Devices for use with electrical components, systems including devices for use with electrical components, methods of operating electrical components

Abstract

The present invention relates to a device for use with an electrical component, the device being configured to at least partially surround at least a component portion of the electrical component around an axis, thereby defining a region therebetween. The device includes two members, at least one of the members including at least one varying characteristic that varies along the axis.

Description

Technical Field

[0001] The present invention generally relates to techniques for use with electrical components. In particular, the present invention relates to devices, systems, and methods for reducing the effects of unwanted capacitance between an electrical component and its operating environment.

Background Art

[0002] Parasitic capacitance or stray capacitance can cause an inevitable and usually unwanted capacitance that exists between parts of an electronic component or circuit simply because they are in close proximity to each other. When two conductors at different voltages are in close proximity to each other, the electric field between them causes charge to accumulate on them, and this effect constitutes capacitance.

[0003] At low frequencies, parasitic capacitance can usually be ignored, but in high-frequency circuits, parasitic capacitance can be a significant problem and is often a factor that limits the operating frequency and bandwidth of electronic components and circuits. In cables with narrow spacing, parasitic capacitance coupling can cause crosstalk, which means that signals from one circuit bleed into another circuit, causing interference and unreliable operation.

[0004] U.S. Patent No. 8,373,998 discloses a resistor shield for minimizing crosstalk and power interference. The shield includes a plurality of printed circuit board (PCB) shields disposed between each of the input resistors on the main printed circuit board within a power meter. Each PCB shield has a conductive layer that provides shielding against unwanted energy. The inventors of U.S. Patent No. 8,373,998 also recognized that a resistor sandwiched between two grounded PCB shields can appear and behave like a capacitor. However, to solve this problem, they teach placing the resistor diagonally or parallel between each pair of PCB shields to prevent the resistor from moving. Since capacitance depends on the distance between two conductive materials, by fixing the distance between the resistor and the PCB pair, a constant parasitic capacitance is generated and can be compensated for.

[0005] U.S. Patent No. 7,498,696 discloses a method for grading voltage and shielding high-voltage components in a printed circuit board (PCB). In particular, U.S. Patent No. 7,498,696 teaches constructing a plurality of second tracks, each track being composed of a metal or alloy and provided at different locations along the length of the high-voltage component. Further, each of the second tracks is coupled to a respective voltage source. This configuration forces the potential at a particular location along the length of the high-voltage component to be substantially equal to the potential of the second track corresponding to that particular location, thereby generating a substantially linear voltage distribution (grading) along the length of the high-voltage component.

[0006] Shielded resistors having two cylindrical shields provided on both sides of the resistor are also known. Such shields are intended to remove the radial electric field. However, they are either too bulky or do not provide good matching between the potential around the resistor and the potential on the resistor.

[0007] Grading rings surrounding an insulator that covers a conductor are also known. These grading rings cause the electric field to follow the voltage potential along the conductor, thereby avoiding breakdown of the insulator. The grading rings are typically connected to a capacitive divider. Overall, such solutions are bulky, introduce a high capacitive load into the system, which is disadvantageous for systems with high bandwidth.

[0008] Known solutions in the prior art for dealing with parasitic capacitance can be satisfactory in some instances, but they can have some drawbacks and limitations. They can be bulky, do not provide good matching between the potential around the resistor and the potential on the resistor, and there is a possibility of introducing a high capacitive load into the system, which is disadvantageous for systems with high bandwidth. SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION

[0009] An object of the present invention is to overcome or at least mitigate the drawbacks and disadvantages of the prior art. MEANS FOR SOLVING THE PROBLEM

[0010] According to a first aspect, the present invention relates to a device for use with an electrical component.

[0011] The device is configured to at least partially surround at least a component portion of the electrical component around an axis, thereby defining a region therebetween. In this way, the electrical component (or a part thereof) is provided within the enclosure generated by the device, and thus can be at least partially separated from the environment outside the enclosure. This can be advantageous as it can enable the device to electromagnetically shield the electrical component. Accordingly, electromagnetic interference between the electrical component and the environment in which the electrical component is located can be reduced and / or blocked. In other words, the device can serve as an electromagnetic shield for the electrical component.

[0012] Furthermore, the device can be arranged to surround and be adjacent to the above-mentioned region between the electrical component and the device. The electric field within the region can be (primarily) affected by the electrical component itself and the device. On the other hand, in the absence of the device, the electric field around and in the vicinity of the electrical component can be affected by the electrical component and other conductors that may be present in the environment in which the electrical component is located. Thus, the device of the present invention can make the electric field within the region and any effects it may have on the electrical component more predictable, and thus easier to compensate for, compared to scenarios where the device is not used, and can therefore be advantageous.

[0013] The device includes two members. At least one of the members includes at least one varying characteristic that varies along an axis. The at least one varying characteristic can vary along the axis so as to be able to reduce the effects caused by the capacitance between the electrical component and the environment in which the electrical component is arranged. As will be further described below, the at least one varying characteristic can be the amount of the member or the distance of the member from the axis. Configuring the members such that at least one of the members includes at least one varying characteristic enables the device to affect the electric field within the region (i.e., the electric field around the electrical component) such that the effects caused by the capacitance between the electrical component and the environment in which the electrical component is arranged can be reduced.

[0014] Thus, the device can be advantageous in that, even if it can generate a parasitic capacitor with the electrical component, it can reduce and / or preferably eliminate the charging and / or discharging of the capacitor. Thus, when attempting to change the potential of the electrical component, it is possible to reduce and / or preferably eliminate the time delay that may be caused by the presence of the parasitic capacitor. Again, this can be achieved by configuring the device such that at least one of its members can include at least one varying characteristic (e.g., an amount or distance parameter) that can vary along an axis.

[0015] Throughout this specification, the terms potential and voltage can be used interchangeably.

[0016] It will be understood that the axis, which can also be referred to interchangeably with the axis of change and / or the longitudinal axis, is used herein simply to refer to a direction along which at least one characteristic of change can vary.

[0017] The axis may be a straight line indicating a straight direction.

[0018] The axis can be the central axis of the device.

[0019] The axis can be the central axis of the electrical component.

[0020] The axis can be parallel to the direction of the flow of current through the electrical component. That is, the axis can be parallel to the direction along which the potential in or on the electrical component can vary. For example, the electrical component may be a circuit element such as a resistor. In this example, the current can generally flow from one end (or terminal) of the resistor to the other end. The potential may also decrease from one end of the resistor to the other end. Thus, the axis along which at least one characteristic of change can vary can be directed from one end (or terminal) of the electrical component to the other end (or terminal).

[0021] The axis may be parallel to the gradient of the potential along the electrical component. In this way, at least one characteristic of change can vary along the same direction in which the voltage in or on the electrical component can vary. Thus, the device can affect the electric field in the region between the electrical component and the device so as to be consistent with the gradient of the potential change along the electrical component.

[0022] The axis can be the longitudinal axis of the electrical component. That is, the electrical component can extend along the axis.

[0023] In some embodiments, the electrical component can extend substantially longitudinally along an axis. That is, the electrical component can include a substantially longitudinal shape in the direction of the axis, that is, it can include one dimension that can be made larger than other dimensions, and the larger dimension is measured along the axis.

[0024] The electrical component can include two component ends that face each other and can be at different positions along the axis. The two component ends can refer to the ends of the electrical component in the direction of the axis. Alternatively or additionally, the two component ends can refer to the electrical terminals of the electrical component. The electrical terminals can be configured to facilitate generating an electrical connection thereon. For example, one of the electrical terminals can be an input electrical port and the other can be an output electrical port.

[0025] The device can include a first device end and a second device end that face each other and are at different positions along the axis. The first device end and the second device end are collectively referred to as the device ends. The first device end and the second device end can be the ends of the device in the direction of the axis.

[0026] The first member of the members can extend along the axis from the first device end, past the center of the device, and towards the second device end. Similarly, the second member of the members can extend along the axis from the second device end, past the center of the device, and towards the first device end. That is, the device can include two halves along the axis, and each of the halves can include both members.

[0027] The minimum distance between the members can be at least 0.5 mm, preferably at least 1 mm. In other words, the members can be spaced apart from each other by at least 0.5 mm, preferably at least 1 mm. Thereby, each member can be easily electrically insulated. Therefore, the members can include different electrical potentials.

[0028] In some embodiments, the minimum distance between the members can be 1 mm.

[0029] The minimum distance between the members can be at least 0.5 mm and at most 1.5 mm, preferably at least 0.8 mm and at most 1.2 mm, more preferably at least 0.9 mm and at most 1.1 mm.

[0030] The members can be configured such that any radial line perpendicular to the axis can pass through at most one of the members.

[0031] In other words, the members may not overlap. This can be advantageous as the capacitance between the members can be reduced. That is, the members may be conductive. Thus, they can form a capacitor. By configuring the device such that the members do not overlap, the capacitance between the members can be reduced. As a result, the capacitive load introduced by the device can be reduced.

[0032] The members may be coaxial. For example, both members can include an axis as a central axis.

[0033] The members can be electrically insulated from each other. This can be advantageous as it allows the members to be maintained at different potentials without causing a short circuit between the members.

[0034] Furthermore, the members can be configured to be conductive. This can be advantageous as it allows the members to be connected to an electrical energy source and thus maintained at a predetermined potential. In this way, the members can each generate an electric field, thereby affecting the electric field within the region.

[0035] The member can be configured to be electrically connected to an electrical energy source. In this way, the potential of the member can be "forced" to a predetermined or desired value. This can be particularly advantageous for reducing or eliminating the charging and / or discharging of capacitors generated by electrical components and devices.

[0036] The device can include a hollow cylindrical shape. This can be particularly easy to manufacture since the device can be manufactured as a rectangular sheet and then wound to form a cylinder. Further, the above shape can generate an enclosure that can accommodate electrical components of different sizes.

[0037] The device can include a device through-hole. In this way, the electrical components and the device can be easily arranged so that the device can at least partially surround at least the component part of the device.

[0038] The device through-hole can extend along an axis.

[0039] The device through-hole can be configured to accommodate electrical components. In some embodiments, the device through-hole can be configured to accommodate electrical components of different sizes.

[0040] The device through-hole can include a region. In other words, the device through-hole can refer to an enclosure generated by a device that can accommodate electrical components.

[0041] The members can have the same shape. In this way, the members can have exactly opposite effects on the electric field within the region. Additionally or alternatively, it can facilitate the manufacture of the device.

[0042] The device can include a substrate layer configured to be non-conductive. This can reduce, for example, the possibility that the device generates a short circuit with an electrical component or other conductors that may be in the vicinity.

[0043] The substrate layer can be made of a non-conductive material. The substrate layer can include a polyimide material. For example, the substrate layer can be a polyimide film.

[0044] The substrate layer can be continuous. Also in this case, this can provide better electrical insulation and / or better support for other layers of the device.

[0045] The substrate layer can form at least a part of the outer surface of the device.

[0046] The device can include a conductive layer configured to be conductive. The conductive layer can be particularly advantageous for forming members of the device.

[0047] The conductive layer can include at least one conductive material.

[0048] At least one of the conductive materials can be a metal such as copper, gold, aluminum, iron, or silver.

[0049] Preferably, the conductive layer can include copper.

[0050] The conductive layer can include two conductive layer portions electrically insulated from each other. Each member can include one of each of the two conductive layer portions.

[0051] In some embodiments, the conductive layer can include two separate sets of conductive layer portions. Each of the two sets can include a plurality of conductive layer portions. All of the conductive layer portions of the conductive layer can be spaced apart from each other. The layer portions within a set can be configured to be electrically connected to each other, and the layer portions of different sets can be electrically insulated from each other. Each member can include one of each of the two conductive layer portions. Such embodiments can be particularly advantageous because they can enable the construction or generation of the members of the device by simply connecting the conductive layer portions to each other, thereby forming two separate sets. This allows, for example, the members to be reconfigured multiple times depending on the application and / or the electrical components. For example, the size of the member can be configured by simply connecting or disconnecting the conductive layer portions from each other.

[0052] The conductive layer can be provided on a substrate layer. In this way, the substrate layer can support the conductive layer and can at least partially electrically insulate it.

[0053] The conductive layer and the substrate layer can be adhered to each other. However, this is merely an example, and other attachment means are possible.

[0054] The device can include a cover layer that at least covers the conductive layer such that the conductive layer can be between the substrate layer and the cover layer. The cover layer can support and / or electrically insulate the conductive layer.

[0055] The conductive layer and the cover layer can be adhered to each other. However, this is merely an example, and other attachment means are possible.

[0056] The cover layer can be configured to be non-conductive.

[0057] The cover layer can be made of a non-conductive material.

[0058] The cover layer can include a polyimide material. For example, the cover layer can be a polyimide film.

[0059] The cover layer can form at least a part of the outer surface of the device.

[0060] The outer surface of the device can be formed by the cover layer and the substrate layer.

[0061] In some embodiments, a conductive layer can be embedded on the substrate layer. For example, the substrate layer can be wound around the conductive layer.

[0062] Thus, the substrate layer can form the entire outer surface of the device.

[0063] In some embodiments, one of the members can include at least one tooth that can extend parallel to the axis. Alternatively or additionally, both members can include at least one respective tooth that extends parallel to the axis. Alternatively or additionally, at least one of the members can include a plurality of teeth that extend parallel to the axis. Alternatively or additionally, both members can each include a plurality of teeth that extend parallel to the axis.

[0064] That is, the teeth protrude in a direction parallel to the axis. In other words, the teeth can be perpendicular to a plane, and the plane is perpendicular to the axis. In other words, the teeth can protrude from a plane perpendicular to the axis.

[0065] The teeth can be advantageous because they can facilitate configuring at least one of the members to include varying characteristics. In particular, the plurality of teeth or a single tooth of at least one of the members can be shaped and / or spaced apart from the axis, thereby configuring each member with varying characteristics.

[0066] Each tooth can extend along the axis from the first half of the device to the second half of the device, and the first and second halves of the device are separated by a plane perpendicular to the axis. This can enable each tooth, and thus each respective member, to be present within each half of the device.

[0067] In some embodiments, each tooth can extend from a first device end, past the center of the device, and towards a second device end. However, it will be understood that each tooth does not necessarily have to "start" exactly at one of the device ends.

[0068] For example, each tooth can include a maximum length along the axis that can be at least 25% of the maximum length along the axis of the device. For example, if the dimension of the device measured parallel to the axis is 1 unit, the dimension of each tooth measured parallel to the axis can be at least one - quarter unit.

[0069] Each tooth can include a maximum length along the axis that can be up to 90% of the maximum length along the axis of the device.

[0070] Each tooth can include a maximum length along the axis that can be at least 25% and up to 90% of the maximum length along the axis of the device.

[0071] Each tooth can include a maximum length along the axis that can be at least 35% and up to 85% of the maximum length along the axis of the device.

[0072] Each tooth can include a maximum length along the axis that can be at least 50% of the maximum length along the axial direction of the device.

[0073] Generally, it can be advantageous for each tooth to start at a position along the axis near one of the device ends and end at a position along the axis near the other device end.

[0074] In some embodiments, at least one of the members can include at least 3 teeth.

[0075] In some embodiments, at least one of the members can include up to 50 teeth.

[0076] In some embodiments, at least one of the members can include up to 25 teeth.

[0077] In some embodiments, at least one of the members can include at least 3 teeth and up to 15 teeth.

[0078] In some embodiments, at least one of the members can include at least 5 teeth and up to 10 teeth.

[0079] In some embodiments, at least one of the members can include 5 teeth.

[0080] In some embodiments, at least one of the members can include 10 teeth.

[0081] Generally, more teeth can be more effective in reducing the influence of the capacitance between the electrical component and the device. For example, a device in which each member includes 10 teeth can be more effective than a device in which each member includes 5 teeth or only 1 tooth. However, a device with fewer teeth can be easier to manufacture.

[0082] The teeth included in different members can be electrically insulated from each other. This can make it possible for the teeth (and the members themselves) from different members to have different potentials from each other. Thus, the teeth of different members can be configured to have opposite effects on the electrical component, and can themselves facilitate matching the potential of the electrical component (which can be referred to as the first potential) along the axis of the potential in the region (which can be referred to as the second potential).

[0083] The teeth included in the same member can be electrically connected to each other. Therefore, the teeth of the same member can be configured to have the same potential.

[0084] In some embodiments, the teeth can be identical to each other.

