Ultrasonic inspection equipment probe module

Abstract

The present invention relates to a probe module for an ultrasonic inspection device, and includes a lower probe module disposed under a target object, the lower probe module including: a lower housing; a lower transducer disposed in the lower housing and capable of generating or receiving ultrasonic waves from a lower portion of the target object toward the target object; a lower water jacket having an internal space into which one side of the lower transducer can be inserted and in which the internal space is filled with liquid; and a lower liquid injector configured to inject liquid into the internal space of the lower water jacket.

Description

[Technical Field]

[0001] The present invention relates to a probe module of an ultrasonic inspection device, and more particularly to a probe module of an ultrasonic inspection device including a lower probe module that is disposed below a target object and generates ultrasonic waves from the lower portion of the target object toward the target object to inspect the target object. [Background technology]

[0002] An ultrasonic inspection device is a device that irradiates an object with ultrasonic waves through a probe module, receives reflected or transmitted ultrasonic waves at the probe module, and creates an image. Ultrasonic inspection devices can detect minute defects, so they require high resolution.

[0003] The ultrasonic inspection method using an ultrasonic inspection device requires a transmission medium for transmitting ultrasonic waves. To prevent attenuation of the ultrasonic waves, a liquid is used as the ultrasonic transmission medium, and water is a commonly used liquid.

[0004] In a conventional ultrasonic inspection method, a water tank is filled with water, a product is placed in the water, and a probe module is positioned above the product, so that the product can be inspected while a certain portion of the product is immersed in the water.

[0005] However, conventional ultrasound inspection devices with a probe module mounted on the top of a target object have the following problems: In conventional ultrasound inspection devices, the probe module, which radiates ultrasound and receives reflected signals, is positioned in only one direction, such as on the top of the target object.

[0006] In a conventional ultrasound inspection device, a probe module is disposed above an object, so that an inspection is performed on the upper part of the object. However, if an inspection is performed only on the upper part of an object that requires inspection of both the upper and lower parts, there is a problem in that after scanning the upper part of the object, the lower part of the object must be scanned by flipping and moving the object.

[0007] If an inspection is performed using an ultrasound inspection device equipped with a probe module only on the upper part of the object, the process time is lengthened due to the inversion and movement of the object.Furthermore, when the alignment is performed by inverting and moving the object after scanning the upper part of the object, position alignment tolerance occurs, which makes it impossible to perform linked processing between the signal processing data scanned on the upper and lower parts of the object.

[0008] In addition, if air bubbles are mixed in water, which is an ultrasonic wave transmission medium of an ultrasonic inspection device, the air bubbles may cause ultrasonic attenuation. However, conventional ultrasonic inspection devices have a problem in that they do not include a separate device for removing air bubbles from the water supplied as a transmission medium. Summary of the Invention [Problem to be solved by the invention]

[0009] The present invention is directed to solving the above-mentioned problems, and more specifically, provides a probe module for an ultrasound inspection device including a lower probe module that is disposed below an object and generates ultrasound waves from the lower part of the object toward the object to inspect the object. [Means for solving the problem]

[0010] In order to solve the above-mentioned problems, the probe module of the ultrasonic inspection device of the present invention is a probe module of the ultrasonic inspection device that inspects an object using ultrasonic waves, and includes a lower probe module disposed under the object, the lower probe module including: a lower housing; a lower transducer disposed in the lower housing and capable of generating ultrasonic waves from a lower portion of the object toward the object or receiving ultrasonic waves; a lower water jacket having an internal space into which one side of the lower transducer can be inserted, the internal space being filled with liquid; and a lower liquid injector that injects liquid into the internal space of the lower water jacket.

[0011] In order to solve the above-mentioned problems, the lower liquid injection unit of the probe module of the ultrasonic inspection apparatus of the present invention may include a lower nozzle communicating with an internal space of the lower water jacket and through which the liquid moves, and a lower bubble discharge hole communicating with the lower nozzle.

[0012] In order to solve the above-mentioned problems, the lower bubble discharge hole of the probe module of the ultrasonic inspection device of the present invention may include a first bubble discharge hole that is connected to the lower nozzle and extends to an upper portion of the lower nozzle, and a second bubble discharge hole that is connected to the first bubble discharge hole and extends while forming a horizontal or downward slope at one end of the first bubble discharge hole.

[0013] In order to solve the above-mentioned problems, the lower nozzle of the probe module of the ultrasonic inspection apparatus of the present invention is provided with a lower mesh filter.

[0014] In order to solve the above-mentioned problems, the lower nozzle of the probe module of the ultrasonic inspection apparatus according to the present invention may include a lower fine nozzle part having a plurality of fine pipes.

[0015] In order to solve the above-mentioned problems, a lower buffer space having a diameter equal to or larger than the diameter of the lower fine nozzle portion may be provided between the point where the lower nozzle and the internal space of the lower water jacket of the probe module of the ultrasonic inspection device of the present invention are connected and the lower fine nozzle portion.

