Cutting apparatus and method of manufacturing cut product

Abstract

To provide a cutting device and a method of manufacturing a cut product using the same, capable of reducing a dead space, and capable of widely securing an inside space, by forming a wide opening when a sliding door is put in an opening state.SOLUTION: A slide mechanism 50S that switches between an open state and a closed state by sliding the plurality of slide door bodies 51 in the same direction, wherein the slide mechanism 50S includes a plurality of rail pairs 5455 corresponding to the respective slide door bodies 51 and a plurality of rotating bodies 5253 provided on the respective slide door bodies, each of the rail pairs 54,55 has an upper rail 54 with which the rotating body 52,53 provided at the upper portion of the sliding door body 51 comes into contact and a lower rail 55 with which the rotating body 52,53 provided at the lower portion of the sliding door body 51 comes into contact, the plurality of upper rails 54 are arranged so as to be aligned in the vertical direction, and the plurality of lower rails 55 are arranged so as to be aligned in the vertical direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a cutting device and a method for producing a cut product. [Background technology]

[0002] As described in Patent Document 1, for example, a conventional cutting device may be provided with a sliding door at the rear of the cutting device for repairing, cleaning, and the like inside the cutting device. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2024-30826 Summary of the Invention [Problem to be solved by the invention]

[0004] However, conventional cutting devices have a double-door structure in which the left sliding door moves left and the right sliding door moves right. Therefore, it is necessary to secure space on each side of the sliding door for the sliding doors to slide in the opening direction. To secure this space, the opening cannot be made sufficiently wide even in the open state. Furthermore, the portion of the interior space of the cutting device where this space is located (at the back of this space) becomes dead space, which is an inconvenience.

[0005] To overcome this disadvantage, even if the multiple sliding doors were simply configured to slide in the same direction, multiple rails would still be required to slide the multiple sliding doors, which could result in the internal space of the cutting device becoming narrower.

[0006] Therefore, there is a demand for a cutting device that can widen the opening when the sliding door is in the open position, reduce dead space, and ensure a large internal space, as well as a method for manufacturing cut products using the same. [Means for solving the problem]

[0007] One embodiment of a cutting device according to the present disclosure comprises a cutting mechanism having a rotary blade for cutting an object to be cut, a nozzle for spraying liquid toward the rotary blade, a wall separating an internal space in which the cutting mechanism is provided from an external space, and a sliding door structure provided in an opening formed in the wall, wherein the sliding door structure comprises a plurality of sliding door bodies and a sliding mechanism for switching between an open state and a closed state by sliding the plurality of sliding door bodies in the same direction, and the sliding mechanism comprises a plurality of rail pairs corresponding to the respective sliding door bodies and a plurality of rotors provided on the respective sliding door bodies, and each of the rail pairs comprises an upper rail provided on an upper portion of the sliding door body against which the rotor abuts, and a lower rail provided on a lower portion of the sliding door body against which the rotor abuts, the plurality of upper rails being arranged vertically aligned, and the plurality of lower rails being arranged vertically aligned.

[0008] One embodiment of the method for manufacturing cut products according to the present disclosure is a method for manufacturing cut products using the cutting device described above, and includes a step of manufacturing cut products by cutting the object to be cut using the rotary blade. [Effects of the Invention]

[0009] According to an embodiment of the present disclosure, it is possible to provide a cutting device and a method for manufacturing cut products using the same that can widen the opening when the sliding door is in the open position, reduce dead space, and ensure a large internal space. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. [Figure 2] FIG. 2 is a side view showing an outline of the configuration of a cutting module of the cutting device. [Figure 3]FIG. 2 is a perspective view showing the configuration of a sliding door structure of the cutting device. [Figure 4] 10 is a view seen from the opposite direction to the Y-direction arrow showing the configuration of the sliding door structure of the cutting device. FIG. [Figure 5] 5 is a cross-sectional view of the slide mechanism (upper side) taken along the arrows VV in FIG. 4. FIG. [Figure 6] 6 is a cross-sectional view taken along the arrows VI-VI in FIG. 4, showing the configuration of the slide mechanism (lower side). [Figure 7] 7 is a cross-sectional view taken along line VII-VII of FIG. 4, showing the configuration of the slide mechanism (lower side). [Figure 8] 8 is a cross-sectional view of the biasing mechanism taken along line VIII-VIII in FIG. 5. FIG. [Figure 9] FIG. 3 is a plan cross-sectional view showing the configuration of a sliding door structure of the cutting device. DETAILED DESCRIPTION OF THE INVENTION

[0011]

[0023] Hereinafter, embodiments of the cutting device and the method for manufacturing cut pieces according to the present disclosure will be described in detail with reference to the drawings. Note that the embodiments described below are merely examples for explaining the cutting device and the method for manufacturing cut pieces, and the cutting device and the method for manufacturing cut pieces are not limited to these embodiments. Therefore, the cutting device and the method for manufacturing cut pieces according to the present disclosure can be implemented in various forms without departing from the spirit and scope of the present disclosure.

[0012] A substrate on which elements such as semiconductor chips are fixed is sealed with resin, and then cut into individual pieces to be used as electronic components. A dedicated cutting device is used to cut the resin-sealed substrate.

