Laser marking device and laser marking system

Abstract

To improve usability of a laser marking device with a camera.SOLUTION: The laser marking device L includes a laser light generating section 2, a laser light scanning section 3, and a housing 10 that accommodates the laser light generating section 2 and the laser light scanning section 3. The housing 10 includes the first accommodation section H1 provided with the cover glass 62 that transmits the laser light reflected by the laser light scanning section 3, the pair of extension sections H21 and H22 extending from the first accommodation section H1 along the emission direction of the laser light so as to sandwich the optical axis Al of the laser light transmitted through the cover glass 62, and the camera attachment section 19 to which the imaging device 92 can be attached so that the imaging optical axis Ax passes through the optical path partition section H3 formed by the pair of extension sections H21 and H22.SELECTED DRAWING: Figure 14

Description

[Technical Field]

[0001] The present disclosure relates to a laser marking device and a laser marking system. [Background technology]

[0002] Patent Document 1 discloses a laser marking device equipped with an external monitor camera. Specifically, this laser marking device is equipped with a monitor camera for capturing an image of the workpiece and a display means for displaying the monitor image obtained by the monitor camera. Here, the monitor camera is attached to the side of the scanning head, and can capture an image of the workpiece from diagonally above.

[0003] According to Patent Document 1, a certain working distance (hereinafter simply referred to as "WD") is ensured between the bottom surface of the scanning head and the top surface of the workpiece, which allows the monitor camera to be spaced away from the workpiece, enabling a wide range to be captured within the imaging field of view. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-034654 Summary of the Invention [Problem to be solved by the invention]

[0005] However, if the working distance cannot be secured as far as in the case disclosed in Patent Document 1, the gap between the bottom surface of the scanning head and the workpiece becomes small. In this case, if a conventional monitor camera is used, only a narrow range can be captured in the imaging field of view, which makes it difficult to use.

[0006] The technology disclosed herein has been made in view of the above points, and its purpose is to improve the usability of a laser marking device equipped with a camera. [Means for solving the problem]

[0007] A first aspect of the present disclosure relates to a laser marking device including a laser light generating unit that generates laser light, a laser light scanning unit that reflects the laser light generated by the laser light generating unit and thereby scans the laser light on a surface of a workpiece, and a housing that accommodates the laser light generating unit and the laser light scanning unit.

[0008] According to a first aspect of the present disclosure, the housing has a storage section in which an optical element that transmits the laser light reflected by the laser light scanning section is provided, a pair of extension sections that extend from the storage section along the emission direction of the laser light so as to sandwich the optical axis of the laser light that has transmitted through the optical element, and a camera attachment section to which an imaging device can be attached so that the imaging optical axis passes through the internal space formed by the pair of extension sections.

[0009] According to the first aspect, by laying out the imaging optical axis so that it passes through the space between the pair of extensions (the internal space), it is possible to extend the imaging optical axis from the imaging device to the work surface even when the distance between the housing and the work is very short, which makes it possible to fit a wider range into the imaging field of view and improves the usability of the laser marking device.

[0010] Furthermore, according to a second aspect of the present disclosure, the housing may have a bottom surface on which the optical member is provided and a top surface opposite the bottom surface, and the housing may be configured to be suspended via the top surface.

[0011] When the housing is suspended from above, as in the second aspect, the distance between the housing and the workpiece may be shorter than when the housing is supported from the side, below, etc. Even when such a layout is adopted, the configuration according to the present disclosure can ensure a wider imaging field of view, and works favorably in improving the usability of the laser marking device.

[0012] According to the third aspect of the present disclosure, at least one of the pair of extension portions may house a heat sink thermally coupled to the laser light generation portion.

[0013] According to the third aspect, the internal space of the pair of extension portions can be used as a space for accommodating the heat sink, thereby making it possible to effectively utilize the internal space of the pair of extension portions without leaving it as dead space.

[0014] Furthermore, according to a fourth aspect of the present disclosure, the pair of extension portions may comprise a first extension portion arranged on one side in a first direction with respect to the optical axis of the laser light, and a second extension portion arranged on the other side in the first direction across the optical axis of the laser light and spaced apart from the first extension portion, the housing having a wall portion connecting the first and second extension portions and dividing the internal space, and a mirror mounting portion provided on the wall portion and configured to be able to mount a reflective mirror, and the camera mounting portion may be configured to install the imaging device so that the imaging optical axis passes through an opening formed at a position opposite the wall portion and intersects with the mirror surface of the reflective mirror.

[0015] According to the fourth aspect, by configuring the wall portion to be able to have a reflecting mirror attached, it becomes possible to bend the imaging optical axis by the reflecting mirror. This makes it possible to adopt a wider variety of layouts when arranging the imaging optical axis so that it passes through the internal space. Increasing the degree of freedom in the layout of the imaging optical axis contributes to improving the usability of the laser marking device.

[0016] Furthermore, according to a fifth aspect of the present disclosure, the reflecting mirror may be attached to the mirror mounting portion, and the mirror surface of the reflecting mirror may be positioned so as to bend the imaging optical axis back toward the surface of the workpiece.

[0017] According to the fifth aspect, the reflective mirror attached to the wall portion can guide the imaging optical axis to the surface of the workpiece. This allows the laser light irradiation area set on the workpiece surface to coincide with or be close to the imaging field of view of the imaging device. This makes it possible to image the workpiece immediately after or immediately before marking, for example, which is advantageous in improving the usability of the laser marking device.

[0018] Furthermore, according to a sixth aspect of the present disclosure, the laser marking device may be provided with a lighting mounting portion that is disposed within the internal space and configured to allow lighting to be mounted thereon.

[0019] According to the sixth aspect, it is possible to lay out lighting within the interior space, which improves the quality of the captured image, such as visibility, and is advantageous in improving the usability of the laser marking device.

[0020] Furthermore, according to a seventh aspect of the present disclosure, the lighting may be attached to the lighting mounting portion, and the lighting may be positioned so as to point in a direction that intersects with the imaging optical axis.

[0021] According to the seventh aspect, the imaging optical axis and the direction in which the illumination light is irradiated are different, and it is possible to suppress halation and the like caused by specular reflection of the illumination light, which improves the quality of the captured image and is advantageous in improving the usability of the laser marking device.

[0022] According to an eighth aspect of the present disclosure, the imaging device may be attached inside the housing, and may be configured as a wide-angle camera having a wide-angle lens.

[0023] Furthermore, a ninth aspect of the present disclosure relates to a laser marking system comprising the laser marking device and a conveying device that conveys a workpiece along a predetermined conveying direction, wherein a plurality of printable areas are set on the surface of the workpiece, arranged at equal intervals along the conveying direction, and the laser marking device is configured to sequentially perform marking on each printable area conveyed by the conveying device.

[0024] According to a ninth aspect of the present disclosure, the laser marking system may include an approach monitoring unit that detects approach between the housing and one of the printing areas, the conveying device stops conveying upon receiving a detection signal from the approach monitoring unit, the laser marking device performs marking on the one of the printing areas while the conveying device has stopped conveying, and the imaging device performs imaging of the one of the printing areas on which marking has been performed by the laser marking device while conveying by the conveying device has stopped. A laser marking system characterized by:

[0025] According to the ninth aspect, the quality of the captured image can be improved by taking an image while the conveyance is stopped, which is advantageous in improving the usability of the laser marking device.

[0026] Furthermore, according to a tenth aspect of the present disclosure, the laser marking system may include an inspection device that inspects the marking content by the laser marking device based on the imaging results by the imaging device, and the inspection device may inspect the marking on the one printed area after the imaging device has performed imaging of the one printed area and transportation by the transport device has resumed.

[0027] According to the tenth aspect, the inspection device inspects the marking while the workpiece is being transported. Whether or not to inspect the marking does not depend on whether the workpiece is being transported. This allows for more efficient inspection.

[0028] An eleventh aspect of the present disclosure relates to a laser marking system comprising the laser marking device and a conveying device that conveys a workpiece along a predetermined conveying direction, wherein a plurality of printable areas are set on the surface of the workpiece at equal intervals along the conveying direction, and the laser marking device is configured to sequentially perform marking on each printable area conveyed by the conveying device.

[0029] According to an eleventh aspect of the present disclosure, the laser marking system may include an approach monitoring unit that detects approach between the housing and one of the printable areas, and the laser marking device may perform marking on the one of the printable areas being transported by the transport device each time it receives a detection signal from the approach sensor, and the imaging device may perform imaging of the one of the printable areas within a period from when the laser marking device performs marking on the one of the printable areas to when the approach monitoring unit outputs a detection signal for another of the printable areas being transported following the one of the printable areas.

[0030] According to a twelfth aspect of the present disclosure, the imaging device may be configured as a line scan camera having an imaging field of view extending along a conveyance width direction orthogonal to the conveyance direction.

[0031] Furthermore, according to a thirteenth aspect of the present disclosure, the laser marking system may include an inspection device that inspects the marking content performed by the laser marking device based on the imaging results of the imaging device, and the inspection device may inspect the marking on one printed area within the period from when the laser marking device performs marking on one printed area to when the approach monitoring unit outputs a detection signal for the other printed area. [Effects of the Invention]

[0032] As described above, according to the present disclosure, the usability of a camera-equipped laser marking device can be improved. [Brief explanation of the drawings]

[0033] [Figure 1] FIG. 1 is a diagram illustrating an example of the overall configuration of a laser marking system. [Figure 2] FIG. 2 is a block diagram illustrating a schematic configuration of a laser marking device. [Figure 3] FIG. 3 is a diagram for explaining the replacement of the printing device and the marker head. [Figure 4] FIG. 4 is a perspective view illustrating an example of the appearance of the marker head. [Figure 5] FIG. 5 is a view corresponding to FIG. 4 illustrating a state in which the cover member is removed from the marker head. [Figure 6] FIG. 6 is a side view of the marker head. [Figure 7] FIG. 7 is a perspective view illustrating a state in which the cover member is removed from the marker head. [Figure 8] FIG. 8 is a perspective view illustrating an example of a housing structure for the marker head. [Figure 9] FIG. 9 is a perspective view illustrating an example of a housing structure for the marker head. [Figure 10] FIG. 10 is a cross-sectional view schematically illustrating the internal structure of the marker head. [Figure 11] FIG. 11 is a diagram for explaining the positional relationship between the marker head and the workpiece. [Figure 12] FIG. 12 is a perspective view for explaining the attachment of the marker head to the support member. [Figure 13] FIG. 13 is a perspective view illustrating the configuration of the camera attachment portion and the camera unit. [Figure 14] FIG. 14 is a diagram illustrating a schematic example of the relationship between the imaging optical axis and the internal space. [Figure 15] FIG. 15 is a diagram illustrating a schematic example of the relationship between the irradiation area and the imaging area. [Figure 16] FIG. 16 is a flowchart showing the control process carried out when operating the laser marking system, focusing on the processing related to the imaging device. [Figure 17] FIG. 17 is a time chart illustrating the time series of still printing. [Figure 18] FIG. 18 is a time chart illustrating the time series of moving and printing. [Figure 19] FIG. 19 is a table illustrating the contents of the inspection log. [Figure 20] FIG. 20 is a view corresponding to FIG. 11, showing a first modified example of the laser marking device. [Figure 21] FIG. 21 is a view corresponding to FIG. 11 and showing a second modified example of the laser marking device. [Figure 22] FIG. 22 is a diagram showing a modified example of the camera unit. DETAILED DESCRIPTION OF THE INVENTION

[0034] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Note that the following description is for illustrative purposes only.

[0035] That is, although this specification describes a laser marker as an example of a laser processing device, the technology disclosed herein can be applied to laser application equipment in general, regardless of whether it is called a laser processing device or a laser marker.