[0016] In order to solve the above-mentioned problems, the probe module of the ultrasonic inspection device of the present invention further includes a liquid supply unit connected to the lower liquid injector, and the liquid supply unit includes a liquid storage tank having a space therein in which liquid can be stored, a liquid injector for injecting liquid into the liquid storage tank, a liquid discharge unit for discharging liquid from the liquid storage tank, and a bubble discharge hole extending from an upper portion of the liquid storage tank to the outside, and the liquid discharge unit may include a fine nozzle unit having a plurality of fine pipes.

[0017] In order to solve the above-mentioned problems, the probe module of the ultrasonic inspection apparatus of the present invention further includes an upper probe module disposed on an upper portion of a target object, and the upper probe module may include: an upper housing; an upper transducer disposed in the upper housing and capable of generating or receiving ultrasonic waves from an upper portion of the target object toward the target object; an upper water jacket having an internal space into which one side of the upper transducer can be inserted, the internal space being filled with liquid; and an upper liquid injector configured to inject liquid into the internal space of the upper water jacket.

[0018] In order to solve the above-mentioned problems, the upper liquid injection part of the probe module of the ultrasonic inspection device of the present invention may include an upper nozzle that is connected to the inner space of the upper water jacket and through which the liquid moves, and the upper water jacket may include an upper bubble discharge hole that extends upward from the inner space of the upper water jacket.

[0019] In order to solve the above-mentioned problems, the upper liquid inlet of the probe module of the ultrasonic inspection apparatus of the present invention may include an upper nozzle communicating with an internal space of the upper water jacket and through which the liquid moves, and an upper bubble discharge hole communicating with the upper nozzle.

[0020] In order to solve the above-mentioned problems, the upper nozzle of the probe module of the ultrasonic inspection apparatus of the present invention may be provided with a mesh filter.

[0021] In order to solve the above-mentioned problems, the upper nozzle of the probe module of the ultrasonic inspection apparatus according to the present invention may include an upper fine nozzle portion having a plurality of fine pipes.

[0022] In order to solve the above-mentioned problems, an upper buffer space having a diameter equal to or larger than the diameter of the upper fine nozzle portion may be provided between the point where the upper nozzle and the internal space of the upper water jacket of the probe module of the ultrasonic inspection device of the present invention are connected and the upper fine nozzle portion.

[0023] In order to solve the above-mentioned problems, the probe module of the ultrasonic inspection device of the present invention further includes a liquid supply unit connected to the upper liquid inlet unit, the liquid supply unit including a liquid storage tank having a space therein for storing liquid, a liquid inlet unit for injecting liquid into the liquid storage tank, a liquid outlet unit for discharging liquid from the liquid storage tank, and a bubble outlet hole extending from an upper portion of the liquid storage tank to the outside, and the liquid outlet unit may include a fine nozzle unit having a plurality of fine pipes. [Effects of the Invention]

[0024] The present invention relates to a probe module of an ultrasonic inspection device, and has an advantage that the lower part of the object can be inspected without inverting or moving the object through the lower probe module that is disposed under the object and generates ultrasonic waves from the lower part of the object toward the object to inspect the object.

[0025] In addition, the present invention has the advantage that the lower and upper parts of the object can be inspected without inverting or moving the object by performing inspection at the lower and upper parts of the object through the lower probe module and the upper probe module, thereby reducing the process time.

[0026] In addition, the present invention has the advantage that the lower and upper parts of the object can be inspected without inverting or moving the object by performing inspection at the lower and upper parts of the object through the lower probe module and the upper probe module, and thus the signal processing data scanned at the upper and lower parts of the object can be linked without positional alignment tolerance.

[0027] In addition, the present invention has the advantage of preventing ultrasonic attenuation caused by bubbles by forming bubble exhaust holes that can remove bubbles in the lower probe module and the upper probe module. [Brief explanation of the drawings]

[0028] [Figure 1] 3 is a view showing a lower probe module and an upper probe module in a measurement state according to an embodiment of the present invention; [Figure 2] 1 is a view showing a lower probe module and an upper probe module in a measurement standby state according to an embodiment of the present invention; [Figure 3] 4 is a diagram illustrating water movement paths in a lower probe module and an upper probe module according to an embodiment of the present invention. [Figure 4] 1 is a view showing a lower probe module according to an embodiment of the present invention; [Figure 5] 1 is a view showing a lower liquid injector according to an embodiment of the present invention; [Figure 6] 1 is a view showing an upper probe module according to an embodiment of the present invention; [Figure 7] 1 is a view showing an upper liquid injection unit according to an embodiment of the present invention. [Figure 8] 1 is a view showing a liquid supply unit connected to an upper water jacket and a lower water jacket according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0029] Various embodiments of the present invention will now be described with reference to the accompanying drawings. While various modifications and variations of the present invention are possible, specific embodiments are illustrated in the drawings and described in the associated detailed description. However, this is not intended to limit the various embodiments of the present invention to the specific embodiments, and it should be understood that the various embodiments of the present invention include all modifications and / or equivalents or alternatives falling within the spirit and technical scope of the various embodiments of the present invention. In connection with the description of the drawings, similar reference numerals are used for similar components.