[0013] Resin sealing of a substrate is performed by fixing the substrate to a molding die (not shown) of a resin molding device and molding the substrate with resin supplied into the molding die. The resin may be a thermoplastic resin or a thermosetting resin. Thermosetting resin reduces its viscosity when heated, and when further heated, it polymerizes and hardens to become a hardened resin. When resin sealing a substrate on which elements such as semiconductor chips are fixed, it is desirable to use a thermosetting resin. The elements fixed to the substrate are protected by the sealing resin.

[0014] [Configuration of cutting device] Fig. 1 is a plan view schematically showing a cutting apparatus 1 according to this embodiment. The cutting apparatus 1 is configured to cut a molded substrate Sb (an example of an object to be cut) into a plurality of electronic components Sc (an example of cut products). Note that the Z direction shown in Fig. 1 is the up-down direction, the arrangement direction of the cutting module A1 and the inspection storage module B1 is the X direction, and the direction perpendicular to the X and Z directions (the depth direction of each module) is the Y direction.

[0015] The cutting apparatus 1 is configured to include a cutting module A1 and an inspection and storage module B1. The cutting module A1 manufactures a plurality of electronic components Sc by cutting a molded substrate Sb. The inspection and storage module B1 inspects each of the manufactured electronic components Sc, and then stores the electronic components Sc in a tray for non-defective products 15a or a tray for defective products 15b. In the cutting apparatus 1, the cutting module A1 and the inspection and storage module B1 are each detachable and replaceable.

[0016] The control unit 26 of the cutting apparatus 1 includes a processor such as a CPU (Central Processing Unit) and a storage device such as a RAM (Random Access Memory) or a ROM (Read Only Memory). The control unit 26 controls the operation of each component of the cutting module A1 and the testing storage module B1 of the cutting apparatus 1 by executing a control program stored in the storage device on the processor. The operation of the cutting apparatus 1 described below is performed based on operation commands from the control unit 26, unless otherwise specified. In the following description, explanation of the operation commands from the control unit 26 will generally be omitted, and the operation commands from the control unit 26 will be explained only as necessary. Note that in the cutting apparatus 1 of this embodiment, the control unit 26, monitor 24, and sound output unit 25 are provided in the cutting module A1. However, they may be provided in the cutting apparatus 1 or the testing storage module B1.

[0017] The cutting module A1 mainly includes a substrate supply unit 3, a positioning unit 4, a cutting table 5, a cutting mechanism 6, and a transport unit 7. The cutting module A1 also includes a part of a first vacuum pump D1 and a second vacuum pump D2.

[0018] The substrate supply unit 3 supplies the shaped substrates Sb one by one to the positioning unit 4 by pushing out the shaped substrates Sb one by one from a magazine M1 that stores a plurality of shaped substrates Sb.

[0019] The positioning unit 4 positions the shaped substrate Sb by placing the shaped substrate Sb pushed out from the substrate supply unit 3 on the rail unit 4a. Thereafter, a first transport device (not shown) transfers the positioned shaped substrate Sb to the cutting table 5.

[0020] The cutting table 5 holds the shaped substrate Sb to be cut. In this embodiment, the cutting module A1 has two cutting tables 5. A second vacuum pump D2 is connected to each of the two cutting tables 5 through a second suction path VR2.

[0021] Each cutting table 5 includes a holding member 5a, a rotating mechanism 5b, and a moving mechanism 5c (see FIG. 2). The holding member 5a holds the shaped substrate Sb transferred from the positioning unit 4 by adsorbing the shaped substrate Sb from below. This fixes the shaped substrate Sb to the cutting table 5. Each cutting table 5 can be moved in the Y direction by the moving mechanism 5c.

[0022] The rotation mechanism 5b is capable of rotating the holding member 5a in the θ1 direction in Fig. 1 (that is, rotating it on the XY plane in Fig. 1). The θ1 direction is the direction of rotation around the Z axis.

[0023] As shown in FIG. 2, the movement mechanism 5c includes a ball screw mechanism 16 extending linearly in the Y direction, a drive source 17 such as a servo motor that drives the ball screw mechanism 16, a slider 18 that is connected to the rotation mechanism 5b attached to the holding member 5a and configured to be reciprocally movable in the Y direction by the ball screw mechanism 16, and a fixed frame 19 configured to accommodate the ball screw mechanism 16. Note that in FIG. 2 and subsequent figures, the direction of an arrow in the X direction is designated "right," the direction opposite to the X direction arrow is designated "left," the direction of an arrow in the Y direction is designated "forward," the direction opposite to the Y direction arrow is designated "backward," the direction of an arrow in the Z direction is designated "upward," and the direction opposite to the Z direction arrow is designated "downward." For convenience, the terms "forward" and "backward" refer to the cutting device 1 as viewed from the side of the sliding door structure 50.

[0024] The movement mechanism 5c is configured such that the ball screw mechanism 16 is driven by the drive source 17 to linearly reciprocate the cutting table 2B forward (toward the viewer) and backward (toward the viewer's depth) in the Y direction.

[0025] In this embodiment, the cutting module A1 includes a protective cover 33 provided between the holding member 5a and the moving mechanism 5c. The protective cover 33 is configured to be extendable and retractable while covering at least the upper part of the moving mechanism 5c. The protective cover 33 includes a first protective cover 33A provided on the Y direction side (front side) of the holding member 5a, and a second protective cover 33B provided on the Y direction side (depth side) of the holding member 5a. The protective cover 33 is provided between the wall portion of the fixed frame 19 and the slider 18, and is configured to cover the ball screw mechanism 16.

