Test circuit, test apparatus, and test method
The test circuit addresses inefficiencies in voltage and current measurement by using feedback loops to adjust test signals, eliminating relays and parasitic capacitance, thereby enhancing test accuracy and efficiency.
Patent Information
- Application Number
- JP2024111486
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2026-01-23
- Estimated Expiration
- 2044-07-11
AI Technical Summary
Existing test circuits and methods struggle to accurately measure both voltage and current during functional and parametric tests on devices under test, leading to inefficiencies and potential degradation of high-speed pulse signals due to parasitic capacitance from relays.
The proposed test circuit includes a measurement circuit that generates output voltage and current, with feedback loops to adjust test signals, and a pulse generation circuit that supplies these signals to the device under test, eliminating the need for relays and reducing parasitic capacitance, thereby enhancing test accuracy and efficiency.
This configuration allows for precise voltage and current measurements during both functional and parametric tests, reducing signal degradation and improving the overall testing process by sharing circuit components between different test types.
Smart Images
Figure 2026011136000001_ABST
Abstract
Description
[Technical Field]
[0001] The present invention relates to a test circuit, a test device, and a test method. [Background technology]
[0002] Patent Document 1 describes a test apparatus that includes "a judgment section that judges whether a device under test is good or bad based on the load voltage or load current applied to the device under test when a constant current or constant voltage test signal is supplied from a driver circuit to the device under test, and the driver circuit includes a driver section that outputs the test signal, a power supply current detection section that detects the power supply current supplied to the driver section, and an output control section that controls the voltage or current of the test signal output by the driver section to a predetermined value based on the power supply current detected by the power supply current detection section" (paragraph 0008 of Patent Document 1).
[0003] Patent document 2 describes that DCL302 supplies a control output to output stage 310 via DAC304, that feedback from output stage 310 is supplied to current ADC306 and voltage ADC output terminal 320 via current sense element 312 and voltage sense element 314, respectively, that current feedback is obtained from the current flowing through current shunt resistor 316, and that voltage feedback is obtained between output terminals 320 and 322 (paragraph 0034 of Patent document 2).
[0004] Patent Document 3 describes a power supply device comprising: "a voltage A / D converter that receives, via a feedback line, an analog voltage observation value corresponding to the power supply voltage supplied to the power supply terminal of the device, and performs analog-to-digital conversion of the analog voltage observation value to generate a digital voltage observation value; a digital calculation unit that generates, by digital calculation processing, a main control value that adjusts the digital voltage observation value so that it coincides with the target voltage value; a main D / A converter that performs digital-to-analog conversion of the main control value and supplies the resulting analog power supply signal to the power supply terminal of the device via the power supply line; a main detection resistor that is provided on the power supply line and has a switchable resistance value; a main sense amplifier that generates, based on the voltage between both ends of the main detection resistor, an analog main current observation value that indicates the amount of power supply current flowing through the power supply line; and a main current A / D converter that performs analog-to-digital conversion of the analog main current observation value to generate a digital main current observation value" (Claim 1 of Patent Document 3). [Prior art document] [Patent documents] [Patent Document 1] International Publication No. 2009 / 157126 [Patent Document 2] U.S. Patent Application Publication No. 2009 / 0121908 [Patent Document 3] JP 2014-10010 A Summary of the Invention
[0005] In a first aspect of the present invention, there is provided a test circuit comprising: a measurement circuit that generates an output voltage and uses the output voltage to perform a voltage application / current measurement test of a device under test; a pulse generation circuit that uses the output voltage of the measurement circuit to generate a pulse signal in a functional test of the device under test and supplies the pulse signal to a terminal of the device under test, and that passes the output voltage of the measurement circuit and supplies the output voltage as a test voltage to the terminal of the device under test in the voltage application / current measurement test; and an output terminal feedback line that is connected to the output terminal side of the pulse generation circuit and feeds back the voltage on the output terminal side to the measurement circuit.
[0006] In the above test circuit, in the voltage application current measurement test, the measurement circuit may adjust the output voltage using the test voltage fed back from the output end feedback line.
[0007] Any of the above test circuits may include an input end feedback line connected to the input end side of the pulse generating circuit and feeding back the voltage on the input end side to the measuring circuit.
[0008] In any of the test circuits described above, during the functional test, the measurement circuit may adjust the output voltage using a voltage fed back from the input end feedback line.
