Gas pressure regulator

Abstract

To provide a gas pressure regulating device capable of properly operating as a safety device when gas pressure abnormality occurs, and properly returning to a state before operation after once operating as the safety device.SOLUTION: In the gas pressure regulating device 10, when the pressure in the pressure regulating chamber 31a is the first value and the movable body 40 is located at the first position P1 in the predetermined direction, the path S in the movable body 40, which communicates between the pressure regulating chamber 31a and the gas discharge chamber 31b, is closed. 31a, when the movable body 40 is located at a second position P1 farther from the base portion 20 than the first position P2 in the predetermined direction, the path S is opened, the pressure in the pressure adjusting chamber 31a returns from the second value to the first value, and when the movable body 40 is located at the first position P1 in the predetermined direction, the path is closed again.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a gas pressure regulator, and more particularly to a gas pressure regulator having a function as a safety device that releases gas to the outside when the gas pressure reaches an abnormal value, thereby returning the gas pressure to a normal value. [Background technology]

[0002] Techniques for adjusting gas pressure have already been developed, and the pressure reducing valve described in Patent Document 1 is one example. The pressure reducing valve described in Patent Document 1 includes a cylinder with a high-pressure gas supply port and a low-pressure gas discharge port, and when attached to a high-pressure cylinder, high-pressure gas is supplied into the cylinder from the high-pressure gas supply port and released as low-pressure gas from the low-pressure gas discharge port. Inside the cylinder are a piston biased downward by a spring, and a valve pin that protrudes downward from the underside of the piston with its lower end located inside the high-pressure gas supply port.

[0003] When high-pressure gas is supplied into the cylinder through the high-pressure gas supply port, the gas pressure causes the piston to move upward against the spring. At this time, the valve pin protruding downward from the piston also moves upward along with the piston. When the gas pressure inside the cylinder reaches a predetermined level, the lower end of the valve pin comes into contact with the packing placed inside the high-pressure gas supply port, closing the high-pressure gas supply port and stopping the supply of high-pressure gas from the high-pressure gas supply port into the cylinder. This causes low-pressure gas adjusted to the predetermined gas pressure to be released from the low-pressure gas release port.

[0004] On the other hand, if an abnormality occurs in the valve pin or packing, the high-pressure gas supply port will not be properly closed by the valve pin or packing, and high-pressure gas will continue to be supplied from the high-pressure gas supply port to the cylinder. This will result in gas at a pressure higher than the specified pressure being released from the low-pressure gas release port. To prevent this, the cylinder has a high-pressure gas outlet located at a position where gas inside the cylinder can be released to the outside when the piston rises above a specified height. As a result, when the gas pressure inside the cylinder increases and the piston rises above the specified height, the gas inside the cylinder is released to the outside through the high-pressure gas outlet, allowing the gas pressure inside the cylinder to return to a normal value. Thus, the pressure reducing valve described in Patent Document 1 functions as a safety device that releases gas to the outside and returns the gas pressure to a normal value in the event of a gas pressure abnormality. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Utility Model Application Publication No. 55-22860 Summary of the Invention [Problem to be solved by the invention]

[0006] In Patent Document 1, the valve pin is restricted from rising by a packing and cannot move above the position where the packing is located. Therefore, in order for the piston to rise above a predetermined height, the piston and the valve pin must be separated from each other. However, because the piston and the valve pin are integrally connected, separating the piston and the valve pin requires destroying the connection between the piston and the valve pin. However, once the piston and the valve pin are separated, they cannot be restored to the same state as before separation, and the pressure reducing valve cannot be used appropriately thereafter.

[0007] Therefore, the present invention has been made in consideration of the above-mentioned problems, and its object is to provide a gas pressure regulating device that operates appropriately as a safety device when an abnormality in gas pressure occurs, and that, once it has operated as a safety device, can properly return to its state before operation. [Means for solving the problem]

[0008] The above object is achieved by providing a gas pressure regulating device according to the present invention, which regulates the pressure of gas supplied from a gas supply device, and which comprises: a base part attached to the gas supply device, which has an inlet through which gas supplied from the gas supply device flows in and an outlet through which the gas flowed in from the inlet flows out; a cover attached to the base part, which has an inner-cover space adjacent to the outlet in a predetermined direction, a wall surrounding the inner-cover space, and a first opening provided in the wall for connecting the inner-cover space to the outside; and a movable body disposed in the inner-cover space, which moves in a predetermined direction in response to pressure fluctuations in the inner-cover space generated by gas being supplied from the outlet to the inner-cover space, and The internal space is divided into a pressure adjustment chamber which is located closer to the base than the movable body in the predetermined direction and which communicates with the outlet, and a gas discharge chamber which is located on the opposite side of the pressure adjustment chamber across the movable body in the predetermined direction and which communicates with the first opening; when the pressure in the pressure adjustment chamber reaches a first value and the movable body is located at a first position in the predetermined direction, the passage within the movable body which communicates between the pressure adjustment chamber and the gas discharge chamber is blocked; when the pressure in the pressure adjustment chamber reaches a second value which exceeds the first value and the movable body is located at a second position which is farther from the base than the first position in the predetermined direction, the passage is opened; and when the pressure in the pressure adjustment chamber returns from the second value to the first value, and the movable body is located at the first position in the predetermined direction, the passage is blocked again.