[0030] The terms "comprise" or "may comprise," as used in various embodiments of the present invention, indicate the presence of the disclosed feature, operation, or component, etc., and do not limit the presence of one or more additional features, operations, or components, etc. Furthermore, in various embodiments of the present invention, it should be understood that the terms "comprise" or "have" are intended to specify the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not preclude the presence or possible addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0031] When a component is referred to as being "coupled" to another component, it should be understood that the component may be directly coupled to the other component, but that there may be other components between the component and the other component. On the other hand, when a component is referred to as being "directly coupled" or "directly connected" to another component, it should be understood that there are no other components between the component and the other component.

[0032] The terms used in the various embodiments of the present invention are used only to describe specific embodiments and are not intended to limit the various embodiments of the present invention. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0033] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of this invention belong.

[0034] Terms defined in commonly used dictionaries should be construed to have a meaning consistent with the contextual meaning of the relevant art, and should not be construed as idealized or overly formal unless expressly defined in various embodiments of the present invention.

[0035] The present invention relates to a probe module for an ultrasonic inspection device, and more particularly to a probe module for an ultrasonic inspection device including a lower probe module disposed below a target object and generating ultrasonic waves from the lower portion of the target object toward the target object to inspect the target object. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0036] The probe module of the ultrasound inspection apparatus according to the embodiment of the present invention is for inspecting the object 10, and can inspect the object 10 by irradiating ultrasound to the object 10 and receiving reflected or transmitted ultrasound in the probe module. The object 10 can be any of a variety of products that can be subjected to ultrasound inspection.

[0037] A probe module of an ultrasound inspection apparatus according to an embodiment of the present invention includes a lower probe module 100 disposed under a target object 10. Referring to Figures 1 and 2, the lower probe module 100 includes a lower housing 110, a lower transducer 120, a lower water jacket 130, and a lower liquid injector 140.

[0038] The lower housing 110 also serves as a housing for the lower probe module 100. The lower housing 110 is provided on the upper part of the target object 10, and the lower housing 110 includes the lower transducer 120. The lower housing 110 is connected to a moving device and is movable in the x, y, and z directions.

[0039] In a measurement state for inspecting the object 10 as shown in FIG. 1, the lower housing 110 may move toward the object 10. In addition, in a measurement standby state as shown in FIG. 2, the lower housing 110 may move away from the object 10.

[0040] According to an embodiment of the present invention, the lower housing 110 may be moved, and the position of the lower transducer 120 provided in the lower housing 110 may be moved.

[0041] The lower transducer 120 is provided in the lower housing 110 and can generate or receive ultrasonic waves from the lower portion of the target object 10 toward the target object 10. The lower transducer 120 is a device that can generate ultrasonic waves, and ultrasonic waves can be irradiated from the lower portion of the target object 10 through the lower transducer 120.

[0042] Also, ultrasonic waves may be received through the lower transducer 120. Specifically, the lower transducer 120 may receive ultrasonic waves entering the lower transducer 120 while functioning as a receiver.

[0043] The lower water jacket 130 has an internal space into which one side of the lower transducer 120 can be inserted, and the internal space of the lower water jacket 130 can be filled with liquid.

[0044] A transmission medium is required to transmit the ultrasound waves generated by the lower transducer 120 to the target object 10, and the transmission medium may be a liquid. The internal space of the lower water jacket 130 is filled with the transmission medium made of a liquid, and the transmission medium may be water. The following description will be focused on the case where the transmission medium is water.

[0045] One side of the lower transducer 120 may be disposed in the internal space of the lower water jacket 130. The lower water jacket 130 includes a lower outlet 131, which is also a through-hole formed inside the lower water jacket 130 in a direction toward the target object 10.

[0046] According to an embodiment of the present invention, an inspection can be performed without immersing the target in a liquid, which is a transmission medium for transmitting ultrasound, by spraying the liquid onto the target through the lower water jacket 130. Specifically, the liquid is sprayed through the lower outlet 131 of the lower water jacket 130, and ultrasound can be transmitted to the target 10 using the sprayed liquid as a transmission medium.

[0047] The ultrasonic waves generated by the lower transducer 120 may be irradiated onto the target object 10 through the lower outlet 131. Referring to FIG. 3, water filled in the internal space of the lower water jacket 130 is also discharged through the lower outlet 131 of the lower water jacket 130.

[0048] The water is also a transmission medium for transmitting ultrasound, and water is discharged through the lower discharge portion 131, and ultrasound generated by the lower transducer 120 can be irradiated to the target object 10 through the water discharged through the lower discharge portion 131.

[0049] The water discharged through the lower discharge part 131 is moved to a water tank 160 provided outside the lower housing 110, and the water moved to the water tank 160 can be moved to the lower liquid inlet part 140 described later via a pump or the like.

[0050] 4, the lower liquid injector 140 is capable of injecting liquid into the internal space of the lower water jacket 130. The lower liquid injector 140 is connected to a hose extending to the outside, and liquid may flow to the lower liquid injector 140 through the hose.

