This coupling structure 120, together with the electrodes 130 fixed to the substrate, is designed to be suitable for compensating the orthogonal error of the angular velocity sensor 100. In this way, a particularly reliable annular angular velocity sensor 100 can be provided.

Brief Description of the Drawings

[0058]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Claims

**Claim 1** A flexible ring structure (110) suitable for forming a circle in a stationary state and generating an excitation vibration substantially parallel to the plane of the circle above a substrate, wherein the excitation vibration superimposes with a detection vibration generated by a Coriolis force during rotation of the ring structure (110), the flexible ring structure (110), and At least one coupling structure (120) connected to the ring structure (110) and designed to be suitable for compensating for an orthogonal error of an angular velocity sensor (100) together with an electrode (130) fixed to the substrate, and A microelectromechanical angular velocity sensor (100) comprising the same. **Claim 2** The angular velocity sensor (100) further comprises a first spring element (140) connecting the ring structure (110) to the substrate, and The at least one coupling structure (120) and the first spring element (140) act on the same side of the ring structure (110), the angular velocity sensor (100) according to claim 1. **Claim 3** The angular velocity sensor (100) has a plurality of coupling structures (120) evenly arranged along the circumferential direction of the ring structure (110), the angular velocity sensor (100) according to claim 1 or 2. **Claim 4** An electrode (132) for compensating for an orthogonal error electrically interacts with a portion of the coupling structure (120) that extends substantially in the radial direction of the ring structure (110), the angular velocity sensor (100) according to any one of claims 1 to 3. **Claim 5** The coupling structure (120) is designed as a frame connected to the ring structure (110) by a first side (122) and connected to the substrate by a second opposite side (124), and At least a portion of the electrode (130) fixed to the substrate is formed within the frame, the angular velocity sensor (100) according to any one of claims 1 to 4. **Claim 6** The electrode (132) for compensating for an orthogonal error electrically interacts with a third side (126) of the frame that extends substantially in the radial direction of the ring structure (110), the angular velocity sensor (100) according to claim 5. **Claim 7** The first and second sides (122, 124) of the frame are longer than the third side (126) of the frame, the angular velocity sensor (100) according to claim 6. **Claim 8** The angular velocity sensor (100) according to any one of claims 1 to 7, wherein the coupling structure (120) is designed to be suitable for generating the excitation vibration and / or measuring the detection vibration together with the electrode (134) fixed to the substrate.

9. The angular velocity sensor (100) according to any one of claims 1 to 8, further comprising a second spring element (150) that connects the coupling structure (120) to the ring structure (110), wherein the second spring element (150) is deformable in the radial direction of the ring structure (110) such that the radial deflection of the coupling structure (120) increases the radial deflection of the ring structure (110).

10. The angular velocity sensor (100) according to any one of claims 1 to 9, further comprising a third spring element (160) that connects the coupling structure (120) to the substrate.

11. The angular velocity sensor (100) according to any one of claims 1 to 10, wherein at least two of the coupling structures (120) are coupled to each other such that their movements are coupled to each other.

Images