[0036] That is, in this embodiment, printing processing (hereinafter referred to as "marking", "printing", or simply "processing") will be described as a representative example of marking using laser light, but the present disclosure can be applied to any marking consisting of multiple scanning lines, such as the marking of a figure.

[0037] <Overall structure> Fig. 1 is a diagram illustrating the overall configuration of a laser marking system S, and Fig. 2 is a diagram illustrating the schematic configuration of a laser marking device L in the laser marking system S. Also, Fig. 3 is a diagram for explaining the replacement of a printing device 1001 with a marker head 1, Fig. 11 is a diagram for explaining the positional relationship between the marker head 1 and a workpiece W, and Fig. 12 is a perspective view for explaining the attachment of the marker head 1 to a support member 501.

[0038] The laser marking system S illustrated in Fig. 1 includes a laser marking device L, an external device 400 connected thereto, and a processing facility 500 to which the laser marking device L is attached and which transports a workpiece W. Of these, the laser marking device L illustrated in Figs. 1 and 2 irradiates a laser beam toward a predetermined irradiation area R1 and scans the laser beam over the surface of the workpiece W.

[0039] By scanning the laser beam as described above, the laser marking device L can perform marking using the laser beam on a sheet-like flexible workpiece W (hereinafter, the "flexible workpiece" will be simply referred to as the workpiece). Note that this marking is performed in accordance with a pre-set printing pattern Pp, etc.

[0040] The irradiation area R1 here refers to an area set on the surface of the workpiece W, and is an area corresponding to a printing surface that is pre-assigned to the set plane R2 on the display unit 102. The irradiation area R1 as the printing surface can take various forms depending on the relative positional relationship between the laser marking device L and the workpiece W, the specifications of the laser marking device L, the movement path of the workpiece W, etc. For example, the irradiation area R1 of a workpiece W that moves along a two-dimensional plane will be a plane that follows the movement path. On the other hand, the irradiation area R1 of a workpiece W that moves in a three-dimensional space can be a curved surface that follows the movement path.

[0041] In addition, the printing pattern Pp in the following description includes not only character patterns to be marked on the workpiece W, but also graphic patterns to be marked on the workpiece W, such as ":", "x", barcodes, and QR codes (registered trademarks).

[0042] In particular, the laser marking device L according to this embodiment can emit laser light having a wavelength of around 350 nm as laser light for processing the workpiece W. This wavelength is included in the ultraviolet wavelength range. Therefore, in the following description, the laser light for processing the workpiece W may be referred to as "UV laser light" to distinguish it from other laser light such as near-infrared light.

[0043] Below, we will explain the case where the workpiece W (the aforementioned "flexible workpiece") made of a sheet-like film is the target of marking, and the film contains a UV-reactive layer (not shown) that chemically reacts with UV laser light.

[0044] The workpiece W in the present disclosure may be made of a plastic film, a film containing an aluminum layer, a film containing an aluminum vapor deposition layer, or a film containing a paper layer. The workpiece W can be made of films made of various materials. The film constituting the workpiece W may have a three-layer structure or a multi-layer structure of three or more layers.

[0045] As shown in FIG. 1, the workpiece W according to this embodiment is formed by arranging a plurality of workpiece elements We along a predetermined conveying direction At. The workpiece elements We may be integrally connected along the conveying direction At, or may be arranged at intervals in the conveying direction At. Each workpiece element We is individually marked by a laser marking device L. The workpiece elements We can also be described as a plurality of processed areas or printed areas set on the surface of the workpiece W and arranged at equal intervals along the conveying direction At.

[0046] Here, in order to apply similar markings to each of the multiple workpiece elements We, it is possible to detect the relative position of each workpiece element We with respect to the marker head 1 each time. For this purpose, alignment marks Mr are provided on the surface of the workpiece W at equal intervals along the conveying direction. As shown in FIG. 1, each alignment mark Mr may be provided in a position between workpiece elements We lined up in the conveying direction At. Alternatively, each alignment mark Mr may be provided on one side of each workpiece element We in the conveying width direction (the +X side or -X side in FIG. 1) (not shown).

[0047] Furthermore, the laser marking device L according to this embodiment is configured to perform so-called two-dimensional printing by two-dimensionally scanning the laser light, but because this laser marking device L is configured to have a deeper focal depth than conventional products, it can also perform so-called three-dimensional printing. Therefore, this laser marking device L can even mark a workpiece W that is transported along a three-dimensional movement path.

[0048] 1 and 2, the laser marking device L according to this embodiment includes a marker head 1 and a marker controller 100. In this embodiment, the marker head 1 and the marker controller 100 are separate entities and connected by a cable 200. The cable 200 according to this embodiment may be configured by bundling together at least a portion of electrical wiring for transmitting power from inside the marker controller 100 to the marker head 1, and signal wiring for transmitting and receiving analog signals, digital signals, and the like.

[0049] (Marker Controller 100) The marker controller 100 has a controller main body 100a for controlling the marker head 1, and a user terminal 100b for accepting various inputs from the user.

[0050] Of these, the controller main body 100a can scan the laser light over the surface of the workpiece W by controlling the marker head 1 in accordance with settings related to the print pattern Pp, for example. The controller main body 100a has a memory device 120 for storing such settings. This memory device 120 is made up of a combination of volatile memory and / or non-volatile memory.

[0051] For example, the controller main body 100a includes a marking control unit 109, illustrated in Fig. 2, as a functional element for controlling the marker head 1. This marking control unit 109 is electrically connected to a laser light generating unit 2 and a laser light scanning unit 3 (described later) in the marker head 1, and by controlling these, it is possible to perform marking using laser light on the workpiece W. Other details of the controller main body 100a will be described later.

[0052] On the other hand, the user terminal 100b has, for example, a central processing unit (CPU) and a memory, and is connected to the controller main body 100a by wire or wirelessly so as to be able to send and receive electrical signals.

[0053] In particular, the user terminal 100b according to this embodiment can be configured as a touch panel console. The user terminal 100b can be configured separately from the controller main body 100a, or can be configured as an integrated unit. If configured separately, the user terminal can be configured as a tablet terminal, desktop computer, laptop computer, or the like, instead of a touch panel console.

[0054] The user terminal 100b functions as a terminal for setting various printing conditions and presenting information related to marking on the workpiece W to the user. The user terminal 100b includes a display unit 102 for displaying information to the user, an operation unit 101 for accepting operation inputs by the user, and a storage device (not shown) for storing various information. The user terminal 100b may also be called a printing setting device for setting various printing conditions. The marker head 1 and marker controller 100 may also be collectively called a laser marker.

[0055] The display unit 102 can display a setting plane R2 defined by Cartesian coordinates. This display unit 102 is an example of a "display means" in this embodiment. Also, as shown in FIG. 1, an input interface Iu that accepts input of characters to be marked (hereinafter referred to as "print pattern Pp") is arranged on the setting plane R2 displayed by the display unit 102. This input interface Iu is made up of user interfaces such as a frame that indicates the range of the setting plane R2 and a graphic that indicates the position of the print pattern Pp on the setting plane R2, and can accept input of the print pattern Pp based on operation input to the operation unit 101 and display the contents of the accepted print pattern Pp on the setting plane R2.

[0056] Specifically, the display unit 102 can be configured with a liquid crystal display or an organic EL panel. When the user terminal 100b is incorporated into the controller main body 100a or a touch panel console is used, a display screen provided on the controller main body 100a or the console can serve as the display unit.

[0057] The operation unit 101 can be configured with a keyboard and a pointing device. Pointing devices include a mouse, a joystick, etc. When the user terminal 100b is incorporated into the controller main body 100a or a touch panel console is used, the operation unit can be a switch, a button, or the display itself provided on the controller main body 100a or the console.

[0058] The user terminal 100b configured as described above can set printing conditions for marking based on operation input by the user. These printing conditions include details of the print pattern Pp, as well as the target output of the laser beam (laser power) and the scanning speed of the laser beam on the workpiece W.

[0059] The printing conditions set by user terminal 100b are output to controller main body 100a and stored in storage device 120 of controller main body 100a. If necessary, the printing conditions may be stored in the storage device of user terminal 100b.

[0060] (Marker head 1) Meanwhile, the marker head 1 is electrically connected to the marker controller 100. The marker head 1 can communicate with the marker controller 100 via wire or wirelessly, and is controlled by the marker controller 100 to emit UV laser light toward the irradiation area R1.

[0061] The marker head 1 according to this embodiment is installed on processing equipment 500 for processing a workpiece W made of a sheet-like film. As shown in Fig. 3, this processing equipment 500 includes a support member 501 that supports the marker head 1 and a conveying roller 502 around which the workpiece W is wound.

[0062] As shown in Figures 11 and 12, the processing equipment 500 further includes two rail members 503l and 503r that slidably support the marker head 1 via the support member 501, two fixed members 505 and 506 to which the ends of the two rail members 503l and 503r are attached, and a first driven roller 504l and a second driven roller 504r that are driven when the workpiece W is transported by driving the transport roller 502.

[0063] In this way, the workpiece W in this embodiment can be a workpiece that is transported while wrapped around the transport roller 502, and the transport roller 502 used in this case may be positioned so as to overlap with the irradiation area R1 in the vertical direction (the Z direction described below), as shown in Figure 11, for example.

[0064] 11, a center line Ar that passes through the rotation axis of the conveying roller 502 and extends in the Z direction is offset upstream or downstream with respect to a laser emission axis Al, which will be described later. In other words, the laser emission axis Al that extends in the Z direction and the rotation axis of the conveying roller 502 that extends in the X direction are laid out so as not to intersect with each other.

[0065] Of these, the support member 501 can mount the laser marking device L, particularly the housing 10 of the marker head 1, at a predetermined mounting position, as shown in Fig. 3. As an example of the configuration of the support member 501 shown in Figs. 1 and 3, the housing 10 can be suspended from above. In particular, the housing 10 according to this embodiment is configured so that its top surface 10u can be suspended.

[0066] On the other hand, the conveying roller 502 is configured in a cylindrical shape having a central axis extending in the short dimension direction of the workpiece W. In this case, the workpiece W is conveyed in the long dimension direction along a predetermined movement path by the rotation of the conveying roller 502.

[0067] Here, the processing equipment 500 of this embodiment is shared between the marker head 1 of this embodiment and a printing device 1001 that prints using a method other than laser light marking, as shown in the upper and lower figures of Figure 3.

[0068] That is, the marker head 1 according to this embodiment is configured so that it can be attached in place of the printing device 1001 to the support member 501 of the processing equipment 500 configured to attach the printing device 1001.

[0069] An example of a printing device 1001 that can replace the marker head 1 is a thermal transfer overprinter (TTO), but other printing devices 1001 can also be used.

[0070] In detail, the replaceable printing device 1001 as described above may be, for example, one that includes a housing 1010 configured in an approximately rectangular parallelepiped shape, which includes a printing surface 1010d that exposes a printing section 1006 that contacts the printing area on the workpiece W, and a connection surface 1010u that is a surface different from the printing surface 1010d and can be connected to the support member 501.

[0071] 3, the marker head 1 is supported by a support member 501 connectable to the connection surface 1010u, similar to the printing device 1001. The marker head 1 thus supported marks the workpiece W by irradiating UV laser light toward an irradiation area R1 set corresponding to the printing area (the area in contact with the printing unit 1006 in the printing device 1001).

[0072] The laser marking device L according to this embodiment is also configured to include an imaging device 92 for capturing images of the marking results. This imaging device 92 is disposed on the outer surface of the housing 10 of the marker head 1 or inside the housing 10, and is capable of capturing images of the surface of the workpiece W. This imaging device 92 is electrically connected to an image sensor 404 that is part of the external device 400. This imaging device 92 can be attached to the housing 10 of the marker head 1 via a camera attachment 91 shown in FIG. 13, for example.

