Photodetector and method for manufacturing photodetector

Abstract

To suitably suppress occurrence of dew condensation in a package while suppressing deterioration of support stability of a window member with respect to the package.SOLUTION: The photodetector 1 includes a light receiving element 10 and a package 20. The package 20 includes a bottom wall 30, a frame wall 40, and a window member 50. The frame 50a 40 includes a first portion 41 surrounding the light receiving device 10 and having an upper surface 41b facing the inner surface 50c of the window member 50, and a second portion 42 located on the first portion 41 and having an inner side surface 42c surrounding the side surface wall of the window member 50. The window member 50 is disposed between the inner side 50a and the upper side 41b, and is bonded to the upper side 50c via the bonding member 60 in contact with the side 41b. A vent hole 70 is provided between the window member 50 and the frame wall 40. The vent hole 70 is formed by a first space 71 between the inner side 50a and the upper side 41b, and a second space 72 between the side 50c and the inner side 42c.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE The present disclosure relates to photodetectors and methods for manufacturing photodetectors. [Background technology]

[0002] Conventionally, a photodetector (photosensor device) has been known in which an optical sensor element is placed in a package made of a substrate having a cavity, and a window member (glass substrate) is bonded to the upper surface of the substrate so as to cover the opening above the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-191834 Summary of the Invention [Problem to be solved by the invention]

[0004] In a photodetector having the above-described configuration, if the inside of the package is hermetically sealed by the window member, condensation may occur on the window member due to the temperature difference between the inside and outside of the package. Furthermore, if an air vent is provided between the window member and the package, the adhesive that bonds the window member to the package is omitted at the air vent, which may reduce the support stability of the window member relative to the package.

[0005] Therefore, one aspect of the present disclosure aims to provide a photodetector that can effectively suppress the occurrence of condensation within a package while suppressing a decrease in the support stability of a window member relative to the package, and a method for manufacturing the photodetector. [Means for solving the problem]

[0006] The present disclosure includes the following photodetectors [1] to

[13] and methods for manufacturing the photodetectors

[14] to

[16] .

[0007] [1] A light receiving element; a package that houses the light receiving element, The package comprises: a bottom wall having a mounting surface on which the light receiving element is mounted; a frame wall disposed on a side of the bottom wall where the mounting surface is located, and provided so as to surround the light receiving element when viewed from a first direction perpendicular to the mounting surface; a window member joined to the frame wall, the window member having an inner surface facing the mounting surface and a side surface connected to an outer edge of the inner surface and extending in the first direction; The frame wall is a first portion that surrounds the light receiving element when viewed from the first direction and has a support surface that faces the inner surface of the window member in the first direction; a second portion located on the first portion and having an inner surface surrounding the side surface of the window member when viewed from the first direction; the window member is bonded to the support surface via an adhesive member that is disposed between the inner surface and the support surface and that contacts the side surface; the adhesive member is not provided between the window member and the frame wall, and a vent hole is provided between the window member and the frame wall, which communicates between the inside and the outside of the package; A photodetector, wherein the ventilation hole is formed by a first space between the inner surface of the window member and the support surface, and a second space located between the side surface and the inner surface of the window member when viewed from the first direction and communicating with the first space.

[0008] In the photodetector described above in [1], ventilation between the inside and outside of the package is achieved through a vent provided between the window member and the frame wall. As a result, condensation within the package can be suppressed. Incidentally, providing such a vent (i.e., a portion where the adhesive material for joining the window member and the frame wall is omitted) would reduce the bonding strength between the window member and the frame wall by the amount of the adhesive material omitted. In the photodetector described above, the adhesive material is provided not only in a position facing the inner surface of the window member (i.e., between the inner surface and the support surface) but also in a position contacting the side surface of the window member, thereby effectively improving the support stability of the window member relative to the frame wall. As described above, the photodetector described above can effectively suppress condensation within the package while suppressing a decrease in the support stability of the window member relative to the package.

[0009] [2] The photodetector of [1], wherein the width of the ventilation hole when viewed from the first direction is greater than twice the shortest distance from the outer edge of the light receiving element to the inner edge of the frame wall.

[0010] [3] The photodetector of [1] or [2], wherein the width of the vent hole when viewed from the first direction is greater than twice the thickness of the window member in the first direction.

[0011] According to the above configurations [2] and [3], by ensuring a sufficient width for the ventilation opening, it is possible to prevent the ventilation opening from being unintentionally blocked.

[0012] [4] The photodetector according to any one of [1] to [3], wherein when viewed from the first direction, the inner edge of the first portion is formed in a substantially rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner edge of the first portion is formed in a curved shape.

[0013] According to the configuration [4] above, the contact area between the inner surface of the window member and the support surface of the frame wall can be increased compared to when the at least one corner of the first portion is not curved (i.e., when the corner is right-angled), thereby further improving the support stability of the window member relative to the frame wall.

[0014] [5] The photodetector according to any one of [1] to [4], wherein when viewed from the first direction, the inner surface of the second portion is formed in a substantially rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner surface is formed in a curved shape.

[0015] According to the configuration [5] above, when excess adhesive material occurs at at least one corner of the second portion, the excess adhesive material can be allowed to escape (dispersed) along the curved surface of the corner, which results in a portion of the excess adhesive material that has accumulated at a specific location on the corner being pushed out toward the inside of the frame wall, preventing it from interfering with components such as the light receiving element arranged on the bottom wall.

[0016] [6] A photodetector according to any one of [1] to [5], wherein when viewed from the first direction, the inner surface of the second portion is formed in a substantially rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner surface has a shape that widens in a direction away from the window member.

[0017] According to the configuration [6] above, the excess adhesive material can be released into the portion of the second part that extends away from the window member at at least one corner portion, thereby effectively preventing some of the adhesive material from flowing inside the frame wall as described above.

[0018] [7] The bottom wall and the frame wall are formed separately from each other, The photodetector according to any one of [1] to [6], wherein the frame wall is fixed to the bottom wall by being joined to the mounting surface.

[0019] The configuration [7] above facilitates package manufacturing. Furthermore, when the bottom wall and the frame wall are constructed as separate bodies, the expansion of gas inside the package can cause a gap between the bottom wall and the frame wall, potentially resulting in package damage. However, the vent hole described above can prevent package damage caused by such gas expansion.

[0020] [8] The first portion and the second portion are formed separately from each other, The photodetector according to any one of [1] to [7], wherein the second portion is fixed to the first portion by being bonded to the support surface.

[0021] According to the configuration [8] above, a frame wall consisting of a first part and a second part having the above-described configuration (i.e., a configuration in which the support surface of the first part supports the inner surface of the window member and the inner surface of the second part surrounds the side surface of the window member) can be manufactured more easily than when the first part and the second part are formed by cutting an integrally formed member. As a result, the manufacturing efficiency of the photodetector (package) can be improved.

[0022] [9] The photodetector according to any one of [1] to [8], wherein the adhesive member provided on the side surface of the window member is in contact with the inner surface of the second portion.