[0051] The liquid that has moved to the lower liquid injector 140 passes through the lower liquid injector 140 and moves into the internal space of the lower water jacket 130. Here, the liquid that passes through the lower liquid injector 140 and is injected into the internal space of the lower water jacket 130 is also water.

[0052] Referring to FIG. 5, the lower liquid injector 140 according to the embodiment of the present invention includes a lower nozzle 141 and a lower bubble discharge hole 150.

[0053] The lower nozzle 141 is also a nozzle through which liquid moves, communicating with the inner space of the lower water jacket 130. The lower nozzle 141 is a nozzle provided inside the lower liquid injector 140, and water may be injected into the lower water jacket 130 through the lower nozzle 141.

[0054] The lower bubble discharge hole 150 is connected to the lower nozzle 141. Specifically, the lower bubble discharge hole 150 is a hollow tube provided on the upper portion of the lower nozzle 141, and one end of the lower bubble discharge hole 150 may be connected to the lower nozzle 141.

[0055] The lower bubble discharge hole 150 is for removing bubbles from the water flowing through the lower nozzle 141. The water flowing through the lower nozzle 141 is a transmission medium for transmitting the ultrasonic waves generated by the lower transducer 120, and if bubbles are formed in the water stored in the lower nozzle 141, the ultrasonic waves may be attenuated by the bubbles.

[0056] The lower air bubble discharge hole 150 is provided to prevent this, and is located above the lower nozzle 141, and can remove air bubbles from the water moving through the lower nozzle 141 through the lower air bubble discharge hole 150.

[0057] Specifically, when bubbles are generated in water, the bubbles move to the top of the water and are discharged through the lower gas discharge hole 150 provided above the lower nozzle 141, thereby removing the bubbles from the water passing through the lower nozzle 141.

[0058] 4 and 5, the lower bubble discharge hole 150 includes a first bubble discharge hole 151 and a second bubble discharge hole 152. The first bubble discharge hole 151 is connected to the lower nozzle 141 and extends to an upper portion of the lower nozzle 141, so that the first bubble discharge hole 151 may extend vertically from the upper portion of the lower nozzle 141.

[0059] The second bubble discharge hole 152 is connected to the first bubble discharge hole 151 and extends horizontally or inclined downward from one end of the first bubble discharge hole 151. Referring to Figures 3 and 4, water can be discharged from the lower discharge portion 131 of the lower water jacket 130.

[0060] In this case, if the lower air bubble discharge holes 150 include only the vertically extending first air bubble discharge holes 151, water discharged from the lower discharge part 131 may flow into the lower air bubble discharge holes 150. If water flows into the lower air bubble discharge holes 150, it becomes difficult to remove air bubbles from the water moving through the lower liquid inlet part 140 via the lower air bubble discharge holes 150.

[0061] To prevent this, the second bubble discharge hole 152 extends horizontally or inclined downward from one end of the first bubble discharge hole 151. Since the second bubble discharge hole 152 extends horizontally or inclined downward from one end of the first bubble discharge hole 151, water discharged from the lower discharge part 131 can be prevented from flowing into the lower bubble discharge hole 150.

[0062] 5, the lower nozzle 141 may be provided with a lower mesh filter 142. The lower mesh filter 142 may filter out foreign matter present in the water flowing through the lower nozzle 141.

[0063] 5, the lower nozzle 141 includes a lower fine nozzle part 143 having a plurality of fine pipes. The lower fine nozzle part 143 has a plurality of fine pipes, and water moving through the lower nozzle 141 passes through the lower fine nozzle part 143.

[0064] Here, the plurality of fine pipes provided in the lower fine nozzle part 143 may extend in the same direction, parallel to the direction in which the lower nozzle 141 extends.

[0065] The lower fine nozzle part 143 is for forming a laminar flow. When the water moving through the lower nozzle 141 passes through the lower fine nozzle part 143, the water moves through the lower fine nozzle part 143 while forming a laminar flow.

[0066] The water passing through the lower nozzle 141 and flowing into the inner space of the lower water jacket 130 also serves as a transmission medium for transmitting the ultrasonic waves generated by the lower transducer 120 .

[0067] If turbulent flow occurs in the water passing through the lower nozzle 141 and flowing into the inner space of the lower water jacket 130, it is difficult for the lower transducer 120 to accurately irradiate the ultrasonic waves to the designated position of the target object 10.

[0068] The lower fine nozzle unit 143 is provided to prevent this. The water moving through the lower nozzle 141 moves through the lower fine nozzle unit 143 while forming a laminar flow, and through this, the ultrasonic waves generated by the lower transducer 120 can be accurately irradiated to a designated position of the target object 10.

[0069] Referring to FIG. 5, a lower buffer space 144 having a diameter equal to or larger than the diameter of the lower fine nozzle portion 143 may be provided between the point where the lower nozzle 141 and the internal space of the lower water jacket 130 are connected and the lower fine nozzle portion 143.