[0026] As shown in Fig. 2, the cutting mechanism 6 includes a motor (not shown) and a rotary shaft 6b that outputs the rotational driving force of the motor. A blade 6a, which is a rotary blade, is disposed at the tip of the rotary shaft 6b. The cutting mechanism 6 rotates the rotary shaft 6b by the rotational driving force, and the blade 6a rotates as a result of the rotation of the rotary shaft 6b. The blade 6a cuts the molded substrate Sb by rotating at high speed, and separates the molded substrate Sb into a plurality of electronic components Sc.

[0027] The cutting mechanism 6 is provided with a plurality of nozzles 30 that spray liquid toward the blade 6a and the like. The nozzles 30 include a cutting water nozzle 30a, a cooling water nozzle 30b, and a cleaning water nozzle 30c. The cutting water nozzle 30a sprays cutting water toward the blade 6a, which rotates at high speed. The cooling water nozzle 30b sprays cooling water toward the blade 6a and the molded substrate Sb, which are heated by cutting. The cleaning water nozzle 30c sprays cleaning water to wash away cutting chips and the like. After being sprayed, the cutting water, cooling water, and cleaning water are discharged outside the cutting module A1.

[0028] A waste material collector 31 that collects cutting chips and the like is provided further back than the cutting mechanism 6. A receiving plate member 34 is provided between the holding member 5a and the protective cover 33 to receive the cutting chips together with the cutting water and discharge them in the direction toward which the waste material collector 31 is located (forward in the Y direction (toward the user)). A slide member 35 that protrudes rearward from the upper end of the slider 18 is attached to the slider 18. The slide member 35 is configured so that its tip portion 35a can push out cutting chips and the like remaining on the upper surface of the first protective cover 33A to the waste material collector 31.

[0029] 1, a second conveying device (not shown) of the conveying unit 7 picks up from above a plurality of cut electronic components Sc held on the cutting table 5 and conveys them all at once to the inspection table 11 of the inspection storage module B1. A first vacuum pump D1 is connected to the second conveying device of the conveying unit 7 through a first suction path VR1. The second conveying device of the conveying unit 7 sucks air using the first vacuum pump D1 to pick up and hold all of the plurality of electronic components Sc.

[0030] The inspection storage module B1 is mainly composed of an inspection table 11, a first optical inspection camera 12, a second optical inspection camera 13, a placement unit 14, and an extraction unit 15. The first optical inspection camera 12 may be provided in the cutting module A1. The inspection storage module B1 also includes a part of a first vacuum pump D1. That is, the first vacuum pump D1 is present across both the cutting module A1 and the inspection storage module B1.

[0031] The first optical inspection camera 12 and the second optical inspection camera 13 capture images of both sides (front and back) of the electronic component Sc. Various inspections of the electronic component Sc are performed based on the image data captured by the first optical inspection camera 12 and the second optical inspection camera 13. The first optical inspection camera 12 and the second optical inspection camera 13 are each positioned near the inspection table 11 so as to capture images above.

[0032] The placement unit 14 has a mounting table, and a plurality of inspected electronic components Sc are transported together in the cut arrangement and placed on the mounting table. A first vacuum pump D1 is connected to the mounting table of the placement unit 14 through a first suction path VR1.

[0033] The extraction unit 15 transfers the electronic components Sc placed in the placement unit 14 to a tray. The electronic components Sc are sorted into "good products" or "defective products" by the extraction unit 15 based on the results of inspection using the first optical inspection camera 12 and the second optical inspection camera 13.

[0034] The cutting device 1 further includes a monitor 24 and a sound output unit 25. The monitor 24 is configured to display an image. The monitor 24 is configured as a display device such as a liquid crystal monitor or an organic EL (Electro Luminescence) monitor. The sound output unit 25 is configured to output sound. The sound output unit 25 is configured as a sound output device such as a speaker, buzzer, or bell.

[0035] [Regarding sliding door structures] 2, the cutting device 1 has a wall 40 that separates an internal space IS, in which the cutting mechanism 6 and the like are provided, from an external space OS. An opening 41 is formed in the wall 40. The opening 41 is provided with a sliding door structure 50 that is configured to be able to open and close the opening 41.

[0036] As shown in FIGS. 2 to 4, in this embodiment, the sliding door structure 50 includes two sliding door bodies 51 and a sliding mechanism 50S that switches between an open state and a closed state by sliding the two sliding door bodies 51 in the same direction (to the right). Of the two sliding door bodies 51, the one located on the left side in FIGS. 3 and 4 in the closed state is referred to as the "first sliding door body 51A," and the one located on the right side of the first sliding door body 51A and toward the internal space (the depth side) is referred to as the "second sliding door body 51B." In the open state, the first sliding door body 51A is located on the front side, and the second sliding door body 51B is located on the depth side. In other words, the first sliding door body 51A and the second sliding door body 51B are overlapping with each other.

[0037] In this embodiment, the first sliding door 51A and the second sliding door 51B have inclined surfaces at the upper and lower portions, so that they bulge toward the external space OS. This configuration ensures a large internal space IS and shortens the distance between the wall 40 and the blade 6a, making it easier to access the blade 6a when the door is open. As a result, maintenance work such as replacing the blade 6a can be easily performed.

[0038] The slide mechanism 50S has a plurality of rail pairs corresponding to the respective slide door bodies 51, and a plurality of rotors provided on the respective slide door bodies 51. The rotors include upper rotors 52 provided on the upper portion of each slide door body 51, and lower rotors 53 provided on the lower portion of each slide door body 51. Furthermore, the slide mechanism 50S has a rail pair including an upper rail 54 against which the upper rotors 52 abut, and a lower rail 55 against which the lower rotors 53 abut.