[0023] According to the above configuration [9], the first and second parts can be fixed to each other via the adhesive member, thereby improving the bonding strength between the first and second parts and suitably improving the support stability of the window member relative to the frame wall.

[0024]

[10] A photodetector according to any one of [1] to [9], wherein the distance between the side surface of the window member and the inner surface of the second portion in the second space is shorter than the distance in the first space in the direction in which the side surface and the inner surface face each other.

[0025] According to the configuration

[10] above, by making the width of the portion where the inner surface of the window member and the support surface of the first portion contact each other via the adhesive member larger than at least the distance between the side surface of the window member and the inner surface of the second portion, it is possible to improve the support stability of the window member relative to the first portion (support surface). Also, by shortening the width of the second space (the distance between the side surface of the window member and the inner surface of the second portion), which serves as an entrance to and exit from the outside of the package, it is possible to prevent foreign matter from entering the inside of the package from the outside.

[0026]

[11] Any of the photodetectors [1] to

[10] , wherein the distance between the side surface of the window member and the inner surface of the second portion in the second space is longer than the distance between the inner surface of the window member and the support surface of the first portion in the first space.

[0027] According to the configuration

[11] above, by ensuring a certain width of the second space, it is possible to prevent the second space from being unintentionally blocked by an adhesive material, etc., and by bringing the inner surface of the window member and the support surface of the first part closer than the width of the second space, it is possible to prevent foreign matter from entering the inside of the package from outside the package in that part (first space).

[0028]

[12] When viewed from the first direction, the window member is formed in a substantially rectangular shape, the vent holes are provided at positions corresponding to each of a pair of side portions of the window member extending along a second direction perpendicular to the first direction, A photodetector according to any one of [1] to

[11] , wherein each of a pair of side portions of the window member extending along a third direction perpendicular to each of the first direction and the second direction is bonded to the support surface via the adhesive member.

[0029] According to the configuration

[12] above, by joining a pair of sides of the window member extending in the third direction to the frame wall (first portion) via an adhesive member, the window member can be stably supported in a well-balanced manner relative to the first portion. Also, by providing a pair of ventilation holes along a pair of sides of the window member extending in the second direction, an air flow can be formed along the third direction, thereby improving the breathability of the package.

[0030]

[13] A photodetector according to any one of [1] to

[12] , wherein the height position of the outer surface of the window member opposite the inner surface, based on the mounting surface, is lower than the height position of the surface of the frame wall opposite the side on which the bottom wall is located, based on the mounting surface.

[0031] According to the configuration

[13] above, by not allowing the outer surface of the window member to protrude outward, it is possible to reduce the risk of an external member coming into contact with the window member and damaging the window member. Furthermore, when a photodetector is manufactured by dicing using a dicing tape, which will be described later, it is possible to separate the outer surface of the window member from the dicing tape, thereby preventing the outer surface of the window member from being damaged during dicing.

[0032]

[14] [7] A method for manufacturing a photodetector, a first step of preparing a bottom wall layer in which a plurality of the bottom walls corresponding to the plurality of photodetectors are formed in a continuous manner along a second direction perpendicular to the first direction, a frame wall layer in which a plurality of the frame walls corresponding to the plurality of photodetectors are formed in a continuous manner along the second direction, a plurality of the light receiving elements, and a plurality of the window members; a second step of arranging the frame wall layer and the plurality of light receiving elements on the bottom wall layer after the first step so that each of the plurality of bottom walls included in the bottom wall layer corresponds to each of the plurality of frame walls included in the frame wall layer, and each of the plurality of light receiving elements; a third step, after the second step, of joining each of the plurality of window members to each of the plurality of frame walls with the adhesive member so that the ventilation hole is formed in each of the plurality of frame walls included in the frame wall layer; a fourth step, after the third step, of cutting the bottom wall layer and the frame wall layer joined together to obtain a plurality of the photodetectors.

[0033] According to the manufacturing method

[14] above, the manufacturing efficiency of the photodetector can be improved compared to a method in which pre-divided components (bottom wall, frame wall, etc.) are prepared and the photodetector is assembled one by one.

[0034]

[15] The bottom wall layer is provided so that a plurality of the bottom walls are connected along the second direction and also so that a plurality of the bottom walls are connected along a third direction perpendicular to each of the first direction and the second direction, The length of the bottom wall layer along the second direction is longer than the length of the bottom wall layer along the third direction;

[14] The method for manufacturing a photodetector, wherein in the third step, the adhesive member is arranged on an edge portion of each of the plurality of frame walls along the third direction so that the ventilation hole is formed on an edge portion of each of the plurality of frame walls along the second direction.

[0035] According to the manufacturing method

[15] above, by providing the adhesive member along the short side direction (third direction) in which warping of the combined structure of the bottom wall layer and the frame wall layer is less likely to occur, the support stability of the window member against the frame wall via the adhesive member can be improved compared to when the adhesive member is provided along the long side direction (second direction) in which warping is more likely to occur.

[0036]

[16] The fourth step is a step of placing a dicing tape so as to cover the plurality of window members provided corresponding to the plurality of frame walls included in the frame wall layer and to be in close contact with a surface of the frame wall layer opposite to a side on which the bottom wall layer is located; With the dicing tape in place, cutting the bottom wall layer and the frame wall layer from the side of the bottom wall layer opposite to the side on which the frame wall layer is located.

[0037] According to the manufacturing method

[16] above, multiple photodetectors can be easily obtained by dicing (cutting) while appropriately preventing the water used during dicing from flowing into the inside of the package through the vent holes of each photodetector. [Effects of the Invention]

[0038] According to one aspect of the present disclosure, it is possible to provide a photodetector and a method for manufacturing the photodetector that can effectively suppress the occurrence of condensation within the package while suppressing a decrease in the support stability of the window member relative to the package. [Brief explanation of the drawings]

[0039] [Figure 1]FIG. 1 is a plan view of a photodetector according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional view of the photodetector taken along line II-II in FIG. [Figure 3] FIG. 3 is a cross-sectional view of the photodetector taken along line III-III in FIG. [Figure 4] FIG. 4 is a plan view of the photodetector before the window member is disposed. [Figure 5] FIG. 5 is a diagram showing a second step of the example of the method for manufacturing the photodetector. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. [Figure 7] FIG. 7 is a diagram showing a second step of the example of the method for manufacturing the photodetector. [Figure 8] FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. [Figure 9] FIG. 9 is a diagram showing a third step in the example of the method for manufacturing the photodetector. [Figure 10] FIG. 10 is a cross-sectional view taken along line XX in FIG. [Figure 11] FIG. 11 is a diagram showing a fourth step in the example of the method for manufacturing the photodetector. [Figure 12] FIGS. 12A to 12F are diagrams showing modified examples of the arrangement of the adhesive members. DETAILED DESCRIPTION OF THE INVENTION

[0040] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the following description, the same or equivalent elements will be designated by the same reference numerals, and redundant description will be omitted.