[0009] In any of the above test circuits, the pulse generating circuit may have a resistor connected between the input terminal and the output terminal, and in the voltage application current measurement test, the measurement circuit may measure the current flowing through the terminal of the device under test using the potential difference between the input terminal feedback line and the output terminal feedback line.
[0010] In any of the above test circuits, the measurement circuit may generate an output current and use the output current to perform a current-applied voltage measurement test on the device under test, and the pulse generation circuit may pass the output current of the measurement circuit during the current-applied voltage measurement test and supply the output current as a test current to the terminal of the device under test.
[0011] In any of the above test circuits, in the current application voltage measurement test, the measurement circuit may measure a voltage fed back from the output end feedback line.
[0012] In a second aspect of the present invention, there is provided a test device including any one of the test circuits described above.
[0013] In a third aspect of the present invention, there is provided a testing method comprising: a measuring circuit generating an output voltage and using the output voltage to perform a voltage application / current measurement test of a device under test; a pulse generating circuit generating a pulse signal using the output voltage of the measuring circuit in a functional test of the device under test and supplying the pulse signal to a terminal of the device under test; and passing the output voltage of the measuring circuit and supplying the output voltage as a test voltage to the terminal of the device under test in the voltage application / current measurement test; and an output terminal feedback line connected to the output terminal side of the pulse generating circuit feeding back the voltage on the output terminal side to the measuring circuit.
[0014] The above summary of the invention does not list all of the features of the present invention, and subcombinations of these features may also be inventions. [Brief explanation of the drawings]
[0015] [Figure 1] 1 shows the configuration of a test device 1 according to this embodiment. [Figure 2] 1 shows the configuration of a pin electronics device 200 according to a comparative example of this embodiment. [Figure 3] 1 shows the configuration of a pin electronics device 300 according to this embodiment. [Figure 4] 1 shows an operation flow of a functional test of a device under test 10 by the test apparatus 1 according to the present embodiment. [Figure 5] 1 shows an operation flow of a voltage application current measurement test of a device under test 10 performed by the test apparatus 1 according to this embodiment. [Figure 6] 1 shows an operation flow of a current application voltage measurement test of a device under test 10 performed by the test apparatus 1 according to this embodiment. DETAILED DESCRIPTION OF THE INVENTION
[0016] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.
[0017] 1 shows the configuration of a test apparatus 1 according to this embodiment together with a device under test (DUT) 10. The device under test 10 is a device on which a circuit to be tested by the test apparatus 1 is formed. The device under test 10 may be a wafer on which a circuit is formed, an IC / LSI chip obtained by dividing the wafer, or an IC / LSI package in which an IC / LSI chip is packaged. In the example shown in this figure, the test apparatus 1 is equipped with one device under test 10, but instead, the test apparatus 1 may be equipped with multiple devices under test 10 and test them simultaneously.
[0018] The test apparatus 1 performs an electrical test on the device under test 10. Alternatively, or in addition, the test apparatus 1 may perform an optical input / output test on the device under test 10. In this embodiment, a case where the test apparatus 1 performs an electrical test on the device under test 10 will be described as an example. When the test apparatus 1 performs an optical input / output test on the device under test 10, the test apparatus 1 and the device under test 10 may be connected by an optical connection in addition to an electrical connection.
[0019] The test apparatus 1 includes a test head 100, a plurality of pin electronics devices 110, a connection device 120, and a main frame 150. The test head 100 is a housing capable of mounting a plurality of pin electronics devices 110. In the example shown in the figure, the test head 100 has a plurality of slots for inserting the plurality of pin electronics devices 110.
[0020] Each of the multiple pin electronics devices 110 is inserted into a slot in the test head 100 and removably connected to the backplane of the test head 100. The pin electronics devices 110 may also be called a "pin electronics card," a "tester board," or a "test module." Each pin electronics device 110 is electrically connected to the device under test 10 via a connection device 120. Each pin electronics device 110 inputs and outputs signals to and from the device under test 10, and tests the device under test 10 by inspecting signals input from the device under test 10.
[0021] The connection device 120 is mounted on the test head 100 and electrically connected to the multiple pin electronics devices 110. The connection device 120 mounts the device under test 10 and is electrically connected to multiple terminals of the device under test 10. The connection device 120 serves to interface terminals between the multiple pin electronics devices 110 and the device under test 10, and electrically connects each terminal of one or more devices under test 10 to corresponding terminals of the multiple pin electronics devices 110 via signal cables, board wiring, or the like.
