Test apparatus and test method

Abstract

To provide a testing device and a testing method capable of evaluating characteristics of a test object with high accuracy by suppressing influence of ozone.SOLUTION: The test apparatus includes a test tank in which a test object to be tested is placed, a gas circulation pipe connected to the test tank, a pump that circulates gas in the test tank through the pipe, an ozone removal unit that removes ozone from the gas flowing from the test tank through the pipe, and a humidification unit that humidifies the gas flowing from the ozone removal unit through the pipe.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a testing apparatus and a testing method. [Background technology]

[0002] There is known an apparatus for estimating a lifespan by analyzing life characteristics obtained through accelerated testing using temperature and humidity as parameters (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2009 / 072204 Summary of the Invention [Problem to be solved by the invention]

[0004] Patent Document 1 does not describe any efforts to address the ozone concentration factor. When power is supplied to the stator winding of an electrically powered device such as a motor, an electric field can concentrate locally, causing partial discharge. This partial discharge can cause the winding's insulating surface to deteriorate, generating corrosive gases such as ozone. Meanwhile, when evaluating life characteristics by focusing on independent factors such as temperature and humidity, ozone can affect the life characteristics of the electrically powered device, potentially resulting in variations in the evaluation results. The present disclosure aims to provide a test device and test method that can suppress the effects of ozone and evaluate the characteristics of the device under test with high accuracy. [Means for solving the problem]

[0005] In order to solve the above problems, a testing device according to one embodiment of the present disclosure includes a test tank in which a test specimen to be tested is placed, a gas circulation pipe connected to the test tank, a pump that circulates the gas in the test tank through the pipe, an ozone removal unit that removes ozone from the gas flowing from the test tank through the pipe, and a humidification unit that humidifies the gas flowing from the ozone removal unit through the pipe.

[0006] In a testing method according to one aspect of the present disclosure, when a test is conducted in a test chamber to evaluate the characteristics of a test object, gas in the test chamber is circulated between the test chamber and the outside of the test chamber through a pipe connected to the test chamber. Outside the test chamber, ozone is removed from the gas flowing from the test chamber through the pipe, and the ozone-removed gas is humidified. The ozone-removed and humidified gas is returned from the outside of the test chamber through the pipe to the test chamber. [Effects of the Invention]

[0007] According to one aspect of the present disclosure, it is possible to provide a test device and a test method that can suppress the influence of ozone and evaluate the characteristics of a test object with high accuracy. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing a configuration example of a test device according to a first embodiment of the present disclosure. [Figure 2] FIG. 2 is a flowchart illustrating a gas circulation operation according to the first embodiment of the present disclosure. [Figure 3] FIG. 3 is a graph showing the results of an experiment conducted by the present inventors, illustrating the relationship between the presence or absence of gas circulation and the ozone concentration in the test tank. [Figure 4] FIG. 4 is a schematic diagram illustrating a configuration example of a test device according to the second embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between thickness and planar dimensions, the thickness ratio of each device and each member, etc. may differ from the actual ones.

[0010] <Embodiment 1> (Configuration example) FIG. 1 is a schematic diagram illustrating a configuration example of a test apparatus 1 according to a first embodiment of the present disclosure. The test apparatus 1 is an apparatus for evaluating the life characteristics of an electrically powered device, such as a motor, that operates by converting electrical energy into mechanical energy. As an example, the test apparatus 1 is an accelerated testing apparatus for evaluating the life characteristics (estimates the life) of an insulator covering a stator winding of a motor. As shown in FIG. 1, the test apparatus 1 includes a test chamber 2, a gas circulation pipe 3 connected to the test chamber 2, a diaphragm pump (an example of a pump in the present disclosure) 4 that circulates gas in the test chamber 2 through the pipe 3, an ozone removal unit 5 that removes ozone (O3) from the gas flowing from the test chamber 2 through the pipe 3, a humidification unit 6 that humidifies the gas flowing from the ozone removal unit 5 through the pipe 3, on-off valves 7 and 8 provided on the pipe 3, and a power supply 9 (high voltage) that supplies power to a test object (sample S; for example, a winding covered with an insulator) placed in the test chamber 2.