[0070] Specifically, the water flowing into the lower nozzle 141 passes through the lower fine nozzle part 143 having a plurality of fine pipes, and then passes through the lower buffer space 144 having no fine pipes, and flows into the lower water jacket 130.

[0071] The lower buffer space 144 is a space for preventing laminar flow water from mixing with each other. When the water passing through the lower fine nozzle part 143 directly flows into the lower water jacket 130, the water movement space expands and the laminar flow water can mix with each other.

[0072] In addition, if the diameter of the point where the lower nozzle 141 and the inner space of the lower water jacket 130 are connected is smaller than the diameter of the lower fine nozzle portion 143, some of the water forming a laminar flow may hit the wall.

[0073] The purpose of the lower buffer space 144 is to prevent this. The water that has passed through the lower fine nozzle unit 143, which has a plurality of fine pipes, passes through the lower buffer space 144, which does not have a plurality of fine pipes, and flows into the lower water jacket 130, thereby preventing the water that forms laminar flow from mixing with each other.

[0074] In the above description, it has been explained that the lower air bubble discharge hole 150 and the lower liquid injection part 140 of the lower water jacket 130 are provided with the lower mesh filter 142, the lower fine nozzle part 143, and the lower buffer space 144. However, if necessary, the lower air bubble discharge hole 150, the lower mesh filter 142, the lower fine nozzle part 143, and the lower buffer space 144 may not be provided.

[0075] The probe module of the ultrasound inspection apparatus according to the embodiment of the present invention may further include an upper probe module 200 disposed on the upper part of the object 10. That is, the probe module of the ultrasound inspection apparatus according to the embodiment of the present invention can simultaneously inspect the upper and lower parts of the object 10 via the lower probe module 100 disposed on the lower part of the object 10 and the upper probe module 200 disposed on the upper part of the object 10.

[0076] 1 and 2, the upper probe module 200 includes an upper housing 210, an upper transducer 220, an upper water jacket 230, and an upper liquid injection unit 240.

[0077] The upper housing 210 also serves as a housing for the upper probe module 200. The upper housing 210 is provided on the upper part of the target object 10, and the upper transducer 220 is provided in the upper housing 210. The upper housing 210 is connected to a moving device and is movable in the x, y, and z directions.

[0078] 1, in a measurement state for inspecting the target object 10, the upper housing 210 may move in a direction approaching the target object 10. Also, in a measurement standby state as shown in FIG. 2, the upper housing 210 may move in a direction away from the target object 10.

[0079] According to an embodiment of the present invention, the upper housing 210 may be moved, and the position of the upper transducer 220 provided in the upper housing 210 may be moved.

[0080] The upper transducer 220 is provided in the upper housing 210 and can generate ultrasound waves from above the target object 10 toward the target object 10. The upper transducer 220 can generate or receive ultrasound waves. The upper transducer 220 is a device that can generate ultrasound waves, and can irradiate ultrasound waves from above the target object 10 through the upper transducer 220.

[0081] Also, ultrasonic waves may be received through the upper transducer 220. Specifically, the upper transducer 220 may receive ultrasonic waves entering the upper transducer 220 while functioning as a receiver.

[0082] The upper water jacket 230 has an internal space into which one side of the upper transducer 220 can be inserted, and the internal space of the upper water jacket 230 can be filled with liquid.

[0083] A transmission medium is required to transmit the ultrasound waves generated by the upper transducer 220 to the target object 10, and the transmission medium may be a liquid. The internal space of the upper water jacket 230 is filled with the transmission medium made of a liquid, and the transmission medium may be water. The following description will be focused on the case where the transmission medium is water.

[0084] One side of the upper transducer 220 may be disposed in the internal space of the upper water jacket 230. The upper water jacket 230 includes an upper discharge part 231, which is also a through-hole formed inside the upper water jacket 230 in a direction toward the target object 10.

[0085] According to an embodiment of the present invention, the target object is not immersed in a liquid, which is a transmission medium for transmitting ultrasound, but the inspection can be performed by spraying the liquid onto the target object through the upper water jacket 230. Specifically, the liquid is sprayed through the upper outlet 231 of the upper water jacket 230, and ultrasound can be transmitted to the target object 10 using the sprayed liquid as a transmission medium.

[0086] The ultrasonic waves generated by the upper transducer 220 may be irradiated onto the target object 10 through the upper outlet 231. Referring to Fig. 3, water filled in the internal space of the upper water jacket 230 is also discharged through the upper outlet 231 of the upper water jacket 230.

[0087] The water is also a transmission medium for transmitting ultrasound, and water is discharged through the upper discharge part 231, and ultrasound generated by the upper transducer 220 can be irradiated to the target object 10 through the water discharged through the upper discharge part 231.

[0088] The water discharged through the upper discharge part 231 is moved to a water tank 160 provided outside the upper housing 210, and the water moved to the water tank 160 can be moved to the upper liquid inlet part 240 described later via a pump or the like.

[0089] 6, the upper liquid injector 240 may inject liquid into the internal space of the upper water jacket 230. The upper liquid injector 240 may be connected to a hose extending to the outside, and liquid may flow to the upper liquid injector 240 through the hose.