[0073] Specifically, the imaging device 92 according to this embodiment is configured with a line scan camera having an imaging field of view extending along the transport width direction (X direction in FIG. 1) perpendicular to the transport direction At. The use of a line scan camera is particularly effective when performing moving printing, which will be described later.

[0074] The external device 400 is connected to the marker controller 100 as necessary. In the example shown in FIGS. 1 and 2, the external device 400 is composed of an encoder 401, a programmable logic controller (PLC) 402, a mark detection sensor 403, and the image sensor 404 described above. Of these devices, the encoder 401 is connected to the marker controller 100 via a first interface unit 106. Similarly, the PLC 402 is connected to the marker controller 100 via a second interface unit 107, and the mark detection sensor 403 is connected to the marker controller 100 via a third interface unit 108. Although not shown in the drawings, the image sensor 404 may be connected to the marker controller 100 via a so-called "fourth interface unit," or the image sensor 404 may be connected to the PLC 402 via an interface unit external to the laser marking device L.

[0075] Hereinafter, the first interface unit 106, the second interface unit 107, and the third interface unit 108 may be referred to as the first IF unit 106, the second IF unit 107, and the third IF unit 108, respectively.

[0076] In this embodiment, the encoder 401 is configured by a rotary encoder, and is capable of detecting the conveying speed of the workpiece W. The encoder 401 outputs a signal (detection signal) indicating the detection result to the marker controller 100. The marker controller 100 controls two-dimensional scanning of the laser light, etc., based on the detection signal input from the encoder 401.

[0077] 1, the encoder 401, which is configured as a rotary encoder, is arranged to rotate its own wheel in accordance with the rotation of the conveying roller 502. The encoder 401 is configured to convert the rotation of the wheel into a pulse signal (so-called "encoder pulse") and output it.

[0078] The PLC 402 is configured by, for example, a microprocessor, and can input control signals to the marker controller 100. The PLC 402 is used to control the laser marking system S in accordance with a predetermined sequence.

[0079] The mark detection sensor 403 is configured, for example, by a light receiving type photoelectric sensor (so-called color sensor), and can detect the position of the alignment mark Mr attached to the surface of the workpiece W. The mark detection sensor 403 outputs a signal (trigger signal) indicating the detection signal to the marker controller 100. The marker controller 100 controls the start timing of marking, etc., based on the trigger signal input from the mark detection sensor 403.

[0080] The image sensor 404 is electrically connected to the imaging device 92 and receives an image signal (a signal indicating the imaging result by the imaging device 92) generated by the imaging device 92. Based on the input image signal, the image sensor 404 inspects the marking made by the laser marking device L and processed on the surface of the workpiece W. In this case, the inspection may be based on the shape, color, gloss, etc. of the marking, or, particularly when marking a character string, an inspection using an OCR (Optical Character Reader) may be performed. Furthermore, the inspection log by the image sensor 404 may be stored in the image sensor 404 itself or in the storage device 120 of the marker controller 100. Details of the processing related to the imaging device 92 and the image sensor 404 will be described later with reference to a specific example of a control process.

[0081] The image sensor 404 may be incorporated into the marker controller 100. In other words, by directly connecting the imaging device 92 and the marker controller 100, the function that should be performed by the image sensor 404 can be performed by the marker controller 100.

[0082] In addition to the above-mentioned equipment and devices, the laser marking device L can be connected wirelessly or with a cable to devices for operation and control, computers for performing various other processes, memory devices, peripheral devices, etc.

[0083] <Marker head 1> Fig. 4 is a perspective view illustrating the appearance of the marker head 1, and Fig. 5 is a view corresponding to Fig. 4 illustrating the state in which the cover member 13 has been removed from the marker head 1. Fig. 6 is a side view of the marker head 1, and Fig. 7 is a perspective view illustrating the state in which the cover member 13 has been removed from the marker head 1. Figs. 8 and 9 are perspective views illustrating the housing structure of the marker head 1, and Fig. 10 is a cross-sectional view that schematically illustrates the internal structure of the marker head 1.

[0084] Furthermore, Figure 13 is a perspective view illustrating the configuration of the camera mounting portion 19 and the camera unit 9, Figure 14 is a diagram illustrating a schematic example of the relationship between the imaging optical axis Ax and the internal space (optical path partition section H3), and Figure 15 is a diagram illustrating a schematic example of the relationship between the irradiation area R1 and the imaging area R3.

[0085] (Schematic configuration of marker head 1) 2, the marker head 1 includes, as its main components, a laser light generation unit 2 and a laser light scanning unit 3. The laser light generation unit 2 generates laser light (e.g., UV laser light) based on power supplied from outside the marker head 1. The laser light scanning unit 3 reflects the laser light generated by the laser light generation unit 2 in a desired direction, thereby scanning the laser light over the surface of the workpiece W.

[0086] The marker head 1 also includes a housing 10 that houses the aforementioned components, namely, the laser light generation unit 2 and the laser light scanning unit 3. The housing 10 is formed with an exit window 4 that transmits the laser light reflected by the laser light scanning unit 3. Although details are omitted, the housing 10 has a substantially rectangular parallelepiped outer shape and includes an exit surface 10d on which the exit window 4 is formed, and a mounting surface 10u that is a surface different from the exit surface 10d and can be connected to a support member 501. The mounting surface 10u is connected to the support member 501 via an attachment 5 (see FIG. 3). The mounting surface 10u in this embodiment is formed by a top surface 10u that faces the exit surface 10d in the Z direction.

[0087] (Laser light generating unit 2) The laser light generation unit 2 generates excitation light in accordance with the power supplied via the cable 200. The excitation light source 21 for generating the excitation light may be, for example, a laser diode. This excitation light source 21 may be housed in the marker controller 100 instead of the housing 10. In that case, a part of the laser light generation unit is housed in the marker controller 100, and the other part is housed in the housing 10.

[0088] The laser light generating unit 2 also has a solid-state laser crystal 22 that generates a fundamental wave based on the generated excitation light, and a nonlinear optical crystal (not shown) that generates UV laser light by modulating the fundamental wave.

[0089] For example, a rod-shaped Nd:YVO4 (yttrium vanadate) can be used as the solid-state laser crystal 22. The fundamental wave can be generated by any method, such as one-directional excitation by end pumping.

[0090] The nonlinear optical crystal can be composed of multiple optical crystals, such as an optical crystal for generating the second harmonic wave and an optical crystal for generating the third harmonic wave, etc. Various optical materials can be used for each optical crystal.

[0091] (Laser light scanning unit 3) The laser light scanning unit 3 is configured using a so-called two-axis (X-axis and Y-axis) galvanometer scanner, and has a first scanner 31 that drives a first mirror 31a to scan the laser light in the Y direction, a second scanner 32 that drives a second mirror 32a to scan the laser light in the X direction, and a control board 33 that controls each part of the laser light scanning unit 3 (shown only in FIG. 10).

[0092] The laser beam scanning unit 3 drives the first scanner 31 and the second scanner 32 in accordance with pre-created print data, thereby polarizing the laser beam generated by the laser beam generating unit 2 so that it is irradiated toward the irradiation area R1. The laser beam thus deflected passes through the exit window 4 and is irradiated onto the irradiation area R1.

[0093] (Outer surface of the housing 10) As illustrated in Fig. 4, the housing 10 of the marker head 1 is configured as a roughly rectangular parallelepiped with a longer dimension in the front-to-rear direction (the direction from the right and front side to the left and depth side in Fig. 4) than in the left-to-right direction (the direction from the left and front side when viewed from the front of the housing 10 to the right and depth side when viewed from the front of the housing 10 in Fig. 4). Note that "left and right" in this specification refers to left and right as seen by a user facing the housing 10.

[0094] Hereinafter, the front-to-back direction of the housing 10 will be referred to as the X direction, the left-to-right direction as the Y direction, and the height direction as the Z direction. Specifically, the depth side of the paper in Fig. 4 in the X direction will be referred to as the +X direction, and the front side of the paper in Fig. 4 will be referred to as the -X direction. Similarly, the front side of the paper in Fig. 4 in the Y direction will be referred to as the +Y direction, and the depth side of the paper in Fig. 4 will be referred to as the -Y direction. Similarly, the upper side of the paper in Fig. 4 in the Z direction will be referred to as the -Z direction, and the lower side of the paper in Fig. 4 will be referred to as the +Z direction.

[0095] For convenience, a definition based on the external shape of the housing 10 has been given here as an example, but instead of or in addition to this definition, a definition based on the operating direction and positional relationship of each component housed in the housing 10 can also be used.

[0096] For example, the direction in which the irradiation position of the laser beam moves by driving the first mirror 31a can be defined as the Y direction, and the direction in which the irradiation position of the laser beam moves by driving the second mirror 32a can be defined as the X direction.

[0097] In the following description, it is assumed that the definition based on the outer shape of the housing 10 and the definition based on the irradiation positions of the first mirror 31a and the second mirror 32a are the same.

[0098] 4 to 7, the housing 10 has a bottom surface 10d on which the exit window 4 is formed, and a top surface 10u facing the bottom surface 10d and therefore the exit window 4. For example, the bottom surface 10d faces the +Z direction, while the top surface 10u faces the -Z direction, and both are made of one or more plate-like members having a thickness in the Z direction. Note that "facing" here refers to conceptual facing when the housing 10 is considered as a conceptual rectangular parallelepiped.

[0099] The housing 10 further has a bottom surface 10d, a top surface 10u, a front surface 10f surrounding the laser light generation unit 2 and the laser light scanning unit 3, a rear surface 10b, a left side surface 10l, and a right side surface 10r.

[0100] The front surface 10f, the back surface 10b, the left side surface 10l, and the right side surface 10r all face in a direction perpendicular to the top surface 10u and the bottom surface 10d (i.e., in a direction along the XY plane). For example, the front surface 10f faces in the -X direction, while the back surface 10b faces in the +X direction, and both are made of one or more plate-like members having a thickness in the X direction. Similarly, for example, the left side surface 10l faces in the +Y direction, while the right side surface 10r faces in the -Y direction, and both are made of one or more plate-like members having a thickness in the Y direction.

[0101] The six sides of the housing 10 will be described in order below. The term "side" in the context of the bottom side 10d, top side 10u, front side 10f, back side 10b, left side side 10l, and right side side 10r also includes plate-like members having a predetermined thickness. These six sides are merely classified for convenience and do not need to be separate from one another. For example, at least one of the left side side 10l and the right side side 10r may be integrally formed with at least a portion of the bottom side 10d (particularly the non-offset portion 18, described below).

[0102] -Top surface 10u- As shown in Fig. 4, the top surface 10u of the six surfaces constituting the housing 10 extends along the XY direction and is formed as a rectangular plate with the X dimension being longer than the Y dimension. In this embodiment, the top surface 10u is configured as a mounting surface that is connected to a support member and attached to the mounting position. In this case, the thickness of the top surface 10u is greater than the thicknesses of the left side surface 10l and the right side surface 10r.

[0103] An attachment 5 that can be attached to a mounting position is provided on the top surface 10u, which serves as a mounting surface. The attachment 5 is configured as a plate-like member that extends in a direction (XY direction) substantially parallel to the top surface 10u and has a thickness in a direction (Z direction) perpendicular to the top surface 10u. The attachment 5 is placed on the top surface 10u and, as shown in FIG. 10, is fastened to the top surface 10u by fasteners 5b such as bolts. As described above, the thickness of the top surface 10u is greater than the thicknesses of the left side surface 10l, right side surface 10r, etc. Increasing the thickness of the top surface 10u is advantageous in ensuring an insertion margin for the fasteners 5b.

