3D profilometry with Linnik interferometer

Abstract

Systems and methods for generating volumetric data are disclosed that can scan a sample at multiple focal planes located along the depth of the sample. A detector in a metrology subsystem can generate multiple images of a volumetric field of the sample at the multiple focal planes. The systems and methods can aggregate the multiple images to generate volumetric data for the volumetric field of the sample. The metrology subsystem can include a Linnik interferometer.

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