[0022] The mainframe 150 controls each unit in the test apparatus 1 to test the device under test 10. In this embodiment, the mainframe 150 is a separate housing from the housing in which the test head 100 and the like are provided. Alternatively, each component in the mainframe 150 may be provided in the same housing as the test head 100. The mainframe 150 has a main power supply unit 160 and a control unit 170.
[0023] The main power supply unit 160 receives power from a commercial power source or the like, and supplies power to each device and circuit within the test apparatus 1. The control unit 170 is connected to the main power supply unit 160 and receives power from the main power supply unit 160. The control unit 170 controls the testing of the device under test 10. When the control unit 170 is implemented by a computer, it may control the testing of the device under test 10 by executing a test control program. The control unit 170 supplies a test program to each pin electronics device 110, and causes each pin electronics device 110 to execute the supplied test program and test the device under test 10. The control unit 170 collects and records test results of the device under test 10 from each pin electronics device 110.
[0024] 2 shows the configuration of a pin electronics device 200 according to a comparative example of this embodiment. The pin electronics device 200 according to the comparative example may be used as the pin electronics device 110 in the test apparatus 1. The pin electronics device 200 includes a power supply unit 205, a test circuit 220, and a test control circuit 210.
[0025] The power supply unit 205 receives power from the main power supply device 160, generates power to be supplied to each circuit in the pin electronics device 200, and supplies the power to each circuit in the pin electronics device 200. The power supply unit 205 may have multiple power supplies and output multiple types of power with different rated voltages or rated currents, etc.
[0026] The test circuit 220 is connected to the device under test 10 via the connection apparatus 120, and tests the device under test 10 by receiving power from the power supply unit 205. This diagram representatively shows a circuit portion of the test circuit 220 that corresponds to one terminal of the device under test 10. The test circuit 220 may be connected to multiple terminals and may have circuit portions corresponding to each of the terminals.
[0027] The test circuit 220 has a test signal generator 230 for performing an operation test (also referred to as a "functional test") of the device under test 10. The test signal generator 230 receives power from the power supply unit 205 and is controlled by the test control circuit 210, and generates test signals to be supplied to the device under test 10 in a functional test of the device under test 10, and supplies the test signals to the terminals of the device under test 10. Here, the test signals generated by the device under test 10 may be pulse signals having a desired signal pattern, such as digital signals or multi-value signals to be supplied to the device under test 10.
[0028] The test signal generator 230 includes a voltage generation circuit 240, a pattern generator 245, a timing generator 250, and a pulse generation circuit 255. The voltage generation circuit 240 receives power from the power supply unit 205 and is controlled by the test control circuit 210, and generates, as an output voltage, a power supply voltage required by the pulse generation circuit 255 in a functional test. The voltage generation circuit 240 may supply, as an output voltage, to the pulse generation circuit 255 a power supply voltage corresponding to the high-level voltage of a pulse signal to be supplied to a terminal of the device under test 10.
[0029] The pattern generator 245 receives power supply from the power supply unit 205 and is controlled by the test control circuit 210 to generate a test pattern that specifies the waveform of a pulse signal to be supplied to the terminals of the device under test 10 during a functional test. The pattern generator 245 may execute a test command for each test cycle having a predetermined period and output a test pattern associated with the test command. The test pattern for each test cycle specifies a change pattern of the test signal within the test cycle. Although this differs depending on the model, the pattern generator 245 may be able to specify a pattern identifier that indicates the waveform shape, such as RZ (Return to Zero) or NRZ (Non Return to Zero), as well as the polarity of the waveform shape, as the change pattern of the test signal.
[0030] The timing generator 250 receives power supply from the power supply unit 205 and is controlled by the test control circuit 210, and generates change timings of pulse signals to be supplied to terminals of the device under test 10 during functional testing. The timing generator 250 generates waveforms of pulse signals to be supplied to the device under test 10 by adding real-time change timings to the change patterns of the test signals for each test cycle. Depending on the model of the test apparatus 1, the pattern generator 245 may generate a test pattern for each test cycle, the timing generator 250 may generate timing for each test cycle, and the waveform shaper may shape the waveform of the pulse signal to be supplied to the device under test 10 using the timing generated by the timing generator 250.