[0104] Fastening holes 5a corresponding to the support member 501 to be placed at the attachment position are provided on the top surface of the attachment 5. With the support member 501 placed on the attachment 5, the support member 501 can be attached to the attachment 5 by fastening a fastener such as a bolt into the fastening holes 5a. As a result, the top surface 10u is attached to the attachment position via the attachment 5, and at the same time, the housing 10 is suspended from the support member 501.

[0105] -Bottom 10d- As shown in Fig. 6, the bottom surface 10d of the six surfaces is located on the opposite side of the top surface 10u across the laser light scanning unit 3. As shown in Fig. 7, the bottom surface 10d is formed in a curved shape that extends along the X direction and has a central portion in the Y direction recessed toward the -Z side.

[0106] 7 and 10, the bottom surface 10d according to this embodiment has an offset portion 16a located in the center in the Y direction and offset toward the -Z side, an inclined portion 16b also located in the center in the Y direction, and non-offset portions 18 located at both ends in the Y direction and protruding further toward the +Z side than the offset portion 16a. Both the offset portion 16a and the non-offset portion 18 are formed to extend substantially flat along the X direction.

[0107] In detail, a groove having a trapezoidal cross section and expanding in diameter toward the +Z side is formed on the bottom surface 10d according to this embodiment, with the offset portion 16a as its upper base. The exit window 4 is provided in the offset portion 16a, which serves as the upper base. The bottom surface 10d according to this embodiment is configured as an exit surface on which the exit window 4 is formed. Details of the exit window 4 will be described later.

[0108] More specifically, as shown in Fig. 6, the center portion of bottom surface 10d in the Y direction is configured by connecting offset portion 16a located on the -X side and inclined portion 16b located on the +X side. Of these, offset portion 16a according to this embodiment extends flatly from the center portion of bottom surface 10d in the Y direction toward the +X side, as shown in Figs. 6, 7, and 9.

[0109] Inclined portion 16b is also located in the center of bottom surface 10d in the Y direction and extends from the +X side end of offset portion 16a while sloping toward the +X side. Inclined portion 16b slopes toward the +Z side as it approaches the +X side, and is disposed so as to be inclined with respect to the X and Z directions and to form a plane parallel to the Y direction. As shown in FIG. 7, the +X side end of inclined portion 16b is set to be at approximately the same height as the +Z side end of non-offset portion 18.

[0110] The surface of inclined portion 16b forms inclined surface 16c facing the -X side and the +Z side, and inclined surface 16c is configured to be able to mount reflective mirror 71, as shown in FIG. 7 etc. Inclined surface 16c is an example of the "mirror mounting portion" in this embodiment. As shown in FIG. 14, reflective mirror 71 intersects with imaging optical axis Ax of imaging device 92 described above and can reflect the imaging optical axis toward irradiation area R1.

[0111] Furthermore, the reflecting mirror 71 according to this embodiment is made of stainless steel (so-called SUS) that has been subjected to a mirror finish. By using the stainless steel material, cracks in the reflecting mirror 71 can be suppressed.

[0112] On the other hand, non-offset portion 18 constitutes a portion of bottom surface 10d from a portion corresponding to the oblique side of the trapezoid to the +Z side end. Non-offset portion 18 according to this embodiment is constituted by first plate-shaped member 18l located on the +Y side of offset portion 16a, and second plate-shaped member 18r located on the -Y side of offset portion 16a.

[0113] As shown in Fig. 10, the first plate-shaped member 18l is formed in a thin plate shape and has an inverted L-shape when viewed from the -X side. Here, "inverted L-shape" refers to a shape obtained by inverting an L-shape with respect to an axis of symmetry extending in the Z direction. The first plate-shaped member 18l is disposed on the opposite side of the second plate-shaped member 18r across the offset portion 16a. The vertical side of the inverted L-shape of the first plate-shaped member 18l forms the oblique side on the +Y side of the trapezoid, and the horizontal side of the inverted L-shape forms the +Z side end of the +Y side.

[0114] 10, second plate-shaped member 18r is formed in a thin plate shape and has an L-shape when viewed from the -X side. Second plate-shaped member 18r is disposed on the opposite side of first plate-shaped member 18l with offset portion 16a sandwiched therebetween. The vertical side of the L-shape of second plate-shaped member 18r forms the oblique side on the -Y side of the trapezoid, and the horizontal side of the L-shape forms the +Z side end of the -Y side.

[0115] 10, first plate-shaped member 18l, together with the lower half of left side surface 10l, covers and conceals exit window 6 from the +Y side. Meanwhile, second plate-shaped member 18r, together with the lower half of right side surface 10r, covers and conceals exit window 6 from the -Y side. In this way, first plate-shaped member 18l and second plate-shaped member 18r, together with the lower half of left side surface 10l and the lower half of right side surface 10r, form a skirt-shaped cover (skirt portion).

[0116] -Front 10f- As shown in Figures 4, 5 and 7, the front surface 10f of the six surfaces extends along the YZ direction and is formed in a plate shape having an indicator 11, two ventilation holes 12, 12, and a notch 10c.

[0117] The indicator 11 is provided on the upper side of the front surface 10f near the right end, and is composed of three lamps 11a, 11b, and 11c aligned along the Y direction (see FIG. 7). Each of the three lamps 11a, 11b, and 11c is composed of a light-emitting diode (LED) electrically connected to the marker controller 100.

[0118] 5 and 7, one of the two ventilation holes 12, 12 is provided on the lower side of the front surface 10f near the left end, and the other of the two ventilation holes 12, 12 is provided on the lower side of the front surface 10f near the right end. Both of the two ventilation holes 12, 12 penetrate the front surface 10f in the thickness direction, and each communicates with a second storage section H2, which will be described later.

[0119] 5A and 7, the cutout 10c is formed by cutting out a portion of the front surface 10f that includes the lower end portion, and is connected to the front end portion (the end portion on the −X direction side) of the offset portion 16a. The cutout 10c is arranged between the two ventilation openings 12, 12 in the Y direction.

[0120] Specifically, notch 10c is formed in a generally trapezoidal shape tapering in the +Z direction so as to have a cross section that generally coincides with the cross section of the trapezoid with offset portion 16a as its upper base. By providing notch 10c in the lower half of front surface 10f according to this embodiment, front surface 10f is configured as an at least partially open user-access surface (open surface) that communicates with exit window 4 via offset portion 16a.

[0121] Additionally, a cover member 13 capable of closing the notch 10c on the front surface 10f is attached to the front surface 10f as an open surface (see FIGS. 4 and 6). The cover member 13 can replace an existing front cover (for example, a cover provided with a hinge that can open and close the notch 10c). Details of the cover member 13 will be described later.

[0122] -Back 10b- 4 to 6, the rear surface 10b of the six surfaces is disposed on the opposite side of the laser light scanning unit 3 from the front surface 10f, and is formed in a plate shape extending along the YZ direction. The rear surface 10b according to this embodiment can be regarded as one outer surface of the housing 10 (an outer surface different from the cover member 13), and serves as a connection surface to which a cable 200 that supplies power to the inside a of the housing 10 is connected. The rear surface 10b as a connection surface surrounds the laser light scanning unit 3 together with the front surface 10f as an open surface, the top surface 10u as a mounting surface, and the bottom surface 10d as an emission surface.

[0123] 6, a connection cover 14 is provided on the rear surface 10b as a connection surface to cover the connection portion between the rear surface 10b and the cable 200. The connection cover 14 regulates the extension direction of the cable 200 so that the cable 200 is unwound in the in-plane direction (YZ direction) of the rear surface 10b.

[0124] -Left side 10l- As shown in FIGS. 4, 5 and 10, the left side surface 10l of the six surfaces is disposed on the +Y side with respect to the laser light scanning unit 3, and is formed in a plate shape extending along the ZX direction.

[0125] -Right side 10r- 7 and 10, the right side surface 10r of the six surfaces is disposed on the -Y side with respect to the laser light scanning unit 3, and is formed in a plate shape extending along the ZX direction. The right side surface 10r is disposed on the opposite side of the left side surface 10l with the laser light scanning unit 3 in between.

[0126] (Internal space of the housing 10) The housing 10 defines an internal space surrounded by six sides: a bottom side 10d, a top side 10u, a front side 10f, a rear side 10b, a left side side 10l, and a right side side 10r. The internal space is divided into multiple storage compartments by plate-like members disposed inside the housing 10.

[0127] As such plate-like members, the marker head 1 according to this embodiment has a first base plate 15, a second base plate 16, and a third base plate 17. In this embodiment, the first base plate 15, the second base plate 16, and the third base plate 17 are separate from one another. Of these plate-like members, the first base plate 15 is configured as a support plate capable of supporting the solid-state laser crystal 22.

[0128] The configuration of each plate-like member will be explained in order below.

[0129] -First base plate 15- 8, 9, and 10, first base plate 15 is configured as a metal plate-like member extending in the X direction, and is housed in housing 10 (in other words, surrounded by six sides of housing 10). The thickness of first base plate 15 is set to be greater than the thickness of at least left side surface 10l and right side surface 10r of housing 10 among the six sides.

[0130] In particular, the first base plate 15 according to this embodiment has an inverted L-shape when viewed from the -X side. Here, the "inverted L-shape" refers to a shape obtained by inverting an L-shape with respect to an axis of symmetry extending in the Z direction. Hereinafter, the portion of the first base plate 15 corresponding to the vertical side of the inverted L-shape may be referred to as the vertical side portion 15a, and the portion corresponding to the horizontal side of the inverted L-shape may be referred to as the horizontal side portion 15b.

[0131] The first base plate 15 is disposed between the left side surface 10l and the right side surface 10r in the Y direction, and is disposed on the +Y side of the second base plate 16. The first base plate 15 is disposed on the +Y side of the third base plate 17 across the second base plate 16. The first base plate 15 is disposed below the top surface 10u in the Z direction. The first base plate 15 is disposed between the front surface 10f and the rear surface 10b in the X direction.

[0132] The first base plate 15 as a support plate is attached to the housing 10 via the front surface 10f and the back surface 10b while being non-integral with the top surface 10u as an attachment surface.

[0133] Next, the vertical side portion 15a will be described in detail. The vertical side portion 15a according to this embodiment is formed in the shape of a thick plate extending along the Z direction, which is the irradiation direction, and the X direction.

[0134] Of the left and right side surfaces of vertical side portion 15a, the left side surface facing the +Y side forms a partition surface that defines crystal housing portion H12 (described later). Various optical components including solid-state laser crystal 41 are fastened to this partition surface.

[0135] Of the left and right side surfaces of the vertical side portion 15a, the right side surface facing the -Y side supports, from the left, the first casing 50 that defines a mirror housing section H11 (described later). Instead of supporting the first casing 50 with this right side surface, the right side surface may define part of the mirror housing section H11.

[0136] Next, the horizontal side portion 15b will be described in detail. The horizontal side portion 15b according to this embodiment is formed in a thick plate shape extending along the X direction and the Y direction. As shown in Fig. 10, a first heat sink 81 serving as a heat sink according to this embodiment is provided on the lower surface of the horizontal side portion 15b.

[0137] The first heat sink 81 is composed of a plurality of fins protruding in the +Z direction. These fins are aligned in the Y direction. Each fin is formed to extend in the X direction. The first heat sink 81 is thermally coupled to a part of the laser light generation unit 2 (specifically, the solid-state laser crystal 22) via the first base plate 15.

[0138] In the example shown in FIG. 10, the horizontal side portion 15b and the first heat sink 81 are integrally formed, but this is not limiting, and the horizontal side portion 15b and the first heat sink 81 may be formed separately.