[0085] In some embodiments, the member can be configured such that each tooth can fit into each space between two adjacent teeth of the other member. In other words, every other tooth of the device can belong to the same member. Stated another way, the member can include meshing teeth. This can be advantageous as teeth from different members can be adjacent teeth, can be arranged close to each other, and thus can reduce the mutual influence on electrical components.

[0086] In some embodiments, each tooth can include a respective tooth width that extends in the azimuthal direction with respect to the axis. The tooth width can be the dimension of the tooth measured along the azimuthal direction or transverse direction defined by the axis. It will be understood that each tooth includes its respective tooth width at any position along the axis along which the tooth extends.

[0087] Each tooth can be configured such that its respective tooth width can taper along the axis. In other words, the presence or amount of each tooth can decrease along the axis. Accordingly, the influence that the above teeth can have on electrical components, for example, can also decrease similarly along the axis.

[0088] The tooth width of each tooth can taper to zero along the axis. For example, the tooth can include a tip.

[0089] In some embodiments, the respective tooth width of each tooth can taper linearly along the axis. That is, the tooth can include a straight edge.

[0090] For example, the tooth can include a shape similar to a trapezoid or a triangle.

[0091] The tooth widths of teeth included in the same member may taper according to the same direction along the axis. Alternatively or additionally, the tooth widths of teeth included in different members may taper in opposite directions along the axis.

[0092] In some embodiments, particularly in embodiments where the tooth width of each tooth tapers, each tooth can be configured such that any point thereof is equidistant from the axis. In other words, each tooth can be parallel to the axis.

[0093] Each tooth can include its respective tooth distance from the axis measured radially with respect to the axis. The tooth distance can be measured in a direction that can be perpendicular to the axis. The tooth distance can be the Euclidean distance of each tooth from the axis at a particular position along the axis.

[0094] Each tooth can be configured such that its respective tooth distance can vary along the axis. That is, each tooth can have various distances from the axis. Thus, each tooth can have various distances from the electrical component. Thus, each tooth can have a varying influence on the electrical component along the axis.

[0095] Each tooth can be configured such that its respective tooth distance can vary monotonically along the axis. That is, for each tooth, its respective tooth distance does not decrease or increase along the axis of variation.

[0096] In some embodiments, each tooth can be configured such that its respective tooth distance can vary strictly monotonically along the axis. That is, for each tooth, its respective tooth distance always decreases or always increases along the axis of variation.

[0097] In some embodiments, each tooth can be configured such that its respective tooth distance can vary linearly along the axis. That is, each tooth can be inclined with respect to the axis or tilted.

[0098] The tooth pitch of teeth included in the same member can increase along the same direction along the axis.

[0099] Alternatively or additionally, the tooth pitch of teeth included in different members can increase along the opposite direction along the axis. In other words, when moving along the axis, the teeth of one member approach the axis, and the teeth of the other member become farther from the axis.

[0100] In some embodiments, particularly in embodiments where the tooth pitch changes along the axis of change, each tooth can include a constant tooth width along the axis.

[0101] Each tooth can be inclined with respect to the axis according to an inclination angle. The inclination angles of the teeth of the same member with respect to the axis may be the same. Alternatively or additionally, the inclination angles of the teeth of different members with respect to the axis can include a difference of 180°.

[0102] In some embodiments, each tooth can be bent outward with respect to the axis. That is, the tooth pitch can change non-linearly along the axis.

[0103] In some embodiments, at least one of the members can include a plurality of rings. Alternatively or additionally, both members can each include a plurality of rings (153, 173). That is, in some embodiments, instead of including teeth, the members may include rings.

[0104] The rings may be parallel to each other. That is, the rings can include a cross-section on a parallel plane.

[0105] The rings may be coaxial. That is, all the rings can be arranged so as to surround a central axis, and the central axis can be, for example, an axis along which at least one change characteristic can change along it.

[0106] That is, in some embodiments, the central axis of each ring can be on the axis.

[0107] The ring can include a hollow cylindrical shape.

[0108] The rings can be arranged at intervals along the axis. That is, in some embodiments, two rings cannot include the same or overlapping positions along the axis of variation.

[0109] The members can be configured such that any two adjacent rings can belong to different members. Two rings can be adjacent if there are no other rings between them. In other words, adjacent rings can refer to rings arranged successively along the axis of variation.

[0110] In some embodiments, at least one of the members can include at least three rings.

[0111] In some embodiments, at least one of the members can include a maximum of 50 rings.

[0112] In some embodiments, at least one of the members can include a maximum of 25 rings.

[0113] In some embodiments, at least one of the members can include at least three rings and a maximum of 10 rings.

[0114] In some embodiments, at least one of the members can include at least four rings and a maximum of 8 rings.

[0115] In some embodiments, at least one of the members can include six rings.

[0116] Generally, more rings can be more effective in reducing the impact of capacitance between electrical components and the device. For example, a device in which each member includes six rings can be more effective than a device in which each member includes two rings or only one tooth. However, a device with fewer rings can be easier to manufacture.

[0117] In some embodiments, the rings included in the same member can be electrically connected to each other. Therefore, the rings of the same member can be configured to have the same potential.

[0118] The rings included in different members can be electrically insulated from each other. This can enable the rings (and the members themselves) from different members to have different potentials from each other. Therefore, the rings of different members can be configured to have opposite effects on the electrical component, and in itself, can easily match the potential of the electrical component (which can be called the first potential) along the axis of the potential in the region (which can be called the second potential).

[0119] For each ring of one member, there can be a corresponding identical ring included in the other member. Typically, the above rings (which can be called corresponding identical rings) can be symmetric with respect to the central plane of the device perpendicular to the axis or arranged at equal intervals from the central plane.

[0120] That is, the corresponding identical rings can be symmetric with respect to the center of the device along the axis.

[0121] In some embodiments, for at least one of the members, the distance along the axis between two of its rings that are furthest from each other is at least 25% of the maximum length along the axis of the device. The above distance can indicate or be the same as the maximum extension of each member along the axis. Alternatively or additionally, for at least one of the members, the distance along the axis between two of its rings that are furthest from each other can be at most 90% of the maximum length along the axis of the device. In some embodiments, the above distance can be at least 25% and at most 90% of the maximum length along the axis of the device. Preferably, the above distance can be at least 35% and at most 85% of the maximum length along the axis of the device. For example, the above distance can be at least 50% of the maximum length along the axial direction of the device.

[0122] In some embodiments, at least one of the members can include at least one ring on the first half of the device and at least one other ring on the second half of the device, and the first and second halves of the device are separated by a plane perpendicular to the axis. That is, each member can include at least one respective ring on each side of the device along the axis.

[0123] Each ring can include a respective ring height measured along the axis. The ring height of each ring can respectively refer to the Euclidean distance between two planes perpendicular to the axis that are in contact with the respective ring such that the respective ring is completely within the space between the planes.

[0124] Each ring can be configured such that its respective ring height can depend on the position of the respective ring along the axis.

[0125] Rings included in the same member can include different ring heights. In other words, in some embodiments, there can be no two rings that include the same ring height and belong to the same member.

[0126] The ring heights of the rings included in the same member can vary monotonically, preferably strictly monotonically, along the axis. That is, the ring heights of the rings included in the same member can form a monotonic, preferably strictly monotonic, sequence of numbers when ordered based on the position of each ring on the axis of change. In other words, for each member, the ring height can be a monotonic function, preferably a strictly monotonic function, of the position along the axis.

[0127] The ring height of the ring included in one of the members and the ring height of the ring constituted by the other of the members can increase in opposite directions along the axis. In other words, in the direction along the axis in which one of the members can include a ring having an increasing ring height, the other member can include a ring having a decreasing ring height.

[0128] In the previous paragraphs, specific embodiments of a device including members having teeth or rings have been discussed. However, those skilled in the art will understand that other shapes and configurations of the members may be possible.

[0129] Generally, at least one change characteristic can vary monotonically along the axis.

[0130] Preferably, at least one change characteristic can vary strictly monotonically along the axis.

[0131] In some embodiments, at least one change characteristic can vary linearly along the axis. This can be particularly advantageous when the electrical component is a resistor, i.e., when it includes a voltage that varies gradually along the axis.

[0132] In some embodiments, both members can each include at least one change characteristic that varies along the axis.

[0133] The member can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members can increase monotonically along the axis in opposite directions. This can be particularly advantageous as it can enable a gradual change along the axis of the average potential in the region between the electrical component and the device.

[0134] Alternatively or additionally, the member can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members can increase strictly monotonically along at least a part of the axis in opposite directions. The above part can preferably be aligned with the center of the electrical component along the axis.

[0135] Alternatively or additionally, the member can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members can increase strictly monotonically along the axis in opposite directions.

[0136] In some embodiments, the member can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members can increase linearly along at least a part of the axis in opposite directions. The above part can preferably be aligned with the center of the electrical component along the axis. The linear change can be particularly advantageous when the electrical component is a resistor.

[0137] The member can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members increase linearly along the axis in opposite directions. This can be particularly advantageous when the electrical component is a resistor.

[0138] In some embodiments, the members can be configured such that at least one change characteristic of one of the members and at least one change characteristic of the other of the members can be equal at a central position along the axis of the device. This can be advantageous as, typically, the electrical potential of an electrical component (especially if the electrical component is a resistor) can be equal to half of the difference between the highest and lowest electrical potentials of the electrical component.

[0139] One of the at least one change characteristics can depend on the tooth width of at least one tooth. That is, in embodiments where at least one member includes at least one tooth, the tooth width can be one of the change characteristics or one of the change characteristics. In other words, the member can be configured to reduce the effect caused by the capacitance between the electrical component and the environment in which the electrical component is disposed by including at least one tooth having a changing tooth width.

[0140] In some embodiments, one of the at least one change characteristics can depend on the tooth pitch of at least one tooth. That is, in embodiments where at least one member includes at least one tooth, the tooth pitch can be one of the change characteristics or one of the change characteristics. In other words, the member can be configured to reduce the effect caused by the capacitance between the electrical component and the environment in which the electrical component is disposed by including at least one tooth having a changing tooth pitch.

[0141] In some embodiments, one of the at least one change characteristics can depend on the ring height of at least one ring. That is, in embodiments where at least one member includes a ring, the ring height can be one of the change characteristics or one of the change characteristics. In other words, the member can be configured to reduce the effect caused by the capacitance between the electrical component and the environment in which the electrical component is disposed by including a ring having a changing ring height.

[0142] Generally, at least one of the at least one change characteristic can be a quantity parameter (which can be interchangeably called a size parameter). The quantity parameter can indicate the quantity of each member included in the device at a plurality of positions along the axis. Thus, the device can include different quantities of each member at different positions along the change axis. The influence that each member exerts on the electrical component can depend on the quantity (i.e., size) of each member. This is based on the principle that the quantity of each member along the axis can be correlated with the number of charges that each member can provide at a specific position along the change axis.

[0143] In some embodiments, the quantity parameter can depend on the tooth width of at least one tooth. That is, in some embodiments, providing a variable quantity parameter to at least one member can be achieved by providing at least one member with at least one tooth having a variable tooth width along the axis.

[0144] In some embodiments, the quantity parameter can depend on the ring height of at least one ring. That is, in some embodiments, providing a variable quantity parameter to at least one member can be achieved by providing at least one member ring having different ring heights along the axis.

[0145] In some embodiments, at least one of the at least one change characteristic can be a distance parameter. The distance parameter can indicate the radial distance between each member measured radially with respect to the axis and the axis. It will be understood that the farther the member is from the electrical component, the smaller the influence on the electrical component can be. Thus, the distance between the member and the electrical component can be varied so as to reduce the influence caused by the capacitance between the electrical component and the environment in which the electrical component is disposed.

[0146] The quantity parameter may depend on the pitch distance of at least one tooth. That is, in some embodiments, providing a variable distance parameter to at least one member may be achieved by providing at least one tooth including a variable pitch distance along the axis to at least one member.

[0147] In some embodiments, the device may be configured such that the effects caused by the capacitance between the electrical component and the environment in which the electrical component may be disposed are reduced. Thus, at least one variable characteristic can vary along the axis so as to be able to reduce the effects caused by the capacitance between the electrical component and the environment in which the electrical component is disposed.

[0148] The environment in which the electrical component is disposed can include at least one conductor. The latter can be coupled to the electrical component, thereby forming a parasitic capacitor therebetween. However, since there may also be no knowledge of the number, size and / or electrical characteristics of the above conductors, it may be difficult to predict and / or explain the parasitic capacitance generated between the electrical component and its environment. The device can function as an electromagnetic shield between the device and the at least one conductor. In other words, the device can advantageously provide a controlled region around the electrical component. In this case, the only or main parasitic capacitance can exist between the electrical component and the device, while the parasitic coupling between the electrical component and other conductors in the environment can be significantly reduced.

[0149] The environment in which the electrical component can be disposed can include the device. That is, the device can "block" the parasitic coupling between the electrical component and other conductors in the environment, but the device can couple itself to the electrical component. Thus, a parasitic capacitor can be generated by the electrical component and the device. However, the device of the present invention can advantageously be configured such that even the effects of the parasitic capacitor generated by the electrical component and the device can be reduced (i.e., via the variable characteristic).

[0150] The capacitance between the electrical component and the environment may be an undesirable capacitance. For example, the capacitance between the electrical component and the environment may include stray capacitance or parasitic capacitance.

[0151] As described above, at least one of the members can include at least one variation characteristic that varies along the axis so as to be able to reduce the influence caused by the capacitance between the electrical component and the environment in which the electrical component is disposed.

[0152] The influence can include the charging time and / or discharging time of the capacitor generated by the electrical component and the environment in which the electrical component exists. This can be achieved by the fact that the device can function as an electromagnetic shield for the electrical component.

[0153] The influence can include the charging time and / or discharging time of the capacitor generated by the electrical component and the device. In other words, the device can be configured such that the parasitic capacitor generated by the device and the electrical component does not charge or discharge, or at least the length of the charging and discharging cycles is reduced.

[0154] The influence can include a time delay when changing the potential of the electrical component from a first set voltage to a second set voltage. Parasitic capacitance can be particularly disadvantageous when trying to change the potential of an electrical component. This is due to the fact that parasitic capacitance can add a delay due to the charging or discharging of the parasitic capacitor. At least one variation characteristic can vary along the axis so that the time delay can be reduced.

[0155] The influence can include a time delay when changing the potential of an external electrical device electrically connected to the electrical component from a first set voltage to a second set voltage. This can be the case, for example, when the electrical component can be a circuit element in a drive circuit for an external electrical device (such as an offset drift tube).

[0156] The first potential of the electrical component can vary along the axis.

[0157] In such an embodiment, at least one of the characteristics can vary along the axis such that the axial electric field within the region parallel to the axis can be aligned with the gradient of the first potential along the axis.

[0158] The axial electric field can be aligned with the gradient of the first potential at any point within the region such that the axial electric field differs from the gradient of the first potential (V1) by no more than 10%, preferably no more than 5%, and even more preferably no more than 1% of the gradient of the first potential (V1).

[0159] Preferably, at least one of the characteristics can vary along the axis such that the axial electric field within the region parallel to the axis can be homogeneous within a tolerance of up to 10% deviation, preferably up to 5% deviation, and even more preferably 1% deviation. A uniform axial electric field can be advantageous because when the electrical component is a resistor, for example, the potential within the region can include a gradient that is substantially constant throughout the region.

[0160] The first potential of the electrical component can vary along the axis, and the second potential within the region can vary along the axis. In such an embodiment, at least one of the characteristics can vary along the axis such that the second potential can be aligned with the first potential along the axis.

[0161] The second potential can be aligned with the first potential at any point within the region such that the measure of the difference between the second potential and the first potential is at most 10% of the first potential, preferably at most 5% of the first potential, and even more preferably at most 1% of the first potential.

[0162] The first potential can indicate the potential at a point within or on the electrical component.

[0163] The first potential can vary deterministically along the axis.

[0164] The first potential can vary monotonically along the axis.

[0165] The first potential can vary strictly monotonically along the axis.

[0166] The first potential can vary linearly along the axis.

[0167] The second potential can be the average of the potentials at points within a region including the same position along the axis.

[0168] The component part can include a length along the axis that is at least 45% of the length of the electrical component along the axis. That is, in some embodiments, the device can include a length along the axis of variation that can be at least 45% of the length of the electrical component along the axis.

[0169] Alternatively, the component part can be the entire electrical component. That is, the device can be configured to include a maximum extension along the axis that is greater than or equal to the maximum extension along the axis of the electrical component.