[0031] The pulse generation circuit 255 receives the output voltage from the voltage generation circuit 240, and in a functional test generates a pulse signal using the output voltage from the voltage generation circuit 240 and supplies it to the terminals of the device under test 10. The pulse generation circuit 255 may drive its output to a high level or a low level (in the case of two values) or to each of multiple levels in accordance with the waveform of a test signal to which real-time change timing has been added for each test cycle, thereby outputting a pulse signal in which the test pattern created by the pattern generator 245 is changed at the timing created by the timing generator 250.
[0032] The test signal generator 230 described above may be realized by a combination of discrete ICs, LSIs, or ASICs, or may be realized by a single test signal generation ASIC. The test signal generator 230 may further have a function of receiving a response signal output from the device under test 10 in response to the test signal and judging the pass / fail of the device under test 10. In this case, the test signal generator 230 may have a comparator that compares the response signal from the device under test 10 with a target value, and a judger that judges the pass / fail of the device under test 10 using the comparison result from the comparator.
[0033] The relay 260 is provided between the terminal Py of the test circuit 220, which is connected to the terminal of the device under test 10, and the test signal generator 230. The relay 260 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the relay 260 is turned on by the test control circuit 210 or the like, and connects the test signal generator 230 and the terminal of the device under test 10. When a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of the device under test 10 is performed by the measurement circuit 270, the relay 260 is turned off by the test control circuit 210 or the like, and disconnects the test signal generator 230 from the terminal of the device under test 10.
[0034] The measurement circuit 270 is connected to wiring between a terminal to which the test signal generator 230 outputs a pulse signal and a terminal of the device under test 10. In the example shown in the figure, the measurement circuit 270 is connected to a force line that applies a voltage or current to the terminal of the device under test 10 via a relay 280, and to a sense line that senses the voltage at the terminal of the device under test 10 via a resistor 290. The force line and sense line are connected to wiring between the relay 260 and a terminal Py of the test circuit 220 that is connected to the terminal of the device under test 10.
[0035] The measurement circuit 270 performs a parametric test on the device under test 10 under the control of the test control circuit 210 and power supplied from the power supply unit 205. The measurement circuit 270 may include various circuits, depending on the model, including at least one of a voltage generator that generates a voltage to be supplied to the terminals of the device under test 10, a current generator that generates a current to be supplied to the device under test 10, a voltage meter that measures the voltage output by the device under test 10, a current meter that measures the current output by the device under test 10, and a frequency meter that measures the frequency of the signal output by the device under test 10. In the example shown in the figure, the measurement circuit 270 is provided within the pin electronics device 200. Alternatively, the measurement circuit 270 may be realized by another pin electronics device 110 within the test apparatus 1.
[0036] When performing a voltage application current measurement test, the measurement circuit 270 outputs a desired test voltage via the force wire and measures the current flowing through the terminal of the device under test 10 that has received the test voltage. When performing a current application voltage measurement test, the measurement circuit 270 flows a desired test current between the terminal of the device under test 10 via the force wire and measures the voltage at the terminal of the device under test 10 via the sense wire.
[0037] The relay 280 is provided on a force line between the measurement circuit 270 and a connection point on the terminal Py side of the relay 260 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The relay 280 may be a mechanical relay or a semiconductor relay using a semiconductor switch or the like. When a functional test of the device under test 10 is performed, the relay 280 is turned off by the test control circuit 210 or the like, and disconnects the measurement circuit 270 from the terminal of the device under test 10. When a parametric test of the device under test 10 is performed, the relay 280 is turned on by the test control circuit 210 or the like, and connects the measurement circuit 270 to the terminal of the device under test 10.
[0038] The resistor 290 is provided on a sense line between the measurement circuit 270 and a connection point on the terminal Py side of the relay 260 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The resistor 290 may be a relatively large resistor, such as 10 kΩ, and allows the voltage at the terminal of the device under test 10 to be input to the measurement circuit 270 while substantially isolating the terminal of the device under test 10 and the measurement circuit 270.
[0039] The test control circuit 210 controls the testing of the device under test 10 by the test circuit 220. The test control circuit 210 may also be called a "site controller." The test control circuit 210 executes a test program supplied from the control device 170 and controls each unit in the test circuit 220, thereby causing the test circuit 220 to perform tests such as an operational test or a parametric test on the device under test 10.
[0040] In the pin electronics apparatus 200 described above, the measurement circuit 270 is connected to a wiring between the terminal Px, to which the test signal generator 230 outputs a pulse signal, and a terminal of the device under test 10. In a functional test of the device under test 10, a high-speed pulse signal is transmitted through the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10. Here, in the functional test of the device under test 10, the relay 260 is turned on and the relay 280 is turned off, but the relay 260 has parasitic capacitance even when on, and the relay 280 has parasitic capacitance even when off. For this reason, an RC delay occurs in the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 due to the parasitic capacitance of the relay 260 and the relay 280, which inhibits the transmission of the high-speed pulse signal.