[0139] -Second base plate 16- As shown in Figures 8, 9 and 10, the second base plate 16 is configured as a metal plate-like member extending in the X direction, and defines some of the six surfaces of the housing 10, particularly the offset portion 16a and the inclined portion 16b on the bottom surface 10d.

[0140] In particular, the second base plate 16 according to this embodiment is formed in a Z shape when viewed from the -Y side. When the second base plate 16 is considered to be Z-shaped, the upper side corresponds to the offset portion 16a, and the side connecting the upper side and the bottom side corresponds to the inclined portion 16b. In the X direction, the length of the offset portion 16a as the upper side is set to be longer than the length of the bottom side when the second base plate 16 is considered to be Z-shaped.

[0141] The second base plate 16 is disposed between the left side surface 10l and the right side surface 10r in the Y direction, more specifically, between the first base plate 15 and the third base plate 17.

[0142] The second base plate 16 is disposed below the top surface 10u in the Z direction. The second base plate 16 is disposed on the -Z side of the horizontal side portion 15b of the first base plate 15. Specifically, in the second base plate 16, the offset portion 16a as the Z-shaped upper side is disposed at approximately the same Z position as the +Z side portion (lower portion) when the vertical side portion 15a of the first base plate 15 is divided in half in the Z direction. In addition, in the second base plate 16, the portion corresponding to the Z-shaped bottom is disposed at approximately the same Z position as the +Z side end portions (lower ends) of the left side surface 10l and the right side surface 10r.

[0143] The second base plate 16 is disposed between the front surface 10f and the rear surface 10b in the X direction. The second base plate 16 is fixed to the front surface 10f and the rear surface 10b via the first base plate 15 and the third base plate 17. The second base plate 16 may also be directly fastened to the front surface 10f and the rear surface 10b.

[0144] Next, to describe the offset portion 16a in more detail, the offset portion 16a according to this embodiment is formed as a thick plate extending in the X and Y directions. When the offset portion 16a is divided into two in the X direction, the exit window 6 according to this embodiment is formed in the +X side portion (the rear portion in the front-to-rear direction). This exit window 6 is arranged in the offset portion 16a near the boundary with the inclined portion 16b.

[0145] The exit window 4 has an exit hole 41 that penetrates the +X side portion of the offset portion 16a, a cover glass 42 that fits into the exit hole 41, and a sealing member (not shown) that liquid-tightly seals the gap between the exit hole 41 and the cover glass 42 (see FIG. 10). The cover glass 42 is configured as an optical member that transmits the laser light that is reflected by the laser light scanning unit 3 and heads toward the irradiation area R1. The cover glass 42 can be formed in a rectangular shape that corresponds to the shape of the irradiation area R1, for example, a rectangular shape that is approximately similar to the irradiation area R1 and is smaller than the irradiation area R1.

[0146] 8, 9, and 10, of the upper and lower surfaces of the offset portion 16a, the upper surface facing the -Z side supports the first casing 50 from below. More specifically, the first casing 50 can be fastened to the upper surface of the offset portion 16a, and this fastening allows the first casing 50 to be fixed to the second base plate 16. Instead of supporting the first casing 50 by the upper surface of the offset portion 16a, the upper surface may define a part of the mirror housing portion H11.

[0147] -Third base plate 17- 8, 9, and 10, the third base plate 17 is configured as a metal plate-like member extending in the X direction, and is housed in the housing 10 (in other words, it is surrounded by six sides of the housing 10). The thickness of the third base plate 17 is set to be greater than the thickness of at least the left side surface 10l and the right side surface 10r of the six sides of the housing 10.

[0148] In particular, the third base plate 17 according to this embodiment has an L-shape when viewed from the -X side. Hereinafter, the portion of the third base plate 17 corresponding to the vertical side of the L-shape may be referred to as a vertical side portion 17a, and the portion corresponding to the horizontal side of the L-shape may be referred to as a horizontal side portion 17b.

[0149] The third base plate 17 is disposed between the left side surface 10l and the right side surface 10r in the Y direction, and is disposed on the -Y side of the second base plate 16. The third base plate 17 is disposed on the -Y side of the first base plate 15, with the second base plate 16 sandwiched between them.

[0150] The third base plate 17 is disposed below the top surface 10u in the Z direction.

[0151] The third base plate 17 is disposed between the front surface 10f and the rear surface 10b in the X direction. The third base plate 17 is fixed to the front surface 10f and the rear surface 10b by fasteners (not shown).

[0152] Next, the vertical side portion 17a of the third base plate 17 will be described in detail. In this embodiment, the vertical side portion 17a is formed like a thick plate extending along the -Z direction, which is the irradiation direction, and the X direction. In the Z direction, the dimension of the vertical side portion 17a of the third base plate 17 is shorter than the dimension of the vertical side portion 15a of the first base plate 15. This vertical side portion 17a supports the second base plate 16 from the -Y side.

[0153] Next, the horizontal side 17b of the third base plate 17 will be described in detail. The horizontal side 17b according to this embodiment is formed like a thick plate extending along the X and Y directions. Various components can be attached to this horizontal side 17b. Components attached to the horizontal side 17b include the control board 33 of the laser light scanning unit 3. Furthermore, as shown in FIG. 10, a second heat sink 82, which serves as a heat sink according to this embodiment, is provided on the lower surface of the horizontal side 17b facing the -Z side.

[0154] The second heat sink 82 is composed of a plurality of fins protruding in the +Z direction. These fins are aligned in the Y direction. Each fin is formed to extend in the X direction. The second heat sink 82 is thermally coupled to other parts of the laser light generation unit 2 (specifically, the excitation light source 21) via the third base plate 17.

[0155] That is, in this embodiment, the first heat sink 81 for cooling the solid-state laser crystal 22 is configured as a separate body from the second heat sink 82 for cooling the excitation light source 21.

[0156] In the example shown in FIG. 10, the horizontal side portion 17b and the second heat sink 82 are integrally formed, but this is not limiting, and the horizontal side portion 17b and the second heat sink 82 may be formed separately.

[0157] Furthermore, when the first base plate 15 and the third base plate 17 are separate bodies as in this embodiment, the first heat sink 81 provided on the first base plate 15 and the second heat sink 82 provided on the third base plate 17 are separate bodies. However, the present disclosure is not limited to such a configuration, and the first heat sink 81 and the second heat sink 82 can also be configured as an integrated body.

[0158] (Outline of the first storage section H1 and the second storage section H2) As described above, the internal space of the housing 10 is partitioned by the first base plate 15, the second base plate 16, and the third base plate 17 into a plurality of housing sections.

[0159] As such a storage section, the housing 10 of this embodiment has a first storage section H1 in which a cover glass 62 serving as an optical member is provided, and a second storage section H2 in which at least a portion of the periphery of the cover glass 62 protrudes beyond the cover glass 62 toward the irradiation area R1 (see dashed line S1 in Figure 10).

[0160] The first housing unit H1 and the second housing unit H2 are aligned along the irradiation direction (-Z direction), with the first housing unit H1 located on one side (-Z side) of the irradiation direction and the second housing unit H2 located on the other side (+Z side) of the irradiation direction. The boundary between the first housing unit H1 and the second housing unit H2 is defined by a first base plate 15, a second base plate 16, and a third base plate 17.

[0161] The first housing unit H1 houses optical components related to generation of excitation light, generation of laser light, and deflection of laser light. Specifically, the first housing unit H1 according to this embodiment houses a laser light generation unit 2 and a laser light scanning unit 3.

[0162] In the example shown in Figure 10, the first storage section H1 is configured as a space surrounded by the top surface 10u, the upper part of the front surface 10f, the lower part of the back surface 10b, the upper part of the left side surface 10l, the upper part of the right side surface 10r, the part of the bottom surface 10d formed by the second base plate 16, the first base plate 15, and the third base plate 17.

[0163] On the other hand, the second housing portion H2 houses cooling components related to cooling the optical components housed in the first housing portion H1. Specifically, the second housing portion H2 according to this embodiment houses a first heat sink 81 and a second heat sink 82 thermally coupled to the optical components housed in the first housing portion H1, and blower fans (not shown) for the first heat sink 81 and the second heat sink 82. The crystal-side housing portion H21 and the light-source-side housing portion H22, which serve as a pair of extensions, define the housing spaces for the first heat sink 81 and the second heat sink 82.

[0164] (Details of the first storage section H1) Here, of the first housing section H1 and second housing section H2 described above, the first housing section H1 is further divided into three housing sections aligned in a direction (XY direction) perpendicular to the irradiation direction, for example, along the Y direction. Specifically, the housing 10 according to this embodiment has a mirror housing section H11, a crystal housing section H12, and a substrate housing section H13.

[0165] The mirror housing section H11 houses the first mirror 31a and the second mirror 32a of the laser light scanning section 3. The mirror housing section H11 according to this embodiment is defined by a first casing 50 that can airtightly seal the first mirror 31a and the second mirror 32a. As described above, the first casing 50 may be defined using the offset portion 16a.

[0166] The crystal housing section H12 is defined by a support plate (first base plate 15) having a partition surface 15g extending along the irradiation direction, and is disposed on the opposite side of the partition surface 15g from the mirror housing section H11 (the +Y side in the illustrated example) to house a solid-state laser crystal 22. The crystal housing section H12 houses some of the optical components that make up the laser light generation section 2, such as the solid-state laser crystal 22. The crystal housing section H12 is defined by a second casing 40 that can hermetically seal these optical components. The crystal housing section H12 according to this embodiment can house a nonlinear optical crystal or the like in a sealed state.

[0167] The substrate accommodating section H13 is disposed on the opposite side of the crystal accommodating section H12 with respect to the mirror accommodating section H11, and accommodates the control substrate 33. The substrate accommodating section H13 according to this embodiment is defined as the space within the internal space of the first accommodating section H1 excluding the mirror accommodating section H11 and the crystal accommodating section H12.

[0168] (Details of the second storage section H2) On the other hand, the second housing section H2 is partitioned into the +Z side portion of the housing 10 by a first plate-shaped member 18l and a second plate-shaped member 18r. The second housing section H2 has two spaces spaced apart in a direction perpendicular to the irradiation direction, for example, in the arrangement direction (Y direction) of the mirror housing section H11, the crystal housing section H12, and the substrate housing section H13.

[0169] The second housing unit H2 according to this embodiment has two such spaces: a crystal-side housing unit H21 and a light source-side housing unit H22. Here, because the crystal-side housing unit H21 and the light source-side housing unit H22 are disposed apart in the Y direction, a space that does not belong to the second housing unit H2 is partitioned between the crystal-side housing unit H21 and the light source-side housing unit H22.

[0170] In this embodiment, the first plate-shaped member 18l and the second plate-shaped member 18r are configured to partition a space that includes the optical path closer to the irradiation area R1 (the optical path on the +Z side) of the optical path of the laser light connecting the first mirror 31a (the scanner mirror) and the irradiation area R1, in addition to the second housing section H2 that houses the members. Hereinafter, this space will be referred to as the "optical path dividing section" and will be denoted by the symbol H3. The optical path dividing section H3 in this embodiment is configured as a space that is surrounded on three sides, the +Y side, the -Y side, and the -Z side, by the first plate-shaped member 18l, the second plate-shaped member 18r, and the cover glass 62.

[0171] In the illustrated example, the optical path dividing section H3 is configured as a space with an open lower end on the +Z side, but this configuration is not limited to this. The +Z side end of the optical path dividing section H3 may be covered with an optical member such as glass. The optical member covering the +Z side end of the optical path dividing section H3 may be provided alternatively to the cover glass 62, or may be used in combination with the cover glass 62.

[0172] Of the two spaces constituting the second housing unit H2, the crystal-side housing unit H21 accommodates a first heat sink 81. The first heat sink 81 according to this embodiment is thermally coupled to at least the solid-state laser crystal 22 attached to the first base plate 15, among the optical components constituting the laser light generation unit 2.