[0170] The device can be configured to completely surround the component part laterally around the axis.

[0171] Alternatively, the device can be configured to surround the component part laterally around the axis by at least 120°, preferably at least 180°, and even more preferably at least 270°.

[0172] The device can be configured to be electrically connected to an electrical energy source. This can be advantageous because it enables the members to be "forced" to their respective potentials so that charging and / or discharging of parasitic capacitors generated by the electrical component and the device can be reduced, preferably eliminated.

[0173] The member can be configured to be electrically connected to each one of the opposing terminals of the electrical energy source.

[0174] The device can be configured to be electrically connected to the same electrical energy source to which the electrical component can be connected.

[0175] Each member can be configured to be electrically connected to the electrical energy source such that each member can include the same potential as one of each of the component ends. In other words, each member can be "forced" to the same potential as each respective component end of the electrical component. Thereby, every time the potential of the electrical component changes, the potential of the member can also change correspondingly. Thus, the charging and / or discharging of the parasitic capacitor generated by the electrical component and the device can be reduced, and preferably eliminated.

[0176] The electrical energy source can be a DC power source. This can be advantageous in scenarios where the current supplied to the electrical component is DC.

[0177] Alternatively, the electrical energy source can be an AC power source. This can be advantageous in dynamic scenarios where the current supplied to the electrical component is AC, such as in the case of a high-frequency circuit.

[0178] Each member can be configured to be electrically connected to one of each of the component ends. In other words, each member can be "forced" to the same potential as each respective component end of the electrical component. Thereby, every time the potential of the electrical component changes, the potential of the member can also change correspondingly. Thus, the charging and / or discharging of the parasitic capacitor generated by the electrical component and the device can be reduced, and preferably eliminated.

[0179] That is, each member can be configured to be electrically connected to one of each of the component ends such that each member and each respective component end can include the same potential.

[0180] For example, each member can be configured to be electrically connected to one of each component end using a wire. The wire in this specification can refer to any circuit element that can be configured to allow the flow of a current with no or very low impedance.

[0181] The electrical component can be configured as a resistor. In some embodiments, the electrical component may be a resistor. In particular, the electrical component can be a high-ohm resistor.

[0182] For example, the electrical component can be a resistor having a resistance of at least 1 megaohm and at most 15 megaohms, preferably at least 5 megaohms and at most 12 megaohms. In some embodiments, the electrical component can be a resistor having a (substantially) 7 megaohm resistance (e.g., it can be between 6.5 and 7.5 megaohms). In some embodiments, the electrical component can be a resistor having a (substantially) 10 megaohm resistance (e.g., it can be 9.5 to 10.5 megaohms). However, it will be understood that these values are merely illustrative. In particular, the above values can be advantageous when the electrical component can be used in a voltage regulation circuit for an offset drift tube.

[0183] In some embodiments, the electrical component can include a resistor. For example, the electrical component may be a plurality of resistors.

[0184] In some embodiments, the electrical component may be a transistor.

[0185] In some embodiments, the electrical component can include a transistor. For example, the electrical component may be a plurality of transistors.

[0186] In some embodiments, the electrical component can include a plurality of circuit elements. In some such embodiments, at least one of the circuit elements can be a resistor. Alternatively or additionally, the circuit element may be a resistor. For example, the circuit element can be a string of resistors electrically connected in series.

[0187] In some embodiments, the electrical component can be part of a voltage divider circuit.

[0188] The electrical component can be part of a control circuit for setting the voltage of a second device to at least one setpoint voltage.

[0189] The second device can be part of a charged particle microscope system.

[0190] The second device can be part of the imaging system of a charged particle microscope system.

[0191] The second device can be part of the drift tube of a charged particle microscope system. For example, the second device may be part of an offset drift tube. The use of the device in such a case can be particularly advantageous because the voltage of the offset drift tube can be switched at a frequency as high as possible.

[0192] The device can be configured to reduce electromagnetic interference in an electrical circuit including the electrical component. As described, the device can be configured as an electromagnetic shield for the electrical component. That is, the device can be used as an electromagnetic shield for the electrical component.

[0193] The device can be configured to reduce the resistance-capacitance delay in an electrical circuit including the electrical component.

[0194] The device can be configured to be used in a charged particle microscope system including the electrical component.

[0195] In some embodiments, the device can be configured to include an unrolled state and a rolled state. In the unrolled state, the device can be configured to be flat. Preferably, in the unrolled state, the device can be configured to include a rectangular shape.

[0196] The device can include a device through-hole in the rolled state. That is, the device can be configured to be wound so as to include a device through-hole. In other words, in the rolled state, the device can be configured to include a hollow cylindrical shape.

[0197] Generally, the device can be used in the rolled state. That is, the device can at least partially surround at least a component portion of an electrical component around an axis in the rolled state.

[0198] The device can be configured to be changed from the unrolled state to the rolled state at least once. For example, the device can be provided in the unrolled state (which can facilitate the transportation of the device) and can be made into the rolled state for use with an electrical component.

[0199] Preferably, the device can be configured to be changed from the rolled state to the unrolled state, and vice versa, a plurality of times. Thereby, the device can be easily removed or attached for use with an electrical component.

[0200] For example, the device can be configured to be changed from the unrolled state to the rolled state by attaching two opposing edges of the device to each other. The device can be configured such that the two opposing edges can be securely and releasably attached to each other.

[0201] In a further aspect, a system including a device and an electrical component is disclosed. It will be understood that any of the features described above can be applied to the system with the necessary modifications.

[0202] The device included in the system can be configured according to any of the preceding device embodiments.

[0203] Furthermore, all the features described above regarding the electrical component can be applied to the electrical component included in the system with the necessary modifications.

[0204] The system can include an offset drift tube for use in a charged particle microscope, and the electrical component can be electrically connected to the offset drift tube. The offset drift tube can include a region traversable by a charged particle beam and can be configured to generate a magnetic field within the said region.

[0205] The system can include a voltage regulation circuit for providing a bias voltage to the offset drift tube, and the voltage regulation circuit can include the electrical component.

[0206] The offset drift tube can be configured to generate a magnetic field based on the bias voltage.

[0207] The voltage regulation circuit can be configured to alternate the bias voltage between a plurality of set points. In some embodiments, the voltage regulation circuit can be configured to alternate the bias voltage between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz. In particular, the voltage regulation circuit can be configured to alternate the bias voltage between a plurality of set points such that each bias voltage can reach and be maintained within 10 μs. Furthermore, the voltage regulation circuit can be configured to set each bias voltage within 300 ppm (parts per million) of a set value. The device of the present invention can facilitate the voltage regulation circuit in achieving these objectives.

[0208] Furthermore, the voltage regulation circuit can provide a step response up to 5 kV, preferably up to 3 kV.

[0209] The system can include a charged particle microscope, which can include electrical components. The charged particle microscope can be a transmission charged particle microscope, an electron microscope, a scanning electron microscope, a transmission electron microscope, a scanning transmission electron microscope, and / or an electron energy loss spectrometer. Alternatively, the charged particle microscope may be an ion-based microscope.

[0210] The charged particle microscope can include a charged particle emitter configured to emit a beam of charged particles. The charged particle microscope can also include an imaging system configured to receive a beam of charged particles emitted by the charged particle emitter.

[0211] The charged particle microscope can include an offset drift tube. In particular, in some embodiments, the imaging system can include an offset drift tube.

[0212] In a further aspect, the present invention relates to a method of operating an electrical component. It will be understood that any of the features discussed above can be applied to the method with the necessary modifications. The method of operating an electrical component includes providing a device that at least partially surrounds at least a component portion of the electrical component around an axis, thereby defining a region therebetween. The device includes two members. At least one of the members includes at least one varying characteristic that varies along the axis.

[0213] In a further aspect, the present invention relates to a method of operating a system. It will be understood that any of the features discussed above can be applied to the method with the necessary modifications. The method of operating a system includes providing a device that at least partially surrounds at least a component portion of electrical components around an axis, thereby defining a region therebetween. The device includes two members. At least one of the members includes at least one varying characteristic that varies along the axis.

[0214] The device provided can be configured according to any of the previous device embodiments.

[0215] Furthermore, all of the features described above with respect to the electrical components can be applied to the electrical components of the method with the necessary modifications.

[0216] Furthermore, the system can be configured according to any of the previous system embodiments.

[0217] The method can include electrically connecting the device to an electrical energy source.

[0218] Electrically connecting the device to an electrical energy source can include electrically connecting each of the members to one of the respective opposite terminals of the electrical energy source.

[0219] Electrically connecting the device to an electrical energy source can include electrically connecting the device and the electrical components to the same electrical energy source.

[0220] The electrical energy source can be a direct current power source. Alternatively, the electrical energy source can be an alternating current power source.

[0221] The method can include maintaining each of the members and one of the component ends at an equal potential.

[0222] The method can include electrically connecting each member to one of each component end.

[0223] The method can include alternating the potential of a member among a plurality of set points.

[0224] The method can include alternating the potential of a member among a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz.

[0225] The method can include alternating the potential of an electrical component.

[0226] The method can include alternating the potential of a member and the potential of an electrical component synchronously.

[0227] The method can include alternating the potential of a member and the potential of an electrical component synchronously so as to minimize, preferably make zero, the difference between the potential of each member and one of each component end.

[0228] The method can include using a device to at least partially surround at least a component portion of an electrical component around an axis.

[0229] In some embodiments, the method can include wrapping a device around at least a component portion of an electrical component.

[0230] The method can include aligning the device and the electrical component so that they are coaxial.

[0231] The method can include the device reducing electromagnetic interference in an electrical circuit including the electrical component.

[0232] The method can include the device electromagnetically shielding the electrical component.

[0233] The method can include reducing resistance-capacitance (RC) delay in an electrical circuit that includes an electrical component by a device.

[0234] The method can include reducing an effect caused by capacitance between an electrical component and an environment in which the electrical component is disposed by a device. The capacitance between the electrical component and the environment can be an undesirable capacitance. For example, the capacitance between the electrical component and the environment can include stray capacitance or parasitic capacitance.

[0235] The method can include using a device in a charged particle microscope system that includes an electrical component.

[0236] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments for at least partially surrounding at least a component portion of an electrical component around an axis.

[0237] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments for reducing electromagnetic interference in an electrical circuit.

[0238] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments as an electromagnetic shield for a device.

[0239] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments for reducing resistance-capacitance (RC) delay in an electrical circuit.

[0240] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments in a charged particle microscope system.

[0241] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments in a voltage regulation circuit for providing a bias voltage to an offset drift tube of a charged particle microscope.

[0242] In a further aspect, the present invention relates to a method comprising providing a device model of a device according to any of the preceding device embodiments, simulating a second potential within a region using a data processing system, and modifying the model of the device in response to the second potential.

[0243] The method can enable automatic determination of an optimized model of the device.

[0244] The method can include manufacturing the device according to the modified device model of the device.

[0245] The method can include providing a component model of an electrical component including a first potential of the electrical component along an axis.

[0246] Modifying the device model of the device can include determining at least one change characteristic that can vary along the axis for at least one of the members.

[0247] The method can include determining at least one change characteristic such that the difference between the first potential and the second potential can be minimized.

[0248] The method can include providing a voltage difference threshold and determining at least one change characteristic such that the difference between the first potential and the second potential is less than the voltage difference threshold.

[0249] The method can include determining at least one change characteristic such that the difference between the axial electric field parallel to the axis within the region and the gradient of the first potential along the axis is minimized.

[0250] The method can include providing a gradient difference threshold and determining at least one change characteristic such that the difference between the axial electric field parallel to the axis within the region and the gradient of the first potential along the axis is less than the electric field difference threshold.

[0251] The method can include determining at least one change characteristic such that an effect caused by a capacitance between an electrical component and a device is minimized.

[0252] The method can include providing a capacitance threshold and determining at least one change characteristic such that an effect caused by a capacitance between an electrical component and a device is less than the capacitance threshold.

[0253] The method can include determining at least one change characteristic such that an axial electric field parallel to an axis within a region can be uniform.

[0254] The method can include providing an electric field dispersion threshold and determining at least one change characteristic such that a measure of a difference in an axial electric field parallel to an axis within a region is less than the electric field dispersion threshold.

[0255] The method can include determining at least one change characteristic such that a radial electric field directed radially with respect to an axis within a region is zero.

[0256] The method can include providing a radial electric field threshold and determining at least one change characteristic such that a radial electric field directed radially with respect to an axis within a region is less than the radial electric field threshold.

[0257] In some embodiments, the method can include providing a device model such that a device can include a toothed member, as discussed above.

[0258] Modifying the device model of the device can include determining the shape of at least one tooth.

[0259] Modifying the device model of a device can include determining the number of teeth included in each member.

[0260] Modifying the device model of a device can include determining the length along the axis of each tooth.

[0261] Modifying the device model of a device can include determining the position along the axis of each tooth.

[0262] Modifying the device model of a device can include determining the position along the axis of each tooth with respect to an electrical component.

[0263] Modifying the device model of a device can include determining the electric potential of each tooth as a function of the electric potential of the electrical component.

[0264] In some embodiments, the method can include providing a device model such that the device can include at least one tooth having a varying tooth width, as described above.

[0265] Modifying the device model of a device can include determining, for each tooth, the respective tooth width along the axis.

[0266] In some embodiments, the method can include providing a device model such that the device can include at least one tooth having a varying tooth distance, as described above.

[0267] Modifying the device model of a device can include determining, for each tooth, the respective tooth distance along the axis.

[0268] In some embodiments, the method can include providing a device model such that the device can include a ring having a varying ring height, as described above.

[0269] Modifying the device model of a device can include determining the respective ring heights for each ring.

[0270] Modifying the device model of a device can include determining the material of the device.

[0271] Using a data processing system to simulate a second potential within a region can include the data processing system performing a finite element method.

[0272] Simulating a second potential within a region can include determining the second potential at a plurality of points within the region.

[0273] Simulating a second potential in a region can include determining the second potential on a cross-section of the region, the cross-section being parallel to an axis.

[0274] Simulating a second potential within a region can include determining the second potential on a part of a cross-section of the region, the cross-section being parallel to an axis. The above part of the cross-section can be a cross-sectional part that is half of the region.

[0275] The present technology is also defined by the following numbered embodiments.