[0041] 3 shows the configuration of a pin electronics device 300 according to this embodiment. The pin electronics device 300 is a modified example of the pin electronics device 200. In this figure, components with the same reference numerals as those in FIG. 2 have the same functions and configurations as those in FIG. 2, and therefore will not be described below except for the differences.
[0042] The test circuit 320 is connected to the device under test 10 via the connection apparatus 120, and tests the device under test 10 by receiving power from the power supply unit 205. This diagram representatively shows a circuit portion of the test circuit 320 that corresponds to one terminal of the device under test 10. The test circuit 320 may be connected to multiple terminals and may have circuit portions corresponding to each of the terminals.
[0043] The test circuit 320 includes a test signal generator 330. The test signal generator 330 according to this embodiment receives power from the power supply unit 205 and is controlled by the test control circuit 310 to perform both functional and parametric tests on the device under test 10. The test circuit 320 may perform both functional and parametric tests on the same device under test 10, depending on how the user uses the device. The test circuit 320 may perform a functional test on one device under test 10 and a parametric test on another device under test. Depending on how the user uses the device, the test circuit 320 may perform only one of a functional test or a parametric test, and the function for performing the other test may not be used. The test signal generator 330 includes a measurement circuit 370, a pattern generator 245, a timing generator 250, a pulse generation circuit 255, and a resistor 290.
[0044] The measurement circuit 370 receives power from the power supply unit 205 and is controlled by the test control circuit 310. The measurement circuit 370 performs a parametric test on the device under test 10. The measurement circuit 370 may differ depending on the type of parametric test it supports, but may include various circuits, for example, including at least one of a voltage generator that generates a voltage to be supplied to the terminals of the device under test 10, a current generator that generates a current to be supplied to the device under test 10, a voltage meter that measures the voltage output by the device under test 10, a current meter that measures the current output by the device under test 10, and a frequency meter that measures the frequency of a signal output by the device under test 10.
[0045] The measurement circuit 370 according to this embodiment may be capable of performing at least one of a voltage-sourced current measurement test or a current-sourced voltage measurement test as a parametric test. In a voltage-sourced current measurement test, the measurement circuit 370 generates an output voltage and performs a voltage-sourced current measurement test on the device under test 10 using the output voltage. The output voltage of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test voltage via the pulse generation circuit 255. In a current-sourced voltage measurement test, the measurement circuit 370 generates an output current and performs a current-sourced voltage measurement test on the device under test 10 using this output current. The output current of the measurement circuit 370 is supplied to the terminals of the device under test 10 as a test current via the pulse generation circuit 255. Here, the output current of the measurement circuit 370 may be a positive current, i.e., a current flowing from the measurement circuit 370 to the terminal of the device under test 10 (source current), or a negative current, i.e., a current flowing from the terminal of the device under test 10 to the measurement circuit 370 (sink current).
[0046] In a functional test, the measurement circuit 370 generates, as an output voltage, a power supply voltage required by the pulse generation circuit 255 in the functional test, similar to the voltage generation circuit 240 shown in Fig. 2. The voltage generation circuit 240 may supply, as an output voltage, to the pulse generation circuit 255 a power supply voltage corresponding to the high-level voltage of a pulse signal to be supplied to a terminal of the device under test 10.
[0047] The pattern generator 245, timing generator 250, and pulse generation circuit 255 have the same functions and configurations as the pattern generator 245, timing generator 250, and pulse generation circuit 255 shown in FIG. 2. In a functional test of the device under test 10, the pulse generation circuit 255 generates a pulse signal using the output voltage of the measurement circuit 370 and supplies the generated pulse signal to the terminal of the device under test 10. In a voltage source current measurement test, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 and supplies the passed output voltage as a test voltage to the terminal of the device under test 10. In a current source voltage measurement test, the pulse generation circuit 255 passes the output current of the measurement circuit 370 and supplies the passed output current as a test current to the terminal of the device under test 10. Note that the test circuit 320 may use any circuit other than the pattern generator 245 and timing generator 250 to generate a pulse signal using the pulse generation circuit 255.
