Charged particle beam apparatus and image generation method

Abstract

To support setting of a measurement sequence comprising a plurality of measurement processes in a scanning electron microscope.SOLUTION: The composite image 92 includes an overhead image 102, a flow image 106, and a report 108. The bird' s-eye image 102 includes a plurality of marks 118 representing a plurality of measurement regions. The flow image 106 includes a plurality of graphics arranged in the main flow direction T1. The multi-graphic includes a plurality of symbols arranged in the sub-flow direction T2. A temporary report or an actual report is displayed as the report 108.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a charged particle beam device and an image generation method, and more particularly to a technique for supporting the setting and confirmation of a measurement sequence for sequentially measuring a plurality of measurement regions on a sample. [Background technology]

[0002] Known charged particle beam devices include scanning electron microscopes, transmission electron microscopes, ion beam processing devices, etc. The following describes scanning electron microscopes.

[0003] Some scanning electron microscopes have the function of sequentially measuring multiple measurement areas on a sample (multi-point measurement function). When using the multi-point measurement function, the user typically sets multiple measurement areas on the sample and also sets a measurement sequence for sequentially measuring the multiple measurement areas. A measurement sequence consists of multiple measurement steps corresponding to the multiple measurement areas. A measurement sequence is also called a recipe.

[0004] Each measurement step that makes up a measurement sequence consists of one or more measurement operations. For example, one measurement step may consist of only a single measurement operation (e.g., image acquisition), while another measurement step may consist of two measurement operations (e.g., image acquisition and analysis). One measurement step may also consist of three or more measurement operations.

[0005] Patent Document 1 discloses a spectroscopic analysis device equipped with a mechanism for managing the analysis position, analysis method, and analysis settings. Patent Document 2 discloses a circuit pattern inspection device including a scanning electron microscope. Patent Documents 1 and 2 do not disclose a technology for visually expressing both the multiple measurement steps that make up a measurement sequence and the multiple measurement operations included in the multiple measurement steps in an easy-to-understand manner, and in particular, do not disclose a technology for generating an image having two intersecting time axes.

[0006] Patent Document 3 discloses an image processing device used in the field of factory automation. A flow representing parallel processing is displayed on the display of the device. The image processing device disclosed in Patent Document 3 is unrelated to sample measurement using an electron beam. The flow disclosed in Patent Document 3 does not have two intersecting time axes. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-38210 [Patent Document 2] Japanese Patent Application Laid-Open No. 2001-35893 [Patent Document 3] Japanese Patent Application Laid-Open No. 2011-53787 Summary of the Invention [Problem to be solved by the invention]

[0008] As described above, a measurement sequence for multipoint measurement in a charged particle beam device such as an electron scanning microscope consists of multiple measurement steps that are executed sequentially. The series of these multiple measurement steps can be called a main flow. Each measurement step in the measurement sequence consists of one or more measurement operations. The one or more measurement operations that make up each measurement step can be called a subflow.

[0009] The contents of a measurement sequence for multi-point measurement are generally complex. When setting a measurement sequence, users are likely to be confused or misunderstand. For example, it can be difficult to understand which measurement step or measurement operation in the measurement sequence the currently set measurement conditions apply to. Even during execution of a measurement sequence, it can be difficult to understand which part of the measurement sequence the currently executed measurement operation corresponds to.

[0010] An object of the present invention is to assist a user in setting and / or executing a measurement sequence consisting of a plurality of measurement steps, or to visually represent a measurement sequence consisting of a plurality of measurement steps in an easy-to-understand manner. [Means for solving the problem]

[0011] The charged particle beam device of the present invention has equipment for irradiating an electron beam onto a sample, and includes a measurement unit that measures the sample, a control unit that controls the measurement unit in accordance with a measurement sequence including a plurality of measurement processes, a flow image generation unit that generates a flow image representing the measurement sequence, and a display that displays the flow image, wherein the flow image has a main flow direction and a subflow direction that intersect with each other, and the flow image includes a plurality of graphics representing the plurality of measurement processes, the plurality of graphics being arranged in the main flow direction according to the execution order of the plurality of measurement processes, and the plurality of graphics including at least one multi-graphic representing a multi-measurement process including a plurality of measurement operations, and each of the at least one multi-graphic includes a plurality of symbols representing the plurality of measurement operations, the plurality of symbols being arranged in the subflow direction according to the execution order of the plurality of measurement operations.

[0012] The image generation method of the present invention is an image generation method for generating a flow image, wherein the flow image is an image representing a measurement sequence including a plurality of measurement processes that are executed sequentially in a charged particle beam device, and is an image that is displayed when the measurement sequence is set and executed, and the flow image has a main flow direction and a subflow direction that are perpendicular to each other, and the flow image includes a plurality of graphics representing the plurality of measurement processes, arranged in the main flow direction according to the execution order of the plurality of measurement processes, and the plurality of graphics includes at least one multi-graphic representing a multi-measurement process including a plurality of measurement operations, and each of the at least one multi-graphic includes a plurality of symbols representing the plurality of measurement operations, arranged in the subflow direction according to the execution order of the plurality of measurement operations. [Effects of the Invention]