[0090] The liquid that has moved to the upper liquid injector 240 passes through the upper liquid injector 240 and moves into the internal space of the upper water jacket 230. Here, the liquid that passes through the upper liquid injector 240 and is injected into the internal space of the upper water jacket 230 is water.

[0091] Referring to FIG. 7, the upper liquid injector 240 according to the embodiment of the present invention includes an upper nozzle 241 and an upper bubble discharge hole 250.

[0092] The upper nozzle 241 is also a nozzle through which liquid moves, communicating with the inner space of the upper water jacket 230. The upper nozzle 241 is a nozzle provided inside the upper liquid injector 240, and water can be injected into the upper water jacket 230 through the upper nozzle 241.

[0093] The upper bubble discharge hole 250 is provided in the upper water jacket 230 and extends from the inner space of the upper water jacket 230 .

[0094] Specifically, the upper bubble discharge hole 250 may be a hollow pipe provided on the upper part of the upper water jacket 230 , and one end of the upper bubble discharge hole 250 may be connected to the upper water jacket 230 .

[0095] The upper bubble discharge hole 250 is for removing bubbles from the water stored in the inner space of the upper water jacket 230. The water stored in the upper water jacket 230 is a transmission medium for transmitting the ultrasonic waves generated by the upper transducer 220, and if bubbles are formed in the water stored in the upper water jacket 230, the ultrasonic waves may be attenuated by the bubbles.

[0096] The upper air bubble discharge hole 250 is provided to prevent this, and water bubbles stored in the upper water jacket 230 can be removed through the upper air bubble discharge hole 250 .

[0097] Specifically, when bubbles are generated in water, the bubbles move to the top of the water and are discharged through the upper gas discharge hole 250 provided at the top of the upper nozzle 241, thereby removing the bubbles from the water passing through the upper nozzle 241.

[0098] The upper bubble discharge hole 250 may be provided at an upper portion of the upper water jacket 230, and water containing bubbles may be removed from the water stored in the inner space of the upper water jacket 230 through the upper bubble discharge hole 250. The upper bubble discharge hole 250 may extend vertically from the upper portion of the upper water jacket 230.

[0099] In addition, the upper bubble discharge hole 250 may be connected to the upper nozzle 241. Specifically, the upper bubble discharge hole 250 may be a hollow tube provided on the upper portion of the upper nozzle 241, and one end of the upper bubble discharge hole 250 may be connected to the upper nozzle 241.

[0100] The upper bubble discharge hole 250 serves to remove air bubbles from the water flowing through the upper nozzle 241. The upper bubble discharge hole 250 is provided above the upper nozzle 241, and water containing air bubbles may be removed from the water flowing through the upper nozzle 241 through the upper bubble discharge hole 250. The upper bubble discharge hole 250 may extend vertically from the upper nozzle 241 and be connected to the outside.

[0101] 7, the upper nozzle 241 may be provided with an upper mesh filter 242. The upper mesh filter 242 may filter out foreign matter present in the water moving through the upper nozzle 241.

[0102] 7, the upper nozzle 241 includes an upper fine nozzle portion 243 having a plurality of fine pipes. The upper fine nozzle portion 243 has a plurality of fine pipes, and water moving through the upper nozzle 241 passes through the upper fine nozzle portion 243.

[0103] Here, the fine pipes provided in the upper fine nozzle part 243 may extend in the same direction, parallel to the direction in which the upper nozzle 241 extends.

[0104] The upper fine nozzle part 243 is for forming a laminar flow. When the water moving through the upper nozzle 241 passes through the upper fine nozzle part 243, the water moves through the upper fine nozzle part 243 while forming a laminar flow.

[0105] The water passing through the upper nozzle 241 and flowing into the inner space of the upper water jacket 230 also serves as a transmission medium for transmitting the ultrasonic waves generated by the upper transducer 220 .

[0106] If turbulent flow occurs in the water passing through the upper nozzle 241 and flowing into the inner space of the upper water jacket 230, it is difficult for the upper transducer 220 to accurately irradiate the ultrasonic waves to the designated position of the target object 10.

[0107] The upper fine nozzle unit 243 is provided to prevent this. The water moving through the upper nozzle 241 moves through the upper fine nozzle unit 243 while forming a laminar flow, and through this, the ultrasonic waves generated by the upper transducer 220 can be accurately irradiated to a designated position of the target object 10.

[0108] Referring to FIG. 7, an upper buffer space 244 having the same diameter as or larger than the diameter of the upper fine nozzle portion 243 may be provided between the point where the upper nozzle 241 and the internal space of the upper water jacket 230 are connected and the upper fine nozzle portion 243.

[0109] Specifically, the water flowing into the upper nozzle 241 passes through the upper fine nozzle part 243 having a plurality of fine pipes, and then passes through the upper buffer space 244 having no fine pipes, and flows into the upper water jacket 230.