[0048] Since the pulse generation circuit 255 has the function of outputting a digital signal or a multi-level signal during a functional test, it passes the output voltage supplied from the measurement circuit 370 through at least one resistor or switching element in the pulse generation circuit 255 for at least one signal value (e.g., a high level for a digital signal or a maximum value for a multi-level signal), and outputs the passed output voltage to a terminal of the device under test 10. The control device 170, the test control circuit 210, the pattern generator 245, the timing generator 250, etc., control the pulse generation circuit 255 to always output such a signal value during a parametric test, thereby connecting the input terminal and output terminal of the pulse generation circuit 255 through at least one resistor or switching element, and can supply the output voltage or output current of the measurement circuit 370 as a test voltage or test current to the device under test 10 via the pulse generation circuit 255.
[0049] The test signal generator 330 may include an output feedback line FBo connected to the output end of the pulse generation circuit 255 and feeding back the voltage on the output end to the measurement circuit 370. The output feedback line FBo may have a function similar to that of the voltage sense line shown in FIG. 2 , and is connected to a connection point on the wiring between the output end of the pulse generation circuit 255 and the terminal of the device under test 10, feeding back the voltage at this connection point to the measurement circuit 370. In the pin electronics device 300 according to this embodiment, this connection point is provided near the output end of the pulse generation circuit 255 within the test signal generator 330. Alternatively, this connection point may be provided outside the test signal generator 330 within the test circuit 320, for example, near the terminal of the device under test 10. A resistor 290 may be provided on the output feedback line FBo. The resistor 290 has a function and configuration similar to that of the resistor 290 shown in FIG. 2 .
[0050] The test signal generator 330 may include an input feedback line FBi connected to the input side of the pulse generation circuit 255 and feeding back the voltage on the input side to the measurement circuit 370. In an embodiment including the input feedback line FBi, the measurement circuit 370 may adjust the output voltage using the voltage fed back from the input feedback line during a functional test. Note that the input feedback line FBi may be provided with a resistor similar to the resistor 290 of the output feedback line FBo.
[0051] According to the pin electronics device 300 described above, the functions of both the measurement circuit 270 and the voltage generation circuit 240 shown in Fig. 2 are realized by the measurement circuit 370. As a result, the voltage generation circuit 240 that generates the output voltage for the pulse generation circuit 255 in the functional test in the configuration shown in Fig. 2 and the voltage generation circuit in the measurement circuit 270 that generates the test voltage in the voltage application / current measurement test can be replaced with the voltage generation circuit in the measurement circuit 370 and shared between the functional test and the voltage application / current measurement test, thereby reducing the circuit scale of the pin electronics device 110.
[0052] Furthermore, with the pin electronics device 300 described above, it is not necessary to connect the force line of the measurement circuit 270 to the wiring from the pulse generation circuit 255 to the terminal of the device under test 10, and the relays 260 and 280 are not required. This reduces the circuit size of the pin electronics device 300 and eliminates the parasitic capacitance of the relays 260 and 280, thereby preventing degradation of the high-speed pulse signal. Note that, in the pin electronics device 300 according to this embodiment, an output feedback line FBo (corresponding to the sense line in FIG. 2 ) is also connected to the wiring from the pulse generation circuit 255 to the terminal of the device under test 10. Here, the output feedback line FBo has a resistor 290 with a relatively large resistance value, which substantially isolates the wiring from the pulse generation circuit 255 to the terminal of the device under test 10 from the measurement circuit 370, while feeding back the voltage at the terminal of the device under test 10 to the measurement circuit 370. Therefore, degradation of the high-speed pulse signal due to the output feedback line FBo is minimal.
[0053] Fig. 4 shows an operation flow of a functional test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300 in Fig. 3. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.
[0054] In step S400, under the control of the test control circuit 310, the measurement circuit 370 generates, as an output voltage, a power supply voltage for pulse generation required by the pulse generation circuit 255 during a functional test. During the functional test, the measurement circuit 370 may adjust the output voltage using a voltage fed back from the input end feedback line FBi. For example, the measurement circuit 370 compares the feedback voltage fed back from the input end feedback line FBi with a target output voltage, and increases the output voltage if the feedback voltage is lower than the target output voltage, and decreases the output voltage if the feedback voltage is higher than the target output voltage. This allows the measurement circuit 370 to adjust the output voltage so that it approaches the target output voltage. Note that the measurement circuit 370 may also perform feedback and adjustment of the output voltage internally.