[0039] [About the upper and lower rails] As shown in Figures 3 and 4, the upper rail 54 includes a first upper rail 54A along which the upper rotor 52 of the first sliding door body 51A rotates, and a second upper rail 54B along which the upper rotor 52 of the second sliding door body 51B rotates. As shown in Figure 5, the second upper rail 54B is located above the first upper rail 54A, and the first upper rail 54A and the second upper rail 54B are arranged side by side in the vertical direction. In this embodiment, the second upper rail 54B is located directly above the first upper rail 54A. In other words, the first upper rail 54A and the second upper rail 54B partially overlap in a plan view.

[0040] As shown in Fig. 5, the cutting device 1 is provided with an upper outer cover 42 (an example of an outer cover) that covers the upper rotating body 52 and the upper rails 54 from the external space OS side. The upper outer cover 42 is provided with upper support members 56 that support the upper rails 54 on the upper outer cover 42 (see Fig. 5). Each upper rail 54 is supported on the upper outer cover 42 via the upper support members 56. For ease of explanation, the upper outer cover 42 is omitted from Figs. 3 and 4.

[0041] As shown in Figures 3 and 4, the lower rail 55 includes a first lower rail 55A that rotates when the lower rotor 53 of the first sliding door body 51A abuts against it, and a second lower rail 55B that rotates when the lower rotor 53 of the second sliding door body 51B abuts against it. As shown in Figure 6, the second lower rail 55B is located below the first lower rail 55A, and the first lower rail 55A and the second lower rail 55B are arranged side by side in the vertical direction. In this embodiment, the second lower rail 55B is located directly below the first lower rail 55A. In other words, the first lower rail 55A and the second lower rail 55B partially overlap in a plan view.

[0042] As shown in Fig. 6, the cutting device 1 is provided with a lower outer cover 43 (an example of an outer cover) that covers the lower rotating body 53 and the lower rails 55 from the external space OS side. The lower outer cover 43 is provided with lower support members 57 that support the lower rails 55 on the lower outer cover 43 (see Fig. 6). Each lower rail 55 is supported by the lower outer cover 43 via the lower support members 57. The lower outer cover 43 is configured to cover the area outward (in the Y direction) and below the lower rails 55. For ease of explanation, the lower outer cover 43 is omitted from Figs. 3 and 4.

[0043] With the above-described configuration, as shown in Figures 5 and 6, multiple upper rails 54 and multiple lower rails 55 are provided to correspond to each of the multiple sliding door bodies 51, and the multiple upper rails 54 and multiple lower rails 55 are arranged so as to be aligned in the vertical direction.

[0044] In this embodiment, the portions of lower rails 55 (first lower rail 55A, second lower rail 55B) that come into contact with lower rotating body 53, i.e., the upper portions of lower rails 55, are tapered so that the width narrows toward the top, and the cross section is formed into an inverted V shape. Note that upper rail 54 is formed into a rectangular cross section.

[0045] 4, in this embodiment, the first upper rail 54A and the first lower rail 55A that support the first sliding door body 51A extend rightward (in the X direction) from a position that corresponds to the position of the first sliding door body 51A in the closed state, that is, a position that corresponds to the left end portion of the opening 41 in Fig. 4. The second upper rail 54B and the second lower rail 55B that support the second sliding door body 51B extend rightward (in the X direction) from a position that corresponds to the position of the second sliding door body 51B in the closed state, that is, a position that corresponds to the center portion of the opening 41 in Fig. 4.

[0046] With the above-mentioned configuration, the first sliding door body 51A and the second sliding door body 51B are both opened by sliding rightward from the closed state, and closed by sliding leftward from the open state. In other words, the first sliding door body 51A and the second sliding door body 51B are opened and closed by sliding in the same direction.

[0047] [About the upper and lower rotors] 5, two upper rotors 52 are provided on the upper portions of the first sliding door body 51A and the second sliding door body 51B. All of the upper rotors 52 are arranged on the external space OS side of the first sliding door body 51A and the second sliding door body 51B.

[0048] 4, at least one of the upper rotors 52 provided on the first sliding door body 51A and at least one of the upper rotors 52 provided on the second sliding door body 51B are rotatably supported on the first sliding door body 51A and the second sliding door body 51B, respectively, via a biasing mechanism 60 that biases the upper rotors 52 toward the upper rail 54. The configuration of the biasing mechanism 60 will be described in detail later.

[0049] As shown in Figure 5, each upper rotating body 52 is formed in a shape having a circumferential surface 52a extending along the circumferential direction of the upper rotating body 52 and vertical walls 52b located on both sides thereof so that an upper rail 54 having a rectangular cross section can be fitted into it.

[0050] As shown in Fig. 6, two lower rotors 53 are provided on the lower portions of the first sliding door body 51A and the second sliding door body 51B. All of the lower rotors 53 are arranged on the external space OS side of the first sliding door body 51A and the second sliding door body 51B. Each lower rotor 53 has a groove with an inverted V-shaped cross section extending along the circumferential direction so as to correspond to the upper portion of the tapered lower rail 55. Although not shown, the upper rotor 52 and the lower rotor 53 have bearings between the outer ring and inner ring that abut against the upper rail 54 and the lower rail 55.