[0110] The upper buffer space 244 also serves as a space for preventing laminar flow water from mixing with each other. When the water passing through the upper fine nozzle part 243 immediately flows into the upper water jacket 230, the water movement space expands and the laminar flow water can mix with each other.

[0111] In addition, if the diameter of the point where the upper nozzle 241 and the inner space of the upper water jacket 230 are connected is smaller than the diameter of the upper fine nozzle portion 243, there is a risk that part of the water forming the laminar flow may hit the wall.

[0112] The purpose of the upper buffer space 244 is to prevent this. The water that has passed through the upper fine nozzle unit 243, which has a plurality of fine pipes, passes through the upper buffer space 244, which does not have a plurality of fine pipes, and flows into the upper water jacket 230, thereby preventing the water that forms laminar flow from mixing with each other.

[0113] In the above description, it has been explained that the upper air bubble discharge hole 250 of the upper water jacket 230 and the upper liquid injection part 240 are provided with the upper mesh filter 242, the upper fine nozzle part 243, and the upper buffer space 244. However, if necessary, the upper air bubble discharge hole 250, the upper mesh filter 242, the upper fine nozzle part 243, and the upper buffer space 244 may not be provided.

[0114] Referring to FIG. 8, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention further includes a liquid supply unit 300.

[0115] The liquid supply unit 300 is connected to the lower liquid injector 140 or the upper liquid injector 240, and can supply liquid to the lower liquid injector 140 or the upper liquid injector 240.

[0116] The liquid supply unit 300 is provided outside the lower housing 110 and the upper housing 210, and may be connected to the lower liquid injector 140 or the upper liquid injector 240 via a hose or the like.

[0117] The liquid supply unit 300 according to the embodiment of the present invention includes a liquid storage tank 310, a liquid inlet unit 320, a liquid outlet unit 330, and a bubble outlet hole 340.

[0118] 8, the liquid storage tank 310 has a space therein for storing liquid. The liquid injector 320 injects liquid into the liquid storage tank 310, so that the liquid can be stored in the liquid storage tank 310 through the liquid injector 320.

[0119] The liquid discharge unit 330 discharges the liquid from the liquid storage tank 310. The liquid stored in the liquid storage tank 310 is discharged through the liquid discharge unit 330, and the liquid discharged through the liquid discharge unit 330 may be supplied to the lower liquid inlet unit 140 or the upper liquid inlet unit 240.

[0120] The liquid discharge part 330 may include a fine nozzle part 350 having a plurality of fine pipes. Referring to FIG. 8, the fine nozzle part 350 includes a plurality of fine pipes, and the liquid moving through the liquid discharge part 330 passes through the fine nozzle part 350.

[0121] Here, the fine pipes provided in the fine nozzle unit 350 may extend in the same direction, parallel to the direction in which the liquid discharge unit 330 extends.

[0122] The fine nozzle unit 350 is for forming a laminar flow. When water passes through the fine nozzle unit 350 in the liquid discharge unit 330, it moves through the fine nozzle unit 350 while forming a laminar flow.

[0123] However, the mesh filter 360 may not be provided in the liquid storage tank 310 and the liquid discharge part 330, or the mesh filter 360 may be provided in the liquid inlet part 320, if necessary.

[0124] According to an embodiment of the present invention, the liquid stored in the liquid storage tank 310 may be water. The air bubble discharge hole 340 extends to the upper part of the liquid storage tank 310. Specifically, the air bubble discharge hole 340 may be a hollow tube provided at the upper part of the liquid storage tank 310, and one end of the air bubble discharge hole 340 may be connected to the liquid storage tank 310.

[0125] The bubble discharge hole 340 is for removing bubbles from the water stored in the internal space of the liquid storage tank 310. The water stored in the liquid storage tank 310 is a transmission medium for transmitting the ultrasonic waves generated by the lower transducer 120 or the upper transducer 220. If bubbles are formed in the water stored in the liquid storage tank 310, the ultrasonic waves may be attenuated by the bubbles.

[0126] The air bubble discharge hole 340 is provided to prevent this, and air bubbles can be removed before water is supplied to the lower liquid injector 140 or the upper liquid injector 240 through the air bubble discharge hole 340 .

[0127] Specifically, when bubbles are generated in the water, the bubbles move to the top of the water and are discharged through the bubble discharge hole 340 provided at the top of the liquid storage tank 310, through which the bubbles can be removed before the water is supplied to the lower liquid inlet 140 or the upper liquid inlet 240.

[0128] The air bubble discharge hole 340 may be provided in the upper portion of the liquid storage tank 310, and may remove air bubbles from the water stored in the interior space of the liquid storage tank 310 through the air bubble discharge hole 340. The air bubble discharge hole 340 may extend vertically from the upper portion of the liquid storage tank 310.

[0129] 8, the liquid storage tank 310 and the liquid discharge unit 330 may be provided with a mesh filter 360. The mesh filter 360 may filter out foreign matter present in the water stored in the liquid storage tank 310 and the water flowing through the liquid discharge unit 330.

[0130] The probe module of the ultrasonic inspection device according to the embodiment of the present invention described above has the following advantages.