[0055] In S410, the pattern generator 245 generates a test pattern for each test cycle under the control of the test control circuit 310. In S420, the timing generator 250 generates the timing of a pulse signal according to the test pattern for each test cycle under the control of the test control circuit 310. In S260, the pulse generation circuit 255 uses the output voltage of the measurement circuit 370 to generate a pulse signal according to the timing from the timing generator 250 for each test cycle, and supplies this generated pulse signal to the terminal of the device under test 10. The pin electronics device 300 may receive a response signal output by the device under test 10 in response to the test signal and judge the pass / fail of the device under test 10.
[0056] According to the pin electronics device 300 described above, the power supply voltage required by the pulse generation circuit 255 in the functional test can be supplied using the voltage generator in the measurement circuit 370 used in the parametric test of the device under test 10. Furthermore, the measurement circuit 370 can adjust the output voltage using the feedback voltage from the input end feedback line FBi, thereby reducing the error with respect to the target output voltage.
[0057] 5 shows an operation flow of a voltage application / current measurement test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300 in Fig. 3. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.
[0058] In S500, the measurement circuit 370 generates an output voltage for a voltage application current measurement test. In S510, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 input from the measurement circuit 370 and supplies this passed output voltage to the terminal of the device under test 10 as a test voltage.
[0059] In S520, the measurement circuit 370 adjusts the output voltage using the test voltage fed back from the output feedback line. For example, the measurement circuit 370 compares the test voltage fed back from the output feedback line FBo with a target test voltage, and increases the output voltage if the fed back test voltage is lower than the target test voltage, and decreases the output voltage if the fed back test voltage is higher than the target test voltage. In this way, in a configuration in which a test voltage is supplied to a terminal of the device under test 10 via the pulse generation circuit 255, the measurement circuit 370 can adjust the test voltage at the output end of the pulse generation circuit 255 so that it approaches the target value, even if there is a resistor between the input end and output end of the pulse generation circuit 255.
[0060] In S530, the measurement circuit 370 measures the current flowing through the terminal of the device under test 10 while a test voltage is being supplied to the terminal of the device under test 10. The measurement circuit 370 according to this embodiment measures the current flowing through the terminal of the device under test 10 using a resistor connected between the input terminal and output terminal of the pulse generation circuit 255 as a sense resistor. In this case, the measurement circuit 370 measures the current flowing through the terminal of the device under test 10 using the potential difference between the input terminal feedback line FBi and the output terminal feedback line FBo. For example, when the output voltage of the measurement circuit 370 is passed from the input terminal to the output terminal, it is assumed that the internal resistance of the pulse generation circuit 255 is R, the voltage at the input terminal of the pulse generation circuit 255 measured using the input terminal feedback line FBi is Vi, and the voltage at the output terminal of the pulse generation circuit 255 measured using the output terminal feedback line FBo is Vo. The current flowing through the terminals of the device under test 10 is substantially the same as the current flowing through the pulse generating circuit 255, and is the potential difference (Vi-Vo) between the input end feedback line FBi and the output end feedback line FBo divided by the internal resistance R.
[0061] The pin electronics device 300 described above allows a voltage application and current measurement test of the device under test 10 to be performed via the pulse generation circuit 255 used for functional testing of the device under test 10. The measurement circuit 370 can measure the test voltage at the output terminal side of the pulse generation circuit 255 and adjust the output voltage. The measurement circuit 370 can also calculate the current flowing through the terminals of the device under test 10 by using the internal resistance of the pulse generation circuit 255.
[0062] 6 shows the operation flow of a current application and voltage measurement test of a device under test 10 by the test apparatus 1 according to this embodiment, focusing on the operation of the pin electronics device 300. Before starting this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection apparatus 120.
[0063] In S600, the measurement circuit 370 generates an output current for a current application voltage measurement test. This output current may be either a positive current or a negative current depending on the test content. In S610, the pulse generation circuit 255 passes the output current of the measurement circuit 370 input from the measurement circuit 370 and supplies this passed output current to the terminals of the device under test 10 as a test current.