[0009] Furthermore, the movable body may be composed of a first movable part and a second movable part, and when the movable body is located at a first position in a predetermined direction, the passage located between the first movable part and the second movable part may be blocked, and when the movable body is located at a second position in the predetermined direction, the second movable part may move away from the base part in the predetermined direction relative to the first movable part, and the passage located between the first movable part and the second movable part may be opened. In addition, the cover has a protrusion that protrudes into the space within the cover toward the base portion from the end of the wall opposite the base portion in a predetermined direction, and the first moving portion is located closer to the base portion than the protrusion in the predetermined direction, and when the moving body is located at a first position in the predetermined direction, the tip of the protrusion and the first moving portion are separated from each other, and when the moving body is located at a second position in the predetermined direction, the tip of the protrusion and the first moving portion may contact each other. In addition, a second opening that connects the space inside the cover to the outside is provided in the wall of the cover closer to the base portion in a predetermined direction than the first opening, and when the movable body is located at a first position in the predetermined direction, the second opening communicates with the gas discharge chamber, and the pressure in the pressure adjustment chamber becomes a third value between the first value and the second value, and when the movable body is located at a third position between the first position and the second position in the predetermined direction, the second opening may communicate with the pressure adjustment chamber. The movable body may further include a sealing member that seals a gap between the movable body and the cover in a direction intersecting the predetermined direction, and the sealing member may move closer to the base portion than the first opening in the predetermined direction. The movable body may include two or more sealing members as the sealing member, and the two or more sealing members may be arranged at intervals in a predetermined direction. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a gas pressure regulating device that operates appropriately as a safety device in the event of a gas pressure abnormality, and that, once it has operated as a safety device, can properly return to its state before operation. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic cross-sectional view showing a state in which a gas pressure regulator according to an embodiment of the present invention is attached to a gas supply device. [Figure 2] 1 is a schematic cross-sectional view (part 1) of a gas pressure regulator according to one embodiment of the present invention. [Figure 3] FIG. 2 is a schematic cross-sectional view (part 2) of a gas pressure regulator according to an embodiment of the present invention. [Figure 4] FIG. 4 is a schematic cross-sectional view of a gas pressure regulator according to a comparative example of the present invention. [Figure 5] 1 is a schematic cross-sectional view (part 1) of a gas pressure regulator according to a first modified example of the present invention. [Figure 6] 10 is a schematic cross-sectional view (part 2) of a gas pressure regulator according to Modification 1 of the present invention. FIG. [Figure 7] 10 is a schematic cross-sectional view (part 1) of a gas pressure regulator according to a second modified example of the present invention. FIG. [Figure 8] 10 is a schematic cross-sectional view (part 2) of a gas pressure regulator according to Modification 2 of the present invention. FIG. [Figure 9] 10 is a schematic cross-sectional view (part 3) of a gas pressure regulator according to Modification 2 of the present invention. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] One embodiment of the present invention (hereinafter referred to as the present embodiment) will be described in detail below with reference to a preferred embodiment shown in the accompanying drawings. Note that the following embodiment is merely an example given to facilitate understanding of the present invention and is not intended to limit the present invention. In other words, the configuration of the present invention may be modified or improved from the following embodiment without departing from the spirit of the present invention. In addition, the drawings show each component somewhat simplified and schematic to make the explanation easier to understand, and the size (dimensions) of each component and the spacing between components shown in the drawings may differ from the actual ones. Furthermore, unless otherwise specified, the material and shape of each member used to implement the present invention can be set arbitrarily depending on the application of the present invention and the state of the art at the time of implementing the present invention. Furthermore, "orthogonal" and "perpendicular" include the range of error generally accepted in the technical field of the present invention, and also include states where they deviate from the strict "orthogonal" and "perpendicular" within a range of several degrees (for example, 5° to 10°).

[0013] <<Configuration of the Gas Pressure Regulating Device According to the Present Embodiment>> A gas pressure regulator according to this embodiment (hereinafter referred to as "gas pressure regulator 10") will be described with reference to FIGS. As shown in FIG. 1, the gas pressure adjustment device 10 is a device that adjusts the pressure of gas supplied from a gas supply device M. More specifically, it is a device that adjusts the primary pressure gas supplied from a supply port of the gas supply device M to a secondary pressure and supplies the gas to a target device N. An example of the gas pressure adjustment device 10 is a pressure reducing valve that reduces the pressure from the primary pressure to the secondary pressure, and the gas pressure adjustment device 10 is not particularly limited in its application and field of use. An example of the gas supply device M is a gas cylinder (such as a cartridge-type gas cylinder), and an example of the target device N is any device that uses gas at a secondary pressure. The "gas" is not particularly limited and includes any gas whose pressure can be adjusted. The range of the "secondary pressure" is not particularly limited, and may be, for example, 0.1 MPa to 0.3 MPa.

[0014] In the following description, it is assumed that the gas supply device M is a cartridge-type gas cylinder, and that the end (hereinafter referred to as "upper end M1") of the gas supply device M including the gas outlet (opening for discharging gas to the outside) faces upward. The normal use state of the gas pressure regulator 10 is defined as the state in which it is attached to the upper end M1 of the gas supply device M, and unless otherwise specified, when describing the position of the gas pressure regulator 10 and the orientation and extension direction of each part of the gas pressure regulator 10, the position, orientation, and extension direction of the gas pressure regulator 10 when in the normal use state will be indicated. In the following description, unless otherwise specified, the "vertical direction" corresponds to the "predetermined direction," which corresponds to the direction in which the outlet 22c described later and the space inside the cover 31 described later are adjacent, as shown in Figure 1, and the direction in which the moving body 40 described later moves.

[0015] As shown in FIG. 1, the gas pressure regulator 10 includes a base portion 20, a cover 30, a moving body 40, and a biasing member 50.

[0016] <Base part> As shown in FIG. 1, the base portion 20 is attached to the upper end portion M1 of the gas supply device M, and specifically has a base main body portion 21, a first flow path 22, a valve 23, a seal portion 24, and a second flow path 25. The base main body 21 is made up of, for example, a plurality of components (not shown). A recessed portion 21a is provided at the end (lower end) of the base main body 21 on the gas supply device M side in the vertical direction, recessed toward the center of the base main body 21 in the vertical direction. The lower side of the recessed portion 21a is open, and the upper end portion M1 of the gas supply device M enters the space surrounded by the recessed portion 21a from the lower side of the recessed portion 21a, whereby the base main body 21 (base portion 20) is attached to the upper end portion M1. Furthermore, a recessed portion 21b that is recessed toward the center of the base main body 21 in the vertical direction is provided at the end (upper end) of the base main body 21 opposite the gas supply device M. As shown in Fig. 1, the recessed portion 21b is composed of an upper surface 22d (a flat surface perpendicular to the vertical direction) and an annular side portion that rises upward from the edge of the upper surface 22d, and the space surrounded by the recessed portion 21b forms part of an inner cover space 31 (more specifically, a pressure adjustment chamber 31a) that will be described later.