[0013] According to the present invention, it is possible to assist a user in setting and / or executing a measurement sequence consisting of a plurality of measurement steps, or to visually represent a measurement sequence consisting of a plurality of measurement steps in an easy-to-understand manner. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a block diagram showing a scanning electron microscope according to an embodiment. [Figure 2] FIG. 10 is a diagram illustrating an example of a data set. [Figure 3] FIG. 10 is a diagram showing an example of a composite image displayed when a measurement sequence is set. [Figure 4] 10A and 10B are diagrams showing changes in a flow image and a bird's-eye view image. [Figure 5] FIG. 10 is a diagram showing a first example of a composite image displayed when a measurement sequence is executed. [Figure 6] FIG. 10 is a diagram showing a second example of a composite image displayed when a measurement sequence is executed. [Figure 7]FIG. 10 is a diagram showing a third example of a composite image displayed when a measurement sequence is executed. [Figure 8] FIG. 10 is a diagram showing an example of a composite image displayed at the end of a measurement sequence. [Figure 9] FIG. 10 illustrates management of multiple layout groups. [Figure 10] 10 is a flowchart showing an operation when setting a measurement sequence. [Figure 11] 10 is a flowchart showing an operation when a measurement sequence is executed. [Figure 12] FIG. 10 illustrates the setup of a measurement sequence based on a template. [Figure 13] FIG. 10 is a diagram showing a modified example of a flow image. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment will be described with reference to the drawings.

[0016] (1) Overview of the embodiment A charged particle beam device according to an embodiment includes a measurement unit, a control unit, a flow image generation unit, and a display. The measurement unit includes equipment for irradiating a sample with an electron beam and measures the sample. The control unit controls the measurement unit according to a measurement sequence including multiple measurement processes. The flow image generation unit generates a flow image representing the measurement sequence. The display displays the flow image. The flow image has a main flow direction and a subflow direction that intersect with each other. The flow image includes multiple graphics representing multiple measurement processes, the multiple graphics being arranged in the main flow direction according to the execution order of the multiple measurement processes. The multiple graphics include at least one multi-graphic representing a multi-measurement process including multiple measurement operations. Each of the at least one multi-graphic includes multiple symbols representing multiple measurement operations, the multiple symbols being arranged in the subflow direction according to the execution order of the multiple measurement operations. A processor, described below, functions as the control unit and the flow image generation unit.

[0017] According to the above configuration, since the flow image has a main flow direction and a sub flow direction that are separated from each other, a user who observes the flow image can easily recognize the flow of the entire measurement sequence and, at the same time, the content of each individual measurement step. In particular, the configuration and flow of multiple measurement steps can be easily recognized. Each graphic corresponds to a display object. Each symbol corresponds to an icon.

[0018] In the embodiment, a flow image is displayed when a measurement sequence is set and when the measurement sequence is executed. This configuration can assist the user in setting the measurement sequence. Furthermore, when the measurement sequence is executed, the user can easily understand the content and progress of the measurement sequence.

[0019] The charged particle beam device according to the embodiment is a scanning electron microscope. The multiple symbols arranged in the subflow direction include a photography symbol and an analysis symbol. The photography symbol is a symbol representing a measurement operation of generating an electron microscope image by detecting electrons emitted from a sample. The analysis symbol is a symbol representing a measurement operation of analyzing a sample by detecting X-rays emitted from the sample. Symbols other than the photography symbol and the analysis symbol may also be provided.

[0020] In an embodiment, the analysis symbol is one or both of a spectrum analysis symbol representing a measurement operation that generates an X-ray spectrum as an analysis result, and a map analysis symbol representing a measurement operation that generates an elemental map as an analysis result. Analysis symbols other than the spectrum analysis symbol and the map analysis symbol may also be provided.

[0021] In an embodiment, the flow image further includes an end graphic indicating the end of the measurement sequence. The end graphic includes a display element indicating whether a specific end action has been performed. This configuration allows the user to recognize in advance the action to be taken at the end of the measurement sequence.

[0022] A charged particle beam device according to an embodiment includes an overhead image generator that generates an overhead image including a plurality of marks representing a plurality of measurement regions set on a sample. The overhead image is displayed together with a flow image at least during measurement sequence setting. This configuration enables accurate and easy measurement sequence setting.

[0023] In an embodiment, when a specific measurement area is selected from multiple measurement areas, the overhead image generation unit emphasizes a specific mark corresponding to the specific measurement area, and at the same time, the flow image generation unit emphasizes all or a part of a specific graphic corresponding to the specific measurement area. On the other hand, when a specific measurement process is selected from multiple measurement processes, the flow image generation unit emphasizes all or a part of a specific graphic corresponding to the specific measurement process, and at the same time, the overhead image generation unit emphasizes a specific mark corresponding to the specific measurement process. This configuration allows the user to accurately recognize the correspondence between the multiple measurement areas and the multiple measurement processes. The specific mark or specific graphic may be emphasized by making the display mode of the specific mark or specific graphic different from the display mode of other marks or other graphics.

[0024] A charged particle beam device according to an embodiment includes a report generation unit that generates a plurality of reports corresponding to a plurality of measurement processes. The report generation unit includes a function for generating a plurality of provisional reports as the plurality of reports, and a function for generating a plurality of actual reports as the plurality of reports based on execution results of the plurality of measurement processes. All or part of the plurality of provisional reports are displayed when a measurement sequence is set, and all or part of the plurality of actual reports are displayed after the measurement sequence is completed.