[0041] [Photodetector configuration] The configuration of a photodetector 1 according to one embodiment will be described with reference to Figures 1 to 4. As shown in Figures 1 to 3, the photodetector 1 includes a photodetector 10 and a package 20 that houses the photodetector 10. The package 20 has a bottom wall 30, a frame wall 40, and a window member 50. As an example, the photodetector 1 (package 20) has a substantially rectangular parallelepiped outer shape.

[0042] The bottom wall 30 constitutes the bottom of the package 20 (the portion opposite to the side where the window member 50, which is the light incident side, is disposed) and is formed, for example, in the shape of a rectangular plate. The bottom wall 30 is, for example, a glass epoxy substrate having an internal wiring structure. The bottom wall 30 has a mounting surface 30a, a bottom surface 30b, and a side surface 30c. The mounting surface 30a faces the inside of the package 20. The bottom surface 30b is located on the opposite side of the mounting surface 30a and faces the outside of the package 20. The side surface 30c is connected to the outer edge of the mounting surface 30a and the outer edge of the bottom surface 30b and extends in a direction perpendicular to the mounting surface 30a (the Z-axis direction, described below). The light receiving element 10 is mounted on the mounting surface 30a. The bottom surface 30b is mounted to an external device (not shown) (for example, a circuit board on which the photodetector 1 is mounted) via a bonding member such as solder. In the following description, the direction perpendicular to the bottom wall 30 (mounting surface 30a) is referred to as the Z-axis direction (first direction), the direction perpendicular to the Z-axis direction and parallel to one side of the bottom wall 30 is referred to as the X-axis direction (second direction), and the direction perpendicular to both the Z-axis direction and the Y-axis direction is referred to as the Y-axis direction (third direction).

[0043] As shown in FIGS. 2 and 3 , the light receiving element 10 is mounted on the mounting surface 30a via a readout integrated circuit (ROIC) 11. As an example, the readout integrated circuit 11 is disposed on a bonding pad P1 provided on the mounting surface 30a via an adhesive resin R such as epoxy resin. The light receiving element 10 is disposed on the upper surface of the readout integrated circuit 11 via a plurality of bump electrodes B. The light receiving element 10 may be connected to the readout integrated circuit 11 by direct bonding. Alternatively, the light receiving element 10 may be disposed on the upper surface of the readout integrated circuit 11 and connected to the readout integrated circuit 11 by metal wiring (bonding wire). The light receiving element 10 is, for example, an InGaAs photodiode or a SiPM (Silicon Photomultiplier) for LiDAR (Light Detection and Ranging). The light receiving element 10 may be disposed on the mounting surface 30a without the readout integrated circuit 11.

[0044] 3, in addition to the light receiving element 10 and the readout integrated circuit 11, bonding pads P2 provided on the sides of the bonding pad P1 (in the example of FIG. 3, on both sides of the bonding pad P1 in the Y-axis direction), metal wiring W connecting the bonding pad P2 and the readout integrated circuit 11, and the like may be arranged inside the package 20. Note that the bonding pads P2 and the metal wiring W are not shown in the drawings other than FIG.

[0045] The frame wall 40 is disposed on the side of the bottom wall 30 where the mounting surface 30a is located, and is provided so as to surround the light receiving element 10 as viewed from the Z-axis direction. That is, the frame wall 40 is formed in a ring shape (a rectangular ring shape in this embodiment) as viewed from the Z-axis direction so as to form an accommodation space S for accommodating each component (light receiving element 10, readout integrated circuit 11, etc.) within the package 20. In this embodiment, the bottom wall 30 and the frame wall 40 are formed as separate pieces. The frame wall 40 is fixed to the bottom wall 30 by being joined to the mounting surface 30a of the bottom wall 30 via adhesive, solder, low-melting-point glass, etc.

[0046] The window member 50 is formed of, for example, a rectangular plate-like member made of a translucent material such as glass. That is, when viewed from the Z-axis direction, the window member 50 is formed in a substantially rectangular shape. The window member 50 has an inner surface 50a facing the mounting surface 30a of the bottom wall 30, an outer surface 50b opposite the inner surface 50a and facing the outside of the package 20, and a side surface 50c connected to the outer edges of the inner surface 50a and the outer surface 50b and extending in the Z-axis direction. In order to suitably guide incident light from outside the package 20 to the light receiving element 10 inside the package 20, an anti-reflection coating (AR coating) may be provided on the inner surface 50a and the outer surface 50b.

[0047] The frame wall 40 has a first portion 41 and a second portion 42 .

[0048] The first portion 41 is a portion that surrounds the light receiving element 10 when viewed from the Z-axis direction. The first portion 41 is formed in a rectangular ring shape when viewed from the Z-axis direction. The first portion 41 is formed, for example, from the same glass epoxy material as the bottom wall 30. The first portion 41 has a lower surface 41a, an upper surface 41b, an inner surface 41c, and an outer surface 41d.

[0049] The lower surface 41a is a surface that faces the mounting surface 30a of the bottom wall 30 and is joined to the mounting surface 30a. The upper surface 41b is located on the opposite side of the lower surface 41a and faces the second portion 42. The upper surface 41b functions as a support surface that faces a part of the inner surface 50a of the window member 50 in the Z-axis direction. In other words, a part (inner part) of the upper surface 41b overlaps a part (outer part) of the window member 50 when viewed from the Z-axis direction.

[0050] The inner surface 41c is a surface that is connected to the inner edges of the lower surface 41a and the upper surface 41b and extends in the Z-axis direction. That is, the inner surface 41c faces the storage space S inside the package 20. The outer surface 41d is located on the opposite side to the inner surface 41c and faces the outside of the package 20. The outer surface 41d is flush with the side surface 30c of the bottom wall 30.

[0051] 4, when viewed from the Z-axis direction, the inner edge of the first portion 41 (i.e., the inner surface 41c) is formed in a substantially rectangular shape, and at least one corner (all four corners 41e in this embodiment) corresponding to the four corners of the inner edge of the first portion 41 is formed in a curved surface shape. As an example, the corner 41e is curved in an R shape when viewed from the Z-axis direction.

[0052] The second portion 42 is located on the upper surface 41b of the first portion 41 and surrounds the side surface 50c of the window member 50 when viewed from the Z-axis direction. The second portion 42 is formed in a rectangular ring shape when viewed from the Z-axis direction. The second portion 42 is formed, for example, from the same glass epoxy material as the first portion 41. The second portion 42 has a lower surface 42a, an upper surface 42b, an inner surface 42c, and an outer surface 42d.

[0053] The lower surface 42a is a surface facing the upper surface 41b of the first portion 41 and is joined to the upper surface 41b. That is, the second portion 42 is fixed to the first portion 41 by joining the lower surface 42a to the upper surface 41b of the first portion 41 via an adhesive, solder, low-melting-point glass, or the like.