[0173] The light source-side housing portion H22 houses a second heat sink 82. The second heat sink 82 according to the present embodiment is thermally coupled to at least the excitation light source 21 attached to the third base plate 17 among the optical components housed in the substrate housing portion H13.

[0174] (Configuration related to the layout of the imaging device) The laser light generated by the laser light generation unit 2 is reflected in turn by the second mirror 32a and the first mirror 31a of the laser light scanning unit 3. The laser light reflected by the first mirror 31a is transmitted through a defocus lens 37 shown in FIG. 10 and other figures. This defocus lens 37 is configured to diffuse the laser light transmitted through the lens 37 in an outward direction perpendicular to the irradiation direction. In the present embodiment, when the Z direction is the irradiation direction, the outward direction as the diffusion direction is a direction along the XY plane.

[0175] Specifically, the defocus lens 37 can be configured, for example, by a single biconcave lens. In this case, the defocus lens 37 is fitted into the through-hole of the first casing 50 with its central axis aligned along the Z direction.

[0176] The defocusing lens 37 is also disposed on a straight line connecting the first mirror 31a and the center of the cover glass 42 at the exit window 4. The defocusing lens 37 is disposed between the first mirror 31a and the cover glass 32 in the Z direction (in other words, on the +Z side of the first mirror 31a and the -Z side of the cover glass 42).

[0177] The defocusing lens 37 is further disposed so that the optical axis of the defocusing lens 37 is coaxial with the optical axis of the cover glass 42. Hereinafter, the optical axes of the defocusing lens 37 and the cover glass 42 will be collectively referred to as the "laser emission axis," which will be denoted by the symbol Al (see also FIG. 6). This laser emission axis Al extends along the Z direction and is offset toward the +Y side with respect to the second mirror 32a, while intersecting with the mirror surface of the first mirror 31a. Because the laser emission axis Al is configured to substantially coincide with the optical axis of the laser light reflected by the first mirror 31a, the two axes will be considered to be the same in the following description.

[0178] The configuration of the defocus lens 37 as an optical element is not limited to one using a single biconcave lens. The optical element may be configured using multiple lenses, or may be configured using lenses other than a biconcave lens.

[0179] Here, as shown in FIG. 11, the crystal side storage section H21 and the light source side storage section H22 constituting the second storage section H2 can be regarded as members extending from the first storage section H1 along the irradiation direction (emission direction) of the laser light so as to sandwich the optical axis (laser emission axis Al) of the laser light that has passed through the cover glass 42 as an optical element.

[0180] In the following description, these members may be referred to as a "pair of extensions" as a term that takes into consideration the shapes of the crystal-side housing portion H21 and the light source-side housing portion H22.

[0181] The pair of extension portions H21, H22 can be classified into a first extension portion (crystal-side accommodation portion) H21 arranged on one side (+Y side) of the first direction (Y direction) with respect to the laser emission axis Al, and a second extension portion (light source-side accommodation portion) H22 arranged on the other side (-Y side) of the first direction with the laser emission axis Al in between. As shown in Figures 10 and 11, the second extension portion H22 is provided with a gap in the Y direction from the first extension portion H21.

[0182] As described above, the pair of extending portions H21 and H22 form the optical path dividing portion H3 as an internal space. This optical path dividing portion H3 is formed in the space between the first extending portion H21 and the second extending portion H22.

[0183] 7, the first extending portion H21 and the second extending portion H22 are connected by an inclined portion 16b serving as a wall portion. The inclined portion 16b serving as a wall portion forms an optical path dividing portion H3 together with the first extending portion H21 and the second extending portion H22. The cover member 13 also forms the optical path dividing portion H3 together with the first extending portion H21 and the second extending portion H22. The cover member 13 is disposed so as to face the inclined portion 16b in the X direction.

[0184] Specifically, the cover member 13 according to this embodiment is formed in a rectangular plate shape that can cover the area from the upper half of the front surface 10f to the notch 10c in the lower half. The cover member 13 is fixed to the front surface 10f with fasteners such as screws.

[0185] The cover member 13 has a through hole (reference numeral omitted) formed at approximately the same position as the indicator 11, and through holes (reference numeral omitted) formed at approximately the same positions as the two ventilation holes 12, 12. A description of these through holes will be omitted.

[0186] Furthermore, a camera mounting portion 19 to which the above-mentioned imaging device 92 can be attached is provided in the lower half of the cover member 13. This camera mounting portion 19 is composed of a first opening (opening) 19a formed in a position facing the inclined portion (wall portion) 16b on which the reflecting mirror 71 is disposed, and a second opening 19b for mounting a camera mounting fixture 91 as shown in FIG.

[0187] The camera mounting portion 19 of this embodiment is configured to allow the mounting of an imaging device 92 so that the imaging optical axis Ax passes through the optical path partition H3 formed by a pair of extension portions H21, H22, as shown in Figures 13 and 14.

[0188] In detail, the camera mounting portion 19 according to this embodiment is configured to be able to mount a camera unit 9 to which an imaging device 92 is attached, and is configured to support the imaging device 92 via this camera unit 9.

[0189] 13, the camera unit 9 includes a camera mounting fixture 91, an imaging device 92, and a light 93. The camera mounting fixture 91 is configured as an inverted L-shaped plate member that is mirror-symmetrical with respect to the Y direction of an L-shaped plate member, and has multiple fastening holes 91b provided at positions corresponding to the first opening 19a. By using the camera unit 9, the relative position of the light 93 with respect to the imaging device 92 is fixed. This makes it easier to position the optical axis of the illumination light with respect to the imaging optical axis Ax, compared to a configuration in which the imaging device 92 and the light 93 are positioned independently.

[0190] Furthermore, a part of the camera mounting fixture 91 protrudes toward the -X side. This protruding part constitutes a camera mounting section 91c to which the imaging device 92 can be attached. With the imaging device 92 attached to the camera mounting section 91c, the camera mounting fixture 91 is attached to the camera attachment section 19, thereby completing the attachment of the imaging device 92 to the marker head 1.

[0191] Furthermore, a portion of the camera mounting fixture 91 protrudes toward the +X side. This protrusion constitutes a lighting mounting section 91d configured to allow mounting of a lighting 93. When the camera mounting fixture 91 is mounted to the camera mounting section 19 with the lighting 93 mounted on the lighting mounting section 91d, the lighting 93 is disposed in the optical path partition section H3, which serves as the internal space, as shown in FIG. 14. As shown in FIG. 13, the lighting 93 is disposed so as to point in a direction intersecting the imaging optical axis Ax. In particular, the lighting 93 according to this embodiment is disposed so as to be perpendicular to both the imaging optical axis Ax and the irradiation direction (Z direction). The lighting of the lighting 93 can be controlled by, for example, the image sensor 404.

[0192] In this embodiment, the illumination 93 is arranged to point in a direction intersecting the imaging optical axis Ax. However, the present invention is not limited to this. The illumination 93 may be arranged to point in approximately the same direction as the imaging optical axis Ax. For example, in the camera unit 9′ shown in FIG. 22, the illumination 93′ ​​is provided outside the housing 10, similar to the imaging device 92. The illumination 93′ ​​is configured as a so-called bar-shaped illumination, and is arranged with its longitudinal direction (the direction in which the light-emitting elements are arranged) aligned along the Y direction and its light-emitting surface facing approximately the +X direction. Like the illumination 93′, the illumination 93′ ​​may be oriented in approximately the same direction as the imaging optical axis Ax (approximately the +X direction in the illustrated example) (see the optical axis Af in FIG. 22) and illuminate the workpiece obliquely through the first opening 19a. This arrangement allows the illumination fixture to be provided outside the housing 10, improving ease of installation. Furthermore, by obliquely illuminating the workpiece through the first opening 19a, specular reflection from the workpiece can be prevented.

[0193] Returning to the explanation of the camera mounting portion 19, the first opening (opening) 19a constituting the camera mounting portion 19 is configured to allow the imaging optical axis Ax of the imaging device 92 and the illumination 93 to pass through. In this case, the camera mounting portion 19 according to this embodiment can install the imaging device 92 so that the imaging optical axis Ax intersects with the mirror surface of the reflecting mirror 71 due to the first opening 19a being formed at a position facing the inclined portion 16b.

[0194] The mirror surface of the reflecting mirror 71 is arranged so as to bend the imaging optical axis Ax back toward the surface of the workpiece W. This allows the imaging optical axis Ax to intersect with the surface of the workpiece W, thereby enabling the surface to be imaged.

[0195] 14, a cover glass 72 may be provided on the bottom surface of the housing 10. In this case, both the laser emission axis Al and the imaging optical axis Ax intersect with the surface of the workpiece W through the cover glass 72. Although not shown in the drawings, the cover glass through which the laser emission axis Al passes and the cover glass through which the imaging optical axis Ax passes may be separate bodies.

[0196] 15, the imaging area R3 of the imaging device 92 may have a shape similar to the laser light irradiation area R1, and is set to be smaller than the irradiation area R1. Furthermore, the center position of the imaging area R3 is arranged to coincide with the center position Op of the irradiation area R1. Note that while FIG. 15 illustrates an example in which a general camera is used as the imaging device 92, if the imaging device 92 is configured using a line scan camera as described above, the imaging area R3 will be a vertically elongated region along the conveying direction At.

[0197] Furthermore, when the camera mounting fixture 91 is attached to the camera attachment part 19 with the imaging device 92 attached to the camera mounting part 91c, the first opening (opening) 19a is open to the outside. Therefore, this first opening 19a may be covered with a light-shielding plate along with the imaging device 92. This light-shielding plate is preferably made of a material such as metal or transparent resin that does not transmit ultraviolet light. For example, if the light-shielding plate is covered with transparent resin that does not transmit ultraviolet light, imaging by the imaging device 92 may be performed through the transparent resin.

[0198] Further Details of Marker Controller 100 The marker controller 100 includes the user terminal 100b described above, as well as a controller main body 100a for controlling the marker head 1. The controller main body 100a includes, as main components, a setting unit 103, a receiving unit 104, a display control unit 105, the first IF unit 106, the second IF unit 107, and the third IF unit 108 described above, the marking control unit 109 also described above, and a trigger monitoring unit 110.

[0199] (Setting unit 103) Based on user input through the operation unit 101, the setting unit 103 sets a printing block in which the character string (printing pattern Pp) to be marked on each work element We by the marking control unit 109 is associated with the attribute information of that printing pattern Pp.

[0200] Here, the attribute information of the print pattern Pp includes, for example, one or more of the character font, font size, character thickness, character spacing, and the position of the print pattern Pp as viewed on the setting plane R2.

[0201] The various information and parameters set by the setting unit 103 are stored in the storage device 120 temporarily or continuously.

[0202] In addition, the setting unit 103 can also set information other than character strings, such as the transport speed of the work W and parameters that characterize the timing of starting marking, as attribute information (hereinafter also referred to as "job information") of a print job consisting of multiple print blocks.

[0203] For example, the setting unit 103 can set, as job information, an offset amount (so-called "trigger delay") from the area R1 irradiated with laser light by the laser light scanning unit 3 to the marking start position of the print pattern Pp on each work element We when a predetermined trigger signal is received. Here, the trigger signal is output each time the mark detection sensor 403 detects the alignment mark Mr.

[0204] Therefore, if the waiting time from when the mark detection sensor 403 detects the alignment mark Mr until it starts marking the work element We corresponding to that alignment mark Mr is called the "delay time," then the trigger delay here can be considered to be the amount of movement of the work W during that delay time. By setting the trigger delay appropriately, marking can be performed at more appropriate timing for each work element We.

[0205] In addition, the setting unit 103 can also set, as job information, whether printing is to be performed while the transport of the work W is temporarily stopped (so-called "static printing"), or whether printing is to be performed while the transport of the work W is continuing without being stopped (so-called "moving printing").

[0206] The setting unit 103 also accepts a print job selection operation by the user and switches to the selected print job. The setting unit 103 then determines the trajectory that the laser beam should follow when marking the character string that makes up each print block of the selected print job. The trajectory that the laser beam should follow varies depending on the attribute information described above, such as character thickness and character spacing. The data determined by the setting unit 103 is temporarily or continuously stored in the storage device 120 of the controller main body 100a.

[0207] Hereinafter, data indicating the trajectory that the laser beam should follow may be referred to as "expanded data," and the process for determining the expanded data may be referred to as "expanding process."

[0208] (Reception unit 104) Reception unit 104 receives user input via operation unit 101 and reflects the input content in the setting items, etc. set by setting unit 103. The content reflected in the setting items, etc. is overwritten and saved in storage device 120. For example, reception unit 104 can receive a change to the character string of a print block when switching print jobs.

[0209] (First IF Part 106) The first IF unit 106 is electrically connected to the PLC 402, and receives a control signal output from the PLC 402 when operating the laser marking system S. This control signal is input to the marking control unit 109, etc. via the first IF unit 106, and is used to control the controller main body 100a.

[0210] (2nd IF part 107) The second IF unit 107 is electrically connected to the mark detection sensor 403, and receives a trigger signal indicating that the mark Mr has been detected each time the alignment mark Mr is detected during the transport of the workpiece W.

[0211] The trigger signal received by the second IF unit 107 is input to the trigger monitoring unit 110 and the marking control unit 109 via the second IF unit 107. The trigger signal, together with the trigger delay described above, is used to control the timing of marking each work element We.

[0212] (3rd IF part 108) The third IF unit 108 is connected to an encoder 401 that outputs a pulse signal (encoder pulse) corresponding to the conveying speed of the workpiece W so as to be able to receive the encoder pulse. The encoder pulse received by the third IF section 108 is input to the trigger monitoring section 110, the marking control section 109, and the setting section 103 via the third IF section 108.

[0213] (Trigger monitoring unit 110) The trigger monitoring unit 110 is electrically connected to the second IF unit 107 and the third IF unit 108, and each time the second IF unit 107 receives a trigger signal, it determines whether the amount of movement of the work element We corresponding to the trigger signal has reached the offset amount (trigger delay) set by the setting unit 103.

[0214] The trigger monitoring unit 110 can make this determination based on, for example, the number of encoder pulses input to the third IF unit 108 after receiving the trigger signal, or the time that has elapsed since receiving the trigger signal. If it is determined that the offset amount has been reached after receiving the trigger signal, the trigger monitoring unit 110 inputs a signal indicating this to the marking control unit 109.

[0215] When the movement amount of the work element We reaches the offset amount, the housing 10 of the marker head 1 and one work element We corresponding to the trigger signal come close enough to be marked. Therefore, the trigger monitoring unit 110 according to this embodiment exemplifies the "approach monitoring unit" in this embodiment in that it can detect the approach between the housing 10 of the marker head 1 and one print area (i.e., one work element We).

[0216] (Marking control unit 109) The marking control unit 109 reads out the decompressed data stored in advance in the storage device 120, and controls the laser light scanning unit 3 to scan the laser light along the trajectory indicated by the read out decompressed data.

[0217] The marking control unit 109 performs marking on each work element We by scanning the laser light on the surface of each work element We. As described above, the timing at which marking starts on each work element We can be controlled by a trigger signal and a determination related to the offset amount.

[0218] In detail, when the second IF unit 107 receives a trigger signal, the marking control unit 109 controls the laser light scanning unit 3 so that the printing pattern Pp set by the setting unit 103 is marked on the flexible workpiece W based on the judgment result by the trigger monitoring unit 110.

[0219] More specifically, the marking control unit 109 is configured to read the expanded data and control the laser light scanning unit 3 using the expanded data when it is determined that the movement amount of the work element We corresponding to the trigger signal has reached the offset amount (trigger delay) after receiving the trigger signal.

[0220] (Display control unit 105) The display control unit 105 displays a predetermined display screen on the display unit 102 based on various electrical signals, and can also switch the display screen appropriately based on the on / off of a key switch, user input, etc. Furthermore, the display control unit 105 is configured to transition the display mode of each display screen based on the state of the laser marking system S. Details of the display modes will be omitted.

[0221] <Example of Laser Marking System L Operation> Fig. 16 is a flowchart showing the control process performed when operating the laser marking system S, focusing on the processing related to the imaging device 92. Fig. 17 is a time chart illustrating the time series of stationary printing, Fig. 18 is a time chart illustrating the time series of moving printing, and Fig. 19 is a table illustrating the contents of the inspection log.

[0222] (moving print) In the case of moving printing, in step S1, the marker controller 100 determines whether or not a print trigger signal has been received from an external device 400 such as the PLC 402. If this determination is YES, the control process proceeds to step S2, while if this determination is NO, the determination related to step S1 is repeated. This print trigger signal can be configured to be input from the PLC 402 to the marker controller 100 at a timing slightly delayed from the input timing of an electrical signal (stop signal) input from the PLC 402 to the processing equipment 500 to stop the transportation of the workpiece W by the processing equipment 500, for example.

[0223] The top row of Fig. 16 illustrates an input period Ts0 of the stop signal. During this period, the transport of the workpiece W is stopped. Also, in the second row of Fig. 16, the delay time Ts1 until the print trigger signal is input from the PLC 402 to the marker controller 100 means the time required for the workpiece W to come to a standstill.

[0224] In the following step S2, the trigger monitoring unit 110 determines whether the movement amount of the workpiece W has reached the trigger delay. If the determination is YES, the control process proceeds to step S3, whereas if the determination is NO, the determination related to step S2 is repeated. Note that the determination related to step S2 may be made based on the elapsed time corresponding to the trigger delay, the number of input pulses, etc.

[0225] In the following step S3, the processing equipment 500 as a conveying device receives a detection signal from the trigger monitoring unit 110 as an approach monitoring unit and stops conveying the workpiece W. Then, the laser marking device L performs marking on one workpiece element We while the processing equipment 500 is stopping conveying the workpiece W (see period Ts2 in FIG. 16). Period Ts2 means the time required for marking.

[0226] Then, the imaging device 92 captures an image of one workpiece element We on which marking has been performed by the laser marking device L while the conveyance by the processing equipment 500 is stopped.

[0227] More specifically, in step S4 following step S3, the image sensor 404 receives a signal indicating that marking has been completed (print completion signal) from the PLC 402 and / or the marker controller 100. Upon receiving the print completion signal, the image sensor 404 turns on the light 93.

[0228] Then, in step S5 following step S4, the image sensor 404 determines whether the time elapsed since receiving the print completion signal has reached a predetermined imaging delay Ts3. If the determination is YES, the control process proceeds to step S6, whereas if the determination is NO, the process related to step S5 is repeated.

[0229] By setting the imaging delay Ts3, imaging is performed after a certain time has passed since marking was completed. This makes it possible to prevent smoke generated by marking from appearing in the image. This allows the image sensor 404 to perform inspection with high accuracy.

[0230] Furthermore, although there is a concern about heat transfer from the imaging device 92 to the workpiece W, in reality, the time that the workpiece W stays near the housing 10 is short, so such heat transfer can be suppressed as much as possible.

[0231] Then, in step S6, which follows step S5, the image sensor 404 inputs an imaging trigger signal to the imaging device 92 and performs imaging of one work element We. Here, as shown in FIG. 16, the timing when marking is performed by the laser marking device L and the timing when imaging is performed by the imaging device 92 fall within the input period Ts0 of the stop signal. In other words, both of these steps are performed while the workpiece W is stopped. After imaging is completed, the image sensor 404 turns off the light 93.

[0232] Then, in step S7 following step S6, the image sensor 404 as an inspection device inspects the marking on one work element We after the imaging device 92 has imaged the work element We and the transportation by the processing equipment 500 has resumed. As shown in FIG. 16, the timing for performing the imaging inspection does not fall within the input period Ts0 of the stop signal. Note that the image sensor 404 may also perform inspection while the transportation of the workpiece W is stopped. The period Ts4 in FIG. 16 refers to the time required to read the marking content.

[0233] Then, in step S8 following step S7, the image sensor 404 determines whether the inspection result was good. If the determination is YES, the image sensor 404 advances the control process to step S9. If the determination is NO, the image sensor 404 advances the control process to step S10.

[0234] In step S8, the image sensor 404 also creates an inspection log as shown in FIG. 19. The first column of the inspection log indicates the identification number (JOB number) assigned to the print job. The second column of the inspection log indicates the cumulative number of marked work elements We. The third column of the inspection log indicates the print content of the print job, which is preset by the marker controller 100. The fourth column of the inspection log indicates the OCR result by the image sensor 404. In this case, if the character string in the third column matches the character string in the fourth column, the determination in step S8 is YES; if the character string in the third column does not match the character string in the fourth column, the determination in step S8 is NO. The fifth column of the inspection log indicates the determination result. The sixth column of the inspection log indicates the file name of the OCR image. Note that parameters (e.g., laser power, scan speed, etc.) on the marker controller 100 side may be associated with each record (column) of the inspection log.

[0235] Furthermore, if a barcode, QR code (registered trademark), or the like is marked instead of a character string, the determination in step S8 may be made based on whether the code has been properly read and whether the read content matches the content set in advance. Alternatively, it may be determined whether marking has been applied (whether there are traces of marking on the surface of the workpiece W). Furthermore, these determinations may be combined, for example, using an OR condition.

[0236] In the following step S9, the image sensor 404 stores the OCR image in various storage devices and then returns. Meanwhile, in step S10, the image sensor 404 stores the OCR image in various storage devices as in step S9 and then returns. In the latter case, the image sensor 404 may stop the operation of the entire laser marking system L via the PLC 402 or the like.

[0237] 16 is based on the premise that the marking contents are inspected after marking, but the surface condition of the workpiece W may be inspected before marking. In this case, inspection items include, for example, defect inspection to monitor whether or not there are holes on the surface of the workpiece W, inspection related to the alignment of the workpiece W, and foreign matter inspection to monitor whether or not there are foreign matters on the surface of the workpiece W.

[0238] (moving print) In the case of moving printing, in step S1, the marker controller 100 determines whether or not a trigger signal has been received (whether or not the alignment mark Mr has been detected) from the mark detection sensor 403. If this determination is YES, the control process proceeds to step S2, whereas if this determination is NO, the determination related to step S1 is repeated.

[0239] The top row of Figure 17 illustrates a pulse indicating that a trigger signal has been received. Regardless of whether or not this trigger signal has been received, the transport of the workpiece W continues.

[0240] In the following step S2, the trigger monitoring unit 110 determines whether the movement amount of the workpiece W has reached the trigger delay. If the determination is YES, the control process proceeds to step S3, whereas if the determination is NO, the determination related to step S2 is repeated. Note that the determination related to step S2 may be made based on the elapsed time corresponding to the trigger delay, the number of input pulses, etc.

[0241] Moreover, the period Td2 in the second row of FIG. 17 indicates the elapsed time until the movement amount of the workpiece W reaches the trigger delay.

[0242] In the following step S3, the laser marking device L performs marking on one workpiece element We being transported by the processing equipment 500. Here, the period Td2 in FIG. 17 means the time required for marking, similar to the period Ts2 in FIG. 16.

[0243] The imaging device 92 is configured to perform imaging of one work element We within the period Td0 from when the laser marking device L performs marking on the one work element We until the trigger monitoring unit 110 receives a detection signal regarding another work element We that is transported following the one work element We.