[0025] With the above configuration, when setting up a measurement sequence, the contents (specifically, layout) of the actual report that will be generated by executing the measurement process can be confirmed in advance by referring to the provisional report. In addition, since the actual report is automatically displayed after the measurement sequence is completed, the burden on the user in creating the report can be reduced.

[0026] In the embodiment, the displayed report changes from the provisional report to the actual report during or at the end of each measurement step in the plurality of measurement steps. With this configuration, it is possible to quickly display the actual report without waiting for the end of the measurement sequence.

[0027] A charged particle beam device according to an embodiment includes a storage unit that stores multiple sets of measurement conditions for executing multiple measurement processes. Each of the multiple sets of measurement conditions includes a common measurement condition and one or more individual measurement conditions. At least when setting a measurement sequence, an image for setting the measurement conditions is displayed together with a flow image. With this configuration, each measurement condition can be set while referring to the flow image.

[0028] An image generation method according to an embodiment is an image generation method for generating a flow image. The flow image represents a measurement sequence including multiple measurement processes executed sequentially in a charged particle beam device, and is an image displayed when the measurement sequence is set and executed. The flow image has a main flow direction and a subflow direction that are orthogonal to each other. The flow image includes multiple graphics representing multiple measurement processes, the multiple graphics being arranged in the main flow direction according to the execution order of the multiple measurement processes. The multiple graphics include at least one multi-graphic representing a multi-measurement process including multiple measurement operations. Each of the at least one multi-graphic includes multiple symbols representing multiple measurement operations, the multiple symbols being arranged in the subflow direction according to the execution order of the multiple measurement operations.

[0029] The image generation method is realized as a function of hardware or software. In an embodiment, a program for executing the image generation method is installed in an information processing device via a network or a portable storage medium. The information processing device has a storage unit that non-temporarily stores the program and a processor that executes the program.

[0030] (2) Details of the embodiment 1 shows a charged particle beam device according to an embodiment. The charged particle beam device is specifically a scanning electron microscope 10 that measures a sample. The scanning electron microscope 10 has a measurement unit 12 and an information processing unit 14.

[0031] The measurement unit 12 has a lens barrel 16 and a housing 18. The lens barrel 16 houses an electron gun, a scanning coil, an objective lens, etc. These are equipment that irradiates a sample 20 with an electron beam 23 as a charged particle beam. The interior of the housing 18 is a sample chamber. A movable stage 22 is provided within the sample chamber. The movable stage 22 is equipment that supports or holds the sample 20. The electron beam 23 is irradiated onto each measurement region set on the surface of the sample 20, and the electron beam 23 is scanned two-dimensionally within each measurement region.

[0032] The measurement unit 12 has a secondary electron detector, a backscattered electron detector, an X-ray detector, etc. Multiple detectors may be provided as secondary electron detectors. A soft X-ray detector may also be provided. The X-ray detector is, for example, a detector for EDS (Energy Dispersive X-ray Spectroscopy). Other types of X-ray detectors may also be used. The measurement unit 12 has a CCD camera that photographs the surface of the sample 20. The CCD camera acquires an optical image representing the surface of the sample 20. The measurement unit 12 also includes a power supply that supplies voltage to the electron gun and multiple detectors, a shutter that separates the internal space of the electron tube 16, etc.

[0033] The information processing unit 14 is configured, for example, by a computer. The information processing unit 14 has a processor 24, a storage unit 26, an input device 28, and a display device 30. The processor 24 is configured, for example, by a CPU, GPU, etc. that executes a program. The storage unit 26 is configured, for example, by a semiconductor memory, a hard disk, etc. The input device 28 is configured, for example, by a keyboard, a pointing device, etc. The display device 30 is configured, for example, by an LCD, etc. The display device 30 may be configured by multiple display devices.

[0034] 1, multiple functions performed by the processor 24 are represented as multiple blocks. The control unit 31 is a controller that controls the operation of the measurement unit 12. The control unit 31 controls, for example, the operation of the movable stage 22, the irradiation of the electron beam, and the detection of electrons and X-rays.

[0035] The control unit 31 functions as a sequence control unit 32. The sequence control unit 32 controls the operation of the measurement unit 12 in accordance with a specific measurement sequence set or selected by the user. Each measurement sequence includes multiple measurement steps corresponding to multiple measurement regions. The measurement sequence is also called a measurement protocol or recipe.

[0036] The SEM image generating unit 33 generates an SEM image based on input detection data. For example, the SEM image generating unit 33 generates an SEM image based on detection data output from a secondary electron detector, or based on detection data output from a backscattered electron detector. An SEM image may also be generated based on other detection data.

[0037] The processor 24 also has the function of generating an optical image based on the signal from the CCD camera. The SEM image is a two-dimensional image representing the surface of the sample 20, and the optical image is also a two-dimensional image representing the surface of the sample 20.

[0038] The analysis unit 34 analyzes the sample by analyzing the detection data output from the X-ray detector. The detection data is specifically characteristic X-ray detection data. The analysis unit 34 includes a spectrum generation unit 36 ​​and a map generation unit 38.

[0039] The spectrum generation unit 36 ​​generates an X-ray spectrum based on the detection data. An X-ray spectrum usually includes multiple peaks. Element information and characteristic X-ray type information are added to each peak. The map generation unit 38 generates multiple element maps based on the detection data. The map generation unit 38 also has the function of generating a composite map by combining multiple element maps. A two-dimensional image representing the measurement region may be generated based on multiple pieces of integrated spectral information obtained from multiple measurement points that make up the measurement region.