[0276] Hereinafter, device embodiments will be considered. Whenever reference is made herein to "device embodiments", these embodiments are meant. 1. A device (1) for use with an electrical component (2), wherein the device (1) is configured to at least partially surround at least a component part (25) of the electrical component (2) around an axis (Z), thereby defining a region (3) therebetween, wherein the device (1) includes two members (15, 17), A device in which at least one of the members (15, 17) includes at least one variation characteristic (130, 150, 190) that varies along the axis (Z). 2. The device according to the preceding embodiment, wherein the electrical component (2) includes two component ends (22, 24) that face each other and are at different positions along the axis (Z). 3. The device according to any one of the preceding embodiments, wherein the axis (Z) is the central axis (Z) of the device (1). 4. The device according to any one of the preceding embodiments, wherein the axis (Z) is the central axis (Z) of the electrical component (2). 5. The device according to any one of the preceding embodiments, wherein the axis (Z) is parallel to the direction of the current flow through the electrical component (2). 6. The device according to any one of the preceding embodiments, wherein the axis (Z) is the longitudinal axis (Z) of the electrical component (2). 7. The device according to any one of the preceding embodiments, wherein the electrical component (2) extends substantially longitudinally along the axis (Z). 8. The device according to any one of the preceding embodiments, wherein the device (1) includes a first device end (12) and a second device end (14) that face each other and are at different positions along the axis (Z). 9. The first member of the members (15, 17) extends along the axis (Z) from the first device end (12) through the center of the device (1) and towards the second device end (14), The second member of the members (15, 17) extends along the axis (Z) from the second device end (14) through the center of the device (1) and towards the first device end (12). The device according to the preceding embodiment. 10. The device according to any one of the preceding embodiments, wherein the minimum distance between the members (15, 17) is at least 0.5 mm, preferably at least 1 mm. 11. The device according to any one of the preceding embodiments, wherein the minimum distance between the members (15, 17) is 1 mm. 12. The device according to any one of the preceding embodiments, wherein the minimum distance between the members (15, 17) is at least 0.5 mm and at most 1.5 mm, preferably at least 0.8 mm and at most 1.2 mm, more preferably at least 0.9 mm and at most 1.1 mm. 13. The device according to any one of the preceding embodiments, wherein the members (15, 17) are configured such that any radial line perpendicular to the axis (Z) passes through at most one of the members (15, 17). 14. The device according to any one of the preceding embodiments, wherein the members (15, 17) do not overlap. 15. The device according to any one of the preceding embodiments, wherein the members (15, 17) are coaxial. 16. The device according to any one of the preceding embodiments, wherein the members (15, 17) are electrically insulated from each other. 17. The device according to any one of the preceding embodiments, wherein the members (15, 17) are configured to be conductive. 18. The device according to any one of the preceding embodiments, wherein the members (15, 17) are configured to be electrically connected to an electrical energy source. 19. The device according to any one of the preceding embodiments, wherein the device (1) includes a hollow cylindrical shape. 20. The device according to any one of the preceding embodiments, wherein the device (1) includes a device through-hole (19). 21. The device according to the preceding embodiment, wherein the device through-hole (19) extends along the axis (Z). 22. The device according to any one of the preceding two embodiments, wherein the device through-hole (19) is configured to accommodate an electrical component (2). 23. The device according to any one of the preceding three embodiments, wherein the device through-hole (19) includes a region (3). 24. The device according to any one of the preceding embodiments, wherein the members (15, 17) have the same shape. 25. The device according to any one of the preceding embodiments, wherein the device (1) includes a substrate layer (102) configured to be non-conductive. 26. The device according to the preceding embodiment, wherein the substrate layer (102) is made of a non-conductive material. 27. The device according to any one of the preceding two embodiments, wherein the substrate layer (102) includes a polyimide material. 28. The device according to any one of the preceding three embodiments, wherein the substrate layer (102) is a polyimide film. 29. The device according to any one of the preceding four embodiments, wherein the substrate layer (102) is continuous. 30. The device according to any one of the preceding five embodiments, wherein the substrate layer (102) forms at least a part of the outer surface of the device (1). 31. The device according to any one of the preceding embodiments, wherein the device (1) includes a conductive layer (104) configured to be conductive. 32. The device according to the preceding embodiment, wherein the conductive layer (104) includes at least one conductive material. 33. The device according to the preceding embodiment, wherein at least one of the conductive materials is a metal such as copper, gold, aluminum, iron, or silver. 34. The device according to any one of the preceding three embodiments, wherein the conductive layer (104) includes copper. 35. The device according to any one of the preceding four embodiments, wherein the conductive layer (104) includes two conductive layer portions (1045, 1047) electrically insulated from each other, and each member (15, 17) includes one of the two conductive layer portions (1045, 1047). 36. The conductive layer (104) includes two separate sets of conductive layer portions (1045, 1047), each of the two sets includes a plurality of conductive layer portions (1045, 1047), all the conductive layer portions (1045, 1047) are spaced apart from each other, the layer portions (1045, 1047) within the set are configured to be electrically connected to each other, Different sets of layer portions (1045, 1047) are electrically insulated from each other, A device according to any one of the preceding five embodiments, wherein each member (15, 17) includes one of each of the two conductive layer portions (1045, 1047). 37. A device according to any one of the preceding embodiments having the features of embodiments 25 and 31, wherein a conductive layer (104) is provided on a substrate layer (102). 38. A device according to the preceding embodiment, wherein the conductive layer (104) and the substrate layer (102) are adhered to each other. 39. A device according to any one of the preceding two embodiments, wherein the device (1) includes a cover layer (106) that covers at least the conductive layer (104) such that the conductive layer (104) is between the substrate layer (102) and the cover layer (106). 40. A device according to the preceding embodiment, wherein the conductive layer (104) and the cover layer (106) are adhered to each other. 41. A device according to any one of the preceding two embodiments, wherein the cover layer (106) is configured to be non-conductive. 42. A device according to any one of the preceding three embodiments, wherein the cover layer (106) is made of a non-conductive material. 43. A device according to any one of the preceding four embodiments, wherein the cover layer (106) includes a polyimide material. 44. A device according to any one of the preceding five embodiments, wherein the cover layer (106) is a polyimide film. 45. A device according to any one of the preceding six embodiments, wherein the cover layer (106) forms at least a part of the outer surface of the device (1). 46. A device according to the preceding embodiment, wherein the outer surface of the device (1) is formed by the cover layer (106) and the substrate layer (102). 47. A device according to any one of the preceding embodiments having the features of embodiments 25 and 31, wherein the conductive layer (104) is embedded in the substrate layer (102). 48. The device according to the preceding embodiment, wherein the substrate layer (102) forms the entire outer surface of the device (1). 49. The device according to any one of the preceding embodiments, wherein at least one of the members (15, 17) includes at least one tooth (155, 175) extending parallel to the axis (Z). 50. The device according to any one of the preceding embodiments, wherein both of the members (15, 17) include at least one respective tooth (155, 175) extending parallel to the axis (Z). 51. The device according to any one of the preceding embodiments, wherein at least one of the members (15, 17) includes a plurality of teeth (155, 175) extending parallel to the axis (Z). 52. The device according to any one of the preceding embodiments, wherein both of the members (15, 17) respectively include a plurality of teeth (155, 175) extending parallel to the axis (Z). 53. The device according to any one of the preceding four embodiments, wherein each tooth (155, 175) extends along the axis from the first half of the device (1) to the second half of the device (1), and the first and second halves of the device (1) are separated by a plane perpendicular to the axis (Z). 54. The device according to any one of the preceding five embodiments having the feature of embodiment 8, wherein each tooth (155, 175) extends from the first device end (12), beyond the center of the device (1), towards the second device end (14). 55. The device according to any one of the preceding six embodiments, including the maximum length along the axis (Z), wherein each tooth (155, 175) is at least 25% of the maximum length along the axis (Z) of the device (1). 56. The device according to any one of the preceding seven embodiments, including the maximum length along the axis (Z), wherein each tooth (155, 175) is at most 90% of the maximum length along the axis (Z) of the device (1). 57. The device according to any one of the preceding eight embodiments, including the maximum length along the axis (Z), wherein each tooth (155, 175) is at least 25% and at most 90% of the maximum length along the axis (Z) of the device (1). 58. The device according to any one of the preceding nine embodiments, wherein each tooth (155, 175) includes a maximum length along the axis (Z) that is at least 35% and at most 85% of the maximum length along the axis (Z) of the device (1). 59. The device according to any one of the preceding ten embodiments, wherein each tooth (155, 175) includes a maximum length along the axis (Z) that is at least 50% of the maximum length along the axial direction of the device (1). 60. The device according to any one of the preceding eleven embodiments, wherein at least one of the members (15, 17) includes at least three teeth (155, 175). 61. The device according to any one of the preceding twelve embodiments, wherein at least one of the members (15, 17) includes a maximum of 50 teeth (155, 175). 62. The device according to any one of the preceding thirteen embodiments, wherein at least one of the members (15, 17) includes a maximum of 25 teeth (155, 175). 63. The device according to any one of the preceding fourteen embodiments, wherein at least one of the members (15, 17) includes at least three teeth (155, 175) and a maximum of 15 teeth. 64. The device according to any one of the preceding fifteen embodiments, wherein at least one of the members (15, 17) includes at least five teeth (155, 175) and a maximum of 10 teeth. 65. The device according to any one of the preceding sixteen embodiments, wherein at least one of the members (15, 17) includes five teeth (155, 175). 66. The device according to any one of the preceding seventeen embodiments, wherein at least one of the members (15, 17) includes ten teeth (155, 175). 67. The device according to any one of the preceding eighteen embodiments, wherein the teeth (153, 173) included in different members (15, 17) are electrically insulated from each other. 68. The device according to any one of the preceding nineteen embodiments, wherein the teeth (155, 175) included in the same member (15, 17) are electrically connected to each other. 69. The device according to any one of the preceding 20 embodiments, wherein the teeth (155, 175) are identical to each other. 70. The device according to any one of the preceding 21 embodiments, wherein the members (15, 17) are configured such that each tooth (155, 175) fits into a respective space between two adjacent teeth (175, 155) of the other member (15, 17). 71. The device according to any one of the preceding embodiments 49 - 70, wherein each tooth (155, 175) includes a respective tooth width (150) that extends azimuthally with respect to the axis (Z). 72. The device according to the preceding embodiment, wherein each tooth (155, 175) is configured such that its respective tooth width (150) tapers along the axis (Z). 73. The device according to any one of the preceding two embodiments, wherein the tooth width (150) of each tooth (155, 175) tapers to zero along the axis (Z). 74. The device according to any one of the preceding three embodiments, wherein the tooth width (150) of each tooth (155, 175) tapers linearly along the axis (Z). 75. The device according to any one of the preceding four embodiments, wherein each tooth (155, 175) includes a triangular shape. 76. The device according to any one of the preceding five embodiments, wherein the tooth widths (150) of the teeth (155, 175) included in the same member (15, 17) taper in the same direction along the axis (Z). 77. The device according to any one of the preceding six embodiments, wherein the tooth widths (150) of the teeth (155, 175) included in different members (15, 17) taper in opposite directions along the axis (Z). 78. The device according to any one of the preceding seven embodiments, wherein each tooth (155, 175) is configured such that any point thereof is equidistant from the axis (Z). 79. The device according to any one of the preceding embodiments having any of the features of embodiments 49 - 52, wherein each tooth (155, 175) includes a respective tooth distance (190) from the axis (Z) measured radially with respect to the axis (Z). 80. The device according to the preceding embodiment, wherein each tooth (155, 175) is configured such that its respective tooth pitch (190) varies along the axis (Z). 81. The device according to any one of the preceding two embodiments, wherein each tooth (155, 175) is configured such that its respective tooth pitch (190) varies monotonically along the axis (Z). 82. The device according to any one of the preceding three embodiments, wherein each tooth (155, 175) is configured such that its respective tooth pitch (190) varies strictly monotonically along the axis (Z). 83. The device according to any one of the preceding four embodiments, wherein each tooth (155, 175) is configured such that its respective tooth pitch (190) varies linearly along the axis (Z). 84. The device according to any one of the preceding five embodiments, wherein the tooth pitches (190) of the teeth (155, 175) included in the same member (15, 17) increase according to the same direction along the axis (Z). 85. The device according to any one of the preceding six embodiments, wherein the tooth pitches (190) of the teeth (155, 175) included in different members (15, 17) increase according to opposite directions along the axis (Z). 86. The device according to any one of the preceding seven embodiments, wherein each tooth (155, 175) includes a constant tooth width (150) along the axis (Z). 87. The device according to any one of the preceding eight embodiments, wherein each tooth (155, 175) is inclined with respect to the axis (Z) according to an inclination angle. 88. The device according to any one of the preceding nine embodiments, wherein each tooth (155, 175) is bent outward with respect to the axis (Z). 89. The device according to any one of the preceding embodiments 1 to 48, wherein at least one of the members (15, 17) includes a plurality of rings (153, 173). 90. The device according to any one of the preceding embodiments 1 to 48, wherein both of the members (15, 17) respectively include a plurality of rings (153, 173). 91. The device according to any one of the preceding two embodiments, wherein the rings (153, 173) are parallel to each other. 92. The device according to any one of the preceding three embodiments, wherein the rings (153, 173) are coaxial. 93. The device according to any one of the preceding four embodiments, wherein the central axis of each ring (153, 173) is on the axis (Z). 94. The device according to any one of the preceding five embodiments, wherein the rings (153, 173) include a hollow cylindrical shape. 95. The device according to any one of the preceding six embodiments, wherein the rings (153, 173) are spaced apart from each other along the axis (Z). 96. The device according to any one of the preceding seven embodiments, wherein the members (15, 17) are configured such that any two adjacent rings (153, 173) belong to different members (15, 17). 97. The device according to any one of the preceding eight embodiments, wherein at least one of the members (15, 17) includes at least three rings (153, 173). 98. The device according to any one of the preceding nine embodiments, wherein at least one of the members (15, 17) includes a maximum of 50 rings (153, 173). 99. The device according to any one of the preceding ten embodiments, wherein at least one of the members (15, 17) includes a maximum of 25 rings (153, 173). 100. The device according to any one of the preceding eleven embodiments, wherein at least one of the members (15, 17) includes at least three rings (153, 173) and a maximum of 10 rings. 101. The device according to any one of the preceding twelve embodiments, wherein at least one of the members (15, 17) includes at least four rings (153, 173) and a maximum of 8 rings. 102. The device according to any one of the preceding thirteen embodiments, wherein at least one of the members (15, 17) includes six rings (153, 173). 103. The device according to any one of the preceding 14 embodiments, wherein the rings (153, 173) included in the same member (15, 17) are electrically connected to each other. 104. The device according to any one of the preceding 15 embodiments, wherein the rings (153, 173) included in different members (15, 17) are electrically insulated from each other. 105. The device according to any one of the preceding 16 embodiments, wherein for each ring (153, 173) of one of the members (15, 17), there is a corresponding identical ring (173, 153) included in the other member (17, 15). 106. The device according to the preceding embodiments, wherein the corresponding identical rings (153, 173) are symmetric with respect to the center of the device (1) along the axis (Z). 107. The device according to any one of the preceding 18 embodiments, wherein for at least one of the members (15, 17), the distance along the axis (Z) between two of its rings (153, 173) that are the farthest from each other is at least 25% of the maximum length along the axis (Z) of the device (1). 108. The device according to any one of the preceding 19 embodiments, wherein for at least one of the members (15, 17), the distance along the axis (Z) between two of its rings (153, 173) that are the farthest from each other is at most 90% of the maximum length along the axis (Z) of the device (1). 109. The device according to any one of the preceding 20 embodiments, wherein for at least one of the members (15, 17), the distance along the axis (Z) between two of its rings (153, 173) that are the farthest from each other is at least 25% and at most 90% of the maximum length along the axis (Z) of the device (1). 110. The device according to any one of the preceding 21 embodiments, wherein for at least one of the members (15, 17), the distance along the axis (Z) between two of its rings (153, 173) that are the farthest from each other is at least 35% and at most 85% of the maximum length along the axis (Z) of the device (1). 111. For at least one of the members (15, 17), the distance along the axis (Z) between two of its rings (153, 173) that are furthest from each other is at least 50% of the maximum length along the axial direction of the device (1), the device according to any one of the preceding 22 embodiments. 112. At least one of the members (15, 17) includes at least one ring (153, 173) on the first half of the device (1) and at least one other ring (153, 173) on the second half of the device (1), The device according to any one of the preceding 23 embodiments, wherein the first half and the second half of the device (1) are separated by a plane perpendicular to the axis (Z). 113. The device according to any one of the preceding 24 embodiments, wherein each ring (153, 173) includes a respective ring height (130) measured along the axis (Z). 114. The device according to the preceding embodiments, wherein each ring (153, 173) is configured such that its respective ring height (130) depends on the position of the respective ring (153, 173) along the axis (Z). 115. The device according to any one of the preceding two embodiments, wherein the rings (153, 173) included in the same member (15, 17) include different ring heights (130). 116. The device according to any one of the preceding three embodiments, wherein the ring heights (130) of the rings (153, 173) included in the same member (15, 17) vary monotonically along the axis (Z). 117. The device according to any one of the preceding four embodiments, wherein the ring height (130) of the rings (153, 173) included in one of the members (15, 17) and the ring height (130) of the rings (153, 173) included in the other of the members (15, 17) increase in opposite directions along the axis (Z). 118. The device according to any one of the preceding embodiments, wherein at least one change characteristic (130, 150, 190) varies monotonically along the axis (Z). 119. The device according to any one of the preceding embodiments, wherein at least one variation characteristic (130, 150, 190) varies strictly monotonically along the axis (Z). 120. The device according to any one of the preceding embodiments, wherein at least one variation characteristic (130, 150, 190) varies linearly along the axis (Z). 121. The device according to any one of the preceding embodiments, wherein both members (15, 17) each include at least one variation characteristic (130, 150, 190) that varies along the axis (Z). 122. The device according to the preceding embodiment, wherein at least one variation characteristic (130, 150, 190) of one of the members (15, 17) and at least one variation characteristic (130, 150, 190) of the other of the members (15, 17) are configured to increase monotonically in opposite directions along the axis (Z). 123. The device according to any one of the preceding two embodiments, wherein at least one variation characteristic (130, 150, 190) of one of the members (15, 17) and at least one variation characteristic (130, 150, 190) of the other of the members (15, 17) are configured to increase strictly monotonically in opposite directions along at least a part of the axis (Z). 124. The device according to any one of the preceding three embodiments, wherein at least one variation characteristic (130, 150, 190) of one of the members (15, 17) and at least one variation characteristic (130, 150, 190) of the other of the members (15, 17) are configured to increase strictly monotonically in opposite directions along the axis (Z). 125. The device according to any one of the preceding four embodiments, wherein at least one variation characteristic (130, 150, 190) of one of the members (15, 17) and at least one variation characteristic (130, 150, 190) of the other of the members (15, 17) are configured to increase linearly in opposite directions along at least a part of the axis (Z). 126. The device according to any one of the preceding five embodiments, wherein the members (15, 17) are configured such that at least one change characteristic (130, 150, 190) of one of the members (15, 17) and at least one change characteristic (130, 150, 190) of the other of the members (15, 17) increase linearly in opposite directions along the axis (Z). 127. The device according to any one of the preceding six embodiments, wherein the members (15, 17) are configured such that at least one change characteristic (130, 150, 190) of one of the members (15, 17) and at least one change characteristic (130, 150, 190) of the other of the members (15, 17) are equal at the central position along the axis (Z) of the device (1). 128. The device according to any one of the preceding embodiments having the features of embodiment 71, wherein one of the at least one change characteristic (150) depends on the tooth width (150) of at least one tooth (155, 175). 129. The device according to any one of the preceding embodiments having the features of embodiment 79, wherein one of the at least one change characteristic (190) depends on the tooth pitch (190) of at least one tooth (155, 175). 130. The device according to any one of the preceding embodiments having the features of embodiment 113, wherein one of the at least one change characteristic (130) depends on the ring height (130) of at least one ring (153, 173). 131. The device according to any one of the preceding embodiments, wherein one of the at least one change characteristic (130, 150) is a quantity parameter (130, 150). 132. The device according to the preceding embodiments, wherein the quantity parameter (130, 150) indicates the quantity of each member (15, 17) included in the device (1) at a plurality of positions along the axis (Z). 133. The device according to any one of the preceding two embodiments having the features of embodiment 71, wherein the quantity parameter (150) depends on the tooth width (150) of at least one tooth (155, 175). The device according to any one of the preceding three embodiments having the feature of embodiment 113, wherein the quantity parameter (150) depends on the ring height (130) of at least one ring (153, 173). The device according to any one of the preceding embodiments, wherein one of at least one change characteristic (190) is a distance parameter (190). The device according to the preceding embodiment, wherein the distance parameter (190) indicates the radial distance between each member (15, 17) measured radially with respect to the axis (Z) and the axis (Z). The device according to any one of the preceding two embodiments having the feature of embodiment 79, wherein the distance parameter (190) depends on the tooth pitch (190) of at least one tooth (155, 175). The device according to any one of the preceding embodiments, wherein the device (1) is configured to reduce the influence caused by the capacitance between the electrical component (2) and the environment in which the electrical component (2) is disposed. The device according to any one of the preceding embodiments, wherein at least one change characteristic (130, 150, 190) changes along the axis (Z) so as to reduce the influence caused by the capacitance between the electrical component (2) and the environment in which the electrical component (2) is disposed. The device according to the preceding embodiment, wherein the environment in which the electrical component (2) is disposed includes at least one conductor. The device according to any one of the preceding two embodiments, wherein the environment in which the electrical component (2) is disposed includes the device (1). The device according to any one of the preceding three embodiments, wherein the capacitance between the electrical component (2) and the environment is an undesirable capacitance. The device according to any one of the preceding four embodiments, wherein the capacitance between the electrical component (2) and the environment includes stray capacitance or parasitic capacitance. 144. The device according to any one of the preceding five embodiments, wherein the effect includes the charging time and / or the discharging time of the capacitor generated by the electrical component (2) and the environment in which the electrical component (2) is present. 145. The device according to any one of the preceding six embodiments, wherein the effect includes the charging time and / or the discharging time of the capacitor generated by the electrical component (2) and the device (1). 146. The device according to any one of the preceding seven embodiments, wherein the effect includes the time delay when changing the potential of the electrical component (2) from a first set voltage to a second set voltage. 147. The device according to any one of the preceding eight embodiments, wherein the effect includes the time delay when changing the potential of an external electrical device electrically connected to the electrical component (2) from a first set voltage to a second set voltage. 148. The first potential (V1) of the electrical component (2) changes along the axis (Z), The device according to any one of the preceding embodiments, wherein at least one of the characteristics (130, 150, 190) changes along the axis (Z) such that the axial electric field parallel to the axis (Z) in the region (3) coincides with the gradient of the first potential (V1) along the axis (Z). 149. The axial electric field coincides with the gradient of the first potential (V1), whereby at any point in the region (3), The axial electric field differs from the gradient of the first potential (V1) by at most 10%, Preferably, by at most 5% of the gradient of the first potential (V1), Even more preferably, by at most 1% of the gradient of the first potential (V1), the device according to the preceding embodiments. 150. At least one of the characteristics (130, 150, 190) changes along the axis (Z), whereby The axial electric field parallel to the axis (Z) in the region (3) is uniform within a tolerance of a maximum deviation of 10%, preferably a maximum deviation of 5%, and even more preferably a deviation of 1%, the device according to any one of the preceding embodiments. 151. The first potential (V1) of the electrical component (2) varies along the axis (Z), and the second potential (V2) in the region (3) varies along the axis (Z), at least one of the characteristics (130, 150, 190) varies along the axis (Z) such that the second potential (V2) coincides with the first potential (V1) along the axis (Z), a device according to any one of the preceding embodiments. 152. The second potential (V2) coincides with the first potential (V1), whereby, at any point within the region (3), the measure of the difference between the second potential (V2) and the first potential (V1) is at most 10% of the first potential (V1), preferably at most 5% of the first potential (V1), even more preferably at most 1% of the first potential (V1), a device according to the preceding embodiment. 153. The first potential (V1) represents the potential at a point within or on the electrical component (2), a device according to any one of the two preceding embodiments and / or a device having the features of embodiment 148. 154. The first potential (V1) varies deterministically along the axis (Z), a device according to any one of the three preceding embodiments and / or a device having the features of embodiment 148. 155. The first potential (V1) varies monotonically along the axis, a device according to any one of the four preceding embodiments and / or a device having the features of embodiment 148. 156. The first potential (V1) varies strictly monotonically along the axis, a device according to any one of the five preceding embodiments and / or a device having the features of embodiment 148. 157. The first potential (V1) varies linearly along the axis, a device according to any one of the six preceding embodiments and / or a device having the features of embodiment 148. 158. The second potential (V2) is the average of the potentials at points within the region (3) including the same position along the axis (Z), a device according to any one of the seven preceding embodiments. 159. The device according to any one of the preceding embodiments, wherein the component part (25) includes a length along the axis (Z) that is at least 45% of the length along the axis (Z) of the electrical component (2). 160. The device according to any one of the preceding embodiments that does not have the features of the preceding embodiments, wherein the component part (25) is the entire electrical component (2). 161. The device according to the preceding embodiment, wherein the device (1) is configured to include a maximum extension along the axis (Z) that is greater than or equal to the maximum extension along the axis (Z) of the electrical component (2). 162. The device according to any one of the preceding embodiments, wherein the device (1) is configured to completely surround the component part (25) laterally around the axis (Z). 163. The device according to any one of the preceding embodiments, wherein the device (1) is configured to surround the component part (25) laterally around the axis (Z) by at least 120°, preferably at least 180°, and more preferably at least 270°. 164. The device according to any one of the preceding embodiments, wherein the device (1) is configured to be electrically connected to an electrical energy source. 165. The device according to the preceding embodiment, wherein the members (15, 17) are configured to be electrically connected to respective ones of the opposing terminals of the electrical energy source. 166. The device according to any one of the preceding two embodiments, wherein the device (1) is configured to be electrically connected to the same electrical energy source to which the electrical component (2) is connected. 167. Each member (15, 17) is configured to be electrically connected to the electrical energy source, whereby The device according to any one of the preceding three embodiments having the features of Embodiment 2, wherein each member (15, 17) includes the same potential as one of the respective component ends (22, 24). 168. The device according to any one of the preceding four embodiments, wherein the electrical energy source is a DC source. 169. The device according to any one of embodiments 164 to 167, wherein the electrical energy source is an AC power source. 170. The device according to any one of the preceding embodiments having the features of embodiment 2, wherein each of the members (15, 17) is configured to be electrically connected to one of the respective component ends (22, 24). 171. The device according to the preceding embodiment, wherein each member (15, 17) is configured to be electrically connected to one of the respective component ends (22, 24) such that each member (15, 17) and the respective component ends (22, 24) have the same potential. 172. The device according to any one of the two preceding embodiments, wherein each member (15, 17) is configured to be electrically connected to one of the respective component ends (22, 24) using a wire. 173. The device according to any one of the preceding embodiments, wherein the electrical component (2) is a resistor (2). 174. The device according to any one of the preceding embodiments, wherein the electrical component (2) includes a resistor. 175. The device according to any one of the preceding embodiments, wherein the electrical component (2) includes a transistor. 176. The device according to any one of the preceding embodiments, wherein the electrical component (2) includes a plurality of circuit elements. 177. The device according to the preceding embodiment, wherein at least one circuit element is a resistor. 178. The device according to any one of the two preceding embodiments, wherein the circuit element includes a resistor. 179. The device according to any one of the three preceding embodiments, wherein the circuit element is a string of resistors electrically connected in series. 180. The device according to any one of the preceding embodiments, wherein the electrical component (2) is part of a voltage divider circuit. 181. The device according to any one of the preceding embodiments, wherein the electrical component (2) is part of a control circuit for setting the voltage of a second device to at least one setpoint voltage. 182. The device according to the preceding embodiment, wherein the second device is part of a charged particle microscope system. 183. The device according to any one of the preceding two embodiments, wherein the second device is part of an imaging system of a charged particle microscope system. 184. The device according to any one of the preceding three embodiments, wherein the second device is part of a drift tube of a charged particle microscope system. 185. The device according to any one of the preceding embodiments, wherein the device (1) is configured to reduce electromagnetic interference in an electric circuit including an electric component (2). 186. The device according to any one of the preceding embodiments, wherein the device (1) is configured as an electromagnetic shield for an electric component (2). 187. The device according to any one of the preceding embodiments, wherein the device (1) is configured to reduce resistance-capacitance (RC) delay in an electric circuit including an electric component (2). 188. The device according to any one of the preceding embodiments, wherein the device (1) is configured to be used in a charged particle microscope system including an electric component (2). 189. The device according to any one of the preceding embodiments, wherein the device (1) is configured to include an unrolled state and a rolled state. 190. The device according to the preceding embodiment, wherein the device (1) is configured to be flat in the unrolled state. 191. The device according to any one of the preceding two embodiments, wherein the device (1) is configured to include a rectangular shape in the unrolled state. 192. The device according to any one of the preceding three embodiments having the features of embodiment 20, wherein the device (1) includes a device through-hole (19) in the rolled state. 193. The device according to any one of the preceding four embodiments, wherein the device (1) is configured to include a hollow cylindrical shape in the rolled state. 194. The device (1) according to any one of the preceding five embodiments, which is used in a wound state. 195. The device (1) according to any one of the preceding six embodiments, which is configured to be wound at least once from an unwound state to a wound state. 196. The device (1) according to any one of the preceding seven embodiments, which is configured to be wound from a wound state to an unwound state and vice versa a plurality of times. 197. The device (1) according to any one of the preceding eight embodiments, which is configured to be wound from an unwound state to a wound state by attaching two opposing edges of the device (1) to each other. 198. The device according to the preceding embodiments, wherein the two opposing edges are configured to be securely and releasably attachable to each other.

