Ozone generator

Abstract

To provide a compact and lightweight ozone generator.SOLUTION: An ozone generating device includes an ozone generating unit including an excimer lamp and configured to generate ozone by irradiating air with ultraviolet rays from the excimer lamp, an inverter connected to the excimer lamp, a control unit connected to the inverter, and a housing formed with a first compartment in which the ozone generating unit is disposed, a second compartment in which the inverter is disposed, and a third compartment in which the control unit is disposed.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an ozone generator. [Background technology]

[0002] Conventionally, there are known ozone generators that can be used for sterilization, deodorization, etc. For example, Patent Document 1 discloses an ozone generator that has a first compartment for an excimer lamp, a second compartment for a control unit and a low-voltage power supply unit, and a third compartment for a lamp power supply unit, with the compartments adjacent to each other with a partition between them. Patent Document 2 discloses a configuration in which an excimer lamp is coaxially arranged in a fluid pipe through which air flows, and an axial flow fan is installed downstream. Patent Document 3 discloses a configuration including an auxiliary light source that irradiates ultraviolet rays onto the discharge space of the ultraviolet lamp and the ozone generation region. On the other hand, silent discharge ozone generators are known as ozone generators that are effective for sterilization and algae killing. These silent discharge ozone generators require special power sources, such as high-voltage transformers and inverters, to generate ozone. Furthermore, silent discharge ozone generators require an oxygen concentrator or oxygen cylinder inside or outside the ozone generator to generate high-concentration ozone. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-12730 [Patent Document 2] Japanese Patent Publication No. 2020-198146 [Patent Document 3] Patent No. 7087754 Summary of the Invention [Problem to be solved by the invention]

[0004] In the silent discharge method, a special power source, oxygen concentrator, and oxygen cylinder are required, which may result in the device itself becoming large and heavy. Furthermore, even in the technologies disclosed in Patent Documents 1 to 3, similar problems may arise depending on the installation mode of the components of the ozone generator. Therefore, a small and lightweight ozone generator is desired.

[0005] An object of the present disclosure is to provide a small and lightweight ozone generator. [Means for solving the problem]

[0006] An ozone generator according to one aspect of the present disclosure includes an ozone generating unit including an excimer lamp, in which the excimer lamp generates ozone by irradiating air with ultraviolet light; an inverter connected to the excimer lamp; a control unit connected to the inverter; and a housing that defines a first compartment in which the ozone generating unit is disposed, a second compartment in which the inverter is disposed, and a third compartment in which the control unit is disposed. [Effects of the Invention]

[0007] According to the present disclosure, a small and lightweight ozone generator can be provided. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a front view of an ozone generator according to an embodiment. [Figure 2] FIG. 2 is a side view of the ozone generator as seen from arrow II in FIG. 1 . [Figure 3] FIG. 3 is a schematic diagram of the ozone generator as seen from arrow III in FIG. 2. [Figure 4] FIG. 2 is a diagram showing the arrangement of an excimer lamp, an inverter, and the like according to an embodiment. [Figure 5] 5 is a schematic diagram of part V in FIG. 4. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The ozone generator of the embodiment is primarily used for industrial purposes, and is applicable to various uses, such as water treatment facilities, cooling towers, and land-based aquaculture. In the following description, expressions indicating relative or absolute arrangements, such as "parallel," "orthogonal," "center," and "coaxial," do not only mean the exact arrangement or state, but also include arrangements or states in which there is a relative displacement with a tolerance or an angle or distance that provides the same function. In the drawings used in the following description, the scale of each component may be appropriately changed to make each component recognizable.

[0010] <Ozone generator> Fig. 1 is a front view of an ozone generator 1 according to an embodiment. Fig. 2 is a side view of the ozone generator 1 as viewed from arrow II in Fig. 1. Fig. 3 is a schematic diagram of the ozone generator 1 as viewed from arrow III in Fig. 2. Fig. 4 is a diagram showing the arrangement of an excimer lamp 20, an inverter 3, and the like according to an embodiment. Fig. 5 is a schematic diagram of part V in Fig. 4. 1 to 5, the ozone generator 1 includes an ozone generating unit 2, an inverter 3, a control unit 4, and a housing 5.