[0051] [About the labyrinth structure] 6, a lower end surface 51Bu is formed at the lower end of the second sliding door body 51B, extending from the lower end of the second sliding door body 51B toward the external space OS. The lower end surface 51Bu forms a so-called labyrinth structure in which the gap between the external space OS-side end of the lower end surface 51Bu and the lower outer cover 43 is narrowed. This labyrinth structure can reduce the amount of liquid, such as water, sprayed from the nozzle 30 leaking into the external space OS.

[0052] 3 and 4, a cover member 44 is provided to cover the area between the lower end of the first sliding door body 51A and the lower outer cover 43. The cover member 44 is provided below the first lower rail 55A in a location where the second lower rail 55B is not present, so as to extend along the extension direction of the first lower rail 55A.

[0053] As shown in Figure 7, the cover member 44 has an upper surface portion 44a, an inclined portion 44b that is configured to be inclined downward from the upper surface portion 44a toward the internal space IS, and a vertical portion 44c that extends vertically downward from the upper surface portion 44a.

[0054] The upper surface portion 44a is located near the lower end of the first sliding door body 51A. The upper surface portion 44a and the vertical portion 44c cover the gap SP between the lower end of the first sliding door body 51A and the lower outer cover 43 in the closed state from the internal space IS side. In other words, in the closed state, the cover member 44 closes the open portion below the lower rail 55. This configuration forms a so-called labyrinth structure in which the gap between the lower end of the first sliding door body 51A and the cover member 44 is narrow. This labyrinth structure makes it possible to reduce the risk of liquid such as water sprayed from the nozzle 30 leaking into the external space OS through the gap SP between the lower end of the first sliding door body 51A in the closed state and the lower outer cover 43.

[0055] The cover member 44 is fixed to the lower outer cover 43 by bolts Bo. The inclined portions 44b can reduce the likelihood that cutting chips and the like blown away by the water sprayed from the nozzle 30 will collide with the bolts Bo.

[0056] [Regarding the biasing mechanism] The biasing mechanisms 60 will be described with reference to FIG. 8. Each biasing mechanism 60 includes a support portion 61 supported by the first sliding door body 51A or the second sliding door body 51B, a movable portion 62 supporting the upper rotating body 52, and a biasing member 63 biasing the movable portion 62 upward. The support portion 61 is fixed to the first sliding door body 51A or the second sliding door body 51B with a bolt Bo. The movable portion 62 is supported by the support portion 61 so as to be movable in the vertical direction by inserting a vertical extension member 61a provided on the support portion 61 into the movable portion 62 in the vertical direction. The biasing member 63 is a spring and is supported by the support portion 61. The biasing member 63 is configured to apply an elastic biasing force to the movable portion 62 to bias the movable portion 62 upward. With the above-described configuration, the biasing mechanism 60 biases the upper rotating body 52 toward the upper rail 54.

[0057] [Regarding sealing materials] 9, the first sliding door body 51A is provided with a sealant 71 that seals the gap between the first sliding door body 51A and the wall body 40 in the closed state and the gap between the first sliding door body 51A and the second sliding door body 51B. The second sliding door body 51B is provided with a sealant 71 that seals the gap between the second sliding door body 51B and the inner wall 47. The inner wall 47 is provided inside the wall body 40, and the first sliding door body 51A and the second sliding door body 51B are accommodated in the space between the inner wall 47 and the wall body 40 in the open state.

[0058] A seal member 71 provided at the left end portion 51Aa of the first sliding door body 51A in FIG. 9 comes into contact with the left wall body 40 in FIG. 9 when in the closed state.

[0059] The sealing material 71 provided at the right end 51Ab of the first sliding door body 51A abuts against the left end 51Ba of the second sliding door body 51B when the first sliding door body 51A is changed from an open state to a closed state, that is, when it is slid in the left direction (opposite the X-direction arrow).

[0060] A seal member 71 provided at the right end portion 51Bb of the second sliding door body 51B abuts against the abutting portion 47a of the inner wall 47 when in the closed state.

[0061] [About the door sensor] 9, a door sensor 73 capable of detecting the open / closed state of the sliding door body 51 is provided at the left end portion of the wall body 40 and the first sliding door body 51A. In this embodiment, the door sensor 73 is configured to detect that the sliding door body 51 is in the closed state when a detectable member (not shown) provided on an abutting member 74 supported by the first sliding door body 51A comes into contact with a detection switch (not shown) of the door sensor 73, but this is not limiting and various detection methods can be adopted.

[0062] [About the sliding door operation when sliding] As shown in Figure 9, the first sliding door body 51A is provided with a gripping portion 72 that an operator can grip, and when changing the state between the open state and the closed state, the operator grasps the gripping portion 72 and manually slides the first sliding door body 51A.

[0063] When changing the first sliding door body 51A from the closed state to the open state, the worker grips the gripping portion 72 and slides the first sliding door body 51A to the right (the direction of the arrow in the X direction). In this embodiment, when the first sliding door body 51A is slid, the abutment member 74 abuts against the left end portion 51Ba of the second sliding door body 51B. When the first sliding door body 51A is slid in this state, the second sliding door body 51B slides in the X direction, changing its state to the open state.