[0017] 1, first flow path 22 is a gas flow path that connects gas supply device M with pressure adjustment chamber 31a (described later), extends in the vertical direction, and penetrates base main body 21 in the vertical direction. Note that a lower portion of first flow path 22 is configured as nozzle portion 22a having a gas flow path therein. Therefore, an opening at the tip of nozzle portion 22a corresponds to inlet 22b through which gas supplied from gas supply device M flows in. Furthermore, an opening provided on upper surface 22d in recessed portion 21b corresponds to outlet 22c through which gas flowing in from inlet 22b flows out. However, the tip of nozzle portion 22a protrudes into the space surrounded by recessed portion 21a. Therefore, when base portion 20 is attached to upper end portion M1 of gas supply device M, the tip of nozzle portion 22a breaks the sealing plate covering the gas outlet of gas supply device M. As a result, gas in gas supply device M passes through first flow path 22 and is supplied to pressure adjustment chamber 31a, which will be described later.

[0018] The valve 23 is, for example, a needle valve, and is disposed in the first flow path 22 on the outlet 22c side of the first flow path 22, as shown in FIG. 1 , and moves back and forth within the first flow path 22 along the flow path direction (corresponding to the up-and-down direction in this embodiment). The valve 23 is composed of a valve body and a tip pin that protrudes from the valve body to a pressure adjustment chamber 31a, which will be described later. A gap is provided between the first flow path 22 and the valve 23, and gas flows through the gap within the first flow path 22. The tip pin of the valve 23 is in contact with the lower end of a moving body 40 (more specifically, a first moving portion 60), which will be described later, and the valve 23 moves back and forth within the first flow path 22 in the up-and-down direction in response to the up-and-down movement of the moving body 40.

[0019] 1, the seal portion 24 prevents the valve 23 from rising above a predetermined position in the first flow path 22. More specifically, the seal portion 24 prevents the valve 23 from rising by coming into close contact with the valve body of the valve 23. The close contact between the seal portion 24 and the valve body of the valve 23 blocks the flow of gas in the first flow path 22. 1, the second flow path 25 is a gas flow path that communicates between the pressure adjustment chamber 31a and the target device N. An intake port 25a of the second flow path 25 (a gas inlet in the second flow path 25) is provided on an upper surface 22d in the recessed portion 21b, that is, on the same surface as the surface on which the outlet 22c of the first flow path 22 is provided. An exhaust port 25b of the second flow path 25 (a gas outlet in the second flow path 25) is provided at one end (a right side in FIG. 1) of the base main body portion 21 in a direction perpendicular to the up-down direction. 1, sealing member 26 seals the gap between base portion 20 and cover 30 (described later) in a direction perpendicular to the up-down direction. Sealing member 26 is, for example, an annular sealing member (such as a packing or an O-ring), and surrounds the outside of the annular side portion of recessed portion 21b to seal the gap between recessed portion 21b and top portion 32a of cover 30 (described later).

[0020] <Cover> 1, the cover 30 is attached to the base portion 20 and has a cylindrical shape with a closed upper end and an open lower end. More specifically, the cover 30 has an inner space 31, a wall 32, a plurality of first openings 33 (two in FIG. 1), and a protrusion 34.

[0021] The cover interior space 31 is adjacent to the outlet 22c in the vertical direction and is adjacent to the outlet 22c from above. The cover interior space 31 is divided into a pressure adjustment chamber 31a and a gas discharge chamber 31b. The pressure adjustment chamber 31a is located closer to the base part 20 than the movable body 40 (described later) in the vertical direction and communicates with the outlet 22c. The gas discharge chamber 31b is located on the opposite side of the movable body 40 from the pressure adjustment chamber 31a in the vertical direction and communicates with a first opening 33 (described later).

[0022] The wall 32 surrounds the cover internal space 31, and specifically has a top portion 32a, a first cylindrical portion 32b, and a second cylindrical portion 32c. The top portion 32a is a flat plate extending in a direction perpendicular to the up-down direction. The first cylindrical portion 32b is cylindrical, surrounds the outer edge of the top portion 32a, and extends downward from the outer edge of the top portion 32a. For example, when viewed from the top-bottom direction, the centers of the top portion 32a and the first cylindrical portion 32b are aligned with each other. The second cylindrical portion 32c is cylindrical and larger than the first cylindrical portion 32b, and extends downward from the lower end of the first cylindrical portion 32b continuously from the first cylindrical portion 32b. For example, when viewed from the top-bottom direction, the centers of the first cylindrical portion 32b and the second cylindrical portion 32c are aligned. As shown in Fig. 1, the second cylindrical portion 32c surrounds the outside of the recessed portion 21b of the base main body 21 with a small gap therebetween, and may be fixed to the recessed portion 21b with, for example, a fastening member (not shown).

[0023] The first opening 33 is provided in the wall 32 and is a through-hole that connects the cover internal space 31 to the outside. The first opening 33 is provided above the vertical center position of the first cylindrical portion 32b and, as described above, connects to the gas discharge chamber 31b of the cover internal space 31. In this embodiment, the cover 30 has two first openings 33, but the number of first openings 33 is not particularly limited. For example, the cover 30 may have one or more first openings 33. The shape of the first opening 33 is also not particularly limited. The first opening 33 may be a circle, an ellipse, a rectangle, a quadrangle other than a rectangle, a polygon other than a quadrangle, or an irregular shape. For example, the first opening 33 may be an elongated hole extending in the circumferential direction of the wall 32 (more specifically, the first cylindrical portion 32b).

[0024] The protrusion 34 corresponds to a restricting portion that restricts the upward movement of the first moving portion 60 beyond a predetermined position. The protrusion 34 protrudes from an end portion (more specifically, the top portion 32a) of the cover 30 opposite the base portion 20 in the up-down direction toward the base portion 20 into the cover internal space 31 (more specifically, into the gas discharge chamber 31b). The tip portion 34a of the protrusion 34 is provided with a recessed portion 34b that is recessed toward the base end side (the top portion 32a side) of the protrusion 34, and the recessed portion 34b is provided, for example, in the center of the tip portion 34a when viewed from the up-down direction.

[0025] The shapes of the top 32a, the first tubular portion 32b, the second tubular portion 32c, and the protrusion 34 when viewed from the top and bottom are not particularly limited, and may be, for example, a circle, an ellipse, a rectangle, a quadrangle other than a rectangle, a polygon other than a quadrangle, or an irregular shape. The top portion 32a, the first cylindrical portion 32b, the second cylindrical portion 32c, and the protruding portion 34 may be formed integrally (seamlessly), or may be joined by welding, adhesive, or fastening using screws, etc. The top portion 32a, the first cylindrical portion 32b, the second cylindrical portion 32c, and the protruding portion 34 may be made of, for example, a metal material, a resin material, or the like.