[0040] The sequence editing unit 40 generates or modifies a measurement sequence for multi-point continuous measurement based on user input or designation. Typically, when setting a measurement sequence, multiple measurement areas are sequentially designated on the surface of the sample 20. A measurement process is defined for each measurement area. Each measurement process consists of one or more measurement operations. When setting multiple measurement processes, a flow image, described in detail below, is generated and used. The multiple measurement processes that make up a measurement sequence are defined by multiple measurement conditions. Individual measurement conditions include common measurement conditions and one or more individual measurement conditions. The substance of each measurement condition is multiple parameters. In other words, the substance of a measurement sequence is a parameter set. This will be described in detail later with reference to Figure 2.

[0041] The display processing unit 42 generates a display image to be displayed on the screen of the display device 30. The display processing unit 42 functions as an overhead image generating unit 44, a flow image generating unit 46, and a report generating unit 48.

[0042] The overhead image generating unit 44 generates an overhead image representing the surface of the sample 20. The overhead image is composed of a background image and a plurality of marks representing a plurality of measurement regions. The overhead image has a first spatial axis and a second spatial axis that are orthogonal to each other.

[0043] Specifically, the background image is an optical image, an SEM image, or a composite image. A composite image is an image generated by combining an optical image and an SEM image having the same display magnification. An artificial image such as a CAD image may also be used as the background image.

[0044] As described above, the overhead image has multiple marks representing multiple measurement areas. Each mark is a graphic, specifically a frame representing the outer edge of the measurement area. If necessary, the inside of the frame may be filled in. Any observation magnification can be specified for each measurement area.

[0045] The flow image generating unit 46 generates a flow image representing a measurement sequence when the measurement sequence is set or executed. The flow image is composed of multiple linked graphics, more specifically, multiple graphics representing multiple measurement steps and an end graphic representing the end of the measurement sequence.

[0046] The flow image has a main flow direction and a subflow direction that intersect (specifically, are perpendicular to) each other. In this embodiment, the main flow direction is horizontal or lateral, and the subflow direction is vertical or longitudinal. Multiple graphics are lined up in the main flow direction.

[0047] The graphic representing each measurement step is either a single graphic or a multi-graphic. A single graphic represents a measurement step consisting of a single measurement operation. A multi-graphic represents a measurement step consisting of multiple measurement operations performed sequentially. More specifically, a single graphic is composed of a single symbol representing a single measurement operation. A multi-graphic is composed of multiple symbols representing multiple measurement operations. The multiple symbols are arranged in the subflow direction. Each symbol is a display element including figures, characters, etc., and can also be called an icon. In Figure 3, each symbol is expressed abstractly or illustratively. Flow images will be described in detail later with reference to Figure 3 and subsequent figures.

[0048] The report generation unit 48 has a provisional report generation function and an actual report generation function. A provisional report is a report sample or dummy report. The layout of the report is specified when the measurement process is set. The provisional report is an image showing that layout. On the other hand, the actual report is the original report that reflects the imaging results and analysis results from the measurement process. The report may be generated simultaneously with the execution of each measurement process, or may be generated at the end of each measurement process.

[0049] The storage unit 26 stores multiple data sets 50 defining multiple measurement sequences. Previously generated data sets may be reused. The storage unit 26 also stores optical images 52, multiple SEM images 54, multiple X-ray spectra 56, multiple elemental maps 58, multiple layouts 60, multiple actual reports 62, etc.

[0050] FIG. 2 shows an example of a data set 50. The data set 50 corresponds to the entity of a measurement sequence, and can be called a measurement condition set or a parameter set. Reference numeral 66 indicates a time axis. The measurement sequence is composed of multiple measurement steps. Reference numeral 64 indicates a measurement step number. Reference numeral 68-1 indicates a parameter group corresponding to the first measurement step. The parameter group 68-1 includes multiple parameters 70 that define common conditions, multiple parameters 72 that define imaging conditions, and multiple parameters 74 that define map analysis conditions.

[0051] Reference numeral 68-2 denotes a parameter group corresponding to the second measurement step. The parameter group 68-2 includes a plurality of parameters 80 that define common conditions, a plurality of parameters 82 that define imaging conditions, and a plurality of parameters 84 that define spectral analysis conditions. Parameters that specify the report layout for each measurement step are also managed.

[0052] Common conditions are measurement conditions common to the imaging operation, spectrum analysis operation, and map analysis operation. Common conditions include, for example, measurement magnification, movable stage position, acceleration voltage, working distance (WD), etc. Imaging conditions are measurement conditions that define the imaging operation. Imaging conditions include, for example, detector type, imaging mode, scanning speed, acquired image size, etc. Spectral analysis conditions are measurement conditions that define the spectrum analysis. Spectral analysis conditions include stopping conditions, conditions related to qualitative analysis, conditions related to quantitative analysis, etc. Map analysis conditions are measurement conditions that define the map analysis. Map analysis conditions include, for example, resolution, stopping conditions, conditions related to qualitative analysis, etc.