[0011] The test chamber 2 is a thermostatic chamber that has a temperature adjustment function and can maintain a constant temperature inside the chamber. The test chamber 2 is also a hygroscopic chamber that can maintain a constant humidity inside the chamber. In other words, the test chamber 2 is a thermo-hygroscopic chamber that can control both the temperature and humidity inside the chamber. The test chamber 2 is made of a material (e.g., quartz glass, stainless steel (SUS), synthetic resin, etc.) that is corrosion-resistant to the ozone (O3) generated inside the chamber.

[0012] The test chamber 2 has a gas outlet 21 for letting out gas (e.g., air) from within the chamber, and a gas inlet 22 for letting gas into the test chamber 2. The gas outlet 21 and the gas inlet 22 are each holes provided in the wall of the test chamber 2, and are connected to a circulation pipe 3. The pipe 3 is provided with an on-off valve 7 on the gas outlet 21 side and an on-off valve 8 on the gas inlet 22 side. The test chamber 2 can be sealed by closing the on-off valves 7 and 8. Note that when a sample S is placed in the test chamber 2 and a test (e.g., an accelerated test to evaluate the life characteristics of an insulation covering a winding) is performed, the on-off valves 7 and 8 are normally open.

[0013] The circulation pipe 3 connects the test chamber 2, the ozone removal unit 5, the diaphragm pump 4, and the humidification unit 6. The pipe 3 is arranged so that, when the diaphragm pump 4 is operated, gas is sent from the test chamber 2 to the ozone removal unit 5 and then to the humidification unit 6, and the gas humidified by the humidification unit 6 is returned to the test chamber 2. The pipe 3 also has a branch pipe 31 for sending ozone-containing water vapor or liquefied water droplets of this water vapor to an ozone water reservoir 51 (described below). The material of the pipe 3 is not particularly limited as long as it is resistant to ozone, but one example is polyvinyl chloride. The outer surface of the pipe 3 may be provided with an insulating material (not shown), such as an elastomer. Covering the outer surface of the pipe 3 with an insulating material prevents the temperature of the gas flowing through the pipe 3 from changing due to the external environment, thereby contributing to maintaining a constant temperature within the test chamber 2.

[0014] The diaphragm pump 4 has the function of sending gas (e.g., air) in the test chamber 2 in one direction through the pipe 3. The one-way direction means that the gas circulates in the following order: test chamber 2, ozone removal unit 5, humidification unit 6, and test chamber 2. Furthermore, by using a diaphragm pump, the gas can be circulated at a relatively low flow rate.

[0015] In the gas circulation path through pipe 3, diaphragm pump 4 is disposed in a later process (later stage) than ozone removal unit 5. This prevents ozone-containing gas and ozone-containing water vapor from passing through diaphragm pump 4. Furthermore, in the gas circulation path through pipe 3, diaphragm pump 4 is disposed in an earlier process (earlier stage) than humidification unit 6. This prevents humidified gas (e.g., high-humidity air) from passing through diaphragm pump 4. In this way, by disposing diaphragm pump 4 between ozone removal unit 5 and humidification unit 6 in the gas circulation path through pipe 3, corrosion due to ozone and humidity can be prevented even if the inside of diaphragm pump 4 has low corrosion resistance to ozone and humidity.

[0016] The ozone removal unit 5 is connected to the gas outlet 21 side of the test tank 2 via a pipe 3. The ozone removal unit 5 has an ozone water reservoir 51 (an example of the "ozone water removal unit" of the present disclosure) that removes ozone water (e.g., ozone-containing water vapor, ozone-containing water droplets, etc.) from the gas (e.g., air) flowing from the test tank 2 through the pipe 3, and an ozone gas removal pipe 52 (an example of the "ozone gas removal unit" of the present disclosure) that removes ozone gas from the gas after the ozone water has been removed by the ozone water reservoir 51. In the gas circulation path passing through the pipe 3, the ozone water reservoir 51 and the ozone gas removal pipe 52 are arranged in this order from the side closest to the gas outlet 21 of the test tank 2 (i.e., the upstream side of the circulation path).