[0026] <Mobile object> 2, the movable body 40 is disposed in the cover interior space 31, and moves up and down in response to pressure fluctuations within the cover interior space 31 (more specifically, pressure fluctuations within the pressure adjustment chamber 31a) that occur when gas is supplied from the outlet 22c to the cover interior space 31. More specifically, the movable body 40 moves up and down due to the balance between a force acting from below due to the pressure within the pressure adjustment chamber 31a and a biasing force acting from above by a biasing member 50, which will be described later. If the cover 30 is considered to be a cylinder, the movable body 40 corresponds to a piston that moves within the cylinder. As described above, the movable body 40 divides the cover interior space 31 into the pressure adjustment chamber 31a and the gas discharge chamber 31b.

[0027] More specifically, the moving body 40 has a first moving section 60 and a second moving section 70. The first moving part 60 is, for example, a shaft extending in the vertical direction. The second moving part 70 is, for example, a cylindrical part surrounding the outer periphery of the first moving part 60 with a small gap (including a passage S, described later) from the first moving part 60, and is biased downward by a biasing member 50, described later. The first moving part 60 and the second moving part 70 are each capable of moving independently in the vertical direction, but the first moving part 60 is restricted from moving upward beyond a predetermined position by a protrusion 34. In addition, a sealing member 65, described later, is located between the first moving part 60 and the second moving part 70, and the passage S, located between the first moving part 60 and the second moving part 70, can be blocked (sealed) by the sealing member 65.

[0028] More specifically, the first moving part 60 and the second moving part 70 move closer to or farther away from each other in the vertical direction in response to pressure fluctuations within the pressure adjustment chamber 31a. When the pressure within the pressure adjustment chamber 31a reaches a first value (a normal value corresponding to the desired secondary pressure) and the moving body 40 is located at a first position P1 in the vertical direction as shown in Fig. 2, the first moving part 60 and the second moving part 70 are close to each other (integrated) in the vertical direction, and the sealing member 65 is pressed by both the first moving part 60 and the second moving part 70 within a predetermined pressure range, thereby blocking the passage S. On the other hand, when the pressure in the pressure adjustment chamber 31a reaches a second value (abnormal value) that exceeds the first value, and the moving body 40 is located at a second position P2 that is farther from the base part 20 in the vertical direction than the first position P1, as shown in Fig. 3, the upward movement of the first moving part 60 is restricted by the protrusion 34, and the second moving part 70 moves away from the base part 20 in the vertical direction relative to the first moving part 60. As a result, the second moving part 70 moves away from the sealing member 65, the pressure on the sealing member 65 by the first moving part 60 and the second moving part 70 is released, and the passage S is opened. The first moving section 60 and the second moving section 70 will be described in more detail below.

[0029] [First moving part] As shown in Figure 2, the first moving portion 60 is located closer to the base portion 20 than the protruding portion 34 in the vertical direction, and specifically has an extension portion 61, a first flange portion 62, a protruding portion 63, a second flange portion 64, and a sealing member 65. The extension portion 61 is a shaft that extends in the vertical direction, and when viewed from the vertical direction, for example, the center of the extension portion 61 coincides with the center of the cover 30 (more specifically, the center of the top portion 32a). The first flange portion 62 is located at the end (upper end) of the extending portion 61 opposite the base portion 20 in the vertical direction, and protrudes outward beyond the extending portion 61 in a direction perpendicular to the vertical direction, forming a flat plate. The first flange portion 62 faces the tip portion 34a of the protruding portion 34 in the vertical direction. Therefore, when the first moving portion 60 moves upward, the first flange portion 62 comes into contact with the tip portion 34a. The protrusion 63 protrudes upward from the first flange 62, is located at the center of the protrusion 63 when viewed from the vertical direction, and faces the recess 34b of the protrusion 34 in the vertical direction. Therefore, when the first moving part 60 moves upward, the protrusion 63 enters the recess 34b. This makes it possible to suppress misalignment of the first moving part 60 relative to the protrusion 34 in a direction perpendicular to the vertical direction. As a result, the first flange 62 and the tip 34a of the protrusion 34 can be brought into appropriate contact. The second flange portion 64 is located at the end (lower end) of the extending portion 61 on the base portion 20 side in the vertical direction, and protrudes outward beyond the extending portion 61 in a direction perpendicular to the vertical direction, forming a flat plate. The lower end of the second flange portion 64 comes into contact with the tip pin of the valve 23.

[0030] The shapes of the extension portion 61, the first flange portion 62, the protrusion portion 63, and the second flange portion 64 when viewed from above and below are not particularly limited, and may be, for example, a circle, an ellipse, a rectangle, a quadrangle other than a rectangle, a polygon other than a quadrangle, or an irregular shape. The extension portion 61, the first flange portion 62, the protrusion portion 63, and the second flange portion 64 may be formed integrally (seamlessly), or may be joined by welding, adhesive, or fastening using screws or the like. The material of the extension portion 61, the first flange portion 62, the protrusion portion 63, and the second flange portion 64 may be, for example, a metal material, a resin material, or the like.

[0031] The sealing member 65 is located between the first moving portion 60 and the second moving portion 70 and blocks the passage S. Specifically, the sealing member 65 is disposed on the second flange portion 64 and surrounds the outside of the lower end portion of the extension portion 61. The sealing member 65 is located between the second flange portion 64 and an inner cylindrical portion 71 (described later) in the vertical direction. The sealing member 65 may be any annular member having sealing properties, and may be, for example, a packing (flat packing or the like) or an O-ring. The sealing member 65 also defines the boundary between the pressure adjustment chamber 31a and the gas discharge chamber 31b; the space on one side of the sealing member 65 becomes the pressure adjustment chamber 31a, and the space on the other side becomes the gas discharge chamber 31b.