[0054] The top surface 42b is located opposite the bottom surface 42a and faces outward from the package 20. As shown in FIG. 2, the top surface 42b protrudes outward (upward in FIG. 2) from the outer surface 50b of the window member 50 in the Z-axis direction. That is, the height position of the outer surface 50b of the window member 50 relative to the mounting surface 30a is lower than the height position of the top surface 42b (the surface opposite to the side where the bottom wall 30 is located) of the frame wall 40 (second portion 42) relative to the mounting surface 30a. A distance d4 between the outer surface 50b and the top surface 42b in the Z-axis direction is set to, for example, not less than 200 μm and not more than 300 μm.

[0055] The inner surface 42c is a surface that is connected to the inner edge portions of the lower surface 42a and the upper surface 42b and extends in the Z-axis direction. The inner surface 42c faces the side surface 50c of the window member 50. A small gap is provided between the inner surface 42c and the side surface 50c. In other words, the inner surface 42c is positioned outward from the inner surface 41c of the first portion 41 when viewed in the Z-axis direction so that the window member 50 fits inside the second portion 42 with the side surface 50c of the window member 50 spaced apart from the inner surface 42c.

[0056] The outer surface 42d is located on the opposite side to the inner surface 42c and faces outward from the package 20. The outer surface 42d is flush with the side surface 30c of the bottom wall 30 and the outer surface 41d of the first portion 41. That is, the thickness of the second portion 42 (the distance between the inner surface 42c and the outer surface 42d) is smaller than the thickness of the first portion 41 (the distance between the inner surface 41c and the outer surface 41d).

[0057] 1 and 4, when viewed from the Z-axis direction, the inner surface 42c of the second portion 42 is formed in a substantially rectangular shape, and a corner corresponding to at least one of the four corners of the inner surface 42c (in this embodiment, all four corners 42e) is formed in a curved shape. Furthermore, in this embodiment, the corner corresponding to at least one of the four corners of the inner surface 42c (in this embodiment, all four corners 42e) has a shape that widens in a direction away from the corner of the window member 50. As an example, the corner 42e has a shape that widens outward in a substantially arc shape when viewed from the Z-axis direction.

[0058] As shown in FIGS. 1 and 2, the window member 50 is bonded to the upper surface 41b (support surface) of the first portion 41 via an adhesive member 60. The adhesive member 60 is formed of a resin such as silicone. As shown in FIG. 2, the adhesive member 60 is disposed between the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41, and is provided so as to contact the side surface 50c of the window member 50. As shown in FIG. 1, as an example in this embodiment, the adhesive member 60 is provided on each of a pair of side portions 51 extending along the Y-axis direction of the window member 50. That is, in this embodiment, each of the pair of side portions 51 of the window member 50 is bonded to the upper surface 41b via the adhesive member 60. Furthermore, as shown in FIG. 2, in this embodiment, the adhesive member 60 that contacts the side surface 50c of the window member 50 contacts the inner surface 42c of the second portion 42.

[0059] The position of the upper surface of the portion of the adhesive member 60 that contacts and covers the side surface 50c may be approximately flush with the outer surface 50b of the window member 50, or may be higher than the outer surface 50b, or may be lower than the outer surface 50b. From the perspective of ensuring suitable support stability for the window member 50, it is preferable that the upper surface of the portion of the adhesive member 60 that contacts and covers the side surface 50c be located closer to the outer surface 50b than the middle position of the window member 50 in the Z-axis direction (the middle position between the inner surface 50a and the outer surface 50b).

[0060] 1 and 3, no adhesive member 60 is provided between the window member 50 and the frame wall 40 (second portion 42), and ventilation holes 70 are provided to communicate between the inside and outside of the package 20. As shown in Fig. 1, as an example in this embodiment, ventilation holes 70 are provided at positions corresponding to each of a pair of side portions 52 of the window member 50 extending along the X-axis direction.

[0061] 3, the ventilation opening 70 is formed by a first space 71 and a second space 72. The first space 71 is a space between the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41. The second space 72 is a space that is located between the side surface 50c of the window member 50 and the inner surface 42c of the second portion 42 when viewed from the Z-axis direction, and communicates with the first space 71.

[0062] A single continuous space (the combined space of the first space 71 and the second space 72) where no adhesive member 60 is provided is defined as a single ventilation hole 70. That is, in this embodiment, two ventilation holes 70 are defined as shown in FIG. 4. A plurality of ventilation holes 70 may be provided as in this embodiment, or only one ventilation hole 70 may be provided. That is, it is sufficient that at least one ventilation hole 70 is provided in the photodetector 1. Furthermore, it is preferable that at least one ventilation hole 70 (for example, the ventilation hole 70 having the maximum width w1 described below) satisfies the following first to third dimensional conditions. These dimensional conditions will be described with reference to FIG. 4.

[0063] (First dimensional condition) When viewed from the Z-axis direction, the width w1 of the ventilation opening 70 is preferably larger than the length of the ventilation opening 70 along a direction perpendicular to the inner surface 42c at the position where the ventilation opening 70 is provided (i.e., the distance d from the inner surface 41c of the first portion 41 to the inner surface 42c of the second portion 42). Here, the "width w1 of the ventilation opening 70" refers to the length of the ventilation opening 70 along the side of the window member 50 where the ventilation opening 70 is provided. In this embodiment, the ventilation opening 70 is provided on the side of the window member 50 extending in the X-axis direction, and therefore the width w1 of the ventilation opening 70 refers to the length of the ventilation opening 70 in the X-axis direction. Setting the width of the ventilation opening 70 so as to satisfy the relationship "w1>d" ensures that the width of the ventilation opening 70 is at least a certain width, thereby preventing the ventilation opening 70 from being unintentionally blocked.

[0064] (Second dimensional condition) When viewed from the Z-axis direction, the width w1 of the ventilation hole 70 is preferably greater than twice the shortest distance w2 (in this embodiment, the distance from the end of the light-receiving element 10 along the X-axis direction to the inner surface 41c) from the outer edge of the light-receiving element 10 to the inner edge of the frame wall 40 (i.e., the inner surface 41c of the first portion 41). Typically, the amount of adhesive member 60 provided on the upper surface 41b of the first portion 41 along the edge of the window member 50 is adjusted so that the adhesive member 60 does not come into contact with the light-receiving element 10 (i.e., the adhesive member 60 does not extend inside the frame wall 40 and reach the portion where the light-receiving element 10 is provided). Therefore, by setting the width w1 of the ventilation hole 70 so as to satisfy the above relationship "w1 > w2 × 2," it is possible to sufficiently reduce the possibility that the adhesive member 60 will unintentionally block the portion intended to be the ventilation hole 70 (i.e., the area designed to function as the ventilation hole 70).