[0277] Hereinafter, embodiments of the system will be considered. These embodiments are abbreviated by the letter "S" followed by a number. Whenever reference is made herein to "embodiments of the system", these embodiments are meant. S1. A system comprising a device (1) and an electrical component (2), wherein the device (1) is configured to at least partially surround at least a component part (25) of the electrical component (2) around an axis (Z), thereby defining a region (3) therebetween, the device (1) includes two members (15, 17), and at least one of the members (15, 17) includes at least one changing characteristic (130, 150, 190) that changes along the axis (Z). S2. The system according to the preceding embodiments, wherein the device (1) is configured according to any one of the preceding device embodiments. S3. The system according to any one of the preceding system embodiments, wherein the electrical component is configured according to any one of embodiments 173 to 184. S4. The system further includes an offset drift tube for use in a charged particle microscope, and the electrical component (2) is electrically connected to the offset drift tube, the system according to any one of the preceding system embodiments. S5. The offset drift tube includes a region transversable by a charged particle beam, and the offset drift tube is configured to generate a magnetic field within the region, the system according to the preceding embodiment. S6. The system includes a voltage regulation circuit for providing a bias voltage to the offset drift tube, and the voltage regulation circuit includes the electrical component (2), the system according to any one of the preceding two embodiments. S7. The offset drift tube is configured to generate a magnetic field based on the bias voltage, the system according to the preceding two embodiments. S8. The voltage regulation circuit is configured to alternate the bias voltage between a plurality of set points, the system according to any one of the preceding two embodiments. S9. The voltage regulation circuit is configured to alternate the bias voltage between a plurality of set points having a frequency of at least 100 kHz, preferably at least 130 kHz, the system according to any one of the preceding three embodiments. S10. The bias voltage varies up to 5 kV, preferably up to 3 kV, the system according to any one of the preceding four embodiments. S11. The system further includes a charged particle microscope, and the charged particle microscope includes the electrical component (2), the system according to any one of the preceding system embodiments. S12. The charged particle microscope is a transmission charged particle microscope, the system according to the preceding embodiment. S13. The charged particle microscope is an electron microscope, the system according to any one of the preceding two embodiments. S14. The charged particle microscope is a scanning electron microscope, the system according to any one of the preceding three embodiments. S15. The system according to any one of the preceding four embodiments, wherein the charged particle microscope is a transmission electron microscope. S16. The system according to any one of the preceding five embodiments, wherein the charged particle microscope is a scanning transmission electron microscope. S17. The system according to any one of the preceding six embodiments, wherein the charged particle microscope is an energy loss spectrometer. S18. The system according to embodiment S11, wherein the charged particle microscope is an ion-based microscope. S19. The system according to any one of the preceding eight embodiments, wherein the charged particle microscope includes a charged particle emitter configured to emit a beam of charged particles. S20. The system according to the preceding embodiments, wherein the charged particle microscope includes an imaging system configured to receive a beam of charged particles emitted by the charged particle emitter. S21. The system according to any one of the preceding ten embodiments, having the features of embodiment S4, wherein the charged particle microscope includes an offset drift tube. S22. The system according to the preceding two embodiments, wherein the imaging system includes an offset drift tube.