[0011] In the following explanation, an X, Y, Z Cartesian coordinate system will be used as necessary. The X direction corresponds to the width direction of the housing 5. The Y direction corresponds to the depth direction of the housing 5. The Z direction corresponds to the height direction (vertical direction) of the housing 5, which is perpendicular to the X and Y directions. In the following explanation, of the X, Y, and Z directions, the arrow side in the figure will be referred to as the plus (+) side, and the side opposite the arrow will be referred to as the minus (-) side. The +Z side corresponds to the upper side in the vertical direction, and the -Z side corresponds to the lower side in the vertical direction.

[0012] The ozone generating unit 2 is configured to include an excimer lamp 20. The ozone generating unit 2 generates ozone by the excimer lamp 20 irradiating the air with ultraviolet rays.

[0013] The inverter 3 is connected to the excimer lamp 20. The inverter 3 includes a power supply circuit that generates (inversely converts) AC with a different frequency from DC or AC. The inverter 3 has the function of controlling the voltage and frequency of the power supply.

[0014] The control unit 4 is connected to the inverter 3. The control unit 4 controls the inverter 3. The control unit 4 controls the components of the ozone generator 1 in an integrated manner.

[0015] The housing 5 is formed with a first section S1 in which the ozone generating section 2 is disposed, a second section S2 in which the inverter 3 is disposed, and a third section S3 in which the control section 4 is disposed.

[0016] The housing 5 is formed, for example, in the shape of a rectangular parallelepiped box. The ozone generator 1 has an operation panel 10 on a side portion (-Y side) of the housing 5. The operation panel 10 is preferably provided on the upper portion (+Z side portion) of the housing 5 so that the user can operate it while standing. The installation mode of the operation panel 10 is not limited to the above and can be changed according to design specifications.

[0017] The ozone generator 1 is provided with a handle 11 on the top (+Z side) of the housing 5 and casters 12 (wheels) on the bottom (-Z side) of the housing 5. This makes the ozone generator 1 easy to carry.

[0018] The handles 11 are formed in an inverted U shape when viewed from the X direction. A pair of handles 11 are provided with a gap in the X direction. A plurality of casters 12 are provided with gaps in the X and Y directions. Note that the installation manner of the handles 11 and / or casters 12 is not limited to the above and can be changed according to design specifications.

[0019] In this embodiment, the storage device further includes a first partition 51 that separates the first section S1 from the second section S2, and a second partition 52 that separates the first section S1 and the second section S2 from the third section S3. The first partition 51 is formed in a plate shape parallel to the XY plane so as to separate the first section S1 and the second section S2 in the Z direction. The second partition 52 is formed in a plate shape parallel to the XZ plane so as to separate the first section S1, the second section S2, and the third section S3 in the Y direction.

[0020] When viewed from the X direction, the first section S1 is surrounded by the bottom surface (-Z side surface) of the first partition section 51, the side surface (+Y side surface of the -Z side portion) of the second partition section 52, and the inner surface of the housing 5 (inner surface of the -Z side and +Y side portions). When viewed from the X direction, the second section S2 is surrounded by the top surface (+Z side surface) of the first partition section 51, the side surface (+Y side surface of the +Z side portion) of the second partition section 52, and the inner surface of the housing 5 (inner surface of the +Z side and +Y side portions). The third section S3 is surrounded by the side surface (-Y side surface) of the second partitioning portion 52 and the inner surface of the housing 5 (the inner surface of the -Y side portion) when viewed from the X direction.

[0021] The first partition 51 has a first hole 51h formed therein, through which a first electric wire 31 that connects the excimer lamp 20 and the inverter 3 passes. The second partition 52 has a portion facing the second section S2 has a second hole 52h formed therein, through which a second electric wire 32 that connects the inverter 3 and the control unit 4 passes. The second hole 52h is not formed in the portion of the second partition 52 that faces the first section S1.

[0022] In this embodiment, the gas supply system further includes a first fan 41 that sends gas to the first section S1, a second fan 42 that sends gas to the second section S2, and a third fan 43 that sends gas to the third section S3.

[0023] The first fan 41 serves to supply ozone raw material gas to the excimer lamp 20. Ozone is generated when the excimer lamp 20 emits light. Light emitted by the excimer lamp 20 generates heat, and the higher the temperature around the excimer lamp 20, the lower the amount of ozone generated. Therefore, cooling is necessary to generate a high concentration of ozone. The first fan 41 serves to cool the heat generated when the excimer lamp 20 emits light. The first fan 41 serves two purposes: to supply air, which is the raw material gas, and to cool the heat generated by the excimer lamp 20.