[0065] (Third dimensional condition) When viewed from the Z-axis direction, the width w1 of the ventilation opening 70 is preferably greater than twice the thickness t (see FIG. 2) of the window member 50 in the Z-axis direction. The thickness t of the window member 50 is, for example, 0.3 mm or more and 0.55 mm or less. By setting the width of the ventilation opening 70 so as to satisfy the above relationship "w1>t×2," it is possible to ensure a sufficient width for the ventilation opening 70, and to sufficiently reduce the possibility of the ventilation opening 70 being unintentionally blocked.

[0066] [Functions and Effects of the Photodetector of this Embodiment] In the photodetector 1, ventilation between the inside and outside of the package 20 can be achieved through the ventilation hole 70 provided between the window member 50 and the frame wall 40. As a result, the occurrence of condensation inside the package 20 (e.g., condensation on the window member 50) can be suppressed. Furthermore, in the case where gas inside the package 20 (the housing space S) expands due to, for example, a temperature rise (e.g., a temperature rise during a reflow process for mounting the bottom wall 30 of the photodetector 1 to an external device via a solder member), the expanded gas can be appropriately released to the outside of the package 20 through the ventilation hole 70. This can also suppress damage to the package 20 caused by the gas expanded inside the package 20. Note that if such a ventilation hole 70 (i.e., a portion where the adhesive member 60 for bonding the window member 50 and the frame wall 40 is omitted) is provided, the bonding strength between the window member 50 and the frame wall 40 will be reduced by the amount of the adhesive member 60 omitted. 2, in the photodetector 1, the adhesive member 60 is provided not only in a position facing the inner surface 50a of the window member 50 (i.e., between the inner surface 50a and the upper surface 41b of the first portion 41), but also in a position contacting the side surface 50c of the window member 50, thereby effectively improving the support stability of the window member 50 relative to the frame wall 40. As described above, the photodetector 1 can effectively prevent condensation from occurring inside the package 20 by the vent hole 70, while preventing a decrease in the support stability of the window member 50 relative to the package 20.

[0067] 4, the corner 41e of the first portion 41 is formed to have a curved surface when viewed from the Z-axis direction. With the above configuration, at least one corner 41e of the first portion 41 (all four corners 41e in this embodiment) can have a larger contact area between the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41 than when the corner 41e is not curved (i.e., when the corner 41e is formed to have a right-angled shape when viewed from the Z-axis direction). As a result, the support stability of the window member 50 with respect to the frame wall 40 (first portion 41) can be further improved.

[0068] 4, when viewed from the Z-axis direction, the corners 42e of the second portion 42 are formed in a curved shape. According to the above configuration, when excess adhesive material 60 occurs at at least one corner 42e of the second portion 42 (all four corners 42e in this embodiment), the excess adhesive material 60 can be allowed to escape (dispersed) along the surface shape of the corners 42e, which are formed in a curved shape. As a result, a portion of the excess adhesive material 60 that has accumulated in one specific location of the corner 42e is pushed toward the inside of the frame wall 40 (first portion 41), and interference with components such as the light receiving element 10 arranged on the bottom wall 30 can be suppressed.

[0069] 4, in this embodiment, the corner 42e has a shape that widens in a direction away from the window member 50 when viewed from the Z-axis direction. According to the above configuration, the excess adhesive material 60 can escape to the portion of at least one corner 42e (all four corners 42e in this embodiment) of the second portion that widens in a direction away from the window member 50, thereby making it possible to preferably prevent a portion of the adhesive material 60 from flowing into the inside of the frame wall 40 as described above.

[0070] 2 and 3, the bottom wall 30 and the frame wall 40 are formed separately from each other, and the frame wall 40 is fixed to the bottom wall 30 by being joined to the mounting surface 30a. This configuration facilitates the manufacture of the package 20. Furthermore, when the bottom wall 30 and the frame wall 40 are formed separately in this manner, the expansion of gas inside the package 20 can cause a gap to form between the bottom wall 30 and the frame wall 40, which can lead to damage to the package 20. However, the above-described vent hole 70 can also prevent damage to the package 20 caused by such gas expansion.

[0071] 2 and 3, the first portion 41 and the second portion 42 of the frame wall 40 are formed separately from each other, and the second portion 42 is fixed to the first portion 41 by being joined to the upper surface 41b of the first portion 41. This makes it possible to manufacture the frame wall 40, which is made up of the first portion 41 and the second portion 42 and has the above-described configuration (i.e., the upper surface 41b of the first portion 41 supports the inner surface 50a of the window member 50, and the inner surface 42c of the second portion 42 surrounds the side surface 50c of the window member 50), more easily than when the first portion 41 and the second portion 42 are formed by cutting an integrally formed member. As a result, the manufacturing efficiency of the photodetector 1 (package 20) can be improved.

[0072] 2, the adhesive member 60 provided on the side surface 50c of the window member 50 contacts the inner surface 42c of the second portion 42. According to the above configuration, the first portion 41 and the second portion 42 can be fixed to each other via the adhesive member 60, thereby improving the bonding strength between the first portion 41 and the second portion 42. Furthermore, the support stability of the window member 50 relative to the frame wall 40 can also be suitably improved.

[0073] As shown in FIG. 3, the distance d2 between the side surface 50c of the window member 50 and the inner surface 42c of the second portion 42 in the first space 71 is shorter than the distance d3 of the first space 71 in the direction in which the side surface 50c and the inner surface 42c face each other (in this embodiment, the Y-axis direction) (in other words, the width of the portion where the window member 50 and the upper surface 41b overlap when viewed from the Z-axis direction). The distance d2 is, for example, 200 μm or more and 300 μm or less. The distance d3 is, for example, 500 μm or more and 700 μm or less. According to the configuration in which the relationship "d2 < d3" holds, by making the width (distance d3) of the portion where the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41 contact each other through the adhesive member 60 at least larger than the distance d2 between the side surface 50c of the window member 50 and the inner surface 42c of the second portion 42, the support stability of the window member 50 with respect to the first portion 41 (upper surface 41b) can be improved. Further, by making the width (distance d2) of the second space 72, which is the entrance and exit to the outside of the package 20, shorter than the distance d3, it is possible to suppress the entry of foreign matter from the outside of the package 20 into the inside of the package 20.

[0074] As shown in FIG. 3, the distance d2 is longer than the distance d1 between the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41 in the first space 71. The distance d1 is, for example, 10 μm or more and 30 μm or less. According to the configuration in which the relationship "d2 > d1" holds, by ensuring the width (distance d2) of the second space 72 to some extent, it is possible to suppress the second space 72 from being unintentionally blocked by the adhesive member 60 or the like, and by bringing the inner surface 50a of the window member 50 and the upper surface 41b of the first portion 41 closer than the width (distance d2) of the second space 72, it is possible to suppress the entry of foreign matter from the outside of the package 20 into the inside of the package 20 in the portion (first space 71).