[0278] Hereinafter, method embodiments will be considered. These embodiments are abbreviated by the letter "M" followed by a number. Whenever reference is made herein to "method embodiments", these embodiments are meant. M1. A method of operating an electrical component (2), including providing a device (1) that at least partially surrounds at least a component portion (25) of the electrical component (2) around an axis (Z), thereby defining a region (3) therebetween, wherein the device (1) includes two members (15, 17), and wherein at least one of the members (15, 17) includes at least one varying characteristic (130, 150, 190) that varies along the axis (Z). M2. A method of operating a system, Providing a device (1) and an electrical component (2) such that the device (1) at least partially surrounds at least the component part (25) of the electrical component (2) around an axis (Z), thereby defining a region (3) therebetween. The device (1) includes two members (15, 17). A method, wherein at least one of the members (15, 17) includes at least one varying characteristic (130, 150, 190) that varies along the axis (Z). M3. The method according to any one of the preceding method embodiments, wherein the device (1) is configured according to any one of the preceding device embodiments. M4. The method according to any one of the preceding three embodiments, wherein the system is configured according to any one of the preceding system embodiments. M5. The method according to any one of the preceding method embodiments, wherein the method includes electrically connecting the device (1) to an electrical energy source. M6. Electrically connecting the device (1) to an electrical energy source includes electrically connecting each of the members (15, 17) to a respective one of the opposing terminals of the electrical energy source, according to the method described in the preceding embodiment. M7. Electrically connecting the device (1) to an electrical energy source includes electrically connecting the device (1) and the electrical component (2) to the same electrical energy source, according to any one of the preceding two embodiments. M8. The method according to any one of the preceding three embodiments, wherein the electrical energy source is a DC source. M9. The method according to any one of embodiments M5 - M7, wherein the electrical energy source is an AC source. M10. The method according to any one of the preceding method embodiments, wherein the device (1) includes the features of embodiment 2, and the method includes maintaining each of the members (15, 17) and one of the component ends (22, 24) at an equal potential. Method according to any one of the preceding method embodiments, wherein the device (1) comprises the features of embodiment 2 and the method comprises electrically connecting each of the members (15, 17) to one of the component ends (22, 24). Method according to any one of the preceding method embodiments, wherein the method comprises alternating the potential of the members (15, 17) between a plurality of set points. Method according to any one of the preceding method embodiments, wherein the method comprises alternating the potential of the members (15, 17) between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz. Method according to any one of the preceding method embodiments, wherein the method comprises alternating the potential of the electrical component (2). Method according to any one of the preceding method embodiments, wherein the method comprises synchronously alternating the potential of the members (15, 17) and the potential of the electrical component (2). Method according to any one of the preceding embodiments, wherein the device (1) comprises the features of embodiment 2 and the method comprises synchronously alternating the potential of the members (15, 17) and the potential of the electrical component (2), whereby the difference between the potential of each of the members (15, 17) and one of the respective component ends (22, 24) is minimized. Method according to any one of the two preceding embodiments, wherein the device (1) comprises the features of embodiment 2 and the method comprises synchronously alternating the potential of the members (15, 17) and the potential of the electrical component (2), whereby the difference between the potential of each of the members (15, 17) and one of the respective component ends (22, 24) is zero. Method wherein the method comprises using the device (1) to at least partially surround at least the component part (25) of the electrical component (2) around the axis (Z). Method according to any one of the preceding method embodiments, wherein the method comprises winding the device (1) around at least the component part (25) of the electrical component (2). The method according to the preceding embodiment, wherein the method includes aligning the device (1) and the electrical component (2) coaxially. The method according to any one of the preceding method embodiments, wherein the method includes reducing electromagnetic interference in an electrical circuit including the electrical component (2) by the device (1). The method according to any one of the preceding method embodiments, wherein the method includes electromagnetically shielding the electrical component (2) by the device (1). The method according to any one of the preceding method embodiments, wherein the method includes reducing the resistance-capacitance (RC) delay in an electrical circuit including the electrical component (2) by the device (1). The method according to any one of the preceding method embodiments, wherein the method includes reducing the influence caused by the capacitance between the electrical component (2) and the environment in which the electrical component (2) is disposed by the device (1). The method according to the preceding embodiment, wherein the capacitance between the electrical component (2) and the environment is an undesirable capacitance. The method according to any one of the preceding two embodiments, wherein the capacitance between the electrical component (2) and the environment includes stray capacitance or parasitic capacitance. The method according to any one of the preceding method embodiments, wherein the method includes using the device (1) in a charged particle microscope system including the electrical component (2). The method according to any one of the preceding method embodiments, wherein the electrical component is configured according to any one of Embodiments 173 to 184.

[0279] Hereinafter, embodiments of use will be considered. These embodiments are abbreviated by the letter "U" followed by a number. Whenever reference is made herein to "embodiments of use", these embodiments are meant. Use of the device according to any one of the preceding device embodiments for at least partially surrounding at least the component portion (25) of the electrical component (2) around the axis (Z). Use of a device according to any one of the preceding device embodiments for reducing electromagnetic interference in an electrical circuit. Use of a device according to any one of the preceding device embodiments as an electromagnetic shield. Use of a device according to any one of the preceding device embodiments for reducing resistance-capacitance (RC) delay in an electrical circuit. Use of a device according to any one of the preceding device embodiments in a charged particle microscope system. Use of a device according to any one of the preceding device embodiments in a voltage regulation circuit for providing a bias voltage to an offset drift tube of a charged particle microscope.

[0280] Hereinafter, further method embodiments will be considered. These embodiments are abbreviated by the letter "A" followed by a number. Whenever reference is made herein to "A" embodiments, these embodiments are meant. A1. A method comprising: providing a device model of a device (1) according to any one of the preceding device embodiments; using a data processing system to simulate a second potential (V2) within a region (3); and modifying the model of the device (1) depending on the second potential (V2). The method according to the preceding embodiment, wherein the method comprises manufacturing the device (1) according to the modified device model of the device (1). The method according to any one of the preceding two embodiments, wherein the method comprises providing a component model of an electrical component (2) including a first potential (V1) of the electrical component (2) along an axis (Z). Modifying the device model of the device (1) comprises: determining at least one variation characteristic (130, 150, 190) varying along an axis (Z) for at least one of the members (15, 17), according to any one of the preceding "A" embodiments. A5. The method includes determining at least one change characteristic (130, 150, 190) such that the difference between a first potential (V1) and a second potential (V1) is minimized, the method according to a preceding embodiment having the features of embodiment A3. A6. The method includes providing a voltage difference threshold value, and determining at least one change characteristic (130, 150, 190) such that the difference between a first potential (V1) and a second potential (V1) is less than the voltage difference threshold value, the method according to any one of the preceding two embodiments having the features of embodiment A3. A7. The method includes determining at least one change characteristic (130, 150, 190) such that the difference between an axial electric field parallel to an axis (Z) in a region (3) and a gradient of a first potential (V1) along the axis (Z) is minimized, the method according to any one of the preceding three embodiments having the features of embodiment A3. A8. The method includes providing a gradient difference threshold value, and determining at least one change characteristic (130, 150, 190) such that the difference between an axial electric field parallel to an axis (Z) in a region (3) and a gradient of a first potential (V1) along the axis (Z) is less than the electric field difference threshold value, the method according to any one of the preceding four embodiments having the features of embodiment A3. A9. The method includes determining at least one change characteristic (130, 150, 190) such that the influence caused by the capacitance between an electrical component (2) and a device (1) is minimized, the method according to any one of the preceding five embodiments. A10. The method includes providing a threshold value, and determining at least one change characteristic (130, 150, 190) such that the influence caused by the capacitance between an electrical component (2) and a device (1) is less than the threshold value, the method according to any one of the preceding six embodiments. The method according to any one of the preceding seven embodiments, comprising determining at least one change characteristic (130, 150, 190) such that the axial electric field parallel to the axis (Z) in the region (3) is uniform. A12. The method comprising providing an electric field dispersion threshold, and determining at least one change characteristic (130, 150, 190) such that the measure of the difference in the axial electric field parallel to the axis (Z) in the region (3) is less than the electric field dispersion threshold, according to any one of the preceding eight embodiments. A13. The method according to any one of the preceding nine embodiments, comprising determining at least one change characteristic (130, 150, 190) such that the radial electric field directed radially with respect to the axis (Z) in the region (3) is zero. A14. The method comprising providing a radial electric field threshold, and determining at least one change characteristic (130, 150, 190) such that the radial electric field directed radially with respect to the axis (Z) in the region (3) is less than the radial electric field threshold, according to any one of the preceding ten embodiments. A15. The method according to any one of the preceding "A" embodiments, comprising providing a device model such that the device (1) includes the features according to any one of embodiments 49 to 70. A16. Modifying the device model of the device (1) comprising determining the shape of at least one tooth (155, 175), according to the method described in the preceding embodiments. A17. Modifying the device model of the device (1) comprising determining the number of teeth (155, 175) included in each member (15, 17), according to any one of the preceding two embodiments. A18. Modifying the device model of the device (1) comprising determining the length of each tooth (155, 175) along the axis (Z), according to any one of the preceding three embodiments. The method according to any one of the preceding four embodiments, wherein modifying the device model of the device (1) includes determining the position along the axis (Z) of each tooth (155, 175). The method according to any one of the preceding five embodiments, wherein modifying the device model of the device (1) includes determining the position along the axis (Z) of each tooth (155, 175) with respect to the electrical component (2). The method according to any one of the preceding six embodiments, wherein modifying the device model of the device (1) includes determining the potential of each tooth (155, 175) as a function of the potential of the electrical component (2). The method includes providing a device model such that the device (1) includes any one of the features of Embodiment 71, and modifying the device model of the device (1) includes, for each tooth (155, 175), determining the respective tooth width (150) along the axis (Z), according to any one of the preceding "A" embodiments. The method includes providing a device model such that the device (1) includes any one of the features of Embodiment 79, and modifying the device model of the device (1) includes, for each tooth (155, 175), determining the respective tooth distance (190) along the axis (Z), according to any one of the preceding "A" embodiments. Providing a device model of the device (1) includes providing a device model such that the device (1) includes any one of the features of Embodiment 113, Modifying the device model of the device (1) depending on the second potential (V2) includes, for each ring (153, 173), determining the respective ring height (130), according to any one of the preceding "A" embodiments. The method according to any one of the preceding "A" embodiments, wherein modifying the device model of the device (1) includes determining the material of the device (1). Using a data processing system to simulate a second potential (V2) within a region (3), the method according to any one of the preceding "A" embodiments, including the data processing system performing a finite element method. Simulating a second potential (V2) in a region (3), the method according to any one of the preceding "A" embodiments, including determining the second potential (V2) at a plurality of points within the region (3). Simulating a second potential (V2) within a region (3), the method according to any one of the preceding "A" embodiments, including determining the second potential (V2) on a cross-section of the region (3), the cross-section being parallel to an axis (Z). Simulating a second potential (V2) within a region (3), the method according to any one of the preceding "A" embodiments, including determining the second potential (V2) on a part of a cross-section of the region (3), the cross-section being parallel to an axis (Z). The method according to the preceding embodiment, wherein the above part of the cross-section is a half cross-section part of the region (3).

Brief Description of the Drawings

[0281]

Figure 1

Figure 2

Figure 3a

Figure 3b

Figure 3c

Figure 4

Figure 5

Figure 6a

Figure 6b

Figure 7

Figure 8a

Figure 8b

Figure 9a

Figure 9b

Figure 10

Figure 11

Figure 12a

Figure 12b

Figure 13

Figure 14

Figure 15a

Figure 15b

Best Mode for Carrying Out the Invention

[0282] Exemplary embodiments of the present invention will be described below with reference to the drawings. These examples are provided to facilitate a further understanding of the present invention without limiting the scope of the present invention. Further, in the following description, a series of features and / or steps will be described. Those skilled in the art will understand that, unless required by the context, the order of the features and steps is not critical to the resulting configuration and its effects. Further, it will be apparent to those skilled in the art that, regardless of the order of the features and steps, there may be a time delay between some or all of the described steps.

[0283] The description of the figures will first provide a brief explanation of known electromagnetic shields and their problems before providing an explanation of exemplary embodiments of the present invention.

[0284] FIG. 1 shows a cross-section of an electrical component 2 surrounded by a typical electromagnetic shield 1' known in the art, which can be interchangeably referred to as shield 1' for simplicity. The shield 1' can surround the electrical component 2 such that a region 3 can be formed therebetween. FIG. 1 further shows the potential distribution within the region 3, where the dark regions indicate a higher potential than the bright regions. The above potential can be obtained, for example, using finite element method (FEM) analysis. It can be easily seen that the potential is higher around the first component end 22 (i.e., the upper component end 22) of the electrical component 2 than around the second component end 24 (i.e., the lower component end 24), as indicated by the darker color. In this specification, the terms "upper" and "bottom" refer to different positions along the axis Z, which can also be referred to as the axis of variation Z for reasons that will become clearer below.

[0285] During the operation of the electrical component 2, an electric field is generated by the electrical component 2, and this electric field may extend within the operating environment where the electrical component 2 is located. The above-mentioned operating environment can include environmental elements such as conductors, conductive surfaces, and / or circuit elements. Therefore, the electric field generated by the electrical component 2 may encounter the above-mentioned environmental elements that may exist within the operating environment. Similarly, the electric field generated by the environmental elements within the operating environment may encounter the electrical component 2.

[0286] As a result, a capacitance can be generated between the electrical component and the environmental elements within the operating environment. Generally, such capacitance is not desirable and is generally referred to as parasitic capacitance or stray capacitance. Parasitic capacitance may include adverse effects on the operation of the electrical component 2 and / or the electrical circuit including the electrical component 2. For example, parasitic capacitance may cause crosstalk between the electrical component 2 and the elements within the operating environment. In addition, it can cause resistance-capacitance delay, that is, RC delay, when changing the voltage applied to the electrical component 2 and / or when changing the voltage applied to the elements within the operating environment. For this reason, parasitic capacitance can be a major problem, especially in high-frequency circuits, and is often a limiting factor when increasing the operating frequency of high-frequency circuits.

[0287] As shown in FIG. 1, it is known that an electromagnetic shield can reduce crosstalk between the electrical component 2 and its operating environment. The electromagnetic shield 1' may be formed by a continuum or mesh of a conductive material that generates an enclosure. The shield 1' can generally be connected to ground (i.e., the reference point of the electrical circuit). Thereby, the entry and exit of the electromagnetic field into and out of the above-mentioned enclosure can be blocked (or significantly reduced). As shown in FIG. 1, by providing the electrical component 2 within the enclosure of the electromagnetic shield 1', the capacitance between the electrical component 2 and the environmental elements within the operating environment, and thus crosstalk, can be reduced and / or completely eliminated.

[0288] However, while the capacitance between the electrical component 2 and the environmental elements outside the enclosure of the shield 1' can be reduced or blocked by the use of the shield 1', a parasitic capacitance can still exist between the electrical component 2 and the shield 1' itself. That is, on the one hand, the use of the shield 1' can reduce the parasitic capacitance between the electrical component 2 and the environmental elements outside the enclosure of the shield 1'. However, on the other hand, the use of the shield 1' introduces a parasitic capacitance between the electrical component 2 and the shield 1' itself. Further, the electrical component 2 or a part thereof can include a potential different from that of the shield 1', and the shield 1' can typically be grounded. The potential difference charges and / or discharges the parasitic capacitor generated by the shield 1' and the electrical component 2, and as a result, introduces a delay when changing the voltage of the electrical component 2.

[0289] More specifically, the electrical component 2 can include a potential that varies along the axis Z. The said potential can also be referred to as the first potential V1 (see FIG. 11). For example, the potential at the upper component end 22 can be higher than the potential at the lower component end 24. Between the component ends 22, 24, the potential of the electrical component 2 can vary from a high voltage to a low voltage. For example, the electrical component 2 can be a resistor, and the potential of the electrical component 2 can gradually decrease from one of the component ends 22, 24 to the other. On the other hand, the shield 1' formed by a continuum or mesh of a conductive material can have a constant voltage as a whole. Accordingly, a part of the electrical component 2 can face a part of the shield 1', and these two can have different potentials.

[0290] This can be understood by looking at the potential along a line perpendicular to the axis Z in FIG. 1, for example. At the lower component end 24, the potential along the said line is constant. This is due to the fact that in this example, the shield 1' and the lower component end 24 are grounded. However, at the upper component end 22, the voltage along the said line decreases. The same also applies to other positions along the axis Z between the upper component end 22 and the lower component end 24.

[0291] Since the voltages of the electrical component 2 and the shield 1' can be different along at least a part of the electrical component 2 along the axis Z, the parasitic capacitors generated thereby are charged and / or discharged. For example, when increasing the voltage applied to the upper component end 22, there may be a delay between the time when the applied voltage is increased and the time when the voltage at the upper component end 22 becomes equal to the applied voltage due to the charging of the parasitic capacitance. The same applies when decreasing the voltage applied to the upper component end 22 for the discharge of the parasitic capacitance.

[0292] Embodiments of the present invention provide a device 1 that can be configured to reduce the influence of parasitic capacitance from an electrical component to its operating environment. This can reduce the RC delay and enable an increase in the operating frequency of the electrical circuit including the electrical component 2.

[0293] Generally, the electrical component 2 that can be used with the device 1 of the present invention can include a conductive path, and the voltage along the path can change when a current flows through it. In other words, the potential of the electrical component 1, called the first potential V1 (see FIG. 11), can vary along the axis Z. The axis Z can be parallel to the direction of the current flow through the electrical component 2. In other words, the axis Z can be parallel to the conductive path. The electrical component can extend substantially longitudinally along the axis Z. That is, the axis Z can be the longitudinal axis of the electrical component 2.

[0294] Generally, referring to all the figures, device 1 can include two members 15, 17. These can be individually referred to as the first member 15 and the second member 17, and collectively as members 15, 17. Members 15, 17 can be electrically insulated from each other. Thereby, members 15, 17 can be set to different electric potentials from each other. In other words, unlike the known electromagnetic shield 1' where the whole shield 1' is at the same electric potential, this device 1 includes two members 15, 17 each of which can have its own electric potential. For example, one of members 15, 17 can include a high voltage, and the other of members 15, 17 can include a low voltage. Preferably, each of members 15, 17 can have the same electric potential as one of the component ends 22, 24 of the electrical component 2 respectively.