[0024] The first fan 41 is provided upstream of the first section S1 so as to draw gas into the first section S1. A raw air inlet En1 is formed in the lower part of the housing 5 on the -X end side and the +Y side. The first fan 41 is provided at the raw air inlet En1. An ozone gas outlet Ex1 is formed in the lower part of the housing 5 on the +X end side and the +Y side. Arrows F1 in the figure indicate the flow of gas (raw air intake, ozone gas outflow, heat exhaust from the excimer lamp 20, etc.) passing through the first section S1. Note that louvers may be provided at the inlet En1 and / or the outlet Ex1.

[0025] The second fan 42 is provided upstream of the second section S2 so as to draw gas into the second section S2. An inlet En2 for cooling air for the inverter 3 is formed in a portion of the upper part of the housing 5 on the -X end side and the +Y side. The second fan 42 is provided at the inlet En2 for cooling air for the inverter 3. An outlet Ex2 for exhaust heat from the inverter 3 is formed in a portion of the upper part of the housing 5 on the +X end side and the +Y side. Arrow F2 in the figure indicates the flow of gas (intake of cooling air for the inverter 3, exhaust heat from the inverter 3, etc.) passing through the second section S2. Note that louvers may be provided at the inlet En2 and / or the outlet Ex2.

[0026] The third fan 43 is provided downstream of the third section S3 so as to exhaust gas from the third section S3. An outlet Ex3 for exhaust heat from the control section 4 is formed in a portion of the lower part of the housing 5 on the +X end side and the -Y side. The third fan 43 is provided at the outlet Ex3 for exhaust heat from the control section 4. An inlet En3 for cooling air for the control section 4 is formed in a portion of the lower part of the housing 5 on the -X end side and the -Y side. Arrow F3 in the figure indicates the flow of gas passing through the third section S3 (intake of cooling air for the control section 4, exhaust heat from the control section 4, etc.). Note that louvers may be provided at the inlet En3 and / or the outlet Ex3.

[0027] In this embodiment, a plurality of excimer lamps 20 are provided in the first section S1. The plurality of excimer lamps 20 are provided parallel to the air flow direction. In the example of Fig. 5, three excimer lamps 20 are provided parallel to the X direction and at equal intervals in the Z direction. For example, other excimer lamps 20 (not shown) may be provided parallel to the three excimer lamps 20 and at equal intervals in the Y direction.

[0028] For example, the ozone generator 2 includes an ozone generator box 21 that houses multiple excimer lamps 20. The ozone generator box 21 is formed in a cylindrical shape that tapers toward the +X end. The inner surface of the tapered portion of the ozone generator box 21 functions as a guide 22 that guides ozone gas and the like. The guide 22 is inclined so that it is positioned inward in the Z direction toward the -X side in the XZ cross-sectional view of FIG. 5. Note that the portion of the ozone generator box 21 on the +Z end side may form at least a part of the first partition section 51.

[0029] The first electric wires 31 connecting the multiple excimer lamps 20 to the corresponding inverters 3 are supported by a presser plate 23. The presser plate 23 is provided on the -X side and the +Z end side of the ozone generator chamber 21. The presser plate 23 is provided so as to cover at least a part of the first holes 51h corresponding to the multiple first electric wires 31. Note that the installation mode of the presser plate 23 is not limited to the above and can be changed according to design specifications.

[0030] The excimer lamps 20 are supported by the ozone generating chamber 21 via lamp holders 24. The lamp holders 24 are provided on both sides of the excimer lamp 20 in the X direction. A pair of lamp holders 24 are provided spaced apart in the X direction so as to support both X-direction ends of each excimer lamp 20. The lamp holder 24 on the -X side supports the -X end of the excimer lamp 20 to which the first electric wire 31 is connected. A connector 25 that connects the first electric wire 31 and the inverter 3 is provided on the +Z side of the holding plate 23.

[0031] Because the excimer lamps 20 generate heat when emitting light, it is preferable that the distance D1 between the excimer lamps 20 be set to be equal to or greater than the adiabatic distance. Distance D1 corresponds to the interval between two excimer lamps 20 adjacent in the Z direction in the XZ cross-sectional view of Fig. 5. For example, distance D1 may be set to be equal to or greater than the diameter (Z-direction dimension) of one excimer lamp 20.

[0032] The distance D2 between the excimer lamps 20 and the inner surface of the ozone generator chamber 21 is preferably set in consideration of the effect of radiant heat. In the XZ cross-sectional view of Fig. 5, the distance D2 corresponds to the distance between the outermost excimer lamp 20 in the Z direction and the inner surface of the ozone generator chamber 21. For example, the distance D2 may be set to be equal to or greater than the diameter (Z direction dimension) of one excimer lamp 20.