[0064] To change the first sliding door body 51A from the open state to the closed state, the operator grips the gripping portion 72 and slides the first sliding door body 51A to the left (opposite the direction of the X-direction arrow). When the first sliding door body 51A slides, the seal material 71 provided on the right end portion 51Ab of the first sliding door body 51A comes into contact with the left end portion 51Ba of the second sliding door body 51B. When the first sliding door body 51A is slid in this state, the second sliding door body 51B slides in the direction opposite the direction of the X-direction arrow, changing the state to the closed state.

[0065] [Method for manufacturing electronic components] Next, a method for manufacturing a plurality of electronic components Sc by cutting the molded substrate Sb using the cutting device 1 will be described with reference to Fig. 1. The method for manufacturing the electronic components Sc includes a fixing step of placing the molded substrate Sb on the cutting table 5 and then operating the second vacuum pump D2 to fix the molded substrate Sb to the cutting table 5, and a cutting step of cutting the molded substrate Sb with the cutting module A1 (blade 6a) to obtain a plurality of electronic components Sc.

[0066] 2, the substrate supply unit 3 pushes out the shaped substrates Sb one by one from a magazine M1 that stores a plurality of shaped substrates Sb, and supplies the shaped substrates Sb one by one to the positioning unit 4. At this time, the shaped substrates Sb are arranged with their back surfaces facing upward.

[0067] A first transport device (not shown) of the positioning unit 4 positions the shaped substrate Sb by placing the shaped substrate Sb pushed out from the substrate supply unit 3 on the rail unit 4a. Thereafter, the first transport device of the positioning unit 4 transports the positioned shaped substrate Sb to the cutting table 5.

[0068] Next, the second vacuum pump D2 is operated. When the second vacuum pump D2 is operated, air is sucked through the suction holes (not shown) of the holding member 5a of the cutting table 5. As a result, the shaped substrate Sb is sucked onto the holding member 5a and fixed to the cutting table 5 (fixing step).

[0069] When the shaped substrate Sb is fixed by suction onto the cutting table 5, the first position confirmation camera 5d captures an image of the shaped substrate Sb and confirms the position of the shaped substrate Sb. Thereafter, the cutting table 5 moves toward the cutting mechanism 6 along the Y axis in FIG.

[0070] After the cutting table 5 moves below the cutting mechanism 6, the cutting table 5 and the cutting mechanism 6 are moved relatively to each other, whereby the molded substrate Sb is cut into individual electronic components Sc (cutting step). Even while the cutting table 5 moves and the molded substrate Sb is being singulated by the blade 6a, the molded substrate Sb remains fixed by suction.

[0071] When cutting the molded substrate Sb, cutting water is sprayed from the cutting water nozzle 30a onto the blade 6a rotating at high speed, cooling water is sprayed from the cooling water nozzle 30b onto the blade 6a and the molded substrate Sb which are heated by cutting, and cleaning water is sprayed from the cleaning water nozzle 30c to wash away cutting chips, etc. Thereafter, the plurality of electronic components Sc are imaged by the second position confirmation camera 6c as necessary, and the positions, etc. of each of the plurality of electronic components Sc are confirmed.

[0072] After cutting of the molded substrate Sb is completed, the cutting table 5, with the plurality of singulated electronic components Sc held by suction, moves along the Y axis in Fig. 2 in a direction away from the cutting mechanism 6. During this movement, the first cleaner 5e cleans and dries the top surfaces (rear surfaces) of the electronic components Sc.

[0073] Next, a second conveying device (not shown) of the conveying unit 7 picks up the electronic components Sc held on the cutting table 5 from above. The second conveying device of the conveying unit 7 picks up the electronic components Sc and conveys them all together to the inspection table 11 of the inspection storage module B1. During this conveying process, the second cleaner 7a cleans and dries the lower surfaces (surfaces) of the electronic components Sc, and the first optical inspection camera 12 inspects them.

[0074] The inspection table 11 holds the electronic components Sc for optical inspection of the electronic components Sc by the second optical inspection camera 13. The inspection table 11 is movable along the X direction in Fig. 2. Furthermore, the inspection table 11 can be turned upside down.

[0075] The first optical inspection camera 12 captures images of the front surfaces of the electronic components Sc being transported to the inspection table 11 by the second transport device of the transport unit 7. Thereafter, the second transport device of the transport unit 7 places a plurality of electronic components Sc on the holding member of the inspection table 11. After the holding member adsorbs the electronic components Sc, the inspection table 11 is turned upside down. After the inverted inspection table 11 moves above the second optical inspection camera 13, the back surfaces of the electronic components Sc are captured by the second optical inspection camera 13.

[0076] The placement unit 14 places the inspected electronic component Sc. The placement unit 14 sucks the inspected electronic component Sc by suction with the first vacuum pump D1. The placement unit 14 is movable along the Y axis in FIG. 2. The inspection table 11 places the inspected electronic component Sc on the placement unit 14.

[0077] The extraction unit 15 transfers the electronic components Sc placed in the placement unit 14 to a tray. The electronic components Sc are sorted into "good products" or "defective products" based on the results of inspection using the first optical inspection camera 12 and the second optical inspection camera 13. The extraction unit 15 transfers each electronic component Sc to a tray for good products 15a or a tray for defective products 15b based on the results of the sorting. That is, the good electronic components Sc are stored in the tray for good products 15a, and the defective electronic components Sc are stored in the tray for defective products 15b.

[0078] If maintenance such as replacing the blade 6a is required, a maintenance process is performed separately from the fixing process and the cutting process. In the maintenance process, it is confirmed that the cutting device 1 is not operating, and then the sliding door structure is opened. After replacing the blade 6a, the sliding door structure is returned to the closed state. In other words, the method for manufacturing an electronic component according to this embodiment may include the maintenance process.

[0079] [Another embodiment] Hereinafter, another embodiment in which the above embodiment is modified will be described as an example. Note that the same terms and symbols will be used to describe the same components as those in the above embodiment in order to facilitate understanding.

[0080] (1) In the above embodiment, the configuration is described as including the cover member 44 that covers the gap SP between the lower end of the first sliding door body 51A in the closed state and the lower outer cover 43 from the internal space IS, but the present invention is not limited to this. Instead of the cover member 44, a configuration may be provided in which a cover member 44 extends along the extension direction of the upper rail 54 and covers the gap between the upper end of the first sliding door body 51A and the upper outer cover 42 from the internal space IS, or a configuration may be provided in which cover members 44 are provided on both the top and bottom.

[0081] (2) In the above embodiment, an example configuration including a biasing mechanism 60 that biases the upper rotor 52 toward the upper rail 54 has been described, but the present invention is not limited to this. For example, the biasing mechanism 60 may be configured to bias the lower rotor 53 toward the lower rail 55, or may be configured to bias both the upper rotor 52 and the lower rotor 53 toward the upper rail 54 and the lower rail 55, respectively. Also, a configuration not including the biasing mechanism 60 may be used.

[0082] (3) In the above embodiment, the first sliding door body 51A and the second sliding door body 51B have inclined surfaces at the upper and lower portions thereof so as to bulge toward the exterior space, but this is not limiting. The first sliding door body 51A and the second sliding door body 51B may also be configured in a flat plate shape.

[0083] (4) In the above embodiment, the first sliding door body 51A and the second sliding door body 51B are configured to slide to the right in Fig. 4 (the direction of the arrow in the X direction), but this is not limiting. The first sliding door body 51A and the second sliding door body 51B may also be configured to slide to the left in Fig. 4 (the opposite direction to the arrow in the X direction).

[0084] (5) In the above embodiment, the upper portion of lower rail 55 is tapered, narrowing toward the top. However, this is not limiting. For example, lower rail 55 may have a rectangular cross section, similar to upper rail 54. Furthermore, both the lower portion of upper rail 54 and the upper portion of lower rail 55 may be tapered.

[0085] Furthermore, in the above embodiment, the tapered shape is described as an example of a configuration in which the cross section is formed in an inverted V shape, but it is sufficient that the width is narrower towards the upper side, and for example, the cross section may be formed in an inverted U shape, or the cross section may be formed in a trapezoidal shape.

[0086] (6) In the above embodiment, an example was described in which two sliding door bodies 51, a first sliding door body 51A and a second sliding door body 51B, were provided, but a configuration in which three or more sliding door bodies 51 were provided may also be used.

[0087] The configurations disclosed in the above embodiments (including other embodiments, the same applies hereinafter) can be applied in combination with configurations disclosed in other embodiments, unless a contradiction arises. Furthermore, the embodiments disclosed in this specification are merely examples, and the present invention is not limited to these, and can be modified as appropriate within the scope of the purpose of the present invention.

[0088] The cutting device (1) and the method for producing the cut product (Sc) described in the above embodiment will be outlined below.

[0089] <1> One aspect of the cutting device (1) includes a cutting mechanism (6) having a rotary blade (6a) for cutting an object (Sb) to be cut, a nozzle (30) for spraying a liquid toward the rotary blade (6a), a wall (40) for separating an internal space (IS) in which the cutting mechanism (6) is provided from an external space (OS), and a sliding door structure (50) provided in an opening (41) formed in the wall (40). The sliding door structure (50) has a plurality of sliding door bodies (51) and a sliding mechanism (50S) for switching between an open state and a closed state by sliding the plurality of sliding door bodies (51) in the same direction. The door mechanism (50S) has a plurality of rail pairs (54, 55) corresponding to each of the sliding door bodies (51) and a plurality of rotating bodies (52, 53) provided on each of the sliding door bodies (51), and each rail pair (54, 55) has an upper rail (54) against which the rotating bodies (52, 53) provided on the upper part of the sliding door body (51) abut, and a lower rail (55) against which the rotating bodies (52, 53) provided on the lower part of the sliding door body (51) abut, and the plurality of upper rails (54) are arranged so as to be aligned vertically, and the plurality of lower rails (55) are arranged so as to be aligned vertically.

[0090] In the cutting device (1) of this embodiment, the multiple sliding doors (51) open and close by sliding in the same direction. As a result, there is no need to secure space on the opposite side of the sliding direction of the sliding doors (51) for the sliding doors (51) to slide in the opening direction. This makes it possible to provide a wide opening when the sliding doors (51) are in the open state.

[0091] <2> the above <1> In the cutting device (1) described above, it is preferable that the rotating bodies (52, 53) are arranged on the outside space (OS) side of the sliding door body (51).

[0092] This makes it possible to prevent the liquid sprayed from the nozzles from adhering to the rotors (52, 53) and the cutting chips from colliding with the rotors (52, 53), thereby preventing deterioration of the rotors (52, 53) due to the liquid and damage to the rotors due to the collision of the cutting chips, etc.

[0093] <3> the above <2> In the cutting device (1) described above, it is preferable to provide outer covers (42, 43) that cover the rotating bodies (52, 53) from the outside space (OS) side.