[0032] [Second moving section] As shown in FIG. 2, the second moving portion 70 has an inner cylindrical portion 71, an outer cylindrical portion 72, a connecting portion 73, a first groove portion 74, a second groove portion 75, a protruding portion 76, and a sealing member 77. The inner cylinder portion 71 is cylindrical and surrounds the outside of the extending portion 61 with a small gap therebetween, and is shorter in length in the vertical direction than the extending portion 61, so that it is movable in the vertical direction along the extending portion 61. The inner cylinder portion 71 is located above the second flange portion 64 with the sealing member 65 sandwiched therebetween in the vertical direction. As described above, there is a small gap between the extension portion 61 and the inner cylindrical portion 71, and this gap corresponds to the passage S inside the movable body 40 that connects the pressure adjustment chamber 31a and the gas discharge chamber 31b, as shown in Fig. 2. The passage S is blocked when the second flange portion 64 and the inner cylindrical portion 71 approach each other in the vertical direction and the second flange portion 64 and the inner cylindrical portion 71 press the sealing member 65 in the vertical direction within a predetermined pressure range. On the other hand, the passage S is opened when the inner cylindrical portion 71 moves upward relative to the second flange portion 64 and moves away from the sealing member 65 (or when the pressure applied to the sealing member 65 by the second flange portion 64 and the inner cylindrical portion 71 falls below the lower limit of the predetermined pressure range). The outer cylinder portion 72 has a cylindrical shape that is larger than the inner cylinder portion 71, surrounds the outside of the inner cylinder portion 71 at a distance from the inner cylinder portion 71, and extends above the inner cylinder portion 71. For example, when viewed from the top-bottom direction, the center of the outer cylinder portion 72 coincides with the center of the inner cylinder portion 71. The outer peripheral surface of the outer cylinder portion 72 faces (faces) the inner peripheral surface of the first cylinder portion 32b with a small gap between them.

[0033] The connecting portion 73 connects the lower ends of the inner and outer cylindrical portions 71 and 72 in the vertical direction, extends over the entire circumferential range of the inner cylindrical portion 71, and forms a ring-shaped plate when viewed from the vertical direction. The upper surface of the connecting portion 73 is the surface that is pressed by the biasing member 50, which will be described later. The first groove 74 is a portion surrounded by the inner cylindrical portion 71, the outer cylindrical portion 72, and the connecting portion 73, and is open at the upper end and closed at the lower end, extending over the entire circumferential range of the inner cylindrical portion 71 and forming a ring shape when viewed from the top and bottom. The lower end of the biasing member 50, which will be described later, fits into the first groove 74. The second groove 75 is provided on the outer peripheral surface of the outer tubular portion 72, and when viewed from the top-bottom direction, is recessed toward the center of the outer tubular portion 72. The second groove 75 extends over the entire circumferential range of the outer tubular portion 72, and when viewed from the top-bottom direction, has an annular shape, into which a sealing member 77 (described later) is inserted. The protruding portion 76 is a portion that protrudes from the lower end of the outer tubular portion 72, and extends along the outer edge (outermost edge) of the outer tubular portion 72 when viewed from the top-bottom direction, forming a ring shape.

[0034] The shapes of the inner cylinder portion 71, the outer cylinder portion 72, the connecting portion 73, and the protruding portion 76 when viewed from above and below may be, for example, circular, elliptical, rectangular, a quadrangle other than a rectangle, a polygon other than a quadrangle, or an irregular shape. The inner cylinder portion 71, the outer cylinder portion 72, the connecting portion 73, the first groove portion 74, the second groove portion 75, and the protruding portion 76 may be formed integrally (seamlessly), or may be joined by welding, adhesive, or fastening using screws or the like. The materials of the inner cylinder portion 71, the outer cylinder portion 72, the connecting portion 73, the first groove portion 74, the second groove portion 75, and the protruding portion 76 may be, for example, metal materials, resin materials, or the like.

[0035] As shown in FIG. 2, the sealing member 77 is an annular sealing member that seals the gap between the cover 30 (more specifically, the first cylindrical portion 32b) and the movable body 40 (more specifically, the outer cylindrical portion 72) in a direction perpendicular to (intersecting) the up-down direction. The sealing member 77 may be any member having sealing properties, such as a packing (flat packing, etc.) or an O-ring. In the present embodiment, the second movable portion 70 is assumed to include one sealing member 77, but may include two or more sealing members 77, as in modified examples described later (see FIGS. 5 and 6). The sealing member 77 is located within the second groove portion 75 and extends over the entire circumferential range of the outer cylindrical portion 72. Here, when the movable body 40 moves in the up-down direction, the sealing member 77 moves closer to the base portion 20 than the first opening 33 in the up-down direction. As a result, the sealing member 77 is not positioned above the first opening 33 or does not cross over the first opening 33, which makes it possible to prevent foreign matter, etc., that has entered from the outside through the first opening 33 from adhering to the sealing member 77. As a result, it is possible to prevent a decrease in the sealing performance of the sealing member 77. Furthermore, rubbing of the sealing member 77 against the edge of the first opening 33 may shorten the life of the sealing member 77 over the long term. In this regard, with the gas pressure regulating device 10, the sealing member 77 is not positioned above the first opening 33 or does not cross over the first opening 33, which makes it possible to prevent a decrease in the life of the sealing member 77. Furthermore, like the sealing member 65, the sealing member 77 is a member that defines the boundary position between the pressure adjustment chamber 31a and the gas discharge chamber 31b, and the space on one side of the sealing member 77 becomes the pressure adjustment chamber 31a, and the space on the other side becomes the gas discharge chamber 31b.

[0036] <Using member> The biasing member 50 biases the movable body 40 (more specifically, the second movable portion 70) from the opposite side of the base portion 20 in the vertical direction, and the spring pressure is pre-adjusted according to the desired secondary pressure. The biasing member 50 is, for example, a compression spring and has a cylindrical shape. The biasing member 50 is located between the cover 30 and the second movable portion 70 in the vertical direction, with its upper end contacting the cover 30 and its lower end contacting the second movable portion 70. More specifically, the upper end of the biasing member 50 surrounds the outside of the protrusion 34 and contacts the lower surface of the apex 32a. Meanwhile, the lower end of the biasing member 50 surrounds the outside of the inner cylindrical portion 71 and is inserted between the inner cylindrical portion 71 and the outer cylindrical portion 72, i.e., into the first groove portion 74, and contacts the upper surface of the connecting portion 73. When the second moving portion 70 is pressed downward by the biasing member 50, the first moving portion 60 is pressed downward via the sealing member 65. More specifically, the first moving portion 60 is pressed downward by the biasing force of the biasing member 50 transmitted from the inner cylinder portion 71 to the second flange portion 64 via the sealing member 65.