[0033] The inner surface distance D3 of the ozone generating chamber 21 is expressed by the following formula (1): In formula (1), N represents the number of excimer lamps 20. D3≧D1×(N-1)+D2...Formula (1)

[0034] Angle A is preferably set to an angle that prevents gas from accumulating in first section S1. Angle A corresponds to the acute angle formed between a line along the Z direction and a line along guide 22 in the XZ cross-sectional view of Figure 5. For example, angle A may be set to an angle between 10 degrees and 60 degrees.

[0035] To promote efficient heat exchange, a cooling component (e.g., a heat sink) having a fin structure may be provided. For example, a cooling component (not shown) may be provided around the excimer lamp 20.

[0036] In this embodiment, the air flow in the first section S1 and the gas flow in the second section S2 are configured to be parallel to each other. In the figure, arrow F1 corresponds to the air flow in the first section S1, and arrow F2 corresponds to the gas flow in the second section S2.

[0037] In this embodiment, the control unit 4 controls the number of times the excimer lamp 20 emits light per unit time, the light emission time, and the amount of air supplied to the excimer lamp 20. The control unit 4 can control the multiple excimer lamps 20 individually.

[0038] The control unit 4 controls the number of times of light emission per unit time individually for each of the multiple excimer lamps 20. For example, the control unit 4 turns on and off the inverter 3 corresponding to each excimer lamp 20 individually to individually control the number of times of light emission. The control unit 4 controls the light emission time per unit time individually for each of the multiple excimer lamps 20. For example, the control unit 4 turns on and off the inverter 3 corresponding to each excimer lamp 20 individually to control the light emission time individually. The control unit 4 controls the volume of air supplied from the first blowers 41 individually to the multiple excimer lamps 20. For example, multiple first blowers 41 may be provided corresponding to the multiple excimer lamps 20. In this case, the control unit 4 controls the volume of air from the first blowers 41 corresponding to each excimer lamp 20 individually.

[0039] <Action and effect> As described above, the ozone generator 1 of this embodiment is configured to include an excimer lamp 20, and is equipped with an ozone generating unit 2 that generates ozone by irradiating ultraviolet rays into the air with the excimer lamp 20, an inverter 3 connected to the excimer lamp 20, a control unit 4 connected to the inverter 3, and a housing 5 that forms a first section S1 in which the ozone generating unit 2 is located, a second section S2 in which the inverter 3 is located, and a third section S3 in which the control unit 4 is located. According to this configuration, excimer lamp 20 generates ozone by irradiating air with ultraviolet rays, eliminating the need for a special power source, oxygen concentrator, or oxygen cylinder. Therefore, it is possible to provide a small and lightweight ozone generator 1. In addition, by making ozone generator 1 small and lightweight, ozone can be used in a variety of locations without being limited by installation space or transportation.

[0040] In this embodiment, the storage device further includes a first partition 51 that separates the first section S1 from the second section S2, and a second partition 52 that separates the first section S1 and the second section S2 from the third section S3. According to this configuration, the first partition 51 can suppress ozone leakage from the first section S1 to the second section S2, and the second partition 52 can suppress ozone leakage from the first section S1 to the third section S3.

[0041] In this embodiment, the first partition 51 is formed with a first hole 51h through which the first electric wire 31 connecting the excimer lamp 20 and the inverter 3 passes. The second partition 52 is formed in a portion facing the second section S2 with a second hole 52h through which the second electric wire 32 connecting the inverter 3 and the control unit 4 passes. The second hole 52h is not formed in the portion of the second partition 52 facing the first section S1. According to this configuration, even when the excimer lamp 20 and the inverter 3 are connected by the first electric wire 31 and the inverter 3 and the control unit 4 are connected by the second electric wire 32, the second partition 52 can suppress ozone leakage from the first section S1 to the third section S3.

[0042] In this embodiment, the gas supply system further includes a first fan 41 that sends gas to the first section S1, a second fan 42 that sends gas to the second section S2, and a third fan 43 that sends gas to the third section S3. With this configuration, the first fan 41 sends gas (air) for generating ozone, the second fan 42 sends gas for cooling the inverter 3, and the third fan 43 sends gas for cooling the control unit 4. In addition, the first fan 41 can send gas (air) for cooling the excimer lamp 20. This makes it possible to suppress a decrease in the efficiency of ozone generation that accompanies a rise in the temperature of the excimer lamp 20. Furthermore, compared to when cooling with cooling water is used to generate a high concentration of ozone, there is no need to secure cooling water. Furthermore, there is no problem of water leakage due to corrosion of the cooling system even during long-term operation.