[0094] This makes it possible for the outer cover parts (42, 43) to prevent the body of a worker or the like from colliding with the rotating body (42, 43) from the outside space, thereby preventing damage to the rotating body (42, 43) due to a collision.

[0095] <4> the above <3> In the cutting device (1) described above, it is preferable to provide an upper support member (56) that supports the upper rail (54) on the outer cover (42), and a lower support member (57) that supports the lower rail (55) on the outer cover (43).

[0096] According to this, by using the lower support member 57, it is possible to fix the upper rail 54 and the lower rail 55 by utilizing the outer cover 43. As a result, it is possible to simplify the structure for fixing the upper rail 54 and the lower rail 55.

[0097] <5> the above <3> or <4> In the cutting device (1) described above, it is preferable to provide a labyrinth structure between the lower end of the sliding door body (51) and the outer cover (43) (SP).

[0098] This reduces the amount of liquid sprayed from the nozzle that escapes into the external space between the lower end of the sliding door body (51) and the outer cover (43). In addition, cutting debris and the like are prevented from landing on the lower rail (55), making it possible to properly open and close the sliding door body (51).

[0099] <6> the above <3> or <4> In the cutting device (1) described above, it is preferable to provide a cover member (44) that covers a space (SP) between the lower end of the sliding door body (51) and the outer cover (43).

[0100] This makes it possible to reduce the amount of liquid sprayed from the nozzle that escapes into the external space from between the lower end of the sliding door body (51) and the outer cover (43).

[0101] <7> the above <1> from <6> In the cutting device (1) described in any one of (1) to (3), the lower rail (55) is preferably formed in a tapered shape that narrows toward the upper side.

[0102] According to this, the lower rail 55 is tapered so that its width narrows toward the top, resulting in a sloped configuration. Even if cutting debris or the like accesses the lower rail 55, the cutting debris or the like slides down the slope, thereby preventing the inconvenience of the cutting debris remaining on the lower rail 55.

[0103] <8> the above <1> from <7> In the cutting device (1) described in any one of the above, it is preferable that a biasing mechanism (60) is provided that biases the rotating body (52) provided in the upper part of the sliding door body (51) toward the upper rail (54).

[0104] This can reduce the likelihood of the rotor (52) coming off the upper rail (54).

[0105] <9> One embodiment of the method for producing the cut product (Sc) is <1> from <8> The method for manufacturing a cut product (Sc) using the cutting device (1) described in any one of the above includes a step of manufacturing the cut product (Sc) by cutting the object to be cut (Sb) using a rotary blade (6a).

[0106] This makes it possible to manufacture cut products (Sc) using the cutting device (1) having the above-mentioned effects. [Industrial Applicability]

[0107] The present disclosure can be used in a cutting device and a method for manufacturing a cut product. [Explanation of symbols]

[0108] 1: Cutting device 6: Cutting mechanism 6a: Blade (rotary blade) 30: Nozzle 40: Wall 41 :Aperture 42: Upper outer cover (outer cover) 43: Lower outer cover (outer cover) 44: Cover member 50: Sliding door structure 50S: Slide mechanism 51: Sliding door body 52: Upper rotating body (rotating body) 53: Lower rotor (rotor) 54: Upper rail (pair of rails) 55: Lower rail (pair of rails) 56: Upper support member 57: Lower support member 60: Biasing mechanism IS: interior space OS: External space SP: Between the bottom end of the first sliding door and the lower outer cover Sb: Preformed substrate (object to be cut) Sc:Electronic parts (cut products)

Claims

1. a cutting mechanism having a rotary blade for cutting an object to be cut; a nozzle that sprays a liquid toward the rotary blade; a wall that separates an internal space in which the cutting mechanism is provided from an external space; a sliding door structure provided in an opening formed in the wall body, The sliding door structure has a plurality of sliding door bodies and a sliding mechanism that switches between an open state and a closed state by sliding the plurality of sliding door bodies in the same direction, The slide mechanism includes a plurality of rail pairs corresponding to the respective slide door bodies, and a plurality of rotating bodies provided on the respective slide door bodies, Each of the rail pairs has an upper rail provided in an upper portion of the sliding door body and against which the rotating body abuts, and a lower rail provided in a lower portion of the sliding door body and against which the rotating body abuts, A cutting device in which the plurality of upper rails are arranged to be aligned in the vertical direction, and the plurality of lower rails are arranged to be aligned in the vertical direction.

2. The cutting device according to claim 1 , wherein the rotating body is disposed on the exterior space side of the sliding door body.

3. The cutting device according to claim 2, further comprising an outer cover that covers the rotating body from the outside space side.

4. The cutting device according to claim 3 , further comprising an upper support member for supporting the upper rail on the outer cover, and a lower support member for supporting the lower rail on the outer cover.

5. 5. The cutting device according to claim 3, further comprising a labyrinth structure between the lower end of the sliding door and the outer cover.

6. 5. The cutting device according to claim 3, further comprising a cover member that covers a space between the lower end of the sliding door body and the outer cover.

7. The cutting device according to claim 1 , wherein the lower rail is tapered so that its width narrows toward its upper side.

8. The cutting device according to any one of claims 1 to 7, further comprising a biasing mechanism that biases the rotating body provided at the upper portion of the sliding door body toward the upper rail.

9. A method for manufacturing a cut product using the cutting device according to any one of claims 1 to 8, A method for manufacturing a cut product, comprising the step of manufacturing a cut product by cutting the object to be cut using the rotary blade.

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