[0017] The ozonated water reservoir 51 includes a metal container 511 (an example of a "water reservoir" in the present disclosure) made of ozone corrosion-resistant metal, such as stainless steel (SUS). The open end of the branch pipe 31 of the pipe 3 is located above the container 511. At least a portion of the ozone-containing water vapor flowing through the pipe 3 is liquefied in the pipe 3 or the branch pipe 31 near the gas outlet 21 and drips from the open end of the branch pipe 31 into the container 511. Alternatively, at least a portion of the ozone-containing water vapor can flow directly from the open end of the branch pipe 31 into the container 511 and be liquefied in the ozonated water reservoir 51. This allows the ozonated water reservoir 51 to discharge at least a portion of the ozone-containing water vapor from the gas circulation system. Ion-exchanged water 512 or the like may be placed in the ozonated water reservoir 51 before testing. This allows the ozone concentration of the ozonated water to be reduced within the ozonated water reservoir 51.

[0018] The ozone gas removal pipe 52 has a metal container that is resistant to corrosion by ozone, for example, a tubular container 521 made of stainless steel (SUS) (an example of the "first container" of the present disclosure), and an ozone adsorbent 522 that is placed in (for example, filled with) the container 521 and adsorbs ozone gas. The gas flowing through the pipe 3 is passed through the ozone adsorbent 522 filled in the container 521. The ozone adsorbent 522 is, for example, a desiccant or activated carbon. As a result, the gas (for example, high-humidity air) flowing through the pipe 3 has ozone and moisture adsorbed thereto, becoming dry air with a reduced ozone concentration (ideally, no ozone).

[0019] The humidifying unit 6 is connected to the gas inlet 22 side of the test chamber 2 via a pipe 3. The humidifying unit 6 is a device that humidifies the gas flowing through the pipe 3, for example, using a humidity control method, and includes a bubbling tank 61 (an example of the "second container" of the present disclosure) and a stabilization tank 62. The bubbling tank 61 and the stabilization tank 62 are arranged in this order from the upstream side of the circulation path. A saturated aqueous solution 611 of, for example, potassium sulfide (K2SO4) is stored in the bubbling tank 61. K2SO4 is an example of a "humidifying agent" of the present disclosure, and the saturated aqueous solution 611 of K2SO4 is an example of a "humidifying agent solution" of the present disclosure. Dry air flowing through the circulation pipe 3 is passed through the saturated aqueous solution 611 (i.e., bubbled). By bubbling the gas flowing through the pipe 3, the gas is humidified to the relative humidity of air in equilibrium with the saturated aqueous solution 611. The temperature of the saturated aqueous solution 611 is, for example, 20° C. or higher and 30° C. or lower.

[0020] The stabilization tank 62 is an auxiliary humidification tank for further humidifying the gas humidified in the bubbling tank 61. The stabilization tank 62 can shorten the time required to humidify the gas to a desired relative humidity. A saturated aqueous solution 621 of K2SO4 is stored in the stabilization tank 62. The area near the liquid surface of the K2SO4 solution becomes a humidified gas with a relative humidity of 95% or more in an equilibrium state (see the box surrounded by a bold line in Table 1 described below). The gas bubbled in the bubbling tank 61 becomes high-humidity air with a relative humidity of 95% or more when exposed to the liquid surface of the saturated aqueous solution 621 in the stabilization tank 62. The temperature of the saturated aqueous solution 621 is, for example, 20°C or higher and 30°C or lower.

[0021] (Example of operation) FIG. 2 is a flowchart illustrating a gas circulation operation according to the first embodiment of the present disclosure. With a sample S placed in the test chamber 2 and the on-off valves 7 and 8 open, the diaphragm pump 4 begins operating (step ST1 in FIG. 2 ). This initiates the gas circulation system of the test apparatus 1, discharging gas (e.g., air) from the test chamber 2 into the circulation pipe 3 (step ST2 in FIG. 2 ). When the gas reaches the ozone removal unit 5 via the circulation pipe 3, the ozone concentration in the gas is reduced by the ozonated water reservoir 51 and the ozone gas removal pipe 52 that constitute the ozone removal unit 5 (step ST3 in FIG. 2 ). Furthermore, the ozonated water reservoir 51 and the ozone gas removal pipe 52 remove not only the ozone component but also the moisture from the gas, turning the gas into dry air. The dry air with the reduced ozone concentration then passes through the diaphragm pump 4 and reaches the humidification unit 6. In the bubbling tank 61 of the humidification unit 6, the gas is humidified by bubbling in a saturated aqueous solution 611 of K2SO4 (step ST4 in Figure 2). The gas humidified by bubbling is then sent to the stabilization tank 62, where it is exposed to the liquid surface of a saturated aqueous solution 621 of K2SO4 and re-humidified (step ST5 in Figure 2). The re-humidified gas (high-humidity air) is returned to the test tank 2 through the circulation pipe 3. By repeating steps ST2 to ST5 after step ST1, the ozone concentration in the test tank 2 is maintained low and a high-humidity environment is maintained.

[0022] Then, in this environment of low ozone concentration and high humidity (for example, relative humidity of 95% or more), power (for example, impulse voltage) is supplied from the power source 9 to the sample S, and an accelerated test is performed to evaluate the life characteristics of the sample S.

[0023] (Relationship between the presence or absence of gas circulation and the ozone concentration in the test chamber) Figure 3 shows the results of an experiment conducted by the present inventors, and is a graph showing the relationship between the presence or absence of gas circulation and the ozone concentration in test chamber 2. The horizontal axis of Figure 3 represents the time (S; seconds) during which voltage was applied to sample S, and the vertical axis represents the ozone concentration (ppm) in test chamber 2. This experiment compared the ozone concentration in the test chamber with and without gas circulation when AC 3.3 kV was applied for 500 seconds. With gas circulation, the test chamber's on-off valve was opened after the temperature and humidity stabilized, while without gas circulation, the on-off valve was closed after the temperature and humidity stabilized. As shown in Figure 3, the ozone concentration without gas circulation tended to increase until 400 seconds, but after 400 seconds it tended to saturate, reaching a maximum of 1.7 ppm. On the other hand, with gas circulation, the ozone concentration saturated after 400 seconds, reaching a maximum of 0.4 ppm. These results confirm the effectiveness of gas circulation in removing ozone.

[0024] (Example of a humidification system) As an example of the humidification unit (humidification system), approximately 5 L of saturated K2SO4 aqueous solution was placed in an acrylic humidification tank, and the gas was humidified to a relative humidity of over 95% by pumping and circulating the high-humidity air from the upper layer. To shorten the time it took to reach a relative humidity of 95%, a stabilization chamber was used, and the return air from the chamber was blown as bubbles into approximately 1 L of aqueous solution, rapidly humidifying the air. By humidifying the air dried using an adsorbent in this way, a circulation system was constructed that prevented humidity drops within the test chamber.

[0025] (Effects of the First Embodiment) As described above, the test apparatus 1 according to the first embodiment of the present disclosure includes a test tank 2 in which a sample S to be tested (e.g., a winding covered with an insulator) is placed, a gas circulation pipe 3 connected to the test tank 2, a diaphragm pump 4 that circulates gas in the test tank 2 through the pipe 3, an ozone removal unit 5 that removes ozone from the gas flowing from the test tank 2 through the pipe 3, and a humidification unit 6 that humidifies the gas flowing from the ozone removal unit 5 through the pipe 3. This allows the test tank 2 to be maintained in an environment with a low ozone concentration and high humidity, and allows testing of the sample S (e.g., a test to evaluate the life characteristics of the insulation covering the winding) to be performed in this environment. By suppressing the effects of ozone, it is possible to evaluate the life characteristics of the insulation covering the winding with high accuracy.

[0026] For example, the ozone emission and adsorption mechanism can control the ozone concentration caused by partial discharges in the test chamber 2 to a level below which it has no substantial effect on the characteristics of the insulator, allowing the degree of influence of humidity and temperature factors on the life characteristics of the insulator to be evaluated. Furthermore, the humidification mechanism can maintain a constant humidity level in the test chamber 2. This eliminates the influence of ozone caused by partial discharges, making it possible to evaluate the life characteristics of the insulator by focusing on humidity and temperature factors. This makes it possible to separate and evaluate the influence of each degradation factor (humidity and temperature) on the life characteristics of the insulator, enabling highly accurate life estimation. It is possible to obtain data that contributes to the long-term reliability design of motors and the suppression of variation in the life characteristics of insulators.

[0027] In the testing method according to the first embodiment of the present disclosure, when a test is conducted in a test chamber 2 to evaluate the life characteristics of a sample S (e.g., an insulator covering a winding), gas (e.g., air) in the test chamber 2 is circulated between the test chamber 2 and the outside of the test chamber 2 through a pipe 3 connected to the test chamber 2. Outside the test chamber 2, ozone is removed from the gas flowing from the test chamber 2 through the pipe 3, and the ozone-removed gas is humidified. The ozone-removed and humidified gas is returned from the outside of the test chamber 2 through the pipe 3 to the test chamber 2. This makes it possible to suppress the effects of ozone and evaluate the life characteristics of the insulator covering the winding with high accuracy.

[0028] (Variation) (1) In the above-described first embodiment, potassium sulfide (K2SO4) is used as a humidifying agent. However, in the first embodiment of the present disclosure and the second embodiment described below, the humidifying agent used in the humidifying unit 6 is not limited to K2SO4. The humidifying agent may be selected depending on the desired humidity level in the test chamber 2. Table 1 shows examples of materials that can be used as humidifying agents and the relative humidity (%) of the air in equilibrium with a saturated aqueous solution of each material (near the liquid surface). As shown in Table 1, in the first and second embodiments of the present disclosure, potassium sulfate, as well as one or more of potassium chloride, sodium chloride, sodium bromide, potassium carbonate, and magnesium chloride, may be used as a humidifying agent. Even in this embodiment, the test chamber can be maintained at a constant temperature and humidity. [Table 1] (2) In the above-described first embodiment, the test object (sample S) subjected to testing in the test tank 2 is a winding coated with an insulator. However, in the first embodiment of the present disclosure and the second embodiment described below, the test object is not limited to this. The test object may be any electric device or any component of any electric device. The test object may also be a semiconductor such as an IGBT module. (3) In the above-described first embodiment, an impulse voltage is applied from the power supply 9 to the test object (sample S). However, in the first embodiment of the present disclosure and the second embodiment described below, the voltage applied from the power supply 9 to the test object is not limited to an impulse voltage, and may be any AC voltage or any DC voltage. Furthermore, the power supply that supplies power to the test object may be a current source instead of a voltage source.

[0029] <Embodiment 2> FIG. 4 is a schematic diagram illustrating a configuration example of a test apparatus 1A according to a second embodiment of the present disclosure. As shown in FIG. 4, the test apparatus 1A according to the second embodiment further includes a concentration sensor 11 that detects the ozone concentration in the test chamber 2 and a control device 12 that controls the gas circulation flow rate by the diaphragm pump 4 based on the ozone concentration detected by the concentration sensor 11. The control device 12 is connected to the concentration sensor 11 and the diaphragm pump 4 via a wired or wireless connection. The test apparatus 1A feedback-controls the diaphragm pump 4, for example, to prevent the ozone concentration in the test chamber 2 from exceeding a preset value (predetermined value). For example, when the ozone concentration is equal to or lower than the predetermined value, the gas circulation flow rate by the diaphragm pump 4 is maintained at a normal value. When the ozone concentration is higher than the predetermined value, the gas circulation flow rate by the diaphragm pump 4 is increased above the normal value to improve ventilation in the test chamber 2. This facilitates maintaining a stable low ozone concentration in the test chamber 2.

[0030] The location in the test chamber 2 where the ozone concentration is measured by the concentration sensor 11 is not particularly limited, but examples include the vicinity of the gas inlet 22 and the vicinity of the gas outlet 21. When the ozone concentration is measured near the gas inlet 22, it becomes easy to confirm the ozone removal effect of the ozone removal unit 5. When the ozone concentration is measured near the gas outlet 21, it becomes easy to confirm the ozone concentration in the test chamber 2 in real time.