[0043] In this embodiment, the first fan 41 is provided upstream of the first section S1 to draw gas into the first section S1, and the third fan 43 is provided downstream of the third section S3 to exhaust gas from the third section S3. According to this configuration, the surroundings of the first section S1 can be kept at a positive pressure, and the inside of the first section S1 can be kept at a negative pressure, so that leakage of ozone to the outside of the first section S1 can be suppressed.

[0044] In this embodiment, a plurality of excimer lamps 20 are provided in the first section S1. According to this configuration, the multiple excimer lamps 20 contribute to improving the efficiency of ozone generation.

[0045] In this embodiment, the multiple excimer lamps 20 are arranged parallel to the air flow direction. This configuration allows air to flow efficiently without stagnation, which contributes to further improving the efficiency of ozone generation.

[0046] In this embodiment, the air flow in the first section S1 and the gas flow in the second section S2 are configured to be parallel to each other. This configuration can promote efficient heat exchange.

[0047] In this embodiment, the control unit 4 controls the number of times the excimer lamp 20 emits light per unit time, the light emission time, and the amount of air supplied to the excimer lamp 20. According to this configuration, the amount of ozone generated can be adjusted as desired.

[0048] In this embodiment, a plurality of excimer lamps 20 are provided in the first section S1, and the control unit 4 can control the plurality of excimer lamps 20 individually. According to this configuration, the amount of ozone generated can be adjusted as desired.

[0049] <Modification> In the above-described embodiment, an example was described in which a first partition separating the first and second compartments and a second partition separating the first and second compartments from a third compartment were further provided, but this is not limited thereto. For example, the first partition and / or the second partition do not have to be provided. The installation mode of the first partition and / or the second partition can be changed according to design specifications.

[0050] In the above-described embodiment, the first partition has a first hole through which a first electric wire connecting the excimer lamp and the inverter passes, and the second partition has a second hole through which a second electric wire connecting the inverter and the control unit passes in a portion facing the second compartment, and the second hole is not formed in the portion of the second partition facing the first compartment. However, this is not limiting. For example, the second hole may be formed in the portion of the second partition facing the first compartment. The form of the second hole can be changed according to design specifications.

[0051] In the above-described embodiment, an example was described in which a first fan that sends gas to the first section, a second fan that sends gas to the second section, and a third fan that sends gas to the third section were further provided, but this is not limited to this. For example, the first fan, the second fan, and / or the third fan do not have to be provided. The installation mode of the first fan, the second fan, and / or the third fan can be changed depending on the design specifications.

[0052] In the above-described embodiment, an example has been described in which the first fan is provided upstream of the first compartment to draw gas into the first compartment, and the third fan is provided downstream of the third compartment to exhaust gas from the third compartment, but this is not limiting. For example, the first fan may be provided downstream of the first compartment. For example, the third fan may be provided upstream of the third compartment. The installation manner (air intake and / or exhaust manner) of the first fan and / or the third fan can be changed according to design specifications.

[0053] In the above-described embodiment, an example was described in which multiple excimer lamps were provided in the first section, but this is not limited to this. For example, only one excimer lamp may be provided in the first section. The installation mode of the excimer lamp in the first section can be changed according to the design specifications.

[0054] In the above-described embodiment, the multiple excimer lamps are arranged parallel to the air flow direction, but this is not limiting. For example, the multiple excimer lamps may be arranged so as to intersect with the air flow direction. The arrangement of the multiple excimer lamps relative to the air flow direction can be changed according to the design specifications.

[0055] In the above-described embodiment, an example has been described in which the air flow in the first compartment and the gas flow in the second compartment are configured to be parallel to each other, but this is not limiting. For example, the air flow in the first compartment and the gas flow in the second compartment may be configured to be counter-current to each other. The manner of the air flow in the first compartment and / or the gas flow in the second compartment can be changed according to design specifications.

[0056] In the above-described embodiment, the control unit controls the number of times the excimer lamp emits light per unit time, the light-emitting duration, and the amount of air supplied to the excimer lamp, but this is not limiting. For example, the control unit may only control the on / off of the power supply to the excimer lamp. The control mode of the excimer lamp can be changed according to the design specifications.