[0037] <<Operations and Effects of the Gas Pressure Regulating Device According to the Present Embodiment>> As shown in FIG. 1, gas is supplied from the gas supply device M to the pressure adjustment chamber 31a through the first flow path 22, gradually increasing the pressure in the pressure adjustment chamber 31a. This causes the second moving part 70 to gradually move upward against the biasing member 50, and the first moving part 60, whose upward movement was previously restricted by the second moving part 70, also moves upward together with the second moving part 70. Accordingly, the valve 23, which is in contact with the lower end of the first moving part 60 (second flange part 64), also moves upward within the first flow path 22. When the pressure in the pressure adjustment chamber 31a reaches a first value (a normal value corresponding to the desired secondary pressure) and the moving body 40 moves up and down to a first position P1 as shown in FIG. 2, the seal part 24 (see FIG. 1) comes into close contact with the valve body of the valve 23, restricting the upward movement of the valve 23. The seal part 24 comes into close contact with the valve body of the valve 23, blocking the flow of gas within the first flow path 22. As a result, the increase in pressure in the pressure adjustment chamber 31a stops at the first value, and the upward movement of the moving body 40 (the first moving part 60 and the second moving part 70) also stops. As a result, gas adjusted to the first value is supplied to the target device N side. Thereafter, when the pressure in the pressure adjustment chamber 31a falls below the first value, the second moving part 70 yields to the biasing force of the biasing member 50 and moves downward. Then, pushed by the second moving part 70 moving downward, the first moving part 60 also moves downward together with the second moving part 70, and pushed by the first moving part 60 moving downward, the valve 23 also moves downward within the first flow path 22. This separates the valve body of the valve 23 from the seal part 24, once again allowing gas to flow within the first flow path 22. By repeating this process, the pressure in the pressure adjustment chamber 31a is maintained at the first value.

[0038] However, when the pressure in pressure adjustment chamber 31a reaches a first value and movable body 40 is located at first position P1 in the vertical direction as shown in Fig. 2, passage S within movable body 40, which connects pressure adjustment chamber 31a and gas discharge chamber 31b, is blocked. More specifically, passage S is blocked by sealing member 65, which is sandwiched in the vertical direction between second flange portion 64 and inner cylindrical portion 71. As a result, pressure adjustment chamber 31a becomes an enclosed space, allowing the pressure in pressure adjustment chamber 31a to be smoothly raised to the first value.

[0039] On the other hand, if, for some reason, there is a malfunction in, for example, valve 23 or seal portion 24, gas may continue to flow into pressure adjustment chamber 31a, causing the pressure in pressure adjustment chamber 31a to reach a second value (abnormal value) exceeding the first value. In such a case, gas at an unexpected secondary pressure (gas with a pressure higher than expected) may be supplied to target device N (see FIG. 1), which is undesirable. Alternatively, gas may flow back from the target device N side for some reason, causing the pressure in pressure adjustment chamber 31a to reach the second value, which is also undesirable.

[0040] In this regard, the operation and effect of the gas pressure regulating device 10 according to this embodiment will be explained while comparing it with a gas pressure regulating device 100 according to a comparative example of the present invention shown in Fig. 4. For convenience, components of the gas pressure regulating device 100 that have the same functions as those of the present embodiment will be given the same reference numerals, and the explanation will focus on differences from this embodiment, omitting explanation of points in common with this embodiment. As shown in FIG. 4, the gas pressure regulator 100 according to the comparative example has a moving body 140 instead of the moving body 40 according to the present embodiment. The moving body 140 divides the cover interior space 31 into a pressure adjustment chamber 31a and a gas discharge chamber 31b. The moving body 140 has a moving portion 141 and a sealing plate 142. The moving portion 141 has an opening 141a that connects the pressure adjustment chamber 31a and the gas discharge chamber 31b. The sealing plate 142 seals the opening 141a and is formed of, for example, a metal (aluminum, etc.) foil. Sealing the opening 141a with the sealing plate 142 makes the pressure adjustment chamber 31a an airtight space. The moving portion 141 is biased downward by a biasing member 50 and moves up and down in response to pressure fluctuations within the cover interior space 31 (more specifically, within the pressure adjustment chamber 31a). A tip pin of the valve 23 contacts the moving portion 141 from below.

[0041] If, for some reason, a malfunction occurs in, for example, valve 23 or seal portion 24, gas continues to flow into pressure adjustment chamber 31a, the pressure in pressure adjustment chamber 31a reaches a second value, and the pressure difference between pressure adjustment chamber 31a and gas discharge chamber 31b breaks seal plate 142, causing pressure adjustment chamber 31a and gas discharge chamber 31b to communicate with each other via opening 141a. Gas flowing from pressure adjustment chamber 31a to gas discharge chamber 31b is then discharged to the outside through first opening 33. This prevents unexpected secondary pressure gas (gas with a higher-than-expected pressure) from being supplied to target device N (see FIG. 1). Thus, gas pressure regulating device 100 functions as a safety device that releases gas to the outside and returns the gas pressure to a normal value when a gas pressure abnormality occurs.

[0042] However, once the sealing plate 142 is broken, it becomes impossible to use the gas pressure regulator 100. In other words, once a gas pressure abnormality occurs, the gas pressure regulator 100 cannot be used appropriately thereafter, which is undesirable. In contrast, in the gas pressure regulator 10 according to this embodiment, when the pressure in the pressure adjustment chamber 31a reaches a second value exceeding the first value and the movable body 40 is positioned at a second position P2 that is farther from the base portion 20 in the vertical direction than the first position P1, as shown in FIG. 3 , the passage S is opened. More specifically, when the movable body 40 is positioned at the second position P2 in the vertical direction, the first movable portion 60 moves upward, causing the first flange portion 62 of the first movable portion 60 to come into contact with the tip end 34a of the protrusion 34, restricting the upward movement of the first movable portion 60. On the other hand, the upward movement of the second movable portion 70 is not restricted, and the second movable portion 70 moves away from the base portion 20 in the vertical direction relative to the first movable portion 60. This releases the seal provided by the sealing member 65 sandwiched between the second flange portion 64 and the inner cylindrical portion 71 in the vertical direction, opening the passage S between the first movable portion 60 and the second movable portion 70. As a result, pressure adjustment chamber 31a and gas discharge chamber 31b communicate with each other via passage S, and gas that has flowed from pressure adjustment chamber 31a to gas discharge chamber 31b is discharged to the outside through first opening 33. In this way, gas pressure adjustment device 10 functions as a safety device that releases gas to the outside and returns the gas pressure to a normal value in the event of an abnormality in the gas pressure, and can prevent gas of an unexpected secondary pressure from being supplied to target device N.

[0043] Furthermore, in the gas pressure regulator 10, when the pressure in the pressure adjustment chamber 31a returns from the second value to the first value and the movable body 40 is located at the first position P1 in the vertical direction, the passage S is blocked again. More specifically, as the second movable part 70 approaches the base part 20 in the vertical direction relative to the first movable part 60, the sealing member 65 is again pressed by the second flange part 64 and the inner cylindrical part 71 in the vertical direction within a predetermined pressure range. As a result, the passage S located between the first movable part 60 and the second movable part 70 is blocked again by the sealing member 65. In this way, the gas pressure regulator 10 can repeatedly open and close the passage S in accordance with the movement of the movable body 40 in the vertical direction. In particular, the gas pressure regulator 10 opens and closes the passage S using the sealing member 65, which can be reused repeatedly. Therefore, there is no need to intentionally damage a member, such as the sealing plate 142 of the gas pressure regulator 100, and even if a gas pressure abnormality occurs once, the gas pressure regulator 10 can be appropriately used thereafter. Similarly, there is no need to destroy the connection between the piston and the valve pin, as in the pressure reducing valve described in Patent Document 1, and therefore the gas pressure regulator 10 can be appropriately used thereafter, even if a gas pressure abnormality occurs once. In this way, the gas pressure regulating device 10 operates appropriately as a safety device when an abnormality in gas pressure occurs, and is capable of properly returning to the state before operation after operating as a safety device.

[0044] Furthermore, in the gas pressure regulating device 100 according to the comparative example, it is not easy to widen the selection range of the secondary pressure of the gas because the selection range of the secondary pressure is determined depending on the physical properties of the sealing plate 142, etc. On the other hand, in the gas pressure regulating device 10 according to the present embodiment, a general-purpose member called the sealing member 65 is used, so the selection range of the secondary pressure of the gas can be widened compared to the gas pressure regulating device 100.

[0045] Furthermore, in the gas pressure regulator 10, the moving body 40 is made up of a first moving section 60 and a second moving section 70. This allows the passage S to be formed between the first moving section 60 and the second moving section 70, and the passage S can be simply configured.

[0046] Furthermore, in the gas pressure regulator 10, the cover 30 has a protrusion 34. When the movable body 40 is located at a first position P1 in the vertical direction, the tip 34a of the protrusion 34 and the first movable part 60 are separated from each other, and when the movable body 40 is located at a second position P2 in the vertical direction, the tip 34a of the protrusion 34 and the first movable part 60 are in contact with each other. This allows the first moving section 60 to move up and down and to be restricted, so that the second moving section 70 can be appropriately moved up and down toward and away from the first moving section 60. As a result, the passage S can be appropriately opened and closed.

[0047] Furthermore, by adjusting the vertical length of the protrusion 34 in accordance with the vertical position of the first opening 33, it is possible to adjust the vertical position of the second moving part 70 at which the passage S is opened (i.e., the second position P2). This makes it possible to adjust the vertical movement range of the sealing member 77 constituting the second moving part 70 to be closer to the base part 20 than the first opening 33. As a result, as described above, it is possible to prevent the sealing member 77 from being positioned above the first opening 33 or the sealing member 77 from crossing over the first opening 33.

[0048] <<Other embodiments>> In the following modified examples, the configuration, operation, and effect that are different from the above embodiment will be mainly described, and the description of the configuration, operation, and effect that are common to the above embodiment will be omitted. Furthermore, in the following modified examples, components that have the same functions as the components in the above embodiment will be denoted by the same reference numerals for convenience.

[0049] <Variation 1> In the above embodiment, as shown in Fig. 2, the moving body 40 (more specifically, the second moving section 70) is provided with one sealing member 77. However, this is not limited to this, and for example, as in the gas pressure adjusting device 10A shown in Figs. 5 and 6, the moving body 40A (more specifically, the second moving section 70A) may be provided with two or more sealing members 77A (two in Figs. 5 and 6). More specifically, as shown in FIG. 5, the second moving section 70A may have an outer cylinder section 72A instead of the outer cylinder section 72 according to the above embodiment. The outer cylinder section 72A extends above the inner cylinder section 71 in the vertical direction, and has two second groove sections 75A spaced apart in the vertical direction on its outer circumferential surface. Two sealing members 77A are disposed in each of the two second groove sections 75A. In other words, the two sealing members 77A are arranged side by side in the vertical direction with a gap therebetween. When the moving body 40A moves in the vertical direction, both of the two sealing members 77A move closer to the base section 20 than the first opening 33 in the vertical direction.

[0050] In the above embodiment, there is a small gap between the movable body 40 (more specifically, the outer cylindrical portion 72) and the cover 30 (more specifically, the first cylindrical portion 32b), and therefore the movable body 40 is supported on the cover 30 with only one sealing member 77 as a fulcrum. As a result, the central axis of the movable body 40 may be tilted relative to the central axis of the cover 30, which is parallel to the vertical direction, and this may prevent the movable body 40 from moving smoothly in the vertical direction. In gas pressure regulator 10A, moving body 40A is supported relative to cover 30 using two sealing members 77A arranged at an interval in the vertical direction as fulcrums. This prevents the central axis of moving body 40A from tilting relative to the central axis of cover 30, allowing moving body 40A to move smoothly in the vertical direction. Furthermore, by providing two sealing members 77A, it is possible to more appropriately seal the gap between the movable body 40 and the cover 30. This makes it possible to more appropriately suppress unintended gas flow from the pressure adjustment chamber 31a to the gas discharge chamber 31b through the gap between the movable body 40 and the cover 30.

[0051] <Variation 2> 7 to 9, a second opening 35B that connects the cover interior space 31 with the outside may be provided in the wall 32 of the cover 30B, closer to the base portion 20 in the up-down direction than the first opening 33. Note that the shape of the second opening 35B will not be described here because it overlaps with the description of the first opening 33. In the example shown in FIGS. 7 to 9, there is one second opening 35B, but the number is not limited to one and may be, for example, two or more.