[0075] 1 and 4, when viewed from the Z-axis direction, the window member 50 is formed in a substantially rectangular shape, and ventilation holes 70 are provided at positions corresponding to each of a pair of side portions 52 of the window member 50 extending along the X-axis direction, and each of a pair of side portions 51 of the window member 50 extending along the Y-axis direction is joined to the upper surface 41b of the first portion 41 via an adhesive member 60. According to the above configuration, by joining the pair of side portions 51 of the window member 50 extending in the Y-axis direction to the frame wall 40 (first portion 41) via the adhesive member 60, the window member 50 can be stably supported with good balance relative to the first portion 41. Furthermore, by providing a pair of ventilation holes 70 along a pair of side portions 52 of the window member 50 extending in the X-axis direction, an air flow along the Y-axis direction from one ventilation hole 70 to the other ventilation hole 70 can be formed (for example, a flow path in which air that has entered the inside of the package 20 from one ventilation hole 70 along the Y-axis direction flows through the inside of the package 20 along the Y-axis direction and is smoothly discharged from the other ventilation hole 70), thereby improving the breathability of the package 20. In the present embodiment, as an example, as shown in FIG. 1 , at both ends of each side portion 52 extending along the X-axis direction (second direction), the side surface 50c of the window member 50 faces the inner side surface 42c of the corner 42e of the second portion 42. Furthermore, the ventilation hole 70 is provided continuously from one end (a portion facing one corner 42e) along the side portion 52 to the other end (a portion facing the other corner 42e). At both ends of each side portion 51 extending along the Y-axis direction (third direction), the side surface 50c of the window member 50 faces the inner side surface 42c of the corner portion 42e of the second portion 42. The window member 50 is joined to the upper surface 41b (support surface) via an adhesive member 60 that is continuously provided from one end to the other along the side portion 51. With this configuration, the window member 50 can be suitably and stably supported at each side portion 51 via the adhesive member 60, and by ensuring a sufficient width for the ventilation opening 70 at each side portion 52, the effect of the pair of ventilation openings 70 described above can be suitably obtained.

[0076] 2, the height position of the outer surface 50b of the window member 50 relative to the mounting surface 30a is set lower than the height position of the upper surface 42b of the frame wall 40 relative to the mounting surface 30a. According to the above configuration, the outer surface 50b of the window member 50 does not protrude outward, thereby reducing the risk of an external member coming into contact with the window member 50 and damaging the window member 50. Furthermore, when the photodetector 1 is manufactured by dicing using a dicing tape 80 (see FIG. 11), which will be described later, the outer surface 50b of the window member 50 can be separated from the dicing tape 80, thereby preventing damage to the outer surface 50b of the window member 50 during dicing.

[0077] [Method of manufacturing the photodetector] An example (first to fourth steps) of a method for manufacturing the photodetector 1 will be described with reference to Figures 5 to 11. Figures 5 to 10 show lines CL along which cutting is to be performed in the fourth step, which will be described later.

[0078] (1st step) First, in the first step, a bottom wall layer 300 (see FIGS. 5 and 6), a frame wall layer 400 (see FIGS. 5 and 6), a plurality of light receiving elements 10, and a plurality of window members 50 are prepared. In addition to the light receiving elements 10, a plurality of components (e.g., readout integrated circuits 11, etc.) to be housed in the package 20 are also prepared in the first step.

[0079] The bottom wall layer 300 is a member (aggregate substrate) on which a plurality of bottom walls 30 corresponding to each of a plurality of (six in this example) photodetectors 1 are formed, arranged in a row along the X-axis direction and the Y-axis direction. In this example, the bottom wall layer 300 includes a plurality of (six in this example) bottom walls 30 arranged two-dimensionally (two rows and three columns in this example) so that three bottom walls 30 are arranged along the X-axis direction and two bottom walls 30 are arranged along the Y-axis direction. That is, the bottom wall layer 300 has a structure in which the plurality of bottom walls 30 are arranged as described above without being separated. Note that the bottom wall layer 300 may be configured to include a plurality of bottom walls 30 arranged one-dimensionally along only one of the X-axis direction or the Y-axis direction. The number of bottom walls 30 included in the bottom wall layer 300 is not limited to six in this example, as long as it is at least two or more. In this embodiment, the length of the bottom wall 30 in the X-axis direction and the length of the bottom wall 30 in the Y-axis direction are approximately the same. Therefore, the length of the bottom wall layer 300 along the X-axis direction in which three bottom walls 30 are arranged is longer than the length of the bottom wall layer 300 along the Y-axis direction in which two bottom walls 30 are arranged.

[0080] The frame wall layer 400 is a member formed by arranging a plurality of frame walls 40 corresponding to a plurality of (six in this example) photodetectors 1 in a row along the X-axis direction and the Y-axis direction. The frame wall layer 400 has an arrangement structure corresponding to the bottom wall layer 300. In this example, the frame wall layer 400 includes a plurality of (six in this example) frame walls 40 arranged two-dimensionally (two rows and three columns in this example) so that three frame walls 40 are arranged along the X-axis direction and two frame walls 40 are arranged along the Y-axis direction. That is, the frame wall layer 400 has a structure in which the plurality of frame walls 40 are arranged as described above without being separated. Note that the frame wall layer 400 may be configured to include a plurality of frame walls 40 arranged one-dimensionally along only one of the X-axis direction or the Y-axis direction. Furthermore, the number of frame walls 40 included in the frame wall layer 400 is not limited to the present example (six) as long as it is at least two or more.

[0081] In this embodiment, the frame wall layer 400 includes a first layer 410 and a second layer 420 bonded to each other. The first layer 410 is a layer including a plurality of first portions 41 included in each of the plurality of frame walls 40. The second layer 420 is a layer including a plurality of second portions 42 included in each of the plurality of frame walls 40. By bonding the upper surface of the first layer 410 (a surface formed by the upper surfaces 41b of each of the plurality of first portions 41) to the lower surface of the second layer 420 (a surface formed by the lower surfaces 42a of each of the plurality of second portions 42), it is possible to save the effort of bonding the first portion 41 and the second portion 42 individually for each photodetector 1.

[0082] (2nd process) In a second step following the first step, a frame wall layer 400 and a plurality of light-receiving elements 10 are arranged on the bottom wall layer 300 so that each of the plurality of bottom walls 30 included in the bottom wall layer 300 corresponds to each of the plurality of frame walls 40 included in the frame wall layer 400, and each of the plurality of light-receiving elements 10. As an example, as shown in FIGS. 5 and 6, the frame wall layer 400 is first arranged on the bottom wall layer 300. Next, as shown in FIGS. 7 and 8, the light-receiving elements 10 are arranged on each bottom wall 30 included in the bottom wall layer 300 via a readout integrated circuit 11. Although not shown in FIGS. 7 and 8, each component (such as bonding pads P1 and P2, metal wiring W, etc.) as shown in FIG. 3 is also arranged on each bottom wall 30 included in the bottom wall layer 300. The mounting order in the second step is not limited to the above example. For example, after each component such as the light receiving element 10 is mounted on each bottom wall 30 included in the bottom wall layer 300, the frame wall layer 400 may be bonded onto the bottom wall layer 300.