[0053] The data set 50 also includes the operating conditions (termination conditions) at the end of the measurement sequence. In the illustrated example, the termination conditions are defined by a plurality of parameters 90. Termination conditions may include stopping the application of voltage to the detector, operating a shutter provided in the lens barrel, etc. Termination conditions may also include moving the movable stage, unlocking the measurement chamber door, etc.

[0054] Execution of each measurement step generates a plurality of data, which are stored in a memory unit. For example, execution of the first measurement step generates an SEM image 76, followed by generation of a plurality of element maps 78. Execution of the second measurement step generates an SEM image 86, followed by generation of an X-ray spectrum 88.

[0055] 3 shows a display image (hereinafter referred to as a composite image) 92 that is displayed on the screen when a measurement sequence is set. The composite image 92 can also be called a UI (User Interface) image. Through the composite image 92, the user specifies multiple measurement areas, and also through the composite image 92, the user defines multiple measurement steps that make up the measurement sequence.

[0056] The composite image 92 has a first display area 94, a second display area 96, a third display area 98, and a fourth display area 100. When setting a measurement sequence, an overhead image 102 is displayed in the first display area 94, an image 104 for setting measurement conditions is displayed in the second display area 96, and a flow image 106 is displayed in the third display area 98. A report (report image) 108 is displayed in the fourth display area 100. The composite image 92 shown in FIG. 5 is the composite image displayed when the setting of the measurement sequence is completed. Flow images displayed before and during the setting of the measurement sequence will be described later with reference to FIG. 12.

[0057] Reference numeral 110 denotes a plurality of buttons operated when editing a measurement sequence. Reference numeral 112 denotes a plurality of buttons operated when specifying the type of measurement process. For example, these buttons correspond to photography, spectrum analysis, and map analysis. Reference numeral 114 denotes a plurality of buttons operated when executing a measurement sequence. For example, these buttons are a start button, a stop button, and a skip button. Each button is a virtual button and corresponds to an icon.

[0058] The overhead image 102 is an image generated by an overhead image generation unit. In the illustrated example, the overhead image 102 has a background image 116 and a plurality of marks 118-1 to 118-5. The background image 116 is an optical image, an SEM image, or a composite image. The composite image is an image generated by superimposing an SEM image on an optical image. A CAD image representing a sample holder may be used as the background image 116.

[0059] The overhead image 102 is an image representing the surface of the sample, and has a first spatial axis and a second spatial axis that are orthogonal to each other. A plurality of measurement areas are sequentially set on the overhead image 102 by the user. Accordingly, a plurality of marks 118-1 to 118-5 representing the plurality of measurement areas (specifically, the first to fifth measurement areas) are displayed on the background image 116. In the illustrated example, each of the marks 118-1 to 118-5 is a rectangular frame. The interior of each of the marks 118-1 to 118-5 is filled in so that the background image can be seen through.

[0060] For example, a measurement area centered on a coordinate specified by a user is set. Alternatively, a region specified by a user is set as a measurement area. Multiple measurement regions may also be set automatically based on the image analysis results.

[0061] The flow image 106 has a main flow direction T1 and a subflow direction T2 that are orthogonal to each other. The main flow direction T1 is horizontal or lateral, and the subflow direction is vertical or longitudinal. The main flow direction T1 corresponds to a first time axis, and the subflow direction T2 corresponds to a second time axis.

[0062] The flow image 106 has a plurality of graphics 120-1 to 120-5 representing a plurality of measurement steps, and also has a graphic 122 representing the end of a measurement sequence. The plurality of graphics 120-1 to 120-5 and 122 are aligned in the main flow direction T1. Two adjacent graphics are connected via an arrow mark.

[0063] In the illustrated example, the first measurement area corresponds to the first measurement step, the second measurement area corresponds to the second measurement step, the third measurement area corresponds to the third measurement step, the fourth measurement area corresponds to the fourth measurement step, and the fifth measurement area corresponds to the fifth measurement step.

[0064] Each measurement process is classified as a single measurement process consisting of a single measurement operation, or a multi-measurement process consisting of multiple measurement operations. A graphic corresponding to a single measurement process is a single graphic. A single graphic has a single symbol representing a single measurement operation. A graphic corresponding to multiple measurement processes is a multi-graphic. A multi-graphic has multiple connected symbols representing multiple measurement operations performed sequentially. The multiple symbols are aligned in the subflow direction T2. ​​Two adjacent symbols are connected by a line. A downward arrow mark may be used instead of the line.

[0065] For example, graphic 120-1 is a multi-graphic consisting of a symbol 124 representing a shooting operation and a symbol 126 representing a map analysis operation, which are aligned in the subflow direction T2. ​​Graphic 120-2 is also a multi-graphic consisting of a symbol 128 representing a shooting operation and a symbol 130 representing a spectrum analysis operation, which are aligned in the subflow direction T2. ​​Graphic 120-3 is a single graphic consisting of a symbol 132 representing a shooting operation.

[0066] The graphic 122 has a display element 123. The display element 123 is a checkbox, and checking it causes a predetermined termination action to be automatically executed at the end of the measurement sequence. The graphic 122 may include multiple display elements corresponding to multiple termination actions.

[0067] In the illustrated example, the symbol 128 representing the photographing operation in the second measurement step is highlighted, and the mark 118-2 representing the second measurement area is also highlighted. Examples of highlighting include enlarging the line width, increasing the brightness, changing the hue, etc. The entire graphic 120-2 including the symbol 128 may also be highlighted.