[0064] In S620, the measurement circuit 370 measures the voltage fed back from the output feedback line FBo. The measurement circuit 370 may use the measured voltage to measure or calculate the voltage at the terminal of the device under test 10. For example, if the wiring resistance from the connection point of the output feedback line FBo in the wiring from the output terminal of the pulse generation circuit 255 to the terminal of the device under test 10 to the terminal of the device under test 10 can be ignored, the measurement circuit 370 may measure the voltage fed back from the output feedback line FBo as the voltage at the terminal of the device under test 10. If the wiring resistance from the connection point of the output feedback line FBo in the wiring from the output terminal of the pulse generation circuit 255 to the terminal of the device under test 10 to the terminal of the device under test 10 is taken into consideration, the measurement circuit 370 may calculate the voltage at the terminal of the device under test 10 by adding to the measured voltage a voltage drop (in the case of a positive current) or a voltage rise (in the case of a negative current) caused by the test current flowing through a known wiring resistance.
[0065] According to the pin electronics device 300 described above, a current application and voltage measurement test of the device under test 10 can be performed via the pulse generation circuit 255 used for a functional test of the device under test 10. The measurement circuit 370 can measure the voltage of the terminal of the device under test 10 on the output end side of the pulse generation circuit 255.
[0066] 5, the measurement circuit 370 may measure the current flowing through the terminal of the device under test 10 using the potential difference between the input feedback line FBi and the output feedback line FBo, and adjust the test current using the measured current. For example, the measurement circuit 370 compares the measured current with a target test current, and increases the output current if the measured current is smaller than the target test current, and decreases the output current if the measured current is larger than the target test current. In this way, the measurement circuit 370 can adjust the test current so that it approaches the target value in a configuration in which the test current is supplied to the terminal of the device under test 10 via the pulse generation circuit 255.
[0067] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.
[0068] It should be noted that the execution order of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order. [Explanation of symbols]
[0069] 1 test equipment, 10 device under test, 100 test head, 110 pin electronics device, 120 connection device, 150 mainframe, 160 main power supply device, 170 control device, 200 pin electronics device, 205 power supply unit, 210 test control circuit, 220 test circuit, 230 test signal generator, 240 voltage generation circuit, 245 pattern generator, 250 timing generator, 255 pulse generation circuit, 260 relay, 270 measurement circuit, 280 relay, 290 resistor, 300 pin electronics device, 310 test control circuit, 320 test circuit, 330 test signal generator, 370 measurement circuit, FBi input end feedback line, FBo output end feedback line
Claims
1. a measurement circuit that generates an output voltage and performs a voltage application current measurement test on a device under test using the output voltage; a pulse generation circuit that generates a pulse signal using the output voltage of the measurement circuit in a function test of the device under test and supplies the pulse signal to a terminal of the device under test, and that passes the output voltage of the measurement circuit and supplies the output voltage as a test voltage to the terminal of the device under test in the voltage application current measurement test; an output end feedback line connected to the output end side of the pulse generating circuit and feeding back the voltage on the output end side to the measuring circuit; A test circuit comprising:
2. 2. The test circuit according to claim 1, wherein, in the voltage application current measurement test, the measurement circuit adjusts the output voltage using the test voltage fed back from the output end feedback line.
3. 2. The test circuit according to claim 1, further comprising an input feedback line connected to the input end of the pulse generating circuit for feeding back the voltage on the input end to the measuring circuit.
4. 4. The test circuit according to claim 3, wherein, during the functional test, the measurement circuit adjusts the output voltage using a voltage fed back from the input end feedback line.
5. the pulse generating circuit has a resistor connected between the input terminal and the output terminal; In the voltage application current measurement test, the measurement circuit measures the current flowing through the terminal of the device under test using the potential difference between the input end feedback line and the output end feedback line.
4. The test circuit of claim 3.
6. the measurement circuit generates an output current and performs a current application voltage measurement test on the device under test using the output current; In the current application voltage measurement test, the pulse generation circuit passes the output current of the measurement circuit and supplies the output current as a test current to the terminal of the device under test.
2. The test circuit of claim 1.
7. 7. The test circuit according to claim 6, wherein in the current application voltage measurement test, the measurement circuit measures the voltage fed back from the output end feedback line.
8. A test device comprising the test circuit according to any one of claims 1 to 7.
9. a measurement circuit generating an output voltage and performing a voltage application / current measurement test on a device under test using the output voltage; a pulse generation circuit, in a functional test of the device under test, generating a pulse signal using the output voltage of the measurement circuit and supplying the pulse signal to a terminal of the device under test, and, in the voltage application current measurement test, passing the output voltage of the measurement circuit and supplying the output voltage as a test voltage to the terminal of the device under test; an output end feedback line connected to the output end side of the pulse generating circuit feeds back the voltage on the output end side to the measuring circuit; A test method comprising: