Vacuum pressure sensor
Vacuum pressure sensors with a weld ring, header element, and optimized silicone oil volume address outgassing issues, ensuring reliable performance in high vacuum environments.
JP2026002786APending Publication Date: 2026-01-08HONEYWELL INTERNATIONAL INC
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Patent Information
- Application Number
- JP2025089410
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-06-20
- Filing Date
- 2025-05-29
- Publication Date
- 2026-01-08
AI Technical Summary
Technical Problem
Vacuum pressure sensors face challenges in withstanding high vacuum environments and outgassing issues, making them unsuitable for applications like semiconductor manufacturing, medical, and pharmaceutical industries.
Method used
The development of vacuum pressure sensors with a weld ring, header element, piezoresistive sensing element, corrugated diaphragm, and plastic spacer, utilizing laser or resistance welding to prevent outgassing, and optimized silicone oil volume for improved performance.
Benefits of technology
The solution prevents outgassing, reduces thermal errors, and enhances sensor accuracy and durability, enabling operation in high vacuum and temperature conditions.
✦ Generated by Eureka AI based on patent content.
Abstract
To provide a method for manufacturing a vacuum pressure sensor, a device including the vacuum pressure sensor, and / or a system including the vacuum pressure sensor.SOLUTION: The vacuum pressure sensor can comprise a weld ring and a header element welded to the weld ring. The header element may comprise one or more header pins hermetically sealed to the header element, a piezoresistive sensing element coupled to the header element and electrically coupled to the one or more header pins, a corrugated diaphragm coupled to the header element and the weld ring, the corrugated diaphragm defining, with the header element, a cavity configured to contain a material, and a plastic spacer disposed within the cavity. The vacuum pressure sensor may comprise a protruding sharp edge or a substantially flat edge without corner breaks of at least a portion of the header element in physical contact with the metal plate.SELECTED DRAWING: Figure 1
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