[0068] When a photography operation is selected, an image 104 for setting the photography operation is displayed in the second display area 96. When a map analysis operation is selected, an image for setting the map analysis conditions is displayed in the second display area 96. When a spectrum analysis operation is selected, an image for setting the spectrum analysis conditions is displayed in the second display area 96. By switching tabs at any time, an image for setting the common measurement conditions can be displayed in the second display area 96.

[0069] The fourth display area displays a report 108 corresponding to the currently selected measurement process or measurement operation. The report 108 displayed when setting the measurement sequence is a provisional report. The report 108 includes an optical image or overhead image 324, a dummy SEM image 326, SEM image acquisition conditions 328, a dummy spectrum 330, and spectrum acquisition conditions 332. Buttons 134 and 136 are page switching buttons.

[0070] According to the embodiment, when setting a measurement sequence, the user can simultaneously refer to the overhead image 102 and flow image 106 displayed on the same screen. This allows the user to correctly design the measurement sequence while being aware of the correspondence between multiple measurement areas and multiple measurement steps. Moreover, since the flow image 106 has a main flow direction T1 and a subflow direction T2, it is possible to intuitively grasp the overall configuration of the measurement sequence and the configuration of each measurement step. In the overhead image 102, identifiers indicating the measurement steps may be displayed together with each of the marks 118-1 to 118-5. In the flow image 106, identifiers indicating the measurement steps may be displayed together with each of the graphics 120-1 to 120-5.

[0071] FIG. 4 shows a portion of the composite image shown in FIG. 3. Specifically, the bird's-eye view image 102, an image 140 for setting measurement conditions, and a flow image 106 are shown. When a specific measurement area is selected by the user during measurement sequence setting, a mark 118-2 representing the specific measurement area is highlighted. At the same time, all or part of a specific graphic corresponding to the specific measurement area is highlighted (see reference numeral 138). In the example shown in FIG. 4, a specific symbol 128 included in the specific graphic is highlighted. When the specific symbol 128 is highlighted, an image 140 for setting shooting conditions is displayed in the second display area (see reference numeral 142).

[0072] On the other hand, when a specific measurement operation is selected by the user, a specific symbol 128 representing the specific measurement operation is highlighted. At the same time, a specific mark 118-2 representing a specific measurement area corresponding to the specific measurement operation is highlighted. In this way, the content of the multiple images changes in response to the user's selection operation. This improves the workability when setting up a measurement sequence.

[0073] 5 shows a first example of a composite image displayed during execution of a measurement sequence. The first measurement operation (photographing operation) in the first measurement step is currently being performed. Symbol 124A is highlighted in flow image 106. Mark 118-1 indicating the first measurement area is highlighted in overhead image 102A.

[0074] 5, an SEM image 150 is displayed in the second display area. The SEM image 150 is a real-time image or a live image. Reference numeral 150A indicates an image portion that has already been generated, and reference numeral 150B indicates an image portion that will be generated in the future. Note that the SEM image 150 may be displayed in the first display area instead of the overhead image 102A.

[0075] The report 108A includes an optical image or an overhead image 152. In the illustrated example, the image 152 includes a mark 152a indicating the first measurement area. The report 108A also includes an SEM image 154 in the process of being generated, and measurement conditions 156 for acquiring the SEM image. In this way, the content of the report may be gradually switched from a provisional report to an actual report while the measurement process is being performed. Alternatively, the entire content of the report may be switched from the provisional report to an actual report at once at the end of the measurement process.

[0076] 6 shows a second example of a composite image displayed during execution of a measurement sequence. The second measurement operation (map analysis) in the first measurement step is currently being executed. Symbol 126A is highlighted in flow image 106. Mark 118-1 indicating the first measurement area is highlighted in overhead image 102A.

[0077] The second display area displays an image 158 showing the map analysis results. Image 158 includes an SEM image 160 generated during the map analysis, and multiple element maps 162, 164, and 166. For example, element map 162 was generated based on characteristic X-rays (K-lines) emitted from carbon atoms, element map 164 was generated based on characteristic X-rays (K-lines) emitted from silicon atoms, and element map 166 was generated based on characteristic X-rays (L-lines) emitted from tin atoms.

[0078] The line 160A corresponds to the boundary between the image portion that has already been formed and the image portion that is to be formed. The slide bar 168 is operated when adjusting the image size or display magnification.

[0079] In the illustrated example, the report 170 includes a composite map 172 generated by combining multiple element maps. It also includes measurement conditions 180. The report 170 includes element maps 174, 176, and 178 corresponding to the element maps 162, 164, and 166. As described above, the content of the report may be gradually switched from a provisional report to an actual report while the measurement process is being performed, or the entire content of the report may be switched from a provisional report to an actual report all at once at the end of the measurement process.

[0080] 7 shows a third example of a composite image displayed during execution of a measurement sequence. The second measurement operation (spectral analysis) in the second measurement step is currently being executed. Symbol 130A is highlighted in flow image 106. Mark 118-2 representing the second measurement area is highlighted in overhead image 102B.

[0081] The second display area displays an image 182 showing the results of the spectrum analysis. The image 182 includes a spectrum. The horizontal axis is the energy axis, and the vertical axis is the intensity axis. The spectrum includes a plurality of peaks 184. Near each peak 184, information indicating the element and information indicating the type of characteristic X-rays is displayed (see reference numeral 186). In the first display area, an SEM image may be displayed instead of the overhead image 102B.

[0082] In the illustrated example, report 188 includes an optical image or an overhead image 190 and also includes a spectrum 192. Furthermore, report 188 includes information 194 indicating measurement conditions and numerical information 196 indicating the spectrum analysis results. As described above, the content of the report may be gradually switched from a provisional report to an actual report during the measurement process, or the entire content of the report may be switched from the provisional report to an actual report at once at the end of the measurement process.

[0083] 8 shows a composite image displayed at the end of the measurement sequence. In the flow image 106, the graphic 122A is highlighted. The overhead image 198 includes a mark 200 indicating the fifth measurement region. The overhead image 198 is displayed so that the mark 200 is at the center of the first display region. Reference numeral 202 denotes the SEM image acquired in the final measurement step. The report 204 includes an optical image or overhead image 206, an SEM image 208, and information 210 indicating the measurement conditions.

[0084] 9 shows three layout groups 212, 214, and 216 corresponding to three types of measurement operations. These are stored in the storage unit 26. For example, when an imaging operation is specified, a specific layout is selected from the layout group 212, when a spectrum analysis operation is specified, a specific layout is selected from the layout group 214, and when a map analysis operation is specified, a specific layout is selected from the layout group 216.

[0085] FIG. 10 shows a flowchart of the operation of the processor when setting a measurement sequence. In S10, 1 is assigned to k. In S12, various conditions are set for the kth measurement step. Specifically, in S12, a measurement area is set based on a user's specification, and one or more measurement operations are set based on the user's input. Furthermore, common measurement conditions are set based on the user's input, and one or more individual measurement conditions are set. Furthermore, in S12, a layout is selected by the user.

[0086] If it is determined in S14 that the setting should be continued, k+1 is substituted for the new k in S16, and then S12 is executed again. If it is determined in S14 that the setting should be terminated, an end condition is set in S18.

[0087] 11 shows a flowchart of the operation of the processor when a measurement sequence is executed. In S20, 1 is assigned to k. In S22, the kth measurement step is executed. If the kth measurement step is a single measurement step, one measurement operation is executed. If the kth measurement step is a multi-measurement step, multiple measurement operations are executed sequentially. If it is determined in S24 that the process should continue, k+1 is assigned to the new k in S26, and S22 is then executed again. If it is determined in S24 that the process should be terminated, control according to the termination condition is executed in S28.

[0088] The upper part of FIG. 12 shows a template 220 for designing a measurement sequence. Reference numeral 222 indicates the main flow direction, and reference numeral 223 indicates the subflow direction. Multiple graphic candidates 224 are arranged in the main flow direction 222. Each graphic candidate 224 is displayed with a dashed line or in low brightness. Each graphic candidate 224 consists of two symbol candidates 226 and 228 arranged in the subflow direction 223. The template 220 ends with a graphic 230, which also includes a display element indicating whether or not the termination condition has been executed. On the template 220, multiple measurement operations are assigned to multiple symbol candidates in chronological order. Accordingly, a measurement area is also specified for each measurement process.

[0089] The bottom part of Figure 12 shows a flow image 232 representing a measurement sequence in the process of being created. Some graphics 234 consist of two symbols, and some graphics 235 consist of one symbol. Symbol 236 is selected and highlighted. Reference numeral 238 indicates a symbol candidate that is not currently in use. Reference numeral 236 indicates a selected symbol. For example, in accordance with the designation of unused section 241, multiple graphic candidates belonging to unused section 241 may be automatically deleted, or these graphic candidates may be left as they are.

[0090] 13 shows a modified example of a flow image. A flow image 260 includes a plurality of graphics 242-1 to 242-5 arranged in a main flow direction 252, and also includes an end graphic 244. Each of the plurality of graphics 242-1 to 242-3 is made up of a plurality of symbols arranged in a subflow direction 254. The graphic 242-5 is a single graphic made up of a single symbol.

[0091] In the illustrated example, graphic 242-4 is composed of three symbols 246, 248, and 250. Symbols 248 and 250 are displayed below symbol 246, but the positions of symbols 248 and 250 are the same in subflow direction 254. The measurement operation represented by symbol 248 (e.g., map analysis) and the measurement operation represented by symbol 250 (e.g., soft X-ray analysis) are performed simultaneously. Currently, symbols 248 and 250 are highlighted.

[0092] According to the above embodiment, since the flow image has a main flow axis and a subflow axis, a user who observes the flow image can easily recognize the flow of the entire measurement sequence and, at the same time, the content of each measurement step. In particular, for multiple measurement steps, the configuration and flow thereof can be easily recognized. The configuration according to the above embodiment may be applied to charged particle beam devices other than scanning electron microscopes. [Explanation of symbols]

[0093] 10 scanning electron microscope, 12 measurement unit, 14 information processing unit, 24 processor, 26 memory unit, 31 control unit, 32 sequence control unit, 35 SEM image generation unit, 34 analysis unit, 36 spectrum generation unit, 38 map generation unit, 40 sequence editing unit, 42 display processing unit, 44 overhead image generation unit, 46 flow image generation unit, 48 report generation unit, 102 overhead image, 104 image for setting measurement conditions, 106 flow image, 108 report, 120-1 to 120-5 graphics, 122 end graphic.