[0052] 7, when the movable body 40 is located at a first position P1 in the vertical direction, the passage S inside the movable body 40, which connects the pressure adjustment chamber 31a and the gas discharge chamber 31b, is blocked, as in the above embodiment. In addition, in this modification, the second opening 35B communicates with the gas discharge chamber 31b. More specifically, the second opening 35B is located above the sealing member 77 in the vertical direction, and communicates with the gas discharge chamber 31b via a small gap between the first cylindrical portion 32b and the outer cylindrical portion 72, but does not communicate with the pressure adjustment chamber 31a.

[0053] 8, when the pressure in the pressure adjustment chamber 31a reaches a third value between the first and second values ​​and the movable body 40 is positioned at a third position P3 between the first position P1 and the second position P2 in the vertical direction, the passage S in the movable body 40, which connects the pressure adjustment chamber 31a and the gas discharge chamber 31b, is blocked, as in the above-described embodiment. Meanwhile, in this modification, the second opening 35B communicates with the pressure adjustment chamber 31a. More specifically, the second opening 35B is positioned below the sealing member 77 in the vertical direction and communicates with the pressure adjustment chamber 31a via a small gap between the first tubular portion 32b and the outer tubular portion 72. This allows gas in the pressure adjustment chamber 31a to be discharged to the outside through the second opening 35B, thereby preventing gas at an unexpected secondary pressure from being supplied to the target device N.

[0054] Furthermore, as shown in FIG. 9 , when the movable body 40 is located at the second position P2 in the vertical direction, the passage S is open, as in the above-described embodiment. Additionally, in this modification, the second opening 35B communicates with the pressure adjustment chamber 31a. More specifically, the second opening 35B is located below the sealing member 77 in the vertical direction and communicates with the pressure adjustment chamber 31a through a small gap between the first tubular portion 32b and the outer tubular portion 72. This allows gas in the pressure adjustment chamber 31a to be discharged to the outside through both the first opening 33 and the second opening 35B. In other words, this modification has two functions as a safety device: it releases gas to the outside in the event of a gas pressure abnormality and returns the gas pressure to a normal value. This allows the gas pressure to be more appropriately returned to a normal value by releasing the gas to the outside. [Explanation of symbols]

[0055] 10, 10A, 10B, 100 Gas pressure regulator 20 Base 21 Base body 21a, 21b, 34b recessed portion 22 First Channel 22a Nozzle part 22b Inlet 22c Outlet 22d top surface 23 Valve 24 Seal part 25 Second Flow Path 25a Air intake 25b Exhaust port 26 Sealing member 30,30B cover 31 Space inside the cover 31a Pressure control room 31b Gas exhaust chamber 32 Wall 32a Top 32b 1st cylinder part 32c 2nd cylinder part 33 First Opening 34 Protrusion 34a Tip 35B 2nd opening 40, 40A, 140 Mobile 50 biasing member 60 First Mobile Section 61 Extension part 62 First flange 63 Protrusion 64 Second flange 65 Sealing member 70,70A 2nd moving part 71 Inner cylinder 72,72A Outer cylinder 73 connection part 74 First groove 75,75A Second groove 76 Projection part 77,77A Sealing member 141 Mobile Unit 141a opening 142 Sealing plate M Gas Supply Device M1 upper end N Target equipment P1 1st position P2 2nd position P3 3rd position S aisle

Claims

1. A gas pressure adjusting device that adjusts the pressure of gas supplied from a gas supply device, a base portion attached to the gas supply device, the base portion having an inlet through which the gas supplied from the gas supply device flows in and an outlet through which the gas flowed in from the inlet flows out; a cover attached to the base portion, the cover including: a space within the cover adjacent to the outlet in a predetermined direction; a wall surrounding the space within the cover; and a first opening provided in the wall to connect the space within the cover to the outside; a moving body that is disposed in the cover interior space and moves in the predetermined direction in response to pressure fluctuations in the cover interior space that occur when gas is supplied to the cover interior space from the outlet, the movable body divides the space within the cover into a pressure adjustment chamber located closer to the base portion than the movable body in the predetermined direction and communicating with the outflow port, and a gas discharge chamber located on the opposite side of the movable body from the pressure adjustment chamber in the predetermined direction and communicating with the first opening, when the pressure in the pressure adjustment chamber reaches a first value and the movable body is located at a first position in the predetermined direction, a passage in the movable body that communicates between the pressure adjustment chamber and the gas discharge chamber is blocked; When the pressure in the pressure adjustment chamber reaches a second value that exceeds the first value and the movable body is located at a second position that is farther from the base portion than the first position in the predetermined direction, the passage is opened, When the pressure in the pressure adjustment chamber returns from the second value to the first value and the movable body is positioned at the first position in the predetermined direction, the passage is blocked again.

2. The moving body is composed of a first moving part and a second moving part, When the moving body is located at the first position in the predetermined direction, the passage located between the first moving part and the second moving part is blocked, 2. The gas pressure regulating device of claim 1, wherein when the movable body is located at the second position in the specified direction, the second movable portion moves away from the base portion in the specified direction relative to the first movable portion, and the passage located between the first movable portion and the second movable portion is opened.

3. the cover has a protrusion that protrudes from an end of the wall opposite to the base in the predetermined direction into the space within the cover toward the base, the first moving portion is located closer to the base portion than the protruding portion in the predetermined direction, When the movable body is located at the first position in the predetermined direction, the tip end of the protrusion and the first movable portion are separated from each other, 3. The gas pressure regulator according to claim 2, wherein when the moving body is located at the second position in the predetermined direction, the tip end of the protrusion and the first moving part come into contact with each other.

4. a second opening that communicates the space inside the cover with the outside is provided in the wall of the cover and is closer to the base portion in the predetermined direction than the first opening; When the movable body is located at the first position in the predetermined direction, the second opening communicates with the gas discharge chamber; 2. The gas pressure regulating device according to claim 1, wherein when the pressure in the pressure adjustment chamber reaches a third value between the first value and the second value and the movable body is located at a third position between the first position and the second position in the predetermined direction, the second opening communicates with the pressure adjustment chamber.

5. the movable body further includes a sealing member that seals a gap between the movable body and the cover in a direction intersecting the predetermined direction, The gas pressure regulator according to claim 1 , wherein the sealing member moves on a side of the base portion closer to the first opening in the predetermined direction.

6. the movable body includes two or more sealing members as the sealing member, The gas pressure regulator according to claim 5 , wherein the two or more sealing members are arranged at intervals in the predetermined direction.

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