[0083] (3rd step) 9 and 10 , in a third step following the second step, each of the window members 50 is joined to each of the frame walls 40 with an adhesive member 60 so that a vent hole 70 is formed in each of the frame walls 40 included in the frame wall layer 400. As an example, the adhesive member 60 is arranged on the edge of each of the frame walls 40 along the Y axis (i.e., the short side direction of the bottom wall layer 300 and the frame wall layer 400) so that a vent hole 70 is formed in the edge of each of the frame walls 40 along the X axis (i.e., the long side direction of the bottom wall layer 300 and the frame wall layer 400). By providing the adhesive member 60 along the short side direction (Y axis direction) in which warping of the combined structure of the bottom wall layer 300 and the frame wall layer 400 is unlikely to occur, the support stability of the window member 50 relative to the frame wall 40 via the adhesive member 60 can be improved compared to when the adhesive member 60 is provided along the long side direction (X axis direction) in which warping is likely to occur.

[0084] (4th step) 11, in a fourth step following the third step, the bottom wall layer 300 and the frame wall layer 400 that are joined together are cut along the cutting lines CL (see FIG. 9) to obtain a plurality of photodetectors 1. As an example, the fourth step includes a tape placement step and a cutting step.

[0085] The tape placement process is a process of placing a dicing tape 80 so as to cover the multiple window members 50 provided corresponding to the multiple frame walls 40 included in the frame wall layer 400 and to adhere to the surface of the frame wall layer 400 opposite the side where the bottom wall layer 300 is located (i.e., the upper surface 42b of each frame wall 40 included in the frame wall layer 400). As a result, as shown in FIG. 11 , the dicing tape 80 covers the entire opening of the frame wall 40 of each photodetector 1. Furthermore, in the photodetector 1, a vent opening opening to the side of the package 20 is not provided, but a vent opening 70 is provided that passes between the side surface 50c of the window member 50 and the inner surface 42c of the second portion 42 and opens above the package 20. Therefore, by placing the dicing tape 80 as described above, it is possible to prevent water used in the subsequent cutting process (e.g., water used for cleaning during dicing or after dicing) from flowing into the interior (accommodation space S) of each photodetector 1. Furthermore, as described above, since the outer surface 50b of the window member 50 is located lower than the upper surface (upper surface 42b) of the frame wall layer 400, the outer surface 50b of the window member 50 is prevented from interfering with the dicing tape 80, and the outer surface 50b of the window member 50 is prevented from being damaged by the dicing tape 80 in the subsequent cutting process.

[0086] The cutting step is a step of cutting the bottom wall layer 300 and the frame wall layer 400 from the side of the bottom wall layer 300 opposite to the side on which the frame wall layer 400 is located, with the dicing tape 80 in place. That is, by inserting a blade from the bottom surface (bottom surface 30b) side of the bottom wall layer 300 toward the dicing tape 80 side along the cutting line CL, a plurality of photodetectors 1 can be obtained (divided into individual pieces) as shown in FIG.

[0087] [Functions and Effects of the Photodetector Manufacturing Method of the Present Embodiment] The above manufacturing method improves the manufacturing efficiency of the photodetectors 1 compared to a method in which pre-divided components (bottom wall 30, frame wall 40, etc.) are prepared and the photodetectors 1 are assembled one by one. Furthermore, the fourth step (tape placement step and cutting step) as described above makes it possible to easily obtain a plurality of photodetectors 1 by dicing (cutting) while appropriately preventing water used during dicing from flowing into the package 20 through the vent holes 70 of each photodetector 1.

[0088] [Variations] Although several embodiments of the present disclosure have been described above, the present disclosure is not limited to the configurations shown in the above embodiments. The materials and shapes of each configuration are not limited to the specific materials and shapes described above, and various materials and shapes other than those described above can be used. Furthermore, some of the configurations included in the above embodiments may be omitted or modified as appropriate, or may be combined in any manner.

[0089] For example, the arrangement pattern of the ventilation holes 70 (i.e., the arrangement pattern of the adhesive members 60) is not limited to the configuration of the above embodiment. Arrangement patterns of the adhesive members 60A to 60F according to several modifications will be described with reference to (A) to (F) of Figure 12. Note that in Figure 12, the corners of the second portion 42 are formed in a right-angled shape as another example different from the above embodiment.

[0090] 12A shows a pair of U-shaped adhesive members 60A that are arranged to overlap two opposing sides of the window member 50 and parts of the sides that intersect at right angles at the edges of the two opposing sides. FIG. 12B shows an adhesive member 60B that is arranged in a U-shape along three sides of the window member 50. FIG. 12C shows an adhesive member 60C that is arranged along three sides of the window member 50 and parts of the remaining sides. According to the configurations shown in FIGS. 12A to 12C, the size of the vent hole (the part where no adhesive member is provided) is reduced compared to the configuration in which adhesive members 60 are provided only on sides along the Y-axis direction as in the above embodiment, but the amount of adhesive member can be increased, thereby improving the bonding strength between the window member 50 and the frame wall 40 (the upper surface 41b of the first portion 41).

[0091] 12(D) shows adhesive members 60D that are placed on parts of two opposing sides (in this example, the centers of each side) of the window member 50. According to this embodiment, compared to the above embodiment (adhesive member 60), the amount of adhesive member is reduced, thereby reducing the bonding strength between the window member 50 and the frame wall 40. However, the vent holes can be made larger than in the above embodiment, thereby improving the breathability of the package 20.

[0092] Fig. 12(E) shows adhesive members 60E that are placed on part of each side (four sides) of the window member 50 (in this example, the center of each side). Fig. 12(F) shows adhesive members 60F that are placed in an L-shape on each of the four corners of the window member 50. According to the configurations of Figs. 12(E) and 12(F), by distributing continuous adhesive regions around the periphery of the window member 50, the window member 50 can be stably supported relative to the frame wall 40 in a balanced manner. In addition, multiple vents can be arranged in a balanced manner among the multiple dispersed adhesive regions.

[0093] The arrangement pattern of the adhesive members is not limited to the modified example shown in Fig. 12. For example, the adhesive members may be arranged in an L-shape along two adjacent sides of the window member 50, other than the pattern exemplified in Fig. 12, or the adhesive members may be arranged around the entire periphery of the window member 50 except for one corner.

[0094] The configuration of the package 20 is not limited to that of the above embodiment. For example, the bottom wall 30 and the frame wall 40 may be integrally formed by cutting or the like. Furthermore, when the bottom wall 30 and the frame wall 40 are formed separately, the first portion 41 and the second portion 42 may be integrally formed by cutting or the like. However, by forming them separately as in the above embodiment, cutting work is not required, and the manufacturing efficiency of the package 20 can be improved.

[0095] In the above embodiment, the frame wall 40 and the window member 50 had a rectangular outer shape when viewed from the Z-axis direction, but the shape of the frame wall and the window member when viewed from the Z-axis direction may be a shape other than rectangular (for example, a polygonal shape other than a square, a circle, etc.).