Claims

1. a measurement unit having equipment for irradiating a sample with a charged particle beam and for measuring the sample; a control unit that controls the measurement unit in accordance with a measurement sequence including a plurality of measurement steps; a flow image generating unit that generates a flow image representing the measurement sequence; a display that displays the flow image; Including, the flow image has a main flow direction and a sub flow direction that intersect with each other; the flow image includes a plurality of graphics representing the plurality of measurement steps, the graphics being arranged in the main flow direction in accordance with the execution order of the plurality of measurement steps; the plurality of graphics includes at least one multi-graphic representing a multi-measurement process including a plurality of measurement operations; each of the at least one multi-graphics includes a plurality of symbols representing the plurality of measurement operations, the plurality of symbols being arranged in the subflow direction according to the execution order of the plurality of measurement operations; A charged particle beam device characterized by:

2. 2. The charged particle beam device according to claim 1, The flow image is displayed when a measurement sequence is set and when the measurement sequence is executed. A charged particle beam device characterized by:

3. 2. The charged particle beam device according to claim 1, the charged particle beam device is a scanning electron microscope, The plurality of symbols arranged in the subflow direction are a photographing symbol representing a measurement operation for generating an electron microscope image by detecting electrons emitted from the sample; an analysis symbol representing a measurement operation for analyzing the sample by detecting X-rays emitted from the sample; A charged particle beam device comprising:

4. 4. The charged particle beam device according to claim 3, The analysis symbol is one or both of a spectrum analysis symbol representing a measurement operation that generates an X-ray spectrum as an analysis result, and a map analysis symbol representing a measurement operation that generates an elemental map as an analysis result. A charged particle beam device characterized by:

5. 2. The charged particle beam device according to claim 1, the flow image further includes an end graphic representing the end of the measurement sequence; The termination graphic includes a display element that indicates whether a specific termination action has been performed. A charged particle beam device characterized by:

6. 2. The charged particle beam device according to claim 1, an overhead image generating unit that generates an overhead image including a plurality of marks that represent a plurality of measurement regions set on the sample; The overhead image is displayed together with the flow image at least during measurement sequence setting. A charged particle beam device characterized by:

7. 7. The charged particle beam device according to claim 6, When a specific measurement area is selected from the plurality of measurement areas, the overhead image generation unit emphasizes a specific mark corresponding to the specific measurement area, and at the same time, the flow image generation unit emphasizes all or a part of a specific graphic corresponding to the specific measurement area; When a specific measurement process is selected from the plurality of measurement processes, the flow image generation unit highlights all or a part of a specific graphic corresponding to the specific measurement process, and at the same time, the overhead image generation unit highlights a specific mark corresponding to the specific measurement process. A charged particle beam device characterized by:

8. 2. The charged particle beam device according to claim 1, a report generator that generates a plurality of reports corresponding to the plurality of measurement steps; The report generation unit generating a plurality of interim reports as the plurality of reports; a function of generating a plurality of actual reports as the plurality of reports based on the execution results of the plurality of measurement processes; and When a measurement sequence is set, all or part of the plurality of provisional reports are displayed, After the measurement sequence is completed, all or part of the plurality of actual reports are displayed. A charged particle beam device characterized by:

9. 9. The charged particle beam device according to claim 8, During or at the end of each measurement step in the plurality of measurement steps, the displayed report changes from a provisional report to an actual report. A charged particle beam device characterized by:

10. 2. The charged particle beam device according to claim 1, a storage unit that stores a plurality of sets of measurement conditions for performing the plurality of measurement steps; each of the plurality of measurement condition sets includes a common measurement condition and one or more individual measurement conditions; an image for setting measurement conditions is displayed together with the flow image at least when setting a measurement sequence; A charged particle beam device characterized by:

11. 1. An image generation method for generating a flow image, comprising: the flow image is an image representing a measurement sequence including a plurality of measurement steps that are sequentially executed in a charged particle beam device, and is an image that is displayed when the measurement sequence is set and executed, the flow image has a main flow direction and a sub flow direction that are orthogonal to each other; the flow image includes a plurality of graphics representing the plurality of measurement steps, the graphics being arranged in the main flow direction in accordance with the execution order of the plurality of measurement steps; the plurality of graphics includes at least one multi-graphic representing a multi-measurement process including a plurality of measurement operations; each of the at least one multi-graphics includes a plurality of symbols representing the plurality of measurement operations, the plurality of symbols being arranged in the subflow direction according to the execution order of the plurality of measurement operations; An image generating method comprising:

12. A program that is executed in an information processing device to generate a flow image, the flow image is an image representing a measurement sequence including a plurality of measurement steps that are sequentially executed in a charged particle beam device, and is an image that is displayed when the measurement sequence is set and executed, the flow image has a main flow direction and a sub flow direction that are orthogonal to each other; the flow image includes a plurality of graphics representing the plurality of measurement steps, the graphics being arranged in the main flow direction in accordance with the execution order of the plurality of measurement steps; the plurality of graphics includes at least one multi-graphic representing a multi-measurement process including a plurality of measurement operations; each of the at least one multi-graphics includes a plurality of symbols representing the plurality of measurement operations, the plurality of symbols being arranged in the subflow direction according to the execution order of the plurality of measurement operations; A program characterized by:

Images