[0295] Members 15, 17 can extend along the axis Z from both sides of device 1 towards the center of device 1, preferably beyond the center of device 1. Thus, members 15, 17 can extend from one side of device 1 to the other side of device 1 along the axis Z. Device 1 and electrical component 2 can be arranged relative to each other such that members 15, 17 having a higher electric potential can be aligned with component ends 22, 24 having a higher electric potential, and members 15, 17 having a lower electric potential can be aligned with component ends 22, 24 also having a lower first electric potential V1. In this way, the difference between the voltage in electrical component 2 and the voltage in device 1 at the same position along the axis can be made smaller compared to the prior art shield 1'. Therefore, simply by including two members 15, 17, device 1 can already provide the advantage of reducing the influence caused by the capacitance between electrical component 2 and device 1 compared to the prior art electromagnetic shield 1'.

[0296] However, while members 15 and 17 can contain different voltages from each other, they contain a certain voltage within themselves. That is, the voltage along the axis Z of each of the members 15 and 17 can be substantially constant. However, as described, the voltage of the electrical component 2 can vary along the axis Z. Therefore, the voltages at the component ends 22 and 24 can be the same as the voltages of the respective members 15 and 17, but the voltage along the electrical component 2 can be different from the voltages of the members 15 and 17.

[0297] For example, the voltage of the electrical component 2, which can be a resistor 2, can gradually decrease from the first component end 22 to the second component end 24. Therefore, the voltage of the electrical component 2 can be highest at the first component end 22 and lowest at the second component end 24. Thus, the first member 15 can contain the high voltage of the first component end 22, and the second member 17 can contain the low voltage of the second component end 24. Therefore, at the component ends 22 and 24, the voltage between the electrical component 2 and the device 1 can be made to match. However, at different positions between the component ends 22 and 24, the voltage between the electrical component 2 and the device 1 can be different. In particular, at a position closer to the first component end 22, the voltage of the electrical component 2 can be lower than the voltage of the device 1. Similarly, at a position closer to the second component end 24, the voltage of the electrical component 2 can be higher than the voltage of the device 1.

[0298] To further reduce the influence of the capacitance between the device 1 and the electrical component 2, the device 1 can be configured such that at least one of the members 15 and 17 can include at least one change characteristic 130, 150, 190 that can vary along the axis Z. The at least one change characteristic 130, 150, 190 can vary along the axis Z such that each of the members 15 and 17 can offset the influence of the other in a manner that varies along the axis Z.

[0299] Continuing with the above example, at a position closer to the first component end 22, the voltage of the electrical component 2 can be lower than the voltage of the first member 15, and thus, a first electric field can exist from the first member 15 towards the electrical component 2. However, at such a position, there can also exist a second member 17 that can have a voltage lower than that of the electrical component 2 at these positions. For this reason, a second electric field can exist from the electrical component 2 towards the second member 17. The first and second electric fields include opposite directions, i.e., directions opposite to each other. These electric fields also exist at a position closer to the second component end 24, but in a direction opposite to the direction described in the preceding sentence. Therefore, an object of the present invention can be to configure the members 15, 17, particularly at least one of the change characteristics 130, 150, 190, such that the first and second electric fields completely or at least largely cancel each other out at each position along the axis Z.

[0300] As will be understood by those skilled in the art, for each position along the axis Z, each of the electric fields can depend on the quantity (i.e., amount) of the respective members 15, 17 at that position along the axis Z, and the distance between the electrical component 2 and the respective members 15, 17 at that position along the axis Z. More specifically, how much these electric fields can cancel each other out can depend on the ratio between the amount of the first member 15 and the amount of the second member 17, and / or the ratio between the distance of the first member 15 from the electrical component 2 and the distance of the second member 17 from the electrical component 2.

[0301] Therefore, the variation characteristics 130, 150, 190 can be quantity parameters 130, 150 that can indicate the amount of each member 15, 17 included in the device 1 at a plurality of positions along the axis Z. Continuing with the above example, at the first component end 22, the device 1 can include only the first member 15. Since the first member 15 and the first component end 22 can be at the same voltage, the second member 17 may not be required. When moving along the axis Z towards the second component end 22, the voltage of the device 1 can drop, and thus the first electric field can appear. It can become stronger as the voltage of the device 1 drops along the axis Z. To cancel or reduce this electric field, the device 1 can include an increasing amount of the second member 17 along the axis Z. Ideally, the second electric field can coincide with the first electric field, and as a result, they can cancel each other out. At the second component end 24, the device 1 can include only the second member 17. Also in this case, since the second member 17 and the second component end 24 can be at the same voltage, the first member 15 may not be required. This is shown in FIGS. 3a to 9b.

[0302] Additionally or alternatively, the variation characteristics 130, 150, 190 can be a distance parameter 190 that can indicate the radial distance between each of the members 15, 17 measured radially with respect to the axis Z and the axis Z. Continuing with the above example, at the first component end 22, the device 1 can include a first member 15 that is closer to the electrical component 2 than the second member 17. The second member 17 may also not be present at the first component end 22 or may be sufficiently far away to have a negligible effect. As it moves along the axis Z towards the second component end 22, the voltage of the device 1 can drop, and thus a first electric field can appear. It can become stronger as the voltage of the device 1 drops along the axis Z. To cancel or reduce this electric field, the device 1 can be configured such that the distance between the first member 15 and the electrical component 2 can increase. This can lower the first electric field. Alternatively or additionally, the device 1 can be configured such that the distance between the second member 17 and the electrical component 2 can decrease. Thereby, the second electric field can be increased. Ideally, the second electric field can match the first electric field, and as a result, they can cancel each other out. This is shown in FIG. 10.

[0303] One skilled in the art will understand that the above embodiments are provided for illustrative purposes only to facilitate the understanding of the present invention. Generally, by changing the amount of at least one of the members 15, 17 along the axis Z and / or by changing the distance of at least one of the members 15, 17 along the axis Z, the influence of the capacitance between the electrical component 2 and the device 1 can be reduced, preferably (or ideally) canceled out.

[0304] In other words, at least one of the members 15 and 17 can be configured to include at least one variation characteristic 130, 150, 190 that varies along the axis Z so as to be able to reduce the influence of the capacitance between the electrical component 2 and the device 1. Ideally, the above influence can be completely offset. Through at least one variation characteristic 130, 150, 190, the device 1 can be configured such that the charging or discharging of the parasitic capacitor formed by the electrical component 2 and the device 1 is very small, and ideally there is no charging or discharging. Therefore, the device 1 cannot affect the rate of change of the potential of the electrical component 2. Therefore, even if there may be a capacitance between the electrical component 2 and the device 1, its influence is reduced and can ideally be offset.

[0305] The influence of the capacitance between the electrical component 2 and the device 1 can be a delay when changing the potential of the electrical component. The above delay can be caused by the charging and / or discharging of the capacitor. The above delay can include a resistance-capacitance delay. Alternatively or additionally, the influence of the capacitance between the electrical component 2 and the device 1 can be a reduction in the maximum operating frequency of the electrical circuit including the electrical component 2. Alternatively or additionally, the influence of the capacitance between the electrical component 2 and the device 1 can be the generation of a feedback current path between the input and output of the amplifier circuit, especially when the electrical component is used in an amplifier circuit. The above feedback current path may cause instability and / or parasitic oscillation in the amplifier.

[0306] Next, the present invention will be described with reference to the drawings.

[0307] Figure 2 shows a cross-section of the device 1 according to an embodiment of the present invention. The device 1 can surround the electrical component 2 such that the region 3 can be formed therebetween. Figure 2 further shows the potential distribution within the region 3, where the darker regions indicate a higher potential than the brighter regions. The above potential can be obtained, for example, using finite element method (FEM) analysis. Further, the above potential can also be referred to as the second potential V2 (see Figure 11). It can be easily seen that around the first component end 22 (which can also be called the upper component end 22) of the electrical component 2, the potential is higher than that around the second component end 24 (which can also be called the lower component end 24), as indicated by the darker color. In this specification, the terms "upper" and "bottom" refer to different positions along the axis Z, and the axis Z can also be called the varying axis Z for reasons that will become clearer below.

[0308] In this particular embodiment, the amounts of each of the members 15, 17 vary along the axis Z. As moving from the upper part to the lower part along the axis Z, it can be seen that the device 1 initially consists only of the first member 15, and then the amount thereof decreases while the amount of the second member 17 increases. Therefore, the potential in the region 3 decreases gradually along the axis Z, as indicated by the gradual increase in the luminance in the region 3.

[0309] As shown by the FEM analysis, the device 1 can significantly cancel out the radial electric field within the region 3 between the device 1 and the electrical component 2. In this specification, the radial electric field refers to the electric field directed perpendicular to the axis Z, that is, directed radially with respect to the axis Z. In addition, the device 1 can also homogenize the axial electric field in the region 3 between the device 1 and the electrical component 2. The axial electric field refers to the electric field directed parallel to the axis Z in this specification.

[0310] Referring now to Figures 3a - 3c, an embodiment of the device 1 including the members 15, 17 that can be configured as toothed members 15, 17 is shown. In particular, Figure 3a shows a perspective view of the device 1, Figure 3b shows a cut-away view, and Figure 3c shows the device 1 in an unrolled state.

[0311] Each of the members 15 and 17 can include respective teeth 155 and 175. In the illustrated example, each member includes five teeth, but this is merely illustrative. Each of the teeth can include a respective tooth width 150. The tooth width 150 of each tooth 155, 175 can vary along the axis Z. In the illustrated example, the tooth width 150 of each tooth 155, 175 varies linearly along the axis Z, but this is merely illustrative. Thus, the amount of each of the members 15 and 17 can vary along the axis. In other words, the tooth width 150 can be an example of the quantity parameters 130, 150 of the variation characteristics 130, 150, 190. In particular, in the illustrated example, the amount of the first member 15 decreases in the direction from the upper part to the lower part along the axis Z, and the amount of the second member 17 increases in the direction from the upper part to the lower part along the axis Z.

[0312] As shown in the figure, the members 15 and 17 can include meshing teeth 155 and 175. That is, each tooth 155, 175 can be disposed within the space between two adjacent teeth 155, 175 of the other member 15, 17. It will be understood that there may be some spacing (see FIG. 12b) at the boundary between the two members 15 and 17 that allows for electrical insulation between the two.

[0313] The device 1 can be changed from the unrolled state shown in FIG. 3c to the rolled state shown in FIG. 3a. In the latter state, the device 1 can include a through hole 19 and can be configured such that the through hole 19 can accommodate the electrical component 2. In this way, the device 1 can surround the electrical component 2. A region 3 can be formed therebetween. The region 3 can also refer to the boundary between the device 1 and the electrical component 2, that is, it will be understood that the device 1 can abut against the outer surface of the electrical component 2 and wrap around the electrical component 2. In this case, electrical insulation may be required between the electrical component 2 and the device 1.

[0314] The embodiment shown in FIG. 3 completely surrounds the entire electrical component 2 around the axis Z. However, this is not necessarily required.

[0315] Figure 4 shows another embodiment of device 1. As shown, device 1 can partially surround the entire electrical component 2 around axis Z. Otherwise, device 1 shown in Figure 4 can include any of the features described above with respect to device 1. Generally, such a solution may be inferior to the solution shown in Figure 3 with respect to reducing the effects caused by the capacitance between electrical component 2 and device 1.

[0316] Figure 5 shows a sectional view of another embodiment of device 1. As shown, device 1 can partially or completely surround the component portion 25 of electrical component 2 around axis Z. Otherwise, device 1 shown in Figure 5 can include any of the features described above with respect to device 1. Generally, such a solution may be inferior to the solution shown in Figure 3 with respect to reducing the effects caused by the capacitance between electrical component 2 and device 1.

[0317] Figures 6a and 6b show another embodiment of device 1. As shown, each of members 15, 17 includes ten teeth 155, 175 respectively. In other respects, device 1 shown in Figures 6a and 6b can include any of the features described above with respect to device 1. Generally, such a solution may be superior to the solution shown in Figure 3 with respect to reducing the effects caused by the capacitance between electrical component 2 and device 1. Generally, the more teeth 155, 175 the device includes, the better it can reduce the effects caused by the capacitance between electrical component 2 and device 1.

[0318] The embodiments shown in Figures 3 to 6b include triangular teeth. However, this is not always necessary. Typically, when electrical component 2 includes a voltage that varies linearly along axis Z (typically when electrical component 2 is resistor 2), triangular teeth may be advantageous.

[0319] FIG. 7 shows another embodiment of device 1. As shown, each of members 15, 17 includes teeth 155, 175 having curved edges. That is, the teeth 150 of each tooth 155, 175 vary non-linearly along axis Z. Otherwise, device 1 shown in FIG. 7 can include any of the features described above with respect to device 1. Generally, such a solution may be superior to the solution shown in FIG. 3 with respect to reducing the effects caused by the capacitance between electrical component 2 and device 1 when the voltage of electrical component 2 along the axis does not vary linearly.

[0320] FIGS. 8a and 8b show another embodiment of device 1. As shown, each of members 15, 17 includes only one tooth 155, 175 respectively. Further, teeth 155, 175 include right triangle shapes rather than both triangular shapes, but this is merely illustrative. In other respects, device 1 shown in FIGS. 8a and 8b can include any of the features described above with respect to device 1. Generally, such a solution may be inferior to the solution shown in FIG. 3 with respect to reducing the effects caused by the capacitance between electrical component 2 and device 1. However, it may be easier to manufacture.

[0321] Referring now to FIGS. 9a and 9b, another embodiment of device 1 is shown including members 15, 17 that can be configured as ring-shaped members 15, 17. In particular, FIG. 9a shows a perspective view of device 1, and FIG. 9b shows device 1 in an unrolled state.

[0322] Each of the members 15, 17 can include respective rings 153, 173. In the illustrated example, each member includes six rings, but this is merely exemplary. Each of the rings 153, 173 can include respective ring heights 130. The ring heights 130 of each of the rings 153, 173 can vary along the axis Z. In the illustrated example, the ring heights 130 of each of the rings 153, 173 vary strictly monotonically along the axis Z, but this is merely exemplary. Thus, the amount of each of the members 15, 17 can vary along the axis. In other words, the ring height 130 can be an example of the quantity parameters 130, 150 of the variation characteristics 130, 150, 190. In particular, in the illustrated example, the amount of the first member 15 decreases in the direction from the upper part to the lower part along the axis Z, and the amount of the second member 17 increases in the direction from the upper part to the lower part along the axis Z.

[0323] As shown in the figure, each of the rings 153, 173 can be arranged within the space between two adjacent rings 153, 173 of the other member 15, 17. It will be understood that there may be some spacing at the boundary between the two members 15, 17 that allows for electrical insulation between the two.

[0324] In other respects, the device 1 shown in FIGS. 9a and 9b can include any of the features described above with respect to the device 1.

[0325] Referring now to FIG. 10, another embodiment of the device 1 including toothed members 15, 17 is shown. Only the front teeth 155, 175 (as seen in the depicted perspective view) are hatched so as not to overburden the figure and / or so as not to reduce its comprehensibility. It will be understood that each of the members 15, 17 can also include teeth 155, 175 on the back side with respect to the depicted perspective view.

[0326] Each of the members 15, 17 can include respective teeth 155, 175. Each of the teeth 155, 175 can include respective tooth widths 150 that can be constant along the axis Z, but this is merely illustrative. Further, each of the teeth 155, 175 can include respective tooth distances 190 that can indicate the Euclidean distance between each of the respective teeth 155, 175 and the axis Z. The tooth distance 190 of each tooth 155, 175 can vary along the axis Z. In the illustrated example, the tooth distance 190 of each tooth 155, 175 varies linearly along the axis Z, but this is merely illustrative. Thus, the distance of each member 15, 17 can vary along the axis Z. In other words, the tooth distance 190 can be an example of the distance parameter 190 of the variation characteristics 130, 150, 190. In particular, in the illustrated example, the distance of the first member 15 increases in the direction from the upper part to the lower part along the axis Z, and the distance of the second member 17 decreases in the direction from the upper part to the lower part along the axis Z.