[0244] More specifically, in step S4 following step S3, the image sensor 404 receives a signal indicating that marking has been completed (print completion signal) from the PLC 402 and / or the marker controller 100. Upon receiving the print completion signal, the image sensor 404 turns on the light 93.

[0245] Then, in step S5 following step S4, the image sensor 404 determines whether the time elapsed since receiving the print completion signal has reached a predetermined imaging delay Td3. If the determination is YES, the control process proceeds to step S6, whereas if the determination is NO, the process related to step S5 is repeated.

[0246] Thereafter, in step S6 following step S5, the image sensor 404 inputs an imaging trigger signal to the imaging device 92 and performs imaging of one work element We. After completing imaging, the image sensor 404 turns off the light 93.

[0247] Then, in step S7 following step S6, the image sensor 404 as an inspection device inspects the marking on one work element We within the period Td0 from when the imaging device 92 performs marking on the former work element We until the trigger monitoring unit 110 receives a detection signal regarding the other work element We.

[0248] From this point on, the details of the inspection process are the same as in the case of static printing, so a detailed explanation will be omitted.

[0249] <About the layout of the imaging optical axis Ax> As described above, according to this embodiment, by laying out the imaging optical axis Ax so that it passes through the internal space (optical path partition H3) between the pair of extension portions H21, H22, it is possible to extend the imaging optical axis Ax from the imaging device 92 to the surface of the workpiece W longer even when the distance between the housing 10 and the workpiece W is very short (see, for example, FIG. 14). This makes it possible to fit a wider range into the imaging field of view, improving the usability of the laser marking device L.

[0250] 3, when the housing 10 is suspended from above, the distance between the housing 10 and the workpiece W may be shorter than when the housing 10 is supported from the side, below, etc. The configuration according to the present disclosure can ensure a wider imaging field even when such a layout is adopted, and works favorably in improving the usability of the laser marking device L.

[0251] 10 and 11, at least one of the pair of extension portions H21, H22 (both in this embodiment) can be used as a storage space for the heat sinks 81, 82. This makes it possible to effectively utilize the internal space of the pair of extension portions H21, H22 without it becoming dead space.

[0252] 14, by configuring the inclined portion 16b as a wall portion so that a reflecting mirror 71 can be attached, the imaging optical axis Ax can be bent by the reflecting mirror 71. This makes it possible to adopt a wider variety of layouts when arranging the imaging optical axis Ax so that it passes through the optical path dividing portion H3. Increasing the degree of freedom in the layout of the imaging optical axis Ax contributes to improving the usability of the laser marking device L.

[0253] 14, the reflecting mirror 71 can guide the imaging optical axis Ax to the surface of the workpiece W. This allows the laser light irradiation area R1 set on the surface of the workpiece W to coincide with or be close to the imaging field of view (imaging area R3) of the imaging device 92, as shown in FIG. 15. This makes it possible to image the workpiece W, for example, immediately after or immediately before marking, which is advantageous in improving the usability of the laser marking device L.

[0254] 14 and 15, it is possible to lay out the illumination 93 in the optical path partition section H3. This improves the quality of the captured image, such as visibility, and is therefore advantageous in improving the usability of the laser marking device L.

[0255] 14 and 15, the imaging optical axis Ax and the direction in which the illumination light is emitted are different, making it possible to suppress halation and the like caused by specular reflection of the illumination light. This improves the quality of the captured image, which is further advantageous in improving the usability of the laser marking device L.

[0256] Other Embodiments Although the imaging device 92 according to the embodiment is configured to be attached to the outer surface (front surface 10f) of the housing 10, the present disclosure is not limited to such a configuration. For example, the imaging device 92 may be laid out inside the housing 10.

[0257] Here, FIG. 20 is a view corresponding to FIG. 11 and shows a first modified example of the laser marking device, and FIG. 21 is a view corresponding to FIG. 12 and shows a second modified example of the laser marking device.

[0258] In the case of the marker head 1' according to the first modified example, the camera mounting portion is composed of the first casing 50 and a through-hole provided in the bottom surface thereof. In this case, the imaging device 92 is mounted inside the housing 10 and housed in the mirror housing portion H11, similar to the first mirror 31a. The imaging optical axis Ax of the imaging device 92 extends while inclining obliquely toward the +Z side, and passes in that order through the cover glass 42 and the optical path partition portion H3, which serves as the internal space.

[0259] On the other hand, in the case of the marker head 1" according to the second modified example, the camera mounting portion is configured in the space between the defocus lens 37 and the cover glass 42. In this case, the imaging device 92 is mounted within the housing 10 and housed in the space between the defocus lens 37 and the cover glass 42. The imaging optical axis Ax of the imaging device 92 extends at an angle toward the +Z side, similar to the laser marking device 1' according to the first modified example, and passes in turn through the cover glass 42 and the optical path partition section H3 as an internal space.

[0260] When the imaging device 92 is housed in the housing 10 as in the first and second modified examples, the imaging device 92 is preferably configured as a so-called wide-angle camera having a wide-angle lens.

[0261] Furthermore, in this embodiment, the imaging device 92 is arranged outside the housing 10, but for example, a dust collector (vacuum cleaner) may be arranged instead of the imaging device 92. That is, the first opening 19a may be configured so that the tip of a hose of the dust collector can be attached. This allows fumes (smoke) generated during film printing to be sucked in, so that the imaging device 92 can obtain a clearer image of the printing result (an image without smoke reflected in it).

[0262] Furthermore, the cover glass 42 attached to the housing 10 may become dirty due to the fumes and the like. If the cover glass 42 becomes dirty, this may lead to a decrease in laser output, which may adversely affect print quality. Therefore, a cleaning tool with a rubber roller attached to the tip of a long, thin handle may be provided. This cleaning tool can be inserted through the first opening 19a to wipe off dirt adhering to the cover glass 42.

[0263] Here, if a strong force is applied to the cover glass 42 when wiping the cover glass 42 with the cleaning tool, there is a risk that the cover glass 42 may be damaged (cracked, etc.). Therefore, a guide groove (guide rail) may be provided on the inner wall of the housing 10, and the cleaning tool may be moved back and forth (inserted and removed) from the front along the guide groove. This makes it possible to prevent unnecessary force from being applied to the cover glass 42. [Explanation of symbols]

[0264] S Laser Marking System L Laser marking device 1 marker head 2. Laser light generation unit 3 Laser beam scanning unit 4 Exit window 42 Cover glass (optical component) 10. Cabinet 10u top 10d bottom 16b Sloped part (wall part) 16c Inclined surface (mirror mounting part) 19 Camera mounting part 71 Reflective mirror 81 First heat sink 82 Second heat sink 9 Camera Unit 91 Camera attachment 91d Lighting mounting part 92 Imaging Device 93 Lighting 100 Marker Controller 100a Controller body 100b User terminal 110 Trigger monitoring unit (approach monitoring unit) 404 Image Sensor (Inspection Equipment) 500 Processing equipment (transport equipment) At conveying direction Al laser emission axis Ax Imaging optical axis H1 First storage section (storage section) H21 Crystal side storage section (first extension) H22 Light source side housing section (second extension section) H3 Optical path partition (internal space) double work We work element (printed area)

Claims

1. a laser light generating unit that generates a laser light; a laser beam scanning unit that reflects the laser beam generated by the laser beam generating unit to scan the laser beam on a surface of a workpiece; a housing that houses the laser light generating unit and the laser light scanning unit, The housing includes: a housing portion provided with an optical member that transmits the laser light reflected by the laser light scanning portion; a pair of extension portions extending from the housing portion along an emission direction of the laser light so as to sandwich an optical axis of the laser light transmitted through the optical member; a camera mounting portion to which an imaging device can be mounted so that an imaging optical axis passes through an internal space formed by the pair of extension portions; A laser marking device characterized by:

2. 2. The laser marking device according to claim 1, the housing has a bottom surface on which the optical member is provided and a top surface opposite the bottom surface, The housing is configured to be suspended via the top surface. A laser marking device characterized by:

3. 3. The laser marking device according to claim 1, At least one of the pair of extensions houses a heat sink thermally coupled to the laser light generating unit. A laser marking device characterized by:

4. 4. The laser marking device according to claim 1, The pair of extension portions are a first extension portion disposed on one side in a first direction with respect to an optical axis of the laser light; a second extending portion disposed on the other side in the first direction across the optical axis of the laser light and spaced apart from the first extending portion; The housing includes: a wall portion connecting the first and second extension portions and dividing the internal space; a mirror mounting portion provided on the wall portion and configured to be able to mount a reflecting mirror; The camera mounting section is configured to have the imaging device installed so that the imaging optical axis passes through an opening formed in a position facing the wall section and intersects with the mirror surface of the reflecting mirror. A laser marking device characterized by:

5. 5. The laser marking device according to claim 4, The reflecting mirror is attached to the mirror attachment portion, The mirror surface of the reflecting mirror is disposed so as to turn back the imaging optical axis toward the surface of the workpiece. A laser marking device characterized by:

6. 6. The laser marking device according to claim 1, a lighting mounting portion that is disposed in the internal space and is configured to be able to mount lighting; A laser marking device characterized by:

7. 7. The laser marking device according to claim 6, The lighting fixture is attached to the lighting fixture attachment portion, The illumination is arranged to be directed in a direction intersecting the imaging optical axis. A laser marking device characterized by:

8. 8. The laser marking device according to claim 1, the imaging device is mounted within the housing; The imaging device is configured as a wide-angle camera having a wide-angle lens. A laser marking device characterized by:

9. A laser marking device according to any one of claims 1 to 8; a conveying device that conveys the workpiece along a predetermined conveying direction, A plurality of printable areas are set on the surface of the workpiece at equal intervals along the transport direction, A laser marking system configured such that the laser marking device sequentially performs marking on each of the marking areas conveyed by the conveying device, an approach monitoring unit that detects approach between the housing and one print area; the transport device stops transporting upon receiving a detection signal from the approach monitoring unit; the laser marking device performs marking on the one print area while the conveying device is halting conveyance; The imaging device captures an image of the one printing area on which marking has been performed by the laser marking device while the conveyance device is stopped. A laser marking system characterized by:

10. 10. The laser marking system according to claim 9, an inspection device that inspects the marking content by the laser marking device based on the imaging result by the imaging device; The inspection device inspects the marking on the one print area after the imaging device has captured an image of the one print area and the conveyance device has resumed conveyance. A laser marking system characterized by:

11. A laser marking device according to any one of claims 1 to 8; a conveying device that conveys the workpiece along a predetermined conveying direction, A plurality of printable areas are set on the surface of the workpiece at equal intervals along the transport direction, A laser marking system configured such that the laser marking device sequentially performs marking on each of the marking areas conveyed by the conveying device, an approach monitoring unit that detects approach between the housing and one print area; the laser marking device performs marking on the one print area being transported by the transport device every time the laser marking device receives a detection signal from the proximity sensor; The imaging device captures an image of the one print area within a period from when the laser marking device executes marking on the one print area until when the approach monitoring unit outputs a detection signal for another print area that is transported following the one print area. A laser marking system characterized by:

12. 12. The laser marking system according to claim 11, The imaging device is configured by a line scan camera having an imaging field of view extending along the conveyance width direction perpendicular to the conveyance direction. A laser marking system characterized by:

13. 13. The laser marking system according to claim 11 or 12, an inspection device that inspects the marking content made by the laser marking device based on the imaging result of the imaging device; The inspection device inspects the marking on one of the printing areas within a period from when the laser marking device executes marking on one of the printing areas until when the approach monitoring unit outputs a detection signal on the other of the printing areas. A laser marking system characterized by:

Images