[0031] Furthermore, ozone concentration measurement points may be provided both near the gas inlet 22 and near the gas outlet 21. In this case, the flow rate of gas by the diaphragm pump 4 may be controlled based on the measured ozone concentration near the gas inlet 22 and the measured ozone concentration near the gas outlet 21. If the measured ozone concentrations near the gas inlet 22 and the gas outlet 21 are low and the difference between the two measurements is small, it can be assumed that the ozone concentration in the test chamber 2 is low and stable, and therefore, for example, the flow rate of gas circulated by the diaphragm pump 4 may be kept low.

[0032] <Other embodiments> As described above, the present disclosure has been described using Embodiments 1 and 2 and modifications thereof. However, the descriptions and drawings that form part of this disclosure should not be understood to limit the present disclosure. Various alternative embodiments and modifications will become apparent to those skilled in the art from this disclosure. It goes without saying that the present technology also includes various embodiments not described herein. Various omissions, substitutions, and / or modifications of components may be made without departing from the spirit of the above-described embodiments and modifications. Furthermore, the effects described in this specification are merely examples and are not limiting, and other effects may also be present.

[0033] The present disclosure can also be configured as follows. (1) a test tank in which a test object to be tested is placed; A gas circulation pipe connected to the test tank; a pump that circulates the gas in the test chamber through the pipe; an ozone removal unit that removes ozone from the gas flowing from the test tank through the pipe; a humidifying section that humidifies the gas flowing from the ozone removing section through the pipe. (2) The test tank comprises: a gas outlet for discharging gas from within the test chamber; a gas inlet for allowing gas to flow into the test chamber; the ozone removal unit is connected to the gas outlet side via the pipe; The testing device according to (1) above, wherein the humidifying section is connected to the gas inlet side via the pipe. (3) The testing device according to (1) or (2), wherein the test chamber is a thermostatic chamber capable of controlling the temperature inside the chamber. (4) The testing device according to any one of (1) to (3), wherein the pipe is made of a material that is resistant to ozone. (5) The testing device according to any one of (1) to (4), further comprising a heat insulating material covering an outer circumferential surface of the pipe. (6) The ozone removal unit includes: an ozone water removal unit that removes ozone water from the gas flowing from the test tank through the pipe; The testing device according to any one of (1) to (5), further comprising an ozone gas removal unit that removes ozone gas from the gas after the ozone water has been removed by the ozone water removal unit. (7) The ozone water removal unit includes: A water reservoir made of a metal that is corrosion-resistant to ozone is provided. The test device according to (6) above, wherein at least a portion of the ozone-containing water vapor flowing through the pipe is liquefied in the pipe or in the reservoir and stored in the reservoir. (8) The ozone gas removal unit includes: a first container made of a metal that is corrosion-resistant to ozone; an ozone adsorbent disposed in the first container and configured to adsorb the ozone gas; The testing device according to (6) or (7), wherein the gas flowing through the pipe is passed through the ozone adsorbent. (9) The testing device according to any one of (1) to (8), wherein the pump is disposed in a process subsequent to the ozone removal unit in a gas circulation path passing through the pipe. (10) The humidifying unit is A second container; a moisturizing solution stored in the second container; The test device according to any one of (1) to (9), wherein the gas flowing through the pipe is passed through the solution of the humidifying agent. (11) The testing device according to (10), wherein the humidifying agent is potassium sulfide (K2SO4). (12) The testing device according to any one of (1) to (11), wherein the pump is disposed in an upstream process of the humidifying unit in a gas circulation path passing through the pipe. (13) the device under test is an electric device or a component of the electric device, The test apparatus according to any one of (1) to (12), further comprising a power source that supplies power to the electrically-powered device or the component disposed within the test apparatus. (14) a concentration sensor for detecting an ozone concentration in the test tank; The testing device according to any one of (1) to (13), further comprising a control device that controls the circulating flow rate of the gas by the pump based on the ozone concentration detected by the concentration sensor. (15) When a test to evaluate the characteristics of a test object is performed in a test tank, the gas in the test tank is circulated between the outside of the test tank and the inside of the test tank through a pipe connected to the test tank, Outside the test chamber, removing ozone from the gas flowing from the test chamber through the pipe; The ozone-removed gas is humidified, A test method in which the ozone-depleted and humidified gas is returned to the test chamber from outside the test chamber through the pipe. [Explanation of symbols]