[0327] As shown in the figure, the members 15, 17 can include meshing teeth 155, 175. That is, each tooth 155, 175 can be arranged within the space between two adjacent teeth 155, 175 of the other member 15, 17. It will be understood that there may be some spacing at the boundary between the two members 15, 17 that can allow for electrical insulation between the two.

[0328] In other respects, the device 1 shown in FIG. 10 can include any of the features described above with respect to the device 1.

[0329] FIG. 11 is a graph showing the electrical component 2 and its vicinity and the electric potential in the device 1. In particular, FIG. 11 is a graph including a vertical axis indicating the position along the axis Z and a horizontal axis indicating the electric potential. In other words, FIG. 11 includes a plot of the electric potential with respect to the position along the axis Z.

[0330] The graph shows, with a dashed line, the electric potential in the electrical component 2 called the first electric potential V1. As can be seen from the figure, the first electric potential V1 decreases linearly along the axis. For example, the electrical component 2 can be a resistor 2.

[0331] Also in this case, the object of the present invention is to make the potential around the electrical component coincide with (ideally, be the same as) the first potential V1.

[0332] This graph shows the potential around the electrical component 2 when the device 1 of the present invention is used, indicated by the solid line. In particular, the graph shows the average potential within the region 3 along the axis Z, indicated by the solid line. This can be referred to as the second potential V2. Thus, the second potential V2 coincides with (i.e., is substantially the same as) the first potential V1.

[0333] This graph also shows the effective potential V3 of the device 1 by a dotted line. It will be understood that within the members 15, 17 of the device 1, the potential along the axis Z can be substantially constant. However, due to the canceling or averaging effect that the members 15, 17 can have on each other, the device 1 can include an effective potential V3 as shown in FIG. 11. In other words, by configuring the members 15, 17 as described above, the device 1 can similarly affect the electrical component 2 as if its potential along the axis Z were the same as the effective potential V3.

[0334] As can be noted, at the upper position along the axis Z corresponding to the position where the first component end 22 can be located, the effective potential V3 of the device 1 is maximum. It can be seen that the maximum values of V1 and V3 are the same, which can indicate that in this example, the first component end 22 and one of the members 15, 17 (for example, the first member 15) are electrically connected to the same voltage source. Further, when moving along the axis Z from the above upper position, the effective potential V3 of the device 1 does not change. This is due to the fact that in this region, the device 1 can be composed of only the first member 15 (see, for example, FIGS. 3a - 9b).

[0335] On the one hand, at a lower position along the axis Z (which may correspond to a position where the second component end 24 can be located), the effective potential V3 of the device 1 is at a minimum. Near the above-mentioned lower position, the effective potential V3 of the device 1 does not change. This is due to the fact that in this region, the device 1 can be composed of only the second member 17 (see, for example, FIGS. 3a to 9b).

[0336] Between these two regions, the effective potential V3 gradually changes from the maximum value to the minimum value that coincides with the first potential V1. Ideally, the members 15, 17 can be configured such that the effective potential V3 is the same as the first potential V1, because this will completely reduce the capacitance between the device 1 and the electrical component 2. However, satisfactory results can also be obtained with the effective potential V3 shown in FIG. 11.

[0337] FIGS. 12a and 12b show the material composition of the device 1.

[0338] As shown in FIG. 12a, the device 1 can include a conductive layer 104 that can be between the substrate layer 102 and the cover layer 106. The cover layer 106 and the substrate layer 102 can be non-conductive. For example, the substrate layer 102 and the cover layer 106 can be made of a non-conductive material such as a polyimide material. In some embodiments, the cover layer 106 and the substrate layer 102 can be the same. In some embodiments, the conductive layer 104 can be embedded on the substrate layer 102.

[0339] As shown in FIG. 12b, the conductive layer 104 can include two conductive layer portions 1045, 1047 that can be electrically insulated from each other. Each of the members 15, 17 can include one of the two conductive layer portions 1045, 1047 respectively. Further, the two conductive layer portions 1045, 1047 can be spaced apart from each other as indicated by the gap 1049. This can facilitate electrically insulating the two conductive layer portions 1045, 1047, and thus the two members 15, 17. The gap 1049 can have a width of at least 0.5 mm, for example 1 mm.

[0340] FIG. 13 shows an embodiment of a microscope system 3000 that can include the device 1 of the present invention. In particular, FIG. 13 shows a charged particle microscope system 3000 configured to use a charged particle beam B to observe and / or characterize a sample 3018. The charged particle beam B can include electrons or ions. In the particular case shown in FIG. 13, it includes electrons. Further, the microscope system 3000 shown in FIG. 13 can include a transmission microscope system 3000, and an image of the sample 3018 is taken using luminescence within the transmission region of the microscope system 3000. Thus, the microscope system 3000 can represent a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM).

[0341] As shown in FIG. 13, within a vacuum enclosure 3002, a variable particle emitter 3004, which in this case is an electron source 3004, can generate an electron beam B that can propagate along an electron optical axis B' (shown by a dashed line). The beam B can traverse an electron optical illuminator 3006 that can be configured to direct and / or focus the electron beam B onto a selected portion of the sample 3018. A deflector 3008 is also shown, which can be used (inter alia) to effect a scanning movement of the beam B.

[0342] The sample 3018 can be held on a sample holder 3016 that can be positioned in multiple degrees of freedom by a positioning device 3014. The latter can move a cradle 3014', in which the holder 3016 can be preferably removably attached. Thus, different portions of the sample 3018 can be irradiated, imaged, and / or inspected by the electron beam B moving along the axis B' (in the W direction). Also, the above movement(s) enable the execution of a scanning movement as an alternative to beam scanning.

[0343] The electron beam B interacts with the sample 3018 such that various types of “stimulated” radiation are emitted from the sample 3018. The “stimulated” radiation can include, for example, secondary electrons, backscattered electrons, X-rays, and optical radiation (cathodoluminescence). Optionally, one or more of these radiation types can be detected using an analysis device 3022, which can be, for example, a combined scintillator / photomultiplier tube or an EDX (energy-dispersive X-ray spectroscopy) module. However, alternatively or additionally, electrons passing through the sample 3018, exiting or radiating therefrom, and propagating along the axis B’ can be studied.

[0344] Such a transmitted electron beam can enter an imaging system 3024, which may also be referred to as an energy filter 3024. In particular, when the microscope system 3000 is used for electron energy loss spectroscopy, the imaging system 3024 may include an offset drift tube 3026. The offset drift tube 3026 may include a region in which a magnetic field (not shown) can be applied to the electron beam B. The magnetic field can be applied in a direction substantially parallel to the Y direction in the configuration shown in FIG. 13 such that the path of the electrons in the beam B curves within the plane shown in FIG. 13. The electrons can trace a substantially circular path under the influence of the magnetic force resulting from the interaction with the magnetic field B, and the radius of the circular path can be based on the velocity of the electrons. Faster electrons move on paths with larger radii. Thus, the electron beam is split along the X direction (the dispersion dimension in the configuration of FIG. 13) at the exit of the offset drift tube 3026 according to the velocity (and thus the energy) of the electrons.

[0345] In order to generate a magnetic field, a potential, which can be referred to as a drift tube bias voltage, can be applied to the offset drift tube 3026. In other words, the magnetic field generated by the offset drift tube 3026 depends on the drift tube bias voltage and also on the way the electron beam B is split along the X direction. Therefore, based on the drift tube bias voltage, a specific spectrum of the electron beam B can be incident on the electron sensor 3030 as will be described below. In order to acquire different parts of the spectrum, the bias voltage of the offset drift tube 3026 needs to be switched between setpoint voltages at a high frequency. The use of a linear amplifier as a driver for the offset drift tube 3026 can be advantageous but may require a high voltage / high ohmic resistor divider. The stray capacitance of the measuring resistor has been shown to be a limiting factor. The device 1 of the present invention can remove such a limitation.

[0346] The electrons emitted from the offset drift tube 3026 can then enter an imaging subsystem 3028 which may also include various electrostatic or magnetic lenses, deflectors, correctors (such as a stigmer) etc. The imaging subsystem 3028 can be configured to cause the spread of the electron beam B in the Y direction (the non-dispersive dimension in the configuration of FIG. 13), for example, as described above. Then, a two-dimensional electron spectrum 3100 representing the electron energy spectrum can be acquired by the electron sensor 3030. The electron sensor 3030 may include a direct or indirect detection sensor. The electron sensor 3030 may include a substantially two-dimensional light receiving portion including a plurality of pixels on which the two-dimensional electron spectrum acquired as the two-dimensional electron spectrum 3100 can be incident. The sensor 3030 may be configured to detect pixel locations where a number of electrons exceeding a threshold number are incident. This may correspond to the detection of electrons at that pixel location.

[0347] Figure 14 shows the respective step responses of the electrical circuit when changing for scenarios with different input voltages. In particular, Figure 14 shows the time behavior of the voltage of the electrical circuit including the electrical component 2 when the input voltage changes.

[0348] In each graph of Figure 14, the horizontal axis indicates time. For example, the horizontal axis of each graph can indicate the time from 0 to 100 microseconds after changing the input voltage, and each increment can indicate a time increment of 20 microseconds. The vertical axis can indicate the normalized offset voltage, for example, the difference between the instantaneous voltage and the applied voltage. Therefore, each graph of Figure 14 can show how quickly and well the voltage of the electrical circuit can be changed.

[0349] The upper graph in Figure 14 shows an ideal scenario. As shown therein, in the ideal scenario, the voltage of the electrical circuit can be changed instantaneously.

[0350] The middle and lower graphs in Figure 14 show the step responses of the offset drift tube (see Figure 13) when its bias voltage changes and when an amplifier circuit including a voltage divider circuit is used. The solid line, dashed line, and dotted line respectively show the step responses for different step sizes, that is, different changes in the input voltage from one level to another level. In the scenario corresponding to the middle plot, the device 1 of the present invention is not used. In the scenario corresponding to the lower plot, the device 1 of the present invention is used around the resistor of the voltage divider circuit (see Figure 15).

[0351] As shown by the middle plot, the behavior of the circuit is unstable, especially during the first 50 μs. During that time, high voltage peaks may be observed, which may damage the circuit. Only after about 100 μs does the voltage of the circuit stabilize. The complex frequency response observed in the middle plot is mainly due to the parasitic capacitance generated by the high-ohm resistor divider used together with the amplifier circuit to set the bias voltage of the offset drift tube.

[0352] As shown in the lower plot, the use of Device 1 stabilizes the voltage of the circuit in about 20 μs. Further, the response is very similar to a square response without any voltage peaks (such as shown in the upper plot).

[0353] Therefore, FIG. 14 shows how the use of Device 1 can reduce the effects caused by the parasitic capacitance in an electrical circuit.

[0354] FIGS. 15a and 15b show the electrical circuit in which Device 1 is used. In particular, FIG. 15a shows a perspective view of the entire circuit, and FIG. 15b shows an enlarged view of Device 1 surrounding the electrical component 2 of the electrical circuit. In the illustrated example, the electrical circuit can be a driver for an external electrical device such as an offset drift tube. That is, the illustrated electrical circuit can be configured to set and change the bias voltage of an external electrical device such as an offset drift tube. Further, the electrical component 2 surrounded by Device 1 can be a resistor 2 such as a high-ohm resistor 2.

[0355] Whenever relative terms such as "about", "substantially", or "approximately" are used in this specification, such terms should also be construed to include the exact term. That is, for example, "substantially straight" should be construed to include "(exactly) straight".

[0356] Whenever the steps are recited in the foregoing or further in the appended claims, it should be noted that the order in which the steps are recited in the text can be accidental. That is, unless otherwise specified or apparent to a person skilled in the art, the order in which the steps are recited can be accidental. That is, if this specification describes, for example, a method as including steps (A) and (B), this does not necessarily mean that step (A) precedes step (B), but it is also possible that step (A) is (at least partially) carried out simultaneously with step (B) or that step (B) precedes step (A). Further, if step (X) is described as preceding another step (Z), this does not mean that there are no steps between step (X) and step (Z). That is, step (X) preceding step (Z) encompasses the situation where step (X) is carried out immediately before step (Z), but also encompasses the situation where step (X) is carried out before one or more steps (Y1),..., that follow step (Z). Corresponding considerations apply when terms such as "after" or "before" are used.

[0357] In the foregoing, the preferred embodiments have been described with reference to the accompanying drawings, but those skilled in the art will understand that this embodiment is provided for illustrative purposes only and should never be construed as limiting the scope of the invention defined by the claims.

Claims

1. A device for use with an electrical component, the device is configured to at least partially surround at least a component portion of the electrical component around an axis, thereby defining a region therebetween, the device includes two members, at least one of the members includes at least one variation characteristic that varies along the axis such that the effect caused by the capacitance between the electrical component and the environment in which the electrical component is disposed is reduced, device.

2. The device according to claim 1, wherein the electrical component is a resistor.

3. The device according to claim 1, wherein the effect includes the charging time and / or the discharging time of the capacitor generated by the electrical component and the device.

4. The effect includes a time delay in the change from a first set voltage to a second set voltage, the potential of the electrical component, and / or the potential of an external electrical device electrically connected to the electrical component, The device according to claim 1.

5. Both members each include at least one variation characteristic that varies along the axis, the at least one variation characteristic of one of the members and the at least one variation characteristic of the other of the members are configured to increase monotonically in opposite directions along the axis, The device according to claim 1.

6. One of the at least one variation characteristics is a quantity parameter, the quantity parameter indicates the quantity of one of the two members included in the device at a plurality of positions along the axis, The device according to claim 1.

7. One of the at least one variation characteristics is a distance parameter, the distance parameter indicates the radial distance between one of the two members measured radially with respect to the axis and the axis, The device according to claim 1.

8. The device includes a first device end and a second device end that face each other and are at different positions along the axis, a first one of the members extends along the axis from the first device end past the center of the device and toward the second device end, a second one of the members extends along the axis from the second device end past the center of the device and toward the first device end. The device according to claim 1.

9. The device according to claim 1, wherein the member is configured such that any radial line perpendicular to the axis passes through at most one of the members.

10. At least one of the members comprises at least one tooth extending parallel to the axis, or Both of the members each include a plurality of teeth extending parallel to the axis. The device according to claim 1.

11. The device according to claim 10, wherein each tooth extends along the axis from a first half of the device to a second half of the device, and the first half and the second half of the device are separated by a plane perpendicular to the axis.

12. Each tooth includes a respective tooth width that extends in an azimuthal direction with respect to the axis, Each tooth is configured such that its respective tooth width tapers along the axis, One of the at least one change characteristic depends on the tooth width of at least one tooth. The device according to claim 10.

13. Each tooth includes a respective tooth distance from the axis measured radially with respect to the axis, Each tooth is configured such that its respective tooth distance varies monotonically along the axis, One of the at least one change characteristic depends on the tooth distance of at least one tooth. The device according to claim 10.

14. At least one of the members includes a plurality of rings, Each ring includes a respective ring height measured along the axis, The ring heights of the rings included in the same member vary monotonically along the axis, One of the at least one change characteristic depends on the ring height of at least one ring. The device according to claim 1.

15. The device according to any one of claims 1 to 14, and An electrical component, and includes The device is configured to at least partially surround at least a component portion of the electrical component around an axis, thereby defining a region therebetween. The device includes two members, At least one of the members includes at least one change characteristic that varies along the axis such that the influence caused by the capacitance between the electrical component and the environment in which the electrical component is disposed is reduced. System.

16. The system further includes an offset drift tube for use in a charged particle microscope, The electrical component is electrically connected to the offset drift tube, The offset drift tube includes a region through which a charged particle beam can pass, The offset drift tube is configured to generate a magnetic field in the region, The system according to claim 15.

17. A method of operating an electrical component, comprising: providing a device according to any one of claims 1 to 14, at least partially surrounding at least a component portion of the electrical component around an axis, thereby defining a region (3) therebetween; The device includes two members, at least one of the members includes at least one varying characteristic that varies along the axis such that an effect caused by a capacitance between the electrical component and an environment in which the electrical component is disposed is reduced, Method.

18. The electrical component includes two component ends that face each other and are at different positions along the axis, The method includes maintaining each member and one of the component ends at an equal potential, The method according to claim 17.

19. providing a device model of the device according to any one of claims 1 to 14; simulating a second potential within the region using a data processing system; modifying the device model of the device depending on the second potential; Method.

20. Modifying the device model of the device includes determining, for at least one of the members, at least one varying characteristic that varies along the axis, the method according to claim 19.

Images