[0096] The corner 41e of the first portion 41 may be formed in a shape other than a curved surface (e.g., a right-angled shape). Furthermore, as shown in FIG. 12, the corner of the second portion 42 may be formed in a simple right-angled shape. Furthermore, the corner of the second portion 42 may be formed in a curved surface shape similar to the corner 41e of the first portion 41 (i.e., a shape that does not have a portion that widens in a direction away from the window member 50). Alternatively, the corner of the second portion 42 may be formed in an angular shape (i.e., a non-curved surface) while having a portion that widens in a direction away from the window member 50 when viewed from the Z-axis direction. However, by forming the corner 42e of the second portion 42 in a curved surface shape and a shape that widens in a direction away from the window member 50, as in the above embodiment, it is possible to effectively prevent excess adhesive material 60 from flowing into the inside of the frame wall 40. [Explanation of symbols]

[0097] 1...photodetector, 10...light-receiving element, 20...package, 30...bottom wall, 30a...mounting surface, 40...frame wall, 41...first part, 41b...top surface (support surface), 41e...corner, 42...second part, 42b...top surface, 42c...inner surface, 42e...corner, 50...window member, 50a...inner surface, 50b...outer surface, 50c...side surface, 51, 52...edge, 60, 60A, 60B, 60C, 60D, 60E, 60F...adhesive member, 70...vent, 71...first space, 72...second space, 80...dicing tape, 300...bottom wall layer, 400...frame wall layer.

Claims

1. A light receiving element; a package that houses the light receiving element, The package comprises: a bottom wall having a mounting surface on which the light receiving element is mounted; a frame wall disposed on a side of the bottom wall where the mounting surface is located, the frame wall being provided so as to surround the light receiving element when viewed from a first direction perpendicular to the mounting surface; a window member joined to the frame wall, the window member having an inner surface facing the mounting surface and a side surface connected to an outer edge of the inner surface and extending in the first direction; The frame wall is a first portion that surrounds the light receiving element when viewed from the first direction and has a support surface that faces the inner surface of the window member in the first direction; a second portion located on the first portion and having an inner surface surrounding the side surface of the window member when viewed from the first direction; the window member is bonded to the support surface via an adhesive member that is disposed between the inner surface and the support surface and that contacts the side surface; the adhesive member is not provided between the window member and the frame wall, and a vent hole is provided between the window member and the frame wall, which communicates between the inside and the outside of the package; A photodetector, wherein the ventilation hole is formed by a first space between the inner surface of the window member and the support surface, and a second space located between the side surface and the inner surface of the window member when viewed from the first direction and communicating with the first space.

2. The photodetector according to claim 1 , wherein the width of the vent hole when viewed from the first direction is greater than twice the shortest distance from an outer edge of the light receiving element to an inner edge of the frame wall.

3. The photodetector of claim 1 , wherein a width of the vent hole when viewed in the first direction is greater than twice a thickness of the window member in the first direction.

4. 2. The photodetector according to claim 1, wherein, when viewed from the first direction, an inner edge of the first portion is formed in a substantially rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner edge of the first portion is formed in a curved shape.

5. 2. The photodetector according to claim 1, wherein when viewed from the first direction, the inner surface of the second portion is formed in a substantially rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner surface is formed in a curved shape.

6. 2. The photodetector of claim 1, wherein when viewed from the first direction, the inner surface of the second portion is formed in an approximately rectangular shape, and a corner portion corresponding to at least one of the four corners of the inner surface has a shape that widens in a direction away from the window member.

7. The bottom wall and the frame wall are formed separately from each other, The photodetector according to claim 1 , wherein the frame wall is fixed to the bottom wall by being bonded to the mounting surface.

8. The first portion and the second portion are formed separately from each other, The photodetector of claim 7 , wherein the second portion is fixed to the first portion by being bonded to the support surface.

9. The photodetector of claim 8 , wherein the adhesive member provided on the side surface of the window member contacts the inner surface of the second portion.

10. 2. The photodetector according to claim 1, wherein a distance between the side surface of the window member and the inner surface of the second portion in the second space is shorter than a distance of the first space in a direction in which the side surface and the inner surface face each other.

11. 2. The photodetector of claim 1, wherein a distance between the side surface of the window member and the inner surface of the second portion in the second space is longer than a distance between the inner surface of the window member and the support surface of the first portion in the first space.

12. When viewed from the first direction, the window member is formed in a substantially rectangular shape, the vent holes are provided at positions corresponding to each of a pair of side portions of the window member extending along a second direction perpendicular to the first direction, 2. The photodetector according to claim 1, wherein each of a pair of sides of the window member extending along a third direction perpendicular to each of the first direction and the second direction is bonded to the support surface via the adhesive member.

13. 2. The photodetector according to claim 1, wherein a height position of the outer surface of the window member opposite the inner surface, based on the mounting surface, is lower than a height position of the frame wall opposite the side on which the bottom wall is located, based on the mounting surface.

14. 8. A method for manufacturing a photodetector according to claim 7, comprising the steps of: a first step of preparing a bottom wall layer in which a plurality of the bottom walls corresponding to the plurality of photodetectors are formed in a continuous manner along a second direction perpendicular to the first direction, a frame wall layer in which a plurality of the frame walls corresponding to the plurality of photodetectors are formed in a continuous manner along the second direction, a plurality of the light receiving elements, and a plurality of the window members; a second step of arranging the frame wall layer and the plurality of light receiving elements on the bottom wall layer after the first step so that each of the plurality of bottom walls included in the bottom wall layer corresponds to each of the plurality of frame walls included in the frame wall layer, and each of the plurality of light receiving elements; a third step, after the second step, of joining each of the plurality of window members to each of the plurality of frame walls with the adhesive member so that the ventilation hole is formed in each of the plurality of frame walls included in the frame wall layer; a fourth step, after the third step, of cutting the bottom wall layer and the frame wall layer joined together to obtain a plurality of the photodetectors.

15. the bottom wall layer is provided such that a plurality of the bottom walls are continuous along the second direction and also along a third direction perpendicular to each of the first direction and the second direction, The length of the bottom wall layer along the second direction is longer than the length of the bottom wall layer along the third direction; 15. The method for manufacturing a photodetector according to claim 14, wherein in the third step, the adhesive member is disposed on an edge portion of each of the plurality of frame walls along the third direction so that the vent hole is formed on an edge portion of each of the plurality of frame walls along the second direction.

16. The fourth step is a step of placing a dicing tape so as to cover the plurality of window members provided corresponding to the plurality of frame walls included in the frame wall layer and to be in close contact with a surface of the frame wall layer opposite to a side on which the bottom wall layer is located; 16. The method for manufacturing a photodetector according to claim 14, further comprising: a step of cutting the bottom wall layer and the frame wall layer from a side of the bottom wall layer opposite to a side on which the frame wall layer is located, with the dicing tape in place.

Images