[0057] In the above-described embodiment, an example has been described in which a plurality of excimer lamps are provided in the first section and the control unit can control the plurality of excimer lamps individually, but this is not limiting. For example, the control unit may control the plurality of excimer lamps collectively (simultaneously). The control mode of the plurality of excimer lamps can be changed according to the design specifications.

[0058] A program for implementing some or all of the functions of the control device (e.g., a control unit for controlling an inverter) of the present invention may be recorded on a computer-readable recording medium, and the program recorded on the recording medium may be loaded into a computer system and executed to perform all or part of the processing performed by the control device. Note that the term "computer system" as used herein includes hardware such as an OS and peripheral devices. The term "computer system" also includes a WWW system equipped with a website provision environment (or display environment). The term "computer-readable recording medium" refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, as well as storage devices such as hard disks built into computer systems. The term "computer-readable recording medium" also includes devices that retain a program for a certain period of time, such as volatile memory (RAM) within a computer system that acts as a server or client when the program is transmitted via a network such as the Internet or a communication line such as a telephone line.

[0059] The program may also be transmitted from a computer system storing the program in a storage device or the like to another computer system via a transmission medium or by transmission waves in the transmission medium. Here, the "transmission medium" that transmits the program refers to a medium that has the function of transmitting information, such as a network (communication network) such as the Internet or a communication line (communication line) such as a telephone line. The program may also be a program that realizes part of the above-mentioned functions. Furthermore, the program may be a so-called differential file (differential program) that can realize the above-mentioned functions in combination with a program already recorded in the computer system.

[0060] The ozone generator of the above-described embodiment is mainly used for industrial purposes, and has been described as being applicable to various uses such as water treatment facilities, cooling towers, and land-based aquaculture, but is not limited thereto. The ozone generator may be applied to uses other than those described above. The application mode of the ozone generator can be changed as appropriate.

[0061] Although the embodiments of the present invention have been described above, the present invention is not limited to these, and additions, omissions, substitutions, and other modifications to the configuration are possible within the scope of the spirit of the present invention, and the above-described embodiments can also be combined as appropriate. [Explanation of symbols]

[0062] REFERENCE SIGNS LIST 1... ozone generator, 2... ozone generator section, 3... inverter, 4... control section, 5... housing, 20... excimer lamp, 31... first electric wire, 32... second electric wire, 41... first fan, 42... second fan, 43... third fan, 51... first partition section, 52... second partition section, 51h... first hole, 52h... second hole, S1... first compartment, S2... second compartment, S3... third compartment

Claims

1. an ozone generating unit including an excimer lamp, the excimer lamp irradiating air with ultraviolet light to generate ozone; an inverter connected to the excimer lamp; a control unit connected to the inverter; a housing in which a first compartment in which the ozone generating unit is disposed, a second compartment in which the inverter is disposed, and a third compartment in which the control unit is disposed are formed; Ozone generator.

2. a first partition portion separating the first compartment and the second compartment; Further provided is a second partition that separates the first compartment, the second compartment, and the third compartment.

2. The ozone generator according to claim 1.

3. a first hole through which a first electric wire connecting the excimer lamp and the inverter passes is formed in the first partition; a second hole through which a second electric wire connecting the inverter and the control unit passes is formed in a portion of the second partition facing the second compartment; the second hole is not formed in a portion of the second partition portion facing the first compartment; 3. The ozone generator according to claim 2.

4. a first blower for delivering gas to the first compartment; a second blower for delivering gas to the second compartment; and a third blower that sends gas to the third compartment. The ozone generator according to any one of claims 1 to 3.

5. the first blower is provided upstream of the first compartment to draw the gas into the first compartment; the third blower is disposed downstream of the third compartment to exhaust the gas from the third compartment; 5. The ozone generator according to claim 4.

6. a plurality of the excimer lamps are provided in the first section; The ozone generator according to any one of claims 1 to 3.

7. The plurality of excimer lamps are arranged parallel to the air flow direction.

7. The ozone generator according to claim 6.

8. The air flow in the first compartment and the gas flow in the second compartment are configured to be parallel to each other.

3. The ozone generator according to claim 2.

9. the control unit controls the number of times the excimer lamp emits light per unit time, the light emission time, and the amount of air supplied to the excimer lamp. The ozone generator according to any one of claims 1 to 3.

10. a plurality of the excimer lamps are provided in the first section; the control unit is capable of individually controlling the plurality of excimer lamps; The ozone generator according to any one of claims 1 to 3.

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