[0131] The probe module of the ultrasound inspection apparatus according to an embodiment of the present invention has the advantage that the lower part of the object can be inspected without inverting or moving the object through the lower probe module, which is disposed under the object and generates ultrasound waves from the lower part of the object toward the object to inspect the object.

[0132] In addition, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention performs inspection at the lower and upper parts of the object through the lower and upper probe modules, thereby inspecting the lower and upper parts of the object without inverting or moving the object, thereby having the advantage of shortening the process time.

[0133] In addition, the probe module of the ultrasound inspection apparatus according to the embodiment of the present invention has an advantage that the lower and upper parts of the object can be inspected without inverting or moving the object by performing an inspection at the lower and upper parts of the object via the lower probe module and the upper probe module, and thus the signal processing data scanned at the upper and lower parts of the object can be linked without positional alignment tolerance.

[0134] In addition, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention has an advantage in that it can prevent attenuation of ultrasonic waves due to bubbles by forming bubble exhaust holes that can remove bubbles in the lower probe module and the upper probe module.

[0135] Although the present invention has been described in detail based on the preferred embodiments, the present invention is not limited to the above embodiments and various modifications may be made within the scope of the present invention. Therefore, the true technical scope of protection of the present invention should be determined by the technical spirit of the claims.

Claims

1. 1. A probe module of an ultrasonic inspection device for inspecting an object using ultrasonic waves, a lower probe module disposed below the object; The lower probe module includes: A lower housing; a lower transducer provided in the lower housing and capable of generating or receiving ultrasonic waves from a lower portion of a target object toward the target object; a lower water jacket having an internal space into which one side of the lower transducer can be inserted, the internal space being filled with liquid; a lower liquid injection section that injects liquid into the internal space of the lower water jacket.

2. The lower liquid injection section is a lower nozzle that is connected to the internal space of the lower water jacket and through which liquid moves; The probe module of claim 1 , further comprising: a lower bubble discharge hole communicating with the lower nozzle.

3. The lower bubble discharge hole a first bubble discharge hole communicating with the lower nozzle and extending to an upper portion of the lower nozzle; 3. The probe module of claim 2, further comprising a second bubble discharge hole communicating with the first bubble discharge hole and extending horizontally or downwardly at one end of the first bubble discharge hole.

4. The probe module of claim 2 , wherein the lower nozzle is provided with a lower mesh filter.

5. The lower nozzle is 3. The probe module of claim 2, further comprising a lower fine nozzle portion provided with a plurality of fine pipes.

6. Between the point where the lower nozzle and the inner space of the lower water jacket are connected and the lower fine nozzle part, The probe module for an ultrasonic inspection device according to claim 5, further comprising a lower buffer space having a diameter equal to or larger than the diameter of the lower fine nozzle portion.

7. a liquid supply unit connected to the lower liquid inlet unit, The liquid supply unit a liquid storage tank having a space therein for storing a liquid; a liquid injector for injecting the liquid into the liquid storage tank; a liquid discharger for discharging the liquid from the liquid storage tank; and a bubble discharge hole extending from an upper portion of the liquid storage tank to the outside, The probe module of claim 1 , wherein the liquid discharge unit includes a fine nozzle unit having a plurality of fine pipes.

8. further including an upper probe module disposed above the object; The upper probe module includes: An upper housing; an upper transducer provided in the upper housing and capable of generating or receiving ultrasonic waves from an upper portion of a target object toward the target object; an upper water jacket having an internal space into which one side of the upper transducer can be inserted, the internal space being filled with liquid; 2. The probe module for an ultrasonic inspection device according to claim 1, further comprising: an upper liquid injector for injecting liquid into the internal space of the upper water jacket.

9. the upper liquid injection section includes an upper nozzle that is in communication with the internal space of the upper water jacket and through which liquid moves, The probe module of claim 8 , wherein the upper water jacket includes an upper bubble discharge hole extending upward from an inner space of the upper water jacket.

10. the upper liquid injection section is connected to the internal space of the upper water jacket and has an upper nozzle through which liquid moves; The probe module of claim 8 , further comprising: an upper bubble discharge hole communicating with the upper nozzle.

11. The probe module of claim 9, wherein the upper nozzle is provided with a mesh filter.

12. The upper nozzle is The probe module of claim 9, further comprising an upper fine nozzle portion provided with a plurality of fine pipes.

13. Between the point where the upper nozzle and the inner space of the upper water jacket are connected and the upper fine nozzle part, The probe module of claim 12, further comprising an upper buffer space having a diameter equal to or larger than the diameter of the upper fine nozzle portion.

14. further comprising a liquid supply unit connected to the upper liquid inlet unit, The liquid supply unit a liquid storage tank having a space therein for storing a liquid; a liquid injector for injecting the liquid into the liquid storage tank; a liquid discharger for discharging the liquid from the liquid storage tank; and a bubble discharge hole extending from an upper portion of the liquid storage tank to the outside, The probe module of claim 8, wherein the liquid discharge unit includes a fine nozzle unit having a plurality of fine pipes.

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