[0034] 1. 1A test equipment 2 Test Tank 3 Pipe 4. Diaphragm pump 5 Ozone removal section 6 Humidification unit 7, 8 On-off valve 9 Power supply 11 Concentration sensor 12 Control device 21 Gas outlet 22 Gas inlet 31 Branch pipe 51 Ozone Water Reservoir 52 Ozone gas removal tube 61 Bubbling tank 62 Stabilizer 511, 521 Container 512 Ion-exchanged water 522 Ozone absorbent 611, 621 Saturated aqueous solution S Sample

Claims

1. a test tank in which a test object to be tested is placed; A gas circulation pipe connected to the test tank; a pump that circulates the gas in the test chamber through the pipe; an ozone removal unit that removes ozone from the gas flowing from the test tank through the pipe; a humidifying section that humidifies the gas flowing from the ozone removing section through the pipe.

2. The test tank comprises: a gas outlet for discharging gas from within the test chamber; a gas inlet for allowing gas to flow into the test chamber; the ozone removal unit is connected to the gas outlet side via the pipe; The testing device according to claim 1 , wherein the humidifying section is connected to the gas inlet side via the pipe.

3. 3. The testing device according to claim 1, wherein the test chamber is a thermostatic chamber capable of controlling the temperature inside the chamber.

4. 3. The testing device according to claim 1, wherein the pipe is made of a material that is resistant to ozone.

5. The testing device according to claim 1 or 2, further comprising a heat insulating material covering an outer circumferential surface of the pipe.

6. The ozone removal unit includes: an ozone water removal unit that removes ozone water from the gas flowing from the test tank through the pipe; 3. The testing device according to claim 1, further comprising an ozone gas removing section that removes ozone gas from the gas after the ozone water has been removed by the ozone water removing section.

7. The ozone water removal unit includes: A water reservoir made of a metal that is corrosion-resistant to ozone is provided.

7. The testing device according to claim 6, wherein at least a portion of the ozone-containing water vapor flowing through the pipe is liquefied in the pipe or in the water reservoir and stored in the water reservoir.

8. The ozone gas removal unit includes: a first container made of a metal that is corrosion-resistant to ozone; an ozone adsorbent disposed in the first container and configured to adsorb the ozone gas; 7. The testing device of claim 6, wherein the gas flowing through the pipe is passed through the ozone adsorbent.

9. 3. The testing device according to claim 1, wherein the pump is disposed downstream of the ozone removal unit in a gas circulation path passing through the pipe.

10. The humidifying unit is A second container; a moisturizing solution stored in the second container; 3. A test device according to claim 1 or 2, wherein the gas flowing through the pipe is passed through a solution of the humidifying agent.

11. The humidifying agent is potassium sulfide (K ２ SO ４ 11. The test device of claim 10, wherein

12. 3. The testing device according to claim 1, wherein the pump is disposed in a process upstream of the humidifying section in a gas circulation path passing through the pipe.

13. the device under test is an electric device or a component of the electric device, The test apparatus according to claim 1 or 2, further comprising a power supply that supplies power to the electrically powered device or the component disposed within the test apparatus.

14. a concentration sensor for detecting an ozone concentration in the test tank; 3. The testing device according to claim 1, further comprising a control device that controls the flow rate of the gas circulated by the pump based on the ozone concentration detected by the concentration sensor.

15. When a test to evaluate the characteristics of a test object is performed in a test tank, the gas in the test tank is circulated between the outside of the test tank and the inside of the test tank through a pipe connected to the test tank, Outside the test chamber, removing ozone from the gas flowing from the test chamber through the pipe; The ozone-removed gas is humidified, A test method in which the ozone-depleted and humidified gas is returned to the test chamber from outside the test chamber through the pipe.

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